JP2007335909A - Substrate cleaning method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate cleaning method provided with cleaning member detection sensors for detecting whether the cleaning member of a cleaning tool is present or not. <P>SOLUTION: In a substrate cleaning apparatus including cleaning tool mounting mechanism 20 for mounting a cleaning tool 21 having a cleaning member contactable with the cleaning surface of a substrate Wf to be cleaned, and cleaning the substrate Wf held and rotated by a substrate holding and rotating mechanism while bringing the substrate Wf into contact with the cleaning member of the cleaning tool 21, cleaning member detection sensors (a floodlight projector 27a and a photodetector 27b) for detecting whether the cleaning member of the cleaning tool 21 is present or not in a state in which the cleaning tool 21 mounted on the cleaning tool mounting mechanism 20 is at a predetermined position, are provided. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate cleaning method in which a substrate to be cleaned such as a semiconductor wafer is held and rotated, and cleaning is performed with a cleaning tool while supplying a cleaning liquid onto the cleaning substrate.

  FIG. 1 is a diagram showing the configuration of this type of substrate cleaning apparatus. As shown in the figure, the substrate cleaning apparatus includes a substrate holding / rotating mechanism 10 that holds and rotates a substrate to be cleaned Wf and a cleaning tool mounting mechanism 20 that mounts a cleaning tool 21. The substrate holding and rotating mechanism 10 includes a plurality of (four in the figure) arms 12 on which chucks 11 that hold the substrate to be cleaned Wf in a horizontal posture are mounted. The arms 12 are integrally attached to the base 13. The rotary shaft 14 can be rotated in the direction of arrow A.

  The cleaning tool mounting mechanism 20 has a swing arm 23, a rotary shaft 22 is provided at the tip of the swing arm 23, and a cleaning tool is mounted at the tip of the rotary shaft 22. The rotating shaft 22 is rotated in the direction of arrow B by a rotating mechanism (not shown) to rotate the cleaning tool 21 in the same direction. A swing shaft 24 is provided at the rear end of the swing arm 23 so as to swing the swing arm 23 in the direction of arrow C. Further, the swing shaft 24 moves the swing arm 23 up and down as indicated by an arrow D.

  As shown in FIG. 2A, the cleaning tool 21 includes a cleaning member 21a made of sponge or the like and a gripping member 21b that grips the cleaning member 21a. The cleaning tool having such a configuration is fixed to the rotating shaft 22, the cleaning member 21 a is brought into contact with the upper surface of the substrate Wf to be cleaned, the cleaning liquid is supplied from the nozzle 25, the rotating shaft 22 is rotated, and the swing arm 23. Is swung to clean the upper surface of the substrate Wf to be cleaned. When the rotational force of the rotary shaft 22 and the swinging force of the swing arm 23 are applied to the cleaning member 21a, the cleaning member 21a is caused to move by the frictional force between the cleaning member 21a and the substrate to be cleaned Wf as shown in FIG. The gripping member 21b may fall off. As described above, when the cleaning member 21a of the cleaning tool 21 is detached from the gripping member 21b, the original cleaning performance may not be maintained, and a product with poor cleaning may continue to be manufactured.

  The present invention has been made in view of the above points, and is provided with a cleaning member detection sensor for detecting the presence or absence of the cleaning member of the cleaning tool attached to the cleaning tool mounting mechanism, accurately detecting the dropping of the cleaning member, and cleaning It is an object of the present invention to provide a substrate cleaning method capable of preventing a defective product from being continuously manufactured.

  In order to solve the above problems, the invention described in claim 1 comprises a substrate holding and rotating mechanism and a cleaning tool, supplying a cleaning liquid onto the surface of the substrate to be cleaned that is held and rotated by the substrate holding and rotating mechanism, and In the substrate cleaning method for cleaning the substrate to be cleaned by relative movement of the cleaning member and the substrate to be cleaned, the cleaning member of the cleaning tool is brought into contact with the surface of the substrate to be cleaned. The presence or absence of the cleaning member is monitored by a cleaning member sensor to be detected. When the cleaning tool has a cleaning member, cleaning by the relative motion is started. When the cleaning tool has no cleaning member, the relative cleaning is performed. Substrate cleaning method, characterized by stopping cleaning by dynamic movement.

