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JP2011056919A - Liquid delivering head and image forming apparatus - Google Patents

Liquid delivering head and image forming apparatus Download PDF

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JP2011056919A
JP2011056919A JP2009212522A JP2009212522A JP2011056919A JP 2011056919 A JP2011056919 A JP 2011056919A JP 2009212522 A JP2009212522 A JP 2009212522A JP 2009212522 A JP2009212522 A JP 2009212522A JP 2011056919 A JP2011056919 A JP 2011056919A
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piezoelectric element
electrode
piezoelectric
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JP5549162B2 (en
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Hiroshi Kobayashi
寛史 小林
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Ricoh Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that a configuration for detecting poor connection of a piezoelectric member and a wiring member becomes complicate following elongation and high-density formation of an actuator. <P>SOLUTION: The liquid delivering head includes both the piezoelectric member 12 with a plurality of piezoelectric element pillars 12A, 12C and 12C, and an FPC 15 which supplies an electricity to the piezoelectric element pillar 12A of the piezoelectric member 12. The piezoelectric member 12 has a driving piezoelectric element pillar 12A and a non-driving piezoelectric element pillar 12B. External electrodes 23 and 25 of the piezoelectric member 12 and a wiring electrode of the FPC 15 are connected with each other. The FPC 15 is equipped with a pair of measurement electrodes 32C1 and 32C1 connected with external electrodes 23 of the measurement piezoelectric element pillars 12C, and has a terminal capable of measuring a resistance value between the pair of measurement electrodes 32C1 and 32C1. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は特に振動板を有する液体吐出ヘッド及び画像形成装置に関する。   The present invention particularly relates to a liquid discharge head and an image forming apparatus having a diaphragm.

プリンタ、ファクシミリ、複写装置、プロッタ、これらの複合機等の画像形成装置として、例えばインク液滴を吐出する液体吐出ヘッド(液滴吐出ヘッド)からなる記録ヘッドを用いた液体吐出記録方式の画像形成装置としてインクジェット記録装置などが知られている。この液体吐出記録方式の画像形成装置は、記録ヘッドからインク滴を、搬送される用紙(紙に限定するものではなく、OHPなどを含み、インク滴、その他の液体などが付着可能なものの意味であり、被記録媒体あるいは記録媒体、記録紙、記録用紙などとも称される。)に対して吐出して、画像形成(記録、印字、印写、印刷も同義語で使用する。)を行なうものであり、記録ヘッドが主走査方向に移動しながら液滴を吐出して画像を形成するシリアル型画像形成装置と、記録ヘッドが移動しない状態で液滴を吐出して画像を形成するライン型ヘッドを用いるライン型画像形成装置がある。   As an image forming apparatus such as a printer, a facsimile, a copying machine, a plotter, or a complex machine of these, for example, a liquid discharge recording type image forming using a recording head composed of a liquid discharge head (droplet discharge head) that discharges ink droplets. As an apparatus, an ink jet recording apparatus or the like is known. This liquid discharge recording type image forming apparatus means that ink droplets are transported from a recording head (not limited to paper, including OHP, and can be attached to ink droplets and other liquids). Yes, it is also ejected onto a recording medium or a recording medium, recording paper, recording paper, etc.) to form an image (recording, printing, printing, and printing are also used synonymously). And a serial type image forming apparatus that forms an image by ejecting liquid droplets while the recording head moves in the main scanning direction, and a line type head that forms images by ejecting liquid droplets without moving the recording head There are line type image forming apparatuses using

なお、本願において、液体吐出記録方式の「画像形成装置」は、紙、糸、繊維、布帛、皮革、金属、プラスチック、ガラス、木材、セラミックス等の媒体に液体を吐出して画像形成を行う装置を意味し、また、「画像形成」とは、文字や図形等の意味を持つ画像を媒体に対して付与することだけでなく、パターン等の意味を持たない画像を媒体に付与すること(単に液滴を媒体に着弾させること)をも意味する。また、「インク」とは、インクと称されるものに限らず、記録液、定着処理液、液体などと称されるものなど、画像形成を行うことができるすべての液体の総称として用い、例えば、DNA試料、レジスト、パターン材料、樹脂なども含まれる。また、「画像」とは平面的なものに限らず、立体的に形成されたものに付与された画像、また立体自体を3次元的に造形して形成された像も含まれる。   In the present application, the “image forming apparatus” of the liquid discharge recording method is an apparatus that forms an image by discharging liquid onto a medium such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics, or the like. In addition, “image formation” means not only giving an image having a meaning such as a character or a figure to a medium but also giving an image having no meaning such as a pattern to the medium (simply It also means that a droplet is landed on a medium). “Ink” is not limited to ink, but is used as a general term for all liquids capable of image formation, such as recording liquid, fixing processing liquid, and liquid. DNA samples, resists, pattern materials, resins and the like are also included. In addition, the “image” is not limited to a planar one, but includes an image given to a three-dimensionally formed image, and an image formed by three-dimensionally modeling a solid itself.

従来の液体吐出ヘッドとしては、液室内の液体であるインクを加圧し圧力を発生するための圧力発生手段としての圧電体、特に圧電層と内部電極を交互に積層した積層型圧電素子を用いた圧電アクチュエータを備え、積層型圧電素子のd33またはd31方向の変位で液室に壁面を形成する弾性変形可能な振動板を変形させ、液室内容積、圧力を変化させて液滴を吐出させるいわゆる圧電型ヘッドが知られている。   As a conventional liquid discharge head, a piezoelectric body as pressure generating means for generating pressure by pressurizing ink, which is a liquid in a liquid chamber, particularly a stacked piezoelectric element in which piezoelectric layers and internal electrodes are alternately stacked is used. A so-called piezoelectric device that includes a piezoelectric actuator and deforms an elastically deformable diaphragm that forms a wall surface in a liquid chamber by displacement in the d33 or d31 direction of the multilayer piezoelectric element, and discharges droplets by changing the volume and pressure in the liquid chamber. A mold head is known.

このような液体吐出ヘッドに使用される圧電アクチュエータとしては、積層型圧電部材に溝加工を施すことによって複数の駆動部(駆動圧電素子柱)と非駆動部(非駆動圧電素子柱)とを形成し、積層型圧電部材の内部電極を端面に引き出した外部電極(端面電極ともいう。)にFPC(フレキシブルプリントケーブル)などの配線部材の配線電極を接合し、各圧電素子柱に画像信号に応じた駆動信号を与えるようにしたものがある。   As a piezoelectric actuator used in such a liquid discharge head, a plurality of driving portions (driving piezoelectric element columns) and non-driving portions (non-driving piezoelectric element columns) are formed by performing groove processing on the laminated piezoelectric member. Then, a wiring electrode of a wiring member such as an FPC (flexible printed cable) is joined to an external electrode (also referred to as an end surface electrode) from which the internal electrode of the laminated piezoelectric member is drawn to the end surface, and each piezoelectric element column is subjected to an image signal. Some drive signals are given.

例えば、特許文献1では、駆動部の並び方向両端の非駆動部に共通外部電極を設けることで、個別外部電極と共通外部電極を同一面に設け、FPC1個で駆動信号を与えることを可能としている。   For example, in Patent Document 1, it is possible to provide individual external electrodes and common external electrodes on the same surface by providing common external electrodes in the non-driving parts at both ends in the arrangement direction of the driving parts, and to provide a drive signal with one FPC. Yes.

ところで、液体吐出ヘッドにおいては、高速化、高精度化が要求され、ヘッドの長尺化、高密度化、すなわち、圧電素子の長尺化、高密度化が図られている。圧電素子を長尺化すると、FPC(配線部材)も長尺化するため、FPCを接合する際の加熱によるFPCの伸長・収縮が大きくなり、圧電素子の外部電極(以下、「圧電素子電極」ともいう。)とFPCの配線電極(以下「FPC電極」ともいう。)の位置ずれが生じやすくなる。また、圧電素子を高密度化すると、圧電素子電極やFPC電極の幅が狭くなる。さらに、FPCのうねり,異物,圧電素子とFPCの電極間方向の傾きによる圧電素子電極とFPC電極の電極間距離のばらつきが大きくなる。   By the way, in the liquid discharge head, high speed and high precision are required, and the length and density of the head are increased, that is, the length and density of the piezoelectric element are increased. When the length of the piezoelectric element is increased, the length of the FPC (wiring member) is also increased, so that the expansion / contraction of the FPC due to heating when the FPC is joined increases, and the external electrode of the piezoelectric element (hereinafter, “piezoelectric element electrode”) And the FPC wiring electrode (hereinafter also referred to as “FPC electrode”) are likely to be displaced. Further, when the density of the piezoelectric element is increased, the widths of the piezoelectric element electrode and the FPC electrode are reduced. Further, the variation in the distance between the electrodes of the piezoelectric element electrode and the FPC electrode due to the undulation of the FPC, the foreign matter, and the inclination in the direction between the electrodes of the piezoelectric element and the FPC increases.

このように、圧電素子の長尺化、高密度化を行うと、接続面積が小さくなるだけでなく、電極間距離のばらつきや接続箇所が増大するため、接続不良が生じやすいという問題がある。特に、圧電部材の駆動部の並び方向両端部では、圧電素子電極とFPC電極の位置ずれや圧電素子とFPCの電極間方向の傾きにより、接続不良が生じやすい。   As described above, when the piezoelectric element is lengthened and densified, not only the connection area is reduced, but also there is a problem in that a connection failure is likely to occur because the distance between electrodes and the number of connection points increase. In particular, at both ends in the arrangement direction of the drive portions of the piezoelectric member, poor connection is likely to occur due to the positional deviation between the piezoelectric element electrode and the FPC electrode and the inclination between the piezoelectric element and the FPC electrode.

従来、圧電素子電極と配線電極との接続不良は、接続部の外観(目視)検査で行なっていたが、外観検査では、電極間を接続する電気接続部材(例えば、半田、導電性接着剤、異方性導電膜の接着剤等)が圧電素子電極又はFPC電極に濡れているか否かの確認しかできないという問題がある。   Conventionally, the connection failure between the piezoelectric element electrode and the wiring electrode has been performed by an appearance (visual) inspection of the connection portion. However, in the appearance inspection, an electrical connection member (for example, solder, conductive adhesive, There is a problem that it is only possible to confirm whether or not the adhesive of the anisotropic conductive film is wet with the piezoelectric element electrode or the FPC electrode.

そこで、圧電素子の静電容量検査によっては配線部材の検査端子が圧電アクチュエータの接合面から剥離しているか否かを判断するようにしたもの、あるいは、配線基板と圧電素子電極との抵抗値を測定するようにしたもの(特許文献1、2)、プローブ検査用電極を圧電素子電極とFPC電極の接続部近傍に設けて、接続抵抗を計測するもの(特許文献3、4)、特定の電極を電極間に突出した形状として、電極間距離を部分的に小さくし、電極の位置ずれによる短絡を抵抗等の電気特性で検出するもの(特許文献5)などが知られている。   Therefore, depending on the capacitance inspection of the piezoelectric element, it is determined whether or not the inspection terminal of the wiring member is peeled off from the bonding surface of the piezoelectric actuator, or the resistance value between the wiring substrate and the piezoelectric element electrode is determined. What is to be measured (Patent Documents 1 and 2), a probe inspection electrode is provided in the vicinity of the connection portion between the piezoelectric element electrode and the FPC electrode, and the connection resistance is measured (Patent Documents 3 and 4), a specific electrode As a shape that protrudes between the electrodes, there is known a technique in which the distance between the electrodes is partially reduced and a short circuit due to the displacement of the electrodes is detected by electrical characteristics such as resistance (Patent Document 5).

