JP2005205284A - Droplet application method, droplet discharge device, electro-optical device manufacturing method, and electronic apparatus - Google Patents

Abstract

Disclosed are a droplet applying method, a droplet discharge device, a method of manufacturing an electro-optical device, and an electronic apparatus capable of easily forming color elements even when the color elements to be formed on a substrate are relatively large. To provide.
The droplet applying method of the present invention is carried out using a droplet discharge device 100, and relatively moves a substrate on which a plurality of sections to be color elements are formed and a droplet discharge means 103. Then, the discharge scanning for discharging the liquid material for forming the color element as droplets from the nozzle and applying the liquid material to the section is performed a plurality of times. In the ejection scanning, a plurality of sections having different positions in the major axis direction of the sections that have passed over the section while moving the base body and the droplet discharge means 103 relative to each other in the minor axis direction of the sections. Each droplet is ejected a plurality of times from each nozzle, and a plurality of dots formed by landing a plurality of droplets ejected from the same nozzle are applied at intervals such that the dots are connected along the minor axis direction of the section .
[Selection] Figure 1

Description

  The present invention relates to a droplet application method, a droplet discharge device, an electro-optical device manufacturing method, and an electronic apparatus.

  It is known to apply a liquid material such as ink to each section on a substrate on which a section to be a color element (pixel) is formed using an ink jet apparatus. For example, it is known to form filter elements of a color filter substrate by using an ink jet device or light emitting portions arranged in a matrix in a matrix display device (see, for example, Patent Document 1).

In the method described in Patent Document 1, an inkjet head having nozzle rows arranged along a direction that is parallel or slightly inclined with respect to the major axis direction of the color element is relative to the direction orthogonal to the major axis direction of the color element. Ink droplets are applied to each color element while moving to. In this case, from each nozzle, one ink drop is applied to one color element (see paragraph numbers 0002 and 0019 of Patent Document 1).
However, when manufacturing a large display device for a large television or the like, each color element also becomes large. Therefore, in the method described in Patent Document 1, a necessary amount of ink can be spread over the entire color element. It was not possible to manufacture.

Japanese Patent Laid-Open No. 9-101212

  An object of the present invention is to provide a droplet applying method, a droplet discharge device, a method for manufacturing an electro-optical device, and a method for easily forming a color element even when a color element to be formed on a substrate is relatively large. To provide electronic equipment.

Such an object is achieved by the present invention described below.
According to the droplet applying method of the present invention, a color element is formed while relatively moving a substrate on which a plurality of sections to be color elements are formed and a droplet discharge means having a plurality of nozzles for discharging droplets. A liquid droplet applying method in which a discharge material is discharged a plurality of times from the nozzle and applied to the section as a liquid droplet.
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
In the ejection scanning, the droplets are ejected a plurality of times from a plurality of nozzles having different positions in the major axis direction for each of the sections while relatively moving the substrate and the droplet ejection means, and A plurality of dots formed by landing of a plurality of droplets ejected from the same nozzle are provided with droplets at intervals such that the dots are connected along a minor axis direction substantially orthogonal to the major axis direction.

  Thus, even when a section to be a color element formed on the substrate is relatively large, an amount of liquid material necessary for forming the color element in the section can be quickly and reliably obtained with a small number of scans. In addition, the applied liquid material can be wetted and spread over the entire area of the compartment. Therefore, color elements can be easily formed.

In the droplet application method of the present invention, it is preferable that in the second and subsequent ejection scans, the droplets are applied in an overlapping manner at substantially the same positions as the positions where the droplets were applied in the previous ejection scan.
Thereby, the said effect is exhibited more notably.
According to the droplet applying method of the present invention, a color element is formed while relatively moving a substrate on which a plurality of sections to be color elements are formed and a droplet discharge means having a plurality of nozzles for discharging droplets. A liquid droplet applying method in which a discharge material is discharged a plurality of times from the nozzle and applied to the section as a liquid droplet.
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
While relatively moving the substrate and the droplet discharge means, the droplets are discharged at least once from a plurality of nozzles having different positions in the major axis direction for each of the sections, and the droplets Make sure that the dots that have landed do not overlap in the major axis direction with the dots that have landed the droplets ejected from another nozzle that has the closest distance in the major axis direction to the nozzle that ejected the droplet. Performing a first ejection scan for applying droplets;
The substrate and the droplet discharge means are relatively moved in a short axis direction substantially orthogonal to the long axis direction, and are superposed at substantially the same positions as the positions where droplets were applied in the first discharge scan. And a step of performing a second ejection scan for applying droplets.
Thus, even when a section to be a color element formed on the substrate is relatively large, an amount of liquid material necessary for forming the color element in the section can be quickly and reliably obtained with a small number of scans. In addition, the applied liquid material can be spread and spread over the entire area of the compartment. Therefore, color elements can be easily formed.

In the droplet application method of the present invention, in the first ejection scan and the second ejection scan, a plurality of droplets are ejected from each nozzle a plurality of times per one section, and a plurality of ejected from the same nozzle. It is preferable that the droplets are applied at intervals such that a plurality of dots formed by the droplets of the droplets are connected along the minor axis direction.
Thereby, the said effect is exhibited more notably.

In the droplet applying method of the present invention, it is preferable that the substrate and the droplet discharge means are reciprocated relatively in the minor axis direction, and discharge scanning is performed respectively in the forward path and the return path.
Thereby, a liquid material can be provided to each division more efficiently and rapidly.
In the droplet application method of the present invention, it is preferable that the application of the droplet to one substrate is completed by one or more reciprocating discharge scans.
Thereby, a liquid material can be provided to each division very efficiently and rapidly.

In the droplet application method of the present invention, in the second and subsequent ejection scans, the relative position between the droplet ejection means and the substrate is shifted by a predetermined amount in the major axis direction compared to the previous ejection scan. It is preferable to eject droplets from the nozzles different from the previous ejection scan to the same section.
Thereby, even if there is some variation in the discharge amount between the nozzles in the droplet discharge head, the amount of liquid material applied to each section can be made uniform.

The droplet discharge device of the present invention includes a droplet discharge unit having a plurality of nozzles for discharging droplets,
A base on which a plurality of sections to be color elements are formed, and a moving means for relatively moving the droplet discharge means;
Control means for controlling the operation of the droplet discharge means and the moving means,
A plurality of ejection scans in which the liquid material for forming color elements is ejected as droplets from the nozzles and applied to the compartments while the droplet ejection means and the substrate are relatively positioned in the short axis direction of the compartments. A droplet discharge device for performing,
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
In the ejection scanning, a plurality of droplets are respectively ejected from a plurality of nozzles having different positions in the major axis direction for each of the sections while relatively moving the substrate and the droplet ejection means in the minor axis direction. It is characterized in that the liquid droplets are applied at intervals such that a plurality of dots that are ejected twice and a plurality of liquid droplets ejected from the same nozzle are connected along the minor axis direction.
Thus, even when a section to be a color element formed on the substrate is relatively large, an amount of liquid material necessary for forming the color element in the section can be quickly and reliably obtained with a small number of scans. In addition, the applied liquid material can be spread and spread over the entire area of the compartment. Therefore, color elements can be easily formed.

The droplet discharge device of the present invention includes a droplet discharge unit having a plurality of nozzles for discharging droplets,
A base on which a plurality of sections to be color elements are formed, and a moving means for relatively moving the droplet discharge means;
Control means for controlling the operation of the droplet discharge means and the moving means,
A plurality of ejection scans in which the liquid material for forming color elements is ejected as droplets from the nozzles and applied to the compartments while the droplet ejection means and the substrate are relatively positioned in the short axis direction of the compartments. A droplet discharge device for performing,
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
While relatively moving the base body and the droplet discharge means in the minor axis direction, each droplet is ejected at least once from a plurality of nozzles whose positions in the major axis direction are different from each other. In addition, the dots formed by the droplets are related to the dots formed by the droplets discharged from another nozzle having the shortest distance in the major axis direction from the nozzle that ejected the droplets and the major axis direction. A first ejection scan for applying droplets without overlapping,
Secondly, droplets are applied in a manner overlapping the respective positions where droplets have been applied in the first ejection scan while relatively moving the substrate and the droplet ejection means in the minor axis direction. It is characterized in that the discharge scanning is performed.
Thus, even when a section to be a color element formed on the substrate is relatively large, an amount of liquid material necessary for forming the color element in the section can be quickly and reliably obtained with a small number of scans. In addition, the applied liquid material can be spread and spread over the entire area of the compartment. Therefore, color elements can be easily formed.

