JP2011160632A - Canned linear motor armature, and canned linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a canned linear motor armature, capable of improving efficiency of cooling the entire armature, by eliminating unevenness in temperature increase at a longitudinal position of the surface of a can, while cooling heat generated in an armature coil by using a coolant in the can by devising the shape of a coolant flow path inside the can, and to provide a canned linear motor. <P>SOLUTION: The canned linear motor armature includes a plurality of protrusions 114 in right and left or up and down directions of a sidewall of the coolant flow path 102a inside the can 102. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a canned linear motor armature and a canned linear motor that are used for table feed of a semiconductor manufacturing apparatus or a machine tool and are required to reduce temperature rise.

Conventionally, it is used for table feed of semiconductor manufacturing equipment and machine tools, and as a canned linear motor that is required to reduce temperature rise, it has a structure that absorbs the heat generated from the coil by flowing refrigerant through the internal space of the armature. Things have been proposed.
FIG. 8 is a front sectional view of a conventional canned linear motor.
In the figure, 1 is an armature coil, 2 is a field yoke, 3, 3 'is a permanent magnet, 4' is a can arranged with the coil 1 in between, 5 is two cans 4, 4 ' A frame for supporting each other, 8 an inner jacket composed of the cans 4, 4 ′ and the frame 5, 6 an inner space of the inner jacket 8, 7 a coil fixing tool for fixing the coil 1 to the frame 5, 9, 9 ′ is an outer jacket formed outside the double cans 4 and 4 ′, and 10 is an inner space of the outer jackets 9 and 9 ′. In this way, the canned linear motor having the double jacket structure allows two types of refrigerants to flow through the inner jacket 8 and the outer jackets 9 and 9 'to flow, and in particular, the inner jacket 8 that covers the coil 1. By flowing an inert refrigerant in the internal space 6 so as not to cause dielectric breakdown on the surface of the coil 1, the heat generated by the coil 1 is absorbed and the temperature rise on the can surface is reduced (for example, Patent Document 1). reference).

JP2001-25227 (5th page, FIG. 1)

However, the canned linear motor described in Patent Document 1 takes measures to improve the cooling efficiency by adopting a double jacket structure for cooling the coil, but the inert refrigerant flowing through the inner jacket has a specific heat higher than that of water. The heat recovery rate is small and the cooling efficiency is poor.
Further, the refrigerant passage cross-sectional area of the inner jacket has a uniform cross-sectional area along the longitudinal direction of the armature (traveling direction of the linear motor), so that the refrigerant flows uniformly, but the heat generation density in the inner jacket is high. In the part facing the armature coil, a part of the refrigerant flowing through the inner jacket is heated, and the heated part in the fluid rises in density due to expansion as the temperature rises. In some cases, heat transfer (thermal convection phenomenon) may occur due to repeated flow of the fluid. In other words, if there is a uniform refrigerant flow, the heat convection of the refrigerant is small, and the heat generated at the part facing the armature coil cannot be completely removed, and as a result, the temperature rise of the refrigerant is concentrated locally. In addition, there is a non-uniformity in that there are locations where the temperature rise is large and small at the longitudinal position of the can surface, and there is a problem that the cooling efficiency of the entire armature is further reduced. Such a problem also applies to a linear motor having a cooling jacket structure in which the refrigerant passage between the can and the winding holder flows through the refrigerant and removes the heat generated by the coil (for example, Japanese Patent Application Laid-Open No. 2004-312877).
The present invention has been made in view of such problems, and by devising the shape of the refrigerant flow path inside the can, the heat generated in the armature coil is cooled by the refrigerant inside the can, and the can surface An object of the present invention is to provide a canned linear motor armature and a canned linear motor capable of eliminating the uneven temperature rise at the longitudinal position of the armature and improving the cooling efficiency of the entire armature.

