JP2015031665A - Particle counter and particle counting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a particle counter capable of counting the number of particles while identifying the shape, material, size of particles in a liquid in detail.SOLUTION: A particle counter 3 counts the number of particles according to their size on the basis of a measurement value of breaking light and a plurality of scattering light when light is radiated on the particles in a liquid (lubrication oil). The particle counter 3 includes material identification means (step S3) for identifying the material of the particles on the basis of the measurement value of the breaking light and the plurality of scattering light and shape identification means for identifying the shape of the particles on the basis of the measurement value of the breaking light and the plurality of scattering light.

Description

  The present invention relates to a particle counting device and a particle counting method, and more particularly to a particle counting device and a particle counting method capable of counting the number of particles while identifying in detail the properties of particles in a liquid.

  In recent years, in a state diagnosis of a mechanical system or the like, a particle size distribution of wear particles in lubricating oil is monitored online using a particle counter (also referred to as “particle counter”). As this particle counting device, a device that counts the number of particles for each size based on the measured values of the blocking light and the plurality of scattered light when the particles in the lubricating oil are irradiated with light is known (for example, , See Patent Document 1).

JP 2007-225335 A

  However, since the particle counter of Patent Document 1 uses blocking light and scattered light, it cannot identify the properties of the particles in detail like the ferrography method or the SOAP method. As a result, even if the particle counter is used, the accuracy of online state diagnosis of a mechanical system or the like cannot be dramatically improved.

  Note that Patent Document 1 describes that a particle material is identified using a plurality of measured values of scattered light (see paragraph [0020] and the like). However, it is difficult to identify the properties of particles in detail from only the measured values of a plurality of scattered lights.

  As described above, the present invention has been made in view of the above-described present situation, and provides a particle counting apparatus and a particle counting method capable of counting the number of particles while identifying in detail the properties of particles in a liquid. Objective.

The present inventors have found that the properties of particles can be identified in detail by using measured values of blocking light and a plurality of scattered light, and have completed the present invention. In addition, as a property of the said particle | grain, a material, a shape, size, etc. can be mentioned, for example.
In order to solve the above problem, the invention according to claim 1 is characterized in that the number of particles is determined for each particle size based on the measured values of the blocking light and the plurality of scattered lights when the particles in the liquid are irradiated with light. It is a particle counting device for counting, and includes a material identifying means for identifying the material of the particles based on the measured values of the blocking light and the plurality of scattered lights.
The gist of a second aspect of the present invention is that, in the first aspect of the present invention, the apparatus further comprises shape identifying means for identifying the shape of the particle based on the measured values of the blocking light and the plurality of scattered light.
In order to solve the above-mentioned problem, the invention according to claim 3 is characterized in that the number is determined for each size of the particles based on the measured values of the blocking light and the plurality of scattered lights when the particles in the liquid are irradiated with light. A particle counting method for counting, wherein the measured values of the blocking light and the plurality of scattered lights are indicated on a multidimensional graph, or the material of the particles is identified by using the intensity distribution of the plurality of scattered lights. The gist is to count the number for each size and material of the particles based on the measured values of the blocking light and the plurality of scattered lights.
In order to solve the above problem, the invention according to claim 4 is characterized in that the number of particles for each size of the particles is determined based on measured values of the blocking light and the plurality of scattered lights when the particles in the liquid are irradiated with light. A particle counting method for counting, wherein the measured values of the blocking light and the plurality of scattered lights are indicated on a multidimensional graph, or the shape of the particles is identified by using the intensity distribution of the plurality of scattered lights. The gist is to count the number for each size and shape of the particles based on the measured values of the blocking light and the plurality of scattered lights.

According to the particle counting apparatus of the present invention, the material of the particle is identified by the material identifying means based on the measured values of the blocking light and the plurality of scattered lights. Thereby, the number of particles can be counted while identifying the properties of the particles in the liquid in detail.
In addition, in the case where shape identifying means for identifying the shape of the particles based on the values of the blocking light and the plurality of scattered lights is provided, the number of particles is counted while further identifying the properties of the particles in the liquid. be able to.

