JP2008249311A - Dry air supply device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dry air supply device installable in a clean room, and capable of supplying dry air of a dew point of -30 to -10 °C to an objective space. <P>SOLUTION: This dry air supply device is characterized by having a dehumidifying rotor of carrying a dehumidifying agent, a first dividing member of dividing one opening surface of the dehumidifying rotor into a dehumidifying zone and a regeneration zone, a second dividing member of dividing the other opening surface of the dehumidifying rotor into a dehumidifying zone and a regeneration zone, a processing object air supply means for supplying processing object air to the dehumidifying zone, a dry air supply passage for supplying the dry air exhausted from the dehumidifying zone to the objective space arranged in the clean room, a regenerated air supply means for directly exhausting regeneration zone exhaust air to the clean room by supplying regenerated air to the regeneration zone, and a driving means for rotatingly driving the dehumidifying rotor. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a small and simple dry air supply apparatus that is installed in a clean room, dehumidifies the air in the clean room, and can supply the dry air to a target space.

  In the manufacture of semiconductors and liquid crystals, there are processes for performing various processes such as oxidation, diffusion, CVD and the like on semiconductor wafers, and various processing apparatuses (for example, heat treatment apparatuses) are used to perform these processes. .

  These processing apparatuses are installed in a clean room and are used in an environment where chemical pollutants are reduced. However, since it is necessary for the production of wafers to have very few contaminants, the cleanliness in the clean room is often not sufficient for countermeasures against contamination. Therefore, in order to cut off the contact with the air in the clean room, a method has been adopted in which the wafer is placed in a transfer container such as FOUP and transferred and stored so as not to touch the air in the clean room as much as possible.

  However, even in this case, when moving from the FOUP to the processing apparatus, the wafer comes into contact with the air in the clean room when the FOUP door is opened and closed, when the wafer is loaded into the processing apparatus, and when the carry-out opening is opened and closed. In order to prevent this, a clean booth is installed in the vicinity of the opening for carrying in and out the wafer of the processing apparatus so that the wafer can be taken in and out in cleaner air (for example, air from which organic substances have been removed). There may be.

  On the other hand, in the clean room and the clean booth, the humidity is kept at, for example, about 50% RH for static electricity countermeasures, and the humidity is high in the air. In addition, when an acidic substance is used in the processing apparatus, a small amount of vaporized acidic substance leaks into the clean booth as the loading / unloading opening / closing is performed. If it does so, the evaporated acidic substance will melt | dissolve in the moisture in a clean booth, and will cause the rust to generate | occur | produce in the metal etc. which comprise a clean booth and an apparatus. In addition, when moisture containing an acidic substance is present inside the processing apparatus or in the FOUP, a natural oxide film of the wafer grows and causes a reduction in quality of the wafer.

  In order to solve such a problem, there is a method in which a large amount of inert gas, for example, nitrogen gas, is supplied to the target space so that the atmosphere has an oxygen concentration of, for example, 30 ppm or less. However, this method is effective in reducing moisture, but is not practical because of the risk of lack of oxygen and the problem of increased running costs.

Therefore, if dry air is supplied to the target space instead of inert gas, even if the acidic substance leaks out, there is no moisture to dissolve, so the growth of the natural oxide film on the wafer by the moisture containing the acidic substance, The occurrence of rust in the processing apparatus can be reduced. In addition, since the risk of lack of oxygen can be avoided and the generation of particles can be prevented, an invention for supplying a dry gas having a low dew point to a target space is proposed as a technique for solving the above problems (for example, Japanese Patent Laid-Open 6-267933) and inventions of dry dehumidifiers that obtain dry gas with a low dew point (see, for example, JP 2000-296309, JP 63-50047, etc.).
JP-A-6-267933 JP 2000-296309 A Japanese Unexamined Patent Publication No. 63-50047

  However, in these conventional dry air supply apparatuses, the air to be treated is sucked from the outside of the clean room through the duct, dehumidified and supplied to the target space, and exhaust air from the regeneration zone or exhaust air from the purge zone Is discharged out of the clean room through the duct, the clean room and the dry air supply device are fixed through the duct and cannot be easily installed and removed.

  In addition, all of the conventional dry air supply devices are intended to obtain air with an extremely low dew point such as −60 ° C., and in the conventional dry air supply device, is the volume of the dehumidification rotor very large? Alternatively, since a plurality of dehumidification rotors are arranged in series, the volume of the dry air supply device is large and the amount of processing is large, which is not suitable as a device for supplying dry air to a narrow space like a clean booth. Further, the required dew point of the clean booth is 0 ° C. or less, preferably about −30 to −10 ° C., so that it is not required to make it an extremely low dew point as in the conventional dry air supply device. . This is because the airtightness in the clean booth is low, so even if air with an extremely low dew point is supplied, the clean booth will not have an extremely low dew point, so the dew point in the clean booth is about -60 ° C. This is because it is useless to set an extremely low dew point.

  Furthermore, in the conventional dry air supply device, moisture in the clean room is discharged out of the clean room, so it is necessary to humidify with an air conditioner to replenish the discharged water, resulting in a problem of energy loss. .

  Accordingly, an object of the present invention is to provide a dry air supply device that can be installed in a clean room and can supply dry air having a dew point required for the target space to the target space.

  As a result of intensive studies to solve the above-described problems in the prior art, the present inventors have (1) used an amorphous metal oxide porous material or a water absorbent resin as a dehumidifying agent, and regenerated the dehumidifying zone. By increasing the zone area ratio to 100/360 to 200/360, the dehumidifying agent is sufficiently regenerated even if the temperature of the regeneration air is lowered or the temperature of the heating member is lowered. The regeneration efficiency is increased and the dehumidification performance is enhanced; (2) the temperature of the dry air and the temperature of the regeneration zone exhaust air are not excessively increased; and (3) the exhaust air from the regeneration zone is The present inventors have found that it can be discharged directly into a clean room, and have completed the present invention.

That is, the present invention (1) includes a dehumidifying rotor carrying a dehumidifying agent,
A first split member that divides one opening surface of the dehumidification rotor into a dehumidification zone and a regeneration zone;
A second divided member that divides the other opening surface of the dehumidification rotor into a dehumidification zone and a regeneration zone;
To-be-treated air supply means for supplying the to-be-treated air to the dehumidifying zone;
A dry air supply path for supplying dry air discharged from the dehumidification zone to a target space provided in a clean room;
Regeneration air supply means for supplying regeneration air to the regeneration zone and discharging regeneration zone exhaust air directly to the clean room;
Drive means for rotating the dehumidifying rotor;
The present invention provides a dry air supply device characterized by comprising:

Further, the present invention (2) includes a dehumidifying rotor carrying a dehumidifying agent,
A first split member that divides one opening surface of the dehumidification rotor into a dehumidification zone, a regeneration zone, and a purge zone;
A second divided member that divides the other opening surface of the dehumidification rotor into a dehumidification zone, a regeneration zone, and a purge zone;
To-be-treated air supply means for supplying the to-be-treated air to the dehumidifying zone;
A dry air supply path for supplying dry air discharged from the dehumidification zone to a target space provided in a clean room;
Regeneration air supply means for supplying regeneration air to the regeneration zone and discharging regeneration zone exhaust air directly to the clean room;
A heating member for heating the regeneration air supplied to the regeneration zone;
Purge air supply means for supplying purge air to the purge zone and discharging purge zone exhaust air;
Drive means for rotating the dehumidifying rotor;
The present invention provides a dry air supply device characterized by comprising:

  ADVANTAGE OF THE INVENTION According to this invention, the dry air supply apparatus which can be installed in a clean room and can supply the dehumidification air of the dew point requested | required of the target space can be provided.

The dry air supply device according to the first aspect of the present invention includes a dehumidification rotor on which a dehumidifying agent is supported,
A first split member that divides one opening surface of the dehumidification rotor into a dehumidification zone and a regeneration zone;
A second divided member that divides the other opening surface of the dehumidification rotor into a dehumidification zone and a regeneration zone;
To-be-treated air supply means for supplying the to-be-treated air to the dehumidifying zone;
A dry air supply path for supplying dry air discharged from the dehumidification zone to a target space provided in a clean room;
Regeneration air supply means for supplying regeneration air to the regeneration zone and discharging regeneration zone exhaust air directly to the clean room;
Drive means for rotating the dehumidifying rotor;
It is a dry air supply apparatus which has.

