JP2013253807A - Spectroscopic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a spectroscopic device that emits transmitted light having a uniform spectrum.SOLUTION: A spectroscopic device comprises: a first filter in which a transmission wavelength of transmitted light continuously changes along a predetermined direction from a first wavelength to a second wavelength that is longer than the first wavelength; and a second filter that is placed between a light source and the first filter and in which a light intensity from the light source is controlled for each wavelength so that intensities of the transmitted light transmitted through the first filter are almost same in a zone between the first wavelength and the second wavelength.

Description

  The present invention relates to a spectroscopic device.

  Conventionally, a spectroscopic measurement apparatus using a wavelength selection filter (linear variable filter) formed so that transmission wavelengths are different along a predetermined direction is known. For example, Patent Document 1 describes a spectroscopic measurement apparatus that forms an object image on a wavelength selection filter telecentricly without vignetting.

JP 2011-226876 A

  The spectroscopic measurement device described in Patent Document 1 has a problem that the intensity of light transmitted through the wavelength selection filter varies depending on the wavelength. If the intensity varies depending on the wavelength, the signal noise of the object to be measured becomes large in a wavelength band with a weak intensity, and accurate spectral sensitivity measurement cannot be performed.

  The spectroscopic device according to claim 1, a first filter in which a transmission wavelength of transmitted light continuously changes from a first wavelength to a second wavelength longer than the first wavelength along a predetermined direction, a light source, and the first The intensity of the light from the light source is set to a wavelength such that the intensity of the transmitted light that is disposed between the filter and the first filter passes through the first filter is substantially the same in the section from the first wavelength to the second wavelength. And a second filter that adjusts for each.

  According to the present invention, it is possible to provide a spectroscopic device that emits light with uniform intensity at each wavelength.

1 is a perspective view of a spectroscopic device constituting a spectral sensitivity measurement system according to a first embodiment of the present invention. 1 is a block diagram showing a configuration of a spectroscopic device 1. FIG. It is a schematic diagram of LVF108a provided in the back | latter stage of the illumination lens 107a with which the 1st block 11 is provided. It is a figure which shows an example of the spectral transmission characteristic of the flattening filter 104a. 3 is a schematic diagram of an LVF 108a, a light shielding plate 109a, and a diffusion plate 110a arranged in the vicinity of the first light emitting unit 10. FIG. It is a figure which shows an example of the display screen of a spectral sensitivity analyzer. It is a block diagram which shows the structure of the spectroscopy apparatus which comprises the spectral sensitivity measuring system which concerns on the 2nd Embodiment of this invention. It is a block diagram which shows the structure of the spectroscopy apparatus which comprises the spectral sensitivity measuring system which concerns on the 3rd Embodiment of this invention.

  Hereinafter, a spectral sensitivity measuring system including a spectroscopic device to which the present invention is applied will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a perspective view of a spectroscopic device constituting the spectral sensitivity measurement system according to the first embodiment of the present invention. The spectral sensitivity measurement system of this embodiment is a system that measures the spectral sensitivity of an optical device such as a camera, and includes a spectral device 1 shown in FIG. 1 and a spectral sensitivity analysis device described later. Below, the example which measures the spectral sensitivity of the digital camera 2 is demonstrated.

  The spectroscopic device 1 includes a first light emitting unit 10 and a second light emitting unit 20 on one surface thereof. The spectroscopic device 1 emits light (so-called visible light) having a wavelength of about 390 nanometers to 710 nanometers from the first light emitting unit 10. The second light emitting unit 20 emits light having a wavelength of about 630 nm to 1150 nm (so-called near infrared light). The user of the spectral sensitivity measurement system uses the first light emitting unit 10 and the second light emitting unit 20 in the state where the light is not emitted (the light source is turned off) in the digital camera 2 to be measured, The first light emitting unit 10 and the second light emitting unit 20 in a state where light is emitted (a state where the light source is turned on) are photographed. And the picked-up image output from the digital camera 2 is analyzed with the spectral sensitivity analyzer mentioned later, and the spectral sensitivity of the optical apparatus is obtained.

(Configuration of Spectrometer 1)
FIG. 2 is a block diagram showing the configuration of the spectroscopic device 1. The spectroscopic device 1 includes a first block 11 corresponding to the first light emitting unit 10 and a second block 21 corresponding to the second light emitting unit 20. Hereinafter, first, the first block 11 corresponding to the first light emitting unit 10 will be described.

