JP2012198247A - GAS SENSOR AND NOx SENSOR - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas sensor which is improved in measurement accuracy.SOLUTION: A gas sensor for specifying a gas concentration based on a current flowing in a solid electrolyte by decomposition includes a gas introduction port, a first diffusion control part, a buffer space, a second diffusion control part, and an internal empty space which are sequentially communicated, a reference gas space for introducing reference gas, a pumping cell capable of pumping out oxygen in the internal empty space by applying a predetermined voltage between a first electrode formed on the surface of the internal empty space and a second electrode formed in a space different from the internal empty space, and a measuring cell capable of measuring a current flowing between a measuring electrode and a reference electrode by applying a voltage between the measuring electrode formed on the surface of the internal empty space and the reference electrode formed to contact the reference gas. The first electrode is formed of porous cermet made of a noble metal and an oxygen ion conductive solid electrolyte, and a porosity of the first electrode is 10% or more and 50% or less.

Description

  The present invention relates to a gas sensor constituted by using an oxygen ion conductive solid electrolyte, in particular, a NOx sensor.

Conventionally, various measuring devices have been used in order to know the concentration of a desired gas component in a gas to be measured. For example, a NOx sensor formed using an oxygen ion conductive solid electrolyte such as zirconia (ZrO ₂ ) is known as a device for measuring NOx concentration in a gas to be measured such as combustion gas (see, for example, Patent Document 1). ).

In the NOx sensor disclosed in Patent Document 1, first, O ₂ in a measurement gas taken from outside is removed in advance by pumping in a first internal space, and the measurement gas is in a low oxygen partial pressure state ( The oxygen partial pressure is lowered to such a degree that O ₂ originally present in the gas to be measured does not affect the measurement of NOx, and then introduced into the second internal space. Then, a constant voltage is applied between the measurement electrode made of Pt, Rh, or the like provided in the second internal space and the reference electrode provided in the atmosphere, thereby reducing NOx at the measurement electrode. At this time, the NOx concentration is detected based on the fact that the current value of the current flowing between the measurement electrode and the reference electrode is proportional to the NOx concentration.

JP-A-8-271476

In order to improve the measurement accuracy in the sensor that measures the NOx concentration based on the principle as described above, it is necessary to precisely control the O ₂ concentration in the second internal space. Specifically, when NOx is not present in the gas to be measured introduced into the second internal space, it is ideal that no current flows between the measurement electrode and the reference electrode. However, in reality, O ₂ exists at a slight oxygen partial pressure, so that when a voltage is applied between the measurement electrode and the reference electrode, current caused by the decomposition of O ₂ (offset current, zero point current) Flows. This offset current is also superimposed on the current that flows when the NOx concentration is measured. Therefore, since the NOx concentration calculated based on the above-described principle includes a slight error derived from this offset current, when the NOx concentration in the gas to be measured is small, the accuracy of the calculated NOx concentration is There was a problem that it was not always sufficient.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a gas sensor in which measurement accuracy is improved as compared with the conventional art.

  In order to solve the above-mentioned problem, the invention of claim 1 is configured using an oxygen ion conductive solid electrolyte, and the concentration of the predetermined gas component in the gas to be measured is decomposed by the predetermined gas component being decomposed. A gas sensor that is specified based on a current flowing in an electrolyte, the gas introduction port being open to an external space, a slit-shaped first diffusion rate-limiting portion communicating with the gas introduction port, and the first diffusion A buffer space communicating with the rate limiting portion, a slit-like second diffusion rate limiting portion communicating with the buffer space, an internal space communicating with the second diffusion rate limiting portion, and a reference gas space for introducing a reference gas Applying a predetermined voltage between the first electrode formed on the surface of the internal space and the second electrode formed in a space different from the internal space, thereby allowing oxygen in the internal space to Pump pin provided for pumping A voltage is applied between the cell, a third electrode formed on the surface of the internal space, and a fourth electrode formed at a site different from the internal space, and the third electrode and the A measurement cell provided so as to be able to measure a current flowing between the fourth electrode and the gas to be measured from the external space to the internal space; A predetermined diffusion resistance is given to the second diffusion rate-determining part and then introduced into the internal space, and the first electrode is formed by a porous cermet made of a noble metal and an oxygen ion conductive solid electrolyte. And the porosity of the first electrode is 10% or more and 50% or less.

