JP2011102729A - Analyzing chip device, chemical sensor chip housing adaptor used analyzing chip device analyzer, and analyzing method using the analyzing chip device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent erroneous detection and erroneous analysis caused by external noise in a microchemical sensor chip for analyzing an extremely small amount of a substance in a liquid sample. <P>SOLUTION: An analyzing chip device is equipped with a chemical sensor chip for detecting the amount of a target substance and a shield part for reducing the noise acting on the chemical sensor chip from the outside. Preferably, a shield layer for shielding at least one of electric noise, magnetic noise, electromagnetic noise, optical noise and heat noise is provided at a chemical sensor chip housing adaptor for housing the chemical sensor chip, an analyzer or the surface of the chemical sensor chip. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an analysis chip device that analyzes trace substances, and more particularly to an analysis chip device that includes a chemical sensor chip.

  Target substances contained in trace amounts in gases and liquids using chemical sensor chips that detect the amount and type of chemical substances in the outside world by converting them into other signals such as electrical signals, optical signals, heat and mass signals, etc. An analysis is currently underway.

  Such chemical sensors include ion sensors, gas sensors, biosensors, microbial sensors, immune sensors, and the like.

  In particular, chemical sensors using ELISA (Enzyme Linked Immuno Sorbent Assay, solid-phase enzyme immunoassay) that uses enzyme immunoassay (EIA method) and performs analysis by immobilizing antibodies on a plate (chip) Chips are widely used.

  The ELISA method is also applied to, for example, examination of mad cow disease or bovine spongiform encephalopathy (hereinafter referred to as BSE), which has recently become a problem. A structural change of a protein called prion is observed from the brain tissue of cattle that developed BSE. A prion protein with a structural change that is specifically observed in BSE-cattle cows is called an abnormal prion protein, and is used as a marker (test indicator) in BSE diagnosis. And BSE diagnosis is generally performed by ELISA method using fluorescence (see Non-Patent Documents 1 and 2). In addition, electrochemical analysis methods are widely used for detection in the ELISA method.

  An analysis using the ELISA method using a chemical sensor chip will be described with reference to FIG. The chemical sensor chip includes an introduction port 1003, a discharge port 1004, and a flow path 1002 that connects the introduction port 1003 and the discharge port 1004. In the flow channel 1002, a detection electrode 1005 is provided. In addition, an antibody that specifically reacts with a target substance (antigen) is immobilized in the channel 1002. The analysis using this chemical sensor chip is performed as follows.

(1) A sample solution containing a target substance is introduced from the introduction port 1003 into the channel 1002.
(2) The sample solution is allowed to undergo an antigen-antibody reaction in a chemical sensor chip to generate an antigen-antibody complex.
(3) The sample solution is discharged from the discharge port 1004 to the outside of the chemical sensor chip.
(4) A solution containing a recognition substance (labeled antibody) in which a labeling substance (enzyme) is immobilized is introduced from the introduction port 1003 into the flow path 1002, reacted with the antigen-antibody complex and antigen-antibody, and labeled antibody-antigen- An antibody complex is generated.
(5) The solution containing the recognition substance having the labeling substance immobilized outside the chemical sensor chip is discharged from the discharge port 1004.
(6) A solution containing a substrate is introduced into the flow channel 1002 from the introduction port 1003, and the label (enzyme) of the labeled antibody-antigen-antibody complex is reacted with the substrate to generate an electrode active substance.
(7) The electrode 1004 detects the electrode active substance obtained by the enzyme substrate reaction.

  As a technique relating to such a chemical sensor chip, the following Patent Document 1 can be cited.

JP 2007-240425 A

G. Safar et al., Nature Biotechnology, 20, 1147-1150 (2002) A. Warsinke, A. Benkert, F.W.Scheller, Fresenius J Anal Chem, 366, 622 (2000)

  However, as a result of diligent researches by the present inventors, it has been found that in the conventional analyzer, a measurement defect occurs when or after the chemical sensor chip is connected. This will be described below.

  For example, as shown in FIG. 16B, the electromagnetic wave 99 may jump from the outside of the chemical sensor chip 91 to the vicinity of the electrode 96 on the chemical sensor chip 91. In this case, part of the energy of the electromagnetic wave is converted into voltage or current in the electrode, and may be carried as a large noise component on the minute current detected during measurement by the analyzer 92. For this reason, if there is an electromagnetic noise source in the vicinity of the analyzer, an erroneous measurement result may be obtained.

  When electrical detection is performed, an electrode pattern 96 is produced inside the detection chip 91, but this electrode pattern 96 serves as a radio wave antenna and easily accepts electromagnetic waves from the outside. For this reason, the risk of erroneous detection increases due to electromagnetic noise.

  In addition, chemical sensor chips are usually inserted into analyzers by human hands (including when using gloves). At this time, static electricity flows from the frictional or static human body to the chemical sensor chip, and the chemical sensor chip. There is also a possibility that the chip itself is charged. As shown in FIG. 16 (c), static electricity generated when touched by a human hand accumulates on the lid substrate 97b of the chemical sensor chip 91, and the accumulated static electricity moves to the measurement electrode 96 to generate a minute current. May greatly affect the measurement.

  In particular, when measuring a very small amount of specimen such as an antigen, the chemical sensor chip and the analyzer measure a minute current of the order of μA or less. Furthermore, in order to measure a very small amount of specimen, it is necessary to have a performance capable of measuring a very small current on the order of nA to pA and a measure for preventing disturbance. In this case, since electrical noise and temperature changes inside and outside the chip and the device cannot be ignored, it is not easy to ensure an S / N (signal / noise) ratio.

  Since such electromagnetic waves and static electricity occur irregularly (randomly), it is difficult to accurately detect by a method of subtracting a certain value.

  A first problem of the present invention is to provide an analysis chip device that can perform accurate detection without being affected by external noise as described above. In addition, a second problem of the present invention is to provide an analysis chip device capable of examining the location and cause of noise and removing noise.

  The present invention for solving the first problem is provided with means for preventing noise from acting on the chemical sensor chip, and is hereinafter referred to as the first present invention. The present invention for solving the second problem is provided with means for detecting and removing noise, and is hereinafter referred to as a second present invention. A combination of the first invention and the second invention is hereinafter referred to as a third invention.

The first aspect of the present invention for solving the above problems is configured as follows.
An analysis chip device comprising: a chemical sensor chip that detects an amount of a target substance; and a shielding unit that reduces noise acting on the chemical sensor chip from the outside.

  The first aspect of the present invention is divided into the following first to third modes depending on which member is provided with the shielding portion.

1st aspect: A shielding part is provided in the surface of a chemical sensor chip.
2nd aspect: A shielding part is provided in the chemical sensor chip accommodation adapter which accommodates a chemical sensor chip.
3rd aspect: A shielding part is provided in the analyzer provided with the analysis means.

