JP2007295774A - Power supply system and system power source - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent artificial setting error in connecting of system power sources or allocating of ID, relating to a power supply system in which the outputs of a plurality of system power sources are connected in common. <P>SOLUTION: Among system power sources, connected in series, of a power supply system 1, a front-stage system power source comprises a confirmation signal transmitting means which transmits confirmation signal for confirming connection to a post-stage system power source by way of a connection confirmation cable. Control means 3a, 3b, and 3c of the post-stage system power source comprises a reply signal transmitting means which transmits reply signal meaning reception of the confirmation signal to the front-stage system power source by way of the connection confirmation cable. The front-stage system power source comprises an ID transmitting means which transmits, by way of a communication cable, the ID of the post-stage system power source when receives the reply signal from the post-stage system power source. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a power supply system used in a DC sputtering apparatus or the like and a system power supply used in the system. In particular, when configuring a power supply system by connecting multiple system power supplies, one system power supply functions as a master machine that controls the output of another system power supply, and the other system power supply is controlled by the master machine. The present invention relates to a system power supply that functions as a slave machine that automatically assigns an ID via a connection cable between system power supplies.

  A DC sputtering apparatus or the like is used as a film forming apparatus for a semiconductor process. As a power source for these devices, a system power source whose output is controlled by a CPU (Central Processing Unit) is used. The power required for a spatter device or the like varies depending on its application. For this reason, a dedicated power source corresponding to each device has been used. However, in order to be able to respond to various needs according to the type and scale of equipment, rather than creating a dedicated power supply according to the equipment, multiple system power supplies of the same type as needed If the power supply system is configured by connection, it can be provided more flexibly and at a reduced cost.

  FIG. 4 is a block diagram showing a conventional power supply system of this type. The system power supply 100a includes a power supply 102a for supplying power, a control means 110a for controlling the output of the power supply 102a, a CPU 101a included in the control means 110a, and a control for selecting a master function or a slave function of the CPU 101a. The switch 105a is connected to the end 104a, and the DIP switch 111a is used to input an ID for identifying the system power supply 100a. The system power supply 100a functions as a master system power supply that controls the output of another system power supply when the potential at the control terminal 104a of the control means 110a is at H level, and other when the potential at the control terminal 104a is at L level. It functions as a slave system power supply whose output is controlled by the system power supply.

  The system power supply 100b and the system power supply 100c have the same hardware as the system power supply 100a. The outputs of these system power supplies are given to the output wiring 108 via the output terminals 106a, 106b and 106c, and are output to the sputtering apparatus or the like. The control means for each system power supply is connected to each other by a control line 109 via control terminals 107a, 107b, and 107c.

  In the system power supply 100a, an H level potential is applied to the control terminal 104a by the wiring 103a through a pull-up resistor. Since the switch 105a is in an off state, an H level potential is applied to the control terminal 104a of the CPU 101a. Therefore, the system power supply 100a functions as a master system power supply that controls the output of another system power supply.

  On the other hand, the switches 105b and 105c of the system power supplies 100b and 100c are in an ON state, and the control terminal 104b and the control terminal 104c are respectively supplied with a ground (GND) L level potential. The system power supply 100b and the system power supply 100c are It functions as a slave system power supply and is configured to be controlled via the control line 109 by the control means 110a.

  In this way, by sharing the hardware of the master and slave units and switching the master system power supply and slave system power supply by the switch, for example, even if the master system power supply fails, the switch can be switched Substitution can be easily performed.

Each system power supply 100a, 100b, and 100c is configured such that an ID for distinguishing from other system power supplies can be manually input by the DIP switches 111a, 111b, and 111c.
JP 2000-209781 A

  However, in the above known example, the master machine and the slave machine can be easily switched by a switch, but one unit is set as the master system power supply and the other set as the slave system power supply. There is a problem that human error such as setting the system power supply to the master system power supply or setting all to the slave system power supply is likely to occur.

  In addition, as the system power supply to be used increases, it is difficult to determine from the outside whether or not all system power supplies are properly connected.

  In addition, there is a problem that an artificial input error occurs because an ID for identifying each system power supply is manually input.

  In the present invention, the following means have been taken in order to solve the above problems.

  (1) The power supply system of the present invention comprises a plurality of system power supplies each having a power supply for supplying power and a control means for controlling the supplied power, and each system power supply has an output for supplying the power. A power supply system in which terminals are connected in common and communication terminals for performing input / output of IDs for identifying the system power supply are connected in common by a communication cable, wherein the plurality of system power supplies are connection confirmation cables. Among the system power supplies connected in series, the control unit for the system power supply at the front stage confirms the connection to the system power supply at the rear stage via the connection confirmation cable. The latter system power supply control means is connected to the previous system power supply via the connection confirmation cable. Response signal transmitting means for transmitting a response signal indicating that the confirmation signal has been received, and the control means for the system power supply in the previous stage receives the response signal from the system power supply in the subsequent stage as a trigger. It is characterized by having ID transmitting means for transmitting the ID of the system power supply at the latter stage via the communication cable.

  (2) In the power supply system according to (1), the control unit for the system power supply at the preceding stage receives an ID from the system power supply at the back stage when the response signal is received from the system power supply at the back stage. An ID transmission notification transmitting means for transmitting an ID transmission notification indicating that transmission is in progress via the connection confirmation cable is provided.

  (3) In the power supply system of the above (1) or (2), the first system power supply of the system power supply connected in series via the connection confirmation cable is a master machine, and the control means of the master machine is the preceding stage A storage means for storing an ID of a subsequent system power supply transmitted from the system power supply via the communication cable, and detecting that the preceding system power supply has not received the response signal from the subsequent system power supply. And a diagnostic signal transmitting means for transmitting a diagnostic signal including an ID of the system power supply at the subsequent stage via the communication cable, and a system power supply at the subsequent stage receiving the diagnostic signal transmits via the connection confirmation cable. And a diagnostic reception notification receiving means for receiving the diagnostic reception notification.

