JP2009169064A - Color filter for in-plane switching liquid-crystal drive - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a color filter for in-plane switching liquid-crystal drive having large spacer height and excellent barrier properties. <P>SOLUTION: The color filter for in-plane switching liquid-crystal drive has a base; a black matrix formed on the base and having openings: colored layers formed at the openings and each including colored portions in three colors of red, green and blue; a stacked column comprising the plurality of colored layers stacked on the black matrix; and an inorganic transparent protective layer made of an inorganic material using a dry depositing method to cover the black matrix, the colored layers and the stacked column. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a color filter for a lateral electric field liquid crystal driving system having a high spacer height and excellent barrier properties.

  In recent years, with the development of personal computers, particularly portable personal computers, the demand for liquid crystal displays has increased. In recent years, the penetration rate of home-use liquid crystal televisions has been increasing, and the market for liquid crystal displays is expanding. Furthermore, liquid crystal displays that have become widespread in recent years tend to have larger screens, and this tendency is particularly strong for home-use liquid crystal televisions. In such a situation, it is desired to manufacture a liquid crystal display that has a lower cost and a higher quality with high productivity, and in particular, a color filter substrate having a function of colorizing the liquid crystal display. However, such demands are increasing because of its high cost.

In a liquid crystal display device, a color filter substrate and a liquid crystal drive side substrate (counter substrate) are opposed to each other, and a liquid crystal compound is sealed between them to form a thin liquid crystal layer. Is controlled by selectively controlling the amount of light transmitted through the display-side substrate.
In such a liquid crystal display device, the gap (cell gap) between the color filter substrate and the counter substrate is the thickness of the liquid crystal layer itself, preventing display unevenness such as color unevenness and contrast unevenness, uniform display, and high-speed response. In order to provide the color liquid crystal display device with good display performance such as high performance, high contrast ratio, and wide viewing angle, it is necessary to keep the cell gap constant and uniform.

  As a method for maintaining the cell gap, a method in which a large number of spherical or rod-shaped particles of a certain size made of glass, alumina, plastic, or the like are scattered as spacers in the gap has been used. There are various problems such as the spacer distribution being easily biased. As a method for solving the problems of these particulate spacers, there is disclosed a method (Patent Document 1) using a laminated spacer (laminated column) formed by laminating a columnar colored layer on a light shielding portion (black matrix) as a spacer. ing.

  On the other hand, in a color filter for a horizontal electric field liquid crystal driving method, a transparent protective layer (overcoat layer) made of a transparent resin is usually used to prevent elution of contaminants such as a colorant from the colored layer to the liquid crystal layer. It is formed so as to cover the black matrix. As a method for forming such a transparent protective layer, a method of applying a transparent protective layer forming material containing a transparent resin is generally used. By the way, when such a transparent protective layer forming material is applied on the laminated spacer, leveling occurs where the transparent protective layer forming material flows down from the top of the laminated spacer onto the colored layer or the like. For this reason, the thickness of the transparent protective layer formed on the laminated spacer is thin, and the thickness of the transparent protective layer formed on the colored layer is thick. As a result, the height of the finally formed spacer, that is, the thickness from the surface of the transparent protective layer formed on the colored layer to the surface of the transparent protective layer formed on the laminated spacer is sufficiently thick. There was a problem that it was difficult to achieve.

  In addition, due to the recent demand for higher accuracy, the prevention of the elution of the above-mentioned contaminants is more demanded. However, the conventional transparent protective layer forming material cannot sufficiently prevent the elution of the contaminants. there were.

Japanese Patent Laid-Open No. 5-196946

  The present invention has been made in view of the above problems, and a main object of the present invention is to provide a color filter for a lateral electric field liquid crystal drive system that has a high spacer height and excellent barrier properties.

  As a result of repeated researches to solve the above problems, the present inventors have used an inorganic transparent protective layer made of an inorganic material as the transparent protective layer, whereby the inorganic material layer on the colored layer and the laminated column. The present inventors have found that the film thickness can be made substantially the same and that the barrier property can be improved, and the present invention has been completed.

  That is, the present invention provides a substrate, a black matrix formed on the substrate and having an opening, a colored layer including at least three colored portions of red, green, and blue formed in the opening, A laminated column formed by laminating a plurality of the above-described colored layers on a black matrix, and an inorganic transparent protective layer made of an inorganic material and formed by a dry film forming method so as to cover the black matrix, the colored layer, and the laminated column. There is provided a color filter for a lateral electric field liquid crystal drive system characterized by having a color filter.

According to the present invention, since the inorganic transparent protective layer as described above is used as the transparent protective layer, the barrier property is high, and further on the laminated column in the vertical direction from the surface of the inorganic transparent protective layer on the colored portion of each color. The spacer height, which is the distance to the surface of the inorganic transparent protective layer, can be made high.
In addition, since the stacked pillar is formed by stacking the colored layers of the respective colors, a spacer forming step for forming the spacer becomes unnecessary, and the cost can be reduced.

