JP2007257839A - Tension applying device and metal tape installation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tension applying device capable of adjusting the tension of a metal tape while confirming the warping of a frame when installing the metal tape by applying tension to the metal tape so as to correct warping caused to the frame of a window frame shape. <P>SOLUTION: One end of the metal tape 17 attached to the frame 13 is fixed to the frame 13, and the other end is held by a tape holding member 44 movably attached to the tension applying jig 41, and a tension applying screw provided at the tape holding member is screwed, and its tip is contacted to the frame's side face, thereby a reaction force is given to the frame, and tension is added to the metal tape 17. In a state that the tension of the metal tape acts on the frame, the adjustment of the tension can be performed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a technique for attaching a metal tape to a window frame-shaped frame by applying a tension in a mask unit manufacturing process suitable for use as a deposition mask in a deposition process in manufacturing an organic EL element, for example.

  Conventionally, vacuum vapor deposition is performed in the manufacture of organic EL elements, and a metal mask having a mask portion having a large number of elongated fine openings that allow vapor deposition is used as the vapor deposition mask. In vapor deposition, the metal mask is attached to a frame having a large window frame shape having an opening larger than the mask portion by a magnet or the like. However, in recent years, when the patterning has been miniaturized and the openings formed in the mask portion have become finer and the thickness of the metal mask itself has also become thinner, the metal mask is simply put on a window frame-shaped frame, etc. The problem that the accuracy of the opening cannot be maintained due to distortion and sagging in the mask portion occurs only by fixing using the.

  Therefore, as a result of examination by the present applicant to solve this problem, as shown in FIG. 11, even with a multi-faced metal mask 1 having a structure in which a plurality of mask portions 2 are formed by using an extremely thin metal plate, Each of the four sides of the metal mask 1 is gripped by a plurality of clamps, a tension is applied to the metal mask 1 as indicated by an arrow by each clamp, and the tension is adjusted for each clamp, thereby providing a metal mask. 1 can be in a flat state without distortion or sagging, and the openings of each mask portion 2 can be held at a constant pitch, and in that state, attached to a window frame-shaped frame 3 having openings 4 by spot welding or the like, By removing unnecessary portions at the periphery, a mask unit 8 having a structure in which the metal mask 1 is held in a flat state by applying tension as shown in FIG. It found that can form, we developed a method and apparatus for securing to the frame of the window frame shape in a state without a metal mask distortion and sagging (see JP 2004-311335).

However, it has been found that the mask unit 8 formed in this way has further improvements. That is, since the mask unit 8 is attached with the metal mask 1 in a state where tension is applied to one side of the frame 3, as shown in an exaggerated manner in FIG. 13, warpage occurs so that the metal mask 1 side becomes a concave surface. When such a warped mask unit 8 is used as a vapor deposition mask, the adhesion between the vapor deposition substrate such as a glass substrate and the metal mask is deteriorated, and the pattern position accuracy of vapor deposition is lowered. For this reason, it is necessary to suppress the warpage (dimension e in FIG. 13) to an appropriate allowable value (for example, about 0.1 mm in the mask unit 8 of 500 mm long × 500 mm wide). In order to suppress the warp generated in the mask unit 8, it is sufficient to increase the rigidity by increasing the thickness of the frame. However, this increases the weight and makes it difficult to handle, and also increases the cost.
JP 2004-31335 A

  Therefore, the inventors of the present invention have developed a mask unit having a structure in which a metal mask in a state where a tension is applied to a window frame-shaped frame is fixed, without increasing the thickness of the frame and increasing the rigidity. As a result of various studies on the structure that can suppress the warpage and increase the flatness, it is possible to correct the warp due to the tension of the metal mask by attaching a metal tape with tension in the longitudinal direction on the back side of the metal mask. It was found that a mask unit with high flatness can be formed.

  However, the amount of warpage generated in the mask unit due to the tension of the metal mask is not necessarily constant, and there is a variation between the mask units. Therefore, the tension applied to the metal tape is not necessarily constant, and each mask unit is not always constant. However, the amount of warpage correction due to the tension applied to the metal tape can only be confirmed after the metal tape is attached to the frame. The problem was that it was difficult to find.

