JP2015230272A - Functional element, electronic equipment, and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a functional element having high detection sensitivity, and electronic equipment and a mobile body including the functional element.SOLUTION: A functional element (1) includes: a substrate 10; a first vibrator 31 and a second vibrator 32 spaced from the substrate 10; a first support beam 23 that is disposed along a first direction connecting the first vibrator 31 and the second vibrator 32 and is connected to the first vibrator 31, and a second support beam 24 that is connected to the second vibrator 32; and a connecting part 20 present between the first support beam 23 and the second support beam 24. The connecting part 20 has a first beam 21 and a second beam 22 extending in a second direction intersecting the first direction; the first beam 21 is connected to the first support beam 23; and the second beam 22 is connected to the second support beam 24. In a cross-sectional view, the first beam 21 and the second beam 22 displace in the same phase in a third direction that intersects a vibration direction along the major surfaces of the first vibrator 31 and the second vibrator 32.

Description

  The present invention relates to a functional element, an electronic device including the functional element, and a moving body.

  Conventionally, a gyro sensor using a gyro sensor element as a functional element has been used in a technology for autonomously controlling the attitude of a ship, an aircraft, a rocket, or the like. Recently, it has been used for vehicle body control in vehicles, vehicle position detection in car navigation systems, vibration control correction (so-called camera shake correction) for digital cameras, video cameras, and mobile phones. This gyro sensor is also required to improve sensitivity.

  In Patent Document 1, two vibrators are arranged side by side, driven and vibrated in opposite phases, and when an angular velocity about an axis in a direction intersecting the direction in which the two vibrators are arranged in a plan view is added. A gyro sensor that detects an angular velocity around the in-plane axis due to a change in capacitance generated between a detection unit provided on the vibrating body and a fixed electrode that is spaced apart from the detection unit. It is disclosed.

JP 2013-217666 A

  However, the gyro sensor element described in Patent Document 1 forms an outer shape of a material mainly composed of silicon or the like by a dry etching method or the like. Due to the manufacturing variations during the formation of the outer shape, the cross-sectional shape becomes asymmetrical, and the vibration component in the direction intersecting the vibration direction of the vibration body in the main surface of the vibration body and the drive vibration, that is, the quadra that is an unnecessary vibration component in the out-of-plane direction There is a possibility that the char component is generated, the Q value of the gyro sensor element is lowered, and the detection sensitivity is deteriorated.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A functional element according to this application example includes a base body, a first vibrating body and a second vibrating body provided apart from the base body, and the first vibrating body and the second vibrating body. A first support beam portion connected to the first vibrating body, a second support beam portion connected to the second vibrating body, and a first support beam portion provided along a first direction of connection; A connecting portion between the second support beam portion, and the connecting portion includes a first beam portion and a second beam portion extending in a second direction intersecting the first direction. The first beam portion and the first support beam portion are connected, and the second beam portion and the second support beam portion are connected, and the first beam portion and the second beam in a cross-sectional view. The beam portion is displaced in the same phase in a third direction intersecting with a vibration direction along the main surfaces of the first vibrating body and the second vibrating body.

  According to this application example, the vibration direction along the main surfaces of the first vibration body and the second vibration body between the first vibration body and the second vibration body is accompanied by the vibration of the first vibration body and the second vibration body. The first vibrating body due to the asymmetry of the cross-sectional shape caused by manufacturing variations at the time of forming the outer shape, since the connecting portion having the first beam portion and the second beam portion that are displaced in the same phase in the third direction intersecting with Vibration component in the direction (third direction) intersecting the main surface of the first and second vibrating bodies and the direction of vibration (first direction) of the first and second vibrating bodies, that is, unnecessary vibration in the out-of-plane direction. Generation of the quadrature component, which is a component, can be suppressed by deforming the first beam portion and the second beam portion of the connecting portion into a hinge shape, thereby reducing a decrease in the Q value and having high detection sensitivity. There is an effect that a functional element can be obtained.

  Application Example 2 In the functional element described in the application example, the first support beam portion and the second support beam portion are connected to a fixing portion provided on the base.

  According to this application example, since the first support beam portion and the second support beam portion are connected to the fixed portion provided on the base body, the fixed portion is used as a fulcrum, and the first vibrating body and the second vibrating body are Since the connecting portion is deformed into a hinge shape by being twisted so that the first support beam portion and the second support beam portion are rotated by the quadrature component, the quadrature component can be suppressed. Therefore, it is possible to reduce the decrease in the Q value of the first vibrating body and the second vibrating body.

  Application Example 3 In the functional element according to the application example described above, the first support beam portion includes a first support portion extending in the second direction and a direction opposite to the extending direction of the first support portion. At least one of the second support portions extending in the direction of the second support portion, the second support beam portion extending in the second direction and the direction in which the third support portion extends. And at least one of a fourth support portion extending in a direction opposite to the first support portion, and the first support portion, the second support portion, the third support portion, and the first support of the fourth support portion. The beam part and the edge part on the opposite side to the edge part connected with the said 2nd support beam part are connected to the said fixing | fixed part, It is characterized by the above-mentioned.

  According to this application example, since the distal end portions of the first to fourth support portions extending from the first support beam portion and the second support beam portion are fixed, the connecting portion and the first support beam portion and The second support beam portion can be separated from the base body. Therefore, the quadrature component of the first vibrator and the second vibrator makes the first support beam part and the second support beam part easily twisted, and the connecting part is deformed into a hinge shape, thereby suppressing the quadrature component. Can do. Therefore, it is possible to reduce a decrease in the Q value of the first vibrating body and the second vibrating body.

