JP2010245498A - Anti-static treated work stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an anti-static treated work stage, and more particularly, a work stage on which a flat work such as a substrate is mounted, in which the work stage can protect the work from static electricity and can be anti-static treated. <P>SOLUTION: In the anti-static treated work stage, a carbon nanotube coating film is coated on a surface to which the substrate of the work stage is mounted. The surface resistance of the carbon nanotube coating film is 105 Ω/sq to 109 Ω/sq. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a work stage that has been subjected to antistatic treatment, and more particularly, a work stage on which a flat work such as a substrate is placed, and the work can be protected from static electricity. It relates to the processed work stage.

  A work stage used in a semiconductor manufacturing apparatus is a substrate on which a wafer substrate is placed, and is usually made of a metal material. In the semiconductor manufacturing apparatus using the work stage, after the handler fixes the wafer substrate and moves it to the work stage, the wafer substrate is put on the work stage by friction between the work stage and the wafer substrate. Static electricity is generated.

  In addition, a work stage used in an FPD (Flat Panel Display) dispenser normally sucks a display substrate by a vacuum method. The work stage in this case is also usually made of a metal material, and the work stage is charged when the display substrate is sucked onto the work stage or when the suction-fixed display substrate is peeled off from the work stage. Generated and charged on the display substrate. In recent years, the amount of charge has increased with the increase in the size of the display substrate, so that the problem of charging due to static electricity has increased.

  A plurality of electronic components such as semiconductor elements are arranged on the wafer substrate and the display substrate. Therefore, if static electricity is generated, the static electricity is applied to the electronic component and transmitted to the internal circuit. This results in fatal damage to the reliability of the electronic component. In addition, there is a problem that particles are attached to the substrate due to static electricity, or the substrate is broken when the substrate is lifted up.

  Conventionally, in order to prevent the static electricity from being charged, an ionizer is provided on the work stage to neutralize the charging potential. However, in this case, if the substrate cannot be lifted up, the ionizer does not reach the ion wind, and even if the lift up is possible, the ion wind does not reach the location where neutralization is required. It is impossible to solve the problem of peeling electrification caused by the static electricity generated between the work stage and the substrate, such as the occurrence of troubles such as electric discharge before arrival.

  In order to solve such a problem, the work stage can be coated with a fluororesin (for example, Teflon (registered trademark) coating) in order to prevent static electricity of the work stage. Since the fluororesin has low adsorption energy with other substances, excellent non-adhesiveness, and a small coefficient of friction, the correlation with the glass substrate is small, and the amount of static electricity generated by peeling is small.

  In this case, since a normal fluorine component has an insulating property, in the Teflon coating, the fluorine component contains a charged substance. That is, the Teflon coating is performed after anodizing the work stage, thereby preventing the work stage from generating static electricity.

  However, the Teflon coating method requires a relatively high manufacturing cost. In particular, in the case of a dispenser, the size of the work stage is increased with an increase in the size of the display substrate, so that high manufacturing costs cannot be avoided.

  Further, since the hardness of fluorine itself is low, the hardness of the coating film made of fluorine inevitably decreases, and scratches are easily generated. For this reason, it is difficult to maintain the flatness of the portion where the scratch has occurred, which becomes a factor in generating particles.

  In addition, since fluorine has an insulating property, a filler such as carbon black or a conductive polymer is added so as to have an antistatic surface resistance. However, in the case of carbon black, it has a spherical shape. Therefore, there is a problem that dust is generated. In the case of a conductive polymer, there is a problem that solvent resistance is weak, an excessive amount of binder must be used, and thin film formation is difficult.

  The present invention minimizes the generation of static electricity on the surface of the stage that meets the substrate, reduces the manufacturing cost, can adjust the surface resistance appropriately, has a low friction coefficient, and has improved wear resistance. The purpose is to provide.

  A work stage subjected to antistatic treatment according to a preferred embodiment of the present invention for accomplishing the above-described problems includes a stage body and a carbon nanotube coating film. Here, the surface resistance of the carbon nanotube coating film is 105 to 109 Ω / sq.

  According to the present invention, the surface resistance of the coating film is reduced by coating the work stage body with a coating film made of carbon nanotubes, which are conductive materials, as a main material, thereby exhibiting an excellent antistatic effect, The reliability of the substrate is improved.

  In addition, since coating is performed using a coating film containing carbon nanotubes instead of fluorine, the cost is reduced.

  In addition, the carbon nanotube coating film has a low friction coefficient and high wear resistance due to the physical properties of the carbon nanotubes themselves, and scratches do not occur or are minute, so that the amount of particles generated is small. .