  The present invention has been made in view of such circumstances, and when attaching a metal tape to a window frame-shaped frame with a tension applied, the metal tape is applied with a tension and the frame is warped by the tension of the metal tape. It is an object of the present invention to provide a tension applying device capable of performing tension adjustment while checking the situation, and a metal tape attaching device using the tension applying device.

  The invention according to claim 1 to solve the above-mentioned problems is a tension applying device for applying tension to a metal tape attached to a window frame-shaped frame, and a frame base for horizontally supporting the frame. And guide means arranged in a region facing one side of the frame supported so as to be in a predetermined position on the frame mounting table, and a moving table held by the guide means so as to be movable parallel to one side of the frame; A tension applying jig held on the moving table, the tension adding jig being held on the supporting table and horizontally movable on the supporting table and perpendicular to one side of the frame. A gripping member capable of gripping a metal tape such that a longitudinal direction thereof is parallel to a moving direction of the tape gripping member, and the tape gripping member A tensioning screw attached to the tape, and the tensioning screw is parallel to the longitudinal direction of the metal tape at a position close to the metal tape gripped by the tape gripping member, and the tip is on the side of the frame. It is the tension applying device characterized by being attached in a form that can be abutted.

  According to a second aspect of the present invention, in the first aspect of the present invention, the tension applying jig is configured to be held in a form in which the position in the vertical direction can be adjusted with respect to the moving table. .

  According to a third aspect of the present invention, in the above-mentioned first or second aspect of the present invention, the guide means is configured to hold two sets of moving platforms and a tension applying jig in a movable manner.

  According to a fourth aspect of the present invention, there is provided the tension applying device according to any one of the first to third aspects, and a spot for fixing a metal tape by spot welding at a predetermined position of the frame supported by the frame mounting table. It is a metal tape attachment apparatus characterized by having a welding apparatus.

  According to the tension applying device of the present invention, the frame to which the metal tape is to be attached is supported at a predetermined position on the frame base, the metal tape is set at a predetermined position on the frame, and the tension applying jig of the metal tape is set. With the end opposite to the side fixed to the frame, hold the end of the metal tape with the tensioning jig and screw in the tensioning screw. Tension can be applied to the metal tape in the form of abutting against the side and reaction force on the frame, so that the tension of the metal tape acts on the frame in the same way as when the metal tape is fixed to the frame In this state, the amount of warpage of the frame is measured, and, for example, a high-accuracy tolerance is set so that the amount of warpage is within a desired range. As a 囲内, by adjusting the screwing amount of tensioning screw can be adjusted the tension to be added to the metal tape. Thus, the tension can be adjusted by a simple operation so that the amount of warping after the metal tape is fixed to the frame is within a desired range, and the metal tape can be attached to the frame with the tension adjusted. By fixing to, high-precision flatness of the frame can be achieved. Further, since the tension applying jig can be adjusted in position along one side of the frame by the guide means and the moving table, it can easily cope with frames of different sizes. Furthermore, when applying tension to a metal tape, the tip of the tension application screw only abuts against the side of the frame and the reaction force is applied to the frame. There is also an effect that it is not necessary to perform the processing.

  Here, if the above-described tension applying jig is held in a form in which the position in the vertical direction can be adjusted with respect to the moving base, it is possible to easily cope with frames having different thicknesses.

  In addition, if the above-described guide means holds two sets of moving bases and a tension applying jig so as to be movable, it is possible to simultaneously apply tension and adjust metal tapes attached to both sides of the frame. And the flatness of the frame after the metal tape is attached can be made more accurate.

  The metal tape attaching device of the present invention has a configuration in which tension is applied to and adjusted on the metal tape using the above-described tension applying device, and then the metal tape is spot welded to the frame. Can be attached to the frame by adjusting the tension of the metal tape so that it is within a desired range, for example, within an allowable range with high precision, and high-precision flatness of the frame can be achieved by a simple operation.