  (4) In the power supply system according to (3), the control unit of the master machine detects that the control unit has not received the response signal from the system power supply at the subsequent stage, and When the diagnosis reception notification receiving unit of the machine detects that the diagnosis reception notification has been received, it recognizes that the subsequent system has failed, and when it does not detect that the diagnosis reception notification has been received, A certifying means for certifying that the system power supply of the latter stage is not connected is provided, and the master machine is provided with a display means for displaying a result of certifying by the certifying means or / and a total number of system power supplies. It is said.

  (5) In the power supply system according to any one of (1) to (4), the system power supply includes a connection confirmation connector connected to the connection confirmation cable, and the connection confirmation connector includes It has a first connection pin that outputs a confirmation signal, a second connection pin that inputs the response signal, a third connection pin that inputs the confirmation signal, and a fourth connection pin that outputs the response signal.

  (6) In the power supply system according to any one of (1) to (5), the connection confirmation connector includes a fifth connection pin that outputs or inputs the ID transmission notification.

  (7) In the system power supply of the present invention, a power supply for supplying power, a control means for controlling the supplied power, a connector for confirming connection with another system power supply, an ID And a communication signal connector for transmitting and receiving the data, wherein the control means transmits a confirmation signal for connection confirmation to one system power supply via the connection confirmation connector; A response signal receiving means for receiving a response signal indicating that the confirmation signal has been received from the one system power supply via the connection confirmation connector; and when the response signal receiving means receives the response signal. And an ID transmission means for transmitting the ID of the one system power supply via the communication connector.

  (8) In the system power supply of (7), the connection confirmation connector includes a first connection pin for outputting the confirmation signal and a second connection pin for inputting the response signal. .

  (9) In the system power supply of (7) or (8), the control means includes confirmation signal receiving means for receiving a connection confirmation confirmation signal from another system power supply via the connection confirmation connector. A response signal transmitting means for transmitting a response signal indicating that the confirmation signal has been received to the other system power supply via the connection confirmation connector; and the response signal transmitting means transmits the response signal. And an ID receiving means for receiving an ID of the system power supply from the other system power supply via the communication connector.

  (10) In the system power supply of (9), the connection confirmation connector includes a third connection pin for inputting the confirmation signal and a fourth connection pin for outputting the response signal. .

  (11) In the system power supply according to any one of (7) to (10), the connection confirmation connector outputs or inputs an ID transmission notification indicating that the communication connector is transmitting the ID. The fifth connection pin is provided.

  According to the power supply system of the present invention, a plurality of system power supplies are connected in series via the connection confirmation cable. As a result, since the unconnected system power supply can be easily visually recognized from the outside, there is an advantage that human error such as forgetting to connect can be prevented in advance.

  Further, the control unit for the system power supply at the front stage has a confirmation signal transmission means for transmitting a confirmation signal for confirming the connection to the system power supply at the back stage via the connection confirmation cable. The control means has a response signal transmission means for transmitting a response signal indicating that the confirmation signal has been received to the system power supply at the preceding stage, and the control means for the system power supply at the front stage has received the response signal from the system power supply at the subsequent stage. Sometimes, it has an ID transmission means for transmitting the ID of the subsequent system power supply via the communication cable. As a result, the system power supply at the front stage can automatically and sequentially assign different IDs to the system power supply at the back stage from the system power supply of the rear stage, and an ID assignment mistake for each system power supply can be prevented. Have.

  According to the system power supply of the present invention, a connection confirmation connector for confirming connection with another system power supply and a communication connector for performing ID transmission / reception are provided. A confirmation signal transmitting means for transmitting a connection confirmation signal and a response signal receiving means for inputting a response signal from the one system power supply, and when the response signal receiving means is received, ID transmitting means for transmitting an ID to the system power supply is provided. The confirmation signal and the response signal are transmitted / received via the connection confirmation connector, and the ID is transmitted via the communication connector. Thereby, it can be easily visually recognized from the outside whether or not the connection confirmation cable is installed in the connection confirmation connector, and an artificial connection error can be prevented in advance. In addition, since an ID can be automatically assigned to one system power supply connected next to its own system power supply, an artificial ID assignment mistake such as assigning the same ID can be prevented. Have advantages.

  Other effects of the present invention will be described in the description of each embodiment.

  The power supply system according to the present embodiment supplies power to a sputtering apparatus or the like by commonly connecting the outputs of a plurality of system power supplies. Each system power supply is commonly connected by a communication cable made of RS485 or the like. The system power supplies are connected in series via a connection confirmation cable. Each system power supply includes a power supply for supplying power and control means for controlling the power supply of the power supply and establishing a connection with another system power supply. Of the system power supplies that are directly connected, the control means for the system power supply at the front stage has a confirmation signal transmission means for sending a confirmation signal for confirming the connection to the system power supply at the rear stage via the connection confirmation cable. is doing. When the confirmation signal is received from the preceding system power supply, the latter system power supply control means has a response signal transmission means for transmitting a response signal indicating that the confirmation signal has been received. Further, the control unit for the system power supply at the front stage has a response signal receiving means for receiving a response signal from the system power supply at the back stage.