  In any of these aspects, the chemical sensor chip has a shielding portion that reduces noise acting from the outside, and accurate analysis can be performed without being affected by external noise.

  The first aspect of the first aspect of the present invention is an analysis chip device in which a shielding portion is provided on the surface of a chemical sensor chip. According to this configuration, the configuration of the analysis chip device can be simplified.

  Further, in the second aspect of the first aspect of the present invention, the shielding portion is provided in the chemical sensor chip storage adapter, not in the analytical device having the chemical sensor chip or the analyzing means. In this configuration, the chemical sensor chip itself is not provided with a shielding part, so that the cost of the chemical sensor chip can be prevented. In addition, since the chemical sensor chip is not directly stored in the analysis device having the analysis means, the test solution does not leak in the analysis device, and failure of the analysis device can be prevented. In addition, since external noise such as static electricity does not enter the analyzer together with the chemical sensor chip, highly accurate detection is possible.

  In the third aspect of the first aspect of the present invention, the analyzer is provided with a shielding part. According to this configuration, the configuration of the analysis chip device can be simplified, and the cost of the chemical sensor chip can be prevented.

  In the first aspect of the first aspect of the present invention, the shielding portion can be a shielding layer that covers the surface of the chemical sensor chip.

  If the shielding portion is a shielding layer that covers the surface of the chemical sensor chip, external noise can be effectively reduced by a simple method.

  In the 2nd or 3rd aspect of 1st this invention, a shielding part can be made into the shielding layer which covers the chip | tip storage part which accommodates a chemical sensor chip.

  The shielding layer is an electrical shielding means for shielding electrical noise, an electromagnetic shielding means for shielding electromagnetic noise, a magnetic shielding means for shielding magnetic noise, a light shielding means for shielding optical noise (noise light), and a heat insulation for shielding thermal noise. It is preferable to have at least one means.

  A conductor can be used as the electrical shielding means. As the electromagnetic shielding means, a conductor can be used, and a conductive fiber mesh structure can also be used. A magnetic material (soft magnetic material) can be used as the magnetic shielding means. An opaque material can be used as the light shielding means. As the heat insulating means, a heat insulating material can be used.

  Moreover, it can be set as the structure which combines an electrical shielding means and a light shielding means with one material like an opaque conductor. Moreover, it can also be set as the structure which has a some shielding function by laminating | stacking a several shielding means (for example, laminating | stacking a magnetic body and a heat insulating material).

In addition, in order to prevent a decrease in analysis accuracy due to an increase in the total length of the wiring connected from the chemical sensor chip to the analyzer, 1 × 10 ¹⁴ Ω · A connection terminal having an insulation resistance of cm or more can be provided. As a material having an insulation resistance of 1 × 10 ¹⁴ Ω · cm or more, ceramic, polyethylene, or tetrafluoroethylene can be used.

  The second aspect of the present invention for solving the above problems relates to a configuration for detecting and removing a noise level of a chemical sensor chip, and is classified into the following four modes.

1st aspect: The aspect which provides the sensor which detects the noise level of a chemical sensor chip.
2nd aspect: The aspect which provides the noise removal means which removes the noise which a chemical sensor chip has.
Third aspect: An aspect in which a sensor for detecting the noise level of the chemical sensor chip and noise removing means are provided.
Fourth aspect: An aspect according to a detection method using the analysis chip device of the third aspect.

The first aspect of the second aspect of the present invention is configured as follows.
An analysis chip device comprising: a chemical sensor chip that detects an amount of a target substance; and a sensor that detects a noise level present on the chemical sensor chip.

  According to this configuration, the noise level of the chemical sensor chip can be detected. When the noise level is constant, a highly accurate analysis can be performed by performing the correction process. Further, it becomes possible to investigate the source and cause of noise.

  As the noise, electric noise (noise due to static electricity), electromagnetic wave noise, temperature, noise due to temperature change can be used.

  The sensor for detecting electrical noise or electromagnetic wave noise can be configured to include a noise detection electrode provided on the chemical sensor chip and a detection unit for detecting the noise level of the noise detection electrode. The noise detection electrode for detecting electrical noise can be a guard ring electrode. Moreover, the electrode for a noise detection which detects an electrical noise can use the electrode of the length which functions as an antenna with respect to electromagnetic waves.

  As a sensor for detecting thermal noise, a known temperature sensor such as a thermocouple or a semiconductor thermal sensor can be used.

The second aspect of the second aspect of the present invention is configured as follows.
An analysis chip device comprising: a chemical sensor chip that detects an amount of a target substance; and a noise removal unit that removes noise from the chemical sensor chip.

  According to this configuration, high-precision analysis can be performed by removing noise from the chemical sensor chip.

  The noise can be electrical noise (noise due to static electricity), temperature, or noise due to temperature changes.

  As means for removing electrical noise, means for discharging static electricity accumulated in the chemical sensor chip, means for connecting the chemical sensor chip to a reference potential, an ion generator (ionizer) for removing static electricity, and the like can be used.

  As means for removing noise due to temperature, temperature control means such as an air conditioner or a Peltier element can be used.

  The third aspect of the second aspect of the present invention is a combination of the first aspect of the second aspect of the present invention and the second aspect of the second aspect of the present invention. Therefore, the structure and effect are the same as the above combination.

  Further, in the third aspect of the second aspect of the present invention, it may be configured to further include a control unit that operates the noise removing means when the noise level detected by the sensor is equal to or higher than a reference value.

  The fourth aspect of the second aspect of the present invention relates to an aspect related to the detection method using the analysis chip device of the third aspect, and is configured as follows.

  A detection method using the analysis chip device according to the third aspect, wherein a step of detecting a noise level of a chemical sensor chip by the sensor, a step of determining the noise level, and the noise level being equal to or higher than a reference value Includes a step of removing noise using the noise removing means and a step of performing analysis.

  According to this configuration, after determining the noise level of the chemical sensor chip, noise that lowers the analysis accuracy is removed, and then the analysis is performed. Therefore, the analysis can be performed with high accuracy regardless of the noise level.

  The third aspect of the present invention for solving the above problems is a combination of the first aspect of the present invention and the second aspect of the present invention.

  According to the first aspect of the present invention, external influence on the chemical sensor chip (physical influence such as electromagnetic wave, static electricity, magnetic field, light, heat, pressure, stress strain, humidity, gas in the air, etc. (Including chemical influences such as contamination by chemical substances), it is possible to prevent a decrease in analysis accuracy.

  According to the second aspect of the present invention, it is possible to determine whether there is a problem in actual analysis by measuring the noise level present on the chemical sensor chip. By removing noise present on the chemical sensor chip to a level that does not cause a problem in measurement, the detection accuracy can be increased.

  According to the third aspect of the present invention, both the effects of the first aspect of the present invention and the effects of the second aspect of the present invention can be obtained.

