JP2015027638A - Cleaning device and cleaning method of box-like body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning device and a cleaning method of a box-like body enabling the box-like body to be certainly cleaned without depending on hands and without scattering a removed foreign matter.SOLUTION: According to a cleaning device 50 of the present invention, a peripheral edge part 19 of a body part 14 is first loaded on a top board 64 of a device body 52. Next, gas in an internal space 40 of the body part 14 is sucked by a gas suction device 54, and the peripheral edge part 19 of the body part 14 is adhered to the top board 64 of the device body 52. Next, clean gas in a clean room is injected toward a groove 24 of the body part 14 from a plurality of nozzles 56 of a gas injection device 58 while sucking the air in the internal space 40 of the body part 14 by the gas suction device 54. Thus, a foreign matter adhered to grooves 24, 26 and an inner wall surface 28 of the body part 14 is blown away by the clean air, so that the grooves 24, 26 and the inner wall surface 28 of the body part 14 are certainly cleaned. Then, the blown foreign matter is sucked by the gas suction device 54 and collected in a HEPA filter 78.

Description

  The present invention relates to a box-shaped body cleaning apparatus and a cleaning method.

  Patent Document 1 discloses a glass plate storage box used in an FPD (Flat Panel Display) such as a liquid crystal display, a plasma display, and an organic EL display. The glass plate is stored in this storage box in a state in which the cleanliness of the main surface of the glass plate is maintained, and is transported, for example, from the glass plate manufacturing factory to the display manufacturing factory.

  The storage box (glass substrate carrying box) of Patent Document 1 is composed of a single foam molded body made of a polyolefin resin foam in order to reduce weight and improve cushioning properties. Moreover, the storage box of Patent Document 1 includes a main body portion and a lid body that are provided with an opening portion on one side and a bottom portion on the other side. A pair of inner wall surfaces facing each other in the main body are formed with a groove into which the peripheral edge of the glass plate is inserted. The grooves hold the glass plate in a vertical position or a horizontal position so as not to contact each other. . Further, Patent Document 1 discloses that a groove may be formed in the lid. In the specification of the present application, the main body and the lid constituting the storage box are referred to as a box-like body.

  When the storage box is returned from the display manufacturing plant to the glass plate manufacturing plant, it is washed at the glass plate manufacturing plant to remove foreign matter such as fine glass cullet and dust adhered to the main body and the inner wall surface of the lid. Is done. Conventional cleaning of storage boxes has been performed manually by an operator using a vacuum cleaner.

Japanese Patent No. 2552625

  As described above, since the conventional cleaning method of the storage box is manual, there is a problem that it takes time and labor. In addition, when the storage box becomes large, there is a problem that the worker has to perform the cleaning work with the upper body in the internal space of the main body, which forces the worker to work hard. Furthermore, since it is a manual cleaning method using a vacuum cleaner, the cleanliness after cleaning varied.

  On the other hand, as another cleaning method, there is a method in which a compressed gas is jetted onto the main body of the storage box and the inner wall surface of the lid, and the foreign matter adhered to the inner wall surface due to static electricity or the like is blown away. According to this cleaning method, there is an advantage that foreign matters can be reliably removed, and the cleanliness after cleaning becomes substantially uniform.

  However, the cleaning place of the storage box is generally implemented in a clean room in order to improve the cleanliness of the storage box. For this reason, when the foreign matter blown off by the compressed gas is scattered in the clean room, the clean room is contaminated. Therefore, the cleaning method of simply injecting the compressed gas cannot be employed as it is.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a cleaning device and a cleaning method for a box-shaped body that can be reliably cleaned without being manually scattered and without scattering the removed foreign matter. To do.

  In one aspect of the present invention, in order to achieve the above object, in a box-shaped body cleaning device in which an opening is provided on one side and a bottom is provided on the other side, an opening is provided on a wall surface. An apparatus main body having a space portion in which a peripheral edge portion of the opening of the box-shaped body is brought into contact with the peripheral edge portion and communicated with the internal space of the box-shaped body via the open portion, and the internal space of the box-shaped body Gas suction means for sucking the gas through the open portion and the space portion of the apparatus main body, and gas injection means for injecting compressed gas toward the inner wall surface of the box-shaped body. A box-shaped body cleaning apparatus is provided.