  In the present invention, the inorganic material is silicon oxide, silicon nitride, silicon carbide, titanium oxide, niobium oxide, indium oxide, zinc oxide, tin oxide, or tantalum oxide, and gallium, cerium, aluminum, carbon, tin, and boron. It is preferable that any of them is doped. This is because the inorganic transparent protective layer can have higher barrier properties.

  In this invention, it is preferable that the film thickness of the said inorganic transparent protective layer exists in the range of 200 to 1800cm. It is because it is excellent in the barrier property mentioned above and can make a spacer height high by being in the said range.

  The present invention includes a substrate, a black matrix formed on the substrate and including an opening, a colored layer including at least three colored portions of red, green, and blue formed in the opening, and the black matrix. An inorganic material is attached to the surface of the black matrix, the colored layer, and the stacked column in the substrate for forming a color filter for a lateral electric field liquid crystal driving system having a stacked column on which a plurality of the colored layers are stacked, by a sputtering method, There is provided a method for producing a color filter for a lateral electric field liquid crystal driving method, comprising an inorganic transparent protective layer forming step of forming an inorganic transparent protective layer.

  According to the present invention, the inorganic transparent protective layer forming step is a step of forming the inorganic transparent protective layer described above by a sputtering method. The sputtering apparatus can be used. For this reason, an inorganic transparent protective layer with high barrier property can be formed at low cost. Moreover, since the said inorganic transparent protective layer can be formed with uniform thickness on the said colored layer and the said laminated pillar, the color filter for horizontal electric field liquid crystal drive systems with a high spacer height can be manufactured.

  The present invention has an effect that it can provide a color filter for a lateral electric field liquid crystal drive system having a high spacer height and excellent barrier properties.

The present invention relates to a color filter for a lateral electric field liquid crystal driving system and a method for manufacturing the same.
Hereinafter, the manufacturing method of the color filter for a horizontal electric field liquid crystal drive system and the color filter for a horizontal electric field liquid crystal drive system of the present invention will be described in detail.

A. Color filter for horizontal electric field liquid crystal driving method The color filter for horizontal electric field liquid crystal driving method of the present invention includes a substrate, a black matrix formed on the substrate and having an opening, red, green, and red formed on the opening. A colored layer including at least three colored portions of blue, a laminated column in which a plurality of the colored layers are laminated on the black matrix, and a dry film forming method so as to cover the black matrix, the colored layer, and the laminated column And an inorganic transparent protective layer made of an inorganic material.

Such a color filter for a lateral electric field liquid crystal drive system of the present invention will be described with reference to the drawings. FIG. 1 is a schematic plan view showing an example of a color filter for a lateral electric field liquid crystal driving system according to the present invention. 2 is a cross-sectional view taken along line AA in FIG. As illustrated in FIG. 1 and FIG. 2, a color filter 10 for a lateral electric field liquid crystal driving method according to the present invention includes a substrate 1, a black matrix 3 formed on the substrate 1 and having an opening 2, and the opening 2. A colored layer including three colored portions (4R, 4G, 4B) of red, green, and blue formed on the red matrix, a red colored layer 14R including a red colored portion 4R on the black matrix 3, and green coloring The laminated column 5 formed by laminating the green colored layer 14G including the portion 4G and the blue colored layer 14B including the blue colored portion 4B, and the black matrix 3, the colored layers (14R, 14G, 14B) and the laminated column 5 are covered. And the inorganic transparent protective layer 6 formed as described above.
Here, the inorganic transparent protective layer 6 is formed by a dry film forming method.
In FIG. 1, the inorganic transparent protective layer is omitted.

According to the present invention, the above-described inorganic transparent protective layer is used as the transparent protective layer, so that the barrier property is high and the spacer height is high.
In addition, since the stacked pillar is formed by stacking the colored layers of the respective colors, a spacer forming step for forming the spacer becomes unnecessary, and the cost can be reduced.
Here, the reason why the barrier property is high and the spacer height is high by using the inorganic transparent protective layer is as follows.

