JP2006251701A - Liquid crystal panel and electronic appliance - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal panel which has excellent light fastness and an excellent aligning property (a function to control an alignment state of a liquid crystal material), and also to provide an electronic appliance equipped with this kind of the liquid crystal panel. <P>SOLUTION: The liquid crystal panel has a liquid crystal layer 2, and inorganic alignment layers 3A, 3A' formed of an inorganic material, and is characterized by having affinity improving films 4A, 4A' comprising a material with six or more dielectric constant disposed on surfaces of the inorganic alignment layers opposite to surfaces opposing the liquid crystal layer. A material constituting the affinity improving film is an inorganic material. Average thickness of the affinity improving film is 0.05-0.5 μm. The inorganic alignment layer is equipped with regular protrusions and recessions on the surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a liquid crystal panel and an electronic device.

A projection display device that projects an image on a screen is known. In this projection display device, a liquid crystal panel is mainly used for image formation.
Such a liquid crystal panel usually has an alignment film set so as to develop a predetermined pretilt angle in order to align liquid crystal molecules in a certain direction. In order to manufacture these alignment films, a method of rubbing a thin film made of a polymer compound such as polyimide formed on a substrate with a cloth such as rayon in one direction is known (for example, , See Patent Document 1).

However, an alignment film made of an organic material such as polyimide may cause photodegradation depending on the use environment, use time, and the like. When such photodegradation occurs, constituent materials such as the alignment film and the liquid crystal layer are decomposed, and the decomposition products may adversely affect the performance of the liquid crystal.
In order to solve such a problem, there is an attempt to employ an alignment film (inorganic alignment film) made of an inorganic material (see, for example, Patent Document 2).
However, the liquid crystal panel provided with the inorganic alignment film is superior in light resistance and heat resistance as compared with a liquid crystal panel provided with an alignment film made of an organic material, but has a problem that the ability to align liquid crystal molecules is low.

JP-A-10-161133 Japanese Patent Laid-Open No. 5-80336

  An object of the present invention is to provide a liquid crystal panel that is excellent in light resistance and excellent in alignment characteristics (function to regulate the alignment state of a liquid crystal material), and to provide an electronic device including such a liquid crystal panel. is there.

Such an object is achieved by the present invention described below.
The liquid crystal panel of the present invention is a liquid crystal panel having a liquid crystal layer and an inorganic alignment film composed of an inorganic material,
An affinity improving film made of a material having a relative dielectric constant of 6 or more is provided on a surface opposite to the surface facing the liquid crystal layer of the inorganic alignment film.
Thereby, it is possible to provide a liquid crystal panel having excellent light resistance and excellent alignment characteristics (function of regulating the alignment state of the liquid crystal material).

In the liquid crystal panel of the present invention, the material constituting the affinity improving film is preferably an inorganic material.
Thereby, it can be made more excellent in light resistance.
In the liquid crystal panel of the present invention, the average thickness of the affinity improving film is preferably 0.05 to 0.5 μm.
Thereby, liquid crystal molecules can be arranged in a more stable state.

In the liquid crystal panel of the present invention, the inorganic alignment film preferably has regular irregularities on the surface thereof.
Thereby, the attracted liquid crystal molecules are aligned along the unevenness of the inorganic alignment film by the affinity improving film, and as a result, the alignment state of the liquid crystal molecules can be more reliably regulated.
In the liquid crystal panel of the present invention, the inorganic alignment film preferably has a surface roughness Rz of 2 to 20 nm.
Thereby, the alignment state of a liquid crystal molecule can be controlled more effectively.

In the liquid crystal panel of the present invention, the inorganic alignment film is composed of a plurality of columnar crystals mainly composed of the inorganic material,
The columnar crystal is preferred for the surface direction of the inorganic alignment film is obtained by orienting a state inclined by a predetermined angle theta _c.
As a result, the inorganic alignment film has regular and predetermined irregularities on the surface thereof, and the alignment state of the liquid crystal molecules is more preferably regulated.

The liquid crystal panel of the present invention, the predetermined angle theta _c is preferably 30~60 °.
Thereby, a more appropriate pretilt angle can be expressed, and the alignment state of the liquid crystal molecules can be more suitably regulated.
In the liquid crystal panel of the present invention, the inorganic alignment film preferably has an average thickness of 0.02 to 0.3 μm.
Thereby, the orientation of liquid crystal molecules can be regulated more efficiently.
An electronic apparatus according to the present invention includes the liquid crystal panel according to the present invention.
Thereby, an electronic device with high reliability can be provided.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.
First, prior to the description of the method for forming the inorganic alignment film, the liquid crystal panel of the present invention will be described.
FIG. 1 is a schematic longitudinal sectional view showing a first embodiment of the liquid crystal panel of the present invention, and FIG. 2 is a longitudinal sectional view showing an example of an inorganic alignment film provided in the liquid crystal panel of the present invention.
As shown in FIG. 1, the liquid crystal panel 1A includes a liquid crystal layer 2, inorganic alignment films 3A and 3A ′, affinity improving films 4A and 4A ′, transparent conductive films (electrodes) 5 and 6, and a polarizing film 7A. , 7A ′ and substrates 9 and 10.
The liquid crystal layer 2 is mainly composed of a liquid crystal material.

  As the liquid crystal material constituting the liquid crystal layer 2, any liquid crystal material may be used as long as it can be aligned, such as nematic liquid crystal and smectic liquid crystal. However, in the case of a TN type liquid crystal panel, a material that forms nematic liquid crystal is preferable. For example, phenylcyclohexane derivative liquid crystal, biphenyl derivative liquid crystal, biphenyl cyclohexane derivative liquid crystal, terphenyl derivative liquid crystal, phenyl ether derivative liquid crystal, phenyl ester derivative liquid crystal, bicyclohexane derivative liquid crystal, azomethine derivative liquid crystal, azoxy derivative liquid crystal, pyrimidine derivative liquid crystal, dioxane Examples include derivative liquid crystals and cubane derivative liquid crystals. Furthermore, liquid crystal molecules in which a fluorine-based substituent such as a monofluoro group, a difluoro group, a trifluoro group, a trifluoromethyl group, a trifluoromethoxy group, or a difluoromethoxy group is introduced into these nematic liquid crystal molecules are also included.

Inorganic alignment films 3A and 3A ′ are disposed on both surfaces of the liquid crystal layer 2, and an affinity improving film is provided on the upper surface side of the inorganic alignment film 3A (the surface opposite to the surface facing the liquid crystal layer 2). 4A is arranged. Similarly, an affinity improving film 4A ′ is disposed on the lower surface side of the alignment film 3A ′ (the surface side opposite to the surface facing the liquid crystal layer 2).
Further, the inorganic alignment film 3A and the affinity improving film 4A are formed on a base material 100 composed of a transparent conductive film 5 and a substrate 9 as will be described later, and the inorganic alignment film 3A ′ and the affinity improving film 4A ′. Is formed on a base material 101 composed of a transparent conductive film 6 and a substrate 10 as will be described later.

