JP2010141222A - Substrate storage container and lid attaching method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storage container which is capable of reducing a pressing force or suppressing deformation of a lid when closing an aperture of a container body with the lid and is capable of preventing displacement and play of a substrate, and a lid attaching method thereof. <P>SOLUTION: The substrate storage container of which the opened front surface 3 of a container body 1 wherein a semiconductor wafer W is stored is opened and closed by a lid 10, includes: a front retainer 30 which is supported by the lid 10 and can be moved toward and away from the semiconductor wafer W in the container body 1; and a driving mechanism 40 which is incorporated in the lid 10 and is driven on the basis of an operation from the outside to move the front retainer 30 from a retreat position to an advance position of the semiconductor wafer W direction and makes the front retainer 30 hold a front part peripheral edge of the semiconductor wafer W. When the lid 10 is fitted to the front surface part 3 of the container body 1, the front part peripheral edge of the semiconductor wafer W and the front retainer 30 are not brought into contact with each other, so that a repulsive force of the semiconductor wafer W doesn't act upon the lid 10 during fitting. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a substrate storage container for storing, storing, transporting, and transporting a substrate made of a semiconductor wafer or the like and a method of attaching the lid.

  Although not shown, a conventional substrate storage container includes a front open box type container main body for aligning and storing a plurality of semiconductor wafers, and a lid body for opening and closing the opened front portion of the container main body. The lid is mounted and automatically attached and removed by the lid opening / closing device (see Patent Documents 1, 2, 3, 4, and 5).

  The lid has a built-in locking mechanism that locks when fitted to the open front portion of the container body, and a front retainer that holds the front peripheral edge of the semiconductor wafer is mounted on the facing surface facing the semiconductor wafer. Yes. There are various types of locking mechanisms. For example, a rotary plate that is rotated by an operation pin of a lid opening / closing device, a plurality of slide plates that slide up and down as the rotary plate rotates, and each slide A plurality of locking claws that protrude from the lid body and slide into the front portion of the container body as the plate slides are configured.

The front retainer is, for example, a support body mounted on an opposing surface of the lid body facing the semiconductor wafer, a plurality of elastic pieces arranged in the support body, and formed on each elastic piece so that the front peripheral edge of the semiconductor wafer is formed. A holding portion that holds the semiconductor wafer, and regulates positional deviation and backlash of the semiconductor wafer with respect to the front-rear direction.
JP 2003-174081 A JP 2007-142189 A JP 2007-019328 A JP 2005-320028 A JP-A-10-70184

  The conventional substrate storage container is configured as described above, and when the lid is fitted to the front portion of the container body and the front periphery of the semiconductor wafer is held by the front retainer, the repulsive force of the semiconductor wafer is applied to the lid. Therefore, it is necessary to press-fit the lid body into the front portion of the container body and to fit it, or to increase the holding force of the front retainer. As a result, the load on the lid opening / closing device increases, There is a problem that the body opening / closing device goes down the machine. In addition, since a large load acts on the lid, the lid may swell like a bow and cause deformation.

  If the holding force of the front retainer is set to a small value in order to eliminate such problems, the holding force of the semiconductor wafer becomes insufficient, which hinders the holding of the semiconductor wafer, and the vibration / impact associated with the transportation and transportation of the substrate storage container. As a result, a new problem arises that the semiconductor wafer rotates and becomes dirty.

  The present invention has been made in view of the above, and can reduce the pressing force when the opening of the container body is closed by the lid, can suppress the deformation of the lid, and can prevent the displacement and backlash of the substrate. It is an object of the present invention to provide a substrate storage container that can be prevented and a method of attaching the lid.

In the present invention, in order to solve the above-mentioned problem, the opening of the container main body for storing the substrate is opened and closed by a lid,
A retainer provided on the lid and capable of moving forward and backward with respect to the substrate stored in the container body, and driven on the basis of an external operation, the retainer advances from the retracted position to the advanced position in the substrate direction. And a drive mechanism for holding the peripheral portion of the substrate in the advanced retainer.

The locking mechanism includes a locking mechanism that locks the lid fitted to the opening of the container body. The locking mechanism is supported by the lid and is rotated from the outside, and the lid is rotated with the rotation of the rotating body. A plurality of slide bodies that slide inward and outward of the body and a plurality of locking claws that protrude from the lid body and slide into the opening of the container main body as the slide bodies slide are provided.
Further, a restricting member that restricts the retainer from retreating from the advanced position to the retracted position can be included.