The electro-optical device manufacturing method of the present invention includes a step of manufacturing a color element-attached substrate by forming color elements in a plurality of sections on a substrate using the droplet applying method of the present invention.
As a result, the electro-optical device can be manufactured efficiently and quickly.
According to another aspect of the invention, there is provided an electronic apparatus including the electro-optical device manufactured by the method for manufacturing the electro-optical device according to the invention.
Thereby, manufacture of an electronic device can be performed efficiently and rapidly, and a low-cost and high-quality electronic device can be provided.

Hereinafter, a droplet application method, a droplet discharge device, an electro-optical device manufacturing method, and an electronic apparatus according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
<First Embodiment of Droplet Discharge Device>
(Overall configuration of droplet discharge device)
As shown in FIG. 1, the droplet discharge device 100 includes a tank 101 that holds a liquid material 111, a tube 110, and a discharge scanning unit 102 that is supplied with the liquid material 111 from the tank 101 via the tube 110. Prepare. The discharge scanning unit 102 includes a droplet discharge unit 103 having a plurality of droplet discharge heads 114 mounted on the carriage 105, a first position control device 104 (moving unit) that controls the position of the droplet discharge unit 103, A stage 106 that holds a base 10 </ b> A described later, a second position control device 108 (moving means) that controls the position of the stage 106, and a control means 112 are provided. The tank 101 and the plurality of droplet discharge heads 114 in the droplet discharge means 103 are connected by a tube 110, and the liquid material 111 is supplied from the tank 101 to each of the plurality of droplet discharge heads 114 by compressed air. The

  The first position control device 104 moves the droplet discharge means 103 along the X-axis direction and the Z-axis direction orthogonal to the X-axis direction in response to a signal from the control means 112. Further, the first position control device 104 also has a function of rotating the droplet discharge means 103 around an axis parallel to the Z axis. In the present embodiment, the Z-axis direction is a direction parallel to the vertical direction (that is, the direction of gravitational acceleration). The second position controller 108 moves the stage 106 along the Y-axis direction orthogonal to both the X-axis direction and the Z-axis direction in response to a signal from the control unit 112. Further, the second position control device 108 also has a function of rotating the stage 106 around an axis parallel to the Z axis.

The stage 106 has a plane parallel to both the X-axis direction and the Y-axis direction. The stage 106 is configured so that a substrate having a section to which the liquid material 111 is to be applied can be fixed or held on the plane.
As described above, the droplet discharge means 103 is moved in the X-axis direction by the first position control device 104. On the other hand, the stage 106 is moved in the Y-axis direction by the second position control device 108. That is, the relative position of the droplet discharge head 114 with respect to the stage 106 is changed by the first position control device 104 and the second position control device 108.
The control unit 112 is configured to receive ejection data representing a relative position at which the liquid material 111 is to be ejected from an external information processing apparatus. The detailed configuration and function of the control unit 112 will be described later.

(Droplet discharge means)
FIG. 2 is a view of the droplet discharge means 103 observed from the stage 106 side. As shown in FIG. 2, the droplet discharge means 103 includes a plurality of droplet discharge heads 114 each having substantially the same structure, and a carriage 105 that holds these droplet discharge heads 114. In the present embodiment, the number of droplet discharge heads 114 held by the droplet discharge means 103 is eight. Each droplet discharge head 114 has a bottom surface provided with a plurality of nozzles 118 described later. The shape of the bottom surface of each droplet discharge head 114 is a polygon having two long sides and two short sides. The bottom surface of the droplet discharge head 114 held by the droplet discharge means 103 faces the stage 106 side, and the long side direction and the short side direction of the droplet discharge head 114 are respectively an X-axis direction and a Y-axis direction. Parallel to the direction.

(Droplet ejection head)
FIG. 3 shows the bottom surface of the droplet discharge head 114. The droplet discharge head 114 has a plurality of nozzles 118 arranged in the X-axis direction. The plurality of nozzles 118 are arranged such that the nozzle pitch HXP in the X-axis direction in the droplet discharge head 114 is about 70 μm. Here, the “nozzle pitch HXP in the X-axis direction of the droplet discharge head 114” is a plurality of images obtained by projecting all the nozzles 118 in the droplet discharge head 114 onto the X-axis along the Y-axis direction. This corresponds to the pitch between nozzle images.

  In the present embodiment, the plurality of nozzles 118 in the droplet discharge head 114 form a nozzle row 116A and a nozzle row 116B that both extend in the X-axis direction. The nozzle row 116A and the nozzle row 116B are arranged in parallel with a space therebetween. In each of the nozzle row 116A and the nozzle row 116B, 90 nozzles 118 are aligned in the X-axis direction at regular intervals. In this embodiment, this regular interval is about 140 μm. That is, the nozzle pitch LNP of the nozzle row 116A and the nozzle pitch LNP of the nozzle row 116B are both about 140 μm.

The position of the nozzle row 116B is shifted from the position of the nozzle row 116A in the positive direction in the X-axis direction (the right direction in FIG. 3) by half the nozzle pitch LNP (about 70 μm). Therefore, the nozzle pitch HXP in the X-axis direction of the droplet discharge head 114 is half the length (about 70 μm) of the nozzle pitch LNP of the nozzle row 116A (or nozzle row 116B).
Accordingly, the nozzle line density in the X-axis direction of the droplet discharge head 114 is twice the nozzle line density of the nozzle row 116A (or nozzle row 116B). In the present specification, “nozzle line density in the X-axis direction” means the number per unit length of a plurality of nozzle images obtained by projecting a plurality of nozzles on the X-axis along the Y-axis direction. It corresponds to.

  Of course, the number of nozzle rows included in the droplet discharge head 114 is not limited to two. The droplet discharge head 114 may include M nozzle rows. Here, M is a natural number of 1 or more. In this case, in each of the M nozzle rows, the plurality of nozzles 118 are arranged at a pitch that is M times the nozzle pitch HXP. Further, when M is a natural number of 2 or more, the other (M−1) nozzle rows are only i times as long as the nozzle pitch HXP with respect to one of the M nozzle rows. There is no overlap in the X-axis direction. Here, i is a natural number from 1 to (M−1).

  Now, since each of the nozzle row 116 </ b> A and the nozzle row 116 </ b> B includes 90 nozzles 118, one droplet discharge head 114 has 180 nozzles 118. However, 5 nozzles at both ends of the nozzle row 116A are set as “pause nozzles”. Similarly, 5 nozzles at both ends of the nozzle row 116B are also set as “pause nozzles”. The liquid material 111 is not discharged from these 20 “pause nozzles”. Therefore, 160 nozzles 118 out of 180 nozzles 118 in the droplet discharge head 114 function as nozzles that discharge the liquid material 111.

As shown in FIG. 2, in the droplet discharge means 103, a plurality of the droplet discharge heads 114 are arranged in two rows along the X-axis direction. The droplet ejection heads 114 in one row and the droplet ejection heads 114 in the other row are arranged so as to partially overlap when viewed from the Y-axis direction in consideration of the rest nozzles. As a result, the droplet discharge means 103 is configured such that the nozzle 118 that discharges the liquid material 111 continues in the X-axis direction at the nozzle pitch HXP over the length of the dimension of the base body 10A in the X-axis direction. ing.
In the droplet discharge means 103 of the present embodiment, the droplet discharge head 114 is disposed so as to cover the entire length of the base 10A in the X-axis direction. The base 10A may cover a part of the length corresponding to the dimension in the X-axis direction.