First, prior to the description of the inorganic alignment films 3A and 3A ′, the affinity improving films 4A and 4A ′ will be described.
The affinity improving films 4A and 4A ′ are made of a material having a dielectric constant of 6 or more.
By the way, the liquid crystal panel provided with the conventional inorganic alignment film has a problem that it is difficult to regulate the alignment state of the liquid crystal molecules and the ability to align the liquid crystal molecules is low.

  Therefore, as a result of intensive studies to solve such problems, the present inventor has found that an affinity formed of a material having a dielectric constant of 6 or more on the surface opposite to the surface facing the liquid crystal layer of the inorganic alignment film. By providing the improvement film, the liquid crystal molecules can be easily aligned at a desired pretilt angle while having excellent light resistance, and have excellent alignment characteristics (function to regulate the alignment state of the liquid crystal molecules). I found out that it would be a panel. This is considered to be because the liquid crystal molecules are attracted to the inorganic alignment film by the affinity improving film and the liquid crystal molecules are aligned in a stable state.

Thus, in the present invention, the affinity improving film is made of a material having a dielectric constant of 6 or more, and more preferably made of a material having a dielectric constant of 8 or more. Thereby, the above-mentioned effect becomes more remarkable.
Specific examples of materials for forming such affinity improving films 4A and 4A ′ include LiNbO ₃ , PbTiO ₃ , Pb (Zr, Ti) O ₃ , PbNbO ₆ , ZnO, Al ₂ O ₃ , Inorganic materials such as Ta ₂ O ₃ , Si ₃ N ₄ , and AlN, and organic materials having polar groups such as carbonyl group, cyano group, hydroxyl group, amino group, nitro group, and fluoro group, etc. Alternatively, two or more kinds can be used in combination.

In particular, when an inorganic material is used, the light resistance of the liquid crystal panel 1A can be made particularly excellent. Moreover, when manufacturing a liquid crystal panel, continuous film-forming with the inorganic orientation film mentioned later is possible.
The average thickness of the affinity improving films 4A and 4A ′ is preferably 0.01 to 1.0 μm, and more preferably 0.03 to 0.5 μm. If the average thickness is less than the lower limit, it may be difficult to dispose liquid crystal molecules in a sufficiently stable state depending on the type of material constituting the affinity improving films 4A and 4A ′. On the other hand, when the average thickness exceeds the upper limit value, the drive voltage increases and the power consumption may increase.

The affinity improving films 4A and 4A ′ as described above are formed by, for example, a vapor deposition method such as a vapor deposition method, a sputtering method, a CVD method, or an ion plating method, or a coating method such as spin coating or immersion. Can do.
The inorganic alignment films 3A and 3A ′ have a function of regulating the alignment state (when no voltage is applied) of the liquid crystal molecules constituting the liquid crystal layer 2.

As shown in FIG. 2, the inorganic alignment films 3A and 3A ′ have regular irregularities on the surface thereof. By having such regular irregularities, the liquid crystal molecules attracted by the affinity improving films 4A and 4A ′ as described above are aligned along the irregularities of the inorganic alignment films 3A and 3A ′. As a result, the alignment state of the liquid crystal molecules can be more reliably regulated.
The surface roughness Rz (ten-point average roughness defined in JIS B 0601) of the inorganic alignment films 3A and 3A ′ is preferably 2 to 20 nm, and more preferably 2 to 8 nm. When the surface roughness Rz is in such a range, the alignment state of the liquid crystal molecules can be more effectively regulated.

Such inorganic alignment films 3A and 3A ′ can be formed by, for example, a method as described later, and in this embodiment, as shown in FIG. to the plane direction of 3A ', it has a configuration in which are arranged at a predetermined inclined state at a predetermined angle theta _c in the direction of the (constant). By adopting such a configuration, the inorganic alignment films 3A and 3A ′ are provided with irregularities having regular and predetermined shapes on the surface thereof, and the alignment state of the liquid crystal molecules is more preferably regulated. It will be a thing.

The inclination θ _c of the columnar crystals with respect to the plane direction of the inorganic alignment films 3A and 3A ′ is preferably 30 to 60 °, and more preferably 40 to 50 °. Thereby, a more appropriate pretilt angle can be expressed, and the alignment state of the liquid crystal molecules can be more suitably regulated.
Moreover, it is preferable that the width | variety of such a columnar crystal is 10-40 nm, and it is more preferable that it is 10-20 nm. Thereby, a more appropriate pretilt angle can be expressed, and the alignment state of the liquid crystal molecules can be more suitably regulated.

The inorganic alignment films 3A and 3A ′ are mainly composed of an inorganic material. In general, inorganic materials have excellent chemical stability compared to organic materials, and therefore have particularly excellent light resistance compared to conventional alignment films composed of organic materials. .
Moreover, it is preferable that the inorganic material which comprises inorganic alignment film 3A, 3A 'can be crystallized in a column shape as shown in FIG. Thereby, the alignment state (pretilt angle) of the liquid crystal molecules constituting the liquid crystal layer 2 (when no voltage is applied) can be more easily regulated.

As the inorganic material as described above, for example, silicon oxide such as SiO ₂ or SiO, metal oxide such as MgO, ITO, or the like can be used. Among these, it is particularly preferable to use silicon oxide. Thereby, the obtained liquid crystal panel has more excellent light resistance.
For example, when silicon oxide is used as a material constituting the inorganic alignment films 3A and 3A ′, the film density of the inorganic alignment films 3A and 3A ′ is 1.0 to 2.0 g / cm ^3. Preferably, it is 1.5 to 1.8 g / cm ³ . Thereby, the effect by providing affinity improvement film | membrane 4A, 4A 'can be made more remarkable.

  The inorganic alignment films 3A and 3A 'have an average thickness of preferably 0.02 to 0.3 [mu] m, and more preferably 0.02 to 0.08 [mu] m. If the average thickness is less than the lower limit, it may be difficult to make the pretilt angle at each portion sufficiently uniform. On the other hand, when the average thickness exceeds the upper limit value, the drive voltage increases and the power consumption may increase.

A transparent conductive film (transparent electrode) 5 is disposed on the outer surface side of the affinity improving film 4A (the surface side opposite to the surface facing the inorganic alignment film 3A). Similarly, a transparent conductive film (transparent electrode) 6 is disposed on the outer surface side of the affinity improving film 4A ′ (the surface side opposite to the surface facing the inorganic alignment film 3A ′).
The transparent conductive films 5 and 6 have a function of driving (changing the orientation of) the liquid crystal molecules of the liquid crystal layer 2 by energizing them.

Control of energization between the transparent conductive films 5 and 6 is performed by controlling a current supplied from a control circuit (not shown) connected to the transparent conductive film.
The transparent conductive films 5 and 6 have conductivity, and are made of, for example, indium tin oxide (ITO), indium oxide (IO), tin oxide (SnO ₂ ), or the like.
On the outer surface side of the transparent conductive film 5 (surface side opposite to the surface facing the inorganic alignment film 3A), a substrate 9 is disposed. Similarly, the substrate 10 is disposed on the outer surface side of the transparent conductive film 6 (the surface side opposite to the surface facing the inorganic alignment film 3A ′).

