JP2015216223A - Adsorption/desorption device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adsorption/desorption device capable of surely removing an adsorbed object while suppressing damage or contamination.SOLUTION: The adsorption/desorption device includes: a flexible adsorption member 3 adsorbing a wafer W on a front face; a rear-face member 5 forming a space part 15 partitioned with respect to an ambient atmosphere on a rear face of the adsorption member 3; a piping part 7 connecting the space part 15 to atmospheric air as a pressure reduction source and to a pressurizing source 23; and a switching valve 9 for switching the pressure reduction by the atmospheric air via the piping part 7 and the pressurization by the pressurizing source 23 with respect to the space part 15. By switching the switching valve 9, the space part 15 is pressurized when removing the wafer W, a pressure difference from the ambient atmosphere is increased, and the adsorption member 3 is expanded closer to the wafer W. When not removing the wafer W, the space part 15 is open in the atmospheric air, the pressure difference between the space part 15 and the ambient atmosphere is eliminated, and the adsorption member 3 is brought into a non-expanded state.

Description

  The present invention relates to a suction and detachment apparatus that makes it possible to remove a sucked object.

  For example, in assembling a liquid crystal panel, a pair of substrates are bonded together with an adhesive and a liquid crystal material interposed therebetween. As the bonding, a pair of substrates is pressed and held using an adsorption device, and after bonding, the substrate is detached from the adsorption device and the assembly of the liquid crystal panel is completed.

  Adsorption of the substrate is usually performed using electrostatic force, adhesive force, electric force, etc., and removal of the substrate is performed by erasing the electrostatic force or electric force or forcibly against the adhesive force. This can be done by peeling off.

  However, in the adsorption device, it may be difficult to remove the substrate when the electrostatic force or the electric force remains or when the adhesion of the object is high.

  On the other hand, for example, Patent Document 1 discloses an adsorption / desorption device in which an adsorption device is provided with a substrate removal mechanism.

  Such an adsorption / desorption device is provided with an adhesive sheet for adsorbing a substrate on each of a pair of pressure plates, and has a push shaft as a desorption mechanism that protrudes and retracts through each hole with respect to the adsorption sheet.

  The push shaft protrudes from the pressure-sensitive adhesive sheet after the substrates are bonded together, and allows the substrate to be pressed and removed from the pressure-sensitive adhesive sheet.

  However, if the substrate is pressed by the push shaft, the substrate may be damaged. Patent Document 1 discloses that compressed air is blown onto a substrate before the substrate is pressed. However, there is a limit to preventing damage to the substrate, and the substrate may be contaminated.

Japanese Patent No. 3819797

  The problem to be solved is that there is a risk of damage or contamination when removing the adsorbed object.

  The adsorption / desorption device of the present invention makes it possible to reliably remove an adsorbed object while suppressing damage and contamination, and a flexible adsorbing member that adsorbs the object to the surface, and the back surface of the adsorbing member A back surface member that forms a space section partitioned with respect to the surrounding atmosphere, a piping section that connects the space section to a pressure source and a pressure source, and the space section via the piping section. A switching unit that switches between depressurization by the depressurization source and pressurization by the pressurization source, and switching the switching unit pressurizes the space when the object is removed, thereby increasing the pressure difference from the surrounding atmosphere. The suction member is bulged to the object side, the space is decompressed when the object is not removed, and the pressure difference from the surrounding atmosphere is reduced to bring the suction member into a non-bulged state. It is characterized by that.

  In the adsorption / desorption device of the present invention, the adsorption member itself that adsorbs the object is bulged, so that the object can be pressed and removed, and the object is not damaged or contaminated.

  In addition, when the object is not removed, the adsorption member does not bulge, and the object can be reliably adsorbed and held.

(Example 1) which is a schematic sectional drawing of the holding | maintenance apparatus of the board | substrate to which the adsorption | suction removal apparatus is applied. FIGS. 2A and 2B are schematic cross-sectional views showing the operation of adsorbing and removing a substrate by the holding device of FIG. 1, FIG. 2A is the operation of adsorbing the substrate, and FIG. 2B is the operation of removing the substrate (Example 1). . FIG. 3A is a schematic cross-sectional view of an adsorbing member of a holding device according to a modification and a peripheral structure thereof, FIG. 3A is an adsorbing member made of an electrorheological material, and FIG. 3B is an insulating material of an electrostatic chuck. It has the comprised adsorption | suction member (Example 1). It is a schematic sectional drawing of the holding | maintenance apparatus which has the switching valve which concerns on a modification (Example 1). (Example 2) which is a schematic sectional drawing of the board | substrate assembly apparatus to which the adsorption | suction removal apparatus is applied.

