JP2012172610A - Method for manufacturing thermal shield coating, turbine member provided with the thermal shield coating, and gas turbine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thermal shield coating having a ceramic layer that can form a smooth surface with high erosion resistance, while securing an excellent thermal shield performance.SOLUTION: The method for manufacturing the thermal shield coating includes processes of: forming a metal bonding layer 12 on a heat resistant base 11; and forming the ceramic layer 13 on the metal bonding layer 12. The process of forming the ceramic layer 13 has steps of: forming a high porous layer 14 including pores by thermal spray coating on the metal bonding layer 12; forming a dense layer 15 having a more dense structure than the high porous layer 14, on the high porous layer 14; and polishing the top surface of the dense layer 15 such that the dense layer 15 becomes a predetermined thickness.

Description

  The present invention relates to a method for manufacturing a thermal barrier coating, a turbine member including the thermal barrier coating, and a gas turbine.

  In recent years, in the field of industrial gas turbines, thermal barrier coating (TBC) that can reduce the heat load on heat-resistant members without changing the shape of the blades or the cooling structure provided on the blades is essential. Technology.

  FIG. 8 shows a partial cross-sectional view of a member to which a conventional TBC is applied. The TBC generally has a two-layer structure in which a metal bonding layer 2 and a ceramic layer 3 are sequentially coated on a heat-resistant base material 1 such as a stationary blade, a moving blade, or a wall material of a combustor constituting a gas turbine. ing.

  The metal bonding layer 2 mainly contains an MCrAlY alloy (M: represents at least one element of Co and Ni) excellent in oxidation resistance, and is sprayed onto the substrate 1. The metal bonding layer 2 has a corrosion resistance function to the substrate 1 and a function as a binder that bonds the substrate 1 and the ceramic layer 3.

The ceramic layer 3 is sprayed on the metal bonding layer 2 using a zirconia (ZrO ₂ ) ceramic powder material. Examples of the ZrO ₂ ceramic powder material include yttria partially stabilized zirconia (YSZ), SmYbZr ₂ O ₇ , and yttria partially stabilized zirconia (YbSZ) (see Patent Documents 1 to 3). Moreover, as disclosed in Patent Document 4, generally, particles having an average particle diameter of 10 to 100 μm are used as the ceramic powder material.

JP 2001-348655 A (claims 4 and 5, paragraphs [0010] to [0011], [0015]) JP 2007-270245 A (Claim 2, paragraphs [0028] to [0029]) JP 2003-160852 A (Claim 1, paragraphs [0006], [0027] to [0030]) JP 2002-69607 A (claim 21, paragraphs [0053] to [0054])

  Since the ceramic layer is required to have a heat shielding function to the base material, the ceramic layer may have a porous structure with a porosity of 1% by volume to 30% by volume. However, as shown in FIG. 9, the ceramic layer containing many pores, when the flying object 4 comes into contact from the outside and damages the surface of the ceramic layer 3, cracks run through the pores (holes), There is concern that the ceramic layer will gradually fall off.

When the thermal barrier coatings 2 and 3 are formed on the heat-resistant substrate 1 by thermal spraying, in general, in order to improve the adhesion between the substrate 1 and the thermal barrier coatings 2 and 3, the substrate is roughened in advance. After that, the thermal barrier coatings 2 and 3 are applied thereon. Therefore, as shown in FIG. 10, the roughness of the surface of the thermal barrier coatings 2 and 3 formed on the substrate 1 is increased due to the influence of the surface shape of the substrate.
In addition, since the thermal spraying is a method in which the raw material powder is collided with the substrate at a high speed in a semi-molten state and deposited, generally the rougher the raw material powder used, the greater the roughness of the sprayed film surface. Become.

Some members to which a thermal barrier coating is applied require not only thermal barrier properties but also aerodynamic characteristics. In such members, the surface of the thermal barrier coating needs to be smooth and often the surface is polished. In particular, in the case of a member that rotates at high speed, such as a moving blade of a gas turbine, smoothing the surface roughness generally leads to an improvement in the efficiency of the gas turbine.
However, the ceramic layer containing many pores has a problem that even if the surface is polished as shown in FIG. 8, the pores appear one after another on the surface, making it difficult to smooth the surface roughness.

