JP2005321297A - Evaluation method and manufacturing method for sheet containing oxide powder, electronic parts, and evaluation device and manufacturing device for sheet containing oxide powder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an evaluation method enabling to precisely evaluate a film containing oxide powder, a sheet manufacturing method using the evaluation method, an evaluation device and manufacturing device suitable for the these methods, and ceramic electronic parts with high reliability and productivity. <P>SOLUTION: This evaluation method comprises a step in which the light intensity of light L passing through the sheet 10 including a film 12 containing predetermined oxide powder is measured by projecting light L with wavelength of λ<SB>Z</SB>to a sheet 10, and a step in which information on either of the weight per unit area or the particle diameter of the oxide powder included in the film 12 is obtained based on the measured light intensity. The wavelength of λ<SB>Z</SB>is at least within the range greater than 900 nm. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an evaluation method and a manufacturing method for an oxide powder-containing sheet, an electronic component, and an evaluation apparatus and a manufacturing apparatus for an oxide powder-containing sheet.

  For the production of ceramic electronic components, green sheets containing ceramic powder and a binder are used. In order to make the film thickness of such a green sheet uniform, a method of irradiating light and measuring the film thickness from the amount of transmitted light has been proposed (for example, see Patent Document 1). However, in order to improve the reliability and yield of ceramic electronic components, the uniformity of the amount per unit area of the ceramic powder contained in the green sheet may be more important than the uniformity of the film thickness. In order to make the amount of ceramic powder in a continuously produced green sheet uniform, it is necessary to continuously measure and feed back the amount of ceramic powder in the moving green sheet in a non-destructive manner. Become.

  As a method for nondestructively measuring the content of powder in a green sheet, a method of measuring the amount of particles per unit area of the film from the amount of X-ray transmission using the attenuation of X-rays by the powder (hereinafter referred to as X There are cases where it is called a line method). However, in recent years, green sheets have become thinner, and when measuring a thin green sheet, the amount of attenuation of X-rays by the green sheet becomes small. In this case, the X-ray method is greatly affected by fluctuations in the measurement environment and fluctuations in the thickness of the base film, so errors due to these influences cannot be ignored. For this reason, the X-ray method is not suitable for a quantitative method for continuously monitoring the amount of powder in a moving green sheet.

In addition, a method has been proposed in which the green sheet is irradiated with light and the content is measured from the transmitted amount (see, for example, Patent Document 2). In Patent Document 2, the light used for the measurement is “in terms of the wavelength of light, it is preferable to use visible light having a wavelength of 350 nm to 800 nm and its surrounding ultraviolet rays and infrared rays. This transparent material is transparent in the visible light region and its surroundings, but is opaque in other regions, and the correlation between the transmitted light intensity and the amount of particles is lost.
Japanese Patent Laid-Open No. 5-71927 JP 2002-167872 A

  In the prior art described in Patent Document 2 described above, the influence of the resin or the like is considered as the reason for selecting the wavelength range of light, but examination of the powder to be analyzed and the wavelength range has not been sufficient. For example, when a green sheet containing a powder having a large particle size or a green sheet containing a colored powder is measured in a wavelength range including the visible range, a sufficient amount of transmitted light may not be obtained. If a sufficient amount of transmitted light cannot be obtained, it cannot be detected by the light receiving element, or noise with respect to signal intensity increases, resulting in a decrease in quantitative accuracy. As a method for improving the quantitative accuracy, it is conceivable to reduce the influence of noise by performing multiple measurements, but in such a method, for example, the amount of powder contained in the green sheet is continuously produced while producing it. Cannot be monitored and fed back to manufacturing conditions.

  In view of such problems, the present invention provides an evaluation method capable of accurately evaluating a film containing an oxide powder that is difficult to accurately evaluate (analyze) by a conventional method, and an oxidation using the same. It is an object of the present invention to provide a method for producing a product powder-containing sheet, and an evaluation device and a production device suitable for those methods. Another object of the present invention is to provide an electronic component with high reliability and high manufacturing yield.

  As a result of studies to achieve the above object, the present inventors have found that the amount of oxide powder contained in the film can be accurately quantified by using light in a specific wavelength range. The present invention is based on this new knowledge.

In other words, the evaluation method of the present invention is an evaluation method for evaluating the sheet comprising a film containing a predetermined oxide powder was irradiated with light including light L (i) a wavelength lambda _Z in the sheet Measuring the light quantity of the light L that has passed through the sheet, and (ii) either one of the mass per unit area and the particle diameter of the oxide powder present in the film based on the light quantity and a step of obtaining the information, the wavelength lambda _Z is at least part of the range of more than 900 nm.

  Moreover, the 1st manufacturing method of this invention for manufacturing an oxide powder containing sheet | seat is the process of forming the sheet | seat containing the film | membrane containing predetermined | prescribed oxide powder, The said sheet | seat is the evaluation method of this invention. Obtaining information about the mass per unit area of the oxide powder present in the film by evaluating, and changing the formation conditions related to the thickness of the film based on the information.

The second production method of the present invention for producing an oxide powder containing sheet includes the steps of forming a sheet comprising a film containing a predetermined oxide powder, light including light L having a wavelength lambda _Z Measuring the light quantity of the light L that has been irradiated to the sheet and transmitted through the sheet, and changing the formation condition relating to the thickness of the film so that the light quantity becomes a predetermined value, and the wavelength λ _Z is It is at least part of the range of 900 nm or more.

  Moreover, the electronic component of this invention is an electronic component produced using the oxide powder containing sheet | seat manufactured with the manufacturing method of the said invention.

The evaluation apparatus of the present invention is an evaluation apparatus for evaluating a sheet containing film containing a predetermined oxide powder, light irradiating means for irradiating light including light L having a wavelength lambda _Z in the sheet When, and a measuring means for measuring the amount of the light L transmitted through the sheet, at least a portion of the range the wavelength lambda _Z is not less than 900 nm, the oxide present in the film based on the light quantity Information on either the mass per unit area or the particle size of the product powder is obtained.

Further, the manufacturing apparatus of the present invention for producing an oxide powder containing sheet, the sheet forming means for forming a sheet comprising a film containing a predetermined oxide powder, light including light L having a wavelength lambda _Z wherein a light irradiating means for irradiating the sheet, and a measuring means for measuring the amount of the light L transmitted through the sheet, wherein the wavelength lambda _Z is at least part of the range of more than 900 nm.

