JP2009179556A - Discharge cell for ozone generator and ozone generator using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce the size of a discharge type ozone generator. <P>SOLUTION: A dielectric unit 30 is arranged between a pair of first upper and lower electrodes 10 and 10 used also as coolers in such a manner that discharge gaps 50 and 50 are formed on both surface sides. A discharge cell is formed by laminating such unit as one module in a thickness direction. Assembly conduits 11, 21, 11, ... for refrigerant supply commonly used between the respective coolers and assembly conduits 12, 22, 12, ... for refrigerant discharge are integrally formed in the module lamination direction on the side outer than the dielectric unit 30 within the discharge cell. Assembly conduits 13, 23, 13, ... for gaseous ozone commonly used between the respective modules are integrally formed in the module lamination direction on the side outer than the dielectric unit 30 within the discharge cell. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a discharge cell used in a plate type ozone generator, and a plate type ozone generator using the discharge cell.

  As a discharge cell used in a plate type ozone generator, one shown in FIG. 9 is known.

  The discharge cell shown in FIG. 9 includes a pair of low-voltage electrodes 1, 1 that also serve as a heat sink, a dielectric unit 2 disposed between the pair of low-voltage electrodes 1, 1, and discharge on both sides of the dielectric unit 2. Spacers 4, 4... For forming the gap 3 are provided. The dielectric unit 2 has a multilayer structure in which a high-voltage electrode 2b is interposed between two glass plates 2a and 2a as dielectrics. The spacers 4, 4... Are made of metal, ceramic, glass, resin, or the like, and are arranged at predetermined intervals in a direction perpendicular to the gas flow direction in the discharge gap 3.

  When ozone is generated, the dielectric unit 2 is made to flow through the discharge gaps 3 and 3 formed on both sides of the dielectric unit 2 from the front to the rear while the source gas made of oxygen gas or a mixed gas containing oxygen gas is circulated from the front to the rear. A predetermined high voltage is applied to the high voltage electrode 2b. By applying a high voltage, silent discharge occurs in the discharge gaps 3 and 3, and oxygen gas in the raw material gas is ozonized.

  By the way, in such a discharge cell for a plate type ozone generator, the low voltage electrodes 1 and 1 and the dielectric unit 2 are made into one module, and the low voltage electrodes 1 and 1 are shared between adjacent modules, and the thickness of the module is reduced. Laminated structures that are laminated in the direction are often employed. Of the low-voltage electrodes 1 and 1 and the high-voltage electrode 2b, at least the low-voltage electrodes 1 and 1 generally serve as a cooler. Normally, this cooler is a refrigerant flow type in which cooling water flows in a direction parallel to the plate surface, and suppresses a decrease in ozone concentration and the like by suppressing a temperature rise in the adjacent discharge gap.

  However, in the conventional discharge cell for a plate-type ozone generator, a pipe joint member with an external pipe is attached to each cooler in order to supply and discharge the refrigerant to each cooler. And due to the mutual interference of the pipe joint members, there is a problem that the thickness of the cooler cannot be sufficiently reduced, and it is difficult to suppress the dimension in the module stacking direction.

  In addition, the ozone generator normally supplies and discharges water to and from the outside of the apparatus through one collecting pipe in order to supply and discharge the refrigerant to and from each cooler in the discharge cell. The cooling water introduced into the apparatus through the collecting pipe for water supply is supplied to each cooler via a plurality of branch pipes, and the cooling water discharged from each cooler is drained via a plurality of branch pipes. Are collected in a common collecting pipe and discharged outside the apparatus. For this reason, in the ozone generator, a complicated piping system in which a large number of branch pipes are combined is configured outside the cell, which is also a major cause of hindering the downsizing of the ozone generator. Yes.

  The object of the present invention is to reduce the above-mentioned miniaturization inhibiting factor, which is a particularly serious problem in the module stacking type in which modules are stacked in the thickness direction due to the supply / discharge of the refrigerant to the cooler, resulting in performance degradation. An object of the present invention is to provide a discharge cell for an ozone generator that can greatly reduce the size of the apparatus without any problems. Another object of the present invention is to provide a small ozone generator that effectively utilizes this discharge cell.