  The present invention has been made in view of such circumstances, and is provided with a ceramic layer capable of forming a smooth surface with high erosion resistance while ensuring excellent heat shielding properties. An object is to provide a method for producing a coating.

  In order to solve the above-mentioned problems, the present invention comprises a step of forming a metal bonding layer on a heat-resistant substrate and a step of forming a ceramic layer on the metal bonding layer, and the step of forming the ceramic layer Forming a high pore layer including pores by thermal spraying on the metal bonding layer; forming a dense layer having a denser structure than the high pore layer on the high pore layer; and the dense layer Polishing the upper surface of the dense layer so as to have a predetermined thickness.

  By laminating a high porosity layer including pores on the metal bonding layer, it is possible to ensure a desired heat shielding property. By forming a dense layer on the high pore layer, the erosion resistance and thermal cycle durability of the ceramic layer are improved. When the dense layer is polished, a smoother surface can be achieved than when the high pore layer is polished.

  In one aspect of the invention, the high pore layer and the dense layer are preferably formed by spraying spray particles having a particle size distribution in which a 10% cumulative particle size is 30 μm or more and 150 μm or less.

  By using the spray particles as described above, it is possible to form a sprayed film having a higher porosity than the conventional one.

  1 aspect of the said invention WHEREIN: You may form the said dense layer partially in the predetermined location of the said high porosity layer. By doing so, production management becomes easier as compared with the case where a dense layer is formed on the entire surface.

  The present invention comprises a step of forming a metal bonding layer on a heat resistant substrate and a step of forming a ceramic layer on the metal bonding layer, wherein the step of forming the ceramic layer is thermally sprayed on the metal bonding layer. A step of forming a high pore layer including pores, and a dense layer having a denser structure than the high pore layer by irradiating microwaves on the upper surface of the high pore layer and sintering the upper portion of the high pore layer Forming a thermal barrier coating.

  By laminating a high porosity layer including pores on the metal bonding layer, it is possible to ensure a desired heat shielding property. The dense layer is not newly laminated on the high pore layer, but is formed by modifying the upper portion of the high pore layer. Since the dense layer is formed by irradiating microwaves on the upper surface of the high pore layer, the thermal damage to the heat-resistant substrate due to the formation of the dense layer is suppressed compared to the case where the dense layer is formed by thermal spraying. be able to. By forming a dense layer on top of the high pore layer, erosion resistance and thermal cycle durability are improved.

  In one aspect of the invention, the high pore layer is preferably formed by spraying spray particles having a particle size distribution in which a 10% cumulative particle size is 30 μm or more and 150 μm or less.

  By using the spray particles as described above, it is possible to form a sprayed film having a higher porosity than in the past.

  In one embodiment of the above invention, the microwave may be applied to a part or the whole of the upper surface of the high pore layer.

  By partially irradiating the upper surface of the high pore layer with microwaves, it is possible to selectively form a dense layer particularly at a location where erosion is likely to occur. As a result, it is possible to minimize the influence of a decrease in heat shielding properties due to the formation of the dense layer in the entire member. On the other hand, when microwaves are applied to the entire upper surface of the high pore layer, the process for forming the dense layer and the quality control are facilitated.

  The present invention provides a turbine member including a thermal barrier coating formed by the above manufacturing method, and a gas turbine.

  The thermal barrier coating produced by the above invention has high thermal barrier properties, erosion resistance, and thermal cycle durability, and can be applied to, for example, 1600 ° C. class gas turbine members. Moreover, since the thermal barrier coating manufactured by the said invention can form a smooth surface, it becomes possible to improve the efficiency of a gas turbine.

  According to the present invention, a thermal barrier coating having excellent thermal barrier properties, erosion resistance, and thermal cycle durability can be manufactured by forming the ceramic layer from a high pore layer and a dense layer. Since the upper surface of the ceramic layer is a dense layer, a smooth surface can be formed.