  As shown in FIGS. 4A and 4B, each droplet discharge head 114 is an inkjet head. More specifically, each droplet discharge head 114 includes a vibration plate 126 and a nozzle plate 128. Between the diaphragm 126 and the nozzle plate 128, a liquid pool 129 in which the liquid material 111 supplied from the tank 101 through the hole 131 is always filled is located.

  In addition, a plurality of partition walls 122 are located between the diaphragm 126 and the nozzle plate 128. A portion surrounded by the diaphragm 126, the nozzle plate 128, and the pair of partition walls 122 is a cavity 120. Since the cavities 120 are provided corresponding to the nozzles 118, the number of the cavities 120 and the number of the nozzles 118 are the same. The liquid material 111 is supplied to the cavity 120 from the liquid pool 129 through the supply port 130 positioned between the pair of partition walls 122.

On the diaphragm 126, the vibrator 124 is positioned corresponding to each cavity 120. The vibrator 124 includes a piezoelectric element 124C and a pair of electrodes 124A and 124B that sandwich the piezoelectric element 124C. By applying a driving voltage between the pair of electrodes 124A and 124B, the liquid material 111 is discharged from the corresponding nozzle 118. The shape of the nozzle 118 is adjusted so that the liquid material 111 is discharged from the nozzle 118 in the Z-axis direction.
Here, the “liquid material” in this specification refers to a material having a viscosity that can be discharged from a nozzle. In this case, it does not matter whether the material is aqueous or oily. It is sufficient if it has fluidity (viscosity) that can be ejected from the nozzle.

  The control means 112 (FIG. 1) may be configured to give a signal to each of the plurality of vibrators 124 independently of each other. That is, the volume of the material 111 ejected from the nozzle 118 may be controlled for each nozzle 118 in accordance with a signal from the control unit 112. In such a case, the volume of the material 111 discharged from each of the nozzles 118 may be variable between 0 pl to 42 pl (picoliter). Further, as will be described later, the control unit 112 can also set the nozzle 118 that performs the discharge operation during the application scan and the nozzle 118 that does not perform the discharge operation.

  In this specification, a portion including one nozzle 118, a cavity 120 corresponding to the nozzle 118, and a vibrator 124 corresponding to the cavity 120 may be referred to as “ejection unit 127”. According to this notation, one droplet discharge head 114 has the same number of discharge units 127 as the number of nozzles 118. The discharge unit 127 may include an electrothermal conversion element instead of the piezo element. That is, the discharge unit 127 may have a configuration for discharging a material by utilizing thermal expansion of the material by the electrothermal conversion element.

In the present invention, the nozzle pitch HXP in the droplet discharge means 103 is not limited to the above size, and may be any size.
In addition to the configuration shown in FIG. 2, the droplet discharge means 103 may have a configuration in which a plurality of droplet discharge heads 114 are stacked in the Y-axis direction as shown in FIG. Hereinafter, the droplet discharge means 103 ′ shown in FIG. 5 will be described.

  FIG. 5 shows two head groups 114G in the droplet discharge means 103 '. Each head group 114G includes four droplet discharge heads 114. The four droplet discharge heads in the head group 114 are set such that the nozzle pitch GXP in the X-axis direction of the head group 114G is ¼ times the nozzle pitch HXP in the X-axis direction of the droplet discharge head 114. 114 is arranged. More specifically, the X coordinate of the reference nozzle 118R of the other droplet discharge head 114 is j / 4 times the nozzle pitch HXP with respect to the X coordinate of the reference nozzle 118R of one droplet discharge head 114. That is, the positions are shifted in the X-axis direction without overlap. Here, j is a natural number from 1 to 3. For this reason, the nozzle pitch GXP in the X-axis direction of the head group 114G is 1/4 times the nozzle pitch HXP.

  In the present embodiment, since the nozzle pitch HXP in the X-axis direction of the droplet discharge head 114 is about 70 μm, the nozzle pitch GXP in the X-axis direction of the head group 114G is about 17.5 μm, which is a quarter of that. Here, the “nozzle pitch GXP of the head group 114G in the X-axis direction” is the interval between a plurality of nozzle images obtained by projecting all the nozzles 118 in the head group 114G onto the X-axis along the Y-axis direction. It corresponds to the pitch.

Of course, the number of droplet discharge heads 114 included in the head group 114G is not limited to four. The head group 114G may include N droplet discharge heads 114. Here, N is a natural number of 2 or more. In this case, N droplet discharge heads 114 may be arranged in the head group 114G so that the nozzle pitch GXP is 1 / N times as long as the nozzle pitch HXP. Alternatively, with respect to the X coordinate of the reference nozzle 118R in one of the N droplet discharge heads 114, the X coordinate of the reference nozzle 118 in the other (N−1) droplet discharge heads 114 is the nozzle pitch HXP. It is only necessary to deviate without overlap by a length of j / N times. In this case, j is a natural number from 1 to (N−1).
According to the configuration shown in FIG. 5, since the nozzle pitch GXP in the X-axis direction as the entire droplet discharge means 103 ′ can be made shorter than the nozzle pitch HXP, droplets can be applied with higher definition. Can do.

(Control means)
Next, the configuration of the control unit 112 will be described. As shown in FIG. 6, the control unit 112 includes an input buffer memory 200, a storage unit 202, a processing unit 204, a scan driving unit 206, and a head driving unit 208. The buffer memory 200 and the processing unit 204 are connected so that they can communicate with each other. The processing unit 204 and the storage unit 202 are connected to be communicable with each other. The processing unit 204 and the scan driving unit 206 are connected so as to communicate with each other. The processing unit 204 and the head driving unit 20 are connected to be communicable with each other. Further, the scan driving unit 206 is connected to the first position control unit 104 and the second position control device 108 so as to communicate with each other. Similarly, the head driving unit 208 is connected to each of the plurality of droplet discharge heads 114 so as to be able to communicate with each other.

  The input buffer memory 200 receives ejection data for ejecting droplets of the liquid material 111 from the external information processing apparatus. The discharge data includes data indicating the relative positions of all the sections on the substrate, data indicating the number of relative scans required to apply the liquid material 111 to all the sections to a desired thickness, and the on-nozzle 118A. And data specifying the nozzle 118 functioning as the off-nozzle 118B. The on-nozzle 118A and the off-nozzle 118B will be described later. The input buffer memory 200 supplies the ejection data to the processing unit 204, and the processing unit 204 stores the ejection data in the storage unit 202. In FIG. 6, the storage means 202 is a RAM.

The processing unit 204 gives data indicating the relative position of the nozzle 118 to the section to the scan driving unit 206 based on the ejection data in the storage unit 202. The scanning drive unit 206 supplies the first position control means 104 and the second position control device 108 with a drive signal corresponding to this data and an ejection cycle EP (FIG. 7) described later. As a result, the droplet discharge head 114 scans relative to the section. On the other hand, the processing unit 204 gives a selection signal SC for designating ON / OFF of the nozzle 118 at each ejection timing to the head driving unit 208 based on the ejection data stored in the storage unit 202 and the ejection cycle EP. . The head drive unit 208 gives the droplet ejection head 114 with an ejection signal ES necessary for ejecting the liquid material 111 based on the selection signal SC. As a result, the liquid material 111 is discharged as droplets from the corresponding nozzle 118 in the droplet discharge head 114.
The control means 112 may be a computer including a CPU, a ROM, and a RAM. In this case, the function of the control unit 112 is realized by a software program executed by a computer. Of course, the control means 112 may be realized by a dedicated circuit (hardware).