  A space is defined on the back surface of the flexible adsorption member that adsorbs the object for the purpose of reliably removing the adsorbed object while suppressing damage and contamination. This is realized by an adsorption / desorption device that pressurizes the part and bulges the adsorption member toward the object side by a pressure difference.

  The space portion is connected to the pressure reduction source and the pressure source by the piping portion, and the switching portion switches between the pressure reduction by the pressure reduction source and the pressure application by the pressure source via the piping portion.

  By switching the switching unit, when the object is removed, the space part is pressurized to increase the pressure difference from the surrounding atmosphere, the adsorption member is bulged toward the object side, and when the object is not removed, the space part is The pressure difference is reduced to reduce the pressure difference from the surrounding atmosphere, and the adsorption member is brought into a non-bulged state.

  The decompression source and the pressurization source are not particularly limited. For example, when the adsorption / desorption device is used in the atmosphere as the ambient atmosphere, the decompression source can be the atmosphere and the pressurization source can be pressurized to atmospheric pressure or higher. Can be.

  On the other hand, the adsorption / desorption device can also be used when processing an object in a reduced-pressure atmosphere in a reduced-pressure chamber. In this case, for example, the reduced-pressure source is a reduced-pressure source for the reduced-pressure chamber, and the pressurized source is the atmosphere. be able to.

  Such an adsorption / detachment device can be applied when substrates such as liquid crystal panels are bonded to each other, when a polarizing film is attached, or when a silicon wafer is transported. It can be widely applied when processing in an atmosphere.

  Embodiments of the present invention will be described below with reference to the drawings.

[Configuration of holding device]
FIG. 1 is a schematic cross-sectional view of a holding device to which the adsorption / desorption device according to the first embodiment is applied.

  The holding device 1 of the present embodiment includes an adsorption member 3, a back surface member 5, a piping part 7, and a switching valve 9 as a switching part.

  The adsorbing member 3 is made of an adhesive sheet such as a resin and has flexibility. The adsorption member 3 adsorbs and holds the substrate W as an object on the surface by the adhesive force. The surface of the adsorbing member 3 faces the ambient atmosphere, and a back surface member 5 is provided on the back surface of the adsorbing member 3.

  The back member 5 is configured by providing a through hole 13 in the support portion 11. The support part 11 is a plate-like body having higher rigidity than the adsorption member 3, and the adsorption member 3 is attached to the surface thereof. Thereby, the support part 11 supports the adsorption | suction member 3 from the back surface side.

  The through hole 13 is provided, for example, in the center of the support portion 11 and penetrates the support portion 11 in the plate thickness direction (vertical direction). The through hole 13 is closed by the adsorption member 3 on the surface side of the support portion 11. That is, the through-hole 13 reaches the back surface of the suction member 3 and defines the space 15 on the back surface of the suction member 3. A plurality of through holes 13 may be provided in the support portion 11. Further, the position of the through hole 13 can be changed as long as the substrate W adsorbed on the adsorption member 3 can be removed as will be described later.

  The through hole 13 is connected to the piping part 7 on the back side of the support part 11. The piping unit 7 includes a common pipe 17, a decompression pipe 19, and a pressurization pipe 21.

  The common pipe 17 constitutes a connection port for the through hole 13, and one end is attached to the opening of the through hole 13. The other end side of the common pipe 17 branches into a decompression pipe 19 and a pressurization pipe 21 via the switching valve 9.

  The end of the decompression pipe 19 opens into the atmosphere, and opens the space 15 to the atmosphere as a decompression source via the switching valve 9 and the common pipe 17. Note that a pump or the like may be separately provided as the decompression source, and the decompression pipe may be connected to the pump or the like.

  The end of the pressurizing pipe 21 is connected to a pressurizing source 23 such as a pump, and the space 15 is connected to the pressurizing source 23 via the switching valve 9 and the common pipe 17. The pressurizing source 23 is controlled by a controller 25 to be described later, and is configured to pressurize the space 15 above atmospheric pressure.

  The switching valve 9 is a three-way valve, which shuts off one of the decompression pipe 19 and the pressurization pipe 21 and opens the other by a switching operation. As a result, the switching valve 9 is configured to be able to switch between the decompression by the atmosphere as the decompression source via the piping part 7 and the pressurization by the pressurization source 23 with respect to the space part 15.

