JP2006221029A - Substrate processing equipment and control unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate processing equipment capable of stabilizing the atmosphere of drying processing and preventing the variation in a functional layer. <P>SOLUTION: A dryer 40 for drying the liquid object applied to a substrate 10 is equipped with a heater 55 for heating an inner wall 46 constituting a drying chamber 43. Also, the dryer 40 is connected to a pumping installation 56 for discharging the residual components of the liquid object in the drying chamber 43. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a substrate processing apparatus and a control apparatus.

  Conventionally, a droplet discharge method has been used in a manufacturing process of an electro-optical device such as an organic electroluminescence device (hereinafter referred to as an organic EL display). In the droplet discharge method, a functional material such as an organic light emitting material is used as a solvent from a droplet discharge head in order to form an organic EL layer (light emitting layer, hole transport layer, etc.) in a pixel formation region provided on a substrate. The dissolved liquid (or dispersed in a dispersion medium) is discharged into the pixel formation region. Further, an organic EL layer or the like is formed by evaporating a solvent (dispersion medium) contained in the liquid applied to the pixel formation region.

As a drying method for drying the liquid, a method of heating the substrate with a hot plate or the like, a method of spraying a heated dry gas onto the substrate, or the like is used. In Patent Document 1, a vacuum drying method is used in which the liquid is dried by reducing the pressure in the drying chamber.
JP 2004-223354 A

  However, in each drying process, there is a problem that the solvent evaporated from the liquid is discharged into the drying chamber, and this solvent remains in the space in the drying chamber or adheres to the inner wall. Residual components adhering to the inner wall by the already completed drying process leave the inner wall and diffuse into the drying chamber during the drying process for other substrates. As a result, the atmosphere in the drying chamber differs for each drying process, and the film thickness, film quality, film shape, and the like of the organic EL layer vary.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a substrate processing apparatus and a control apparatus that can stabilize the atmosphere of the drying process and prevent variations in functional layers. .

  The substrate processing apparatus of the present invention includes a drying chamber for drying a liquid material containing a functional material applied to a substrate, and a residual component of the liquid material adhered to the wall portion by heating a wall portion constituting the drying chamber. And a heating means for removing water.

  According to this, the substrate processing apparatus heats the drying chamber for drying the liquid material containing the functional material applied to the substrate and the wall portion constituting the drying chamber, and removes the residual component of the liquid material attached to the wall portion. Heating means for removing by heating. For this reason, when the substrate processing apparatus repeatedly performs the drying process, even if the liquid component remains in the drying chamber in the previous drying process, the heating of the wall portion by the heating means is performed in advance before the next drying process. By performing the above, it is possible to desorb and remove residual components attached to the wall. Accordingly, the drying chamber can be kept clean and the atmosphere in the drying chamber can be stabilized. For example, it is possible to prevent variations in the film thickness, film shape, film quality, and the like of the functional layer formed on the substrate from the functional material. Can do.

In this substrate processing apparatus, the heating means is provided on at least the side wall or the upper wall of the wall portion.
According to this, a heating means is provided with respect to at least a side wall or an upper wall among wall parts. For this reason, the location where the component of the liquid material evaporated from the substrate is likely to adhere can be heated.

In this substrate processing apparatus, the heating means is provided in the wall portion.
According to this, since a heating means is provided in the wall part, a wall part can be heated efficiently.
In the substrate processing apparatus, the residual component contained in the gas in the drying chamber is connected to a discharge unit that discharges the residual component from the drying chamber.

  According to this, the substrate processing apparatus is connected to the discharge means for discharging the residual components in the drying chamber from the drying chamber. For this reason, by driving the heating means and the discharge means, each component can be discharged efficiently without staying in the drying chamber.

In this substrate processing apparatus, the substrate processing apparatus is connected to a concentration measuring apparatus that measures the concentration of the residual component contained in the gas in the drying chamber.
According to this, the substrate processing apparatus is connected to a concentration measuring apparatus that measures the concentration of residual components vaporized in the drying chamber. For this reason, since the drying process can be performed only when the concentration of the residual component exceeds the reference value by the concentration measuring apparatus, the efficiency is good.