That is, in the color filter for the horizontal electric field liquid crystal driving method, the above-mentioned coloring is prevented in order to prevent contaminants such as a colorant from being eluted from the black matrix or the colored layer into the liquid crystal layer and causing a decrease in electrical reliability. A transparent protective layer is formed on the layer or the like.
Here, a transparent protective layer made of a transparent resin is usually used as the transparent protective layer in the conventional color filter. In addition, such a method for forming a transparent protective layer made of resin comprises applying a coating liquid for forming a transparent protective layer containing a material for forming the transparent protective layer made of resin on the surface of the colored layer, etc. A method of forming by exposure and development is used.
For this reason, as a method for forming a transparent protective layer in a conventional color filter for a lateral electric field liquid crystal driving method having a laminated column with a colored layer as a spacer, specifically, as illustrated in FIG. Further, for forming a color filter, a black matrix 103 and a laminated column 105 formed by laminating a colored layer (114R, 114G, 114B) including a red colored portion 104R, a green colored portion, and a blue colored portion are formed. A method is used in which a substrate is prepared (FIG. 4A) and the transparent protective layer forming coating solution is applied (FIG. 4B). Here, as shown in FIG. 4B, immediately after the coating liquid for forming the transparent protective layer is applied, the black matrix 103, the colored layers (114R, 114G, 114B), and the laminated pillar 105 The coating film 106 ′ of the coating liquid for forming the transparent protective layer is formed with a relatively uniform thickness. However, the coating film 106 'of the coating liquid for forming the transparent protective layer is gradually leveled down to a lower position (FIG. 4C). For this reason, the resin-made transparent protective layer 106 in the color filter 100 finally formed by performing exposure and development has a thin film thickness on the laminated column 105, and on the colored portion (104R) of each color, The film thickness is large (FIG. 4D).
Accordingly, the height of the finally formed spacer, that is, the distance from the surface of the transparent protective layer formed on the colored portion of each color to the surface of the transparent protective layer formed on the stacked pillar in the vertical direction. However, the spacer height before the formation of the transparent protective layer, that is, the distance from the colored portion surface, which is the height of the stacked column, in the vertical direction is much shorter than the distance from the top of the stacked column.

  When the resin transparent protective layer is used to sufficiently prevent the contaminants from being eluted, it is necessary to make the resin transparent protective layer very thick. In this case, the film thickness of the coating film of the transparent protective layer forming coating solution applied on the laminated column becomes thick, and the transparent protective layer forming coating solution that flows down from the laminated column by leveling. The amount will be more. For this reason, the spacer height is lower.

On the other hand, in the present invention, the transparent transparent protective layer is formed by a dry film forming method and uses an inorganic transparent protective layer made of an inorganic material. Therefore, the inorganic transparent protective layer film on the colored layer and the laminated column is used. The thickness can be made substantially uniform.
For this reason, the spacer height can be made substantially the same as the spacer height before the transparent protective layer is formed, and the spacer height can be made high.
Moreover, since the inorganic transparent protective layer made of the inorganic material exhibits high barrier properties even when the film thickness is thin, the barrier properties can be easily increased.
Such a phenomenon can be said to be a phenomenon peculiar to a color filter for a lateral electric field liquid crystal driving system having a laminated column formed by laminating colored layers of the respective colors and a transparent protective layer. The present invention solves such a specific problem by using an inorganic transparent protective layer made of an inorganic material formed by a dry film forming method as the transparent protective layer.

  The color filter for a lateral electric field liquid crystal driving system of the present invention has the inorganic transparent protective layer, the laminated column, the colored layer, the black matrix, and the substrate. Hereinafter, each structure of the color filter for a horizontal electric field liquid crystal drive system of the present invention will be described.

1. Inorganic transparent protective layer The inorganic transparent protective layer used in the present invention is formed by a dry film-forming method and is made of an inorganic material.
In addition, it is formed so as to cover a black matrix, a colored layer, and a stacked column, which will be described later, and when used in a liquid crystal display device, a colorant or the like is added to the liquid crystal layer from the black matrix, the colored layer, and the stacked column. It is possible to prevent the contaminants from eluting.

As an inorganic material constituting such an inorganic transparent protective layer, any material that exhibits a desired barrier property may be used. For example, silicon oxide, silicon nitride, silicon carbide, titanium oxide, niobium oxide, indium oxide, zinc oxide, A material obtained by doping tin oxide or tantalum oxide with any of gallium, cerium, aluminum, carbon, tin (tin) and boron can be preferably used.
In the present invention, among these, silicon oxide, silicon nitride, indium oxide, zinc oxide or titanium oxide doped with any of gallium, cerium, aluminum and tin can be preferably used. Indium oxide doped with any of gallium, cerium and tin (tin) can be preferably used. This is because it is possible to form an inorganic transparent protective layer having excellent barrier properties that prevents the contaminants contained in the black matrix, the colored layer, and the laminated pillar described later from eluting into the liquid crystal layer.

  In the present invention, one inorganic transparent protective layer may be formed using one kind of inorganic material, and two or more inorganic transparent protective layers may be formed using two or more kinds of inorganic materials. May be formed.

  The film thickness of the inorganic transparent protective layer used in the present invention is not particularly limited as long as it exhibits a desired barrier property, but is preferably in the range of 200 to 1800 mm, and more preferably in the range of 400 to 1400 mm. It is preferable that it is in the range of 600 to 1400 in particular. It is because it is excellent in the barrier property mentioned above and can make a spacer height high by being in the said range.

As a dry film forming method used in the present invention, any method can be used as long as the inorganic material can be attached at a desired position and film thickness.
Specific examples include sputtering, vacuum deposition, and plasma CVD. Among these, sputtering can be preferably used. The transparent electrode layer made of ITO or the like is usually formed by a sputtering method. For this reason, it is because the said inorganic transparent protective layer can be formed using the existing sputtering apparatus used for formation of the said transparent electrode layer by using sputtering method as the said dry-type film forming method. Therefore, the color filter for the lateral electric field liquid crystal driving method of the present invention can be made low-cost.