  According to a second aspect of the present invention, in the substrate cleaning method according to the first aspect, the cleaning tool includes the cleaning member and a cleaning member holding mechanism that holds the cleaning member, and the cleaning member has a cylindrical shape. In the middle, the small-diameter intermediate portion is integrally formed with the upper large-diameter portion and the lower large-diameter portion above and below the small-diameter intermediate portion, and the cleaning member holding mechanism is fitted with the small-diameter intermediate portion of the cleaning member. And a gripping part having a groove in which the upper large-diameter part of the cleaning member fits above and below the flange and a concave part in which the upper part of the lower large-diameter part fits, and the cleaning member in the gripping part, The small-diameter intermediate portion is fitted to the flange, the upper large-diameter portion is fitted to the groove, and the upper portion of the lower large-diameter portion is fitted and held in the recess.

  According to a third aspect of the present invention, in the substrate cleaning method according to the first or second aspect, the gripping portion includes a plurality of gripping portion constituent members, and the cleaning member holding mechanism includes the plurality of gripping portion constituent members. A fastening mechanism for fastening in a cylindrical shape is provided, and each of the plurality of gripping portion constituting members has a flange in which a small-diameter intermediate portion of the cleaning member is fitted in an inner intermediate portion, and the upper and lower portions of the cleaning member are formed above and below the flange. A groove in which the diameter portion is fitted and a recess in which the upper portion of the lower large diameter portion is fitted are formed, and the cleaning member is disposed between the plurality of gripping portion constituting members, and the small diameter intermediate portion is provided in the flange. The upper large-diameter portion is arranged in the groove and the upper portion of the lower large-diameter portion is fitted in the recess, and the plurality of gripping portion constituting members are integrally fastened by the fastening mechanism. Features.

  According to a fourth aspect of the present invention, in the substrate cleaning method according to the third aspect, the fastening mechanism transmits a rotational force to the fastened gripping member constituting member.

  According to the present invention, in the substrate cleaning method described above, a protrusion is provided on a surface of the gripping member constituting member that contacts the cleaning member.

  According to the present invention, in the substrate cleaning method described above, the cleaning member is provided with a flat annular protrusion on an outer peripheral portion of a lower end surface of the lower large diameter portion.

  According to the present invention, in the substrate cleaning method described above, a plurality of kerfs are provided in the radial direction on the annular protrusion, and the annular protrusion is divided into a plurality of parts.

  According to the present invention, in the substrate cleaning method described above, the cleaning member is provided with a plurality of disc-shaped protrusions arranged concentrically on a lower end surface of the lower large diameter portion.

  According to the present invention, in the substrate cleaning method described above, the cleaning member includes a cross holding member in which the small diameter intermediate portion, the upper large diameter portion, and the lower large diameter portion are integrally formed; and It consists of the cyclic | annular cloth affixed on the lower end surface of the said lower large diameter part, It is characterized by the above-mentioned.

  According to the first aspect of the present invention, the presence or absence of the cleaning member is monitored by the cleaning member sensor that detects the presence or absence of the cleaning member of the cleaning tool. When the cleaning tool does not have a cleaning member, the cleaning by the relative motion is stopped, so that it is possible to avoid continuously manufacturing defective products.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 3 is a plan view showing the configuration of the substrate cleaning apparatus according to the present invention. The appearance of the substrate cleaning apparatus is substantially the same as that shown in FIG. The swing arm 23 of the cleaning tool mounting mechanism 20 of the substrate cleaning apparatus 1 swings within the cleaning range indicated by the arrow 4 on the substrate Wf to be cleaned, and rotates while supplying the cleaning liquid from the nozzle 25 (see FIG. 1). Wash with tool 21. The swing arm 23 of the cleaning tool mounting mechanism 20 can swing within the range indicated by the arrow 3, and the cleaning tool 21 mounted on the tip of the swinging arm 23 is retracted in a state where it reaches the retracted position 2.