  The switching valve 9 of the present embodiment is configured as an electrically driven electromagnetic valve, and switching is controlled by a controller 25 including an arithmetic device or the like. However, the switching valve 9 can also be configured as a valve that is manually switched by an operator.

  While holding the substrate W by the holding device 1 (when the substrate W is not removed), the controller 25 switches the switching valve 9 to make the space portion 15 communicate with the atmosphere. Thereby, the space part 15 is depressurized to atmospheric pressure, the pressure difference between the space part 15 and the atmosphere (surrounding atmosphere) disappears (decreases), and the adsorbing member 3 enters a non-bulged state.

On the other hand, when the substrate W is removed, the controller 25 switches the switching valve 9 so that the space 15 and the pressurization source 23 communicate with each other. At this time, the controller 25 drives the pressurizing source 23 to pressurize the space 15 to the atmospheric pressure or higher by the pressurizing source 23. Accordingly, the pressure difference between the space portion 15 and the atmosphere increases (occurs), and the adsorption member 3 is expanded toward the substrate W side.
[Suction and removal of substrate]
2A and 2B are cross-sectional views showing the operation of sucking and removing the substrate, FIG. 2A shows the operation of sucking the substrate, and FIG. 2B shows the operation of removing the substrate.

  When adsorbing the substrate W, the controller 25 switches the switching valve 9 to open the space 15 to the atmosphere as shown in FIG. In this state, the substrate W is sucked and held by the holding device 1 by pressing the substrate W against the suction member 3 of the holding device 1.

  At this time, since the space portion 15 and the surrounding atmosphere are both atmospheric pressure, no pressure difference is generated between the space portion 15 and the surrounding atmosphere, that is, the front and back of the suction member 3, and the suction member 3 that sucks the substrate W is sucked. Is maintained (becomes a non-bulged state). Therefore, the holding device 1 can reliably maintain the suction holding state of the substrate W, and can carry and process the substrate W as a process.

  When removing the substrate W, as shown in FIG. 2B, the controller 25 switches the switching valve 9 to connect the space portion 15 to the pressure source 23 and operate the pressure source 23 to change the space portion 15 Pressurize above atmospheric pressure.

  Accordingly, the space portion 15 has a relatively high pressure with respect to the surrounding atmosphere, and a pressure difference is generated between the space portion 15 and the surrounding atmosphere, that is, at a position corresponding to the space portion 15 between the front and back of the adsorption member 3. Based on the pressure difference, the adsorbing member 3 is pressed from the space 15 side and partially bulges to the substrate W side. Due to this swelling, the substrate W is separated from the other part of the adsorption member 3 and is removed from the holding device 1.

The swelling of the adsorbing member 3 depends on the amount of pressure applied by the pressure source 23 and the pressure rate. The pressure amount and pressure threshold of the pressurizing source 23 are set so that the adsorption member 3 is excessively expanded and the adsorption member 3 itself and the substrate W are not damaged, and the substrate W is excessively expanded by the expansion of the adsorption member 3. It is preferable to set within a range where damage is not caused by impact.
[Effect of Example 1]
The holding device 1 of the present embodiment includes a flexible adsorption member 3 that adsorbs the substrate W to the surface, a back surface member 5 that forms a space 15 that is partitioned with respect to the surrounding atmosphere on the back surface of the adsorption member 3, The space portion 15 is connected to the atmosphere as a decompression source and the piping portion 7 is connected to the pressurization source 23, and the space portion 15 is switched between the decompression by the atmosphere via the piping portion 7 and the pressurization by the pressurization source 23. And a switching valve 9.

  Then, the holding device 1 pressurizes the space 15 when the substrate W is removed by switching the switching valve 9, increases the pressure difference with the surrounding atmosphere, and causes the adsorption member 3 to bulge to the substrate W side. At the time of non-removal, the space portion 15 is opened to the atmosphere, the pressure difference between the space portion 15 and the surrounding atmosphere is eliminated, and the adsorption member 3 is brought into a non-expanded state.

  Therefore, in this embodiment, the suction member 3 itself that sucks the substrate W is swelled so that the substrate W can be pressed and removed, and the substrate W is not damaged or contaminated.

  Further, in this embodiment, since the suction member 3 is expanded using the pressure difference, there is no member that exerts a pressing force on the substrate W other than the suction member 3, and the substrate W is also damaged from this point. Can be reliably prevented.

