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JP2008142467A - Coaxial probe - Google Patents

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JP2008142467A
JP2008142467A JP2006335993A JP2006335993A JP2008142467A JP 2008142467 A JP2008142467 A JP 2008142467A JP 2006335993 A JP2006335993 A JP 2006335993A JP 2006335993 A JP2006335993 A JP 2006335993A JP 2008142467 A JP2008142467 A JP 2008142467A
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dielectric
coaxial probe
coaxial
probe device
inner conductor
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JP4618241B2 (en
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Kikuo Wakino
喜久男 脇野
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a coaxial probe which can be easily inserted into a body, has small reflection of power to a power amplifier, and has high radiation efficiency of electromagnetic waves. <P>SOLUTION: The coaxial probe has a dielectric substance between an inner conductive body 2 and an outer conductive body 3. The coaxial probe comprises a transmission line part with a first dielectric body 4, a probe part with a second dielectric body 5, and an impedance matching part with a third dielectric body 6. The end point of the probe part is formed in a cone shape from the inner conductive body 2 to the outer conductive body 3 and has a tip end exposing the inner conductive body 2 and the dielectric body 5 therefrom to make its shape capable of being easily inserted into a living body. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、例えば生体組織内に挿入してマイクロ波により加熱治療を行う際に用いることができる同軸プローブに関するものである。   The present invention relates to a coaxial probe that can be used, for example, when inserted into a living tissue to perform heat treatment using microwaves.

近年、悪性腫瘍等の病気に対する治療方法として電磁波を利用したものが幾つか提案されている。その内の１つにマイクロ波を直接患部に吸収させて、患部の温度を上昇させ凝固させるという凝固療法がある。この方法は、マイクロ波を効率よく放射する同軸プローブを直接患部に射し込み、同軸プローブから放射されるマイクロ波によって患部に発生する誘電熱により患部の組織を凝固壊死させるというものである。   In recent years, several methods using electromagnetic waves have been proposed as treatment methods for diseases such as malignant tumors. One of them is coagulation therapy in which microwaves are directly absorbed into the affected area, and the temperature of the affected area is increased to coagulate. In this method, a coaxial probe that efficiently radiates microwaves is directly projected onto the affected area, and the tissue of the affected area is coagulated and necrosed by dielectric heat generated in the affected area by the microwave radiated from the coaxial probe.

同軸プローブは直径１mm程度又はそれ以下に形成が可能であり、経皮的に患部に挿入する方法や、胸腔鏡または腹腔鏡を利用して患部に挿入する方法がある。同軸プローブを用いることにより切開部分を小さくできる、もしくは切開せずに済み、治療時間も比較的短時間であるため悪性腫瘍等を手術により摘出するのに比較して、患者への負担が小さく特に癌の初期治療として有用である。   The coaxial probe can be formed with a diameter of about 1 mm or less, and there are a method of percutaneously inserting into the affected part and a method of inserting into the affected part using a thoracoscope or a laparoscope. By using a coaxial probe, the incision can be made smaller or no incision can be made, and the treatment time is relatively short, so the burden on the patient is particularly small compared to surgical removal of malignant tumors. Useful as an initial treatment for cancer.

特許文献１には、ＭＲＩ装置によるモニタリングを行いながらマイクロ波治療を行う際に、ＭＲＩ装置により患部と同軸プローブの相対位置がモニタリング可能となるように、先端部に磁性体材料からなるマーカー部材を備えた針状モノポーラ電極装置が開示されている。図Ｘに針状モノポーラ電極装置１００の部分断面図を示す。針状モノポーラ電極装置は外部電極１０３、絶縁体１０４、中心電極１０５、中心導体１０６、およびマーカー部材１０７からなり、中心電極１０５はマーカー部材１０７を介して中心導体１０６と電気的に一体化されている。   In Patent Document 1, a marker member made of a magnetic material is provided at the tip so that the relative position between the affected part and the coaxial probe can be monitored by the MRI apparatus when performing microwave therapy while monitoring by the MRI apparatus. A needle-shaped monopolar electrode device is disclosed. FIG. X shows a partial cross-sectional view of the acicular monopolar electrode device 100. The acicular monopolar electrode device includes an external electrode 103, an insulator 104, a center electrode 105, a center conductor 106, and a marker member 107. The center electrode 105 is electrically integrated with the center conductor 106 via the marker member 107. Yes.

