JP2006321575A - Device and method for manufacturing display panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate conveying and holding device and a method therefor capable of reducing the deflection to generate stresses in an enlarged substrate, and preventing any breakage of the substrate by suppressing any change of a deflected state of the substrate, and reliably conveying and holding the substrate. <P>SOLUTION: The substrate conveying and holding device comprises a conveying and holding means 3 to hold a rectangular and thin film-shaped substrate 1 and convey it to the predetermined position, and a substrate holding means 2 to hold the substrate 1. The substrate conveying and holding means 3 changes the substrate 1 in a predetermined deflected shape. The substrate holding means 2 has inner angular parts 21a, 21b, 21c, 21d to hold and fix four corner parts which are diagonally located on the substrate 1 to each other, and the diagonal distance of the inner angular parts 21a, 21b, 21c, 21d is set to be shorter than the diagonal length of the substrate 1. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a display panel manufacturing apparatus and a manufacturing method, and more particularly to a transport holding device and a transport holding method for transporting and holding a substrate when performing a desired process on the display panel substrate in manufacturing the display panel.

  In recent years, flat panel display devices using display panels such as EL devices, SED devices, liquid crystal display devices, and plasma display panel (hereinafter also referred to as PDP) devices can be reduced in thickness and weight, and have low power consumption. Social demands for John receivers and public display monitors have increased and are attracting attention. In particular, in a PDP that is excellent in visibility by exciting and emitting phosphors with ultraviolet light generated by rare gas discharge and used for image / video display, the size of the display area has recently increased from 50 inches to 80 inches. A product using a screen PDP has appeared, and a PDP apparatus having a larger screen whose display area size exceeds 100 inches is planned in the future.

  And with the increase in the display screen, the area of the substrate used in the flat panel display device also becomes larger, but it is difficult to increase the thickness of the substrate in proportion to the area because of the demand for weight reduction. The thickness itself is not so thick. Therefore, if you try to support only the both ends of the substrate when transporting or holding a large substrate, the center portion of the substrate will bend (deflection) due to its own weight, affecting the processing in a given process and causing process troubles. In addition to generating or reducing product accuracy, the projection size of the substrate may be reduced due to bending, and the substrate may fall off the holding / supporting portion at the end of the substrate, causing damage to the substrate. . For example, in the case of a glass substrate used for a liquid crystal display device, even if it is 960 mm long × 1100 mm wide, the thickness is about 1 mm, and when supported at both ends, the center part is lowered by about 80 mm due to the weight of the substrate due to the weight of the substrate. There is also.

  Thus, various proposals have been made to avoid the influence of bending when a large substrate is transported or held. To give some examples, first, a substrate with a support device provided in the center where the substrate bends together with both ends parallel to the longitudinal center line of the substrate, and a substrate with a similar substrate fixing base installed A loading case is mentioned as the simplest method (see, for example, Patent Document 1 and Patent Document 2). Next, in a transfer device using rollers and rollers, the rollers and rollers are arranged not only at both ends parallel to the center line in the longitudinal direction of the substrate but also at the central portion where the substrate bends to horizontally level the substrate surface. When applying a fluid material, the diameter of the roller or roller at the center is larger than the end, and the substrate is bent in the opposite upper direction to the extent that it does not break. A method of preventing the material from flowing and collecting in the central portion has been considered (see, for example, Patent Document 3 and Patent Document 4). In addition, both ends on the side parallel to the longitudinal center line of the substrate are placed on a non-movable support / holding unit or a movable roller or roller, and liquid or gas is placed on the lower side where bending occurs. A transport method for supporting and holding the substrate in a flat state by ejecting or blowing from the substrate has also been proposed (see, for example, Patent Document 5 and Patent Document 6).

Furthermore, although it is not a method for preventing the influence of the bending of the substrate itself, in order to prevent the substrate from being damaged by thermal stress during processing in a predetermined process, four or more flexible strip-like plates are individually provided. There has also been proposed a method in which a substrate is supported by being combined in a frame shape independently, and a belt-like plate is bent to absorb thermal stress in processing (for example, see Patent Document 7).
Japanese Patent Laid-Open No. 11-165813 JP 2004-107006 A Japanese Patent Laid-Open No. 9-208078 JP 2003-100581 A JP-A-9-278181 JP 2000-53247 A JP 11-61379 A

  However, in the above-described method using a support / holding member such as a support pin or a substrate fixing base installed in the central portion where the substrate bends or transported and held using rollers or rollers, the substrate surface and the Contact with the holding member may cause scratches or dirt, and may cause a display defect due to adhesion of dust such as fine dust, which may directly affect the quality of the display screen. In addition, the possibility of breakage of the substrate due to the generated scratches is very high. In addition to these problems, it is necessary to separately prepare a jig provided with support / holding members such as a support pin, a substrate fixing base, a roller, and a roller. In addition, since the case for holding the substrate is also provided with holding and conveying means, there arises a problem that the volume becomes large and it is necessary to secure a new place.

  On the other hand, when a substrate is transported by a roller or roller, the fundamental problem that the roller or roller travels in contact with the substrate, that is, the roller or roller is arranged on the conveyor at a predetermined interval. When transferring to the roller, there is a problem that the edge of the glass substrate and the roller surface are rubbed and a part of the glass substrate is chipped or dust or static electricity is generated. In addition, when a substrate is horizontally supported and held by rollers or rollers arranged at a predetermined interval, the substrate may wave and bend in an uneven state in a direction perpendicular to the conveyance direction. Due to this bending, the end of the substrate hangs down, and the roller and roller and the end surface of the substrate repeatedly collide, and the roller and roller wear and generate dust, and the roller and roller are frequently replaced. There is also a problem that must be done.

  In addition, in the method of supporting and holding liquid or gas (gas) from the lower side to the center of the substrate where bending occurs, or by supporting and holding the liquid, a highly clean liquid or Gas must be used, and in the case of liquid, it is necessary to wash away the liquid adhering to the substrate. Therefore, in the case of this method, there arises a problem that the configuration of the processing apparatus is complicated and large. Also, even if the substrate is transported in a non-contact manner, the substrate cannot be supported / held in a non-contact state at all times, and some support / holding is required. At that time, the support member directly contacts the substrate. As a result, the same problem as described above occurs.