  In addition, when the substrate W is not detached, the suction member 3 does not bulge toward the substrate W, and the suction holding of the substrate W can be performed reliably.

  Further, in this embodiment, the ambient atmosphere is the atmosphere, and the piping part 7 opens the space part 15 to the atmosphere as the decompression source and connects to the pressurization source 23 that pressurizes the atmospheric pressure or higher, so that the atmosphere is used. The structure can be simplified.

  The back surface member 5 includes a support portion 11 that supports the adsorption member 3 from the back surface side, and a through hole 13 that penetrates the support portion 11 and reaches the back surface of the adsorption member 3 to partition the space portion 15.

  Therefore, in the present embodiment, the back surface member 5 can be configured by using the support portion 11 that supports the adsorption member 3, and the structure can be simplified more reliably.

  Further, in the present embodiment, the suction member 3 is excessively expanded according to the setting of the pressurization amount by the pressure source 23, and the suction member 3 itself is damaged or the substrate W is damaged by adjusting the pressing force. Can be prevented.

Moreover, according to the setting of the pressurization speed by the pressurization source 23, the swelling speed of the adsorption member 3 can be adjusted, and the substrate W can be prevented from being damaged by an excessive impact.
[Modification]
3 is a cross-sectional view of an adsorption member and its peripheral structure according to a modification of Example 1, FIG. 3A is an adsorption member made of an electrorheological material, and FIG. 3B is an electrostatic chuck. The adsorbing member is made of an insulating material.

  The suction member 3 according to the first embodiment only needs to be flexible and can suck an object such as the substrate W, and various structures can be employed.

  For example, as in the example of FIG. 3A, the adsorbing member 3 can be formed of a flexible sheet in which the electrorheological particles 27 are dispersed in the electric insulating medium 29. In this case, an electrode substrate 31 constituting the back member 5 is interposed between the support member 11 and the back surface of the adsorption member 3.

  The electrode substrate 31 is provided with an electrode through hole 33 penetrating in the thickness direction corresponding to the through hole 13 on the support portion 11 side. A space 15 is defined by the electrode through-hole 33 and the through-hole 13.

  The adsorbing member 3 in FIG. 3A can generate an adsorbing force on the substrate W by an electric force or the like in response to voltage application via the electrode substrate 31.

  In the example of FIG. 3B, the attracting member 3 is composed of a flexible electrical insulating sheet, and the attracting member 3 constitutes an electrostatic chuck 35 together with the electrode substrate 31. The adsorbing member 3 of FIG. 3B can generate an adsorbing force on the substrate W by electrostatic force in response to voltage application via the electrode substrate 31.

  FIG. 4 is a schematic cross-sectional view of a holding device 1 having a switching valve according to a modification of the first embodiment.

  The switching valve 9 according to the first embodiment only needs to be able to switch between the decompression pipe 19 and the pressurization pipe 21 of the pipe section 7 communicating with the space section 15, and various structures can be employed.

  In the example of FIG. 4, the electrically driven switching valves 9 a and 9 b are provided in the decompression pipe 19 and the pressurization pipe 21 of the pipe section 7, respectively.

  3A to 4 can achieve the same operational effects as those of the first embodiment.

FIG. 5 is a schematic cross-sectional view of a substrate assembly apparatus to which the adsorption / desorption apparatus according to the second embodiment is applied. In the second embodiment, the components corresponding to those in the first embodiment are denoted by the same reference numerals or the same reference numerals with A added thereto, and redundant description is omitted.
[Board assembly equipment]
As shown in FIG. 5, the substrate assembly apparatus 37 of the present embodiment includes a decompression chamber 39 and upper and lower holding devices 1Aa and 1Ab that are the adsorption and desorption devices of the present embodiment. The substrate assembly device 37 is configured to suck and hold the substrates W1 and W2 by the upper and lower holding devices 1Aa and 1Ab and to bond the substrates W1 and W2 in the decompression chamber 39 in a decompressed atmosphere.

  The decompression chamber 39 is composed of, for example, upper and lower chamber portions 41a and 41b, and a sealing member 43 such as an O-ring is located between the two, and is in a sealed state. The decompression chamber 39 can be opened and closed by, for example, moving the upper chamber portion 41a close to and away from the lower chamber portion 41b in the vertical direction.

  The inside of the decompression chamber 39 is connected to a decompression source 47 such as a pump by an intake pipe 45 and can be decompressed by the decompression source 47 to form a decompressed atmosphere. The decompression source 47 is controlled by a controller 25A described later.