  One embodiment of the present invention uses the box-shaped body cleaning device of the present invention, and sucks the gas in the internal space of the box-shaped body by the gas suction means, while supplying compressed gas from the gas jetting means to the inside of the plate-shaped body. Provided is a box-shaped body cleaning device characterized by spraying on a wall surface.

  According to one aspect of the present invention, first, the peripheral edge of the opening of the box-shaped body is brought into contact with the peripheral edge of the opening of the main body of the cleaning apparatus. Next, the gas in the internal space of the box-shaped body is sucked by the gas suction means through the opening portion and the space portion of the apparatus main body, and the peripheral portion of the opening of the box-shaped body is changed to the peripheral portion of the open portion of the apparatus main body. Adhere to (vacuum adsorption). Thereby, the internal space of a box-shaped body and the space part of an apparatus main body are interrupted | blocked from external air. Next, while sucking the gas in the internal space of the box-like body by the gas suction means, that is, while maintaining the close contact state, compressed gas is jetted from the gas jetting means onto the inner wall surface of the plate-like body. Thereby, since the foreign material adhering to the inner wall surface of a box-shaped body is blown away by compressed gas, the inner wall surface of a box-shaped body is wash | cleaned reliably. The blown-out foreign matter is sucked and collected by the gas suction means.

  Therefore, according to one aspect of the present invention, it is possible to reliably clean the box-shaped body without relying on human hands and without scattering the removed foreign matter outside the cleaning apparatus.

  One aspect of the present invention preferably includes a static electricity removing means for removing static electricity on the inner wall surface of the box-shaped body.

  According to one aspect of the present invention, the foreign matter attached to the inner wall surface of the box-like body can be reliably removed by the ions necessary for static elimination discharged from the static electricity removing means. Further, since the removed foreign matter is neutralized, it can be prevented that the foreign matter reattaches to the inner wall surface of the box-like body.

  One aspect of the present invention preferably includes moving means for moving at least one of the gas ejecting means and the static electricity removing means within the internal space of the box-shaped body.

  According to one aspect of the present invention, the moving means moves at least one of the gas jetting means or the static electricity removing means within the internal space of the box-shaped body, thereby removing the foreign matter attached to the inner wall surface of the box-shaped body. Can be removed without hesitation.

  In one aspect of the present invention, it is preferable that the wall surface of the apparatus main body provided with the opening portion is an upper wall surface, and the peripheral edge portion of the opening of the box-like body is placed on the peripheral edge portion of the open portion. .

  According to the aspect of the present invention, the inner wall surface of the box-shaped body is cleaned in a posture in which the peripheral edge portion of the opening of the box-shaped body is placed on the peripheral edge portion of the opening formed on the upper wall surface of the apparatus main body. Is done. A box-like body can be easily set on the main body of the device. Further, since the opening of the box-shaped body faces downward, the foreign matter falls from the opening to the space of the apparatus main body. Thereby, it becomes easy to collect a foreign material.

  In one aspect of the present invention, it is preferable that the gas injection unit injects compressed gas onto an inner wall surface in which the groove of the box-like body is formed.

  According to one aspect of the present invention, it is suitable for cleaning a plate-shaped object storage box in which a groove is formed on the inner wall surface. That is, because the plate-like body and the groove are rubbed by taking the plate-like body into and out of the box-like body or by the vibration during the conveyance of the box-like body containing the plate-like body, Body cullet is generated, and many of these foreign substances adhere to the groove. Therefore, it is preferable to blow gas toward the groove as in one embodiment of the present invention.

  In one embodiment of the present invention, the cleaning device is disposed in a clean room, and the gas in the clean room is ejected from the gas ejecting unit, and the gas sucked by the gas sucking unit is returned to the clean room via an air filter. Is preferred.