  In order to achieve the above object, the discharge cell for an ozone generator according to the present invention is configured by arranging a dielectric so that a discharge gap is formed on at least one electrode side between a pair of electrodes arranged opposite to each other. A plurality of plate-type modules are stacked in the thickness direction, and a source gas is used to introduce a source gas into each discharge gap of the plurality of plate-type modules. In a discharge cell for an ozone generator accommodated in a tank to be supplied, at least one of a pair of electrodes is a refrigerant circulation type cooler, and a refrigerant supply collecting line and a refrigerant discharge shared between the coolers In order to take out the ozone gas generated in the discharge gap of each module to the outside of the apparatus while forming the collective pipe for use in the module stacking direction outside the dielectric in the module stack, By forming a collecting pipe for ozone gas shared between joules in the module stacking direction outside the dielectric in the module stack, the refrigerant and ozone gas from the side end surface of each plate module in the module stack This eliminates the pipe joint member.

  In the discharge cell for an ozone generator of the present invention, the refrigerant supply collecting pipe and the refrigerant discharging collecting pipe shared between the coolers are formed in the module stacking direction outside the dielectric in the module stack. ing. In addition, a collecting pipe for ozone gas shared between the modules is also formed in the module stacking direction outside the dielectric in the module stack.

  As a result, the piping joint members for the refrigerant and the ozone gas are excluded from the side end surfaces of the modules. As a result, a complicated external piping system in which a large number of branch pipes are combined is also excluded from the apparatus. As a result, the device size is greatly reduced in the module stacking direction and in the direction perpendicular thereto. In addition to this, the dielectric in the module stack is composed of a glass plate, a ceramic plate, a crystal plate, etc., as will be described later, but any collecting pipe is formed outside the dielectric in the module stack, It is important that it is not formed in a dielectric.

  A typical module configuration is as follows.

  The plate module is configured by sandwiching a second electrode between a pair of first electrodes that also serve as a cooler and a pair of dielectrics, and a discharge gap is formed between the pair of first electrodes. A dielectric unit disposed between the pair of first electrodes, the refrigerant supply collecting line, the refrigerant discharge collecting line, and the ozone gas collecting line outside the dielectric unit. And formed through the first electrode. The plate module further includes a spacer sandwiched between a pair of first electrodes, and the dielectric unit is positioned between the pair of first electrodes and located inside the spacer.

  When forming a collecting pipeline for supplying refrigerant, a collecting pipeline for discharging refrigerant, and a collecting pipeline for ozone gas in the module stacking direction, each collecting pipe is opened on the same end surface side in the module stacking direction. This is preferable from the viewpoint of downsizing the apparatus.

  Also, in the refrigerant supply collecting pipe and the refrigerant discharge collecting pipe, the gap between the laminated members for pipe construction is sealed, and in the ozone gas collecting pipe, the gap between the laminated members for pipe construction is not sealed. Is preferable from the viewpoint of reducing the number of parts. In the collective flow path for ozone gas, the pressure difference between the inside and outside of the pipe line is small, so even if the laminated members for the pipe line structure are not sealed, there is virtually no leakage of ozone gas, and the non-seal reduces the number of parts. The

  For the joint member, the module laminated body is fixed with end plates arranged on both ends in the laminating direction, and the refrigerant supply collecting pipe and the refrigerant discharging collecting pipe formed in the laminating direction of the module laminated body It is preferable that each pipe joint member for connecting the pipe with the external pipe is directly connected to each collecting pipe line through the end plate in the plate thickness direction. According to this, the situation where the refrigerant contacts the end plate is avoided, and it is not necessary to consider the corrosion caused by the refrigerant in the end plate, so that the selection range of the material is widened and the weight can be reduced.

  The module is disposed between the pair of first electrodes disposed between the pair of first electrodes, the pair of spacers disposed between the pair of first electrodes, and the pair of first electrodes between the spacers on both sides. In order to form a pair of discharge gaps between the first electrode and the first electrode, a configuration including a dielectric unit configured by sandwiching the second electrode between the pair of dielectrics is preferable.

  According to this, the first electrode and the spacer are alternately laminated on both side portions of the module laminate, and the dielectric unit is eliminated. Unlike the dielectric, the first electrode and the spacer can be formed of metal, so that both side portions of the module can have a metal laminated structure. Therefore, the collecting pipe is particularly easily formed by utilizing the metal laminated portions on both sides.

  Further, the ozone generator of the present invention accommodates a plurality of discharge cells for the ozone generator of the present invention in the same tank, and the same kind of collective flow paths formed in the module stack of each discharge cell are placed in the tank. Are interconnected by collective piping, and a part of the connecting piping is pulled out of the tank.

  In the ozone generator of the present invention, the piping system in the tank is simplified even though a plurality of discharge cells are accommodated in the same tank.

  As the dielectric, a glass plate, particularly a glass plate for a liquid crystal substrate is preferable because of low cost, withstand voltage characteristics, dimensional accuracy, and the surface becomes a mirror surface without a polishing process, but a ceramic plate such as alumina, a crystal such as sapphire It is also possible to use a plate, a ceramic coated plate by thermal spraying of alumina or the like, an enamel plate and the like.