According to the particle counting method of the present invention, the measured values of the blocking light and the plurality of scattered lights are shown on the multidimensional graph, or the particle material is identified by using the intensity distribution of the plurality of scattered lights, The number is counted for each particle size and material based on the measured values of the plurality of scattered light. Thereby, the number of particles can be counted while identifying the properties of the particles in the liquid in detail.
According to another particle counting method of the present invention, the measured values of the blocking light and the plurality of scattered lights are shown on a multidimensional graph, or the shape of the particles is changed by using the intensity distribution of the plurality of scattered lights. When identifying and counting the number of particles for each size and shape based on the measured values of the blocking light and the plurality of scattered light, the number of particles can be determined while identifying the properties of the particles in the liquid in detail. Can be counted.

The present invention will be further described in the following detailed description with reference to the drawings referred to, with reference to non-limiting examples of exemplary embodiments according to the present invention. Similar parts are shown throughout the several figures.
1 is a schematic diagram of a diagnostic system including a particle counter according to Example 1. FIG. It is a schematic diagram of the said particle | grain counter. It is a flowchart figure for demonstrating the counting process by the said particle | grain counter. It is a flowchart figure for demonstrating the diagnostic process by the said diagnostic system. It is operation | movement explanatory drawing of the said particle | grain counter, (a) shows the state which counts a bubble, (b) shows the state which counts metal powder. It is operation | movement explanatory drawing of the said particle | grain counter, (a) shows the case where particle | grains are silica sand, (b) shows the case where particle | grains are water. It is operation | movement explanatory drawing of the said particle | grain counter, (a) shows the case where a particle is a metal powder, (b) shows the case where a particle is a bubble. It is explanatory drawing for demonstrating the diagnostic process by the said diagnostic system, (a) shows a particle size distribution, (b) shows a particle size distribution ratio, (c) Shows the particle size distribution ratio of another form. . FIG. 4 is a schematic diagram illustrating a particle counting device according to a second embodiment. It is a flowchart figure for demonstrating the counting process by the said particle | grain counter. It is operation | movement explanatory drawing of the said particle | grain counter. It is operation | movement explanatory drawing of the said particle | grain counter. It is explanatory drawing for demonstrating the particle | grain counter of another form (circular arrangement | positioning of the some scattered light photoreceptor). Furthermore, it is explanatory drawing for demonstrating the particle counter of other forms (dome shape arrangement | positioning of a some scattered light photoreceptor), (a) shows the longitudinal cross-sectional view of a particle counter, (b), The bb sectional view taken on the line of (a) is shown.

  The items shown here are exemplary and illustrative of the embodiments of the present invention, and are the most effective and easy-to-understand explanations of the principles and conceptual features of the present invention. It is stated for the purpose of providing what seems to be. In this respect, it is not intended to illustrate the structural details of the present invention beyond what is necessary for a fundamental understanding of the present invention. It will be clear to those skilled in the art how it is actually implemented.

<Particle counter>
The particle counter according to the present embodiment is a particle counter (3, 3) that counts the number of particles for each size based on the measured values of the blocking light and the plurality of scattered light when the particles in the liquid are irradiated with light. 33) provided with material identification means (step S3) for identifying the material of the particles based on the measured values of the blocking light and the plurality of scattered lights (see, for example, FIGS. 3 and 10).

  Examples of the “liquid” include lubricating oil, cleaning liquid, water, and chemical liquid. Examples of the “particles” include metal powder, glass, sand, other solid materials, water, and bubbles. The “blocking light” means light blocked by particles in the liquid. Further, the “scattered light” means light scattered by particles in the liquid.

  As a particle counter according to the present embodiment, for example, a form including shape identifying means (step SS1) for identifying the shape of a particle based on measured values of blocking light and a plurality of scattered light (see, for example, FIG. 10). Can be mentioned. The “shape” means a two-dimensional shape or a three-dimensional shape.

  In the case of the above-mentioned form, for example, a wear form identifying means (step SS2) for identifying the wear form according to the shape of the particles can be provided (see, for example, FIG. 10). Thereby, the number of particles can be counted while identifying the properties of the particles in the liquid in more detail.