  The substrates 9 and 10 have a function of supporting the liquid crystal layer 2, the inorganic alignment films 3A and 3A ', the transparent conductive films 5 and 6, and the polarizing films 7A and 8A described later. The constituent materials of the substrates 9 and 10 are not particularly limited, and examples thereof include glass such as quartz glass and plastic materials such as polyethylene terephthalate. Among these, it is particularly preferable that the glass is made of glass such as quartz glass. Thereby, it is possible to obtain a liquid crystal panel which is less likely to be warped or bent and which is more stable. In FIG. 1, the description of the sealing material, the wiring, etc. is omitted.

A polarizing film (polarizing plate, polarizing film) 7A is arranged on the outer surface side of the substrate 9 (the surface side opposite to the surface facing the transparent conductive film 5). Similarly, a polarizing film (polarizing plate, polarizing film) 8A is disposed on the outer surface side of the substrate 10 (the surface side opposite to the surface facing the transparent conductive film 6).
Examples of the constituent material of the polarizing films 7A and 8A include polyvinyl alcohol (PVA). Moreover, as a polarizing film, you may use what doped the said material with iodine.

As a polarizing film, what extended | stretched the film comprised with the said material to the uniaxial direction can be used, for example.
By disposing the polarizing films 7A and 8A as described above, it is possible to more reliably control the light transmittance by adjusting the energization amount.
The direction of the polarization axis of the polarizing films 7A and 8A is usually determined according to the alignment direction of the inorganic alignment films 3A and 3A ′.

In this embodiment, the inorganic alignment film has a shape as shown in FIG. 2, but is not limited to this, and any shape is possible as long as the liquid crystal molecules are stably aligned. It may be.
Next, an example of a method for forming the affinity improving film and the inorganic alignment film as described above will be described.
FIG. 3 is a schematic diagram of a film forming apparatus used for forming the affinity improving film and the inorganic alignment film.
First, the film forming apparatus will be described.

An ion beam sputtering apparatus S100 shown in FIG. 3 includes an ion source S1 that irradiates an ion beam, a target S2 that generates (irradiates) sputtered particles by irradiation with the ion beam, a vacuum chamber S3, and a pressure in the vacuum chamber S3. And an exhaust pump S4 for controlling.
The ion source S1 has a filament S11 and an extraction electrode S12 therein. In addition, a gas supply source S13 that supplies gas into the ion source S1 is connected to the ion source S1.

The ion beam sputtering apparatus S100 has a base material holder S5 for fixing the base material on which the affinity improving film and the inorganic alignment film are formed in the vacuum chamber S3. The base material holder S5 is attached to the target S2. Are relatively movable or rotatable.
When an ion beam sputtering apparatus having the configuration shown in the drawing is used, the affinity improving film and the inorganic alignment film are formed as follows. Hereinafter, a case where the affinity improving film 4A and the inorganic alignment film 3A are formed will be typically described. Moreover, in the following description, the case where the affinity improvement film | membrane comprised with the inorganic material is formed is demonstrated.

1. The base material 100 is installed in the base material holder S5 in the vacuum chamber S3. The target S2 is made of an inorganic material for forming the above-described affinity improving film.
2. The inside of the vacuum chamber S3 is depressurized by the exhaust pump S4.
3. Gas is supplied from the gas supply source S13 into the ion source S1.

4). A current (ion beam current) is supplied to the filament S11 from a power source (not shown) to generate thermoelectrons.
5. The generated thermoelectrons collide with the introduced gas, the gas is ionized, and plasma is generated.
6). An ion acceleration voltage is applied to the extraction electrode S12 to accelerate the ions, and the target S2 is irradiated as an ion beam.

7). The target S2 irradiated with the ion beam irradiates the substrate 100 with sputtered particles, and the incident and deposition of the sputtered particles on the substrate 100 proceeds, and the affinity improving film 4A is formed on the substrate 100. Is done.
8). The target S2 is exchanged for one made of an inorganic material for forming the inorganic alignment film.

9. The inside of the vacuum chamber S3 is depressurized by the exhaust pump S4.
10. Gas is supplied from the gas supply source S13 into the ion source S1.
11. A current (ion beam current) is supplied to the filament S11 from a power source (not shown) to generate thermoelectrons.
12 The generated thermoelectrons collide with the introduced gas, the gas is ionized, and plasma is generated.

13. An ion acceleration voltage is applied to the extraction electrode S12 to accelerate the ions, and the target S2 is irradiated as an ion beam.
14 The target S2 irradiated with the ion beam irradiates the substrate 100 with sputtered particles, and the incident and deposition of the sputtered particles on the affinity improving film 4A proceeds, and the inorganic alignment film is formed on the affinity improving film 4A. 3A is formed.

Thus, when the affinity improving film 4A is made of an inorganic material, the affinity improving film and the inorganic alignment film can be continuously formed in the same apparatus.
2A and 2B, the sputtered particles generated from the target S2 are inclined by a predetermined angle (irradiation angle) θ _{s with} respect to the direction perpendicular to the surface on which the inorganic alignment film 3A is formed. It is formed by irradiation.
The inorganic alignment film 3A thus formed can be provided with irregularities regularly on the surface. That is, as shown in FIG. 2, the columnar crystals can be arranged in a state inclined in a certain direction.

The irradiation angle θ _s of the sputtered particles when forming the inorganic alignment film 3A is preferably 40 ° or more, more preferably 50 to 87 °, and further preferably 70 to 87 °. Thereby, it is possible to more suitably form an inorganic alignment film in which columnar crystals are arranged in an inclined state, and as a result, the obtained inorganic alignment film has a more excellent function of regulating the alignment state of liquid crystal molecules. Become. On the other hand, if the irradiation angle θ _s is too small, a sufficient pretilt angle cannot be obtained, and the function of regulating the alignment state of liquid crystal molecules may not be sufficiently obtained. On the other hand, if the irradiation angle θ _s is too large, there may be a problem that the production efficiency decreases.

The pressure in the vacuum chamber S3, that is, the pressure of the atmosphere when forming the inorganic alignment film 3A is preferably 10 ⁻² Pa or less. Thereby, the inorganic alignment film 3A in which columnar crystals are arranged can be obtained more suitably. If the pressure in the vacuum chamber S3 is too high, the straightness of the irradiated sputtered particles may be deteriorated, and as a result, the columnar crystals may not be sufficiently formed. In addition, the crystal orientation may not be sufficiently aligned.
The gas supplied from the gas supply source S13 into the ion source S1 is not particularly limited as long as it is a rare gas, but among them, argon gas is particularly preferable. Thereby, the formation speed (sputter rate) of the inorganic alignment film 3A can be improved.

  The voltage applied to the filament S11 is not particularly limited, but is preferably 50 to 80V, and more preferably 60 to 70V. Thereby, it is possible to more suitably form an inorganic alignment film in which columnar crystals are arranged in an inclined state. On the other hand, when the voltage applied to the filament S11 is less than the lower limit value, the sputtering rate is lowered, and sufficient productivity may not be obtained. On the other hand, when the voltage applied to the filament S11 exceeds the upper limit, the orientation of the liquid crystal molecules tends to vary.