  The discharge cell for an ozone generator of the present invention has a refrigerant supply collecting line and a refrigerant discharging collecting line shared between the coolers, and an ozone gas collecting line shared between the modules. Since it is formed in the module stack, piping joint members can be excluded from each module, and as a result, a complicated external piping system combining multiple branch pipes can be excluded from the inside of the apparatus. It can be greatly reduced in the module stacking direction and the direction perpendicular thereto. Furthermore, since each collecting pipe is formed outside the dielectric in the module stack, it is not necessary to form the refrigerant introduction hole, the refrigerant outlet hole, and the ozone gas outlet hole in the dielectric.

  Further, the ozone generator of the present invention accommodates a plurality of discharge cells for the ozone generator of the present invention in the same tank, and the same kind of collective flow paths formed in the module stack of each discharge cell are placed in the tank. In this way, the piping system in the tank can be simplified despite the fact that multiple discharge cells are accommodated in the same tank. It also enables downsizing.

It is a front view of the discharge cell for plate type ozone generators concerning the embodiment of the present invention. It is a disassembled perspective view of the cell module used for the discharge cell. It is a disassembled perspective view of the 1st electrode used for the cell module. It is a front view of the ozone generator which concerns on embodiment of this invention. It is a top view of the same ozone generator. It is a side view of the same ozone generator. (A) shows an upper end plate part in the AA line arrow figure of FIG. 5, (b) shows an upper end plate part in the BB line arrow figure of FIG. The lower end plate portion is shown by the AA arrow in FIG. It is a schematic block diagram of the conventional discharge cell for plate type ozone generators.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a front view of a discharge cell for a plate-type ozone generator according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a cell module used in the discharge cell, and FIG. 3 is a first view used in the cell module. It is a disassembled perspective view of 1 electrode.

  As shown in FIG. 1, the discharge cell according to the present embodiment includes a plurality of first electrodes 10, 10. The cell module laminate is configured by superimposing them on each other. The cell module laminate is fixed between a pair of upper and lower end plates (not shown) by a plurality of bolts penetrating both sides in the lamination direction. In this laminate, the first electrode 10 is shared between the upper and lower cell modules.

  As shown in FIG. 2, each cell module includes a pair of upper and lower first electrodes 10 and 10, a pair of rigid body spacers 20 and 20 sandwiched between the first electrodes 10 and 10, a rigid body spacer 20, 20 between the first electrode 10 and 10 in order to form the discharge gaps 50 and 50 on both sides of the dielectric unit 30. A plurality of elastic spacers 40, 40,.

  All the drawings exaggerate the vertical dimension, and the actual thickness is designed to be very thin, for example, 3 mm or less for the first electrode 10 and 3 mm or less for the rigid spacer 20. .

  The pair of upper and lower first electrodes 10 and 10 are low-pressure electrodes that also serve as a cooler. Each first electrode 10 is a thin plate-like conductive rigid body in which two conductive plates 15, 15 made of a stainless steel plate or the like are joined to form a refrigerant flow path between the plates.

  On one side of the first electrode 10, there are a refrigerant supply hole 11 for supplying cooling water as a refrigerant to the refrigerant flow passage, and a refrigerant discharge hole 12 for taking out the cooling water from the flow passage. Two conductive plates 15 are provided so as to penetrate in the plate thickness direction. Further, in order to take out the ozone gas generated in the cell module, the first electrode 10 has a pair of gas discharge holes 13 and 13 on both sides and a slit-like gas flow passage 14 connecting the gas discharge holes 13 and 13. Two conductive plates 15 are provided so as to penetrate in the plate thickness direction. A plurality of small round holes provided on both sides of the first electrode 10 are bolt through holes.

  On both opposing surfaces of the two conductive plates 15 and 15 constituting the first electrode 10, as shown in FIG. 3, a U-shape is formed so as to surround the gas discharge holes 13 and 13 and the gas flow passage 14. A shallow and wide groove is formed. The grooves formed on both opposing surfaces are combined to form a refrigerant flow passage 16 between the conductive plates 15 and 15. This shallow and wide groove is easily formed by, for example, etching or pressing.

  One end of the refrigerant flow passage 16 is connected to the refrigerant supply hole 11, and the other end is connected to the refrigerant discharge hole 12. A plurality of ribs 17, 17... Extending in the flow direction are provided in the refrigerant flow passage 16 at a predetermined interval in a direction perpendicular to the flow direction. The ribs 17, 17... Contribute to ensuring a uniform flow of cooling water and securing the rigidity of the first electrode 10.