  Application Example 4 In the functional element according to the application example described above, it is preferable that the connecting portion has a ring shape and is line symmetric with respect to the second direction as an axis of symmetry.

  According to this application example, the connecting portion is annular and is symmetrical with respect to the second direction as the axis of symmetry, so that the connecting portion that suppresses the quadrature component of the first vibrating body and the second vibrating body can be hinged stably. Can be deformed. Therefore, it is possible to further reduce the Q value of the first vibrating body and the second vibrating body.

  Application Example 5 In the functional element according to the application example described above, the first support beam portion and the first vibrating body, and the second support beam portion and the second vibrating body are respectively connected by a connecting spring portion. It is characterized by being.

  According to this application example, since the support beam portion and the vibrating body are connected by the connecting spring portion, the resonance frequency of the connecting body for connecting the two vibrating bodies can be lowered. For this reason, the phenomenon that the drive vibration and the detection vibration separated by a certain frequency resonate with each other as the resonance frequency increases and the amplitude increases, that is, the quadrature component that is multiplied and increased by the resonance gain can be suppressed to be small. The decrease in the Q value of the body and the second vibrating body can be further reduced.

  Application Example 6 In the functional element according to the application example described above, the connection part and the connection spring part are elastic bodies, and the connection part is larger than a spring constant of the connection spring part. .

  According to this application example, since the connecting portion and the connecting spring portion are elastic bodies, they can be deformed according to the vibration displacement of the vibrating body, and a reduction in the Q value of the vibrating body can be reduced. Further, since the spring constant of the connecting spring portion is smaller than the spring constant of the connecting portion, the quadrature component that is multiplied and increased by the resonance gain as the spring constant increases is attenuated by the connecting spring portion, and then the connecting portion is hinged. By deforming into a shape, the quadrature component can be further reduced, and a decrease in the Q value of the vibrator can be reduced.

  Application Example 7 In the functional element described in the application example, the first vibrating body and the second vibrating body include a detection unit that detects vibration.

  According to this application example, since the first vibrating body and the second vibrating body include the detection unit that detects vibration, when the angular velocity around the in-plane axis is applied, the first vibrating body and the second vibrating body are The vibration due to the angular velocity can be detected by the change in the capacitance generated between the provided detection unit and the detection electrode that is spaced apart from the detection unit.

  Application Example 8 An electronic apparatus according to this application example includes the functional element described in the application example.

  According to this application example, it is possible to provide an electronic device including a functional element with high detection sensitivity.

  Application Example 9 A moving object according to this application example includes the functional element described in the application example.

  According to this application example, it is possible to provide a moving body including a functional element with high detection sensitivity.

1 is a schematic plan view showing a schematic structure of a functional element according to a first embodiment of the present invention. The schematic cross section of the AA line in FIG. It is a schematic cross section explaining the displacement direction in the coupling body of the functional element according to the first embodiment of the present invention, (a) when the vibrating body approaches the coupling portion side, (b) is the vibrating body is the coupling portion When separated from the side. The schematic plan view which shows schematic structure of the coupling body of the 1st modification of the functional element which concerns on 1st Embodiment of this invention. The schematic top view which shows schematic structure of the coupling body of the functional element which concerns on 2nd Embodiment of this invention. The perspective view which shows the structure of the mobile type (or notebook type) personal computer to which the electronic device provided with the functional element of the present invention is applied. The perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device provided with the functional element of this invention is applied. The perspective view which shows the structure of the digital camera to which the electronic device provided with the functional element of this invention is applied. The perspective view which shows roughly the motor vehicle as an example of a mobile body provided with the functional element of this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each figure shown below, the size and ratio of each component may be described differently from the actual component in order to make each component large enough to be recognized on the drawing. is there.

<First Embodiment>
[Configuration of functional elements]
As an example of the functional element according to the first embodiment of the present invention, a gyro sensor element 1 that detects an angular velocity around an in-plane axis is given and described with reference to FIGS. 1 and 2.
FIG. 1 is a schematic plan view showing a schematic structure of a gyro sensor element 1 as a functional element according to the first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view taken along line AA in FIG. For convenience, in FIG. 1, the lid 80 that covers the drive unit 40 and the detection units (43, 44) is not shown. In the following drawings, for convenience of explanation, the X axis, the Y axis, and the Z axis are illustrated as three axes that are orthogonal to each other. Is “−side”. A direction parallel to the X axis is referred to as an “X axis direction”, a direction parallel to the Y axis is referred to as a “Y axis direction”, and a direction parallel to the Z axis is referred to as a “Z axis direction”. Furthermore, for convenience of explanation, in the plan view when viewed from the Z-axis direction, the surface in the Z-axis direction is assumed to be the main surface, the + Z-axis side is the upper surface, and the −Z-axis side is the lower surface.

  As shown in FIGS. 1 and 2, the gyro sensor element 1 includes a base body 10, a first vibrating body 31 and a second vibrating body 32, a first support beam portion 23 connected to the first vibrating body 31, and The connecting body 18 having the second support beam portion 24 and the connecting portion 20 connected to the second vibrating body 32, the spring portion 30, the driving portion 40, the first detecting portion 43 and the second detecting portion 44, The lid body 80 is included. The gyro sensor element 1 is a gyro sensor element (capacitive MEMS gyro sensor element) that detects an angular velocity around the Y axis that is an in-plane axis.