特許第4240124号公報Japanese Patent No. 4240124 特許第4240125号公報Japanese Patent No. 4240125 特許第3389941号公報Japanese Patent No. 3389941 特開2001−179995号公報JP 2001-179995 A 特開2008−141078号公報JP 2008-1441078 A

しかしながら、特許文献1、2の開示されているように、圧電素子の静電容量検査で接続不良を検査する構成にあっては、配線の抵抗や駆動用ICの外部抵抗が大きいために、オープン(電極間剥離や断線)不良や隣接電極間のショート(リーク,短絡)不良の検出しかできない。また、同文献1、2に開示されているように、配線基板の検査端子と圧電素子電極(共通電極)との抵抗値を測定する構成にあっては、共通電極と内部電極を通じて駆動用ICの外部抵抗を含む抵抗値を測定することになり、内部電極の断線でも接合部断線と誤判断したり、駆動用ICの外部抵抗(通常100Ω程度)の誤差レベルである数Ω程度の抵抗値上昇は検出することができない。このため、接続信頼性上問題となる、電極同士が電気接続部材を介して接触し、少しの外力で剥離するような接続抵抗が高い接続不良は検出できないという課題がある。   However, as disclosed in Patent Documents 1 and 2, in the configuration in which the connection failure is inspected by the capacitance inspection of the piezoelectric element, the wiring resistance and the external resistance of the driving IC are large. It can only detect defects (separation or disconnection between electrodes) and shorts between adjacent electrodes (leakage or short circuit). Further, as disclosed in the literatures 1 and 2, in the configuration in which the resistance value between the inspection terminal of the wiring board and the piezoelectric element electrode (common electrode) is measured, the driving IC is connected through the common electrode and the internal electrode. The resistance value including the external resistance is measured, and even if the internal electrode is disconnected, it is misjudged as a joint disconnection, or the error value of the external resistance (usually about 100Ω) of the driving IC is about several Ω. The rise cannot be detected. For this reason, there is a problem that a connection failure having a high connection resistance such that the electrodes come into contact with each other through the electrical connection member and peel with a little external force, which is a problem in connection reliability, cannot be detected.

また、プローブ検査用電極を圧電素子電極とFPC電極の接続部近傍に設けて接続抵抗を計測する構成にあっては、プローブ検査用電極領域を確保するため、FPC等の配線部材のサイズが大きくなる。また、検査用電極を複数の接続部で共有することにより、検査用電極領域を小さくすることができるが、検査用電極を複数の接続部で共有するための配線を検査後に切断する必要があり、コストが高くなるという課題がある。   Further, in the configuration in which the probe inspection electrode is provided near the connection portion between the piezoelectric element electrode and the FPC electrode and the connection resistance is measured, the size of the wiring member such as the FPC is large in order to secure the probe inspection electrode region. Become. In addition, the inspection electrode area can be reduced by sharing the inspection electrode with a plurality of connection portions, but the wiring for sharing the inspection electrode with the plurality of connection portions must be cut after the inspection. There is a problem that the cost becomes high.

さらに、特定の電極を電極間に突出した形状として、電極間距離を部分的に小さくし、電極の位置ずれによる短絡を抵抗等の電気特性で検出する構成にあっては、電極ピッチが小さくなると、過剰に短絡を検出することになるという課題がある。   Furthermore, in a configuration in which a specific electrode protrudes between the electrodes, the distance between the electrodes is partially reduced, and a short circuit due to the displacement of the electrode is detected by electrical characteristics such as resistance, the electrode pitch is reduced. There is a problem that a short circuit will be detected excessively.

本発明は上記の課題に鑑みてなされたものであり、圧電部材や配線部材の電極構造を複雑にすることなく、簡単な構成で接続不良を検出できるようにすることを目的とする。   The present invention has been made in view of the above problems, and an object of the present invention is to detect a connection failure with a simple configuration without complicating the electrode structure of a piezoelectric member or a wiring member.

上記の課題を解決するため、本発明に係る圧電アクチュエータは、
圧電層と内部電極が交互に積層された複数の圧電素子柱を有する圧電部材と、
前記圧電部材の圧電素子柱に給電する配線部材と、を備え、
前記圧電部材は、駆動圧電素子柱と非駆動圧電素子柱とを有し、
前記圧電部材の外部電極と前記配線部材の配線電極とが接続され、
前記配線部材には、少なくとも一つの非駆動圧電素子柱の外部電極と接続する一対の測定用電極が設けられ、
前記一対の測定用電極間の抵抗値を測定可能な端子を有する
構成とした。
In order to solve the above problems, the piezoelectric actuator according to the present invention is:
A piezoelectric member having a plurality of piezoelectric element columns in which piezoelectric layers and internal electrodes are alternately laminated;
A wiring member that feeds power to the piezoelectric element column of the piezoelectric member,
The piezoelectric member has a driving piezoelectric element column and a non-driving piezoelectric element column,
The external electrode of the piezoelectric member and the wiring electrode of the wiring member are connected,
The wiring member is provided with a pair of measurement electrodes connected to an external electrode of at least one non-driven piezoelectric element column,
The terminal has a terminal capable of measuring the resistance value between the pair of measurement electrodes.

ここで、
前記圧電部材には両端部に共通外部電極が形成された非駆動圧電素子柱が設けられ、
前記配線部材の一対の測定用電極が接続される非駆動圧電素子柱は、前記駆動圧電素子柱と前記共通外部電極が形成された非駆動圧電素子柱との間に配置されている
構成とできる。
here,
The piezoelectric member is provided with a non-driving piezoelectric element column having common external electrodes formed at both ends,
The non-driving piezoelectric element column to which the pair of measurement electrodes of the wiring member is connected can be configured to be disposed between the driving piezoelectric element column and the non-driving piezoelectric element column on which the common external electrode is formed. .

また、
前記圧電部材には前記駆動圧電素子柱間に、前記配線部材の一対の測定用電極が接続される非駆動圧電素子柱が配置され、
前記圧電部材の外部電極は先端部側と基部側に分割され、
前記駆動圧電素子柱を挟む前記配線部材の一対の測定用電極が接続される2つの非駆動圧電素子柱の外部電極の内の前記基部側の電極部分と前記一対の測定用電極とが接続され、
前記2つの非駆動圧電素子柱の間の前記駆動圧電素子柱の外部電極の先端部側の電極部分と前記測定用電極とが連結されている
構成とできる。
Also,
A non-driving piezoelectric element column to which a pair of measurement electrodes of the wiring member is connected is disposed between the driving piezoelectric element columns on the piezoelectric member,
The external electrode of the piezoelectric member is divided into a distal end side and a base side,
Of the external electrodes of the two non-drive piezoelectric element columns to which the pair of measurement electrodes of the wiring member sandwiching the drive piezoelectric element column is connected, the base side electrode portion and the pair of measurement electrodes are connected. ,
The electrode portion on the tip side of the external electrode of the driving piezoelectric element column between the two non-driving piezoelectric element columns and the measurement electrode may be connected.

また、前記配線部材の測定用電極は前記圧電部材の基部側で分岐している構成とできる。   Further, the measurement electrode of the wiring member may be branched on the base side of the piezoelectric member.

本発明に係る液体吐出ヘッドは、本発明に係る圧電アクチュエータを備えているものである。   The liquid discharge head according to the present invention includes the piezoelectric actuator according to the present invention.

本発明に係る画像形成装置は、本発明に係る液体吐出ヘッドを備えているものである。   The image forming apparatus according to the present invention includes the liquid discharge head according to the present invention.

本発明に係る圧電アクチュエータによれば、配線部材には少なくとも一つの非駆動圧電素子柱の外部電極と接続する一対の測定用電極が設けられ、一対の測定用電極間の抵抗値を測定可能な端子を有する構成としたので、圧電部材や配線部材の電極構造を複雑にすることなく、簡単な構成で接続不良を検出できるようになる。   According to the piezoelectric actuator of the present invention, the wiring member is provided with a pair of measurement electrodes connected to the external electrode of at least one non-driven piezoelectric element column, and the resistance value between the pair of measurement electrodes can be measured. Since the terminal is provided, the connection failure can be detected with a simple configuration without complicating the electrode structure of the piezoelectric member and the wiring member.

本発明に係る液体吐出ヘッドによれば、本発明に係る圧電アクチュエータを備えているので、信頼性が向上する。   According to the liquid discharge head according to the present invention, the piezoelectric actuator according to the present invention is provided, so that the reliability is improved.

本発明に係る画像形成装置によれば、本発明に係る液体吐出ヘッドを備えているので、高い信頼性が得られ、高速で、高画質画像を形成することができるようになる。   According to the image forming apparatus of the present invention, since the liquid discharge head according to the present invention is provided, high reliability can be obtained and a high-quality image can be formed at high speed.

本発明に係る液体吐出ヘッドの一例を示す分解斜視説明図である。FIG. 4 is an exploded perspective view illustrating an example of a liquid discharge head according to the present invention. 同ヘッドのノズル配列方向と直交する方向(液室長手方向)に沿う断面説明図である。It is sectional explanatory drawing which follows the direction (liquid chamber longitudinal direction) orthogonal to the nozzle arrangement direction of the head. 同ヘッドのノズル配列方向(液室短手方向)に沿う一例の断面説明図である。It is sectional explanatory drawing of an example along the nozzle arrangement direction (liquid chamber short direction) of the head. 同ヘッドのノズル配列方向(液室短手方向)に沿う他の例の断面説明図である。It is sectional explanatory drawing of the other example along the nozzle arrangement direction (liquid chamber short direction) of the head. 本発明の第1実施形態に係る圧電アクチュエータの圧電部材の電極構成及び配線部材の配線構成の説明に供する正面説明図である。It is front explanatory drawing with which it uses for description of the electrode structure of the piezoelectric member of the piezoelectric actuator which concerns on 1st Embodiment of this invention, and the wiring structure of a wiring member. 図5のA−A線に沿う断面説明図である。FIG. 6 is a cross-sectional explanatory view taken along line AA in FIG. 5. 本発明の第2実施形態に係る圧電アクチュエータの圧電部材の電極構成及び配線部材の配線構成の説明に供する正面説明図である。It is front explanatory drawing with which it uses for description of the electrode structure of the piezoelectric member of the piezoelectric actuator which concerns on 2nd Embodiment of this invention, and the wiring structure of a wiring member. 本発明の第3実施形態に係る圧電アクチュエータの圧電部材の電極構成及び配線部材の配線構成の説明に供する正面説明図である。It is front explanatory drawing with which it uses for description of the electrode structure of the piezoelectric member of the piezoelectric actuator which concerns on 3rd Embodiment of this invention, and the wiring structure of a wiring member. 図8のB−B線に沿う断面説明図である。It is sectional explanatory drawing which follows the BB line of FIG. 本発明に係る画像形成装置の一例を示す全体構成図である。1 is an overall configuration diagram illustrating an example of an image forming apparatus according to the present invention. 同じく要部平面説明図である。Similarly it is principal part plane explanatory drawing. 本発明に係る画像形成装置の他の例を示す全体構成図である。It is a whole block diagram which shows the other example of the image forming apparatus which concerns on this invention.