  Hereinafter, preferred embodiments of the present invention will be described by taking as an example the production of a mask unit used as a multi-sided deposition mask in the production of organic EL elements. FIG. 1A is a schematic perspective view of an example of a mask unit manufactured using a tension applying device according to an embodiment of the present invention, as viewed from the front side, and FIG. FIG. 2 is a schematic perspective view showing components constituting the mask unit in a state before assembly. 1 and 2, a mask unit generally indicated by reference numeral 10 includes a frame 13 having a window frame shape, a metal mask 11 attached by a spot welded portion 30 with a tension applied to the surface thereof, and a frame. 13 are provided with metal tapes 17 and 18 attached by spot welds 56 with tension applied to the back surface of 13.

  The metal mask 11 is made of a thin metal plate, and is formed by arranging a plurality of mask portions 12 side by side. Each mask portion 12 includes a large number of minute openings formed by etching or the like. The opening in each mask part 12 is for allowing the passage of vapor at the time of vapor deposition, and the shape and arrangement of the opening are arbitrary, for example, those in which elongated slit-like openings are arranged in parallel, The slot-shaped openings are arranged in the vertical direction and in parallel. The metal mask 11 before being attached to the frame 13 is made larger in size in both vertical and horizontal directions than the frame 13, and an easy cutting line 15 that can be easily cut by bending at a position substantially corresponding to the outer peripheral edge of the frame 13. Is formed by half etching or the like. The easy cutting line 15 has a strength that can withstand the tension applied to the metal mask 11. The thickness of the metal mask 11, the dimensions of the mask portion 12, the dimensions of a large number of minute openings formed thereon are not particularly limited, but the thickness of the metal mask 11 is typically 30 to 200 μm. The dimensions of the mask portion 12 are 50 to 70 mm in length, 30 to 50 mm in width, 40 to 100 μm in width of the opening, 80 to 200 μm in width of the non-porous portion between the openings arranged in parallel, etc. it can.

  The frame 13 has a window frame shape including an opening 14 having a size including a region where a large number of mask portions 12 of the metal mask 11 are formed. The frame 13 does not bend or sag due to the tension of the metal mask 11 even after the tensioned metal mask 11 is attached. The metal mask 11 is rigid enough to hold the metal mask 11 in a flat state even when it is attached to a metal plate or during a vapor deposition operation. When the metal mask 11 to which tension is applied is attached (before attaching the metal tape), there is some warping (for example, warping of about 0.2 to 0.5 mm in the frame 13 of 500 mm long × 500 mm wide). Even if it occurs, it can be corrected by attaching the metal tapes 17 and 18 later, so that it is not necessary to have such a high rigidity that it does not cause such a small warp. The thickness of the frame 13 can be about 2 mm to 30 mm, and the width (the distance between the inner peripheral surface of the opening 14 and the outer peripheral surface of the frame) can be about 5 mm to 50 mm. On the back surface of the frame 13, a groove-shaped digging 20 is put in an area where the metal tapes 17 and 18 are attached.

  The metal tapes 17 and 18 are for restraining the warp of the mask unit 10 within an allowable range by being attached to the frame 13 with a longitudinal tension applied thereto. The width and thickness of the metal tapes 17 and 18 are selected so that a necessary amount of tension can be applied in the elastic region. For example, the width is 5 to 50 mm and the thickness is 50 to 200 μm. Selected to the extent. The length of the metal tapes 17 and 18 before being attached to the frame 13 is made longer than that of the frame 13. Also on the metal tapes 17 and 18, easy-cut lines 19 that can be easily cut by bending are formed by half etching or the like at positions substantially corresponding to the outer peripheral edge of the frame 13.