It is a schematic diagram of the cross section of a turbine member provided with the thermal barrier coating which concerns on 1st Embodiment. It is a figure which illustrates the part which the reduction | decrease of a film thickness and erosion tend to produce. It is a figure which illustrates the part which the reduction | decrease of a film thickness and erosion tend to produce. It is a figure which shows the relationship between the electric current value (A) of an APS spraying apparatus, and the surface roughness (relative value) of a test piece when the surface roughness (Ra) of the reference test piece 1 is set to 1. Test piece when the current value (A) of the APS spraying apparatus, the porosity (relative value) of the test piece when the porosity of the reference test piece 2 is 1, and the thermal conductivity of the reference test piece 2 are 1. It is a figure which shows the relationship with thermal conductivity (relative value). It is a figure which shows the influence on the erosion property of a dense layer. It is a figure explaining the manufacturing method of the thermal barrier coating which concerns on 2nd Embodiment. It is a fragmentary sectional view of the member to which conventional TBC was given. It is a fragmentary sectional view when a flying object collides with the member to which conventional TBC was given. It is a fragmentary sectional view of the member in which conventional TBC was given after carrying out blast processing of the substrate surface.

[First Embodiment]
The first embodiment of the present invention will be described below.
FIG. 1 is a schematic cross-sectional view of a turbine member provided with a thermal barrier coating. A metal bonding layer 12 and a ceramic layer 13 are sequentially formed as a thermal barrier coating on a heat-resistant substrate 11 such as a moving blade or a stationary blade of a turbine.

  The metal bonding layer 12 is an MCrAlY alloy (M represents a metal element such as Ni, Co, Fe, or a combination of two or more of these).

The ceramic layer 13 is composed of a high porosity layer 14 and a dense layer 15. The high pore layer 14 and the dense layer 15 are respectively YbSZ (ytterbia stabilized zirconia, Yb ₂ O ₃ addition ratio of 0.01% to 17.00% by weight), YSZ (yttria stabilized zirconia), SmYbZr _2. O ₇ , DySZ (dysprosia stabilized zirconia), ErSZ (erbia stabilized zirconia) and the like. The high pore layer 14 and the dense layer 15 are preferably made of the same material, particularly from the viewpoint of reducing the construction cost and the continuity of film formation.

  The high pore layer 14 has a porous structure including many pores 16. Here, “contains a lot” means that the porosity (volume%) is higher than that of the dense layer 15. The porosity and thickness of the high porosity layer 14 are appropriately set according to the required thermal conductivity.

  The dense layer 15 has a denser structure than the high pore layer 14 and is formed on the entire surface or part of the high pore layer 14. The part is a curved portion 17 as shown in FIG. 2 and FIG. 3 in which film thickness reduction and erosion are likely to occur. For example, the fillet R portion and the leading edge portion of the moving blade of the gas turbine correspond to this. The porosity of the dense layer 15 is appropriately set so as to obtain the required surface roughness. The thickness of the dense layer 15 is appropriately set in consideration of the thermal conductivity required when the ceramic layer is formed. The thickness of the ceramic layer is not particularly limited, but is 0.1 mm or more and 1 mm or less.

The method for manufacturing a thermal barrier coating according to the present embodiment includes a step of forming a metal bond layer on a heat-resistant substrate and a step of forming a ceramic layer on the metal bond layer.
First, the metal bonding layer 12 is formed on the heat-resistant substrate 11 by low pressure plasma spraying (LPPS), atmospheric plasma spraying (APS), high-speed flame spraying (HVOF), or the like.

Next, the ceramic layer 13 is formed on the metal bonding layer 12. The step of forming the ceramic layer 13 includes a step of forming the high porosity layer 14, a step of forming the dense layer 15, and a step of polishing the upper surface of the dense layer 15.
(1) Step of forming the high pore layer 14 The high pore layer 14 is formed on the metal bonding layer 12 by the atmospheric plasma spraying method. For thermal spraying, thermal sprayed particles having a particle size distribution in which the 10% cumulative particle size is 30 μm or more and 150 μm or less are used. When the cumulative particle size 10% particle size is 30 μm or more, peeling does not occur even when a severe heat load is applied 1000 times or more such that the temperature difference between the front and back surfaces of the top coat exceeds 600 ° C. (when the film thickness is assumed to be 0.5 mm). A ceramic layer having high thermal cycle durability can be obtained. That is, the thermal cycle durability can be improved by using sprayed particles with a small particle size. Increasing the 10% cumulative particle size has higher thermal cycle durability. However, if the 10% cumulative particle size exceeds 60 μm, the thermal cycle durability is substantially constant. Considering the film formation efficiency, the 10% cumulative particle size used in this embodiment is preferably 100 μm or less. The spray particles preferably have a maximum particle size of 150 μm or less, and contain particles having a particle size of 30 μm or less in a proportion of 3% or less and particles having a particle size of 40 μm or less in a proportion of 8% or less.