  A dry air supply device according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic diagram showing a dehumidification rotor installed in a dry air supply apparatus according to the first embodiment of the present invention, and FIG. 2 is an A portion of an opening surface 2a of the dehumidification rotor 1 in FIG. FIG. 3 is an enlarged perspective view, FIG. 3 is a schematic perspective view of the dry air supply device according to the first embodiment of the present invention, and FIG. 4 is a schematic diagram showing an air ventilation path in the dry air supply device of FIG. FIG. The dry air supply device shown in FIGS. 1 to 4 is an example of the dry air supply device of the first aspect of the present invention, and the dry air supply device of the first aspect of the present invention is limited to this. Is not to be done. Further, for simplification of the description of the drawings, the description of the ventilation cavity of the dehumidifying rotor is omitted in FIG. 4 (the same applies to FIGS. 6, 7, 12, 13, 14 and 16). .

  In FIG. 1, the dehumidifying rotor 1 is formed with a ventilation cavity 4 for ventilating the air to be treated and the regeneration air in parallel to the rotor shaft 13. The dehumidifying rotor 1 has opening surfaces 2a and 2b at both ends. The opening surfaces 2a and 2b are entrances and exits for the air to be treated and the regeneration air. The rotor shaft 13 is attached to the center of the dehumidifying rotor 1 and is a rotating shaft for rotating in the rotation direction 14. As shown in FIG. 2, the ventilation cavity 4 is formed by alternately laminating flat portions 5 and corrugated portions 6. The dehumidifying rotor 1 is a rotor in which a dehumidifying agent is supported on a fibrous carrier 7 having the shape of the dehumidifying rotor 1.

  One opening surface 2a of the dehumidifying rotor 1 is divided into a dehumidifying zone 8 and a regeneration zone 9 by a first dividing member 3a. The other opening surface 2b of the dehumidifying rotor 1 is divided into a dehumidifying zone and a regeneration zone by a second dividing member (not shown).

  The dehumidification rotor 1 is installed in the rotor case 21 of the dry air supply device 20 shown in FIG. A driving means (not shown) is attached to the rotor shaft 13 in order to rotationally drive the dehumidifying rotor 1. The first divided member 3a is fixed to the rotor case 21 so as to be disposed in a gap between the rotor case 21 and the opening surface 2a of the dehumidifying rotor 1, and the second divided member is The rotor case 21 is fixed to the rotor case 21 so as to be disposed in a gap between the rotor case 21 and the opening surface 2b of the dehumidifying rotor 1. In FIG. 3, the position where the first divided member 3a is fixed is indicated by a dotted line. Further, the rotor case 21 has a to-be-treated air suction duct 22 which is a suction port for supplying the to-be-treated air A to the dehumidification zone on the opening surface 2b side, and the dry air B on the opening surface 2a side. A dry air discharge duct 23 which is a discharge port when discharging from the dehumidification zone 8, a regeneration air suction duct 24 which is a suction port when supplying the regeneration air C to the regeneration zone 9 on the opening surface 2a side, and a regeneration zone discharge A regeneration zone exhaust air discharge duct 25 is provided as an exhaust port for discharging the air D from the regeneration zone on the opening surface 2b side. The dry air discharge duct 23 is connected to a dry air supply path 26 for supplying the dry air B discharged from the dehumidification zone 8 on the opening surface 2a side to the target space.

  As shown in FIG. 4, the air to be treated A is supplied to the dehumidification zone on the opening surface 2b side, and the dry air B is discharged from the dehumidification zone 8 on the opening surface 2a side. A process air supply means 27 for supplying the target space through the supply path 26 is installed in the dry air discharge duct 23. Also, the regeneration air supply means 28 for supplying the regeneration air C to the regeneration zone 9 on the opening surface 2a side and exhausting the regeneration zone exhaust air D from the regeneration zone on the opening surface 2b side, An electric heater 29 for heating the regeneration air C is installed in the regeneration air suction duct 24.

  FIG. 3 shows an example in which the treated air suction duct 22, the dry air discharge duct 23, the regeneration air suction duct 24, and the regeneration zone exhaust air discharge duct 25 are installed. Installation of the duct is optional, and the air to be treated 27, the regeneration air supply 28 and the electric heater 29 can be installed directly on the rotor case 21 or by changing the installation position. Installation of the duct can be omitted.

  FIG. 3 shows an example in which the dehumidification rotor is placed vertically. However, in the dry air supply device according to the first aspect of the present invention, the dehumidification rotor is arranged as shown in FIGS. It can also be placed horizontally. FIG. 5 is a schematic end view of a dry air supply apparatus according to an embodiment in which the dehumidification rotor is placed horizontally, and FIG. 6 is a schematic perspective view showing an air ventilation path in the dry air supply apparatus of FIG. It is. In the dry air supply device 201, the dehumidification rotor 1 is placed horizontally and installed in the rotor case 211 via the rotor shaft 13, and at this time, a large gap is taken between the rotor case 211 and the dehumidification rotor 1, This gap is divided into a gap 212 on the dehumidification zone side and a gap 213 on the regeneration zone side by a divided member (first divided member or second divided member). In the gap 212 on the dehumidification zone side, the air supply means 27 to be treated is installed, and in the gap 213 on the regeneration zone side, the regeneration air supply means 28 and the electric heater 29 are installed. The rotor case 211 is provided with a regeneration air supply path 214 for supplying regeneration air C to the clearance 213 on the regeneration zone side in a direction parallel to the dehumidifying rotor 1. And as shown in FIG. 6, the to-be-processed air A is supplied from the side surface of the dry air supply device 201, the dry air B is discharged downward, the regeneration air C is supplied from the side surface, and the regeneration zone from the side surface. Exhaust air D is discharged. In the dry air supply apparatus 201, a portion of the rotor case 211 corresponding to the gap 212 on the dehumidification zone side serves as the dry air supply path.

  The fibrous carrier 7 has a honeycomb structure as shown in FIG. The fibrous carrier 7 having the honeycomb structure includes, for example, a porous flat fibrous carrier and a corrugated fibrous carrier obtained by corrugating the flat fibrous carrier, using an inorganic adhesive or an organic adhesive. It is manufactured by adhering at the peak of the corrugated fibrous carrier and laminating. At this time, since a substantially semi-cylindrical cavity formed between the flat fibrous carrier and the corrugated fibrous carrier serves as an air flow path, both of them are parallel to the rotor shaft 13. Laminated so as to be formed in the direction. As a method of performing the lamination, for example, a method of laminating a pair of the flat fibrous carrier and the corrugated fibrous carrier, winding up into a roll shape, and laminating can be mentioned. 1 and 2, the fibrous carrier 7 having a honeycomb structure is shown, but the structure of the fibrous carrier 7 is not limited thereto, and a ventilation cavity is provided in a direction parallel to the rotor axis. It only has to be formed.

  The fibrous carrier 7 is a woven or non-woven fabric formed from fibers. The fiber is not particularly limited, and glass fiber such as E glass fiber, NCR glass fiber, ARG fiber, ECG fiber, S glass fiber, and A glass fiber, and its chopped strand, ceramic fiber, alumina fiber, mullite fiber, silica Examples thereof include inorganic fibers and organic fibers such as fibers, rock wool fibers, and carbon fibers. As the organic fiber, an aramid fiber, a nylon fiber, a polyethylene terephthalate fiber, or the like can be used. It is preferable to use inorganic fibers as the fibers of the fibrous carrier because the strength of the dehumidifying rotor can be increased.

Examples of the fibers forming the fibrous carrier include biosoluble inorganic fibers. The biologically soluble inorganic fiber refers to an inorganic fiber having a physiological saline dissolution rate at 40 ° C. of 1% or more. More specifically, examples of the biologically soluble inorganic fibers include those disclosed in JP 2000-220037, JP 2002-68777, JP 2003-73926, or JP 2003-212596. inorganic fibers described, that is, the total content of SiO ₂ and CaO is more than 85 mass%, 0.5 to 3.0 wt% MgO and 2.0 to 8.0 wt% of _P 2 O ₅ and an inorganic fiber having a carcinogenicity index (KI value) of 40 or more according to German hazardous substance regulations, SiO ₂ , MgO and TiO ₂ as essential components, SiO ₂ , MgO and manganese oxide are essential inorganic fibers as a _component, SiO 2 52 to 72 wt%, _Al less than 2 _{O 3} 3 wt%, MgO 0 to 7 wt%, CaO 7.5 to 9.5 _wt%, B 2 _{O 3} 12 wt%, BaO 0 to 4 wt%, SrO 0 to 3.5 _wt%, Na 2 O from 10 to 20.5 _wt%, K 2 O 0.5 to 4.0 wt% and _P 2 _O 5 0 Inorganic fiber containing ˜5 mass%, SiO ₂ 75-80 mass%, Al ₂ O ₃ 1.0-3.0 mass%, MgO 16-20 mass%, CaO 3.0-5.0 mass%, K Inorganic fibers containing ₂ O and / or Fe ₂ O _{3 0 to} 2.0 mass% can be mentioned. The biosoluble inorganic fiber may be one type or a combination of two or more types.