  According to one aspect of the present invention, when a box-shaped body is washed in a clean room, a clean room gas having a high cleanliness is jetted onto the inner wall surface of the box-shaped body by the gas jetting means. Thereby, the foreign matter adhering to the inner wall surface is not only blown away, but also the cleanliness of the inner wall surface from which the foreign matter has been blown is enhanced by the gas in the clean room. And the gas in which a foreign material is mixed is attracted | sucked by a gas suction means, a foreign material is collected by an air filter, and the gas without a foreign material is returned to a clean room. Thereby, the box-shaped body can be washed without contaminating the clean room.

  As described above, according to the box-shaped body cleaning apparatus and the cleaning method of the present invention, it is possible to reliably perform cleaning without manual intervention and without scattering the removed foreign matter.

The perspective view which showed the storage box of embodiment, and the several glass plate The perspective view which showed the washing | cleaning apparatus of embodiment and the main-body part of a storage box The longitudinal cross-sectional view which showed the state by which the main-body part of the storage box was set to the washing | cleaning apparatus of FIG.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a box-shaped body cleaning apparatus and a cleaning method according to the present invention will be described with reference to the accompanying drawings.

  In the following embodiments, a storage box that stores a plurality of glass plates is illustrated as a box-shaped body. However, the box-shaped body of the present invention may be a storage box that stores a plate-shaped body made of resin or metal. The body washing apparatus and washing method can be applied.

[Configuration of Storage Box 10]
FIG. 1 is a perspective view illustrating a storage box 10 and a plurality of glass plates 12 according to the embodiment.

  The storage box 10 includes a main body 14 and a lid 16. In this storage box 10, a plurality of glass plates 12 each having a rectangular size of 300 mm to 1000 mm and a thickness of 0.3 mm to 0.5 mm are stored.

  The main body 14 is a horizontally long box-like body, and is provided with an opening 18 for inserting and removing the glass plate 12 at the top, and a rectangular bottom 20 at a position facing the opening 18. In addition, although the main-body part 14 of embodiment is a horizontally long box-shaped body, it is not limited to this, A vertically long box-shaped body may be sufficient.

  Further, a plurality of grooves 24 into which the short side vertical edges 12A and 12A on both sides of the glass plate 12 are inserted in the pair of inner wall surfaces 22 and 22 facing the main body portion 14 in the width direction of the inner wall surface 22. It is formed with a predetermined interval. A plurality of grooves 26 into which the lower edge portion 12B of the long side of the glass plate 12 is inserted are formed on the inner bottom surface 20A of the bottom portion 20 with the predetermined interval. In addition, since another pair of inner wall surfaces 28 and 28 which the main-body part 14 opposes are the inner wall surfaces which oppose the surface of the glass plate 12, a groove | channel is not formed but it is a flat surface.

  The cross-sectional shape and depth of the grooves 24 and 26 are set to shapes and depths capable of holding the vertical edge portion 12A and the lower edge portion 12B of the glass plate 12 inserted into the grooves 24 and 26. Further, the interval between the grooves 24 and 26 is set such that adjacent glass plates 12 inserted and held in the grooves 24 and 26 do not contact each other. As an example, the cross-sectional shape of the groove 24 is substantially V-shaped, its depth is about 12 mm, and the interval is about 10 mm. Moreover, the cross-sectional shape of the groove | channel 26 is also substantially V shape, the depth is about 7 mm and a space | interval is about 10 mm.

  The lid 16 is also a horizontally long box-like body, and is provided with an opening 30 facing the opening 18 of the main body 14, and a top (bottom) 32 is provided at a position facing the opening 30. . A groove 36 similar to the groove 24 is also formed on the pair of inner wall surfaces 34, 34 facing the lid body 16. Further, the other pair of opposed inner wall surfaces 38, 38 are not provided with a groove, like the inner wall surfaces 28, 28. The lid 16 is not limited to the form shown in FIG. 1, and may be any form as long as the opening 18 of the main body 14 can be closed. In addition, the material of the main-body part 14 and the cover body 16 is a polypropylene as an example.