  A light projector 27a and a light receiver 27b constituting a cleaning member sensor that detects the presence or absence of the cleaning member of the cleaning tool 21 with the retracted position 2 interposed therebetween are arranged. As shown in FIG. 4, the cleaning tool 21 includes a cleaning member 21a and a gripping member 21b that grips the cleaning member 21a. In the state where the cleaning tool 21 is located at the retreat position 2 and the cleaning member 21a is normally gripped by the gripping member 21b, the light 28 from the projector 27a is blocked by the cleaning member 21a as shown in FIG. Although it does not reach the light receiver 27b, as shown in FIG. 4B, when the cleaning member 21a falls off the gripping member 21b, the light 28 from the projector 27a reaches the light receiver 27b. Therefore, the presence or absence of the cleaning member 21a is determined based on whether or not the light 28 from the projector 27a reaches the light receiver 27b in a state where the cleaning tool 21 is positioned at the retreat position 2.

  Instead of the light receiver 27b and the projector 27a, a single projector / receiver 27 may be provided as shown in FIG. With this configuration, as shown in FIG. 5A, the light 28 emitted from the light emitter / receiver 27 in a state where the cleaning member 21a is normally held by the holding member 21b is reflected by the cleaning member 21a. The reflected light 28 ′ reaches the light projecting / receiving device 27, but when the cleaning member 21 a falls off the gripping member 21 b as shown in FIG. 5B, the light 28 emitted from the light projecting / receiving device 27 is emitted. Since it is not reflected, the reflected light does not reach the projector / receiver 27. Accordingly, the presence or absence of the cleaning member 21a is determined by whether or not the light emitted from the light projecting / receiving device 27 is reflected and received by the light projecting / receiving device 27 in a state where the cleaning tool 21 is located at the retracted position 2.

  The detection signal of the light receiver 27b or the light projector / receiver 27 constituting the cleaning member sensor is transmitted to a control device (not shown), and the control device performs a predetermined process. FIG. 6 is a diagram illustrating a processing flow of the control device. First, at the start of cleaning, the presence or absence of the cleaning member 21a is detected by the output of the cleaning member sensor (step ST1). If the cleaning member 21a is not present, an abnormal alarm is output and the substrate cleaning apparatus is stopped (step ST2). If the cleaning member 21a is present, cleaning of the substrate Wf is started (step ST3). When cleaning is completed (step ST4), the presence or absence of the cleaning member 21a is detected by the output of the cleaning member sensor (step ST5), and the cleaning member 21a is detected. If there is not, an abnormal alarm is output and the substrate cleaning apparatus is stopped (step ST6). If there is the cleaning member 21a, the cleaning process of the substrate Wf is terminated as normal.

  In the above example, the example in which the light projector 27a and the light receiver 27b constituting the cleaning member sensor for detecting the presence or absence of the cleaning member of the cleaning tool 21 with the retracted position 2 interposed therebetween is shown, but the present invention is not limited to this. For example, as shown in FIG. 17, the light projector 27 a and the light receiver 27 b are attached to the swing arm 23 via the support members 41 and 42 so as to be disposed with the cleaning member 21 a of the cleaning tool 21 interposed therebetween. May be. Thereby, the presence or absence of the cleaning member 21a can be confirmed at all times (of course, during the substrate cleaning).

  FIG. 17 shows an example of a transmission type sensor in which the projector 27a and the light receiver 27b are arranged to face each other with or without the cleaning member 21a, but the light emitter / receiver 27 shown in FIG. You may make it attach through a member.

  7 to 12 are views showing the structure of the cleaning tool according to the present invention. FIG. 7 is an exploded perspective view, FIG. 8 is a plan view, FIG. 9 is a cross-sectional view taken along the line AA in FIG. FIG. 11 is a cross-sectional view taken along the line BB in FIG. 9, and FIG. 12 is a cross-sectional view taken along the line CC in FIG. 9. The cleaning tool includes a pair of gripping members 31 and 32, a driving force transmission member 33, a cylindrical fastening member 34, a cleaning member 35, screws 36 and 36, and the like.

