JP2015190992A - Confocal microscope device and confocal observation method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable an observation with a high resolving power exceeding imaging capability of microscopes.SOLUTION: A confocal microscope device exemplifying the present invention comprises: an illumination optical system that converges illumination light to an observation object plane; an observation optical system that converges observation light emerging from a converging point of the illumination light; a mask unit that disposes a principal pinhole at a position conjugate relative to the converging point, and disposes a sub-pinhole at a position out of the position; a detection unit that individually produces a principal intensity signal indicative of intensity of the observation light passing through the principal pinhole and a sub-intensity signal indicative of intensity of the observation light passing through the sub-pinhole; a scanning unit that scans the observation object plane with a probe composed of a principal pinhole image serving as an image of the principal pinhole, a sub-pinhole image serving as an image of the sub-pinhole and the converging point of the illumination light; and a computation unit that subtracts a value corresponding to the sub-intensity signal produced when the sub-pinhole image is located at the observation object point from the principal intensity signal produced when the principal pinhole image is located at an observation object point of the observation object plane.

Description

  The present invention relates to a confocal microscope apparatus and a confocal observation method.

  Conventionally, a confocal microscope achieves high resolution by condensing excitation light on a fluorescent specimen and detecting fluorescence emitted from a condensing point of the excitation light through a pinhole. The resolution of this confocal microscope is basically determined by the product distribution of the PSF (PSF: Point spread function) of the focal point of the excitation light and the intensity distribution of the pinhole image projected onto the specimen. Therefore, the resolution of the confocal microscope depends on the imaging performance of the microscope.

Japanese Patent No. 5242148

  The present invention provides a confocal microscope apparatus and a confocal observation method that enable observation with high resolution exceeding the imaging performance of a microscope.

  One aspect of a confocal microscope apparatus illustrating the present invention condenses an illumination optical system that condenses illumination light on an observation target surface, and observation light emitted from a condensing point of the illumination light on the observation target surface An observation optical system, a mask portion in which a main pinhole is disposed at a position conjugate with the focusing point with respect to the observation optical system, and a sub pinhole is disposed at a position deviating from the conjugate position; and the main pinhole A detection unit that individually generates a main intensity signal indicating the intensity of the observation light that has passed through and a sub-intensity signal indicating the intensity of the observation light that has passed through the auxiliary pinhole, and the observation optical on the observation target surface A main pinhole image that is an image of the main pinhole formed by a system; a subpinhole image that is an image of the subpinhole formed by the observation optical system on the observation target surface; and Before the illumination optical system is formed A scanning unit that scans the observation target surface with a probe including a condensing point of illumination light, and the main intensity signal generated when the main pinhole image is positioned at the observation target point of the observation target surface From the sub-intensity signal generated when the sub-pinhole image is located at the observation point, the region smaller than the main pinhole image is used as the emission source by subtracting the value according to the sub-intensity signal generated. A calculation unit that generates an intensity signal of the observation light.

  In one aspect of the confocal observation method illustrating the present invention, illumination light is condensed on an observation target surface by an illumination optical system, and the observation light emitted from the illumination light condensing point on the observation target surface is observed by the observation optical system The main pinhole is arranged at a position conjugate with the condensing point with respect to the observation optical system, and a sub pinhole is arranged at a position deviating from the conjugate position, and passes through the main pinhole. The main intensity signal indicating the intensity of the observation light and the sub intensity signal indicating the intensity of the observation light that has passed through the sub pinhole are individually generated, and the main optical system formed on the observation target surface by the observation optical system. A main pinhole image that is an image of a pinhole, a sub-pinhole image that is an image of the sub-pinhole formed by the observation optical system on the observation target surface, and the illumination optical system is formed on the observation target surface The illumination light condensing point Scanning the observation target surface, and from the main intensity signal generated when the main pinhole image is located at the observation target point of the observation target surface, By subtracting a value corresponding to the sub-intensity signal generated when the image is positioned, an intensity signal of the observation light is generated with an area smaller than the main pinhole image as an emission source.

  According to the present invention, a confocal microscope apparatus and a confocal observation method capable of observing with high resolution exceeding the imaging performance of a microscope are realized.

It is a block diagram of a confocal microscope apparatus. It is the figure which looked at the pinhole mask 21 from the z direction. It is a figure which shows the positional relationship of a pinhole image. It is a figure which shows the positional relationship of an excitation light spot and a pinhole image. It is a figure explaining the arrangement | sequence of several sampling coordinates. It is a figure explaining the arithmetic processing by the arithmetic unit. It is a figure explaining the super-resolution effect of this embodiment. It is a figure which shows the relationship between the saturation factor S and radiation | emission PSF. It is an example of the relationship between the effective PSF and the subtraction coefficient α.

[First Embodiment]
Hereinafter, a confocal microscope apparatus will be described as a first embodiment of the present invention.

FIG. 1 is a configuration diagram of the confocal microscope apparatus of the present embodiment. As shown in FIG. 1, the confocal microscope apparatus includes a laser light source 11, an optical fiber 7, a collimating lens 12, a filter 13, a dichroic mirror 14, a galvano scanner 15, a relay lens 16, an objective lens 17, a sample 18, a filter 19, and a collector. An optical lens 20, a pinhole mask 21, optical fibers 22-0 to 22-6, photodetectors 23-0 to 23-6, a control device 39, an arithmetic device 40, and the like are arranged. The arithmetic device 40 is equipped with frame memories M _{1 to} M ₆ .