1A and 1B are diagrams showing a configuration of an analysis chip device according to Embodiment 1, FIG. 1A shows a separated state, and FIG. 1B shows a chemical sensor chip stored in a chemical sensor chip storage adapter. FIG. 1C shows a state in which the chemical sensor chip storage adapter is connected to the analyzer. FIG. 2 is a diagram illustrating a state where the analysis chip device according to Embodiment 1 is connected, and FIG. 2A is a cross-sectional view of a chemical sensor chip storage adapter in which a chemical sensor chip is stored; FIG. 2B is a partial cross-sectional view of the analysis chip device showing connection between the chemical sensor chip storage adapter and the analysis device, and FIG. 2C is a cross-sectional view of the analysis chip device. 3A and 3B are diagrams for explaining connection terminals of the analysis chip device according to the first embodiment. FIG. 3A shows the chemical sensor chip before storage, and FIG. 3B shows the chemical sensor chip after storage. FIG. 4 is a diagram showing a modification of the connection form of the analysis device of the analysis chip device and the chemical sensor chip storage adapter according to the first embodiment. FIG. 5 is a diagram illustrating a configuration of the analysis chip device according to the second embodiment. 6 is a diagram showing a configuration of an analysis chip device according to Embodiment 3, FIG. 6 (a) shows a chemical sensor chip, FIG. 6 (b) shows an analysis device before chemical sensor chip storage, FIG. 6C shows the analyzer after the chemical sensor chip is housed. FIG. 7 is a diagram illustrating a configuration of an analysis chip device according to the fourth embodiment. 8A and 8B are diagrams showing a connection form of the analysis chip device according to the fourth embodiment. FIG. 8A is a cross-sectional view, and FIGS. 8B and 8C are diagrams showing connection terminals. 9A and 9B are diagrams showing the configuration of the analysis chip device according to the fifth embodiment. FIG. 9A shows the chemical sensor chip before storage, FIG. 9B shows the chemical sensor chip after storage, and FIG. 9 (c) shows a chemical sensor chip, and FIG. 9 (d) shows a modification of the chemical sensor chip. 10A and 10B are diagrams showing an electrostatic noise removing mechanism of the analysis chip device according to the fifth embodiment. FIG. 10A is an overall view, and FIG. 10B is an enlarged view of a main part. FIG. 11 is a diagram illustrating an electrostatic noise removal mechanism of the analysis chip device according to the sixth embodiment. FIG. 12 is a diagram illustrating a configuration of an analysis chip device according to the seventh embodiment. FIG. 13 is a flowchart for explaining an analysis method according to the ninth embodiment. FIG. 14 is a diagram illustrating a chemical sensor chip according to an example, in which FIG. 14A is a plan view and FIG. 14B is a cross-sectional view. FIG. 15 is a voltammogram showing the results of electrochemical measurements in Example 1. 16A and 16B are diagrams showing the configuration of the analysis chip device according to Comparative Example 1. FIG. 16A shows the chemical sensor chip before storage, FIG. 16B shows the chemical sensor chip after storage, and FIG. (C) shows electrostatic noise on the chemical sensor chip. FIG. 17 is a voltammogram showing the electrochemical measurement results in Comparative Example 1. FIG. 18 is a diagram showing a conventional micro chemical sensor chip.

(Embodiment 1)
In the present embodiment, the second aspect of the first present invention will be described. The present embodiment will be described in detail with reference to the drawings. FIG. 1 is a diagram showing an analysis chip device according to the present embodiment, and FIG. 2 is a diagram showing conductive connection of the analysis chip device.

  As shown in FIG. 1A, the analysis chip device according to the present embodiment is connected to a chemical sensor chip 1, a chemical sensor chip storage adapter 3 that stores the chemical sensor chip 1, and a chemical sensor chip storage adapter 3. And an analyzing device 2 to be operated.

  The chemical sensor chip storage adapter 3 is provided with a chip storage part 4 having an opening for storing the chemical sensor chip 1, and the analyzer 2 is provided with an adapter connection part 5 for connecting to the chemical sensor chip storage adapter 3. It has been. Then, as shown in FIG. 1B, the chemical sensor chip 1 is stored in the chip storage portion 4 of the chemical sensor chip storage adapter 3, and as shown in FIG. 1C, the adapter connection portion 4 of the analyzer 2 is stored. The chemical sensor chip storage adapter 3 is connected to the battery for analysis.

  As shown in FIG. 1A, the chemical sensor chip 1 is provided with a flow path 20 and a detection electrode 6. In the chemical sensor chip 1, as shown in FIG. 2A, the lid substrate 7 b provided with the detection electrode 6 and the main substrate 7 a provided with a groove for the flow path 20 are overlapped. It becomes. Here, a resin material having excellent processability can be used as the material of the main substrate 7a, and for example, PDMS (polydimethylsiloxane) is suitable. Further, as the material of the lid substrate 7b, a material that can easily form electrodes can be used, and glass, quartz, or the like can be used. The electrode 6 may be made of a noble metal such as Au, Pt, or Ag, may be made of an inexpensive metal such as Al, Cu, or Ni, and may have a structure in which these metals are laminated. .

  As shown in FIG. 2A, the chemical sensor chip storage adapter 3 is provided with a shielding layer 8 that prevents external noise from acting on the chemical sensor chip 1 stored inside. In addition, a leaf spring electrode 9 connected to the electrode 6 of the chemical sensor chip is provided. As a material of the chemical sensor chip storage adapter 3, a molding resin material can be used, and for example, an acrylic resin, a polystyrene resin, a polycarbonate resin, or the like can be used.

  Further, a metal material may be provided in the vicinity of the chip housing portion 4 of the chemical sensor chip housing adapter 3 and at a position where the chemical sensor chip housing adapter 3 does not contact the electrode 6 of the chemical sensor chip 1. In this case, since static electricity accumulated in the chemical sensor chip 1 flows to the outside via the metal material, noise due to charging of the chemical sensor chip 1 itself can be reduced.

  For example, the shielding layer 8 can be electrically shielded (electric shielding means) so that electrical noise from the outside does not act on the chemical sensor chip 1 housed in the adapter. The shielding layer 8 that electrically shields can be made of a conductor, and as the conductor, carbon or a carbon-like material, an alloy such as Ni, Fe, or Cu can be used. Moreover, it can also be set as the shielding layer (electromagnetic shielding means) which shields electromagnetic waves in addition to electrical shielding. When an electromagnetic shielding layer is used, static electricity generated inside and outside the adapter can be quickly removed, and electromagnetic waves can be prevented from entering the adapter by reflection / absorption.

  The shielding layer 8 may be a magnetic shielding means that shields magnetic noise. In this case, the shielding layer 8 can be made of a magnetic material (soft magnetic material). As the magnetic material, a material having a high magnetic permeability such as steel or mu metal can be used, but these materials have a drawback that it takes time to produce a shielding layer. Therefore, it is preferable to use a magnetic shielding sheet using an amorphous magnetic material made of iron or cobalt because of its high versatility. When other electronic devices are present around the analysis chip device, the influence of magnetic field noise due to the use of the electronic devices appears in the measurement results. However, this can be prevented by providing a magnetic shielding layer.