  A second aspect of the invention is the gas sensor according to the first aspect, wherein the porosity of the first electrode is 15% or more and 40% or less. And

  The invention of claim 3 is the gas sensor according to claim 1 or claim 2, wherein the internal space is a first internal space that introduces the gas to be measured from the external space; An internal space, wherein the first internal space and the second internal space communicate with each other under a predetermined diffusion resistance by a slit-shaped third diffusion rate-limiting part, and the pumping cell A primary pumping cell comprising the first electrode in the first internal cavity, and an auxiliary pumping cell comprising the first electrode in the second internal cavity, the third electrode comprising: It is provided in the second internal space.

  The invention of claim 4 is the gas sensor according to claim 3, wherein the second electrode is shared by the main pump cell and the auxiliary pump cell and also serves as the fourth electrode. It is characterized by that.

  A fifth aspect of the present invention is a NOx sensor which is the gas sensor according to any one of the first to fourth aspects, wherein the partial pressure of oxygen in the internal space is controlled by controlling a voltage applied to the pumping cell. The NOx concentration is obtained by measuring a current flowing between the third electrode and the fourth electrode in the measurement cell in a state of being kept constant.

According to the first to fifth aspects of the invention, the error factor derived from the O ₂ gas in the gas to be measured is reduced, the diffusion resistance of O _{2 in} the electrode is suitably reduced, and the concentration gradient of O ₂ is reduced. Thus, a gas sensor or NOx sensor with excellent measurement accuracy, in which the occurrence of gas is suitably suppressed, is realized.

It is a cross-sectional schematic diagram which shows schematically the structure of the gas sensor 100 which concerns on this Embodiment. It is a figure which shows the relationship between the porosity and the offset electric current Ip2 _ofs in this sensor element at the time of comprising a sensor element by varying the porosity of the inner side pump electrode 22 and the auxiliary pump electrode 51 variously.

<Schematic configuration of gas sensor>
FIG. 1 is a schematic cross-sectional view schematically showing a configuration of a gas sensor 100 according to the present embodiment. The gas sensor 100 detects a predetermined gas component in the gas to be measured (measurement gas) and further measures the concentration thereof. In the present embodiment, the case where the gas sensor 100 is a NOx sensor using nitrogen oxide (NOx) as a detection target component will be described as an example. The gas sensor 100 has a sensor element 101 made of an oxygen ion conductive solid electrolyte such as zirconia (ZrO ₂ ).

  Specifically, the sensor element 101 includes a first substrate layer 1, a second substrate layer 2, a third substrate layer 3, a first solid electrolyte layer 4, a spacer each made of an oxygen ion conductive solid electrolyte. Six layers of the layer 5 and the second solid electrolyte layer 6 are laminated in this order from the lower side in the drawing view and have an integrated structure.

  Such a sensor element 101 can be produced by forming a laminate composed of a green sheet containing an oxygen ion conductive solid electrolyte such as zirconia as a ceramic component, and cutting and firing the laminate. In general, the laminated body is formed by punching a through portion for forming an internal space in a plurality of green sheets each corresponding to each layer of the sensor element, and depending on the lamination position. The predetermined pattern is printed and formed, and further, an adhesive paste is printed and applied as an adhesive, and these are sequentially laminated. A known screen printing technique can be used for printing a pattern or an adhesive. Also, a known drying means can be used for the drying process after printing.

  One end of the sensor element 101, and between the lower surface of the second solid electrolyte layer 6 and the upper surface of the first solid electrolyte layer 4, is a gas inlet 10, a first diffusion rate limiting unit 11, and a buffer space. 12, the second diffusion rate limiting part 13, the first internal space 20, the third diffusion rate limiting part 30, and the second internal space 40 are formed adjacent to each other in such a manner that they communicate with each other in this order. The gas introduction port 10, the buffer space 12, the first internal space 20, and the second internal space 40 are provided on the lower surface of the second solid electrolyte layer 6 with the upper portion provided in a state in which the spacer layer 5 is hollowed out, This is an internal space defined by the lower part on the upper surface of the first solid electrolyte layer 4 and the side part on the side surface of the spacer layer 5. Each of the first diffusion rate controlling unit 11, the second diffusion rate controlling unit 13, and the third diffusion rate controlling unit 30 is provided as two horizontally long slits (the opening has a longitudinal direction in a direction perpendicular to the drawing). A part from the gas inlet 10 to the second internal space 40 is also referred to as a gas circulation part.