In this substrate processing apparatus, the liquid material applied to the substrate is vacuum-dried by reducing the pressure in the drying chamber.
According to this, the substrate processing apparatus performs vacuum drying of the liquid material applied to the substrate. For this reason, there is no material alteration of the components contained in the liquid material, and the variation of the film thickness and the like can be further suppressed by heating the wall portion by the heating means in advance.

  In this substrate processing apparatus, the substrate processing apparatus dries the liquid material containing the functional material for forming the functional layer, and forms the functional layer constituting the electro-optical device on the substrate.

  According to this, the substrate processing apparatus is an apparatus for manufacturing an electro-optical device. Therefore, it is possible to produce an electro-optical device with little color unevenness when displaying an image by preventing variations in the thickness of the functional layer and the like.

  The control device according to the present invention controls a process of drying a liquid material containing a functional material applied to a substrate in a drying chamber, and heats a wall portion constituting the drying chamber before the liquid material is dried. Is driven in advance, and the residual component of the liquid material adhering to the wall portion is removed by heating.

  According to this, the control device controls the process of drying the liquid material applied to the substrate in the drying chamber, and drives the heating means for heating the wall portion constituting the drying chamber in advance before the drying process, Residual components of the liquid adhering to the wall are removed by heating. Therefore, when the drying process is repeatedly performed in the drying chamber, even if the liquid component remains in the drying chamber in the previous drying process, the wall portion is heated by the heating means in advance before the next drying process. By performing, the residual component adhering to the wall portion can be desorbed and removed. Accordingly, the drying chamber can be kept clean and the atmosphere in the drying chamber can be stabilized. For example, it is possible to prevent variations in the film thickness, film shape, film quality, and the like of the functional layer formed on the substrate from the functional material. Can do.

In this control device, the heating unit is driven, and a discharge unit that discharges the residual component contained in the gas in the drying chamber from the drying chamber is driven.
According to this, the control device drives the discharge means for discharging the residual component contained in the gas in the drying chamber from the drying chamber. For this reason, by driving the heating means and the discharge means, each component can be discharged efficiently without staying in the drying chamber.

In the control device, the heating means is driven when the concentration of the residual component in the drying chamber measured by the concentration measuring device exceeds a reference value.
According to this, the control device drives the heating means when the concentration of the residual component measured by the concentration measuring device exceeds the reference value. For this reason, when the residual component concentration is less than the reference value, the removal of the residual component by heating is not performed, so that the efficiency is high.

In this control device, a pump device that depressurizes the drying chamber is driven to vacuum dry the liquid material applied to the substrate.
According to this, the control device drives the pump device that depressurizes the inside of the drying chamber, and performs vacuum drying of the liquid material applied to the substrate. For this reason, it is possible to prevent variations in the thickness, shape and the like of the functional layer formed by drying the liquid, and there is no material alteration.

  In this control device, when the pumping time or pumping speed of the pump device until the pressure is reduced to a predetermined pressure exceeds a reference value, the heating means and the pump device are driven to adhere to the wall portion. The residual component is removed by heating and the residual component is discharged.

  According to this, when the pumping time or pumping speed of the pump device exceeds the reference value, the control device determines that the liquid component remains in the drying chamber and drives the heating means and the pump device. . For this reason, when the residual component concentration is less than the reference value, the residual component is not removed by heating, which is efficient.

Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. FIG. 1 is a schematic diagram of an organic EL display as an electro-optical device.
As shown in FIG. 1, the organic EL display 1 includes a display unit 2 and a flexible circuit board 3. The flexible circuit board 3 is provided below the display unit 2.