  The shielding layer 8 may be an optical shielding means for shielding optical noise. In this configuration, since the chemical sensor chip is not exposed to light, the internal specimen can be prevented from being deteriorated and the sensitivity of the detection current due to optical influence can be prevented from being deteriorated. In addition, temperature changes inside the chip due to external light can be prevented. The optical shielding means can be made of an opaque material.

  Moreover, the shielding layer 8 is good also as a heat insulation means which prevents the temperature change of a chemical sensor chip. With this configuration, it is possible to prevent the electrical measurement results on the chemical sensor chip from greatly varying due to temperature changes inside or outside the apparatus or inside or outside the adapter. In this case, a heat insulating material can be used as the shielding layer 8. As the heat insulating material, for example, a fiber coating such as urethane resin can be used.

  The shielding layer 8 can have a plurality of functions of the above-described electrical shielding, electromagnetic shielding, magnetic shielding, light shielding, and temperature shielding. This can be realized by using a material having a plurality of functions (for example, shielding light and electricity by using an opaque conductor) or by laminating a plurality of materials.

  As shown in FIG. 2 (c), the analyzer 2 includes a circuit board (analyzing means) 10 that performs analysis, and a leaf spring electrode 11 that is electrically connected to the circuit board 10 and the chemical sensor chip storage adapter 3. Have.

  2 (b) and 2 (c), the electrode 6 of the chemical sensor chip 1 and the chemical sensor chip storage adapter 3 are connected by a leaf spring electrode 9, and the chemical sensor chip storage adapter 3 and the analyzer are connected. 2 are connected by the leaf spring electrode 11, the signal detected at the electrode 6 of the chemical sensor chip 1 is sent to the circuit board 10.

  Here, when the shielding layer 8 is provided as described above, it is strong against noise from the outside, but by providing the chemical sensor chip storage adapter between the chemical sensor chip 1 and the analyzer 2, the wiring length becomes long. If the wiring length increases, self-induced current noise may be generated. Therefore, it is preferable to provide means for reducing this.

In the present embodiment, as shown in FIG. 3A, a plate spring electrode 11 is provided at the connection portion 12 between the circuit board 10 of the analyzer 2 and the plate spring electrode 9 of the chemical sensor chip storage adapter 3. A part of the leaf spring electrode 11 is covered with a connection terminal 14 having an insulation resistance of 1 × 10 ¹⁴ Ω · cm or more. Thereby, the influence by self-induced current noise can be reduced. As the material of the connection terminal 14, ceramic, polyethylene, polytetrafluoroethylene, etc., which are known as inexpensive insulating materials, can be used.

  FIG. 3B shows a state of the terminal 14 when the analyzer 2 and the chemical sensor chip storage adapter 3 are connected. From this figure, it can be seen that the wiring portion not covered with the insulating connection terminal is shortened.

  In addition, this Embodiment shows one form with which a chemical sensor chip accommodation adapter and an analyzer exist independently, Comprising: It is not limited to the form shown in figure.

  For example, not only the method of directly inserting the chemical sensor chip storage adapter 3 into the analyzer 2 as described above, but also the analyzer 3 and the chemical sensor chip storage adapter 2 are electrically connected to each other by an electric cord. Also good. In this case, it is necessary to provide a connector capable of connecting an electric cord to the analyzer 3 and the chemical sensor chip storage adapter 2.

  FIG. 4 shows a modification example described above. The analyzer 2 is provided with a connector 15, and a similar connector (not shown) is also provided on the chemical sensor chip storage adapter 3 side. The analyzer 2 and the storage adapter 3 are electrically connected via the electric cord 16. The effect similar to the above is acquired also by this form. In this embodiment, the leaf spring electrode 11 of the analyzer 2 is not necessary.

(Embodiment 2)
In the present embodiment, a further modification of the second aspect of the first aspect of the present invention will be described. FIG. 2 shows an analysis chip device according to the present embodiment. As shown in FIGS. 5 (a) and 5 (b), the present embodiment is the same as in the first embodiment except that the analyzer 22 is mounted with a chemical sensor chip storage adapter 23 in advance. It is the same. The detailed configuration of the chemical sensor chip 21, the chemical sensor chip storage adapter 23, and the analyzer 22 may be the same as in the first embodiment. Also with this configuration, the same effect as in the first embodiment can be obtained.

  In this embodiment, only the wiring connection portion 9 is a leaf spring, and the wiring connection portion 11 is not a leaf spring.

(Embodiment 3)
In the present embodiment, the first aspect of the first present invention will be described. FIG. 6 shows an analysis chip device according to the present embodiment. As shown in FIGS. 6B and 6C, the analysis chip device according to the present embodiment is provided with a shielding layer 38 on the chemical sensor chip 31, and this analysis chip device has an analysis means. Housed in the analyzer 32.

The present embodiment is the same as the first embodiment except for the following points.
(1) There is no chemical sensor chip storage adapter.
(2) The analyzer 32 is provided with a storage unit 35 for storing the chemical sensor chip 31 in place of the adapter connection unit connected to the chemical sensor chip storage adapter.
(3) A shielding layer 38 that covers both surfaces of the chemical sensor chip 31 is provided.
(4) The chemical sensor chip 31 is not provided with electrodes.

  As shown in FIG. 6A, both surfaces of the chemical sensor chip having the main substrate 37a and the lid substrate 37b are covered with a shielding layer 38. The flow path 320, the main substrate 37a, and the lid substrate 37b may be the same as those in the first embodiment. The shielding layer 38 that shields the surface of the chemical sensor chip 31 may be the same as the shielding layer of the chemical sensor chip storage adapter of the first embodiment. FIGS. 6 (b) and 6 (c) show how the analysis chip device having the shielding layer 38 provided on the surface of the chemical sensor chip 31 is attached to the analysis device 32. FIG.

  The connection form between the analysis chip device and the analysis device 32 may be the same as that in which the chemical sensor chip is housed in the chemical sensor chip housing adapter of the first embodiment.

  Here, in the present embodiment, no electrode is provided on the chemical sensor chip. In this embodiment, a case where optical detection is performed instead of electrochemical detection will be described. In this embodiment, a material (for example, an opaque material) that hinders optical detection cannot be used as the constituent material of the analysis chip device. That is, the shielding layer 38 should not be opaque. For this reason, for example, by using a transparent conductor as the shielding layer 38, electrical shielding can be performed without harming optical detection. A known material can be used as the transparent conductor, and for example, an inorganic transparent conductor such as indium tin oxide (ITO) or zinc oxide (ZnO) can be used. Further, a transparent conductor made of an organic material may be used.