In FIG. 1, only the three optical fibers 22-0, 22-1, and 22-2 are illustrated on behalf of the optical fibers 22-0 to 22-6, and the photodetectors 23-0 to 23-6 are illustrated. representatively shows only three photodetectors 23-0,23-1,23-2, frame memories _M 0 ~M ₆ three frame memories _M 0 on behalf _of, M 1, _{M 2} only shown did.

  The sample 18 includes an observation object such as a living cell, and the observation object is pre-stained with a predetermined fluorescent material. The position of the sample 18 in the optical axis direction (z direction) is adjusted in advance by a vertical movement mechanism (not shown) so that the observation target surface P of the sample 18 is positioned on the focal plane of the objective lens 17. Here, it is assumed that the thickness of the sample 18 in the z direction is sufficiently thin.

  The laser light source 11 emits laser light (excitation light) having the same wavelength as the excitation wavelength of the fluorescent material. The excitation light emitted from the laser light source 11 propagates through the optical fiber 7, is converted into a parallel beam by the collimator lens 12, and then enters the filter 13. The filter 13 is given wavelength selectivity that transmits light having the same wavelength as the excitation light and cuts light having the same wavelength as fluorescence (described later) emitted from the fluorescent material.

  The excitation light that has entered the filter 13 passes through the filter 13 and enters the dichroic mirror 14. The dichroic mirror 14 has a reflection / transmission wavelength selectivity that reflects light having the same wavelength as the excitation light and transmits light having the same wavelength as fluorescence.

  The excitation light incident on the dichroic mirror 14 is reflected by the two mirrors of the galvano scanner 15 after being reflected by the dichroic mirror 14 and then enters the pupil side of the objective lens 17 via the relay lens 16. Note that the relay lens 16 has a function of conjugately connecting the pupil plane of the objective lens 17 and the arrangement plane of the galvano scanner 15.

  The excitation light incident on the pupil side of the objective lens 17 becomes condensed light when exiting from the distal end side of the objective lens 17, and is condensed toward one point on the observation target surface P of the sample 18 to be a light spot (excitation). Light spot). In the excitation light spot on the observation target surface P, the fluorescent substance is excited and emits fluorescence.

  The fluorescence generated at the excitation light spot travels in the same optical path as the excitation light that forms the excitation light spot, and travels toward the dichroic mirror 14 via the two mirrors of the objective lens 17, the relay lens 16, and the galvano scanner 15. The fluorescence that has entered the dichroic mirror 14 passes through the dichroic mirror 14 and enters the filter 19. The filter 19 is given wavelength selectivity that cuts light having the same wavelength as the excitation light and transmits light having the same wavelength as the fluorescence.

  When the fluorescence that has entered the filter 19 passes through the filter 19 and enters the condenser lens 20, the fluorescence is received by the condenser lens 20, and is condensed toward the arrangement surface of the pinhole mask 21. Note that the arrangement surface of the pinhole mask 21 is conjugate with the observation target surface P of the sample 18 with respect to the observation optical system including the objective lens 17, the relay lens 16, and the condenser lens 20.

  Here, as shown in FIG. 2, the pinhole mask 21 is formed with circular pinholes 21-0 to 21-6 as openings, and regions other than the openings are mask portions. In FIG. 1, only pinholes 21-0, 21-1, and 21-2 representing pinholes 21-0 to 21-6 are shown.

  In FIG. 2, the center position of the pinhole 21-0 is a position conjugate with the center of the excitation light spot, and the center position of each pinhole 21-1 to 21-6 is conjugate with the center of the excitation light spot. Out of position. Therefore, hereinafter, the pinhole 21-0 is referred to as “main pinhole 21-0”, and the pinholes 21-1 to 21-6 are referred to as “sub pinholes 21-1 to 21-6”.

  In the present embodiment, the diameters of the sub pinholes 21-1 to 21-6 are set to the same size as the diameter of the main pinhole 21-0.

  In the present embodiment, as shown in FIG. 3, the distance from the center of the main pinhole image 18-0 to the center of each of the sub pinhole images 18-1 to 18-6 coincides with the Airy disk radius a. Yes. The Airy disk radius a is a value specific to the optical system of the confocal microscope.

  In FIG. 3, the size of the main pinhole image 18-0, the size of the sub pinhole images 18-1 to 18-6, and the size of the excitation light spot 100 are smaller than the Airy disk radius a. I drew it.

  Here, the “main pinhole image 18-0” is a virtual light intensity distribution formed on the observation target plane P by the observation optical system when a light emitter is virtually arranged in the main pinhole 21-0. The “sub pinhole images 18-1 to 18-6” mean that the observation optical system is placed on the observation target surface P when the light emitter is virtually arranged in the sub pinholes 21-1 to 21-6. It is a virtual light intensity distribution to be formed.

  Further, as shown in FIG. 2, the sub pinholes 21-1 to 21-6 are arranged at equal intervals around the main pinhole 21-0. Therefore, as shown in FIG. 3, the sub-pinhole images 18-1 to 18-6 are arranged at equal intervals around the main pinhole image 18-0.

  Hereinafter, the arrangement direction of the sub pinhole images 18-2 and 18-5 is defined as the y direction (= sub scanning direction described later), and the direction perpendicular to the y direction is defined as the x direction (= main scanning direction described later).