以下、本発明の実施形態について添付図面を参照して説明する。本発明に係る液体吐出ヘッドの一例について図1ないし図4を参照して説明する。なお、図1は同ヘッドの分解斜視説明図、図2は同ヘッドのノズル配列方向と直交する方向(液室長手方向)に沿う断面説明図、図3及び図4は同ヘッドのノズル配列方向(液室短手方向)に沿う断面説明図、図4は1つの液室部分の拡大断面説明図である。   Embodiments of the present invention will be described below with reference to the accompanying drawings. An example of a liquid discharge head according to the present invention will be described with reference to FIGS. 1 is an exploded perspective view of the head, FIG. 2 is a cross-sectional explanatory view along a direction (liquid chamber longitudinal direction) orthogonal to the nozzle arrangement direction of the head, and FIGS. 3 and 4 are nozzle arrangement directions of the head. FIG. 4 is an enlarged sectional explanatory view of one liquid chamber portion.

この液体吐出ヘッドは、SUS基板で形成した流路板(流路基板、液室基板)1と、この流路板1の下面に接合した振動板を形成する振動板部材2と、流路板1の上面に接合したノズル板3とを有し、これらによって液滴(液体の滴)を吐出する複数のノズル4がそれぞれノズル連通路5を介して連通する個別流路としての複数の液室(加圧液室、圧力室、加圧室、流路などとも称される。)6、液室6にインクを供給する供給路を兼ねた流体抵抗部7、この流体抵抗部7を介して液室6と連通する連通部8を形成し、連通部8に振動板部材2に形成した供給口9を介して後述するフレーム部材17に形成した共通液室10からインクを供給する。   The liquid discharge head includes a flow path plate (flow path substrate, liquid chamber substrate) 1 formed of a SUS substrate, a vibration plate member 2 that forms a vibration plate bonded to the lower surface of the flow path plate 1, and a flow path plate. A plurality of liquid chambers as individual flow paths each having a nozzle plate 3 joined to the upper surface of the nozzle 1 and a plurality of nozzles 4 for discharging droplets (liquid droplets) communicated with each other via a nozzle communication path 5. (Also referred to as a pressurized liquid chamber, a pressure chamber, a pressurized chamber, a flow path, etc.) 6, a fluid resistance section 7 that also serves as a supply path for supplying ink to the liquid chamber 6, and the fluid resistance section 7 A communication portion 8 communicating with the liquid chamber 6 is formed, and ink is supplied from a common liquid chamber 10 formed in a frame member 17 described later through a supply port 9 formed in the diaphragm member 2 in the communication portion 8.

流路板1は、流路板1Aと連通板1Bとを接着して構成している。この流路板1は、SUS基板を、酸性エッチング液を用いてエッチング、あるいは打ち抜き(プレス)などの機械加工することで、連通路5、加圧液室6、流体抵抗部7などの開口をそれぞれ形成している。   The flow path plate 1 is configured by bonding a flow path plate 1A and a communication plate 1B. The flow path plate 1 is formed by etching the SUS substrate with an acidic etchant or machining such as punching (pressing) to open openings such as the communication path 5, the pressurized liquid chamber 6, and the fluid resistance portion 7. Each is formed.

振動板部材2は、第1層2Aと第2層2Bとで形成されて、第1層2Aで薄肉部を形成し、第1層2A及び第2層2Bで厚肉部を形成している。そして、この振動板部材2は、各液室6に対応してその壁面を形成する第1層2Aで形成された各振動領域(ダイアフラム部)2aを有し、この振動領域2aの中に、面外側(液室6と反対面側)に第1層2A及び第2層2Bの厚肉部で形成された島状凸部2bが設けられ、この島状凸部2bに振動領域2aを変形させる駆動手段(アクチュエータ手段、圧力発生手段)としての電気機械変換素子を含む本発明に係る圧電アクチュエータ100を配置している。   The diaphragm member 2 is formed of the first layer 2A and the second layer 2B, the first layer 2A forms a thin portion, and the first layer 2A and the second layer 2B form a thick portion. . And this diaphragm member 2 has each vibration field (diaphragm part) 2a formed in the 1st layer 2A which forms the wall surface corresponding to each liquid room 6, and in this vibration field 2a, An island-shaped convex portion 2b formed by the thick portions of the first layer 2A and the second layer 2B is provided on the outer surface (the side opposite to the liquid chamber 6), and the vibration region 2a is deformed into the island-shaped convex portion 2b. A piezoelectric actuator 100 according to the present invention including an electromechanical conversion element as a driving means (actuator means, pressure generating means) is arranged.

この圧電アクチュエータ100は、ベース部材13上に接着剤接合した複数(ここでは2つとする)の積層型圧電部材12を有し、圧電部材12にはハーフカットダイシングによって溝31を加工して1つの圧電部材12に対して所要数の圧電素子柱12A、12Bを所定の間隔で櫛歯状に形成している。なお、圧電部材12の圧電素子柱12A、12Bは、同じものであるが、駆動波形を与えて駆動させる圧電素子柱を駆動圧電素子柱12A、駆動波形を与えないで単なる支柱として使用する圧電素子柱を非駆動圧電素子柱12Bとして区別している。そして、駆動圧電素子柱12Aの上端面(接合面)を振動板部材2の島状凸部2bに接合している。また、非駆動圧電素子柱12Bの上端面は液室間隔壁6Aに対応する位置で振動板部材2に接合される。   The piezoelectric actuator 100 includes a plurality of (here, two) laminated piezoelectric members 12 that are bonded to an adhesive on a base member 13, and the piezoelectric member 12 has one groove 31 processed by half-cut dicing. A required number of piezoelectric element columns 12A and 12B are formed in a comb shape at a predetermined interval with respect to the piezoelectric member 12. The piezoelectric element columns 12A and 12B of the piezoelectric member 12 are the same, but the piezoelectric element column that is driven by giving a drive waveform is used as the drive piezoelectric element column 12A, and the piezoelectric element is used as a simple column without giving the drive waveform. The columns are distinguished as non-driving piezoelectric element columns 12B. Then, the upper end surface (joint surface) of the drive piezoelectric element column 12 </ b> A is joined to the island-shaped convex portion 2 b of the diaphragm member 2. The upper end surface of the non-driving piezoelectric element column 12B is joined to the diaphragm member 2 at a position corresponding to the liquid chamber interval wall 6A.

ここで、圧電部材12は、圧電材料層21と内部電極22A、22Bとを交互に積層したものであり、内部電極22A、22Bをそれぞれ端面、即ち圧電部材12の振動板部材2に略垂直な側面(積層方向に沿う面)に引き出して、この側面に形成された端面電極(外部電極)23、24に接続し、端面電極(外部電極)23、24間に電圧を印加することで積層方向の変位を生じる。   Here, the piezoelectric member 12 is obtained by alternately stacking the piezoelectric material layers 21 and the internal electrodes 22A and 22B. The internal electrodes 22A and 22B are respectively substantially perpendicular to the end face, that is, the diaphragm member 2 of the piezoelectric member 12. Pulled out to the side surface (surface along the laminating direction), connected to the end face electrodes (external electrodes) 23, 24 formed on this side surface, and a voltage is applied between the end face electrodes (external electrodes) 23, 24 to form the laminating direction Cause displacement.

また、圧電部材12には駆動圧電素子柱12Aに駆動信号を与えるための可撓性を有する給電部材(配線部材)としてのフレキシブル配線基板であるFPC15が接続されている。FPC15には、図示しないが駆動圧電素子柱12Aに駆動波形を与えるドライバIC(駆動回路)が搭載されている。   The piezoelectric member 12 is connected to an FPC 15 which is a flexible wiring board as a flexible power supply member (wiring member) for supplying a driving signal to the driving piezoelectric element column 12A. Although not shown, the FPC 15 includes a driver IC (drive circuit) that gives a drive waveform to the drive piezoelectric element column 12A.

なお、ここでは、上述したように、圧電部材12の圧電素子柱12A、12Bは、同じものであるが、駆動波形を与えて駆動させる圧電素子柱を駆動圧電素子柱12A、駆動波形を与えないで単なる支柱として使用する圧電素子柱を非駆動圧電素子柱12Bとして、図3に示すように、駆動用圧電素子柱12Aと支柱用圧電素子柱12Bとを交互に使用するバイピッチ構成としているが、図4に示すように、すべての圧電素子柱を駆動用圧電素子柱12Aとして使用するノーマルピッチ構成とすることもできる。   Here, as described above, the piezoelectric element columns 12A and 12B of the piezoelectric member 12 are the same, but the piezoelectric element column to be driven by applying a driving waveform is not provided with the driving piezoelectric element column 12A. As shown in FIG. 3, the piezoelectric element column used as a mere support is a non-driving piezoelectric element column 12B, and the driving piezoelectric element column 12A and the support piezoelectric element column 12B are alternately used as shown in FIG. As shown in FIG. 4, it is possible to adopt a normal pitch configuration in which all the piezoelectric element columns are used as the driving piezoelectric element columns 12A.

ノズル板3は、ニッケル(Ni)の金属プレートから形成したもので、エレクトロフォーミング法(電鋳)で製造している。このノズル板3には各液室6に対応して直径10〜35μmのノズル4を形成し、流路板1に接着剤接合している。そして、このノズル板3の液滴吐出側面(吐出方向の表面:吐出面、又は液室6側と反対の面)には撥水層を設けている。   The nozzle plate 3 is formed from a nickel (Ni) metal plate, and is manufactured by an electroforming method (electroforming). In this nozzle plate 3, nozzles 4 having a diameter of 10 to 35 μm are formed corresponding to the respective liquid chambers 6 and bonded to the flow path plate 1 with an adhesive. A water repellent layer is provided on the droplet discharge side surface (surface in the discharge direction: discharge surface or surface opposite to the liquid chamber 6 side) of the nozzle plate 3.

さらに、これらの圧電素子12、ベース部材13及びFPC15などで構成されるアクチュエータ部の外周側には、エポキシ系樹脂或いはポリフェニレンサルファイトで射出成形により形成したフレーム部材17を接合している。そして、このフレーム部材17には前述した共通液室10を形成し、更に共通液室10に外部から記録液を供給するための供給口を形成し、この供給口19は更に図示しないサブタンクやインクカートリッジなどのインク供給源に接続される。   Further, a frame member 17 formed by injection molding with an epoxy resin or polyphenylene sulfite is joined to the outer peripheral side of the actuator portion composed of the piezoelectric element 12, the base member 13, the FPC 15, and the like. The frame member 17 is formed with the common liquid chamber 10 described above, and further, a supply port for supplying recording liquid from the outside to the common liquid chamber 10 is formed. It is connected to an ink supply source such as a cartridge.