  The ion acceleration voltage applied to the extraction electrode S12 is not particularly limited, but is preferably 800 to 3000V, and more preferably 1500 to 2300V. Thereby, it is possible to more suitably form an inorganic alignment film in which columnar crystals are arranged in an inclined state. On the other hand, when the ion acceleration voltage is less than the lower limit value, the sputtering rate is lowered, and sufficient productivity may not be obtained. On the other hand, when the ion acceleration voltage exceeds the upper limit, the orientation of liquid crystal molecules tends to vary.

  The ion beam current of the irradiated ion beam is preferably 50 to 500 mA. Thereby, it is possible to more suitably form an inorganic alignment film in which columnar crystals are arranged in an inclined state. On the other hand, when the ion beam current is less than the lower limit value, the sputtering rate is lowered and sufficient productivity may not be obtained. On the other hand, when the ion beam current exceeds the upper limit, the orientation of liquid crystal molecules tends to vary.

  The temperature of the base material 100 when forming the inorganic alignment film 3A is preferably relatively low. Specifically, the temperature of the substrate 100 is preferably 150 ° C. or less, more preferably 80 ° C. or less, and further preferably 20 to 50 ° C. Thereby, the phenomenon in which the sputtered particles attached to the substrate 100 move from the position where they are first attached, that is, migration, can be suppressed, and the inorganic alignment film 3A in which columnar crystals are arranged can be obtained more suitably. In addition, you may cool as needed so that the temperature of the base material 100 at the time of forming inorganic alignment film 3A may become the thing of the said range.

Note that, similarly to the inorganic alignment film 3A, the affinity improving film 4A is also irradiated with sputtered particles inclined at a predetermined angle (irradiation angle) θ _{s with} respect to the direction perpendicular to the surface on which the affinity improving film is formed. May be formed. By forming the affinity improving film 4A in this way, regular irregularities are also formed on the surface of the affinity improving film 4A, and as a result, the shape of the surface of the inorganic alignment film 3A can be more easily controlled. Can do.

Although the case where the affinity improving film 4A and the inorganic alignment film 3A are formed has been described above, the affinity improving film 4A ′ and the inorganic alignment film 3A ′ can be formed in the same manner.
Next, a second embodiment of the liquid crystal panel of the present invention will be described.
FIG. 4 is a schematic longitudinal sectional view showing a second embodiment of the liquid crystal panel of the present invention. Hereinafter, the liquid crystal panel 1B shown in FIG. 5 will be described with a focus on differences from the first embodiment, and description of similar matters will be omitted.

  As shown in FIG. 4, the liquid crystal panel (TFT liquid crystal panel) 1B is joined to the TFT substrate (liquid crystal drive substrate) 17, the affinity improving film 4B joined to the TFT substrate 17, and the affinity improving film 4B. Inorganic alignment film 3B, liquid crystal panel counter substrate 12, liquid crystal panel counter substrate 12, affinity improving film 4B ′ bonded to liquid crystal panel counter substrate 12, inorganic alignment film 3B ′ bonded to affinity improving film 4B ′, inorganic The liquid crystal layer 2 made of liquid crystal sealed in the gap between the alignment film 3B and the inorganic alignment film 3B ′ and the outer surface side of the TFT substrate (liquid crystal driving substrate) 17 (opposite to the surface facing the affinity improving film 4B) The polarizing film 7B bonded to the surface side) and the polarizing film 8B bonded to the outer surface side of the liquid crystal panel counter substrate 12 (the surface opposite to the surface facing the affinity improving film 4B ′). is doing. The inorganic alignment films 3B and 3B ′ are the same as the inorganic alignment films 3A and 3A ′ described in the first embodiment, and the affinity improving films 4B and 4B ′ are compatible with those described in the first embodiment. The polarizing films 7B and 8B are the same as the polarizing films 7A and 8A described in the first embodiment.

The counter substrate 12 for the liquid crystal panel is provided on the microlens substrate 11, the surface layer 114 of the microlens substrate 11, the black matrix 13 in which the opening 131 is formed, and the black matrix 13 on the surface layer 114 so as to cover the black matrix 13. A transparent conductive film (common electrode) 14.
The microlens substrate 11 includes a microlens concave substrate (first substrate) 111 provided with a plurality of (many) concave portions (microlens concave portions) 112 having a concave curved surface, and the microlens concave substrate 111. And a surface layer (second substrate) 114 joined via a resin layer (adhesive layer) 115 on the surface provided with the recess 112, and the resin layer 115 fills the recess 112. The microlens 113 is formed by the resin thus formed.

The substrate with concave portions for microlenses 111 is manufactured from a flat base material (transparent substrate), and a plurality of (many) concave portions 112 are formed on the surface thereof. The recess 112 can be formed by, for example, a dry etching method, a wet etching method, or the like using a mask.
The substrate with concave portions 111 for microlenses is made of glass, for example.

The thermal expansion coefficient of the base material is preferably approximately the same as the thermal expansion coefficient of the glass substrate 171 (for example, the ratio of the thermal expansion coefficients of the two is about 1/10 to 10). As a result, in the obtained liquid crystal panel, warpage, deflection, peeling, and the like caused by differences in the thermal expansion coefficients of the two when the temperature changes are prevented.
From this point of view, it is preferable that the substrate 111 with concave portions for microlenses and the glass substrate 171 are made of the same type of material. This effectively prevents warpage, deflection, peeling, and the like due to differences in the thermal expansion coefficient when the temperature changes.

  In particular, when the microlens substrate 11 is used in a high-temperature polysilicon TFT liquid crystal panel, the substrate 111 with concave portions for microlenses is preferably made of quartz glass. The TFT liquid crystal panel has a TFT substrate as a liquid crystal driving substrate. For such a TFT substrate, quartz glass whose characteristics are unlikely to change depending on the manufacturing environment is preferably used. For this reason, the micro liquid crystal substrate 111 with concave portions for microlenses is made of quartz glass, so that a TFT liquid crystal panel with excellent stability that is less likely to be warped or bent can be obtained.

A resin layer (adhesive layer) 115 that covers the recess 112 is provided on the upper surface of the substrate with recesses 111 for microlenses.
The concave portion 112 is filled with the constituent material of the resin layer 115 to form the microlens 113.
The resin layer 115 can be made of, for example, a resin (adhesive) having a refractive index higher than the refractive index of the constituent material of the substrate 111 with concave portions for microlenses. For example, acrylic resin, epoxy resin, acrylic epoxy It can be suitably configured with an ultraviolet curable resin or the like.

A flat surface layer 114 is provided on the upper surface of the resin layer 115.
The surface layer (glass layer) 114 can be made of glass, for example. In this case, it is preferable that the thermal expansion coefficient of the surface layer 114 is substantially equal to the thermal expansion coefficient of the substrate 111 with concave portions for microlenses (for example, the ratio of the thermal expansion coefficients of the two is about 1/10 to 10). As a result, warpage, deflection, peeling, etc. caused by the difference in thermal expansion coefficient between the substrate 111 with concave portions for microlenses and the surface layer 114 are prevented. Such an effect can be more effectively obtained when the substrate with concave portions for microlenses 111 and the surface layer 114 are made of the same material.