  Further, a reference gas introduction space 43 is provided at a position between the upper surface of the third substrate layer 3 and the lower surface of the spacer layer 5 and farther from the front end side than the gas flow part. The reference gas introduction space 43 is an internal space defined by an upper portion being the lower surface of the spacer layer, a lower portion being the upper surface of the third substrate layer 3 and a side portion being the side surface of the first solid electrolyte layer 4. For example, air is introduced into the reference gas introduction space 43 as a reference gas.

  The gas introduction port 10 is a portion opened to the external space, and the gas to be measured is taken into the sensor element 101 from the external space through the gas introduction port 10.

  The first diffusion control unit 11 is a part that provides a predetermined diffusion resistance to the gas to be measured taken from the gas inlet 10.

  The buffer space 12 is provided for the purpose of canceling the concentration fluctuation of the gas to be measured caused by the pressure fluctuation of the gas to be measured in the external space (exhaust pressure pulsation if the gas to be measured is an automobile exhaust gas). It becomes.

  The second diffusion rate controlling part 13 is a part that gives a predetermined diffusion resistance to the gas to be measured introduced from the buffer space 12 into the second diffusion rate controlling part 13.

  The first internal space 20 is provided as a space for adjusting the partial pressure of oxygen in the gas to be measured introduced through the second diffusion rate limiting unit 13. The oxygen partial pressure is adjusted by the operation of the main pump cell 21.

The main pump cell 21 corresponds to the inner pump electrode 22 provided on substantially the entire lower surface of the second solid electrolyte layer 6 facing the first internal space 20 and the inner pump electrode 22 on the upper surface of the second solid electrolyte layer 6. This is an electrochemical pump cell constituted by the outer pump electrode 23 provided in a manner exposed to the external space in the region to be formed, and the second solid electrolyte layer 6 sandwiched between these electrodes. The inner pump electrode 22 and the outer pump electrode 23 are formed as a porous cermet electrode having a rectangular shape in plan view (for example, a porous electrode made of a noble metal such as Pt or Rh and a cermet of ZrO ₂ ). The inner pump electrode 22 is formed using a material that has weakened or has no reducing ability with respect to the NO component in the gas to be measured. Details of the inner pump electrode 22 will be described later.

  In the main pump cell 21, a desired pump voltage Vp 1 is applied between the inner pump electrode 22 and the outer pump electrode 23 by a variable power supply 24 provided outside the sensor element 101, and It is possible to pump oxygen in the first internal space 20 into the external space by flowing a pump current Ip1 in the positive direction or negative direction in between, or pump oxygen in the external space into the first internal space 20 It has become.

  The third diffusion control unit 30 is a part that imparts a predetermined diffusion resistance to the gas to be measured introduced from the first internal space 20 into the second internal space.

  The second internal space 40 is provided as a space for performing a process related to the measurement of the nitrogen oxide (NOx) concentration in the measurement gas introduced through the third diffusion control unit 30.

  The measurement of the NOx concentration becomes possible when the measurement pump cell 41 is activated. The measurement pump cell 41 is a reference electrode 42 sandwiched between the upper surface of the third substrate layer 3 and the first solid electrolyte layer 4, and the upper surface of the first solid electrolyte layer 4 facing the second internal space 40, 3 is an electrochemical pump cell constituted by the measurement electrode 44 provided at a position separated from the diffusion limiting part 30 and the first solid electrolyte layer 4. Each of the reference electrode 42 and the measurement electrode 44 is a porous cermet electrode having a substantially rectangular shape in plan view. An air introduction layer 48 made of porous alumina and connected to the reference gas introduction space is provided around the reference electrode 42. The measurement electrode 44 is composed of a metal capable of reducing NOx as a gas component to be measured and a porous cermet made of zirconia. Accordingly, the measurement electrode 44 also functions as a NOx reduction catalyst that reduces NOx present in the atmosphere in the second internal space 40.

  Further, the measurement electrode 44 is covered with a fourth diffusion rate controlling part 45. The fourth diffusion rate controlling part 45 is a film made of alumina and plays a role of limiting the amount of NOx flowing into the measurement electrode 44.