In this case, if the minimum arrangement pitch in the x direction of the pinhole image is set as Δx and the minimum arrangement pitch in the y direction of the pinhole image is set as Δy, Δx = a (√3) / 2, Δy = a / 2 Holds. If the center coordinates of the main pinhole image 18-0 are (x, y), the center coordinates of the sub pinhole images 18-1 to 18-6 are expressed as follows.
The center coordinates of the sub pinhole 18-1: (x−Δx, y + Δy),
-Center coordinates of the secondary pinhole 18-2: (x, y + 2Δy),
The center coordinates of the sub pinhole 18-3: (x + Δx, y + Δy),
The center coordinates of the sub pinhole 18-4: (x + Δx, y−Δy),
The center coordinates of the sub pinhole 18-5: (x, y-2Δy),
・ Center coordinates of the sub pinhole 18-6: (x−Δx, y−Δy)
FIG. 4 is a diagram showing the relationship between the distribution area of the main pinhole image 18-0, the distribution areas of the sub pinhole images 18-1 to 18-6, and the distribution area of the excitation light spot 100. Here, it is assumed that the radius of the main pinhole image 18-0, the radius of each of the sub pinhole images 18-1 to 18-6, and the radius of the excitation light spot 100 substantially coincide with the Airy disk radius a. Assumed.

  As shown in FIG. 4, the distribution area of the main pinhole image 18-0 and the distribution area of the excitation light spot 100 are substantially coincident, and each distribution area of the sub pinhole images 18-1 to 18-6 is the main distribution area. It partially overlaps the distribution area of the pinhole image 18-0 and the excitation light spot 100. The main pinhole image 18-0, the sub pinhole images 18-1 to 18-6, and the entire excitation light spot 100 are used as the probe 300 of this embodiment.

  Returning to FIG. 1, the fluorescent light individually passing through the main pinhole 21-0 and the sub pinholes 21-1 to 21-6 of the pinhole mask 21 is individually supplied to the incident ends of the optical fibers 22-0 to 22-6. Incident. The fluorescence individually incident on the optical fibers 22-0 to 22-6 is individually emitted from the emission ends of the optical fibers 22-0 to 22-6, and individually incident on the photodetectors 23-0 to 23-6. .

The incident fluorescence separately into the photodetector 23-0～23-6 is converted into individual fluorescence signal _I 0 ~I ₆ at the optical detector 23-0～23-6. The fluorescence signals I _{0 to} I ₆ generated by the photodetectors 23-0 to 23-6 are taken into the arithmetic device 40 via the control device 39.

The frame memory M ₀ of the arithmetic device 40 stores the fluorescence signal I ₀ sent from the control device 39. Further, the frame memory M ₁ of the arithmetic unit 40 stores the fluorescence signal I ₁ sent from the control device 39. Further, the frame memory M ₂ of the arithmetic device 40 stores the fluorescence signal I ₂ sent from the control device 39. Further, the frame memory M ₃ of the arithmetic unit 40 stores the fluorescence signal I ₃ sent from the control device 39. Further, the frame memory M ₄ of the arithmetic unit 40 stores the fluorescence signal I ₄ sent from the control device 39. Further, the frame memory M ₅ of the arithmetic unit 40 stores the fluorescence signal I ₅ sent from the control device 39. Further, the frame memory M ₆ of the arithmetic device 40 stores the fluorescence signal I ₆ sent from the control device 39.

  In the above description, in order to individually guide the seven fluorescences individually passing through the seven pinholes 21-0 to 21-6 to the seven photodetectors 23-0 to 23-6, Although the optical fibers 22-0 to 22-6 are used, when the distance between the seven pinholes 21-0 to 21-6 is sufficiently wide, the optical fibers 22-0 to 22-6 are omitted, and the pinhole 21 Seven photodetectors 23-0 to 23-6 may be arranged directly behind -0 to 21-6.

  In the above description, the pinhole mask 21 in which the seven pinholes 21-0 to 21-6 are formed is used. However, the pinhole mask 21 is omitted and the seven optical fibers 22-0 to 22- are formed. 6 may be used in place of the seven pinholes 21-0 to 21-6. However, in that case, the diameters of the incident ends of the optical fibers 22-0 to 22-6 are set to the same size as the diameters of the seven pinholes 21-0 to 21-6.

  In the above description, the seven photodetectors 23-0 to 23-6 are used to individually detect the seven fluorescences that have passed through the seven pinholes 21-0 to 21-6. In order to individually detect the seven fluorescences individually passing through the seven pinholes 21-0 to 21-6, seven different pixel regions of a single image sensor may be used. Further, instead of the seven photodetectors 23-0 to 23-6, a single imaging device is used, and the pinhole mask 21 is omitted and each of the seven optical fibers 22-0 to 22-6 is omitted. Of course, the incident end can be used instead of the pinholes 21-0 to 21-6.

  Now, when a main scanning mirror (not shown) of the two mirrors of the galvano scanner 15 shown in FIG. 1 is driven, the formation destination of the probe 300 on the observation target surface P moves in the main scanning direction (= x direction) ( Scan). When a sub-scanning mirror (not shown) of the two mirrors of the galvano scanner 15 is driven, the formation destination of the probe 300 on the observation target surface P moves (scans) in the sub-scanning direction (= y direction).

Therefore, the control device 39 turns on the laser light source 11 and drives the photodetectors 23-0 to 23-6 when the formation destination of the probe 300 is at each coordinate of the observation target surface P, thereby Fluorescent signals I _{0 to} I ₆ are sampled from the coordinates. Hereinafter, the center coordinates of the probe 300 at the sampling timing of the fluorescence signals I _{0 to} I ₆ (that is, the center coordinates of the excitation light spot 100 and the main pinhole image 18-0) are referred to as “sampling coordinates”.