このように構成した液体吐出ヘッドにおいては、例えば押し打ち方式で駆動する場合には、図示しない制御部から記録する画像に応じて駆動用圧電素子柱12Aに20〜50Vの駆動パルス電圧を選択的に印加することによって、パルス電圧が印加された圧電素子柱12Aが変位して振動板2の振動領域2aをノズル板3方向に変形させ、液室6の容積(体積)変化によって液室6内の液体を加圧することで、ノズル板3のノズル4から液滴が吐出される。そして、液滴の吐出に伴って液室6内の圧力が低下し、このときの液流れの慣性によって液室6内には若干の負圧が発生する。この状態の下において、圧電素子柱12Aへの電圧の印加をオフ状態にすることによって、振動板2が元の位置に戻って液室6が元の形状になるため、さらに負圧が発生する。このとき、共通液室10から液室6内に記録液が充填され、次の駆動パルスの印加に応じて液滴がノズル4から吐出される。   In the liquid discharge head configured as described above, for example, when driven by a punching method, a driving pulse voltage of 20 to 50 V is selectively applied to the driving piezoelectric element column 12A according to an image recorded from a control unit (not shown). Is applied to the piezoelectric element column 12A to which the pulse voltage is applied, and the vibration region 2a of the vibration plate 2 is deformed in the direction of the nozzle plate 3, and the liquid chamber 6 changes its volume (volume). A liquid droplet is discharged from the nozzle 4 of the nozzle plate 3 by pressurizing the liquid. As the liquid droplets are discharged, the pressure in the liquid chamber 6 decreases, and a slight negative pressure is generated in the liquid chamber 6 due to the inertia of the liquid flow at this time. Under this state, when the voltage application to the piezoelectric element column 12A is turned off, the diaphragm 2 returns to the original position and the liquid chamber 6 becomes the original shape, so that further negative pressure is generated. . At this time, the recording liquid is filled into the liquid chamber 6 from the common liquid chamber 10, and droplets are ejected from the nozzle 4 in response to the next drive pulse application.

なお、液体吐出ヘッドは、上記の押し打ち以外にも、引き打ち方式(振動板2を引いた状態から開放して復元力で加圧する方式)、引き−押し打ち方式(振動板2を中間位置で保持しておき、この位置から引いた後、押出す方式)などの方式で駆動することもできる。   In addition to the above-described pushing, the liquid ejection head is not limited to the pulling method (a method of releasing the diaphragm 2 from the pulled state and pressurizing it with a restoring force), and the pulling-pushing method (the diaphragm 2 at the intermediate position). It is also possible to drive by pulling from this position and then extruding.

そこで、この液体吐出ヘッドにおける本発明の第1実施形態に係る圧電アクチュエータの詳細について図5及び図6をも参照して説明する。なお、図5(a)は圧電部材の電極構成、(b)は配線部材の配線構成、(c)は圧電部材と配線部材の接合状態の説明に供する正面説明図、図6は図5(c)のA−A線に沿う断面説明図である。   Therefore, details of the piezoelectric actuator according to the first embodiment of the present invention in this liquid discharge head will be described with reference to FIGS. 5A is an electrode configuration of the piezoelectric member, FIG. 5B is a wiring configuration of the wiring member, FIG. 5C is a front explanatory view for explaining a bonding state of the piezoelectric member and the wiring member, and FIG. It is sectional explanatory drawing which follows the AA line of c).

この圧電アクチュエータ100は、前述したように圧電層21Aと内部電極22A、22Bが交互に積層された複数の圧電素子柱12A、12Bを有する圧電部材12と、圧電部材12の駆動圧電素子柱12Aに給電する配線部材としてのFPC15とを備えている。   As described above, the piezoelectric actuator 100 includes a piezoelectric member 12 having a plurality of piezoelectric element columns 12A and 12B in which piezoelectric layers 21A and internal electrodes 22A and 22B are alternately stacked, and a driving piezoelectric element column 12A of the piezoelectric member 12. And an FPC 15 as a wiring member for supplying power.

この実施形態では、圧電部材12の中央部に複数の駆動圧電素子柱12Aを配置し、両端部に共通外部電極用の幅広の非駆動圧電素子柱12Baを配置し、少なくとも複数の駆動圧電素子柱12Aの柱配列方向の外側であって、駆動圧電素子柱12Aと非駆動圧電素子柱12Baとの間に2つの測定用非駆動圧電素子柱12Cを配置している。   In this embodiment, a plurality of driving piezoelectric element columns 12A are arranged at the center of the piezoelectric member 12, and a wide non-driving piezoelectric element column 12Ba for a common external electrode is arranged at both ends, so that at least a plurality of driving piezoelectric element columns are arranged. Two non-driving piezoelectric element columns for measurement 12C are arranged between the driving piezoelectric element column 12A and the non-driving piezoelectric element column 12Ba outside the column arrangement direction of 12A.

ここで、駆動圧電素子柱12A、非駆動圧電素子柱12CにはFPC15と接合する側に個別外部電極23が形成されている。非駆動圧電素子12Cの個別外部電極12Cは動作時に駆動波形が印加されるものではないが、個別外部電極として説明する。非駆動圧電素子柱12BaにはFPC15と接合する側に共通外部電極23が形成されている。そして、駆動圧電素子柱12Aの共通外部電極24は、図示しないがスリット加工で分断されない内部電極などを通じて非駆動圧電素子柱12Baに形成された共通外部電極25に接続されている。   Here, individual external electrodes 23 are formed on the side to be joined to the FPC 15 in the driving piezoelectric element column 12A and the non-driving piezoelectric element column 12C. The individual external electrode 12C of the non-driving piezoelectric element 12C is not applied with a driving waveform during operation, but will be described as an individual external electrode. A common external electrode 23 is formed on the non-driving piezoelectric element column 12Ba on the side where the FPC 15 is joined. The common external electrode 24 of the driving piezoelectric element column 12A is connected to a common external electrode 25 formed on the non-driving piezoelectric element column 12Ba through an internal electrode (not shown) that is not divided by slit processing.

なお、駆動圧電素子柱12Aと測定用非駆動圧電素子柱12Cの柱幅(電極幅)は、同一幅、同一ピッチで形成している。また、図5では圧電部材12の一端部側のみ図示しているが、他端部側も同様の構成としている。また、内部電極についても図示は省略している。   Note that the column widths (electrode widths) of the driving piezoelectric element columns 12A and the measurement non-driving piezoelectric element columns 12C are the same width and the same pitch. In FIG. 5, only one end side of the piezoelectric member 12 is shown, but the other end side has the same configuration. Also, illustration of the internal electrodes is omitted.

配線部材としてのFPC15は、基材31に形成された配線(電極)32と、ソルダレジスト33と、図示しない駆動ICとを有し、ベース部材13にホットメルト接着剤16にて固定されている。   The FPC 15 as a wiring member has a wiring (electrode) 32 formed on the base material 31, a solder resist 33, and a driving IC (not shown), and is fixed to the base member 13 with a hot melt adhesive 16. .

このFPC15は、圧電部材12の個別外部電極23が形成された面側に接続されて、駆動圧電素子柱12Aの個別外部電極23に接続される個別電極配線32Aと、非駆動圧電素子柱12Baの共通外部電極25に接続される共通電極配線32Bと、測定用非駆動圧電素子柱12Cの個別外部電極23に接続される測定用配線32C(32C1、32C2、32C3)とを有している。   The FPC 15 is connected to the surface of the piezoelectric member 12 where the individual external electrodes 23 are formed, and the individual electrode wiring 32A connected to the individual external electrodes 23 of the driving piezoelectric element column 12A and the non-driving piezoelectric element columns 12Ba are connected. A common electrode wiring 32B connected to the common external electrode 25 and a measurement wiring 32C (32C1, 32C2, 32C3) connected to the individual external electrode 23 of the measurement non-driving piezoelectric element column 12C are provided.

ここで、個別電極配線32Aは図示しない駆動ICの接続端子まで形成されている。また、共通電極配線32Bは個別電極配線32Aより幅広に形成されている。   Here, the individual electrode wiring 32A is formed up to a connection terminal of a drive IC (not shown). The common electrode wiring 32B is formed wider than the individual electrode wiring 32A.

測定用配線32Cは、2つの測定用非駆動圧電素子柱12C、12Cに接続される一対の測定用電極32C1と、1つの測定用配線32C1を分岐した分岐電極32C2と、非駆動圧電素子柱12C、12C間を連結する連結電極32C3により構成されている。分岐電極32C2は図示しない測定用端子に接続されている。   The measurement wiring 32C includes a pair of measurement electrodes 32C1 connected to the two measurement non-drive piezoelectric element columns 12C and 12C, a branch electrode 32C2 that branches one measurement wiring 32C1, and a non-drive piezoelectric element column 12C. , 12C, the connecting electrode 32C3 is connected. The branch electrode 32C2 is connected to a measurement terminal (not shown).

このFPC15の各電極及び配線32(32A、32B、32C1、32C2、32C3)は、高導電性のCuを膜厚8μm厚みで形成している。より低抵抗とする場合には、12μm、18μm、35μm等の厚膜のものも用いることができる。また、ソルダレジスト33はFPC15の一部の領域15B(図6)に形成している。   Each electrode and wiring 32 (32A, 32B, 32C1, 32C2, and 32C3) of the FPC 15 are formed of highly conductive Cu with a thickness of 8 μm. In the case of lower resistance, a thick film having a thickness of 12 μm, 18 μm, 35 μm or the like can also be used. Further, the solder resist 33 is formed in a partial region 15B (FIG. 6) of the FPC 15.

このFPC15の各電極及び配線32(これを「FPC電極」という。)と圧電部材12の各電極23、25(これを「圧電素子電極」という。)は、それぞれ半田41で接続されている。FPC電極と圧電素子電極を接続する方法としては、電極を位置合わせして圧電部材12とFPC15を重ね合わせ、ヒーターチップ(ブロック)でFPC15の電極部15A裏面の基材31を加圧しながらヒーターチップの温度をパルス的に上昇させ半田41を溶融硬化させることにより接合するヒーター接合法や、FPC15をガラス等のレーザーを透過する剛性部材で加圧した状態でレーザー光をFPC15の各電極配線32A、32Bや半田41に照射して半田41を溶融硬化させることにより接合するレーザー接合法等を用いることができる。   Each electrode and wiring 32 of the FPC 15 (referred to as “FPC electrode”) and each of the electrodes 23 and 25 (referred to as “piezoelectric element electrode”) of the piezoelectric member 12 are connected by solder 41. As a method of connecting the FPC electrode and the piezoelectric element electrode, the electrodes are aligned, the piezoelectric member 12 and the FPC 15 are overlapped, and the heater chip (block) is pressed while pressing the substrate 31 on the back surface of the electrode portion 15A of the FPC 15 with the heater chip. A heater joining method in which the solder 41 is melted and hardened by pulsating the temperature, and the FPC 15 is pressed by a rigid member that transmits a laser such as glass, and laser light is applied to each electrode wiring 32A of the FPC 15; For example, a laser bonding method in which the solder 41 is melted and cured by irradiating the solder 32B or the solder 41 can be used.

なお、半田41は、FPC電極及びFPC15の基材31に比較して低い融点を有する金属材料であり、かつ導電性を有する材料から構成されたものであればよく、鉛(Pb)を含有しないものであることが好ましい。たとえば、半田41としてスズ(Sn)及びビスマス(Bi)を主成分とする半田を用いることができる。鉛が含有されていないことから、環境保護の観点において効果的であるとともに、スズ(Sn)及びビスマス(Bi)が主成分の半田41は非鉛の部材の中では非常に低い融点を有していることから、FPC15及び圧電部材12にダメージを与えることなくFPC電極と圧電素子電極とを容易に溶着することができる。   The solder 41 is a metal material having a lower melting point than that of the FPC electrode and the base material 31 of the FPC 15 and may be made of a conductive material and does not contain lead (Pb). It is preferable. For example, as the solder 41, solder containing tin (Sn) and bismuth (Bi) as main components can be used. Since lead is not contained, it is effective from the viewpoint of environmental protection, and the solder 41 mainly composed of tin (Sn) and bismuth (Bi) has a very low melting point among non-lead members. Therefore, the FPC electrode and the piezoelectric element electrode can be easily welded without damaging the FPC 15 and the piezoelectric member 12.

