JP2012098198A - Electrical connection device and adjusting method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce cost of an electrical connection device by facilitating assembly and position adjustment of the electrical connection device.SOLUTION: In the electrical connection device, first, second, and third plate members are stacked so that the first plate member is interposed between the second and third plate members. By making the second plate member displace with respect to the first plate member by means of an adjustment device, a positioning hole or a positioning pin attached to the second plate member and a needle point position of a probe assembly disposed below the third plate member are relatively aligned for positioning a light emission device attached to the electrical connection device.

Description

  The present invention relates to an electrical connection device used for electrical testing of a wafer, a TAB, an FPC, and the like provided with a semiconductor integrated circuit, and an adjustment method thereof.

  A large number of semiconductor integrated circuits built in a semiconductor wafer (that is, an object to be inspected) are subjected to a test (that is, inspection) as to whether or not each of them is manufactured according to a specification before being separated into chips. . For this electrical test, an electrical connection device having an electrical test probe connected to the electrode of the semiconductor integrated circuit is used, and the device under test is connected to the electrical circuit of the test device via the electrical connection device. Is done.

  As one of the semiconductor integrated circuits described above, there is an integrated circuit such as a CMOS image sensor having a light receiving region having a large number of light receiving elements such as photodiodes in a chip region. In an integrated circuit including such a light receiving region, a test in a state where a test light beam such as a laser beam is irradiated on the light receiving region of the chip region to be tested, that is, a light irradiation test is performed.

  The electrical connection device is attached to the test device in advance so that it is located above the device under test. The object to be inspected and the electrical connection device are a probe provided on the lower side of the electrical connection device after the device to be inspected is arranged in the test device and is relatively moved in the direction of movement (vertical direction). The lower end of the needle, that is, the needle tip is pressed against the electrode of the object to be examined.

  At this time, in order to accurately contact the needle tip with the electrode of the object to be inspected, prior to the relative movement between the electrical connecting device and the object to be inspected, the electrical connection device and the object to be inspected are in the left-right direction and the front-back direction It is moved in a rotational direction with the vertical direction as the axis, that is, two-dimensionally. Thereby, the probe tip position and the electrode of the inspection object are aligned two-dimensionally.

  In addition, the electrical connection device used for the light irradiation test includes an opening penetrating in the vertical direction, and the light irradiation device for irradiating the test light beam is disposed on the electrical connection device so as to be disposed above the opening. It is attached in advance. Thereby, the test light beam of the light irradiation device is irradiated to the object to be inspected placed under the opening through the opening of the electrical connection device. At this time, the light irradiation device is previously positioned two-dimensionally with respect to the object to be inspected so that the test light beam is uniformly irradiated to all the light receiving elements in each light receiving region.

  Therefore, the light irradiation device is two-dimensionally positioned and attached to the electrical connection device so as to satisfy a predetermined positional relationship with the needle tip that is two-dimensionally aligned with the electrode of the object to be inspected. Thereby, coupled with the fact that the light receiving region and the electrode are built in the wafer in a fixed positional relationship, the light beam emitted from the light irradiation device having a predetermined positional relationship with the needle tip aligned with the electrode is The light receiving area is accurately irradiated.

  As described above, since the light irradiation device needs to be attached to the electrical connection device so as to satisfy the predetermined positional relationship with the needle tip, the light irradiation device includes a plurality of positioning pins on the lower side and is electrically The connecting device includes a plurality of positioning holes into which the positioning pins are fitted. The light irradiation device is positioned with respect to the electrical connection device by these positioning holes and positioning pins. Therefore, the two-dimensional positional relationship between the needle tip and the light irradiation device is determined by the positional accuracy between the needle tip and the positioning hole in the electrical connection device.

  In order to improve the positional accuracy between the probe tip of the probe and the positioning hole of the electrical connecting device, the conventional electrical connecting device has been adjusted by the following method as shown in FIG.

  As shown in FIG. 7A, the conventional electrical connecting apparatus 200 includes a reinforcing plate 202, a wiring board 204 attached to the lower side of the reinforcing plate 202, and a probe attached to the lower side of the wiring board 204. Assembly 206.

