JP2014131877A - Method of electrically connecting electrically isolated printhead die ground networks as flexible circuit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of electrically connecting printhead die ground networks as a flexible circuit, the method solving the problem that printhead die fabrication processes involving etching of a silicon substrate are not optimally performed in a case where the silicon substrate and a device layer are grounded.SOLUTION: A printhead assembly 100 for an inkjet-printing device comprises: a printhead die 104; and a flexible circuit 106 connected to the printhead die. The printhead die includes a substrate 202, a first ground network 206 electrically connected to the substrate, a device layer, and a second ground network 212 electrically connected to the device layer. The first ground network and the second ground network are electrically isolated from one another within the printhead die. The first ground network and the second ground network are electrically connected to one another at the flexible circuit.

Description

  An ink jet printing apparatus forms an image on a medium by ejecting ink onto a medium such as paper via a print head die. A printhead die is a relatively small semiconductor component, and the many complex components that a printhead die normally has to be precisely manufactured in order for the die to operate properly. Many printhead dies include a silicon substrate and a device layer formed on the substrate. The element layer may include a transistor, a heating resistor, and other members for properly operating the die.

  In many types of printhead dies, the silicon substrate and device layers are grounded for optimal operation of the printhead die. However, in the manufacturing process of the printhead die, the grounding of the silicon substrate and the element layer may cause a problem. Specifically, when the silicon substrate and the element layer are grounded, a manufacturing process including etching of the silicon substrate may not be optimally performed.

2 shows a typical example of a print head assembly for an inkjet printing apparatus according to an embodiment of the present disclosure. For an inkjet printing apparatus showing a first ground network and a second ground network that are electrically isolated from each other in a printhead die and electrically connected to each other in a flexible circuit, according to embodiments of the present disclosure FIG. 2 is a schematic view of a printhead assembly. FIG. 3 is a cross-sectional view illustrating in detail a layer of a printhead die for an inkjet printing apparatus according to an embodiment of the present disclosure. 2 is a flowchart of a method for manufacturing at least a portion of a printhead assembly for an inkjet printing apparatus, in accordance with an embodiment of the present disclosure. 1 is a block diagram of a basic inkjet printing apparatus according to an embodiment of the present disclosure.

FIG. 1 shows a typical example of a printhead assembly 100 for an inkjet printing apparatus according to an embodiment of the present disclosure. Printhead assembly 100 includes an encapsulating cartridge 102. The encapsulating cartridge 102, i.e., the printhead assembly 100, can be inserted into a corresponding slot in an ink jet printing device so that the device can eject an ink onto a medium such as paper to form an image on the medium.

  The printhead assembly 100 includes a printhead die 104 that is electrically connected to the flexible circuit 106 of the assembly 100. The printhead die 104 is typically a small semiconductor die and is shown in FIG. 1 at a scale greater than the actual size for the flexible circuit 106 and the encapsulating cartridge 102 for clarity of illustration. The flexible circuit 106 is electrically coupled to a corresponding electrical connector of the inkjet printing apparatus on an encapsulating cartridge 102 that is removably inserted or attached to the inkjet printing apparatus. Specifically, the flexible circuit 106 may include a lead from the printhead die 104 to electrically couple the die 104 to the inkjet printing apparatus. Because the circuit 106 is flexible, it can be bent around at least one edge of the encapsulating cartridge 102 as shown in FIG.

  In the embodiment of FIG. 1, the printhead assembly 100 also includes a supply of ink 108 contained within the encapsulating cartridge 102. However, in other embodiments, the supply of ink 108 may be included in a different assembly than the printhead assembly 100. In general, an ink jet printing apparatus with the printhead assembly 100 attached thereto causes a drop of ink 108 to be ejected through the die onto the printhead die 104 to form an image on a medium such as paper.

  FIG. 2 is a partial schematic diagram of a printhead assembly 100 for an inkjet printing apparatus according to an embodiment of the present disclosure. Specifically, the printhead die 104 and flexible circuit 106 of the printhead assembly 100 are shown in FIG. The illustrated printhead die 104 includes a substrate 202, such as a silicon substrate. The substrate 202 is the substrate of the printhead die 104, and various devices of the die 104 are manufactured on the substrate 202, such as transistors and heating resistors. The substrate 202 is electrically connected to the first ground network 206. That is, the first ground network 206 is electrically connected to a plurality of portions of the substrate 202.