In order to solve the above problems, the present invention is configured as follows.
The invention according to claim 1 is an armature coil fixed along the longitudinal direction of the stator;
A can disposed on the surface of the armature coil, a refrigerant flow path formed in a sealed space formed inside the can, and either one end side or the other end side of both ends of the can In the canned linear motor armature provided with the provided refrigerant supply port and refrigerant discharge port, a plurality of protrusions are provided along the flow direction in the side wall of the refrigerant flow path.
According to a second aspect of the present invention, in the canned linear motor according to the first aspect, the position of the protrusion is different on the side wall in the left-right direction or the up-down direction of the refrigerant flow path.
According to a third aspect of the present invention, in the canned linear motor according to the first or second aspect, the shape of the protrusion is different depending on a side wall in the left-right direction or the vertical direction of the refrigerant flow path. .
According to a fourth aspect of the present invention, in the canned linear motor according to any one of the first to third aspects, a support column penetrating in the vertical direction of the can is provided, and the support column is in a flow direction of the refrigerant. It is characterized by being arranged in a staggered pattern at positions along the line.
According to a fifth aspect of the present invention, the canned linear motor armature according to any one of the first to fourth aspects is disposed opposite to the armature via a magnetic air gap and is alternately polarized. A plurality of permanent magnets arranged side by side next to each other, the armature and the field as relative to the armature and the field as a stator and the other as a mover. It features a canned linear motor that is designed to run on the road.

According to the first aspect of the present invention, the heat generated by the armature coil is cooled by the refrigerant inside the can, and the refrigerant flow is disturbed by the protrusion of the refrigerant flow passage inside the can, thereby dispersing the temperature rise of the refrigerant. In addition, a canned linear motor armature capable of improving the cooling efficiency and reducing the temperature rise can be provided.
According to the second aspect of the present invention, the refrigerant flow is disturbed by the protrusion of the refrigerant flow path inside the can, and the refrigerant between one and the other of the flows on the left and right and upper and lower side walls due to the difference in position of the protrusion. It is possible to provide a canned linear motor armature capable of dispersing the flow and dispersing the temperature rise of the refrigerant, improving the cooling efficiency, and reducing the temperature rise.
According to the invention of claim 3, the refrigerant flow is disturbed by the protrusion of the refrigerant flow path inside the can, and further, the refrigerant of one and the other of the flows on the left and right and upper and lower side walls due to the difference in the shape of the protrusion. It is possible to provide a canned linear motor armature capable of dispersing the flow and dispersing the temperature rise of the refrigerant, improving the cooling efficiency, and reducing the temperature rise.
According to the invention of claim 4, the canned linear motor armature that can disturb the refrigerant flow by the support column, disperse the temperature rise of the refrigerant, improve the cooling efficiency, and reduce the temperature rise. Can be provided.
According to the invention described in claim 5, the armature of the canned linear motor and the field having the permanent magnet are opposed to each other, and either the armature or the field is used as a stator and the other is used as a mover. Since it comprises, the canned linear motor which has the effect of Claims 1-4 can be provided.

1 is an overall view of a canned linear motor showing a first embodiment of the present invention. Sectional drawing of the thrust direction of a canned linear motor along the AA line of FIG. Partial sectional view in the gap direction of the stator of the canned linear motor along the line BB in FIG. It is a schematic diagram of a flow analysis model of a can internal refrigerant flow path to be subjected to thermal analysis of a canned linear motor, and a temperature rise distribution on a can surface facing the flow path, (a) is a flow path without protrusions, (b ) Shows a channel with protrusions The temperature rise of the can surface with respect to the distance from the refrigerant | coolant supply port of the can internal refrigerant flow path in a canned linear motor is shown, (a) is a can internal refrigerant flow path with the protrusion used as the thermal analysis object of a can linear motor. (B) is a graph of the temperature rise distribution on the can surface at the protrusion tip position of the can internal refrigerant flow path, (c) is the center position of the can internal refrigerant flow path (center position in the width direction of the stator) ) Shows a graph of temperature rise distribution on the can surface The fragmentary sectional view of the gap direction of the stator of the canned linear motor which shows the 2nd Embodiment of this invention Partial sectional view of the stator of the canned linear motor showing the third embodiment of the present invention in the non-thrust direction Front sectional view of a conventional canned linear motor

