JP2006012605A - Microwave irradiation treating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microwave irradiation treating device surely preventing uneven drying or uneven heating of an object to be treated by irradiating microwave not only from the top and bottom face but also from the side face. <P>SOLUTION: The microwave irradiation treating device, drying or raising the temperature of the object to be treated by transferring the object to be treated 1 into a treatment tank 10, guiding microwave generated at microwave generators 12a, 13a through a wave guide 16, and irradiating it on the upper face and lower face of the object to be treated, comprises a treatment tank 10 treating the object to be treated and a conveyor 11 transferring the object to be treated 1 from the front side to the rear side. A first irradiating means 12 capable of irradiating the microwave from the top and bottom sides and a second irradiating means 13 capable of irradiating from both side are provided in the treatment tank 10. Here, a control means 19, capable of controlling the microwave irradiated from respective direction to the treatment tank 10 through the wave guide simultaneously or separately is connected to the microwave generators 12a, 13a. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a microwave irradiation processing apparatus, and more specifically, for example, is used in industrial fields other than cooking for consumer use, and is used for treatment items such as electronic parts, castings, ceramics, foods, and chemical synthesis. The present invention relates to a microwave irradiation processing apparatus that raises a temperature by applying waves (heating), promotes drying, sterilization, or chemical reaction.

Conventional microwave irradiation processing apparatuses are used in industrial fields other than for cooking for consumer use, for example, to irradiate microwaves to processed products such as electronic parts, castings, ceramics, foods, and chemical compounds. A device for raising (heating), drying, sterilizing, or promoting a chemical reaction, which is generated by a microwave generator from one or both of the upper and lower sides of the processed material carried into the processing tank. Is well known (for example, see Patent Documents 1 to 3).
Japanese Unexamined Patent Publication No. 2003-145521 (page 7, FIG. 9) JP 2002-283331 A JP-A-6-165660

  An example of the former method will be described with reference to FIG. FIG. 10 is a block diagram showing an embodiment of a conventional microwave irradiation processing apparatus. As shown in FIG. 10, in one embodiment of a conventional microwave irradiation processing apparatus, a processed object 1 such as an electronic component, a casting, a ceramic, a food, a chemical composition, etc. is carried from the front by a conveyor 31 and carried to the rear. A conveyor-type treatment tank 30 that can be processed during conveyance is provided, and the processed material 1 carried into the treatment tank 30 by the conveyor 31 is guided from either one or both of the upper and lower surfaces (both in FIG. 10). It is possible to introduce and irradiate the microwave generated by the microwave generator 32 via 36 to increase the drying or temperature.

  In one embodiment of a conventional microwave irradiation processing apparatus having such a configuration, first, a plurality of processed objects 1 are sequentially processed into a processing tank 30 by transferring the processed object 1 conveyed from another manufacturing process to a conveyor 31. Carry in. And in the processing tank 30, the microwave which generate | occur | produced with the microwave generator 32 is irradiated from the upper and lower surfaces toward the processed material 1 carried in by the conveyor 31 via the waveguide 36, and thereby the processed material 1 Perform processing such as drying or heating. Thereafter, the processed product 1 unloaded from the processing tank 30 is unloaded by the conveyor 31 as a product that has been subjected to processing such as drying or heating, and is conveyed to the next step.

  Thus, the conventional microwave irradiation processing apparatus employs a method of irradiating microwaves from the upper and lower surfaces of the processing object 1 carried into the processing tank 30 by the conveyor 31 so that the inside and outside of the processing object 1 can be simultaneously dried or It was provided so that it could be heated.

  However, since the conventional microwave irradiation processing apparatus employs a method of irradiating only the upper and lower portions of the processed object 1 to be conveyed, the uniform temperature rise in the entire processed object 1 and the temperature of the entire processed object 1 There is a problem that unevenness is likely to occur in the distribution, and drying unevenness and heating unevenness occur in the processed product 1 after processing.

  The present invention solves such problems and provides a microwave irradiation processing apparatus that enables microwave irradiation not only from the upper and lower surfaces of the processed object but also from the side surface to reliably prevent unevenness in drying or heating of the processed object. The purpose is to do.

  In order to solve the above-mentioned problem, the present invention introduces a microwave generated by a microwave generator through a waveguide from one or both of upper and lower surfaces by carrying a processed material into a processing tank. A microwave irradiation processing apparatus that irradiates and raises the temperature or temperature, and includes a conveyor-type processing tank that conveys a processed material from the front surface to the rear surface for processing, and the microwave is applied to the processing tank either on the upper or lower surface or In addition to the first irradiation means, a first irradiation means capable of irradiation from both sides and a second irradiation means capable of irradiation from the left or right side or both sides of the processed object are provided.

