JP2010013710A - Heat-treatment apparatus, heat-treatment method, and compound processing machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat-treatment apparatus, a heat-treatment method and a compound processing machine with which the cooling for processing of a work-piece and the heat-treatment is performed and the separation of coolant can be obtained. <P>SOLUTION: The heat-treatment apparatus is composed of: a processing part 900 which is almost constituted of a chuck part 106 for rotation-driving the work-piece W, a main shaft 105 and a sealing part 107; and a cooling part which is almost constituted of a cooling capsule 800 which the coolant 990 is filled up in the whole inner part, a thermometer 810 in the capsule, a coolant supplying part 820, a drainage piping 830, a coolant pump 840, a coolant temperature control part 850, a stirring fan 860 and a coolant recovering tank 910. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a heat treatment apparatus, a heat treatment method, and a combined processing machine, and more particularly, to a heat treatment apparatus, a heat treatment method, and a combined processing machine using a laser light source.

  Heat treatment such as quenching is performed for the purpose of improving wear resistance and strength of metal parts used in automobiles and ships. The heat treatment of the metal part is performed by heating to a specific temperature based on the material, shape, etc. of the workpiece, and cooling after the heating. There are various heating tools such as laser light and high-frequency heating, but a quenching device with a high-frequency induction heating unit equipped with a heating coil and a cooling liquid injection unit that cools the work heating unit by injecting cooling liquid is proposed. (For example, Patent Document 1).

  This quenching apparatus is a high-frequency quenching apparatus that includes a high-frequency induction heating unit that heats a workpiece by flowing a high-frequency current through a heating coil, and a cooling-liquid quenching unit that cools the heated workpiece by injecting coolant. Shielding means is provided to shield the splash of coolant that is scattered on the medium or heated workpiece. This is because, as a result of temperature drop and gradual cooling due to scattering of the coolant, it becomes more difficult to perform induction hardening as the amount of carbon contained in the steel material decreases.

  According to this quenching apparatus, since the shielding means is a shielding air means having a compressed air source and a nozzle for ejecting compressed air, it is possible to positively suppress the influence on the quenching due to the splashing of the cooling liquid. It is said that the injection unit can be sufficiently close to the high frequency induction heating unit, the high frequency induction heating and the subsequent cooling can be completed in a short time, and the time for the entire induction hardening can be greatly shortened.

However, the quenching apparatus disclosed in Patent Document 1 cools the work by injecting the coolant into the work, but cooling the work by immersing the whole work in the coolant has a higher quenching effect and is suitable for the quenching process. ing. When cooling with coolant for workpiece processing (heating, machining) and quenching with a heat treatment device or multi-tasking machine, etc., separation of coolant and heat treatment coolant from the coolant supplied to the processing location during processing Is a problem. This is because the target temperatures are different and cannot be used in common.
JP 2001-32017 A

  Accordingly, an object of the present invention is to provide a heat treatment apparatus, a heat treatment method, and a multi-task machine capable of performing cooling for workpiece processing and heat treatment, and capable of separating the respective coolants.