2. Laminated Column The laminated column used in the present invention is formed by laminating a plurality of later-described colored layers.

  The number of laminated pillars used in the present invention may be any number as long as at least two colored layers described later are laminated, and in particular, the above-mentioned colored layers are laminated within a range of 2 to 3 layers. It is preferable that it is made. This is because a stacked pillar having a sufficient height can be formed by being within the above range. Moreover, it is because the effect of this invention can be exhibited more effectively.

  Moreover, as a lamination | stacking pillar used for this invention, all the lamination | stacking numbers of the colored layer which comprises the said lamination | stacking pillar may be the same, and a different lamination | stacking number may be sufficient. Specifically, the laminated column may be composed of only three layers of colored layers, and includes those in which the colored layer is laminated in three layers and those in which two layers are laminated. It may be.

  As the planar view area of the colored layer constituting the laminated column, it is only necessary that each colored layer is stably formed. Moreover, the planar view area of the uppermost colored layer is not particularly limited as long as the liquid crystal display device has a strength capable of maintaining a desired cell gap.

  As the order of the planar view areas of the colored layers constituting the laminated pillar, the lowest colored layer constituting the laminated pillar, i.e., the planar view area of the colored layer formed on the black matrix is the smallest. The lowermost colored layer may have the largest planar view area, but usually the lowest colored layer has the largest planar view area, and the uppermost colored layer has the largest planar view area. In order to be the narrowest, the planar view area of each colored layer is narrower than that of the colored layer immediately below.

  The planar view shape of the colored layer constituting the laminated column used in the present invention may be any shape as long as the laminated column can be stably formed, and may be circular, elliptical, or polygonal.

The height of the laminated pillar used in the present invention is different depending on the film thickness of the colored layer, and specifically, preferably in the range of 2.5 μm to 5.0 μm, Especially, it is preferable that it exists in the range of 2.5 micrometers-4.5 micrometers. This is because the spacer height can be made sufficiently high by being within the above range.
In addition, the height of the laminated pillar means the maximum length among the distances to the top of the laminated pillar in the vertical direction from the colored portion surface described later.

  The number of stacked pillars used in the present invention is not particularly limited as long as the cell gap is constant when the liquid crystal display device is used, and can be appropriately set depending on the height of the stacked pillars to be formed.

3. Colored layer The colored layer used in the present invention has colored portions of at least three colors of red, green, and blue formed in openings provided in a black matrix described later.

  The color of the colored layer used in the present invention is not particularly limited as long as it includes at least three colors of red, green, and blue. For example, three colors of red, green, and blue, or red, The four colors of green, blue, and yellow, or the five colors of red, green, blue, yellow, and cyan can be used.

  The colored layer of each color in the present invention is obtained by dispersing or dissolving a colorant such as a pigment or dye of each color in a binder resin, and is formed by a photolithography method.

In the present invention, examples of the colorant used in the red (R) colored layer include perylene pigments, lake pigments, azo pigments, quinacridone pigments, anthraquinone pigments, anthracene pigments, and isoindoline pigments. Can be mentioned. These pigments may be used alone or in combination of two or more.
Examples of the colorant used for the green (G) colored layer include phthalocyanine pigments such as halogen polysubstituted phthalocyanine pigments or halogen polysubstituted copper phthalocyanine pigments, triphenylmethane basic dyes, isoindoline pigments, Examples include isoindolinone pigments. These pigments or dyes may be used alone or in combination of two or more.
Examples of the colorant used in the blue (B) colored layer include copper phthalocyanine pigments, anthraquinone pigments, indanthrene pigments, indophenol pigments, cyanine pigments, dioxazine pigments, and the like. These pigments may be used alone or in combination of two or more.

  As the binder resin used in the colored layer, for example, a photosensitive resin having a reactive vinyl group such as acrylate, methacrylate, polyvinyl cinnamate, or cyclized rubber is used. In this case, a photopolymerization initiator may be added to the photosensitive resin composition for forming a colored part containing a colorant and a photosensitive resin, and further, a sensitizer, a coating property improver, and a development as necessary. You may add an improving agent, a crosslinking agent, a polymerization inhibitor, a plasticizer, a flame retardant, etc.

  The thickness of the colored layer of each color is usually set to about 1 μm to 5 μm.

4). Black matrix The black matrix used for this invention is formed on the board | substrate mentioned later, and is provided with an opening part.

  As the shape of the openings in the black matrix used in the present invention, those in which openings having the same shape are formed in a pattern at regular intervals are usually used. Here, the pattern shape of the opening is not particularly limited, and examples thereof include a stripe shape and a matrix shape.