  Further, as another embodiment of the present invention, a processed object is introduced into a processing tank, and microwaves generated by a microwave generator from one or both of upper and lower surfaces through a waveguide are introduced and irradiated. A microwave irradiation processing apparatus for drying or raising the temperature, which is equipped with a batch-type processing tank for processing the processed material in and out of a sealed hollow from the front surface, and microwaves are applied to the processing tank on either the upper or lower surface. A first irradiating means capable of irradiating from one or both of them; in addition to the first irradiating means, a second irradiating means capable of irradiating from the left or right side or both sides of the processed object; Any one or both of the 3rd irradiation means which can irradiate from the back surface opposite to the front is provided.

  Here, the first irradiating means, the second irradiating means, and the third irradiating means are each connected to the processing tank via a waveguide and generate a microwave in each direction, respectively, It is preferable to provide an isolator that protects the microwave oscillator by absorbing power reflected from the waveguide, and a matching unit that performs impedance matching of the processing tank and effectively uses the microwave power. The microwave generator is preferably connected with a control means for controlling the microwave so that microwaves can be irradiated simultaneously or separately from each direction via a waveguide. In addition, the control means installs and connects at least one thermopile type or thermistor type infrared thermometer for measuring the temperature of the processed object during the microwave irradiation to the treatment tank, and the temperature data of the thermometer Accordingly, it is preferable to control the output of the microwave generator so that the temperature state of the workpiece can be monitored. Further, the waveguide is provided with an irradiation port formed in a horn shape having a taper when the microwave is introduced into the processing tank from each direction, and the irradiation port extends from the outside to the inside of the processing tank. It is preferable to extend so as to spread. Moreover, it is preferable that the waveguide is extended so that the horn-shaped irradiation port is close to the vicinity of the processing object in the processing tank. Further, the waveguide preferably has a taper length extending in a horn shape and extending to the length of the wavelength of the microwave.

  As described above in detail, according to the microwave irradiation processing apparatus of the present invention, since the microwave irradiation can be performed not only from the upper and lower surfaces of the processing object, but also from the side surface, There is no unevenness in the temperature distribution of the entire processed product, and it is possible to uniformly prevent drying unevenness or heating unevenness in the processed product after processing.

  Next, an embodiment of a microwave irradiation processing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a configuration diagram showing a first embodiment of a microwave irradiation processing apparatus according to the present invention. FIG. 2 is a diagram showing a comparison of the heating state between the first embodiment shown in FIG. 1 and the prior art. FIG. 2 (a) shows the heating state of the prior art, and FIG. 2 (b) shows the present state. Each of the heating states of the invention is shown. FIG. 3 is a diagram showing another embodiment of the waveguide 16 shown in FIG. FIG. 4 is a diagram showing an internal structure viewed from the direction of arrow A shown in FIG. FIG. 5 is a view showing another embodiment of the irradiation port 16a shown in FIG. 4. FIG. 5 (a) shows the irradiation port 16a provided inside the processing tank 10, and FIG. Irradiation ports 16a are shown outside the processing tank 10, respectively. 6 is a diagram showing a comparison of the heating state with and without the horn-shaped irradiation port 16a shown in FIG. 3, and FIG. 6 (a) shows the heating state with the waveguide without the irradiation port. (B) each shows the heating state by the waveguide with an irradiation port. Moreover, FIG. 7 is a block diagram which shows 2nd Embodiment of the microwave irradiation processing apparatus by this invention. Moreover, FIG. 8 is a block diagram which shows 3rd Embodiment of the microwave irradiation processing apparatus by this invention. Moreover, FIG. 9 is a block diagram which shows 4th Embodiment of the microwave irradiation processing apparatus by this invention.