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is an overall view of a canned linear motor showing a first embodiment of the present invention.
In FIG. 1, a stator 100 includes a metal casing 101 that is shaped like a frame with a hollow inside, and a plate that represents the outer shape of the casing 101 so as to cover the hollow portion of the casing 101. A resin can 102 formed into a shape, a can fixing bolt 103 for fixing the can 102 to the housing 101, and a through hole for the can fixing bolt 103 to hold the can with an equal load. A holding plate 104, a terminal block 105 attached to the housing 101 for supplying power to the armature coil 108, a refrigerant supply port 106 for supplying a refrigerant to the internal refrigerant flow path of the can 102, and the interior of the can 102 A refrigerant outlet 107 for discharging the refrigerant from the refrigerant flow path, a three-phase armature coil 108 disposed in the hollow of the casing 101, a mold resin 109 in which the armature coil 108 is molded, a module A coil fixing bolt 111 for fixing the resin resin 109 in close contact with the can 102 and the armature coil 108 and a substrate configured to electrically connect the armature coil 108 and the terminal block 105. 112. Here, the material of the can 102 is specifically a carbon fiber reinforced plastic (CFRP). For example, an epoxy resin that is a thermosetting resin or polyphenylene sulfide (PPS) that is a thermoplastic resin may be used. good. In addition, a can made of stainless steel may be used for a canned linear motor for low-speed feed speed or small stroke use.
On the other hand, the mover 120 is provided through a gap so as to surround the outer periphery of the stator 100 and has a configuration in which a permanent magnet 123 is disposed so as to face the armature coil 108 of the stator 100. Not supported by a linear guide or the like.

FIG. 2 is a cross-sectional view in the thrust direction of the canned linear motor along the line AA in FIG.
In FIG. 2, the shape of the hollow portion of the casing 101 is depicted so as to surround the outer periphery of the armature coil 108. The can 102 is provided with a can internal refrigerant flow path 102a through which the refrigerant 113 is supplied from the refrigerant supply port 106 and discharged from the refrigerant discharge port 107, and the coil fixing bolt 111 passes through the can 102. A spacer 102b is provided around the location, and an O-ring 102c is provided between the can internal channel 102a and the spacer 102b in order to prevent the refrigerant from leaking from the can internal channel 102a. The can 102 is arranged on the front and back of the casing 101 so as to cover the casing 101, and a pressing plate 104 is laid from the top of the can 102 along the edge of the casing 101, and tightened with a can fixing bolt 103. The can 102 and the housing 101 are fixed. The mold resin 109 in which the armature coil 108 is molded is arranged on both surfaces of the substrate 112 formed in a plate shape, and the mold resin 109 in which the armature coil 108 is molded is placed above and below the coil fixing nut 110 and the can 102. It is fixed in close contact with the can 102 with a coil fixing bolt 111 that penetrates. The refrigerant 113 uses pure water or water. Since pure water and water have larger specific heat and higher heat absorption efficiency than an inert refrigerant, cooling efficiency can be improved and temperature rise on the can surface can be reduced.
On the other hand, the mover 120 supports the permanent magnet 123 disposed through the armature coil 108 and the magnetic gap, the field yoke 122 made of a magnetic material for passing the magnetic flux generated by the permanent magnet 123, and the like. A plurality of permanent magnets 123 are arranged along the thrust direction 124 of the mover (perpendicular to the paper surface) so as to have different polarities at every pole pitch.
As shown in FIG. 1, the canned linear motor configured as described above has a magnetic field generated by the permanent magnet 123 when a predetermined current corresponding to the electrical relative position of the mover 120 and the stator 100 is passed through the armature coil 108. As a result, thrust is generated in the mover 120, and the mover 100 moves in the thrust direction 124 indicated by the arrow. Further, when an electric current is passed through the armature coil 108, a copper loss occurs, and the armature coil 108 that generates heat due to the generated copper loss is cooled by the refrigerant 113 flowing through the can internal refrigerant flow path 102a, and the can 102 The temperature rise on the surface of the surface is reduced.