  The reinforcing plate 202 includes a through hole 208 that penetrates the reinforcing plate 202 in the vertical direction and an opening 210. The through-hole 208 functions as a positioning hole in which a light irradiation device (not shown) is positioned and attached, and the opening 210 functions as a passage through which a test beam from the light irradiation device passes.

  The wiring board 204 includes a through hole 212 that penetrates the wiring board 204 in the vertical direction and an opening 214. The through hole 212 has the same cross-sectional shape as the through hole 208 of the reinforcing plate 202 and is two-dimensionally located at the same position. The opening 214 faces the opening 210 and acts as a passage through which the test light beam passes.

  The probe assembly 206 includes a needle presser 216 attached to the wiring board 204 and a plurality of probes 218 fixed to the needle presser 216 with an adhesive. The needle presser 216 includes an opening 220. The opening 220 faces the openings 210 and 214 and acts as a passage for the test beam. The probe 218 is soldered to an electrode (not shown) provided at its rear end on the lower surface of the wiring board 204 with its needle tip 222 positioned downward.

  For adjustment of the electrical connection device, an attachment jig 224 and a guide jig 226 are used. The attachment jig 224 includes a through hole 230 that passes through the attachment jig 224 in the vertical direction and a hole 228 into which the needle tip 222 is fitted. The through hole 230 has the same cross-sectional shape as the through holes 208 and 212 and is two-dimensionally located at the same position. The guide jig 226 includes guide pins 232 that are inserted into the through holes 208, 212, and 230.

  As shown in FIG. 7B, the electrical connection device is assembled and adjusted as follows.

  First, the through hole 230 of the attachment jig 224 is passed through the guide pin 232, and the attachment jig 224 is arranged on the guide jig 226.

  Next, the probes 206 are arranged on the slope of the mounting jig 224 in a state where the needle tip 222 is fitted into the hole 228 of the mounting jig 224.

  Next, the probe holder 216 is disposed on the attachment jig 224 and the probe 206, and the probe 206 is adhered to the needle holder 216, whereby the probe assembly 206 is formed.

  Next, the wiring board 204 and the reinforcing plate 202 are disposed on the probe assembly 206 as the support assembly 234 so that the through holes 212 and 208 are passed through the guide pins 232.

  The probe assembly 206 and support assembly 234 are then bonded. Next, after the attachment jig and the guide jig are removed, the probe is soldered to the wiring board 204 at the rear end opposite to the needle tip.

  In the above process, since the guide pin 232 is passed through the through holes 208, 212, and 230 and the reinforcing plate 202, the wiring board 204, and the mounting jig 224 are overlapped, the reinforcing plate 202, the wiring board 204, and the mounting jig 224 are overlapped. Are positioned two-dimensionally.

  In such an electrical connection device, the attachment jig 224 is positioned and superimposed on the wiring board 204 and the reinforcing plate 202 in a state where the needle tip 222 is fitted in the hole 228 of the attachment jig 224. Therefore, the needle tip 222 is positioned with respect to the wiring board 204 and, consequently, the reinforcing plate 202 and attached to the wiring board 204. Thereby, the needle point 222 and the through hole 208 of the reinforcing plate 202 satisfy a predetermined positional relationship.

  However, as described above, in the method of positioning the needle tip and assembling the electrical connection device during assembly and position adjustment of the electrical connection device, the guide pin and each positioning hole through which the guide pin is passed are formed with high accuracy. Since it is necessary, the cost and man-hours for manufacturing each component such as the probe assembly and the wiring board, and thus the electrical connection device, are enormous.

  It is an object of the present invention to facilitate assembly and position adjustment of an electrical connection device and to make the electrical connection device inexpensive.

  The electrical connection device according to the present invention is disposed on the upper side of the first plate-like member that is movable in the left-right direction and the front-rear direction, and a first plate-like member extending in the left-right direction and the front-rear direction. A second plate-like member, a third plate-like member arranged immovably below the first plate-like member, and an immovable arranged below the third plate-like member A probe assembly; and an adjustment device that relatively moves the first plate member and the second plate member in the left-right direction or the front-rear direction.