The retainer also includes a support that overlaps the opposing wall of the lid facing the substrate, an elastic piece that is supported by the support, and a holding portion that is formed on the elastic piece and holds the peripheral edge of the substrate. The support is provided with a follower penetrating the opposing wall of the lid,
The drive mechanism is provided operatively on the lid, and includes a prime mover that contacts the follower of the retainer and transmits power, and an operated portion that is provided on the prime mover and is operated from the outside of the lid. And good.

The retainer has a frame-shaped support that overlaps the opposing wall of the lid facing the substrate, an elastic piece that is supported in the support, and a holding portion that is formed on the elastic piece and holds the peripheral edge of the substrate. Can be included.
In addition, an elastic piece can be formed on at least one side of the opposing side portions of the frame-shaped support, and one or more holding portions can be formed on the elastic piece.

  Further, the end of the follower of the retainer is formed in a groove shape, the driving body of the drive mechanism is oriented so as to be reciprocable in a direction substantially perpendicular to the substrate, and the driving body is partially bent to end the end of the follower. The retainer can be advanced to the advanced position by forming a cam portion that fits with the portion and moving the moving body forward or backward.

In addition, the driving body of the drive mechanism is formed in a substantially disc shape and is rotatably supported on the opposing wall of the lid, and a cam portion that contacts the follower is three-dimensionally formed on this driving body, By rotating, the retainer can be advanced to the advanced position.
Moreover, it is preferable to interpose a sealing member between the opposing wall of the lid and the follower of the support.

Further, in the present invention, in order to solve the above-described problem, a lid attachment method for closing an opening of a container main body of a substrate storage container according to any one of claims 1 to 6 by a lid,
When closing the opening of the container body containing the substrate with the lid, the retainer is advanced from the retracted position to the advanced position in the substrate direction by operating the drive mechanism of the lid from the outside, and the peripheral edge of the substrate is moved to the advanced retainer. It is characterized by holding.

  Here, the substrate in the claims includes at least φ200, φ300, φ450 mm semiconductor wafer, glass substrate, mask glass, liquid crystal glass, storage disk, and the like. Further, the container body and the lid are not particularly required to be transparent, opaque or translucent. The container body is not limited to the front open box type or the top open box type, and can be provided with fluoroscopic windows for observing the substrate in the vertical and horizontal directions.

  The retainer elastic piece, the holding portion, and the follower may be any one or more. The end of the follower can be formed, for example, in a substantially C-shaped cross section, a substantially U-shaped cross section, a substantially semicircular shape, a substantially semielliptical shape, or the like. Further, the drive mechanism can use various motion direction conversion mechanisms and cam mechanisms such as a link mechanism. The operated portion of the drive mechanism corresponds to a concave portion, a convex portion, various holes, and the like. Furthermore, the restricting member includes at least a concave portion and a convex portion that are fitted to each other by a frictional force, various springs, an elastic member, and the like.

According to the present invention, when closing the opening of the container body with the lid and holding the peripheral edge of the substrate by the retainer, first, if the retainer fits the retracted lid on the opening of the container body, The front part of the container body can be appropriately closed by the lid. At this time, since the peripheral portion of the substrate and the retainer are in a non-contact relationship, the repulsive force of the substrate does not act on the lid, and it is not necessary to push the lid strongly.
Once the container body is closed with the lid, the lid drive mechanism may be operated to drive it. Then, based on the drive of the drive mechanism, the retainer of the lid body advances from the retracted position to the advance position in the substrate direction, and the retainer approaches and holds the peripheral edge of the substrate.

ADVANTAGE OF THE INVENTION According to this invention, there exists an effect that the pressing force at the time of closing the opening part of a container main body with a cover body can be reduced, or a deformation | transformation of a cover body can be suppressed. Further, it is possible to prevent the substrate of the container body from being displaced due to vibration / impact applied to the substrate storage container and to prevent rattling.
Further, if a restricting member that restricts the retainer from retreating from the advance position to the retreat position is used, it is possible to prevent the retainer from being carelessly separated from the substrate and prevent damage to the substrate.

  Also, if the end of the retainer follower is formed in a groove shape, the end of the follower can be fitted from only one direction, preventing errors in assembly of the lid, retainer, and drive mechanism. Can do. In addition, the driving body of the drive mechanism is directed so as to be reciprocally movable in a direction substantially perpendicular to the substrate, and the driving body is partially bent to form a cam portion that fits with the end of the follower. If the retainer is advanced to the advanced position by moving forward or backward, a complicated motion can be transmitted to the retainer with a relatively simple configuration, and the retainer can be advanced and retracted.