また、ここでは、電気接続部材として半田41を用いたが、異方性導電膜や導電性接着剤等を用いることもできる。   Here, the solder 41 is used as the electrical connection member, but an anisotropic conductive film, a conductive adhesive, or the like can also be used.

また、半田41を、印刷法やめっき法等により、予め圧電部材12の外部電極23、25、または、FPC15の電極配線32(電極部15A)に形成している。   The solder 41 is formed in advance on the external electrodes 23 and 25 of the piezoelectric member 12 or the electrode wiring 32 (electrode portion 15A) of the FPC 15 by a printing method, a plating method, or the like.

また、ここでは、配線部材として、FPCを用いたが、薄膜状であり互いに並列された複数の電極が設けられているものであればよく、例えば、TAB(Tape Automated Bonding)を用いることもできる。   Here, although FPC is used as the wiring member, it may be any film provided with a plurality of electrodes that are thin and parallel to each other. For example, TAB (Tape Automated Bonding) can also be used. .

このように構成した圧電アクチュエータにおいて、圧電部材12とFPC15を接続した後、一対の測定用電極32C1間の抵抗値を図示しない測定端子を通じて測定する。   In the piezoelectric actuator configured as described above, after the piezoelectric member 12 and the FPC 15 are connected, the resistance value between the pair of measurement electrodes 32C1 is measured through a measurement terminal (not shown).

ここでは、分岐電極32C2に電圧又は電流を印加して、電流又は電圧を計測する4端子計測を行ない、一方の測定用電極32C1の分岐部からもう一方の測定用電極32C1の分岐部までの配線抵抗と接続抵抗を含む抵抗値を計測した。これにより、良好接合部に対して少し高い抵抗(良好な接続抵抗+1Ω以下)を示す不良接合部を検出することができる。   Here, the voltage or current is applied to the branch electrode 32C2 to perform four-terminal measurement to measure the current or voltage, and wiring from the branch portion of one measurement electrode 32C1 to the branch portion of the other measurement electrode 32C1 Resistance values including resistance and connection resistance were measured. As a result, it is possible to detect a defective junction that exhibits a slightly higher resistance (good connection resistance + 1Ω or less) with respect to the good junction.

このように、この液体吐出ヘッドにおける圧電アクチュエータによれば、配線部材には少なくとも一つの非駆動圧電素子柱の外部電極と接続する一対の測定用電極が設けられ、一対の測定用電極間の抵抗値を測定可能な端子を有する構成としているので、圧電部材や配線部材の電極構造を複雑にすることなく、簡単な構成で接続不良を検出できるようになる。   Thus, according to the piezoelectric actuator in the liquid discharge head, the wiring member is provided with a pair of measurement electrodes connected to the external electrode of at least one non-driven piezoelectric element column, and the resistance between the pair of measurement electrodes Since the configuration has a terminal capable of measuring a value, it is possible to detect a connection failure with a simple configuration without complicating the electrode structure of the piezoelectric member and the wiring member.

この場合、圧電部材には両端部に共通外部電極が形成された非駆動圧電素子柱が設けられ、配線部材の一対の測定用電極が接続される非駆動圧電素子柱は、駆動圧電素子柱と共通外部電極が形成された非駆動圧電素子柱との間に配置されている構成とすることで、圧電素子電極と配線電極の位置ずれや圧電素子と配線電極間方向の傾きにより、最も接続不良の生じやすい圧電部材の駆動圧電素子柱の並び方向両端部の接続抵抗を測定することができ、接続不良を簡単に検出することができる。   In this case, the piezoelectric member is provided with a non-driving piezoelectric element column in which common external electrodes are formed at both ends, and the non-driving piezoelectric element column to which the pair of measurement electrodes of the wiring member is connected is the driving piezoelectric element column. Due to the arrangement between the non-driven piezoelectric element column with the common external electrode formed, the poor connection due to the displacement of the piezoelectric element electrode and the wiring electrode and the inclination between the piezoelectric element and the wiring electrode. It is possible to measure the connection resistance at both ends of the driving piezoelectric element columns of the piezoelectric member in which it is likely to occur, and it is possible to easily detect a connection failure.

また、測定用非駆動圧電素子柱の外部電極幅及びピッチと駆動圧電素子柱の外部電極幅及びピッチとを同一にしているので、圧電素子電極と配線電極の位置ずれが生じても、接続状態が駆動圧電素子柱と測定用非駆動圧電素子柱でほぼ同一となるため、測定用非駆動圧電素子柱部の接続抵抗が増大し接続不良が生じた場合は、駆動圧電素子柱でも接続不良が生じたと判定できる。この結果、過剰に短絡不良を検出することがなくなる。   In addition, since the external electrode width and pitch of the non-drive piezoelectric element column for measurement and the external electrode width and pitch of the drive piezoelectric element column are made the same, even if the positional deviation between the piezoelectric element electrode and the wiring electrode occurs, the connection state Is almost the same between the driving piezoelectric element column and the non-driving piezoelectric element column for measurement. Therefore, if the connection resistance of the non-driving piezoelectric element column for measurement increases and a connection failure occurs, the connection failure also occurs in the driving piezoelectric element column. It can be determined that it has occurred. As a result, the short circuit failure is not detected excessively.

また、配線部材の測定用電極配線は圧電部材の基部側で分岐している構成とすることで、4端子法による抵抗計測ができるため、分岐部からプローブ検査用電極等の抵抗測定用電極までの配線抵抗を無視でき、測定用電極配線の接続部近傍にプローブ検査用電極等を設ける必要がなくなる。   Also, since the measurement electrode wiring of the wiring member is branched on the base side of the piezoelectric member, resistance measurement by the four-terminal method can be performed, so from the branching portion to the resistance measurement electrode such as a probe inspection electrode Therefore, it is not necessary to provide a probe inspection electrode in the vicinity of the connection portion of the measurement electrode wiring.

また、電気接続部材として半田を用いることで、異方性導電膜や導電性接着剤等に比べて、接続抵抗を低くできるだけでなく、抵抗値測定による接続不良が生じた場合には、再度、FPCを加圧しながら半田を溶融させることにより接合をやり直すことができる。   Also, by using solder as an electrical connection member, not only can the connection resistance be lowered compared to anisotropic conductive films, conductive adhesives, etc., but if a connection failure occurs due to resistance measurement, Bonding can be performed again by melting the solder while pressing the FPC.

そして、このような圧電アクチュエータを備える液体吐出ヘッドは、ヘッドの長尺化、高密度化に伴って圧電アクチュエータの接続不良が生じても、接続不良を容易に検出できるため、信頼性の高いヘッドを得ることができる。   A liquid ejection head having such a piezoelectric actuator is a highly reliable head because the connection failure can be easily detected even if the connection failure of the piezoelectric actuator occurs with an increase in the length and density of the head. Can be obtained.

次に、本発明の第2実施形態に係る圧電アクチュエータついて図7を参照して説明する。なお、図7(a)は同実施形態における圧電部材の電極構成、(b)は同じく配線部材の配線構成、(c)は同じく圧電部材と配線部材の接合状態の説明に供する正面説明図である。
ここでは、前記第1実施形態におけるFPC15の一対の測定用電極32C1の一方と連結電極32C3とを一体的に形成している。
Next, a piezoelectric actuator according to a second embodiment of the present invention will be described with reference to FIG. 7A is an electrode configuration of the piezoelectric member in the embodiment, FIG. 7B is a wiring configuration of the wiring member, and FIG. 7C is a front explanatory view for explaining a bonding state of the piezoelectric member and the wiring member. is there.
Here, one of the pair of measurement electrodes 32C1 of the FPC 15 in the first embodiment and the connection electrode 32C3 are integrally formed.

また、前記第1実施形態に比べて、非駆動柱を減らすことができるとともに、圧電部材12の両端の外側の測定用電極32C1、32C1間の抵抗を測定することにより、両端の共通電極12Ba(他方は図示省略)間の抵抗を精度良く計測できる。   Further, as compared with the first embodiment, the number of non-driven columns can be reduced, and the resistance between the measurement electrodes 32C1 and 32C1 outside the both ends of the piezoelectric member 12 is measured, whereby the common electrodes 12Ba ( It is possible to accurately measure the resistance between the other (not shown).

次に、本発明の第3実施形態に係る圧電アクチュエータついて図8及び図9を参照して説明する。なお、図8(a)は同実施形態における圧電部材の電極構成、(b)は同じく配線部材の配線構成、(c)は同じく圧電部材と配線部材の接合状態の説明に供する正面説明図、図9は図8のB−B線に沿う断面説明図である。
ここでは、圧電部材12には駆動圧電素子柱12Aと測定用非駆動圧電素子柱12Cを交互に配列し、駆動圧電素子柱12Aの両端は測定用非駆動圧電素子柱12Cを配列し、さらに、圧電部材12の両端部の測定用非駆動圧電素子柱12Cの外側に、共通外部電極25が形成された非駆動圧電素子柱12Baを配列している。
Next, a piezoelectric actuator according to a third embodiment of the present invention will be described with reference to FIGS. 8A is an electrode configuration of the piezoelectric member according to the embodiment, FIG. 8B is a wiring configuration of the wiring member, and FIG. 8C is a front explanatory view for explaining a bonding state of the piezoelectric member and the wiring member. FIG. 9 is a cross-sectional explanatory view taken along line BB in FIG.
Here, driving piezoelectric element columns 12A and measurement non-driving piezoelectric element columns 12C are alternately arranged on the piezoelectric member 12, and measurement non-driving piezoelectric element columns 12C are arranged at both ends of the driving piezoelectric element column 12A. Non-driving piezoelectric element columns 12Ba in which common external electrodes 25 are formed are arranged outside the measurement non-driving piezoelectric element columns 12C at both ends of the piezoelectric member 12.

また、各圧電素子柱12A、12Ba、12CのFPC15との接合面の外部電極23、25は、圧電部材12の先端部側部分23aと基部側(ベース部材13に接合する側)部分23bに上下に分断(分割)された構成としている。外部電極23、25を上下に分断する方法としては、ダイサーにより溝加工する方法や、レーザーにより電極を除去する方法を用いることができる。   In addition, the external electrodes 23 and 25 on the bonding surfaces of the piezoelectric element columns 12A, 12Ba, and 12C with the FPC 15 are vertically moved to the distal end side portion 23a and the base side (side bonded to the base member 13) portion 23b of the piezoelectric member 12. The structure is divided (divided). As a method of dividing the external electrodes 23 and 25 into the upper and lower sides, a method of forming a groove with a dicer or a method of removing the electrodes with a laser can be used.

FPC15の個別電極配線32Aは、駆動圧電素子柱12Aの外部電極23の基部側部分23bに接続されている。また、共通電極配線32Bは、非駆動圧電素子柱12Bの外部電極25全体に接続されている。   The individual electrode wiring 32A of the FPC 15 is connected to the base portion 23b of the external electrode 23 of the driving piezoelectric element column 12A. Further, the common electrode wiring 32B is connected to the entire external electrode 25 of the non-driving piezoelectric element column 12B.