  The pair of rigid body spacers 20 and 20 on both sides are plate-like conductive rigid bodies made of a conductive plate material such as a stainless steel plate, and are interposed on both sides between the first electrodes 10 and 10 so that the spacer thickness is increased between them. A space having an equal gap amount G ′ is formed. Moreover, it functions as an electrical connection member of the first electrodes 10 and 10.

  One rigid body spacer 20 is provided with a refrigerant supply hole 21 and a refrigerant discharge hole 22 that communicate with the refrigerant supply hole 11 and the refrigerant discharge hole 12 of the first electrode 10, respectively, penetrating in the plate thickness direction. A cut-out gas discharge hole 23 communicating with the gas discharge hole 13 of the first electrode 10 is provided in each inner edge portion of both the rigid spacers 20 and 20 so as to penetrate in the plate thickness direction. Further, a bolt through hole is also provided in the same manner as the first electrode 10. The through hole of the bolt in the rigid body spacer 20 has an inner diameter sufficiently larger than the outer diameter of the bolt. Thereby, the space | interval of the rigid body spacers 20 and 20 on both sides is adjusted.

  In addition, annular recesses are formed on both surfaces of one rigid body spacer 20 by notching the opening edge portions on both end sides of the coolant supply hole 21 and the coolant discharge hole 22. An annular seal member 60 made of an elastic material is fitted, and a relatively rigid annular backup member 70 is fitted inside the seal member 60. The seal member 60 seals between the first electrode 10 and the rigid body spacer 20 in contact with the first electrode 10 outside the coolant supply holes 11 and 12 and the coolant discharge holes 12 and 22. The backup member 70 is for preventing the inner deformation of the seal member 60. Such a seal structure is not applied to the gas discharge hole 23.

  A dielectric unit 30 disposed in a space surrounded by a pair of upper and lower first electrodes 10 and 10 and a pair of rigid body spacers 20 and 20 on both sides is provided between a pair of upper and lower glass plates 31 and 31 as a dielectric. It is a thin plate-like rigid body having a sandwich structure with two electrodes 32 interposed therebetween. The thickness T of the dielectric unit 30 is slightly smaller than the gap amount G ′ of the space, and more specifically, G′−2G, where G is the gap amount of the discharge gaps 50 and 50. In order to adjust the thickness T, an appropriate number of conductive thin plates are inserted as shims between the glass plates 31 and 31. By this thickness adjustment, an arbitrary discharge gap amount G can be accurately obtained. In order to adjust the discharge gap amount G, it is also effective to stack a suitable number of conductive thin plates as shims on the rigid spacer 20.

  The second electrode 32 is a high-voltage electrode made of a conductive thin plate such as a stainless steel plate, and a part thereof is led out between the glass plates 31 and 31 as a terminal portion 32 ′. The width of the second electrode 32 is narrower than the width of the glass plates 31, 31, and insulators 33, 33 are provided on both sides of the second electrode 32 for insulation between the rigid spacers 20, 20.

  The elastic spacers 40, 40... Provided between the first electrodes 10, 10 in order to form the discharge gaps 50, 50 on both sides of the dielectric unit 30 have ozone resistance and elasticity. Is a circular thin resin wire, and is arranged at a predetermined interval in the width direction of the discharge gap 50 (direction perpendicular to the gas flow direction). The thickness of each elastic spacer 40 (outer diameter D of the wire) is set to be about 5 to 50% larger than the gap amount G of each of the discharge gaps 50 and 50 in a state without compression.

  By this setting, the elastic spacers 40, 40,... Are compressed from above and below by the first electrode 10 and the dielectric unit 30, and by this compression, the dielectric unit 30 is elastically pressed from above and below with an equal pressure. It is held at the center in the vertical direction in the space. As a result, discharge gaps 50 and 50 having a uniform gap amount G are formed on both sides of the dielectric unit 30.

  In addition, tape-like insulating members 41 and 41 made of an elastic body are provided on both sides of each discharge gap 50 to serve as an elastic spacer and a seal member.

  Next, a method of assembling, using, and functioning the discharge cell according to the present embodiment will be described.

  In the assembly of the discharge cell, a plurality of first electrodes 10, 10,... Are arranged between upper and lower end plates (not shown), and rigid body spacers 20, 20, dielectric unit 30 and elastic spacers 40, 40,. The both sides are fastened in the overlapping direction by a plurality of bolts (not shown).

  Thereby, in each cell module, discharge gaps 50 and 50 are formed on both sides of the dielectric unit 30. Here, the upper and lower first electrodes 10, 10, the rigid spacers 20, 20 on both sides and the dielectric unit 30 are rigid bodies that do not cause compression, while the elastic spacers 40, 40. The gap amount G of each discharge gap 50 is a constant value of (G′−T) / 2. Therefore, a minute gap amount G of 0.2 mm or less can be stably realized.