  The second plate-like member includes a first hole that opens upward or a pin that protrudes upward. The probe assembly includes a plurality of probes having needle tips, and is disposed on the third plate-like member in a state where the needle tips are positioned downward.

  The first, second and third plate-like members and the probe assembly may include an opening penetrating them in the vertical direction. The adjusting device may include at least one adjusting mechanism, and the adjusting mechanism includes a second hole penetrating the second plate-like member in the vertical direction and an inner wall of the second hole. An adjusting member having an abutting portion abutted on the portion, the adjusting member being pressed downward to press the inner wall of the hole in the left-right direction or the front-rear direction via the abutting portion. May be.

  The adjustment mechanism is further an elastic member disposed below the adjustment member, the elastic member urging the adjustment member upward, and the elastic member and the adjustment member penetrating the first member. A screw member that is screwed to the plate-like member, and that presses the adjusting member downward.

  The adjustment device is a pair of first adjustment mechanisms spaced in either the left-right direction or the front-rear direction, and each adjustment mechanism relatively moves the first and second plate members in the left-right direction. And a pair of first adjustment mechanisms that move the other in the front-rear direction, and a second adjustment mechanism that relatively moves the first and second plate-like members in one of the left-right direction and the front-rear direction. May be. Furthermore, the electrical connection device may include a plurality of coupling means for coupling the first and second plate-like members so as not to move.

  The adjustment method of the electrical connection device according to the present invention includes an assembly step of assembling the electrical connection device as described above, and the first and second plate-like members in the left-right direction in the assembled electrical connection device. Or the adjustment process moved relatively to the front-back direction.

  The first, second and third plate-like members and the probe assembly may be provided with an opening penetrating them in the vertical direction, and the adjustment step is placed in or above the opening. An adjustment jig provided with a reference portion to be positioned is positioned by the first hole or pin and removably attached to the second plate-like member, and the needle tip of at least one of the reference portion and the probe Moving the first plate member and the second plate member relative to each other in the left-right direction or the front-rear direction.

  The adjusting method may include, after the adjusting step, coupling the first and second plate-like members in a non-movable and releasable manner by a plurality of coupling means.

  According to the present invention, since the positional relationship between the probe tip and the positioning hole or the positioning pin with respect to the light irradiation device can be easily adjusted after assembling the electrical connecting device, No alignment means such as a through hole with high accuracy is required. Thereby, an electrical connection apparatus can be produced simply and inexpensively.

It is a front view which shows one Example of the electrical connection apparatus which concerns on this invention. It is a figure which shows the electrical connection apparatus in FIG. 1, Comprising: (A) is a top view of an electrical connection apparatus, (B) is sectional drawing obtained along the 2B-2B line of (A). FIG. 3 is an enlarged view of 3 in FIG. 2. FIG. 2B is a view similar to FIG. 2B showing the adjustment of the electrical connection device, and (A) and (B) are respectively attached with the electrical connection device before adjustment and the attachment jig after adjustment. It is a figure which shows an electrical connection apparatus. It is a top view which shows the electrical connection apparatus which attached the attachment jig | tool in FIG. 4 (B). It is an enlarged view which shows the other Example of the adjustment mechanism of the electrical connection apparatus which concerns on this invention. It is a figure explaining the adjustment method of the conventional electrical connection apparatus, (A) shows an electrical connection apparatus, an attachment jig, and a guide jig, (B) is an attachment jig to a guide jig, It is a figure which shows the state which piles up a probe assembly and a support assembly.

  [Terminology]

  In the present invention, in FIG. 2A, the left-right direction is referred to as the left-right direction (X direction), the up-down direction is referred to as the front-rear direction (Y direction), and the paper back direction is referred to as the up-down direction (Z direction).

  However, the above-described directions in the present invention are different from the actual directions depending on the posture of the object to be inspected received by the test apparatus in which the electrical connection device is assembled. For example, in the vertical direction in the present invention, the vertical direction is an actual vertical direction, a horizontal direction, an oblique direction that is inclined with respect to the horizontal direction, and the vertical direction is determined according to the posture of an object to be inspected arranged in a test apparatus. You may use so that it may become a reverse direction. Moreover, you may rotate and use the left-right direction and the front-back direction within an XY plane.