FIG. 3 is a partial cross-sectional view in the gap direction of the stator of the canned linear motor along the line B-B in FIG. 2.
In the figure, the can 102 is provided with a can internal refrigerant flow path 102a through which the refrigerant 113 is supplied from the refrigerant supply port 106 and flows in the refrigerant discharge port direction 107a. And an O-ring 102c is provided to prevent the refrigerant from leaking from the can internal refrigerant flow path 102a. The can internal refrigerant flow path 102a is provided with protrusions 114 protruding inward from left and right side walls along a plurality of flow directions on the left and right side walls of the can internal refrigerant flow path 102a. The mold resin 109 in which the armature coil 108 is molded is fixed to the can 102 by coil fixing bolts 111 that penetrate the upper and lower sides of the can 102.
The present invention is different from the prior art in that the left and right side walls of the can internal refrigerant flow path 102a have protrusions 114 projecting inward from the side walls along a plurality of flow directions, that is, the coils of adjacent armature coils 108. This is a portion in which the outer wall of the can internal refrigerant flow path 102 protrudes inward so as to follow the shape of the curvature portion.
The canned linear motor configured as described above has the protrusion 114 so that the refrigerant flow 113a near the left and right side walls of the flow path flows along the protrusion, and the flow direction and the flow velocity change. The refrigerant flow in the can internal refrigerant flow path 102a is disturbed. By disturbing the refrigerant flow in the can internal refrigerant flow path 102a, the temperature rise of the refrigerant is dispersed, and the temperature rise at the center of the stator where the temperature rise on the can surface is large together with the refrigerant. Since the temperature rise at the center of the stator where the temperature rise on the can surface is large is small, it is possible to provide a can linear motor that can reduce the temperature rise by improving the cooling efficiency when compared at the same refrigerant flow rate. .

4 and 5, the effect of the first embodiment will be described from the thermal analysis results.
FIG. 4 is a schematic diagram of a flow analysis model of a can internal refrigerant flow path to be subjected to a thermal analysis of a can linear motor, and a temperature rise distribution on the can surface facing the flow path. , (B) shows a channel with a protrusion.
The flow path shape that is the thermal analysis model shown in FIG. 4 is modeled by using a half region in the width direction of the stator 100 as a flow path, and the refrigerant flows from the refrigerant supply port side 106a to the refrigerant outlet side 107a. Yes. The temperature rise distribution on the can surface is shown as an isotherm in which the same temperature rise value is connected by a line in the region where the temperature around the refrigerant supply port 106a is 0 [K]. The temperature increase value on the isotherm indicates a temperature increase value at a certain interval, and a large number of isotherms indicates a large temperature increase gradient.
Since the refrigerant 113 absorbs the heat of the armature coil 208 that has generated heat, the temperature rise of the refrigerant 113 gradually increases. As the temperature rise of the refrigerant 113 gradually increases, it can be confirmed that the temperature rise on the can surface gradually increases along the direction of the refrigerant discharge port 107 in a region where the vicinity of the refrigerant supply port 106 is small.
Since the flow path 114b with protrusions has less isotherm from the stator side surface 100a to the stator center 100b than the flow path 114a without protrusions, the temperature difference between the vicinity of the stator side surface 100a and the vicinity of the stator center 100b is greater. It can be confirmed that the temperature rise on the can surface is small and dispersed.

FIG. 5 shows the temperature rise of the can surface with respect to the distance from the refrigerant supply port of the can internal refrigerant flow path in the canned linear motor. FIG. (B) is a graph of the temperature rise distribution on the can surface at the protrusion tip position (100c) of the can internal refrigerant flow path, and (c) is the center position of the can internal refrigerant flow path (100c). 3 shows a graph of the temperature rise distribution on the can surface at the center position 100b) in the width direction of the stator. In addition, the graph of the temperature rise comparison of the can surface at the projection tip and the stator tip in the channel 114b with projections is respectively compared with the temperature rise of the channel 114a without projections. T [K] in the graph indicates the same temperature rise value.
It can be said from the graph (b) that the maximum value of the temperature rise on the can surface of the protrusion tip 100c is about T [K] for both the protrusionless flow path 114a and the protrusion-provided flow path 114b. Moreover, it can be said by comparing the graphs (b) and (c) that the maximum value of the temperature rise on the can surface of the protrusion tip 100c is smaller than the maximum value of the temperature increase on the can surface of the stator center 100b. Can be confirmed. Then, the temperature rise on the can surface at the position of the protrusion tip 100c is larger in the flow path 114b with the protrusion than the flow path 114a without the protrusion, and the temperature increase on the can surface at the position of the stator center 100b is caused by the flow path with the protrusion. It can be confirmed that 114b is smaller than the non-projection flow path 114a.
In the temperature rise of the can surface of the channel 114b with protrusions, the temperature difference between the protrusion tip 100c and the stator center 100b is smaller than the temperature difference in the case of the channel 114a without protrusions, and the temperature increase of the refrigerant is dispersed. The temperature rise at the stator center 100b where the temperature rise on the can surface is large together with the refrigerant is small. That is, the canned linear motor of the first embodiment has a small temperature rise at the center of the stator where the temperature rise on the can surface is large. Therefore, it is possible to provide a canned linear motor capable of improving the cooling efficiency when compared with the same refrigerant flow rate and reducing the temperature rise.