  As shown in FIG. 1, the first embodiment of the microwave irradiation processing apparatus according to the present invention is adopted in the industrial field except for cooking for consumer use, as in the prior art shown in FIG. 10, to promote chemical reaction. It is used for heat treatment such as heating, drying, sterilization, etc., for example, processing objects 1 such as electronic parts, castings, ceramics, foods, chemical compounds, etc. are conveyed from the front surface to the rear surface by the conveyor 11. The conveyor-type processing tank 10 is provided, and the processed product 1 is carried into the processing tank 10 by the conveyor 11 and is passed through the waveguide 16 from one or both of the upper and lower surfaces (both in FIG. 1). The first irradiation means 12 having a microwave generator (see FIG. 2) generates microwaves and introduces and irradiates them to increase the drying or temperature. Further, in the first embodiment, unlike the prior art shown in FIG. 10, in addition to the first irradiation means 12 that irradiates the processing tank 10 with microwaves from both the upper and lower surfaces, either the left or right of the processed object 1 is processed. Or the 2nd irradiation means 13 which can also irradiate from both sides (both in FIG. 1) is provided. That is, in 1st Embodiment, the 2nd irradiation means 13 which can irradiate the microwave from not only the 1st irradiation means 12 which irradiates the processed material 1 in the processing tank 10 from the upper and lower surfaces from both upper and lower surfaces is provided. By providing, the processed object 1 can be heated or dried uniformly uniformly, and the processing object 1 after the process can be reliably treated by preventing drying unevenness or heating unevenness.

  Here, the processing tank 10 is provided with a peripheral wall that opens (penetrates) in the front-rear direction for conveying the processed material 1 and surrounds the upper, lower, left, and right sides. And a conveyor 11 which is rotatably supported by arranging a plurality of rollers at predetermined intervals in the opened front-rear direction. At this time, in the processing tank 10, microwave irradiation can be performed through a gap between a plurality of rollers provided so that the conveyor 11 does not block the bottom surface of the processed material 1 in the downward irradiation by the first irradiation means 12. Provided. Moreover, in this processing tank 10, although the Example which each installs the 1st irradiation means 12 and the 2nd irradiation means 13 on four surfaces of upper and lower, right and left was demonstrated, it is not limited to this, either upper and lower It is also possible to appropriately reduce the irradiation to only one of the surface and the left and right surfaces. For example, when the first irradiation means 12 from the lower surface is reduced, the bottom surface of the workpiece 1 to be conveyed may be blocked, and a belt type conveyor (not shown) is adopted instead of the roller type shown in FIG. It is also possible to do.

  Further, as shown in FIG. 1, the first irradiating means 12 and the second irradiating means 13 are connected to each other from the upper, lower, left and right directions via a waveguide 16 perpendicular to the outer peripheral surface of the processing tank 10, respectively. The microwave generators 12a and 13a for generating microwaves are respectively provided, and unlike the prior art shown in FIG. 11, the power reflected from the waveguide 16 is absorbed to protect the microwave oscillators 12a and 13a. Isolators 12b and 13b, and matching units 12c and 13c that perform impedance matching of processing tank 10 and effectively use microwave power are provided. More specifically, in the present embodiment, the processed product 1 that does not contain moisture such as electronic parts, castings, ceramics, etc., rather than cooking that irradiates microwaves to the processed product (food) that contains moisture as in consumer use. In order to irradiate the microwave, the processed object 1 that does not contain moisture has a low microwave absorptance and may be reflected through the waveguide 16 to reach the microwave oscillators 12a and 13a to be destroyed. Therefore, in the present embodiment, unlike the prior art shown in FIG. 10, the first and second irradiating means 12 and 13 absorb power reflected from the waveguide 16 to thereby generate microwave oscillators 12a and 13a. Isolators 12b and 13b are provided.

  The microwave oscillators 12 a and 13 a of the first irradiation unit 12 and the second irradiation unit 13 are controlled to be able to irradiate the processing tank 10 with microwaves simultaneously or separately from each direction via the waveguide 16. Control means 19 is connected. The control means 19 includes at least one or more thermopile type or thermistor type infrared thermometers 18 that detect the infrared rays emitted from the processing object 1 during microwave irradiation and measure the temperature in the treatment tank 10 ( In FIG. 2, two are provided and connected, and the temperature of the workpiece 1 can be monitored by controlling the outputs of the microwave generators 12 a and 13 a according to the temperature data (signal) measured by the thermometer 18. It is provided as follows. Here, for example, the reason why a thermistor type infrared thermometer is used as the thermometer 18 is that the infrared rays detected for the thin film thermistor can be output as a voltage (easily converted from voltage to temperature) and downsizing is possible. This is because by making the area of the light receiving portion smaller than the wavelength of the microwave, it is possible to make it less susceptible to the influence of the microwave (electromagnetic wave noise). Moreover, the reason for installing a plurality of thermometers 18 in the treatment tank 10 is to more accurately measure the temperature of the processed material 1 by installing a plurality of thermometers than one. The control means 19 is connected to the thermometer 18 of the processing tank 10 to receive and process the temperature data (analog signal) obtained by measuring the temperature of the processed object 1, and based on the analog signal. Each of the control units 19b controls the microwave outputs of the microwave oscillators 12a and 13a to control the processed product 1 to a predetermined set temperature, and performs signal processing. Therefore, in the first embodiment, a plurality of thermopile type or thermistor type infrared thermometers 18 are installed to accurately measure the temperature of the workpiece 1, and based on this temperature data, the control means 19 uses the microwave oscillator 12 a, Since the output of 13a is controlled to enable temperature adjustment of the processed object 1, drying and heating unevenness of the processed object 1 can be surely prevented.