In addition, the driving body of the drive mechanism is formed in a substantially disc shape and is rotatably supported on the opposing wall of the lid, and a cam portion that contacts the follower is three-dimensionally formed on this driving body, If the retainer is advanced to the advanced position by rotating, it is possible to transmit a complicated motion to the retainer with a relatively simple configuration.
Furthermore, if a seal member is interposed between the facing wall of the lid and the follower of the support, it is possible to prevent dust generation / diffusion and contamination of the substrate accompanying the forward / backward movement of the retainer.

  Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to the drawings. The substrate storage container in this embodiment stores a plurality of semiconductor wafers W as shown in FIGS. A pair of left and right front retainers that are open and close with respect to the semiconductor wafer W of the container body 1 supported by the lid body 10, which are opened and closed by a detachable lid body 10. 30 and the lid 10 are driven based on an external operation to advance each front retainer 30 from the retracted position as the reference position to the advanced position in the direction of the semiconductor wafer W, and hold the semiconductor wafer W on the front retainer 30. And a plurality of regulating members 60 that regulate the position of each front retainer 30.

  As shown in FIGS. 2, 6, and 7, the semiconductor wafer W is made of, for example, a φ300 mm thin and round silicon wafer, and a notch for alignment and identification (not shown) is notched in a semicircular plane at the periphery. The 25 or 26 sheets are stored in the container body 1 in an aligned manner.

  The container body 1 and the lid body 10 are each injection-molded with a molding material containing a predetermined resin. Examples of the predetermined resin of the molding material include polycarbonate, polyether ether ketone, polyether imide, and cyclic olefin resin, which are excellent in mechanical properties and heat resistance. Carbon, carbon fiber, metal fiber, carbon nanotube, conductive polymer, antistatic agent, flame retardant or the like is selectively added to the predetermined resin as necessary.

  As shown in FIGS. 1 and 2, the container body 1 is formed in, for example, a transparent front open box type, and a pair of left and right teeth 2 that support the semiconductor wafer W are formed at a predetermined pitch in the vertical direction on both sides inside. They are arranged side by side and mounted on a semiconductor processing device or a gas replacement device in a state where the horizontally elongated front portion 3 is oriented in the horizontal and horizontal directions, or cleaned with a cleaning liquid in a cleaning tank. The container body 1 is formed so that each tooth 2 is bent in a substantially square shape or semicircular arc shape, and functions to support the semiconductor wafer W horizontally.

  The bottom plate of the container body 1 is provided with cylindrical filter bosses in the vicinity of the four corners thereof, and a plurality of filter bosses are connected to the inside and outside of the container body 1 through an air supply filter and an exhaust filter. Are detachably fitted through O-rings. A plurality of elongate height adjustment plates are arranged in parallel at a predetermined pitch on both sides of the front portion and the center of the rear portion of the bottom plate, and a substrate storage container, specifically, a container body 1 is placed on the plurality of height adjustment plates. Positioning tools 4 for positioning are respectively screwed through fastening screws or the like.

  A plurality of air supply filters, exhaust filters, and a bottom plate 5 for exposing the positioning tool 4 are screwed horizontally to the bottom plate of the container body 1 via fastening screws. The bottom plate 5 is formed in a similar shape that is slightly smaller than the bottom plate, for example, and has a peripheral edge standing and reinforced, and conveyor conveyor rails are selectively formed on the left and right sides. A plurality of identification holes are formed in the rear portion of the bottom plate 5, and a detachable information identification pad is selectively inserted into the plurality of identification holes, so that the type of substrate storage container, the number of semiconductor wafers W, and the like can be determined. It is identified by a semiconductor processing apparatus.

  The top plate 6 of the container body 1 is screwed horizontally through a fastening screw with a transfer top flange 6 held by a factory ceiling transfer mechanism, and a transparent peek is provided at the center of the back wall of the container body 1. The window is formed in a vertically long shape by a two-color molding method or the like, and the inside of the container main body 1 is visually observed and grasped from the outside by this viewing window.

  On the surfaces of both side walls of the container body 1, gripping grips 7 capable of interfering with fingers and the like are mounted in addition to reinforcement and deformation prevention. Further, the front portion 3 of the container body 1 has a rim flange 8 that protrudes outward at the periphery, and a pair of left and right locking holes 9 are formed on the inner peripheral surface of the rim flange 8. The detachable lid 10 is fitted by the lid opening / closing device.