  The cleaning member 35 is made of a cylindrical PVA (polyvinyl alcohol) sponge (= porous substrate PVF (polyvinyl formal)), and the cleaning member 35 is a small diameter intermediate portion ( 35a), the upper portion of the small-diameter intermediate portion 35a is a flange-like upper large-diameter portion 35b, and the lower portion is a cylindrical lower-large-diameter portion 35c.

  The holding members 31 and 32 are respectively composed of lower large-diameter portions 31a and 32a and upper small-diameter portions 31b and 32b. A groove 31c into which the upper large-diameter portion 35b of the cleaning member 35 is fitted is formed in the upper portion inside the large-diameter portion 31a of the grip member 31, and a base portion 33a of the driving force transmitting member 33 is formed in the upper portion of the small-diameter portion 31b. A fitting groove 31d is formed. Further, a groove 32c into which the upper large diameter portion 35b of the cleaning member 35 is fitted is formed on the inner upper portion of the large diameter portion 32a of the grip member 32, and the base portion of the driving force transmitting member 33 is formed on the upper portion of the small diameter portion 32b. A groove 32d into which 33a is fitted is formed.

  The driving force transmission member 33 has a base portion 33a having a shape obtained by cutting both sides of the disk, and a cylindrical portion 33b is provided upright on the upper surface of the base portion 33a. A mounting screw hole 33c to which the tip of the rotating shaft 22 of the cleaning tool mounting mechanism 20 of FIG. 1 is mounted is formed at the center of the cylindrical portion 33b. The base portion 33a of the driving force transmission member 33 is inserted into the grooves 31d and 32d of the small diameter portions 31b and 32b of the grip members 31 and 32, and both side surfaces 33d of the base portion 33a in the inserted state. , 33d are in close contact with both side walls of the grooves 31d, 32d. Further, recessed portions 31e and 32e into which the upper end portion of the lower large diameter portion 35c of the cleaning member 35 is fitted are formed below the large diameter portions 31a and 32a of the gripping members 31 and 32, and the recessed portions 31e and 32e and the groove 31c are formed. , 32c are formed with flanges 31h and 32h that fit into the small-diameter intermediate portion 35a of the cleaning member 35.

  The fastening member 34 is cylindrical and has an inner diameter that allows the upper small diameter portions 31b and 32b of the pair of gripping members 31 and 32 facing each other to be fitted. Further, a hole 34a into which the cylindrical portion 33b of the driving force transmission member 33 is inserted is formed in the upper center portion of the fastening member 34, and holes 34b and 34b into which screws 36 and 36 are inserted are formed.

  In assembling the cleaning tool 21 having the above-described component configuration, first, the upper large diameter portion 35b of the cleaning member 35 is inserted into the grooves 31c and 32c of the gripping members 31 and 32, and the upper portion of the lower large diameter portion 35c of the cleaning member 35 is inserted. The cleaning member 35 is gripped by the pair of gripping members 31 and 32 by being inserted into the recesses 31 e and 32 e of the gripping members 31 and 32.

  Next, the base portion 33a of the driving force transmission member 33 is inserted into the grooves 31d and 32d of the small diameter portions 31b and 32b of the gripping members 31 and 32, and in this state, the small diameter portions of the gripping members 31 and 32 are connected to the inner diameter of the fastening member 34. When 31 b and 32 b are inserted, the cylindrical portion 33 b of the driving force transmission member 33 is inserted into the hole 34 a of the fastening member 34.

  Next, the screws 36, 36 are screwed into the screw holes 31f, 32f formed in the small diameter portions 31b, 32b of the holding members 31, 32 through the holes 34b, 34b of the fastening member 34. The members 31, 32, the driving force transmission member 33, and the cleaning member 35 are assembled together.

  A plurality (four in total, four each) of arcuate protrusions 31g and 32g are provided on the portions of the recesses 31e and 32e of the gripping members 31 and 32 that contact the upper surface of the upper large diameter portion 35b of the cleaning member 35. In the state where the screws 36 and 36 and the gripping members 31 and 32 are fastened with the screws 36 and 36, the protruding portions 31g and 32g bite into the upper surface of the lower large-diameter portion 35c of the cleaning member 35 (a state where they are pierced). When the gripping members 31 and 32 are rotated, they are simultaneously rotated so as not to idle.