[Method for storing glass plate 12 in storage box 10]
First, the glass plate 12 is stored in the internal space 40 of the main body portion 14 through the opening 18 of the main body portion 14 with the lower edge portion 12B of the glass plate 12 as the head.

  At this time, the vertical edge portions 12 </ b> A and 12 </ b> A on both sides of the glass plate 12 are inserted into the grooves 24 and 24 and are stored in the internal space 40 of the main body portion 14 while being guided by the grooves 24 and 24. Then, the lower edge portion 12B of the glass plate 12 is inserted into the groove 26 in which the inner bottom surface 20A of the bottom portion 20 is formed. Thereby, the glass plate 12 is stably accommodated in the main body 14.

  After the specified number of glass plates 12 are stored in the storage box 10, the opening 18 of the main body 14 is closed by the lid 16. At this time, the upper portions of the vertical edge portions 12A and 12A on both sides of the glass plate 12 protruding from the opening 18 of the main body portion 14 are inserted into the grooves 36 and 36 of the lid body 16. The above is the storage method of the glass plate 12 with respect to the storage box 10.

[Configuration of Cleaning Device 50]
FIG. 2 is a perspective view illustrating the cleaning device 50 and the main body 14 of the storage box 10 according to the embodiment, and FIG. 3 is a longitudinal cross-sectional view illustrating a state in which the main body 14 is set in the cleaning device 50 of FIG. FIG.

  The cleaning device 50 includes an apparatus main body 52, a gas suction device (gas suction means) 54, a gas injection device (gas injection means) 58 provided with a plurality of nozzles 56, an ionizer (static discharge means) 60, and a lifting device (moving means). 62). The cleaning device 50 is installed and used in a clean room in order to improve the cleanliness of the main body 14 during cleaning, but is not limited thereto.

<Apparatus body 52>
The apparatus main body 52 is a rectangular parallelepiped box. A top plate (wall surface, upper wall surface) 64 of the apparatus main body 52 is provided with a rectangular opening portion 66. Further, a frame-shaped peripheral edge portion 19 that forms the opening 18 of the main body portion 14 is brought into contact with the top plate 64. Thereby, the top plate 64 functions as a support surface that supports the main body 14 in an inverted state (a state in which the opening 18 is downward). The top plate 64 is provided with four L-shaped brackets 68 at positions corresponding to the four corners of the peripheral edge portion 19 to prevent the body portion 14 from tilting. Furthermore, the apparatus main body 52 is provided with a space portion 70 that communicates with the internal space 40 of the main body portion 14 via the opening portion 66.

  In addition, although the apparatus main body 52 of embodiment is the form which supports the main-body part 14 in an inverted state, the form which supports a main-body part in the standing state (state which opened the opening part 18 upward) may be sufficient. However, in terms of the device configuration, in the case of the device main body 52 that supports the main body portion 14 in an upright state, the device main body 52 must be installed above the main body portion 14. For this reason, a support member for suspending and supporting the apparatus main body 52 in a clean room is required, which is not preferable. On the other hand, if it is the apparatus main body 52 which supports the main-body part 14 in an inverted state, the apparatus main body 52 should just be installed in the floor of a clean room. Therefore, since the support member of the apparatus main body 52 becomes unnecessary, the form which supports the main-body part 14 in an inverted state is preferable. Further, since the opening 18 of the main body 14 faces downward, the foreign matter falls from the opening 18 to the space 70 of the apparatus main body 52. Thereby, there exists an advantage that it becomes easy to collect a foreign material.

<Gas suction device 54>
The gas suction device 54 is configured by connecting a valve 74, a suction pump 76, and a HEPA filter (air filter) 78 to an intake system including an intake pipe 72.