(2) Step of forming the dense layer 15 The dense layer 15 is formed on the high pore layer 14 by atmospheric plasma spraying. For thermal spraying, thermal sprayed particles having a particle size distribution in which the 10% cumulative particle size is 30 μm or more and 150 μm or less are used. Since the dense layer 15 is polished in a later step, the dense layer 15 is formed to have a desired thickness after polishing.
A finer layer is more likely to be obtained by using a powder having a smaller integrated particle size of 10%, but in this case, the powder supply needs to be switched at the time of construction, and the construction cost increases.
Depending on the situation of surface roughness requirement, switching to such fine powder is also an effective measure, but if the target surface roughness is not so severe, only the measures on the construction condition side described later Is sufficient, which is advantageous in terms of reducing construction costs and simplifying management.
The user can select a method in consideration of the degree of request and cost. In the present embodiment, a case where the powder particle size is not changed between the lower high-pore layer and the upper dense layer is shown.

  The porosity of the high porosity layer 14 and the dense layer 15 is controlled by adjusting the thermal spraying conditions. Examples of adjustable spraying conditions include spraying current, plasma gas flow rate, spraying distance, and the like.

(3) Step of polishing the upper surface of the dense layer 15 The upper surface of the dense layer formed on the high pore layer is polished to obtain a predetermined thickness and desired surface roughness. Polishing is performed using abrasive paper or the like.

(Effect of spraying current on roughness after polishing)
As a base material, a heat-resistant alloy (trade name: IN-738LC) having a thickness of 5 mm and a metal bonding layer (Ni: 32 mass%, Cr: 21 mass%, Al: 8 mass) having a film thickness of 100 μm by low-pressure plasma spraying. %, Y: 0.5% by mass, Co: balance). A ceramic layer (film thickness: 0.6 mm) was formed on the metal bonding layer by thermal spraying using ceramic particles having a particle size distribution with an accumulated particle size of 10% and a particle size of 30 μm to 100 μm. For spraying, a spray gun (F4 gun) manufactured by Sulzer Metco was used. Table 1 shows the thermal spraying conditions of the ceramic layer.

  After the ceramic layer is formed on the heat-resistant alloy substrate / metal bonding layer, the surface of the ceramic layer (the surface located on the side opposite to the metal bonding layer) is polished with a # 400 abrasive paper to a thickness of 100 μm to give a test piece It was.

As a comparative control of the preferable surface roughness after polishing, a ceramic layer was formed on the metal bonding layer of the base material using spray particles having an average particle size of 10-100 μm and a particle size distribution close to the normal distribution. The spraying conditions are: spraying current: 600 (A), spraying distance: 150 (mm), powder supply amount: 60 (g / min), Ar / H ₂ amount: 35 / 7.4 (l / min), film thickness : 0.6 (mm). After the ceramic layer was formed on the heat-resistant alloy / metal bonding layer, the surface of the ceramic layer was polished with a # 400 abrasive paper by a thickness of 100 μm to obtain a reference test piece 1.

The surface roughness of the ceramic layers of the test pieces (1-1 to 1-3) and the reference test piece 1 was measured using a stylus type surface roughness meter.
The measurement results are shown in FIG. In the figure, the horizontal axis represents the current value (A) of the APS spraying apparatus, and the vertical axis represents the surface roughness (relative value) of the test piece when the surface roughness (Ra) of the reference test piece 1 is 1.

  According to FIG. 4, the surface roughness of the ceramic layer after polishing decreased with increasing plasma current value. In addition, when particles having an accumulated particle size of 10% and a particle size of 30 μm or more and 150 μm or less were used, it was confirmed that the surface roughness was substantially equivalent to that of the reference specimen 1 by thermal spraying with a plasma current value of about 670 A. .