  A method for measuring the physiological saline dissolution rate will be described. First, 1 g of a sample obtained by pulverizing inorganic fibers to 200 mesh or less and 150 ml of physiological saline are placed in an Erlenmeyer flask (300 ml) and placed in an incubator at 40 ° C. The Erlenmeyer flask is then subjected to horizontal shaking at 120 revolutions per minute for 50 hours. After shaking, the mixture is filtered, and the concentration (mg / L) of each element is measured by ICP emission analysis for silicon, magnesium, calcium and aluminum contained in the obtained filtrate. Then, from the concentration of each element in the filtrate and the content (% by mass) of each element in the inorganic fiber before dissolution, the physiological saline dissolution rate B (%) is calculated by the following formula (1). The concentration of each element obtained by ICP emission analysis is as follows: silicon element concentration: c1 (mg / L), magnesium element concentration: c2 (mg / L), calcium element concentration: c3 (mg / L) and The aluminum element concentration c4 (mg / L), the content of each element in the inorganic fiber before dissolution, the silicon element content: d1 (mass%), the magnesium element content: d2 (mass%), Calcium element content: d3 (mass%) and aluminum element content: d4 (mass%).

B (%) = {filtrate amount (L) × (c1 + c2 + c3 + c4) × 100} / {amount of inorganic fiber before dissolution (mg) × (d1 + d2 + d3 + d4) / 100} (1)
The fibrous carrier is a porous body having a large number of voids between the fibers of the fibrous carrier. The inter-fiber porosity of the fibrous carrier is usually 80 to 95%, and the thickness of the fibrous carrier is usually 0.1 to 1 mm. The inter-fiber void ratio means a ratio of a portion obtained by subtracting the volume of fibers in the fibrous carrier from the apparent volume of the fibrous carrier in the apparent volume of the fibrous carrier.

  In the description of the dehumidifying rotor 1, the fibrous carrier 7 was obtained by forming a flat fibrous carrier into a honeycomb structure and then supporting the dehumidifying agent on the resulting molded product. First, a flat fibrous carrier carrying the dehumidifying agent was prepared, and then the flat fibrous carrier carrying the dehumidifying agent was formed into a honeycomb structure. It may be obtained.

  The dehumidifying agent supported on the dehumidifying rotor 1 is an amorphous metal oxide porous body or a water absorbent resin.

  The saturated moisture absorption amount of the amorphous metal oxide porous body when left in an environment of 25 ° C. and 90% RH is 10 to 60% by mass, preferably 20 to 50% by mass. When the saturated moisture absorption amount of the amorphous metal oxide porous body when left in an environment of 25 ° C. and 90% RH is less than the above range, the dehumidifying performance of the dry air supply device is lowered, and 60 mass It is practically difficult to produce more than%. Further, the saturated moisture absorption amount of the water absorbent resin when left in an environment of 25 ° C. and 90% RH is 10 to 120% by mass, preferably 20 to 90% by mass. When the saturated moisture absorption amount of the water-absorbent resin when left in an environment of 25 ° C. and 90% RH is less than the above range, the dehumidifying performance of the dry air supply device becomes low. Therefore, the dehumidification rotor is greatly deformed, or the water-absorbing resin is liquefied, which makes it difficult to use the dehumidification rotor.

In the present invention, the saturated moisture absorption when measured in an environment of 25 ° C. and 90% RH is measured by the following procedure.
(I) The measurement sample is dried at 200 ° C. for 2 hours, and the mass E (g) after drying for 2 hours is measured.
(Ii) The dried measurement sample is allowed to stand for 48 hours in a container adjusted to 25 ° C. and 90% RH.
(Iii) The mass F (g) of the measurement sample after standing for 48 hours is measured.
(Iv) The saturated moisture absorption is expressed by the following formula:
Saturated moisture absorption (%) = {(FE) / E} × 100
Calculated by

  The dehumidifying peak temperature of the amorphous metal oxide porous body is 50 to 120 ° C, preferably 60 to 100 ° C. Since the dehumidification peak temperature of the amorphous metal oxide porous body is within the above range, the regeneration efficiency of the dehumidifying agent is increased, so that the dehumidifying performance of the dry air supply device is enhanced.

  In the present invention, the dehumidifying peak temperature is a value determined as follows. First, the measurement sample is allowed to stand at 25 ° C. and 50% RH until saturation is reached, and moisture is adsorbed. Next, 20 mg of a measurement sample adsorbing moisture is collected, and the temperature is raised from room temperature to 600 ° C. at 10 ° C./min with a differential scanning calorimeter, and the dehumidification energy is measured. And let the temperature of the peak top of the obtained dehumidification energy curve be this dehumidification peak temperature. The dehumidification peak temperature is an index indicating the ease of dehumidification when the temperature is lowered. For example, the dehumidification peak temperature of the dehumidifying agent a is 100 ° C., and the dehumidifying peak temperature of the dehumidifying agent b is When it is assumed that the temperature is 80 ° C., the lower limit of the temperature at which the dehumidifying agent b can be dehumidified is lower than the lower limit of the temperature at which the dehumidifying agent a can be dehumidified. The dehumidifying peak temperature does not directly indicate the temperature at which the dehumidifying agent is completely dehumidified.

  The amorphous metal oxide porous body is not particularly limited as long as the moisture absorption amount and the dehumidification peak temperature are within the above ranges, and examples thereof include silica gel, silica alumina amorphous porous body, mesoporous silica and the like. It is done. The water-absorbing resin is not particularly limited as long as the amount of moisture absorption is within the above range, and examples thereof include ion exchange resins, polyacrylate resins, and alkylene oxide resins. The dehumidifying agent may be a single type or a combination of two or more types, or a combination of the amorphous metal oxide porous body and the water absorbent resin. The dehumidifying agent is one or more selected from silica gel, silica-alumina amorphous porous material, mesoporous silica, ion exchange resin, polyacrylate resin and alkylene oxide resin. It is preferable at the point from which the dehumidification performance of a supply apparatus becomes high.

  The silica-alumina amorphous porous material is a gel composed of silica and alumina, and is described in, for example, JP-A-63-252909. The mesoporous silica is a porous body having siliceous mesopores, and is described, for example, in JP-T-5-503499.

  The ion exchange resin may be a strong acid cation exchange resin, a weak acid cation exchange resin, a strong basic anion exchange resin, or a weak basic anion exchange resin.

  Examples of the polyacrylate resin include polyacrylate crosslinked products, self-crosslinked polyacrylates, starch-acrylate graft copolymer crosslinked products, vinyl alcohol-acrylate copolymers, acrylamide copolymers. Examples include hydrolysates of combined cross-linked products.

  The alkylene oxide resin is a polyalkylene oxide polymer, and examples thereof include a polyethylene oxide polymer, a polypropylene oxide polymer, and a polyethylene oxide-polypropylene oxide polymer.

  The method for supporting the dehumidifying agent on the fibrous carrier 7 is not particularly limited. For example, the fibrous carrier 7 is dipped or coated with a slurry containing the dehumidifying agent and a binder, and then, The method of drying is mentioned. The immersion treatment is performed, for example, by allowing the fibrous carrier 7 to stand in a slurry containing the dehumidifying agent and a binder. Moreover, this application | coating process is performed by apply | coating the slurry containing this dehumidifying agent and a binder to this fibrous support | carrier 7 using a spray etc., for example.

  The binder is not particularly limited, and examples thereof include inorganic binders such as silica sol, alkali silicate, alumina sol, and titania sol; polyethylene resins, polyolefin resins such as polypropylene resins, polyester resins such as polyethylene terephthalate resins, acrylic resins, fluorine Examples thereof include organic binders that are emulsions of organic resins such as resins.