  Referring to FIG. 1, a test apparatus 10 uses a plurality of chip regions formed on a semiconductor wafer as plate-like inspected bodies 12, and tests the inspected bodies 12 at one time or divided into a plurality of times. Used for electrical testing.

  Each chip region is an integrated circuit such as a CMOS image sensor having a plurality of image sensors. Each chip region has a plurality of electrodes 12a on the upper surface and a light receiving region 12b in which the light receiving surfaces of the plurality of light receiving elements are exposed on the upper surface. The inspection object 12 may be a wiring sheet such as an FPC on which an integrated circuit chip having a light receiving area is mounted.

  The test apparatus 10 includes a chuck top 14 that detachably holds the device 12 to be inspected in a state in which the electrode 12a and the light receiving region 12b are directed upward, and is disposed above the chuck top 14 so as to be placed on the chuck top 14. An electrical connection device 16 that electrically connects the mounted inspected object 12 and a test electrical circuit, and the electrical connection device 16 is disposed above the electrical connection device 16 so that the test light beam is directed toward the light receiving region 12b. Light irradiation device 18 for irradiation.

  The electrical connection device 16 is interposed between the test device (not shown) and the device under test 12 and transmits a test signal to the test device and the device under test 12. The test signal for the test includes a drive signal (voltage and current) supplied to the device under test 12 (integrated circuit) to obtain a response signal, and the response signal from the device under test 12 (integrated circuit) for the drive signal. Including.

  The chuck top 14 is provided on a known inspection stage, and has an upper surface that releasably holds the object 12 to be inspected. The inspection object 12 can be held on the chuck top 14 by, for example, vacuum suction.

  The chuck top 14 and the electrical connecting device 16 are relatively moved three-dimensionally in the three directions of the XY plane extending in the X direction and the Y direction and in the Z direction perpendicular to the XY plane, and in the Z direction. It is rotated relative to the angle around the extending θ axis. In general, the chuck top 14 is moved three-dimensionally with respect to the electrical connection device 16 and rotated angularly about the θ axis.

  The light irradiation device 18 is attached to a gate-type light source holder 19 supported by the electrical connection device 16. The light source holder 19 has a plurality of positioning pins 21 extending downward with an interval in the X direction or the Y direction inserted into the positioning holes 44 of the electrical connecting device 16 so that the electrical connecting device is in the XY plane. The predetermined positional relationship is maintained. For this reason, the light irradiation device 18 is also maintained in a predetermined positional relationship in the XY plane with respect to the electrical connection device.

  The electrical connection device 16 includes an opening 20 penetrating in the vertical direction at the center thereof. The light irradiation device 18 is positioned with respect to the electrical connection device 16 so as to irradiate the test light beam 22 through the opening 20 to the light receiving region 12b of the inspection object 12 placed on the chuck top 14.

  As shown in FIGS. 2A and 2B, the electrical connecting device 16 includes a first plate-like member, that is, a reinforcing plate 30, and a second plate-like member attached to the upper surface of the reinforcing plate 30, That is, the adjustment plate 32, the third plate-like member attached to the lower surface of the reinforcement plate 30, that is, the wiring board 34, the probe assembly 36 attached to the lower side of the wiring board 34, and the adjustment plate for the reinforcement plate 30. And an adjusting device 38 that adjusts the position of the 32 in the XY plane.

  The reinforcing plate 30 and the adjustment plate 32 have a flat upper surface and a lower surface. The adjusting plate 32 is attached to the reinforcing plate 30 so as to be movable in the XY plane. The wiring board 34 and the probe assembly 36 are fixedly attached to the reinforcing plate 30 and the wiring board 34, respectively.

  The reinforcing plate 30, the adjustment plate 32, the wiring board 34, and the probe assembly 36 are provided with first, second, third, and fourth openings penetrating in the vertical direction, respectively, and these first to fourth openings are electrically connected. Acts as an opening 20 in the mechanical connection device 16.