[1] In order to achieve the above object, the present invention inserts the processing part having a heating tool for heating the work with a predetermined power while rotating the work, and the work heated in the processing part. A cooling capsule to be stored, a cooling liquid supply unit that fills the cooling liquid in the cooling capsule, and a work cooling unit that has a cooling liquid recovery tank that collects the cooling liquid discharged from the cooling liquid supply unit. In addition, a heat treatment apparatus is provided in which the coolant recovery tank is provided separately from the processing unit.
[2] The heat treatment apparatus according to [1], wherein the heating tool includes a laser light source.
[3] The heat treatment apparatus according to [1], wherein the cooling capsule measures the temperature in the cooling capsule and controls the temperature of the cooling liquid based on the measurement result. May be.
[4] The heat treatment apparatus according to [1] may further include a transfer unit that moves the workpiece between the processing unit and the workpiece cooling unit.
[5] In order to achieve the above object, the present invention provides a heating step of heating the workpiece with a heating tool having a predetermined power while rotating the workpiece, and the workpiece heated by the heating step as a next step. There is provided a heat treatment method comprising: a moving step of moving; and a cooling step of cooling the workpiece moved by the moving step by immersing it in a cooling liquid while rotating.
[6] The heat treatment method according to [5], wherein the heating step is performed by a laser light source.
[7] The heat treatment according to [5], wherein the cooling step is performed by being inserted and accommodated in a cooling capsule by the moving step, and filling the cooling capsule with a cooling liquid. It may be a method.
[8] The cooling step is a cooling rate control step of controlling the cooling rate by stopping the supply of the cooling fluid to the cooling capsule based on the temperature of the cooling fluid filled in the cooling capsule. The heat treatment method described in [7] above may be included.
[9] In order to achieve the above object, the present invention provides a heating tool for heating the workpiece with a predetermined power while rotating the workpiece, and grinding, cutting, etc. of the workpiece while supplying coolant to the workpiece. A machining part having a machining tool for performing, a cooling capsule for inserting and storing the workpiece heated in the machining part, a cooling liquid supply part for filling a cooling liquid in the cooling capsule, and the cooling liquid supply part And a work cooling part having a cooling liquid recovery tank for recovering the cooling liquid discharged from the cooling part, and the cooling liquid recovery tank is provided independently of the coolant recovery tank of the coolant of the processing part. A multi-task machine characterized by the above is provided.
[10] The combined processing machine according to [9], wherein the cooling liquid is cooling water, and the cooling water recovered in the recovery tank is supplied to the coolant recovery tank. Also good.

  According to the present invention, it is possible to provide a heat treatment apparatus, a heat treatment method, and a multi-task machine capable of performing cooling for workpiece processing and heat treatment, and capable of separating the respective coolants.

  In the embodiment of the present invention, laser light, electron beam, plasma, high frequency, TIG, etc. can be used as the heating tool. Heating by an electron beam is performed by emitting electrons in a solid to a space by high heat or a high electric field, accelerating the electron by an electric field, and converging an electron beam into a beam by an electron lens and irradiating it. Moreover, the heating by plasma is performed by the high temperature plasma obtained by flowing an inert gas between electrodes and discharging. Specifically, DC discharge plasma, electron beam excitation plasma, or the like can be used. Moreover, in the heating by a high frequency, the required part of the workpiece | work surface can be heated only the surface using an inductor (coil). Moreover, the heating by TIG (Tungsten Insert Gas) can heat a required part by using a tungsten electrode and using inert gas, such as argon and helium, as shielding gas. In the following embodiments of the present invention, an example in which laser light having a predetermined beam shape and easy power control is used as a heating tool will be described.

(First embodiment of the present invention)
FIG. 1 is a diagram schematically showing an apparatus for explaining a heat treatment apparatus and a heat treatment method according to the first embodiment of the present invention. FIG. 2 is a perspective view showing a configuration of a laser light source irradiated on the workpiece. FIG. 3 is a diagram for explaining the cooling process of the heat treatment apparatus and the heat treatment method according to the first embodiment of the present invention. FIG. 4 is a diagram illustrating the relationship between time and temperature when quenching a workpiece.

  As shown in FIG. 1, the heat treatment apparatus according to the first embodiment of the present invention includes a processing unit 900 that is roughly constituted by a chuck unit 106 that rotationally drives a workpiece W, a main shaft 105, and a sealing unit 107. , A cooling capsule 800 in which the entire interior of the cooling liquid 990 is filled, a thermometer 810 in the capsule, a cooling liquid supply unit 820, a drain pipe 830, a cooling liquid pump 840, a liquid temperature control unit 850, a stirring fan 860, and a cooling liquid And a cooling unit generally configured from the recovery tank 910. Here, the movement of the workpiece W from the processing unit 900 to the cooling unit 901 may be provided with a separate moving / conveying device, and the moving stage (particularly, the traverse stage) of the processing unit is used as a cooling capsule for the workpiece W. It may be used to move to 800.