  The first block 11 includes a light source 101a that emits visible light (for example, light having a component in a wavelength range of about 390 nanometers to 710 nanometers). The light source 101a is configured by, for example, a xenon lamp. The light emitted from the light source 101a is collimated by the collimating lens 102a to become parallel light. The parallel light is attenuated by the light amount adjusting unit 103a and adjusted to an appropriate light amount. The light amount adjusting unit 103a is preferably configured not to change the spectrum of the light from the light source 101a by a mesh screen method or the like instead of a so-called ND filter or the like. The light that has passed through the light amount adjusting unit 103a is incident on the flattening filter 104a installed at an angle with respect to the light amount adjusting unit 103a. The reason why the flattening filter 104a is installed at an angle is to prevent light that has not passed through the flattening filter 104a from becoming stray light. Details of the flattening filter 104a will be described later.

  The parallel light that has passed through the flattening filter 104a is condensed by the condenser lens 105a and is incident on one end of the bundle fiber 106a. The other end of the bundle fiber 106 a is directed to the first light emitting unit 10 inside the spectroscopic device 1. That is, the light incident on one end of the bundle fiber 106a on the light source 101a side is emitted toward the first light emitting unit 10 from the other end of the bundle fiber 106a. This light is collimated again by the illumination lens 107 a provided between the other end of the bundle fiber 106 a and the first light emitting unit 10, and is a linear variable filter (LVF) installed in the vicinity of the first light emitting unit 10. Illuminated at 108a. The LVF 108a will be described in detail later. A part of the light transmitted through the LVF 108a is shielded by the light shielding plate 109a. The light shielding plate 109a has an opening, and light that is not shielded passes through the opening and reaches the diffusion plate 110a. The diffusion plate 110 a faces the first light emitting unit 10, and light diffused by the diffusion plate 110 a is emitted from the first light emitting unit 10.

  Next, the second block 21 corresponding to the second light emitting unit 20 will be described. The second block 21 includes a light source 101b that emits near-infrared light (for example, light having a component in a wavelength range of about 630 nm to 1150 nm). The light source 101b is configured by, for example, a halogen lamp. The light emitted from the light source 101b is similar to the light emitted from the light source 101a, the collimating lens 102b, the light amount adjusting unit 103b, the flattening filter 104b, the condensing lens 105b, and the bundle fiber 106b arranged in the same manner as the first block 11. Then, the light passes through the illumination lens 107b, the LVF 108b, the light shielding plate 109b, and the diffusion plate 110b, and is emitted from the second light emitting unit 20.

  As described above, since the spectroscopic device 1 includes two light emitting units that respectively emit two types of light having different wavelength regions, the spectral sensitivity of the digital camera 2 can be set in a wide range from the visible light region to the near infrared region. Can be measured.

(Description of linear variable filter)
FIG. 3 is a schematic diagram of the LVF 108a provided in the rear stage of the illumination lens 107a provided in the first block 11. The LVF 108a is an optical filter that continuously changes the transmission wavelength of transmitted light from about 380 nanometers to about 710 nanometers along a predetermined direction. In the following description, the horizontal direction of the paper (the direction represented by the arrow X) is defined as the x axis.

  As shown in FIG. 3A, the LVF 108a is configured such that the transmitted light amount for each wavelength continuously changes at each coordinate from x = 0 to x = N. For example, light having a wavelength of about 380 nanometers is best transmitted near x = 0, and light having a wavelength of about 710 nanometers is best transmitted near x = N. At other positions, the larger the x, the longer wavelength light is transmitted. FIG. 3B shows a graph in which the wavelength (the wavelength at which the amount of transmitted light reaches a peak) through which the most light is transmitted for each x coordinate is plotted.

  The LVF 108b included in the second block 21 has the same configuration as that of the LVF 108a except that the wavelength range is approximately 630 to 1150 nanometers, and thus the description thereof is omitted.

(Description of flattening filter)
Next, the flattening filter 104a provided in the first stage of the LVF 108a provided in the first block 11 will be described. The flattening filter 104a reduces the intensity of light from the light source 101a so that the intensity of transmitted light that passes through the LVF 108a is substantially the same in the visible light wavelength range (for example, a wavelength range of about 390 nanometers to 710 nanometers). It is a filter that adjusts (attenuates) for each wavelength.

