JP2014038914A - Drying device and drying method for substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drying device for a glass substrate having an excellent liquid draining properties of a cleaning liquid on the glass substrate.SOLUTION: A substrate 2 after cleaning, is conveyed while tilting the substrate, a plurality of gas spray means 30A, 30B for spraying the gas 9 to the substrate 2 are moved with the substrate 2, and the air 9 is sprayed to the substrate 2 in different directions by the gas spray means 30A, 30B, respectively.

Description

  The present invention relates to a drying apparatus and method for drying a substrate, and more particularly to a drying apparatus for drying a color filter (glass substrate) that has been subjected to a cleaning process.

  2. Description of the Related Art Conventionally, a cleaning apparatus that cleans a glass substrate such as a color filter used in a color liquid crystal display panel and removes the cleaning liquid after the cleaning with an air knife is known (for example, see Patent Document 1).

  The drying apparatus shown in Patent Document 1 removes the cleaning liquid by conveying a cleaned glass substrate in a horizontal state and blowing a gas while moving an air knife against the glass substrate.

JP 2009-6299 A

  By the way, the pattern formed on the glass substrate such as a color filter has been miniaturized in recent years, and the conventional method of blowing gas from one direction with an air knife can remove the cleaning liquid at the boundary between the pattern and the glass substrate. May remain.

  In addition, when a gas is sprayed onto a glass substrate that is transported in a horizontal state, the cleaning liquid may drift upward, and the cleaning liquid may not be completely removed without being blown off to the outside of the glass substrate. .

  An object of the present invention is to provide a glass substrate drying apparatus and the like that have a good liquid drainage of the cleaning liquid on the glass substrate.

  In order to solve the above-mentioned problem, the substrate (2) drying device (10) according to claim 1 is a substrate drying device for removing the cleaning liquid (7) adhering to the cleaned substrate and drying the substrate. In addition, conveying means (11, 15) for conveying the substrate in an inclined manner, a plurality of gas blowing means (30A, 30B) for blowing gas (9) against the substrate, and conveying each gas blowing means. And a moving means (35) for moving the substrate along a transport path of the substrate, wherein each of the gas blowing means blows gas from different directions to the substrate.

  Further, the substrate drying apparatus according to claim 2 is the substrate drying apparatus according to claim 1, wherein the gas spraying means includes two sets of air knives, and each air knife is in a conveying direction. It is provided so as to be inclined so as to be line symmetric in the orthogonal direction.

  The substrate drying apparatus according to claim 3 is the substrate drying apparatus according to claim 1 or 2, wherein the moving means moves the gas blowing means at a speed slower than a conveyance speed of the substrate. It is characterized by that.

  According to a fourth aspect of the present invention, there is provided the method for drying a substrate, wherein the substrate after the cleaning is conveyed while being inclined, and a plurality of gas spraying means for injecting a gas to the substrate are moved together with the substrate while being moved to the substrate. On the other hand, the gas spraying means injects the gas in different directions.

  According to the present invention, the cleaning liquid adhering to the cleaned glass substrate can be removed almost completely.

It is a schematic diagram for demonstrating the conveyance form of a glass substrate. It is a schematic diagram for demonstrating the washing | cleaning and drying process of a glass substrate. It is a schematic diagram which shows the plane of the conveying apparatus of this embodiment. It is a schematic diagram which shows the longitudinal cross-section of the conveying apparatus of this embodiment. FIG. 5A is a longitudinal sectional view, and FIG. 5B is a plan view, showing an example of a gas ejection location. It is a schematic diagram which shows the plane of the conveying apparatus of other embodiment. It is a figure which shows the example of control of a drying apparatus. It is a figure which shows the other example of control of a drying apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drying apparatus 10 according to the present embodiment is an apparatus that performs a cleaning process and a drying process on the glass substrate 2 and carries it out. For convenience, the vertical direction of the drying apparatus 10 shown in FIG. 2 is expressed as the vertical direction of the drying apparatus 10, and the horizontal direction of the drying apparatus 10 is expressed as the front-rear direction.

