JP2011257393A - 密閉封止された圧力感知装置 - Google Patents
密閉封止された圧力感知装置 Download PDFInfo
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- 239000012530 fluid Substances 0.000 claims abstract description 75
- 239000000463 material Substances 0.000 claims abstract description 38
- 238000007789 sealing Methods 0.000 claims description 46
- 239000003566 sealing material Substances 0.000 claims description 33
- 239000011521 glass Substances 0.000 claims description 30
- 239000000919 ceramic Substances 0.000 claims description 21
- 230000007935 neutral effect Effects 0.000 claims description 15
- 238000005452 bending Methods 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 230000008901 benefit Effects 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000003750 conditioning effect Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000002788 crimping Methods 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 239000005394 sealing glass Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003225 biodiesel Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
【解決手段】支持構造12aと当該支持構造に取り付けられたダイアフラム12bを有する圧力感知変換器12を含み、ダイアフラムは、流体接触面を有する。ハウジング16は、底壁と当該底壁から上方に延在するハウジング側壁16fによって規定された変換器受け取り空洞を有する。底壁には、流体圧力受け取り窪みが形成され。流体圧力ポート16cは、流体圧力受け取り窪みに連通するようにハウジング内に形成される。ダイアフラムは、支持構造と流体圧力受け取り窪みとの間に位置決めされ、支持構造の側壁の周囲のシール18の材料は、圧力感知変換器をハウジング内に固定し、かつ密閉シールを提供する。
【選択図】図1
Description
12:圧力感知素子または変換器
12a:セラミックベースまたは支持構造
12b:ダイアフラム
12c:電気的リード
14:条件付け電子回路
16:ハウジング
16a:ベース部分
16b:ねじ付き結合部分
16c:流体受け取り通路
16d:チャンバ
16e:プラットフォーム
16f:側壁
18:密閉シール
22:密閉シール領域
22a:バッファ部分
22b:封止部分
22c:アライメント部分
22d:アンダーカット部分
24:コネクタハウジング
Claims (16)
- 流体圧力感知装置であって、
支持構造と、当該支持構造に取り付けられたダイアフラムとを含み、当該ダイアフラムは、流体圧力に晒されるべき流体接触面を有する、圧力感知変換器と、
コネクタ端子を有するコネクタ本体と、
前記コネクタ本体とともにチャンバを形成するハウジングと、
前記チャンバ内に配置された電気回路であって、当該電気回路は、前記圧力感知変換器と前記コネクタ端子に電気的に接続され、前記ダイアフラムに印加された圧力に対応する電気信号を提供する、前記電気回路とを有し、
前記ハウジングは、底壁と前記底壁から上方に延在するハウジング側壁によって規定された変換器受け取り空洞を有し、前記底壁には流体圧力受け取り窪みが形成され、流体圧力ポートが前記流体受け取り窪みと連通して前記ハウジングに形成され、
前記ダイアフラムは、前記支持構造と前記流体圧力受け取り窪みとの間に位置決めされ、支持構造周囲のシール材料は、前記圧力感知変換器を前記ハウジング内に固定し、かつ密閉シールを提供する、流体圧力感知装置。 - 前記圧力感知変換器の前記支持構造周囲のシール材料は、半径方向に圧縮される、請求項1に記載の流体圧力感知装置。
- 前記圧力感知変換器は、曲げの中立面を有し、前記シール材料は、少なくとも、前記曲げの中立面の高さで半径方向に圧縮される、請求項2に記載の流体圧力感知装置。
- 前記シール材料は、前記圧力感知変換器を直接的にハウジングに固定する、請求項1に記載の流体圧力感知装置。
- 封止空間は、前記側壁と前記支持構造との間に存在し、前記封止空間は、封止前に前記シール材料を受け取るように構成されたバッファ部分と、前記密封封止を提供するよう構成された封止部分と、前記圧力感知変換器をハウジング内に整合させるよう構成されたアライメント部分とを含む、請求項4に記載の流体圧力感知装置。
- 前記ダイアフラムは境界面を有し、前記封止空間はさらに、アライメント部分から前記ダイアフラムの境界面に沿ってハウジングの環状プラットフォームにまで延在するアンダーカット部分を含み、前記プラットフォームに前記ダイアフラムの流体接触面が位置決めされる、請求項4に記載の流体圧力感知装置。
- 前記封止空間は、前記バッファ部分の第1の幅と、前記封止部分の第2の幅と、前記アライメント部分の第3の幅とを有し、第1の幅≧第2の幅>第3の幅である、請求項5に記載の流体圧力感知装置。
- 前記支持構造の環状の窪みは、前記バッファ部分の一部を形成する、請求項7に記載の流体圧力感知装置。
- 前記支持構造の側壁は、前記ダイアフラムから前記アライメント部分付近まで側壁に沿って上方に延在するノッチを含む、請求項5に記載の流体圧力感知装置。
- 前記装置はさらに、環状の位置決め部材を含み、前記環状の位置決め部材は、内側リムで前記ダイアフラムの前記流体接触面に隣接し、かつ外側リムで前記ハウジング側壁の環状のエッジに隣接し、
前記環状の位置決め部材は、前記ダイアフラム近傍の前記ハウジングから離間されるように構成される、請求項1に記載の流体圧力感知装置。 - 前記装置はさらに、前記圧力感知変換器を前記ハウジング内に位置決めするように構成された、前記支持構造の周囲に位置決めされたスペーサーを含み、封止空間からダイアフラムの方向にシール材料が流れるのを防止する、請求項1に記載の流体圧力感知装置。
- 前記装置はさらに、環状の溶接によって前記ハウジングに密封して取り付けられた支持部材を含み、前記圧力感知変換器の前記支持構造は、前記支持部材内で少なくとも部分的に受け取られ、前記シール材料は、前記変換器と前記支持部材間の密封封止を形成する、請求項1に記載の流体圧力感知装置。
- 前記支持構造は、セラミックの支持構造である、請求項1に記載の流体圧力感知装置。
- 前記圧力感知変換器は、容量性の圧力感知変換器である、請求項1に記載の流体圧力感知装置。
- 前記シール材料はガラスであり、より好ましくは、低温度のシールガラスである、請求項1に記載の流体圧力感知装置。
- 請求項9に記載の圧力感知変換器の技術的特徴を含む、圧力感知素子。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10165275.8A EP2395336B1 (en) | 2010-06-08 | 2010-06-08 | Hermetically sealed pressure sensing device |
EP10165275.8 | 2010-06-08 | ||
US13/097,246 US8499642B2 (en) | 2010-06-08 | 2011-04-29 | Hermetically sealed pressure sensing device |