FIG. 6 is a partial sectional view in the gap direction of the stator of the canned linear motor showing the second embodiment of the present invention.
In the figure, the can 202 is provided with a can internal refrigerant flow path 202a through which the refrigerant 213 is supplied from the refrigerant supply port side 206 and flows to the refrigerant discharge port 207, and a spacer 202b is provided at a location where the coil fixing bolt 211 passes. And an O-ring 202c is provided to prevent the refrigerant from leaking from the can internal refrigerant flow path 202a. The can internal refrigerant flow path 202a is provided with protrusions 214 protruding inward from the side walls along a plurality of flow directions on the left and right side walls of the can internal refrigerant flow path 202a. The positions and shapes of the protrusions 214 are different on the left and right side walls of the can internal refrigerant flow path 202a. The shape of the protrusion 214 is different along the flow direction. In order of increasing protrusion amount, 214a is protrusion a, 214b is protrusion b, 214c is protrusion c, and 214d is protrusion d. The closer it is, the larger the amount of protrusion. The mold resin 209 formed by molding the armature coil 208 is fixed to the can 202 with coil fixing bolts 211 that penetrate the top and bottom of the can 202. The spacers 202b, the O-rings 202c, and the coil fixing bolts 211 are provided in a staggered manner at positions along the flow direction.
The present invention is different from the prior art in that the left and right side walls of the can internal refrigerant flow path 202a are provided with projections 214 projecting inward from the side walls along a plurality of flow directions. A portion where the left and right side walls of the internal coolant channel 202a are different, a portion where the shape of the protrusion 214 is different along the flow direction, the spacer 202b, the O-ring 202c, and the coil fixing bolt 211 are aligned along the flow direction. It is a portion provided in a staggered pattern at the position.
In the canned linear motor configured as described above, the positions and shapes of the protrusions 214 are different between the left and right side walls of the can internal refrigerant flow path 202a, so that the flow 213a on the left and right side walls of the can internal refrigerant flow path 202a is changed. The flow direction and flow velocity between one and the other change, and the refrigerant flow in the can internal refrigerant flow path 102a is disturbed. In addition, the can linear motor configured as described above has a shape in which the protrusion 214 is different along the flow direction, so that the can internal coolant flow gradually near the refrigerant outlet 207 where the temperature rise on the can surface is large. The refrigerant flow in the path 202a is disturbed. In addition, the canned linear motor configured as described above has the spacer 202b, the O-ring 202c, and the coil fixing bolt 211 provided in a staggered manner along the flow direction, so that the refrigerant flow in the can internal refrigerant flow path 202a. 213b flows along the O-ring, the flow direction and flow velocity change, and the refrigerant flow in the can internal refrigerant flow path 202a is disturbed.
In the canned linear motor configured as described above, the refrigerant flow in the can internal refrigerant flow path 202a is disturbed, so that the temperature rise of the refrigerant is dispersed and the temperature rise at the stator center where the temperature rise on the can surface is large together with the refrigerant. Becomes smaller. Since the temperature rise at the center of the stator where the temperature rise on the can surface is large is small, it is possible to provide a can linear motor that can reduce the temperature rise by improving the cooling efficiency when compared at the same refrigerant flow rate. .