  When drying or heating using the first embodiment of the microwave irradiation processing apparatus according to the present invention formed as described above, a plurality of processed objects 1 are automatically processed by a conveyor 11 as shown in FIG. By sequentially transporting the film 10 into the inside, heat treatment such as drying or heating is performed by irradiating microwaves from four directions, top, bottom, left and right. At this time, in the processing tank 10, the control unit 19 is driven so that the thermometer 18 shown in FIG. 1 operates in advance, and the first irradiation unit 12 and the second irradiation unit 13 are controlled by the control unit 19 b of the control unit 19. The microwave oscillators 12a and 13a are controlled to set whether to irradiate simultaneously or individually from each direction. Thereafter, when the processed product 1 is conveyed into the processing tank 10 by the conveyor 11, the temperature of the processed product 1 is automatically monitored by the thermometer 18, and the microwave oscillators 12a and 13a are set in accordance with the monitored temperature. It drives and irradiates a microwave simultaneously or individually not only from the upper and lower parts of the processed material 1 but also from the side surface. During this irradiation, the temperature of the processed object 1 is constantly monitored by the thermometer 18, so that, for example, when the temperature of the processed object 1 decreases, the processing unit 19 a of the control means 19 receives the temperature data and controls it. By transmitting to the unit 19b, the control unit 19b adjusts the irradiation amount of the microwave oscillators 12a and 13a to adjust to a desired temperature. As a result, in the treatment tank 10, it becomes possible to irradiate the irradiation direction of the microwaves not only from the upper part and the lower part of the processing object 1 but also from the side surface simultaneously or individually, so that compared with the prior art shown in FIG. Unevenness of drying and unevenness of heating of the processed product 1 after the treatment can be surely prevented.

  Here, in order to explain in more detail the difference in the heating or drying effect between the present embodiment and the prior art, a specific comparison will be made with reference to FIG. The present applicant confirmed the effect using electromagnetic field strength analysis software: HFSS (USA: ANSOFT Corporation) based on the above-described embodiment. FIG. 2A shows the prior art irradiated only by the first irradiation means 12 on the upper surface, and FIG. 3B shows the book irradiated simultaneously from the first irradiation means 12 on the upper surface and the second irradiation means 13 on the left and right side surfaces. Each embodiment is shown. In the analysis model shown in FIG. 3A, the microwave inlets of the second irradiation means on both the left and right sides can be seen, but in this analysis, the side irradiation holes are not irradiated. Irradiation is performed only from the first irradiation means 12 on the upper surface. Also, in the present embodiment shown in FIG. 3B, unlike the first embodiment described above, the microwave inlets in the second irradiation means 13 on both the left and right side faces 90 ° in order to break interference with each other. Is changing. Further, as analysis conditions, the size of the treatment tank 10 shown in FIGS. 3A and 3B is W700 × H880 × L1000 mm, the size of the treatment object 1 is φ300 × H380 mm, and the dielectric constant Was set to 15 tan δ 0.001.

As an analysis result under such conditions, first, in the conventional technique shown in FIG. 3A (upper surface irradiation only), it is difficult to discriminate with the illustrated display (the original figure is color), but the intensity of the electromagnetic field is low. The distribution is displayed in blue as the temperature is low, and the color is displayed in red as the temperature is high. The electromagnetic field intensity is low in the prior art by irradiating only the upper surface, and the electromagnetic field is below the workpiece 1. The distribution was not good.
On the other hand, in the analysis result in the present embodiment (upper surface and both side surface irradiation) shown in FIG. 3B, the electromagnetic field strength and the temperature of the processed object 1 are generally uniform by the irradiation from the upper surface and the left and right side surfaces. It can be determined that the electromagnetic field distribution is good even in the lower part of the processed object 1.