  In the processing unit 900, the workpiece W is held by the main shaft 105 by the chuck unit 106 and is rotationally driven at a predetermined rotational speed. A sealing portion 107 is provided between the chuck portion 106 and the workpiece W. When the workpiece W is accommodated in the cooling capsule 800 and the inside of the cooling capsule 800 is filled with the cooling liquid 990, the cooling liquid 990 prevents leakage from the gap between the workpiece W and the opening 801 of the cooling capsule 800. The sealing portion 107 is formed of an elastic member so that the workpiece W can rotate and the gap between the workpiece W and the opening 801 of the cooling capsule 800 is closed.

  A laser light source for irradiating the workpiece W with laser light is provided, and FIG. 1 shows a laser head 600. The laser head 600 is mounted on a stage for moving in the Z-axis direction (not shown), and can irradiate the outer circumference of the workpiece W with a predetermined feed rate in the Z direction, or laser in the Z direction at a predetermined frequency. Scan light can be irradiated. Thereby, it can heat by laser irradiation over the desired heating range 110, as shown in FIG.

  As shown in FIG. 2, the laser light source is roughly constituted by a laser oscillator 601 and a laser head 600, and the laser oscillator 601 and the laser head 600 are optically connected by a transmission fiber 651 via an optical fiber coupler 650. ing. As described above, the laser head 600 is controlled to move in the Z direction and can be controlled in the Y direction to change the size of the laser irradiation beam. Moreover, it can also be set as the structure which can control attitude | position by a rotation ((theta)) mechanism so that the workpiece | work W may respond | correspond to the shape which has a step part, a taper part, etc. as shown in FIG.

  The laser oscillator 601 includes laser stack modules 602, 603, and 604, and dichroic mirrors 605 and 606. The laser stack modules 602 to 604 are obtained by stacking a large number of semiconductor laser light emitting elements to increase the output. Each of the laser stack modules 602 to 604 is combined into one laser beam by dichroic mirrors 605 and 606 that reflect light of a specific wavelength and transmit light of other wavelengths.

  The laser oscillator 601 configured in this manner is near infrared light having an optical output of 1.8 kW and an oscillation wavelength of 800 nm to 1000 nm. In addition to the semiconductor laser, a carbon dioxide laser, a YAG laser, or the like can be used.

  Laser light emitted from the laser oscillator 601 is collimated, optically connected to the transmission fiber 651 via the optical fiber coupler 650, and guided to the laser head 600. The work 10 is condensed and irradiated by a condensing lens in the laser head 600.

  As shown in FIG. 1, the cooling capsule 800 has an inner space 802 that can accommodate the workpiece W therein, and an opening 801 into which the workpiece W can be inserted is provided on the side facing the processing portion 900. Yes. A stirring fan 860 for making the temperature distribution of the cooling liquid 990 uniform is provided in the lower part of the cooling capsule 800, and a thermocouple internal thermometer using a thermocouple is provided in the upper part to detect the cooling liquid temperature in the inner space 802. 810 is provided. In addition, a cooling liquid supply unit 850 and an outlet 835 for the drain pipe 830 are provided in the upper part. A cooling liquid recovery tank 910 is provided on the table 915 below the cooling capsule 800 separately from the processing unit 900.

  Next, as shown in FIG. 3, the work W is accommodated in the inner space 802 of the cooling capsule 800 and the opening 801 is covered with the sealing portion 107. The cooling liquid 990 is supplied to the inner space 802. The cooling liquid 990 is sufficiently filled in the inner space 802, and the excess cooling liquid 990 is recovered from the outlet 835 of the drain pipe 830 through the drain pipe 830 to the cooling liquid recovery tank 910. Further, the coolant 990 leaking from the gap between the sealing portion 107 and the opening 801 is also recovered in the coolant recovery tank 910. The collected cooling liquid 990 is pumped by the cooling liquid pump 840, and the liquid temperature control unit 850 controls the cooling liquid pump 840 based on the measurement result of the cooling liquid temperature by the capsule thermometer 810 to reach a predetermined temperature. The cooling liquid 990 is appropriately supplied from the cooling liquid supply unit 820.