  The rotating shaft 22 of the cleaning tool mounting mechanism 20 is mounted in the screw hole 33c formed in the cylindrical portion 33b of the driving force transmission member 33 of the cleaning tool 21 assembled as described above (see FIG. 1). By rotating 22, the driving force transmission member 33 rotates. At this time, since both side surfaces 33d of the base portion 33a of the driving force transmission member 33 are in close contact with the wall surfaces of the grooves 31d and 32d of the small diameter portions 31b and 32b of the grip members 31, 32, this rotational force is applied to the base portion. The gripping members 31 and 32 are transmitted to the gripping members 31 and 32 by surface contact from the both side surfaces 33d of 33a, and the gripping members 31 and 32 rotate. At this time, as described above, the arc-shaped protrusions 31g and 32g of the gripping members 31 and 32 bite into the upper surface of the lower large diameter portion 35c of the cleaning member 35, so that the lower end surface of the cleaning member 35 is on the substrate to be cleaned. Even if it abuts and receives frictional force, it does not run idle.

  As described above, the cleaning member 35 of the cleaning tool 21 has the small-diameter intermediate portion 35a at the portion gripped by the gripping members 31 and 32, the upper portion of the small-diameter intermediate portion 35a is a flange-like upper large-diameter portion 35b, and the lower portion is a circle. The lower large diameter portion 35c is a columnar shape. The upper large diameter portion 35b is formed in the grooves 31c and 32c of the holding members 31 and 32, and the upper end portion of the lower large diameter portion 35c is formed in the recessed portions 31e and 32e of the holding members 31 and 32. Further, the flanges 31 h and 32 h of the gripping members 31 and 32 are fitted into the small diameter intermediate portion 35 a of the cleaning member 35.

  Accordingly, the holding of the cleaning member 35 becomes perfect, and even if the cleaning member 35 interferes with the protrusion (chuck 11) of the substrate holding and rotating mechanism 10 (see FIG. 1), the cleaning member 35 is held by the gripping member. In the case where the substrate to be cleaned Wf is continuously cleaned without being detached from or coming off from 31 and 32, the cleaning process is not continued without noticing that the cleaning member 35 has been detached. .

  Further, in the cleaning tool having the above configuration, since the upper end portion of the lower large diameter portion 35c of the cleaning member 35 is fitted into the concave portions 31e and 32e of the grip members 31 and 32, the lower end surface of the cleaning member 35 is placed on the substrate to be cleaned Wf. When the contact member receives the frictional force in the lateral direction and tries to move in the lateral direction, the upper end side surface of the lower large diameter portion 35c of the cleaning member 35 is pressed by the recesses 31e and 32e of the gripping members 31 and 32. Is blocked.

  The configuration of the cleaning member 35 is not limited to the above example, and may be, for example, the shape shown in FIGS. 13 to 16, (a) is a side view and (b) is a bottom view. The cleaning member 35 shown in FIGS. 13 to 16 has a small-diameter intermediate portion 35a having a small diameter at a portion gripped by the gripping members 31 and 32, and an upper large-diameter portion 35b and a lower portion on the upper and lower portions of the small-diameter intermediate portion 35a. Although the point which has the large diameter part 35c is the same as the said example, it differs in the following points, respectively.

  The cleaning member shown in FIG. 13 is provided with a flat annular projection 35d on the lower surface (contact surface to the substrate to be cleaned) of the outer peripheral portion of the lower end surface of the cleaning member 35. By configuring the cleaning member 35 in this way, the lower surfaces of the recesses 31e and 32e of the gripping members 31 and 32 are in contact with the outer peripheral upper surface of the lower large diameter portion 35c of the cleaning member 35. The contact surface of the protrusion 35d is cleaned with a uniform contact pressure.

  The cleaning member shown in FIG. 14 is provided with a plurality of kerfs 35e in the radial direction on an annular protrusion 35d provided on the outer peripheral portion of the lower end surface of the cleaning member 35, and the annular protrusion 35d is divided into a plurality (four in the figure). is doing. By providing the cut groove 35e in this way, the cleaning liquid supplied to the upper surface of the substrate Wf to be cleaned flows through the cut groove 35e, and the cleaning effect is improved.