  The display unit 2 includes a display area 2a at substantially the center thereof. In the display area 2 a, pixel formation areas 5 of n rows and m columns are partitioned and formed in a matrix by partitions 4 (see FIG. 2) formed on the display unit 2. In each pixel formation region 5, a red pixel R, a green pixel G, and a blue pixel B are formed. The red pixel R, the green pixel G, and the blue pixel B form one pixel P in one set in the horizontal direction (row direction) in FIG. The red pixel R, the green pixel G, and the blue pixel B are arranged in a line in the vertical direction (column direction) for each color. Further, m columns are formed in the display area 2a by repeatedly arranging the columns of each color in a predetermined order (red pixel R, green pixel G, blue pixel B).

  A pair of scanning line driving circuits 6 is formed in the non-display area 2 b of the display unit 2. An inspection circuit 7 is formed in the non-display area 2b and above the display area 2a.

  On the flexible circuit board 3, there are a data line driving circuit 8 for outputting a data signal for determining light emission luminance, and a control circuit 9 for outputting various control signals to each scanning line driving circuit 6 and the data line driving circuit 8. Is formed.

  FIG. 2 is a cross-sectional view of the main part of the organic EL display 1 taken along the line aa in FIG. As shown in FIG. 2, the organic EL display 1 includes a substrate 10 formed of a light transmissive material such as glass or a polymer film. A circuit formation layer 11 is formed on the substrate 10. Various circuit elements such as a thin film transistor 12 are formed on the circuit forming layer 11.

A plurality of partition walls 4 are formed in the display region 2 a on the circuit formation layer 11, and each partition wall 4 defines each pixel formation region 5. A pixel electrode 13 is formed at each bottom in each pixel formation region 5 partitioned by the partition wall 4, and the pixel electrode 13 is electrically connected to each thin film transistor 12 through a contact hole 14. The pixel electrode 13 is composed of a transparent electrode such as an indium-tin compound (ITO) or an indium oxide / zinc oxide based amorphous material.

  On the pixel electrode 13, an electro-optical layer 19 including a hole transport layer 17 as a functional layer and a red light emitting layer 18R, a green light emitting layer 18G, or a blue light emitting layer 18B as a functional layer is formed. ing.

  The hole transport layer 17 is made of, for example, an organic material such as a polythiophene derivative, a polypyrrole derivative, or a doped body thereof. The red light emitting layer 18R, the green light emitting layer 18G, and the blue light emitting layer 18B are made of an organic light emitting material capable of emitting fluorescence or phosphorescence.

  Each of the red light emitting layer 18R, the green light emitting layer 18G, and the blue light emitting layer 18B emits light of each color with a luminance corresponding to the carrier density injected from each hole transport layer 17. The emitted light of each color is emitted to the outside through the circuit forming layer 11 and the substrate 10.

In addition, a cathode 20 is formed at a position where each pixel electrode 13 faces through the electro-optic layer 19. The cathode 20 is formed up to the non-display area 2b over the partition wall 4.
The pixel electrode 13, the cathode 20, and the red light emitting layer 18R, the green light emitting layer 18G, or the blue light emitting layer 18B constitute the red pixel R, the green pixel G, or the blue pixel B, respectively. Yes. A sealing member 22 made of resin or the like is bonded to the outer peripheral edge of the circuit forming layer 11 through a dry space 21 so as to cover the entire surface of the cathode 20. FIG. 1 shows the display unit 2 in a state where the sealing member 22 is omitted.

  Next, an example of the manufacturing method of the display part 2 is demonstrated according to FIGS. First, as shown in FIG. 3, various circuit elements such as the thin film transistor 12 are formed on the substrate 10 using a known method, and an interlayer insulating film 25 is formed on the various circuit elements. Thereafter, a contact hole 14 penetrating to the source or drain of the thin film transistor 12 is formed, and the circuit forming layer 11 is formed.

  Further, the pixel electrode 13 is formed on the interlayer insulating film 25 by patterning a transparent conductive material. Subsequently, a photosensitive polyimide resin or the like is applied on the circuit forming layer 11, and the partition walls 4 are formed by exposure and development. Then, each pixel electrode 13 is subjected to hydrophilic treatment such as oxygen plasma treatment, and the partition walls 4 and the like are made liquid repellent by plasma treatment using a fluorine-based gas.