  Next, a tension applying device used when attaching the metal tapes 17 and 18 to the frame 13 and a metal tape attaching device including the tension applying device will be described. 3 and 4 are schematic perspective views showing the tape attachment device according to the embodiment of the present invention in different operating states, and FIG. 5 is the main tension applying device provided in the tape attachment device shown in FIGS. FIG. 6 is a schematic perspective view of a part of the region shown in FIG. 5, and FIG. 7 is a schematic cross-sectional view taken along line AA in FIG. A tape attachment device generally indicated by reference numeral 31 includes a support plate having a high-precision flatness support surface, for example, a stone surface plate 32, a tension applying device 33 held on the stone surface plate 32, and spot welding. A device 34 is included.

  The tension applying device 33 includes a frame mount 35 that horizontally supports the frame 13, guide means 36 disposed in a region facing one side of the frame 13 that is supported by the frame mount 35 so as to be in a predetermined position, and the guide The means 36 includes a moving table 37 held so as to be movable parallel to one side of the frame 13 and a tension applying jig 41 held on the moving table 37 via a lifting guide mechanism 38. Yes. The structures of the guide means 36 and the movable table 37 are arbitrary as long as the movable table 37 can be moved linearly along the guide means 36 and can be fixed at a desired position. Examples include those used, guide rails, and linear motion guides. The structure of the lifting guide mechanism 38 is arbitrary as long as the tension applying jig 41 can be moved up and down with respect to the movable table 37 and can be fixed at a desired position.

  The tension applying jig 41 is horizontally supported by the support table 42 and the support table 42 through the linear motion guide 43 and perpendicular to one side of the frame 13 (perpendicular to the moving direction of the moving table 37 by the guide means 36). A tape gripping member 44 movably held in a direction), and capable of gripping the metal tape 17 such that the longitudinal direction thereof is parallel to the moving direction of the tape gripping member 44, and the tape gripping A tape addition screw 46 attached to the member 44 is provided. The tape gripping member 44 includes a tape gripping main body 48 and a tape presser 49. The metal tape 17 is mounted on the upper surface of the tape gripping main body 48 so that the longitudinal direction thereof is parallel to the moving direction of the tape gripping member 44. A possible groove 48a is formed. The groove 48 a is formed so as to be located on the extension of the digging 20 of the frame 13 in a state where the tension applying jig 41 is disposed at a predetermined position with respect to the frame 13, and the metal set in the digging 20 The tape 17 can be received in the groove 48a without bending. The tape retainer 49 is for fixing the tape holding body 48 with the bolt 50 so that the metal tape 17 set in the groove 48 a is pressed against and held by the tape holding body 48. In order to ensure that the metal tape 17 can be gripped by the tape gripping body 48 and the tape retainer 49, a caulking ridge 49 a is formed on the lower surface of the tape retainer 49. The protrusion 49a may be provided on the tape gripping main body 48 side.

  The tension applying screw 46 is protruded from the tape gripping member 44 at a position close to the metal tape 17 gripped by the tape gripping member 44 and parallel to the longitudinal direction of the metal tape, and abuts against the side surface of the frame 13. It is attached in a possible form. With this structure, the tension applying screw 46 is screwed in, the tip is abutted against the frame 13, and further screwed in, so that a reaction force is taken near the metal tape mounting position of the frame 13 and the metal tape 17 is tensioned. Can be added. Here, the attachment position of the tension applying screw 46 to the tape gripping member 44 may be on the side of the metal tape 17 as long as it is close to the metal tape 17 gripped by the tape gripping member 44. In this form, it is just below the center of the metal tape 17. With this position, tension can be stably applied to the entire width of the metal tape 17.

  3 and 4, the spot welding device 34 is for welding and fixing a desired position of the metal tape 17 to the frame 13, and in this embodiment, a resistance welding type is used. The spot welding device 34 is not limited to the resistance welding method, but may be another method, for example, a laser method. The spot welding device 34 is provided so as to be movable by the guide device 53, and has a configuration capable of spot welding a desired position of the metal tape 17 set at a predetermined position on the frame 13. Although the spot welding device 34 is drawn only on the front side of the frame 13 in the drawing, a spot welding device (not shown) is also provided on the back side of the frame 13, and the metal tape 17 on the back side is attached to the frame 13. It can be welded and fixed. Instead of providing the spot welding device 34 on both sides with the frame 13 in between, a single spot welding device is held by an XY moving mechanism capable of moving in a two-dimensional direction in a horizontal plane, and the spot It is good also as a structure which moves a welding apparatus to the desired position of a XY direction, and performs spot welding.