特許文献２には、生体組織にマイクロ波を効率よく吸収させる構造を有する同軸プローブが開示されている。この同軸プローブは先端を内導体から外導体にかけて円錐状にして内導体、外導体および内導体と外導体の間に介在する誘電体を露出させた形状を有し、生体組織に対して利用するマイクロ波の反射係数が最も小さくなる形状条件と誘電体の比誘電率の条件が開示されている。
特開２００４−００８２４３号公報 特開２００４−０５８７５０号公報 Patent Document 2 discloses a coaxial probe having a structure that allows a living tissue to efficiently absorb microwaves. This coaxial probe has a shape in which the tip is conically formed from the inner conductor to the outer conductor, and the inner conductor, the outer conductor, and the dielectric interposed between the inner conductor and the outer conductor are exposed, and is used for living tissue. A shape condition that minimizes the reflection coefficient of the microwave and a condition of the relative dielectric constant of the dielectric are disclosed.
JP 2004008243 A JP 2004-058750 A

特許文献１記載の針状モノポーラ電極装置では、その先端部において同軸ケーブル部とマイクロ波の放射部がインピーダンス的に不整合となりがちで、伝送されてきた電力の内、数％〜数十％の電力がこの部分で反射される。また、中心電極１０５と生体組織との間においても電力の反射が起こり、電力が生体組織で効率よく消費されない。   In the needle-shaped monopolar electrode device described in Patent Document 1, the coaxial cable portion and the microwave radiating portion tend to be mismatched in terms of impedance at the tip, and the transmitted power is several% to several tens%. Power is reflected at this part. Further, power is also reflected between the center electrode 105 and the living tissue, and the power is not efficiently consumed by the living tissue.

特許文献２記載の同軸プローブでは、内導体と外導体の間に介在する誘電体をアルミナとし、先端の形状を所定の形状とすることにより生体組織と同軸プローブとの間での電力反射を非常に小さくすることができる。この同軸プローブの特性インピーダンスは約２３Ωである。一般の信号発生器、電力増幅アンプ、同軸伝送ケーブルは通常特性インピーダンスが５０Ωとされており、前記同軸プローブと同軸伝送ケーブルを直接接合するとインピーダンスが不整合となり、大部分の電力が反射されることとなる。   In the coaxial probe described in Patent Document 2, the dielectric interposed between the inner conductor and the outer conductor is alumina, and the shape of the tip is set to a predetermined shape, so that power reflection between the living tissue and the coaxial probe is extremely low. Can be made smaller. The characteristic impedance of this coaxial probe is about 23Ω. General signal generators, power amplification amplifiers, and coaxial transmission cables usually have a characteristic impedance of 50Ω. When the coaxial probe and coaxial transmission cable are directly joined, the impedance becomes mismatched and most of the power is reflected. It becomes.

一般にマイクロ波凝固療法に用いられる周波数は２．４〜２．４５ＧＨｚであり、この周波数を増幅できる高周波増幅器は非常に高価である。また出力する電力の大きさによって価格は高くなる。同軸プローブからの電力の反射が大きければ、その分増幅器から大きな電力を供給する必要があり、増幅器の価格がさらに高くなってしまう。また、大きな反射電力を増幅器に直接戻さないために、高電力のアイソレータが必要となり、全体の設備自体の価格が高くなってしまうという問題点があった。   Generally, the frequency used for microwave coagulation therapy is 2.4 to 2.45 GHz, and a high-frequency amplifier capable of amplifying this frequency is very expensive. In addition, the price increases depending on the magnitude of the output power. If the reflection of power from the coaxial probe is large, it is necessary to supply a large amount of power from the amplifier, and the price of the amplifier is further increased. In addition, since high reflected power is not returned directly to the amplifier, a high-power isolator is required, and there is a problem that the price of the entire equipment itself is increased.