  Next, a liquid material for forming the hole transport layer 17 in the pixel formation region 5 is discharged using a droplet discharge device. As shown in FIG. 4, the droplet discharge device 30 includes a transport base 32 for mounting and fixing the substrate 10 that is moved by the transport unit 31 in the X-axis direction (X arrow direction and anti-X arrow direction). Yes. The droplet discharge device 30 includes a droplet discharge head 35 mounted on a carriage 34 that moves along the guide rail 33. Each droplet discharge head 35 temporarily stores a liquid material for forming the hole transport layer 17 supplied from the outside, and discharges the liquid material from a nozzle N (see FIG. 5). This liquid is composed of a functional material that is the above-described organic material that constitutes the hole transport layer 17, a solvent (or a dispersion medium that disperses the functional material), various regulators, and the like.

  Then, the droplet discharge head 35 discharges the liquid droplets Fa from the nozzle N to the substrate 10 on the transport table 32 as shown in FIG. In contrast, the liquid material is discharged. As a result, a droplet Fb (liquid material) adheres in each pixel formation region 5.

  Next, a first drying process for drying and solidifying the liquid droplets Fb for the hole transport layer 17 is performed. In this drying process, a drying apparatus 40 as a substrate processing apparatus shown in FIG. 6 is used. The drying device 40 includes a housing 42 constituted by a wall portion 41, and a drying chamber 43 for drying the liquid material applied in the pixel formation region 5 of the substrate 10 is provided in the housing 42. An opening 44 is formed on one side surface of the housing 42, and the substrate 10 can be carried into and out of the drying chamber 43 through the opening 44.

Further, a plate-like gate valve 45 is provided outside the housing 42 so that the opening 44 can be opened and closed, and the drying chamber 43 can be sealed by the gate valve 45.
The wall 41 constituting the housing 42 is constituted by an inner wall 46, an intermediate wall 47 and an outer wall 48. The inner wall 46 forms the upper surface, the lower surface, and the side surface of the drying chamber 43 and is formed of a material that can ensure the hermeticity of the drying chamber 43 such as stainless steel or glass. The inner wall 46 includes an exhaust part 49, a communication part 51, and an atmospheric pressure release hole 52 each having a through hole communicating with the drying chamber 43. An exhaust pipe 49 a is connected to the exhaust part 49, and a communication pipe 51 a is connected to the communication part 51. An atmospheric pressure release pipe 52 a is connected to the atmospheric pressure release hole 52, and a leak valve 54 provided outside the housing 42 is provided at an end thereof.

  The middle wall 47 is provided so as to surround the inner wall 46, and is made of a heat insulating material such as a refractory brick. A heater 55 is disposed in the middle wall 47 as a heating means. That is, the heater 55 is embedded in the middle wall 47 so as to surround the upper wall (not shown), the side wall 46a, and the lower wall 46b of the inner wall 46. The heater 55 is composed of a sheathed heater, for example, and is provided so as to heat the inner wall 46. The outer wall 48 provided on the outer side of the inner wall 47 is made of a metal plate or the like, and is provided mainly to ensure the strength of the housing 42.

  Further, the exhaust pipe 49a communicating with the drying chamber 43 is connected to a pump device 56 as a discharge means through a valve 56a. The pump device 56 has an exhaust capability of depressurizing the inside of the drying chamber 43 to about 1 Torr (133.3 Pa) or less via the exhaust pipe 49a. Then, when the substrate 10 is placed in the drying chamber 43 and the pump device 56 is driven with the gate valve 45 and the leak valve 54 closed, the drying chamber 43 is depressurized, and the inside of the pixel formation region 5 of the substrate 10 is reduced. The liquid solvent applied to the substrate is discharged into the drying chamber 43 to be vacuum dried.