  Next, a method for attaching the metal tape to the frame 13 by using the metal tape attachment device 31 having the above configuration and a method for manufacturing the mask unit 10 using the metal tape attachment device 31 will be described. A metal mask 11, a frame 13, and metal tapes 17 and 18 shown in FIG. 2 are prepared in advance. First, as shown in FIGS. 8 and 9, in a mask attaching apparatus for attaching a metal mask 11 to a frame 13 with tension applied, the frame 13 is set at a predetermined position, and the metal mask 11 is placed thereon. Each of the four sides of the metal mask 11 is gripped by a plurality of clamps 23, and driving means 24 such as an air cylinder connected to each clamp 23 is operated so that each clamp 23 is vertically and horizontally indicated by arrows. Pull in the direction to apply tension to the metal mask 11.

  Here, the plurality of clamps 23 provided on each of the four sides of the metal mask 11 are arranged in accordance with the rows of the mask portions 12 and the regions without the mask portions, and accordingly, the mask portions 12 of the metal mask 11. It is possible to apply tension by pulling the region where the mask is formed and the region where the mask portion is not provided with the separate clamps 23, whereby the regions having different rigidity of the metal mask 11 are tensioned with the separate clamps 23. Can be added. Then, in a state where each side of the metal mask 11 is gripped and pulled by a plurality of clamps 23, the surface state of the metal mask 11 is visually inspected, and if there is distortion or sagging, the region is added to the clamp 23 that is pulling. The tensile force is adjusted so that the metal mask 11 is in a flat state without distortion or sagging and the opening of the mask part 12 is aligned in parallel. Further, the position of each mask portion 12 formed on the metal mask 11 is inspected, and the tensile force of each clamp 23 is adjusted so that each mask portion enters a position within a predetermined dimensional accuracy. As described above, the metal mask 11 can be brought into a state where there is no distortion or sagging and each mask portion 12 is located within a predetermined dimensional accuracy range. Thereafter, in this state, the peripheral portion of the metal mask 11 is spot welded to the frame 13 using a laser beam (see the spot welded portion 30) and fixed. Thereafter, the clamp 23 is removed, and unnecessary portions on the periphery of the metal mask 11 are removed using the easy cutting lines 15.

  Next, as shown in FIG. 3 and FIG. 10A, the frame 13 to which the metal mask 11 is attached is placed on the frame mounting table 35 with the metal mask 11 side down and one side parallel to the guide means 36. Position and support so that Next, the warp generated in the frame 13 is measured by a dial gauge 55 held by appropriate support means (not shown) such as a support stand. Next, the metal tape 17 is set in the digging 20 extending in the direction perpendicular to the guide means 36 in the groove-shaped digging 20 formed in the frame 13, and opposite to the tension applying jig 41. The vicinity of the end on the side is fixed by spot welding (see reference numeral 56) to the frame 13 by the spot welding device 34, and unnecessary parts on the fixed side are cut and removed using the easy cutting line 19 (see FIG. 2). To do.