  FIG. 7 shows a view (7-1) when the dehumidification rotor 1 is viewed from the opening surface 2a side and a view (7-2) when the dehumidification rotor 1 is viewed from the opening surface 2b side. Since this 1st division member and this 2nd division member are arrange | positioned in the position and shape which become object on both sides of this dehumidification rotor 1, this 1st division member 3a when it sees from this opening surface 2a side And the position and shape (7-2) of the second divided member 3b when viewed from the opening surface 2b side are symmetrical. In FIG. 7, the first dividing member 3 a divides the opening surface 2 a so that the shape of the reproduction zone 9 is substantially fan-shaped, but the reproduction is divided by the first dividing member. The shape of the zone 9 is not particularly limited, and other examples include a rectangle and a circle. Similarly, the shape of the reproduction zone on the side of the opening surface 2b divided by the second divided member is not particularly limited, and examples thereof include a sector, a rectangle, and a circle.

  In the dry air supply device of the first aspect of the present invention, when the dehumidification rotor is viewed from the opening surface side, the ratio of the area of the regeneration zone 9 to the area of the opening surface 2a of the dehumidification rotor (regeneration zone 9 / The opening surface 2a) of the dehumidifying rotor is 100/360 to 200/360, preferably 110/360 to 190/360, particularly preferably 120/360 to 180/360. When the ratio of the area of the regeneration zone to the area of the opening surface of the dehumidifying rotor is within the above range, the dehumidifying performance of the dry air supply device is enhanced.

  In the present invention, the area of the dehumidification zone refers to the area of the dehumidification zone in the opening surface 2a of the dehumidification rotor, and the area of the regeneration zone refers to the area of the regeneration zone in the opening surface 2a of the dehumidification rotor. Further, the area of the purge zone refers to the area of the purge zone in the opening surface 2a of the dehumidifying rotor.

  When the shape of the regeneration zone divided by the first divided member and the second divided member is a fan shape, the ratio of the area of the regeneration zone to the area of the opening surface of the dehumidification rotor is the ratio of the area of the first divided member. The installation angle can be adjusted by the installation angle of the second divided member (reference numeral 30 in FIG. 7). In this case, the installation angle of the first divided member and the installation angle of the second divided member are 100 to 100. It is 200 degrees, preferably 110 to 190 degrees, particularly preferably 120 to 180 degrees.

  The air to be treated 27 is not particularly limited, and examples thereof include a fan, a blower, and a compressed air supply device. 3 and 4 show an embodiment in which the air supply means to be processed is installed at the rear stage of the dehumidifying rotor 1, and in such an embodiment, the air supply means to be processed is air. , The air to be treated A is supplied to the dehumidifying rotor 1. Further, the processing air supply means may be installed in front of the dehumidification rotor. In this case, the processing air supply means blows air so that the processing air A is converted into the dehumidification rotor. 1 is supplied. Further, the air to be treated may be installed at both the front stage and the rear stage of the dehumidifying rotor.

  The regeneration air supply means 28 is not particularly limited, and examples thereof include a fan, a blower, and a compressed air supply device. The regeneration air supply means 28 is a member for supplying the regeneration air C to the regeneration zone, passing the regeneration air C through the dehumidification rotor, and discharging the regeneration zone exhaust air D directly from the regeneration zone to the clean room. . Note that the exhaust of the regeneration zone exhaust air D directly from the regeneration zone to the clean room means that a duct for exhausting the regeneration zone exhaust air D to the outside of the clean room or moisture in the regeneration zone exhaust air D is removed. It means that there is no condenser to condense. FIG. 3 and FIG. 4 show an example in which the regeneration air supply means is installed in the front stage of the dehumidification rotor 1. In such an example, the regeneration air supply means blows air. As a result, the regeneration air C is supplied to the dehumidifying rotor 1. Further, the regeneration air supply means may be installed at a stage subsequent to the dehumidification rotor. In this case, the regeneration air supply means sucks air so that the regeneration air C is supplied to the dehumidification rotor 1. Is done. Further, the regeneration air supply means may be installed in both the front stage and the rear stage of the dehumidification rotor.

  In the dry air supply device according to the first aspect of the present invention, the regeneration air C supplied to the regeneration zone 9 is heated air. And in the form example of the dry air supply device of the first form of the present invention, like the dry air supply apparatus 20, a form example having the electric heater and a form not having a heating member such as an electric heater There is an example. When the dry air supply device according to the first aspect of the present invention is an embodiment having the electric heater, the regeneration air C is heated by the electric heater. In addition, when the dry air supply device according to the first aspect of the present invention is a configuration example that does not have a heating member such as an electric heater, the regeneration air C is previously supplied before being supplied to the dry air supply device. Heated and fed to the regeneration zone. The heat source for preheating the regeneration air C can also be obtained by exchanging heat from the exhaust heat of the semiconductor manufacturing apparatus or hot water inside and outside the clean room.

  Of the dry air supply apparatus according to the first aspect of the present invention, the embodiment having the electric heater has a higher temperature of the regeneration air C, and the dehumidification rotor is also heated by the radiant heat of the electric heater. The temperature of the dehumidifying rotor increases. On the other hand, in the embodiment having no heating member such as the electric heater, the temperature of the regeneration air C is easily adjusted, and the dehumidification rotor is not heated by radiant heat. Therefore, the embodiment having the electric heater As compared with the above, the temperature of the dehumidifying rotor can be lowered. Therefore, in the dry air supply apparatus according to the first embodiment of the present invention that does not have a purge zone, it is preferable to supply the pre-heated regeneration air C without installing a heating member such as the electric heater.

  The driving means is not particularly limited as long as the dehumidifying rotor is rotationally driven, and examples thereof include a motor.

  The dry air supply device according to the first aspect of the present invention may further include a cooling coil or a heat exchanger for cooling the dry air B. In the clean room, piping of cooling water used for cooling in various devices may be installed. In this case, the cooling water is extracted from the piping of the cooling water, and the cooling coil or By flowing it through the heat exchanger, the dry air B can be cooled by a simple method.

  The dry air supply device according to the first aspect of the present invention is installed in a clean room, and is used to continuously supply dry air to a target space using air in the clean room as air to be treated. For example, as shown in FIG. 8, the dry air supply device 20 is installed in a clean room 31, and the dry air B obtained by dehumidifying the air to be treated A in the clean room 31 is supplied to the dry air. It supplies to the target space 32 via the path 26. The wall surface of the target space 32 is formed of, for example, a transparent resin cloth that does not transmit air. In the present invention, the target space refers to a local clean space such as a clean booth or a clean bench provided in a clean room that requires dry air, for example, a transport container containing a wafer, For example, a clean booth installed between a wafer and a processing container that performs a predetermined process. In FIG. 8, only the dehumidifying rotor 1 among the members of the dry air supply device is indicated by a dotted line (the same applies to FIGS. 9 and 15).

  Further, as shown in FIG. 9, the dry air supply device 201, which is an embodiment in which the dehumidifying rotor is placed horizontally, is installed on the target space 32.

  The operation of the dry air supply device 20 or the dry air supply device 201 is performed as follows. First, the air to be treated A is supplied by the air supply means 27 to the dehumidifying zone 8 on the opening surface 2b side, passes through the dehumidifying rotor 1, and the dry air B is supplied to the opening surface. The air is discharged from the dehumidifying zone 8 on the 2a side to the outside of the dehumidifying rotor 1. At this time, when the air to be treated A comes into contact with the dehumidifying agent when passing through the dehumidifying rotor 1, moisture in the air to be treated A moves to the dehumidifying agent. A is dehumidified. Then, the dry air B from which moisture has been dehumidified is supplied to the target space 32.

  Next, when the dehumidifying rotor 1 rotates, the dehumidifying agent that has absorbed moisture in the dehumidifying zone 8 moves to the regeneration zone 9. Then, the regeneration air C heated by the regeneration air supply means 28 through the electric heater 29 is supplied to the regeneration zone 9 on the opening surface 2a side, passes through the dehumidification rotor 1, and The regeneration zone exhaust air D is exhausted out of the dehumidification rotor 1 from the regeneration zone 9 on the opening surface 2b side. At this time, when the regenerated air C comes into contact with the dehumidifying agent, moisture in the dehumidifying agent moves to the regenerating air C, so that the dehumidifying agent is dehumidified.

  Next, the dehumidifying agent dehumidified in the regeneration zone 9 moves to the dehumidifying zone 8 as the dehumidifying rotor 1 rotates, and is used again for dehumidifying the air to be treated A.

