JP2013249514A - Electrolytic silver plating solution for optical semiconductor - Google Patents
Electrolytic silver plating solution for optical semiconductor Download PDFInfo
- Publication number
- JP2013249514A JP2013249514A JP2012124972A JP2012124972A JP2013249514A JP 2013249514 A JP2013249514 A JP 2013249514A JP 2012124972 A JP2012124972 A JP 2012124972A JP 2012124972 A JP2012124972 A JP 2012124972A JP 2013249514 A JP2013249514 A JP 2013249514A
- Authority
- JP
- Japan
- Prior art keywords
- plating solution
- silver plating
- silver
- optical semiconductor
- lead frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 138
- 229910052709 silver Inorganic materials 0.000 title claims abstract description 112
- 239000004332 silver Substances 0.000 title claims abstract description 112
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims abstract description 111
- 239000004065 semiconductor Substances 0.000 title claims abstract description 41
- 230000003287 optical effect Effects 0.000 title claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 43
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052737 gold Inorganic materials 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 20
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 20
- 150000003464 sulfur compounds Chemical class 0.000 claims abstract description 19
- 229910052785 arsenic Inorganic materials 0.000 claims abstract description 18
- 150000001875 compounds Chemical class 0.000 claims abstract description 18
- 229910052802 copper Inorganic materials 0.000 claims abstract description 18
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 18
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 17
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 17
- 229910052738 indium Inorganic materials 0.000 claims abstract description 17
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 17
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 17
- 229910052716 thallium Inorganic materials 0.000 claims abstract description 17
- 229910052718 tin Inorganic materials 0.000 claims abstract description 17
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 17
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 17
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 17
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 17
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 16
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 16
- 229910052740 iodine Inorganic materials 0.000 claims abstract description 16
- 229940065287 selenium compound Drugs 0.000 claims abstract description 15
- 150000003343 selenium compounds Chemical class 0.000 claims abstract description 15
- 229940098221 silver cyanide Drugs 0.000 claims description 21
- 239000010936 titanium Substances 0.000 claims description 19
- 239000010949 copper Substances 0.000 claims description 17
- 150000003839 salts Chemical class 0.000 claims description 17
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 claims description 10
- PMNLUUOXGOOLSP-UHFFFAOYSA-N 2-mercaptopropanoic acid Chemical compound CC(S)C(O)=O PMNLUUOXGOOLSP-UHFFFAOYSA-N 0.000 claims description 8
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 claims description 6
- 150000001913 cyanates Chemical class 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- RVBUGGBMJDPOST-UHFFFAOYSA-N 2-thiobarbituric acid Chemical compound O=C1CC(=O)NC(=S)N1 RVBUGGBMJDPOST-UHFFFAOYSA-N 0.000 claims description 4
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- LEVWYRKDKASIDU-IMJSIDKUSA-N L-cystine Chemical compound [O-]C(=O)[C@@H]([NH3+])CSSC[C@H]([NH3+])C([O-])=O LEVWYRKDKASIDU-IMJSIDKUSA-N 0.000 claims description 4
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 4
- QGJOPFRUJISHPQ-NJFSPNSNSA-N carbon disulfide-14c Chemical compound S=[14C]=S QGJOPFRUJISHPQ-NJFSPNSNSA-N 0.000 claims description 4
- XUJNEKJLAYXESH-UHFFFAOYSA-N cysteine Natural products SCC(N)C(O)=O XUJNEKJLAYXESH-UHFFFAOYSA-N 0.000 claims description 4
- 235000018417 cysteine Nutrition 0.000 claims description 4
- 229960003067 cystine Drugs 0.000 claims description 4
- KOUKXHPPRFNWPP-UHFFFAOYSA-N pyrazine-2,5-dicarboxylic acid;hydrate Chemical compound O.OC(=O)C1=CN=C(C(O)=O)C=N1 KOUKXHPPRFNWPP-UHFFFAOYSA-N 0.000 claims description 4
- ZEMGGZBWXRYJHK-UHFFFAOYSA-N thiouracil Chemical compound O=C1C=CNC(=S)N1 ZEMGGZBWXRYJHK-UHFFFAOYSA-N 0.000 claims description 4
- 229950000329 thiouracil Drugs 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- JPJALAQPGMAKDF-UHFFFAOYSA-N selenium dioxide Chemical compound O=[Se]=O JPJALAQPGMAKDF-UHFFFAOYSA-N 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 claims description 2
- 229910002651 NO3 Inorganic materials 0.000 claims description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 2
- 229910019142 PO4 Inorganic materials 0.000 claims description 2
- WTKUDAMSULHEKV-UHFFFAOYSA-N [Se](C#N)C#N.[K] Chemical compound [Se](C#N)C#N.[K] WTKUDAMSULHEKV-UHFFFAOYSA-N 0.000 claims description 2
- 229910052789 astatine Inorganic materials 0.000 claims description 2
- KXZJHVJKXJLBKO-UHFFFAOYSA-N chembl1408157 Chemical compound N=1C2=CC=CC=C2C(C(=O)O)=CC=1C1=CC=C(O)C=C1 KXZJHVJKXJLBKO-UHFFFAOYSA-N 0.000 claims description 2
- 239000007795 chemical reaction product Substances 0.000 claims description 2
- NRUPVVPBPCPMPJ-UHFFFAOYSA-N cyano selenocyanate Chemical compound N#C[Se]C#N NRUPVVPBPCPMPJ-UHFFFAOYSA-N 0.000 claims description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 2
- 239000010452 phosphate Substances 0.000 claims description 2
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 claims description 2
- -1 potassium selenium oxide Chemical compound 0.000 claims description 2
- 229940000207 selenious acid Drugs 0.000 claims description 2
- MCAHWIHFGHIESP-UHFFFAOYSA-N selenous acid Chemical compound O[Se](O)=O MCAHWIHFGHIESP-UHFFFAOYSA-N 0.000 claims description 2
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims 1
- LUZZASVJWGRCFO-UHFFFAOYSA-N [Na].[Ag]C#N Chemical compound [Na].[Ag]C#N LUZZASVJWGRCFO-UHFFFAOYSA-N 0.000 claims 1
- 125000001931 aliphatic group Chemical group 0.000 claims 1
- 125000003118 aryl group Chemical group 0.000 claims 1
- HKSGQTYSSZOJOA-UHFFFAOYSA-N potassium argentocyanide Chemical compound [K+].[Ag+].N#[C-].N#[C-] HKSGQTYSSZOJOA-UHFFFAOYSA-N 0.000 claims 1
- 229940095064 tartrate Drugs 0.000 claims 1
- 238000005260 corrosion Methods 0.000 abstract description 17
- 230000007797 corrosion Effects 0.000 abstract description 17
- 230000000087 stabilizing effect Effects 0.000 abstract description 3
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical class N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 abstract 1
- 238000005987 sulfurization reaction Methods 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 58
- 239000010931 gold Substances 0.000 description 17
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 14
- 239000011701 zinc Substances 0.000 description 14
- 230000004907 flux Effects 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 150000002825 nitriles Chemical class 0.000 description 4
- LWIHDJKSTIGBAC-UHFFFAOYSA-K potassium phosphate Substances [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000005486 sulfidation Methods 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000001488 sodium phosphate Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 238000005282 brightening Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
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- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 150000003892 tartrate salts Chemical class 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