  As shown in FIGS. 1 to 3, the lid body 10 includes, for example, a horizontally long casing 11 that is detachably fitted in an open front portion 3 of the container body 1, and an open surface (front face) of the casing 11. ) And a locking mechanism 18 interposed between the housing 11 and the surface plate 15. The casing 11 is basically formed in a shallow dish with a substantially dish-shaped cross section, and through holes for the locking mechanism 18 are drilled in the upper and lower sides of the peripheral wall. Opposite the blind hole 9.

  As shown in FIG. 5, a plurality of communication holes 13 for the front retainer 30 are perforated on the facing wall 12 facing the semiconductor wafer W of the housing 11, and a frame-like fitting is provided on the peripheral surface of the facing wall 12. A groove is formed, and in this fitting groove, a lip type gasket 14 that is pressed into the front portion 3 of the container body 1 is tightly fitted. The gasket 14 is formed into a frame shape that can be elastically deformed by using, for example, fluorine rubber, silicone rubber, various thermoplastic elastomers, etc., which are excellent in heat resistance and weather resistance, as a molding material. The protruding piece is pressed into the front portion 3 of the container body 1 while being bent, and functions to ensure airtightness.

  The surface plate 15 is formed in a horizontally long flat plate so as to correspond to the opened surface of the housing 11, and a plurality of mounting holes are drilled in the left and right sides together with the operation port 16 for the locking mechanism 18, respectively. The fastening screws penetrating through the plurality of mounting holes are screwed into the screw bosses of the housing 11, thereby being positioned and fixed on the surface of the housing 11. A plurality of operation holes 17 for the drive mechanism 40 are respectively drilled in the left and right side portions of the surface plate 15, and drive mechanism operation pins 70 of the lid opening / closing device are inserted into the operation holes 17 from the outside. (See FIGS. 5 to 7).

  Although the locking mechanism 18 is not shown in detail, for example, a pair of left and right rotations that are pivotally supported by the operation pin of the lid opening / closing device that is pivotally supported by the opposing wall 12 of the housing 11 and penetrates the operation port 16 of the surface plate 15. A plate, a plurality of slide plates that slide in the up-and-down direction as each rotary plate rotates, and a protrusion that can project from the peripheral wall of the housing 11 and slide into the locking hole 9 of the container body 1 as each slide plate slides. And a plurality of locking claws 19.

  As shown in FIGS. 3, 5 to 8, each front retainer 30 includes, for example, a pair of left and right vertically long support bodies 31 that are supported so as to be able to come into contact with and separate from the facing surface of the facing wall 12 of the lid body 10. A plurality of elastic pieces 34 laid side by side in the vertical direction between the supports 31, and a holding portion 35 that is formed on each elastic piece 34 and holds the front periphery of the semiconductor wafer W. It functions to regulate misalignment and rattling with respect to. The front retainer 30 is formed of, for example, a thermoplastic elastomer such as polyolefin, polyester, or polystyrene, or a thermoplastic resin such as polybutylene terephthalate, polyether ether ketone, or polypropylene.

  A plurality of followers 32 are formed in the pair of support bodies 31 so as to project through the communication holes 13 of the facing wall 12 of the lid body 10 and directed toward the surface plate 15. The portion is bulged and formed in a groove shape having a substantially U-shaped cross section, and a seal member 33 is interposed between each follower 32 and the facing wall 12 of the lid 10. The seal member 33 is formed in, for example, a telescopic hollow frustoconical shape or bellows penetrating the follower 32, covers the communication hole 13 of the lid 10, and follows the forward and backward movement of the front retainer 30. It functions to prevent the diffusion of particles and the contamination of the semiconductor wafer W accompanying the forward and backward movement of the front retainer 30.

  Each elastic piece 34 is, for example, bent in a substantially dish-shaped cross section between a pair of supports 31 and horizontally installed, and a holding portion 35 is integrally formed at the center approaching the semiconductor wafer W. The notch is a holding groove 36 having a substantially V-shaped cross section that is held across the front periphery of the semiconductor wafer W.

  As shown in FIGS. 2 to 7, the drive mechanism 40 is operatively provided on the facing wall 12 of the housing 11, and slidably contacts the plurality of followers 32 of each front retainer 30 to periodically transmit power. A pair of left and right prime movers 41 and an operated portion 47 provided on the pair of prime movers 41 and operated from the outside of the surface plate 15 are configured.

  Each of the prime movers 41 is wider than the front retainer 30 and is indirectly positioned on the left and right sides thereof, and a pair of left and right oriented to reciprocate in the vertical direction (alignment direction of the plurality of semiconductor wafers W) perpendicular to the semiconductor wafer W. The plurality of connecting plates 46 are installed horizontally with a space between the pair of columns 42.