  In addition, although industrial water can be used as the cooling liquid 990, not only this but the liquid cooling medium which can cool the workpiece | work W can be used.

(Heat treatment method)
A heating step (S101) for heating the workpiece W with a heating tool of a predetermined power while rotating the workpiece W; a moving step (S102) for moving the workpiece W heated by the heating step (S101) to the next step; It is a heat treatment method characterized by having a cooling step (S103) in which the work W moved in the moving step (S102) is cooled by being immersed in the cooling liquid 990 while rotating.

(Heating process) S101
The heating step (S101) is a step in which the workpiece W is irradiated with laser from the laser head 600 and heated to a predetermined temperature. As shown in FIG. 1, the workpiece W is attached to the spindle 105 by the chuck portion 106 with the sealing portion 107 mounted. While rotating the workpiece W at a predetermined number of revolutions, the laser head 600 irradiates the heating range 110 on the outer peripheral surface of the workpiece W with a predetermined laser power. Laser irradiation can be performed by laser irradiation at a predetermined Z-direction feed rate, or by laser irradiation with laser light in the Z direction at a predetermined frequency, and heating only a portion requiring heat treatment.

(Transfer process) S102
The moving step S102 is a step of moving the workpiece W heated in the heating step S101 into the cooling capsule 800 that performs the cooling step S103, which is the next step. The movement of the workpiece W from the processing unit 900 to the cooling unit 901 may be provided with a separate moving / conveying device, and the moving Z stage (traverse stage) of the processing unit is moved to the cooling capsule 800 of the workpiece W. May be used for For example, in the case of quenching, this moving process needs to be performed within a predetermined time based on a CCT (Continuous Cooling Transformation) diagram so that the temperature drop is within a predetermined range.

(Cooling process) S103
The cooling step S103 is a step of forcibly cooling the heated workpiece W by immersing it in the cooling liquid 990 with the cooling capsule 800. The work W is arranged in the inner space 802 of the cooling capsule 800 and the opening 801 is covered with the sealing portion 107, whereby the cooling liquid 990 is supplied from the cooling liquid supply unit 820, and the cooling liquid 990 is supplied to the inner space 802. By satisfy | filling, it will be set as the state in which the workpiece | work W is immersed in the cooling fluid 990. FIG. In this state, the workpiece W is rotated at a predetermined rotation speed. The cooling liquid 990 is supplied from the cooling liquid supply unit 820 to the inner space 802 of the cooling capsule 800 while stirring the cooling liquid 990 with the stirring fan 860 to make the temperature distribution uniform. The cooling liquid 990 is sufficiently filled in the inner space 802, and the excess cooling liquid 990 is recovered from the outlet 835 of the drain pipe 830 through the drain pipe 830 to the cooling liquid recovery tank 910. Further, the coolant 990 leaking from the gap between the sealing portion 107 and the opening 801 is also recovered in the coolant recovery tank 910. The collected cooling liquid 990 is pumped by the cooling liquid pump 840, and the liquid temperature control unit 850 controls the cooling liquid pump 840 based on the measurement result of the cooling liquid temperature by the capsule thermometer 810 to reach a predetermined temperature. The cooling liquid 990 is appropriately supplied from the cooling liquid supply unit 820 so as to be.

  Although the heated workpiece W is forcibly cooled by the above-described steps, the forced cooling is terminated at a predetermined temperature or a predetermined time, and can be switched to slow cooling. By taking the workpiece W out of the cooling capsule 800 from the opening 801, the workpiece W is in an air-cooled state. For example, in the steel quenching process, by switching to air cooling at about 250 ° C., a quenching process avoiding a dangerous area (about 250 ° C.) can be performed, and the occurrence of quench cracks can be suppressed.

(Hardening treatment of steel by the heat treatment method according to the first embodiment of the present invention)
As shown in FIG. 2, a case will be described in which a steel material is hardened when the workpiece W has a workpiece shape having an end surface of a stepped portion, a tapered surface, and the like in addition to the cylindrical surface.