US13/097,246 | 2011-04-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011257393A true JP2011257393A (ja) | 2011-12-22 |
JP5748567B2 JP5748567B2 (ja) | 2015-07-15 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2011123899A Active JP5748567B2 (ja) | 2010-06-08 | 2011-06-02 | 密閉封止された圧力感知装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8499642B2 (ja) |
EP (1) | EP2395336B1 (ja) |
JP (1) | JP5748567B2 (ja) |
KR (1) | KR101883500B1 (ja) |
CN (1) | CN102331323B (ja) |
Cited By (1)
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EP3002572A2 (en) | 2014-09-30 | 2016-04-06 | Nagano Keiki Co., Ltd. | Physical quantity measuring device |
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DE102008001393A1 (de) * | 2008-04-25 | 2009-10-29 | Robert Bosch Gmbh | Luftdrucksensor zur Aufprallerkennung |
US9103738B2 (en) | 2012-09-07 | 2015-08-11 | Dynisco Instruments Llc | Capacitive pressure sensor with intrinsic temperature compensation |
US8984952B2 (en) * | 2012-09-07 | 2015-03-24 | Dynisco Instruments Llc | Capacitive pressure sensor |
US9027410B2 (en) * | 2012-09-14 | 2015-05-12 | Sensata Technologies, Inc. | Hermetically glass sealed pressure sensor |
DE102012222089A1 (de) * | 2012-12-03 | 2014-06-05 | Robert Bosch Gmbh | Drucksensormodul |
US9341536B2 (en) * | 2014-02-24 | 2016-05-17 | Kulite Semiconductor Products, Inc. | Pressure sensor having a front seal |
US9964460B2 (en) | 2014-02-24 | 2018-05-08 | Kulite Semiconductor Products, Inc. | Pressure sensor having a front seal |
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CN209326840U (zh) | 2018-12-27 | 2019-08-30 | 热敏碟公司 | 压力传感器及压力变送器 |
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CN113418562A (zh) * | 2020-12-31 | 2021-09-21 | 杭州三花研究院有限公司 | 传感器 |
CN112954578B (zh) * | 2021-01-29 | 2022-07-01 | 中国科学院声学研究所北海研究站 | 一种振动平衡型低噪声深海水听器及其制造方法 |
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2010
- 2010-06-08 EP EP10165275.8A patent/EP2395336B1/en active Active
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2011
- 2011-04-29 US US13/097,246 patent/US8499642B2/en active Active
- 2011-06-02 JP JP2011123899A patent/JP5748567B2/ja active Active
- 2011-06-03 CN CN201110148055.3A patent/CN102331323B/zh active Active
- 2011-06-07 KR KR1020110054592A patent/KR101883500B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02138776A (ja) * | 1988-08-07 | 1990-05-28 | Nippon Denso Co Ltd | 半導体圧力センサ |
JPH08271365A (ja) * | 1995-03-31 | 1996-10-18 | Endress & Hauser Gmbh & Co | 圧力センサ |
JPH09304209A (ja) * | 1996-05-14 | 1997-11-28 | Matsushita Electric Ind Co Ltd | 静電容量式圧力センサ及びこのセンサを用いたガス異常監視装置 |
JP2001242030A (ja) * | 2000-02-15 | 2001-09-07 | Endress & Hauser Gmbh & Co | 圧力センサ |
Cited By (4)
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EP3002572A2 (en) | 2014-09-30 | 2016-04-06 | Nagano Keiki Co., Ltd. | Physical quantity measuring device |
KR20160038775A (ko) | 2014-09-30 | 2016-04-07 | 나가노 게이키 가부시키가이샤 | 물리량 측정 장치 |
US9631991B2 (en) | 2014-09-30 | 2017-04-25 | Nagano Keiki Co., Ltd. | Strain-gauge physical quantity measuring device with an electronic component provided on a flat surface of a cylindrical portion radially distanced from a diaphragm |
EP3581905A1 (en) | 2014-09-30 | 2019-12-18 | Nagano Keiki Co., Ltd. | Physical quantity measuring device |
Also Published As
Publication number | Publication date |
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KR20110134308A (ko) | 2011-12-14 |
US20110296927A1 (en) | 2011-12-08 |
EP2395336A1 (en) | 2011-12-14 |
EP2395336B1 (en) | 2018-08-01 |
KR101883500B1 (ko) | 2018-07-30 |
CN102331323B (zh) | 2015-09-09 |
US8499642B2 (en) | 2013-08-06 |
JP5748567B2 (ja) | 2015-07-15 |
CN102331323A (zh) | 2012-01-25 |
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