  Each column 42 is basically oriented linearly in the vertical direction of the lid body 10, and long holes 43 are drilled at both upper and lower ends, respectively. 44 is screwed into the drive mechanism boss 20 protruding from the opposing wall 12 of the housing 11, thereby being supported by the opposing wall 12 of the housing 11. As the fastener 44, a small-diameter screw or pin is used.

  The column 42 is partially bent in the thickness direction of the lid body 10, in other words, partially bent in a substantially step shape, and a plurality of cam portions 45 that are slidably fitted to the end portion of the follower 32 are spaced apart from each other. The inclined cam portion 45 moves forward or backward as a linear motion cam, whereby the front retainer 30 is advanced from the retracted position to the advanced position, in other words, toward the back wall of the container body 1.

  In the center of each connecting plate 46, a recess or a hole is provided opposite to the operation hole 17 of the surface plate 15. By operating the operation pin 70, the drive mechanism 40 is driven in the vertical direction, and the front retainer 30 is moved back and forth horizontally.

  As shown in FIG. 9, each regulating member 60 is formed so as to protrude from the recess 61 cut out at the end face of the connecting plate of each prime mover 41, and the housing 11 or the surface plate 15 of the lid body 10. The front retainer includes a projecting portion 62 that meshes with each other, and a biasing spring 63 that is stretched between the casing 11 or the surface plate 15 and the connecting plate 46 of each prime mover 41, and positioning and fixing the drive mechanism 40. 30 is restricted from retreating from the advance position to the retreat position. The biasing spring 63 is not particularly limited. For example, a coil spring or a leaf spring that biases the front retainer 30 to the advanced position is used.

In the above configuration, when the lid 10 is fitted to the opened front portion 3 of the container main body 1 and the front peripheral edge of the semiconductor wafer W is held by the front retainer 30, first, the opened front portion of the container main body 1 is used. 3, the front part 3 of the container body 1 can be easily and appropriately closed by the lid 10 when the lid 10 having the front retainer 30 in the retracted position is fitted to the lid 3 by the lid opening / closing device.
At this time, since the front peripheral edge of each semiconductor wafer W and the holding portion 35 of the front retainer 30 are not in contact with each other, it is not necessary to press-fit the lid 10 strongly.

  When the front surface portion 3 of the container body 1 is closed with the lid body 10, the drive mechanism operation pin 70 of the lid body opening / closing device penetrates the operation hole 17 of the surface plate 15 and interferes with the operated portion 47 of the drive mechanism 40 ( 6) and lowers the prime mover 41 of the drive mechanism 40.

  Then, as the pillar 42 of the prime mover 41 descends, the follower 32 fitted to the inclined cam portion 45 advances from the direction of the surface plate 15 of the lid 10 toward the facing wall 12 of the housing 11 and the front retainer. 30 advances from the retracted position to the advanced position in the direction of the semiconductor wafer W, the concave portion 61 and the convex portion 62 of the regulating member 60 mesh with each other to position the front retainer 30, and the holding portion 35 of the front retainer 30 is a semiconductor. The wafer W is held close to the front periphery (see FIG. 7).

  Note that the locking mechanism 18 of the lid 10 is locked by the lid opening / closing device before the front retainer 30 advances after the lid 10 is fitted to the open front portion 3 of the container body 1. When the locking mechanism 18 of the lid body 10 is locked, the front retainer 30 advances to the advance position, and the holding part 35 holds the front peripheral edge of the semiconductor wafer W.

When removing the lid 10 from the front part 3 of the container body 1, first, the drive mechanism operation pin 70 of the lid opening / closing device loosely penetrates the operation hole 17 of the surface plate 15 and the operated part of the drive mechanism 40 is operated. 47, and moves up to raise the prime mover 41 of the drive mechanism 40.
Then, as the column 42 is raised, the follower 32 fitted to the cam portion 45 is retracted from the advanced position to the retracted position, and the front retainer 30 is retracted from the advanced position to the retracted position. 35 is away from the front edge of the semiconductor wafer W.

When the holding portion 35 of the front retainer 30 is separated from the front peripheral edge of the semiconductor wafer W, the front surface of the container body 1 can be obtained by adsorbing and removing the lid body 10 fitted to the front surface portion 3 of the container body 1 by the lid body opening / closing device. Part 3 can be opened. Since the lid 10 is removed after the front retainer 30 is separated from the semiconductor wafer W, misalignment of the semiconductor wafer W accompanying movement of the lid 10 can be prevented, and generation of particles due to rubbing can be reduced.
The locking mechanism 18 of the lid 10 is unlocked by the lid opening / closing device immediately before or after the holding portion 35 of the front retainer 30 is separated from the front edge of the semiconductor wafer W.