  The dry air supply device is configured such that the air to be treated A and the regeneration air C are continuously supplied to the dehumidification rotor 1 while the dehumidification rotor 1 rotates continuously or intermittently. 20 or the dry air supply device 201 is operated, and the dry air B is continuously supplied to the target space 32.

  Since the dry air B is continuously supplied to the target space 32, the air in the target space 32 is discharged to the clean room 31 by the amount of the supplied dry air B, and the target space 32 The inside of 32 is a positive pressure. As a result, the dew point of the air in the target space 32 is always kept low.

  The dew point of the dry air B obtained by treating the air to be treated A by the dry air supply device 20 or the dry air supply device 201 is 0 ° C. or less, preferably −30 to −10 ° C. Moreover, the temperature of this dry air B is 1-10 degreeC higher than the temperature in a clean room.

  The rotation of the dehumidifying rotor 1 may be continuous or intermittent. When the dehumidifying rotor 1 rotates continuously, the rotation speed is not particularly limited, but is approximately 10 to 120 rotations / hour, preferably 20 to 80 rotations / hour. When the dehumidifying rotor 1 rotates intermittently, the amount of rotation of the dehumidifying rotor 1 per rotation is 1/12 to 1/3 rotation, and the rotation interval may be either regular or irregular. . It is preferable to continuously rotate the dehumidifying rotor 1 in that a certain amount of the regenerated dehumidifying agent is always supplied to the dehumidifying zone, so that the dehumidifying efficiency is high and the dehumidifying performance is stable.

  8 and 9, the entire amount of the air to be treated is the air in the clean room. However, in the dry air supply device according to the first aspect of the present invention, the air in the clean room has the target space. The air in the target space extracted from the air can be mixed, and a part of the air to be treated can be used as the air in the clean room and the other part can be used as the air in the target space. May be air in the target space extracted from the target space.

  In the conventional dry air supply apparatus, faujasite type zeolite is used as a dehumidifying agent, and a dehumidifying zone is widely set in order to increase the dehumidifying efficiency. In addition, although zeolite has a dew point of about −60 ° C. and the dew point of dry air can be extremely low, it is not dehumidified unless it is at a high temperature. Therefore, in the conventional dry air supply apparatus, heating for heating regeneration air is performed. The temperature of the member was set high. The dehumidification peak temperature of the faujasite type zeolite is usually 120 ° C. or higher.

  If the dehumidifying agent according to the dry air supply device of the first aspect of the present invention is replaced with zeolite, a dry air supply device in which such zeolite is used as a dehumidifying agent is installed in a clean room, When the air in the clean room is dehumidified and dry air is supplied to the target space, the temperature of the heating member must be increased in order to regenerate the zeolite, and as a result, the air is supplied to the target space. The temperature of the dry air and the temperature of the regeneration zone exhaust air discharged to the clean room become too high. For this reason, since the temperatures of the target space and the clean room become too high, the load on the air conditioning of the clean room increases. In order to reduce the load on the air conditioning of the clean room, the dry air and the regeneration zone exhaust air can be cooled using a cooling device. In that case, the air is heated to a high temperature by a heating member and discharged. Therefore, the energy efficiency is low and a dedicated cooling device is required.

  On the other hand, the dry air supply device of the first aspect of the present invention uses the amorphous metal oxide porous body or the water absorbent resin that is dehumidified at a low temperature as compared with zeolite as a dehumidifying agent. The temperature of the heating member and the regeneration air can be lowered as compared with the case where zeolite is used as a dehumidifying agent. In the dry air supply device according to the first aspect of the present invention, the ratio of the area of the regeneration zone to the area of the opening surface of the dehumidification rotor is made larger than that of the conventional dry air supply device. Increases regeneration efficiency and enhances dehumidification performance.

  Therefore, in the dry air supply device of the first aspect of the present invention, it is possible to supply dry air having a dew point required as air in the target space, and the temperature of the dry air and the temperature of the regeneration zone exhaust air Can be kept from becoming too high. Thus, in the dry air supply apparatus according to the first aspect of the present invention, the air in the clean room can be used as the air to be treated, and the regeneration zone exhaust air can be directly discharged to the clean room.

  When the air in the clean room can be used as the air to be treated and the regeneration zone exhaust air can be directly discharged to the clean room, the duct for taking the air to be treated from outside the clean room and the regeneration zone exhaust gas are discharged to the outside of the clean room. Since it is not necessary to provide a duct, the dry air supply device of the first aspect of the present invention only needs to connect the dry air supply path and the target space. Therefore, installation and removal of the dry air supply device according to the first aspect of the present invention are extremely simple.

  Therefore, the dry air supply device according to the first aspect of the present invention is preferably used as a dry air supply device that is installed in a clean room, dehumidifies the air in the clean room, and supplies the dry air to the target space. Used.

  In the present invention, a purge zone can be provided between the regeneration zone and the dehumidification zone.

That is, the dry air supply device of the second aspect of the present invention includes a dehumidification rotor carrying a dehumidifying agent,
A first split member that divides one opening surface of the dehumidification rotor into a dehumidification zone, a regeneration zone, and a purge zone;
A second divided member that divides the other opening surface of the dehumidification rotor into a dehumidification zone, a regeneration zone, and a purge zone;
To-be-treated air supply means for supplying the to-be-treated air to the dehumidifying zone;
A dry air supply path for supplying dry air discharged from the dehumidification zone to a target space provided in a clean room;
Regeneration air supply means for supplying regeneration air to the regeneration zone and discharging regeneration zone exhaust air directly to the clean room;
A heating member for heating the regeneration air supplied to the regeneration zone;
Purge air supply means for supplying purge air to the purge zone and discharging purge zone exhaust air;
Drive means for rotating the dehumidifying rotor;
It is a dry air supply apparatus which has.

  The dry air supply apparatus of the second aspect of the present invention is mainly different from the dry air supply apparatus of the first aspect of the present invention in that a purge zone is provided between the regeneration zone and the dehumidification zone. However, there are many other similar points, and different points from the dry air supply device according to the first embodiment of the present invention will be described below.

  The dry air supply apparatus of the 2nd form of this invention is demonstrated with reference to FIGS. FIG. 10 is a schematic view showing a dehumidification rotor installed in the dry air supply device of the second embodiment of the present invention, and FIG. 11 is a schematic view of the dry air supply device of the second embodiment of the present invention. FIG. 12 is a schematic perspective view showing an air ventilation path in the dry air supply device of FIG. 11, and FIG. 13 is a view of the dehumidification rotor 1 as viewed from the opening surface 2a side (13). -1) and FIG. 13B are views (13-2) of the dehumidifying rotor 1 viewed from the opening surface 2b side. The dry air supply apparatus shown in FIGS. 10 to 13 is an example of the dry air supply apparatus according to the second aspect of the present invention, and the dry air supply apparatus according to the second aspect of the present invention is limited to this. Is not to be done. In addition, in FIGS. 10 to 13, the same reference numerals are given to the same points as the dry air supply device of the first embodiment of the present invention.

  In FIG. 10, one opening surface 2a of the dehumidifying rotor 1 is divided into a dehumidifying zone 8, a regeneration zone 9, and a purge zone 40 by a first dividing member 43a. The other opening surface 2b of the dehumidifying rotor 1 is divided into a dehumidifying zone, a regeneration zone, and a purge zone by a second dividing member (not shown).

  The purge zone 40 is provided to cool the dehumidifier heated in the regeneration zone 9 by venting purge air to the purge zone 40. Therefore, the purge zone 40 is provided in the subsequent stage of the regeneration zone 9 in the rotational direction of the dehumidifying rotor 1.