  According to the present invention, it is possible to accurately evaluate a film containing an oxide powder, which is difficult to accurately evaluate with a conventional method, in a short time. By using this evaluation method, a sheet including a film in which the content of the oxide powder contained in the film is uniform can be manufactured. The electronic component of the present invention formed using such a film has high yield and reliability during manufacturing. Moreover, according to the evaluation apparatus and manufacturing apparatus of this invention, the evaluation method and manufacturing method of this invention are easily realizable.

  Embodiments of the present invention will be described below. It should be noted that the method and apparatus of the present invention described below are related to each other, and description of overlapping contents may be omitted. In addition, similar parts may be omitted by using the same reference numerals.

(Embodiment 1)
In the first embodiment, an evaluation method and an evaluation apparatus of the present invention will be described. The evaluation method of the present invention is a method for evaluating a sheet including a film containing a predetermined oxide powder (hereinafter sometimes referred to as powder (A)).

In this way, it measures the amount of light L light (may be light consisting of only the light L) through the sheet by irradiating the sheet containing the light L having a wavelength lambda _Z (step (i)). Next, based on the measured light quantity, information on either the mass per unit area or the particle size of the powder (A) present in the film is obtained (step (ii)).

Wavelength lambda _Z is at least part of the range of more than 900 nm, may be part of the wavelength range of the range, it may be a single wavelength of the range. Wavelength lambda _Z is preferably less 2500 nm. Furthermore, it is more preferable wavelength lambda _Z is at least part of the scope of 1000Nm～1700nm (such as in the range of 1000nm~1600nm). In this range, for example, the influence of scattering by the powder (A) can be reduced, so that the amount of transmitted light necessary for high-accuracy evaluation can be obtained, and the light with respect to the change in mass per unit area of the powder (A) present in the film The change in the transmission amount of L increases. As a result, quantitative accuracy can be increased.

  The evaluation method of the present invention is suitable for evaluation of powders that are difficult to analyze by conventional methods because of large absorption, reflection, and scattering of light in the visible range. Examples of such a powder (A) include a powder made of at least one oxide selected from aluminum oxide (alumina), borosilicate, calcium titanate, strontium titanate, and barium titanate. The powder (A) may be a powder composed of one of these oxides, may be a plurality of solid solutions of these oxides, or may contain a trace amount of additives. Good. These oxide powders may be colored powders such as white or may be colored when impurities are mixed. Since colored powders have large absorption and reflection in the visible light region, such oxide powders are quantified using visible light and its surroundings, specifically, attenuation of light in the wavelength region of less than 900 nm. However, since the attenuation of light is large, the quantitative accuracy may be lowered. Therefore, the present invention is suitable for evaluating these powders.

The average particle size of the powder (A) is not particularly limited, but the average particle size of the powder (A) is in the range of 0.1 μm to 1.2 μm (more preferably in the range of 0.3 μm to 1.0 μm). Is preferred. Within this range, it is possible to evaluate particularly accurately. An average particle size in the range of 0.3Myuemu～1.0Myuemu, by twice or more the average particle diameter of the lower limit of the wavelength lambda _Z, easily sufficient amount of transmitted light is obtained in the evaluation. Further, when the average particle diameter is in this range, the wavelength range of lambda _Z for a change in the transmitted light amount to the amount of powder (A) is large, it is possible to perform quantitative with high accuracy. If the average particle size is out of this range, the accuracy of quantification may decrease.

  A perspective view of an example of the implementation of the evaluation method of the present invention is schematically shown in FIG. The sheet 10 includes a base film 11 and a film 12 formed on the base film 11. The membrane 12 includes a powder (A). Light including the light L is emitted from the light irradiation means 13. The measuring means 14 receives the light L that has passed through the sheet 10 and outputs information relating to the amount of light. Although FIG. 1 shows the case where the light L is irradiated from the base film 11 side, the light L may be irradiated from the film 12 side. Moreover, the light irradiation means 13, the measurement means 14, and the spectroscopic means described later may be disposed above and below the sheet, or may be disposed away from the sheet using an optical fiber or the like.

  The kind and application of the sheet 10 are not limited as long as the sheet 10 contains the powder (A) to be measured. Typical examples of the sheet 10 include a green sheet that is a material of a ceramic capacitor and a green sheet of a ceramic multilayer substrate. Although FIG. 1 shows the case where the sheet 10 includes the base film 11, the sheet 10 may include only the film 12, and does not include oxide powder in addition to the film 12. Other films (for example, base film 11) may be included.

The base film 11 is a film for holding the formed film 12. When the base film 11 is used, the base film 11 is preferably made of a resin and does not contain additives such as oxide powder. The material and thickness of the base film 11 are not particularly limited, but errors due to the base film 11 can be reduced when the attenuation factor of the light L by the base film 11 is small. Therefore, the transmittance of the base film 11 at the wavelength lambda _Z is preferably 80% or more. In addition, when the attenuation rate of the light L by the base film 11 can be known, the error can be reduced by performing correction to remove the influence. For example, it is preferable to measure in advance the amount of transmitted light when only the base film 11 is present, and use the amount of transmitted light for correcting the calculation in step (ii). Even when the moving sheet 10 is continuously measured, there is no particular limitation on the measurement location of the base film 11 where the transmittance is measured in advance because the influence of the variation of the base film 11 on the measurement value is small. The measurement accuracy can be sufficiently increased by measuring any one point of the base film 11. Examples of the preferable base film 11 include films made of polyethylene terephthalate (PET) or polypropylene (PP).

  The film 12 may contain other substances such as a polymer compound in addition to the powder (A). When the attenuation rate of the light L by these materials is constant or small, or when the attenuation rate can be known, errors due to these materials can be reduced. The film 12 may contain a solvent such as an organic solvent or an additive in addition to the polymer compound as a substance other than the powder (A). Representative polymer compounds include, for example, acrylic resin, cellulose, and butyral resin. Such a polymer compound can be used as a binder. Examples of the solvent include methyl ethyl ketone, toluene, phthalate ester, butyl acetate, water and the like. Examples of the additive include a dispersant such as stearic acid.

Contained in the film 12, powder (A) other than the substance, e.g., a base film, a polymer compound, an organic solvent, such as additives, it is usually preferable no specific absorption at a wavelength lambda _Z. However, even if there is such a specific absorption, it is possible to reduce the influence by selecting the appropriate wavelength lambda _Z.