(Embodiment 4)
In the present embodiment, a third aspect of the first present invention will be described. FIG. 7 shows an analysis chip device according to the present embodiment. In this embodiment, instead of providing a shielding layer on the surface of the chemical sensor chip 41, the above-described embodiment is provided except that a shielding layer is provided in the analyzer 42 and an electrode is provided in the chemical sensor chip. Same as 3.

  As shown in FIGS. 7A to 7D, the analysis chip device according to the present embodiment includes a chemical sensor chip 41 and an analysis device 42. The analysis device 42 is provided with a chip storage portion 43 that stores the chemical sensor chip 41 and a lid 44 that covers the chip storage portion 43.

  In FIG. 8A, an electrode (not shown) of a chemical sensor chip having a main substrate 47a and a lid substrate 47b and a circuit substrate 410 in the analyzer are in contact with each other by a connection wiring 45 and a leaf spring 411. It shows how it is. A stage 413 and a circuit board support 412 are provided in the analyzer 42. And in the analyzer 42, the shielding layer 48 which covers the chemical sensor chip accommodated in the analyzer is provided. Further, as shown in FIGS. 8B and 8C, the insulating connection terminal of the leaf spring 411 can have the same configuration as that of the first embodiment.

(Embodiment 5)
In the present embodiment, the first aspect of the second aspect of the present invention will be described. FIG. 9 shows an analysis chip device according to the present embodiment. FIG. 9A is a diagram showing the chemical sensor chip and the analyzer according to the present embodiment, and FIG. 9B is a diagram showing a state where the chemical sensor chip and the analyzer are connected, FIG. 9A is a diagram showing a chemical sensor chip and an analyzer according to the present embodiment, and FIG. 9C is a diagram showing a sensor of the chemical sensor chip according to the present embodiment. FIG. 9D is a diagram showing a modification of the sensor of the chemical sensor chip according to the present embodiment.

  As shown in FIG. 9A, the analysis chip device according to the present embodiment includes a chemical sensor chip 51 and an analysis device 52 provided with a chip storage portion 53 for storing the chemical sensor chip. As shown in FIGS. 9A and 9C, the chemical sensor chip 51 according to the present embodiment is the same as the first embodiment except that a guard ring-shaped electrode 57 is provided. .

  As shown in FIG. 9B, when the chemical sensor chip 51 includes noise (static electricity) 59, the noise 59 enters the analyzer 52 together with the chemical sensor chip 51, thereby reducing the accuracy of analysis.

  When the noise is static electricity, static electricity accumulated on the surface of the chemical sensor chip 51 continues to exist on the surface of the chemical sensor chip 51 unless the conductor is touched. When static electricity is accumulated on the surface to some extent, the charged region on the surface of the chemical sensor chip covers a wide range as indicated by reference numeral 98 in FIG. In the configuration according to the present embodiment, when static electricity accumulates and the charged region spreads, the static electricity on the surface of the chemical sensor chip contacts the guard ring electrode 57 and flows into the electrode 57 all at once. The electrostatic noise level can be detected by detecting the electric field of the electrode 57 and the electric field due to static electricity with a detection unit (not shown) provided in the analyzer.

  As shown in FIG. 9 (d), when the sensor portion is formed of electrode patterns 58 having different wiring lengths on the surface of the chemical sensor chip, the electrode patterns 58 function as antennas for electromagnetic waves. The electromagnetic wave that causes noise enters according to the length of each electrode wiring 56 used for detection and the wiring connected thereto. In this embodiment, the electrode pattern 58 having the same length as each electrode wiring and the wiring connected thereto is provided as a dummy pattern.

  Normally, when electrical detection is performed, the electrode 56 provided on the chemical sensor chip is composed of three electrodes: a working electrode, a counter electrode, and a reference electrode. When intrusion of electromagnetic waves is detected in the electrode pattern 58 having the same length as each of the three electrodes constituting the electrode 56, the same electromagnetic waves have also entered the electrode 56.

  Then, by detecting a change in the electric field generated by the electromagnetic wave with the electrode pattern 58, the level of the electromagnetic wave affecting the measurement can be confirmed.

  Thus, the measurement data can be corrected by detecting the noise level of static electricity or electromagnetic waves. In addition, it is possible to specify the source and cause of noise.

  A temperature sensor for detecting the temperature or temperature change of the chemical sensor chip may be provided. In addition, the analyzer connected to the chemical sensor chip may be provided with a function of detecting the temperature of the chemical sensor chip or a temperature change from the wiring connection portion with the chemical sensor chip. Specifically, a semiconductor temperature sensor is used as a temperature sensor, and a semiconductor temperature sensor is formed and mounted on a chemical sensor chip, or an analyzer that is connected to a chemical sensor chip without providing a semiconductor temperature sensor on the chemical sensor chip A configuration in which a semiconductor temperature sensor is mounted can be employed.

  As another form of the temperature sensor, a thermocouple can be provided on the chemical sensor chip or in a device side circuit connected to the chemical sensor chip. In addition, various forms such as providing a known temperature sensor in a chemical sensor chip or a device side circuit connected to the chemical sensor chip can be adopted.

  By utilizing the temperature sensor and grasping the temperature change of the chemical sensor chip, the measurement result can be corrected.

(Embodiment 6)
In the present embodiment, a second aspect of the second aspect of the present invention will be described. The present embodiment will be described with reference to the drawings. FIG. 10A is a cross-sectional view illustrating the analysis chip device according to the present embodiment, and FIG. 10B is a diagram illustrating a mechanism for removing electrostatic noise from the chemical sensor chip.

  As shown in FIG. 10A, the analysis chip device according to the present embodiment includes a chemical sensor chip 61 and an analysis device 62 that houses the chemical sensor chip. As shown in FIG. 10B, the chemical sensor chip 61 includes a main substrate 67a provided with a flow path 620 and a lid substrate 67b provided with an electrode 66. As shown in FIG. 10A, the analyzer 62 is provided with a leaf spring 611 and a circuit board 610 as in the first embodiment. In addition, a conductive plate 68 is provided in the analyzer 62, and a moving mechanism 69 that can move up and down is provided on the conductive plate 68. A stage 613 is provided in the analyzer 62.

  When the moving mechanism 69 is operated and the conductive plate 68 is pressed against the surface of the chemical sensor chip 61 (see FIG. 10B), static electricity (surface charge) existing on the surface of the chemical sensor chip 61 is promptly passed through the conductive plate 68. escape. In order to quickly release static electricity, the conductive plate 68 may be short-circuited to a reference potential (for example, GND) as shown in FIG. Moreover, it is good also as a moving mechanism which moves the chemical sensor chip side and contacts a conductive plate.