更に、同軸プローブと同軸伝送ケーブルのインピーダンスが不整合において反射波が発生し、この反射波と入射波が干渉して無視できない大きさの定在波が存在することとなる。この定在波の電力はインピーダンス不整合による反射係数の２乗に比例して大きくなり、線路上で不要な発熱を伴い、正常な組織まで壊死させるという問題があった。
Further, when the impedances of the coaxial probe and the coaxial transmission cable are mismatched, a reflected wave is generated, and the reflected wave and the incident wave interfere with each other, and a standing wave having a magnitude that cannot be ignored exists. The power of this standing wave increases in proportion to the square of the reflection coefficient due to impedance mismatching, causing unnecessary heat generation on the line, and causing a problem of necrosis to a normal tissue.

上記問題点を解決するために請求項１記載の発明は、外導体と内導体との間に誘電体を介在させた構造を有する同軸プローブ装置であって、前記同軸プローブ装置は、比誘電率がε1である第１の誘電体を有する伝送線路部と、比誘電率がε2である第２の誘電体を有するプローブ部と、単層又は複数層で構成され平均の比誘電率がε3である第３の誘電体を有するインピーダンス整合部とからなり、前記それぞれの比誘電率は下記の数１の関係を満たし、前記伝送線路部と、前記インピーダンス整合部と、前記プローブ部とは、この順で外導体同士と内導体同士がそれぞれ電気的に接合され、かつ、前記第１の誘電体と前記第３の誘電体、および前記第３の誘電体と前記第２の誘電体は隙間無く接合されており、前記プローブ部は、外部に電力を放射する放射部を有していることを特徴とする。 In order to solve the above problem, the invention according to claim 1 is a coaxial probe device having a structure in which a dielectric is interposed between an outer conductor and an inner conductor, wherein the coaxial probe device has a relative dielectric constant. A transmission line portion having a first dielectric having ε 1 , a probe portion having a second dielectric having a relative permittivity of ε 2 , and an average relative permittivity having a single layer or a plurality of layers. an impedance matching unit having a third dielectric body that is ε 3 , wherein each of the relative dielectric constants satisfies the relationship of the following formula 1, and the transmission line unit, the impedance matching unit, the probe unit, The outer conductor and the inner conductor are respectively electrically joined in this order, and the first dielectric and the third dielectric, and the third dielectric and the second dielectric Are joined without any gaps, and the probe section is connected to the outside. Characterized in that it includes a radiation unit that radiates.

請求項２に記載の発明は、請求項１に記載の同軸プローブ装置において、前記放射部は前記プローブ部の一端に形成されており、該放射部は前記内導体から前記外導体にかけて円錐形状にして前記内導体と前記第２の誘電体を露出する尖端であることを特徴とする。 According to a second aspect of the present invention, in the coaxial probe device according to the first aspect, the radiating portion is formed at one end of the probe portion, and the radiating portion has a conical shape from the inner conductor to the outer conductor. And a tip that exposes the inner conductor and the second dielectric.

請求項３に記載の発明は、請求項１から２のいずれかに記載の同軸プローブ装置において、３つの異なる比誘電率の誘電体が連続する任意の部分において、中間層となる誘電体の比誘電率をεm、両側の誘電体の比誘電率をそれぞれεa、εbとしたとき、εmが下記の数２を満足することを特徴とする。 According to a third aspect of the present invention, in the coaxial probe device according to any one of the first to second aspects, the ratio of the dielectric material serving as the intermediate layer in any portion where the dielectric materials having three different relative dielectric constants are continuous. When the dielectric constant is ε m and the relative dielectric constants of the dielectrics on both sides are ε a and ε b , respectively, ε m satisfies the following formula 2.

請求項４に記載の発明は、請求項１から３のいずれか１項に記載の同軸プローブ装置において、前記異なる比誘電率の誘電体同士が接合される部分において、前記誘電体の一方は内導体から前記外導体にかけて円錐状の凸部とされ、他方は該凸部に隙間無く勘合する円錐状の凹部とされていることを特徴とする。 According to a fourth aspect of the present invention, in the coaxial probe device according to any one of the first to third aspects, in the portion where the dielectrics having different relative dielectric constants are joined, one of the dielectrics is an inner part. A conical convex portion is formed from the conductor to the outer conductor, and the other is a conical concave portion that fits into the convex portion without a gap.