The thickness of the base film 11 and the film 12 and the amount of the powder (A) contained in the film 12 are not particularly limited, but in order to obtain a sufficient amount of transmitted light and reduce the error, the light L from the sheet 10 is reduced. The value of attenuation rate [−log {(transmitted light amount I) / (irradiated light amount I ₀ )}] (hereinafter sometimes referred to as “light attenuation rate”) is 3.0 or less (more preferably 2.5 or less). ) Is preferable. In one example, the thickness of the film 12 is in the range of 2.0 μm to 8.0 μm. Further, in one example, the amount per unit area of the powder contained in the film 12 (A) is in the range of ^{0.08g / 100cm 2 ~0.27g / 100cm 2} .

  In the evaluation method of the first embodiment, the transmission amount of the light L irradiated on the sheet 10 varies depending on the content and particle size of the powder (A) contained in the film 12. Therefore, when evaluating the film 12 containing the powder (A) having a substantially constant particle size, information on the amount of the powder (A) present in the portion irradiated with the light L based on the transmission amount of the light L. Is obtained. Therefore, based on the measured light quantity, detection of a change in mass per unit area of the powder (A) present in the film 12 and determination of mass per unit area of the powder (A) present in the film 12 are performed. Can be performed. In the method and apparatus of the present invention, it is possible to perform quantification continuously while moving the sheet 10. Similarly, when the content of the powder (A) present in the film 12 is substantially constant, the change in the particle diameter of the powder (A) present in the film 12 is determined based on the transmission amount of the light L. It can be detected. In this case, the particle diameter can be estimated by preparing a calibration curve in advance.

  In the evaluation method of the first embodiment, before step (ii), data indicating the relationship between the mass per unit area of the powder (A) present in the film 12 and the amount of transmitted light L (for example, a calibration curve) ) May be acquired. Based on the obtained data and the light quantity of the light L measured in step (i), the mass per unit area of the powder (A) present in the film 12 can be quantified in step (ii). In order to create a calibration curve, it is necessary to quantify the mass per unit area of the powder (A) present in the film 12, and various methods conventionally used are applied for the quantification. it can. For example, the powder (A) may be taken out from the film 12 and the mass thereof may be measured, or the powder (A) may be quantified using the amount of X-ray (including fluorescent X-ray) transmitted. May be. These evaluation methods can perform quantitative measurement with relatively high accuracy by performing various corrections over time.

  Moreover, the evaluation method of the first embodiment includes a step of quantifying the mass per unit area of the powder (A) in a part of the film 12 by another evaluation method after the step (ii). The above data (for example, a calibration curve) may be corrected using the quantitative value obtained by the method. Specifically, the data is corrected by comparing the quantitative value calculated using the transmitted light amount of the light L measured in the part and the data with the quantitative value obtained by another evaluation method. it can. For example, the calibration result may be corrected from the ratio by comparing the quantitative results obtained by other evaluation methods with the quantitative results obtained by the evaluation method of the present invention. In addition, a calibration curve is prepared for each powder having a different average particle diameter, and a quantitative result obtained by another evaluation method is compared with a quantitative result obtained by the evaluation method of the present invention. A calibration curve may be selected. In these cases, as other evaluation methods, various conventionally used methods can be applied. For example, the above-described methods can be applied. By correcting or selecting a calibration curve, high-precision quantification can be achieved only by measuring the amount of transmitted light.

  In the evaluation method of the first embodiment, the transmitted light amount of the light L may be measured for each predetermined wavelength width selected from the range of 10 nm to 100 nm. According to this configuration, since the attenuation rate of the light L can be quantified for each predetermined wavelength width, it is possible to reduce the influence of a substance having an absorption peak in a specific wavelength range, and improve the quantification accuracy. be able to. Further, by evaluating with a specific wavelength width, the influence of interference at each wavelength can be averaged, and the quantitative accuracy can be improved. Such an effect becomes remarkable when the wavelength width to be separated is in the range of 10 nm to 100 nm. In order to realize this configuration, for example, the light L may be dispersed by the light irradiation unit 13 or the measurement unit 14 and the light amount of the light L may be measured for each fixed wavelength width. In that case, a photodiode array or the like may be used for the measuring means 14.

Further, in the evaluation method of the first embodiment, the wavelength width of the wavelength lambda _Z used for evaluation may be limited to a range of 10 nm to 100 nm. According to this configuration, the wavelength with the highest quantitative accuracy can be selected and evaluated, and the time required for the evaluation can be shortened compared with the evaluation using a wide wavelength range. In addition, the linearity of the calibration curve is increased and the quantitative accuracy is also improved. In order to realize this configuration, a light irradiation means (for example, a light irradiation means including an optical filter or a spectroscopic means) that irradiates only light L having a specific wavelength may be used, or only light L having a specific wavelength may be used. A measuring means for detecting (for example, a measuring means including an optical filter or a spectroscopic means) may be used.

  Further, in the evaluation method of the first embodiment, information on the powder (A) may be acquired by correcting the attenuation of the light L in a portion other than the film 12. For example, the calculation means exists in the film 12 based on the light amount of the light L measured by the measurement means, the data stored in the storage means, and the transmission amount of the light L when the film 12 is not present. You may calculate the mass per unit area of powder (A). As a result, the powder (A) contained in the film 12 can be more accurately evaluated. The portion other than the film 12 is an atmospheric gas (for example, air) when the sheet 10 is made of only the film 12, and is the base film 11 and the atmospheric gas when the sheet 10 includes the base film 11. According to these corrections, the influence of the variation in the thickness of the base film 11 and the influence of the variation in the amount of light L emitted from the light source can be corrected.

  Examples of the method for measuring the attenuation of the light L in the portion other than the film 12 include the following methods. The first method is a method in which the attenuation rate of the light L in a portion other than the film 12 is measured in advance and stored in a storage unit or the like, and the attenuation of the light L by the portion other than the film 12 is corrected. For example, the attenuation factor of the light L may be measured for a representative sample of the base film 11. Further, the attenuation factor of the light L may be measured for the base film 11 before the film 12 is formed. In this case, by measuring and comparing the attenuation rate before forming the film 12 and the attenuation rate after forming the film 12 at the same location of the base film 11, the variation of the attenuation rate due to the variation in the thickness of the base film 11 is measured. The impact can be reduced.

  In the second method, the light emitted from the light source in the light irradiation means 13 is demultiplexed into the first light (light L ′) and the second light (light L). For demultiplexing, for example, a half mirror can be used. Then, the amount of transmitted light in a portion other than the film 12 is measured using the first light, and the amount of transmitted light in the state where the film 12 exists is measured using the second light. In this case, the measuring unit 14 includes a first measuring unit that measures the transmitted light amount of the first light, and a second measuring unit that measures the transmitted light amount of the second light. According to the second method, the influence of light attenuation in a portion other than the film 12 can be corrected by using the light quantity measured by the first measurement means and the light quantity measured by the second measurement means. Further, according to this method, errors due to fluctuations in the amount of light emitted from the light source can be reduced.