Therefore, the fluorescence signal I ₀ corresponding to each of the plurality of sampling coordinates is stored in the frame memory M ₀ of the arithmetic unit 40. Hereinafter, an image formed by arranging the fluorescence signals I ₀ stored in the frame memory M ₀ in the coordinate order is referred to as “fluorescence image I ₀ ” as necessary.

In addition, the fluorescence signal I ₁ corresponding to each of the plurality of sampling coordinates is stored in the frame memory M ₁ of the arithmetic device 40. Hereinafter, an image in which the fluorescence signals I ₁ stored in the frame memory M ₁ are arranged in the coordinate order is referred to as “fluorescence image I ₁ ” as necessary.

Further, the fluorescence signal I ₂ corresponding to each of the plurality of sampling coordinates is stored in the frame memory M ₂ of the arithmetic device 40. Hereinafter, an image in which the fluorescence signals I ₂ stored in the frame memory M ₂ are arranged in the coordinate order is referred to as “fluorescence image I ₂ ” as necessary.

Further, the fluorescence signal I ₃ corresponding to each of the plurality of sampling coordinates is stored in the frame memory M ₃ of the arithmetic unit 40. Hereinafter, an image in which the fluorescence signals I ₃ stored in the frame memory M ₃ are arranged in the coordinate order is referred to as “fluorescence image I ₃ ” as necessary.

Further, the fluorescence signal I ₄ corresponding to each of the plurality of sampling coordinates is stored in the frame memory M ₄ of the arithmetic unit 40. Hereinafter, an image in which the fluorescence signals I ₄ stored in the frame memory M ₄ are arranged in the coordinate order is referred to as “fluorescence image I ₄ ” as necessary.

Further, in the frame memory M ₅ of the arithmetic unit 40, the fluorescence signal I ₅ corresponding to each of the plurality of sampling coordinates are stored. Hereinafter, an image formed by arranging the fluorescence signals I ₅ stored in the frame memory M ₅ in the order of coordinates is referred to as “fluorescence image I ₅ ” as necessary.

In addition, the fluorescence signal I ₆ corresponding to each of the plurality of sampling coordinates is stored in the frame memory M ₆ of the arithmetic unit 40. Hereinafter, an image in which the fluorescence signals I ₆ stored in the frame memory M ₆ are arranged in the coordinate order is referred to as “fluorescence image I ₆ ” as necessary.

  FIG. 5 is a diagram illustrating the arrangement of sampling coordinates on the observation target surface P. The horizontal axis in FIG. 5 is the main scanning direction (= x direction), and the vertical axis in FIG. 5 is the sub-scanning direction (= y direction). As shown in FIG. 5, the arrangement pitch in the x direction of the sampling coordinates (that is, the scanning pitch in the x direction) is set finer than the width (= 2Δx) of the probe 300 in the x direction, and the arrangement pitch in the y direction of the sampling coordinates (ie, the scanning pitch in the x direction) The scanning pitch in the y direction is set finer than the width (= 4Δy) of the probe 300 in the y direction.

  Specifically, the scanning pitch in the x direction is set to be the same as the minimum arrangement pitch Δx of the pinhole images in the x direction in the probe 300, and the scanning pitch in the y direction is the minimum arrangement of the pinhole images in the y direction in the probe 300. It is set to be the same as the pitch Δy.

If the scanning pitches in the x direction and y direction are set in this way, all the pinhole images 18-0 to 18-6 can be positioned at different timings in each of the sampling coordinates. In this case, the fluorescence signals I _{0 to} I ₆ necessary for super-resolution can be sampled from each of the sampling coordinates.

  Next, the excitation light power of this embodiment will be described.

  The control device 39 of the present embodiment sets the power of the laser light source 11, that is, the power of the excitation light, to be sufficiently high so that the amount of fluorescence generated in the excitation light spot 100 is saturated. Flatten the peak.

  Here, in-probe coordinates (u, v) with the center of the probe 300 (= the center of the excitation light spot 100) as the origin are introduced. Here, the in-probe coordinates (u, v) are used separately from the center coordinates (= sampling coordinates (x, y)) of the probe 300 on the observation target plane P.

When the radiation PSF is set to PSF _em (u, v) using the coordinates (u, v) in the probe, PSF _em (u, v) is expressed by the following equation (1).

PSF _em (u, v) = (S ⁻¹ · PSF _ill (u, v)) / (S ⁻¹ + PSF _ill (u, v)) (1)
Here, the intensity distribution (excitation PSF) of the excitation light spot 100 is expressed as PSF _ill (u, v). Further, S in the formula (1) is a factor determined by the intensity of the excitation light and the characteristics of the fluorescent material, and the larger the factor S, the higher the saturation of the amount of fluorescence generated and the flatness of the radiation PSF. Therefore, hereinafter, this factor S is referred to as a “saturation factor”.

  In the present embodiment, the saturation factor S is appropriately increased and the peak of the radiation PSF is appropriately flattened by appropriately increasing the intensity of the excitation light. This ensures super-resolution observation.

In this apparatus, when the point response function of the fluorescence signal I _i sampled by the pinhole 21-i is PSF _det ⁱ (u, v), PSF _det ⁱ (u, v) is a radiation PSF (PSF _em (u, v). , V)) is obtained by applying the mask I _p ⁱ (u, v) by the pinhole image 18-i and is generally expressed by the following equation (2).