As described above, in the conventional microwave irradiation processing apparatus, the method of irradiating the microwave only to the upper surface of the processed object 1 as in the prior art is insufficient for dielectric heating of the processed object 1, and this embodiment Thus, it can be seen that irradiation from the side surface of the processed object 1 is most effective. In this prior art, a method of irradiating microwaves from the lower surface in addition to the upper surface of the processed object 1 was also examined. As a result of the analysis, it was found that heating was insufficient at the side surface of the processed object 1. .
Therefore, microwave energy is concentrated on a portion where the electromagnetic field strength is high and dielectric treatment of the workpiece 1 occurs, so that irradiation is performed from four directions on the left and right sides in addition to the upper and lower sides as in this embodiment. Thus, it was confirmed that the more uniform the electromagnetic field distribution in the entire processed object 1 is, the more uniform the heating is performed, and the drying or heating without unevenness becomes possible.

  By the way, in the first embodiment of the microwave irradiation processing apparatus shown in FIG. 1, the microwave electromagnetic field irradiated to the entire workpiece 1 can be supplied more uniformly by forming the waveguide 16 in a horn shape. It becomes possible. As shown in FIG. 3, another embodiment of the waveguide thus formed in a horn shape has four directions including a vertical direction by the first irradiation means 12 and a horizontal direction by the second irradiation means 13 in the treatment tank 10. When the microwave is introduced from the conveyor 11 toward the processed material 1 conveyed by the conveyor 11, each of the irradiation ports 16a formed in a horn shape having a taper and gradually expanding is provided, and the irradiation port 16a is provided from the outside of the processing tank 10. It extends so that it extends to the inside. As shown in FIG. 4, the horn-type waveguide 16 has an irradiation port 16 a that starts to spread in a horn shape outside the processing tank 10 and penetrates the upper, lower, left, and right peripheral walls, and further horn-type irradiation in the processing tank 10. The mouth 16a extends so as to be close to the vicinity of the processed material 1 conveyed by the conveyor 11 and surround the periphery.

  At this time, the waveguide 16 is provided with a taper length B shown in FIG. 4 extending in a horn shape of the irradiation port 16a at the wavelength of the microwave. For example, if the microwave frequency is 2450 Mhz, the length of the wavelength can be uniformly supplied by setting the taper length B shown in FIG. In addition, it becomes possible to uniformly dry and heat the processed product 1, and thus it is possible to prevent drying unevenness and heating unevenness. Further, the waveguide 16 is not limited to the horn-shaped irradiation port 16a extending from the outside of the processing tank 10 and extending through the peripheral wall to the inside as shown in FIG. As shown to 5 (a), it is also possible to have the irradiation port 16a which spreads in a horn shape inside the processing tank 10. FIG. As described above, according to the irradiation port 16a inherent in the processing tank 10, it becomes possible to bring the processing object 1 closer to and closer to the periphery of the processing object 1, so that the electromagnetic field of the microwave irradiated to the processing object 1 is supplied as a whole. , Uniform drying and heating are possible. On the other hand, it is also possible to provide a horn-shaped irradiation port 16 a outside the processing tank 10. As shown in FIG. 5B, the irradiation port 16a provided on the outer side of the processing tank 10 is provided by directly connecting end portions extending in a horn shape to the upper, lower, left and right peripheral walls of the processing tank 10. Therefore, according to such an irradiation port 16a, since it extends outside the processing tank 10 and does not exist, the entire structure of the processing tank 10 is simplified, the size inside the processing tank 10 can be easily reduced, and the entire apparatus can be manufactured. Cost can also be reduced.

  Here, in order to explain in more detail the difference in heating effect caused by the presence or absence of the horn-shaped irradiation port 16a in the waveguide 16, a specific comparison will be made with reference to FIG. The analysis result shown in FIG. 6 is analyzed by the electromagnetic field strength analysis software described above. FIG. 6A shows a waveguide that guides the microwave straight from the direction perpendicular to the side wall surface of the processing tank 10. FIG. 6B shows a case where a tube is used, and FIG. 6B shows a case where a waveguide that spreads in a horn shape in the processing tank 10 is used, and the intensity distribution of the electromagnetic field is analyzed and displayed. At this time, as the analysis conditions, the microwave frequency is 2450 KHz, whereas the taper length (taper length B shown in FIG. 4) of the horn type waveguide shown in FIG. The length is 122 mm corresponding to the wavelength length.