  As shown in FIG. 1, the glass substrate 2 is conveyed by the driving roller 15 in the direction of arrow A in FIG. 1 while being held in a posture inclined by a base 11 in a predetermined direction. As shown in FIG. 2, a cleaning liquid 7 such as a chemical solution or pure water is sprayed onto the glass substrate 2 by the cleaning nozzle 20 to clean the surface of the glass substrate 2. Thereafter, the glass substrate 2 is sprayed with a gas 9 such as air or an inert gas pressurized to a predetermined pressure by the drying nozzle 30, and the cleaning liquid 7 adhering to the glass substrate 2 is blown off to the glass substrate. 2 is dried.

  Hereinafter, the drying apparatus 10 of this embodiment will be described in detail.

  As shown in FIGS. 3 and 4, the drying apparatus 10 according to the present embodiment is provided at a base 11 attached to a frame (not shown) at a predetermined angle α, and at a lower end portion in the tilt direction of the base 11. Drive roller 15, cleaning nozzle 20 provided on the upstream side in the transport direction of glass substrate 2 of base 11, and drying nozzle 30 provided on the downstream side (the gas blowing means of the present application). .

  The base 11 has a predetermined length in the axial direction and is attached so as to be bridged between a pair of base bodies 11a and 11b arranged in parallel and the base bodies 11a and 11b. A plurality of supports 13 supported from below. The support 13 is arranged at equal intervals in the axial direction of the bases 11a and 11b, and a plurality of transfer rollers 14 are provided on the support 13 so as to be rotatable at equal intervals in its own axial direction. The glass substrate 2 can be moved in the direction of arrow A in FIG.

  The driving roller 15 holds the glass substrate 2 in an inclined state and functions as a conveying unit that conveys the glass substrate 2 in the direction of arrow A in FIG. 2, and the plurality of driving rollers 15 pass through a power transmission mechanism such as a belt (not shown). Connected to the motor. The motor is driven and controlled by the controller 50, and the conveyance speed of the glass substrate 2 is controlled by controlling the rotation speed of the drive roller 15.

  The cleaning nozzle 20 is attached so as to span the pair of base bodies 11a and 11b. The cleaning nozzle 20 is provided with a slit (not shown) at a lower end portion of a tubular member extending in a direction orthogonal to the conveyance direction of the glass substrate 2, and the cleaning liquid 7 is sprayed downward in the form of a slit. Although not shown, the cleaning liquid 7 is supplied to the tubular member from a cleaning liquid container that stores the cleaning liquid 7 (not shown), the supply amount of the cleaning liquid 7 is controlled by the control unit 50, and a predetermined amount of the cleaning liquid 7 is ejected.

  The drying nozzle 30 includes a first air knife 30A provided on the upstream side in the transport direction of the glass substrate 2 and a second air knife 30B provided on the downstream side. Each of the air knives 30A and 30B is illustrated in FIG. As indicated by the arrows in FIG. 2, the gas 9 is blown in different directions at a predetermined angle with respect to the glass substrate 2, and the cleaning liquid 7 on the glass substrate 2 is blown off by the pressure of the gas 9 to be dried.

  These first and second air knives 30A, 30B have a predetermined length in the axial direction as shown in FIGS. 2 and 3, and the longitudinal direction is predetermined with respect to the conveying direction of the glass substrate 2. Arranged at an angle. The first and second air knives 30 </ b> A and 30 </ b> B have a length over the entire length in the width direction of the glass substrate 2 in an inclined state, and the end surface facing the top surface of the glass substrate 2 covers almost the entire length in the axial direction. An opening 32 is formed.

  As shown in FIG. 2, the opening 32 is tapered at the tip, and the tip 32 a is provided with a discharge port 33 formed in a slit shape, and a gas 9 supplied from a gas supply source (not shown). Is injected at a predetermined pressure or injection amount via an injection mechanism (not shown). Note that the pressure and the injection amount of the gas 9 are determined by the control unit 50 controlling the injection mechanism.

  As shown in FIG. 3, the opening 32 formed in the first air knife 30 </ b> A is provided so that the gas 9 is ejected in the forward direction of the conveyance direction of the glass substrate 2. On the other hand, the opening 32 formed in the second air knife 30 </ b> B is provided so that the gas 9 is jetted in the direction opposite to the conveyance direction of the glass substrate 2.

  In other words, from the openings 32 of the air knives 30 </ b> A and 30 </ b> B, the gas 9 is jetted in the opposite direction to the surface of the glass substrate 2 and at a predetermined angle with respect to the transport direction of the glass substrate 2. Yes. In the present embodiment, the injection angle of the gas 9 with respect to the conveyance direction of the glass substrate 2 is defined by the attachment angles of the air knives 30A and 30B with respect to the bases 11a and 11b, but only the angle of the opening 32 is provided separately. Thus, the respective air injection angles may be adjustable.