  Similarly, a concentration measuring device 57 such as a mass spectrometer (MS) is connected to a communication pipe 51a that communicates with the drying chamber 43 and protrudes from the housing 42 via a valve 51b. The concentration measuring device 57 guides the gas in the drying chamber 43 into the device, and measures the concentration of the liquid component (hereinafter referred to as “residual component”) remaining in the drying chamber 43. The residual component to be measured is determined in advance, and may be, for example, a liquid solvent or dispersion medium, a functional material, or various regulators contained in the liquid.

  Further, the unit composed of the drying device 40, the pump device 56, and the concentration measuring device 57 is driven and controlled by the control device 60. The control device 60 is electrically connected to the drying device 40, the pump device 56, and the concentration measuring device 57, and drives the drying device 40, the pump device 56, and the concentration measuring device 57 based on a program stored in a ROM or the like.

The control device 60 drives the concentration measuring device 57 before each drying process to measure the concentration of the residual components in the drying chamber 43 in advance. Specifically, after the dried substrate 10 is already taken out from the drying chamber 43 and before the next drying process is started, the gate valve 45 and the leak valve 54 are closed, and the communication pipe 51a. The valve 51b provided in is opened. Then, the concentration measuring device 57 is driven to suck the gas in the drying chamber 43 through the communication pipe 51a, and the drying chamber 43
The concentration of residual components remaining in the gas inside is measured.

  That is, as described above, the drying device 40 vacuum-drys the liquid applied to the substrate 10 by driving the pump device 56, but after a part of the evaporated residual component is discharged into the drying chamber 43, Instead of being discharged through the exhaust pipe 49 a, it remains in the gas in the drying chamber 43 or adheres to the inner wall 46. Therefore, it is assumed that this residual component has an adverse effect on the variation in the film thickness and the like of the functional layer formed by the drying process under reduced pressure. For this reason, the concentration measuring device 57 measures the concentration of the residual component contained in the gas in the drying chamber 43 and confirms whether the concentration is less than the reference value.

  Based on the measurement result of the concentration measuring device 57, the control device 60 determines whether or not the concentration of the residual component is less than a predetermined reference value. If it is less than the reference value, the process proceeds to the drying process as it is without affecting the drying process of the substrate 10. If the reference value is exceeded, a heat removal process is performed.

  During the heat removal process, the control device 60 drives the heater 55 provided in the drying device 40 to heat the inner wall 46 to about 100 degrees. As a result, the residual component adhering to the inner wall 46 is detached from the inner wall 46 and re-released into the drying chamber 43.

  At the same time as driving the heater 55, the control device 60 drives the pump device 56. Thereby, the residual components in the gas in the drying chamber 43 are discharged to the outside through the exhaust pipe 49 a and the pump device 56.

  The control device 60 continues the concentration measurement of the residual component while driving the heater 55 and the pump device 56, and determines whether or not the concentration of the residual component has become less than the reference value. If the concentration of the residual component becomes less than the reference value as a result of the heat removal process, the control device 60 stops driving the heater 55 and the pump device 56. Then, the leak valve 54 is opened, the drying chamber 43 is opened to the atmosphere, and the temperature in the drying chamber 43 is set to a predetermined temperature.

  Thereafter, the gate valve 45 of the drying device 40 is opened, and the substrate 10 coated with the liquid material is carried into the drying chamber 43. Then, the control device 60 closes the gate valve 45, the leak valve 54 and the like to seal the drying chamber 43, and drives the pump device 56. Thereby, the inside of the drying chamber 43 is depressurized, and the liquid solvent applied to the substrate 10 evaporates. As a result, the functional material is solidified in the pixel formation region 5 and the hole transport layer 17 is formed on the pixel electrode 13 as shown in FIG.

  When the first drying process is thus completed, the control device 60 stops driving the pump device 56. Then, the substrate 10 on which the hole transport layer 17 is formed is unloaded from the drying device 40.