  The illustrated printhead die 104 also includes a device ground 208 and a surface metal layer 210. Device ground 208 is a ground connection for devices manufactured on printhead die 104, for example, the ground for various transistors manufactured on printhead die 104. Specifically, the surface metal layer 210 may be a layer made of gold. The surface metal layer 210 in one embodiment provides a low resistance conductor for power and ground signals within the printhead die 104. The device ground 208 and the surface metal layer 210 are electrically connected to the second ground network 212.

  During operation of the printhead die 104, a greater amount of current flows through the second ground network 212 compared to the first ground network 206, so that the second ground network 212 is the primary ground network and the first ground network. Network 206 may be considered a secondary or “back” ground network. Note that, within the printhead die 104, the first ground network 206 and the second ground network 212 are electrically isolated from each other. This is beneficial because the second ground network 212 can be at a different potential than the first ground network 206 in processes such as etching used during manufacture of the printhead die 104. Accordingly, having the ground networks 206 and 212 electrically isolated from each other within the printhead die 104 is beneficial during manufacture of the die 104.

  However, during operation of the printhead die 104, the first ground network 206 and the second ground network 212 can be held at the same potential, specifically, a shared potential such as ground or a ground potential. . The embodiment of FIG. 2 electrically connects the ground networks 206 and 212 to each other in the flexible circuit 106. Specifically, the ground networks 206 and 212 meet at at least one point 214 in the flexible circuit 106. Point 214 may be implemented, for example, as an inkjet printer connector pin that electrically connects printhead die 104 to an inkjet printer in which printhead assembly 100 is inserted or attached.

  Accordingly, the embodiment of FIG. 2 provides at least a substantially optimal potential for the ground networks 206 and 212 during manufacture and operation of the printhead die 104. During manufacture of the printhead die 104, the ground networks 206 and 212 are electrically isolated and can have different potentials. During operation of the printhead die 104, the ground networks 206 and 212 are electrically connected to each other in the flexible circuit 106 and are therefore held at the same ground potential or shared potential.

  FIG. 3 is a partial cross-sectional view of printhead die 104 according to an embodiment of the present invention. An element layer 302 is disposed on the printhead die 104. The element layer 302 includes a plurality of thin film transistors. For example, one transistor includes a source 304A, a polycrystalline silicon gate 304B, and a drain 304C, and a small layer of gate oxide (not particularly labeled in FIG. 3) between the gate 304B, the source 304A, and the drain 304C. ) Is formed. Other transistors include a source 306A, a polysilicon gate 306B, and a drain 306C, and a small layer of gate oxide is formed between the gate 306B, source 306A, and drain 306C. The drain 304C is the same as the drain 306C.

  In FIG. 3, the heating resistor 316 is arranged on the illustrated element layer 302 in consideration of the convenience of illustration, but may include the heating resistor 316. As will be appreciated by those skilled in the art, when current is supplied to the heating resistor 316, the resistor 316 is considered "burned". Accordingly, the resistor 316 forms bubbles in the ink located on the uppermost side of the print head die 104. This bubble ejects an ink drop from the die 104. Thereafter, the bubbles collapse. Further, the element layer 302 may include an insulating layer 307. In one embodiment, the element layer 302 may be phosphosilicate glass (PSG).

  A thin resistance layer 308 is disposed on the element layer 302, and a first metal layer 310 is disposed thereon. The first metal layer 310 may be made of, for example, aluminum and / or a tantalum aluminum alloy, so that the layer 310 has two sublayers consisting of one aluminum layer and one tantalum aluminum alloy layer. A passive layer and / or insulating layer 312 is disposed on the first metal layer 310 to protect the printhead die 104 from ink. The layer 312 may be made of, for example, silicon carbide or silicon nitride. The heating resistor 316 may be part of the insulating layer 307, part of the resistive layer 308, part of the first metal layer 310, part of the layer 312, and / or a further protective layer disposed on the passive layer 312. A part of 314 may be included.

  A surface metal layer 210 is disposed on the element layer 302, specifically, the first metal layer 310, and the surface metal layer 210 may be a sublayer of the second metal layer including a tantalum layer. The surface metal layer 210 is separated and electrically isolated from the first metal layer 310 by a portion of the layer 312. Although the electrical connection is not described in the cross-sectional view of FIG. 3, the surface metal layer 210 is electrically connected to the ground portion of the transistor in the element layer 302, and is electrically connected to, for example, the main power supply ground portion and other ground portions. May be connected. However, the flexible circuit 106 of FIGS. 1 and 2 is electrically connected to the second ground network 212 of FIG. The second ground network 212 may be mounted on a second metal layer including the surface metal layer 210. Further, the second ground network 212 may not be mainly mounted on the first metal layer 310.