PSF _det ⁱ (u, v) = PSF _em (u, v) × I _p ⁱ (u, v) (2)
Next, the super-resolution principle of this embodiment will be described.

_6A and 6B are diagrams for explaining the relationship between the center coordinates (sampling coordinates) of the probe 300 and the fluorescence signal I _i sampled by the probe 300. FIG.

  6A and 6B, the three curves constituting the probe 300 indicate the intensity distribution of the main pinhole image 18-0, the intensity distribution of the sub-pinhole image 18-1, and the radiation PSF by the excitation light spot 100. This is a schematic representation. In FIGS. 6A and 6B, the intensity distributions of the other sub-pinhole images 18-2 to 18-6 are not shown.

First, as shown in FIG. 6A, when the center coordinates (= sampling coordinates) of the probe 300 on the observation target surface P are (x, y), the fluorescence signal I ₀ sampled by the main pinhole 21-0. (X, y) has sensitivity in a region (shaded portion) corresponding to the product of the intensity distribution of the main pinhole image 18-0 and the radiation PSF by the excitation light spot 100.

On the other hand, as shown in FIG. 6B, when the center coordinates (= sampling coordinates) of the probe 300 on the observation target surface P are (x + Δx, y−Δy), the fluorescence signal I sampled in the sub pinhole 21-1. ₁ (x + Δx, y−Δy) has sensitivity in a region (shaded portion) corresponding to the product of the intensity distribution of the sub-pinhole image 18-1 and the radiation PSF by the excitation light spot 100.

Here, consider the following differential fluorescence signal ΔI ₁ (x, y), which can be obtained by subtracting a value corresponding to the fluorescence signal I ₁ (x + Δx, y−Δy) from the fluorescence signal I ₀ (x, y). .

ΔI ₁ (x, y) = I ₀ (x, y) −α · I ₁ (x + Δx, y−Δy) (3)
Α is a subtraction coefficient and 0 <α ≦ 1.

This differential fluorescence signal ΔI ₁ (x, y) is obtained by subtracting the value corresponding to the hatched portion in FIG. 6 (A) from the hatched portion, that is, as shown in FIG. It has sensitivity only in a small area (shaded area) in the vicinity of (x, y). The point response function of the differential fluorescence signal ΔI ₁ (x, y) is expressed by the following equation (4) using the coordinates (u, v) in the probe.

PSF _eff ¹ (u, v) = PSF _det ⁰ (u, v) −α · PSF _det ¹ (u, v) (4)
Here, the point response function of the differential fluorescence signal ΔI _i (x, y) is represented as PSF _eff ⁱ (u, v).

In addition, the description regarding the sub-pinhole image 18-1 and the fluorescence signal I ₁ (x + Δx, y−Δy) is similarly applied to the sub-pinhole image 18-2 and the fluorescence signal I ₂ (x, y−2Δy). apply. The explanation regarding the sub-pinhole image 18-1 and the fluorescence signal I ₁ (x + Δx, y−Δy) is similarly applied to the sub-pinhole image 18-3 and the fluorescence signal I ₃ (x−Δx, y−Δy). apply. The description regarding the sub-pinhole image 18-1 and the fluorescence signal I ₁ (x + Δx, y−Δy) is similarly applied to the sub-pinhole image 18-4 and the fluorescence signal I ₄ (x−Δx, y + Δy). The description regarding the sub-pinhole image 18-1 and the fluorescence signal I ₁ (x + Δx, y−Δy) is similarly applied to the sub-pinhole image 18-5 and the fluorescence signal I ₅ (x, y + 2Δy). The description regarding the sub-pinhole image 18-1 and the fluorescence signal I ₁ (x + Δx, y−Δy) is similarly applied to the sub-pinhole image 18-6 and the fluorescence signal I ₆ (x + Δx, y + Δy) (FIG. 6). (See (D).)

  Further, the above description of the sampling coordinates (x, y) applies similarly to the other sampling coordinates.

Therefore, the arithmetic unit 40 of this embodiment, the fluorescence image _I 0 of the frame memory _{M 0} (x, y), the fluorescence image _I 1 of the frame memory _{M 1} (x, y), the fluorescence image _{I 2} of the frame memory _{M 2} (x, y), the fluorescence image _I 3 of the frame memory _{M 3} (x, y), the fluorescence image _I 4 of the frame memory _{M 4} (x, y), the fluorescence image _I 5 of the frame memory _{M 5} (x, y) By applying the fluorescence image I ₆ (x, y) in the frame memory M ₆ to the following equation (5), a difference fluorescence image ΔI (x, y) is generated, and the difference fluorescence image ΔI (x, y) Is displayed as a super-resolution image of the sample 18 on an image display device (not shown).

ΔI (x, y) = I ₀ (x, y) −α · {I ₁ (x + Δx, y−Δy) + I ₂ (x, y−2Δy) + I ₃ (x−Δx, y−Δy) + I ₄ ( x−Δx, y + Δy) + I ₅ (x, y + 2Δy) + I ₆ (x + Δx, y + Δy)} (5)
This differential fluorescent image ΔI (x, y) has sensitivity only in a very small region (shaded portion) in the vicinity of the sampling coordinates (x, y) as shown in FIG. The point response function of the differential fluorescence image ΔI (x, y) is expressed by the following equation (6) using the coordinates (u, v) in the probe.