When the correction is performed using the transmitted light quantity I _B transmitted through the base film 11 which film 12 is not formed, it may be calculated attenuation rate of the light L as represented by the formula (1) below. However, in Expression (1), the irradiation light amount I _B0 is the irradiation light amount when the transmitted light amount I _B is measured, and the transmitted light amount I and the irradiation light amount I ₀ are each transmitted when the sheet 10 including the film 12 is measured. Light quantity and irradiation light quantity.

  When quantification is performed using the attenuation rate calculated by (Equation 1), quantification is performed using a calibration curve from which the influence of light attenuation by the base film 11 is removed.

  In the evaluation method of the first embodiment, the light emitted from the light source in the light irradiation unit 13 is demultiplexed into the first light (light L ′) and the second light (light L), and other than the film 12. Even if the mass per unit area of the powder (A) existing in the film 12 is calculated by using the ratio between the transmitted light amount of the light L ′ in the portion and the transmitted light amount of the light L in the portion where the film 12 exists. Good. In this method, a calibration curve relating to the relationship between the ratio of the two transmitted light amounts and the mass per unit area of the powder (A) present in the film 12 is used as the calibration curve.

  In the evaluation method of the first embodiment, the evaluation may be performed with the sheet 10 stopped, or the evaluation may be performed while the sheet 10 is moved. A sheet moving means such as a roller can be used to move the sheet 10.

Next, an evaluation apparatus of the present invention that can carry out the above evaluation method will be described. Evaluation apparatus of the present invention is an evaluation apparatus for evaluating a sheet containing film containing a predetermined oxide powder (powder (A)), it is irradiated with light containing light L having a wavelength lambda _Z in the sheet A light irradiating means and a measuring means for measuring the amount of the light L transmitted through the sheet. In this evaluation apparatus, information on either the mass per unit area or the particle size of the powder (A) present in the film is obtained based on the measured light quantity. Since the wavelength λ _Z and the sheet to be evaluated have been described above, a duplicate description is omitted. This evaluation apparatus may include various means for realizing the above-described evaluation method. The structure of an example of the evaluation apparatus of this invention is typically shown in FIG.

  The evaluation device 20 in FIG. 2 includes a light irradiation unit 13, a measurement unit 14, a storage unit 21, and a calculation unit 22. In addition, as shown in the manufacturing apparatus 30a of FIG. 9, the evaluation apparatus of the present invention may include means for correcting the influence of the base film 11. Below, the case where the mass per unit area of the powder (A) which exists in the film | membrane 12 is quantified is demonstrated.

Light irradiating means 13 comprises at least a light source for emitting light having a wavelength lambda _Z. As the light source, for example, a lamp such as a xenon lamp or a halogen lamp, a light emitting diode, or a laser diode can be used.

  The measuring means 14 includes a light receiving element for measuring the amount of light L that has passed through the sheet 10. This light receiving element is disposed on the optical path of the light L. The light receiving element may be any element that can measure the light quantity of the light L. For example, a photodiode or a phototransistor can be used.

  In the case of splitting the light L, at least one selected from the light irradiating means 13 and the measuring means 14 includes a spectroscopic means. A known spectroscopic means such as a diffraction grating can be applied to such spectroscopic means.

  The storage means 21 stores data (calibration curve) relating to the relationship between the mass per unit area of the powder (A) present in the film 12 and the amount of transmitted light L. Usually, the storage means 21 also stores a design value (target value) of mass per unit area of the powder (A) present in the film 12. The storage unit 21 may further store data for correcting the relationship between the transmitted light amount of the light L and the mass per unit area of the powder (A) present in the film 12.

  The calculation means 22 calculates the mass per unit area of the powder (A) present in the film 12 based on the transmitted light amount of the light L measured by the measurement means 14 and the data stored in the storage means 21. . As the storage means 21 and the calculation means 22, for example, a personal computer including a memory, a CPU, and an input device can be used.

  When correcting the attenuation of the light L in a portion other than the film 12, the calculation unit 22 includes the transmitted light amount of the light L measured by the measurement unit 14, the data (calibration curve) stored in the storage unit 21, and The mass per unit area of the powder (A) present in the film 12 may be calculated based on the transmitted light amount of the light L when the film 12 is not present. In this case, a calibration curve created by removing the influence of portions other than the membrane 12 is usually used.

  Unlike the conventional analysis method using visible light, the method and apparatus of the present invention have an advantage that it is not necessary to block visible light emitted from a fluorescent lamp or the like. Further, compared to an evaluation method using X-rays, there are advantages that the evaluation can be performed in a short time and with simple settings, and that safety management is easy. For this reason, in the evaluation apparatus of the present invention, it is possible to make the light irradiation means and the measurement means visible, and maintenance and inspection are easy.

  In the evaluation method and the evaluation apparatus of the present invention, the powder (A) is analyzed using light having a wavelength region of 900 nm or more. Since the amount of transmitted light is large in such a wavelength range, the error can be significantly reduced as compared with the case where visible light is used, and the analysis can be performed in a short time. Therefore, the evaluation method and the evaluation apparatus of the present invention are suitable for real-time evaluation of continuously manufactured sheets.

The wavelength dependence of the value of [−log {(transmitted light amount I) / (irradiated light amount I ₀ )}] in a green sheet using barium titanate powder (average particle size: 0.7 μm) as the powder (A) is shown. 3 shows. [-Log {(transmitted light amount I) / (irradiated light amount I ₀ )}] is a value corresponding to the absorbance. The measured green sheet was produced by forming a film made of barium titanate powder and butyral resin on a polyethylene terephthalate film (base film 11).

  In FIG. 3, line A is a measurement result of a sheet made of a base film and a film having a thickness of 4.5 μm, and line B is a measurement result of a sheet made of the base film and a film having a thickness of 9.0 μm. Line C is the measurement result of the base film only. As is clear from the lines A and B in FIG. 3, light is hardly transmitted at a wavelength of 400 nm or less. In the entire region of 800 nm or less, the transmitted light amount is about 0.1% or less of the irradiation light amount. Butyral resin is known as a colorless and transparent resin, and light attenuation is considered to be mainly due to barium titanate. When a powder such as alumina powder (average particle size: 0.5 μm) or strontium titanate powder (average particle size: 0.5 μm) is used instead of barium titanate powder (average particle size: 0.7 μm). Also confirmed the same trend. On the other hand, in the case of alumina powder (average particle size: 0.05 μm) and barium titanate powder (average particle size: 0.05 μm), a sufficient amount of transmitted light was obtained even in the visible light region.