  According to the above configuration, when the lid 10 is fitted to the front portion 3 of the container body 1, the front peripheral edge of the semiconductor wafer W and the front retainer 30 do not come into contact with each other. The repulsive force of W does not act. Therefore, there is no need to press-fit the lid 10 into the front portion 3 of the container main body 1 or to increase the holding force of the front retainer 30, and the load on the lid opening / closing device is suppressed. It is possible to prevent the switchgear from being machine down.

  Further, since the front peripheral edge of the semiconductor wafer W and the front retainer 30 do not come into contact with each other when the lid 10 is fitted, it is possible to prevent a large load from acting on the lid 10, so that the lid 10 becomes a bow. It is possible to effectively eliminate the possibility of deformation. Further, since it is not necessary to set the holding force of the front retainer 30 to be small, the holding of the semiconductor wafer W is hindered, or the semiconductor wafer W rotates and becomes dirty due to vibrations / impacts caused by transport and transportation of the substrate storage container. Can be effectively prevented.

  Furthermore, since the end portion of the follower 32 is formed in a groove shape, the end portion of the follower 32 is fitted only from one direction, for example, only from the direction of the facing wall 12 of the lid 10. (See FIG. 8). Therefore, the surface plate 15 can be mounted for the first time after the front retainer 30 and the drive mechanism 40 are disposed on the casing 11 of the lid body 10, and it is highly expected that an error in assembling work will be prevented.

  Next, FIGS. 10 to 13 show a second embodiment of the present invention. In this case, the extension 37 is extended from the end portion of the follower 32, and each prime mover 41 of the drive mechanism 40 is moved. Further, the front retainer 30 is formed on an elongated vertical plate 48 that faces the front retainer 12 through the facing wall 12.

  Each vertical plate 48 is provided with a concave portion or a hole facing the operation hole 17 of the surface plate 15 at the center thereof to be an operated portion 47, and is positioned between a pair of support bodies 31 of the front retainer 30. Opposite the elastic piece 34. In addition to the long hole 43 and the plurality of cam portions 45, the vertical plate 48 has a long hole 43A penetrating through the extension 37 of the follower 32, and the extension 37 penetrating through the long hole 43A. The fastener 44 for preventing the drop-off is screwed into. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effect as that of the above embodiment can be expected. In addition, the front retainer 30 and the drive mechanism 40 can be diversified, or the plurality of connecting plates 46 and the like can be omitted. It is clear that simplification of the configuration can be expected.

  Next, FIGS. 14 to 18 show a third embodiment of the present invention. In this case, the end portion of the follower 32 of the front retainer 30 is formed in a hemispherical shape instead of a groove shape. A plurality of prime movers 41 of the drive mechanism 40 are formed to form each prime mover 41 in a disc, and this prime mover 41 is pivotally supported on the opposing wall 12 of the lid 10 via a cylindrical boss 49 so as to be A cam portion 45A slidably in contact with the end of the follower 32 is three-dimensionally inclined on the facing surface of the moving body 41 facing the lid facing wall 12, and the driving body 41 is rotated in a predetermined direction so that the front retainer is rotated. 30 is advanced from the retreat position to the advance position.

  As shown in FIG. 18, the prime mover 41 is formed in a substantially hat-shaped cross section, and the driving mechanism operation is such that the central portion recessed in the direction of the facing wall 12 loosely penetrates the operation hole 17 of the surface plate 15 as the operated portion 47. The pin 70 is rotated. A biasing spring such as a torsion spring that biases the front retainer 30 to the advanced position is fitted between the central portion of the prime mover 41 and the cylindrical boss 49 of the opposing wall 12 as necessary.

A holding surface 50 for selectively holding the follower 32 in a fixed position is formed in a recessed manner on the contact surface of the cam portion 45A that is in sliding contact with the follower 32. In addition, a plurality of convex portions 62 of the regulating member 60 are formed on the periphery of the prime mover 41, and the concave portions 61 of the regulating member 60 that mesh with the convex portions 62 are formed on the casing 11 or the surface plate 15 of the lid body 10. A plurality are formed.
A plurality of protrusions 22 are selectively formed on the surface plate 15 of the lid 10 so as to face each of the prime movers 41 with a slight gap, and the plurality of projections 22 are cylindrical bosses of the prime mover 41. It functions to regulate dropout and rattling from 49, and to regulate the rotation angle of the prime mover 41.