  Further, tightening is performed on both side portions where the rigid body spacers 20 and 20 are disposed, and since it is not necessary to pressurize the entire discharge cell uniformly, the tightening mechanism is simplified. Further, the elastic spacers 40, 40,... Due to tightening and the glass plates 31, 31 in the dielectric unit 30 are not damaged.

  The discharge cells that have been assembled are accommodated in a tank (not shown) in order to introduce the raw material gas into the discharge gaps 50, 50 of each cell module from the front and rear.

  In the discharge cell, the coolant supply hole 11 of the first electrode 10 and the coolant supply hole 21 of the rigid body spacer 20 are combined to form a vertically extending coolant supply collecting conduit that is continuous in the stacking direction. , 30..., 30... Further, the refrigerant discharge hole 12 of the first electrode 10 and the refrigerant discharge hole 22 of the rigid body spacer 20 are combined, so that a vertically extending refrigerant discharge collecting pipe continuous in the stacking direction is formed into the dielectric units 30, 30. -It is formed on the side of the laminated part, that is, on the outside. Further, the gas discharge holes 13 and 13 of the first electrode 10 and the gas discharge holes 23 and 23 of the rigid bodies 20 and 20 are combined to form a pair of vertically-oriented ozone gas discharge collecting pipes that are continuous in the stacking direction. The dielectric units 30, 30... Are formed on the side, that is, outside the laminated portion.

  Here, the vertically-facing refrigerant supply collecting pipe and the refrigerant discharging collecting pipe have a structure in which a gap between the first electrode 10 and the rigid body spacer 20 constituting the above is sealed by an annular seal member 60. .

  In addition, the vertically-facing refrigerant supply collecting pipe, the refrigerant discharging collecting pipe, and the ozone gas discharging collecting pipe are connected to the outside of the tank by an opening provided in the upper end plate and a pipe connected to each opening. Communicating with On the other hand, the lower end plate functions as a cover plate for closing these pipe lines.

  When ozone is generated, a raw material gas is supplied into a tank that accommodates the discharge cells. Further, cooling water is supplied to the refrigerant supply collecting pipeline. In this state, a high voltage is applied to the second electrode 32 provided in the dielectric unit 30 of each cell module, and silent discharge is generated in the discharge gaps 50 and 50.

  The raw material gas supplied into the tank flows into the upper and lower discharge gaps 50 and 50 in each cell module from the front and rear, and is exposed to discharge in the process of flowing toward the center in the front and rear direction to become ozone gas. The ozone gas generated in the discharge gaps 50 and 50 passes through the gas flow passages 14 and 14 provided in the upper and lower first electrodes 10 and 10 to the gas discharge holes 13 and 13 on both sides, and is formed on both sides of the discharge cell. It is taken out above the discharge cell through a pair of vertical ozone gas discharge collecting pipes on both sides, and further taken out of the tank.

  Here, in the collecting pipe for exhausting ozone gas, the space between the first electrode 10 and the rigid body spacer 20 constituting the ozone gas discharge pipe is not sealed. However, the pressure difference between the tank and the discharge gaps 50 and 50 is generated only by the amount corresponding to the pressure loss in the discharge gaps 50 and 50 and is very slight. For this reason, even if it is a non-seal, the gas leak which becomes a problem does not generate | occur | produce, but the number of parts reduces by the non-seal structure.

  The cooling water supplied to the vertically extending refrigerant supply collecting pipe enters the refrigerant flow passage 16 from the refrigerant supply holes 11 and 11 provided in the upper and lower first electrodes 10 and 10 of each cell module, and discharges the discharge gap 50. , 50 is water cooled from the low voltage electrode side. The cooling water exiting from the refrigerant discharge holes 12 and 12 of the first electrodes 10 and 10 is taken out above the discharge cell through a vertical refrigerant discharge collecting pipe formed on one side of the discharge cell. Further, it is taken out of the tank.

  In the refrigerant supply collecting pipe and the refrigerant discharge collecting pipe, the constituent members are sealed by the seal member 60, so there is no risk of water leakage. Further, since the seal member 60 is supported from the inner side by the backup member 70, even when a high-pressure source gas higher than the water pressure is supplied into the tank, the sealing performance of the refrigerant supply collecting pipeline is ensured.