  The dehumidifying rotor 1 is installed in the rotor case 21 of the dry air supply device 42 shown in FIG. A driving means (not shown) is attached to the rotor shaft 13 in order to rotationally drive the dehumidifying rotor 1. The first split member 43a is fixed to the rotor case 21 so as to be disposed in a gap between the rotor case 21 and the opening surface 2a of the dehumidifying rotor 1, and the second split member is The rotor case 21 is fixed to the rotor case 21 so as to be disposed in a gap between the rotor case 21 and the opening surface 2b of the dehumidifying rotor 1. In FIG. 11, the position where the first divided member 3a is fixed is indicated by a dotted line. Further, the rotor case 21 has a to-be-treated air suction duct 22 which is a suction port for supplying the to-be-treated air A to the dehumidification zone on the opening surface 2b side, and the dry air B on the opening surface 2a side. A dry air discharge duct 23 which is a discharge port when discharging from the dehumidification zone 8, a regeneration air supply duct 24 which is a suction port when supplying the regeneration air C to the regeneration zone 9 on the opening surface 2a side, a regeneration zone exhaust air A regeneration zone exhaust air exhaust duct 25 that is an exhaust port for discharging D from the regeneration zone on the opening surface 2b side, a purge air intake duct 44 that is an intake port for supplying purge air E, and purge zone exhaust air A purge zone exhaust air exhaust duct 45, which is an exhaust port for discharging F, is provided. The dry air discharge duct 23 is connected to a dry air supply path 26 for supplying the dry air B discharged from the dehumidification zone 8 on the opening surface 2a side to the target space.

  As shown in FIG. 12, the air to be treated A is supplied to the dehumidification zone on the opening surface 2b side, the dry air B is discharged from the dehumidification zone 8 on the opening surface 2a side, and the dry air An air supply means 271 for supplying the target space through the supply path 26 is installed in the dry air discharge duct 23. Further, the regeneration air supply means 281 for supplying the regeneration air C to the regeneration zone 9 on the opening surface 2a side and exhausting the regeneration zone exhaust air D from the regeneration zone on the opening surface 2b side, An electric heater 291 for heating the regeneration air C is installed in the regeneration air intake duct 24. Further, purge air supply means 451 for supplying the purge air E to the purge zone 40 on the opening surface 2b side and discharging the purge zone exhaust air F from the purge zone on the opening surface 2a side is provided. The purge air intake duct 44 is installed.

  11 and 12, the air supply duct 22 to be treated, the dry air discharge duct 23, the regeneration air suction duct 24, the regeneration zone exhaust air discharge duct 25, the purge air suction duct 44, and the purge zone. Although the embodiment in which the exhaust air discharge duct 45 is installed is shown, the installation of these ducts is optional, and the treated air supply means, the regeneration air supply means, the heating member, and the purge air supply means are provided. The installation of these ducts can be omitted by directly installing the rotor case 21 or changing the installation position.

  Further, the dry air supply apparatus according to the second embodiment of the present invention includes an embodiment in which the purge zone exhaust air F is used as the regeneration air C as shown in FIG. In this embodiment, the regeneration air supply means can also serve as the purge air supply means. In this case, the regeneration air supply means is also the purge air supply means. In this embodiment, the purge air supply means can also serve as the regeneration air supply means. In this case, the purge air supply means is also the regeneration air supply means.

  In the dry air supply apparatus according to the second aspect of the present invention, the purge air suction duct 44 is connected to the dry air discharge duct 23, the dry air supply path 26, or the rotor case on the discharge side of the dry air B. A configuration example in which a part of the dry air B is used as the purge air E by being branched from 21 is also included. In such an embodiment, the air supply means to be treated can also serve as the purge air supply means. When the air supply means to be treated also serves as the purge air supply means, The air supply means is also the purge air supply means.

  In FIG. 13, the first divided member and the second divided member are arranged in a target position and shape with the dehumidification rotor 1 interposed therebetween, so the first divided member when viewed from the opening surface 2 a side. The position and shape (13-1) of the one split member 43a and the position and shape (13-2) of the second split member 43b when viewed from the opening surface 2b side are symmetrical. In FIG. 13, the first dividing member 43a divides the opening surface 2a so that the shapes of the regeneration zone 8 and the purge zone 40 are substantially fan-shaped. The shapes of the regeneration zone 9 and the purge zone 40 to be divided are not particularly limited, and examples thereof include a rectangle and a circle. Similarly, the shapes of the regeneration zone 9 and the purge zone 40 on the side of the opening surface 2b divided by the second divided member are not particularly limited, and examples thereof include a sector, a rectangle, and a circle.

  In the dry air supply device of the second aspect of the present invention, when the dehumidification rotor is viewed from the opening surface side, the ratio of the total area of the regeneration zone and the purge zone to the area of the opening surface 2a of the dehumidification rotor ( (Regeneration zone + purge zone) / opening surface of the dehumidifying rotor) is 100/360 to 200/360, preferably 110/360 to 190/360, particularly preferably 120/360 to 180/360. Since the ratio of the total area of the regeneration zone and the purge zone to the area of the opening surface of the dehumidifying rotor is within the above range, the regeneration efficiency of the dehumidifying agent is increased, so that the dehumidifying performance of the dry air supply device is high. Become. When the dehumidifying rotor is viewed from the opening surface side, the ratio of the area of the regeneration zone to the area of the purge zone (regeneration zone / purge zone) is 1 or more, preferably 1 to 5. When the ratio of the area of the regeneration zone to the area of the purge zone is within the above range, the dehumidifying performance of the dehumidifying agent is increased, so that the dehumidifying performance of the dry air supply device is increased.

  When the shape of the regeneration zone divided by the first divided member and the second divided member is a sector, the ratio of the total area of the regeneration zone and the purge zone to the area of the opening surface of the dehumidifying rotor, The ratio of the area of the regeneration zone to the area of the purge zone can be adjusted by the installation angle of the first divided member and the installation angle of the second divided member (reference numerals 30 and 46 in FIG. 13). The total angle (angle 30 + angle 46) of the regeneration zone and the purge zone is 100 to 200 degrees, preferably 110 to 190 degrees, particularly preferably 120 to 180 degrees. Further, the ratio of the angle of the regeneration zone to the angle of the purge zone (the angle of reference numeral 30 / the angle of reference numeral 46) is 1 or more, preferably 1 to 5.

  The purge air supply means is not particularly limited, and examples thereof include a fan, a blower, and a compressed air supply device. In the description of FIG. 11 and FIG. 12, it has been described that the purge air supply unit is an embodiment installed in the front stage of the dehumidifying rotor 1. In such an embodiment, the purge air supply unit is The purge air E is supplied to the dehumidifying rotor 1 by blowing air. Further, the purge air supply means may be installed at the subsequent stage of the dehumidification rotor. In this case, the purge air E is supplied to the dehumidification rotor 1 by sucking air. Is done. Further, the purge air supply means may be installed at both the front stage and the rear stage of the dehumidifying rotor.

  In the dry air supply apparatus 42 shown in FIGS. 11 and 12, the purge air E is supplied from the opening surface 2b side, that is, from the same direction as the supply direction of the air to be treated A. In the dry air supply apparatus of the second form, the purge air E may be supplied from the opening surface 2a side, that is, from the direction opposite to the supply direction of the air to be treated A.

  The purge air E may be air around the dry air supply device 42 or the dry air B.

  The dehumidifying agent, the dehumidifying rotor, the to-be-treated air supply means, the dry air supply path, the regeneration air supply means, and the drive means according to the dry air supply apparatus of the second aspect of the present invention are the drying according to the first aspect of the present invention. It is the same as the dehumidifying agent, the dehumidifying rotor, the treated air supply means, the dry air supply path, the regeneration air supply means, and the drive means related to the air supply device.

  The heating member according to the dry air supply device of the second aspect of the present invention is an electric heater. When the electric heater is installed in the dry air supply device, the temperature of the regeneration air C and the dehumidification rotor becomes high, so the dry air supply device of the second aspect of the present invention having a purge zone is It is suitable as a dry air supply device having an electric heater.

  The dry air supply device according to the second aspect of the present invention may further include a cooling coil or a heat exchanger for cooling the dry air B. In the clean room, piping of cooling water used for cooling in various devices may be installed. In this case, the cooling water is extracted from the piping of the cooling water, and the cooling coil or By flowing it through the heat exchanger, the dry air B can be cooled by a simple method.

  The operation of the dry air supply device 42 is performed as follows. First, the air to be treated A is supplied by the air supply means to the dehumidification zone 8 on the opening surface 2b side, passes through the dehumidification rotor 1, and the dry air B becomes the opening surface 3a. It is discharged from the dehumidifying zone 8 on the side to the outside of the dehumidifying rotor 1. At this time, when the air to be treated A comes into contact with the dehumidifying agent when passing through the dehumidifying rotor 1, moisture in the air to be treated A moves to the dehumidifying agent. A is dehumidified. The dry air B from which moisture has been dehumidified is supplied to the target space via the dry air supply path 26.