In the above configuration, when the lid 10 is fitted to the opened front portion 3 of the container main body 1 and the front peripheral edge of the semiconductor wafer W is held by the front retainer 30, first, the opened front portion of the container main body 1 is used. 3, the front part 3 of the container body 1 can be easily and appropriately closed by the lid 10 when the lid 10 having the front retainer 30 in the retracted position is fitted to the lid 3 by the lid opening / closing device.
Also at this time, since the front peripheral edge of each semiconductor wafer W and the holding portion 35 of the front retainer 30 are not in contact with each other, it is not necessary to press-fit the lid 10 strongly (see FIGS. 14 and 15).

  When the front part 3 of the container body 1 is closed by the lid 10 and the locking mechanism 18 of the lid 10 is locked by the lid opening / closing device, the drive mechanism operation pins 70 of the lid opening / closing device are attached to the surface plate 15. It penetrates the operation hole 17 and is inserted into the operated portion 47 of the drive mechanism 40, and rotates in one direction to rotate the prime mover 41 of the drive mechanism 40 in the same direction.

  Then, as the prime mover 41 rotates, the follower 32 slidably in contact with the cam portion 45A advances from the direction of the surface plate 15 of the lid 10 toward the facing wall 12 of the casing 11, and the front retainer 30 moves to the semiconductor wafer W. The front retainer 30 is positioned by engaging the concave portion 61 and the convex portion 62 of the restricting member 60, and the holding portion 35 of the front retainer 30 holds the front peripheral edge of the semiconductor wafer W. (Refer FIG. 16, FIG. 17).

When removing the lid 10 from the front part 3 of the container body 1, first, the drive mechanism operation pin 70 of the lid opening / closing device loosely penetrates the operation hole 17 of the surface plate 15 and the operated part of the drive mechanism 40 is operated. It is inserted into 47 and rotated in the other direction to rotate the prime mover 41 of the drive mechanism 40 in the same direction.
Then, as the prime mover 41 rotates, the follower 32 slidably contacting the cam portion 45A moves back to the retracted position, and the front retainer 30 retracts to the retracted position, and the holding portion 35 of the front retainer 30 moves to the semiconductor wafer W. It will be separated from the front periphery of.

When the holding portion 35 of the front retainer 30 is separated from the front peripheral edge of the semiconductor wafer W, the locking mechanism 18 of the lid 10 is unlocked by the lid opening / closing device, and then fitted to the front portion 3 of the container body 1. If the lid 10 is removed by the lid opening / closing device, the front portion 3 of the container body 1 can be opened. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.
In this embodiment, it is possible to expect the same effect as the above embodiment, and it is obvious that the configuration of the drive mechanism 40 can be diversified by changing the type of cam from a linear cam to a slope cam. It is.

  Note that a rear retainer for holding the rear periphery of the semiconductor wafer W may be provided on the back wall of the container body 1 of the above embodiment. Moreover, in the said embodiment, although the teeth 2 were bent and formed in the plane substantially square shape or the semicircular arc shape, it is not limited to this at all, For example, the teeth 2 are divided into three parts, a front part, a center part, and a rear part etc. Alternatively, it may be divided into a plurality of parts. Further, the pair of support bodies 31 of the front retainer 30 may be formed in a frame shape.

  Further, a long hole 43A penetrating through the extension 37 of the follower 32 is drilled in the surface plate 15 of the lid 10, and a fastener 44 for preventing dropping is screwed into the extension 37 passing through the long hole 43A. Alternatively, the extension 37 may be used as the operated portion 47. Furthermore, an urging spring 63 that urges the front retainer 30 to the advanced position can be stretched between the peripheral edge of the disk-shaped driving body 41 and the lid body 10 as necessary.