請求項５に記載の発明は、請求項１から４のいずれか１項に記載の同軸プローブ装置において、前記凸部は比誘電率の低い側の誘電体に設けられていることを特徴とする。   According to a fifth aspect of the present invention, in the coaxial probe device according to any one of the first to fourth aspects, the convex portion is provided on a dielectric having a low relative dielectric constant. .

請求項６に記載の発明は、請求項１から５のいずれか１項に記載の同軸プローブ装置において、前記第２の誘電体はアルミナであることを特徴とする。   The invention according to claim 6 is the coaxial probe device according to any one of claims 1 to 5, wherein the second dielectric is alumina.

請求項７に記載の発明は、請求項１から６のいずれか１項に記載の同軸プローブ装置において、前記第１の誘電体はポリテトラフルオロエチレンであることを特徴とする。   A seventh aspect of the present invention is the coaxial probe device according to any one of the first to sixth aspects, wherein the first dielectric is polytetrafluoroethylene.

請求項８に記載の発明は、請求項１から７のいずれか１項に記載の同軸プローブ装置において、前記第２の誘電体はポリフェニレンサルファイドからなることを特徴とする。   According to an eighth aspect of the present invention, in the coaxial probe device according to any one of the first to seventh aspects, the second dielectric is made of polyphenylene sulfide.

請求項９に記載の発明は、請求項１から８のいずれか１項に記載の同軸プローブ装置において、前記伝送線路部は特性インピーダンスが５０Ωであることを特徴とする。
According to a ninth aspect of the present invention, in the coaxial probe device according to any one of the first to eighth aspects, the transmission line section has a characteristic impedance of 50Ω.

この発明によれば、マイクロ波凝固療法に用いられる同軸プローブ装置に供給する電力を反射させることなく、効率よく生体組織に吸収させることができる。これにより、増幅器の出力を必要以上に大きくする必要がないため、装置自体を安価にすることができる。インピーダンス不整合部からの反射波と入射波の干渉により発生する定在波が無視できるため不要な発熱による正常組織の破壊を回避できる。   According to the present invention, the power supplied to the coaxial probe device used for the microwave coagulation therapy can be efficiently absorbed into the living tissue without reflecting. Thereby, since it is not necessary to make the output of the amplifier larger than necessary, the device itself can be made inexpensive. Since the standing wave generated by the interference between the reflected wave from the impedance mismatching part and the incident wave can be ignored, the destruction of the normal tissue due to unnecessary heat generation can be avoided.

第１の実施例を図１に基づいて説明する。図１は同軸プローブ装置１の部分断面図である。同軸プローブ装置１は外導体３、内導体２、および外導体３と内導体２の間に挿入された誘電体からなる。第１の誘電体４は比誘電率が約2.1のポリテトラフルオロエチレン（テフロン：登録商標）で構成されており、第１の誘電体４が存在する部分は伝送線路部として機能する。内導体２の外径は0.48mm、外導体３の内径は1.6mmで、伝送線路部における特性インピーダンスは50Ωとされている。   A first embodiment will be described with reference to FIG. FIG. 1 is a partial cross-sectional view of the coaxial probe device 1. The coaxial probe device 1 includes an outer conductor 3, an inner conductor 2, and a dielectric inserted between the outer conductor 3 and the inner conductor 2. The first dielectric 4 is made of polytetrafluoroethylene (Teflon: registered trademark) having a relative dielectric constant of about 2.1, and a portion where the first dielectric 4 exists functions as a transmission line portion. The outer diameter of the inner conductor 2 is 0.48 mm, the inner diameter of the outer conductor 3 is 1.6 mm, and the characteristic impedance in the transmission line portion is 50Ω.