  Further, when removing thermal noise, a temperature control unit is provided instead of the conductive plate 608 and the moving mechanism 609. The temperature control means controls the temperature inside the analyzer 52 so that the temperature of the chemical sensor chip 51 is maintained at a predetermined temperature (for example, the temperature at which the enzyme activity is highest). A well-known thing can be used as a temperature control means.

(Embodiment 7)
In the present embodiment, a modification of the second aspect of the second aspect of the present invention will be described. FIG. 11 shows an electrostatic noise removal mechanism according to the present embodiment. In the present embodiment, instead of the conductive plate and the moving mechanism, the electrode 76 on the chemical sensor chip 71 is configured to include a switch 77 that temporarily drops the reference potential (for example, GND) before measurement. This is the same as in the sixth embodiment. By dropping the voltage to the reference potential once before the measurement, unnecessary charges that have moved on the electrodes are allowed to flow as a minute current, and static electricity that causes noise is removed.

  In the present embodiment, the analyzer (not shown) has a switch 77 connected to a grounded wiring. When the chemical sensor chip 71 is accommodated, the electrode 76 of the chemical sensor chip 71 is connected to the switch 77. When the switch 77 is switched to connect to GND, the electrode 76 of the chemical sensor chip 71 is short-circuited to GND, and static electricity is removed. When actual specimen detection or measurement is performed, the switch 77 is switched so as to be connected to a circuit board (not shown).

  The guard ring-shaped electrode 78 functions as a sensor for detecting static electricity on the chemical sensor chip 71, that is, a potential on the chemical sensor chip or a potential change, like the electrode 57 of the fifth embodiment. The electrode 78 is also short-circuited to the reference potential (GND) by the switch 77, so that static electricity in the vicinity of the guard ring can be removed.

(Embodiment 8)
In the present embodiment, a further modification of the second aspect of the second aspect of the present invention will be described. In the present embodiment, static electricity generated on the chemical sensor chip is removed using an ion generator (ionizer) mounted in the analyzer. The chemical sensor chip can have the same configuration as in the fourth embodiment.

  FIG. 12 shows an analysis chip device according to the present embodiment. As shown in FIG. 12, the analysis chip device according to the present embodiment includes a chemical sensor chip 81 and an analysis device 82 that houses the chemical sensor chip. In the analysis device 82, a stage 83 on which the chemical sensor chip 81 is mounted and an ion generator (ionizer) 84 are provided. When the chemical sensor chip 81 is arranged on the stage 83 in the analyzer 82, positively charged or negatively charged air ions are emitted from the ion generator 84 in a shower shape and irradiated onto the surface of the chemical sensor chip 81. . Air ions have a charge with a polarity different from that of the static electricity on the chip surface, and positive and negative charges cancel each other, thereby eliminating static electricity.

  As the ion generator 84, for example, a device in which discharge is generated at the tip portion by high voltage to ionize air can be used.

  The air ion irradiation is preferably performed to a certain extent because static electricity may remain if the amount of irradiation onto the chemical sensor chip is small. However, if the amount of irradiation is too large, there is a problem that the surface of the chemical sensor chip is charged with the opposite polarity, so that it is important to adjust or adjust the amount of irradiation. In this case, the chemical sensor chip surface potential or potential change must be measured. For this reason, it is preferable to provide a sensor as shown in the fifth embodiment. Note that ion irradiation is preferably performed until the surface potential reaches the reference potential.

(Embodiment 9)
In the present embodiment, a fourth aspect of the second aspect of the present invention will be described. FIG. 13 shows a flowchart of the analysis method according to the present embodiment. As an analysis chip device used in the present embodiment, a combination of Embodiment 5 and any of Embodiments 6 to 8 can be used.

  First, the chemical sensor chip is inserted into the analyzer.

  Thereafter, it is confirmed whether or not a sample to be analyzed is introduced into the chemical sensor chip. At this time, if a sample is introduced, the process proceeds to the next step. If a sample has not been introduced, an error message is displayed, or a message instructing sample introduction is displayed. If the sample needs to be introduced before the chemical sensor chip is inserted into the analyzer, an instruction is given to remove the chemical sensor chip from the analyzer.

  Thereafter, a process for measuring the noise level on the surface of the chemical sensor chip is performed. The sensor or method for measuring the noise level follows the method described in the fifth embodiment.

  Thereafter, the analyzer determines whether or not the measured noise level is sufficiently lower than the signal level to be measured. Reference data for determination is stored in advance in the measurement data calculation processing circuit (control unit) in the analyzer, and is compared with the signal level of the reference data.

  If the noise level is higher or lower than the signal level to be measured, the noise source on the surface of the chemical sensor chip is removed. As a noise reduction / removal method, the configuration shown in the sixth to eighth embodiments is used.

  If the noise level is low enough, start sample analysis. After the analysis is completed, the analysis result is displayed. The analysis data is stored in a data storage unit (DRAM, HDD, flash memory, etc.) of the analyzer.

  By adopting such an analysis method, it is possible to detect only the signal from the measurement object without the influence of noise, so that the analysis accuracy is improved.

(Comparative Example 1)
As shown in FIGS. 16A and 16B, the analysis chip device according to this comparative example includes a chemical sensor chip 91 that has not been shielded and an analysis device 92.

  As shown in FIG. 18, the chemical sensor chip includes a flow channel 1002, an electrode 1005 that is provided in the flow channel 1002 and includes a working electrode, a counter electrode, and a reference electrode, and an introduction unit 1003 that introduces a liquid into the flow channel 1002. And a discharge part 1004 for discharging the liquid from the flow path 1002.

  A resin molding method using a mold was used to form the groove for the flow path 1002 in the main substrate. The mold was manufactured by forming a resist pattern on a silicon substrate by a photolithography method and then performing an etching by a dry etching process method. The prepared mold form was placed, and silicon rubber (polydimethylsiloxane, Zilpot 184 manufactured by Toray Dow Corning Co., Ltd.) was poured until the thickness became 2 mm, and heated at 100 ° C. for 15 minutes to be cured. After curing, the mold and the cured silicon rubber were separated, and the silicon rubber was shaped into a length of 20 mm, a width of 10 mm, and a thickness of 2 mm to produce an upper substrate. The channel width was 50 μm and the channel height was 50 μm.

  The lid substrate was prepared by cutting a quartz substrate having a thickness of 600 μm into a 25 mm length and a 15 mm width using a dicing saw. The electrode 1005 is manufactured by patterning a resist by a photolithography method, forming a titanium layer (or chromium layer) of 50 nm and a gold layer of 100 nm by a sputtering method, and forming a titanium layer and a gold layer on the resist and the resist by a lift-off method. Then, an electrode patterned in a desired shape was formed.

  The main substrate and the lid substrate were bonded together to produce a chemical sensor chip according to Example 1.

  A Tris buffer was passed through the chemical sensor chip, and measurement was performed with the analyzer 92 using the cyclic voltamentary method. The results (Voltammogram) are shown in FIG.