FPC15の測定用電極配線32Cは、一対の測定用電極32C1、分岐電極32C2、圧電素子柱12C、12A、12Cを連結する連結電極32C3により構成している。   The measurement electrode wiring 32C of the FPC 15 includes a pair of measurement electrodes 32C1, a branch electrode 32C2, and a connection electrode 32C3 that connects the piezoelectric element columns 12C, 12A, and 12C.

一対の測定用電極32C1と連結電極32C3の電極部(下部)は、圧電素子柱12Cの外部電極23の基部側部分23bに接続されている。また、連結電極32C3の連結部分(圧電素子柱配列方向に沿う部分)は、圧電素子柱12A、12Cの外部電極23の先端部側部分23aに接続されている。この連結電極32C3は駆動圧電素子柱12Aの外部電極23の基部側部分23bとは電気的に接続されていない。   The electrode parts (lower part) of the pair of measurement electrodes 32C1 and the coupling electrode 32C3 are connected to the base part 23b of the external electrode 23 of the piezoelectric element column 12C. In addition, the connecting portion of the connecting electrode 32C3 (the portion along the piezoelectric element column arrangement direction) is connected to the tip portion side portion 23a of the external electrode 23 of the piezoelectric element columns 12A and 12C. The connection electrode 32C3 is not electrically connected to the base portion 23b of the external electrode 23 of the drive piezoelectric element column 12A.

このように構成したので、圧電部材12とFPC15を接続した後、一対の測定用電極32C1間の抵抗値を測定することができる。ここでは、まず、端の個別電極32Aの両側に配置した一対の測定用電極32C1、32C1間の抵抗値を4端子法で測定し、一方の測定用電極32C1の分岐部からもう一方の測定用電極32C1の分岐部までの配線抵抗と接続抵抗を含む抵抗を測定した。次いで、図で左から2番目の個別電極32Aの両側に配置した一対の測定用電極32C1間の抵抗,さらに、3番目の個別電極32Aの両側に配置した一対の測定用電極32C1間の抵抗と、順次、全ての個別電極32Aの両側に配置した一対の測定用電極32C1間の抵抗を測定した。   Since it comprised in this way, after connecting the piezoelectric member 12 and FPC15, the resistance value between a pair of electrodes 32C1 for a measurement can be measured. Here, first, the resistance value between a pair of measurement electrodes 32C1 and 32C1 arranged on both sides of the individual electrode 32A at the end is measured by the four-terminal method, and the other measurement electrode is measured from the branch portion of one measurement electrode 32C1. The resistance including the wiring resistance and connection resistance to the branch portion of the electrode 32C1 was measured. Next, in the figure, the resistance between the pair of measurement electrodes 32C1 arranged on both sides of the second individual electrode 32A from the left, and the resistance between the pair of measurement electrodes 32C1 arranged on both sides of the third individual electrode 32A The resistance between a pair of measurement electrodes 32C1 arranged on both sides of all the individual electrodes 32A was measured sequentially.

このように、圧電部材には駆動圧電素子柱間に、配線部材の一対の測定用電極が接続される非駆動圧電素子柱が配置され、圧電部材の外部電極は先端部側と基部側に分割され、駆動圧電素子柱を挟む配線部材の一対の測定用電極が接続される2つの非駆動圧電素子柱の外部電極の内の基部側の電極部分と一対の測定用電極とが接続され、2つの非駆動圧電素子柱の間の駆動圧電素子柱の外部電極の先端部側の電極部分と測定用電極とが連結されている構成とすることで、全ての駆動圧電素子柱に隣接する非駆動圧電素子柱の接続抵抗を測定することができる。これにより、非駆動圧電素子柱の接続抵抗が増大し、接続不良が生じた場合は、非駆動圧電素子柱の間の駆動圧電素子柱で接続不良が生じたと判定できるようになる。   As described above, the piezoelectric member is provided with the non-driving piezoelectric element column to which the pair of measurement electrodes of the wiring member is connected between the driving piezoelectric element columns, and the external electrode of the piezoelectric member is divided into the tip side and the base side. Of the external electrodes of the two non-drive piezoelectric element columns to which the pair of measurement electrodes of the wiring member sandwiching the drive piezoelectric element column is connected, and the pair of measurement electrodes are connected to each other. Non-driving adjacent to all the driving piezoelectric element columns by connecting the electrode part on the tip end side of the external electrode of the driving piezoelectric element column between the two non-driving piezoelectric element columns and the measurement electrode The connection resistance of the piezoelectric element column can be measured. As a result, when the connection resistance of the non-driving piezoelectric element columns increases and a connection failure occurs, it can be determined that a connection failure has occurred in the driving piezoelectric element columns between the non-driving piezoelectric element columns.

つまり、FPCのうねり、異物等により、圧電部材とFPCの電極間距離が局所的に大きくなり、接続部が高抵抗になる接続不良を検出できる。   That is, it is possible to detect a connection failure in which the distance between the electrodes of the piezoelectric member and the FPC is locally increased due to the undulation of the FPC, foreign matter, or the like, and the connection portion has a high resistance.

また、各圧電素子柱の外部電極が上下(先端部側と基部側)に分割され、駆動圧電素子柱を挟む配線部材の一対の測定用電極が接続される2つの非駆動圧電素子柱の外部電極の内の基部側の電極部分と一対の測定用電極とが接続され、2つの非駆動圧電素子柱の間の駆動圧電素子柱の外部電極の先端部側の電極部分と測定用電極とが連結されていることで、圧電部材の外部電極や内部電極をパターニングすることなく、抵抗測定を行なうことができて、低コストで容易に接続不良を検出することができるようになる。   In addition, the external electrodes of each piezoelectric element column are divided into upper and lower sides (tip side and base side), and the outside of the two non-driving piezoelectric element columns to which the pair of measurement electrodes of the wiring member sandwiching the driving piezoelectric element column are connected The electrode portion on the base side of the electrode is connected to the pair of measurement electrodes, and the electrode portion on the distal end side of the external electrode of the drive piezoelectric element column between the two non-drive piezoelectric element columns and the measurement electrode By being connected, resistance measurement can be performed without patterning the external electrode and the internal electrode of the piezoelectric member, and a connection failure can be easily detected at low cost.

なお、本発明に係る液体吐出ヘッドは、ヘッドにインクを供給するカートリッジを一体化した構成のヘッド一体型カートリッジ又はカートリッジ一体型のヘッドとして構成することもできる。   The liquid discharge head according to the present invention can also be configured as a head-integrated cartridge or a cartridge-integrated head in which a cartridge for supplying ink to the head is integrated.

なお、上記各実施形態の液体吐出ヘッドにインクを供給するタンクを一体にしたインクカートリッジを構成することもできる。   Note that an ink cartridge in which a tank for supplying ink to the liquid discharge head of each of the above embodiments is integrated can be configured.

次に、本発明に係る液体吐出ヘッドを備える本発明に係る画像形成装置の一例について図10及び図11を参照して説明する。なお、図10は同装置の機構部の全体構成を説明する概略構成図、図11は同機構部の要部平面説明図である。
この画像形成装置はシリアル型画像形成装置であり、左右の側板221A、221Bに横架したガイド部材である主従のガイドロッド231、232でキャリッジ233を主走査方向に摺動自在に保持し、図示しない主走査モータによってタイミングベルトを介して矢示方向(キャリッジ主走査方向)に移動走査する。
Next, an example of the image forming apparatus according to the present invention including the liquid discharge head according to the present invention will be described with reference to FIGS. FIG. 10 is a schematic configuration diagram for explaining the overall configuration of the mechanism section of the apparatus, and FIG. 11 is a plan view for explaining a main portion of the mechanism section.
This image forming apparatus is a serial type image forming apparatus, and a carriage 233 is slidably held in a main scanning direction by main and sub guide rods 231 and 232 which are guide members horizontally mounted on left and right side plates 221A and 221B. The main scanning motor that does not perform moving scanning in the direction indicated by the arrow (carriage main scanning direction) via the timing belt.

このキャリッジ233には、イエロー(Y)、シアン(C)、マゼンタ(M)、ブラック(K)の各色のインク滴を吐出するための本発明に係る液体吐出ヘッドユニットからなる記録ヘッド234を複数のノズルからなるノズル列を主走査方向と直交する副走査方向に配列し、インク滴吐出方向を下方に向けて装着している。   The carriage 233 includes a plurality of recording heads 234 including the liquid discharge head unit according to the present invention for discharging ink droplets of each color of yellow (Y), cyan (C), magenta (M), and black (K). Nozzle rows consisting of these nozzles are arranged in the sub-scanning direction orthogonal to the main scanning direction, and are mounted with the ink droplet ejection direction facing downward.

記録ヘッド234は、それぞれ2つのノズル列を有する液体吐出ヘッド234a、234bを1つのベース部材に取り付けて構成したもので、一方のヘッド234aの一方のノズル列はブラック(K)の液滴を、他方のノズル列はシアン(C)の液滴を、他方のヘッド234bの一方のノズル列はマゼンタ(M)の液滴を、他方のノズル列はイエロー(Y)の液滴を、それぞれ吐出する。なお、ここでは2ヘッド構成で4色の液滴を吐出する構成としているが、各色毎の液体吐出ヘッドを備えることもできる。   The recording head 234 is configured by attaching liquid ejection heads 234a and 234b each having two nozzle rows to one base member, and one nozzle row of one head 234a has a black (K) droplet. The other nozzle row ejects cyan (C) droplets, the other nozzle row of the other head 234b ejects magenta (M) droplets, and the other nozzle row ejects yellow (Y) droplets. . Note that, here, a two-head configuration is used to eject four color droplets, but a liquid ejection head for each color may be provided.

また、キャリッジ233には、記録ヘッド234のノズル列に対応して各色のインクを供給するためのサブタンク235a、235b(区別しないときは「サブタンク235」という。)を搭載している。このサブタンク235には各色の供給チューブ236を介して、供給ユニット224によって各色のインクカートリッジ210から各色のインクが補充供給される。   The carriage 233 is equipped with sub tanks 235a and 235b (referred to as “sub tank 235” when not distinguished) for supplying ink of each color corresponding to the nozzle rows of the recording head 234. The sub tank 235 is supplied with ink of each color from the ink cartridge 210 of each color by the supply unit 224 via the supply tube 236 of each color.

一方、給紙トレイ202の用紙積載部(圧板)241上に積載した用紙242を給紙するための給紙部として、用紙積載部241から用紙242を1枚ずつ分離給送する半月コロ(給紙コロ)243及び給紙コロ243に対向し、摩擦係数の大きな材質からなる分離パッド244を備え、この分離パッド244は給紙コロ243側に付勢されている。   On the other hand, as a paper feed unit for feeding the paper 242 loaded on the paper stacking unit (pressure plate) 241 of the paper feed tray 202, a half-moon roller (feed) that feeds the paper 242 from the paper stacking unit 241 one by one. A separation pad 244 made of a material having a large coefficient of friction is provided opposite to the sheet roller 243 and the sheet feeding roller 243, and the separation pad 244 is urged toward the sheet feeding roller 243 side.