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- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
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- 229910002601 GaN Inorganic materials 0.000 description 1
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- 239000004954 Polyphthalamide Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
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- 229940026189 antimony potassium tartrate Drugs 0.000 description 1
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- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- BEQZMQXCOWIHRY-UHFFFAOYSA-H dibismuth;trisulfate Chemical compound [Bi+3].[Bi+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O BEQZMQXCOWIHRY-UHFFFAOYSA-H 0.000 description 1
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- ISDDBQLTUUCGCZ-UHFFFAOYSA-N dipotassium dicyanide Chemical compound [K+].[K+].N#[C-].N#[C-] ISDDBQLTUUCGCZ-UHFFFAOYSA-N 0.000 description 1
- ZPWVASYFFYYZEW-UHFFFAOYSA-L dipotassium hydrogen phosphate Chemical compound [K+].[K+].OP([O-])([O-])=O ZPWVASYFFYYZEW-UHFFFAOYSA-L 0.000 description 1
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- WBTCZEPSIIFINA-MSFWTACDSA-J dipotassium;antimony(3+);(2r,3r)-2,3-dioxidobutanedioate;trihydrate Chemical compound O.O.O.[K+].[K+].[Sb+3].[Sb+3].[O-]C(=O)[C@H]([O-])[C@@H]([O-])C([O-])=O.[O-]C(=O)[C@H]([O-])[C@@H]([O-])C([O-])=O WBTCZEPSIIFINA-MSFWTACDSA-J 0.000 description 1
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- TVQLLNFANZSCGY-UHFFFAOYSA-N disodium;dioxido(oxo)tin Chemical compound [Na+].[Na+].[O-][Sn]([O-])=O TVQLLNFANZSCGY-UHFFFAOYSA-N 0.000 description 1
- XERQTZLDFHNZIC-UHFFFAOYSA-L disodium;tellurate Chemical compound [Na+].[Na+].[O-][Te]([O-])(=O)=O XERQTZLDFHNZIC-UHFFFAOYSA-L 0.000 description 1
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- IZLAVFWQHMDDGK-UHFFFAOYSA-N gold(1+);cyanide Chemical compound [Au+].N#[C-] IZLAVFWQHMDDGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910000337 indium(III) sulfate Inorganic materials 0.000 description 1
- PSCMQHVBLHHWTO-UHFFFAOYSA-K indium(iii) chloride Chemical compound Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 description 1
- XGCKLPDYTQRDTR-UHFFFAOYSA-H indium(iii) sulfate Chemical compound [In+3].[In+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O XGCKLPDYTQRDTR-UHFFFAOYSA-H 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
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- 230000001788 irregular Effects 0.000 description 1
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- 239000007769 metal material Substances 0.000 description 1
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- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- 235000019796 monopotassium phosphate Nutrition 0.000 description 1
- 229910000403 monosodium phosphate Inorganic materials 0.000 description 1
- 235000019799 monosodium phosphate Nutrition 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 1
- FYWSTUCDSVYLPV-UHFFFAOYSA-N nitrooxythallium Chemical compound [Tl+].[O-][N+]([O-])=O FYWSTUCDSVYLPV-UHFFFAOYSA-N 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- WVNUZODXEDDHRM-UHFFFAOYSA-L oxalate;thallium(1+) Chemical compound [Tl+].[Tl+].[O-]C(=O)C([O-])=O WVNUZODXEDDHRM-UHFFFAOYSA-L 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- 239000006179 pH buffering agent Substances 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- GPNDARIEYHPYAY-UHFFFAOYSA-N palladium(ii) nitrate Chemical compound [Pd+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O GPNDARIEYHPYAY-UHFFFAOYSA-N 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920006375 polyphtalamide Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 229960003975 potassium Drugs 0.000 description 1
- AVTYONGGKAJVTE-OLXYHTOASA-L potassium L-tartrate Chemical compound [K+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O AVTYONGGKAJVTE-OLXYHTOASA-L 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- 229960002635 potassium citrate Drugs 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 235000011082 potassium citrates Nutrition 0.000 description 1
- GNSKLFRGEWLPPA-UHFFFAOYSA-M potassium dihydrogen phosphate Chemical compound [K+].OP(O)([O-])=O GNSKLFRGEWLPPA-UHFFFAOYSA-M 0.000 description 1
- 229910001380 potassium hypophosphite Inorganic materials 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- CRGPNLUFHHUKCM-UHFFFAOYSA-M potassium phosphinate Chemical compound [K+].[O-]P=O CRGPNLUFHHUKCM-UHFFFAOYSA-M 0.000 description 1
- 229940074439 potassium sodium tartrate Drugs 0.000 description 1
- BHZRJJOHZFYXTO-UHFFFAOYSA-L potassium sulfite Chemical compound [K+].[K+].[O-]S([O-])=O BHZRJJOHZFYXTO-UHFFFAOYSA-L 0.000 description 1
- 235000019252 potassium sulphite Nutrition 0.000 description 1
- 239000001472 potassium tartrate Substances 0.000 description 1
- 229940111695 potassium tartrate Drugs 0.000 description 1
- 235000011005 potassium tartrates Nutrition 0.000 description 1
- JVUYWILPYBCNNG-UHFFFAOYSA-N potassium;oxido(oxo)borane Chemical compound [K+].[O-]B=O JVUYWILPYBCNNG-UHFFFAOYSA-N 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- HELHAJAZNSDZJO-OLXYHTOASA-L sodium L-tartrate Chemical compound [Na+].[Na+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O HELHAJAZNSDZJO-OLXYHTOASA-L 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- 239000011684 sodium molybdate Substances 0.000 description 1
- 235000015393 sodium molybdate Nutrition 0.000 description 1
- TVXXNOYZHKPKGW-UHFFFAOYSA-N sodium molybdate (anhydrous) Chemical compound [Na+].[Na+].[O-][Mo]([O-])(=O)=O TVXXNOYZHKPKGW-UHFFFAOYSA-N 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- DZCAZXAJPZCSCU-UHFFFAOYSA-K sodium nitrilotriacetate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CC([O-])=O DZCAZXAJPZCSCU-UHFFFAOYSA-K 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 235000011008 sodium phosphates Nutrition 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
- 229940079864 sodium stannate Drugs 0.000 description 1
- 239000001433 sodium tartrate Substances 0.000 description 1
- VMDSWYDTKFSTQH-UHFFFAOYSA-N sodium;gold(1+);dicyanide Chemical compound [Na+].[Au+].N#[C-].N#[C-] VMDSWYDTKFSTQH-UHFFFAOYSA-N 0.000 description 1
- ZWZLRIBPAZENFK-UHFFFAOYSA-J sodium;gold(3+);disulfite Chemical compound [Na+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O ZWZLRIBPAZENFK-UHFFFAOYSA-J 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- SITVSCPRJNYAGV-UHFFFAOYSA-L tellurite Chemical compound [O-][Te]([O-])=O SITVSCPRJNYAGV-UHFFFAOYSA-L 0.000 description 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 1
- YTQVHRVITVLIRD-UHFFFAOYSA-L thallium sulfate Chemical compound [Tl+].[Tl+].[O-]S([O-])(=O)=O YTQVHRVITVLIRD-UHFFFAOYSA-L 0.000 description 1
- 229940119523 thallium sulfate Drugs 0.000 description 1
- 229910000374 thallium(I) sulfate Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- NCPXQVVMIXIKTN-UHFFFAOYSA-N trisodium;phosphite Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])[O-] NCPXQVVMIXIKTN-UHFFFAOYSA-N 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- 229960001763 zinc sulfate Drugs 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 1
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- Electroplating And Plating Baths Therefor (AREA)
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Abstract
Description
本発明は、光半導体装置用リードフレームまたは基板に対する電解銀めっき液と、その電解銀めっき液を用いためっき方法に関する。 The present invention relates to an electrolytic silver plating solution for a lead frame or a substrate for an optical semiconductor device, and a plating method using the electrolytic silver plating solution.