  In addition, a leak pipe 49 and a leak valve 51 are attached in the decompression chamber 39, and can be opened to the atmosphere (pressurization by the atmosphere is possible) according to switching of the leak valve 51.

  The pressure in the decompression chamber 39 is monitored by a pressure sensor 53.

  The configuration of the decompression chamber 39 is not particularly limited, and various configurations can be adopted as long as the decompression source 47 can decompress the configuration.

  In the decompression chamber 39, upper and lower holding devices 1Aa and 1Ab are supported by upper and lower chamber portions 41a and 41b, respectively. The upper and lower holding devices 1Aa and 1Ab hold the substrates W1 and W2 as shown in FIG. 5 and, for example, the upper holding device 1Aa is driven downward to bond the substrates W1 and W2 together under pressure. After the substrates W1 and W2 are bonded, the substrates W1 and W2 are removed from the upper and lower holding devices 1Aa and 1Ab, and the assembly of, for example, a liquid crystal panel is completed.

  In the present embodiment, a pair of adsorption / desorption devices are provided as the upper and lower holding devices 1Aa and 1Ab of the substrate assembly device 37 for the purpose of bonding the substrates W1 and W2 as the objects. However, the present invention is not limited to this. is not.

  In other words, the adsorption / desorption device may be any device that adsorbs and holds an object to be processed in a reduced-pressure atmosphere. Etc. can be appropriately changed.

  The upper and lower holding devices 1Aa and 1Ab basically have the same configuration as the holding device 1 of the first embodiment, but the piping portion 7A is different from the first embodiment. In the present embodiment, the controller 25A is also different from the first embodiment.

  That is, in the piping part 7A, the decompression pipe 19A opens into the decompression chamber 39 and the pressurization pipe 21A is drawn out of the decompression chamber 39 and opens into the atmosphere.

  Accordingly, the space portion 15 is opened to the decompression chamber 39 via the common pipe 17, the switching valve 9 </ b> A, and the decompression pipe 19 </ b> A, and is connected to the decompression source 47 for the decompression chamber 39. On the other hand, the space 15 is opened to the atmosphere as a pressurizing source through the common pipe 17, the switching valve 9A, and the pressurizing pipe 21A. Note that the pressure reducing pipe 19 </ b> A may be directly connected to the pressure reducing source 47.

  The controller 25A switches the switching valve 9A to connect the space portion 15 and the decompression chamber 39 when the substrates W1 and W2 are sucked and held by the holding devices 1Aa and 1Ab or are sucked and held (when not removed). .

  As a result, the space 15 is decompressed by the decompression source 47 through the decompression chamber 39, the pressure difference from the decompressed atmosphere that is the internal atmosphere (peripheral atmosphere) of the decompression chamber 39 is reduced, and the adsorption member 3A does not bulge. It becomes a state. The reduction in the pressure difference includes a case where the adsorption member 3A is small enough to be in a non-expanded state and a case where the pressure difference disappears.

  On the other hand, when the substrates W1 and W2 are removed, the controller 25A switches the switching valve 9A to connect the space 15 and the atmosphere outside the decompression chamber 39. As a result, the space 15 is pressurized by the atmosphere, the pressure difference from the internal atmosphere of the decompression chamber 39 increases, and the adsorption member 3A bulges toward the substrates W1 and W2 (see FIG. 2B). The increase in the pressure difference is at least enough to cause the adsorbing member 3A to swell, and includes a case where the pressure difference occurs from a state where there is no pressure difference.

  In this embodiment, the decompression chamber 39 is opened to the atmosphere when the substrates W1 and W2 are removed, and the controller 25A switches the switching valve 9A according to the pressure in the decompression chamber 39 at that time.

  That is, when starting to remove the substrates W1 and W2, the controller 25A switches the leak valve 51 to open the decompression chamber 39 to the atmosphere. At this time, the controller 25A acquires the pressure in the decompression chamber 39 from the pressure sensor 53, and switches the switching valve 9A to open the space 15 to the atmosphere while the pressure in the decompression chamber 39 is lower than the atmospheric pressure.

  In the present embodiment, when the pressure difference between the pressure in the decompression chamber 39 and the atmospheric pressure becomes equal to or less than the threshold value, the switching valve 9A is switched to open the space 15 to the atmosphere. The threshold value of the pressure difference is set in a range in which the adsorption member 3A does not bulge excessively when the space 15 is opened to the atmosphere. Moreover, it is preferable that the opening speed of the space 15 to the atmosphere is set within a range in which an excessive impact is not applied to the substrates W1 and W2 due to the swelling of the adsorption member 3A.