  Here, the material identification means can identify the material of the particle by, for example, showing the measured values of the blocking light and the plurality of scattered lights on a multidimensional graph, or using the intensity distribution of the plurality of scattered lights. (See, for example, FIG. 6, FIG. 7 and FIG. 11). The shape identification means can identify the shape of the particle by, for example, showing the measured values of the blocking light and the plurality of scattered lights on a multidimensional graph, or using the intensity distribution of the plurality of scattered lights (for example, FIG. 6, FIG. 7 and FIG. 11 etc.).

<Particle counting method A>
The particle counting method A according to the present embodiment is a particle counting method in which the number is counted for each particle size based on the measured values of the blocking light and the plurality of scattered lights when the particles in the liquid are irradiated with light. The measured values of the blocking light and the plurality of scattered lights are indicated on the multidimensional graph, or the particle material is identified by using the intensity distribution of the plurality of scattered lights, and the measured values of the blocking light and the plurality of scattered lights are measured. Based on the above, the number of particles is counted for each size and material (see, for example, FIG. 6, FIG. 7 and FIG. 11). The particle counting method A according to the present embodiment can use, for example, the particle counting device according to the above-described embodiment.

<Particle counting method B>
The particle counting method B according to the present embodiment is a particle counting method that counts the number of particles for each size based on the measured values of the blocking light and the plurality of scattered light when the particles in the liquid are irradiated with light. The measured values of blocking light and multiple scattered light are shown on a multidimensional graph, or the shape of the particle is identified by using the intensity distribution of multiple scattered light, and the blocking light and multiple scattered light are measured. The number is counted for each particle size and shape based on the value (see, for example, FIG. 6, FIG. 7 and FIG. 11). The particle counting method B according to the present embodiment can use, for example, the particle counting device according to the above-described embodiment. Furthermore, the particle counting methods A and B can be used in combination.

  In addition, the code | symbol in the parenthesis of each structure described in the said embodiment shows the correspondence with the specific structure as described in the Example mentioned later.

  Hereinafter, the present invention will be specifically described with reference to the drawings.

<Example 1>
(1) Configuration of Diagnostic System The diagnostic system 1 according to the present embodiment includes a particle counting device 3 and a computer 5 connected to the particle counting device 3 via a network 4 as shown in FIG. ing. In the present embodiment, a diagnosis system 1 that performs state diagnosis of a lubrication target portion (for example, a bearing portion, a gear portion, a sliding portion, etc.) of a mechanical system (for example, a generator, a prime mover, an aircraft, a ship, a vehicle, or the like). In addition, as an example of the “particle counting device” according to the present invention, a particle counting device 3 that counts particles in the lubricating oil used in the lubrication target portion is illustrated.

  As shown in FIG. 2, the particle counting device 3 includes a measuring unit 8 (also referred to as “cell”) through which lubricating oil flows, a light emitter 9 made of a semiconductor laser, etc., and a blocking light made up of a photodiode or the like. A light receiving body 10, a first scattered light receiving body 11 and a second scattered light receiving body 12 made of a photodiode or the like, and a control unit 13 (see FIG. 1) for performing particle counting processing to be described later are provided.

  The measurement unit 8 is formed in a translucent tubular shape. As shown in FIG. 1, pipes 15 and 16 connected to the lubrication target portion of the mechanical system are communicated with the upstream end side and the downstream end side of the measurement unit 8, respectively. The pipe 15 is provided with a pump 17 that pumps the lubricating oil to the measuring unit. It is assumed that lubricating oil flows through the measuring unit 8 in a direction substantially orthogonal to the paper surface of FIG.

  As shown in FIG. 2, the light emitter 9 irradiates the lubricating oil flowing through the measuring unit 8 with light (for example, laser light). The blocking light receiver 10 is disposed on the opposite side of the light emitter 9 via the measuring unit 8 on the optical axis of the light emitted from the light emitter 9. The blocking light receiver 10 receives the blocking light blocked by the particles p in the lubricating oil and converts it into a predetermined blocking light pulse signal (that is, a measured value). The pulse height of the blocking light pulse signal indicates a value proportional to the size (for example, particle size) of the particle p. Further, each of the first and second scattered light receivers 11 and 12 is disposed on the outer peripheral side of the optical axis of the irradiation light from the light emitter 9. The first and second scattered light receivers 11 and 12 receive the scattered light scattered by the particles p in the lubricating oil and convert it into a predetermined scattered light pulse signal (that is, a measured value).