発光ダイオード(Light Emitting Diode:LED)等の光半導体装置は、照明や各種ディスプレイ、液晶テレビや携帯電話などのバックライトなどの光源として広く利用されている。これらの光半導体装置は、光半導体素子が、リードフレームや、プリント基板、セラミック基板、フレキシブル基板などの各種基板上にダイボンディングやワイヤーボンディングにより実装されて構成されている。これらの実装信頼性向上のため、リードフレームや基板上には、金めっきか銀めっきのいずれかが施されることが一般的である。金めっきは、酸化しにくく接合信頼性が高いが、光半導体素子から発せられる可視領域の光を吸収しやすいため、可視領域の光に対して光反射性に優れる銀めっきが広く使用されている。 2. Description of the Related Art Optical semiconductor devices such as light emitting diodes (LEDs) are widely used as light sources for lighting, various displays, backlights for liquid crystal televisions and mobile phones. These optical semiconductor devices are configured by mounting an optical semiconductor element on various substrates such as a lead frame, a printed circuit board, a ceramic substrate, and a flexible substrate by die bonding or wire bonding. In order to improve the mounting reliability, it is common that the lead frame or the substrate is subjected to either gold plating or silver plating. Gold plating is hard to oxidize and has high bonding reliability. However, since it easily absorbs light in the visible region emitted from the optical semiconductor element, silver plating having excellent light reflectivity with respect to light in the visible region is widely used. .
例えば、特許文献1、2には、銀めっき皮膜を光沢化する光沢剤の製造方法が開示されている。また例えば、特許文献3、4には、銀めっき皮膜のダイボンディング性やワイヤーボンディング性を向上させたり、生産性を上げるため部分めっきできるように工夫された銀めっき液が開示されている。しかしながら、光半導体装置用のリードフレームまたは基板に求められる光反射特性については、何ら検討されていない。 For example, Patent Documents 1 and 2 disclose a method for producing a brightener that brightens a silver plating film. Further, for example, Patent Documents 3 and 4 disclose silver plating solutions devised so that partial plating can be performed in order to improve the die bonding property and wire bonding property of the silver plating film or increase the productivity. However, no consideration has been given to the light reflection characteristics required of a lead frame or substrate for an optical semiconductor device.
一方、特許文献5には、光反射率の向上のため、銀めっき膜の最表面の結晶粒径を調整したLED実装用基板が開示されている。また、特許文献6には、銀めっき層上にロジウムめっき層を形成したリードフレームを有する半導体発光装置が開示されている。また、特許文献7には、純銀層の表面に硫化耐食性に優れる金属材料からなる皮膜を形成した光半導体装置用リードフレームが開示されているが、使用される銀めっき液については、何ら新規なものではなく、従来の銀めっき液を使用しているにすぎない。 On the other hand, Patent Document 5 discloses an LED mounting substrate in which the crystal grain size of the outermost surface of the silver plating film is adjusted in order to improve the light reflectance. Patent Document 6 discloses a semiconductor light emitting device having a lead frame in which a rhodium plating layer is formed on a silver plating layer. Further, Patent Document 7 discloses a lead frame for an optical semiconductor device in which a film made of a metal material having excellent sulfidation corrosion resistance is formed on the surface of a pure silver layer. It is only a conventional silver plating solution.
従来の銀めっき液では、銀めっき皮膜の光反射特性を信頼性の高いものとすることが困難である。具体的には、例えば、従来の銀めっき液でめっきしたリードフレームは、光半導体装置を実装組み立てする間に、樹脂成形機により銀めっき皮膜が機械的な変成を受けたり、また組み立て中の様々な熱処理により、銀めっき皮膜が凝集変成したりすることがある。 In the conventional silver plating solution, it is difficult to make the light reflection characteristics of the silver plating film highly reliable. Specifically, for example, in a conventional lead frame plated with a silver plating solution, a silver plating film is mechanically modified by a resin molding machine during mounting and assembling of an optical semiconductor device, and various types of assembling are being performed. The silver plating film may be agglomerated and transformed by an appropriate heat treatment.
本発明は、上記課題に鑑み成されたものであり、その目的とするところは、光半導体装置用リードフレームまたは基板に対して実装信頼性、光反射特性及び耐食性(特に、硫化腐食に対する耐食性)を安定化させることができ、これらの特性を向上させることができる銀めっき液とその銀めっき液を用いためっき方法を提供することにある。 The present invention has been made in view of the above problems, and its object is to provide mounting reliability, light reflection characteristics and corrosion resistance (particularly corrosion resistance against sulfidation corrosion) for a lead frame or a substrate for an optical semiconductor device. It is to provide a silver plating solution and a plating method using the silver plating solution that can stabilize these properties and improve these characteristics.
上記問題点を解決するために、鋭意研究を重ねた結果、光半導体装置専用の銀めっき液を完成するに至った。 As a result of intensive studies to solve the above problems, a silver plating solution dedicated to optical semiconductor devices has been completed.
すなわち、本発明は、シアン化銀錯体20〜250g/L、遊離のシアン塩50〜200g/L、セレン化合物およびイオウ化合物の少なくともいずれか一方を含有する銀めっき液に、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を、5mg/L〜10g/Lの濃度範囲で添加し、pHが10〜14である、光半導体装置用リードフレームまたは基板に対する電解銀めっき液、
シアン化銀錯体20〜250g/L、電気伝導塩50〜250g/L、遊離のシアン塩0.1〜30g/L、セレン化合物およびイオウ化合物の少なくともいずれか一方を含有する銀めっき液に、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を、5mg/L〜10g/Lの濃度範囲で添加し、pHが7.5〜14である、光半導体装置用リードフレームまたは基板に対する電解銀めっき液、
電気伝導性のあるリードフレームまたは基板を陽極とし、金属銀、ステンレス、白金族金属または白金族金属を被覆したチタンを陰極として、前記陽極及び前記陰極を前記の光半導体装置用リードフレーム及び基板に対する電解銀めっき液に浸漬し、前記リードフレームまたは前記基板を電気めっきするめっき方法
を提供するものである。
本発明の銀めっき液及びめっき方法によれば、めっき液が、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を含むため、銀めっき皮膜の電析粒子の隙間に微量のTi、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iが嵌り込み、実装工程中の機械的な圧力による変形や熱的な履歴による粒子凝集が発生しにくくなり、光反射率の高い銀反射膜としての機能を維持することができる。そのため、著しく光反射率が向上するとともに、長期間にわたり高い光反射率を維持することができる。したがって、当該銀めっき液及びめっき方法によれば、光半導体装置用リードフレームまたは基板に適用することによって、例えばLEDとしての発光効率の向上、耐食性の向上、製品間の光特性の品質安定化を得ることができる。このため、LEDの光束向上が実現できるため、LED電球内の搭載部品数の低減や液晶テレビ用バックライトLEDの搭載数低減により、省エネルギー化とともに製造コストの削減が可能となる。また、耐食性の向上により、LEDの長寿命化が可能となる。また、LEDの発光特性の部品間バラツキが向上するため、製造工程内作業ロスが低減でき製造コストの削減が可能である。
That is, the present invention provides a silver plating solution containing at least one of a silver cyanide complex 20 to 250 g / L, a free cyan salt 50 to 200 g / L, a selenium compound and a sulfur compound, Ti, Zr, V, Soluble containing at least one selected from the group consisting of Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, I An electrolytic silver plating solution for a lead frame or substrate for an optical semiconductor device, wherein the compound is added in a concentration range of 5 mg / L to 10 g / L, and the pH is 10 to 14,
In a silver plating solution containing at least one of silver cyanide complex 20 to 250 g / L, electric conduction salt 50 to 250 g / L, free cyanate 0.1 to 30 g / L, selenium compound and sulfur compound, Ti , Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, I An electrolytic silver plating solution for a lead frame or substrate for an optical semiconductor device, wherein a soluble compound containing one kind is added in a concentration range of 5 mg / L to 10 g / L, and the pH is 7.5 to 14,
An electrically conductive lead frame or substrate is used as an anode, metallic silver, stainless steel, platinum group metal or titanium coated with a platinum group metal as a cathode, and the anode and the cathode are connected to the optical semiconductor device lead frame and substrate. The present invention provides a plating method in which the lead frame or the substrate is electroplated by being immersed in an electrolytic silver plating solution.