When the microlens substrate 11 is used in a liquid crystal panel, the thickness of the surface layer 114 is usually about 5 to 1000 μm, more preferably about 10 to 150 μm, from the viewpoint of obtaining necessary optical characteristics.
In addition, the surface layer (barrier layer) 114 can also be comprised, for example with ceramics. Examples of the ceramic include nitride ceramics such as AlN, SiN, TiN, and BN, oxide ceramics such as Al2O3 and TiO2, and carbide ceramics such as WC, TiC, ZrC, and TaC. When the surface layer 114 is made of ceramics, the thickness of the surface layer 114 is not particularly limited, but is preferably about 20 nm to 20 μm, and more preferably about 40 nm to 1 μm.
Such a surface layer 114 can be omitted if necessary.

The black matrix 13 has a light blocking function and is made of, for example, a metal such as Cr, Al, Al alloy, Ni, Zn, Ti, or a resin in which carbon, titanium, or the like is dispersed.
The transparent conductive film 14 has conductivity and is made of, for example, indium tin oxide (ITO), indium oxide (IO), tin oxide (SnO 2), or the like.
The TFT substrate 17 is a substrate that drives the liquid crystal of the liquid crystal layer 2, and is a glass substrate 171 and a plurality (large number) of pixel electrodes 172 provided on the glass substrate 171 and arranged in a matrix (matrix). And a plurality of (many) thin film transistors (TFTs) 173 corresponding to the respective pixel electrodes 172. In FIG. 4, the description of the sealing material, wiring, etc. is omitted.

The glass substrate 171 is preferably made of quartz glass for the reasons described above.
The pixel electrode 172 drives the liquid crystal of the liquid crystal layer 2 by charging and discharging with the transparent conductive film (common electrode) 14. The pixel electrode 172 is made of, for example, the same material as that of the transparent conductive film 14 described above.

The thin film transistor 173 is connected to the corresponding pixel electrode 172 in the vicinity. The thin film transistor 173 is connected to a control circuit (not shown) and controls a current supplied to the pixel electrode 172. Thereby, charging / discharging of the pixel electrode 172 is controlled.
The affinity improving film 4B is bonded to the pixel electrode 172 of the TFT substrate 17, and the affinity improving film 4B ′ is bonded to the transparent conductive film 14 of the counter substrate 12 for the liquid crystal panel. The inorganic alignment film 3B is bonded to the affinity improving film 4B, and the inorganic alignment film 3B ′ is bonded to the affinity improving film 4B ′.

The liquid crystal layer 2 is made of a liquid crystal material (liquid crystal molecules), and the alignment of the liquid crystal molecules, that is, the liquid crystal changes corresponding to the charge / discharge of the pixel electrode 172.
In such a liquid crystal panel 1B, normally, one micro lens 113, one opening 131 of the black matrix 13 corresponding to the optical axis Q of the micro lens 113, one pixel electrode 172, and such a pixel. One thin film transistor 173 connected to the electrode 172 corresponds to one pixel.

  Incident light L incident from the liquid crystal panel counter substrate 12 side passes through the microlens concave substrate 111 and is condensed when passing through the microlens 113, while opening the resin layer 115, the surface layer 114, and the black matrix 13. 131, the transparent conductive film 14, the liquid crystal layer 2, the pixel electrode 172, and the glass substrate 171 are transmitted. At this time, since the polarizing film 8B is provided on the incident side of the microlens substrate 11, when the incident light L passes through the liquid crystal layer 2, the incident light L is linearly polarized light. At this time, the polarization direction of the incident light L is controlled in accordance with the alignment state of the liquid crystal molecules in the liquid crystal layer 2. Therefore, the luminance of the emitted light can be controlled by transmitting the incident light L transmitted through the liquid crystal panel 1B to the polarizing film 7B.

  As described above, the liquid crystal panel 1 </ b> B has the microlens 113, and the incident light L that has passed through the microlens 113 is collected and passes through the openings 131 of the black matrix 13. On the other hand, the incident light L is shielded in a portion where the opening 131 of the black matrix 13 is not formed. Accordingly, in the liquid crystal panel 1B, unnecessary light is prevented from leaking from portions other than the pixels, and attenuation of the incident light L at the pixel portions is suppressed. For this reason, the liquid crystal panel 1B has a high light transmittance in the pixel portion.

  In the liquid crystal panel 1B, for example, the affinity improving films 4B and 4B ′ are respectively formed on the TFT substrate 17 and the counter substrate 12 for the liquid crystal panel manufactured by a known method. Alignment films 3B and 3B ′ are formed, and then both are bonded via a sealing material (not shown), and then liquid crystal is introduced into the gap from the sealing hole (not shown) formed by the gap. It can be manufactured by pouring and then closing such a sealing hole.

In the liquid crystal panel 1B, the TFT substrate is used as the liquid crystal drive substrate. However, a liquid crystal drive substrate other than the TFT substrate, for example, a TFD substrate or an STN substrate may be used as the liquid crystal drive substrate.
Moreover, a liquid crystal panel provided with the inorganic alignment film as described above can be suitably used for those having a strong light source and those used outdoors.

Next, an electronic apparatus (liquid crystal display device) of the present invention including the liquid crystal panel 1A as described above will be described in detail based on the embodiment shown in FIGS.
FIG. 5 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied.
In this figure, a personal computer 1100 includes a main body 1104 having a keyboard 1102 and a display unit 1106. The display unit 1106 is supported by the main body 1104 via a hinge structure so as to be rotatable. Yes.

In the personal computer 1100, the display unit 1106 includes the liquid crystal panel 1A described above and a backlight (not shown). An image (information) can be displayed by transmitting light from the backlight to the liquid crystal panel 1A.
FIG. 6 is a perspective view showing a configuration of a mobile phone (including PHS) to which the electronic apparatus of the present invention is applied.

In this figure, a cellular phone 1200 includes the above-described liquid crystal panel 1A and a backlight (not shown) as well as a plurality of operation buttons 1202, an earpiece 1204 and a mouthpiece 1206.
FIG. 7 is a perspective view showing the configuration of a digital still camera to which the electronic apparatus of the present invention is applied. In this figure, connection with an external device is also simply shown.

Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.
The above-described liquid crystal panel 1A and a backlight (not shown) are provided on the back of the case (body) 1302 in the digital still camera 1300. The liquid crystal panel 1A is configured to perform display based on an imaging signal from the CCD. Functions as a finder that displays the subject as an electronic image.

A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration).
When the photographer confirms the subject image displayed on the liquid crystal panel 1A and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.
Next, as an example of the electronic apparatus of the present invention, an electronic apparatus (liquid crystal projector) using the liquid crystal panel 1B will be described.

FIG. 8 is a diagram schematically showing an optical system of the electronic apparatus (projection display device) of the present invention.
As shown in the figure, the projection display apparatus 300 includes a light source 301, an illumination optical system including a plurality of integrator lenses, a color separation optical system (light guide optical system) including a plurality of dichroic mirrors, and the like. A liquid crystal light valve (liquid crystal optical shutter array) 24 corresponding to red (liquid crystal optical shutter array) 24 corresponding to red, a liquid crystal light valve (liquid crystal optical shutter array) 25 corresponding to green (liquid crystal optical shutter array) 25, and a liquid crystal light valve corresponding to blue (for blue) ) A liquid crystal light valve (liquid crystal light shutter array) 26, a dichroic prism (color combining optical system) 21 formed with a dichroic mirror surface 211 reflecting only red light and a dichroic mirror surface 212 reflecting only blue light, and projection And a lens (projection optical system) 22.