1 is a perspective view illustrating an example of a paste dispenser including an antistatic-treated work stage according to a preferred embodiment of the present invention. It is sectional drawing which showed the cross section of the upper side of a work stage in FIG. It is sectional drawing which expanded and showed the A section of FIG. It is a modification of FIG. It is sectional drawing which showed the other modification of FIG.

  Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing an example of a paste dispenser as an example to which the work stage subjected to the antistatic treatment of the present invention is applied.

  As shown in FIG. 1, the paste dispenser 1 includes a frame 10, an antistatic work stage 20, a head support 30, and a head unit 40. The work stage 20 subjected to the antistatic treatment is arranged on the upper side of the frame 10. The stage 20 is formed so that the substrate S supplied from one side of the frame 10 can be placed thereon.

  The work stage 20 subjected to the antistatic treatment is fixed to the frame 10 or is slidable in the X-axis and / or Y-axis direction by an actuator.

  The head support 30 is disposed on the upper side of the stage 20. The head support base 30 extends in the X-axis direction, and both ends thereof are supported by the frame 10. The head support 30 can be slid in the Y-axis direction by an actuator that drives the head support 30.

  The head unit 40 is supported by the head support 30 so as to be movable along the X-axis direction. The head unit 40 includes at least one coating head 42 to which a nozzle 44 for discharging paste is attached. The nozzle 44 is connected to a syringe filled with paste.

  2 is a cross-sectional view taken along a line II-II in FIG. As shown in FIG. 2, a carbon nanotube coating film 25 is coated on one surface of the work stage 20.

  The work stage 20 is usually made of a metal material such as aluminum. In this case, the upper surface of the work stage 20 is anodized.

  Anodizing is an artificial oxide coating on the surface of aluminum that has not been surface-treated using an electro-chemical reaction. By the anodizing treatment, surface wear is prevented and there is an effect of preventing corrosion.

  The carbon nanotube coating film 25 is formed on the surface on which the substrate of the work stage 20 is placed, and includes carbon nanotubes.

  Carbon nanotubes (CNTs) are in the form of tubes in which one carbon is bonded to another carbon atom in the shape of a hexagonal honeycomb, and the diameter of the tube is extremely small at the nanometer level. It has characteristics.

  Carbon nanotubes have excellent mechanical properties, electrical selectivity, and excellent field emission properties. When such a carbon nanotube is formed as a thin conductive film on the stage, high conductivity can be obtained, so that an antistatic effect is exhibited.

  Further, since the carbon nanotubes are not spherical but tube-shaped and form a network with each other, there is little possibility of dust and the moisture resistance is excellent.

  The carbon nanotubes can be selected from single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes, bundled carbon nanotubes, and combinations thereof.

  Further, it is possible to select a carbon nanotube whose surface is modified by acid treatment or the like, or a carbon nanotube from which different attributes such as metallicity and semiconductivity are separated.

  The coating liquid containing carbon nanotubes may contain an appropriate dispersant. Specific examples of the dispersant include sodium dodecyl sulfate (SDS), Triton X (Triton X) (Sigma), Tween 20 (Polyoxyethylene Sorbitan Monooleate), and CTAB (Cetyl Trimethyl Ammonium).

  The carbon nanotube coating film 25 can be adjusted to have a sheet resistance of 105Ω / sq to 109Ω / sq. The sheet resistance is an appropriate size for preventing the generation of static electricity on the stage. If the sheet resistance is 109 Ω / sq or more, excellent electrical conductivity cannot be exhibited, and the effect of discharging static electricity on the stage to the outside is small. If the sheet resistance is 105 Ω / sq or less, the electric conductivity of the sheet itself becomes excessively high, which may affect adjacent electronic components.

  The carbon nanotube coating film 25 may contain a binder. The binder may be an acrylic, urethane, polyester, epoxy, polyimide, melamine, conductive polymer, or organic / inorganic hybrid binder. The binder may be a thermosetting resin or a photocurable resin.

  In this case, the carbon nanotubes included in the carbon nanotube coating film 25 may be single-walled, double-walled, or multi-walled carbon nanotubes.

  The carbon nanotube coating layer 25 may have a thickness of 0.1 μm to 100 μm.

  On the other hand, an adhesion promoting layer 23 is formed between the carbon nanotube coating film 25 and the work stage 20. The adhesion promoting layer 23 functions to improve the adhesion between the carbon nanotube coating film 25 and the work stage 20. In this case, the adhesion promoting layer 23 is a single molecule, oligomer, carboxylic acid group, anhydride group or phosphonic acid group that can chemisorb to the aluminum oxide surface. It can be made of a polymer material. The thickness of the adhesion promoting layer 23 may be 1 nm to 1 μm.