According to the silver plating solution and the plating method of the present invention, the plating solution is Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi. , As, P, Te, Br, and a soluble compound containing at least one selected from the group consisting of I, a small amount of Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, and I are fitted, deformation due to mechanical pressure during the mounting process, and thermal Aggregation of particles due to a simple history is difficult to occur, and the function as a silver reflective film having a high light reflectance can be maintained. Therefore, the light reflectance is remarkably improved and a high light reflectance can be maintained over a long period of time. Therefore, according to the silver plating solution and the plating method, by applying to a lead frame or substrate for an optical semiconductor device, for example, improvement in light emission efficiency as an LED, improvement in corrosion resistance, and stabilization of the quality of light characteristics between products. Can be obtained. For this reason, since the luminous flux improvement of LED can be implement | achieved, the reduction in the number of mounting components in a LED bulb and the reduction in the number of mounting of backlight LEDs for liquid crystal televisions enable energy saving and a reduction in manufacturing cost. In addition, the improvement of the corrosion resistance can extend the life of the LED. Moreover, since the variation in the light emitting characteristics of the LED is improved, the work loss in the manufacturing process can be reduced, and the manufacturing cost can be reduced.
本発明によれば、光半導体装置用リードフレームまたは基板に対して実装信頼性、光反射特性及び耐食性(特に、硫化腐食に対する耐食性)を安定化させることができ、これらの特性を向上させることができる銀めっき液とその銀めっき液を用いためっき方法を提供することができる。 According to the present invention, it is possible to stabilize mounting reliability, light reflection characteristics, and corrosion resistance (particularly corrosion resistance against sulfidation corrosion) with respect to a lead frame or substrate for an optical semiconductor device, and to improve these characteristics. A silver plating solution that can be produced and a plating method using the silver plating solution can be provided.
以下に、本発明を詳細に説明する。
光半導体装置は、電気回路を形成し、適切な電圧を印加すると発光するチッ化ガリウムなどの光半導体素子をリードフレームや基板(プリント基板、セラミック基板、フレキシブル基板など)に、適切なペーストなどでダイボンディングして固定し、p型とn型の電極に金線などでワイヤーボンディングし、樹脂で封止することにより製造されることが多い。また、光半導体装置は、実際のLED電球などに搭載する際に、はんだリフローなどで実装される。
The present invention is described in detail below.
An optical semiconductor device forms an electrical circuit, and an optical semiconductor element such as gallium nitride that emits light when an appropriate voltage is applied to a lead frame or a substrate (printed substrate, ceramic substrate, flexible substrate, etc.) with an appropriate paste, etc. It is often manufactured by die bonding and fixing, wire bonding to p-type and n-type electrodes with a gold wire or the like, and sealing with resin. The optical semiconductor device is mounted by solder reflow or the like when mounted on an actual LED bulb or the like.
このような組み立て工程や実装工程を安定した品質で工業的に行うため、光半導体装置用のリードフレームや基板には、金めっきや銀めっきを行うことが一般的である。特に、銀めっきは、高い反射率が得られるため、広く実用化されている。このような銀めっき皮膜には、高い信頼性のあるワイヤーボンディング性、安定したダイボンディング性、安定したはんだ濡れ性、封止樹脂密着性などのほか、高い反射率を長期間にわたって維持する光反射率特性が要求される。しかし、従来の銀めっき液は、主にIC等の電子部品のリードフレーム用の銀めっき液として開発されたものであり、高い反射率を長期間にわたって維持する光反射率特性の要求については、なんら考慮されていなかった。 In order to industrially perform such an assembly process and a mounting process with stable quality, it is common to perform gold plating or silver plating on a lead frame or a substrate for an optical semiconductor device. In particular, silver plating has been widely put into practical use because high reflectance can be obtained. In addition to highly reliable wire bonding, stable die bonding, stable solder wettability, sealing resin adhesion, etc., this silver plating film has a light reflection that maintains high reflectivity over a long period of time. Rate characteristics are required. However, the conventional silver plating solution is mainly developed as a silver plating solution for lead frames of electronic parts such as ICs. Regarding the requirement of light reflectance characteristics to maintain a high reflectance over a long period of time, Nothing was considered.
そこで、光半導体装置用のリードフレームや基板に対する銀めっき液を鋭意研究したところ、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iのうちの少なくとも一種を含む可溶性化合物を5mg/L〜10g/Lの濃度範囲で添加した銀めっき液を用いて、光半導体装置用のリードフレームや基板に銀めっきすることにより、著しく光反射率が向上するとともに、長期間にわたり高い光反射率を維持することができる光半導体装置を製造することが可能になることを見出した。 Therefore, when intensive research was conducted on silver plating solutions for lead frames and substrates for optical semiconductor devices, Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl. , Sb, Bi, As, P, Te, Br, lead for optical semiconductor devices using a silver plating solution to which a soluble compound containing at least one of them is added in a concentration range of 5 mg / L to 10 g / L It has been found that an optical semiconductor device capable of significantly improving light reflectance and maintaining high light reflectance over a long period of time can be manufactured by silver plating on a frame or a substrate.
これらの効果が得られる詳細なメカニズムは、現状でははっきしないが、本発明の成分構成の銀めっき液を用いて、電気めっきすると、銀めっき皮膜の電析粒子の隙間に微量のTi、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iが嵌り込むため、実装工程中の機械的な圧力による変形や熱的な履歴による粒子凝集が発生しにくくなり、反射率の高い銀反射板としての機能を維持することができると推察している。特に、重要なのは、蒸着やスパッターなどによる銀皮膜の形成法とは異なり、電気めっき法では、微量な炭素など不純物が比較的に高くなった電析粒子境界が形成されるため、同時に銀皮膜に取り込まれたこれらの元素粒子が粒子境界に偏析し、光反射率の高い皮膜が得られ、かつ維持できると考えられる。一方、蒸着法やスパッター法では、粒子境界が動きやすく、乱反射となり、高い光反射が得られないと考えられる。また、本発明の銀めっき液組成とは異なり、従来からある各種銀合金めっき液では、銀以外の合金成分がただ単に析出合金化するだけであり、合金化により光反射率が低下してしまう欠点があるほか、組み立て工程内で、反射率が低下してしまうため、工業的な実用化ができないのである。 The detailed mechanism for obtaining these effects is not clear at present, but when electroplating is performed using the silver plating solution having the component structure of the present invention, a small amount of Ti, Zr, Since V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, and I are fitted, mechanical during the mounting process It is presumed that deformation due to a large pressure and particle aggregation due to thermal history are less likely to occur, and the function as a highly reflective silver reflector can be maintained. In particular, unlike the method of forming a silver film by vapor deposition or sputtering, the electroplating method forms an electrodeposited particle boundary in which impurities such as trace amounts of carbon are relatively high. It is considered that these incorporated elemental particles segregate at the particle boundary, and a film having a high light reflectance can be obtained and maintained. On the other hand, in the vapor deposition method or the sputtering method, it is considered that the particle boundary is easy to move, irregular reflection occurs, and high light reflection cannot be obtained. Moreover, unlike the silver plating solution composition of the present invention, in various conventional silver alloy plating solutions, alloy components other than silver are merely precipitated and alloyed, and the light reflectance is reduced by alloying. In addition to its drawbacks, the reflectivity is reduced during the assembly process, which makes industrial practical use impossible.