  On the other hand, FIG. 4 shows the state of light attenuation in the wavelength region of 900 nm or more for the same green sheet as the lines A and B in FIG. 3 except that the thickness of the film is 2.5 μm, 5 μm, or 10 μm. . As shown in FIG. 4, the light attenuation rate was small at 900 nm or more, particularly 1000 nm or more, and a sufficient amount of transmitted light was obtained. Further, although not shown in FIG. 4, a sufficient amount of transmitted light was obtained even in a wavelength region of 1600 nm or more. Thus, the amount of transmitted light is sufficient in the wavelength region of 900 nm or more, and high analysis accuracy can be realized.

On the other hand, in the wavelength range larger than 2500 nm, there are absorption peaks due to the organic polymer and the base film present in the film, and therefore the quantitative accuracy may be lowered due to the influence of these absorption peaks. Therefore, it is preferable wavelength lambda _Z is less 2500 nm.

Further, the lower limit of the wavelength lambda _Z is preferably at least twice the average particle size of the powder (A). 5, 6 and 7, a green sheet constituted by a base film made of polyethylene terephthalate and a film (thickness: 2.5-8.0 μm) made of barium titanate powder and butyral resin, The result of measuring the attenuation factor of light [-log {(transmitted light amount I) / (irradiated light amount I ₀ )}] is shown. 5 and 6 show the measurement results when using barium titanate powder having an average particle diameter of 1 μm, and FIG. 7 shows the measurement results when using barium titanate powder having an average particle diameter of 0.5 μm. . FIG. 5 shows the result of measurement using light of five types of wavelengths in the range of 1200 nm to 1600 nm, and FIG. 6 shows the result of measurement using light of four types of wavelengths in the range of 2000 nm to 2300 nm. FIG. 7 shows the results of measurement using light of seven wavelengths in the range of 1000 nm to 1600 nm.

As shown in FIG. 5, when the measurement wavelength is less than twice the average particle diameter, the linearity of the relationship between the mass of the powder per unit area and the light attenuation rate is lost. This is considered to be because the influence of scattering increases and the amount of transmitted light decreases, resulting in an increase in error. On the other hand, as shown in FIG. 6, when the measurement wavelength was twice or more the average particle diameter, the proportional relationship between the mass of the powder per unit area and the light attenuation factor was high. Similarly, in the data of FIG. 7 in which the measurement wavelength is twice or more the average particle diameter, the mass of the powder per unit area and the light attenuation rate showed a high proportional relationship. Therefore, by setting the lower limit value of the wavelength _λZ to be twice or more the average particle diameter of the powder (A), particularly high analysis accuracy can be realized. The fact that the mass of the powder per unit area and the light attenuation rate show a high proportional relationship is advantageous also in that a highly reliable calibration curve can be easily obtained. 5 to 7 are results obtained by correcting the influence of absorption by the base film, but similar results were obtained even when correction was not performed.

For a green sheet containing barium titanate powder having an average particle size of 0.5 μm (sheet mass per unit area: 0.80 mg / cm ² ), the mass of the powder per unit area by the method of the present invention and the X-ray method Was quantified. The time required for the measurement was 1 second in the method of the present invention, and 10 seconds in the X-ray method. The reason why a long time is required for the measurement by the X-ray method is that the X-ray counting error is large, and it is necessary to perform a long-time measurement and average in order to improve accuracy. As a result of verifying each measurement error, the error of the method of the present invention was 1.7%, and the error of the X-ray method was 5.8%. Further, when the sheet mass changes by ± 5%, the amount of change in the light attenuation rate [−log {(transmitted light amount I) / (irradiated light amount I ₀ )}] in the method of the present invention is 6.0 ×. ^10-2 . On the other hand, when the sheet mass changes by ± 5%, the amount of change in the X-ray attenuation rate [−log {(transmitted X dose) / log (irradiated X dose)}] in the X-ray method is 9 8 × 10 ⁻³ . Thus, according to the method of the present invention, the powder (A) can be accurately quantified in a short time.

(Embodiment 2)
In the second embodiment, two methods for manufacturing an oxide powder-containing sheet and a manufacturing apparatus that can be used for the manufacturing method will be described.

  The first manufacturing method of the second embodiment includes a step of forming a sheet 10 including a film 12 containing a predetermined oxide powder (powder (A)). The film 12 can be formed by a known method such as a doctor blade method or an extrusion method. Next, information about the mass per unit area of the powder (A) present in the film 12 is obtained by evaluating the formed sheet 10 by the evaluation method described in the first embodiment, and based on the information. Including a step of changing a forming condition relating to the thickness of the film 12. By controlling the thickness of the film 12 based on the acquired information, the amount of the powder (A) contained per unit area of the film 12 can be made uniform.

  Moreover, in the said 1st manufacturing method, it is preferable to form the sheet | seat 10 continuously and to evaluate the moving sheet | seat 10 and to change the formation conditions regarding the thickness of the film | membrane 12. FIG. Evaluation of the moving sheet 10 may be performed continuously or intermittently at regular intervals. As a result, fluctuations in the amount of the powder (A) present in the film 12 can always be fed back to the formation conditions of the sheet 10, so that the film 12 having a uniform powder (A) content can be formed.

  The membrane 12 is formed using a slurry containing the powder (A). In the said 1st manufacturing method, before forming the sheet | seat 10, it forms in a slurry by evaluating the sample sheet with the process of forming a sample sheet using a part of slurry, and the evaluation method of this invention. A step of obtaining information on the particle size of the powder (A) and changing the dispersion condition of the powder (A) in the slurry. By changing the dispersion conditions (for example, particle size distribution and average particle size) of the powder (A) in the slurry based on the acquired information, a slurry having a uniform dispersion state can be produced, and the slurry is used. Thus, the homogeneity of the film 12 can be improved by forming the film 12.