  In the measurement pump cell 41, the pump voltage Vp2 which is a constant voltage is applied between the measurement electrode 44 and the reference electrode 42 through the DC power source 46, thereby reducing NOx, and the second internal space generated thereby. Oxygen in the atmosphere within 40 can be pumped into the reference gas introduction space 43. The pump current Ip2 flowing by the operation of the measurement pump cell 41 is detected by an ammeter 47. In the gas sensor 100, the NOx concentration is calculated by utilizing the fact that the pump current Ip2 is substantially proportional to the NOx concentration present in the gas to be measured in a state where the oxygen partial pressure in the second internal space 40 is kept constant. Is done.

  Further, in the second internal space 40, after the oxygen partial pressure is adjusted in the first internal space 20 in advance, the measurement gas introduced through the third diffusion rate-determining unit 30 is further reduced by the auxiliary pump cell 50. The oxygen partial pressure is adjusted. Thereby, in the gas sensor 100, the NOx concentration measurement with high accuracy is realized.

  The auxiliary pump cell 50 includes an auxiliary pump electrode 51 provided on substantially the entire lower surface of the second solid electrolyte layer 6 facing the second internal space 40, the second solid electrolyte layer 6, the spacer layer 5, and the first This is an auxiliary electrochemical pump cell constituted by the solid electrolyte layer 4 and the reference electrode 42.

  As with the inner pump electrode 22, the auxiliary pump electrode 51 is formed using a material that has weakened or has no reducing ability with respect to the NO component in the gas to be measured. Details of the auxiliary pump electrode 51 will be described later.

  In the auxiliary pump cell 50, by applying a constant voltage Vp3 between the auxiliary pump electrode 51 and the reference electrode 42 through a DC power source 52 provided outside the sensor element 101, oxygen in the atmosphere in the second internal space 40 is changed. The reference gas introduction space 43 can be pumped out.

  In the sensor element 101, the oxygen partial pressure for control, which is an electrochemical sensor cell, includes the inner pump electrode 22, the reference electrode 42, the second solid electrolyte layer 6, the spacer layer 5, and the first solid electrolyte layer 4. A detection sensor cell 60 is configured.

  The control oxygen partial pressure detection sensor cell 60 includes an inner pump electrode 22 and a reference electrode that are caused by an oxygen concentration difference between the atmosphere in the first internal space 20 and the reference gas (atmosphere) in the reference gas introduction space 43. 42, the oxygen partial pressure in the atmosphere in the first internal space 20 can be detected on the basis of the electromotive force V1 generated between the first internal space 20 and the electromotive force V1. The detected oxygen partial pressure is used for feedback control of the variable power source 24. Specifically, the oxygen partial pressure of the atmosphere in the first internal space 20 is applied to the main pump cell 21 so that the oxygen partial pressure in the second internal space 40 is sufficiently low to be able to perform the oxygen partial pressure control. The pump voltage to be controlled is controlled.

  Further, in the sensor element 101, the heater 70 is formed in a form sandwiched between the second substrate layer 2 and the third substrate layer from above and below. The heater 70 generates heat by being externally supplied with power through a heater electrode 71 provided on the lower surface of the first substrate layer 1. When the heater generates heat, the oxygen ion conductivity of the solid electrolyte constituting the sensor element 101 is enhanced. The heater 70 is embedded over the entire area from the first internal space 20 to the second internal space 40, and can heat and retain a predetermined location of the sensor element 101 at a predetermined temperature. Yes. A heater insulating layer 72 made of alumina or the like is formed on the upper and lower surfaces of the heater 70 for the purpose of obtaining electrical insulation from the second substrate layer 2 and the third substrate layer 3 (hereinafter referred to as heater 70). The heater electrode 71 and the heater insulating layer 72 are collectively referred to as a heater portion).

  In the gas sensor 100 having such a configuration, by operating the main pump cell 21 and the auxiliary pump cell 50, the oxygen partial pressure is always kept at a constant low value (a value that does not substantially affect the measurement of NOx). A gas to be measured is supplied to the measurement pump cell 41. Therefore, the pump current flowing through the measurement pump cell 41 by pumping out oxygen generated by the reduction of NOx is approximately proportional to the NOx concentration to be reduced. Based on this, the NOx concentration in the gas to be measured can be known.