Furthermore, in addition to the problem in transporting and holding a large-sized substrate as described above, there is a problem of stress due to the bending of the substrate. Hereinafter, the bending of the substrate will be briefly described with reference to FIG. FIG. 9 is a perspective view for explaining changes in the state of the substrate when holding a large substrate. In FIG. 9, when the substrate 1 is transported and transferred by a predetermined means and method and the short side end of the substrate 1 is placed on the support means 2a and 2b, the substrate 1 immediately after placement is shown in FIG. ). At this time, the long side length _{L 1} of the substrate support means 2a, sufficiently large compared to the gap length _{L 2} between 2b _{(L 1> L} 2), the substrate 1 is a support means 2a, stably over 2b Retained. However, if the short-side end of the enlarged substrate 1 continues to be placed on the support means 2a and 2b, the arrow A appears at the center of the substrate 1 as shown in FIG. Begins to bend in the direction indicated by. As a result, the projection length L ₃ of the substrate 1 is reduced from L ₁ , and when L ₁ > L ₃ > L ₂ , the edge portions of the support means 2 a and 2 b and the surface of the substrate 1 come into contact with each other. In addition to the same problems as described above, such as the surface of the substrate being scratched or contaminated, there is a possibility that stress is generated in the substrate 1 due to bending and the substrate is cracked. As the bending further proceeds, the stress increases proportionally, and the substrate 1 becomes more easily broken. It has already been described in the background art that when L ₃ <L ₂ , the edge of the substrate 1 falls off the support means 2a, 2b and falls to cause problems such as breakage.

  Although FIG. 9 shows an example in which the short side end of the substrate 1 is placed on the support means 2a, 2b, the long side end of the substrate 1 is placed on the support means 2a, 2b. It is the same even when doing. However, the stress resistance of the substrate 1 is better when the long side end is placed than when the short side end is placed on the support means 2a, 2b. In addition, the stress resistance depends on the thickness of the substrate 1, and in the PDP, the increase in weight due to the increase in size is in a direction corresponding to the reduction in the thickness of the substrate. When trying, the problem that the board | substrate 1 is damaged with the stress resulting from such bending is serious.

  The present invention has been made to solve the above-mentioned problems, and suppresses the generation of dust and dirt generated when transporting and holding a large-sized substrate, and reduces the bending that causes stress on the substrate. In addition, the change in the bending state of the substrate during processing can be suppressed, and the substrate can be reliably transported and held without adversely affecting the product to prevent the substrate from being damaged, and the required processing can be performed stably and reliably. An object of the present invention is to provide a substrate transport and holding device and a method for transporting and holding the same that have good transport and holdability, and that can further improve yield and quality without simplifying the device and making it expensive. To do.

  In order to achieve the above object, a display panel manufacturing apparatus of the present invention includes a conveyance holding unit that holds a rectangular thin plate-like substrate and conveys the substrate to a predetermined position, and a substrate holding unit that holds the substrate at an end portion. The conveyance holding means changes the substrate into a predetermined bent shape. In addition to this configuration, the substrate holding means has inner corner portions for holding and fixing the four corner portions diagonally of the substrate, and the diagonal distance of the inner corner portions is longer than the diagonal length of the substrate. Substrate mounting having a curved surface with a predetermined bent shape when the substrate holding means places and supports the substrate at the end of either the long side or the short side of the substrate. And a stopper that prevents the substrate from moving out of a predetermined position, and the projection length in the longitudinal direction of the substrate mounting portion is longer than or equal to the projection length on the side where the substrate is bent. The conveyance holding means for holding the rectangular thin plate-like substrate and conveying it to a predetermined position has a holding jig that holds and holds the surface of the substrate on which the component is not formed, and the substrate holding means is the substrate. Arranged to face the surface on which the component is formed, The holding jig provided in the conveyance holding means has a connecting member capable of switching between a state in which the arm is fixedly held and a state in which the arm is movable, and the holding jig provided in the conveyance holding means has a height of the substrate. A configuration having a plurality of height position adjustment jigs that can change the position, a configuration in which a substrate mounting portion is divided into a plurality of members, and is arranged in parallel on the side on which the substrate is bent, The substrate mounting portion may have a configuration in which members divided into a plurality are arranged so as to cross each other.

  The display panel manufacturing apparatus of the present invention includes a substrate support member that supports a rectangular thin plate-shaped substrate and conveys the substrate to a predetermined position, and substrate holding means that fixes and holds the substrate, and the substrate support member holds the substrate. It has a configuration for changing to a predetermined bent shape. In addition to this configuration, the substrate holding means has internal corner portions for holding and fixing the four corner portions diagonally of the substrate, and the diagonal distance of the internal corner portions is larger than the diagonal length of the substrate. A configuration in which the substrate support member is placed and supported on the surface on which the component of the substrate is formed together with the short configuration, and the substrate support member is either on the long side or the short side of the substrate A substrate having a curved surface substantially equal to a bent state when a surface on which a component of the substrate is formed is placed and supported on a center line parallel to the substrate, and a member divided into a plurality of substrate support members May be arranged in parallel to the side on which the substrate is bent, or may be arranged in such a manner that members obtained by dividing the substrate supporting member into a plurality of portions are crossed.

  With these configurations, when transporting and holding a large-sized substrate, it is possible to reduce the bending that causes stress on the substrate and to suppress changes in the bending state of the substrate during processing, thereby adversely affecting the product. Therefore, it is possible to reliably carry and hold the substrate to prevent the substrate from being damaged, and to stably and surely perform the required processing, and to provide a substrate carrying and holding device having a simple configuration.