The configuration of the modified example of the first embodiment can also be applied to the second embodiment.
[Boarding and removal of substrates]
When the substrates W1 and W2 are bonded together, as shown in FIG. 5, the substrates W1 and W2 are sucked and held by the vertical holding devices 1Aa and 1Ab, and the decompression chamber 39 is kept in a sealed state.

  When adsorbing and holding the substrates W1 and W2, first, the upper and lower chamber portions 41a and 41b of the decompression chamber 39 are opened, and the adsorbing members of the upper and lower holding devices 1Aa and 1Ab are conveyed while the substrates W1 and W2 are conveyed by a robot arm or the like. The substrates W1 and W2 are pressed against 3A. In this case, one of the upper and lower chamber portions 41a and 41b, for example, the lower chamber portion 41b is moved in the horizontal direction, so that the upper and lower chamber portions 41a and 41b and the upper and lower holding devices 1Aa and 1Ab supported by them do not face vertically. It is preferable to do so.

  In addition, what is necessary is just to control operation | movement of these upper and lower chamber parts 41a and 41b by the controller 25A or another control unit.

  At this time, the controller 25 </ b> A switches the switching valve 9 </ b> A of the upper and lower holding devices 1 </ b> Aa and 1 </ b> Ab to communicate the space portion 15 of the upper and lower holding devices 1 </ b> Aa and 1 </ b> Ab with the inside of the decompression chamber 39.

  At the time of this adsorption holding, the decompression chamber 39 is opened to the atmosphere, and the space 15 can be opened to the atmosphere via the decompression chamber 39. For this reason, the space 15 has no pressure difference from the internal atmosphere of the decompression chamber 39.

  If there is no pressure difference from the atmospheric pressure due to the adsorption and separation of the substrates W1 and W2 performed immediately before the space 15 or the adsorption member 3A is small enough not to bulge, the decompression chamber 39 described below is decompressed. In doing so, the space 15 of the upper and lower holding devices 1Aa and 1Ab may be communicated with the decompression chamber 39.

  When the substrates W1 and W2 in FIG. 5 are held and the decompression chamber 39 is sealed, the decompression chamber 39 is decompressed to form a decompressed atmosphere. That is, the controller 25 </ b> A depressurizes the interior of the decompression chamber 39 by the decompression source 47 through the intake pipe 45.

  At this time, since the space portion 15 communicates with the decompression chamber 39, the pressure is reduced by the decompression source 47 together with the decompression chamber 39, and the pressure difference from the internal atmosphere of the decompression chamber 39 that has become the decompressed atmosphere disappears.

  As a result, the posture of the adsorption member 3A that adsorbs the substrates W1 and W2 is maintained in the non-expanded state, and the adsorption state of the substrates W1 and W2 can be reliably maintained.

  After the decompression chamber 39 is in a decompressed atmosphere in this way, for example, the upper holding device 1Aa is driven downward, and the substrates W1 and W2 are pressurized and bonded together by the upper and lower holding devices 1Aa and 1Ab.

  Bonding of the substrates W1 and W2 is performed via an adhesive that is applied to the substrate W2 in advance. Further, since the substrates W1 and W2 are bonded together in a reduced-pressure atmosphere, it is possible to prevent air from remaining (bubble generation).

  After the substrates W1 and W2 are bonded together, the substrates W1 and W2 are removed from the upper and lower holding devices 1Aa and 1Ab, and the assembly of the panel composed of the substrates W1 and W2 is completed.

  When removing the substrate W1 from the upper holding device 1Aa, first, the controller 25A switches the leak valve 51 to open the inside of the decompression chamber 39 to the atmosphere via the leak pipe 49. As a result, the pressure in the decompression chamber 39 increases.

  At this time, the controller 25A acquires the pressure in the decompression chamber 39 from the pressure sensor 53, and determines whether or not the difference between the pressure in the decompression chamber 39 and the atmospheric pressure is equal to or less than a threshold value.

  When the difference between the pressure in the decompression chamber 39 and the atmospheric pressure becomes equal to or less than the threshold value, the controller 25A switches the switching valve 9A of the upper holding device 1Aa to open the space 15 to the atmosphere. For this reason, in the upper holding device 1 </ b> Aa, the space portion 15 becomes an atmospheric pressure that is relatively higher (pressurized) than the internal atmosphere of the decompression chamber 39, and the pressure between the decompression chamber 39 and the space portion 15. There is a difference.