  As for the gas flow in the discharge gap 50, this gas flow has been conventionally one-way from the front to the rear of the discharge gap 50. In this case, in order to take out ozone gas, it is necessary to attach a header to the rear surface perpendicular to the stacking direction of the discharge cells. However, the rear surface perpendicular to the stacking direction of the discharge cells is not flat because the end surfaces of the stacked members appear. For this reason, it becomes difficult to seal between the header and the end face.

  On the other hand, in the discharge cell according to the present embodiment, the gas flow passage 14 is provided in the portion in contact with the discharge gap 50 of the first electrode 10 at the center of the discharge gap 50 in the gas flow direction, and the first Gas discharge holes 13 and 13 connected to the gas flow passage 14 are provided in portions of the electrode 10 that are in contact with the rigid spacers 20 and 20. The rigid spacers 20 and 20 are provided with gas discharge holes 23 and 23 corresponding to the gas discharge holes 13 and 13, respectively.

  As a result, the source gas flows from both the front and rear of the discharge gap 50. Both inflowing gases are ozonized in the discharge gap 50, enter the gas flow path 14 of the first electrode 10 at the center of the discharge gap 50, flow in the stacking direction from the gas outlet holes 13 and 13 on both sides, and out of the discharge cell. To be taken out. For this reason, extraction of ozone gas is performed by two tubes from the surface of the first electrode 10 or the surface of the end plate. Unlike the rear surface of the discharge cell, these surfaces are flat, easy to seal, and do not require a header. In addition, since the cooling water supply / discharge direction and the ozone gas extraction direction are the same, the piping structure is simplified and the apparatus can be miniaturized.

  4 is a front view of an ozone generator according to an embodiment of the present invention, FIG. 5 is a plan view of the ozone generator, FIG. 6 is a side view of the ozone generator, and FIG. FIG. 7B is an BB line arrow view of FIG. 5 and shows the upper end plate portion. Moreover, FIG. 8 is an AA line arrow figure of FIG. 5, and shows a lower endplate part.

  As shown in FIGS. 4 to 6, the ozone generator according to the present embodiment includes a cylindrical horizontal tank 100 and two discharge cells 200 and 200 accommodated side by side in the axial direction in the tank 100. I have. The two discharge cells 200 and 200 are fixed on the gantry 110 in the tank 100 with the front and back reversed. The openings on both sides of the tank 100 are hermetically closed by a lid (not shown).

  Each discharge cell 200 is the discharge cell shown in FIGS. 1 to 3, and has a structure in which the module laminate 210 is fixed between the upper and lower end plates 220 and 230 with a plurality of bolts as described above. The end plates 220 and 230 are made of an aluminum alloy.

  As shown in FIG. 7, the upper end plate 220 is overlaid on the uppermost first electrode 10 via a seal plate 240 made of a stainless steel plate or the like. The seal plate 240 is for closing the gas flow passage 14 of the first electrode 10 from above, and is an opening other than the gas flow passage 14, that is, the refrigerant supply hole 11, the refrigerant discharge hole 12, and the gas discharge holes 13 and 13. Are provided with openings 241 and 242 corresponding thereto.

  On one side of the end plate 220, two circular through holes 221 and 221 penetrating in the plate thickness direction are provided corresponding to the refrigerant supply hole 11 and the refrigerant discharge hole 12 of the first electrode 10, respectively. Yes. The vertical attachment portions of the L-shaped pipe joint members 250 and 250 pass through the through holes 221 and 221. Each piping joint member 250 has a flange portion 251 at the lower end portion of the attachment portion. The flange portion 251 is fitted into an annular recess 222 formed by cutting out the lower surface of the end plate 220 around the through hole 221, and the annular seal member fitted into the recess 222 together with the flange portion 251. By 260, the space between the sealing plate 240 and the seal plate 240 is sealed around the through hole 221.

  As a result, the pipe joint members 250 and 250 are directly connected to the refrigerant supply collecting pipe and the refrigerant discharge collecting pipe formed in the vertical direction on one side of the module laminate 210, respectively. In addition, each pipe joint member 250 is rotatable about the axis of the attachment portion, and the orientation of the horizontal mouth portion can be freely changed.

  On the lower surface of the end plate 220, a relatively large groove 223 for collecting gas is provided from the gas discharge holes 13 and 13 on both sides of the first electrode 10 to the central portion. A circular through-hole penetrating in the thickness direction is provided in the center of the end plate 220 so as to communicate with the groove 223, and the attachment portion of the pipe joint member 270 is screwed into the through-hole. Is attached.