(Heating step S101)
A workpiece W, which is a steel material (for example, S45C) to be heat-treated, is held on the main shaft 105 by the chuck unit 106 in the processing unit 900 and rotated at a predetermined rotation speed. The laser beam is irradiated while scanning the laser head 600 in the Z direction while controlling the Y direction (θ angle as necessary) of the laser head 600 with respect to the part of the workpiece W that needs to be quenched. In scanning irradiation with laser light, heating control can be performed based on the input shape data of the workpiece while considering the thermal conductivity inside the workpiece. It is also possible to perform the above heating control by controlling the laser power, the number of rotations of the workpiece, the scan speed (scan frequency), and the number of scans while measuring the temperature in the workpiece heat treatment range.

The heating process starts from t ₁ shown in FIG. 4, and at t ₂ , the temperature in the heating range 110 rises to about 900 ° C. at which the A3 transformation temperature (about 730 ° C.) is reached. By the heating control as described above, the heating process is completed at t ₂ when the entire heating range 110 is uniformly equal to or higher than the A3 transformation temperature.

(Move step S102)
The workpiece W after the heating process is moved from the processing unit 900 to the cooling unit 901. This moving process needs to be performed within a predetermined time based on the CCT diagram, and in S45C, it is within about 2 seconds. This transfer step is t ₂ ~t ₃ shown in FIG. 4, is caused slight temperature drop during this time.

(Cooling step S103)
In the cooling step, the heated workpiece W, forced cooling by marinate to the coolant 990 in the cooling capsule 800, the workpiece W between t ₅ from t ₃ is rapidly cooled. By this rapid cooling, the austenite becomes a martensite structure and is quenched to a predetermined depth.

(Dangerous area avoidance process)
In the cooling process shown above, was quenched workpiece W from t ₃ to about room temperature t _5, for example, by performing temperature measurement without contact, or after a predetermined period of time, cooling the workpiece W from the opening 801 By taking it out of the capsule 800, a quenching process avoiding a dangerous area (about 250 ° C.) is possible. That is, by issuing the workpiece W out of the cooling capsule 800 at time t ₄ when reached about 250 ° C., then becomes a slow cooling in air atmosphere, generation of quench crack can be suppressed.

  In the above description, the quenching process has been described as the heat treatment based on the heat treatment method according to the first embodiment of the present invention. In the heating process, the workpiece W is uniformly heated to the tempering temperature (about 200 ° C.), and in the cooling process, For example, the tempering process can be performed by reducing the amount of the cooling liquid 990 and gradually cooling it. In addition, various heat treatments such as normalization can be performed by a combination of a heating step and a cooling step.

(Effect of the first embodiment of the present invention)
The heat treatment apparatus and heat treatment method according to the first embodiment of the present invention have the following effects.
(1) Since the coolant recovery tank 910 that recovers the coolant 990 used in the cooling capsule 800 is provided separately from the processing unit 900, the coolant and the like to be supplied to the processing location during processing and heat treatment Therefore, it becomes possible to separate and collect the cooling liquid. Thereby, application to a multi-task machine is also possible.
(2) Since a large amount of coolant can be used in the cooling capsule 800 by the above configuration, the workpiece W can be cooled (rapidly cooled) by immersing it in the coolant, and in particular, the cooling rate can be made uniform. Since the temperature controllability is good and the quenching effect is high, high quality quenching is possible.
(3) The liquid temperature control unit 850 controls the cooling liquid pump 840 based on the measurement result of the cooling liquid temperature by the in-capsule thermometer 810 so that the cooling liquid 990 is appropriately supplied from the cooling liquid supply unit 820 so as to reach a predetermined temperature. Since it is supplied, the heat treatment temperature can be controlled, and a highly accurate heat treatment can be performed.
(4) Since a laser light source is used as a heating tool, only the heat treatment necessary part of the workpiece W can be heated, and highly functional heat treatment is possible.
(5) Since the cooling liquid is supplied to the cooling capsule 800 having a size capable of accommodating the workpiece W and heat treatment is performed, the cooling liquid to be used can be reduced, and the cooling capsule can be downsized.
(6) Since heat treatment is performed in the cooling capsule 800, generation of steam is suppressed, and a clean apparatus environment is obtained.