第２の誘電体５は比誘電率が約9.7のアルミナで構成されており、第２の誘電体５が存在する部分はプローブ部として機能する。プローブ部は鋭い先端部Ａを有する。先端部Ａは内導体の中心を頂点とする円錐形状とされており、第２の誘電体５の一部が外部に露出している。プローブ部は生体組織の患部に射し込まれるため、内導体２の先端および外導体３は人体にとって無毒である金属でめっきされていることが好ましく、金めっきが好適である。また、テフロンなどの薄い樹脂被膜で覆われていてもよい。ｔを約5.3mmとすれば、プローブ部が生体組織（肝臓）に射し込まれているときに電力の反射が極小となり、反射係数Γ＜0.1となる。   The second dielectric 5 is made of alumina having a relative dielectric constant of about 9.7, and the portion where the second dielectric 5 exists functions as a probe portion. The probe portion has a sharp tip A. The tip A has a conical shape with the center of the inner conductor as the apex, and a part of the second dielectric 5 is exposed to the outside. Since the probe part is projected into the affected part of the living tissue, the tip of the inner conductor 2 and the outer conductor 3 are preferably plated with a metal that is non-toxic to the human body, and gold plating is preferred. Further, it may be covered with a thin resin film such as Teflon. If t is about 5.3 mm, the reflection of electric power is minimized when the probe part is projected into the living tissue (liver), and the reflection coefficient Γ <0.1.

第３の誘電体６は比誘電率が約4.5のガラスで構成されている。第３の誘電体６の比誘電率をεm、第１の誘電体４の比誘電率をεa、第２の誘電体５の比誘電率をεbとしたとき、εmは下記の数２を満足している。 The third dielectric 6 is made of glass having a relative dielectric constant of about 4.5. When the relative dielectric constant of the third dielectric 6 is ε m , the relative dielectric constant of the first dielectric 4 is ε a , and the relative dielectric constant of the second dielectric 5 is ε b , ε m is I am satisfied with Equation 2.

尤も必ずしもこの関係を満たす必要はなく、後述するＬ１、Ｌ２の値を適宜設定することにより第３の誘電体６の比誘電率はある程度の範囲をとることが可能である。 However, it is not always necessary to satisfy this relationship, and the relative permittivity of the third dielectric 6 can take a certain range by appropriately setting values of L1 and L2 described later.

第１の誘電体４は第３の誘電体６に向けて錐状の凸部を有しており、この錐状の凸部の高さはＬ１とされている。一方第３の誘電体６は前記凸部と勘合する錐状の凹部を有しており、この錐状の凹部の高さはＬ１とされ、前記凸部と前記凹部は隙間無く組み合わされている。Ｌ１は双方の比誘電率により適宜決定される。   The first dielectric 4 has a cone-shaped projection toward the third dielectric 6, and the height of the cone-shaped projection is L1. On the other hand, the third dielectric 6 has a conical concave portion to be fitted with the convex portion, the height of the conical concave portion is L1, and the convex portion and the concave portion are combined with no gap. . L1 is appropriately determined depending on the relative permittivity of both.

上記と同様に第３の誘電体６は第２の誘電体５に向けて錐状の凸部を有しており、この錐状の凸部の高さはＬ２とされている。一方第２の誘電体５は前記凸部と勘合する錐状の凹部を有しており、この錐状の凹部の高さはＬ２とされ、前記凸部と前記凹部は隙間無く組み合わされている。Ｌ２は双方の比誘電率により適宜決定される。   Similarly to the above, the third dielectric 6 has a cone-shaped projection toward the second dielectric 5, and the height of the cone-shaped projection is L2. On the other hand, the second dielectric 5 has a conical concave portion to be fitted with the convex portion, and the height of the conical concave portion is L2, and the convex portion and the concave portion are combined with no gap. . L2 is appropriately determined depending on the relative permittivity of both.