Next, the configuration and function of the head drive unit 208 in the control unit 112 will be described.
As shown in FIG. 7A, the head drive unit 208 includes one drive signal generation unit 203 and a plurality of analog switches AS. As shown in FIG. 7B, the drive signal generation unit 203 generates a drive signal DS. The potential of the drive signal DS changes with respect to the reference potential L over time. Specifically, the drive signal DS includes a plurality of ejection waveforms P that are repeated at the ejection cycle EP. Here, the discharge waveform P corresponds to a drive voltage waveform to be applied between a pair of electrodes of the corresponding vibrator 124 in order to discharge one droplet from the nozzle 118.

The drive signal DS is supplied to each input terminal of the analog switch AS. Each of the analog switches AS is provided corresponding to each of the ejection units 127. That is, the number of analog switches AS and the number of ejection units 127 (that is, the number of nozzles 118) are the same.
The processing unit 204 gives a selection signal SC indicating ON / OFF of the nozzle 118 to each analog switch AS. Here, the selection signal SC can take either a high level or a low level independently for each analog switch AS. On the other hand, the analog switch AS supplies the ejection signal ES to the electrode 124A of the vibrator 124 according to the drive signal DS and the selection signal SC. Specifically, when the selection signal SC is at a high level, the analog switch AS propagates the drive signal DS as the ejection signal ES to the electrode 124A. On the other hand, when the selection signal SC is at a low level, the potential of the ejection signal ES output from the analog switch AS becomes the reference potential L. When the drive signal DS is applied to the electrode 124A of the vibrator 124, the liquid material 111 is discharged from the nozzle 118 corresponding to the vibrator 124. A reference potential L is applied to the electrode 124B of each vibrator 124.

In the example shown in FIG. 7B, a high-level period is set in each of the two selection signals SC so that the discharge waveform P appears in the cycle 2EP that is twice the discharge cycle EP in each of the two discharge signals ES. A low-level period is set. As a result, the liquid material 111 is discharged from each of the two corresponding nozzles 118 at a period of 2EP. A common drive signal DS from the common drive signal generation unit 203 is given to each of the vibrators 124 corresponding to these two nozzles 118. For this reason, the liquid material 111 is discharged from the two nozzles 118 at substantially the same timing.
With the above configuration, the droplet discharge device 100 performs discharge scanning for applying the liquid material 111 to the substrate 10 </ b> A in accordance with the discharge data given to the control unit 112.

<First Embodiment of Droplet Application Method>
The droplet applying method of the present invention is performed using the droplet discharge device 100 as described above. Hereinafter, a first embodiment of the droplet application method of the present invention will be described with reference to FIGS.
In the following description, it is assumed that a color filter substrate used for a liquid crystal display device is manufactured. However, as will be described later, the present invention is applied to manufacturing various electro-optical devices other than the color filter substrate. be able to.

As shown in FIG. 8, a plurality of elongated sections 18R, 18G, and 18B to be color elements are formed on the base 10A. The section 18R is an area that should be a color element of R (red), the section 18G is an area that should be a color element of G (green), and the section 18B should be a color element of B (blue). It is an area.
The sections 18R, 18G, and 18B have the same shape, the major axis direction (longitudinal direction) is parallel to the X axis direction, and the minor axis direction is parallel to the Y axis direction. Each of the sections 18R, 18G, and 18B has a substantially rectangular shape. However, in the illustrated configuration, the left side of the upper end portion in the drawing has a recessed shape, and the width of this portion is slightly narrowed. . This recessed portion is a portion corresponding to the TFT formation region.
The set of partitions 18R, 18G, and 18B arranged in parallel corresponds to one pixel of the color filter substrate. A large number of sets of sections 18R, 18G, and 18B are formed in a matrix on the base 10A. That is, the base body 10A is to be a color filter substrate having a stripe arrangement.

The droplet discharge device 100 operates the second position control device 108 to move the substrate 10A and the droplet discharge means 103 relative to each other in the Y-axis direction, while the liquid material 111 for forming color elements is completely or The operation of ejecting as droplets from some of the nozzles 118 and applying it to all or some of the sections on the substrate 10A (this operation is referred to as “ejection scanning” in this specification) is performed a plurality of times.
In the ejection scanning, in principle, the droplet ejection means 103 is relatively moved in the Y-axis direction so that the droplet ejection means 103 passes relatively over the substrate 10A from end to end.
In the following description, the case where droplets are applied to the section 18R will be described as a representative. However, droplets can be applied to the sections G and B as well. Further, although only one section 18R is shown in the drawing, droplets are similarly applied to all the sections 18R in one ejection scan.

FIG. 8 is a diagram illustrating a state before the first ejection scan. Prior to the ejection scan, the relative position in the X-axis direction between the substrate 10A and the droplet ejection means 103 is positioned at a predetermined position by the operation of the first position control device 104. FIG. 8 shows a state after this positioning. By this positioning, a nozzle 118 that discharges droplets is assigned to the section 18R.
Here, since the nozzle pitch HXP in the X-axis direction of the droplet discharge means 103 is configured to be shorter than the length of the partition 18R in the X-axis direction, a plurality of (shown configuration) are included in one partition 18R. 5 nozzles 118 are assigned.

  In FIG. 8 and other figures, the number with “#” described after the reference numeral “118” indicates the number of the nozzle 118 from the end of each nozzle row 116A, 116B. That is, in the illustrated section 18R, a total of five nozzles 118, 11th, 12th and 13th in the nozzle row 116A and 11th and 12th in the nozzle row 116B, are assigned. Show.

  In the first discharge scan, the base 10A is moved relative to the droplet discharge means 103 from the state shown in FIG. 8 in the left direction in the figure, and the liquid is discharged from the five nozzles 118 passing over the section 18R. The droplets are ejected and landed in the compartment 18R. FIG. 9 is a diagram illustrating a state in which the first ejection scanning is completed. In the present embodiment, droplets are ejected from each nozzle 118 a plurality of times for each section 18R. A plurality of dots 91 formed by landing of a plurality of droplets ejected from the same nozzle 118 are naturally arranged along the Y-axis direction which is the scanning direction. In this embodiment, as shown in FIG. 9, a plurality of dots 91 formed by landing of a plurality of droplets ejected from the same nozzle 118 are connected at intervals (continuous) along the Y-axis direction. A droplet is applied.

  Here, “the interval at which a plurality of dots 91 formed by landing of a plurality of droplets ejected from the same nozzle 118 are connected along the Y-axis direction” means one droplet of liquid material ejected from the nozzle 118. The interval 111 is smaller than the diameter of the dot 91 formed on the bottom surface of the section 18R. The diameter of the dot 91 formed by landing one drop of the liquid material 111 discharged from the nozzle 118 on the bottom surface of the section 18R is the volume of the one drop of the liquid material 111 and the contact angle of the liquid material 111 with respect to the bottom surface of the section 18R ( It depends on the wettability. Therefore, in the present embodiment, the value of the diameter of the dot 91 formed by one droplet of the liquid material 111 ejected from the nozzle 118 landing on the bottom surface of the section 18R is obtained in advance by experiment or theoretical calculation, and is larger than this value. By controlling to discharge a plurality of droplets from the same nozzle 118 at small intervals, the droplets can be applied so as to be in the state shown in FIG.

  In addition, although each dot 91 shown in FIG. 9 is drawn so as to overlap with the other dots 91, naturally, a plurality of liquid droplets that have landed at the intervals as described above stick to each other and are integrated, Spread wet around. That is, FIG. 9 is schematically drawn for easy understanding of the droplet applying method of the present invention, and does not represent the actual wet spreading method of the liquid material 111 applied in the section 18R.

  After the first discharge scan is completed, before the second discharge scan is performed, the first position control device 104 is operated to shift the relative position between the droplet discharge means 103 and the substrate 10A by a predetermined amount in the X-axis direction ( Hereinafter, it is also referred to as “line feed”), and FIG. 10 is a diagram showing a state after “line feed”. In the illustrated case, the nozzle pitch is shifted by 30 nozzles LNP. As a result, a total of five nozzles 118, ie, the 41st, 42nd and 43rd nozzle rows 116A and the 41st and 42nd nozzle rows 116B, are allocated to the illustrated section 18R. That is, in the second ejection scan, droplets are ejected from the five nozzles 118 to the section 18R.