  The illumination optical system includes integrator lenses 302 and 303. The color separation optical system includes mirrors 304, 306, and 309, a dichroic mirror 305 that reflects blue light and green light (transmits only red light), a dichroic mirror 307 that reflects only green light, and a dichroic that reflects only blue light. A mirror (or a mirror that reflects blue light) 308 and condenser lenses 310, 311, 312, 313, and 314 are included.

The liquid crystal light valve 25 includes the liquid crystal panel 1B described above. The liquid crystal light valves 24 and 26 have the same configuration as the liquid crystal light valve 25. The liquid crystal panels 1B included in these liquid crystal light valves 24, 25 and 26 are connected to driving circuits (not shown).
In the projection display device 300, the dichroic prism 21 and the projection lens 22 constitute the optical block 20. The optical block 20 and liquid crystal light valves 24, 25 and 26 fixedly installed on the dichroic prism 21 constitute a display unit 23.

Hereinafter, the operation of the projection display apparatus 300 will be described.
White light (white light beam) emitted from the light source 301 passes through the integrator lenses 302 and 303. The light intensity (luminance distribution) of the white light is made uniform by the integrator lenses 302 and 303. The white light emitted from the light source 301 preferably has a relatively high light intensity. Thereby, the image formed on the screen 320 can be made clearer. In addition, since the projection display device 300 uses the liquid crystal panel 1B having excellent light resistance, excellent long-term stability can be obtained even when the intensity of light emitted from the light source 301 is large.

White light transmitted through the integrator lenses 302 and 303 is reflected to the left side in FIG. 8 by the mirror 304, and blue light (B) and green light (G) of the reflected light are respectively reflected by the dichroic mirror 305 in FIG. The red light (R) is reflected downward and passes through the dichroic mirror 305.
The red light transmitted through the dichroic mirror 305 is reflected downward in FIG. 8 by the mirror 306, and the reflected light is shaped by the condenser lens 310 and enters the liquid crystal light valve 24 for red.

Green light of blue light and green light reflected by the dichroic mirror 305 is reflected to the left in FIG. 8 by the dichroic mirror 307, and the blue light passes through the dichroic mirror 307.
The green light reflected by the dichroic mirror 307 is shaped by the condenser lens 311 and enters the green liquid crystal light valve 25.

Further, the blue light transmitted through the dichroic mirror 307 is reflected on the left side in FIG. 8 by the dichroic mirror (or mirror) 308, and the reflected light is reflected on the upper side in FIG. 8 by the mirror 309. The blue light is shaped by the condenser lenses 312, 313, and 314, and enters the liquid crystal light valve 26 for blue.
As described above, the white light emitted from the light source 301 is separated into the three primary colors of red, green, and blue by the color separation optical system, and is guided to the corresponding liquid crystal light valve and enters.
At this time, each pixel (the thin film transistor 173 and the pixel electrode 172 connected thereto) of the liquid crystal panel 1B included in the liquid crystal light valve 24 is subjected to switching control by a drive circuit (drive means) that operates based on the image signal for red. (On / off), ie modulated.

Similarly, green light and blue light are incident on the liquid crystal light valves 25 and 26, respectively, and modulated by the respective liquid crystal panels 1B, thereby forming a green image and a blue image. At this time, each pixel of the liquid crystal panel 1B included in the liquid crystal light valve 25 is switching-controlled by a drive circuit that operates based on a green image signal, and each pixel of the liquid crystal panel 1B included in the liquid crystal light valve 26 is used for blue color. Switching control is performed by a drive circuit that operates based on the image signal.
As a result, red light, green light, and blue light are modulated by the liquid crystal light valves 24, 25, and 26, respectively, and a red image, a green image, and a blue image are formed, respectively.

The red image formed by the liquid crystal light valve 24, that is, the red light from the liquid crystal light valve 24, enters the dichroic prism 21 from the surface 213, is reflected by the dichroic mirror surface 211 to the left in FIG. The light passes through the surface 212 and exits from the exit surface 216.
Further, the green image formed by the liquid crystal light valve 25, that is, the green light from the liquid crystal light valve 25, enters the dichroic prism 21 from the surface 214, passes through the dichroic mirror surfaces 211 and 212, and exits. The light exits from the surface 216.

Further, the blue image formed by the liquid crystal light valve 26, that is, the blue light from the liquid crystal light valve 26 is incident on the dichroic prism 21 from the surface 215, and is reflected by the dichroic mirror surface 212 to the left in FIG. The light passes through the dichroic mirror surface 211 and exits from the exit surface 216.
Thus, the light of each color from the liquid crystal light valves 24, 25 and 26, that is, the images formed by the liquid crystal light valves 24, 25 and 26 are synthesized by the dichroic prism 21, thereby forming a color image. Is done. This image is projected (enlarged projection) on the screen 320 installed at a predetermined position by the projection lens 22.

  In addition to the personal computer (mobile personal computer) of FIG. 5, the mobile phone of FIG. 6, the digital still camera of FIG. 7, and the projection display device of FIG. , Video camera, viewfinder type, monitor direct view type video tape recorder, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game device, word processor, workstation, video phone, crime prevention TV monitors, electronic binoculars, POS terminals, devices equipped with touch panels (for example, cash dispensers of financial institutions, automatic ticket vending machines), medical devices (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiographs, ultrasonic diagnostic devices) , Endoscope display devices), fish detectors, various measuring instruments, instruments (for example, Two, aircraft, gauges of a ship), such as flight simulators, and the like. And it cannot be overemphasized that the liquid crystal panel of this invention mentioned above is applicable as a display part of these various electronic devices, and a monitor part.

As mentioned above, although this invention was demonstrated based on embodiment of illustration, this invention is not limited to this.
For example, in the liquid crystal panel and the electronic apparatus of the present invention, the configuration of each part can be replaced with any configuration that exhibits the same function, and any configuration can be added.
Further, in the above-described embodiment, the surface of the inorganic alignment film is described as being uneven, but it may not be necessary.
In the above-described embodiments, the inorganic alignment film has been described as a plurality of columnar crystals arranged, but the present invention is not limited to this.

Further, the inorganic alignment film is not limited to the one formed by the method as described above, and may be formed by, for example, oblique vapor deposition using a vapor deposition apparatus.
In the above-described embodiment, the projection display device (electronic device) has three liquid crystal panels, and the liquid crystal panel of the present invention is applied to all of them, but at least these One of them may be the liquid crystal panel of the present invention. In this case, it is preferable to apply the present invention to at least a liquid crystal panel used for a liquid crystal light valve for blue.

[Manufacture of LCD panels]
A liquid crystal panel as shown in FIG. 4 was manufactured as follows.
Example 1
First, a microlens substrate was manufactured as follows.
Prepare a raw quartz glass substrate (transparent substrate) with a thickness of about 1.2 mm as a base material, and wash it by immersing it in a cleaning solution (mixed solution of sulfuric acid and hydrogen peroxide solution) at 85 ° C. The surface was cleaned.