  That is, in response to the confirmation signal transmitted from the system power supply in the previous stage to the system power supply in the subsequent stage, the system power supply in the subsequent stage transmits a response signal to the system power supply in the previous stage, and the system power supply in the previous stage receives the response signal. It is confirmed that the system power supply is connected after the own system power supply. The front system power supply has ID transmission means for transmitting the ID of the rear system power supply via the communication cable to the rear system power supply after receiving the response signal. The ID transmission means of the system power supply at the front stage transmits an ID different from the ID of the system power supply to the system power supply at the back stage. Since a plurality of system power supplies sequentially perform the above operation, different IDs can be automatically assigned to all system power supplies. Therefore, it is possible to reliably assign an ID as compared with the case where the system power is manually input. Further, since the connection confirmation cable connects the respective system power supplies in series, the connection state of the connection cable can be easily seen from the outside, and it becomes easy to prevent human connection errors.

  Further, the control means for the system power supply in the previous stage has ID transmission notification transmission means. When the preceding system power supply receives a response signal from the succeeding system power supply, the preceding ID transmission notification transmitting means transmits an ID indicating that an ID is being transmitted to other system power supplies including the succeeding system power supply. Send a notification via the connection confirmation cable. The other system power supply is provided with an ID transmission notification receiving means for receiving the ID transmission notification. When receiving that the ID transmission notification is transmitted from any of the system power supplies, a signal is sent to the communication cable. Is not sent. Thereby, interference can be prevented in the communication cable in which the ID is transmitted.

  The system power supply at the head of the system power supplies connected in series is set as the master machine. The control unit of the master unit stores the ID of the subsequent system power source transmitted from the previous system power source via the communication cable in the storage unit. Therefore, in the master machine, IDs of all other system power supplies are recorded. Further, when the control unit of the master unit detects that the confirmation signal is transmitted from the system power supply of the preceding stage and the response signal is not transmitted from the system power supply of the subsequent stage, the system power supply of the subsequent stage is not actually connected. A diagnostic signal transmitting means for transmitting a diagnostic signal for diagnosing whether or not, and a diagnostic reception notification transmitted from the subsequent system power supply when the subsequent system power supply is connected. Diagnostic reception notification receiving means.

  The case where the response signal is not transmitted from the system power supply at the subsequent stage is either the case where the system power supply at the subsequent stage does not exist or a failure occurs even if it exists. The system power supply in the subsequent stage that has received the diagnostic signal transmitted via the communication cable transmits a diagnostic acceptance notification via the connection confirmation cable. It can be determined whether the system power supply in the subsequent stage has failed or does not exist, depending on whether or not the master machine receives this diagnosis reception notification.

  Therefore, the control unit of the master machine is provided with a certification unit for performing the above determination, and the master machine is provided with a display unit for displaying the certification result. When the control unit of the master machine detects that it does not receive a response signal from the system power supply at the subsequent stage, and the diagnosis signal transmitted from the diagnostic signal transmission means of the master machine is received by the system power supply at the subsequent stage to receive a diagnosis reception notification Is transmitted when the system power supply in the subsequent stage is out of order. When the master unit diagnosis reception notification unit receives the diagnosis reception notification, the master unit authentication unit determines that the system power supply in the subsequent stage exists but is defective. In addition, when the master unit's diagnosis reception notification receiving unit does not receive the diagnosis reception notification, the master unit authentication unit certifies that there is no subsequent system power supply. The display unit of the master machine displays the total number of system power supplies constituting the power supply system and displays the diagnosis result. In this way, the master machine can automatically check the connection state of the system power supply and diagnose whether or not a failure has occurred.

  Each system power supply has a connection confirmation connector for connection with a connection confirmation cable. The connector for confirming the connection of each system power supply is confirmed from the first connection pin for outputting a confirmation signal to the system power supply in the subsequent stage, the second connection pin for inputting a response signal from the system power supply in the subsequent stage, and the system power supply in the previous stage. A third connection pin for inputting a signal and a fourth connection pin for outputting a response signal to the preceding system power supply are provided. The connection confirmation connector having these connection pins is connected to another system power supply by a connection cable. Therefore, by visually recognizing this connection cable, the connection state of the system power supply can be easily confirmed, and a human error such as forgetting to connect can be prevented.

  Each system power supply connection confirmation connector includes a fifth connection pin for outputting or inputting an ID transmission notification. The fifth connection pin is commonly connected between the system power supplies. Therefore, when an ID transmission notification is output to the fifth connection pin of any system power supply, it can be input to any system power supply. As a result, the system power supply other than the system power supply that transmits the ID via the communication cable can be set to prohibit data transmission using the communication cable. As a result, it is possible to reliably transmit the ID from the preceding system power source to the succeeding system power source without interference.

  The system power supply according to the present embodiment includes a power supply for supplying power, a control means for controlling the power supplied by the power supply, a connection confirmation connector for confirming connection with other system power supplies, A communication connector for transmitting and receiving IDs is provided. In addition to controlling the power supply, the control means also performs control such as confirmation of connection with other system power supplies and transmission / reception of IDs.

  The control means includes a confirmation signal transmitting means for transmitting a connection confirmation confirmation signal to one system power supply, and a response signal receiving for receiving a response signal indicating that the confirmation signal has been received from the one system power supply. Means. This establishes a connection with another system power supply. Then, the control means is provided with an ID transmission means for transmitting an ID different from the own system power supply to the one system power supply via the communication connector when the response signal receiving means receives the response signal. I have. For example, if the ID of the own system power supply is 10, ID 11 is transmitted to the one system power supply. By establishing a connection with other system power supplies and providing an automatic ID assignment function for other system power supplies in this way, human errors such as forgetting to connect to other system power supplies and ID input mistakes can be avoided. Can be prevented.