  The reinforcing plate 30 and the adjustment plate 32 are made of a metal material such as a stainless steel plate, and are releasably coupled by a plurality of coupling means 40. Each coupling means 40 includes a through hole 40a penetrating the adjustment plate 32 in the vertical direction, a screw hole 40c provided in the reinforcing plate 30, and a screw member 40b inserted through the through hole 40a and screwed into the reinforcing plate 30. With.

  In the illustrated example, the screw member 40b is tightened, so that the reinforcing plate 30 and the adjustment plate 32 are coupled so as not to move. However, the adjustment plate 32 and the reinforcing plate 30 can relatively move two-dimensionally in the XY plane until the screw member 40b is tightened.

  The adjustment plate 32 includes a plurality of first holes opened upward, that is, positioning holes 44, and the positioning holes 44 are fitted with the positioning pins 21 of the light irradiation device 18. Thereby, the light irradiation device 18 is positioned and attached to the upper side of the adjustment plate 32. However, the positioning pin 21 and the positioning hole 44 may be provided in the adjustment plate 32 and the light irradiation device 18 in the reverse manner.

  In the illustrated example, the reinforcing plate 30 and the wiring board 34 include through holes 46 and 48 that are larger than the positioning holes 44 below the positioning holes 44, respectively. The through holes 46 and 48 act as escape holes for the positioning pin 21 when the positioning pin 21 of the light irradiation device 18 is longer than the vertical dimension of the positioning hole 44.

  The wiring board 34 is a known printed wiring board manufactured in a disk shape by an electrically insulating resin such as an epoxy resin containing glass. Such a wiring board 34 has a plurality of first terminals (not shown) electrically connected to the test electric circuit so as to pass a test signal to the test electric circuit. And a plurality of conductive paths (not shown) connected to these terminals. The wiring board 34 has a plurality of second terminals (not shown) electrically connected to the probe assembly 36 on the lower surface, and each second terminal is electrically connected to the conductive path. ing.

  The probe assembly 36 includes a needle holder 50 that is immovably attached to the lower side of the wiring board 34, and a probe 52 that is disposed on the lower side of the needle holder 50. The probe 52 is a needle-type needle formed of a hard metal thin wire such as tungsten, and connected to the second electrode of the wiring board 34 with the needle tip 54 in contact with the electrode 12a at the tip. A probe rear end 56 is provided at the rear end.

  However, the probe assembly 36 may include a circular flat probe substrate disposed on the lower surface of the wiring substrate 34 and a plurality of probes attached to the lower surface of the probe substrate in a cantilever manner. Good. Such a probe may be a blade-type probe formed in a plate shape.

  In the electrical connection device 16, the probe assembly 36 and the wiring board 34 are attached to the wiring board 34 and the reinforcing plate 30 so as not to move, so that when the adjustment plate 32 moves relative to the reinforcing plate 30, The adjustment plate 32 moves in the XY plane with respect to the probe assembly 36.

  That is, when the adjustment plate 32 is moved in the XY plane with respect to the reinforcing plate 30, the positioning hole 44 of the adjustment plate 32 moves two-dimensionally with respect to the needle tip 54 of the probe 52. The positional relationship with the needle tip 54 is adjusted two-dimensionally.

  In the illustrated example, the adjustment device 38 includes a pair of first adjustment mechanisms 62 and 62 that are spaced apart from each other on the outer edge of one side extending in the left-right direction of the rectangular opening 20 and the rectangular opening 20. And a second adjustment mechanism 64 placed on the outer edge of one side extending in the front-rear direction. However, the adjusting device 38 may include only one first adjusting mechanism 62.

  Each first adjustment mechanism 62 moves the adjustment plate 32 in the front-rear direction with respect to the reinforcing plate 30. Therefore, by causing both the first adjustment mechanisms 62 to function, the reinforcing plate 30 and the adjustment plate 32 are relatively moved in the front-rear direction, and by causing only one of the first adjustment mechanisms 62 to function. Alternatively, the adjustment plate 32 can be angularly rotated around a virtual axis extending in the vertical direction with respect to the reinforcing plate 30 by providing a difference between the adjustment amounts of the first adjustment mechanisms 62.