<Reduction of offset current>
As described above, the gas sensor 100 utilizes the fact that the pump current Ip2 is substantially proportional to the NOx concentration present in the gas to be measured in a state where the oxygen partial pressure in the second internal space 40 is kept constant. Thus, the NOx concentration is calculated. However, the pump current Ip2 is superposed with the offset current Ip2 _ofs that flows as a result of decomposition of O _{2 that} is slightly present in the gas to be measured. The offset current Ip2 _ofs corresponds to a current that flows when the NOx concentration is 0 (when NOx does not exist in the gas to be measured). Therefore, it can be said that the smaller the value of the offset current Ip2 _ofs, the better the gas sensor 100 has measurement accuracy.

FIG. 2 shows the pores of the inner pump electrode 22 and the auxiliary pump electrode 51 which are electrodes on the side of the inner space of the main pump cell 21 and the auxiliary pump cell 50 which are provided to pump out oxygen from the inside of the sensor element 101. It is a figure which shows the relationship between the porosity and the offset current Ip2 _ofs in the sensor element when the sensor element is configured with various rates (also referred to as electrode porosity). The weight ratio of the noble metal component to zirconia is 6: 4. In the present embodiment, the porosity is defined as the ratio of the volume of the void portion in the actual electrode to the total volume of the region when assuming that the electrode is completely dense.

As shown in FIG. 2, there is a correlation between the porosity of the inner pump electrode 22 and the auxiliary pump electrode 51 and the offset current Ip2 _ofs . When the porosity is about 30% to 40%, the offset current Ip2 _ofs is minimized. Such knowledge was first discovered by the inventors of the present invention.

In the case where the electrode porosity is 10% or less, the diffusion resistance when the O ₂ diffuses through the air gap to a layer comprising an oxygen ion conductive solid electrolyte from the surface side of the both electrodes is increased (O ₂ diffusion Therefore, the partial pressure of oxygen on the surfaces of both electrodes (that is, the partial pressure of oxygen in the first and second internal cavities) becomes too high relative to the target partial pressure of oxygen (concentration electromotive force) ( The actual oxygen partial pressure does not decrease as much as the target oxygen partial pressure. Further, such a case, in the electrodes, since the O ₂ concentration gradient O ₂ concentration is low enough toward the inside high O ₂ concentration at the surface side occurs remarkably, in the measurement gas of H _{2 O} and CO ₂ There is also a problem that the generation of oxygen ions by decomposition is promoted and the measurement accuracy of the NOx concentration may be deteriorated.

On the other hand, when the electrode porosity is set to 50% or more, the conduction path in the electrode is reduced, so that the conductive resistance of oxygen ions generated by the decomposition of O ₂ in both the electrodes becomes too high. It has been confirmed that there is a problem that the function of pumping out oxygen from the first and second cavities to the target oxygen partial pressure to be achieved by the pump cell 21 and the auxiliary pump cell 50 cannot be obtained sufficiently.

In view of the above, in the sensor element 101 according to the present embodiment, the inner pump electrode 22 and the auxiliary pump electrode 51 are formed such that the respective porosity is 10% or more and 50% or less. As a result, even if the offset current Ip2 _ofs varies somewhat, the NOx concentration can be measured with substantially no problem. For example, the offset current Ip2 _ofs in such a case is a minute value of 5% or less of the pump current Ip2 that flows corresponding to the NOx having a concentration of 500 ppm. Measurement is possible with a certain degree of error. In view of the results shown in FIG. 2, it can be said that the electrode porosity is more preferably 15% or more and 40% or less from the viewpoint of reducing the offset current Ip2 _ofs as much as possible.

Further, by setting the porosity within the above range, the diffusion resistance of O ₂ in the electrode is suitably reduced, and the generation of the O ₂ concentration gradient (concentration distribution) is also preferably suppressed.

There are various methods for allowing the inner pump electrode 22 and the auxiliary pump electrode 51, which are porous cermet electrodes, to have a porosity in the above-described range. For example, in the case of forming an electrode by the screen printing technique described above, the conductivity produced after appropriately adjusting the shape, particle size, specific surface area, etc. of the noble metal component and ZrO ₂ raw material powder used as the material of the cermet electrode The electrode pattern of the inner pump electrode 22 and the auxiliary pump electrode 51 is formed by using a paste or a conductive paste prepared by further mixing a sublimable pore former with the raw material powder as described above. This is a preferred example. In the latter case, the porosity can be 30% when the added amount of the pore former is 20 vol%, and the porosity can be 35% when the added amount is 40 vol%.