  As shown in FIG. 8, the lower end plate 230 is directly overlaid on the lowermost first electrode 10. On one side of the end plate 230, two circular recesses 231 and 231 are provided corresponding to the refrigerant supply hole 11 and the refrigerant discharge hole 12 of the first electrode 10. Each recess 231 accommodates a cover plate 270 made of a stainless steel plate or the like and an annular seal member 260, whereby a refrigerant supply collecting pipe formed vertically on one side of the module laminate 210. The passage and the refrigerant discharge collecting conduit are closed at the lower end without interfering with the lower end plate 230.

  The respective mouth portions of the pipe joint members 250 and 250 are connected to the corresponding pipe joint members 250 and 250 of another discharge cell 200 arranged on the side of the discharge cell 200 by the collective pipes 300 and 300. Each collective pipe 300 includes a vertical tube portion 310 provided along the outer side surface of the discharge cell 200 and a horizontal tube portion 320 provided horizontally below the gantry 110, and the horizontal tube portion 320. From one part in the longitudinal direction, a refrigerant supply pipe 330 for one of the collective pipes 300 and a refrigerant discharge pipe 340 for the other collective pipe 300 branch downward and protrude out of the tank 100.

  Similarly, the pipe joint member 270 is connected to the corresponding pipe joint member 270 of another discharge cell 200 disposed on the side of the discharge cell 200 by the collective pipe 400. Each collective pipe 400 has a vertical tube portion provided along the outer side surface of the discharge cell 200 and a horizontal tube portion provided horizontally below the gantry 110, and the longitudinal direction of the horizontal tube portion. A gas discharge pipe 410 branches downward from a part and protrudes out of the tank 100.

  Next, the power feeding system of the discharge cells 200 and 200 will be described.

  This power supply system includes an external terminal portion 500 attached to the central portion of the tank 100, an arc-shaped first lead portion 510 disposed along the inner surface at the central portion of the tank 100, and a terminal end of the first lead portion 510. From the second lead portion 520 to the side of the one discharge cell 200, and the vertical direction of the second lead portion 520 from the front side of the one discharge cell 200 to the lower side. From the third lead portion 530, the lateral fourth lead portion 540 disposed from the connection point of the external terminal portion 500 and the first lead portion 510 toward the other discharge cell 200, and the fourth lead portion 540 A vertical lead portion corresponding to the third lead portion 530 is provided with the front side of the other discharge cell 200 facing downward.

  The first lead portion 510, the second lead portion 520, and the fourth lead portion 540 are fixed to the inner surface of the tank 100 via an insulator 560. The third lead 530 is attached to the front center portion of the corresponding discharge cell 200 by a pair of upper and lower insulators 570 and 570.

  In each discharge cell 200, terminal portions 32 'provided on the second electrodes 32 in the dielectric unit 30 are polymerized at left and right alternate positions for every predetermined number of module units continuous in the stacking direction. Each overlapping portion is connected to the vertical third lead portion 530 attached to the front side of the discharge cell 200 via tube fuses 580 alternately from the left and right.

  In the ozone generator according to this embodiment, a predetermined high voltage is applied to the external terminal 500. Further, cooling water is supplied from the refrigerant supply pipe 330 into the one collecting pipe 300. In this state, source gas is supplied into the tank from a gas supply pipe 120 provided in the tank 100.

  By applying a predetermined high voltage to the external terminal 500, a predetermined high voltage is applied to the second electrode 32 in each module in each discharge cell 200, and a discharge is generated in the discharge gaps 50 and 50. In this state, by supplying the source gas into the tank 100, the source gas is ozonized in the discharge gaps 50 and 50 in each module. The ozone gas rises through a collecting pipe for discharging ozone gas formed vertically on both sides of each discharge cell 200, passes through the groove 223 of the upper end plate 220, the joint member 270, and the collecting pipe 400. The gas is discharged from the gas discharge pipe 410 to the outside of the tank 100.

  The cooling water supplied from the refrigerant supply pipe 330 into the one collective pipe 300 is supplied from the one pipe joint member 250 to the collective pipe for supplying refrigerant formed vertically on one side of each discharge cell 200. It flows in from above and is supplied to the first electrodes 10 and 10 in each module. The cooling water discharged from the first electrodes 10 and 10 in each module flows into a refrigerant discharge collecting conduit formed vertically on one side of each discharge cell 200, and the other pipe joint member 250. From the refrigerant discharge pipe 340 to the outside of the tank 100 through the other collecting pipe 300.

  Since ozone gas forms an oxide film on the aluminum alloy, the end plate 220 made of the aluminum alloy is not corroded. In contrast, the cooling water rapidly corrodes the aluminum alloy. However, the refrigerant supply collecting pipe and the refrigerant discharging collecting pipe formed vertically on one side portion of each discharge cell 200 are connected to the pipe joint member 250, without the end plates 220, 230 made of aluminum alloy. 250 is directly connected. For this reason, although the end plates 220 and 230 are made of a lightweight aluminum alloy, corrosion due to the cooling water is prevented.