The second production method of the present invention, a sheet 10 of light comprising the steps of forming a sheet 10 comprising a membrane 12 containing a predetermined oxide powder (powder (A)), the light L having a wavelength lambda _Z And measuring the light quantity of the light L that has passed through the sheet 10 and changing the formation conditions relating to the thickness of the film 12 so that the light quantity becomes a predetermined value, and the wavelength λ _Z is in the range of 900 nm or more (Preferably 2500 nm or less). In this method, the thickness of the film is controlled based only on the amount of light. For example, the thickness of the film is controlled so that the amount of light is constant or a predetermined value. Also in this method, the attenuation of the light L in portions other than the film 12 may be corrected. In addition, the sheet 10 may be formed continuously, and the formation condition regarding the film thickness may be changed based on the amount of light transmitted through the moving sheet 10. The measurement of the amount of light may be performed continuously or intermittently at regular time intervals.

The manufacturing apparatus according to the second embodiment is an apparatus for carrying out the first or second manufacturing method. The manufacturing apparatus includes a light irradiating means for irradiating the sheet-forming means for forming a sheet comprising a film containing a predetermined oxide powder (powder (A)), the light containing light L having a wavelength lambda _Z in the sheet, Measuring means for measuring the amount of light L that has passed through the sheet. The manufacturing apparatus further includes means necessary for carrying out the manufacturing method described above.

  The sheet forming means preferably forms the sheet continuously. The sheet forming means preferably includes a film thickness control means for controlling the thickness of the film based on the light quantity of the light L measured by the measuring means. As the sheet forming means including the film thickness control means, a known coating apparatus, for example, a coater head described later can be used. When the particle size of the powder (A) is almost constant, the mass per unit area of the powder (A) existing in the film is constant by controlling the film thickness so that the light quantity of the light L becomes a predetermined value. Can be. At this time, the thickness of the film may be controlled by correcting the attenuation of the light L in a portion other than the film containing the powder (A).

  The manufacturing apparatus according to the second embodiment may include the evaluation apparatus described in the first embodiment. In this case, the manufacturing apparatus according to the second embodiment includes a storage unit that stores data on the relationship between the mass per unit area of the powder (A) existing in the film and the transmitted light amount of the light L, an arithmetic unit, It is preferable to provide. The sheet forming means preferably includes a film thickness control means for controlling the thickness of the film. The calculating means calculates the mass per unit area of the powder (A) present in the film based on the light quantity of the light L measured by the measuring means and the data. The film thickness control means controls the thickness of the film to be formed based on the mass calculated by the calculation means. Thereby, the amount per unit area of the powder (A) contained in the film can be set to a desired value. Note that, as described in the first embodiment, the calculation unit may perform the quantification by correcting the attenuation of the light L in a portion other than the film.

  The manufacturing method and manufacturing apparatus of the second embodiment can be applied to any sheet as long as it can be evaluated by the evaluation method of the first embodiment. Hereinafter, as a typical example, a method for manufacturing a green sheet as a material for a ceramic electronic component and an example of the manufacturing apparatus will be described.

  An example of the manufacturing apparatus is schematically shown in FIG. The manufacturing apparatus 30 of FIG. 8 includes a delivery unit 31, a coater head 32, a drying unit 33, a winding unit 34, and the evaluation device 20. The feeding unit 31 and the winding unit 34 function as a moving unit that moves the sheet. A slurry is applied to the base film 11 delivered from the delivery unit 31 to a constant thickness by the coater head 32.

  The slurry is formed by dispersing a powder (A) having a substantially uniform particle size distribution, a binder, and the like in a solvent. As the particle diameter of the powder (A) is more uniform, higher quantitative accuracy can be realized. For dispersing the powder (A) and the binder, various dispersers are used depending on their properties. When the particles in the powder do not form a strong aggregate or when the slurry has a high viscosity, it is preferable to use a planetary mixer. On the contrary, when a powder having a low slurry viscosity and easily agglomerated is used, it is preferable to use a ball mill, a bead mill or a sand mill.

  A dispersant may be added to the slurry in order to promote dispersion and maintain the dispersed state. As the dispersant, either ionic or nonionic may be used. Any dispersant improves the dispersibility in a solvent by adsorbing on the surface of the particles constituting the powder and exposing a molecular site having solvent affinity to the solvent side.

  Various types of coater heads can be applied to the coater head 32 according to the purpose. A typical method of the coater head is a doctor blade method. In the doctor blade method, the distance between the plate-like blade and the base film is managed with high accuracy. The coating film applied thicker than the design value on the base film is made into a coating film (film 12) having a predetermined thickness by the blade.

  The sheet 10 on which the film 12 is formed by the coater head 32 is dried by the drying unit 33. There is no limitation in the drying method in the drying part 33, It selects according to the characteristic of a coating film from various methods, such as hot air drying and infrared rays drying.

  The sheet 10 that has been dried is evaluated by the evaluation device 20. The storage means 21 stores in advance a calibration curve for quantifying the powder (A) and a design value for the amount of the powder (A). The calculation means 22 quantifies the mass per unit area of the powder (A) based on the data stored in the storage means 21 and the measured light quantity. Further, the calculation means 22 outputs a control signal for controlling the coater head 32 based on the difference between the design value and the quantitative value. Based on the control signal, the coater head 32 is controlled. Specifically, when the quantitative value of the powder (A) is smaller than the design value, the coater head 32 is controlled so that the film 12 becomes thick. Conversely, when the quantitative value of the powder (A) is larger than the design value, the coater head 32 is controlled so that the film 12 becomes thin. Thus, by controlling the film thickness of the coating film based on the evaluation result, the mass per unit area of the powder (A) present in the film 12 can be made constant.

  The sheet 10 that has been evaluated is rolled up by the winding unit 34 together with the base film into a roll. Thereafter, the sheet 10 on the roll is cut into a certain width and length by a slitter or the like, and sent to the next laminating step.

  In the evaluation of the green sheet, a calibration curve showing the relationship between the amount of transmitted light of the sheet 10 including the base film 11 and the amount of the powder (A) may be created and quantified using this. The quantification may be performed based on the ratio between the transmitted light amount of the light L and the transmitted light amount of the light L that has passed through the sheet 10 in the state where only the base film 11 exists. In this case, since the quantitative value does not change even if the attenuation amount of light by the base film 11 changes due to the type or lot of the base film 11, it is not necessary to create a calibration curve for each type or lot of the base film 11. Quantification can be performed. Further, when measuring the amount of transmitted light in a portion where only the base film 11 exists in order to correct the base film 11 or the like, the position of the light irradiating means and the measuring means for performing the measurement is only the base film 11 There is no particular limitation as long as it is possible. For example, the place where only the base film 11 is measured may be before the coater head 32 or behind it. When the measurement is performed at a portion behind the coater head 32, the measurement may be performed at an end portion of the sheet 10 where the film 12 is not formed.