Examples of the black matrix include those obtained by dispersing or dissolving a black colorant in a binder resin, and metal thin films such as chromium and chromium oxide. This metal thin film may be a CrO _x film (x is an arbitrary number) and a laminate of two Cr films, and a CrO _x film (x is an arbitrary number) with a reduced reflectance. , CrN _y film (y is an arbitrary number) and three layers of Cr film may be laminated. Among them, the black matrix is preferably a black matrix in which a black colorant is dispersed or dissolved in a binder resin in that the black matrix can be made relatively thick.

In the above case, when a printing method or an ink jet method is used as a black matrix formation method, examples of the binder resin include polymethyl methacrylate resin, polyacrylate resin, polycarbonate resin, polyvinyl alcohol resin, polyvinyl pyrrolidone resin, hydroxy Examples thereof include ethyl cellulose resin, carboxymethyl cellulose resin, polyvinyl chloride resin, melamine resin, phenol resin, alkyd resin, epoxy resin, polyurethane resin, polyester resin, maleic acid resin, polyamide resin and the like.
In the above case, when a photolithography method is used as a black matrix formation method, the binder resin may be, for example, an acrylate-based, methacrylate-based, polyvinyl cinnamate-based, or cyclized rubber-based reactive material. A photosensitive resin having a vinyl group is used. In this case, a photopolymerization initiator may be added to the photosensitive resin composition for forming a black matrix containing a black colorant and a photosensitive resin, and further, if necessary, a sensitizer, a coatability improver, A development improver, a crosslinking agent, a polymerization inhibitor, a plasticizer, a flame retardant, and the like may be added.

  On the other hand, when the black matrix is a metal thin film, the method for forming the black matrix is not particularly limited as long as the black matrix can be patterned. For example, a photolithography method or a mask is used. The vapor deposition method, the printing method, etc. can be mentioned.

  The thickness of the black matrix is set to about 0.2 μm to 0.4 μm in the case of a metal thin film, and about 0.5 μm to 2 μm in the case where the black colorant is dispersed or dissolved in a binder resin. Is set.

5. Substrate As the material of the substrate used in the present invention, those conventionally used for color filters can be used. Examples of such materials include non-flexible transparent inorganic substrates such as quartz glass, Pyrex (registered trademark) glass, and synthetic quartz plates, and flexibility such as transparent resin films and optical resin plates. Examples thereof include a transparent resin substrate. In particular, an inorganic substrate is preferably used in this step, and a glass substrate is preferably used among the inorganic substrates. Furthermore, it is preferable to use an alkali-free type glass substrate among the glass substrates. The alkali-free glass substrate is excellent in dimensional stability and workability in high-temperature heat treatment, and contains no alkali component in the glass, so it is suitable for color filters for color liquid crystal display devices using an active matrix method. This is because it can be used.

  The substrate may be a transparent substrate, or may be a reflective substrate or a white colored one. In the present invention, a transparent substrate is usually used.

6). Color filter for lateral electric field liquid crystal drive system The color filter for lateral electric field liquid crystal drive system of the present invention may be any material as long as it has the above substrate, black matrix, colored layer, laminated pillar, and inorganic transparent protective layer, It may have other configurations such as a transparent electrode and an alignment film as necessary.

In addition, the spacer height of the color filter for a horizontal electric field liquid crystal driving method of the present invention may be any height as long as it can form a desired cell gap. Specifically, the spacer height is 2.5 μm to 5.0 μm. It is preferable that it is in the range, and in particular, it is preferable to be in the range of 2.5 μm to 4.5 μm, and it is particularly preferable to be in the range of 3.0 μm to 4.0 μm.
The spacer height refers to the thickness from the surface of the transparent protective layer formed on the colored portion of each color to the surface of the transparent protective layer formed on the laminated column in the vertical direction.

7). Method for Manufacturing Color Filter for Horizontal Electric Field Liquid Crystal Drive Method Any method can be used as a method for manufacturing the color filter for horizontal electric field liquid crystal drive method according to the present invention as long as the above-described configurations can be formed with high accuracy. Specifically, the method described in “B. Method for producing color filter for lateral electric field liquid crystal driving method” described later can be given.

8). Applications The color filter for the lateral electric field liquid crystal drive system of the present invention can be used in a liquid crystal display device. In particular, the cell gap is uniform, the display quality is excellent, and the contamination of the liquid crystal layer is required to be reduced. It is suitably used for a liquid crystal display device.

B. Method for Manufacturing Color Filter for Horizontal Electric Field Liquid Crystal Drive Method The method for manufacturing a color filter for horizontal electric field liquid crystal drive method according to the present invention includes a substrate, a black matrix formed on the substrate and provided with an opening, and formed on the opening. For forming a color filter for a lateral electric field liquid crystal driving method, comprising: a colored layer including colored portions of at least three colors of red, green, and blue; and a stacked column in which a plurality of the colored layers are stacked on the black matrix It has an inorganic transparent protective layer forming step of forming an inorganic transparent protective layer by depositing an inorganic material on the surfaces of the black matrix, the colored layer and the laminated pillar on the substrate by a sputtering method.