  In the present invention, as described above, in the second and subsequent ejection scans, the relative position between the droplet ejection means 103 and the substrate 10A is shifted by a predetermined amount in the X-axis direction compared to the previous ejection scan, It is preferable to eject droplets from the nozzles different from the previous ejection scan to the same section. Thereby, even if there is some variation in the discharge amount between the nozzles in the droplet discharge head 114, the amount of the liquid material 111 applied to each section can be made uniform.

  In the second discharge scan, the base 10A is moved relative to the droplet discharge means 103 from the state shown in FIG. 10 in the right direction in the figure, and the liquid is discharged from the five nozzles 118 passing over the section 18R. The droplets are ejected and landed in the compartment 18R. In the second ejection scan, as in the first ejection scan, a plurality of dots 91 formed by a plurality of droplets ejected from the same nozzle 118 are connected along the Y-axis direction. Apply droplets at intervals. However, the position at which the droplet is applied may be the same as or different from the first time, and the number of applied droplets may be the same as or different from the first time.

  As described above, in the ejection scanning in the droplet applying method of the present embodiment, the substrate 10A and the droplet ejection means 103 are moved relative to each other in the Y-axis direction while passing over the compartment. The plurality of dots ejected from the plurality of nozzles 118 whose positions in the X-axis direction are different from each other and the plurality of droplets ejected from the same nozzle 118 are landed in the Y-axis direction. Drops are applied at intervals that lead along. As a result, since a large number of droplets can be landed in the compartment, even when the compartment size is relatively large, the amount of liquid material 111 necessary for forming the color element is reduced by a small number of scans. Can be granted. Further, by applying droplets at intervals such that a plurality of dots formed by landing of a plurality of droplets ejected from the same nozzle 118 are connected along the Y-axis direction, the liquid material is left over the entire area in the compartment. It can be surely spread and wet.

Further, in this embodiment, the substrate 10A and the droplet discharge means 103 are reciprocated relatively in the Y-axis direction, and discharged on the forward path (the first discharge scan) and the return path (the second discharge scan), respectively. By performing scanning, the liquid material 111 can be applied to each section efficiently and quickly.
In the present embodiment, since the droplet discharge means 103 covers the entire width of the substrate 10A in the X-axis direction (see FIG. 2), all the partitions 18R (or the partitions 18G or Droplets can be applied to the compartment 18B), and the liquid material 111 can be applied more efficiently and quickly.

  In the present invention, it is most preferable to finish the application of the liquid droplet (liquid material 111) to one substrate 10A by one reciprocating discharge scanning, and the liquid droplet (liquid material) to one substrate 10A by a plurality of reciprocating discharge scanning. It is then preferred to end the application of 111). As a result, when the work is successively performed on the plurality of bases 10A, the relative movement between the base 10A and the droplet discharge means 103 can be used without waste, so that the manufacturing efficiency can be further improved. In the present invention, unlike the above, the application of droplets (liquid material 111) to one substrate 10A may be terminated by an odd number of ejection scans.

<Second Embodiment of Droplet Application Method>
Hereinafter, the second embodiment of the droplet applying method of the present invention will be described with reference to FIGS. 11 to 13. However, the difference from the first embodiment described above will be mainly described, and the same matters will be described. The description is omitted.
The state before the first ejection scan (first ejection scan) is the same as in the first embodiment (FIG. 8). The first discharge scan (first discharge scan) passes over the section 18R while moving the base body 10A relative to the droplet discharge means 103 in the left direction in the drawing from the state shown in FIG. Droplets are ejected from the five nozzles 118, and these droplets are landed in the compartment 18R. FIG. 11 is a diagram illustrating a state where the first ejection scan (first ejection scan) has been completed.

  In this embodiment, as shown in FIG. 11, a dot 92 formed by a droplet is a droplet ejected from another nozzle 118 having the closest distance in the X-axis direction from the nozzle 118 that ejected the droplet. A droplet is applied so as not to overlap with the dot 92 formed by landing in the X-axis direction. Here, “does not overlap in the X-axis direction” means that the dots 92 ejected from one nozzle 118 do not overlap with the dots 92 ejected from other nozzles 118 when viewed from a direction parallel to the Y-axis direction. Say that. That is, in the present embodiment, the value of the diameter of the dot 92 formed by landing one drop of the liquid material 111 discharged from the nozzle 118 on the bottom surface of the section 18R is examined in advance by experiment or theoretical calculation, and this value is the nozzle pitch HXP. It may be controlled so as to be smaller.

In the example shown in FIG. 11, the droplets are ejected four times from each nozzle 118, but in this embodiment, it is sufficient to eject at least once from each nozzle 118.
When the first ejection scan (first ejection scan) is completed, “line feed” is performed in the same manner as in the first embodiment before performing the second ejection scan (second ejection scan). FIG. 12 is a diagram illustrating a state after “line feed”.

The second ejection scan (second ejection scan) 5 passes over the section 18R while moving the base body 10A relative to the droplet ejection means 103 in the right direction in the figure from the state shown in FIG. Droplets are ejected from the nozzles 118, and these droplets are landed in the compartment 18R. FIG. 13 is a diagram illustrating a state after the second ejection scan (second ejection scan). In the second ejection scan (second ejection scan), a droplet (dot 93) is applied in a manner substantially overlapping with each position (each dot 92) applied with the droplet in the first ejection scan. .
Although the third and subsequent ejection scans may be performed as necessary, it is most preferable that the scanning is completed in one reciprocation until the second ejection scanning, as in the first embodiment.

In the ejection scanning in the droplet applying method of the present embodiment, since a large number of droplets can be landed in the section as in the first embodiment, even when the size of the section is relatively large. The liquid material 111 in an amount necessary for forming the color element can be applied with a small number of scans. Further, in the second ejection scan, the liquid material is surely left over the entire area in the compartment by applying the liquid droplets in almost the same positions as the positions where the liquid droplets were applied in the first ejection scan. Can be spread and wet.
Further, in the illustrated configuration, in each of the first ejection scan and the second ejection scan, droplets are ejected a plurality of times from each nozzle 118, and a plurality of droplets ejected from the same nozzle 118 are landed. Thus, the plurality of dots 92 and 93 are applied with a droplet at intervals such that they are connected along the Y-axis direction. Thereby, the said effect is exhibited more notably.

  In the droplet discharge device 100 of the present invention, a plurality of nozzles 118 are arranged in a direction (X-axis direction) orthogonal to the direction (Y-axis direction) in which the droplet discharge means 103 relatively moves. For this reason, the liquid material 111 can be discharged almost simultaneously from the plurality of nozzles 118 to the section extending in the X-axis direction. As a result, one drive signal generation unit 203 that generates the drive signal DS may be provided for the plurality of nozzles 118. In addition, since the discharge timings from the plurality of nozzles 118 arranged in one direction are almost simultaneous, a circuit configuration for delaying the drive signal DS from the drive signal generation unit 203 is not necessary. As a result, there are few factors that cause rounding in the waveform of the drive signal DS, and therefore, a precise ejection waveform P can be applied to the vibrator 124. Therefore, the discharge of the liquid material 111 from the nozzle 118 is more stable.

<Second Embodiment of Droplet Discharge Device>
Next, an example in which the present invention is applied to the manufacture of a color filter substrate will be described in more detail.
A substrate 10A shown in FIGS. 14A and 14B is a substrate that becomes the color filter substrate 10 through processing by a manufacturing apparatus 1 (FIG. 15) described later. The base body 10A has a plurality of sections 18R, 18G, and 18B arranged in a matrix.

  Specifically, the base body 10 </ b> A includes a support substrate 12 having optical transparency, a black matrix 14 formed on the support substrate 12, and a bank 16 formed on the black matrix 14. The black matrix 14 is formed of a light-shielding material. The black matrix 14 and the bank 16 on the black matrix 14 are positioned on the support substrate 12 so that a plurality of matrix-like light transmission portions, that is, a plurality of matrix-like pixel regions are defined.