PSF _eff (u, v) = PSF _det ⁰ (u, v) −α · {PSF _det ¹ (u, v) + PSF _det ² (u, v) + PSF _det ³ (u, v) + PSF _det ⁴ (u, v) + PSF _det ⁵ (u, v) + PSF _det ⁶ (u, v)} (6)
Here, the point response function of the differential fluorescence image ΔI (x, y) is represented as PSF _eff (u, v).

This point response function PSF _eff (u, v) corresponds to the effective PSF of the present embodiment. The convolution of the effective PSF and the density distribution of the fluorescent material on the observation target surface P is the super-resolution image of the present embodiment. Therefore, in the present embodiment, the super-resolution effect increases as the effective PSF distribution area is narrower.

  Next, the effective PSF of this embodiment will be described.

  In FIG. 7, “direction A” is an effective PSF in the arrangement direction of the main pinhole image and the sub-pinhole image (see symbol A in FIG. 4), and “direction B” is the main pinhole image and the sub-pinhole image. This is the effective PSF in the non-arrangement direction with respect to the hole image (see reference numeral B in FIG. 4), and “normal” is the effective PSF in the conventional case (when there is no sub pinhole). The data in FIG. 7 is a simulation result when the pinhole diameter is assumed to be infinitesimal.

  According to FIG. 7, the effective PSF distribution area in the direction A of the present embodiment is the narrowest, the effective PSF distribution area in the direction B of the present embodiment is the next narrowest, and in any case, the effective PSF distribution area is smaller than the conventional effective PSF distribution area. It can be seen that it is narrow. That is, according to the present embodiment, it can be seen that the super-resolution effect is obtained in any of the directions A and B.

  Next, the saturation factor S will be described.

  FIG. 8 is a diagram showing the relationship between the saturation factor S and the radiation PSF.

  As shown in FIG. 8, the peak of the radiation PSF is flattened as the saturation factor S increases. The greater the degree of flattening, the higher the super-resolution effect of this embodiment.

  However, since it is necessary to increase the intensity of the excitation light in order to increase the saturation factor S, the fading of the sample 18 becomes more intense accordingly. Therefore, the control apparatus 39 of this embodiment makes a user designate the value of the saturation factor S, and sets the power of the laser light source 11 according to the value.

  Therefore, the user of this embodiment can arbitrarily set the balance between resolution and sample damage.

  Next, the subtraction coefficient α will be described.

  FIG. 9 is a diagram showing the relationship between the subtraction coefficient α and the effective PSF. As shown in FIG. 9, depending on the value of the subtraction coefficient α, there is a possibility that a negative ripple may occur in the periphery of the effective PSF. If a negative ripple occurs in the effective PSF, artifacts may occur in the super-resolution image that is the final image. For this reason, in the present embodiment, the optimum value of the subtraction coefficient α is a value in which the negative ripple in the effective PSF is suppressed and the distribution range of the effective PSF is as narrow as possible. In the example of FIG. 9, the optimum value of the subtraction coefficient α is 0.25.

  Further, since the radiation PSF curve depends on the value of the saturation factor S as described above, the optimum value of the subtraction coefficient α also depends on the value of the saturation factor S. For this reason, the arithmetic unit 40 of this embodiment needs to set the subtraction coefficient (alpha) according to the value of the saturation factor S designated by the user. However, if the value of the saturation factor S is determined, the optimum value of the subtraction coefficient α is also uniquely determined.

Therefore, the arithmetic device 40 of this embodiment may store in advance a correspondence relationship between various values of the saturation factor S and the optimum value of the subtraction coefficient α for each of these values in the form of a table or the like. . Based on this correspondence, the arithmetic unit 40 can maintain the subtraction coefficient α at an optimum value regardless of the change of the saturation factor S by the user.
[Supplement of embodiment]
In the present embodiment, the number of sub pinholes formed in the pinhole mask 21 is “6”, but may be a number other than six. In any case, when there are two or more sub-pinholes, it is desirable that two or more sub-pinholes are evenly arranged around the main pinhole. If they are evenly arranged, the distribution of the effective PSF on the observation target surface P can be brought close to an isotropic distribution.

  In the present embodiment, the transmissive pinhole mask 21 is used. However, a reflective pinhole mask may be used instead of the transmissive pinhole mask 21. The reflection type pinhole mask is a mask in which a reflection type pinhole (a minute mirror) is formed instead of a transmission type pinhole (a minute hole).

  In this embodiment, it is assumed that “one type of fluorescent material is excited by one type of excitation light”, but “a case where a plurality of types of fluorescent materials having different fluorescence wavelengths are simultaneously excited by one type of excitation light”. '', `` When multiple types of fluorescent materials with different wavelengths are excited simultaneously with multiple types of excitation light with different wavelengths '', or `` With multiple types of fluorescent materials with different wavelengths of excitation with multiple types of excitation light with different wavelengths '' The present invention can also be applied to “when sequentially excited”.

In addition, when there are a plurality of types of fluorescent materials to be visualized, that is, “when simultaneously exciting a plurality of types of fluorescent materials having different fluorescence wavelengths with one type of excitation light”, “fluorescence wavelengths with a plurality of types of excitation light having different wavelengths. "When simultaneously exciting a plurality of types of fluorescent materials having different wavelengths" and "When sequentially exciting a plurality of types of fluorescent materials having different fluorescence wavelengths with a plurality of types of excitation light having different wavelengths", the wavelengths generated in the sample 18 are different. A plurality of fluorescences are individually detected, the above-described fluorescence images I ₀ ,..., I ₆ are acquired for each wavelength, and the above-described differential fluorescence image ΔI may be calculated for each wavelength.