  Next, the moving table 37 is moved along the guide means 36, and the groove 48a (see FIG. 5) of the tension applying jig 41 that is held overlaps the metal tape 17 set on the frame 13. After positioning, the movable table 37 is fixed at that position, and then the height of the tension applying jig 41 is adjusted using the lifting guide mechanism 38 so that the groove 48a is at the same height as the digging 20 of the frame 13. And fix at that position. Next, the end of the metal tape 17 is gripped by the tape gripping member 44. This operation is performed for the tension applying jigs 41 on both sides. Thereafter, a tension applying screw 46 (see FIG. 6) is screwed in, the tip thereof is pressed against the side surface of the frame 13, and further screwed in, so that a reaction force is applied to the frame 13 and a tension is applied to the metal tape 17. In this state, the warpage amount of the frame 13 is measured with a dial gauge 55 as shown in FIGS. Then, the screwing of the tension application screw 46 is adjusted so that the warpage amount obtained by the measurement is within a desired allowable range (for example, warpage of 0.1 mm or less in the frame 13 of 500 mm long × 500 mm wide). The tension applied to the metal tape 17 is adjusted. Thereafter, as shown in FIG. 10 (c), when the amount of warping of the frame 13 falls within a desired allowable range and the flatness required for the frame 13 is ensured, as shown in FIG. The vicinity of the end of each is spot welded to the frame 13 using a laser welding device 34 and fixed. Thereafter, the metal tape 17 is removed from the tape adding jig 41, and unnecessary portions at the ends are cut and removed using the easy cutting lines 19.

  Here, when the tension was applied to the metal tape 17 using the tension applying jig 41, the tension was applied by taking a reaction force in the vicinity of the attachment position of the metal tape 17 to the frame 13, so the metal tape 17 was attached to the frame. 13 is fixed by spot welding and the tension applying jig 41 is removed, the tension applied to the frame 13 by the metal tape 17 hardly changes. Therefore, the frame 13 is adjusted first. The flatness is kept. Thus, the tension applying screw 46 is simply adjusted so that the frame 13 has a desired flatness, and the metal tape 17 is fixed to the frame 13 in this state, thereby correcting the warp generated in the frame 13 and the desired flatness. Can be degrees.

  The above operation is also performed on the groove-shaped digging 20 formed in the lateral direction on the back surface of the frame 13, and the metal tape 18 is attached to the digging 20. Thereby, it is possible to correct the warpage in the lateral direction to obtain a desired flatness. Thus, the mask unit 10 shown in FIG. 1 is manufactured.

  In the mask unit 10 manufactured as described above, the metal mask 11 is kept in a state in which there is no distortion or sagging, and the openings of the mask part 12 are accurately aligned in parallel. The position is also maintained within a predetermined dimensional accuracy. Further, the warp of the mask unit 10 is also kept within a minute allowable range. Thereafter, a predetermined vapor deposition operation is performed using the mask unit 10. That is, a substrate to be deposited such as a glass substrate is attached to the mask unit, set in a deposition machine, and the organic layer of the organic EL element or the cathode electrode is deposited. Thereby, vapor deposition of a fine pattern can be performed with high positional accuracy, and a high-quality organic layer or cathode electrode can be formed.

  Although the preferred embodiment of the present invention has been described above, the present invention is not limited to this, and can be appropriately changed within the scope of the claims. For example, in the above-described embodiment, the metal tapes 17 and 18 are attached to the frame 13 after the metal mask 11 is fixed, and the warp generated in the frame 13 due to the attachment of the metal mask 11 is corrected. The metal tape attachment device of the present invention can also be used when attaching a metal tape to a frame before attaching a metal mask. In this case, the metal tape may be attached by adjusting the tension of the metal tape so that a desired warp in the opposite direction is generated in the frame 13 in anticipation of the warp that occurs when the metal mask 11 is attached in a later process. Further, the fixing position of the metal tapes 17 and 18 is not limited to both ends, and fixing at an appropriate intermediate position may be used in combination.

  Further, in the above-described embodiment, when the metal mask 11 is fixed to the frame 13, a plurality of four sides of the metal mask 11 are provided corresponding to the region corresponding to the mask portion 12 and the region not having the mask portion, respectively. However, the means for applying tension to the metal mask 11 is not limited to this configuration, and the metal mask 11 is pulled in a flat state without distortion or deflection, and the mask portion If the openings can be aligned in parallel, it can be changed as appropriate. For example, changes such as changing the number of clamps provided on each side of the metal mask 11 and the width of the clamps may be added.