A method of manufacturing such a color filter for a horizontal electric field liquid crystal driving method will be described with reference to the drawings. FIG. 3 is a process diagram showing an example of a method of manufacturing a color filter for a lateral electric field liquid crystal drive system according to the present invention. As shown in FIG. 3, a substrate 1 on which a black matrix 3 having openings 2 is formed is prepared (FIG. 3A), and a red colored layer 14R including a red colored portion 4R is collectively formed (FIG. 3). (B)).
Next, as shown in FIG. 3C, a blue colored layer 14B including a blue colored portion is formed in a lump.
Next, as illustrated in FIG. 3D, a green colored layer 14 </ b> G including a green colored portion is formed in a lump to form the stacked pillar 5.
Subsequently, as shown in FIG. 3 (e), the inorganic material 16 is sputtered on the surface of the black matrix 3, the colored layers (14R, 14G, 14B) of three colors of red, green, and blue, and the stacked pillars 5. A lateral electric field liquid crystal drive comprising the black matrix 3, the colored layers (14R, 14G, 14B) of three colors of red, green, and blue, and the inorganic transparent protective layer 6 formed so as to cover the laminated pillar 5 The system color filter 10 is formed (FIG. 3F).
In addition, FIG.3 (e)-(f) is an inorganic transparent protective layer formation process.

  According to the present invention, the inorganic transparent protective layer forming step is a step of forming the inorganic transparent protective layer described above by a sputtering method. The sputtering apparatus can be used. For this reason, an inorganic transparent protective layer with high barrier property can be formed at low cost. Moreover, since the said inorganic transparent protective layer can be formed with uniform thickness on the said colored layer and the said laminated pillar, the color filter for horizontal electric field liquid crystal drive systems with a high spacer height can be manufactured.

  The manufacturing method of the color filter for a horizontal electric field liquid crystal drive system of this invention has the said inorganic transparent protective layer formation process. Hereinafter, the inorganic transparent protective layer forming step in the production method of the present invention will be described.

1. Inorganic transparent protective layer forming step The inorganic transparent protective layer forming step in the method for producing a color filter for a horizontal electric field liquid crystal driving method of the present invention comprises the above black matrix, colored layer and lamination in the substrate for forming a color filter for a horizontal electric field liquid crystal driving method. In this step, an inorganic transparent protective layer is formed on the surface of the column by sputtering.

  A substrate for forming a color filter for a lateral electric field liquid crystal driving method used in this step is a substrate, a black matrix formed on the substrate and having an opening, and at least red, green and blue formed in the opening. It has a colored layer including three colored portions, and a laminated column formed by laminating a plurality of the colored layers on the black matrix. The substrate, the black matrix, the colored layer, and the laminated pillar constituting the substrate for forming a color filter for a horizontal electric field liquid crystal driving method are described in the above section “A. Color filter for a horizontal electric field liquid crystal driving method”. Since the contents are the same as those described above, description thereof is omitted here.

  In this step, an inorganic transparent protective layer is formed by a sputtering method. Here, the inorganic material used for the formation of the inorganic transparent protective layer and the film thickness of the formed inorganic transparent protective layer are described in “1. Inorganic transparent liquid crystal driving system color filter” in the above section “A. Since it is the same as the content described in the “protective layer”, description thereof is omitted here.

  As a condition of the sputtering method in this step, the inorganic material is adhered to the surface of the colored layer, laminated pillar, and black matrix in the substrate for forming a color filter for a lateral electric field liquid crystal driving method, and the inorganic transparent protection is performed. It is sufficient that the layer can be formed, and general sputtering conditions can be used.

2. Other Steps The method for producing a color filter for a lateral electric field liquid crystal driving method of the present invention may be any method as long as it has the inorganic transparent protective layer forming step, and may have other steps as necessary.
As such other steps, an alignment film forming step of forming an alignment film so as to cover the inorganic transparent protective layer may be performed after the inorganic transparent protective layer forming step.

The alignment film can be formed, for example, by applying an organic compound such as soluble polyimide, polyamic acid type polyimide, or modified polyimide by a general printing method or coating method, followed by baking.
The thickness of the alignment film can be about 500 to 1000 mm.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.

  Hereinafter, the present invention will be specifically described with reference to examples.

[Example 1]
1. Formation of Black Matrix As a transparent substrate, a glass substrate (Corning 1737 glass) having a size of 300 mm × 400 mm and a thickness of 0.7 mm was prepared. After cleaning this transparent substrate according to a conventional method, a negative photosensitive black resist (CFPR DN-83, manufactured by Tokyo Ohka Kogyo Co., Ltd.) is applied, exposed, developed, and heat-treated through a predetermined mask to obtain vertical stripe lines. A grid-like black matrix pattern having a width of 10 μm, a vertical stripe pitch of 150 μm, a horizontal stripe line width of 75 μm, and a horizontal stripe pitch of 450 μm was formed. Thus, openings having a short side of 150 μm and a long side of 450 μm were formed at intervals of 10 μm in the short side direction and at intervals of 75 μm in the long side direction. The region sandwiched between the openings adjacent to each other in the long side direction was a rectangular region having a length of 75 μm in the long side direction of the opening and a length of 150 μm in the short side direction of the opening.
Moreover, the area | region pinched | interposed into the opening part in which a blue coloring part is formed among the area | regions pinched | interposed into the opening part adjacent to a long side direction was made into the lamination | stacking column formation site | part.