そして、この給紙部から給紙された用紙242を記録ヘッド234の下方側に送り込むために、用紙242を案内するガイド部材245と、カウンタローラ246と、搬送ガイド部材247と、先端加圧コロ249を有する押さえ部材248とを備えるとともに、給送された用紙242を静電吸着して記録ヘッド234に対向する位置で搬送するための搬送手段である搬送ベルト251を備えている。   In order to feed the sheet 242 fed from the sheet feeding unit to the lower side of the recording head 234, a guide member 245 for guiding the sheet 242, a counter roller 246, a conveyance guide member 247, and a tip pressure roller. And a conveying belt 251 which is a conveying means for electrostatically attracting the fed paper 242 and conveying it at a position facing the recording head 234.

この搬送ベルト251は、無端状ベルトであり、搬送ローラ252とテンションローラ253との間に掛け渡されて、ベルト搬送方向(副走査方向)に周回するように構成している。また、この搬送ベルト251の表面を帯電させるための帯電手段である帯電ローラ256を備えている。この帯電ローラ256は、搬送ベルト251の表層に接触し、搬送ベルト251の回動に従動して回転するように配置されている。この搬送ベルト251は、図示しない副走査モータによってタイミングを介して搬送ローラ252が回転駆動されることによってベルト搬送方向に周回移動する。   The conveyor belt 251 is an endless belt, and is configured to wrap around the conveyor roller 252 and the tension roller 253 so as to circulate in the belt conveyance direction (sub-scanning direction). In addition, a charging roller 256 that is a charging unit for charging the surface of the transport belt 251 is provided. The charging roller 256 is disposed so as to come into contact with the surface layer of the conveyor belt 251 and to rotate following the rotation of the conveyor belt 251. The transport belt 251 rotates in the belt transport direction when the transport roller 252 is rotationally driven through timing by a sub-scanning motor (not shown).

さらに、記録ヘッド234で記録された用紙242を排紙するための排紙部として、搬送ベルト251から用紙242を分離するための分離爪261と、排紙ローラ262及び排紙コロ263とを備え、排紙ローラ262の下方に排紙トレイ203を備えている。   Further, as a paper discharge unit for discharging the paper 242 recorded by the recording head 234, a separation claw 261 for separating the paper 242 from the transport belt 251, a paper discharge roller 262, and a paper discharge roller 263 are provided. A paper discharge tray 203 is provided below the paper discharge roller 262.

また、装置本体の背面部には両面ユニット271が着脱自在に装着されている。この両面ユニット271は搬送ベルト251の逆方向回転で戻される用紙242を取り込んで反転させて再度カウンタローラ246と搬送ベルト251との間に給紙する。また、この両面ユニット271の上面は手差しトレイ272としている。   A double-sided unit 271 is detachably attached to the back surface of the apparatus main body. The duplex unit 271 takes in the paper 242 returned by the reverse rotation of the transport belt 251, reverses it, and feeds it again between the counter roller 246 and the transport belt 251. The upper surface of the duplex unit 271 is a manual feed tray 272.

さらに、キャリッジ233の走査方向一方側の非印字領域には、記録ヘッド234のノズルの状態を維持し、回復するための維持回復機構281を配置している。この維持回復機構281には、記録ヘッド234の各ノズル面をキャピングするための各キャップ部材(以下「キャップ」という。)282a、282b(区別しないときは「キャップ282」という。)と、ノズル面をワイピングするためのブレード部材であるワイパーブレード283と、増粘した記録液を排出するために記録に寄与しない液滴を吐出させる空吐出を行うときの液滴を受ける空吐出受け284などを備えている。   Further, a maintenance / recovery mechanism 281 for maintaining and recovering the nozzle state of the recording head 234 is disposed in a non-printing area on one side in the scanning direction of the carriage 233. The maintenance / recovery mechanism 281 includes cap members (hereinafter referred to as “caps”) 282a and 282b (hereinafter referred to as “caps 282” when not distinguished) for capping each nozzle surface of the recording head 234, and nozzle surfaces. A wiper blade 283 that is a blade member for wiping the ink, and an empty discharge receiver 284 that receives liquid droplets for discharging the liquid droplets that do not contribute to recording in order to discharge the thickened recording liquid. ing.

また、キャリッジ233の走査方向他方側の非印字領域には、記録中などに増粘した記録液を排出するために記録に寄与しない液滴を吐出させる空吐出を行うときの液滴を受ける空吐出受け288を配置し、この空吐出受け288には記録ヘッド234のノズル列方向に沿った開口部289などを備えている。   Further, in the non-printing area on the other side in the scanning direction of the carriage 233, there is an empty space for receiving a liquid droplet when performing an empty discharge for discharging a liquid droplet that does not contribute to the recording in order to discharge the recording liquid thickened during the recording. A discharge receiver 288 is disposed, and the idle discharge receiver 288 is provided with an opening 289 along the nozzle row direction of the recording head 234 and the like.

このように構成したこの画像形成装置においては、給紙トレイ202から用紙242が1枚ずつ分離給紙され、略鉛直上方に給紙された用紙242はガイド245で案内され、搬送ベルト251とカウンタローラ246との間に挟まれて搬送され、更に先端を搬送ガイド237で案内されて先端加圧コロ249で搬送ベルト251に押し付けられ、略90°搬送方向を転換される。   In this image forming apparatus configured as described above, the sheets 242 are separated and fed one by one from the sheet feeding tray 202, and the sheet 242 fed substantially vertically upward is guided by the guide 245, and is conveyed to the conveyor belt 251 and the counter. It is sandwiched between the rollers 246 and conveyed, and further, the leading end is guided by the conveying guide 237 and pressed against the conveying belt 251 by the leading end pressing roller 249, and the conveying direction is changed by approximately 90 °.

このとき、帯電ローラ256に対してプラス出力とマイナス出力とが交互に繰り返すように、つまり交番する電圧が印加され、搬送ベルト251が交番する帯電電圧パターン、すなわち、周回方向である副走査方向に、プラスとマイナスが所定の幅で帯状に交互に帯電されたものとなる。このプラス、マイナス交互に帯電した搬送ベルト251上に用紙242が給送されると、用紙242が搬送ベルト251に吸着され、搬送ベルト251の周回移動によって用紙242が副走査方向に搬送される。   At this time, a positive output and a negative output are alternately applied to the charging roller 256, that is, an alternating voltage is applied, and a charging voltage pattern in which the conveying belt 251 alternates, that is, in the sub-scanning direction that is the circumferential direction. , Plus and minus are alternately charged in a band shape with a predetermined width. When the sheet 242 is fed onto the conveyance belt 251 charged alternately with plus and minus, the sheet 242 is attracted to the conveyance belt 251, and the sheet 242 is conveyed in the sub scanning direction by the circumferential movement of the conveyance belt 251.

そこで、キャリッジ233を移動させながら画像信号に応じて記録ヘッド234を駆動することにより、停止している用紙242にインク滴を吐出して1行分を記録し、用紙242を所定量搬送後、次の行の記録を行う。記録終了信号又は用紙242の後端が記録領域に到達した信号を受けることにより、記録動作を終了して、用紙242を排紙トレイ203に排紙する。   Therefore, by driving the recording head 234 according to the image signal while moving the carriage 233, ink droplets are ejected onto the stopped paper 242 to record one line, and after the paper 242 is conveyed by a predetermined amount, Record the next line. Upon receiving a recording end signal or a signal that the trailing edge of the paper 242 has reached the recording area, the recording operation is finished and the paper 242 is discharged onto the paper discharge tray 203.

このように、この画像形成装置では本発明に係る液体吐出ヘッドを記録ヘッドとして備えているので、ヘッドの長尺化、高密度化を図っても信頼性の高い安定した滴吐出を行なうことができて、高速で、高画質画像を形成することができる。   As described above, since the image forming apparatus includes the liquid discharge head according to the present invention as a recording head, reliable and stable droplet discharge can be performed even if the head is lengthened and densified. And high-quality images can be formed at high speed.

次に、本発明に係る液体吐出ヘッドを備える本発明に係る画像形成装置の他の例について図12を参照して説明する。なお、図12は同装置の機構部全体の概略構成図である。
この画像形成装置は、ライン型画像形成装置であり、装置本体401の内部に画像形成部402等を有し、装置本体401の下方側に多数枚の記録媒体(用紙)403を積載可能な給紙トレイ404を備え、この給紙トレイ404から給紙される用紙403を取り込み、搬送機構405によって用紙403を搬送しながら画像形成部402によって所要の画像を記録した後、装置本体401の側方に装着された排紙トレイ406に用紙403を排紙する。
Next, another example of the image forming apparatus according to the present invention including the liquid ejection head according to the present invention will be described with reference to FIG. FIG. 12 is a schematic configuration diagram of the entire mechanism unit of the apparatus.
This image forming apparatus is a line type image forming apparatus, has an image forming unit 402 and the like inside the apparatus main body 401, and can supply a large number of recording media (sheets) 403 on the lower side of the apparatus main body 401. A paper tray 404 is provided, a sheet 403 fed from the sheet feeding tray 404 is taken in, a required image is recorded by the image forming unit 402 while the sheet 403 is conveyed by the conveying mechanism 405, and then the side of the apparatus main body 401. The paper 403 is discharged to a paper discharge tray 406 attached to the printer.

また、装置本体401に対して着脱可能な両面ユニット407を備え、両面印刷を行うときには、一面(表面)印刷終了後、搬送機構405によって用紙403を逆方向に搬送しながら両面ユニット407内に取り込み、反転させて他面(裏面)を印刷可能面として再度搬送機構405に送り込み、他面(裏面)印刷終了後排紙トレイ406に用紙403を排紙する。   Also, a duplex unit 407 that can be attached to and detached from the apparatus main body 401 is provided, and when performing duplex printing, the sheet 403 is conveyed into the duplex unit 407 while being transported in the reverse direction by the transport mechanism 405 after one-side (front) printing is completed. Then, the other side (back side) is sent back to the transport mechanism 405 as the printable side, and the paper 403 is discharged to the paper discharge tray 406 after the other side (back side) printing is completed.

ここで、画像形成部402は、例えばブラック(K)、シアン(C)、マゼンタ(M)、イエロー(Y)の各色の液滴を吐出する、フルライン型の4個の本発明に係る液体吐出ヘッドで構成した記録ヘッド411k、411c、411m、411y(色を区別しないときには「記録ヘッド411」という。)を備え、各記録ヘッド411は液滴を吐出するノズルを形成したノズル面を下方に向けてヘッドホルダ413に装着している。   Here, the image forming unit 402 is, for example, four full-line liquids according to the present invention that discharge droplets of each color of black (K), cyan (C), magenta (M), and yellow (Y). The recording heads 411k, 411c, 411m, and 411y (which are referred to as “recording heads 411” when the colors are not distinguished) are configured with ejection heads, and each recording head 411 has a nozzle surface on which nozzles for ejecting droplets are formed downward. The head holder 413 is attached.

また、各記録ヘッド411に対応してヘッドの性能を維持回復するための維持回復機構412k、412c、412m、412y(色を区別しないときには「維持回復機構412」という。)を備え、パージ処理、ワイピング処理などのヘッドの性能維持動作時には、記録ヘッド411と維持回復機構412とを相対的に移動させて、記録ヘッド411のノズル面に維持回復機構412を構成するキャッピング部材などを対向させる。   Further, a maintenance / recovery mechanism 412k, 412c, 412m, 412y for maintaining and recovering the performance of the head corresponding to each recording head 411 (referred to as “maintenance / recovery mechanism 412” when colors are not distinguished) is provided, and purge processing, During the head performance maintenance operation such as wiping processing, the recording head 411 and the maintenance / recovery mechanism 412 are relatively moved so that the capping member constituting the maintenance / recovery mechanism 412 faces the nozzle surface of the recording head 411.