  The dividing line 317 in FIG. 3 indicates that the left part of the line 317 is arranged farther from the right part of the line 317 than the state shown in FIG. The left portion of line 317 includes substrate contact 318. At the contact 318, a part of the first metal layer 310 is exposed, and none of the passive layer 312, the protective layer 314, and the insulating layer 307 is disposed. Thus, the two layers above the substrate 202, ie, the thin resistive layer 308 and the first metal layer 310, are both conductive, so that at the contact 318, the first metal layer 310 electrically exposes the substrate 202. To do. The flexible circuit of FIGS. 1 and 2 is electrically connected to the first ground network 206 of FIG. 2 via a first metal layer 310. In addition, the first ground network 206 may be mainly mounted on the first metal layer 310.

  Thus, FIG. 3 illustrates how the ground networks 206 and 212 of FIG. 2 are electrically isolated from each other in the printhead die 104. For example, the surface metal layer 210 is electrically isolated from the portion of the first metal layer 310 where the contact 318 is disposed. Thus, if the second ground network 212 is mounted on a second metal layer that includes the surface metal layer 210 and the first ground network 206 is mounted primarily on the first metal layer 310, the ground networks 206 and 212 are They are electrically isolated from each other within the printhead die 104.

  FIG. 4 illustrates a method 400 for manufacturing at least a portion of a printhead assembly 100 for an inkjet printing apparatus, according to an embodiment of the present disclosure. FIG. 4 shows only a part of the manufacturing process in detail and will be described here. Accordingly, those skilled in the art will appreciate that other steps may be performed to complete the manufacture of the printhead assembly 100. Specifically, FIG. 4 shows only portions related to the embodiment of the present disclosure and will be described here.

  A substrate 202 is provided on the printhead die 104 of the printhead assembly 100 (402). Thereafter, an element layer 302 including a thin film transistor and / or a heating resistor 316 may be formed on the substrate (404). Thereafter, the first metal layer 310 is formed (406) on the element layer 302 at an arbitrary time, and the first ground network 206 is mainly mounted on the first metal layer 310 as described above. Finally, a surface metal layer 210 is formed 408 on the first metal layer 310 and a second ground network 212 is mounted on the second metal layer including the surface metal layer 210 as described above.

  The substrate 202 may be etched 410 so that the first ground network 206 and the second ground network 212 are at different potentials (410). For example, the substrate 202 may be wet etched using tetramethylammonium hydroxide (TMAH). Etching of the substrate 202 with TMAH is optimally performed when the surface metal layer 210 (ie, the second ground network 212) has any potential with respect to the substrate 202 (ie, the first ground network 206). I know that. Otherwise, the substrate 202 may be improperly etched. As can be understood by those skilled in the art, the substrate 202 may be etched to form holes for supplying ink through the printhead die 104 and / or smooth without any irregularities in the vicinity of the heating resistor 316. A straight edge may be formed. According to an embodiment of the present invention, before the flexible circuit 106 is connected to the die 104, the substrate 202 and the surface metal layer 210 (ie, the first ground network 206 and the second ground network 212) are printed heads. The surface metal layer 210 can have any potential with respect to the substrate 202 when electrically isolated from each other within the die 104.

  When the etching is complete, the flexible circuit 106 may be connected to the printhead die 104 (412), thereby electrically connecting the first ground network 206 and the second ground network 212 to each other. Thus, during use of printhead assembly 100, ground networks 206 and 212 (ie, surface metal layer 210 and substrate 202 or first metal layer 310) are held at the same ground potential or other shared potential, and as a result. The assembly 100 has been found to operate optimally. Thus, during use of the printhead assembly 100, the ground networks 206 and 212 are electrically connected to each other in the flexible circuit 106 and are therefore kept in electrical connection with each other.

  Finally, FIG. 5 shows a basic inkjet printing apparatus 500 according to an embodiment of the present disclosure. The inkjet printing apparatus 500 may be an inkjet printer, a multi-function device (MFD), or an all-in-one (AIO) 10 device that can also have functionality other than the inkjet printing function. An ink jet printing apparatus 500 shown in FIG. 5 includes the print head assembly 100 and the ink jet printing mechanism 502 described above. Those skilled in the art will appreciate that the inkjet printing apparatus 500 may include other members in addition to the components shown in FIG. 5, and typically includes such other members.