もちろん、本発明の銀めっき液から得られる銀めっき皮膜は、高い信頼性のあるワイヤーボンディング性、安定したダイボンディング性、安定したはんだ濡れ性、封止樹脂密着性などにおいても優れている。 Of course, the silver plating film obtained from the silver plating solution of the present invention is also excellent in highly reliable wire bonding properties, stable die bonding properties, stable solder wettability, sealing resin adhesion, and the like.
本発明の銀めっき液の銀源としては、シアン化銀錯体を用いることが好ましい。シアン化銀錯体は、水溶液中で安定であり、析出電位が貴であるため、ワイヤーボンディング性のよい緻密な銀めっき皮膜が得られる。シアン化銀錯体としては、シアン化銀やシアン化銀カリウムが工業的に入手しやすい。 As a silver source of the silver plating solution of the present invention, a silver cyanide complex is preferably used. Since the silver cyanide complex is stable in an aqueous solution and has a noble deposition potential, a dense silver plating film having good wire bonding properties can be obtained. As the cyanide complex, silver cyanide and potassium potassium cyanide are industrially easily available.
シアン化銀錯体の濃度としては、20〜250g/Lが好ましいが、さらに好ましくは50〜150g/Lである。シアン化銀錯体濃度が20g/L未満では、同時に水の電解が始まり、銀めっき皮膜が粗くなり、ワイヤーボンディングが困難になるだけでなく、光反射率が低下するため好ましくない。一方、シアン化銀錯体の濃度が、250g/Lを超えると、銀めっき液の粘性が高くなりすぎ、銀めっき皮膜が粗くなり、光反射率が大きく低下するため、好ましくない。 The concentration of the silver cyanide complex is preferably 20 to 250 g / L, more preferably 50 to 150 g / L. If the silver cyanide complex concentration is less than 20 g / L, electrolysis of water starts at the same time, the silver plating film becomes rough, and not only wire bonding becomes difficult, but also the light reflectance decreases, which is not preferable. On the other hand, if the concentration of the silver cyanide complex exceeds 250 g / L, the viscosity of the silver plating solution becomes too high, the silver plating film becomes rough, and the light reflectance is greatly reduced, which is not preferable.
シアン化銀錯体20〜250g/L、遊離シアン塩50〜200g/L、セレン化合物およびイオウ化合物の少なくともいずれか一方を含有する銀めっき液に、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を、5mg/L〜10g/Lの濃度範囲で添加し、pHが10〜14である、光半導体装置用リードフレームまたは基板に対する電解銀めっき液において、遊離シアン塩は、めっき液としての電気伝導性の維持のためには不可欠な成分である。薬品としては、シアン化カリウムやシアン化ナトリウムが入手しやすく、これらの単一組成でも、混合塩でもかまわない。遊離シアン塩濃度としては、50〜200g/Lが好ましく、より好ましくは80〜150g/Lである。遊離シアン塩濃度が50g/L未満では、めっき液の電気伝導性が低下するため、銀めっき皮膜が粗くなり、光反射率が低下するため、好ましくない。一方、遊離シアン塩濃度が200g/Lを超えると、めっき液の粘性が高くなりすぎ、銀めっき皮膜が粗くなり、光反射率が大きく低下するため、好ましくない。 A silver plating solution containing 20 to 250 g / L of a silver cyanide complex, 50 to 200 g / L of a free cyanate salt, selenium compound and sulfur compound is added to Ti, Zr, V, Mo, W, Co, Pd. A soluble compound comprising at least one selected from the group consisting of Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, and I In an electrolytic silver plating solution for an optical semiconductor device lead frame or substrate added in a concentration range of 10 g / L and having a pH of 10 to 14, free cyanide salt is used for maintaining electrical conductivity as a plating solution. Is an essential ingredient. As chemicals, potassium cyanide and sodium cyanide are easily available, and these single compositions or mixed salts may be used. The free cyanate concentration is preferably 50 to 200 g / L, more preferably 80 to 150 g / L. If the concentration of the free cyanate salt is less than 50 g / L, the electric conductivity of the plating solution is lowered, so that the silver plating film becomes rough and the light reflectance is lowered. On the other hand, if the free cyanide concentration exceeds 200 g / L, the viscosity of the plating solution becomes too high, the silver plating film becomes rough, and the light reflectance is greatly reduced, which is not preferable.
また、シアン化銀錯体20〜250g/L、電気伝導塩50〜250g/L、遊離シアン塩0.1〜30g/L、セレン化合物およびイオウ化合物の少なくともいずれか一方を含有する銀めっき液に、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を、5mg/L〜10g/Lの濃度範囲で添加し、pHが7.5〜14である、光半導体装置用リードフレームまたは基板に対する電解銀めっき液において、遊離シアン塩は、シアン化銀錯体の電気析出の安定化のため不可欠な成分であるが、電気伝導性は、別の電気伝導塩を含有するため、銀めっき液に比べ低い濃度で十分で、遊離シアン塩濃度としては、0.1〜30g/Lが好ましいが、より好ましくは1〜15g/Lである。遊離シアン塩濃度が0.1g/L未満であると、シアン化銀錯体が電気析出する際、異常析出が発生し、粗い銀めっき皮膜となり、光反射率が低下するため、好ましくない。一方、遊離シアン塩濃度が30g/L以上となると、当該遊離シアン塩とともに使用される電気伝導塩の電気伝導性が阻害され、銀めっき皮膜中にシアン分解物が混入して、銀めっき皮膜が変色し、さらには光反射率が低下するため、好ましくない。 In addition, a silver plating solution containing at least one of silver cyanide complex 20 to 250 g / L, electrically conductive salt 50 to 250 g / L, free cyanate 0.1 to 30 g / L, selenium compound and sulfur compound, Selected from the group consisting of Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, I In an electrolytic silver plating solution for an optical semiconductor device lead frame or substrate, a soluble compound containing at least one kind is added in a concentration range of 5 mg / L to 10 g / L, and the pH is 7.5 to 14. The salt is an indispensable component for stabilizing the electrodeposition of the silver cyanide complex, but since the electrical conductivity contains another electrical conductive salt, a lower concentration than the silver plating solution is sufficient, and free cyanide is sufficient. salt The degrees, but 0.1 to 30 g / L is preferred, more preferably from 1 to 15 g / L. If the free cyanide concentration is less than 0.1 g / L, abnormal precipitation occurs when the silver cyanide complex is electrodeposited, resulting in a rough silver plating film, and the light reflectance is lowered, which is not preferable. On the other hand, when the concentration of the free cyanide salt is 30 g / L or more, the electrical conductivity of the electrical conduction salt used together with the free cyanate salt is hindered, and cyan decomposition products are mixed in the silver plating film, so that the silver plating film becomes This is not preferable because the color changes and the light reflectance is lowered.
シアン化銀錯体20〜250g/L、電気伝導塩50〜250g/L、遊離シアン塩0.1〜30g/L、セレン化合物およびイオウ化合物の少なくとも一方を含有する銀めっき液に、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を、5mg/L〜10g/Lの濃度範囲で添加し、pHが7.5〜14である、光半導体装置用リードフレームまたは基板に対する電解銀めっき液において、電気伝導塩は、りん酸塩、硝酸塩、クエン酸塩、酒石酸塩などの単独又はこれらの混合物であるが、電気伝導性で、水溶性であるものであれば、特に限定するものではない。より具体的には、りん酸塩としては、りん酸第二カリウム、りん酸第二ナトリウム、りん酸第一カリウム、りん酸第一ナトリウム、ピロリン酸カリウム、りん酸アンモニウムなどである。硝酸塩としては、硝酸カリウム、硝酸ナトリウム、硝酸アンモニウムなどである。クエン酸塩としては、クエン酸カリウムやクエン酸ナトリウムなどである。酒石酸塩としては、酒石酸カリウム、あるいは酒石酸ナトリウムなどである。 To a silver plating solution containing at least one of silver cyanide complex 20 to 250 g / L, electric conduction salt 50 to 250 g / L, free cyanate 0.1 to 30 g / L, selenium compound and sulfur compound, Ti, Zr, At least one selected from the group consisting of V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, and I In an electrolytic silver plating solution for a lead frame or a substrate for an optical semiconductor device, wherein a soluble compound is added in a concentration range of 5 mg / L to 10 g / L and the pH is 7.5 to 14, the conductive salt is phosphorus The acid salt, nitrate salt, citrate salt, tartrate salt and the like are used alone or as a mixture thereof, but are not particularly limited as long as they are electrically conductive and water-soluble. More specifically, examples of the phosphate include dipotassium phosphate, disodium phosphate, monopotassium phosphate, monosodium phosphate, potassium pyrophosphate, ammonium phosphate, and the like. Examples of the nitrate include potassium nitrate, sodium nitrate, and ammonium nitrate. Examples of the citrate include potassium citrate and sodium citrate. Examples of tartrate salts include potassium tartrate and sodium tartrate.