  The adjusting device 38 includes one second adjusting mechanism 64 that moves the adjusting plate 32 in the left-right direction with respect to the reinforcing plate 30. However, if the adjusting device 38 includes at least two adjusting mechanisms, the adjusting plate 32 can be moved two-dimensionally with respect to the reinforcing plate 30 as in the case of the two first adjusting mechanisms 62 described above.

  As shown in FIG. 3, the adjusting mechanisms 62 and 64 include a second hole formed in the adjusting plate 32 so as to open upward, that is, a hole 66, and an adjusting member 68 disposed in the hole 66, A thick plate-like elastic member 70 disposed below the adjustment member 68 and a screw member 72 that penetrates the adjustment member 68 and the elastic member 70 and is screwed to the reinforcing plate 30 are included.

  The hole 66 includes an obliquely upward inclined surface 74 that extends in the moving direction (front-rear direction or left-right direction) of the adjustment plate 32 with respect to the reinforcing plate 30. The adjustment member 68 includes an inclined surface 76 that is inclined downward and parallel to the inclined surface 74. The inclined surface 76 and the inclined surface 74 are in contact with each other.

  Since the elastic member 70 is made of an elastic material such as an elastomer, the adjustment member 68 is biased upward. The screw member 72 passes through the adjustment member 68 and is screwed into a screw hole 71 provided in the reinforcing plate 30. Therefore, when the screw member 72 is screwed into the screw hole 71, the adjustment member 68 is displaced downward. The elastic member 70 may be an elastic member such as a coil spring. In this case, the screw member 72 is inserted through the center of the coil spring.

  In the adjustment mechanism 62 (or 64), when the adjustment member 68 is displaced downward by the screw member 72, the adjustment member 68 is displaced downward along the axis of the screw member 72 while compressively deforming the elastic member 70. . As a result, the adjustment plate 32 is moved relative to the reinforcing plate 30 by pressing the inclined surface 74 of the hole 66 in one of the front and rear directions (or the left and right direction) by the inclined surface 76 of the adjustment member 68. At this time, the inclined surface 76 acts as an abutting portion that abuts the inclined surface 74 of the hole 66 and presses the adjustment plate 32.

  In the illustrated example, the hole 66 and the adjustment member 68 include an upward inclined surface 74 and a downward inclined surface 76, respectively, but one of the hole 66 and the adjustment member 68 includes the above-described inclined surface, and the other includes It is not necessary to provide an inclined surface. In this case, the adjustment plate 32 is pressed in the front-rear direction (or the left-right direction) when the other part of the hole 66 and the adjustment member 68 comes into contact with one of the inclined surfaces of the hole 66 and the adjustment member 68. Further, instead of such an inclined surface, one of the hole 66 and the adjustment member 68 has a convex portion such as an obliquely upward or obliquely inclined side that makes line contact with the other part of the hole 66 and the adjustment member 68. You may have.

  The amount of movement of the adjustment plate 32 with respect to the reinforcing plate 30 can be adjusted by the screwing amount of the screw member 72 into the screw hole 71.

  Next, a method for adjusting the electrical connection device 16 shown in FIG. 4 will be described below.

  An adjustment jig 80 and a camera 90 are used to adjust the electrical connection device 16. The adjustment jig 80 includes a jig body 82 and a plurality of positioning pins 84 located outside the jig body 82. The spacing and dimensions of the positioning pins 84 are exactly matched to the spacing and dimensions of the positioning pins 21 of the light source holder 19. When the adjustment jig 80 is attached to the electrical connection device 16, the positioning pin 84 is fitted into the positioning hole 44 of the adjustment plate 32.

  In the illustrated example, the jig body 82 includes a central portion 86 disposed in the opening 20, but the central portion 86 may be disposed above the opening 20. The central portion 86 includes a reference portion 88 having a predetermined positional relationship with respect to the positioning pin 84. For example, in the state where the positioning pins 84 are fitted in the positioning holes 44 and the jig main body 82 is attached to the electrical connecting device 16, the reference portion 88 is the center of the position area of the needle tips 54 of all the probes 52. It can be provided at a location corresponding to.

  In the illustrated example, the reference portion 88 is a through hole penetrating the central portion 86 in the vertical direction, but may be a reference mark such as a cross-shaped mark formed on the lower surface of the central portion.