  With respect to the cooling water supply / discharge system, the refrigerant supply collection pipe and the refrigerant discharge collection pipe are formed in the module laminate 210 of each discharge cell 200, so that the pipe joint member is excluded from each module. The thickness of the first electrodes 10 and 10 that are coolers is reduced. As a result, the overall height of the discharge cell 200, and hence the height of the tank 100, is reduced without any performance degradation.

  In addition, a complicated external piping system in which a large number of branch pipes are combined from the inside of the tank 100 is eliminated, and the same kind of collecting pipes formed in the module laminate 210 of each discharge cell 200 are connected in the tank 100. Since they are interconnected by the collective pipe 300, the two external pipes for the refrigerant in the tank 100 are only the two collective pipes 300, 300 even though the two discharge cells 200, 200 are combined. In addition, there are three pipes together with the collecting pipe 400 for discharging ozone gas.

  This also reduces the tank 100 in size.

10 First electrode (low voltage electrode)
DESCRIPTION OF SYMBOLS 11 Refrigerant introduction hole 12 Refrigerant outlet hole 13 Gas outlet hole 14 Gas outlet path 15 Conductive plate 16 Refrigerant flow path 17 Rib 20 Rigid body spacer 21 Refrigerant inlet hole 22 Refrigerant outlet hole 30 Dielectric unit 31 Glass plate (dielectric)
32 Second electrode (high voltage electrode)
40 Elastic body spacer 50 Discharge gap 60 Seal member 70 Backup member 100 Tank 200 Discharge cell 210 Module laminated body 220, 230 End plate 250, 270 Piping joint member 300 Collecting pipe 330 Refrigerant supply pipe 340 Refrigerant discharge pipe 400 Collecting pipe 410 Gas discharge Tube 500 External terminal 510, 520, 530, 540 Lead member 580 Tube fuse

Claims (7)

  It is configured by laminating a plurality of plate type modules configured by arranging a dielectric so that a discharge gap is formed on at least one electrode side between a pair of electrodes arranged opposite to each other in the plate thickness direction. In the discharge cell for ozone generator accommodated in the tank to which the source gas is supplied in order to introduce the source gas into each discharge gap of the plurality of plate modules, At least one of the electrodes is a refrigerant flow type cooler, and a refrigerant supply collecting pipe and a refrigerant discharging collecting pipe shared between the coolers are arranged outside the dielectric in the module stack. In order to take out the ozone gas generated in the discharge gap of each module to the outside of the apparatus, a collective line for ozone gas shared between the modules is formed in the module. An ozone generator characterized in that a pipe joint member for refrigerant and ozone gas is eliminated from the side end face of each plate module in the module laminate by forming in the module lamination direction outside the dielectric in the laminate. Discharge cell.   The discharge for an ozone generator according to claim 1, wherein the refrigerant supply collecting pipe, the refrigerant discharging collecting pipe, and the ozone gas collecting pipe are opened on the same end face side in the module stacking direction. cell.   The laminated pipe for refrigerant supply and the collecting pipe for refrigerant discharge are sealed between the laminated members, and the laminated pipe for ozone gas is non-sealed between the laminated members. Discharge cell for ozone generator.   The module stack is fixed with end plates arranged at both ends in the stacking direction, and the refrigerant supply collecting pipe and the refrigerant discharging collecting pipe formed in the module stacking direction are connected to external piping. 4. The discharge cell for an ozone generator according to claim 1, wherein each joint member to be connected is passed through in the thickness direction of the end plate and directly connected to each collecting pipe.   The plate module is configured by sandwiching a second electrode between a pair of first electrodes also serving as a cooler and a pair of dielectrics, and a discharge gap is formed between the pair of first electrodes. A dielectric unit disposed between the pair of first electrodes, the refrigerant supply collecting line, the refrigerant discharge collecting line, and the ozone gas collecting line outside the dielectric unit. The discharge cell for an ozone generator according to claim 1, wherein the discharge cell is formed through the first electrode.   6. The ozone generator according to claim 5, wherein a spacer is provided between the pair of first electrodes, and the dielectric unit is located between the pair of first electrodes and located inside the spacer. Discharge cell.   A plurality of discharge cells for an ozone generator according to claim 1, 2, 3, 4, or 6 are accommodated in the same tank, and the same kind of collecting pipes formed in the module laminate of each discharge cell An ozone generator characterized in that they are interconnected by a collective pipe in the tank, and a part of the connected pipe is drawn out of the tank.

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