  As shown in FIG. 2, the base body 10 is provided with a recess 12 on the upper surface side where the first vibrating body 31 and the second vibrating body 32 are disposed. Above the recess 12, the connecting body 18, the first vibrating body 31, the second vibrating body 32, and the spring portion 30 are provided via a gap. By the recess 12, the first vibrating body 31 and the second vibrating body 32 can be moved in a desired direction without being obstructed by the base 10. The recess 12 is formed by, for example, a photolithography technique and an etching technique. The material of the base 10 is, for example, glass or silicon.

  The base 10 has a first fixing part 15 and a second fixing part 16. As shown in FIGS. 1 and 2, the first fixing portion 15 and the second fixing portion 16 are regions that are appropriately provided on the upper surface of the base body 10 according to the form of the first vibrating body 31 and the second vibrating body 32. is there.

  One end of the spring portion 30 that supports the first vibrating body 31 and the second vibrating body 32 is fixed (joined) to the first fixing portion 15, and the first vibrating body 31 and the second vibrating body 32 are interposed via the spring portion 30. This is the part that supports As shown in FIGS. 1 and 2, the first fixing portion 15 may be arranged so as to sandwich the first vibrating body 31 and the second vibrating body 32 in the X-axis direction.

  The second fixing portion 16 includes first to fourth support portions extending from the first support beam portion 23 and the second support beam portion 24 of the coupling body 18 that connects the first vibrating body 31 and the second vibrating body 32. One end of each of 25a, 25b, 26a, and 26b is fixed (joined), and is a part that supports the first vibrating body 31 and the second vibrating body 32 via the coupling body 18.

  By being fixed (joined) to the first fixing portion 15 and the second fixing portion 16, the connecting body 18, the first vibrating body 31 and the second vibrating body 32, the spring portion 30, and the driving unit are integrated. The movable electrode part 41 can be provided separately from the base body 10.

  A method of fixing (joining) the upper surface (base 10) of the first fixing part 15 and the second fixing part 16 to the coupling body 18, the spring part 30, the driving fixed electrode part 42, and the like is not particularly limited. For example, when the material of the base 10 is glass and the material of the first vibrating body 31 and the second vibrating body 32 is silicon, anodic bonding can be applied.

  The first vibrating body 31 and the second vibrating body 32 are juxtaposed in a first direction (X-axis direction) that is a direction along the X-axis, and are connected by a connecting body 18, as shown in FIG. It is accommodated in a cavity 82 surrounded by the base 10 and the lid 80. The first vibrating body 31 and the second vibrating body 32 are provided above the base 10 via a gap (recessed portion 12). The first vibrating body 31 and the second vibrating body 32 are supported on the upper surface of the base body 10 (on the base body 10) via the coupling body 18 and the spring portion 30.

  The first vibrating body 31 includes a first movable part 37, an annular support part 34 surrounding the first movable part 37, and a support beam part 36 for connecting the first movable part 37 and the support part 34. It is configured to include. Similarly to the first vibrating body 31, the second vibrating body 32 connects the second movable portion 38, the annular support portion 34 surrounding the second movable portion 38, and the second movable portion 38 and the support portion 34. And a support beam portion 36. In addition, the shape of the support part 34 will not be specifically limited if it is cyclic | annular shape. The support part 34 may have a frame shape, for example.

  Here, the support beam portion 36 extends along the X-axis direction, the center portion is connected to the first movable portion 37 and the second movable portion 38, and both end portions are connected to the support portion 34. Therefore, the first movable portion 37 and the second movable portion 38 are configured to be able to be displaced in a third direction (Z-axis direction) that is a direction intersecting with the main surface.

  The material of the first vibrating body 31 and the second vibrating body 32 is, for example, silicon provided with conductivity by doping impurities such as phosphorus and boron. The first vibrating body 31 and the second vibrating body 32 are formed, for example, by processing a silicon substrate (not shown) by a photolithography technique and an etching technique.

  The connecting body 18 is provided along a first direction (X-axis direction) connecting the first vibrating body 31 and the second vibrating body 32, and includes the first support beam portion 23 and the second support beam portion 24, And a connecting portion 20 that connects the support beam portion 23 and the second support beam portion 24. The connecting portion 20 includes a first beam portion 21 and a second beam portion 22 that extend in a second direction (Y-axis direction) intersecting the first direction (X-axis direction), and the first beam portion 21 and the second beam portion. The first connecting beam portion 27 and the second connecting beam portion 28 that connect the both ends of the beam portion 22, respectively, have an annular shape having a through hole at the center. Further, the first beam portion 21 and the first support beam portion 23 are connected, and the second beam portion 22 and the second support beam portion 24 are connected.

The first support beam portion 23 extends in the second direction (Y-axis direction) in the + Y-axis direction, and in the −Y-axis direction opposite to the direction in which the first support portion 25a extends. The second support beam portion 24 includes a third support portion 26a extending in the + Y axis direction and a fourth support portion 26b extending in the −Y axis direction. And have.
The first support portion 25a, the second support portion 25b, the third support portion 26a, and the fourth support portion 26b are opposite to the ends connected to the first support beam portion 23 and the second support beam portion 24. The end portion is connected to the second fixing portion 16 and is fixed (joined).