  The adjustment is performed while projecting an image captured by the camera and viewing the image. On the display, at least one cross line representing the center of the position area of the needle tip 54 and serving as a reference for matching the reference portion 88 is displayed. The camera 90 is placed below the opening 20 of the electrical connecting device 16 so that the position area of the reference portion 88 and the needle tip 54 can be observed.

  First, as shown in FIG. 4A, the reinforcing plate 30, the adjustment plate 32, the wiring board 34, and the probe assembly 36 are combined to assemble the electrical connection device 16, and then the adjustment jig 80 is electrically connected. It is attached to the connecting device 16 as described above.

  Next, among the plurality of probes 52, the coordinate positions of several needle tips 54 are obtained via the camera 90, and the center of the position area of the needle tips 54 is derived from the obtained coordinate positions. A location corresponding to the center of the position area of the needle tip 54 is displayed on the display as a crosshair.

  Prior to the two steps, in parallel or after, each of the screw members 40b and 72 is loosened. Thereby, the adjustment plate 32 can move two-dimensionally with respect to the reinforcing plate 30.

  Next, the adjustment plate 32 is moved to the left in FIG. As a result, the adjustment jig 80 has a virtual portion in which the reference portion 88 extends in the vertical direction through the centers of the needle tip position areas of all the probes 52 (that is, the crosshairs) guided from the several needle tips 54. The position is shifted to the left with respect to the standard reference line 92.

  Next, as shown in FIGS. 4B and 5, the reference portion 88 is moved to the right with respect to the reinforcing plate 30 until it overlaps the reference line 92 (that is, the crosshair). At this time, when the screw member 72 of the adjustment mechanism 64 is screwed into the screw hole 71, the adjustment member 68 presses the inclined surface 74 to the right, and the adjustment plate 32, and consequently the adjustment jig 80 is moved against the reinforcing plate 30. Move to the right.

  When the reference portion 88 and the reference line 92 (that is, the crosshairs) overlap with each other, the reference line 92 (that is, the crosshairs) is guided from the needle tip 54. As a result, the needle 54 and the positioning hole 44 of the adjusting plate 32 in which the positioning pin 84 of the adjusting jig 80 is fitted are aligned.

  Thereafter, the adjusting plate 32 is movably coupled to the reinforcing plate 30 by the coupling means 40 in a state where the needle tip 54 and the positioning hole 44 are aligned. However, since the adjustment plate 32 and the reinforcing plate 30 are coupled by the plurality of adjustment mechanisms 64, the coupling means 40 may be omitted.

  Referring to FIG. 6, the electrical connecting apparatus 100 includes a plurality of adjusting mechanisms 102 instead of the adjusting mechanism 62 (or 64). Each adjusting mechanism 102 is screwed into the screw member 106, the plate member 104 attached to the end of the reinforcing plate 30, the screw hole 106 penetrating the plate member 104 in the left-right direction (or the front-rear direction). And a screw member 108.

  The plate-like member 104 is attached to the end of the reinforcing plate 30 so as to rise from the reinforcing plate 30, and the screw hole 106 is located on the plate-like member 104 so as to be positioned at substantially the same height as the end of the adjusting plate 32. Is formed. When the screw member 108 is screwed into the screw hole 106, the end of the screw member 108 (the right end in the illustrated example) presses the end surface of the adjustment plate 32, and the adjustment plate 32 is moved to the right with respect to the reinforcing plate 30. The

  In the electrical connection device 16 described above, by changing one of the adjustment plate 32 and the adjustment member 68 to another adjustment plate 32 or adjustment member 68 having a different inclination angle of the inclined surface or inclined portion, the downward movement can be achieved. The moving amount of the adjusting plate 32 relative to the reinforcing plate 30 with respect to the displacement amount of the screw member 72 can be changed.