  The connection confirmation connector includes a first connection pin for outputting a confirmation signal transmitted from the confirmation signal transmitting means to another system power supply, and a second connection pin for inputting a response signal received from the other system power supply. It has. These connection pins are connected to connection pins of other system power supplies via connection confirmation cables. Thereby, the connection with other system power supplies can be easily recognized, and human errors such as forgetting to connect can be prevented.

  The control circuit further includes a confirmation signal receiving means for receiving a connection confirmation confirmation signal from another system power supply and a response signal indicating that the confirmation signal has been received with respect to the other system power supply. Response signal transmitting means for transmitting is provided. In addition, after receiving a response signal to the other system power supply, an ID receiving unit is provided for receiving the ID of the system power supply from the other system power supply via the communication connector. Yes. In this way, by establishing a connection of another system power supply and providing an automatic ID reception function from the other system power supply, it is possible to prevent human errors such as forgetting to connect and ID assignment mistakes. it can.

  Further, the connection confirmation connector has a third connection pin for inputting a confirmation signal received from another system power supply and a response signal transmitted from the response signal transmission means for outputting to the other system power supply. A fourth connection pin is provided. These connection pins are connected to connection pins of another system power supply via a connection confirmation cable. As a result, the connection with the other system power supply can be easily recognized, and a human error such as forgetting the connection can be prevented.

  In addition, the system power connection confirmation connector includes a fifth connection pin for outputting or inputting an ID transmission notification indicating that an ID is being received via the communication connector. By outputting the ID transmission notification via the fifth connection pin, interference can be prevented when receiving the ID via the communication connector.

  Hereinafter, the present embodiment will be described in detail with reference to the drawings. In addition, the same code | symbol represents the same part or the same function.

  FIG. 1 is a block diagram showing a power supply system 1 according to the present embodiment, which is composed of three system power supplies. The system power source 2a includes a control unit 3a, a power source 4a for controlling the power supplied by the control unit 3a, a connector 16a for confirming connection with another system power source, and an output terminal 9a for supplying power to the outside. An output connector 17a, a communication connector 18a having a communication terminal 10a for inputting / outputting data such as an ID for identifying a system power supply, and a display means 5a for displaying the status of the system power supply. Yes.

  The connection confirmation connector 16a is connected to the first node 21a of the control means 3a, is connected to the first connection pin 11a for outputting a confirmation signal, and is connected to the second node 22a of the control means 3a for inputting a response signal. Connected to the second connection pin 12a and the third node 23a of the control means 3a, connected to the third connection pin 13a for inputting the confirmation signal and the fourth node 24a of the control means 3a, and output a response signal And a fifth connection pin 15a for inputting / outputting an ID transmission notification and a diagnosis reception notification. The potential of each connection pin and each node is pulled up by being connected to the power supply line 7a via the resistor 8a.

  The control means 3a includes a CPU that controls the overall operation of the system power supply 2a, a supply power control means that is controlled by the CPU, a confirmation signal transmission means, a response signal reception means, a confirmation signal reception means, and a response signal. Transmission means, ID transmission notification transmission means, ID transmission notification reception means, diagnosis reception notification transmission means, diagnosis reception notification reception means, ID transmission means, ID reception means, termination signal transmission means, termination signal A receiving unit, a diagnostic signal transmitting unit, a diagnostic signal receiving unit, an authorization unit, an ID storage unit, a display driving unit, and the like are provided. The supply power control means controls the power output from the output terminal 9a. The confirmation signal transmitting means sets the potential of the first node 21a to L level and transmits a confirmation signal to the system power supply at the subsequent stage. The response signal receiving means detects that the potential of the second node 22a has become L level, and receives a response signal from the subsequent system power supply. The confirmation signal receiving means detects that the potential of the third node 23a has become L level, and receives a confirmation signal from the system power supply in the previous stage. The response signal transmission means sets the potential of the fourth node 24a to the L level and transmits a response signal to the preceding system power supply.

  The ID transmission notification transmission means sets the potential of the sixth node 26a to H level for a predetermined period, electrically connects the source and drain of the transistor 6a, turns on the transistor 6a, and sets the potential of the fifth connection pin 15a to L level. And an ID transmission notification for notifying another system power supply that the ID is transmitted from the communication terminal 10a. The ID transmission notification receiving means detects that the potential of the fifth node 25a has become L level during a predetermined period, and receives the ID transmission notification. In response to the input of the diagnostic signal from the communication terminal 10a, the diagnostic acceptance notification transmitting means sets the potential of the sixth node 26a to H level, turns on the transistor 6a, and sets the potential of the fifth connection pin 15a to L level. A diagnosis receipt notification indicating that a diagnosis signal has been received is transmitted. The diagnostic reception notification receiving means detects that the potential of the fifth node 25a has become L level after outputting the diagnostic signal from the communication terminal 10a, and receives the diagnostic reception notification.

  The ID transmission means transmits the ID of the subsequent system power supply to another system power supply via the communication terminal 10a. The ID receiving means receives the ID of its own system power supply from another system power supply via the communication terminal 10a and stores it in the ID storage means. When the system power supply 2a functions as a master machine that controls other system power supplies, all IDs of other system power supplies are stored. The termination signal transmission means transmits the termination signal via the communication terminal 10a when the system power supply 2a is the system power supply of the previous stage and does not receive a response signal from the system power supply of the subsequent stage. The termination signal receiving means receives the termination signal via the communication terminal 10a when the system power supply 2a functions as a master machine. The diagnostic signal transmission means transmits a confirmation signal via the communication terminal 10a when the system power supply 2a functions as a master machine and the termination signal reception means receives the termination signal. The diagnostic signal receiving means receives a diagnostic signal from the master machine via the communication terminal 10a. In the case where the system power supply 2a is the master machine, the authorization means is that when the diagnosis reception notification receiving means does not receive the diagnosis reception notification, no further system power supply is connected, and when the diagnosis reception notification is received. Diagnose that additional system power is connected but failed. The ID storage means stores the ID of the own system power supply received by the ID receiving means from the preceding system power supply via the communication terminal 10a. When the system power source 2a is a master machine, the IDs of all system power sources constituting the power supply system 1 are stored in addition to the ID of the own system power source. The display means displays the total number of connected system power supplies constituting the power supply system 1 and the failed system power supply.