  Accordingly, the suction member 3A has a pressure difference between the front and back surfaces at a position corresponding to the space portion 15, and is pressed by the atmospheric pressure from the space portion 15 side based on the pressure difference, and is partially below the substrate W1 side. Bulge out (see FIG. 2B).

  Due to this swelling, the substrate W1 is pressed downward against the other part of the adsorption member 3A, and is removed from the upper holding device 1Aa. When the upper holding device 1Aa is driven upward in this state, the removal of the substrate W1 from the upper holding device 1Aa is completed.

  On the other hand, the substrate W2 is also removed from the lower holding device 1Ab. The removal of the substrate W2 from the lower holding device 1Ab is performed at the same time as the removal of the substrate W1 from the upper holding device 1Aa in this embodiment while the difference between the pressure in the decompression chamber 39 and the atmospheric pressure is equal to or less than the threshold value. Is called.

  When removing the substrate W2 from the lower holding device 1Ab, the controller 25A switches the switching valve 9A of the lower holding device 1Ab to open the space 15 to the atmosphere, and the adsorption member 3A is located at a position corresponding to the space 15. Partially bulges upward on the W2 side (see FIG. 2B). Due to such swelling, the substrate W2 is removed from the lower holding device 1Ab.

  When the substrates W1 and W2 are removed from the upper and lower holding devices 1Aa and 1Ab in this way, the panel made of the substrates W1 and W2 is placed on the lower holding device 1Ab.

Thereafter, the panel can be transported from the decompression chamber 39 by opening the decompression chamber 39.
[Effect of Example 2]
The upper and lower holding devices 1Aa and 1Ab of the present embodiment are respectively provided with a flexible adsorbing member 3A that adsorbs the substrates W1 and W2 to the surface and is disposed in the decompression chamber 39 at least when the substrates W1 and W2 are bonded (processed). The back surface member 5 that forms the space 15 partitioned with respect to the inner atmosphere of the decompression chamber 39, which is the ambient atmosphere, on the back surface of the adsorbing member 3A, and the space 15 is connected to the decompression source 47 and as a pressure source 7 A of piping parts connected to air | atmosphere and the switching valve 9A which switches the pressure reduction by the pressure reduction source 47 via the piping part 7A and the pressurization by air | atmosphere with respect to the space part 15 are provided.

  Then, the upper and lower holding devices 1Aa and 1Ab pressurize the space 15 when the substrates W1 and W2 are removed by switching the switching unit 9A, and increase the pressure difference with the internal atmosphere of the decompression chamber 39 to place the adsorption member 3A on the substrate. When the substrates W1 and W2 are not removed, the space 15 is decompressed to reduce the pressure difference from the internal atmosphere of the decompression chamber 39, and the adsorption member 3A is brought into a non-expanded state.

  Therefore, in the present embodiment, the same effects as those of the first embodiment can be achieved when the substrates W1 and W2 are bonded together in a reduced-pressure atmosphere.

  In addition, in the present embodiment, the piping part 7A can have a simple structure that opens the space part 15 to the decompression chamber 39 on the one hand and opens the space part 15 to the atmosphere as a pressurization source on the other hand, The structure can be simplified using the decompression chamber 39 and the atmosphere.

  In this embodiment, the controller 25A for controlling the switching valve 9A and the pressure sensor 53 for monitoring the pressure in the decompression chamber 39 are provided, and the decompression chamber 39 is opened to the atmosphere when the substrates W1 and W2 are removed. Based on the monitoring of the pressure in the decompression chamber 39 by the pressure sensor 53, the controller 25A switches the switching valve 9A to open the space 15 to the atmosphere while the pressure in the decompression chamber 39 is lower than the atmospheric pressure.

  Therefore, in this embodiment, the pressure difference between the space portion 15 and the decompression chamber 39 can be reliably increased, and the substrates W1 and W2 can be reliably removed.

  The controller 25A according to the present embodiment switches the switching valve 9A to open the space 15 to the atmosphere when the pressure difference between the pressure in the decompression chamber 39 and the atmospheric pressure becomes equal to or less than the threshold value.

  Therefore, in this embodiment, if the threshold value is set according to the pressure difference between the pressure reducing chamber 39 and the atmospheric pressure, the amount of deflection of the adsorption member 3A, and the like, the amount of expansion of the adsorption member 3A is adjusted and the adsorption is performed. It can suppress that member 3A bends excessively.