  Here, the coupling body 18 is configured to displace the first vibrating body 31 and the second vibrating body 32 in the X-axis direction. More specifically, the first support portion 25a and the second support portion 25b, the first beam portion 21, the second beam portion 22, and the third support portion 26a and the fourth support portion 26b of the coupling body 18 are in the X-axis direction. It acts like a spring against the displacement of. Thereby, the 1st vibrating body 31 and the 2nd vibrating body 32 can vibrate in a mutually opposite phase in the X-axis direction.

  The material of the coupling body 18 is, for example, silicon provided with conductivity by doping impurities such as phosphorus and boron. For example, the connecting body 18 is formed by integrally processing a silicon substrate (not shown) together with the first vibrating body 31 and the second vibrating body 32 by a photolithography technique and an etching technique.

  The spring portion 30 is configured to be able to displace the first vibrating body 31 and the second vibrating body 32 in the X-axis direction. Specifically, the spring portion 30 extends from the first fixed portion 15 to the first vibrating body 31 and the second vibrating body 32 in the direction along the X axis, and extends in the X axis direction while reciprocating in the Y axis direction. It has a shape to One end of the spring portion 30 is joined (fixed) to the first fixing portion 15 (the upper surface of the base body 10). The other end of the spring portion 30 is connected to the first vibrating body 31 and the second vibrating body 32. In the illustrated example, the spring portion 30 sandwiches the first vibrating body 31 and the second vibrating body 32 in the X-axis direction, and sandwiches the first vibrating body 31 and the second vibrating body 32 in the Y-axis direction. There are two.

  The material of the spring part 30 is, for example, silicon provided with conductivity by doping impurities such as phosphorus and boron. The spring portion 30 is formed, for example, by integrally processing a silicon substrate (not shown) together with the first vibrating body 31 and the second vibrating body 32 by a photolithography technique and an etching technique.

  The drive unit 40 has a mechanism that can excite the first vibrating body 31 and the second vibrating body 32. The configuration and number of the drive units 40 are not particularly limited as long as the first vibrating body 31 and the second vibrating body 32 can be excited.

  For example, the drive unit 40 may be provided directly on the first vibrating body 31 and the second vibrating body 32. As shown in FIG. 1, a movable electrode portion 41 connected to the outside of the first vibrating body 31 and the second vibrating body 32, and a fixed electrode portion 42 arranged to face the movable electrode portion 41 through a predetermined distance. It may be configured. Although not shown, the drive unit 40 has a mechanism for exciting the first vibrating body 31 and the second vibrating body 32 by electrostatic force or the like without being directly connected to the first vibrating body 31 and the second vibrating body 32. However, it may be disposed outside the first vibrating body 31 and the second vibrating body 32.

  A plurality of movable electrode portions 41 may be connected to the first vibrating body 31 and the second vibrating body 32. In the illustrated example, the movable electrode portion 41 includes a trunk portion that extends in the + Y-axis direction (or −Y-axis direction) from the first vibrating body 31 and the second vibrating body 32, and the + X-axis direction and the −X-axis from the trunk portion. It may be a comb-like electrode having a plurality of branches extending in the direction.

  The fixed electrode portion 42 is disposed outside the movable electrode portion 41. The fixed electrode portion 42 is bonded (fixed) to the upper surface of the base 10. In the example shown in the figure, a plurality of fixed electrode portions 42 are provided and are arranged to face each other via the movable electrode portion 41. When the movable electrode portion 41 has a comb-like shape, the fixed electrode portion 42 may be a comb-like electrode corresponding to the movable electrode portion 41.

  The movable electrode portion 41 and the fixed electrode portion 42 are electrically connected to a power source (not shown). When a voltage is applied to the movable electrode portion 41 and the fixed electrode portion 42, an electrostatic force can be generated between the movable electrode portion 41 and the fixed electrode portion 42. Thereby, the spring part 30 can be expanded-contracted along an X-axis, and the 1st vibrating body 31 and the 2nd vibrating body 32 can be vibrated along an X-axis.

  The material of the drive unit 40 composed of the movable electrode unit 41 and the fixed electrode unit 42 is, for example, silicon provided with conductivity by doping impurities such as phosphorus and boron. The drive unit 40 is formed, for example, by integrally processing a silicon substrate (not shown) together with the first vibrating body 31 and the second vibrating body 32 by a photolithography technique and an etching technique.

  The first detection unit 43 includes a first movable unit 37 of the first vibrating body 31 and a first detection electrode unit 45 disposed to face the first movable unit 37 in the recess 12 of the base body 10. It is configured. Similarly to the first detection unit 43, the second detection unit 44 is also provided with a second detection unit disposed opposite to the second movable unit 38 in the second movable unit 38 of the second vibrating body 32 and the recess 12 of the base body 10. The electrode part 46 is comprised. That is, the gyro sensor element 1 of the present embodiment includes the first detection unit 43 and the second detection unit 44 that are detection units in the first vibration body 31 and the second vibration body 32.