(Second embodiment of the present invention)
In the second embodiment of the present invention, the heat treatment apparatus according to the first embodiment is applied to a combined processing machine. FIG. 5 is a plan view showing a configuration when the heat treatment apparatus according to the second embodiment of the present invention is applied to a multi-tasking machine. FIG. 6 is a diagram showing a configuration of a recovery tank when cooling water is supplied to a processing coolant and used.

(Configuration of multi-task machine)
In the combined processing machine according to the embodiment of the present invention, various processing tools 501 can be mounted on the workpiece processing unit 200. For example, as shown in FIG. 5, a laser head 600 that is a heat treatment processing tool is mounted. In FIG. 5, the X direction is defined vertically and the Z direction is defined horizontally.

  The multi-tasking machine 10 is controlled by a computer numerical control device (CNC) (not shown), and is composed of a multi-tasking machine body and an auxiliary device (not shown). Main accessory devices include a laser oscillator, an oil supply device, a cooling device, an air supply device, a coolant supply device, a chip collecting device, a duct device for connecting these devices to the multi-tasking machine body, and the like.

  The multi-task machine 10 is placed on a bed 11 and supports a shaft support or a long workpiece W so as to be rotationally driven, and mounted on the bed 11 to move in the X and Z directions. And the X stage 301 and the Z stage 302 for positioning, the workpiece processing unit 200 that is mounted on the Z stage 302 so as to be detachably mounted, and the processing tool 501 is attached to and detached from a predetermined position of the workpiece processing unit 200. And a tool mounting unit 400. The workpiece machining unit 200 is not only moved in the X and Z directions by the X stage 301 and the Z stage 302, but also, for example, a so-called parallel mechanism in which a closed link mechanism is arranged in parallel to perform a turning operation. It may move in a plane.

  The work support drive unit 100 has a headstock 103 that is slidable in the Z direction via a headstock slide guide 102 on a headstock base 101 placed on a bed 11. A main shaft drive motor 104 that rotates the main shaft 105 at a predetermined rotational speed is mounted. The headstock 103 includes a chuck portion 106, and is configured to chuck the workpiece W in a cantilevered state with the sealing portion 107 mounted thereon.

  When the workpiece processing unit 200 performs processing by rotating the tool and the workpiece W, such as grinding, the tool rotation main shaft 202 on which the processing tool 501 is mounted is rotationally driven by the tool drive motor 201 at a predetermined number of rotations. . Further, when machining is performed by rotating the workpiece W without rotating tools such as turning and heat treatment, the tool rotation spindle 202 with the machining tool 501 mounted is not rotated and fixed at a predetermined rotational rigidity position with a predetermined stationary rigidity. Is done.

  Similar to the first embodiment, the coolant recovery tank can be provided separately from the processing unit. That is, the coolant recovery tank and the coolant recovery tank used for grinding, cutting, etc. can be provided on the bed 11 separately.

  However, in the second embodiment, after the coolant and the coolant are collected on the common recovery tank on the bed 11, they are respectively sent to the coolant recovery tank and the coolant recovery tank provided independently. An example of recovery is shown.

  As shown in FIG. 5, the cooling capsule 800 is placed on the bed 11 on the extension line of the main shaft 105 on which the workpiece W is supported, and straddles the region where the workpiece W is processed and the region where the cooling capsule 800 is disposed. An oil pan 920 is provided on the bed 11 as a common collection tank.

  The oil pan 920 collects the coolant 991 supplied from the coolant supply nozzle 700 when the workpiece W is machined on the bed 11, and collects the coolant 990 used in the cooling process in the cooling capsule 800. . How to treat the coolant 991 and the cooling water 992 recovered by the oil pan 920 will be described later.

  The tool rotation main shaft 202 has a clamp portion 203 that clamps the taper portion 510 of the processing tool 501 and firmly fastens the processing tool 501 and the tool rotation main shaft 202. Specifically, the clamp unit 203 is configured by a compatible standard such as an HSK interface standard for a multi-task machine. When the clamp part 203 is configured according to the HSK interface standard, the taper part 510 and the end face of the processing tool 501 are firmly fastened to the tool rotation main shaft 202 by two-face restraint.