  The inkjet printing mechanism 502 includes components for forming an image on a medium such as paper by causing the inkjet printing apparatus 500 to thermally eject ink onto the medium, for example. Accordingly, the printhead assembly 100 may share components with the inkjet printing mechanism 502. That is, the printhead assembly 100 includes a printhead die 104 that actually ejects ink. In this regard, the inkjet printing mechanism 502 may be considered to share the printhead die 104 with the printhead assembly 100. As will be appreciated by those skilled in the art, the inkjet printing mechanism 502 may include other components, such as firmware and media feed motors.

In the following, exemplary embodiments consisting of combinations of various components of the present invention are shown.
1. A print head assembly for an inkjet printing apparatus, comprising:
A printhead die,
A flexible circuit connected to the printhead die,
The printhead die is
A substrate,
A first ground network electrically connected to the substrate;
An element layer;
A second ground network electrically connected to the element layer,
The first ground network and the second ground network are electrically isolated from each other in the printhead die;
The printhead assembly, wherein the first ground network and the second ground network are electrically connected to each other in the flexible circuit.
2. 2. The printhead assembly of claim 1, wherein the first ground network temporarily has a different potential than the second ground network during manufacture of the printhead die.
3. The printhead assembly of claim 2, wherein the first ground network temporarily has a different potential than the second ground network during etching of the substrate.
4). The printhead assembly of claim 1, wherein the printhead die further comprises a first metal layer on which the first ground network is primarily mounted.
5. 5. The printhead assembly according to claim 4, wherein the first metal layer includes at least one tantalum aluminum alloy layer and an aluminum layer.
6). The printhead assembly of claim 4, wherein the printhead die further comprises a second metal layer on which the second ground network is mounted.
7). The printhead assembly of claim 6, wherein the second metal layer comprises a surface metal layer of the printhead die.
8). 7. The print head assembly according to claim 6, wherein the second metal layer includes a gold layer.
9. 2. The print head assembly according to claim 1, wherein the substrate is a silicon substrate.
10. 2. The print head assembly according to claim 1, wherein the element layer includes at least one transistor and a heating resistor that ejects ink from the print head assembly.
11. The printhead assembly of claim 1, wherein the flexible circuit electrically connects the printhead die to the inkjet printing apparatus.
12 A substrate is provided on a printhead die of a printhead assembly for an inkjet printing apparatus;
Forming an element layer on the substrate including at least one transistor and a heating resistor for ejecting ink from the printhead assembly;
Forming a first metal layer on the device layer to provide a first ground network electrically connected to the substrate;
A second metal layer is provided on the first metal layer to provide a second ground network that is electrically connected to the element layer, and the second ground network is formed in the printhead die. Electrically isolated from the first ground network;
Etching the substrate so that the first ground network is held at a different potential than the second ground network during etching.
13. 13. The method of claim 12 further comprising connecting a flexible circuit to the printhead die and electrically connecting the first ground network and the second ground network to each other in the flexible circuit. .
14 The method of claim 13 wherein the flexible circuit electrically connects the printhead die to the inkjet printing apparatus.
15. During use of the inkjet printing apparatus, the first ground network and the second ground network are electrically connected to each other in the flexible circuit, so that the first ground network and the second ground network 14. The method according to item 13 above, wherein the two are held in an electrically connected state to each other.
16. An inkjet printing apparatus,
An inkjet printing mechanism;
A cartridge mounted in the inkjet printing apparatus,
The cartridge is
An ink supply unit;
A printhead die,
A flexible circuit that electrically connects the printhead die to the inkjet printing mechanism;
The printhead die is
A substrate,
A first ground network electrically connected to the substrate;
An element layer;
A second ground network electrically connected to the element layer,
The first ground network and the second ground network are electrically isolated from each other in the printhead die;
The first ground network and the second ground network are electrically connected to each other in the flexible circuit;
The ink jet printing mechanism forms an image on the medium by ejecting the ink onto the medium through the print head die.
17. The inkjet printing apparatus according to item 16, wherein the first grounding network temporarily has a different potential from the second grounding network during manufacture of the printhead die.
18. 18. The inkjet printing apparatus according to item 17, wherein the first ground network temporarily has a potential different from that of the second ground network during the etching of the substrate.
19. The print head die is
A first metal layer on which the first ground network is mainly mounted;
A second metal layer, wherein the second ground network is mounted, and the first metal layer is not mainly mounted;
The inkjet printing apparatus according to claim 16, wherein the second metal layer is a surface metal layer of the printhead die.
20. 17. The inkjet printing apparatus according to item 16, wherein the element layer includes at least one transistor and a heating resistor.