  The control unit 13 is electrically connected to the pump 17, the light emitter 9, the light receivers 10, 11, and 12. As shown in FIG. 3, the control unit 13 executes a particle counting process described below.

  The control unit 13 acquires information on the lubricating oil (for example, flow rate) and grasps information on the component (for example, driving time of the light emitter) (step S1). Next, the measured value from each photoreceptor 10, 11, 12 is acquired (step S2). Next, the particle material is identified based on the measured value (step S3), and the number is counted for each particle size and material (step S4). Thereafter, it is determined whether or not the measurement is finished after a predetermined measurement time has elapsed (step S5). As a result, when the measurement is not finished (NO in step S5), the above steps S2 to S5 are repeated. On the other hand, when the measurement is finished (YES in step S5), a cleaning command for cleaning the measuring unit 8 is output by flowing lubricating oil to the measuring unit 8 (step S6).

  Here, in the particle material identification process (step S3 in FIG. 3), the particle material is identified by plotting each measured value on a multidimensional graph. Specifically, for example, as shown in FIGS. 6 and 7, the measured value of the blocking light receiver 10 is shown on the X axis, the measured value of the first scattered light receiver 11 is shown on the Y axis, and the second scattered light is shown. The material of the particle is identified by indicating the measured value of the light receiver 12 on the Z axis.

  For example, when the particle p is glass (silica sand), as shown in FIG. 6A, since there is almost no scattered light, plot points are concentrated in the vicinity of the X axis. Further, when the particle p is water, as shown in FIG. 6B, the scattered light with respect to the first and second scattered light photoreceptors 11 and 12 is substantially uniform and relatively small, so the X axis to the Y axis. The plot points are concentrated at locations slightly separated in the direction and the Z-axis direction. When the particles p are metal powder, irregular reflection occurs because the metal powder has an irregular shape (see FIG. 5B). And as shown to Fig.7 (a), since the scattered light with respect to the 1st and 2nd scattered light light-receiving bodies 11 and 12 differs, and the intensity difference is comparatively large, it is out of the X-axis from the Y-axis direction and the Z-axis direction. Plot points are concentrated at locations that are greatly separated in one of the axial directions. Further, when the particle p is a bubble, since the bubble is substantially spherical, the scattered light with respect to the first and second scattered light receivers 11 and 12 becomes substantially equal (see FIG. 5A). Then, as shown in FIG. 7B, the plot points are concentrated in the conical region S whose vertex is the intersection of the XYZ axes. Therefore, if a plurality of coordinate areas on the multidimensional graph are set in advance according to the material of the particle, the material of the particle can be identified based on the coordinate position of the measurement value on the multidimensional graph.

  The control process of the control unit 13 may be realized by either hardware or software, and preferably includes a microcontroller (microcomputer) including a CPU, a memory (ROM, RAM, etc.), an input / output circuit, and the like. A peripheral circuit such as an input / output interface can be provided at the center.

  As shown in FIG. 4, the computer 5 executes a diagnostic process described below. That is, the computer 5 calculates the particle size distribution A (see FIG. 8A) based on the measurement result of the control unit 13 (that is, the particle size and the number information for each material) (step ST1). Next, the particle size distribution ratio B (see FIG. 8B) and the like are calculated based on the calculated particle size distribution A and the stored past particle size distribution A (step ST2). This particle size distribution ratio B indicates the ratio of change with time of the particle size of a predetermined size of interest (A μm and B μm in FIG. 8B).

  In the present embodiment, the particle size distribution ratio B (see FIG. 8B) of particles having a predetermined size is adopted, but the present invention is not limited to this. For example, as shown in FIG. You may employ | adopt particle size distribution ratio B 'showing the ratio of the change with time progress of the whole distribution.

  Next, for example, it is determined whether or not it is abnormal by comparing the particle size distribution ratio B and the like with a preset threshold value (step ST3). As a result, when it is determined that there is an abnormality (YES determination in step ST3), the abnormality is notified by an alarm or the like (step ST4). On the other hand, if it is determined that there is no abnormality (NO determination in step ST3), the diagnosis process is terminated.