  In order to achieve the above object, the display panel manufacturing method of the present invention includes a step of holding a rectangular thin plate-like substrate by a transfer holding unit and transferring the substrate above the substrate holding unit for fixing and holding the substrate. A step of lowering the substrate with a surface on which a component of the substrate is formed facing a base member provided in the substrate holding means, a step of changing the substrate into a predetermined bent shape, and a step of bending the bent substrate And a step of placing and holding the holding means.

  In the display panel manufacturing method of the present invention, the surface on which the components of the rectangular thin plate-like substrate are formed is placed and supported on the substrate support member, and the substrate is bent by its own weight, and above the substrate holding means. A step of transporting, a step of lowering the substrate with a surface on which a component of the substrate is formed facing a base member provided on the substrate holding means, and a substrate on which the substrate is bent is placed and held on the substrate holding means In addition, the method for transporting and holding a substrate according to the present invention corresponds to four corner portions on the substrate, and the diagonal distance is set shorter than the diagonal length of the substrate. The substrate is held by the substrate holding means having the internal corners formed, and the surface on the side forming the component of the substrate is placed and supported on the center line parallel to either the long side or the short side of the substrate When the board is bent The substrate support member having a substantially equal curved state may comprise the steps of holding the substrate.

  By these methods, the generation of dust and dirt generated when transporting and holding a large-sized substrate is suppressed, the bending that causes stress on the substrate is reduced, and the bending state of the substrate during processing is changed. It has good transport and holding properties that can be controlled and reliably transported and held without adversely affecting the product to prevent the substrate from being damaged and perform the required processing stably and reliably. Therefore, it is possible to provide a method for transporting and holding a substrate that can improve the yield and quality without simplifying the apparatus and making it expensive.

  As described above, according to the display panel manufacturing apparatus and method of the present invention, it is possible to transport the substrate and stably hold and support it on the support means or the substrate holding means, which occurs due to the bending of the substrate. It is possible to eliminate problems such as breakage due to the stress that occurs, and when manufacturing display devices, when forming components such as electrodes on the substrate by vapor deposition or spray coating, the process is performed while holding and supporting the substrate It is also possible.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
First, a flat panel display substrate transfer holding device and a transfer holding method according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a diagram for explaining a substrate holding method according to Embodiment 1 of the present invention, and FIG. 2 is a perspective view showing another example of the shape and arrangement of the substrate holding member according to Embodiment 1 of the present invention.

  FIG. 1A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 by the transfer holding means 3 and placed on the substrate holding means 2. In FIG. 1A, the surface of the substrate 1 that is not used to form components such as electrodes used for manufacturing the display device is sucked and held by a suction holder 30 such as a suction plate provided in the transport holding means 3 and held. The substrate 1 is transported above the supporting substrate holding means 2. At this time, the substrate 1 is kept horizontal. Although the conveyance holding means 3 shows an example in which six suction holders 30 are connected by the arm 5 having sufficient rigidity to hold the substrate 1 in FIG. 1, Embodiment 1 of the present invention. The configuration of the transport and holding device is not limited to this example. The substrate holding means 2 includes at least four substrate holding / supporting members 20a, 20b, 20c, and 20d formed in a rectangular solid angle shape so that the inner corners 21a, 21b, 21c, and 21d face each other on the same plane. It is arranged and fixed so that the diagonal distance is shorter than the diagonal length of the substrate 1. The substrate holding / supporting members 20a, 20b, 20c, and 20d are placed and fixed on a base member 22 having an opening 23 as shown in FIG.

  In this state, when the substrate 1 is lowered in the direction indicated by the arrow A in FIG. 1A, the substrate 1 is placed on the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, and 20d. 1 is not held. Before lowering the substrate 1, the long side of the substrate 1 is divided into two equal parts and parallel to the short side at a position higher than the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, 20d. When the substrate support member 4 having a round bar shape is arranged and the substrate 1 is lowered, the substrate support member 4 comes into contact with the substrate 1 through the state shown in FIG. The substrate 1 is supported. At this time, when the suction of the suction holder 30 of the transport holding means 3 is released, the substrate 1 starts to bend so that the short side is lowered by its own weight, and the projected size of the long side of the substrate 1 is gradually reduced. When the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner of the substrate holding / supporting member, each corner portion of the substrate 1 corresponds to the substrate holding / supporting as shown in FIG. The members 20a, 20b, 20c, and 20d are accommodated in the inner corners 21a, 21b, 21c, and 21d. Then, by changing the setting of the diagonal distance between the inner corners of the substrate holding / supporting member, the central portion of the substrate 1 starts to bend downward or conversely bends upward to hold it stably. Can be controlled. When bending upward, it is necessary to be careful because the substrate 1 may be damaged if the amount of bending becomes too large.

  Since the substrate holding / supporting member is fixed to the base member 22 and each corner portion of the substrate 1 is restricted by the inner corners of the substrate holding / supporting member and does not move, the substrate 1 is shown in FIG. If the distance between the diagonal corners of the inner corners of the substrate holding / supporting member is set so as to keep it bent upward and not bent downward in the opposite direction, the substrate supporting member 4 can be removed at this time. As shown in FIG. 1D, the substrate 1 is held stationary while being bent upward. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary with the substrate bent upward is the substrate size, thickness and density, Young's modulus, and tensile strength of the substrate 1. Although simulation based on numerical calculation is possible using physical quantities unique to the materials such as the above, here, it is obtained and set by actual measurement using the substrate 1 actually used for manufacturing.

  By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

  In the substrate transport and holding method according to Embodiment 1 of the present invention described above, an example in which the substrate support member 4 is arranged at a position where the long side of the substrate 1 is divided into two equal parts and parallel to the short side. As described above, it is possible to arrange the substrate supporting member 4 at a position where the short side of the substrate 1 is divided into two equal parts and parallel to the long side.

  Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the example shown in FIG. 1, and for example, FIG. 2 (a), (b), The quantity, shape and arrangement as shown in (c) and (d) are also possible. FIG. 2A shows the inner corners 21a, 21b, 21c, 21d of the four substrate holding / supporting members 20a, 20b, 20c, 20d formed in a straight three-dimensional angle. The substrate 1 is held at each side portion. Further, the substrate holding / supporting members constituting the substrate holding means 2 shown in FIGS. 2B, 2C, and 2D are also formed by notching the respective inner corners, and the substrate is formed at the side portion. A configuration in which 1 is held is also possible. Although not shown, it is possible to use five or more substrate holding / supporting members. Furthermore, the shape of the substrate support member 4 is not limited to the illustrated round bar, and a square bar or a strip-shaped flat plate can also be used.

(Embodiment 2)
Next, a transport and holding device and a transport and holding method for a flat panel display substrate in Embodiment 2 of the present invention will be described with reference to FIG. FIG. 3 is a diagram for explaining a substrate holding method according to Embodiment 2 of the present invention. The substrate transport and holding method in the second embodiment of the present invention is similar to the substrate transport and holding method in the first embodiment of the present invention shown in FIG. 1, and the same reference numerals are used for the same member elements in FIG. It is attached.

  In FIG. 3, the difference from the substrate transport and holding apparatus in the first embodiment of the present invention shown in FIG. 1A is that the configuration of the transport and holding means 31 and the substrate support member 4 are not used. The conveyance holding means 3 of the substrate conveyance holding apparatus in Embodiment 1 of the present invention shown in FIG. 1 is directly connected by a plurality of arms 5 having sufficient rigidity for the six suction holders 30 to hold the substrate 1. The transfer holding means 31 of the substrate transfer holding apparatus according to the first embodiment of the present invention shown in FIG. 3 is connected to the main arm 51 and the main arm 51 with one arm. It consists of two sub-arms 52 and 53 that diverge through the member 6, and the connecting member 6 can be switched between a state in which the sub-arms 52 and 53 are fixedly held and a state in which the sub-arms 52 and 53 are movable. The place where the holding means 31 is given the function of a substrate support member is greatly different. The suction holding tool 30 connected to each arm and at least four substrate holding / supporting members 20a, 20b, 20c, 20d formed in a straight three-dimensional angle form inner corners 21a, 21b, Substrate holding means arranged and fixed on the base member 22 having the opening 23 so that the diagonal distances on the same plane are diagonally opposed to each other and the diagonal distance is shorter than the diagonal length of the substrate 1. The configuration of 2 is the same as that of the substrate transfer and holding device in the first embodiment of the present invention shown in FIG.

  FIG. 3A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 by the transfer holding means 31 and placed on the substrate holding means 2. In FIG. 3A, the surface of the substrate 1 used for manufacturing the display device on which the components such as electrodes are not formed is sucked and held by a suction holder 30 such as a suction cup provided in the transport holding means 31. The substrate 1 is transported above the substrate holding means 2 to be supported. At this time, the connecting member 6 is in a state of fixing and holding the sub-arms 52 and 53, and the substrate 1 is kept horizontal.

  In this state, when the substrate 1 is lowered in the direction indicated by the arrow C in FIG. 3A, the substrate 1 is placed on the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, and 20d. 1 is not held. When the state of the connecting member 6 that holds and holds the sub arms 52 and 53 is switched to a movable state before the substrate 1 is lowered, the substrate is subjected to the state shown in FIG. 1 begins to bend in the direction indicated by the arrow C so that the short side is lowered by its own weight, and the projection size on the long side of the substrate 1 is gradually reduced. Therefore, it can be said that the conveyance holding means 31 in Embodiment 2 of the present invention has the function of the substrate support member in Embodiment 1 described above. In this way, when the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner portion of the substrate holding / supporting member, each corner portion of the substrate 1 corresponds as shown in FIG. The substrate holding / supporting members 20a, 20b, 20c, and 20d are accommodated in the inner corners 21a, 21b, 21c, and 21d. Here, when the substrate 1 is lowered, the substrate support member 4 comes into contact with the substrate 1 and supports the substrate 1. Then, by changing the setting of the diagonal distance between the inner corners of the substrate holding / supporting member, the central portion of the substrate 1 starts to bend downward or conversely bends upward to hold it stably. Can be controlled. When bending upward, it is necessary to be careful because the substrate 1 may be damaged if the amount of bending becomes too large.

  Since the substrate holding / supporting member is fixed to the base member 22 and each corner portion of the substrate 1 is restricted by the inner corners of the substrate holding / supporting member, the substrate 1 is shown in FIG. If the distance between the diagonal corners of the inner corners of the substrate holding / supporting member is set so that the upper side is bent and the lower side is not bent downward, the conveyance holding means 31 can be removed at this time. As shown in FIG. 3D, the substrate 1 is held stationary while being bent upward. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary with the substrate bent upward is the substrate size, thickness and density, Young's modulus, and tensile strength of the substrate 1. Although simulation based on numerical calculation is possible using physical quantities unique to the materials such as the above, here, it is obtained and set by actual measurement using the substrate 1 actually used for manufacturing.

  By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

  In the substrate transport and holding method according to the second embodiment of the present invention described above, the example in which the side parallel to the long side of the substrate 1 bends has been described, but the substrate is transported and held so that the side parallel to the short side bends. The structure which arrange | positions the adsorption | suction holder 30 of the means 31 is also possible.

  Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the example shown in FIG. 3. For example, in the description of the first embodiment, FIG. The quantity, shape and arrangement as shown in a), (b), (c) and (d) are possible because the flat panel display substrate carrying and holding device and carrying in the second embodiment of the present invention are as follows. The same applies to the holding method.

(Embodiment 3)
Next, a flat panel display substrate transfer holding apparatus and transfer holding method according to Embodiment 3 of the present invention will be described with reference to FIGS. FIG. 4 is a diagram for explaining a substrate holding method according to the third embodiment of the present invention, and FIG. 5 is a diagram for explaining another substrate holding method according to the third embodiment of the present invention. The substrate transport and holding method in the third embodiment of the present invention is similar to the substrate transport and holding method in the second embodiment of the present invention shown in FIG. 3, and the same member elements in FIGS. The same reference numerals are attached.