  As shown in FIG. 17, in the cyclic voltamentary measurement result of the Tris buffer, it can be seen that the current value varies by about ± 50 nA. This variation is because the static electricity generated on the surface of the chemical sensor chip has moved to the wall surface of the flow path and has affected the electrochemical detection.

Example 1
The present embodiment describes the third aspect of the present invention. As shown in FIG. 1, the analysis chip device according to the present embodiment includes a chemical sensor chip 1, a chemical sensor chip storage adapter 3, and an analysis device 2. As shown in FIG. 14A, the chemical sensor chip 1 was the same as that of Comparative Example 1 except that a guard ring electrode 99 was provided.

  As the chemical sensor chip storage adapter 3, an acrylic resin casing provided with a shielding layer 8 made of an amorphous magnetic material was used.

  The analyzer 2 used was the structure shown in the seventh embodiment. These chemical sensor chip, chemical sensor chip storage adapter, and analyzer were connected as shown in FIG.

  A commercially available electromagnetic wave generator was placed beside the analyzer and used as a noise source.

  The analysis was performed according to the flow shown in the ninth embodiment. In noise measurement, electromagnetic wave noise from the electromagnetic wave generator was not detected, but static noise derived from insertion was detected. From this, it was found that noise acting on the chemical sensor chip from the outside can be reduced by providing the chemical sensor chip housing adapter with a shielding layer.

  Thereafter, noise was reduced by the method described in the seventh embodiment. The analysis result (voltammogram) is shown in FIG.

  As can be seen from the comparison between FIGS. 15 and 17, the measurement results according to Example 1 have smaller current variations than Comparative Example 1. This is because the external noise is greatly reduced by providing the shielding layer, and the noise at the time of inserting the chemical sensor chip is also reduced by performing the noise reduction process.

  In addition, even when implemented according to the second embodiment, the same result as in the first example was obtained.

  Further, when implemented in accordance with the third embodiment, since there is a shielding layer on the chemical sensor chip, static electricity hardly remains, and a noise level that seems to be derived from static electricity was not detected. In other words, it was found that this configuration can suppress the generation of static electricity itself.

  Further, when implemented according to the fourth embodiment, a noise level derived from static electricity was detected as in the first example. However, the same results as in Example 1 were obtained by performing noise reduction / removal in the same manner as in Example 1.

  As described above, according to the present invention, it has been found that noise can be reduced so that highly sensitive measurement such as a minute current can be performed, and detection and calibration of a small amount of sample in a sample can be facilitated.

  In the above embodiment, the chemical sensor chip provided with the fine flow path has been described as an example. However, the present invention is not limited to the chemical sensor chip provided with the fine flow path, and is a chemical substance in the outside world. It can be applied to all chemical sensor chips that convert and detect the amount and type of other signals such as electric signals, optical signals, heat and mass signals. As a chemical sensor, an ion sensor, a gas sensor, a biosensor, a microorganism sensor, an immunosensor, or the like can be used.

  As described above, according to the first aspect of the present invention, by providing the chemical sensor chip with a shielding layer that shields noise acting from the outside, a highly accurate analysis can be performed. In addition, according to the second aspect of the present invention, the chemical sensor chip is provided with a sensor for detecting an electrical noise level, thereby facilitating data correction, and by providing a means for removing noise, a highly accurate analysis. It can be performed. Further, according to the third aspect of the present invention, both the effects of the first aspect of the present invention and the effects of the second aspect of the present invention can be obtained. Therefore, the industrial significance is great.

1, 21, 31, 41, 51, 61, 71, 81: Chemical sensor chip 2, 22, 32, 42, 52, 62, 82: Analyzing device 3, 23: Chemical sensor chip storage adapter 4: Chip storage section ( adapter)
5: Adapter connection part 6, 45, 66, 96: Wiring or electrode 7a, 37a, 47a, 67a, 97a: Main board 7b, 37b, 47b, 67b, 97b: Cover board 8, 38, 48, 68: Shielding layer (Shielding layer)
9: leaf spring electrodes 10, 410, 610: circuit board (analysis means)
11, 611: Leaf spring electrode 12: Adapter connection part 13: Circuit area 14: Insulation resistance terminal 15: Connector 16: Cord 20, 320, 910, 1002: Flow path 35, 43, 53: Chip storage part (analyzer)
44: Lid 412: Circuit board support 413, 613, 83: Stages 56, 76, 913, 1005: Detection electrodes 57, 78, 99: Guard ring electrode 58: Antenna electrode 59: Noise 68: Conductive plate 69 : Moving mechanism 77: Switch 83: Stage 84: Ion generator 911, 1003: Inlet 912, 1004: Discharge

Claims (57)