  FIG. 9 schematically shows an example of a manufacturing apparatus in the case of correcting the influence due to portions other than the film 12. The manufacturing apparatus 30a in FIG. 9 further includes a light irradiation unit 13a and a measurement unit 14a for measuring the attenuation of the light L by the base film 11 in the manufacturing apparatus 30 in FIG. The result measured by the measuring means 14 a is sent to the calculating means 22. Based on the light quantity measured by the measuring means 14, the data stored in the storage means 21, and the transmission amount of the light L when the film 12 is not present, the calculating means 22 is a powder ( The mass per unit area of A) is quantified.

  In addition, the manufacturing apparatus 30 is an example of the manufacturing apparatus of this invention, and this invention is not limited to this. For example, the evaluation device 20 may measure the sheet 10 before drying. When measuring the film 12 before drying, the change in the content of the powder (A) contained in the film 12 can be immediately fed back to the control of the film thickness. On the other hand, when the film 12 after drying is measured, the evaluation device 20 can be prevented from being damaged by the organic solvent.

(Embodiment 3)
In the third embodiment, an electronic component of the present invention will be described. This electronic component is manufactured using the oxide powder-containing sheet (usually the portion of the film 12 containing the powder (A) in the sheet 10) manufactured by the manufacturing method or manufacturing apparatus of the second embodiment. It is a part. Examples of the electronic component of the third embodiment include a ceramic capacitor and a multilayer electronic circuit module.

  A stacked electronic circuit module typically includes a plurality of stacked ceramic layers, and electronic components and wiring patterns embedded between the ceramic layers. The ceramic layer is formed by firing a green sheet. This electronic circuit module is used for a communication circuit such as a portable terminal.

  A multilayer ceramic capacitor typically includes a ceramic part composed of a plurality of laminated ceramic layers, an internal electrode embedded in the ceramic part, and an external electrode. An example of the ceramic capacitor of Embodiment 3 is shown in FIG. 10 includes a ceramic part 41, internal electrodes 42a and 42b embedded in the ceramic part 41, and external electrodes 43a and 43b connected to the internal electrodes 42a and 42b, respectively.

  The ceramic capacitor 40 can be manufactured by a general method, for example, by the following method. First, green sheets (film 12) and internal electrodes are alternately laminated, then cut into a predetermined size, and further fired to form the green sheet as the ceramic portion 41. Next, external electrodes 43a and 43b are formed. In this way, the ceramic capacitor 40 can be manufactured.

  Since the electronic component of the present invention is manufactured using the method or apparatus of the present invention, the electronic component includes a uniform ceramic layer. For example, a green sheet (thickness: 2.0 μm) is manufactured using the manufacturing method described in the second embodiment, and a multilayer ceramic capacitor of 3216 size, B characteristics, and 100 layers is formed using the green sheet. 100 were produced. As a result, an electronic component in which the mass of any one of the plurality of ceramic layers is within ± 5% of the average value of the mass of the plurality of ceramic layers could be mass-produced. Further, the ratio of defective products whose actual capacity deviated by ± 10% or more from the design capacity was 1%. On the other hand, when a multilayer ceramic capacitor was similarly produced using the X-ray method, the mass of any one of the ceramic layers varied within ± 10% of the average value of the mass of the ceramic layers. And the ratio of defective products was 5%. Thus, according to the present invention, since the amount of powder contained per unit area of the ceramic sheet can be made uniform, a highly reliable multilayer ceramic capacitor can be manufactured with high yield.

  The present invention can be used for evaluation of a sheet containing oxide powder and an evaluation apparatus used for such evaluation. The present invention can also be applied to the manufacture of a sheet containing oxide powder, such as a green sheet, and a manufacturing apparatus used for such manufacture. In addition, the present invention can be used for an electronic component manufactured using such a sheet, for example, a ceramic capacitor or a multilayer electronic circuit module.

The figure which shows an example of the evaluation method of this invention typically The figure which shows typically the structure of an example of the evaluation apparatus of this invention. The figure which shows an example of the wavelength dependence of attenuation | damping of the transmitted light amount about the sheet | seat and base film containing oxide powder The figure which shows another example of the wavelength dependence of attenuation | damping of the transmitted light amount about the sheet | seat and base film containing oxide powder The figure which shows an example of the relationship between the mass per unit area of the oxide powder contained in a film | membrane, and attenuation | damping of transmitted light amount The figure which shows another example of the relationship between the mass per unit area of the oxide powder contained in a film | membrane, and attenuation | damping of transmitted light amount The figure which shows another example of the relationship between the mass per unit area of the oxide powder contained in a film | membrane, and attenuation | damping of transmitted light amount The figure which shows typically a structure of an example about the apparatus of this invention for manufacturing an oxide powder containing sheet | seat. The figure which shows typically the structure of another example about the apparatus of this invention for manufacturing an oxide powder containing sheet | seat. Sectional drawing which shows an example of the electronic component of this invention typically

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Sheet | seat 11 Base film 12 Film | membrane 13, 13a Light irradiation means 14, 14a Measuring means 20 Evaluation apparatus 21 Memory | storage means 22 Calculation means 30, 30a Manufacturing apparatus 31 Sending part 32 Coater head 33 Drying part 34 Winding part 40 Ceramic capacitor (electronic) parts)
41 Ceramic part 42a, 42b Internal electrode 43a, 43b External electrode L Light

Claims (32)