電気伝導塩の濃度としては、50〜250g/Lが好ましいが、より好ましくは80〜150g/Lである。電気伝導塩の濃度が、50g/L未満になると、析出する銀皮膜が粗くなり、光反射率が低下してしまうため、好ましくない。一方、電気伝導塩の濃度が250g/Lを超えると、めっき液の粘性が高すぎることにより、銀めっき皮膜が粗くなり、光反射率が低下するため、好ましくない。 The concentration of the electrically conductive salt is preferably 50 to 250 g / L, and more preferably 80 to 150 g / L. If the concentration of the electroconductive salt is less than 50 g / L, the deposited silver film becomes coarse and the light reflectance decreases, which is not preferable. On the other hand, if the concentration of the electrically conductive salt exceeds 250 g / L, the viscosity of the plating solution is too high, so that the silver plating film becomes rough and the light reflectance decreases, which is not preferable.
光沢剤としては、セレン化合物またはイオウ化合物、あるいはそれらの両方を含有することが好ましい。これらの光沢剤は、銀めっき皮膜に微量含まれることにより銀めっき皮膜を光沢化し、高い光反射率を維持可能とするための成分である。光沢剤のセレン化合物としては、シアン化セレンカリウム、シアン化セレン、亜セレン酸、酸化セレン酸、酸化セレンなどが挙げられるが、光沢を呈するものであれば、これに限定されるものではない。光沢剤のセレン化合物濃度のとしては、0.01mg/L〜100mg/Lが好ましい。また、光沢剤のイオウ化合物としては、二硫化炭素、チオ尿素、チオ乳酸、チオウラシル、チオバルビツル酸、システイン、シスチン、チオ酢酸、メルカプトベンゾチアゾールが挙げられるが、光沢を呈するものであれば、これに限定されるものではない。 The brightener preferably contains a selenium compound, a sulfur compound, or both. These brighteners are components for making the silver plating film glossy by being contained in a small amount in the silver plating film and maintaining high light reflectance. Examples of the selenium compound of the brightener include potassium selenium cyanide, selenium cyanide, selenious acid, selenium oxide, and selenium oxide, but are not limited thereto as long as they exhibit gloss. The concentration of the selenium compound in the brightener is preferably 0.01 mg / L to 100 mg / L. Examples of the brightening agent sulfur compound include carbon disulfide, thiourea, thiolactic acid, thiouracil, thiobarbituric acid, cysteine, cystine, thioacetic acid, and mercaptobenzothiazole. It is not limited.
また、光沢剤としては、セレン化合物とイオウ化合物を両方含有することも可能である。さらに、光沢剤のイオウ化合物としては、二硫化炭素、チオ尿素、チオ乳酸、チオウラシル、チオバルビツル酸、システイン、シスチン、チオ酢酸、メルカプトベンゾチアゾールなどの一種以上のイオウ化合物の反応物であってもよい。これらの光沢剤としてのイオウ化合物の濃度としては、好ましくは0.05g/L〜10g/Lである。 Moreover, as a brightener, it is also possible to contain both a selenium compound and a sulfur compound. Further, the brightening agent sulfur compound may be a reaction product of one or more sulfur compounds such as carbon disulfide, thiourea, thiolactic acid, thiouracil, thiobarbituric acid, cysteine, cystine, thioacetic acid, mercaptobenzothiazole and the like. . The concentration of the sulfur compound as the brightener is preferably 0.05 g / L to 10 g / L.
シアン化銀錯体20〜250g/L、遊離シアン塩50〜200g/L、セレン化合物およびイオウ化合物の少なくともいずれか一方を含有する銀めっき液に、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を、5mg/L〜10g/Lの濃度範囲で添加し、pHが10〜14である、光半導体装置用リードフレームまたは基板に対する電解銀めっき液において、pHは、好ましくは10〜14である。pHが10未満であると、シアン化銀錯体が不安定となり、めっき液が濁りやすくなるほか、遊離シアン塩が気化しやすくなり、経済的でないため、好ましくない。 A silver plating solution containing 20 to 250 g / L of a silver cyanide complex, 50 to 200 g / L of a free cyanate salt, selenium compound and sulfur compound is added to Ti, Zr, V, Mo, W, Co, Pd. A soluble compound comprising at least one selected from the group consisting of Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, and I In an electrolytic silver plating solution for an optical semiconductor device lead frame or substrate added in a concentration range of 10 g / L and having a pH of 10 to 14, the pH is preferably 10 to 14. If the pH is less than 10, the silver cyanide complex becomes unstable, the plating solution tends to become cloudy, and the free cyanide salt tends to vaporize, which is not economical, which is not preferable.
また、シアン化銀錯体20〜250g/L、電気伝導塩50〜250g/L、遊離シアン塩0.1〜30g/L、セレン化合物およびイオウ化合物の少なくともいずれか一方を含有する銀めっき液に、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を、5mg/L〜10g/Lの濃度範囲で添加し、pHが7.5〜14である、光半導体装置用リードフレームまたは基板に対する電解銀めっき液において、pHは、好ましくは7.5〜14である。pHが7.5未満であると、シアン化銀錯体が不安定となり、めっき液が濁りやすくなるほか、遊離シアン塩が気化しやすくなり、経済的でないため、好ましくない。 In addition, a silver plating solution containing at least one of silver cyanide complex 20 to 250 g / L, electrically conductive salt 50 to 250 g / L, free cyanate 0.1 to 30 g / L, selenium compound and sulfur compound, Selected from the group consisting of Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, I In an electrolytic silver plating solution for a lead frame or substrate for an optical semiconductor device, wherein a soluble compound containing at least one kind is added in a concentration range of 5 mg / L to 10 g / L, and the pH is 7.5 to 14, the pH is Preferably, it is 7.5-14. If the pH is less than 7.5, the silver cyanide complex becomes unstable, the plating solution tends to become cloudy, and the free cyanide salt tends to vaporize, which is not economical, which is not preferable.