  In the electrical connection device according to the present invention, an integrated circuit including a light receiving region such as a CMOS image sensor is used as an object to be inspected in the above-described embodiments, but an integrated circuit not including a light receiving element may be used as an object to be inspected. . In this case, the positioning hole of the adjustment plate can be used for positioning and attaching the electrical connection device to the test device. When the light receiving element is not irradiated with the test light beam, the electrical connection device may not include the opening.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

DESCRIPTION OF SYMBOLS 10 Test apparatus 12 Inspected object 12a Electrode 12b Light reception area | region 16, 100, 200 Electrical connection apparatus 18 Light irradiation apparatus 22 Light beam 30 for a test Reinforcement board (1st plate-shaped member)
32 Adjustment plate (second plate member)
34 Wiring board (third plate-like member)
36 Probe assembly 38 Adjustment device 40 Coupling means 44 Positioning hole (first hole)
52 Probe 54 Needle tip 56 Probe rear end 62, 64, 102 Adjustment mechanism 66 Hole (second hole)
68 Adjustment member 70 Elastic member 72 Screw member 74, 76 Inclined surface 80 Adjustment jig,
82 Jig body 84 Positioning pin 88 Reference part 90 Camera

Claims (9)

A first plate-like member extending in the left-right direction and the front-rear direction;
A second plate-like member disposed on the upper side of the first plate-like member so as to be relatively movable in the left-right direction or the front-rear direction, and having a first hole opened upward or a pin protruding upward A second plate member comprising:
A third plate-like member disposed immovably below the first plate-like member;
A probe assembly comprising a plurality of probes having needle tips, the probe assembly being disposed immovably below the third plate-like member in a state in which the needle tips are downward;
An electrical connection device comprising: an adjustment device that relatively moves the first plate-like member and the second plate-like member in the left-right direction or the front-rear direction.   2. The electrical connection device according to claim 1, wherein each of the first, second, and third plate-like members and the probe assembly includes an opening that penetrates them in a vertical direction. The adjusting device includes at least one adjusting mechanism,
The adjustment mechanism is an adjustment member including a second hole penetrating the second plate-like member in the vertical direction, and a contact portion that is in contact with a part of an inner wall of the second hole, The electrical connection device according to claim 1, further comprising: an adjustment member that is pressed downward so as to press the inner wall of the hole in the left-right direction or the front-rear direction via the contact portion.   The adjustment mechanism is further an elastic member disposed below the adjustment member, the elastic member urging the adjustment member upward, and the elastic member and the adjustment member penetrating the first member. The electrical connection device according to claim 3, further comprising: a screw member screwed to the plate-like member, and a screw member that presses the adjustment member downward. The adjustment device is a pair of first adjustment mechanisms spaced in either the left-right direction or the front-rear direction, and each adjustment mechanism moves the first and second plate-like members in the left-right direction and the front-rear direction. A pair of first adjustment mechanisms that move relative to the other of
5. The electrical connection device according to claim 1, further comprising: a second adjustment mechanism that relatively moves the first and second plate-like members in one of the left-right direction and the front-rear direction. .   Furthermore, the electrical connection apparatus of any one of Claim 1 to 6 including the some coupling | bonding means which couple | bonds the said 1st and 2nd plate-shaped member so that a movement is impossible. A first plate-like member extending in the left-right direction and the front-rear direction; and a second plate-like member disposed on the upper side of the first plate-like member so as to be relatively movable in the left-right direction or the front-rear direction, A second plate-like member having a first hole opened upward or a pin projecting upward; a third plate-like member arranged immovably below the first plate-like member; and a needle And a probe assembly including a plurality of probes having tips, the probe assembly being disposed so as to be immovable below the third plate-like member so that the probe needle tip is in a lower position. An assembly process for assembling the connection device;
In the assembled electrical connection device, the electrical connection device adjustment method includes an adjustment step of relatively moving the first and second plate-like members in the left-right direction or the front-rear direction. The first, second and third plate-like members and the probe assembly each include an opening penetrating them in the vertical direction.
In the adjustment step, an adjustment jig having a reference portion placed in or above the opening is positioned by the first hole or pin and removably attached to the second plate member, Relatively moving the first plate member and the second plate member in the left-right direction or the front-rear direction so that the portion and the needle tip of at least one probe are placed in a predetermined positional relationship. The adjustment method according to claim 7, comprising:   9. The adjustment method according to claim 7, comprising: after the adjustment step, coupling the first and second plate-like members in a non-movable and releasable manner by a plurality of coupling means. .

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