  The tool mounting unit 400 is placed at a predetermined position on the bed 11 and has a tool turret 403 having a plurality of tool pods 402 that can hold various processing tools 501 and a servo that performs indexing control around the X axis. The motor 404 is configured. Inside the tool pod 402, a coupling portion 405 is formed in which a groove formed at the tip of the processing tool 501 can be attached and detached.

  The machining tool 501 includes a turning tool 502 such as a turning electrodeposition wheel used for turning, a cutting tool 503 such as a drill and end mill used for drilling and grooving, and a heating tool such as a laser head 600. There are a heat treatment tool 504, a grinding tool 505 such as a grinding wheel (for example, CBN wheel) used for grinding, and a surface finishing tool 506 used for superfinishing, ELID grinding and the like.

  FIG. 6 shows a configuration for explaining a recovery system for the coolant 991 and the cooling water 992 of the multi-task machine 10. In the processing unit 900, for example, a grinding tool 505 is mounted on the tool rotation spindle 202 (not shown) as the processing tool 501, and the workpiece W is ground while supplying the coolant 991 from the coolant supply nozzle 700. The coolant 991 used at this time is collected by the oil pan 920 and sent to the coolant tank 940 by the switching valve 930.

  After the grinding process is completed, the grinding tool 505 is collected on the tool mounting unit 400 side, the laser head 600 is mounted, and the necessary part of the workpiece W is heated. After this heating step, the workpiece W is moved to the inner space 802 of the cooling capsule 800 by the Z stage 302 and filled with the cooling liquid 990 to rapidly cool the workpiece W. The coolant 990 used at this time is collected by the oil pan 920 and sent to the coolant tank 950 by the switching valve 930.

  The coolant 991 in the coolant tank 940 is sent to the coolant supply device 970 by the coolant supply pump 960 and supplied to the coolant supply nozzle 700 as necessary. On the other hand, the supply of the cooling liquid 990 to the cooling capsule 800 is supplied from the cooling liquid supply unit 820 via the cooling liquid supply valve 980 as necessary.

  In the present embodiment, cooling water 992 (industrial water) can be used as the cooling liquid 990. In this case, the cooling water 992 collected in the cooling liquid tank 950 overflows to the adjacent coolant tank 940 when the water level exceeds a certain level, and the cooling water 992 is supplied to the coolant tank 940. Thereby, replenishment of the water | moisture content in the coolant tank 940 by evaporation is attained.

(Effect of 2nd Embodiment of this invention)
The multi-task machine according to the second embodiment of the present invention has the following effects in addition to the effects of the first embodiment. That is, in the multi-task machine, the coolant is supplied to the workpiece W during processing, but it can be easily separated from the coolant for heat treatment. Furthermore, the coolant can be supplied to the coolant tank 940 by using cooling water (industrial water) as the coolant.

  As mentioned above, although the heat processing apparatus, the heat processing method, and the combined processing machine of this invention were demonstrated based on said embodiment, this invention is not limited to said embodiment, and does not deviate from the summary. It can be implemented in various ways within the scope.