  The light source 101a emits light in the above-described wavelength range corresponding to visible light, but the intensity varies for each wavelength. In addition, since each optical member existing between the light source 101a and the first light emitting unit 10 has its own spectral transmission characteristic, the intensity of light of each wavelength is also transmitted when passing through these optical members. Change. The flattening filter 104a is an optical filter that changes the intensity of transmitted light so that there is no difference in the intensity of light for each wavelength at the time of emission from the LVF 108a (emission from the first light emitting unit 10). That is, the light emitted from the first light emitting unit 10 has a substantially uniform intensity over the entire wavelength range. The flattening filter 104a is further configured to shield excess light that is not included in the wavelength range.

  FIG. 4 is a diagram illustrating an example of the spectral transmission characteristics of the flattening filter 104a. In the graph of FIG. 4, the horizontal axis represents wavelength and the vertical axis represents intensity. The flattening filter 104a can be designed by measuring the intensity for each wavelength of the light emitted from the first light emitting unit 10 when each optical member other than the flattening filter 104a is arranged. For example, it is assumed that the spectrum 30 is obtained from the first light emitting unit 10 when each optical member other than the flattening filter 104a is arranged. At this time, the flattening filter 104a may have a spectral transmission characteristic represented by reference numeral 40. By inserting the flattening filter 104a having the spectral transmission characteristic represented by reference numeral 40, the spectrum 50 of the light emitted from the first light emitting unit 10 becomes substantially uniform at each wavelength.

  Although it is difficult to control the transmittance for each wavelength with a general interference filter (for example, a band-pass filter), if a thin film can be formed into several tens to several hundreds of layers, FIG. It is possible to manufacture the flattening filter 104a having such transmittance. For example, the applicant of the present application applies and uses an automatic error correction system capable of forming a highly accurate multi-layer laminated structure of thin films of SiO 2 and Nb 2 O 5 in a sputtering apparatus. According to this automatic error correction system, by measuring the error after film formation and correcting the film thickness of the subsequent layers, film formation of tens to hundreds of layers is performed with high accuracy, and finally The desired spectral transmission characteristics can be brought to the limit.

  Similarly, for the flattening filter 104b, the intensity of transmitted light is changed so that there is no difference in light intensity for each wavelength as described above at the time of emission from the LVF 108b (emission from the second light emitting unit 20). What is necessary is just to manufacture as an optical filter to be made.

(Description of the first light emitting unit 10)
FIG. 5 is a schematic diagram of the LVF 108a, the light shielding plate 109a, and the diffusion plate 110a arranged in the vicinity of the first light emitting unit 10, and FIG. 5 (a) is viewed from the front of the spectroscopic device 1 (FIG. 1). FIG. 5B shows a state seen from the side of the digital camera 2 in the perspective view.

  As shown in FIG. 5B, the spectroscopic device 1 includes two LVFs 108a. This is because of the manufacturing process, the LVF 108a has a rectangular shape with the long side in the direction (x direction) in which the transmission wavelength changes, and it is difficult to increase the area of the region where the transmitted light is emitted with only one LVF 108a. This is because of this.

  As shown in FIG. 5A, the light shielding plate 109a is provided with rectangular openings 60a and 60b along the direction in which the transmission wavelength changes. The light shielding plate 109a shields part of the transmitted light from the two LVFs 108a, and allows the remaining light to pass through these two openings 60a and 60b. In addition, pinholes 61 through which light serving as an indicator of the transmission wavelength is made open at predetermined positions around these openings 60a and 60b.

  The pinhole 61 includes, for example, 400 nanometers and 500 nanometers provided at a position corresponding to a predetermined transmission wavelength of the LVF 108a (represented by a dotted frame 62) and short openings 60a and 60b. Those provided at the center in the side direction (represented by a broken line frame 63) are included. The former pinhole 61 is disposed along the x direction of the LVF 108a. The pinhole 61 is used for, for example, alignment of the light shielding plate 109a and the LVF 108a when assembling the spectroscopic device 1, and from the image of the first light emitting unit 10 photographed by the digital camera 2, the spectroscopic of the digital camera 2 is used. It is also used when calculating the sensitivity (details will be described later). Light transmitted through the LVF 108a that is not shielded by the light shielding plate 109a enters the diffusion plate 110a. Thereby, the transmitted light of the LVF 108a once forms an image on the diffusion plate 110a.