  Further, when one type of excitation light is used, that is, “when one type of excitation light excites one type of fluorescent substance” or “one type of excitation light with a plurality of types of fluorescent substances having different fluorescence wavelengths. In the case of simultaneous excitation, the filter 13 in FIG. 1 is not essential.

  On the other hand, when the excitation is sequentially performed with a plurality of types of excitation light, that is, when “a plurality of types of fluorescent substances having different fluorescence wavelengths are sequentially excited with a plurality of types of excitation light having different wavelengths”, the filter 13 in FIG. 1 is essential. It becomes.

  In this embodiment, the optical scanning method is adopted as a method of scanning the observation target surface P with the probe 300. However, a stage scanning method may be adopted instead of the optical scanning method.

  In the present embodiment, the reflection type confocal microscope apparatus has been described. However, the present invention can also be applied to a transmission type confocal microscope. Incidentally, in the case of the transmission type, two objective lenses are arranged to face each other with the sample 18 interposed therebetween.

  In the present embodiment, the light to be observed is fluorescence (spontaneously emitted light) generated in the sample 18 in response to the excitation light, but may be other light generated in the sample 18. The light to be observed may be, for example, scattered light generated in the sample 18 in response to illumination light, stimulated emission light generated in the sample 18 in response to excitation light, or the like.

  In this embodiment, the size of the main pinhole and the size of the sub-pinhole are made the same, but the size of the main pinhole and the size of the sub-pinhole are made different, or aberrations are intentionally given. For example, the size of the main pinhole image may be larger than the size of the sub pinhole image. As described above, if the size relationship between the main pinhole image and the sub pinhole image is appropriately adjusted, it is possible to suppress negative ripple generated in the effective PSF curve.

In this embodiment, the distance from the center of the main pinhole image to the center of the sub pinhole is made to coincide with the Airy disk radius a. However, when the excitation light spot cannot be regarded as a point light source image, It may be better to deliberately remove the distance from the center of the hall image to the center of the sub pinhole from the Airy disk radius a.
[Effects of Embodiment]
The confocal microscope apparatus of this embodiment includes an illumination optical system (collimator lens 12, relay lens 16, objective lens 17) that collects illumination light (excitation light, etc.) on the observation target surface (P), and the observation target surface. An observation optical system (objective lens 17, relay lens 16, condensing lens 20) for condensing observation light (fluorescence, scattered light, stimulated emission light, etc.) emitted from the condensing point of the illumination light, and the observation optics A mask portion in which a main pinhole is arranged at a position conjugate with the condensing point with respect to the system (objective lens 17, relay lens 16, condensing lens 20), and a sub pinhole is arranged at a position deviating from the conjugate position. and (pinhole mask 21), a main intensity signal representing the intensity of the observation light having passed through the main pinhole (fluorescent signal I _0), the sub-intensity indicating the intensity of the observation light having passed through the secondary pinhole Signal (fluorescence signal _I 1 ~I ₆₎ and a detection unit which generates a separate (optical detector 23-0～23-6), the observation optical system on the observation target plane (P) (objective lens 17, relay A main pinhole image (18-0), which is an image of the main pinhole formed by the lens 16 and the condenser lens 20), and the sub-pinhole formed by the observation optical system on the observation surface (P). Sub-pinhole images (18-1 to 18-6) as images and the illumination light formed by the illumination optical system (collimator lens 12, relay lens 16, objective lens 17) on the observation target surface (P). A scanning unit (galvano scanner 15) that scans the observation target surface (P) with a probe (300) composed of a condensing point, and the main pinhole image (18−) on the observation target point of the observation target surface (P). Before generated when 0) is located From major intensity signal (fluorescence signal _{I 0),} the observation the subject point the secondary pinhole image (18-1～18-6) is generated when positioned sub intensity signal (fluorescence signals _I 1 ~ I ₆ ) is subtracted from the value to generate an intensity signal (difference fluorescence signal ΔI) of the observation light (fluorescence) with an area smaller than the main pinhole image (18-0) as an emission source Unit (arithmetic unit 40).

  Therefore, the confocal microscope apparatus of this embodiment can observe the observation target surface (super-resolution observation) with a resolution corresponding to a region smaller than the main pinhole image (18-0).

  The intensity of the illumination light (excitation light, etc.) is set to such a height that the amount of observation light (fluorescence, scattered light, stimulated emission light, etc.) generated at the illumination light condensing point is saturated. .

  Further, the distance from the center of the main pinhole image (18-0) to the center of the sub pinhole image (18-1 to 18-6) in the probe (300) matches the Airy disk radius (a). To do.

  Therefore, the confocal microscope apparatus of this embodiment can reliably obtain the super-resolution effect.

  The scanning pitch of the probe (300) on the observation target surface (P) is set to be finer than the width of the probe (300).

  Specifically, the scanning pitch of the probe (300) on the observation target surface (P) is set to be the same as the arrangement pitch (Δx, Δy) from the main pinhole image to the sub pinhole image on the probe. The

  Therefore, the confocal microscope apparatus of this embodiment can efficiently scan the observation target surface (P) with the probe (300).

The degree of saturation (saturation factor S) can be determined by a user, and a subtraction coefficient (α) that is a ratio between the sub-intensity signals (fluorescence signals I _{1 to} I ₆ ) and the value to be subtracted. ) Is set to a value corresponding to the degree of saturation (saturation factor S).