  Next, the red light emitting layer 18R, the green light emitting layer 18G, and the blue light emitting layer 18B are formed on the hole transport layer 17 formed in the pixel formation region 5 by using a droplet discharge device. . The droplet discharge device for forming each of the light emitting layers 18R, 18G, and 18B has substantially the same configuration as the droplet discharge device 30 shown in FIG.

The droplet discharge device 30 for forming each light emitting layer 18R, 18G, 18B supplies a liquid material corresponding to each color to the droplet discharge head 35. Each liquid includes a light emitting layer material as a functional material, a solvent (or dispersion medium) for dissolving these materials, various adjusting agents, and the like. Then, the droplet discharge device 30 has a liquid droplet Fc (see FIG. 8) corresponding to each color from a nozzle N (see FIG. 8) of the droplet discharge head 35 into each predetermined pixel formation region 5. Is to be discharged.

  As shown in FIG. 8, when the liquid droplets Fd are applied onto the hole transport layers 17 in all the pixel formation regions 5, the process proceeds to the second drying process. The drying apparatus for forming each light emitting layer 18R, 18G, 18B is an apparatus having the same configuration as the drying apparatus 40 shown in FIG. Further, in the second drying process, similarly to the first drying process, a heat removal process and a drying process for drying the liquid material are performed. In the heat removal process, the residual component contained in the liquid for forming the respective light emitting layers 18R, 18G, and 18B and remaining in the drying chamber 43 is measured by the concentration measuring device 57, and the residual component exceeds the reference value. In that case, the inner wall 46 of the drying device 40 is heated by the heater 55.

As a result, as shown in FIG. 9, each red light emitting layer 18 </ b> R, green light emitting layer 18 </ b> G, or blue light emitting layer 18 </ b> B is formed on the hole transport layer 17 in each pixel formation region 5.
Subsequently, a LiF layer, a Ca layer, an Al layer, and the like are stacked on the partition wall 4 and the light emitting layers 18R, 18G, and 18B by a vapor deposition method or the like, thereby forming the cathode 20. Thereafter, the display unit 2 is sealed by the sealing member 22 through the space 21. Further, the display unit 2 and the flexible circuit board 3 are connected.

According to the above embodiment, the following effects can be obtained.
(1) In the above-described embodiment, the heater 55 for heating and removing residual components attached to the inner wall 46 on the wall 41 constituting the drying chamber 43 of the drying apparatus 40 that performs vacuum drying by reducing the pressure inside the drying chamber 43. Was provided. For this reason, heating of the inner wall 46 by the heater 55 and exhaust of the pump device 56 for reducing the pressure in the drying chamber 43 are performed in advance before the drying process, so that residual components generated by the previous drying process are removed by heating. be able to. Therefore, since the drying chamber 43 can be in a clean state and the atmosphere in the drying chamber 43 can be stabilized, the film thickness and film thickness of the hole transport layer 17 and the light emitting layers 18R, 18G, and 18B formed on the substrate 10 can be increased. Variations in shape, film quality, etc. can be prevented.

  (2) In the above embodiment, the heater 55 is also provided on the side wall and the upper wall side of the inner wall 46, so that the portion where the liquid material evaporated from the substrate 10 is likely to adhere can be heated. Moreover, since the heater 55 is provided in the wall part 41, the heat of the heater 55 can be efficiently propagated to the inner wall 46.

  (3) In the above embodiment, the drying device 40 is connected to the concentration measuring device 57 that measures the residual component concentration in the drying chamber 43. For this reason, since the drying process can be performed only when the concentration of the residual component in the drying chamber 43 exceeds the reference value, the increase in the number of steps can be suppressed, and the efficiency is good.

  (4) In the above embodiment, the heater 55 is provided in the drying device 40 that vacuum-drys the liquid material of the substrate 10. Therefore, the atmosphere in the drying chamber 43 can be stabilized by the heat removal process using the heater 55 while performing vacuum drying that can prevent the material from being altered, and thus the hole transport layer 17 and the light emitting layers 18R and 18G. , 18B, variation in film thickness, film shape, film quality, etc. can be further suppressed.