(Influence of thermal spray current on porosity and thermal conductivity)
The base material and ceramic particles used were the same as described above (influence of spraying current on roughness after polishing), a ceramic layer (film thickness 0.6 mm) was formed on the metal bonding layer by thermal spraying, and a test piece (2 -1 to 2-4). For spraying, a spray gun (F4 gun) manufactured by Sulzer Metco was used. Table 2 shows the thermal spraying conditions of the ceramic layer.

As a comparative control having preferable porosity and thermal conductivity, a ceramic layer was formed on the metal bonding layer of the base material using spray particles having an average particle size of 10-100 μm and a particle size distribution close to a normal distribution. The spraying conditions are: spraying current: 600 (A), spraying distance: 150 (mm), powder supply amount: 60 (g / min), Ar / H ₂ amount: 35 / 7.4 (l / min), film thickness : 0.6 (mm). After the ceramic layer was formed on the heat-resistant alloy / metal bonding layer, the surface of the ceramic layer was polished with a # 400 abrasive paper by a thickness of 100 μm to obtain a reference test piece 2.

  For the test pieces (2-1 to 2-4) and the reference test piece 2, the porosity and the thermal conductivity were measured. The porosity is determined by using an image processing method from a micrograph of a precisely polished thermal barrier coating cross section taken from any five fields of view (observation length of about 3 mm) using an optical microscope (100 times magnification). It was. The thermal conductivity was measured by a laser flash method specified by JIS R 1611.

  The measurement results are shown in FIG. In this figure, the horizontal axis is the current value (A) of the APS spraying apparatus, the left vertical axis is the porosity (relative value) of the test piece when the porosity of the reference test piece 2 is 1, and the right vertical axis is the reference test. It is the thermal conductivity (relative value) of the test piece when the thermal conductivity of the piece 2 is 1.

  According to FIG. 5, the porosity of the test pieces (2-1 to 2-4) increased as the plasma current value was increased. The thermal conductivity of the test pieces (2-1 to 2-4) decreased as the plasma current value was increased.

  The thermal conductivity of the test piece (2-1) on which the ceramic layer was sprayed with a plasma current of 580 A was 0.9 times that of the reference test piece 2. Although not shown in the figure, the test piece (2-1) also satisfied the allowable value for thermal cycle durability. On the other hand, referring to FIG. 4, when the ceramic layer is sprayed with a plasma current of 580 A, the surface roughness of the ceramic layer is 1.2 times higher than that of the reference test piece 1.

  According to FIG. 5, when the ceramic layer is sprayed with a plasma current of 670 A that can form the preferred surface roughness in FIG. 4, the thermal conductivity is 1.1 times that of the reference test piece 2. Although not shown in the figure, the test piece produced by thermal spraying the ceramic layer with a plasma current of 670 A also satisfied the thermal cycle durability. In the thermal cycle test, the laser thermal cycle test described in Japanese Patent No. 4031631 is applied, and various maximum surface heating temperatures are set at a heating time of 3 minutes, a cooling time of 3 minutes, and a maximum interface temperature of 900 ° C. The number of thermal cycles until the ceramic layer was peeled was measured.

  Comparing the results of FIG. 4 and FIG. 5, it can be said that the surface roughness of the ceramic layer after polishing was smoothly improved because the porosity decreased when the current value during thermal spraying was increased. On the other hand, when the porosity is lowered, the thermal conductivity is increased, and the heat shielding property, which is the original purpose of the thermal barrier coating, is lowered. From the above results, it was confirmed that the surface roughness, porosity, and thermal conductivity can be adjusted by determining the current value during thermal spraying according to the purpose.

Example 1
As a base material, a heat-resistant alloy (trade name: IN-738LC) having a thickness of 5 mm and a metal bonding layer (Ni: 32 mass%, Cr: 21 mass%, Al: 8 mass) having a film thickness of 100 μm by low-pressure plasma spraying. %, Y: 0.5% by mass, Co: balance). A ceramic layer (film thickness: 0.6 mm) was formed on the metal bonding layer by thermal spraying using ceramic particles having a particle size distribution with an accumulated particle size of 10% and a particle size of 30 μm to 100 μm. For spraying, a spray gun (F4 gun) manufactured by Sulzer Metco was used. The ceramic layer has a two-layer structure in which a porous film and a dense layer are laminated in this order from the metal bonding layer side. Table 3 shows the thermal spraying conditions of the ceramic layer.