  Therefore, the confocal microscope apparatus of the present embodiment can adjust the super-resolution and can maintain the shape of the effective PSF well regardless of the adjustment. Incidentally, if the shape of the effective PSF is inappropriate and, for example, negative ripples are generated, there is a possibility that artifacts may occur in the super-resolution image generated by the confocal microscope apparatus.

  In the mask portion (pinhole mask 21), a plurality of sub pinholes (21-1 to 21-6) are arranged around the main pinhole (21-0) at equal intervals.

  Therefore, the confocal microscope of the present embodiment can bring the effective PSF closer to an isotropic distribution.

  Further, the wavelength of the illumination light (excitation light) is the same as the excitation wavelength of the fluorescent substance existing on the observation target surface (P), and is detected by the detection units (photodetectors 23-0 to 23-6). The wavelength may be the same as the wavelength of fluorescence generated from the fluorescent material being excited.

  In this case, fluorescence observation of the observation target surface can be performed with super resolution.

DESCRIPTION OF SYMBOLS 11 ... Laser light source, 7 ... Optical fiber, 12 ... Collimating lens, 13 ... Filter, 14 ... Dichroic mirror, 15 ... Galvano scanner, 16 ... Relay lens, 17 ... Objective lens, 18 ... Sample, 19 ... Filter, 20 ... Collection Optical lens, 21 ... pinhole mask, 22-0 to 22-6 ... optical fiber, photodetectors 23-0 to 23-6, 39 ... control device, 40 ... arithmetic unit

Claims (9)

An illumination optical system that collects illumination light on the observation target surface;
An observation optical system for condensing the observation light emitted from the condensing point of the illumination light on the observation target surface;
A mask portion in which a main pinhole is arranged at a position conjugate with the condensing point with respect to the observation optical system, and a sub pinhole is arranged at a position deviating from the conjugate position;
A detection unit that individually generates a main intensity signal indicating the intensity of the observation light that has passed through the main pinhole and a subintensity signal indicating the intensity of the observation light that has passed through the sub pinhole;
A main pinhole image that is an image of the main pinhole formed by the observation optical system on the observation target surface, and a sub pinhole image that is an image of the subpinhole formed by the observation optical system on the observation target surface. And a scanning unit that scans the observation target surface with a probe that includes the illumination light condensing point formed by the illumination optical system on the observation target surface;
Generated when the sub-pinhole image is positioned at the observation target point from the main intensity signal generated when the main pinhole image is positioned at the observation target point of the observation target surface A calculation unit that generates an intensity signal of the observation light with a region smaller than the main pinhole image as an emission source by subtracting a value according to the sub-intensity signal;
A confocal microscope apparatus comprising: The confocal microscope apparatus according to claim 1,
The confocal microscope apparatus is characterized in that the intensity of the illumination light is set to such a height that the amount of the observation light generated at the condensing point of the illumination light is saturated. The confocal microscope apparatus according to claim 1 or 2,
A confocal microscope apparatus characterized in that a distance from the center of the main pinhole image to the center of the sub pinhole image in the probe coincides with an Airy disk radius. In the confocal microscope apparatus according to any one of claims 1 to 3,
The confocal microscope apparatus, wherein a scanning pitch of the probe on the observation target surface is set to be finer than a width of the probe. The confocal microscope apparatus according to claim 4,
The confocal microscope apparatus, wherein a scanning pitch of the probe on the observation target surface is set to be the same as an arrangement pitch from the main pinhole image to the sub pinhole image on the probe. The confocal microscope apparatus according to claim 2,
The degree of saturation can be determined by the user,
A confocal microscope apparatus, wherein a subtraction coefficient, which is a ratio between the sub-intensity signal and the value to be subtracted, is set to a value corresponding to the degree of saturation. In the confocal microscope apparatus according to any one of claims 1 to 6,
The confocal microscope apparatus characterized in that a plurality of the sub pinholes are arranged at equal intervals around the main pinhole in the mask portion. In the confocal microscope apparatus according to any one of claims 1 to 7,
The wavelength of the illumination light is
It is the same as the excitation wavelength of the fluorescent substance present on the observation target surface,
The detection wavelength of the detection unit is
A confocal microscope apparatus having the same wavelength as that of fluorescence generated from the fluorescent substance being excited. The illumination light is condensed on the observation target surface by the illumination optical system,
Condensing the observation light emitted from the condensing point of the illumination light on the observation target surface with an observation optical system,
A main pinhole is arranged at a position conjugate with the condensing point with respect to the observation optical system, and a sub pinhole is arranged at a position deviating from the conjugate position,
Separately generating a main intensity signal indicating the intensity of the observation light passing through the main pinhole and a subintensity signal indicating the intensity of the observation light passing through the sub pinhole;
A main pinhole image that is an image of the main pinhole formed by the observation optical system on the observation target surface, and a sub pinhole image that is an image of the subpinhole formed by the observation optical system on the observation target surface. And scanning the observation target surface with a probe comprising a focusing point of the illumination light formed by the illumination optical system on the observation target surface,
Generated when the sub-pinhole image is positioned at the observation target point from the main intensity signal generated when the main pinhole image is positioned at the observation target point of the observation target surface A confocal observation method, wherein an intensity signal of the observation light having a region smaller than the main pinhole image as an emission source is generated by subtracting a value corresponding to the sub-intensity signal.

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