図２、図３、図４、図５はεｍをそれぞれ4.0、4.5、5.0、5.5としたときの、Ｌ１とＬ２と同軸プローブ装置１の反射係数の関係を有限要素法を用いてシミュレーションを行った結果を示したものである。プローブ部は肝臓に差し込まれていると仮定し、計算に用いたパラメータは以下の通りで、一部のパラメータはすでに前述したものの再掲である。
解析周波数（Ｆ） ：2.45GHz
内導体２の外径（ｒ） ：0.48mm
外導体３の内径 （Ｒ） ：1.60mm
先端錐状部の高さ（ｔ） ：5.2mm
テフロンの比誘電率（εa） ：2.1
テフロンの誘電正接（tanδa）：1.0E-04
アルミナの比誘電率（εb） ：9.7
アルミナの誘電正接（tanδb）：1.0E-04
肝臓の比誘電率（εr） ：43.0
肝臓の誘電正接（tanδr） ：2.85E-01
図２、図３、図４、図５の各々において横軸はＬ１の寸法を示し、縦軸はＬ２の寸法を示している。例えば図３においてＬ１を5、Ｌ２を9とすれば、その時の反射係数Γはおよそ0.05（V.S.W.R＝1.10）となる。このとき供給される電力に対し、反射される電力はわずか0.3%程度しかなく、大部分の電力が生体に放射吸収されていることを表している。従って電力増幅器は必要以上に大きな電力を供給する必要が無く、増幅レベルの大きい電力増幅器を必要としないため設備を安価に構成できる。 2, 3, 4, and 5 simulate the relationship between L1 and L2 and the reflection coefficient of the coaxial probe device 1 using the finite element method when εm is 4.0, 4.5, 5.0, and 5.5, respectively. The results are shown. Assuming that the probe unit is inserted into the liver, the parameters used in the calculation are as follows, and some of the parameters have already been described above.
Analysis frequency (F): 2.45GHz
Inner conductor 2 outer diameter (r): 0.48 mm
Inner diameter of outer conductor 3 (R): 1.60mm
Tip cone height (t): 5.2 mm
Teflon dielectric constant (ε a ): 2.1
Teflon dielectric loss tangent (tanδ a ): 1.0E-04
Relative permittivity of alumina (ε b ): 9.7
Dielectric loss tangent of alumina (tanδ b ): 1.0E-04
Liver dielectric constant (ε r ): 43.0
Liver dielectric loss tangent (tanδ r ): 2.85E-01
In each of FIGS. 2, 3, 4, and 5, the horizontal axis indicates the dimension of L1, and the vertical axis indicates the dimension of L2. For example, if L1 is 5 and L2 is 9 in FIG. 3, the reflection coefficient Γ at that time is approximately 0.05 (VSWR = 1.10). The reflected power is only about 0.3% of the power supplied at this time, which means that most of the power is radiated and absorbed by the living body. Therefore, the power amplifier does not need to supply more power than necessary, and does not require a power amplifier with a high amplification level, so that the equipment can be configured at low cost.

図２、図３、図４、図５から、εmのいずれの条件においてもL1、L2を適宜選択すれば、反射係数を小さくできる領域が有ることが分かる。従って、用いる誘電体の比誘電率に合わせてシミュレーションを実施しL1、L2を最適値に設計することで電力反射の小さい同軸プローブ装置を作成することができる。 2, 3, 4, and 5, it can be seen that there is a region where the reflection coefficient can be reduced if L1 and L2 are appropriately selected under any condition of ε m . Therefore, a coaxial probe device with low power reflection can be created by performing simulation in accordance with the relative dielectric constant of the dielectric to be used and designing L1 and L2 to optimum values.

εa＝2.1、εb＝9.7を[数１]に代入すればεm≒4.5となる。図２〜図５において、特に図４は[数１]を満たした時のシミュレーション結果を表すグラフである。このとき、反射係数を小さくできる領域がεm=4のグラフと比較して広くなり、L1、L2の設計領域が大きくなる。またεm=5のグラフと比較すれば、反射係数を小さくできる領域は幾分小さいものの、L1とL2が小さい領域において寸法による反射係数の変化が小さいため、ばらつきを抑えた設計が可能となる。比誘電率が4.5に近い特性を持つものとして比誘電率が4.6のポリフェニレンサルファイド（PPS）がある。PPSは耐環境性能に優れており、またTanδも0.002程度と非常に小さいため、第３の誘電体として好適である。 Substituting ε a = 2.1 and ε b = 9.7 into [Equation 1] gives ε m ≈4.5. 2 to 5, in particular, FIG. 4 is a graph showing a simulation result when [Equation 1] is satisfied. At this time, the region where the reflection coefficient can be reduced becomes wider compared to the graph of ε m = 4, and the design region of L1 and L2 becomes large. Compared with the graph of ε m = 5, although the area where the reflection coefficient can be reduced is somewhat small, the change in the reflection coefficient due to the dimension is small in the area where L1 and L2 are small, so that design with reduced variation is possible. . Polyphenylene sulfide (PPS) with a relative dielectric constant of 4.6 is a characteristic having a dielectric constant close to 4.5. PPS is excellent in environmental resistance, and Tanδ is very small, about 0.002, and thus is suitable as the third dielectric.