Thereafter, a polycrystalline silicon film having a thickness of 0.4 μm was formed on the front and back surfaces of the quartz glass substrate by a CVD method.
Next, an opening corresponding to the recess to be formed was formed in the formed polycrystalline silicon film.
This was done as follows. First, a resist layer having a concave pattern to be formed was formed on the polycrystalline silicon film. Next, the polycrystalline silicon film was dry-etched with CF gas to form openings. Next, the resist layer was removed.

Next, the quartz glass substrate was immersed in an etching solution (mixed aqueous solution of 10 wt% hydrofluoric acid + 10 wt% glycerin) for 120 minutes for wet etching (etching temperature 30 ° C.) to form a recess on the quartz glass substrate.
Thereafter, the quartz glass substrate was immersed in a 15 wt% tetramethylammonium hydroxide aqueous solution for 5 minutes to remove the polycrystalline silicon film formed on the front and back surfaces, thereby obtaining a substrate with concave portions for microlenses.

Next, an ultraviolet (UV) curable acrylic optical adhesive (refractive index of 1.60) is applied without bubbles on the surface of the substrate with concave portions for microlenses, and then the optical adhesive is used. A cover glass (surface layer) made of quartz glass was bonded to the optical adhesive, and then the optical adhesive was cured by irradiating the optical adhesive with ultraviolet rays to obtain a laminate.
Thereafter, the cover glass was ground and polished to a thickness of 50 μm to obtain a microlens substrate.
In the obtained microlens substrate, the thickness of the resin layer was 12 μm.

  With respect to the microlens substrate obtained as described above, a light shielding film (Cr film) having a thickness of 0.16 μm in which an opening is provided at a position corresponding to the microlens of the cover glass by using a sputtering method and a photolithography method. That is, a black matrix was formed. Further, an ITO film (transparent conductive film) having a thickness of 0.15 μm was formed on the black matrix by a sputtering method to manufacture a counter substrate for a liquid crystal panel.

Next, an affinity improving film and an inorganic alignment film were formed on the ITO film using an apparatus as shown in FIG. 3 as follows.
First, a counter substrate for a liquid crystal panel was placed on the base material holder S5 in the vacuum chamber S3. The irradiation angle θ _s of the sputtered particles was 70 °, and the substrate holder S5 was adjusted.
Next, the pressure inside the vacuum chamber S3 was reduced to 5 × 10 ⁻⁵ Pa by the exhaust pump S4.

Next, argon gas is supplied from the gas supply source S13 into the ion source S1, a voltage of 70 V is applied to the filament S11, plasma is generated, and an ion acceleration voltage of 1200 V is applied to the extraction electrode S12. Ions were accelerated and irradiated to the target S2 as an ion beam. As the target S2, dielectric constant _Al 2 _{O 3} was used in 9-12. The ion beam current of the irradiated ion beam was 250 mA.

The target S2 irradiated with the ion beam was irradiated with sputtered particles toward the counter substrate for the liquid crystal panel, and an affinity improving film made of Al ₂ O ₃ having an average thickness of 0.05 μm was formed on the ITO film. .
Subsequently, using the same apparatus, an inorganic alignment film was formed on the affinity improving film as follows.
First, change the target S2 to SiO _2.
Next, the pressure inside the vacuum chamber S3 was reduced to 1 × 10 ⁻⁴ Pa by the exhaust pump S4.

  Next, argon gas is supplied from the gas supply source S13 into the ion source S1, a voltage of 70 V is applied to the filament S11, plasma is generated, and an ion acceleration voltage of 1200 V is applied to the extraction electrode S12. Ions were accelerated and irradiated to the target S2 as an ion beam. The ion beam current of the irradiated ion beam was 250 mA.

The target S2 irradiated with the ion beam was irradiated with sputtered particles toward the counter substrate for the liquid crystal panel, and an inorganic alignment film composed of SiO ₂ having an average thickness of 0.03 μm was formed on the affinity improving film.
In addition, the inclination angle θ _c of the columnar crystals constituting the formed inorganic alignment film with respect to the plane direction of the inorganic alignment film was 45 °, and the width of the columnar crystals was 25 nm.
Moreover, the film density of the formed inorganic alignment film was 1.7 g / cm ³ . Moreover, the surface roughness Rz of the inorganic alignment film was 8 nm.
Also, an affinity improving film and an inorganic alignment film were formed on the surface of a separately prepared TFT substrate (made of quartz glass) in the same manner as described above.

The counter substrate for a liquid crystal panel on which the affinity improving film and the inorganic alignment film were formed, and the TFT substrate on which the affinity improving film and the inorganic alignment film were formed were joined via a sealing material. This bonding was performed such that the alignment direction of the inorganic alignment film was shifted by 90 ° so that the liquid crystal molecules constituting the liquid crystal layer were twisted to the left.
Next, liquid crystal (Merck Corp .: MJ99247) was injected into the gap from the gap hole formed between the inorganic alignment film and the inorganic alignment film, and then the hole was closed. The formed liquid crystal layer had a thickness of about 3 μm.

Thereafter, a polarizing film 8B and a polarizing film 7B are bonded to the outer surface side of the counter substrate for the liquid crystal panel and the outer surface side of the TFT substrate, respectively, thereby manufacturing a TFT liquid crystal panel having a structure as shown in FIG. did. As the polarizing film, a film made of polyvinyl alcohol (PVA) and stretched in a uniaxial direction was used. The bonding directions of the polarizing film 7B and the polarizing film 8B were determined based on the alignment directions of the inorganic alignment film 3B and the inorganic alignment film 3B ′, respectively. That is, the polarizing film 7B and the polarizing film 8B are bonded so that the incident light is not transmitted when the voltage is applied and the incident light is transmitted when the voltage is not applied.
The manufactured liquid crystal panel had a pretilt angle in the range of 1 to 5 °.

(Example 2)
Except for using the target S2 shown in Table 1 when forming the affinity improving film and forming the affinity improving film as shown in Table 1 for each condition when forming the affinity improving film, A liquid crystal panel was manufactured in the same manner as in Example 1.
(Comparative Example 1)
Without forming an affinity enhancement film, a solution of polyimide resin (PI) (manufactured by Nippon Synthetic Rubber Co., Ltd .: AL6256) is prepared and applied onto the transparent conductive film of the counter substrate for the liquid crystal panel by spin coating. A liquid crystal panel was produced in the same manner as in Example 1 except that a film having an average thickness of 0.05 μm was formed and a rubbing treatment was performed so that the pretilt angle was 3 to 7 ° to obtain an alignment film. .

(Comparative Example 2)
A liquid crystal panel was produced in the same manner as in Example 1 except that the affinity improving film was not formed.
(Comparative Example 3)
Except that SiO ₂ having a relative dielectric constant of 4 to 5 is used as the target S2 when forming the affinity improving film, and the conditions for forming the affinity improving film are as shown in Table 1 above. A liquid crystal panel was produced in the same manner as in Example 1.

[LCD panel evaluation]
The light transmittance was continuously measured for the liquid crystal panels (liquid crystal panels manufactured as the first sheet) manufactured in the above Examples and Comparative Examples. The light transmittance was measured by placing each liquid crystal panel at a temperature of 50 ° C. and irradiating it with white light having a light flux density of 15 lm / mm ² without applying voltage.