  (5) In the above embodiment, the drying device 40, the pump device 56, and the control device 60 are devices for manufacturing the organic EL display 1. Therefore, by preventing variations in the film thickness of the hole transport layer 17 and the light emitting layers 18R, 18G, and 18B, it is possible to manufacture the organic EL display 1 with less color unevenness during image display. Especially effective.

In addition, you may change this embodiment as follows.
The heating means for heating the wall 41 (inner wall 46) may be a heater 70 such as a sheathed heater or a heat tape provided so as to surround the inner wall 46 as shown in FIG.

  In the above embodiment, before the drying process for drying the liquid material of the substrate 10, a temporary drying process is performed using the drying device 40 to form a liquid material having a high viscosity in the pixel formation region 5. Also good. And you may make it perform the above-mentioned heat removal process before this temporary drying.

  The droplet discharge device for forming each red light emitting layer 18R, green light emitting layer 18G and blue light emitting layer 18B is a device for forming the red light emitting layer 18R and the green light emitting layer 18G. And a device for forming the blue light emitting layer 18B. Then, the heat removal process and the drying process by the drying apparatus 40 may be performed between the droplet discharge operations of the respective apparatuses.

  The drying device 40 may have a structure in which the inner wall 47 and the outer wall 48 are omitted, and may not have a multilayer structure. That is, a structure in which the heater 55 is embedded in a single-layer wall portion made of ceramics or the like may be used, as long as the wall to which residual components may adhere is heated by the heater 55.

  The control device 60 drives the drying device 40, the pump device 56, and the concentration measuring device 57, but only the drying device 40 or the drying device 40 and either the pump device 56 or the concentration measuring device 57 is operated. You may make it drive.

  In the above embodiment, the concentration measuring device 57 is a mass spectrometer. However, the measuring device may be selected depending on residual components such as an electro-optical system analyzer, an absorptiometric analyzer, and an emission spectroscopic analyzer.

  In the above embodiment, the concentration measuring device 57 measures the concentration of the residual component of the gas in the drying chamber 43 in a state where the heater 55 is not driven. Also good. When the concentration exceeds the reference value, the heater 55 and the pump device 56 may be driven for a predetermined time to perform the heat removal process.

  Although the pump device 56 is used as a discharge means for exhausting residual components in the drying chamber 43, a device such as a fan may be used. The pump device 56 for reducing the pressure in the drying chamber 43 and the discharging means for discharging the residual components in the drying chamber 43 may be separate devices.

  The heater 55 may be provided outside or inside the wall portion 41 (inside the drying chamber 43). Further, the heater 55 may be provided only on the side wall 46a, upper wall, or lower wall 46b side of the inner wall 46.

  In the above embodiment, the heat removal process is performed based on the measurement result of the concentration measuring device 57, but it may be determined whether the heat removal process is performed based on other methods. For example, when a residual component remains in the drying chamber 43, the time until the pump device 56 reaches a predetermined degree of vacuum becomes longer. Therefore, the pump device 56 that reduces the pressure in the drying chamber 43 to a predetermined pressure. When the exhaust time is longer than a predetermined time (reference value), the heat removal process may be performed. Alternatively, the heat removal process may be performed when the exhaust speed of the pump device 56 controlled to reduce the pressure to a predetermined pressure in a predetermined time exceeds a predetermined speed (reference value). Alternatively, when the pressure in the drying chamber 43 is not reduced to a predetermined pressure, the heat removal process may be performed. If it does in this way, a heat removal process can be performed with simple equipment.

  In the above embodiment, the drying device 40 performs vacuum drying. However, the drying device 40 is a device for drying by spraying a dry gas onto the substrate, a drying device for evaporating the solvent by microwaves, laser light irradiation, or the like. The present invention may be embodied in a non-heating apparatus or a heating apparatus that heats the substrate by a hot plate or the like. The non-heating method is a drying method other than the method of directly heating the substrate with a hot plate or the like.