As described above, according to the present embodiment, the porosity of the electrode on the side of the internal space of the pump cell provided to pump out oxygen from the sensor element of the gas sensor is set within a predetermined range. Thus, the error factor derived from the O ₂ gas in the gas to be measured is reduced, the diffusion resistance of O _{2 in} the electrode is suitably reduced, and the generation of the O ₂ concentration gradient is suitably suppressed. A gas sensor with excellent measurement accuracy is realized.

<Modification>
The porosity of the inner pump electrode 22 and the porosity of the auxiliary pump electrode 51 do not have to be the same, and may be different within the range defined as described above.

The mode of determining the value of the electrode porosity within the above range is not limited to the gas sensor having two internal spaces as described above, and can be applied even when there is one internal space. More specifically, the present invention can be widely applied to gas sensors in general that measure an electric current derived from oxygen ions generated by decomposition of O ₂ or oxide gas using an oxygen ion conductive solid electrolyte.

  Further, the arrangement position of each electrode is not limited to that of the above-described embodiment, and other arrangement forms may be adopted as long as the function of each cell is ensured.

  Alternatively, in the above-described embodiment, the measurement pump cell 41 is configured between the measurement electrode 44 and the reference electrode 42, and the auxiliary pump cell 50 is configured between the auxiliary pump electrode 51 and the reference electrode 42. However, instead of this, the measurement pump cell 41 is configured between the measurement electrode 44 and the outer pump electrode 23, and the auxiliary pump cell 50 is configured between the auxiliary pump electrode 51 and the outer pump electrode 23. There may be.

DESCRIPTION OF SYMBOLS 10 Gas introduction port 20 1st internal space 21 Main pump cell 22 Inner pump electrode 23 Outer pump electrode 40 2nd internal space 41 Measurement pump cell 42 Reference electrode 43 Reference gas introduction space 44 Measurement electrode 50 Auxiliary pump cell 51 Auxiliary pump electrode 100 Gas sensor 101 Sensor element

Claims (5)

A gas sensor configured using an oxygen ion conductive solid electrolyte, and specifying a concentration of a predetermined gas component in a gas to be measured based on a current flowing through the solid electrolyte as the predetermined gas component is decomposed. ,
A gas inlet opening to the external space;
A slit-shaped first diffusion rate-limiting part communicating with the gas inlet;
A buffer space communicating with the first diffusion rate-limiting part;
A slit-shaped second diffusion rate-controlling portion communicating with the buffer space;
An internal space communicating with the second diffusion rate-limiting part;
A reference gas space for introducing a reference gas; and
Oxygen in the internal space is pumped by applying a predetermined voltage between the first electrode formed on the surface of the internal space and the second electrode formed in a space different from the internal space. Possible pumping cells; and
A voltage is applied between a third electrode formed on the surface of the internal space and a fourth electrode formed at a site different from the internal space, and the third electrode and the fourth electrode A measurement cell provided to be able to measure the current flowing between the electrodes;
With
A gas to be measured is introduced into the internal space after being given a predetermined diffusion resistance in the first diffusion rate-limiting portion and the second diffusion rate-limiting portion during the period from the external space to the internal space. And
The first electrode is formed of a porous cermet made of a noble metal and an oxygen ion conductive solid electrolyte, and the porosity of the first electrode is 10% or more and 50% or less.
A gas sensor characterized by that. The gas sensor according to claim 1,
The porosity of the first electrode is 15% or more and 40% or less,
A gas sensor characterized by that. The gas sensor according to claim 1 or 2, wherein
As the internal space,
A first internal space for introducing the measurement gas from the external space;
A second internal void,
With
The first internal space and the second internal space are communicated under a predetermined diffusion resistance by a slit-shaped third diffusion rate-determining portion,
The pumping cell comprises a main pumping cell comprising the first electrode in the first internal cavity, and an auxiliary pumping cell comprising the first electrode in the second internal cavity,
The third electrode is provided in the second internal space;
A gas sensor characterized by that. The gas sensor according to claim 3,
The second electrode is made common to the main pump cell and the auxiliary pump cell, and also serves as the fourth electrode.
A gas sensor characterized by that. A NOx sensor which is the gas sensor according to any one of claims 1 to 4,
By controlling the voltage applied to the pumping cell, the current flowing between the third electrode and the fourth electrode in the measurement cell is maintained in a state where the oxygen partial pressure in the internal space is kept constant. A NOx sensor characterized in that a NOx concentration is obtained by measurement.

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