As the evaluation of the liquid crystal panel, the time (light resistance time) from the start of the white light irradiation of the liquid crystal panel manufactured in Comparative Example 1 until the light transmittance is reduced by 50% compared to the initial light transmittance. As a standard, evaluation was performed in four stages as follows.
A: Light resistance time is 5 times or more that of Comparative Example 1.
○: Light resistance time is 2 times or more and less than 5 times that of Comparative Example 1.
Δ: Light resistance time is 1 to 2 times that of Comparative Example 1.
X: Light resistance time is inferior to that of Comparative Example 1.
Table 1 shows the constituent material of the alignment film (type of target (inorganic material)), the polarizability of the inorganic material and the inclination angle θ _{b of} the polarization direction, the formation condition of the inorganic alignment film, the average thickness of the inorganic alignment film, and the columnar shape. The evaluation results of the liquid crystal panel are shown together with the crystal width and tilt angle θ _c and the pretilt angle of each liquid crystal panel.

  As is apparent from Table 1, the liquid crystal panel of the present invention showed excellent light resistance as compared with the liquid crystal panel of Comparative Example 1. Further, in the liquid crystal panel of the present invention, a sufficient pretilt angle was obtained, and the alignment state of the liquid crystal molecules could be reliably regulated. However, in the liquid crystal panels of Comparative Examples 2 and 3, a sufficient pretilt angle was obtained. Therefore, it was difficult to regulate the alignment state of the liquid crystal molecules.

[Evaluation of LCD projector (electronic equipment)]
A liquid crystal projector (electronic device) having a structure as shown in FIG. 8 was assembled using the TFT liquid crystal panels manufactured in the above Examples and Comparative Examples, and this liquid crystal projector was continuously driven for 5000 hours.
As an evaluation of the liquid crystal projector, a projected image immediately after driving and a projected image after 5,000 hours after driving were observed, and sharpness was evaluated in four stages as follows.

A: A clear projected image was observed.
○: An almost clear projected image was observed.
(Triangle | delta): The projection image somewhat inferior to a clearness was observed.
X: The projection image which is not clear was confirmed.
The results are shown in Table 2.

As is clear from Table 2, the liquid crystal projector (electronic device) manufactured using the liquid crystal panel of the present invention obtained a clear projected image even when it was continuously driven for a long time.
On the other hand, in the liquid crystal projector manufactured using the liquid crystal panel of Comparative Example 1, the sharpness of the projected image clearly decreased with the driving time. This is presumably because the alignment of the liquid crystal molecules is uniform in the initial stage, but the alignment film deteriorates and the alignment of the liquid crystal molecules decreases due to long-term driving. In addition, in the liquid crystal projector manufactured using the liquid crystal panel of Comparative Examples 2 and 3, a clear projection image was not obtained from the beginning of driving. This is considered to be because the orientation of the inorganic alignment film is originally low.
Moreover, when a personal computer, a cellular phone, and a digital still camera equipped with the liquid crystal panel of the present invention were manufactured and evaluated in the same manner, similar results were obtained.
From these results, it can be seen that the liquid crystal panel and the electronic apparatus of the present invention are excellent in light resistance and stable characteristics can be obtained even after long-term use.

It is a typical longitudinal section showing a 1st embodiment of a liquid crystal panel of the present invention. It is a longitudinal cross-sectional view which shows an example of the inorganic alignment film with which the liquid crystal panel of this invention is provided. It is a schematic diagram of the alignment film formation apparatus used for the formation method of an inorganic alignment film. It is a typical longitudinal cross-sectional view which shows 2nd Embodiment of the liquid crystal panel of this invention. 1 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which an electronic apparatus of the present invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device of this invention is applied. It is a figure which shows typically the optical system of the projection type display apparatus to which the electronic device of this invention is applied.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1A, 1B ... Liquid crystal panel 2 ... Liquid crystal layer 3A, 3A ', 3B, 3B' ... Inorganic alignment film 4A, 4A ', 4B, 4B' ... Affinity improvement film 5 ... Transparent conductive film 6 ... Transparent conductive film 7A, 7B ... Polarizing films 8A, 8B ... Polarizing films 9 ... Substrate 10 ... Substrate 100 ... Base material 101 ... Base material S100 ... Ion beam sputtering apparatus S1 ... Ion source S11 ... Filament S12 ... Extraction electrode S13 ... Gas supply source S2 ... Target S3 ... Vacuum chamber S4 ... Exhaust pump S5 ... Base material holder 11 ... Microlens substrate 111 ... Substrate with microlens recess 112 ... Concave 113 ... Microlens 114 ... Surface layer 115 ... Resin layer 12 ... Counter substrate for liquid crystal panel 13 ... Black matrix 131 ... Opening 14 ... Transparent conductive film 17 ... TFT substrate 171 ... Glass substrate 172: Pixel electrode 173: Thin film transistor 1100 ... Personal computer 1102 ... Keyboard 1104 ... Main body 1106 ... Display unit 1200 ... Mobile phone 1202 ... Operation button 1204 ... Earpiece 1206 ... Mouthpiece 1300 ... Digital still camera 1302 ... Case (body) DESCRIPTION OF SYMBOLS 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Circuit board 1312 ... Video signal output terminal 1314 ... Input / output terminal for data communication 1430 ... Television monitor 1440 ... Personal computer 300 ... Projection type display device 301 ... Light source 302, 303 ... Integrator lens 304, 306, 309 ... Mirrors 305, 307, 308 ... Dichroic mirrors 310-314 ... Condensing lens 320 ... Screen 0 ... optical block 21 ... dichroic prism 211 ... dichroic mirror surface 213 to 215 ... the surface 216 ... exit surface 22 ... projection lens 23 ... display unit 24 to 26 ... liquid crystal light valve

Claims (9)

A liquid crystal panel having a liquid crystal layer and an inorganic alignment film made of an inorganic material,
A liquid crystal panel, wherein an affinity improving film made of a material having a relative dielectric constant of 6 or more is provided on a surface opposite to a surface facing the liquid crystal layer of the inorganic alignment film.   The liquid crystal panel according to claim 1, wherein the material constituting the affinity improving film is an inorganic material.   The liquid crystal panel according to claim 1, wherein an average thickness of the affinity improving film is 0.05 to 0.5 μm.   The liquid crystal panel according to claim 1, wherein the inorganic alignment film has regular irregularities on a surface thereof.   The liquid crystal panel according to claim 1, wherein the inorganic alignment film has a surface roughness Rz of 2 to 20 nm. The inorganic alignment film is composed of a plurality of columnar crystals mainly composed of the inorganic material,
The columnar crystal is a liquid crystal panel according to any one of the inorganic alignment layer according to claim 1 to 5 with respect to the plane direction is obtained by orienting a state inclined by a predetermined angle theta _c of. Wherein the predetermined angle theta _c, the liquid crystal panel according to claim 6 which is 30 to 60 °.   The liquid crystal panel according to claim 1, wherein an average thickness of the inorganic alignment film is 0.02 to 0.3 μm. An electronic apparatus comprising the liquid crystal panel according to claim 1.

Images