本発明の銀めっき液に、添加剤として加えられる、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物としては、酸化チタン、水酸化チタン、塩化チタン、酸化ジルコニウム、塩化ジルコニウム、酸化バナジウム、酸化モリブデン酸ナトリウム、酸化タングステンナトリウム、硫酸コバルト、硝酸パラジウム、塩化パラジウム、シアン化金、シアン化金カリウム、シアン化金ナトリウム、シアン化金アンモニウム、亜硫酸金ナトリウム、亜硫酸カリウム、塩化金酸、シアン化銅、硫酸銅、塩化銅、塩化亜鉛、硫酸亜鉛、酸化亜鉛、塩化ガリウム、酸化ガリウム、酸化ゲルマニウム、塩化ゲルマニウム、硫酸インジウム、塩化インジウム、塩化錫、酸化錫、硫酸錫、錫酸ナトリウム、硫酸タリウム、硝酸タリウム、儀酸タリウム、酸化アンチモン、酒石酸アンチモニルカリウム、硫酸ビスマス、塩化ビスマス、酸化ビスマス、三酸化砒素、りん酸カリウム、りん酸ナトリウム、ピロリン酸カリウム、次亜りん酸カリウム、亜りん酸ナトリウム、テルル酸ナトリウム、酸化テルル、塩化テルル、亜テルル酸、臭酸カリウム、よう化カリウムなどが挙げられ、これらの一種でもよいし、二種以上混合してもよい。さらに、水溶液に可溶であれば、これらの薬品に限定されるものではない。また、水溶液に可溶化するために、適宜硫酸や塩酸などの酸や、水酸化カリウムや水酸化ナトリウムなどのアルカリ、さらに、エチレンジアミン四酢酸(EDTA)やニトリロ三酢酸ナトリウム(NTA)などのキレート剤を適宜混合して使用してもよい。Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物の濃度としては、5mg/L〜10g/Lが好ましい。より好ましくは10〜1000mg/Lである。当該可溶性化合物濃度が5mg/L未満であると、銀めっき皮膜の光反射率が低下するため好ましくない。一方、当該可溶性化合物濃度が10g/L以上であると、銀めっき皮膜の光吸収率が上がり、光反射率が低下するため、好ましくない。 Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, added as additives to the silver plating solution of the present invention Soluble compounds including at least one selected from the group consisting of P, Te, Br, and I include titanium oxide, titanium hydroxide, titanium chloride, zirconium oxide, zirconium chloride, vanadium oxide, sodium molybdate, and tungsten oxide. Sodium, cobalt sulfate, palladium nitrate, palladium chloride, gold cyanide, potassium cyanide cyanide, sodium gold cyanide, ammonium gold cyanide, sodium gold sulfite, potassium sulfite, chloroauric acid, copper cyanide, copper sulfate, copper chloride , Zinc chloride, zinc sulfate, zinc oxide, gallium chloride, gallium oxide, germanium oxide, germanium chloride , Indium sulfate, indium chloride, tin chloride, tin oxide, tin sulfate, sodium stannate, thallium sulfate, thallium nitrate, thallium oxalate, antimony oxide, antimony potassium tartrate, bismuth sulfate, bismuth chloride, bismuth oxide, trioxide Examples include arsenic, potassium phosphate, sodium phosphate, potassium pyrophosphate, potassium hypophosphite, sodium phosphite, sodium tellurate, tellurium oxide, tellurium chloride, tellurite, potassium odorate, potassium iodide, etc. These may be one kind or a mixture of two or more kinds. Furthermore, it is not limited to these chemicals as long as it is soluble in an aqueous solution. Also, in order to solubilize in aqueous solution, acids such as sulfuric acid and hydrochloric acid, alkalis such as potassium hydroxide and sodium hydroxide, and chelating agents such as ethylenediaminetetraacetic acid (EDTA) and sodium nitrilotriacetate (NTA) May be used in a suitable mixture. Selected from the group consisting of Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga, Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, I The concentration of the soluble compound containing at least one kind is preferably 5 mg / L to 10 g / L. More preferably, it is 10-1000 mg / L. If the soluble compound concentration is less than 5 mg / L, the light reflectance of the silver plating film is lowered, which is not preferable. On the other hand, if the soluble compound concentration is 10 g / L or more, the light absorptivity of the silver plating film increases and the light reflectance decreases, which is not preferable.
また、本発明の銀めっき液には、銀めっき皮膜のムラ発生を防止するために、各種界面活性剤を添加してもよい。例えば、界面活性剤としては、ポリオキシアルキルエーテル縮合物などノニオン界面活性剤などが挙げられる。 In addition, various surfactants may be added to the silver plating solution of the present invention in order to prevent unevenness of the silver plating film. For example, examples of the surfactant include nonionic surfactants such as polyoxyalkyl ether condensates.
さらに、本発明の銀めっき液には、pHを安定化させるためのpH緩衝剤を添加してもよい。例えば、pH緩衝剤としては、ほう酸やメタほう酸カリウム、フタル酸などが挙げられる。 Furthermore, a pH buffering agent for stabilizing the pH may be added to the silver plating solution of the present invention. For example, examples of the pH buffer include boric acid, potassium metaborate, and phthalic acid.
電気伝導性のあるリードフレーム又は基板を陽極とし、金属銀、ステンレス、白金族金属または白金族金属を被覆したチタンを陰極として、前記陽極および前記陰極を、本発明の銀めっき液に浸漬し、リードフレームまたは基板に電気めっきを行うめっき方法が可能である。 Using an electrically conductive lead frame or substrate as an anode, metallic silver, stainless steel, platinum group metal or titanium coated with a platinum group metal as a cathode, the anode and the cathode are immersed in the silver plating solution of the present invention, A plating method for performing electroplating on the lead frame or the substrate is possible.
本発明の銀めっき液は、マニュアル又は自動エレベーター方式のラック式めっき方法、リールツーリール方式の電気めっき槽がオーバーフロー式のめっき方法、あるいはリードフレームの部分めっきに採用されている噴流式めっき方法のどれにも対応可能である。 The silver plating solution of the present invention is a manual or automatic elevator type rack type plating method, a reel-to-reel type electroplating bath of an overflow type plating method, or a jet type plating method employed for partial plating of lead frames. Any of them can be supported.
銀めっきを行う液温は、それぞれのめっき装置の流速や攪拌状態によって異なるが、概ね15℃〜70℃が好ましい。ラック式めっきやオーバーフロー式めっきの場合は、液温は20〜30℃が好ましく、噴流式めっきの場合には、液温は50〜70℃にすることが好ましい。 Although the liquid temperature which performs silver plating changes with the flow rates and stirring state of each plating apparatus, 15 to 70 degreeC is preferable in general. In the case of rack type plating or overflow type plating, the liquid temperature is preferably 20 to 30 ° C, and in the case of jet flow type plating, the liquid temperature is preferably 50 to 70 ° C.
銀めっきを行う陰極電流密度は、めっき装置の流速や攪拌状態によって異なる。ラック式めっきやオーバーフロー式めっきでは、陰極電流密度としては、1〜5A/dm2が好ましく、噴流式めっきの場合には、陰極電流密度としては、30〜150A/dm2が好ましい。 The cathode current density for silver plating varies depending on the flow rate and stirring state of the plating apparatus. In rack type plating or overflow type plating, the cathode current density is preferably 1 to 5 A / dm 2 , and in the case of jet flow type plating, the cathode current density is preferably 30 to 150 A / dm 2 .
また、本発明の銀めっき液により銀めっきした後のリードフレームを圧延加工などして塑性変形することもできる。 Further, the lead frame after silver plating with the silver plating solution of the present invention can be plastically deformed by rolling or the like.
本実施の形態に係る銀めっき液によれば、光半導体装置用リードフレームまたは基板に対して実装信頼性、光反射特性及び耐食性(特に、硫化腐食に対する耐食性)を安定化させることができ、これらの特性を向上させることができる。 According to the silver plating solution according to the present embodiment, it is possible to stabilize the mounting reliability, light reflection characteristics and corrosion resistance (particularly corrosion resistance against sulfidation corrosion) with respect to the lead frame or substrate for an optical semiconductor device. The characteristics can be improved.
次に、実施例を挙げて本発明を具体的に説明するが、本発明はこれら実施例に限定されるものではない。 EXAMPLES Next, the present invention will be specifically described with reference to examples, but the present invention is not limited to these examples.
本実施例のLEDは、下記のように製作される。 The LED of this example is manufactured as follows.