  The intake pipe 72 communicates with an intake port 80 provided on the inner bottom surface 53 of the apparatus main body 52, and a valve 74, a suction pump 76, and a HEPA filter 78 are attached in order from the upstream side to the downstream side in the intake direction. It has been. Therefore, when the suction pump 76 is driven and the valve 74 is opened, the gas in the internal space 40 of the main body 14 is sucked into the intake pipe 72 through the opening 66 and the space 70 by the suction force of the suction pump 76. Is done. Then, the foreign matter contained in the sucked gas is collected by the HEPA filter 78. Then, the clean gas indicated by the arrow A in FIG. 3 that has passed through the HEPA filter 78 is exhausted to the clean room.

  In the embodiment, the HEPA filter 78 is used as the air filter. However, the present invention is not limited to this, and any air filter capable of collecting foreign substances may be used. As an air filter, in order to reliably collect foreign matter, it has a particle collection rate of 99.97% or more with respect to particles having a particle size of 0.3 μm or less at the rated air volume, and an initial pressure loss of 245 Pa or less. An air filter having performance is preferable. Specifically, the HEPA filter 78 or the ULPA filter can be exemplified. The HEPA filter 78 or the ULPA filter is defined by JIS Z 8122 (established in 1974, revised in 2000).

  Further, as described above, the gas in the internal space 40 is sucked, whereby the peripheral edge portion 19 of the main body portion 14 is brought into close contact (vacuum suction) with the top plate 64. As a result, the internal space 40 of the main body 14 and the space 70 of the apparatus main body 52 are blocked from the clean space of the clean room.

<Gas injection device 58>
The gas injection device 58 includes a plurality of nozzles 56, a flexible air supply hose 82, a valve 84, and an air supply pump 86.

  The plurality of nozzles 56 are attached to a rectangular table 88 described later. Further, four nozzles 56 are arranged at intervals along the short side of the table 88. That is, the injection port of the nozzle 56 is disposed toward the groove 24 of the main body 14. The plurality of nozzles 56 are connected to the distal end portion of the air supply hose 82 via a branch pipe (not shown). Furthermore, the tip shape of the nozzle 56 is inclined upward. Thereby, since the gas injected from the nozzle 56 can easily reach the corners between the inner wall surfaces 22 and 28 of the main body 14 and the inner bottom surface 20A, the foreign matters attached to the corners can be easily removed.

  In this embodiment, the nozzle 56 that injects gas only into the groove 24 of the main body 14 is arranged on the table 88, but a nozzle that injects gas into the groove 26 of the main body 14 may be further arranged.

  The air supply hose 82 is inserted into the apparatus main body 52 in an airtight state via a packing (not shown), and a valve 84 and an air supply pump 86 are connected to the outside of the apparatus main body 52. Therefore, when the air supply pump 86 is driven and the valve 84 is opened, the clean gas in the clean room is sucked into the air supply pump 86, and is supplied from the plurality of nozzles 56 to the groove 24 via the air supply hose 82 and the branch pipe. It is injected towards. As a result, the foreign matter attached to the groove 24 is blown off from the groove 24. Further, the foreign matter attached to the groove 26 is also blown away from the groove 26 by the clean gas (compressed gas) from the nozzle 56.

  The gas ejected from the nozzle 56 is not limited to the clean gas in the clean room, but may be oxygen gas or nitrogen gas filled in the container. However, it is preferable to use clean air in a clean room because it is economical.

<Ionizer 60>
The ionizer 60 is attached to the center portion of the table 88. The ionizer 60 is a known static eliminator that discharges ions necessary for static elimination to the internal space 40 of the main body 14.

<Elevating device 62>
The lifting device 62 is disposed in the space 70 of the device main body 52. The lifting device 62 includes a lifting mechanism 90 and a servo motor 92 that drives the lifting mechanism 90.

  The elevating mechanism 90 is a pantograph mechanism in which a plurality of links 94 are rotatably connected by a plurality of pins 96. The fixed pin 98 and the moving pin 100 at the lower part of the elevating mechanism 90 are attached to the base 102 fixed to the apparatus main body 52, and the fixed pin 104 and the moving pin 106 at the upper part of the elevating mechanism 90 are attached to the table 88. . The moving pin 100 is slidably fitted in a horizontal long hole 108 provided in the base 102, and the moving pin 106 is slidably fitted in a horizontal long hole 110 provided in the table 88. The The moving pin 100 is driven by the power of the servo motor 92 so as to reciprocate along the long hole 108.