  Next, when the dehumidifying rotor 1 rotates, the dehumidifying agent that has absorbed moisture in the dehumidifying zone 8 moves to the regeneration zone 9. Then, the regeneration air C heated by the regeneration air supply means through the electric heater 291 is supplied to the regeneration zone 9 on the opening surface 2a side, passes through the dehumidification rotor 1, and the regeneration air C Zone exhaust air D is discharged out of the dehumidifying rotor 1 from the regeneration zone 9 on the opening surface 2b side. At this time, when the regenerated air C comes into contact with the dehumidifying agent, moisture in the dehumidifying agent moves to the regenerating air C, so that the dehumidifying agent is dehumidified.

  Next, as the dehumidifying rotor 1 rotates, the dehumidifying agent dehumidified in the dehumidifying zone 9 moves to the purge zone 40. Then, the purge air E is supplied to the purge zone 40 on the opening surface 2b side by the purge air supply means, passes through the dehumidifying rotor 1, and the purge zone exhaust air F is supplied to the opening surface 2a. It is discharged out of the dehumidifying rotor 1 from the purge zone 40 on the side. At this time, the purge air E comes into contact with the dehumidifying agent, thereby cooling the dehumidifying agent. In the dry air supply apparatus according to the second aspect of the present invention, the purge zone exhaust air F is directly discharged to the clean room or used as the regeneration air C.

  Next, the dehumidifying agent cooled in the regeneration zone 40 moves to the dehumidifying zone 8 as the dehumidifying rotor 1 rotates, and is used again for dehumidifying the air to be treated A.

  And while this dehumidification rotor 1 rotates continuously or intermittently, this to-be-processed air A, this regeneration air C, and this purge air E are supplied to this dehumidification rotor 1 continuously, The dry air supply device 42 is operated, and the dry air B is continuously supplied to the target space.

  The dew point of the dry air B obtained by treating the air to be treated A with the dry air supply device 42 is 0 ° C. or less, preferably −30 to −10 ° C. Moreover, the temperature of this dry air B is 1-10 degreeC higher than the temperature in a clean room.

  Moreover, the dry air supply apparatus of the 2nd form of this invention can also be made into the example which makes this dehumidification rotor set horizontally similarly to this dry air supply apparatus 201 shown in FIG. In the dry air co-feeding device of such a horizontally placed embodiment, the purge zone is provided between the regeneration zone and the dehumidification zone of the dry air feeding device 201. Moreover, in the dry air co-feeding apparatus of such a horizontally placed embodiment, for example, a dividing member for dividing the opening surface on the side from which the purge zone discharge air is discharged into the purge zone and the regeneration zone is provided. The purge zone exhaust air discharged from the purge zone can be supplied to the regeneration zone in the rotor case by not providing or by providing a vent hole in the divided member.

  In the dry air supply apparatus according to the second aspect of the present invention, the air to be treated may be entirely in the clean room or the air extracted from the target space into the air in the clean room. It may be a mixed air of air in the clean room and air in the target space obtained by mixing air in the target space, or the entire amount of air in the target space extracted from the target space. May be.

  FIG. 15 shows an example in which the dehumidification rotor is placed horizontally in the dry air supply apparatus according to the second aspect of the present invention, and the target space extracted from the target space into the air in the clean room. The form example which uses the mixed air obtained by mixing the air of this inside as this to-be-processed air is shown. In FIG. 15, in the dry air supply device 202, the dehumidification rotor 1 is installed horizontally, and a gap between the rotor case 215 and the dehumidification rotor 1 is used to supply the purge air E to the purge zone. A path 51, a path 52 for supplying the purge zone exhaust air to the regeneration zone (for example, a vent hole provided in the dividing member), a path 53 for exhausting the regeneration zone exhaust air, A path 54 for supplying the air to be treated A1 (air in the clean room 31) to the dehumidifying zone, a path 55 for extracting the air A2 in the target space 32 and mixing it with the air to be treated A1, A path 56 for discharging the dry air B is formed.

  Similarly to the dry air supply device of the first aspect of the present invention, the dry air supply device of the second aspect of the present invention is the amorphous metal oxide porous body that is dehumidified at a lower temperature than the zeolite or Since the water absorbent resin is used as a dehumidifying agent, the temperature of the heating member can be lowered as compared with the case where zeolite is used as the dehumidifying agent. Further, in the dry air supply device according to the second aspect of the present invention, the ratio of the area of the regeneration zone to the area of the opening surface of the dehumidification rotor is made larger than that of the conventional dry air supply device. Increases regeneration efficiency and enhances dehumidification performance.

  Therefore, in the dry air supply apparatus according to the second aspect of the present invention, it is possible to supply dry air having a dew point required as air in the target space, and the temperature of the dry air and the temperature of the regeneration zone exhaust air And the temperature of the purge zone exhaust air can be kept from becoming too high.

  Therefore, the dry air supply device according to the second aspect of the present invention is preferably used as a dry air supply device that is installed in a clean room, dehumidifies the air in the clean room, and supplies the dry air to the target space. Used.

  Further, in the dry air supply apparatus according to the present invention, an embodiment in which the purge zone is provided between the regeneration zone and the dehumidification zone, and the purge zone exhaust air F is used as the regeneration air C. This is particularly preferable in that the thermal efficiency is increased.

  EXAMPLES Next, although an Example is given and this invention is demonstrated more concretely, this is only an illustration and does not restrict | limit this invention.

Example 1
(Production of dehumidification rotor)
A flat fibrous carrier made of ceramic fibers was processed into a corrugated shape having a pitch of 3.3 mm and a peak height of 1.9 mm to obtain a corrugated fibrous carrier. The flat fibrous carrier and the corrugated fibrous carrier were superposed to obtain a fibrous carrier having a honeycomb structure. This honeycomb structure fibrous carrier was cut into a diameter of 500 mm and a thickness of 200 mm to obtain a rotor-shaped fibrous carrier a.

Next, the silica-alumina amorphous porous body, colloidal silica (solid content concentration 20% by mass) and water were mixed with silica-alumina amorphous porous body 25.5% by mass, colloidal silica 22.5% by mass and water 52.%. Mixing at a ratio of 0% by mass gave slurry b. Next, the rotor-shaped fibrous carrier a was immersed in the slurry b to obtain a dehumidifying rotor c. The supported amount of the silica alumina amorphous porous body of the dehumidifying rotor c was 97 g / L.
Silica alumina amorphous porous body: dehumidification peak temperature 90 ° C., specific surface area 410 m ² / g, pore volume 0.5 cc / g

(Manufacture of dry air supply equipment)
A dry air supply device d in which each member is arranged in the arrangement shown in FIG. 16 is manufactured in the dry air supply device 202 shown in FIG. As shown in FIG. 15, the dry air supply device d supplies a path 51 for supplying the purge air E to the purge zone in the rotor case 215 and supplies the purge zone exhaust air to the regeneration zone. A path 52 for discharging the regeneration zone, a path 53 for discharging the regeneration zone exhaust air, a path 54 for supplying the air to be treated A1 (air in the clean room 31) to the dehumidification zone, A path 55 for extracting the air A2 and mixing it with the air to be treated A1 and a path 56 for discharging the dry air B are provided, and the dehumidification rotor 1 is obtained as described above. The dehumidification rotor c is used, the air supply fan 272 is used as the treated air supply means 272 and the regeneration air supply means 282, the electric heater with electric power 580 W is used as the heating member 292, and the angle of the dehumidification zone 180 degrees, the angle is 90 degrees regeneration zone, as the angle of the purge zone is 90 degrees, was placed first divided member and the second divided member. The dry air supply device d had outer dimensions of a width of 0.7 m, a depth of 0.7 m, a height of 0.3 m, and a weight of 19 kg. Further, the ratio of the total area of the regeneration zone and the purge zone to the area of the opening surface of the dehumidifying rotor was 180/360, and the ratio of the area of the regeneration zone to the area of the purge zone was 1.

(Dry air supply system operation)
The dry air supply device d was installed and operated on a 4.3 m ³ clean bench (target space) installed in a clean room. At this time, the rotation speed of the dehumidification rotor is 15 rotations / hour, and the supply air volume of the air to be treated A is 5.2 m ³ / min. From a clean room, 5.2 m ³ / min. Of 10.4 m ³ / min. , Purge air E (regeneration air C) is supplied at a flow rate of 5.2 m ³ / min. Met.