  As a result, damage to the adsorption member 3A can be prevented, and the pressing force against the substrates W1 and W2 due to the expansion of the adsorption member 3A can be adjusted, so that damage to the substrates W1 and W2 can be reliably prevented.

Further, in this embodiment, the bulging speed of the adsorption member 3A is adjusted according to the opening speed (pressurization speed) of the space 15 to the atmosphere, and it is possible to prevent the substrates W1 and W2 from being damaged by excessive impact. .
[Others]
As mentioned above, although the Example of this invention was described, this invention is not limited to this.

  For example, in the first embodiment, the atmosphere is used as a decompression source of the space portion 15, and in the embodiment 2, the decompression source 47 of the decompression chamber 39 is used as a decompression source of the space portion 15 and the atmosphere is used as a pressurization source. However, instead of using them, a pressure reduction source or a pressure source consisting of a pump or the like may be provided separately.

  In this case, the switching unit may be a controller or the like that performs drive control of the decompression source and the pressurization source.

  Moreover, although the pressurization pipes 21 and 21A and the pressure reduction pipes 19 and 19A are connected to the space part 15 by the common pipe 17, they may be configured to be connected to the space part 15 independently.

1 Holding device (Suction / removal device)
3 Adsorbing member 5 Back member 7 Piping section 9 Switching valve (switching section)
DESCRIPTION OF SYMBOLS 11 Support part 13 Through-hole 23 Pressure source 25 Controller

Claims (7)

A flexible adsorption member that adsorbs an object to the surface;
A back surface member that forms a space partitioned with respect to the surrounding atmosphere on the back surface of the adsorption member;
A pipe part for connecting the space part to a pressure source and a pressure source;
A switching unit that switches between depressurization by the depressurization source and pressurization by the pressurization source via the piping unit with respect to the space unit,
By switching the switching unit, the space part is pressurized when the object is removed, the pressure difference from the surrounding atmosphere is increased, and the adsorption member is bulged toward the object side, and the object is not removed. Sometimes the space is depressurized and the pressure difference with the surrounding atmosphere is reduced to bring the adsorbing member into a non-bulged state,
An adsorption / desorption device characterized by that. The adsorption / desorption device according to claim 1,
The ambient atmosphere is air,
The pipe part is connected to a pressure source that opens the space part to the atmosphere as the pressure reduction source and pressurizes the space part to an atmospheric pressure or higher.
An adsorption / desorption device characterized by that. An adsorption desorption device that adsorbs an object to be processed in a reduced pressure atmosphere of a decompression chamber and removes the object after the processing,
A flexible adsorbing member that adsorbs the object to the surface and is disposed in the decompression chamber at least when the object is processed;
A back member that forms a space defined on the back surface of the suction member with respect to the internal atmosphere of the decompression chamber;
A pipe part for connecting the space part to a pressure source and a pressure source;
A switching unit that switches between depressurization by the depressurization source and pressurization by the pressurization source via the piping unit with respect to the space unit,
By switching the switching unit, the space is pressurized when the object is removed, the pressure difference with the internal atmosphere of the decompression chamber is increased, and the adsorption member is expanded toward the object, and the object Decompressing the space when not removed, reducing the pressure difference with the internal atmosphere of the decompression chamber to bring the adsorbing member into a non-expanded state,
An adsorption / desorption device characterized by that. The adsorption / desorption device according to claim 3,
The piping part opens the space part to the decompression chamber and connects to a decompression source for the decompression chamber and opens the space part to the atmosphere as the pressurization source.
An adsorption / desorption device characterized by that. The adsorption / desorption device according to claim 4,
A controller for controlling the switching unit;
A pressure sensor for monitoring the pressure in the decompression chamber;
The decompression chamber is opened to the atmosphere when removing the adsorbed object,
The controller switches the switching unit while the pressure in the decompression chamber is lower than the atmospheric pressure based on monitoring of the pressure in the decompression chamber by the pressure sensor to open the space portion to the atmosphere.
An adsorption / desorption device characterized by that. The adsorption / desorption device according to claim 5,
When the pressure difference between the pressure in the decompression chamber and the atmospheric pressure is equal to or less than a threshold, the controller switches the switching unit to open the space to the atmosphere.
An adsorption / desorption device characterized by that. The adsorption / desorption device according to any one of claims 1 to 6,
The back surface member includes a support portion that supports the adsorption member from the back surface side, and a through hole that penetrates the support portion and reaches the back surface of the adsorption member to partition the space portion.
An adsorption / desorption device characterized by that.

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