  In the cleaning member shown in FIG. 15, a plurality of disc-shaped protrusions 35 f and 35 g are arranged on the lower end surface of the cleaning member 35 in a concentric manner at an equal pitch. Here, a plurality of disk-shaped projections 35f having a large diameter are arranged at an equal pitch on the outer peripheral side, and a plurality of disk-shaped projections 35g having a small diameter are arranged at an equal pitch on the inner side. By comprising in this way, a washing | cleaning liquid flows through between the disk-shaped protrusion parts 35f and 35g, and the washing | cleaning effect improves.

  In the cleaning tool shown in FIGS. 7 to 12, the material of the pair of gripping members 31, 32, the driving force transmission member 33, and the cylindrical fastening member 34 constituting the holding mechanism that holds the cleaning member 35 is not particularly limited. For example, a plastic material is used. Plastic materials include PVC (polyvinyl chloride), PE (polyethylene), PP (polypropylene), PET (polyethylene terephthalate), PVDF (polyvinylidene fluoride), PEEK (polyetheretherketone), PTFE (polytetrofluoroethylene). Etc. are used.

  Moreover, although the example which used PVA (polyvinyl alcohol) sponge (= porous substrate PVF (polyvinyl formal)) was shown as a constituent material of the washing | cleaning member 35 in the said example, if it is a liquid-absorbing porous body, There is no particular limitation.

  In the above example, the cleaning member 35 held by the pair of holding members 31 and 32 is a porous body such as PVA sponge. However, the present invention is not limited to this, and as shown in FIG. You may make it hold | grip the cross holding member 37 which stuck the cyclic | annular cloth | cross 38 with a pair of holding members 31 and 32. FIG. The cross holding member 37 has a small-diameter intermediate portion 37a having a small diameter at the portion held by the holding members 31 and 32, and the upper portion of the small-diameter intermediate portion 37a is a flange-shaped upper large-diameter portion 37b. Is the same as the cleaning member 35 in that it is a cylindrical lower large diameter portion 37c.

  As the material of the cloth holding member 37, plastic, FKM (fluoro rubber), EPDM (ethylene propylene rubber), urethane rubber, or the like can be used. Further, as the material of the cloth 38, fine holes are formed on the surface thereof, such as urethane foam, a nonwoven fabric in which fibers are hardened with urethane resin, and a suede type polishing cloth. The cloth 38 and the substrate to be cleaned are formed in the holes. Any cloth having a property of taking in foreign matters such as dust removed from the cleaning surface of the substrate to be cleaned Wf by friction with Wf may be used.

  As described above, the cleaning tool using the cloth 38 is preferably a structure in which a hard cloth 38 is bonded to a soft (for example, rubber) cloth holding member 37, but is not limited thereto. Instead of this, a structure in which the cloth 38 and the cloth holding member 37 are integrally formed, or a structure in which the cloth 38 is attached to the cloth holding member 37 made of inelastic plastic may be used.