When microwaves are irradiated under such conditions, first, in the straight type waveguide shown in FIG. 6A, the microwave is introduced from the side surface of the processing tank 10 and the electromagnetic field strength is near the center. It can be confirmed that the region distribution gradually decreases and the region distribution decreases. This indicates that in the heating or drying treatment of the processed material, a large amount of unevenness occurs in the portion where the above-described area distribution of the electromagnetic field intensity decreases, that is, the front side irradiated with the microwave.
On the other hand, in another embodiment of the waveguide extending to the horn type, the horn type is changed to the straight type waveguide shown in FIG. 6A as shown in FIG. In comparison, the overall electromagnetic field strength is high, and it can be confirmed that the region is distributed almost uniformly in the treatment tank 10. This indicates that the region distribution of the electromagnetic field intensity is uniform in the heating or drying treatment of the treatment object, and the treatment without unevenness is possible.
According to another embodiment of the waveguide formed in the horn shape as described above, compared with the straight waveguide shown in FIG. Can be dried or heat-treated without unevenness.

  As described above in detail, according to the first embodiment of the microwave irradiation processing apparatus of the present invention, the microwave irradiation can be performed not only from the upper and lower surfaces of the processing object 1 but also from the side surfaces. The temperature rise of the entire product 1 and the temperature distribution of the entire processed product are free from unevenness, and it is possible to reliably prevent drying unevenness or heating unevenness in the processed product 1 after processing and to perform uniform processing. Further, according to the present embodiment, as shown in FIG. 1, the microwave oscillators 12a and 13a of the first irradiation means 12 and the second irradiation means 13 are controlled by the control means 19 having the thermometer 18 to perform processing. Since the temperature of the product 1 is adjusted, drying or heating unevenness of the processed product 1 can be reliably prevented. Further, according to the present embodiment, as shown in FIG. 3, since the waveguide 16 is provided with the taper (horn) type irradiation port 16a, the microwave is uniformly irradiated in the processing tank 10. It becomes possible to dry or heat-process the processed material 1 without unevenness.

  By the way, this Embodiment is not limited to the conveyor type microwave irradiation processing apparatus which interposes the conveyor 11 from the front surface to the rear surface of the processing tank 10 shown in FIG. 1, for example, the processed material 1 is sealed. It is also possible to provide in a batch type microwave irradiation processing apparatus that takes in and out from the front side into a hollow. In this batch type microwave irradiation processing apparatus, as shown in FIGS. 7 to 9, a batch type processing tank 20 formed in a box shape and hollow and opened on the front surface is provided. A second embodiment (see FIG. 7) in which a first irradiation means 12 for irradiating a wave is provided and second irradiation means 13 are provided on the left and right in addition to the first irradiation means 12, or in addition to the first irradiation means 12 In the third embodiment (see FIG. 8) in which the rear third irradiation unit 14 is provided, or in addition to the first irradiation unit 12, the second irradiation unit 13 and the third irradiation unit 14 are provided on all right and left rear walls. Various irradiation methods such as the fourth embodiment (see FIG. 10) can be selected. That is, in the conveyor type first embodiment (see FIG. 1) in which the front and rear directions of the treatment tank are opened (penetrated), the irradiation means is provided only on the side surface. Irradiation means can be provided on each of the wall surfaces, and various irradiation methods can be selected depending on the combination. The first irradiating means 12 and the second irradiating means 14 shown in FIGS. 7 to 9 are the same constituent elements as those of the first embodiment shown in FIG. 1, and the same constituent elements are denoted by the same reference numerals. In addition, overlapping explanation is omitted.