  A voltage is applied to the movable electrode portion 41 and the fixed electrode portion 42 to vibrate the first vibrating body 31 and the second vibrating body 32 in the opposite phase along the X axis. When an angular velocity about an axis in the second direction (Y-axis direction) intersecting with the X-axis direction is added, the first surface intersecting with the principal surfaces of the first vibrating body 31 and the second vibrating body 32 is caused by the Coriolis force generated by this angular velocity. Vibration having displacement in three directions (Z-axis direction) is generated. Since the first vibrating body 31 and the second vibrating body 32 vibrate in the opposite phase along the X axis, they vibrate in the opposite phase along the Z axis due to the Coriolis force. That is, when the first vibrating body 31 is displaced in the + Z-axis direction, the second vibrating body 32 is displaced in the −Z-axis direction. Further, when the first vibrating body 31 is displaced in the −Z axis direction, the second vibrating body 32 is displaced in the + Z axis direction. Therefore, the gyro sensor is measured by measuring the capacitance between the first movable portion 37 and the first detection electrode portion 45 and the capacitance between the second movable portion 38 and the second detection electrode portion 46. The angular velocity applied to the in-plane axis of the element 1 can be detected.

  The material of the first detection electrode unit 45 and the second detection electrode unit 46 is, for example, aluminum, gold, ITO (Indium Tin Oxide), or the like. The material of the first detection electrode unit 45 and the second detection electrode unit 46 is preferably a transparent electrode material such as ITO. By using a transparent electrode material as the first detection electrode unit 45 and the second detection electrode unit 46, when the base 10 is a transparent substrate (glass substrate), the first detection electrode unit 45 and the second detection electrode unit 46 This is because foreign matters and the like existing in the can be easily visually recognized.

  The lid body 80 is provided on the base body 10. The base body 10 and the lid body 80 can constitute a package as shown in FIG. The base body 10 and the lid body 80 can form a cavity 82, and the first vibrating body 31 and the second vibrating body 32 can be accommodated in the cavity 82. For example, the space between the base body 10 and the lid 80 shown in FIG. 2 may be filled with an adhesive member or the like. In this case, the cavity 82 is, for example, an inert gas (for example, nitrogen gas) atmosphere or a vacuum. It may be sealed with an atmosphere.

  The material of the lid 80 is, for example, silicon or glass. The method for joining the lid 80 and the base 10 is not particularly limited. For example, when the base 10 is made of glass and the lid 80 is made of silicon, the base 10 and the lid 80 are made of an anode. Can be joined.

[Operational principle of functional elements]
Next, the operation principle of the gyro sensor element 1 according to the first embodiment of the present invention will be described.
The displacement direction a of the first vibrating body 31 and the second vibrating body 32 that vibrate by applying a voltage to the movable electrode section 41 and the fixed electrode section 42 is generally along the X axis. That is, it is displaced parallel to the X axis. In this state, when an angular velocity is applied around the Y axis that is the in-plane axis of the gyro sensor element 1, a Coriolis force is generated, and the first vibrating body 31 and the second vibrating body 32 are connected to the first vibrating body 31 and the second vibrating body 32, respectively. A vibration that is displaced in a third direction (Z-axis direction) intersecting the main surface (XY plane) of the vibrating body 32 is generated. Therefore, the gyro sensor is measured by measuring the capacitance between the first movable portion 37 and the first detection electrode portion 45 and the capacitance between the second movable portion 38 and the second detection electrode portion 46. The angular velocity applied around the Y axis that is the in-plane axis of the element 1 can be detected.

  However, if the silicon substrate (not shown) is etched by a dry etching apparatus or the like and the outer shape of the connection body 18 including the first vibration body 31, the second vibration body 32, and the connection portion 20 is processed, the manufacturing apparatus is installed. Due to manufacturing variations caused by the position, as shown in FIG. 2, the cross-sectional shape of the XZ plane becomes a trapezoidal shape that is asymmetric with respect to the X-axis direction. A displacement component in the Z-axis direction is generated. That is, a quadrature component that is an unnecessary vibration component in the out-of-plane direction is generated, the Q values of the first vibrating body 31 and the second vibrating body 32 of the gyro sensor element 1 are lowered, and the detection sensitivity is deteriorated. There's a problem.

  Therefore, in the present embodiment, by providing the connecting body 18 having the annular connecting portion 20 between the first vibrating body 31 and the second vibrating body 32, the quadrature component is suppressed, and the first vibrating body and A decrease in the Q value of the second vibrating body is reduced.

Next, a method for suppressing the quadrature component in the connecting portion 20 will be described in detail with reference to FIG.
FIG. 3 is a schematic cross-sectional view illustrating the displacement direction in the coupling body 18 of the gyro sensor element 1 according to the first embodiment of the present invention. FIG. b) is a case where the vibrators are separated from each other.

In FIG. 3, the quadrature component of the first vibrating body 31 is larger than the quadrature component of the second vibrating body 32, that is, the displacement of the first vibrating body 31 in the Z-axis direction is larger than that of the second vibrating body 32. The case where it is large will be described.
When the vibrating bodies approach each other, as shown in FIG. 3A, the first vibrating body 31 is displaced in the displacement direction a11, so that the second support portion 25b (first support) is generated by the displacement component in the + Z-axis direction. The portion 25a) is twisted in the clockwise twist direction b11, and the displacement causes the first beam portion 21 of the connecting portion 20 to be displaced in the −Z-axis direction, which is the displacement direction C1. Further, as the first beam portion 21 is displaced in the −Z-axis direction, the second beam portion 22 of the connecting portion 20 is deformed into a hinge shape and displaced in the −Z-axis direction at the same phase. By displacing the second beam portion 22 in the −Z-axis direction that is the displacement direction C1, the fourth support portion 26b (third support portion 26a) is twisted in the counterclockwise twist direction b12. The displacement component in the −Z-axis direction in the displacement direction a12 of the two vibrating bodies 32 is attenuated. In addition, the displacement component in the + Z-axis direction in the displacement direction a11 of the first vibrating body 31 is also attenuated by the reaction force of the force twisted in the clockwise twist direction b11 of the second support portion 25b (first support portion 25a). .