  After the porous film and the dense layer were formed in order on the heat-resistant alloy / metal bonding layer, the surface of the dense layer (the surface located on the side opposite to the metal bonding layer) was polished by # 400 abrasive paper by a thickness of 100 μm.

About Example 1, the surface roughness, porosity, and thermal conductivity of the ceramic layer (dense layer) after polishing were measured in the same manner as the above test piece.
The surface roughness of Example 1 was a value substantially equivalent to the surface roughness of the reference test piece 1 as in the case of the single-layer ceramic layer formed at a current value of 670A. The thermal conductivity of Example 1 was just an intermediate value between the current values 580A and 670A in FIG. 5 and was substantially equal to the thermal conductivity of the reference test piece 2.

  In Example 1, the thermal cycle performance also satisfied the allowable value. In general, when the same heat flux is applied to a porous film and a dense layer formed of the same material so as to have the same adhesion, the dense layer has higher thermal cycle durability than the porous film. This is because the porous film has a higher heat shielding property than the dense layer, so the temperature gradient in the porous film increases, the thermal stress acting on the porous film increases, and the thermal cycle durability of the porous film decreases. It is estimated to act on Therefore, the fracture portion in the thermal cycle test is mainly near the interface between the metal bonding layer and the ceramic layer. Therefore, even if the ceramic layer has a two-layer structure of a porous film and a dense layer, the ceramic layer Compared with the case where the porous film has a single layer structure, the thermal cycle durability does not decrease.

  In addition, when particles having an integrated particle size of 10% and a particle size of 30 μm or more and 150 μm or less were used, it was confirmed that the surface roughness was substantially the same as that of the reference test piece by spraying with a plasma current value of about 670 A.

As a reference example, a ceramic layer made of a porous film was formed on the metal bonding layer of the base material under the same conditions as the high pore layer of Example 1.
About Example 1 and the reference example, erosion resistance was evaluated. Specifically, the test pieces of Example 1 and Reference Example (50 mm × 50 mm × 3.6 mm) were evaluated three times each by Arata-type thermal spray coating evaluation test apparatus (ACT-JP). The evaluation conditions were a test angle of 30 °, an injection distance of 100 mm, an injection pressure of 5 kg / cm ² , an injection material abrax # 54, an injection amount of 70 g / time, and an air flow rate of 330 l / min.

FIG. 6 shows the influence on the erosion property of the dense layer. In the figure, the horizontal axis represents the number of blast injections, and the vertical axis represents the cumulative amount of wear. The cumulative amount of wear is displayed as a relative value where the amount of wear when the blast injection is performed once on the ceramic layer side surface of the test piece of the reference example is 1.
According to FIG. 6, the cumulative amount of wear increased as the number of blast injections increased. Compared with the reference example which a ceramic layer consists of a porous film, Example 1 which provided the dense layer on the surface had the increase width of the cumulative depletion amount suppressed. Thus, it was shown that the erosion resistance is improved by providing a dense layer on the upper surface of the ceramic layer.

[Second Embodiment]
Hereinafter, a second embodiment of the present invention will be described.
The turbine member including the thermal barrier coating manufactured by the thermal barrier coating manufacturing method according to the present embodiment has the same configuration as that of the first embodiment.

The method for manufacturing a thermal barrier coating according to the present embodiment includes a step of forming a metal bond layer on a heat-resistant substrate and a step of forming a ceramic layer on the metal bond layer. The manufacturing method of the thermal barrier coating according to the present embodiment is different from the first embodiment in the step of forming a dense layer. FIG. 7 is a view for explaining the method for manufacturing the thermal barrier coating according to this embodiment.
First, the metal bonding layer 12 is formed on the heat-resistant substrate 21 by low pressure plasma spraying (LPPS), atmospheric plasma spraying (APS), high-speed flame spraying (HVOF), or the like.