FIG. 1 is a diagram schematically showing an apparatus for explaining a heat treatment apparatus and a heat treatment method according to the first embodiment of the present invention. FIG. 2 is a perspective view showing a configuration of a laser light source irradiated on the workpiece. FIG. 3 is a diagram for explaining the cooling process of the heat treatment apparatus and the heat treatment method according to the first embodiment of the present invention. FIG. 4 is a diagram illustrating the relationship between time and temperature when quenching a workpiece. FIG. 5 is a plan view showing a configuration when the heat treatment apparatus according to the second embodiment of the present invention is applied to a multi-tasking machine. FIG. 6 is a diagram showing a configuration of a recovery tank when cooling water is supplied to a processing coolant and used.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Composite processing machine, 11 ... Bed, 100 ... Work support drive unit, 101 ... Spindle base, 102 ... Spindle base slide guide, 103 ... Spindle base, 104 ... Spindle drive motor, 105 ... Spindle, 106 ... Chuck part, DESCRIPTION OF SYMBOLS 107 ... Sealing part, 110 ... Heating part, 200 ... Workpiece processing unit, 201 ... Tool drive motor, 202 ... Tool rotation spindle, 203 ... Clamp part, 301 ... X stage, 302 ... Z stage, 400 ... Tool mounting unit, 402 ... Tool pod, 403 ... Tool turret, 404 ... Servo motor, 405 ... Joint, 501 ... Machining tool, 502 ... Turning tool, 503 ... Cutting tool, 504 ... Heat treatment tool, 505 ... Grinding tool, 506 ... Surface finishing tool , 510 ... Tapered portion, 600 ... Laser head, 601 ... Laser oscillator, 602 and 603 604: Laser stack module, 605, 606 ... Dichroic mirror, 650 ... Optical fiber coupler, 651 ... Transmission fiber, 700 ... Coolant supply nozzle, 800 ... Cooling capsule, 801 ... Opening, 802 ... Inner space, 810 ... Inside capsule Thermometer, 820 ... Coolant supply unit, 830 ... Drain pipe, 835 ... Outlet, 840 ... Coolant pump, 850 ... Liquid temperature control unit, 860 ... Stir fan, 900 ... Processing unit, 901 ... Cooling unit, 910 ... Coolant recovery tank, 915 ... table, 920 ... oil pan, 930 ... switching valve, 940 ... coolant tank, 950 ... coolant tank, 960 ... supply pump, 970 ... coolant supply device, 980 ... coolant supply valve, 990 ... Coolant, 991 ... Coolant, 992 ... Coolant

Claims (10)

A processing unit having a heating tool for heating the workpiece with a predetermined power while rotating the workpiece,
A cooling capsule that inserts and accommodates the workpiece heated in the processing unit, a cooling liquid supply unit that fills the cooling liquid in the cooling capsule, and cooling that collects the cooling liquid discharged from the cooling liquid supply unit A work cooling section having a liquid recovery tank,
The heat treatment apparatus, wherein the cooling liquid recovery tank is provided separately from the processing portion.   The heat treatment apparatus according to claim 1, wherein the heating tool includes a laser light source.   The heat treatment apparatus according to claim 1, wherein the cooling capsule measures the temperature in the cooling capsule and performs temperature control of the cooling liquid based on the measurement result.   The heat treatment apparatus according to claim 1, further comprising a transfer unit that moves the workpiece between the processing unit and the workpiece cooling unit. A heating step of heating the workpiece with a heating tool of a predetermined power while rotating the workpiece;
A moving step of moving the workpiece heated by the heating step to the next step;
A cooling step of cooling by immersing in the coolant while rotating the workpiece moved by the moving step;
The heat processing method characterized by having.   The heat treatment method according to claim 5, wherein the heating step performs heating with a laser light source.   The heat treatment method according to claim 5, wherein the cooling step is performed by inserting and storing in a cooling capsule by the moving step, and filling the cooling capsule with a cooling liquid.   The cooling step includes a cooling rate control step of controlling a cooling rate by stopping the supply of the cooling fluid to the cooling capsule based on the temperature of the cooling fluid filled in the cooling capsule. The heat treatment method according to claim 7. A processing unit having a heating tool for heating the workpiece with a predetermined power while rotating the workpiece, and a machining tool for performing grinding, cutting, etc. of the workpiece while supplying a coolant to the workpiece;
A cooling capsule for inserting and storing the workpiece heated in the processing unit, and a workpiece cooling unit having a cooling liquid supply unit that fills the cooling liquid in the cooling capsule,
After the cooling liquid and the coolant are collected in a common collection tank, a cooling liquid collection tank and a coolant collection tank that are respectively sent from the collection tank are provided independently. Machine.   The multi-tasking machine according to claim 9, wherein the cooling liquid is cooling water, and the cooling water recovered in the cooling liquid recovery tank is supplied to the coolant recovery tank.

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