  Further, in the above embodiment, the metal mask 11 is flattened by applying tension in both the vertical and horizontal directions. However, depending on the metal mask, the metal mask can be distorted by applying tension only in the vertical direction or only in the horizontal direction. In some cases, it can be arranged in a state without sagging. In that case, it is not necessary to provide the metal tape on the four sides of the frame, and the metal tape may be attached only to the side parallel to the direction of the tension applied to the metal mask. Further, in the case where the frame 13 is a rectangle that is long in the vertical direction and the warp does not occur much in the horizontal direction, a metal tape may be attached only in the vertical direction. Furthermore, in the above-described embodiment, the metal tapes 17 and 18 are attached so that the entire surface thereof overlaps with the frame portion surrounding the opening 14 of the frame 13, but the attachment position of the metal tape is not limited to this, and the frame A metal tape may be attached so as to cross the opening 14 within a range that does not interfere with the mask portion 12 of the metal mask 11 fixed to 13.

(A) is the schematic perspective view which looked at one example of the mask unit manufactured using the tension applying apparatus which concerns on embodiment of this invention from the surface side, (b) is the outline which looked at the mask unit from the back side Perspective view The schematic perspective view which shows the components which comprise the mask unit shown in FIG. 1 in the state before an assembly. The schematic perspective view which shows the metal tape attachment apparatus which concerns on embodiment of this invention The schematic perspective view which shows the metal tape attachment apparatus shown in FIG. 3 in the operation state different from FIG. The schematic perspective view of the principal part of the tension | tensile_strength addition apparatus provided in the tape attachment apparatus shown in FIG. FIG. 5 is a schematic sectional view of a part of the region shown in FIG. 6 is a schematic cross-sectional view taken along line AA in FIG. Schematic plan view showing the state where the metal mask is tensioned and attached to the frame Schematic perspective view showing a state in which tension is applied to the metal mask and attached to the frame (A) is a schematic side view which shows the state which measures the curvature of the frame which attached the metal mask, (b), (c) is a schematic side view which shows the state which adds tension to a metal tape and corrects the curvature of a frame. Schematic plan view showing a state in which tension is applied to a metal mask and attached to a frame in the prior art Schematic perspective view of a conventional mask unit Schematic side view showing a conventional mask unit with exaggerated warpage

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Mask unit 11 Metal mask 12 Mask part 13 Frame 14 Opening 15 Easy cutting line 17, 18 Metal tape 19 Easy cutting line 20 Digging 23 Clamp 24 Drive means (air cylinder)
30, 56 Spot welded portion 31 Metal tape attachment device 32 Stone surface plate 33 Tension applying device 34 Spot welding device 35 Frame mounting table 36 Guide means 37 Moving table 38 Lifting guide mechanism 41 Tension applying jig 42 Support table 43 Linear motion guide 44 Tape gripping member 46 Tension application screw 48 Tape gripping body 49 Tape presser 50 Bolt 53 Guide device 55 Dial gauge

Claims (4)

  A tension applying device for applying tension to a metal tape to be attached to a window frame-shaped frame, comprising: a frame base for horizontally supporting the frame; and a frame supported on the frame base so as to be in a predetermined position. A guide means disposed in a region facing one side, a moving table held movably parallel to one side of the frame, and a tension applying jig held on the moving table. A tension applying jig is a support base and a tape gripping member held on the support base so as to be movable in a direction perpendicular to one side of the frame, and the longitudinal direction of the metal tape is the tape gripping member. A tape gripping member that can be gripped so as to be parallel to the moving direction of the tape, and a tension applying screw attached to the tape gripping member. The additional screw is attached in a form that is parallel to the longitudinal direction of the metal tape and can be abutted against the side surface of the frame at a position close to the metal tape gripped by the tape gripping member. A tensioning device characterized by.   The tension applying device according to claim 1, wherein the tension applying jig is held in a form in which a position in a vertical direction can be adjusted with respect to the movable table.   3. The tension applying device according to claim 1, wherein two sets of moving platforms and a tension applying jig are movably held on the guide means.   4. A metal comprising: the tension applying device according to claim 1; and a spot welding device that spot welds and fixes a metal tape to a predetermined position of the frame supported by the frame mounting table. 5. Tape mounting device.

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