  In FIG. 4, the difference from the substrate transport and holding device in the second embodiment of the present invention shown in FIG. The transfer holding means 32 of the substrate transfer holding apparatus according to the third embodiment of the present invention shown in FIG. 4 has one main arm 51 having a rigid arm and two flexible arms branched from the main arm 51. Are provided with six height position adjusting jigs 7 fixed in the vicinity of the connection portion between the suction holding tool 30 and the arm, and the height position adjusting jig 7 is indicated by an arrow D. The difference is that the height position of the suction holder 30, that is, the substrate 1 is variable. However, the place where the transport holding means 32 has the function of a substrate support member is the same, and at least four substrate holding / support members 20a, 20b, 20c, and 20d formed in a straight three-dimensional angle form are respectively provided. The inner corners 21a, 21b, 21c, and 21d are opposed to each other diagonally on the same plane, and are arranged on the base member 22 having the opening 23 so that the distance between the diagonals is shorter than the diagonal length of the substrate 1. The configuration of the fixed substrate holding means 2 is the same as that of the substrate transfer and holding device in the second embodiment of the present invention shown in FIG.

  FIG. 4A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 by the transfer holding means 32 and placed on the substrate holding means 2. In FIG. 4A, the surface of the substrate 1 used for manufacturing the display device on which the components such as electrodes are not formed is sucked and held by a suction holder 30 such as a suction cup provided in the transport holding means 32. The substrate 1 is transported above the substrate holding means 2 to be supported. At this time, the six height position adjusting jigs 7 are in a state in which the suction holder 30 is set at the same height position, and the substrate 1 is kept horizontal.

  In this state, when the substrate 1 is lowered in the direction indicated by the arrow A in FIG. 4A, the substrate 1 is placed on the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, and 20d. 1 is not held. Before the substrate 1 is lowered, when the fixed state of the height position adjusting jig 7 at the four corners of the substrate 1 is released, the substrate 1 passes through the state shown in FIG. Begins to bend in the direction indicated by the arrow C so that the short side is lowered by its own weight, and the projection size on the long side of the substrate 1 is gradually reduced. Therefore, the height position adjusting jig 7 of the conveyance holding means 32 in the third embodiment of the present invention has the function of the connecting member 6 in the second embodiment, that is, the substrate support member in the first embodiment. It can be said. When the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner of the substrate holding / supporting member, each corner portion of the substrate 1 corresponds to the substrate holding / supporting as shown in FIG. The members 20a, 20b, 20c, and 20d are accommodated in the inner corners 21a, 21b, 21c, and 21d. Here, when the substrate 1 is lowered, the substrate support member 4 comes into contact with the substrate 1 and supports the substrate 1. Then, by changing the setting of the diagonal distance between the inner corners of the substrate holding / supporting member, the central portion of the substrate 1 starts to bend downward or conversely bends upward to hold it stably. Can be controlled. When bending upward, it is necessary to be careful because the substrate 1 may be damaged if the amount of bending becomes too large.

  Since the substrate holding / supporting member is fixed to the base member 22 and each corner portion of the substrate 1 is restricted by the inner corners of the substrate holding / supporting member, the substrate 1 is shown in FIG. If the distance between the diagonal corners of the inner corners of the substrate holding / supporting member is set so as to keep it bent upward and not bent downward in the opposite direction, the conveyance holding means 32 can be removed at this time. As shown in FIG. 4D, the substrate 1 is held stationary while being bent upward. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary with the substrate bent upward is the substrate size, thickness and density, Young's modulus, and tensile strength of the substrate 1. Although simulation based on numerical calculation is possible using physical quantities unique to the materials such as the above, here, it is obtained and set by actual measurement using the substrate 1 actually used for manufacturing.

  In the above description, in FIG. 4C, the fixed state of the height position adjusting jig 7 at the four corners of the substrate 1 is released, and the height position adjusting jig 7 is extended by its own weight. Although it demonstrated that it bent in the direction of arrow C, the fixed state of the height position adjustment jig 7 installed in two places near a side edge part is cancelled | released, and two height position adjustment treatments near a side edge part are carried out. The tool 7 can be extended in the opposite direction to the arrow C to bend the substrate 1 into a similar shape.

  Further, in the configuration of the conveyance holding means 32 shown in FIG. 4 of the flat panel display substrate conveyance holding apparatus according to the third embodiment of the present invention, the height position adjusting jig 7 is the substrate 1 as shown in FIG. The jigs installed at four locations in the vicinity of the corner portion are made of, for example, a height position adjusting jig 72 having an elastic member such as a spring and the jigs installed at two locations in the vicinity of the side edge portion. It can be replaced with a height fixing jig 71 made of Even in the conveyance holding means 32 of this configuration, the fixed state of the height position adjusting jig 72 at the four corner portions of the substrate 1 is released, and the state shown in FIG. Then, the substrate 1 is bent in the direction indicated by the arrow C so that the short side is lowered by its own weight, and the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner of the substrate holding / supporting member. At this stage, as shown in FIG. 4C, each corner portion of the substrate 1 is accommodated in the inner corner portions 21a, 21b, 21c, 21d of the corresponding substrate holding / supporting members 20a, 20b, 20c, 20d. Can be supported. In the configuration shown in FIG. 5, four corner portions of the substrate 1 are used as the height fixing jig 71, and two locations near the side edge portion of the substrate 1 are used as the height position adjusting jig 72, and the vicinity of the side edge portion. The height position adjusting jigs 72 installed at the two positions are released from the fixed state, and the two height position adjusting jigs 71 near the side edges are extended in the direction opposite to the arrow C, and the substrate is It is also possible to bend 1 into a similar shape.

  By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

  In the substrate transport and holding method according to the second embodiment of the present invention described above, the example in which the side parallel to the long side of the substrate 1 bends has been described, but the substrate is transported and held so that the side parallel to the short side bends. A configuration in which the suction holder 30 of the means 32 is arranged is also possible.

  Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the examples shown in FIGS. 4 and 5, for example, in the description of the first embodiment. The quantity, shape, and arrangement as shown in FIGS. 2 (a), (b), (c), and (d) are possible because the flat panel display substrate according to the third embodiment of the present invention is transported and held. The same applies to the apparatus and the conveyance holding method.

(Embodiment 4)
Next, a flat panel display substrate transfer holding device and transfer holding method according to Embodiment 4 of the present invention will be described with reference to FIG. FIG. 6 is a diagram for explaining a substrate holding method according to Embodiment 4 of the present invention. The substrate transport and holding method in the fourth embodiment of the present invention is similar to the substrate transport and holding method in the first embodiment of the present invention shown in FIG. 1, and the same member elements in FIG. It is attached.

  FIG. 6A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 and placed on the substrate holding means 2, and FIG. 6B is a side view. In the method for transporting and holding the substrate 1 according to the fourth embodiment of the present invention, the surface of the substrate 1 on which the components such as electrodes are not formed is a curved surface that is substantially equal to the bent state when the substrate 1 is held and supported. Transferring (transferring) the substrate onto the substrate holding means 2 using the substrate support member 40 having a difference from the substrate transfer and holding method in the first embodiment shown in FIG. The projected length of the substrate support member 40 on the side where the substrate 1 is bent is formed to be smaller than the projected length of the substrate 1 on the bent side. Further, the substrate holding means 2 includes at least four substrate holding / supporting members 20a, 20b, 20c, and 20d formed in a straight three-dimensional angle so that the inner corner portions 21a, 21b, 21c, and 21d are on the same plane. The substrate holding and supporting members 20a, 20b, 20c, and 20d are arranged and fixed so that the diagonal distance is shorter than the diagonal length of the substrate 1, and the substrate holding / supporting members 20a, 20b, 20c, and 20d are shown in FIG. The place where it is placed and fixed on the base member 22 having the opening 23 as shown is the same as in the first embodiment.

  In the state shown in FIGS. 6A and 6B, the substrate 1 is lowered in the direction indicated by the arrow A, but the curved surface is substantially equal to the bent state when the substrate 1 is held and supported. The projected diagonal length of the substrate 1 is shorter than the diagonal distance at the inner corner of the substrate holding / supporting member, as shown in FIG. 6 (c). The corners of the substrate 1 are accommodated in the inner corners of the corresponding substrate holding / supporting members 20a, 20b, 20c, and 20d, so that the corners of the substrate 1 are mounted on the inner corners of the substrate holding / supporting member. Can be placed. The substrate holding / supporting members 20a, 20b, 20c, and 20d are fixed to the base member 22, and each corner portion of the substrate 1 placed on the substrate holding means 2 is regulated by the inner corner of the substrate holding / supporting member. Does not move.

  At this time, similarly to the description of the substrate holding method of the first embodiment, the substrate 1 keeps the state of being bent upward as shown in FIG. 6C and is not bent downward in the reverse direction. When the diagonal distance between the inner corners of the substrate holding / supporting member is set and the substrate supporting member 40 is removed, the substrate 1 is stationary while being bent upward as shown in FIG. 6 (d). Will be held. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary in a state of being bent upward is obtained and set by actual measurement using the substrate 1 actually used for manufacturing. However, this is the same as in the case of the conveyance holding method in the first embodiment.

  By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

  The substrate support member 40 has a curved surface substantially equal to the bent state when the substrate 1 is held and supported. As described above, the curved surface has the substrate size, thickness and density, Young's modulus, and tension of the substrate 1. Although it is possible to obtain by physical calculation or simulation using a physical quantity unique to the material such as strength, in the substrate holding method according to the fourth embodiment of the present invention, the substrate 1 actually used for manufacturing is bent. The substrate support member 40 having a substantially equal curved surface obtained by actual measurement in the state of being held and supported was formed. The substrate support member 40 can be formed using a material such as resin, metal, or ceramic.

  Since the substrate support member 40 having a curved surface that is optimal for holding and supporting the substrate 1 is used, the substrate 1 is placed on the substrate support member 40 and conveyed onto the substrate holding means 2 for holding and supporting. The procedure up to can be advanced. For this reason, even if the time for carrying and supporting the substrate becomes long, the substrate 1 does not bend excessively, and adverse effects caused by the substrate 1 being largely bent can be suppressed.

  6A shows the substrate support member 40 as a single member. However, in the fourth embodiment of the present invention, the substrate support member 40 is not limited to this, and the substrate support member 40 is composed of a plurality of members. It can be divided and used. For example, the substrate support member 40 divided into two elongated members bent and bent may be used by being arranged on both ends.

  As described above, the substrate holding method according to the fourth embodiment of the present invention enables the substrate 1 to be transported and stably held and supported on the substrate holding / supporting member, and is generated by the bending of the substrate 1. Problems such as breakage due to the stress to be applied can also be solved. Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform each process while supporting in the state shown.

  In the above-described method for transporting and holding a substrate according to the fourth embodiment of the present invention, the substrate support member 40 is described as an example in which the substrate support member 40 is disposed at a position parallel to the long side of the substrate 1. It is also possible to arrange 40 at a position parallel to the short side of the substrate 1. However, in any case, the projected length of the substrate support member 40 on the side where the substrate 1 bends needs to be smaller than the projected length of the substrate 1 on the deflected side.

  Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the example shown in FIG. 6, and for example, FIG. 2 (a), (b), The quantity, shape and arrangement as shown in (c) and (d) are also possible. Although not shown, it is possible to use five or more substrate holding / supporting members.

  Furthermore, in the above description, the substrate 1 is not bent when holding and supporting the surface of the substrate 1 on which the components such as the electrodes are not formed from the beginning without using the conveyance holding means such as a suction cup. The substrate support member 40 having a curved surface substantially equal to the bent state is supported and transferred (conveyed) onto the substrate holding means 2. However, the suction holder 30 of the conveyance holding means 3 as shown in FIG. 1 is used. The substrate 1 is transferred (conveyed) onto the substrate holding means 2, placed on the substrate support member 40, the suction holder 30 is immediately removed, and the substrate 1 is held and held by the procedure described with reference to FIG. It is also possible to hold and support the support member.