Next, the ceramic layer 23 is formed on the metal bonding layer 22. The step of forming the ceramic layer 23 includes a step of forming the high porosity layer 24, a step of forming the dense layer 25, and a step of polishing the upper surface of the dense layer 25.
(1) Step of forming the high pore layer 24 The high pore layer 24 is formed on the metal bonding layer 22 by the atmospheric plasma spraying method. For thermal spraying, thermal sprayed particles having a particle size distribution in which the 10% cumulative particle size is 30 μm or more and 150 μm or less are used. When the cumulative particle size 10% particle size is 30 μm or more, peeling does not occur even when a severe heat load is applied 1000 times or more such that the temperature difference between the front and back surfaces of the top coat exceeds 600 ° C. (when the film thickness is assumed to be 0.5 mm). A ceramic layer having high thermal cycle durability can be obtained. That is, the thermal cycle durability can be improved by using sprayed particles with a small particle size. Increasing the 10% cumulative particle size has higher thermal cycle durability. However, if the 10% cumulative particle size exceeds 60 μm, the thermal cycle durability is substantially constant. Considering the film formation efficiency, the 10% cumulative particle size used in this embodiment is preferably 100 μm or less. The sprayed particles preferably have a maximum particle size of 150 μm or less, and contain particles having a particle size of 30 μm in a ratio of 3% or less and particles having a particle size of 40 μm in a ratio of 8% or less.
The porosity of the high porosity layer 24 is controlled by adjusting the spraying conditions. Examples of adjustable spraying conditions include spraying current, plasma gas flow rate, spraying distance, and the like.

(2) Step of forming the dense layer 25 The upper surface of the high pore layer 24 is irradiated with the microwave 26, and the upper portion of the high pore layer is sintered to form the dense layer. The microwave is applied to a part or the whole of the upper surface of the high pore layer 24. When irradiating the whole, it is good to put a member to be constructed in a microwave heating furnace. The microwave irradiation conditions may be set as appropriate depending on the required thermal conductivity of the dense layer. For example, when the frequency is 2.45 GHz to 30 GHz, the heating time is within 5 minutes, and the sintering temperature is 1200 ° C. to 1400 ° C., the dense layer 25 extends from the upper surface of the high pore layer to a depth of about 0.1 to 0.2 mm. can do.
Since the dense layer 25 is polished in a later step, the dense layer 25 is formed to have a desired thickness after polishing.

(3) Step of polishing the upper surface of the dense layer 25 The upper surface of the dense layer 24 formed on the high pore layer 24 is polished to have a predetermined thickness and a desired surface roughness. Polishing is performed using abrasive paper or the like.

1,11,21 Heat-resistant substrate 2,12,22 Metal bonding layer 3,13,23 Ceramic layer 4 Flying object 14,24 High pore layer 15,25 Dense layer 16 Pore 17 Curved portion 26 Microwave

Claims (8)

Forming a metal bonding layer on the heat resistant substrate;
Forming a ceramic layer on the metal bonding layer;
With
Forming the ceramic layer comprises:
Forming a high pore layer including pores by thermal spraying on the metal bonding layer;
Forming a dense layer having a denser structure than the high pore layer on the high pore layer;
Polishing the upper surface of the dense layer so that the dense layer has a predetermined thickness;
A method for producing a thermal barrier coating comprising:   2. The method for producing a thermal barrier coating according to claim 1, wherein the high-pore layer and the dense layer are formed by spraying spray particles having a particle size distribution in which a 10% cumulative particle size is 30 μm or more and 150 μm or less.   The method for producing a thermal barrier coating according to claim 1, wherein the dense layer is partially formed at a predetermined location on the highly airtight layer. Forming a metal bonding layer on the heat resistant substrate;
Forming a ceramic layer on the metal bonding layer;
With
Forming the ceramic layer comprises:
Forming a high porosity layer containing pores by thermal spraying on the metal binding layer;
Irradiating the upper surface of the high pore layer with microwaves and sintering the upper portion of the high pore layer to form a dense layer having a denser structure than the high pore layer;
A method for producing a thermal barrier coating comprising:   The method for producing a thermal barrier coating according to claim 4, wherein the high pore layer is formed by spraying thermal spray particles having a particle size distribution in which a 10% cumulative particle size is 30 μm or more and 150 μm or less.   The method for producing a thermal barrier coating according to claim 4 or 5, wherein the microwave is irradiated to a part or the whole of the upper surface of the high pore layer.   A turbine member provided with the thermal barrier coating manufactured with the manufacturing method in any one of Claims 1 thru | or 6. A gas turbine comprising the turbine member according to claim 7.

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