  In each pixel region, the concave portions defined by the support substrate 12, the black matrix 14, and the bank 16 correspond to the partition 18R, the partition 18G, and the partition 18B. The section 18R is an area where the filter layer 111FR that transmits only light in the red wavelength band is to be formed, and the section 18G is an area where the filter layer 111FG that transmits only the light in the green wavelength band is to be formed. The section 18B is an area where the filter layer 111FB that transmits only light in the blue wavelength region is to be formed.

  The base 10A shown in FIG. 14B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. The row direction and the column direction of the matrix formed by the plurality of sections 18R, 18G, and 18B are parallel to the X-axis direction and the Y-axis direction, respectively. In the base body 10A, the section 18R, the section 18G, and the section 18B are periodically arranged in this order in the Y-axis direction. On the other hand, the sections 18R are arranged in a line at a predetermined constant interval in the X axis direction, and the sections 18G are arranged in a line at a predetermined constant interval in the X axis direction, and The partitions 18B are arranged in a line at a predetermined constant interval in the X-axis direction. Note that the X-axis direction and the Y-axis direction are orthogonal to each other.

  The interval LRY along the Y-axis direction between the partitions 18R, that is, the pitch is approximately 560 μm. This interval is the same as the interval LGY along the Y-axis direction between the partitions 18G, and is the same as the interval LBY along the Y-axis direction between the partitions 18B. The planar image of the section 18R is a rectangle determined by the long side and the short side. Specifically, the length of the section 18R in the Y-axis direction is approximately 100 μm, and the length in the X-axis direction is approximately 300 μm. The section 18G and the section 18B also have the same shape and size as the section 18R. The spacing between the partitions and the size of the partitions correspond to the spacing and size of pixel regions corresponding to the same color in a high-definition television having a size of about 40 inches.

  The manufacturing apparatus 1 shown in FIG. 15 is an apparatus that discharges a corresponding color filter material to each of the sections 18R, 18G, and 18B of the base body 10A of FIG. Specifically, the manufacturing apparatus 1 includes a droplet discharge device 100R that applies the color filter material 111R to all the compartments 18R by the droplet application method described above, and a drying device 150R that dries the color filter material 111R on the compartments 18R. A droplet discharge device 100G for applying the color filter material 111G to all of the compartments 18G by the droplet applying method described above, a drying device 150G for drying the color filter material 111G on the compartment 18G, and the droplet applying method described above. The droplet discharge device 100B for applying the color filter material 111B to all the compartments 18B, the drying device 150B for drying the color filter material 111B in the compartments 18B, and the color filter materials 111R, 111G, 111B are heated again (post-baking). Oven 160 and post The droplet discharge device 100C for providing the protective film 20 on the layer of the color filter material 111R, 111G, 111B, the drying device 150C for drying the protective film 20, and the dried protective film 20 are heated again. A curing device 165 for curing. Further, the manufacturing apparatus 1 includes a droplet discharge device 100R, a drying device 150R, a droplet discharge device 100G, a drying device 150G, a droplet discharge device 100B, a drying device 150B, a droplet discharge device 100C, a drying device 150C, and a curing device 165. A transport device 170 that transports the base body 10A in order is also provided.

  As shown in FIG. 16, the configuration of the droplet discharge device 100R is basically the same as the configuration of the droplet discharge device 100 of the first embodiment. However, instead of the tank 101 and the tube 110, the droplet discharge device 100R includes a tank 101R and a tube 110R for the liquid color filter material 111R, and the configuration of the droplet discharge device 100R is the droplet discharge device 100. The configuration is different. Note that, among the components of the droplet discharge device 100R, the same components as those of the droplet discharge device 100 are denoted by the same reference numerals as those in the first embodiment, and redundant description is omitted.

  The configuration of the droplet discharge device 100G, the configuration of the droplet discharge device 100B, and the configuration of the droplet discharge device 100C are basically the same as the configuration of the droplet discharge device 100R. However, instead of the tank 101R and the tube 110R in the droplet discharge device 100R, the droplet discharge device 100G includes a tank and a tube for the color filter material 111G, and the configuration of the droplet discharge device 100G is a droplet discharge. Different from the configuration of the device 100R. Similarly, in place of the tank 101R and the tube 110R, the droplet discharge device 100B includes a tank and a tube for the color filter material 111B, and the configuration of the droplet discharge device 100B is the same as the configuration of the droplet discharge device 100R. Different. Furthermore, the configuration of the droplet discharge device 100C is different from the configuration of the droplet discharge device 100R in that the droplet discharge device 100C includes a tank and a tube for a protective film material instead of the tank 101R and the tube 110R. The liquid color filter materials 111R, 111G, and 111B in this embodiment are examples of the liquid material of the present invention.

  Next, the operation of the droplet discharge device 100R will be described. The droplet discharge device 100R discharges the same material to a plurality of sections 18R arranged in a matrix on the base 10A. As described in the third embodiment, the base body 10A may be replaced with a substrate for an electroluminescence display device, and may further be replaced with a rear substrate for a plasma display device. You may replace with the board | substrate of the image display apparatus provided with the element.

Below, a series of processes until the color filter substrate 10 is obtained by the manufacturing apparatus 1 will be described.
First, the base body 10A of FIG. 14 is prepared according to the following procedure. First, a metal thin film is formed on the support substrate 12 by sputtering or vapor deposition. Thereafter, a lattice-like black matrix 14 is formed from the metal thin film by a photolithography process. Examples of the material of the black matrix 14 are metal chromium and chromium oxide. Note that the support substrate 12 is a substrate having optical transparency with respect to visible light, for example, a glass substrate. Subsequently, a resist layer made of a negative photosensitive resin composition is applied so as to cover the support substrate 12 and the black matrix 14. Then, the resist layer is exposed while closely contacting the mask film formed in a matrix pattern shape on the resist layer. Thereafter, the bank 16 is obtained by removing an unexposed portion of the resist layer by an etching process. The base body 10A is obtained through the above steps.
In place of the bank 16, a bank made of resin black may be used. In that case, the metal thin film (black matrix 14) becomes unnecessary, and the bank layer is only one layer.

  Next, the substrate 10A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the support substrate 12, the surface of the black matrix 14, the surface of the bank 16, and the recesses defined by the support substrate 12, the black matrix 14, and the bank 16 (part of the pixel region) The surface becomes lyophilic. Further, thereafter, a plasma treatment using tetrafluoromethane as a treatment gas is performed on the base 10A. By the plasma treatment using tetrafluoromethane, the surface of the bank 16 in each recess is fluorinated (treated to be liquid repellent), whereby the surface of the bank 16 becomes liquid repellent. Note that the surface of the support substrate 12 and the surface of the black matrix 14 to which lyophilicity was previously imparted by plasma treatment using tetrafluoromethane slightly lose lyophilicity, but these surfaces are still lyophilic. maintain. As described above, the surface of the concave portion defined by the support substrate 12, the black matrix 14, and the bank 16 is subjected to a predetermined surface treatment, so that the surface of the concave portion becomes the partitions 18R, 18G, and 18B.

  Depending on the material of the support substrate 12, the material of the black matrix 14, and the material of the bank 16, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. There is also. In such a case, the surface of the recess defined by the support substrate 12, the black matrix 14, and the bank 16 is the sections 18R, 18G, and 18B without performing the surface treatment.