  When the air knives 30A and 30B are fixed, the glass substrate 2 is transported at a predetermined speed. Therefore, the glass substrate 2 is exposed to the gas 9 only for a short time, and the cleaning liquid 7 is not exposed to the gas 9 sufficiently. There is a risk of not being able to attend. Therefore, the drying apparatus 10 of the present embodiment follows the glass substrate 2 being conveyed in order to extend the contact time of the gas 9 ejected from each of the air knives 30A and 30B with the glass substrate 2. , 30 </ b> B is moved along with the movement of the glass substrate 2.

  Although not shown, the moving mechanism unit 35 includes a guide body that is mounted on the bases 11a and 11b and extends in the conveyance direction of the glass substrate 2, and an actuator that moves the air knives 30A and 30B via the guide body. Provided, and the actuator is driven and controlled by the controller 50 to move the air knives 30A and 30B. The air knives 30A and 30B are preferably controlled to move at substantially the same speed as the conveying speed of the glass substrate 2, specifically, slightly slower. Thereby, the gas 9 can be brought into contact with the entire surface of the glass substrate 2 for a long time.

  Further, in order to control the drive timing of the air knives 30A and 30B, a position detecting means 36 for detecting the position of the glass substrate 2 is provided on the conveyance path of the glass substrate 2. The position detection means 36 is, for example, a photoelectric sensor, and includes a first sensor 36a provided on the upstream side of the first air knife 30A in the transport path, and the first air knife 30A and the second air knife in the transport path. And a second sensor 36b provided between the sensors 30B. Each sensor 36a, 36b detects the position of the glass substrate 2 and outputs the result to the controller 50. The control unit 50 drives and controls the moving mechanism unit 35 based on the results detected by the sensors 36a and 36b in order to move the air knives 30A and 30B corresponding to the glass substrate 2 being conveyed.

  The control unit 50 includes a central processing unit (CPU) having a calculation function, a working RAM, and a ROM that stores various data and programs. The CPU executes various programs stored in the ROM, for example, thereby controlling each unit and overall controlling the entire drying apparatus 10. Specifically, the control unit 50 includes a motor that drives the driving roller 15, an injection mechanism that injects the gas 9 from the air knives 30A and 30B, an injection mechanism that injects the cleaning liquid 7 from the cleaning nozzle, the air knife 30A, It is electrically connected to the moving mechanism unit 35 and the like that moves 30B, and as described above, the drive control of the driving roller 15, the drive control of the moving mechanism unit 35, and the gas injection amount (air volume) by the air knives 30A and 30B. Control, injection amount (flow rate) control of the cleaning liquid 7 by the cleaning nozzle, and the like are performed.

  As described above, the drying apparatus 10 of the present embodiment causes the cleaning liquid 7 to flow downward from the base 11 and the gas 9 to be blown from the predetermined direction onto the glass substrate 2 by tilting the glass substrate 2. As a result, the cleaning liquid 7 is blown off (exhausted) downward in the glass substrate 2 to dry the surface of the glass substrate 2.

  Moreover, the drying apparatus 10 of this embodiment arrange | positions the photoelectric sensor 36a as the position detection means 36 to the upstream of the air knife 30A in a conveyance path | route. The photoelectric sensor 36a detects the position of the glass substrate 2 and outputs the result to the control unit 50. The control unit 50 moves the air knife 30A based on the detection result and ejects the gas 9.

  Next, the removal process (dry process) of the cleaning liquid 7 using the drying apparatus 10 will be described.

  (1) First, the glass substrate 2 that has been subjected to a predetermined process in the previous step is conveyed downstream by the drive roller 15 that is driven and controlled by the control unit 50.

  As shown in FIG. 5A, the glass substrate 2 has a thickness of 0.1 to 0.5 mm, for example, and a predetermined pattern 70 is formed on the surface thereof. It has a protrusion 71 of several tens of μm. Therefore, when the surface of the glass substrate 2 is cleaned with the cleaning liquid 7, the cleaning liquid 7 particularly accumulates in the corner 75 at the boundary between the protrusion 71 and the surface of the glass substrate 2.