  The system power supply 2b and the system power supply 2c have the same configuration as the system power supply 2a. The output terminals 9a, 9b, and 9c for supplying power from the system power supplies 2a, 2b, and 2c are commonly connected to supply power to the sputtering apparatus and the like. The communication terminals 10a, 10b, and 10c of the system power supplies 2a, 2b, and 2c are commonly connected by a communication cable 19, and exchange IDs and the like between the system power supplies. The system power supply 2a and the system power supply 2b are connected by a connection confirmation cable 20a, and the system power supply 2b and the system power supply 2c are connected by a connection confirmation cable 20b. Specifically, the first connection pin 11a of the system power supply 2a is connected to the third connection pin 13b of the system power supply 2b and outputs a confirmation signal. The second connection pin 12a of the system power supply 2a is connected to the fourth connection pin 14b of the system power supply 2b and inputs a response signal. The fifth connection pin 15a of the system power supply 2a is connected to the fifth connection pin 15b of the system power supply 2b and the fifth connection pin 15c of the system power supply 2c to input / output ID transmission notification and diagnosis reception notification. That is, the fifth connection pins of the respective system power supplies are commonly connected via the connection confirmation cables 20a and 20b. The first connection pin 11b of the system power supply 2b is connected to the third connection pin 13c of the system power supply 2c and outputs a confirmation signal. The second connection pin 12b of the system power supply 2b is connected to the fourth connection pin 14c of the system power supply 2c and inputs a response signal.

  In the above embodiment, an example of three system power supplies has been described. However, in the case of a power supply system using a larger number of system power supplies, the cable connection is the same as described above. Each system power supply is connected in series with respect to the first to fourth connection pins. In this case, the first system power supply 2a is a master machine, the other system power supply 2b and the system power supply 2c are slave machines, and the master machine manages the entire power supply system 1. Specifically, the management of IDs assigned to the slave units, the number of slave units, confirmation processing for failure or unconnection of slave units, and the like are performed.

  FIG. 2 is a flowchart showing connection confirmation and ID assignment operation of the power supply system 1. The operation of the power supply system 1 will be described below using the flowchart of FIG. Here, the system power supply 2a is a master machine (hereinafter referred to as master machine M), the system power supply 2b and the system power supply 2c are slave machines (hereinafter referred to as slave machines Vn, n is an integer such as 1, 2, 3, etc.), and the system power supply Assume that 2b is a slave machine V1, the system power supply 2c is a slave machine V2, and the nth slave machine Vn.

  The confirmation signal transmission means of the control means 3a of the master machine M sets the potential of the first node 21a to L level and transmits a confirmation signal to the slave machine V1 (step S1). The confirmation signal is output from the first connection pin 11a and is input to the third connection pin of the slave unit V1 through the connection confirmation cable 20a. As a result, the third node 23b of the slave device V1 changes from H level to L level. The confirmation signal receiving means of the control means 3b of the slave machine V1 detects that the third node 23b has changed from H level to L level and receives the confirmation signal. The response signal transmission means of the control means 3b of the slave unit V1 changes the potential of the fourth node 24b from H level to L level and transmits a response signal indicating that the confirmation signal has been received. The response signal is output from the fourth connection pin 14b of the slave unit V1, and is input from the second connection pin 12a of the master unit M via the connection confirmation cable 20a, and the potential of the second node 22a is changed from H level to L level. To change. The response signal receiving means of the control means 3a of the master machine M detects that the second node 22a has changed from H level to L level (YES in step S2), and the ID transmitting means of the control means 3a connects the communication terminal 10a. 1 is transmitted to the communication cable 19 via the ID of the slave unit V1.

  At the same time, the ID transmission notification transmission means of the control means 3a changes the potential of the sixth node 26a from L level to H level to turn on the transistor 6a, and changes the potential of the fifth node 25a from H level to L level. An ID transmission notification indicating that the ID is being transmitted is transmitted. The ID transmission notification is output from the fifth connection pin 15a to another system power supply (step S3). While the ID transmission notification is being transmitted, the other system power supplies (in this case, the slave unit V1 and the slave unit V2) prohibit the output of signals to the communication cable 19. The ID receiving means of the control means 3b of the slave machine V1 receives 1 which is the ID of its own system power supply via the communication terminal 10b (step S4) and stores it in the ID storage means.

  When the response signal receiving means of the master machine M does not receive a response signal from the slave machine V1 (NO in step S2), the diagnostic signal transmitting means of the control means 3a transmits a diagnostic signal via the communication terminal 10a (step). S5). When the diagnosis reception notification receiving means of the control means 3a of the master machine M detects that the fifth node 25a maintains the H level (NO in step S6), the authorization means of the control means 3a is the slave machine V1. Is not connected and only the master machine M is authorized (step S8). The display means 5a displays the authorization result or the total number of system power supplies constituting the power supply system (in this case, one), and the control means 3a ends the process. On the other hand, when the diagnosis reception notification receiving means of the control means 3a detects that the fifth node 25a has changed from the H level to the L level (YES in step S6), the authorization means of the control means 3a is the slave machine V1. It is recognized that it is connected but has failed (step S7). The CPU 30a displays the result on the display means 5a via the display I / F 34a, and ends the process.