  In the above embodiment, the drying device 40 and the control device 60 are devices that manufacture the organic EL display 1, but may be embodied in other electro-optical devices or devices that manufacture other products. For example, the present invention may be embodied in a liquid crystal display module manufacturing apparatus. Further, the display module manufacturing apparatus may include a field effect display (FED, SED, or the like) that includes a planar electron-emitting device and uses light emission of a fluorescent material by electrons emitted from the device.

The schematic diagram of the organic electroluminescent display of this embodiment. Sectional drawing of the principal part of the organic EL display. Sectional drawing of the principal part of the organic EL display of a manufacturing process. The top view of the droplet discharge apparatus used for a manufacturing process. Sectional drawing of the principal part of the organic EL display of a manufacturing process. The schematic diagram of the unit provided with the drying apparatus used for a manufacturing process. Sectional drawing of the principal part of the organic EL display of a manufacturing process. Sectional drawing of the principal part of the organic EL display of a manufacturing process. Sectional drawing of the principal part of the organic EL display of a manufacturing process. The schematic diagram of the drying apparatus of another example.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Organic EL display as an electro-optical device, 10 ... Board | substrate, 17 ... Hole transport layer as a functional layer, 18R ... Red light emitting layer 18R, 18G as a functional layer ... Green light emitting layer 18G, 18B as a functional layer ... Blue light emitting layer 18B as functional layer, 40 ... drying device as substrate processing apparatus, 41 ... wall portion, 43 ... drying chamber, 46 ... inner wall, 46a ... side wall, 55, 70 ... heater as heating means, 56 ... discharge Pump device as means, 57... Concentration measuring device, 60.

Claims (12)

A drying chamber for drying the liquid material containing the functional material applied to the substrate;
A substrate processing apparatus, comprising: a heating unit that heats a wall portion constituting the drying chamber to remove a residual component of the liquid material attached to the wall portion. The substrate processing apparatus according to claim 1,
The substrate processing apparatus, wherein the heating means is provided on at least a side wall or an upper wall of the wall portion. In the substrate processing apparatus according to claim 1 or 2,
The substrate processing apparatus, wherein the heating means is provided in the wall portion. In the substrate processing apparatus of any one of Claims 1-3,
A substrate processing apparatus, wherein the substrate processing apparatus is connected to a discharge means for discharging the residual component contained in the gas in the drying chamber from the drying chamber. In the substrate processing apparatus of any one of Claims 1-4,
A substrate processing apparatus connected to a concentration measuring device for measuring the concentration of the residual component contained in the gas in the drying chamber. In the substrate processing apparatus of any one of Claims 1-5,
A substrate processing apparatus, wherein the liquid material applied to the substrate is vacuum-dried by reducing the pressure in the drying chamber. In the substrate processing apparatus of any one of Claims 1-6,
The substrate processing apparatus is characterized in that the liquid material containing the functional material for forming a functional layer is dried to form the functional layer constituting the electro-optical device on the substrate. . Control the process of drying the liquid material containing the functional material applied to the substrate in the drying chamber,
Before the liquid material is dried, the heating means for heating the wall portion constituting the drying chamber is driven in advance so that the residual component of the liquid material adhering to the wall portion is removed by heating. apparatus. The control device according to claim 8, wherein
Driving the heating means;
The control apparatus which drives the discharge means which discharges | emits the said residual component contained in the gas in the said drying chamber from the said drying chamber. The control device according to claim 8 or 9,
A control device that drives the heating means when the concentration of the residual component in the drying chamber measured by the concentration measuring device exceeds a reference value. In the control device according to any one of claims 8 to 10,
A control device, wherein a pump device for depressurizing the drying chamber is driven to vacuum dry the liquid material applied to the substrate. The control device according to claim 11,
When the pumping time or pumping speed of the pump device until the pressure is reduced to a predetermined pressure exceeds a reference value, the heating means and the pump device are driven to remove the residual components attached to the wall by heating. And a controller for discharging the residual component.

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