  In addition, since the structure of the 2nd light emission part 20 is the same as that of the structure of the 1st light emission part 10 demonstrated above, description is abbreviate | omitted.

(Explanation of spectral sensitivity analyzer)
Next, a spectral sensitivity analysis apparatus included in the spectral sensitivity measurement system of this embodiment will be described. The spectral sensitivity analysis apparatus according to this embodiment includes a computer including a CPU, a display device, an input device, and the like, and a spectral sensitivity analysis program executed by the CPU. In the following description, only the first light emitting unit 10 will be described for the sake of simplicity, but the spectral sensitivity analysis is also performed for the second light emitting unit 20 in the same procedure.

  FIG. 6 is a diagram illustrating an example of a display screen of the spectral sensitivity analysis apparatus. First, the user inputs the results of photographing the first light emitting unit 10 with the optical device to be analyzed (two results when the light source 101a is off and two results when the light source 101a is on) to the spectral sensitivity analyzer. The spectral sensitivity analysis apparatus displays the input photographing result in the image data display area 71 of the screen 70. Thereafter, the user inputs the position of the pinhole 61 on the captured image of the first light emitting unit 10 displayed in the image data display area 71 using an input device such as a mouse. As described above, since the position of the pinhole 61 corresponds to a specific wavelength, the spectral sensitivity analysis apparatus determines the transmission wavelength corresponding to each position on the openings 60a and 60b from the input position of the pinhole 61. Can be identified. The spectral sensitivity analysis device analyzes the spectral sensitivity based on the light reception output of each wavelength specified as described above, and displays it in the spectral distribution display area 72. Note that the spectral sensitivity analyzer removes background data due to external light or the like by subtracting the imaging result when the light source 101a is off from the imaging result when the light source 101a is on.

According to the spectral sensitivity measurement system according to the first embodiment described above, the following operational effects can be obtained.
(1) The spectroscopic device 1 is disposed between the LVF 108a in which the transmission wavelength of the transmitted light continuously changes from 390 nanometers to 710 nanometers along the x direction, and the light source 101a and the LVF 108a, and transmits the LVF 108a. A flattening filter 104a that adjusts the intensity of light from the light source 101a for each wavelength so that the intensity of transmitted light is substantially the same in a section from 390 nanometers to 710 nanometers. Since it did in this way, the transmitted light which has a uniform spectrum can be radiate | emitted with respect to the optical apparatus used as the measuring object of spectral sensitivity from the spectroscopic apparatus 1. FIG.

(2) The flattening filter 104a disposed between the light source 101a and the LVF 108a shields light with a wavelength of 390 nanometers or less and light with a wavelength of 710 nanometers or more. Since it did in this way, the light of the wavelength range outside a measuring object is not radiate | emitted from the 1st light emission part 10, and the precision of spectral sensitivity measurement improves.

(3) A light shielding plate 109a for shielding a part of the transmitted light from the LVF 108a is provided in the vicinity of the LVF 108a. The light shielding plate 109a includes a plurality of pinholes 61 that are disposed along the x direction of the LVF 108a and allow light serving as a transmission wavelength index to pass therethrough. Since it did in this way, it can identify easily what kind of wavelength light permeate | transmits in each position of the X direction of LVF108a.

(4) The pinhole 61 provided in the light shielding plate 109a transmits the light transmitted through the LVF 108a. In other words, the pinhole 61 is disposed at a position overlapping the LVF 108a. Since it did in this way, the assembly | attachment of LVF108a and the light-shielding plate 109a can be made easy.

(5) The spectroscopic device 1 includes a plurality of LVFs 108a. Since it did in this way, the area of the light emission area | region of the 1st light emission part 10 can be taken large, and the measurement precision of spectral sensitivity improves.

(6) The light amount adjusting unit 103a disposed between the light source 101a and the LVF 108a reduces the light traveling from the light source 101a to the LVF 108a while maintaining the spectrum of the light. Since it did in this way, it can avoid becoming a state unfavorable for the measurement of spectral sensitivity accompanying adjustment of light quantity, for example, the intensity | strength of the light of a specific wavelength falls large.

(7) A diffusion plate 110 a is provided between the LVF 108 a and the first light emitting unit 10. Since it did in this way, when the focal depth of the digital camera 2 is deep, for example, it can prevent that the camera 2 image-captures the image before and behind LVF108a.