次に第２の実施例を図６に基づいて説明する。図６は図１と同様に同軸プローブ装置１の部分断面図である。図１と同じ部分については同じ番号を付し説明を省略する。第３の誘電体６は、それぞれ誘電率の異なる第１の層６ａと第２の層６ｂを有する２層構造とされている。第１の層６ａの誘電率をεma、第２の層６ｂの誘電率をεmbとすれば、それぞれの誘電率の関係は、 Next, a second embodiment will be described with reference to FIG. FIG. 6 is a partial cross-sectional view of the coaxial probe device 1 as in FIG. The same parts as those in FIG. The third dielectric 6 has a two-layer structure having a first layer 6a and a second layer 6b having different dielectric constants. If the dielectric constant of the first layer 6a is ε ma and the dielectric constant of the second layer 6b is ε mb , the relationship between the respective dielectric constants is

とされていることが好ましい。さらに、 It is preferable that further,

とされ。また、 And Also,

とされていることが好ましい。第２の実施例において第３の誘電体６は第１の層６ａと第２の層６ｂとから成る例を示したが、３層以上の層を有しても構わない。
 It is preferable that In the second embodiment, the third dielectric 6 is composed of the first layer 6a and the second layer 6b. However, the third dielectric 6 may have three or more layers.

本発明の第１の実施例を示す同軸プローブ装置の先端付近部分断面図である。1 is a partial cross-sectional view near the tip of a coaxial probe device showing a first embodiment of the present invention. 本発明の第１の実施例において、εm＝4.0としたときの、L1とL2と反射係数との関係を表すグラフである。6 is a graph showing the relationship between L1, L2, and the reflection coefficient when ε m = 4.0 in the first example of the present invention. 本発明の第１の実施例において、εm＝4.5としたときの、L1とL2と反射係数との関係を表すグラフである。In the first embodiment of the present invention, it is a graph showing the relationship between L1 and L2 and the reflection coefficient when ε m = 4.5. 本発明の第１の実施例において、εm＝5.0としたときの、L1とL2と反射係数との関係を表すグラフである。In the first embodiment of the present invention, it is a graph showing the relationship between L1 and L2 and the reflection coefficient when ε m = 5.0. 本発明の第１の実施例において、εm＝5.5としたときの、L1とL2と反射係数との関係を表すグラフである。In the first embodiment of the present invention, it is a graph showing the relationship between L1 and L2 and the reflection coefficient when ε m = 5.5. 本発明の第１の実施例を示す同軸プローブ装置の先端付近の部分断面図である。It is a fragmentary sectional view near the front-end | tip of the coaxial probe apparatus which shows the 1st Example of this invention. 従来の針状モノポーラ電極装置の先端付近の部分断面図である。It is a fragmentary sectional view near the front-end | tip of the conventional acicular monopolar electrode apparatus.

符号の説明Explanation of symbols

２ 内部電極
３ 外部電極
４ 第１の誘電体
５ 第２の誘電体
６ 第３の誘電体
６ａ 第３の誘電体の第１の層
６ｂ 第３の誘電体の第２の層
１０３ 外部電極
１０４ 絶縁体
１０５ 中心電極
１０６ 中心導体
１０７ マーカー部材 2 internal electrode 3 external electrode 4 first dielectric 5 second dielectric 6 third dielectric 6a third dielectric first layer 6b third dielectric second layer 103 external electrode 104 Insulator 105 Center electrode 106 Center conductor 107 Marker member

Claims (9)