It is an exploded perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is a section explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is explanatory drawing which shows typically the cover body, front retainer, and drive mechanism in embodiment of the substrate storage container which concerns on this invention. It is explanatory drawing which shows typically the drive mechanism in embodiment of the substrate storage container which concerns on this invention. It is a section explanatory view showing typically a lid, a front retainer, and a drive mechanism in an embodiment of a substrate storage container concerning the present invention. It is a section explanatory view showing typically a front retainer of a retreat position in an embodiment of a substrate storage container and a lid attachment method concerning the present invention. It is a section explanatory view showing typically a front retainer of an advance position in an embodiment of a substrate storage container and a lid attachment method concerning the present invention. It is explanatory drawing which shows typically the relationship between the follower of a front retainer and drive mechanism in embodiment of the substrate storage container which concerns on this invention. It is explanatory drawing which shows typically the drive mechanism and the control member in embodiment of the substrate storage container which concerns on this invention. It is explanatory drawing which shows typically the cover body, front retainer, and drive mechanism in 2nd Embodiment of the substrate storage container which concerns on this invention. It is a section explanatory view showing typically a 2nd embodiment of a substrate storage container concerning the present invention. It is explanatory drawing which shows typically the surface plate of the cover body in 2nd Embodiment of the substrate storage container which concerns on this invention. It is explanatory drawing which shows typically the relationship between the follower of a front retainer and drive mechanism in 2nd Embodiment of the substrate storage container which concerns on this invention. It is sectional explanatory drawing which shows typically a drive mechanism in case the front retainer in the 3rd Embodiment of the substrate storage container which concerns on this invention exists in a retracted position. It is sectional explanatory drawing which shows typically the front retainer of the retracted position in 3rd Embodiment of the substrate storage container which concerns on this invention. It is sectional explanatory drawing which shows typically a drive mechanism in case the front retainer in 3rd Embodiment of the substrate storage container which concerns on this invention exists in an advance position. It is sectional explanatory drawing which shows typically the front retainer of the advance position in 3rd Embodiment of the substrate storage container which concerns on this invention. It is sectional explanatory drawing which shows typically the relationship between the follower of a front retainer and drive mechanism in 3rd Embodiment of the substrate storage container which concerns on this invention.

Explanation of symbols

1 Container body 3 Front (opening)
DESCRIPTION OF SYMBOLS 10 Cover body 11 Housing | casing 12 Opposite wall 13 Communication hole 15 Surface plate 17 Operation hole 18 Locking mechanism 30 Front retainer (retainer)
31 Support body 33 Seal member 34 Elastic piece 35 Holding part 36 Holding groove 37 Extender 40 Drive mechanism 41 Driving body 42 Pillar 45 Cam part 45A Cam part 46 Connection plate 47 Operated part 48 Vertical plate 60 Restriction member 61 Concave part 62 Convex part 63 Biasing spring 70 Driving mechanism operating pin W Semiconductor wafer (substrate)

Claims (7)

  A substrate storage container that opens and closes an opening of a container body that stores a substrate with a lid, and is provided on the lid, and is provided on the lid and a retainer that can move forward and backward with respect to the substrate stored in the container body. And a drive mechanism that drives based on an external operation to advance the retainer from the retracted position to the advanced position in the substrate direction, and to hold the peripheral edge of the substrate by the advanced retainer. container.   2. The substrate storage container according to claim 1, further comprising a restricting member for restricting the retainer from retreating from the advanced position to the retracted position. The retainer includes a support that overlaps the opposing wall of the lid facing the substrate, an elastic piece that is supported by the support, and a holding portion that is formed on the elastic piece and holds the peripheral edge of the substrate. The body is provided with a follower penetrating the opposing wall of the lid,
The drive mechanism is provided operatively on the lid, and includes a prime mover that contacts the follower of the retainer and transmits power, and an operated part that is provided on the prime mover and is operated from the outside of the lid. The substrate storage container according to claim 1 or 2.   The end of the retainer follower is formed in a groove shape, and the driving body of the drive mechanism is directed so as to be reciprocally movable in a direction substantially perpendicular to the substrate, and the driving body is partially bent to form the end of the follower. 4. The substrate storage container according to claim 3, wherein a cam portion to be fitted is formed, and the retainer is advanced to the advanced position by moving the moving body forward or backward.   The driving body of the drive mechanism is formed in a substantially disc shape and is rotatably supported on the opposing wall of the lid, and the driving body is three-dimensionally formed on this driving body to contact the follower, and the driving body is rotated. 4. The substrate storage container according to claim 3, wherein the retainer is advanced to the advanced position.   6. The substrate storage container according to claim 3, wherein a sealing member is interposed between the facing wall of the lid and the follower of the support. A method for attaching a lid of a substrate storage container, wherein the opening of the container main body of the substrate storage container according to any one of claims 1 to 6 is closed by a lid.
When closing the opening of the container body containing the substrate with the lid, the retainer is advanced from the retracted position to the advanced position in the substrate direction by operating the drive mechanism of the lid from the outside, and the peripheral edge of the substrate is moved to the advanced retainer. A method for attaching a lid of a substrate storage container, comprising: holding a substrate.

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