(Second Embodiment)
FIG. 7 is a block diagram showing the configuration of the spectroscopic device that constitutes the spectral sensitivity measurement system according to the second embodiment of the present invention. The spectroscopic device 1 according to the present embodiment is different from the spectroscopic device 1 according to the first embodiment only in the configuration from the light shielding plate 109a. Hereinafter, the same parts as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and the description thereof is omitted. 7 shows only the first block 11, the configuration of the second block 21 is the same as the configuration of the first block 11, and the description thereof is omitted.

  In the spectroscopic device 1 of the present embodiment, a magnifying lens 111a is provided at the tip of the light shielding plate 109a so that light that has passed through the LVF 108a and has not been shielded by the light shielding plate 109a is incident thereon. The magnifying lens 111 a magnifies incident light and illuminates a transmissive diffusion plate 112 a provided in the vicinity of the first light emitting unit 10. As a result, an enlarged image of the LVF 108a is displayed on the transmissive diffusion plate 112a. The user takes this magnified image with an optical device to be measured (for example, the digital camera 2), and obtains the spectral sensitivity of the optical device with the spectral sensitivity analyzer.

According to the spectral sensitivity measurement system according to the second embodiment described above, the following operational effects can be obtained.
(1) The light transmitted through the LVF 108 a is magnified by the magnifying lens 111 a and is emitted from the first light emitting unit 10. Since it did in this way, the area of the light emission area | region in the 1st light emission part 10 can be made larger than the area of opening part 60a, 60b of the light-shielding plate 109a, and the measurement accuracy of spectral sensitivity can be improved.

(Third embodiment)
In the first embodiment and the second embodiment described above, the spectral sensitivity measurement system for measuring the spectral sensitivity of an optical apparatus such as the digital camera 2 has been described. The spectral sensitivity measurement system according to the third embodiment is a system for measuring the spectral sensitivity of a sample such as an image sensor or a photosensitive material, unlike the system. Hereinafter, the spectroscopic device included in the spectral sensitivity measurement system according to the present embodiment will be described. In addition, about the same location as 1st Embodiment, the code | symbol same as 1st Embodiment is attached | subjected and description is abbreviate | omitted.

  FIG. 8 is a block diagram showing a configuration of a spectroscopic device constituting a spectral sensitivity measurement system according to the third embodiment of the present invention. The spectroscopic device 1 according to the present embodiment is different from the spectroscopic device 1 according to the first embodiment only in the configuration from the light shielding plate 109a. In FIG. 8, only the configuration of the first block 11 is shown. Since the configuration of the second block 21 is the same as the configuration of the first block 11, the description thereof is omitted.

  In the present embodiment, the transmitted light of the LVF 108a that is not shielded by the light shielding plate 109a enters the illumination lens 113a. The user previously arranges the sample 114 at a position conjugate with the LVF 108a so that the light emitted from the illumination lens 113a is illuminated on the sample 114. In addition, it is desirable that the illumination light with which the sample 114 is illuminated from the illumination lens 113a is telecentric illumination. The user can obtain the spectral sensitivity from the sample 114 illuminated with the illumination light from the spectroscopic device 1 by a method according to the sample 114.

  According to the spectral sensitivity measurement system according to the third embodiment described above, the same operational effects as those of the first embodiment can be obtained for the sample 114 such as an image sensor or a photosensitive material instead of the optical device.

  The following modifications are also within the scope of the present invention, and one or a plurality of modifications can be combined with the above-described embodiment.

(Modification 1)
The flattening filter 104a can be configured as a plurality of (for example, two) different filters. For example, instead of the flattening filter 104a, a first filter that blocks light that is not visible light and a second filter that makes the spectrum of light emitted from the first light emitting unit 10 substantially uniform are first. The block 11 may be provided.

(Modification 2)
The pinhole 61 may be provided at a position that does not overlap with the LVF 108a. That is, the pinhole 61 may transmit light that has not passed through the LVF 108a out of light from the light source 101a. The light transmitted through the pinhole 61 may be light from a light source other than the light source 101a. The pinhole 61 in the vicinity of the wavelength where the optical instrument and sample to be measured for spectral sensitivity can hardly be detected is difficult to be visually recognized by the user on the display screen of the spectral sensitivity analyzer. The pinhole 61 can be easily viewed by the user, and the operability of the spectral sensitivity analyzer is improved.