(Embodiment 5)
Next, a flat panel display substrate holding apparatus and holding method according to Embodiment 5 of the present invention will be described with reference to FIGS. In the first to fourth embodiments, the apparatus and method for holding and supporting the substrate 1 on the substrate holding means 2 after conveying the substrate have been described. However, in the fifth embodiment of the present invention, the conveying apparatus, Regarding the transport method, since the substrate support member 4 and the transport holding means 3, 31, 32 described in the first to fourth embodiments of the present invention can be used in the same manner, the description is omitted to avoid duplication. Only the method for holding the substrate 1 using the holding device will be described. Here, FIG. 7 is a diagram for explaining a substrate holding method in the fifth embodiment of the present invention, and FIG. 8 is a diagram for explaining another substrate holding method in the fifth embodiment of the present invention.

  FIG. 7A is a perspective view showing a state in which the substrate 1 is placed on the substrate holding means 2 serving as a holding device in Embodiment 5 of the present invention, and the substrate is held and supported, and a side view. 7 (b), the substrate holding means 2 is integrally formed with a lower member 82 corresponding to a base member, stoppers 50a, 50b, 50c, 50d and substrate mounting portions 41a, 41b. The lower member 82 is a base member for stacking and forming the stoppers 50 a, 50 b, 50 c, 50 d and the substrate mounting portions 41 a, 41 b necessary for the substrate holding means 2, and has a flat plate shape or a square shape that becomes the opening 23. The inner hole is removed to form a frame shape or a frame shape (bezel shape). The area of the lower member 82 where the substrate 1 is placed is set larger than the surface area of the substrate 1. The stoppers 50a, 50b, 50c, and 50d are externally equivalent to the substrate holding / supporting members 20a, 20b, 20c, and 20d shown in FIGS. 1, 2, 3, 4, 5, and 6. The inner corners 51a, 51b, 51c, 51d do not restrict and hold the corners of the substrate 1, but have a simple stopper function for preventing the substrate 1 from falling off the substrate holding means 2. . In addition, the substrate platform 41 has a shape that is similar in appearance to the substrate support member 40 described in the fourth embodiment. That is, the shape of the portion that holds and supports the substrate 1 has a curved surface that is substantially equal to the bent state when the substrate 1 is actually held and supported. However, the projection length of the substrate support member 40 described in the fourth embodiment on the side where the substrate 1 is bent is set to be smaller than the projection length on the side where the substrate 1 is bent, whereas the substrate mounting portion 41a. 41b, the projection length on the side on which the substrate 1 is bent is formed to be equal to or larger than the projection length on the side on which the substrate 1 is bent.

  In the substrate holding means 2 serving as the holding device in the fifth embodiment of the present invention described above, the substrate 1 is bent on the lower member 82 in which the area of the portion on which the substrate 1 is placed is set larger than the surface area of the substrate 1. Since the substrate mounting portions 41a and 41b formed so as to be equal to or larger than the projection length of the bent side of the substrate 1 are disposed, the substrate 1 is caused by the stress generated by the bending of the substrate 1. Placed on the substrate placement portions 41a and 41b in an optimal bending state without causing damage or the like, and stably held and supported without contacting the lower member 82 or the stoppers 50a, 50b, 50c, and 50d. Will be.

  Further, the shape of the substrate mounting portions 41a and 41b provided in the substrate holding means 2 serving as the holding device in the fifth embodiment of the present invention is not limited to the shape shown in FIG. 7, and other shapes are possible. is there. As shown in the perspective view of FIG. 8A, it is possible to use the substrate mounting portions 41 and 42a formed in a block shape instead of a plate shape. At this time, the shape of the portion that holds and supports the substrate 1 has a curved surface that is substantially the same as the bent state when the substrate 1 is actually held and supported, and the projected length of the side on which the substrate 1 is bent is the substrate. 7 is the same as the substrate mounting portions 41a and 41b in FIG.

  Further, as shown in the perspective view and the side view in FIGS. 8B and 8C, respectively, the substrate mounting portions 42a and 42b are divided into fine blocks and configured by using only a part thereof. It is also possible to do. In FIG. 8B and FIG. 8C, the substrate platform 41 and the substrate platform 42a each include five substrate platform blocks 43a, 43b, 43c, 43d, and 43e, and the substrate platform block. 43f, 43g, 43h, 43i, 43j. At this time, the top of each block corresponds to a curved surface that is substantially equal to the bent state when the substrate 1 is held and supported, and is equivalent to the substrate placement portions 42a and 42b shown in FIG. It has a function. 8B and 8C show an example in which five substrate placement unit blocks are used, but the number is not limited to five.

  As described above, the substrate holding method according to the fifth embodiment of the present invention makes it possible to stably hold and support the substrate on the substrate mounting portion provided in the substrate holding means, which occurs due to the bending of the substrate. Problems such as breakage due to stress can also be solved.

  FIG. 7 shows an example of the configuration in which the substrate mounting portion provided in the substrate holding means serving as the holding device in Embodiment 5 of the present invention is divided into two or two groups of members on both sides bent and bent. However, it is possible to divide into three or more groups of members, or conversely, to assemble two or two groups of members into one large or one group of members. is there.

  Further, in the above-described substrate holding / supporting method according to the fifth embodiment of the present invention, the substrate mounting portion has been described as an example in which the substrate mounting portion is disposed at a position parallel to the long side of the substrate 1. A method is also possible in which the placing portion is arranged at a position parallel to the short side of the substrate.

  The flat panel display substrate transfer holding device and transfer holding method according to the present invention suppresses the generation of dust and dirt that occur when a large-sized substrate is transferred and held, and also causes bending of the substrate. In addition, the change in the bending state of the substrate during processing can be suppressed, and the substrate can be reliably transported and held without adversely affecting the product to prevent the substrate from being damaged, and the required processing can be performed stably and reliably. Therefore, it is useful for applications such as liquid crystal, PDP, EL and other flat panel display manufacturing apparatuses.