FIG. 7 is a partial sectional view in the non-thrust direction of the stator of the canned linear motor showing the third embodiment of the present invention.
In the figure, the can 302 is provided with a can internal refrigerant flow path 302a in which the refrigerant 313 is supplied from the refrigerant supply port side 306 and flows to the refrigerant discharge port side 307. The can internal refrigerant flow path 302a is provided with protrusions 314 protruding inward from the side walls along a plurality of flow directions on the upper and lower side walls of the gap surface and the armature coil surface of the can internal refrigerant flow path 302a. The armature coil 308 is fixed in close contact with the can 302 by a mold resin 309.
The present invention is different from the prior art in that the upper and lower side walls of the can internal refrigerant flow path 302a are provided with protrusions 314 protruding inward from the side walls along a plurality of flow directions.
Since the canned linear motor configured as described above has the protrusion 314, the refrigerant flow 313a near the upper and lower side walls of the can internal refrigerant flow path 302a flows along the protrusion, and the flow direction and flow velocity are As a result, the refrigerant flow in the can internal refrigerant flow path 302a is disturbed. By disturbing the refrigerant flow in the can internal refrigerant flow path 302a, the temperature rise of the refrigerant is dispersed, and the temperature rise at the center of the stator where the temperature rise on the can surface is large together with the refrigerant. Since the temperature rise at the center of the stator where the temperature rise on the can surface is large is small, it is possible to provide a can linear motor that can reduce the temperature rise by improving the cooling efficiency when compared at the same refrigerant flow rate. .

DESCRIPTION OF SYMBOLS 1 Coil 2 Yoke 3, 3 'Permanent magnet 4, 4' Can 5 Frame 6 Inner jacket inner space 7 Coil fixing tool 8 Inner jacket 9, 9 'Outer jacket 10 Outer jacket inner space 50, 70, 100 Stator 51 71, 101 Housing 52, 72, 102, 202, 302 Can 53, 73, 103 Can fixing bolts 54, 74, 104 Holding plate 55, 105 Terminal block 56, 106 Refrigerant supply port 57, 107, 207 Refrigerant exhaust Outlet 58, 78, 108, 208, 308 Armature coil 59, 79 Coil fixing frame 60, 80 Refrigerant flow path 61, 120 Movable element 62, 121 Field yoke support member 63, 122 Field yoke 64, 123 Permanent magnet 75 Bolt screw 76 Coil fixing frame support member 77 Sealing material 81, 102c, 202c O-ring 100a fixing Side surface 100b Stator center 100c Protrusion tip 102a, 202a, 302a Can internal refrigerant flow path 102b, 202b Spacer 106a, 206, 306 Refrigerant supply port side 107a, 307 Refrigerant discharge port side 109, 209, 309 Mold resin 110 Coil fixing nut 111, 211 Coil fixing bolt 112 Substrate 113, 213, 313 Refrigerant 113a, 213a, 213b, 313a Refrigerant flow 114, 214, 314 Protrusion 114a Protrusionless flow path 114b Protrusion flow path 124 Thrust direction 214a Protrusion a
214b Protrusion b
214c Protrusion c
214d Protrusion d

Claims (5)

An armature coil fixed along the longitudinal direction of the stator;
A can disposed on a surface of the armature coil;
A refrigerant flow path formed in a sealed space configured inside the can;
In the canned linear motor armature provided with the refrigerant supply port and the refrigerant discharge port provided on either one end side or the other end side of both ends of the can,
A canned linear motor armature, wherein a plurality of protrusions are provided along a flow direction on a side wall of the refrigerant flow path.   2. The canned linear motor armature according to claim 1, wherein the position of the protrusion is different on a side wall in a left-right direction or a vertical direction of the refrigerant flow path.   3. The canned linear motor armature according to claim 1, wherein the shape of the protrusion is different in a lateral direction or a vertical side wall of the refrigerant flow path.   The support column penetrating in the vertical direction of the can is provided, and the support column is arranged in a staggered manner at a position along the flow direction of the refrigerant. Cand linear motor armature.   The canned linear motor armature according to any one of claims 1 to 4, and a plurality of permanent magnets that are arranged opposite to each other via a magnetic air gap and are alternately arranged next to each other. The armature and the field are relatively driven by using either one of the armature or the field as a stator and the other as a mover. Canned linear motor.

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