  Next, when the vibrating bodies are separated from each other, as illustrated in FIG. 3B, the first vibrating body 31 is displaced in the displacement direction a <b> 21, so that the second support portion 25 b is caused by the displacement component in the −Z axis direction. The (first support portion 25a) is twisted in the counterclockwise twist direction b21, and the displacement causes the first beam portion 21 of the connecting portion 20 to be displaced in the + Z-axis direction, which is the displacement direction C2. Further, with the displacement of the first beam portion 21 in the + Z-axis direction, the second beam portion 22 of the connecting portion 20 is deformed into a hinge shape and displaced in the + Z-axis direction at the same phase. By displacing the second beam portion 22 in the + Z-axis direction, which is the displacement direction C2, the fourth support portion 26b (third support portion 26a) is twisted in the clockwise twist direction b22, thereby causing the second vibration. The displacement component in the + Z-axis direction in the displacement direction a22 of the body 32 is attenuated. Further, due to the reaction force of the force twisted in the counterclockwise twist direction b21 of the second support portion 25b (first support portion 25a), the displacement component in the −Z-axis direction in the displacement direction a21 of the first vibrating body 31 is also Attenuates.

  Therefore, the quadrature component, which is an unnecessary displacement component in the out-of-plane direction (Z-axis direction) of the first vibrating body 31 and the second vibrating body 32, is converted into the first beam portion 21 and the second beam portion 22 of the connecting portion 20. It can suppress by deform | transforming into hinge shape.

  According to the gyro sensor element 1 of the present embodiment, between the first vibrating body 31 and the second vibrating body 32, the first vibrating body 31 and the second vibrating body 32 are caused by the vibration of the first vibrating body 31 and the second vibrating body 32. The connection part which has the 1st beam part 21 and the 2nd beam part 22 which displace in the 3rd direction (Z-axis direction) which cross | intersects the 1st direction (X-axis direction) along the main surface of the 2 vibrating body 32 in the same phase. 20 is provided. For this reason, the main surfaces of the first vibrating body 31 and the second vibrating body 32 and the vibration directions of the first vibrating body 31 and the second vibrating body 32 due to the asymmetry of the cross-sectional shape caused by manufacturing variations during the formation of the outer shape (first Direction), the first beam portion 21 and the second beam portion 22 of the connecting portion 20 are hinged in a vibration component in the direction (third direction), that is, a quadrature component that is an unnecessary vibration component in the out-of-plane direction. Therefore, the gyro sensor element 1 having high detection sensitivity can be obtained.

Further, the first support beam portion 23 and the second support beam portion 24 may be connected to the second fixing portion 16 provided in the base body 10.
By connecting the first support beam portion 23 and the second support beam portion 24 to the second fixing portion 16, the quadrature component of the first vibrating body 31 and the second vibrating body 32 with the second fixing portion 16 as a fulcrum. As a result, the first support beam portion 23 and the second support beam portion 24 are twisted so that the first support beam portion 23 and the second support beam portion 24 rotate, and the first beam portion 21 and the second beam portion 22 of the connecting portion 20 are deformed into a hinge shape, thereby suppressing the quadrature component. be able to. Therefore, a decrease in the Q value of the first vibrating body 31 and the second vibrating body 32 can be reduced.

[First Modification]
Next, a first modification of the gyro sensor element 1 according to the first embodiment of the present invention will be described with reference to FIG. FIG. 4 is a schematic plan view showing a schematic structure of the coupling body 18a of the gyro sensor element 1a according to the first modification. In FIG. 4, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In FIG. 4, the base 10 and the lid 80 are not shown for convenience. Hereinafter, in the gyro sensor element 1a according to the first modification, members having the same functions as the constituent members of the gyro sensor element 1 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the gyro sensor element 1a according to the first modification, the shape of the connecting portion 20a of the connecting body 18a that connects the first vibrating body 31 and the second vibrating body 32 is the gyro sensor according to the first embodiment described above. Different from element 1. As shown in FIG. 4, the shape of the connecting portion 20a of the gyro sensor element 1a is an annular shape in which both ends of the first beam portion 21a and the second beam portion 22a having curved portions are connected, and the connecting portion 20a. The axis of the second direction (Y-axis direction) intersecting the first direction (X-axis direction), which is the direction along the X-axis where the first vibrating body 31 and the second vibrating body 32 are provided side by side, is symmetrical. It is line symmetric as an axis.

  With such a configuration, the connecting portion 20a is line-symmetric with respect to the symmetry axis in the second direction (Y-axis direction), so that the connecting portion 20a can be stably deformed into a hinge shape. The quadrature component of the first vibrating body 31 and the second vibrating body 32 can be suppressed. For this reason, since the reduction in the Q value due to the quadrature component of the first vibrating body 31 and the second vibrating body 32 can be further reduced, the gyro sensor element 1a with high detection sensitivity can be obtained.

  The gyro sensor element 1a according to the first modification can have the same characteristics as the gyro sensor element 1 according to the first embodiment.