(2) Operation of Diagnostic System Next, the operation of the diagnostic system 1 having the above configuration will be described. In the particle counting device 3, as shown in FIG. 3, lubricating oil information and component information are acquired (step S1), and then measurement is started and each measured value from each photoreceptor is acquired (step S1). S2).

  Next, each measured value is plotted on a multidimensional graph to identify the particle material (step S3), and the number is counted for each particle size and material (step S4). Thereafter, when the measurement is completed by repeating the above steps S2 to S4 during a predetermined measurement time (YES determination in step S5), the measurement unit 8 is washed by flowing lubricating oil (step S6).

  On the other hand, as shown in FIG. 4, the computer 5 calculates the particle size distribution A and the particle size distribution ratio B based on the size of particles and the total number of materials (steps ST1 and ST2). Next, when it is determined that there is an abnormality based on the particle size distribution ratio B or the like (YES determination in step ST3), an abnormality notification is performed by an alarm or the like (step ST4).

(3) Effects of the Example According to the particle counting device 3 of the present example, the material of the particles is identified based on the measured values of the blocking light and the plurality of scattered lights by the material identifying means (step S3 in FIG. 3). Thereby, the number of particles can be counted while identifying the properties of the particles in the lubricating oil in detail.

  In the present embodiment, the material of the particle is identified by showing the measured values of the blocking light and the plurality of scattered lights on a multidimensional graph. Thereby, the number of particles can be counted while further identifying the properties of the particles in the lubricating oil.

  Furthermore, in this embodiment, since the diagnostic system 1 is configured by including the particle counting device 2 and the computer 5 connected to the particle counting device 2 via the network 4, online remote diagnosis is preferably performed. can do.

<Example 2>
Next, the configuration of the diagnostic system according to the second embodiment will be described. In the diagnostic system of the second embodiment, the same components as those of the diagnostic system 1 according to the above-described embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and the particle counting apparatus that is mainly the difference will be described in detail.

(1) Configuration of Diagnostic System A diagnostic system 31 according to this embodiment includes a particle counter 33 and a computer 5. As shown in FIG. 9, the particle counter 33 includes a measuring unit 8, a light emitter 9, a blocking light receiver 10, a plurality of first scattered light receivers 11a to 11g, and a second scattered light receiver 12a. To 12 g and the control unit 13.

  Each of the first and second scattered light receivers 11a to 11g and 12a to 12g is arranged so as to be aligned on an axis substantially parallel to the optical axis of the irradiation light from the light emitter 9. These first and second scattered light receivers 11a to 11g and 12a to 12g receive scattered light scattered by the particles p in the lubricating oil and convert them into predetermined scattered light pulse signals (that is, measured values). To do.

  As shown in FIG. 10, the control unit 13 executes a particle counting process described below. In addition to executing various processes (steps S1 to S6) substantially similar to the diagnostic system 1 of the above embodiment, the control unit 13 performs a particle shape identification process (step SS1) and a particle wear form identification process (step S1). Step SS2) is executed.

  In the particle shape identification process (step SS1 in FIG. 10), as shown in FIG. 11, it is obtained from the measured values of the blocking light receiver 10 and the measured values of the plurality of first scattered light receivers 11a to 11g. The shape of the particles is identified based on the intensity distribution of the first scattering patterns P1a to P4a and the intensity distribution of the second scattering patterns P1b to P4b obtained from the measured values of the plurality of second scattered light receivers 12a to 12g. To do. The scattering patterns P1a to P4a and P1b to P4b are arranged with the positions of the scattered light receivers 11a to 11g (12a to 12g) in the optical axis direction of the irradiation light on the horizontal axis, A linear pattern (that is, intensity distribution of a plurality of scattered lights) obtained by taking the value of the pulse height (that is, the measured value) of the scattered light pulse signal of the scattered light receiver and further interpolating the value of each pulse height. ).

  For example, when the measured value of the blocking light receiver 10 is a relatively small value and the first and second scattering patterns P1a and P1b are different, the flaky metal powder M1 (see FIG. 12A). Identified. Further, when the measured value of the blocking light receiver 10 is a relatively large value and the first and second scattering patterns P2a and P2b are different, the curled metal powder M2 (see FIG. 12B). Identified. Further, when the measured value of the blocking light receiver 10 is relatively small and the first and second scattering patterns P3a and P3b are substantially equal, the ball-shaped metal powder M3 (see FIG. 12C). ).