A chemical sensor chip,
A shielding part for reducing noise acting on the chemical sensor chip from the outside;
An analysis chip device comprising: The analysis chip device according to claim 1,
The shielding part is composed of a shielding layer covering the surface of the chemical sensor chip.
An analysis chip device characterized by that. The analysis chip device according to claim 2,
The shielding layer has electrical shielding means,
An analysis chip device characterized by that. The analysis chip device according to claim 2,
The shielding layer has magnetic shielding means,
An analysis chip device characterized by that. The analysis chip device according to claim 2,
The shielding layer has electromagnetic shielding means,
An analysis chip device characterized by that. The analysis chip device according to claim 2,
The shielding layer has light shielding means,
An analysis chip device characterized by that. The analysis chip device according to claim 2,
The shielding layer has heat insulating means,
An analysis chip device characterized by that. The analysis chip device according to claim 1,
The analysis chip device includes:
A chemical sensor chip storage adapter for storing the chemical sensor chip;
The shielding part is provided on the chemical sensor chip storage adapter,
An analysis chip device characterized by that. A chip storage section in which the chemical sensor chip is stored;
A shielding part for reducing noise acting on the chemical sensor chip from the outside;
A chemical sensor chip storage adapter comprising: The chemical sensor chip storage adapter according to claim 9,
The shielding part is composed of a shielding layer covering the chip storage part.
A chemical sensor chip storage adapter. In the chemical sensor chip storage adapter according to claim 10,
The shielding layer has electrical shielding means,
A chemical sensor chip storage adapter. In the chemical sensor chip storage adapter according to claim 10,
The shielding layer has magnetic shielding means,
A chemical sensor chip storage adapter. In the chemical sensor chip storage adapter according to claim 10,
The shielding layer has electromagnetic shielding means,
A chemical sensor chip storage adapter. In the chemical sensor chip storage adapter according to claim 10,
The shielding layer has light shielding means,
A chemical sensor chip storage adapter. In the chemical sensor chip storage adapter according to claim 10,
The shielding layer has heat insulating means,
A chemical sensor chip storage adapter. The chemical sensor chip storage adapter according to claim 10,
A chemical sensor chip,
An analyzer having an analysis means connected to the chemical sensor chip storage adapter;
An analysis chip device comprising: The analysis chip device according to claim 10, wherein
The chemical sensor chip storage adapter and the analyzer are integrated.
An analysis chip device characterized by that. The analysis chip device according to claim 1,
The analysis chip device includes:
Having an analysis means, comprising an analysis device for storing the chemical sensor chip,
The shielding unit is provided in the analyzer.
An analysis chip device characterized by that. A chip storage section in which the chemical sensor chip is stored;
A shielding part for reducing noise acting on the chemical sensor chip from the outside;
Analytical means;
An analysis apparatus comprising: The analyzer according to claim 19,
The shielding part is composed of a shielding layer covering the chip storage part.
An analyzer characterized by that. The analyzer according to claim 20,
The shielding layer has electrical shielding means,
An analyzer characterized by that. The analyzer according to claim 20,
The shielding layer has magnetic shielding means,
An analyzer characterized by that. The analyzer according to claim 20,
The shielding layer has electromagnetic shielding means,
An analyzer characterized by that. The analyzer according to claim 20,
The shielding layer has light shielding means,
An analyzer characterized by that. The analyzer according to claim 20,
The shielding layer has heat insulating means,
An analyzer characterized by that. The analysis chip device according to claim 18,
The chemical sensor chip has a detection electrode and a terminal connected to the detection electrode,
The chip storage portion is provided with a wiring connection portion for connecting to the terminal,
The wiring connection portion is provided with a connection terminal having an insulation resistance of 1 × 10 ¹⁴ Ω · cm or more.
An analysis chip device characterized by that. The analyzer according to claim 19,
The chip housing portion is provided with a wiring connection portion for connecting with a terminal of the chemical sensor chip,
The wiring connection portion is provided with a connection terminal having an insulation resistance of 1 × 10 ¹⁴ Ω · cm or more.
An analyzer characterized by that. The analysis chip device according to claim 26,
The connection terminal is made of ceramic, polyethylene, or polytetrafluoroethylene,
An analysis chip device characterized by that. The analyzer according to claim 27,
The connection terminal is made of ceramic, polyethylene, or polytetrafluoroethylene,
An analyzer characterized by that. The analysis chip device according to claim 1, 2, 3, 4, 5, 6, 7, 8, 16, 17, 18, 26 or 28.
The chemical sensor chip is provided with a fine flow path,
An analysis chip device comprising: A chemical sensor chip,
A sensor for detecting a noise level present on the chemical sensor chip;
An analysis chip device comprising: The analysis chip device according to claim 31,
The sensor detects the electrical noise and / or electromagnetic noise;
An analysis chip device characterized by that. The analysis chip device according to claim 32,
The sensor is
A noise detection electrode provided on the chemical sensor chip;
A detection unit for detecting a noise level of the noise detection electrode;
An analysis chip device comprising: The analysis chip device according to claim 33,
The detection unit detects a potential of the noise detection electrode or a potential change;
An analysis chip device characterized by that. The analysis chip device according to claim 33,
The noise detection electrode is a guard ring electrode.
An analysis chip device characterized by that. The analysis chip device according to claim 33,
The chemical sensor chip further includes a detection electrode,
The noise detection electrode is an electrode having a length equal to the detection electrode.
An analysis chip device characterized by that. The analysis chip device according to claim 31,
The sensor detects the temperature or temperature change of the chemical sensor chip.
An analysis chip device characterized by that. The analysis chip device according to claim 37,
The chemical sensor chip has an electrode for detection and a wiring connection part connected to the electrode,
The sensor detects a temperature of the wiring connection part or a temperature change;
An analysis chip device characterized by that. A chemical sensor chip,
Noise removing means for removing noise of the chemical sensor chip;
An analysis chip device comprising: The analysis chip device according to claim 39,
The noise is static electricity accumulated in the chemical sensor chip.
An analysis chip device characterized by that. The analysis chip device according to claim 40,
The noise removing means is
A conductive plate;
A moving mechanism movable so as to contact the chemical sensor chip surface and the conductive plate;
An analysis chip device comprising: The analysis chip device according to claim 40,
The noise removing unit includes a mechanism for connecting the chemical sensor chip to a reference potential.
An analysis chip device characterized by that. The analysis chip device according to claim 40,
The noise removing unit includes an ion generator that irradiates air ions on the surface of the chemical sensor chip.
An analysis chip device characterized by that. The analysis chip device according to claim 39,
The noise is the temperature of the chemical sensor chip;
An analysis chip device characterized by that. The analysis chip device according to claim 44,
The noise removing means is a temperature control means.
An analysis chip device characterized by that. The analysis chip device according to any one of claims 39 to 45,
The analysis chip device further includes a chemical sensor chip storage adapter that stores the chemical sensor chip,
The noise removing means is provided in the chemical sensor chip storage adapter,
An analysis chip device characterized by that. The analysis chip device according to claim 46,
The analysis chip device further includes an analysis device provided with analysis means and connected to the chemical sensor chip storage adapter.
An analysis chip device characterized by that. The analysis chip device according to any one of claims 39 to 45,
The analysis chip device further includes an analysis device that houses the chemical sensor chip and is provided with analysis means,
The noise removing means is provided in the analyzer;
An analysis chip device characterized by that. The analysis chip device according to claim 39,
The analysis chip device further includes a sensor that detects a noise level of the chemical sensor chip.
An analysis chip device characterized by that. The analysis chip device according to claim 49,
The sensor is
A noise detection electrode provided on the chemical sensor chip;
A detection unit for detecting a noise level of the noise detection electrode,
An analysis chip device characterized by that. The analysis chip device according to claim 50,
The detection unit detects a potential of the noise detection electrode or a potential change;
An analysis chip device characterized by that. The analysis chip device according to claim 49,
The sensor detects the temperature or temperature change of the chemical sensor chip.
An analysis chip device characterized by that. The analysis chip device according to claim 52,
The chemical sensor chip has an electrode for detection, and a wiring connection portion connected to the electrode,
The sensor detects a temperature of the wiring connection part or a temperature change;
An analysis chip device characterized by that. The analysis chip device according to claim 49,
The sensor is
A wiring connection portion provided in the chemical sensor chip;
A detection unit for detecting a temperature or a temperature change of the chemical sensor chip of the wiring connection unit,
An analysis chip device characterized by that. The analysis chip device according to claim 49,
The analysis chip device further includes a control unit that operates the noise removing unit when the noise level detected by the sensor is equal to or higher than a reference value.
An analysis chip device characterized by that. The analysis chip device according to any one of claims 31 to 55,
The chemical sensor chip is provided with a fine flow path,
An analysis chip device comprising: An analysis method using the analysis chip device according to claim 49,
Detecting the noise level of the chemical sensor chip with the sensor;
Determining the noise level;
If the noise level is greater than or equal to a reference value, removing noise using the noise removing means;
Performing the analysis,
An analysis method characterized by comprising:

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