  (2) Next, when the glass substrate 2 is transported below the cleaning nozzle 20, the cleaning liquid 7 is sprayed from the cleaning nozzle 20 onto the surface of the glass substrate 2 by the control unit 50, and the glass substrate 2 is cleaned. Is done.

  (3) Next, when the first sensor 36a detects the glass substrate 2, the control unit 50 that has received the detection result moves the first air knife 30A corresponding to the glass substrate 2 being conveyed. Then, the gas 9 is jetted onto the surface of the glass substrate 2. Further, when the second sensor 36b detects the glass substrate 2, the control unit 50 that has received the detection result stops the injection of the gas 9 from the first air knife 30A and transports the second air knife 30B. The gas 9 is jetted onto the surface of the glass substrate 2 while being moved corresponding to the glass substrate 2 to be blown, and the cleaning liquid 7 is blown off to dry the surface of the glass substrate 2.

  The first air knife 30A blows the gas 9 obliquely downward in the conveyance direction of the glass substrate 2, while the second air knife 30B is obliquely downward in the direction opposite to the conveyance direction of the glass substrate 2. The gas 9 is sprayed on the surface. The cleaning liquid 7 is pushed away in the jet direction of the gas 9 by the air knives 30 </ b> A and 30 </ b> B and blown off beyond the protrusions 71 of the pattern 70.

  Here, as shown in FIG. 5B, for example, when the pattern 70 of the glass substrate 2 is formed in a lattice shape, the upper corner 60 c is inclined to convey the glass substrate 2 to convey the cleaning liquid 7. Is substantially removed, but the cleaning liquid 7 accumulates in the lower corners 60a and 60b. In this embodiment, the cleaning liquid 7 is removed from the lower corner 60a on the upstream side in the transport direction of the glass substrate 2 by the first air knife 30A, and the lower corner 60b on the downstream side in the transport direction is cleaned by the second air knife 30B. 7 is removed. That is, according to the first and second air knives 30A and 30B shown in the present embodiment, the cleaning liquid 7 remaining in the pattern 70 formed in a lattice shape as described above is almost completely removed, and the glass substrate 2 is removed. Can be dried.

  (4) Finally, the glass substrate 2 is transported to the next step, and the drying apparatus 10 of the present embodiment sequentially performs such operations, whereby the glass substrate is cleaned and dried.

  As described above, according to the drying apparatus 10 of the present embodiment, the glass substrate 2 is cleaned by the inclined conveyance and the injection of the gas 9 in the reverse direction by the first and second air knives 30A and 30B. It is possible to remove the cleaning liquid 7 adhering to the glass substrate 2 almost completely.

(Other embodiments)
The drying apparatus 10A according to the present embodiment is different from the drying apparatus 10 according to the above-described embodiment in jetting control of the gas 9 by the air knives 30A and 30B. Specifically, while the drying device 10 of the above-described embodiment injects the gas 9 at a constant injection amount, the drying device 10A of the present embodiment intermittently injects the gas 9, and The difference is that the injection amount of the gas 9 is changed.

  Further, the above embodiment is a mode in which the gas 9 is ejected using two air knives 30A and 30B in different directions (opposite directions) from each air knife 30A and 30B. The embodiment differs in that the drying process is performed with one air knife (for example, 30A).

  Hereinafter, the drying apparatus 10A of the present embodiment will be described in detail with reference to FIGS.

  As shown in FIG. 6, the drying apparatus 10 </ b> A of the present embodiment includes a base 11 that is attached to a frame (not shown) at a predetermined angle α, and a driving roller 15 that is provided at one end of the base 11. The cleaning nozzle 20 provided on the upstream side of the base 11 and the drying nozzle 30 provided on the downstream side are provided. Further, the drying apparatus 10 includes a control unit 50, and the control unit 50 performs electrical control of the entire drying apparatus.

  The drying nozzle 30 includes an air knife 30 </ b> A disposed on the downstream side of the cleaning nozzle 20, sprays a gas 9 toward the lower side of the glass substrate 2, and adheres onto the glass substrate 2 by the pressure of the gas 9. The cleaning liquid 7 is removed by blowing and dried.

  Since the configuration of the air knife 30A is the same as that of the first air knife 30A described above, the description thereof is omitted.