Claims (17)

A print head assembly for an inkjet printing apparatus, comprising:
A printhead die,
A flexible circuit electrically connected to the printhead die,
The print head die is
A silicon substrate;
An element layer on the silicon substrate, the element layer including one or more transistors and a heating resistor for ejecting ink from the printhead assembly;
A first metal layer on the device layer, the first metal layer providing a first ground network electrically connected to the silicon substrate;
A second metal layer on the first metal layer, the second metal layer being electrically connected to the device layer, and the second ground network being within the printhead die A second metal layer adapted to be electrically isolated from the first ground network;
The flexible circuit has a point shorted to each other such that the first ground network and the second ground network are electrically connected to each other in the flexible circuit;
Printhead assembly.   The printhead assembly of claim 1, wherein the printhead die comprises an insulating layer between the first metal layer and the second metal layer.   The printhead assembly of claim 1 or 2, wherein the first metal layer comprises one or both of a tantalum aluminum alloy layer and an aluminum layer.   4. The printhead assembly according to claim 1, wherein the second metal layer comprises a surface metal layer of the printhead die. 5.   The printhead assembly according to any one of claims 1 to 4, wherein the second metal layer comprises a gold layer.   The flexible circuit is implemented as a connector pin for an ink jet printing apparatus that electrically connects the print head die to the ink jet printing apparatus and the points electrically connect the print head die to the ink jet printing apparatus. A printhead assembly according to any one of claims 1 to 5. A method of making a printhead assembly according to any one of claims 1-6,
The print head die is manufactured, and the manufacturing step includes forming the silicon substrate using a tetramethylammonium hydroxide etchant in a state where the first ground network and the second ground network are electrically insulated from each other. Etching step,
Connecting the flexible circuit to the printhead die so that the first ground network and the second ground network are electrically connected to each other in the flexible circuit;
The method for producing a print head assembly according to claim 1, comprising the steps of:   8. The method of claim 7, wherein during the step of etching the silicon substrate, the first ground network is temporarily at a different potential than the second ground network. A print head assembly for an inkjet printing apparatus, comprising:
A printhead die,
A flexible circuit electrically connected to the printhead die,
The print head die is
A silicon substrate;
A first ground network electrically connected to the silicon substrate;
An element layer including one or more transistors;
A second ground network electrically connected to the element layer;
The first ground network and the second ground network are electrically isolated from each other in the printhead die;
The printhead assembly, wherein the flexible circuit has a point that is shorted to each other such that the first ground network and the second ground network are electrically connected to each other in the flexible circuit.   The printhead assembly of claim 9, wherein the printhead die further comprises a first metal layer on which the first ground network is primarily implemented.   The printhead assembly of claim 10, wherein the first metal layer comprises one or both of a tantalum aluminum alloy layer and an aluminum layer.   12. A printhead assembly according to any one of claims 9 to 11, wherein the printhead die further comprises a second metal layer on which the second ground network is implemented.   The printhead assembly of claim 12, wherein the second metal layer comprises a surface metal layer of the printhead die.   The printhead assembly of claim 12 or 13, wherein the second metal layer comprises a gold layer.   The flexible circuit is implemented as a connector pin for an ink jet printing apparatus that electrically connects the print head die to the ink jet printing apparatus and the points electrically connect the print head die to the ink jet printing apparatus. 15. A printhead assembly according to any one of claims 9 to 14. A method of making a printhead assembly according to any one of claims 9 to 15,
Fabricating the printhead die, the fabricating step etching a silicon substrate using a tetramethylammonium hydroxide etchant with the first ground network and the second ground network electrically isolated from each other. Including the steps of
Connecting the flexible circuit to the printhead die so that the first ground network and the second ground network are electrically connected to each other in the flexible circuit;
A method consisting of each step.   The method of claim 16, wherein the first ground network is temporarily brought to a different potential than the second ground network during the step of etching the silicon substrate.

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