  Therefore, when the moving pin 100 is moved to the right from the position shown in FIG. 3 by the servo motor 92, the diamond-shaped lifting mechanism 90 is driven, and the table 88 is formed on the main body 14 as shown by a two-dot chain line in FIG. It is raised in the internal space 40. In this state, when the servo motor 92 is driven in reverse, the moving pin 100 is moved to the left, so that the table 88 is returned to the position of the solid line in FIG. That is, the plurality of nozzles 56 and the ionizer 60 mounted on the table 88 are moved up and down as shown by the arrow B in the internal space 40 of the main body 14. The raised position of the table 88 is controlled by a controller (not shown) of the servo motor 92. That is, the rising position of the table 88 is preset by the controller so that the table 88 rises to a position corresponding to the depth of the internal space 40 of the main body portion 14.

  In the embodiment, both the nozzle 56 and the ionizer 60 are moved up and down, but at least one of the nozzle 56 and the ionizer 60 may be mounted on the table 88 and moved up and down. Further, in the embodiment, the pantograph type lifting mechanism 90 is exemplified as the lifting device 62, but the present invention is not limited to this. For example, any apparatus that can move at least one of the nozzle 56 and the ionizer 60 in the vertical direction and the horizontal direction within the internal space 40 of the main body 14 can be applied.

[Operation of cleaning device 50]
First, the peripheral edge 19 of the main body 14 is placed on the top plate 64 of the apparatus main body 52.

  Next, the gas suction device 54 sucks the gas in the internal space 40 of the main body portion 14 through the open portion 66 and the space portion 70 of the device main body 52, and the peripheral portion 19 of the main body portion 14 is moved to the top plate of the device main body 52. 64 (vacuum adsorption). As a result, the internal space 40 of the main body 14 and the space 70 of the apparatus main body 52 are shielded from the clean gas in the clean room.

  Next, while the gas suction device 54 sucks the gas in the internal space 40 of the main body 14, that is, while maintaining the close contact state, clean room clean gas is discharged from the plurality of nozzles 56 of the gas injection device 58. It injects toward the groove | channel 24 of the main-body part 14. FIG. Thereby, since the foreign material adhering to the grooves 24 and 26 and the inner wall surface 28 of the main body part 14 is blown off by the clean gas, the grooves 24 and 26 and the inner wall surface 28 of the main body part 14 are reliably cleaned. The blown-out foreign matter is sucked by the gas suction device 54 and collected by the HEPA filter 78.

  Therefore, according to the cleaning device 50 of the embodiment, the main body portion 14 can be reliably cleaned without the need for manual labor and without scattering the removed foreign matter.

  Further, according to the cleaning device 50 of the embodiment, the foreign matters attached to the grooves 24 and 26 and the inner wall surface 28 of the main body portion 14 due to static electricity can be reliably removed by the ions necessary for static elimination discharged from the ionizer 60. . Further, since the removed foreign matter has been neutralized, it can be prevented that the foreign matter reattaches to the grooves 24 and 26 and the inner wall surface 28 of the main body 14.

  Further, according to the cleaning apparatus 50 of the embodiment, the nozzle 56 and the ionizer 60 are moved up and down in the inner space 40 by the lifting device 62, so that the foreign matters attached to the grooves 24 and 26 and the inner wall surface 28 of the main body 14 are removed. Can be removed without hesitation.

  Further, since the cleaning device 50 of the embodiment is arranged in a clean room, the clean gas in the clean room can be injected from the nozzle 56. Further, the gas sucked by the gas suction device 54 can be returned to the clean room via the HEPA filter 78.