  The base body 10A on which the sections 18R, 18G, and 18B are formed is carried by the transport device 170 to the stage 106 of the droplet discharge device 100R. Then, as shown in FIG. 17A, the droplet discharge device 100R discharges the color filter material 111R from the droplet discharge head 114 so that the layer of the color filter material 111R is formed in all the sections 18R. . Specifically, the droplet discharge device 100R applies the color filter material 111R to the section 18R by the droplet applying method described above. When the layer of the color filter material 111R is formed on all the sections 18R of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150R. And the filter layer 111FR is obtained on the division 18R by drying the color filter material 111R on the division 18R completely.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100G. Then, as illustrated in FIG. 17B, the droplet discharge device 100G discharges the color filter material 111G from the droplet discharge head 114 so that the layer of the color filter material 111G is formed in all the sections 18G. . Specifically, the droplet discharge device 100G applies the color filter material 111G to the section 18G by the droplet applying method described above. When the layer of the color filter material 111G is formed in all the sections 18G of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150G. Then, the filter layer 111FG is obtained on the section 18G by completely drying the color filter material 111G on the section 18G.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100B. Then, as shown in FIG. 17C, the droplet discharge device 100B discharges the color filter material 111B from the droplet discharge head 114 so that the layer of the color filter material 111B is formed in all the sections 18B. . Specifically, the droplet discharge device 100B applies the color filter material 111B to the section 18B by the droplet applying method described above. When the layer of the color filter material 111B is formed in all the sections 18B of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150B. Then, the filter layer 111FB is obtained on the section 18B by completely drying the color filter material 111B on the section 18B.

Next, the transfer device 170 positions the base body 10 </ b> A in the oven 160. Thereafter, the oven 160 reheats (post-bake) the filter layers 111FR, 111FG, and 111FB.
Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100C. Then, the droplet discharge device 100C discharges a liquid protective film material so that the protective film 20 is formed so as to cover the filter layers 111FR, 111FG, 111FB and the bank 16. After the protective film 20 covering the filter layers 111FR, 111FG, 111FB and the bank 16 is formed, the transfer device 170 positions the base body 10A in the oven 150C. Then, after the oven 150C completely dries the protective film 20, the curing device 165 heats the protective film 20 and completely cures, whereby the base 10A becomes the color filter substrate 10.

<Third Embodiment of Droplet Discharge Device>
Next, the example which applied this invention to the manufacturing apparatus of an electroluminescent display apparatus is demonstrated.
A substrate 30A shown in FIGS. 18A and 18B is a substrate that becomes the electroluminescence display device 30 by processing by the manufacturing apparatus 2 (FIG. 19) described later. The base body 30A has a plurality of sections 38R, 38G, and 38B arranged in a matrix.

  Specifically, the base body 30A includes a support substrate 32, a circuit element layer 34 formed on the support substrate 32, a plurality of pixel electrodes 36 formed on the circuit element layer 34, and a plurality of pixel electrodes 36. And a bank 40 formed therebetween. The support substrate 32 is a substrate having optical transparency with respect to visible light, and is, for example, a glass substrate. Each of the plurality of pixel electrodes 36 is an electrode having optical transparency with respect to visible light, for example, an ITO (Indium-Tin Oxide) electrode. The plurality of pixel electrodes 36 are arranged in a matrix on the circuit element layer 34, and each define a pixel region. The bank 40 has a lattice shape and surrounds each of the plurality of pixel electrodes 36. The bank 40 includes an inorganic bank 40A formed on the circuit element layer 34 and an organic bank 40B positioned on the inorganic bank 40A.

  The circuit element layer 34 includes a plurality of scan electrodes extending in a predetermined direction on the support substrate 32, an insulating film 42 formed so as to cover the plurality of scan electrodes, and a plurality of scan electrodes positioned on the insulating film 42. A plurality of signal electrodes extending in a direction orthogonal to the direction in which the electrodes extend, a plurality of switching elements 44 located near the intersections of the scan electrodes and the signal electrodes, and polyimide formed so as to cover the plurality of switching elements 44 And an interlayer insulating film 45. The gate electrode 44G and the source electrode 44S of each switching element 44 are electrically connected to the corresponding scan electrode and the corresponding signal electrode, respectively. A plurality of pixel electrodes 36 are located on the interlayer insulating film 45. The interlayer insulating film 45 is provided with a through hole 44V at a portion corresponding to the drain electrode 44D of each switching element 44, and the switching element 44 and the corresponding pixel electrode 36 are connected via the through hole 44V. An electrical connection between them is formed. Each switching element 44 is located at a position corresponding to the bank 40. That is, when viewed from a direction perpendicular to the paper surface of FIG. 18B, each of the plurality of switching elements 44 is positioned so as to be covered by the bank 40.

  A recess (a part of the pixel area) defined by the pixel electrode 36 and the bank 40 of the base body 30A corresponds to the partition 38R, the partition 38G, and the partition 38B. The section 38R is a region where the light emitting layer 211FR that emits light in the red wavelength region is to be formed, and the section 38G is a region where the light emitting layer 211FG that emits light in the green wavelength region is to be formed, The section 38B is a region where the light emitting layer 211GB that emits light in the blue wavelength region is to be formed.

  The base body 30A shown in FIG. 18B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. The row direction and the column direction of the matrix formed by the plurality of sections 38R, 38G, and 38B are parallel to the X-axis direction and the Y-axis direction, respectively. In the base body 30A, the section 38R, the section 38G, and the section 38B are periodically arranged in this order in the Y-axis direction. On the other hand, the sections 38R are arranged in a line at a predetermined fixed interval in the X-axis direction, and the sections 38G are arranged in a line at a predetermined fixed interval in the X-axis direction. The partitions 38B are arranged in a line at a predetermined constant interval in the X-axis direction. Note that the X-axis direction and the Y-axis direction are orthogonal to each other.

  The interval LRY along the Y-axis direction between the partitions 38R, that is, the pitch is approximately 560 μm. This interval is the same as the interval LGY along the Y-axis direction between the partitions 38G, and is the same as the interval LBY along the Y-axis direction between the partitions 18B. The planar image of the section 38R is a rectangle determined by the long side and the short side. Specifically, the length of the section 38R in the Y-axis direction is approximately 100 μm, and the length in the X-axis direction is approximately 300 μm. The section 38G and the section 38B also have the same shape and size as the section 38R. The spacing between the partitions and the size of the partitions correspond to the spacing and size of pixel regions corresponding to the same color in a high-definition television having a size of about 40 inches.

  The manufacturing apparatus 2 shown in FIG. 19 is an apparatus that discharges a corresponding luminescent material to each of the sections 38R, 38G, and 38B of the base body 30A of FIG. The manufacturing apparatus 2 includes a droplet discharge device 200R that applies the luminescent material 211R to all of the sections 38R, a drying device 250R that dries the luminescent material 211R on the sections 38R, and a liquid that applies the luminescent material 211G to all of the sections 38G. The droplet discharge device 200G, the drying device 250G for drying the luminescent material 211G on the section 38G, the droplet discharge device 200B for applying the luminescent material 211B to all the sections 38B, and the drying for drying the luminescent material B on the section 38B And a device 250B. The manufacturing apparatus 2 further includes a transport device 270 that transports the base body 30A in the order of the droplet discharge device 200R, the drying device 250R, the droplet discharge device 200G, the drying device 250G, the droplet discharge device 200B, and the drying device 250B. .

A droplet discharge device 200R illustrated in FIG. 20 includes a tank 201R that holds a liquid light-emitting material 211R, a tube 210R, and a discharge scanning unit 102 that is supplied with the light-emitting material 211R from the tank 201R via the tube 210R. . Since the configuration of the ejection scanning unit 102 is the same as the configuration of the ejection scanning unit 102 (FIG. 1) of the first embodiment, the same reference numerals are given to the same components, and redundant description is omitted. The configuration of the droplet discharge device 200G and the configuration of the droplet discharge device 200B are both basically the same as the configuration of the droplet discharge device 200R. However, the configuration of the droplet discharge device 200G is different from the configuration of the droplet discharge device 200R in that the droplet discharge device 200G includes a tank and a tube for the light emitting material 211G instead of the tank 201R and the tube 210R. Similarly, the configuration of the droplet discharge device 200B is different from the configuration of the droplet discharge device 200R in that the droplet discharge device 200B includes a tank and a tube for the light emitting material 211B instead of the tank 201R and the tube 210R. . Note that the liquid light emitting materials 211R, 211B, and 211G in the present embodiment are examples of the liquid material of the present invention.
A method for manufacturing the electroluminescence display device 30 using the manufacturing apparatus 2 will be described. First, a base 30A shown in FIG. 18 is manufactured using a known film forming technique and patterning technique.