  In the particle wear form identifying process (step SS2 in FIG. 10), the wear form is identified according to the particle shape identified in the particle shape identifying process. Here, it is known that the flaky metal powder M1 is normal wear particles generated by normal sliding wear of the machine. Further, it is known that the curled metal powder M2 is cutting wear particles that are generated when the metal surface is cut by mixing sand or the like. Furthermore, it is known that the ball-shaped metal powder M3 is fatigue wear particles generated by bearing fatigue. Therefore, when the particle shape is the flaky metal powder M1, it is identified as normal wear. Further, when the shape of the particle is the curled metal powder M2, it is identified as cutting wear. Further, when the particle shape is the ball-shaped metal powder M3, it is identified as fatigue wear.

  In the particle material identification process (step S3 in FIG. 10) in the present embodiment, the measurement value of the blocking light receiver 10 and the plurality of first scattered light receivers are substantially the same as in the diagnosis system 1 of the above embodiment. By plotting the measured value of one photoreceptor among 11a to 11g and the measured value of one photoreceptor among the plurality of second scattered light photoreceptors 12a to 12b on a multidimensional graph, the material of the particles can be determined. Identify (see FIGS. 6 and 7). However, a plurality of multidimensional graphs may be formed according to the number of the first and second scattered light photoreceptors 11a to 11g and 12a to 12g, or a specific multidimensional graph (for example, a multiaxial graph having four or more axes or an xyz) If a graph having a time axis in addition to the axis is formed, the material of the particles can be identified more accurately. Furthermore, the material of the particles may be identified using the intensity distribution of the plurality of scattered lights as described above.

  Moreover, in the said Example, although the shape of particle | grains was identified based on the intensity distribution of the measured value of several scattered light (step SS1 of FIG. 10), it is not limited to this, For example, blocking light and several The shape of the particle may be identified by showing the measured value of the scattered light on a multidimensional graph. In this case, for example, a plurality of multidimensional graphs can be formed according to the number of the plurality of scattered light photoreceptors, or a specific multidimensional graph (for example, a multiaxis graph having four or more axes or an xyz axis can be set with a time axis). Or the like).

(2) Operation of Diagnostic System Next, the operation of the diagnostic system 31 having the above configuration will be described. In the diagnostic system 31, in addition to performing substantially the same operation as the diagnostic system 1 of the above embodiment, as shown in FIG. 10, the measured values of the blocking light emitter 10 and the first and second scattering patterns P1a to P4a. The shape of the particles is identified based on P1b to P4b (step SS1). Next, the wear form is identified based on the shape of the particles (step SS2). This wear form is displayed by display means such as a display monitor.

(3) Effects of the Example According to the particle counting device 33 of the present example, in addition to the effects similar to those of the particle counting device 3 of the above example, the following effects can be obtained. That is, in the present embodiment, a shape identifying means (step SS1 in FIG. 10) for identifying the shape of the particle based on the values of the blocking light and the plurality of scattered lights is provided. Thereby, the number of particles can be counted while further identifying the properties of the particles in the lubricating oil.

  In this embodiment, the shape of the particle is identified by using the intensity distribution of a plurality of scattered lights. Thereby, the number of particles can be counted while further identifying the properties of the particles in the lubricating oil.

  Furthermore, in this embodiment, a wear form identifying means (step SS2 in FIG. 10) for identifying the wear form according to the shape of the particle is provided. Thereby, the number of particles can be counted while further identifying the properties of the particles in the lubricating oil.

  In the present invention, the present invention is not limited to the above embodiment, and various modifications can be made within the scope of the present invention depending on the purpose and application. That is, in the above embodiment, the plurality of scattered light receivers 11a to 11g and 12a to 12g are arranged side by side on a straight line. However, the present invention is not limited to this, and a plurality of scattered light receivers are arranged side by side on a curve. You may make it do. Further, for example, as shown in FIG. 13, a plurality of scattered light receivers 11a to 11i and 12a to 12i may be arranged side by side on an arc centered on the intersection of the optical axis of light and the measurement unit. . Furthermore, for example, as shown in FIG. 14, a plurality of scattered light receivers may be arranged in a three-dimensional shape in a dome shape. Further, a plurality of scattered light receivers may be arranged in a three-dimensional shape in a cylindrical shape.