  Next, the confirmation signal transmitting means of the slave device V1 sets the potential of the first node 21b to L level and transmits a confirmation signal to the slave device V2 (step S9). The confirmation signal is output from the first connection pin 11b of the slave device V1 and input from the third connection pin 13c of the slave device V2, and the third node 23c of the slave device V2 changes from H level to L level. The confirmation signal receiving means of the control means 3c of the slave unit V2 detects that the third node 23c has changed from H level to L level and receives the confirmation signal. The response signal transmission means of the control means 3c of the slave unit V2 changes the potential of the fourth node 24c from H level to L level and transmits a response signal indicating that the confirmation signal has been received. The response signal receiving means of the control means 3b of the slave machine V1 detects that the potential of the second node 22b has changed from H level to L level (YES in step S10), and transmits the ID of the control means 3b of the slave machine V1. The means transmits the ID of the slave device V2 to the communication cable 19 via the communication terminal 10b, and transmits 2 (ID = ID + 1) obtained by adding 1 to the ID of the slave device V1 (step S11). At the same time, the ID transmission notification means of the control means 3b changes the potential of the sixth node 26b from L level to H level to turn on the transistor 6b, and changes the potential of the fifth node 25b from H level to L level. An ID transmission notification is transmitted to another system power supply via the five connection pins 15b (step S11).

  The ID receiving means of the control means 3c of the slave unit V2 receives 2 which is the ID of its own system power supply via the communication terminal 10c (step S12), and stores the ID in the ID storage means. The ID receiving means of the master machine M receives 2 which is the ID of the slave machine V2 via the communication terminal 10a, and stores the ID in the ID storage means. The ID transmission notification transmission means of the slave unit V1 that has finished transmitting the ID changes the potential of the sixth node 26b from the H level to the L level, turns off the transistor 6b, and turns the fifth node 25b and the fifth connection pin 15b to H. The ID transmission notification is canceled by changing from the level to the L level. After the slave device V2 receives the ID, 1 is added to n (step S13), and the same processing is repeated from step S9. That is, the confirmation signal transmission means of the control means 3c of the slave device V2 sets the potential of the first node 21c to L level and transmits a confirmation signal to the slave device V3 (step S9). When n slave units are connected, this is repeated n times.

  Next, when the confirmation signal transmitting means of the control means 3b of the slave machine V1 transmits the confirmation signal to the slave machine V2, the response signal receiving means of the control means 3b does not receive the response signal from the slave machine V2 (NO in step S10). ). The case where the slave device V1 does not receive a response signal from the slave device V2 is a case where the slave device V2 is not connected or is connected but has failed. When the response signal receiving means of the slave machine V1 does not receive a response signal from the slave machine V2 (NO in step S10), the termination signal transmitting means of the control means 3b of the slave machine V1 is sent to the master machine M via the communication terminal 10b. A termination signal is transmitted (step S14). When the termination signal receiving unit of the control unit 3a of the master machine M detects the termination signal via the communication terminal 10a, the diagnostic signal transmission unit of the control unit 3a transmits a diagnostic signal via the communication terminal 10a (step S15). . When the diagnosis reception notification receiving means of the control means 3a of the master machine M detects that the fifth node 25a is maintained at the H level (NO in step S16), the authorization means of the control means 3a is the slave machine V2. Is determined not to be connected (step S18), and the CPU 30a of the control means 3a configures the power supply system 1 that the slave unit V2 is not connected to the display means 5a via the display I / F 33a. The total number of system power supplies (two in this case) is displayed, and the process ends. When the diagnosis reception notification receiving means of the master machine M detects that the potential of the fifth node 25a has changed from H level to L level (YES in step S16), the authorization means of the control means 3a is connected to the slave machine V2. However, the CPU 30a displays that the slave unit V2 is faulty on the display means 5a, and the process ends.

  When the slave unit V2 is present, when the diagnostic signal receiving unit of the control unit 3c of the slave unit V2 receives the diagnostic signal from the communication terminal 10c, the diagnostic notification transmission unit of the control unit 3c transmits the potential of the sixth node 26c. Is changed from L level to H level, the transistor 6c is turned on, the potentials of the fifth node 25c and the fifth connection pin 15c are changed from H level to L level, and a diagnosis acceptance notification is transmitted. In step S16, the master machine M receives this diagnosis reception notification.

  In the above processing, when the slave unit V1 does not receive a response signal after transmitting a confirmation signal via the connection confirmation cable 20b, the slave unit V1 transmits a termination signal via the communication cable 19, and Machine M detects this termination signal. Instead of this processing, the master machine M may detect that the slave machine V1 has not received a response signal from the slave machine V2. For example, when a predetermined time has elapsed since the ID transmission notification receiving unit of the master machine M last received the ID transmission notification, the diagnostic signal transmission unit of the master machine M transmits a diagnostic signal from the communication terminal 10a. It may be.

  FIG. 3 is a block diagram showing the configuration of the control means 3a of the system power supply 2a. The same reference sign represents the same part or the same function. The control means 3a has basically the same configuration as the control means 3b and 3c of the other system power supplies 2b and 2c.

  In FIG. 3, the control means 3a temporarily stores a CPU 30a for controlling the operation of the control means 3a, a bus 38a including a control bus and a data bus, a ROM 36a for storing a program, and a program called from the ROM 36a. Then, a RAM 35a that is controlled by the CPU 30a to execute program processing, a supply power control means 31a that controls the power source 4a (see FIG. 1), and a communication I / F (interface) that transmits and receives data by RS485 and the like. 33a, a display I / F (interface) 34a for transmitting display data to the display means 5a, and transmission / reception of signals to / from the connection confirmation cable 20a from the first connection pin 11a to the fifth connection pin 15a. I / O 32a and ID storage means 37a for storing the ID.