外導体と内導体との間に誘電体を介在させた構造を有する同軸プローブ装置であって、前記同軸プローブ装置は、
比誘電率がε1である第１の誘電体を有する伝送線路部と、比誘電率がε2である第２の誘電体を有するプローブ部と、単層又は複数層で構成され平均の比誘電率がε3である第３の誘電体を有するインピーダンス整合部とからなり、
前記それぞれの比誘電率は下記の数１の関係を満たし、
前記伝送線路部と、前記インピーダンス整合部と、前記プローブ部とは、この順で外導体同士と内導体同士がそれぞれ電気的に接合され、かつ、前記第１の誘電体と前記第３の誘電体、および前記第３の誘電体と前記第２の誘電体は隙間無く接合されており、
前記プローブ部は、外部に電力を放射する放射部を有していることを特徴とする同軸プローブ装置。
A coaxial probe device having a structure in which a dielectric is interposed between an outer conductor and an inner conductor, the coaxial probe device comprising:
A transmission line portion having a first dielectric having a relative permittivity of ε 1 , a probe portion having a second dielectric having a relative permittivity of ε 2 , and an average ratio composed of a single layer or a plurality of layers. An impedance matching portion having a third dielectric having a dielectric constant ε 3 ,
Each of the relative dielectric constants satisfies the following formula (1):
The transmission line section, the impedance matching section, and the probe section are such that the outer conductor and the inner conductor are electrically joined in this order, and the first dielectric and the third dielectric Body, and the third dielectric and the second dielectric are joined without gaps,
The coaxial probe apparatus according to claim 1, wherein the probe section includes a radiation section that radiates electric power to the outside.
前記放射部は前記プローブ部の一端に形成されており、該放射部は前記内導体から前記外導体にかけて円錐形状にして前記内導体と前記第２の誘電体を露出する尖端であることを特徴とする請求項１に記載の同軸プローブ装置。   The radiating portion is formed at one end of the probe portion, and the radiating portion is a pointed end that exposes the inner conductor and the second dielectric body in a conical shape from the inner conductor to the outer conductor. The coaxial probe device according to claim 1. ３つの異なる比誘電率の誘電体が連続する任意の部分において、中間層となる誘電体の比誘電率をεm、両側の誘電体の比誘電率をそれぞれεa、εbとしたとき、εmが下記の数２を満足することを特徴とする請求項１または２に記載の同軸プローブ装置。
In an arbitrary portion where three different dielectric constant dielectrics are continuous, when the dielectric constant of the intermediate layer is ε m , and the dielectric constants of the dielectrics on both sides are ε a and ε b , respectively, The coaxial probe apparatus according to claim 1, wherein ε m satisfies the following formula 2.
前記異なる比誘電率の誘電体同士が接合される部分において、
前記誘電体の一方は内導体から前記外導体にかけて円錐状の凸部とされ、他方は該凸部に隙間無く勘合する円錐状の凹部とされていることを特徴とする請求項１から３のいずれか１項に記載の同軸プローブ装置。 In the portion where the dielectrics having different relative dielectric constants are joined,
4. One of the dielectrics is a conical convex portion from the inner conductor to the outer conductor, and the other is a conical concave portion that fits into the convex portion without a gap. The coaxial probe device according to any one of the preceding claims. 前記凸部は比誘電率の低い側の誘電体に設けられていることを特徴とする請求項１から４のいずれか１項に記載の同軸プローブ装置。   5. The coaxial probe device according to claim 1, wherein the convex portion is provided on a dielectric having a low relative dielectric constant. 前記第２の誘電体はアルミナであることを特徴とする請求項１から５のいずれか１項に記載の同軸プローブ装置。   6. The coaxial probe device according to claim 1, wherein the second dielectric is alumina. 前記第１の誘電体はポリテトラフルオロエチレンであることを特徴とする請求項１から６のいずれか１項に記載の同軸プローブ装置。   The coaxial probe apparatus according to claim 1, wherein the first dielectric is polytetrafluoroethylene. 前記第２の誘電体はポリフェニレンサルファイドからなることを特徴とする請求項１から７のいずれか１項に記載の同軸プローブ装置。   The coaxial probe device according to claim 1, wherein the second dielectric is made of polyphenylene sulfide. 前記伝送線路部は特性インピーダンスが５０Ωであることを特徴とする請求項１から８のいずれか１項に記載の同軸プローブ装置。   The coaxial probe apparatus according to claim 1, wherein the transmission line section has a characteristic impedance of 50Ω.
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