(Modification 3)
In each first embodiment, the spectroscopic device 1 includes two light emitting units (the first light emitting unit 10 and the second light emitting unit 20), but the present invention is not limited to such an embodiment. For example, the spectroscopic device 1 may be provided with a single light emitting unit corresponding to a wide wavelength range from visible light to infrared light. In addition, when it is not necessary to measure the spectral sensitivity for such a wide wavelength range (for example, it is sufficient that the spectral sensitivity can be measured only for the visible light range), only one light emitting unit corresponding to the wavelength range needs to be prepared. Conversely, a large number of light emitting units may be provided by the spectroscopic device 1.

(Modification 4)
In the first embodiment, the spectroscopic device 1 includes a plurality of LVFs 108a. However, the present invention is not limited to such an embodiment. For example, only the opening 60a may be provided in the light shielding plate 109a, and the LVF 108a may be only the one corresponding to the opening 60a. The shape of the opening 60a is not limited to the shape described in the first embodiment (the shape shown in FIG. 5). For one LVF 108a, the light shielding plate 109a may have a large number of openings.

(Modification 5)
The spectroscopic device 1 does not necessarily include all the optical members described in the first embodiment. For example, in FIG. 2, the condensing lens 105a, the bundle fiber 106a, the illumination lens 107a, and the like may be omitted. Further, the spectroscopic device 1 may not include the light source 101a. For example, light from a light source provided outside the spectroscopic device 1 may be guided to the first block 11 from an opening provided in the housing of the spectroscopic device 1. At this time, if collimated light enters the casing of the spectroscopic device 1, the collimating lens 102a can be omitted.

  As long as the characteristics of the present invention are not impaired, the present invention is not limited to the above-described embodiments, and other forms conceivable within the scope of the technical idea of the present invention are also included in the scope of the present invention. .

DESCRIPTION OF SYMBOLS 1 ... Spectroscopic device, 10 ... 1st light emission part, 11 ... 1st block, 20 ... 2nd light emission part, 21 ... 2nd block, 101a, 101b ... Light source, 102a, 102b ... Collimate lens, 103a, 103b ... Light quantity adjustment 104a, 104b ... flattening filter, 105a, 105b ... condensing lens, 106a, 106b ... bundle fiber, 107a, 107b ... illumination lens, 108a, 108b ... linear variable filter (LVF), 109a, 109b ... light shielding plate, 110a, 110b ... diffusion plate, 111a ... magnifying lens, 112a ... illumination lens

Claims (9)

A first filter in which a transmission wavelength of transmitted light continuously changes from a first wavelength to a second wavelength longer than the first wavelength along a predetermined direction;
The light from the light source is disposed between the light source and the first filter so that the intensity of the transmitted light passing through the first filter is substantially the same in the section from the first wavelength to the second wavelength. A second filter for adjusting the light intensity for each wavelength;
A spectroscopic device comprising: The spectroscopic device according to claim 1,
A spectroscopic device comprising a third filter that is disposed between the light source and the first filter and shields light having a wavelength equal to or less than the first wavelength and light having a wavelength equal to or greater than the second wavelength. The spectroscopic device according to claim 2,
A spectroscopic device comprising a filter member in which the second filter and the third filter are integrally formed. In the spectroscopic device according to any one of claims 1 to 3,
A shielding member that is provided in the vicinity of the first filter and shields part of the light incident on the first filter or the transmitted light from the first filter;
The spectroscopic device, wherein the shielding member includes at least two non-shielding portions that are arranged along the predetermined direction and allow light that is an indicator of the transmission wavelength to pass therethrough. The spectroscopic device according to claim 4,
The spectroscopic device, wherein the two non-shielding portions allow the transmitted light of the first filter to pass through. The spectroscopic device according to claim 4,
The spectroscopic device, wherein the two non-shielding portions allow light different from the transmitted light of the first filter to pass. In the spectroscopic device according to any one of claims 1 to 6,
A spectroscopic device comprising a plurality of the first filters. In the spectroscopic device according to any one of claims 1 to 7,
A spectroscopic device, comprising: a light amount adjusting unit that is disposed between the light source and the first filter and diminishes light traveling from the light source toward the first filter while maintaining a spectrum of the light. In the spectroscopic device according to any one of claims 1 to 8,
A spectroscopic device comprising the light source.