なお、ここでは、記録ヘッド411は、用紙搬送方向上流側から、ブランク、シアン、マゼンタ、イエローの順に各色の液滴を吐出する配置としているが、配置及び色数はこれに限るものではない。また、ライン型ヘッドとしては、各色の液滴を吐出する複数のノズル列を所定間隔で設けた1又は複数のヘッドを用いることもできるし、ヘッドとこのヘッドに記録液を供給する記録液カートリッジを一体とすることも別体とすることもできる。   Here, the recording head 411 is arranged to eject droplets of each color in the order of blank, cyan, magenta, and yellow from the upstream side in the paper conveyance direction, but the arrangement and the number of colors are not limited to this. Further, as the line-type head, one or a plurality of heads provided with a plurality of nozzle rows for discharging droplets of each color at predetermined intervals can be used, and a recording liquid cartridge for supplying a recording liquid to the head and the head. Can be integrated or separated.

給紙トレイ404の用紙403は、給紙コロ(半月コロ)421と図示しない分離パッドによって1枚ずつ分離され装置本体401内に給紙され、搬送ガイド部材423のガイド面423aに沿ってレジストローラ425と搬送ベルト433との間に送り込まれ、所定のタイミングでガイド部材426を介して搬送機構405の搬送ベルト433に送り込まれる。   The paper 403 in the paper feed tray 404 is separated one by one by a paper feed roller (half-moon roller) 421 and a separation pad (not shown) and fed into the apparatus main body 401, and is registered along the guide surface 423 a of the transport guide member 423. It is sent between 425 and the conveyor belt 433, and is sent to the conveyor belt 433 of the conveyor mechanism 405 via the guide member 426 at a predetermined timing.

また、搬送ガイド部材423には両面ユニット407から送り出される用紙403を案内するガイド面423bも形成されている。更に、両面印刷時に搬送機構405から戻される用紙403を両面ユニット407に案内するガイド部材427も配置している。   In addition, the conveyance guide member 423 is also formed with a guide surface 423 b for guiding the paper 403 sent out from the duplex unit 407. Further, a guide member 427 for guiding the sheet 403 returned from the transport mechanism 405 to the duplex unit 407 during duplex printing is also provided.

搬送機構405は、駆動ローラである搬送ローラ431と従動ローラ432との間に掛け渡した無端状の搬送ベルト433と、この搬送ベルト433を帯電させるための帯電ローラ434と、画像形成部402に対向する部分で搬送ベルト433の平面性を維持するプラテン部材435と、搬送ベルト433から送り出す用紙403を搬送ローラ431側に押し付ける押さえコロ436と、その他図示しないが、搬送ベルト433に付着した記録液(インク)を除去するためのクリーニング手段である多孔質体などからなるクリーニングローラなどを有している。   The conveyance mechanism 405 includes an endless conveyance belt 433 that is stretched between a conveyance roller 431 that is a driving roller and a driven roller 432, a charging roller 434 that charges the conveyance belt 433, and an image forming unit 402. A platen member 435 that maintains the flatness of the conveyance belt 433 at the opposite portion, a pressing roller 436 that presses the paper 403 fed from the conveyance belt 433 against the conveyance roller 431 side, and other recording liquid that is attached to the conveyance belt 433, although not shown. It has a cleaning roller made of a porous material or the like, which is a cleaning means for removing (ink).

この搬送機構405の下流側には、画像が記録された用紙403を排紙トレイ406に送り出すための排紙ローラ438及び拍車439を備えている。   On the downstream side of the transport mechanism 405, a paper discharge roller 438 and a spur 439 for sending the paper 403 on which an image is recorded to the paper discharge tray 406 are provided.

このように構成した画像形成装置において、搬送ベルト433は矢示方向に周回移動し、高電位の印加電圧が印加される帯電ローラ434と接触することで帯電され、この高電位に帯電した搬送ベルト433上に用紙403が給送されると、用紙403は搬送ベルト433に静電的に吸着される。このようにして、搬送ベルト433に強力に吸着した用紙403は反りや凹凸が校正され、高度に平らな面が形成される。   In the image forming apparatus configured as described above, the conveyance belt 433 moves in the direction indicated by the arrow, and is charged by contact with the charging roller 434 to which a high potential application voltage is applied. When the sheet 403 is fed onto the sheet 433, the sheet 403 is electrostatically attracted to the conveyance belt 433. In this way, the sheet 403 that is strongly adsorbed to the transport belt 433 is calibrated for warpage and unevenness, and forms a highly flat surface.

そして、搬送ベルト433を周回させて用紙403を移動させ、記録ヘッド411から液滴を吐出することで、用紙403上に所要の画像が形成され、画像が記録された用紙403は排紙ローラ438によって排紙トレイ406に排紙される。   Then, the paper 403 is moved around the conveyor belt 433 and droplets are ejected from the recording head 411, whereby a required image is formed on the paper 403, and the paper 403 on which the image has been recorded is the paper discharge roller 438. As a result, the paper is discharged to the paper discharge tray 406.

このように、この画像形成装置においては本発明に係る液体吐出ヘッドからなる記録ヘッドを備えているので、ヘッドの長尺化、高密度化を図っても信頼性の高い安定した滴吐出を行なうことができて、高速で、高画質画像を形成することができる。   As described above, since the image forming apparatus includes the recording head including the liquid discharge head according to the present invention, highly reliable and stable droplet discharge is performed even if the head is lengthened and densified. And high-quality images can be formed at high speed.

なお、上記実施形態では本発明をプリンタ構成の画像形成装置に適用した例で説明したが、これに限るものではなく、例えば、プリンタ/ファックス/コピア複合機などの画像形成装置に適用することができる。また、狭義のインク以外の液体や定着処理液などを用いる画像形成装置にも適用することができる。   In the above embodiment, the present invention has been described with reference to an example in which the present invention is applied to an image forming apparatus having a printer configuration. However, the present invention is not limited to this. For example, the present invention may be applied to an image forming apparatus such as a printer / fax / copier multifunction machine. it can. Further, the present invention can be applied to an image forming apparatus using a liquid other than the narrowly defined ink, a fixing processing liquid, or the like.

1 流路板(流路基板)
2 振動板部材
3 ノズル板
4 ノズル
6 液室
10 共通液室
12 圧電部材
12A 駆動圧電素子柱
12B 非駆動圧電素子柱
12C 測定用非駆動圧電素子柱
13 ベース部材
15 FPC(配線部材)
15A 電極部
23 個別外部電極
24 共通外部電極
25 共通外部電極
31 基材
32A 個別電極配線
32B 共通電極配線
32C 測定用配線
32C1 測定用電極
32C2 分岐電極
32C3 連結電極
100 圧電アクチュエータ
233 キャリッジ
234 記録ヘッド
1 Channel plate (channel substrate)
2 vibration plate member 3 nozzle plate 4 nozzle 6 liquid chamber 10 common liquid chamber 12 piezoelectric member 12A driving piezoelectric element column 12B non-driving piezoelectric element column 12C non-driving piezoelectric element column for measurement 13 base member 15 FPC (wiring member)
15A electrode portion 23 individual external electrode 24 common external electrode 25 common external electrode 31 base material 32A individual electrode wiring 32B common electrode wiring 32C measurement wiring 32C1 measurement electrode 32C2 branch electrode 32C3 connecting electrode 100 piezoelectric actuator 233 carriage 234 recording head

Claims (6)

圧電層と内部電極が交互に積層された複数の圧電素子柱を有する圧電部材と、
前記圧電部材の圧電素子柱に給電する配線部材と、を備え、
前記圧電部材は、駆動圧電素子柱と非駆動圧電素子柱とを有し、
前記圧電部材の外部電極と前記配線部材の配線電極とが接続され、
前記配線部材には、少なくとも一つの非駆動圧電素子柱の外部電極と接続する一対の測定用電極が設けられ、
前記一対の測定用電極間の抵抗値を測定可能な端子を有する
ことを特徴とする圧電アクチュエータ。
A piezoelectric member having a plurality of piezoelectric element columns in which piezoelectric layers and internal electrodes are alternately laminated;
A wiring member that feeds power to the piezoelectric element column of the piezoelectric member,
The piezoelectric member has a driving piezoelectric element column and a non-driving piezoelectric element column,
The external electrode of the piezoelectric member and the wiring electrode of the wiring member are connected,
The wiring member is provided with a pair of measurement electrodes connected to an external electrode of at least one non-driven piezoelectric element column,
A piezoelectric actuator comprising a terminal capable of measuring a resistance value between the pair of measuring electrodes.
前記圧電部材には両端部に共通外部電極が形成された非駆動圧電素子柱が設けられ、
前記配線部材の一対の測定用電極が接続される非駆動圧電素子柱は、前記駆動圧電素子柱と前記共通外部電極が形成された非駆動圧電素子柱との間に配置されている
ことを特徴とする請求項1に記載の圧電アクチュエータ。
The piezoelectric member is provided with a non-driving piezoelectric element column having common external electrodes formed at both ends,
The non-driving piezoelectric element column to which the pair of measurement electrodes of the wiring member is connected is disposed between the driving piezoelectric element column and the non-driving piezoelectric element column on which the common external electrode is formed. The piezoelectric actuator according to claim 1.
前記圧電部材には前記駆動圧電素子柱間に、前記配線部材の一対の測定用電極が接続される非駆動圧電素子柱が配置され、
前記圧電部材の外部電極は先端部側と基部側に分割され、
前記駆動圧電素子柱を挟む前記配線部材の一対の測定用電極が接続される2つの非駆動圧電素子柱の外部電極の内の前記基部側の電極部分と前記一対の測定用電極とが接続され、
前記2つの非駆動圧電素子柱の間の前記駆動圧電素子柱の外部電極の先端部側の電極部分と前記測定用電極とが連結されている
ことを特徴とする請求項1に記載の圧電アクチュエータ。
A non-driving piezoelectric element column to which a pair of measurement electrodes of the wiring member is connected is disposed between the driving piezoelectric element columns on the piezoelectric member,
The external electrode of the piezoelectric member is divided into a distal end side and a base side,
Of the external electrodes of the two non-drive piezoelectric element columns to which the pair of measurement electrodes of the wiring member sandwiching the drive piezoelectric element column is connected, the base side electrode portion and the pair of measurement electrodes are connected. ,
2. The piezoelectric actuator according to claim 1, wherein an electrode portion on a distal end side of an external electrode of the driving piezoelectric element column between the two non-driving piezoelectric element columns is connected to the measurement electrode. .
前記配線部材の測定用電極は前記圧電部材の基部側で分岐していることを特徴とする請求項1ないし3のいずれかに記載の圧電アクチュエータ。   4. The piezoelectric actuator according to claim 1, wherein the measurement electrode of the wiring member is branched on the base side of the piezoelectric member. 請求項1ないし4のいずれかに記載の圧電アクチュエータを備えていることを特徴とする液体吐出ヘッド。   A liquid discharge head comprising the piezoelectric actuator according to claim 1. 請求項5に記載の液体吐出ヘッドを備えていることを特徴とする画像形成装置。   An image forming apparatus comprising the liquid discharge head according to claim 5.
JP2009212522A 2009-09-14 2009-09-14 Piezoelectric actuator, liquid discharge head, and image forming apparatus Expired - Fee Related JP5549162B2 (en)

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