An evaluation method for evaluating a sheet including a film containing a predetermined oxide powder,
Measuring the amount of the light L having passed through the sheet (i) light including a light L of a wavelength lambda _Z is irradiated to the seat,
(Ii) obtaining information on either the mass per unit area or the particle size of the oxide powder present in the film based on the light amount,
At least a portion is a method of evaluating the oxide powder containing sheet of range the wavelength lambda _Z is not less than 900 nm. Wherein the wavelength lambda _Z is as defined in claim 1 or less 2500 nm, the evaluation method of the oxide powder containing sheet. 3. The method for evaluating an oxide powder-containing sheet according to claim 1, wherein an average particle diameter of the oxide powder is in a range of 0.3 μm to 1.0 μm. Wherein according to the wavelength lambda _Z any one of claims 1 to 3, the lower limit is not less than 2 times the average particle size of the oxide powder, the evaluation method of the oxide powder containing sheet. The sheet includes a base film;
The transmittance | permeability of the said base film in the said wavelength (lambda) _Z is 80% or more, The evaluation method of the oxide powder containing sheet | seat of any one of Claims 1-4. The method for evaluating an oxide powder-containing sheet according to claim 1, wherein the film contains a polymer compound. The method for evaluating an oxide powder-containing sheet according to any one of claims 1 to 6, wherein a change in mass per unit area of the oxide powder present in the film is detected based on the light amount. The evaluation method of the oxide powder containing sheet | seat of any one of Claims 1-6 which quantifies the mass per unit area of the said oxide powder which exists in the said film | membrane based on the said light quantity. Before the step (ii), including the step of obtaining data indicating the relationship between the mass per unit area of the oxide powder present in the film and the amount of light, the data and the step (i) The oxide powder-containing sheet according to claim 8, wherein the mass per unit area of the oxide powder present in the film is quantified in the step (ii) based on the light amount measured in the step. Evaluation methods. After the step (ii), including a step of quantifying the mass per unit area of the oxide powder in a part of the film by another evaluation method,
The method for evaluating an oxide powder-containing sheet according to claim 9, wherein the data is corrected using a quantitative value obtained by the other evaluation method. The evaluation method of the oxide powder containing sheet | seat of any one of Claims 1-10 which measure the said light quantity for every predetermined wavelength range chosen from the range of 10 nm-100 nm. Wherein according to any one of claims 1 to 10, the wavelength width of the wavelength lambda _Z is in the range of 10 nm to 100 nm, the evaluation method of the oxide powder containing sheet. The method for evaluating an oxide powder-containing sheet according to claim 1, wherein the information is obtained by correcting attenuation of the light L in a portion other than the film. 14. The powder according to claim 1, wherein the oxide powder is a powder made of at least one oxide selected from aluminum oxide, borosilicate, calcium titanate, strontium titanate, and barium titanate. The evaluation method of the oxide powder containing sheet | seat. Forming a sheet including a film containing a predetermined oxide powder;
Information on the mass per unit area of the oxide powder present in the film is obtained by evaluating the sheet by the evaluation method according to any one of claims 1 to 14, and based on the information And a step of changing the forming conditions relating to the thickness of the film. The manufacturing method of the oxide powder containing sheet | seat of Claim 15 which forms the said sheet | seat continuously and evaluates the said moving sheet | seat and changes the said formation conditions. The film is formed using a slurry containing the oxide powder,
Before forming the sheet, a step of forming a sample sheet using a part of the slurry, and a particle size of the oxide powder present in the slurry by evaluating the sample sheet by the evaluation method The method for producing an oxide powder-containing sheet according to claim 15, comprising obtaining information and changing a dispersion condition of the oxide powder in the slurry. Forming a sheet including a film containing a predetermined oxide powder;
Light including light L having a wavelength lambda _Z is irradiated to the sheet to measure the amount of the light L transmitted through the sheet, the amount of light changes the formation condition related to the thickness of the film to a predetermined value Process,
The manufacturing method of the oxide powder containing sheet | seat whose said wavelength (lambda) _Z is at least one part of the range of 900 nm or more. The manufacturing method of the oxide powder containing sheet | seat of Claim 18 which correct | amends attenuation | damping of the said light L in parts other than the said film | membrane. The manufacturing method of the oxide powder containing sheet | seat of Claim 18 which forms the said sheet | seat continuously and changes the formation conditions regarding the thickness of the said film | membrane based on the said light quantity which permeate | transmitted the said sheet | seat which is moving. The electronic component produced using the oxide powder containing sheet | seat manufactured with the manufacturing method of any one of Claims 15-20. An evaluation apparatus for evaluating a sheet including a film containing a predetermined oxide powder,
A light irradiating means for irradiating light to the sheet containing the light L having a wavelength lambda _Z,
Measuring means for measuring the amount of the light L transmitted through the sheet,
The wavelength λ _Z is at least part of a range of 900 nm or more,
The evaluation apparatus of the oxide powder containing sheet | seat which obtains the information about any one of the mass per unit area and the particle size of the said oxide powder which exists in the said film | membrane based on the said light quantity. Storage means storing data relating to the relationship between the mass per unit area of the oxide powder present in the film and the amount of light, and further comprises a calculation means,
The oxide powder according to claim 22, wherein the calculation means calculates a mass per unit area of the oxide powder present in the film based on the light amount measured by the measurement means and the data. Evaluation device for contained sheets. The calculation means is a unit area of the oxide powder present in the film based on the light amount measured by the measurement means, the data, and the transmission amount of the light L when the film is not present. The evaluation apparatus for an oxide powder-containing sheet according to claim 23, wherein the mass per unit is calculated. The evaluation apparatus for an oxide powder-containing sheet according to claim 22, wherein at least one selected from the light irradiation means and the measurement means includes a spectroscopic means. Sheet forming means for forming a sheet including a film containing a predetermined oxide powder;
A light irradiating means for irradiating light to the sheet containing the light L having a wavelength lambda _Z,
Measuring means for measuring the amount of the light L transmitted through the sheet,
The manufacturing apparatus of the oxide powder containing sheet | seat whose said wavelength (lambda) _Z is at least one part of the range of 900 nm or more. 27. The apparatus for producing an oxide powder-containing sheet according to claim 26, wherein the sheet forming means forms the sheet continuously. 28. The apparatus for producing an oxide powder-containing sheet according to claim 26, wherein the sheet forming unit includes a film thickness control unit that controls the thickness of the film based on the light amount measured by the measurement unit. The manufacturing apparatus of the oxide powder containing sheet | seat of Claim 28 which correct | amends attenuation | damping of the said light L in parts other than the said film | membrane, and controls the thickness of the said film | membrane. Storage means storing data relating to the relationship between the mass per unit area of the oxide powder present in the film and the amount of light, and further comprises a calculation means,
The sheet forming means includes a film thickness control means for controlling the thickness of the film,
The calculation means calculates a mass per unit area of the oxide powder present in the film based on the light amount and the data measured by the measurement means,
The said film thickness control means is a manufacturing apparatus of the oxide powder containing sheet | seat of Claim 26 or 27 which controls the thickness of the said film | membrane based on the said mass calculated by the said calculating means. The calculation means is a unit of the oxide powder present in the film based on the light amount measured by the measurement means, the data, and the transmission amount of the light L when the film is not present. The manufacturing apparatus of the oxide powder containing sheet | seat of Claim 30 which calculates the mass per area. 32. The apparatus for producing an oxide powder-containing sheet according to claim 26, wherein at least one selected from the light irradiation unit and the measurement unit includes a spectroscopic unit.

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