  The opening 32 formed in the air knife 30 </ b> A is arranged so that the gas 9 is ejected in a direction perpendicular to the conveying direction of the glass substrate 2 and downward in the inclined direction.

  Then, as shown in FIG. 7, the control unit 50 alternately performs the ejection control and the stop control of the constant injection amount by the ON / OFF control of the injection, and intermittently injects the gas 9 onto the glass substrate 2. Let Thus, the removal effect of the cleaning liquid 7 is enhanced by changing the contact pressure of the gas 9 to the glass substrate 2 by intermittently injecting the gas 9 injected by the air knife 30A.

  In addition to the intermittent injection control described above, the control unit 50 controls the increase and decrease of the injection amount of the gas 9 alternately at a constant cycle, as shown in FIG. 8, and the injection amount of the gas 9 that contacts the glass substrate 2 To change. Thus, the removal effect of the cleaning liquid 7 is enhanced by changing the contact pressure of the gas 9 to the glass substrate 2 so that the injection amount of the gas 9 injected by the air knife 30A is changed.

  In addition, although injection control of these gas 9 may be performed independently by either one control system, the removal effect of the washing | cleaning liquid 7 can further be heightened by combining.

  Next, cleaning liquid removal processing (drying processing) using the drying apparatus of the present embodiment will be described.

  (1) First, the glass substrate 2 that has been subjected to a predetermined process in the previous step is conveyed downstream by the drive roller 15 that is driven and controlled by the control unit 50.

  (2) Next, when the glass substrate 2 is transported below the cleaning nozzle 20, the cleaning liquid 7 is sprayed from the cleaning nozzle 20 onto the surface of the glass substrate 2 by the control unit 50, and the glass substrate 2 is cleaned. Is done.

  (3) Next, when the photoelectric sensor 36 a detects the glass substrate 2, the control unit 50 that has received the detection result moves the air knife 30 </ b> A corresponding to the glass substrate 2 being conveyed while moving the glass substrate 2. The gas 9 is sprayed onto the surface, and the cleaning liquid 7 is blown off to dry the surface of the glass substrate 2.

  In the air knife 30 </ b> A, the gas 9 is blown toward the glass substrate 2 toward the lower side in the inclination direction of the glass substrate 2. Further, as described above, the gas 9 is injected intermittently and while changing the injection amount. As a result, the cleaning liquid 7 is pushed away in the jet direction of the gas 9 and blown off beyond the protrusions 71 of the pattern 70.

  (4) Finally, the glass substrate 2 is transported to the next step, and the drying apparatus 10 of the present embodiment performs such operations sequentially, whereby the glass substrate 2 is cleaned and dried.

  In addition, this invention is not limited to the said embodiment, A various change is possible within the range of the summary of this invention. For example, you may apply this embodiment and other embodiment as the drying apparatus 10 combining. Specifically, the gas 9 is jetted in the reverse direction using the two air knives 30A and 30B, the gas 9 is jetted intermittently, and the jet quantity is changed. In the first embodiment, the gas 9 is jetted by the two air knives 30A and 30B so as to be opposed to each other. However, one air knife may be rotated downward. Absent.

2 Glass substrate 7 Cleaning liquid 9 Gas 10 Drying device 11 Base 15 Drive roller 30A, 30B Air knife 35 Movement mechanism part

Claims (4)

A substrate drying apparatus that removes the cleaning liquid adhering to the substrate after cleaning and dries the substrate,
Conveying means for conveying the substrate at an inclination;
A plurality of gas blowing means for blowing gas to the substrate;
Moving means for moving each of the gas blowing means on the transport path of the substrate together with the substrate being transported;
Comprising
Each said gas spraying means sprays gas from a different direction with respect to the said board | substrate, The drying apparatus of the board | substrate characterized by the above-mentioned.   The said gas spraying means is provided with 2 sets of air knives, and each air knife is inclined and provided so that it may become line symmetrical in the direction orthogonal to a conveyance direction. Substrate drying equipment.   3. The substrate drying apparatus according to claim 1, wherein the moving unit moves the gas blowing unit at a speed slower than a conveyance speed of the substrate.   The substrate after cleaning is conveyed while being inclined, and a plurality of gas spraying means for injecting gas to the substrate are moved together with the substrate, and each gas spraying means injects the gas in a different direction with respect to the substrate. A method for drying a substrate, comprising:

Images