Second Embodiment
Next, the gyro sensor element 2 according to the second embodiment will be described with reference to FIG. FIG. 5 is a schematic plan view showing a schematic structure of the coupling body 18b of the gyro sensor element 2 according to the second embodiment of the present invention. Hereinafter, in the gyro sensor element 2, members having the same functions as those of the constituent members of the gyro sensor elements 1 and 1a described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 5, the gyro sensor element 2 according to the second embodiment includes the first support beam portion 23b of the connecting body 18b that connects the first vibrating body 31b and the second vibrating body 32b, and the first vibration. A connecting spring portion 29 is provided between the body 31 b and the first support beam portion 23 b and the first vibrating body 31 b are connected via the connecting spring portion 29. Further, a connecting spring portion 29 is provided between the second support beam portion 24b and the second vibrating body 32b of the connecting body 18b, and the second support beam portion 24b and the second vibrating body 32b are connected to the connecting spring portion 29. Connected through. Therefore, the connection spring portion 29 is provided between the first support beam portion 23b and the first vibrating body 31b and between the second support beam portion 24b and the second vibrating body 32b. This is different from the gyro sensor elements 1 and 1a according to the first embodiment and the first modification.

  The connecting spring portion 29 is configured to be able to displace the first vibrating body 31b and the second vibrating body 32b in the X-axis direction. Specifically, the connecting spring portion 29 extends from the connecting body 18b to the first vibrating body 31b and the second vibrating body 32b in the direction along the X axis, and extends in the X axis direction while reciprocating in the Y axis direction. It has a shape.

  Since the first support beam portion 23b and the first vibrating body 31b and the second support beam portion 24b and the second vibrating body 32b are connected by the connecting spring portion 29, the first vibrating body 31b The resonance frequency of the connecting body 18b that connects the second vibrating body 32b can be lowered. For this reason, the phenomenon that the drive vibration and the detection vibration separated by a certain frequency resonate with each other as the resonance frequency increases and the amplitude increases, that is, the quadrature component that is multiplied and increased by the resonance gain can be suppressed to be small. The decrease in the Q value of the body 31b and the second vibrating body 32b can be further reduced.

  The connection part 20 b and the connection spring part 29 are elastic bodies, and the spring constant of the connection part 20 b may be larger than the spring constant of the connection spring part 29.

  Since the connecting portion 20b and the connecting spring portion 29 are elastic bodies, they are deformed according to the vibration displacement of the first vibrating body 31b and the second vibrating body 32b, and the Q values of the first vibrating body 31b and the second vibrating body 32b are obtained. Can be reduced. Further, since the spring constant of the connecting spring portion 29 is smaller than the spring constant of the connecting portion 20b, the quadrature component that is multiplied and increased by the resonance gain as the spring constant increases is attenuated by the connecting spring portion 29 and then connected. By deforming the part 20b into a hinge shape, the quadrature component can be further reduced, and a decrease in the Q value of the first vibrating body 31b and the second vibrating body 32b can be reduced.

  The material of the connecting body 18b and the connecting spring portion 29 is, for example, silicon imparted with conductivity by doping impurities such as phosphorus and boron. The connecting body 18b and the connecting spring portion 29 are formed by, for example, integrally processing a silicon substrate (not shown) together with the first vibrating body 31b and the second vibrating body 32b by a photolithography technique and an etching technique. .

  According to the gyro sensor element 2 according to the second embodiment, the resonance frequency of the coupling body 18b can be lowered by providing the coupling spring portion 29 that can be elastically deformed. The char component can be reduced.

  Further, since the connecting portion 20b and the connecting spring portion 29 are elastic bodies, the vibration displacements of the first vibrating body 31b and the second vibrating body 32b are not constrained, so that the Q values of the first vibrating body 31b and the second vibrating body 32b Can be reduced.

  Further, since the spring constant of the connecting spring portion 29 is smaller than the spring constant of the connecting portion 20b, the resonance gain can be suppressed and the quadrature component can be further reduced, and the first vibrating body 31b and the second vibrating body 32b. The decrease in the Q value can be reduced. Therefore, the gyro sensor element 2 with high detection sensitivity can be obtained.

  The gyro sensor element 2 according to the second embodiment can have the same characteristics as the gyro sensor elements 1 and 1a according to the first embodiment and the first modification.

<Electronic equipment>
Next, an electronic apparatus provided with a functional element according to an embodiment of the present invention will be described with reference to FIGS. In this description, an example using the gyro sensor element 1 as a functional element is shown.

FIG. 6 is a perspective view schematically illustrating a configuration of a mobile (or notebook) personal computer 1100 as an example of an electronic apparatus including the gyro sensor element 1 according to an embodiment of the present invention.
As shown in FIG. 6, the personal computer 1100 includes a main body portion 1104 having a keyboard 1102 and a display unit 1106 having a display portion 1000, and the display unit 1106 has a hinge structure portion with respect to the main body portion 1104. It is supported so that rotation is possible. Such a personal computer 1100 incorporates a gyro sensor element 1 having a function of detecting angular velocity.

FIG. 7 is a perspective view schematically illustrating a configuration of a mobile phone 1200 (including PHS) as an example of an electronic apparatus including the gyro sensor element 1 according to an embodiment of the present invention.
As shown in FIG. 7, the cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1000 is disposed between the operation buttons 1202 and the earpiece 1204. . Such a cellular phone 1200 incorporates a gyro sensor element 1 having a function of detecting angular velocity.