First, in the second embodiment of the microwave irradiation processing apparatus according to the present invention, as shown in FIG. 7, in addition to the upper and lower first irradiation means 12 in the batch type treatment tank 20, the second irradiation means 13 are provided on the left and right. The first irradiating means 12 is provided with a batch type processing tank 20 for processing the processed material 1 in and out of the sealed hollow from the front, and capable of irradiating the microwave from both above and below the processing tank 20. In addition to the first irradiating means 12, a second irradiating means 14 capable of irradiating from both the left and right side surfaces of the workpiece 1 is provided. Here, the front surface of the processing tank 20 is provided so that the opened opening surface can be sealed with a lid member (not shown). In addition, the treatment tank 20 is provided with a pedestal 22 that is installed so that the treatment object 1 covers the irradiation port on the bottom surface when the microwave is irradiated from the inner bottom surface of the first irradiation means 12. Here, the first irradiating means 12 and the second irradiating means 14 do not need to be provided as a pair so as to face each other like the upper and lower sides or the left and right sides of the processing tank 20, and only one of the left and right sides or the upper and lower sides is provided. For example, when the lower part of the first irradiation unit 12 is reduced, the above-described mounting table 22 is not necessary. In addition, the first irradiation means 12 and the second irradiation means 14 are connected to the processing tank 20 via a waveguide, as in the first embodiment shown in FIG. It is provided so as to operate under the control of the control means.
According to the second embodiment of the microwave irradiation processing apparatus of the present invention, since the microwaves can be irradiated from the left and right second irradiation means 14 in addition to the first irradiation means 12 above and below the treatment tank 20, the first The effect similar to that of the first embodiment can be obtained, and the inside of the treatment tank 20 can be sealed at the time of heating or drying treatment, so that the microwave is not emitted outside the tank, and is effectively treated (irradiated). It becomes possible.

Next, in the third embodiment of the microwave irradiation processing apparatus according to the present invention, as shown in FIG. 8, in addition to the upper and lower first irradiation means 12 in the batch type treatment tank 20, the third irradiation means 14 is provided on the rear surface. 1st irradiation means which is the structure provided and is equipped with the batch-type process tank 20 which puts in and out the processed material 1 from the front in the sealed hollow, and can irradiate this process tank 20 from both the upper and lower sides In addition to the first irradiating means 12, a third irradiating means 14 capable of irradiating from the rear surface opposite to the front surface for loading and unloading the workpiece 1 is provided. Here, the treatment tank 20 is provided with a table 22 on which the treatment object 1 is placed, as in the second embodiment. That is, in the third embodiment, in place of the second irradiation unit that irradiates the microwaves from both the left and right sides of the processing tank 20 in the second embodiment, the third irradiation that can irradiate the microwaves from the rear part of the processing tank 20 is performed. Means 14 are provided, and other configurations are formed in the same manner as in the second embodiment.
Therefore, according to the third embodiment of the microwave irradiation processing apparatus of the present invention, the microwave can be irradiated from the third irradiation means 14 on the rear surface in addition to the first irradiation means 12 above and below the processing tank 20. The effect similar to that of the embodiment can be obtained, and the second irradiation means is not provided on both the left and right sides of the processing tank 20, so that it can be installed with a small installation area when installed side by side with other devices in the factory. it can.

Furthermore, in the fourth embodiment of the microwave irradiation processing apparatus according to the present invention, as shown in FIG. 9, in addition to the upper and lower first irradiation means 12 in the batch type processing tank 20, the second irradiation is applied to all the left and right rear wall surfaces. It has a structure in which means 13 and third irradiation means 14 are provided, and is provided with a batch type treatment tank 20 for processing the processed material 1 in and out of a sealed hollow from the front, and microwaves are moved up and down in this treatment tank 20. It has the 1st irradiation means 12 which can be irradiated from both, and in addition to this 1st irradiation means 12, the 2nd irradiation means 13 which can be irradiated from the right-and-left both sides of processed material 1, and the front which takes in and out processed material 1 are opposed. And third irradiation means 14 capable of irradiating from the rear surface. That is, in the fourth embodiment, in addition to the first irradiation means 12 above and below the treatment tank 20, both the second irradiation means 13 in the second embodiment and the third irradiation means 14 in the third embodiment are all included. It is an attached structure, and microwaves can be irradiated from all wall surfaces other than the front surface where the processing object 1 is taken in and out, and other configurations are formed in the same manner as in the second and third embodiments.
Therefore, according to the fourth embodiment of the microwave irradiation processing apparatus of the present invention, the microwaves are also emitted from the second irradiation means 13 and the third irradiation means 14 on the left and right rear surfaces in addition to the first irradiation means 12 above and below the treatment tank 20. In addition to the first irradiating means 12, the second irradiating means 13 and the third irradiating means 14 are provided, and from all the upper, lower, left and right rear surfaces. By irradiating, it is possible to irradiate microwaves from various angles more effectively than in the first to third embodiments.