  In this case, the binder contained in the carbon nanotube coating film 25 may be a single molecule or a polymer having a bonding force with the adhesion promoting layer 23.

  Therefore, as shown in FIG. 3, after the upper surface of the work stage 20 is anodized 22a, the adhesion promoting layer 23 and the carbon nanotube coating film 25 layer mixed with the binder are laminated in order. Can do.

  A protective layer 26 is formed on the outer surface of the carbon nanotube coating film 25. The protective layer 26 protects the surface of the carbon nanotube coating film 25 from the outside while maintaining the antistatic performance, and further improves the durability and wear resistance of the carbon nanotube coating film 25. In this case, the protective layer 26 may be made of an inorganic material, an organic monomolecule, a polymer compound, or an organic / inorganic hybrid material, and may have a thickness of 0.1 μm to 100 μm.

  In the case of a conventional antistatic coating of a fluorine material, the thickness of the protective layer must be increased because the hardness of fluorine is low. The antistatic effect is lowered by the thickness. However, in the case of the present invention, the carbon nanotube coating film is excellent in abrasion resistance and excellent in bonding strength with the protective layer, so that the thickness can be reduced to the minimum.

  In this case, the protective layer may be made of a ceramic system. This is because the ceramic-based protective layer has high chemical resistance and strong durability against acetone, alcohols and the like.

  On the other hand, as shown in FIG. 4, an inner binder layer 24 may be interposed between the carbon nanotube coating film 25 and the work stage 20. That is, after the inner binder layer 24 is first coated on the upper surface of the working stage 20 that has been anodized, the carbon nanotube coating film 25 is coated on the upper surface of the inner binder layer 24. In this case, an adhesion promoting layer 23 may be interposed between the inner binder layer 24 and the work stage 20.

  The inner binder layer 24 can be applied onto the work stage 20 using bar coating, slit die coating, dip coating, spin coating, spray coating, screen coating, inkjet coating methods, and the like. Further, the carbon nanotube coating film 25 can be applied on the inner binder layer 24 by using bar coating, slit die coating, dip coating, spin coating, spray coating, screen coating, ink jet coating, or the like.

  Also, the adhesion promoting layer 23 can be applied on the work stage 20 using bar coating, slit die coating, dip coating, spin coating, spray coating, screen coating, ink jet coating, or the like.

  In this case, the main material of the inner binder layer 24 is preferably made of an acrylic, urethane, polyester, epoxy, polyimide, melamine, conductive polymer, or organic / inorganic hybrid binder. As an example, the urethane-based main material is coated on the work stage with high adhesive force, and at the same time, the carbon nanotube coating film 25 is coated with high adhesive force. Therefore, the main material greatly improves the adhesive force between the work stage and the carbon nanotube coating film.

  Also in the case of FIG. 4, the protective layer 26 is formed on the outer surface of the carbon nanotube coating film.

  In order to prevent the generation of static electricity, the carbon nanotube coating layer may be grounded. As a result, electricity generated in the work stage does not stay in the carbon nanotube coating film 25, but quickly moves to the ground and is released to the outside. As an example, as illustrated in FIG. 2, the work stage 20 includes a stage base 21 and a plurality of mounting blocks 22 coupled to the stage base 21. In this case, each mounting block 22 has a hollow quadrangular prism shape and is coupled to the upper surface of the stage base 21, whereby the lower surface of the mounting block 22 is in contact with the stage base 21, and the side surface of the mounting block and The upper surface does not contact the stage base 21.

  In this case, the carbon nanotube coating film 25 can be brought into contact with the stage base 21 by forming not only the upper surface of the mounting block 22 but also the lower surface along the side surface thereof. Thereby, the electricity generated from the mounting block 22 can be transmitted to the stage base 21 along the carbon nanotube coating film 25 and grounded.

  As another method for grounding to the ground, as shown in FIG. 5, the carbon nanotube coating film 25 is formed on the upper surface and the side surface of the mounting block 22, and at the same time, the stage base 21 not occupied by the mounting block 22 is used. It can also be formed on the upper surface of.

  On the other hand, although not shown, the ground wire can be extended from the end of the carbon nanotube coating film 25 and brought into contact with the stage base 21 to be grounded.

  One method for coating the carbon nanotube coating film on the working stage in the embodiment of the present invention is as follows. In this case, the coating method will be described with reference to FIG.

First, the stage coating surface of the work stage 20 is anodized. As a result, the Al ₂ O ₃ layer 22a is coated on the upper surface of the work stage.

Thereafter, an adhesive is applied to the upper surface of the Al ₂ O ₃ layer 22 a to form an adhesion promoting layer 23, and an inner binder layer 24 is coated on the outer surface of the adhesion promoting layer 23. In this case, the inner binder layer 24 may be a urethane-based binder.