FIG. 8 is a perspective view illustrating a schematic configuration of a digital camera 1300 as an example of an electronic apparatus including the gyro sensor element 1 according to an embodiment of the present invention. Note that FIG. 8 also shows a simple connection with an external device. Here, the conventional film camera sensitizes the silver halide photographic film with the light image of the subject, whereas the digital camera 1300 photoelectrically converts the light image of the subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.
A display unit 1000 is provided on the back surface of a case (body) 1302 in the digital camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1000 displays a subject as an electronic image. Function as. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 1000 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital camera 1300, an output terminal 1312 for video signals and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital camera 1300 incorporates a gyro sensor element 1 as an angular velocity sensor or the like.

  In addition to the personal computer 1100 (mobile personal computer) in FIG. 6, the mobile phone 1200 in FIG. 7, and the digital camera 1300 in FIG. Dispenser (for example, inkjet printer), laptop personal computer, TV, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game machine, word processor , Workstations, videophones, crime prevention TV monitors, electronic binoculars, POS terminals, medical equipment (eg, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish detectors, Various measuring instruments, total Class (e.g., gages for vehicles, aircraft, and ships), can be applied to electronic devices such as flight simulators.

<Moving object>
Next, a moving body including a functional element according to an embodiment of the present invention will be described with reference to FIG. In this description, an example using the gyro sensor element 1 as a functional element is shown.
FIG. 9 is a perspective view schematically showing an automobile as an example of a moving body including the gyro sensor element 1 according to an embodiment of the present invention.

The automobile 1500 is equipped with the gyro sensor element 1 according to the above embodiment.
As shown in FIG. 9, an automobile 1500 as a moving body has an electronic control unit 1510 that incorporates the gyro sensor element 1 and controls a tire or the like mounted on the vehicle body. In addition, the gyro sensor element 1 includes keyless entry, immobilizer, car navigation system, car air conditioner, anti-lock brake system (ABS), airbag, tire pressure monitoring system (TPMS: Tire Pressure Monitoring System). ), Electronic control units (ECUs) such as engine controls, battery monitors for hybrid vehicles and electric vehicles, and vehicle body attitude control systems.

  DESCRIPTION OF SYMBOLS 1 ... Gyro sensor element as a functional element, 10 ... Base | substrate, 12 ... Recessed part, 15 ... 1st fixing | fixed part, 16 ... 2nd fixing | fixed part, 18 ... Connection body, 20 ... Connection part, 21 ... 1st beam part, 22 2nd beam part, 23 ... 1st support beam part, 24 ... 2nd support beam part, 25a ... 1st support part, 25b ... 2nd support part, 26a ... 3rd support part, 26b ... 4th support part, 27: First connecting beam portion, 28: Second connecting beam portion, 29: Connecting spring portion, 30: Spring portion, 31: First vibrating body, 32: Second vibrating body, 34: Supporting portion, 36: Supporting beam 37, first movable part, 38, second movable part, 40, drive part, 41, movable electrode, 42, fixed electrode, 43, first detection part, 44, second detection part, 45, first detection. Electrode part 46 ... 2nd detection electrode part 80 ... Lid body 82 ... Cavity 1100 ... Personal computer 1200 ... Mobile phone Machine, 1300 ... digital camera, 1500 ... automobile, a, a11, a12, a21, a22 ... displacement direction, b11, b12, b21, b22 ... twist direction, c1, c2 ... displacement direction.

Claims (9)

A substrate;
A first vibrating body and a second vibrating body provided apart from the base body;
A first support beam portion provided along a first direction connecting the first vibrating body and the second vibrating body and connected to the first vibrating body, and a first support beam connected to the second vibrating body. 2 support beam parts;
A connecting portion between the first support beam portion and the second support beam portion,
The connecting portion is
A first beam portion and a second beam portion extending in a second direction intersecting the first direction;
The first beam portion and the first support beam portion are connected, and the second beam portion and the second support beam portion are connected,
In a cross-sectional view, the first beam portion and the second beam portion are displaced in the same phase in a third direction intersecting with a vibration direction along a main surface of the first vibrating body and the second vibrating body. Feature functional elements.   The functional element according to claim 1, wherein the first support beam portion and the second support beam portion are connected to a fixing portion provided on the base body. The first support beam portion includes at least one of a first support portion extending in the second direction and a second support portion extending in a direction opposite to the extending direction of the first support portion. Have
The second support beam portion includes at least one of a third support portion extending in the second direction and a fourth support portion extending in a direction opposite to the extending direction of the third support portion. Have
The end of the first support part, the second support part, the third support part, and the fourth support part opposite to the end part connected to the first support beam part and the second support beam part The functional element according to claim 1, wherein a portion is connected to the fixed portion.   4. The functional element according to claim 1, wherein the connecting portion is annular and is line symmetric with respect to the second direction as an axis of symmetry. 5.   The first support beam portion and the first vibrating body, and the second support beam portion and the second vibrating body are connected by a connecting spring portion, respectively. The functional element according to item. The connection part and the connection spring part are elastic bodies,
The functional element according to claim 5, wherein the connecting portion is larger than a spring constant of the connecting spring portion.   The functional element according to claim 1, wherein the first vibrating body and the second vibrating body include a detection unit that detects vibration.   An electronic apparatus comprising the functional element according to claim 1.   A moving body comprising the functional element according to claim 1.

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