リードフレームとしては、株式会社神戸製鋼所製の銅合金KLF194(CDA No.C19400、鉄含有率2.3%)の板厚0.11mmの平板を使用し、株式会社エノモトのLED用オープンフレーム FLASH LED 6PIN OP1 (外形寸法5050)のタイプに型抜きしたものを使用する。アルカリ系の脱脂剤で脱脂処理した後、希硫酸で酸中和し、その後シアン浴により銅めっきを0.5μm施す。その後、本発明の銀めっき液にて3μmの膜厚になるように、陰極電流密度とめっき時間を調整し、銀めっきを行い、清浄な純水で洗浄した後、乾燥させ、銀めっき付きリードレームを製作する。なお、銀めっきは、全面銀めっきとする。このリードフレームを金型内に配置し、成形材料として、ポリフタルアミド樹脂を注入し、硬化させて、金型から取り外す。そして、樹脂成形後のリードフレーム上に、青色発光ダイオードチップを、樹脂ペーストを介して載置した後、150℃で1時間加熱して接合させる。その後、発光ダイオードチップの電極と、リードフレームと、を25μm径の金線にて接続する。次に、変性シリコーン樹脂にYAG蛍光体を20%の割合で配合したものを、成形開口部に充填し、熱風乾燥機にて硬化させ(硬化条件:150℃、4時間)、封止を完了する。この後、個別のLEDとして切断する。 As the lead frame, a copper alloy KLF194 (CDA No. C19400, iron content rate 2.3%) made by Kobe Steel Co., Ltd. with a thickness of 0.11 mm was used, and Enomoto's LED open frame FLASH Use the LED 6PIN OP1 (external dimension 5050) type that has been punched out. After degreasing with an alkaline degreasing agent, acid neutralization with dilute sulfuric acid is performed, and then copper plating is applied in a thickness of 0.5 μm with a cyan bath. Thereafter, the cathode current density and plating time are adjusted so as to obtain a film thickness of 3 μm with the silver plating solution of the present invention, silver plating is performed, the substrate is washed with clean pure water, dried, and lead with silver plating is provided. Make a lemma. In addition, silver plating shall be whole surface silver plating. The lead frame is placed in a mold, polyphthalamide resin is injected as a molding material, cured, and removed from the mold. Then, the blue light emitting diode chip is placed on the lead frame after the resin molding via the resin paste, and then heated and bonded at 150 ° C. for 1 hour. Thereafter, the electrode of the light emitting diode chip and the lead frame are connected with a gold wire having a diameter of 25 μm. Next, a 20% blend of YAG phosphor in a modified silicone resin is filled into the molding opening and cured with a hot air dryer (curing conditions: 150 ° C., 4 hours) to complete sealing. To do. Then, it cut | disconnects as individual LED.
以上のように製作したLEDを、下記2条件で処理した後、積分式全光束測定装置にて全光束φv(lm)の測定を行う。 After the LED manufactured as described above is processed under the following two conditions, the total luminous flux φv (lm) is measured by an integral type total luminous flux measuring apparatus.
第一試験としては、高温動作試験であり、製作したLEDを120℃の熱風恒温装置に入れ、50mAの電流を流し、1000時間処理する。また、第二試験としては、JIS C60068-2-43に準拠した腐食試験であり、40℃、硫化水素ガス15ppm、80%RH の腐食条件で300時間処理する。 The first test is a high-temperature operation test, in which the manufactured LED is placed in a 120 ° C. hot air thermostatic device, a current of 50 mA is passed, and processing is performed for 1000 hours. The second test is a corrosion test in accordance with JIS C60068-2-43, which is treated for 300 hours under a corrosion condition of 40 ° C., hydrogen sulfide gas 15 ppm, 80% RH.
なお、この試験において、すべてのLEDとも、ワイヤーボンディング不良、ダイボンディング不良、樹脂密着不良などの不良モードは発生していない。 In this test, no failure mode such as wire bonding failure, die bonding failure, and resin adhesion failure occurs in all LEDs.
本発明の銀めっき液を使用した実施例と従来の銀めっき液を使用した比較例を表1に示す。また、表2には、表1の実施例と比較例の銀めっき液でめっきされたリードフレームを有するLEDの初期の全光束φv(lm)の計測数値と、高温動作試験及び腐食試験処理後の全光束φv(lm)の計測値、さらに光束変動率(%)を示す。 Table 1 shows an example using the silver plating solution of the present invention and a comparative example using a conventional silver plating solution. Table 2 shows the measured values of the initial total luminous flux φv (lm) of the LED having the lead frame plated with the silver plating solutions of the examples and comparative examples of Table 1, and after the high temperature operation test and the corrosion test treatment. The measured value of the total luminous flux φv (lm) and the luminous flux fluctuation rate (%) are shown.
表2に示すとおり、比較例1及び2については、各試験とも光束が大きく低下しているのに対して、Ti、Zr、V、Mo、W、Co、Pd、Au、Cu、Zn、Ga、Ge、In、Sn、Tl、Sb、Bi、As、P、Te、Br、Iからなる群から選択された少なくとも1種を含む可溶性化合物を添加した銀めっき液から得られた光半導体装置については、各試験とも、光束の低下はわずかであり、高い光反射率を維持することがわかる。 As shown in Table 2, in Comparative Examples 1 and 2, the luminous flux is greatly reduced in each test, whereas Ti, Zr, V, Mo, W, Co, Pd, Au, Cu, Zn, Ga , Ge, In, Sn, Tl, Sb, Bi, As, P, Te, Br, and an optical semiconductor device obtained from a silver plating solution to which a soluble compound containing at least one selected from the group consisting of I is added In each test, the decrease in luminous flux is slight, and it can be seen that high light reflectance is maintained.
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495818B1 (en) * | 1968-06-27 | 1974-02-09 | ||
JPS56156790A (en) * | 1980-05-08 | 1981-12-03 | Nippon Mining Co Ltd | Silver-palladium alloy plating solution and its method |
JPS59232288A (en) * | 1983-06-14 | 1984-12-27 | Nippon Mining Co Ltd | High speed silver plating liquid |
JPS60159192A (en) * | 1984-01-27 | 1985-08-20 | Nippon Mining Co Ltd | High-speed silver plating solution |
JPH06173074A (en) * | 1992-04-15 | 1994-06-21 | Learonal Inc | Electroplated alloy of gold, copper and silver |
JPH06184789A (en) * | 1992-12-22 | 1994-07-05 | Asahi Glass Co Ltd | Oxidation-resistant metallic member, plating solution and circuit device |
JP2001049487A (en) * | 1999-08-12 | 2001-02-20 | Ne Chemcat Corp | Silver electroplating bath |
WO2004048646A1 (en) * | 2002-11-28 | 2004-06-10 | Shinko Electric Industries Co., Ltd. | Electrolytic silver plating solution |
-
2012
- 2012-05-31 JP JP2012124972A patent/JP6230778B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495818B1 (en) * | 1968-06-27 | 1974-02-09 | ||
JPS56156790A (en) * | 1980-05-08 | 1981-12-03 | Nippon Mining Co Ltd | Silver-palladium alloy plating solution and its method |
JPS59232288A (en) * | 1983-06-14 | 1984-12-27 | Nippon Mining Co Ltd | High speed silver plating liquid |
JPS60159192A (en) * | 1984-01-27 | 1985-08-20 | Nippon Mining Co Ltd | High-speed silver plating solution |
JPH06173074A (en) * | 1992-04-15 | 1994-06-21 | Learonal Inc | Electroplated alloy of gold, copper and silver |
JPH06184789A (en) * | 1992-12-22 | 1994-07-05 | Asahi Glass Co Ltd | Oxidation-resistant metallic member, plating solution and circuit device |
JP2001049487A (en) * | 1999-08-12 | 2001-02-20 | Ne Chemcat Corp | Silver electroplating bath |
WO2004048646A1 (en) * | 2002-11-28 | 2004-06-10 | Shinko Electric Industries Co., Ltd. | Electrolytic silver plating solution |
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