The figure explaining the board | substrate holding method in Embodiment 1 of this invention The perspective view which shows the other example of the shape and arrangement | positioning of the board | substrate holding member in Embodiment 1 of this invention. The figure explaining the board | substrate holding method in Embodiment 2 of this invention The figure explaining the substrate holding method in Embodiment 3 of this invention The figure explaining another board | substrate holding | maintenance method in Embodiment 3 of this invention. The figure explaining the board | substrate holding method in Embodiment 4 of this invention The figure explaining the substrate holding method in Embodiment 5 of this invention The figure explaining another board | substrate holding | maintenance method in Embodiment 5 of this invention. The perspective view explaining the change of the state of a board | substrate when holding a large sized board | substrate

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 2 Substrate holding means 2a, 2b Support means 3, 31, 32 Transport holding means 4, 40 Substrate support member 5 Arm 6 Connecting member 7, 72 Height position adjustment jig 20a, 20b, 20c, 20d Substrate holding / support Member 21a, 21b, 21c, 21d, 51a, 51b, 51c, 51d Inner corner 22 Base member 23 Opening 30 Adsorption holder 41a, 41b, 42a, 42b Substrate mounting part 43a, 43b, 43c, 43d, 43e, 43f, 43g, 43h, 43i, 43j Substrate placement block 50a, 50b, 50c, 50d Stopper 51 Main arm 52, 53, 54, 55 Sub arm 71 Height fixing jig 82 Lower member

Claims (18)

Transport holding means for holding a rectangular thin plate-shaped substrate and transporting it to a predetermined position;
Substrate holding means for holding the substrate at an end;
With
The apparatus for manufacturing a display panel, wherein the conveyance holding means changes the substrate into a predetermined bent shape. The substrate holding means has inner corner portions for holding and fixing four corner portions diagonally of the substrate, and the diagonal distance of the inner corner portions is shorter than the diagonal length of the substrate. The display panel manufacturing apparatus according to claim 1, wherein the display panel manufacturing apparatus is formed. The substrate holding means has a curved surface with a predetermined bent shape when the substrate is placed and supported at an end of either the long side or the short side of the substrate. When,
A stopper for preventing the substrate from coming off a predetermined position;
With
2. The display panel manufacturing apparatus according to claim 1, wherein a projection length in a longitudinal direction of the substrate mounting portion is longer than or equal to a projection length of the substrate on a bent side. The transport holding means for holding a rectangular thin plate-shaped substrate and transporting it to a predetermined position has a holding jig for sucking and holding the surface of the substrate on which the component is not formed,
4. The display panel manufacturing apparatus according to claim 2, wherein the substrate holding unit is disposed so as to face a surface of the substrate on which a component is formed. 5. The display panel manufacturing apparatus according to claim 4, wherein the holding jig provided in the conveyance holding unit includes a connecting member capable of switching between a state in which the arm is fixedly held and a state in which the arm is movable. . The display panel manufacturing apparatus according to claim 4, wherein the holding jig provided in the conveyance holding unit includes a plurality of height position adjusting jigs that can change a height position of the substrate. The apparatus for manufacturing a display panel according to claim 3, wherein the substrate placement unit includes a plurality of divided members arranged in parallel to a side of the substrate bent. The apparatus for manufacturing a display panel according to claim 3, wherein the substrate mounting portion is formed by crossing a plurality of divided members. A substrate support member that supports a rectangular thin plate-shaped substrate and conveys the substrate to a predetermined position;
Substrate holding means for holding the substrate;
With
The display panel manufacturing apparatus, wherein the substrate support member changes the substrate into a predetermined bent shape. The substrate holding means has internal corner portions for holding and fixing the four corner portions diagonally of the substrate, and the diagonal distance between the internal corner portions is shorter than the diagonal length of the substrate. The display panel manufacturing apparatus according to claim 9, wherein the display panel manufacturing apparatus is a display panel. 10. The display panel manufacturing apparatus according to claim 9, wherein the substrate support member is disposed so as to place and support a surface of the substrate on which a component is formed. The substrate support member is in a state in which the substrate is bent when a surface on which the component of the substrate is formed is placed and supported on a center line parallel to either the long side or the short side of the substrate. The display panel manufacturing apparatus according to claim 9, wherein the display panel has a curved surface substantially equal to the curved surface. The display panel manufacturing apparatus according to claim 12, wherein the substrate support member includes a plurality of divided members arranged in parallel with the bent side of the substrate. 13. The display panel manufacturing apparatus according to claim 12, wherein the substrate support member is formed by crossing a plurality of divided members. Holding a rectangular thin plate-shaped substrate by a conveyance holding means, and conveying the substrate above the substrate holding means for fixing and holding the substrate;
Lowering the substrate with a surface on which the component of the substrate is formed facing a base member provided in the substrate holding means;
Changing the substrate to a predetermined bent shape;
Placing and holding the bent substrate on the substrate holding means;
A method for producing a display panel, comprising: Transporting the substrate on the side that forms the components of the rectangular thin plate-like substrate on the substrate support member and bending the substrate by its own weight, and transporting it above the substrate holding means;
Lowering the substrate with a surface on which the component of the substrate is formed facing a base member provided in the substrate holding means;
Placing and holding the bent substrate on the substrate holding means;
A method for producing a display panel, comprising: The substrate is held by the substrate holding means corresponding to the corner portions at four locations on the substrate and having internal corner portions arranged with a diagonal distance set shorter than the diagonal length of the substrate. The method of manufacturing a display panel according to claim 15 or 16, The substrate has a curved surface that is substantially equal to a bent state when a surface on which the component of the substrate is formed is placed and supported at a center line parallel to either the long side or the short side of the substrate. The display panel manufacturing method according to claim 15, wherein the substrate is held by the substrate support member.