  Thereafter, a carbon nanotube coating film 25 is coated on the outer surface of the inner binder layer 24.

  As an example of a method for producing the carbon nanotube coating film 25, first, a carbon nanotube, a dispersant and a solvent are mixed to produce a coating solution in which the carbon nanotubes are dispersed. The carbon nanotubes can be selected from single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes, bundled carbon nanotubes, and combinations thereof, but are not necessarily limited thereto.

  Any dispersant can be used as long as it can disperse carbon nanotubes with a solvent. Examples of the solvent include water, ethanol, methanol, isopropanol, 1,2-dichlorobenzene, chloroform, dimethylformamide, acetone and a mixture thereof.

  Thereafter, the coating solution is coated on the inner binder layer and dried to coat the carbon nanotube coating film.

  A variety of known methods can be used as the coating method, and an example thereof is spray coating. The spray coating used in the present invention can use general spray coating equipment and an ultrasonic sprayer. Various types of nozzles used for spray coating can be used, such as one-fluid, two-fluid, and mixing nozzles.

  An apparatus for evaporating the solvent may be included in the spray process of the present invention. For this, a heating plate can be used, and the temperature can be heated on the lower surface, upper surface, lateral surface, etc. of the coating surface for evaporation of the coating solution.

  A protective layer 26 is formed on the outer surface of the carbon nanotube coating film 25. The protective layer 26 can be a polymeric hard coating or a ceramic coating.

  Another method of coating the carbon nanotube coating film on the work stage according to the embodiment of the present invention is as follows. In this case, the case of FIG. 3 will be described as an example.

First, the stage coating surface of the work stage 20 is anodized. Thereby, the Al ₂ O ₃ layer 22a is coated on the upper surface of the work stage.

Thereafter, an adhesive is applied to the Al ₂ O ₃ layer 22 a to form an adhesion promoting layer 23, and a carbon nanotube coating film 25 is coated on the outer surface of the adhesion promoting layer 23. In this case, the carbon nanotube coating film 25 includes a binder, and the binder may be an acrylic binder.

  A protective layer 26 may be coated on the outer surface of the carbon nanotube coating film 25. In this case, the main material of the protective layer may be a hard coating polymer and a ceramic system.

  According to the present invention, the coating film on the entire stage surface including the stage edge portion is made constant by the spray coating, and the stage flatness can be maintained.

  Further, the adhesive force is improved by the binder, and the generation factor of particles can be removed.

  The present invention is applicable to a technical field related to an antistatic-treated work stage.

1 paste dispenser 10 frame 20 work stage 21 stage base 22 mount block 22a Al ₂ O ₃ layer 23 adhesion promoter layer 24 inside the binder layer 25 of carbon nanotubes coated film 26 protective layer 30 head supporting base 40 head unit 42 applying head 44 nozzles

Claims (7)

A work stage on which a wafer substrate or a display substrate is mounted, and at least a surface on which the substrate is mounted is made of a conductive material;
At least one surface of the work stage on which the substrate is placed is coated so as to prevent charging of the substrate and the work stage, and a carbon nanotube coating film containing carbon nanotubes;
An antistatic treated work stage coated with an antistatic material characterized by comprising: The surface resistance of the carbon nanotube coating film is
The work stage subjected to antistatic treatment and coated with the antistatic substance according to claim 1, wherein the work stage is 105 Ω / sq to 109 Ω / sq. The carbon nanotube coating film is
The antistatic material according to claim 1, further comprising an acrylic, urethane, polyester, epoxy, polyimide, melamine, conductive polymer, or organic / inorganic hybrid binder. Work stage with antistatic treatment. An adhesion promoting layer is interposed between the work stage and the carbon nanotube coating film,
The antistatic material according to claim 1, wherein the adhesion promoting layer is made of a monomolecular, oligomer, or polymer material having at least one of a carboxylic acid group, an anhydride group, and a phosphonic acid group. A coated antistatic work stage. A protective layer is formed on the outer surface of the carbon nanotube coating film,
2. The antistatic work stage coated with an antistatic substance according to claim 1, wherein the protective layer is made of an inorganic substance, an organic monomolecule and a polymer compound, or an organic / inorganic hybrid material. The work stage is
6. An antistatic treatment coated with an antistatic substance according to claim 1, wherein the antistatic treatment is a work stage for a dispenser device on which a substrate for dispensing is placed. Work stage. The carbon nanotube coating film is
The work stage subjected to antistatic treatment and coated with an antistatic substance according to claim 6, wherein the work stage is grounded.

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