As mentioned above, although embodiment of the microwave irradiation processing apparatus by this invention was described in detail, this invention is not limited to embodiment mentioned above, In the range which does not deviate from the summary, it can change.
For example, the first embodiment of the conveyor type in which the inclined horn-shaped irradiation port is provided in the waveguide shown in FIG. 4 has been described in detail. However, the present invention is not limited to this. For example, FIGS. The batch-type second, third, and fourth embodiments shown in the above can also be provided with inclined horn-shaped irradiation ports.

The block diagram which shows 1st Embodiment of the microwave irradiation processing apparatus by this invention. (Example 1) The figure which shows the contrast of the heating state by 1st Embodiment shown in FIG. 1, and a prior art. The figure which shows the other Example of the waveguide shown in FIG. The figure which shows the internal structure seen from the arrow A direction shown in FIG. The figure which shows the other Example of the irradiation port shown in FIG. The figure which shows the contrast of the heating state by the presence or absence of the horn type irradiation port shown in FIG. The block diagram which shows 2nd Embodiment of the microwave irradiation processing apparatus by this invention. (Example 2) The block diagram which shows 3rd Embodiment of the microwave irradiation processing apparatus by this invention. Example 3 The block diagram which shows 4th Embodiment of the microwave irradiation processing apparatus by this invention. Example 4 The block diagram which shows one Embodiment of the conventional microwave irradiation processing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Processed object 10 Processing tank 11 Conveyor 12 1st irradiation means 12a Microwave generator 12b Isolator 12c Matching device 13 2nd irradiation means 13a Microwave generator 13b Isolator 13c Matching device 16 Waveguide 18 Thermometer 19 Control means 19a Processing Part 19b control part

Claims (8)

Microwave irradiation process to bring the processed material into the processing tank and introduce or irradiate the microwave generated by the microwave generator from one or both of the upper and lower surfaces through the waveguide and increase the temperature by drying or irradiation. In the device
A conveyor-type treatment tank that conveys and processes the processed material from the front surface to the rear surface, and a first irradiation means that can irradiate the microwave from either one or both of the upper and lower surfaces, and the first irradiation. In addition to the means, there is provided a second irradiation means capable of irradiating from the left or right side or both sides of the processed material. Microwave irradiation process to bring the processed material into the processing tank and introduce or irradiate the microwave generated by the microwave generator from one or both of the upper and lower surfaces through the waveguide and increase the temperature by drying or irradiation. In the device
A batch-type treatment tank is provided for processing the processed material by putting it in and out of a sealed hollow from the front, and the treatment tank has a first irradiation means capable of irradiating microwaves from one or both of the upper and lower surfaces. In addition to the first irradiation means, the second irradiation means capable of irradiating from the left or right or both side surfaces of the processed material, and the third irradiation capable of irradiating from the rear surface facing the front surface for taking in and out the processed material. One or both of the means are provided. A microwave irradiation processing apparatus characterized by comprising: In the microwave irradiation processing apparatus of Claim 1 or 2,
The first irradiating means, the second irradiating means, and the third irradiating means are each connected to the processing tank via a waveguide and generate a microwave in each direction, and the microwave generator, A microwave comprising: an isolator that absorbs power reflected from the waveguide and protects the microwave oscillator; and a matching unit that performs impedance matching of the processing tank and effectively uses the microwave power Irradiation processing device. In the microwave irradiation processing apparatus of Claim 3,
Control means for controlling the microwave to be able to irradiate the microwave simultaneously or separately from each direction through the waveguide is connected to the microwave generator. Irradiation processing device. In the microwave irradiation processing apparatus of Claim 4,
The control means installs and connects at least one thermopile type or thermistor type infrared thermometer for measuring the temperature of the treatment object during microwave irradiation to the treatment tank, and temperature data of the thermometer The microwave irradiation processing apparatus is characterized in that the temperature state of the processing object can be monitored by controlling the output of the microwave generator according to the above. In the microwave irradiation processing apparatus of Claim 3,
The waveguide is provided with an irradiation port formed in a horn shape having a taper when the microwave is introduced into the processing tank from each direction, and the irradiation port is provided from the outside to the inside of the processing tank. A microwave irradiation processing apparatus characterized by extending so as to spread throughout. In the microwave irradiation processing apparatus of Claim 6,
The microwave irradiation processing apparatus, wherein the waveguide extends so that the horn-shaped irradiation port is close to the vicinity of the processing object in the processing tank. In the microwave irradiation processing apparatus of Claim 6 or 7,
The microwave irradiation processing apparatus according to claim 1, wherein the waveguide has a taper length extending in the horn shape and extending to a length of the wavelength of the microwave.

Images