  Further, in the above embodiment, the form in which each measurement value is plotted on a multidimensional graph to identify the material and shape of the particle is exemplified, but the present invention is not limited to this. For example, each measurement value and a predetermined correlation The material and shape of the particles may be identified based on the following parameters.

  In the above embodiment, the flaky metal powder M1, the curled metal powder M2, the ball-shaped metal powder M3, etc. are identified as the shape of the particles. However, the present invention is not limited to this. Further, a flat metal powder, a flat metal powder having a straight edge, or the like may be identified.

  Further, in the above embodiment, normal wear, cutting wear, fatigue wear, and the like are identified as the form of particle wear. However, the present invention is not limited to this, for example, in addition to these, abnormal sliding wear, corrosion wear, Adhesive wear, melt wear, etc. may be identified.

  Further, in the above-described embodiment, the measurement unit 8 may be measured by flowing the lubricating oil being used in the mechanical system in real time, or may be measured by flowing the lubricating oil previously collected by the mechanical system in a batch manner. Good.

  Further, in the above embodiment, an operation stop signal is output to the mechanical system by the state diagnosis based on the particle size distribution ratio B, the wear state of the lubrication target portion based on the particle size distribution ratio, the cause of the occurrence, the wear countermeasure, and the implementation One type or a combination of two or more types of times may be displayed.

  Moreover, in the said Example, you may comprise so that operation, such as a measurement start and stop of the particle | grain counters 3 and 33, a backwash of lubricating oil, can be implemented from remote.

  Further, in the above embodiment, the replacement period of the component part may be notified according to information on the component part (for example, the driving time of the light emitter).

  Further, in the above embodiment, the diagnostic processing is performed by the computer 5 that is separate from the particle counting devices 3 and 33. However, the present invention is not limited to this. May be performed.

  The foregoing examples are for illustrative purposes only and are not to be construed as limiting the invention. Although the invention has been described with reference to exemplary embodiments, it is to be understood that the language used in the description and illustration of the invention is illustrative and exemplary rather than limiting. As detailed herein, changes may be made in its form within the scope of the appended claims without departing from the scope or spirit of the invention. Although specific structures, materials and examples have been referred to in the detailed description of the invention herein, it is not intended to limit the invention to the disclosure herein, but rather, the invention is claimed. It covers all functionally equivalent structures, methods and uses within the scope.

  The present invention is not limited to the embodiments described in detail above, and various modifications or changes can be made within the scope of the claims of the present invention.

  It is widely used as a technique for counting the number of particles contained in a liquid such as a lubricating oil, a cleaning liquid, a cooling water, and a drainage of a mechanical system.

  DESCRIPTION OF SYMBOLS 1,31; Diagnostic system 3,33; Particle counter 10; Blocking light receiver 11, 11a-11g; First scattered light receiver 12a, 12a-12g; Second scattered light receiver.

Claims (4)

A particle counting device that counts the number of each particle size based on the measured values of the blocking light and the plurality of scattered light when the particles in the liquid are irradiated with light,
A particle counter comprising: a material identification unit that identifies a material of the particle based on the measured values of the blocking light and the plurality of scattered light.   The particle counter according to claim 1, further comprising a shape identification unit that identifies the shape of the particle based on the measurement values of the blocking light and the plurality of scattered light. A particle counting method for counting the number of particles for each size based on measured values of blocking light and a plurality of scattered light when irradiating particles in a liquid,
Showing the measured values of the blocking light and the plurality of scattered light on a multidimensional graph, or identifying the material of the particles by using the intensity distribution of the plurality of scattered light,
A particle counting method, wherein the number is counted for each size and material of the particles based on measured values of the blocking light and the plurality of scattered lights. A particle counting method for counting the number of particles for each size based on measured values of blocking light and a plurality of scattered light when irradiating particles in a liquid,
The measured values of the blocking light and the plurality of scattered lights are shown on a multidimensional graph, or the shape of the particles is identified by using the intensity distribution of the plurality of scattered lights,
A particle counting method, wherein the number is counted for each size and shape of the particles based on measured values of the blocking light and the plurality of scattered lights.

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