  The ROM 36a stores a connection confirmation program for executing a system power supply connection confirmation process, a control program for controlling the supply power control means 31a, and various programs for executing the processes of other means. ing. These programs are temporarily called into the RAM 35a by the CPU 30a, and are executed based on the control of the CPU 30a. The ROM 36a executes a connection confirmation program for executing the connection confirmation process, a power control program for controlling the supply power control means, and an ID transmission process for transmitting and receiving data from the communication I / F 33a. ID transmission means comprising a program, ID reception means comprising a program for executing ID reception processing, termination signal transmission means comprising a program for transmitting termination signals, and termination signal reception comprising a program for receiving termination signals And a diagnosis signal transmitting means comprising a program for transmitting a diagnostic signal, a diagnostic signal receiving means comprising a program for receiving a diagnostic signal, and determining whether the system power supply is connected or malfunctioned depending on whether or not a diagnostic reception signal is received. And accreditation means consisting of programs.

  The I / O 32a is controlled by the CPU 30a and includes transmission / reception means for transmitting / receiving data from the first connection pin 11a to the fifth connection pin 15a. The transmission means is composed of, for example, an open drain output transistor, and inputs a logic signal to its gate to perform on / off control between the drain and source. The receiving means is composed of, for example, an input transistor for signal reception, and detects the potential level of the corresponding node and converts it into a logic signal.

  For each transmission / reception means in the I / O 32a, specifically, confirmation signal transmission for transmitting a confirmation signal by setting the potential of the first node 21a to L level based on a control signal from the CPU 30a via the bus 38a. Means, a response signal receiving means for detecting that the potential of the second node 22a is set to L level and notifying the CPU 30a that the response signal has been received via the bus 38a, and the potential of the third node 23a Based on a confirmation signal receiving means for detecting that the confirmation signal has been received via the bus 38a and notifying that the confirmation signal has been received via the bus 38a and a control signal from the CPU 30a via the bus 38a, the fourth node Response signal transmitting means for transmitting a response signal by setting the potential of 24a to L level, and that the potential of the fifth node 25a has been set to L level for a predetermined period An ID transmission notification receiving means for detecting that the CPU 30a has received the ID transmission notification via the bus 38a, and detecting that the potential of the fifth node 25a is set to the L level during a predetermined period; Based on the control signal from the CPU 30a via the bus 38a after the diagnosis signal reception means for notifying the CPU 30a that the diagnosis reception notification has been received via the bus 38a and the response signal receiving means receiving the response signal. An ID transmission notification transmitting means for setting the potential of the node 26a to H level, turning on the transistor 6a, setting the potential of the fifth node 25a to L level and transmitting an ID transmission notification; , The potential of the sixth node 26a is set to H level based on the control signal from the CPU 30a via the bus 38a, and the transistor 6a It turns, and a diagnostic receiving notification transmission means for the potential of the fifth node 25a transmits a diagnosis received notification is set to L level.

  In the above embodiment, the ID transmission notification receiving unit and the diagnosis reception notification receiving unit are commonly connected to the fifth node 25a, the ID transmission notification is received by the ID transmission notification reception unit, and the diagnosis reception notification is received by the diagnosis reception notification. The means are configured to receive separately from each other. Instead of this configuration, the ID transmission notification and the diagnosis reception notification are received by the same receiving means, for example, a single input transistor, and the ID transmission notification and the diagnosis reception notification are executed when the processing program controlled by the CPU 30a is executed. You may make it identify. In this case, the processing program for processing the ID transmission notification is the ID transmission notification receiving means, and the processing program for processing the diagnosis reception notification is the diagnostic reception notification receiving means. Similarly, the ID transmission notification transmission unit and the diagnosis reception notification transmission unit commonly connected to the sixth node 26a are the same transmission unit, for example, a single output transistor, and ID transmission is performed when a processing program controlled by the CPU 30a is executed. The notification and the diagnosis reception notification may be identified and transmitted. In this case, the processing program for processing the ID transmission notification is the ID transmission notification transmission means, and the processing program for processing the diagnosis reception notification is the diagnosis reception notification transmission means.

  The supply power control means is controlled by the CPU 30a via the bus 38a, and controls the supply power of the power source 4a via the power control node 40a. When the system power supply 2a is the master machine M, it also controls the outputs supplied by the other system power supplies 2b and 2c. The display I / F 34a is an interface for causing the display means 5a to display display data received via the bus 38a. Information such as the total number of system power supplies constituting the power supply system 1 and failures is displayed. The ID storage unit 37a stores the ID of its own system power supply and the ID of the slave machine when functioning as a master machine.

  In the control means 3a in the above-described embodiment, the CPU 30a reads each program stored in the ROM 36a via the bus 38a to the RAM 35a, executes processing of the transmission / reception means composed of each program, and via the communication I / F 33a. Each signal is transmitted / received, and the CPU 30a controls the I / O 32a via the bus 38a to set the potential level from the first node 21a to the sixth node 26a by each transmitting / receiving means in the I / O 32a. Although each signal is transmitted and received by detection, the present invention is not limited to this. The point is that each transmission means and each reception means for setting the potential level and detecting the potential level of the first node 21a to the sixth node 26a are provided, and the transmission means for transmitting and receiving each signal to the communication terminal 10a. And a receiving unit that can execute each process of the flowchart shown in FIG.