2. Next, negative photosensitive resin composition for red colored layer, negative photosensitive resin composition for blue colored layer, negative photosensitive resin composition for green colored layer A product was prepared.

<Negative photosensitive resin composition for red colored layer>
・ Red pigment (Chromophthal Red A2B manufactured by Ciba Specialty Chemicals)
4.8 parts by weight / yellow pigment (PASFOL Yellow D1819, manufactured by BASF) 1.2 parts by weight / dispersant (Disperbic 161, manufactured by Big Chemie) 3.0 parts by weight / monomer (SR399, manufactured by Sartomer) 4.0 weight Part / Polymer I 5.0 parts by weight / Initiator (Irgacure 907 manufactured by Ciba Specialty Chemicals)
1.4 parts by weight / initiator (2,2′-bis (o-chlorophenyl) -4,5,4 ′, 5′-tetraphenyl-1,2′-biimidazole) 0.6 parts by weight / solvent ( Propylene glycol monomethyl ether acetate) 80.0 parts by weight

<Negative photosensitive resin composition for blue colored layer>
Blue pigment (BASF Heliogen Blue L6700F) 6.0 parts by weight Pigment derivative (Abyssia Solsperse 5000) 0.6 parts by weight Dispersant (Bic Chemie Dispersic 161) 2.4 parts by weight Monomer (SR399, manufactured by Sartomer) 4.0 parts by weight, Polymer I, 5.0 parts by weight, initiator (Irgacure 907, manufactured by Ciba Specialty Chemicals)
1.4 parts by weight / initiator (2,2′-bis (o-chlorophenyl) -4,5,4 ′, 5′-tetraphenyl-1,2′-biimidazole) 0.6 parts by weight / solvent ( Propylene glycol monomethyl ether acetate) 80.0 parts by weight

<Negative photosensitive resin composition for green colored layer>
Green pigment (Avisia Monastral Green 9Y-C) 4.2 parts by weight Yellow pigment (BASF Paliotor Yellow D1819) 1.8 parts by weight Dispersant (Bicchemy Disperbic 161) 3.0 Part by weight / monomer (SR399, manufactured by Sartomer) 4.0 part by weight / Polymer I, 5.0 parts by weight / initiator (Irgacure 907, manufactured by Ciba Specialty Chemicals)
1.4 parts by weight / initiator (2,2′-bis (o-chlorophenyl) -4,5,4 ′, 5′-tetraphenyl-1,2′-biimidazole) 0.6 parts by weight / solvent ( Propylene glycol monomethyl ether acetate) 80.0 parts by weight

The polymer I is based on 100 mol% of a copolymer of benzyl methacrylate: styrene: acrylic acid: 2-hydroxyethyl methacrylate = 15.6: 37.0: 30.5: 16.9 (molar ratio). 2-methacryloyloxyethyl isocyanate was added at 16.9 mol%, and the weight average molecular weight was 42500.
Here, the said weight average molecular weight is calculated | required as a standard polystyrene conversion value by gel permeation chromatography (GPC).

  Next, a negative photosensitive resin composition for a red colored layer is applied by a spin coating method so as to cover the black matrix on the transparent substrate, and exposed and developed through a photomask for the red colored layer, A red colored layer was formed. As a plan view shape of the red colored layer, a red vertical stripe line was formed to have a width of 145 μm at a predetermined position of the opening. Further, the red vertical stripe lines were formed so that the red colored portions formed in the openings adjacent in the long side direction were continuous.

  Further, a dot pattern having a diameter of 50 μm was formed on the black matrix pattern at the layered column forming portion.

  Next, a negative photosensitive resin composition for a blue colored layer is applied by a spin coating method so as to cover the black matrix on the transparent substrate, and is exposed and developed through a photomask for the blue colored layer, A blue colored layer was formed. As a plan view shape of this blue colored layer, a blue vertical stripe line was formed at a predetermined position of the opening so as to have a width of 145 μm. Further, the blue vertical stripe lines were formed so that the blue colored portions formed in the openings adjacent in the long side direction were continuous.

  Next, a negative photosensitive resin composition for a green colored layer is applied by a spin coating method so as to cover the black matrix on the transparent substrate, exposed and developed through a photomask for the green colored layer, A green colored layer was formed. As a plan view shape of the green colored layer, a green vertical stripe was formed at a predetermined position of the opening so as to have a line width of 145 μm. Moreover, the green vertical stripe was formed so that the green coloring part formed in the opening part adjacent to a long side direction might become continuous.

  In addition, a dot pattern having a diameter of 35 μm was formed on the blue colored layer on the layered column forming portion.