  The temperature in the clean bench before the start of operation was 25 ° C, the humidity was 45% RH, and the dew point was 10 ° C. The temperature of the dry air supplied to the clean bench 1 hour after the start of operation was 30 ° C. The humidity was 5% RH and the dew point was -13 ° C. At this time, the temperature of the regeneration zone exhaust air D was 29 ° C., the humidity was 100% RH, and the dew point was 29 ° C.

(Comparative Example 1)
(Production of dehumidification rotor)
Zeolite, colloidal silica (solid content concentration 20% by mass) and water were mixed at a ratio of 25.5% by mass of zeolite, 22.5% by mass of colloidal silica and 52.0% by mass of water to obtain slurry e. Next, a rotor-shaped fibrous carrier a obtained by the same method as in Example 1 was immersed in the slurry e, to obtain a dehumidifying rotor f. The amount of zeolite supported on the dehumidifying rotor f was 147 g / L.
Zeolite: Y-type zeolite, silica alumina ratio 5, dehumidification peak temperature 153 ° C

(Manufacture of dry air supply equipment)
A dry air supply device g was manufactured in the same manner as in Example 1 except that the dehumidification rotor c was used instead of the dehumidification rotor c as the dehumidification rotor 1.

(Dry air supply system operation)
The same procedure as in Example 1 was performed except that the dry air supply device g was used instead of the dry air supply device d. As a result, the temperature in the clean bench before the start of operation was 25 ° C., the humidity was 45% RH, and the dew point was 10 ° C., whereas the temperature of the dry air supplied into the clean bench 1 hour after the start of operation. Was 29 ° C., the humidity was 15% RH, and the dew point was 0 ° C. At this time, the temperature of the regeneration zone exhaust air D was 29 ° C., the humidity was 100% RH, and the dew point was 29 ° C.

(Comparative Example 2)
(Production of dehumidification rotor)
In the same manner as in Example 1, a dehumidifying rotor c was obtained.

(Manufacture of dry air supply equipment)
Instead of installing the first split member and the second split member so that the dehumidification zone angle is 180 degrees, the regeneration zone angle is 90 degrees, and the purge zone angle is 90 degrees, the dehumidification zone angle is 270 degrees, the regeneration zone angle is 45 degrees, and the purge zone angle is 45 degrees, except that the first split member and the second split member are installed, and drying is performed in the same manner as in Example 1. An air supply device h was manufactured. At this time, the ratio of the total area of the regeneration zone and the purge zone to the area of the opening surface of the dehumidifying rotor was 90/360, and the ratio of the area of the regeneration zone to the area of the purge zone was 1.

(Dry air supply system operation)
The same procedure as in Example 1 was performed except that the dry air supply device h was used instead of the dry air supply device d. As a result, the temperature in the clean bench before the start of operation was 25 ° C., the humidity was 45% RH, and the dew point was 10 ° C., whereas the temperature of the dry air supplied into the clean bench 1 hour after the start of operation. Was 29 ° C., the humidity was 18% RH, and the dew point was 2 ° C. At this time, the temperature of the regeneration zone exhaust air D was 29 ° C., the humidity was 100% RH, and the dew point was 29 ° C.

It is a schematic diagram which shows the dehumidification rotor installed in the dry air supply apparatus of the 1st form of this invention. It is an enlarged view of A part of the opening surface 2a of the dehumidification rotor 1 in FIG. It is a typical perspective view of the dry air supply apparatus of the 1st form of this invention. It is a typical perspective view which shows the ventilation path | route of the air in the dry air supply apparatus of FIG. It is a typical end view of the dry air supply apparatus of the form example which set the dehumidification rotor horizontally. It is a typical perspective view which shows the ventilation path | route of the air in the dry air supply apparatus of FIG. It is the figure which looked at the dehumidification rotor 1 from the opening surface 2a side, and the figure which looked at the dehumidification rotor 1 from the opening surface 2b side. It is a figure which shows the use condition of the dry air supply apparatus of FIG. It is a figure which shows the use condition of the dry air supply apparatus of FIG. It is a schematic diagram which shows the dehumidification rotor installed in the dry air supply apparatus of the 2nd form of this invention. It is a typical perspective view of the dry air supply apparatus of the 2nd form of this invention. It is a typical perspective view which shows the ventilation path | route of the air in the dry air supply apparatus of FIG. It is the figure which looked at the dehumidification rotor 1 from the opening surface 2a side, and the figure which looked at the dehumidification rotor 1 from the opening surface 2b side. FIG. 3 is a schematic diagram of an embodiment in which the purge zone exhaust air F is used as the regeneration air C. It is a schematic diagram of a form example in which the dehumidification rotor is placed horizontally and the air in the target space extracted from the target space is mixed with the air in the clean room. FIG. 3 is a schematic diagram illustrating an arrangement of members in a rotor case of the dry air supply device d according to the first embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, Dehumidification rotor 2a, 2b Opening surface 3a, 43a 1st division member 3b, 43b 2nd division member 4 Ventilation cavity 5 Flat part 6 Corrugated part 7 Fiber carrier 8 Dehumidification zone 9 Regeneration zone 10 Dehumidification rotor thickness 11 Dehumidification Diameter of rotor 13 Rotor shaft 14 Direction of rotation 20, 42, 201, 202 Dry air supply device 21, 211, 215 Rotor case 22 Air to be treated air intake duct 23 Dry air exhaust duct 24 Regeneration air intake duct 25 Regeneration zone exhaust air exhaust duct 26 Dry air supply paths 27, 271, 272 Processed air supply means 28, 281, 282 Regenerative air supply means 29, 291, 292 Electric heaters 30, 46 Installation angle of the first divided member and installation angle 31 of the second divided member Clean room 32 Target space 40 Purge zone 44 Purge air intake duct 45 Par Zone exhaust air exhaust duct 51, 52, 53, 54, 55, 56 Path 212, 213 Clearance 214 Regeneration air supply path 451 Purge air supply means A Processed air A1 Air in clean room A2 Air in target space B Dry air C Regeneration air D Regeneration zone exhaust air E Purge air F Purge zone exhaust air

Claims (7)

A dehumidifying rotor carrying a dehumidifying agent;
A first split member that divides one opening surface of the dehumidification rotor into a dehumidification zone and a regeneration zone;
A second divided member that divides the other opening surface of the dehumidification rotor into a dehumidification zone and a regeneration zone;
To-be-treated air supply means for supplying the to-be-treated air to the dehumidifying zone;
A dry air supply path for supplying dry air discharged from the dehumidification zone to a target space provided in a clean room;
Regeneration air supply means for supplying regeneration air to the regeneration zone and discharging regeneration zone exhaust air directly to the clean room;
Drive means for rotating the dehumidifying rotor;
A dry air supply device characterized by comprising: A dehumidifying rotor carrying a dehumidifying agent;
A first split member that divides one opening surface of the dehumidification rotor into a dehumidification zone, a regeneration zone, and a purge zone;
A second divided member that divides the other opening surface of the dehumidification rotor into a dehumidification zone, a regeneration zone, and a purge zone;
To-be-treated air supply means for supplying the to-be-treated air to the dehumidifying zone;
A dry air supply path for supplying dry air discharged from the dehumidification zone to a target space provided in a clean room;
Regeneration air supply means for supplying regeneration air to the regeneration zone and discharging regeneration zone exhaust air directly to the clean room;
A heating member for heating the regeneration air supplied to the regeneration zone;
Purge air supply means for supplying purge air to the purge zone and discharging purge zone exhaust air;
Drive means for rotating the dehumidifying rotor;
A dry air supply device characterized by comprising:   2. The dry air supply according to claim 1, wherein the ratio of the area of the regeneration zone to the area of the opening surface of the dehumidifying rotor (regeneration zone / opening surface of the dehumidifying rotor) is 100/360 to 200/360. apparatus.   The ratio of the total area of the regeneration zone and the purge zone to the area of the opening surface of the dehumidifying rotor ((regeneration zone + purge zone) / opening surface of the dehumidifying rotor) is 100/360 to 200/360. The dry air supply device according to claim 2.   The dry air supply device according to any one of claims 1 to 4, wherein the dehumidifying agent is an amorphous metal oxide porous body or a water absorbent resin.   The dehumidifying agent is one or more selected from silica gel, silica-alumina amorphous porous material, mesoporous silica, ion exchange resin, polyacrylate resin, and alkylene oxide resin. The dry air supply apparatus of any one of 1-5.   Furthermore, it has a cooling coil or a heat exchanger for cooling the said dry air, The dry air supply apparatus of any one of Claims 1-6 characterized by the above-mentioned.

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