It is a figure which shows the structure of the conventional board | substrate cleaning apparatus. It is a figure which shows the cross-sectional structure of the conventional cleaning tool, FIG. 2 (a) is a normal state, FIG.2 (b) is a figure which shows the state which the cleaning member fell from the holding member. It is a top view which shows the structure of the board | substrate cleaning apparatus which concerns on this invention. 4A and 4B are diagrams illustrating an operation state of the cleaning member sensor of the substrate cleaning apparatus according to the present invention. FIG. 4A illustrates a case where the cleaning member is in a normal state, and FIG. 4B illustrates a case where the cleaning member is detached from the gripping member. It is a figure (transmission type). FIGS. 5A and 5B are diagrams showing an operation state of the cleaning member sensor of the substrate cleaning apparatus according to the present invention, FIG. 5A shows a case where the cleaning member is in a normal state, and FIG. 5B shows a case where the cleaning member is dropped from the gripping member. It is a figure (reflection type). It is a figure which shows the processing flow of the cleaning member sensor output signal of the control apparatus of the board | substrate cleaning apparatus which concerns on this invention. It is a disassembled perspective view which shows the structure of the cleaning tool which concerns on this invention. It is a top view of the cleaning tool which concerns on this invention. It is AA sectional drawing of FIG. It is a top view of the driving force transmission member of the cleaning tool concerning the present invention. It is BB sectional drawing of FIG. It is CC sectional drawing of FIG. It is a figure which shows the structural example of the cleaning member of the cleaning tool which concerns on this invention, Fig.13 (a) is a side view, FIG.13 (b) is a bottom view. It is a figure which shows the structural example of the washing | cleaning member of the cleaning tool which concerns on this invention, Fig.14 (a) is a side view, FIG.14 (b) is a bottom view. It is a figure which shows the structural example of the cleaning member of the cleaning tool which concerns on this invention, Fig.15 (a) is a side view, FIG.15 (b) is a bottom view. It is a figure which shows the structural example of the cleaning member of the cleaning tool which concerns on this invention, Fig.16 (a) is a side view, FIG.16 (b) is a bottom view. It is a side view which shows the structure of the board | substrate cleaning apparatus which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Substrate holding | maintenance rotation mechanism 11 Chuck 12 Arm 13 Base 14 Rotating shaft 20 Cleaning tool mounting mechanism 21 Cleaning tool 22 Rotating shaft 23 Swing arm 24 Swing shaft 25 Nozzle 27 Emitter / receiver 27a Emitter 27b Receiver 28 Light 28 'Reflection Light 31 Holding member 32 Holding member 33 Driving force transmission member 34 Fastening member 35 Cleaning member 36 Screw 37 Cross holding member 38 Cross 41 Support member 42 Support member

Claims (4)

A substrate holding and rotating mechanism and a cleaning tool are provided, a cleaning liquid is supplied onto the surface of the substrate to be cleaned that is held and rotated by the substrate holding and rotating mechanism, and the cleaning member of the cleaning tool is brought into contact with the surface of the substrate to be cleaned. In the substrate cleaning method for cleaning the substrate to be cleaned by relative movement of the cleaning member and the substrate to be cleaned,
The cleaning member sensor that detects the presence or absence of the cleaning member of the cleaning tool monitors the presence or absence of the cleaning member, and when the cleaning tool has a cleaning member, starts cleaning by the relative motion, If there is no cleaning member, the cleaning by the relative motion is stopped. The substrate cleaning method according to claim 1,
The cleaning tool includes the cleaning member and a cleaning member holding mechanism that holds the cleaning member,
The cleaning member has a cylindrical shape with a small-diameter intermediate portion formed in the middle and an upper large-diameter portion and a lower large-diameter portion integrally formed above and below the small-diameter intermediate portion,
The cleaning member holding mechanism includes a flange in which a small-diameter intermediate portion of the cleaning member is fitted, a groove in which the upper large-diameter portion of the cleaning member is fitted on the top and bottom of the flange, and an upper portion of the lower large-diameter portion. A grip portion having a recess,
The holding member is held by fitting the cleaning member, the flange with the small-diameter intermediate portion, the groove with the upper large-diameter portion, and the concave portion with the upper portion of the lower large-diameter portion. Substrate cleaning method. In the substrate cleaning method according to claim 1 or 2,
The grip portion is composed of a plurality of grip portion constituent members, and the cleaning member holding mechanism includes a fastening mechanism for fastening the plurality of grip portion constituent members in a cylindrical shape,
Each of the plurality of gripping member constituting members has a flange in which the small-diameter intermediate portion of the cleaning member is fitted in the inner intermediate portion, and a groove and a lower large groove that fit the upper-large diameter portion of the cleaning member above and below the flange. It is a configuration in which a recess into which the upper part of the diameter part fits is formed,
The cleaning member is fitted between the plurality of gripping portion constituting members, the small diameter intermediate portion is fitted to the flange, the upper large diameter portion is fitted to the groove, and the upper portion of the lower large diameter portion is fitted to the recess. A substrate cleaning method comprising: arranging and integrally fastening the plurality of gripping portion constituting members by the fastening mechanism. The substrate cleaning method according to claim 3,
The substrate cleaning method, wherein the fastening mechanism transmits a rotational force to the fastened gripping member constituting member.

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