3. Formation of Inorganic Protective Film Next, an indium oxide film doped with gallium (inorganic protective film) was formed on the glass substrate on which the colored layer was formed by a sputtering method under the following conditions. The thickness of the inorganic protective film was 500 mm.

<Film formation conditions>
-Gas flow ratio Ar: O ₂ = 1: 0.1
・ Power: 1.5kW
・ Gas pressure: 3mTorr

[Example 2]
A color filter was prepared in the same manner as in Example 1 except that a tin-doped silicon oxide film (inorganic protective film) was formed on the glass substrate on which the colored layer was formed by the sputtering method under the following conditions. The thickness of the inorganic protective film was 1000 mm.

<Film formation conditions>
-Gas flow ratio Ar: O ₂ = 1: 0.5
・ Power: 0.5kW
・ Gas pressure: 3mTorr

[Comparative example]
Similarly to Example 1, a black matrix, a colored layer, and a laminated column were formed on a transparent substrate (glass substrate). Subsequently, the following protective film composition was apply | coated by the spin coat method as a composition for color filter protective films on the glass substrate in which the colored layer was formed.

(Composition of composition for protective film)
・ Methyl methacrylate-styrene-acrylic acid copolymer: 32 parts by weight ・ Epicoat 180S70 (manufactured by Japan Epoxy Resin Co., Ltd.): 18 parts by weight ・ Dipentaerythritol pentaacrylate: 42 parts by weight ・ Initiator (Ciba Specialty Chemicals) Irgacure 907) ... 8 parts by weight, 3-methoxybutyl acetate ... 300 parts by weight

Next, after drying under reduced pressure at a vacuum degree of about 1 × 10 ⁻² Torr and prebaking at 90 ° C., a photomask is placed at a distance of 100 μm from the coating film of the protective film composition, and 2 by a proximity aligner. Using an ultra-high pressure mercury lamp of 0.0 kW, the region corresponding to the colored layer forming region including the black matrix layer was irradiated with ultraviolet rays for 10 seconds. Next, it was immersed in a 0.05% aqueous potassium hydroxide solution (liquid temperature: 23 ° C.) for 1 minute and alkali-developed, and only the uncured portion of the coating film was removed to form a transparent protective film, thereby producing a color filter. .

[Evaluation]
The spacer height of the color filter produced as described above was measured. As a result, the spacer height in Example 1 was 3.5 μm. The spacer height of Example 2 was 3.5 μm. On the other hand, the spacer height of the comparative example was 2.3 μm. Thus, in the example, it was possible to form a color filter having stacked columns that can have a sufficient spacer height.
In addition, the said spacer height was measured on the basis of the said transparent protective layer surface formed on the said blue coloring part.

It is a schematic plan view which shows an example of the color filter for horizontal electric field liquid crystal drive systems of this invention. It is the sectional view on the AA line in FIG. It is process drawing which shows an example of the manufacturing method of the color filter for horizontal electric field liquid crystal drive systems of this invention. It is process drawing which shows an example of the manufacturing method of the conventional color filter.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,101 ... Board | substrate 2,102 ... Opening part 3,103 ... Black matrix 4R, 104R ... Red colored part 4G ... Green colored part 4B ... Blue colored part 5, 105 ... Laminated pillar 6 ... Inorganic transparent protective layer 10 , 100 ... Color filters 14R, 114R ... Red colored layer 14G, 114G ... Green colored layer 14B, 114B ... Blue colored layer 106 ... Resin transparent protective layer

Claims (4)

A substrate,
A black matrix formed on the substrate and provided with an opening;
A colored layer including colored portions of at least three colors of red, green and blue formed in the opening;
A stacked column in which a plurality of the colored layers are stacked on the black matrix;
An inorganic transparent protective layer made of an inorganic material, formed by a dry film forming method so as to cover the black matrix, the colored layer, and the laminated pillar;
A color filter for a lateral electric field liquid crystal driving method, comprising:   The inorganic material is doped with any of gallium, cerium, aluminum, carbon, tin and boron into silicon oxide, silicon nitride, silicon carbide, titanium oxide, niobium oxide, indium oxide, zinc oxide, tin oxide or tantalum oxide. 2. The color filter for a lateral electric field liquid crystal driving method according to claim 1, wherein the color filter is a liquid crystal driving method color filter.   The color filter for a lateral electric field liquid crystal driving method according to claim 1 or 2, wherein the thickness of the inorganic transparent protective layer is in a range of 200 to 1800 mm.   A substrate, a black matrix having an opening formed on the substrate, a colored layer including at least three colored portions of red, green, and blue formed in the opening, and a plurality of layers on the black matrix An inorganic transparent protective layer formed by adhering an inorganic material by a sputtering method to the surface of the black matrix, the colored layer, and the laminated pillar in the substrate for forming a color filter for a lateral electric field liquid crystal driving system having a laminated pillar in which the colored layer is laminated. A method for producing a color filter for a lateral electric field liquid crystal driving method, comprising: forming an inorganic transparent protective layer.

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