  That is, clean room clean gas with high cleanliness is sprayed from the nozzle 56 to the grooves 24, 26 and the inner wall surface 28 of the main body 14, so that the foreign matter adhering to the grooves 24, 26 and the inner wall surface 28 is blown away. In addition, the cleanliness of the grooves 24 and 26 and the inner wall surface 28 from which foreign matter has been blown is increased by the clean gas in the clean room. And the gas in which the foreign material is mixed passes the HEPA filter 78, and the foreign material in gas is collected by the HEPA filter. Thereby, since the gas without a foreign substance can be returned to a clean room, the main-body part 14 can be wash | cleaned, without polluting a clean room.

  In addition, since the cleaning method of the cover body 16 by the cleaning device 50 is different from the cleaning method of the main body portion 14 only in the ascending position of the table 88, the description thereof is omitted here.

  Moreover, although embodiment demonstrated the washing | cleaning apparatus and washing | cleaning method which wash | clean the storage box 10 of the glass plate 12, a washing | cleaning target object is not limited to the storage box 10 of the glass plate 12. FIG. In other words, the cleaning device 50 and the cleaning method of the present invention can be applied to any box-like body having an opening on one side and a bottom on the other.

  DESCRIPTION OF SYMBOLS 10 ... Storage box, 12 ... Glass plate, 14 ... Main-body part, 16 ... Cover, 18 ... Opening part, 19 ... Peripheral part, 20 ... Bottom part, 20A ... Inner bottom surface, 22 ... Inner wall surface, 24 ... Groove, 26 ... groove, 28 ... inner wall surface, 30 ... opening, 32 ... top, 34 ... inner wall surface, 36 ... groove, 38 ... inner wall surface, 40 ... internal space, 50 ... cleaning device, 52 ... device main body, 54 ... gas Suction device 56 ... Nozzle 58 ... Gas injection device 60 ... Ionizer 62 ... Lifting device 64 ... Top plate 66 ... Opening part 68 ... Bracket 70 ... Space part 72 ... Intake pipe 74 ... Valve 76 ... Suction pump, 78 ... HEPA filter, 80 ... Intake port, 82 ... Air supply hose, 84 ... Valve, 86 ... Air supply pump, 88 ... Table, 90 ... Lifting mechanism, 92 ... Servo motor, 94 ... Link, 96 ... pin, 98 ... fixing pin, 100 Moving pins, 102 ... base, 104 ... fixing pin, 106 ... moving pin, 108 ... elongated hole, 110 ... elongated hole

Claims (7)

In the box-shaped body cleaning apparatus provided with an opening on one side and a bottom on the other side
An open portion is provided on the wall surface, and a peripheral portion of the opening of the box-shaped body is brought into contact with a peripheral portion of the open portion, and a space portion communicated with the internal space of the box-shaped body through the open portion. An apparatus main body,
A gas suction means for sucking the gas in the internal space of the box-like body through the open portion and the space portion of the apparatus main body;
Gas injection means for injecting compressed gas toward the inner wall surface of the box-shaped body;
A box-shaped body cleaning device comprising:   The box-shaped body cleaning apparatus according to claim 1, further comprising a static electricity removing unit configured to remove static electricity on an inner wall surface of the box-shaped body.   The box-shaped body cleaning apparatus according to claim 2, further comprising a moving unit configured to move at least one of the gas injection unit and the static electricity removing unit within an internal space of the box-shaped body.   The wall surface of the apparatus main body provided with the open portion is an upper wall surface, and the peripheral portion of the opening of the box-like body is placed on the peripheral portion of the open portion. The box-shaped body cleaning device described in 1.   The box-shaped body cleaning apparatus according to any one of claims 1 to 4, wherein the gas injection unit sprays compressed gas onto an inner wall surface in which a groove of the box-shaped body is formed.   The box-shaped cleaning device according to any one of claims 1 to 5, wherein the compressed gas is supplied from the gas injection means to the box-like shape while the gas in the internal space of the box-shaped body is sucked by the gas suction means. A method for cleaning a box-shaped body, characterized by spraying on an inner wall surface of the body.   The box shape according to claim 6, wherein the cleaning device is disposed in a clean room, the gas in the clean room is ejected from the gas ejecting unit, and the gas sucked by the gas sucking unit is returned to the clean room through an air filter. How to wash your body.

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