  In the above embodiment, the potential of the first node 21a to the sixth node 26a is pulled up to the H level by the power supply line 7a. However, the present invention is not limited to this. Instead of connecting one terminal of the resistor 8a to the power supply line 7a, it is connected to GND (ground) to pull down the potential of each node to L level, and the transmitting / receiving means of the control means 3a sets the potential of the corresponding node to H level. The signal may be set to be transmitted or the signal may be received upon detection of the H level. Alternatively, a logic signal based on a combination of levels may be used as a confirmation signal or a response signal.

It is a block diagram showing the electric power supply system which concerns on embodiment of this invention. It is a flowchart figure showing operation | movement of the electric power supply system which concerns on embodiment of this invention. It is a block diagram showing the control means of the system power supply which concerns on embodiment of this invention. It is a block diagram showing the conventionally well-known electric power supply system.

Explanation of symbols

1 Power supply system 2a, 2b, 2c System power supply 3a, 3b, 3c Control means 4a, 4b, 4c Power supply 5a, 5b, 5c Display means 6a, 6b, 6c Transistor 7a, 7b, 7c Power supply line 8a, 8b, 8c Resistance 9a, 9b, 9c Output terminals 10a, 10b, 10c Communication terminals 11a, 11b, 11c First connection pins 12a, 12b, 12c Second connection pins 13a, 13b, 13c Third connection pins 14a, 14b, 14c Fourth connection pins 15a, 15b, 15c 5th connection pin 21a, 21b, 21c 1st node 22a, 22b, 22c 2nd node 23a, 23b, 23c 3rd node 24a, 24b, 24c 4th node 25a, 25b, 25c 5th node 26a , 26b, 26c 6th node

Claims (11)

A plurality of system power supplies having a power supply for supplying power and a control means for controlling the supplied power are provided, and each system power supply is commonly connected to an output terminal for supplying the power to identify the system power supply A power supply system for commonly connecting communication terminals for inputting / outputting IDs for communication using a communication cable,
The plurality of system power supplies are connected in series via a connection confirmation cable,
Of the system power supplies connected in series, the control means for the system power supply at the previous stage transmits a confirmation signal for confirming the connection to the system power supply at the subsequent stage via the connection confirmation cable. Have
The latter-stage system power supply control means has response signal transmission means for sending a response signal indicating that the confirmation signal has been received via the connection confirmation cable to the preceding-stage system power supply,
The control unit for the system power supply at the preceding stage has an ID transmission means for transmitting the ID of the system power supply at the subsequent stage via the communication cable when the response signal is received from the system power supply at the subsequent stage. A featured power supply system.   The control unit for the system power supply at the preceding stage receives an ID transmission notification indicating that an ID is being transmitted to the system power supply at the subsequent stage when the response signal is received from the system power supply at the subsequent stage. The power supply system according to claim 1, further comprising ID transmission notification transmission means for transmitting via a confirmation cable. The first system power supply of the system power supply connected in series via the connection confirmation cable is a master machine,
The control means of the master machine is
Storage means for storing an ID of a subsequent system power source transmitted from the preceding system power source via the communication cable;
Diagnostic signal transmission means for detecting that the preceding system power supply has not received the response signal from the subsequent system power supply and transmitting a diagnostic signal via the communication cable;
The diagnostic reception notification receiving means for receiving a diagnostic reception notification transmitted from the subsequent system power supply that has received the diagnostic signal via the connection confirmation cable. 2. The power supply system according to 2. The control unit of the master unit is a case where the control unit detects that the response signal has not been received from the system power supply at the subsequent stage, and the diagnosis reception notification reception unit of the master unit receives the diagnosis reception. When it is detected that the notification is received, it is certified that the latter system is out of order, and when it is not detected that the diagnosis reception notification is received, it is certified that the latter system power supply is not connected. With certification means,
The power supply system according to claim 3, wherein the master device includes display means for displaying a result of the authorization by the authorization means and / or a total number of system power supplies. The system power supply has a connection confirmation connector to be connected to the connection confirmation cable,
The connection confirmation connector includes a first connection pin for outputting the confirmation signal, a second connection pin for inputting the response signal, a third connection pin for inputting the confirmation signal, and a fourth connection pin for outputting the response signal. The power supply system according to any one of claims 1 to 4, wherein   The power supply system according to claim 1, wherein the connection confirmation connector has a fifth connection pin that outputs or inputs the ID transmission notification. A power supply for supplying power, a control means for controlling the supplied power, a connection confirmation connector for confirming connection with another system power supply, and a communication connector for transmitting and receiving IDs System power supply,
The control means includes
Confirmation signal transmitting means for transmitting a connection confirmation confirmation signal to one system power supply via the connection confirmation connector;
A response signal receiving means for receiving a response signal indicating that the confirmation signal has been received from the one system power supply via the connection confirmation connector;
System power supply comprising: ID transmission means for transmitting the ID of the one system power supply via the communication connector when the response signal receiving means receives the response signal. .   The system power supply according to claim 7, wherein the connection confirmation connector includes a first connection pin that outputs the confirmation signal and a second connection pin that inputs the response signal. The control means includes
Confirmation signal receiving means for receiving a connection confirmation confirmation signal from another system power supply via the connection confirmation connector;
Response signal transmitting means for transmitting a response signal indicating that the confirmation signal has been received to the other system power supply via the connection confirmation connector;
An ID receiving means for receiving an ID of its own system power supply from the other system power supply via the communication connector after the response signal transmitting means transmits the response signal; The system power supply according to claim 7 or 8.   The system power supply according to claim 9, wherein the connection confirmation connector includes a third connection pin for inputting the confirmation signal and a fourth connection pin for outputting the response signal.   The said connection confirmation connector is provided with the 5th connection pin which outputs or inputs the ID transmission notification showing that the said connector for communication is transmitting said ID, The any one of Claims 7-10 characterized by the above-mentioned. The system power supply according to claim 1.

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