  Next, the base 30A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the pixel electrode 36, the surface of the inorganic bank 40A, and the surface of the organic bank 40B in the respective recesses (a part of the pixel region) defined by the pixel electrode 36 and the bank 40 are made lyophilic. Present. Further, thereafter, a plasma process using tetrafluoromethane as a process gas is performed on the base 30A. By the plasma treatment using tetrafluoromethane, the surface of the organic bank 40B in each concave portion is fluorinated (treated to be liquid repellent) so that the surface of the organic bank 40B exhibits liquid repellency. Become. Note that the surface of the pixel electrode 36 and the surface of the inorganic bank 40A previously given lyophilicity by plasma treatment using tetrafluoromethane lose some lyophilicity, but still maintain lyophilicity. . As described above, the surface of the concave portion defined by the pixel electrode 36 and the bank 40 is subjected to a predetermined surface treatment, so that the surface of the concave portion becomes the partitions 38R, 38G, and 38B.

  Depending on the material of the pixel electrode 36, the material of the inorganic bank 40, and the material of the organic bank 40, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. Sometimes. In such a case, the surface of the recess defined by the pixel electrode 36 and the bank 40 is the sections 38R, 38G, and 38B without performing the surface treatment.

  Here, the corresponding hole transport layers 37R, 37G, and 37B may be formed on each of the plurality of pixel electrodes 36 subjected to the surface treatment. If the hole transport layers 37R, 37G, and 37B are positioned between the pixel electrode 36 and light emitting layers 211RF, 211GF, and 211BF, which will be described later, the light emission efficiency of the electroluminescence display device is increased. When a hole transport layer is provided on each of the plurality of pixel electrodes 36, the recesses defined by the hole transport layer and the bank 40 correspond to the sections 38R, 38G, and 38B.

  Note that the hole transport layers 37R, 37G, and 37B can be formed by an inkjet method. In this case, the hole transport layer can be formed by applying a predetermined amount of a solution containing a material for forming the hole transport layers 37R, 37G, and 37B to each pixel region and then drying the solution. In addition, you may form a positive hole transport layer using the drawing method (droplet provision method) described in this specification.

  The base body 30A on which the sections 38R, 38G, and 38B are formed is transported to the stage 106 of the droplet discharge device 200R by the transport device 270. 21A, the droplet discharge device 200R discharges the light emitting material 211R from the droplet discharge head 114 so that the layer of the light emitting material 211R is formed in all the partitions 38R. Specifically, the droplet discharge device 200R applies the luminescent material 211R to the section 38R by the droplet applying method described above. When the layer of the light emitting material 211R is formed in all the sections 38R of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250R. Then, the light emitting material 211R on the section 38R is completely dried to obtain the light emitting layer 211FR on the section 38R.

  Next, the transport device 270 positions the base body 30A on the stage 106 of the droplet discharge device 200G. Then, as shown in FIG. 21B, the droplet discharge device 200G discharges the luminescent material 211G from the droplet discharge head 114 so that the layer of the luminescent material 211G is formed in all the sections 38G. Specifically, the droplet discharge device 200G applies the luminescent material 211G to the section 38G by the droplet applying method described above. When the layer of the light emitting material 211G is formed in all the sections 38G of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250G. And the luminescent material 211FG is obtained on the division 38G by drying the luminescent material G on the division 38G completely.

  Next, the transport device 270 positions the base body 30A on the stage 106 of the droplet discharge device 200B. Then, as shown in FIG. 21C, the droplet discharge device 200B discharges the light emitting material 211B from the droplet discharge head 114 so that the layer of the light emitting material 211B is formed in all the sections 38B. Specifically, the droplet discharge device 200B applies the light emitting material 211B to the section 38B by the droplet applying method described above. When the layer of the light emitting material 211B is formed in all the sections 38B of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250B. Then, by completely drying the light emitting material 211B on the section 38B, the light emitting layer 211FB is obtained on the section 38B.

Next, as shown in FIG. 21D, the counter electrode 46 is provided so as to cover the light emitting layers 211FR, 211FG, 211FB, and the bank 40. The counter electrode 46 functions as a cathode.
Then, the electroluminescent display apparatus 30 shown in FIG.21 (d) is obtained by adhere | attaching the sealing substrate 48 and the base | substrate 30A in a mutual peripheral part. An inert gas 49 is enclosed between the sealing substrate 48 and the base body 30A.

  In the electroluminescence display device 30, light emitted from the light emitting layers 211 FR, 211 FG, and 211 FB is emitted through the pixel electrode 36, the circuit element layer 34, and the support substrate 32. The electroluminescence display device that emits light through the circuit element layer 34 in this manner is called a bottom emission type display device.

  Although the present invention has been described with respect to the case where the present invention is applied to the manufacture of a liquid crystal display device (color filter substrate) and the manufacture of an electroluminescence display device, the present invention is not limited to these examples. The present invention can also be applied to the manufacture of an image display device including an electron-emitting device (sometimes called SED (Surface-Conduction Electron-Emitter Display) or FED (Field Emission Display)).

<Embodiment of Electronic Device of the Present Invention>
Hereinafter, an image display device (electro-optical device) 1000 such as a liquid crystal display device, an electroluminescence display device, a plasma display device, or an image display device including an electron-emitting device manufactured by the method described above is used for various electronic devices. It can be used for a display portion.
FIG. 22 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied.

In this figure, a personal computer 1100 includes a main body 1104 having a keyboard 1102 and a display unit 1106. The display unit 1106 is supported by the main body 1104 via a hinge structure so as to be rotatable. Yes.
In the personal computer 1100, the display unit 1106 includes an image display device 1000.

FIG. 23 is a perspective view showing a configuration of a mobile phone (including PHS) to which the electronic apparatus of the invention is applied.
In this figure, a cellular phone 1200 is provided with an image display device 1000 in a display unit, together with a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206.
FIG. 24 is a perspective view showing the configuration of a digital still camera to which the electronic apparatus of the present invention is applied. In this figure, connection with an external device is also simply shown.

Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.
On the back of a case (body) 1302 in the digital still camera 1300, an image display device 1000 is provided in the display unit, and is configured to display based on an imaging signal from the CCD, and a finder that displays a subject as an electronic image. Function as.

A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration).
When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

The electronic apparatus according to the present invention includes, for example, a television, a video camera, a viewfinder type, and a monitor direct-view type video tape recorder in addition to the above-described personal computer (mobile personal computer), mobile phone, and digital still camera. , Laptop personal computers, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game machines, word processors, workstations, video phones, security TV monitors, electronic binoculars, POS terminals , Devices equipped with touch panels (for example, cash dispensers of financial institutions, automatic ticket vending machines), medical devices (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiographic display devices, ultrasonic diagnostic devices, endoscope display devices), Fish finder, various measuring instruments, instruments (eg If, gages for vehicles, aircraft, and ships), a flight simulator, various monitors, and a projection display such as a projector.
As described above, the droplet application method, the droplet discharge device, the electro-optical device manufacturing method, and the electronic apparatus according to the present invention have been described with respect to the illustrated embodiments. However, the present invention is not limited thereto. Each unit constituting the droplet discharge device can be replaced with any component that can exhibit the same function. Moreover, arbitrary components may be added.

1 is a perspective view of a droplet discharge device according to a first embodiment of the present invention. The figure which observed the droplet discharge means in the droplet discharge apparatus shown in FIG. 1 from the stage side. The figure which shows the bottom face of the droplet discharge head in the droplet discharge apparatus shown in FIG. 2A and 2B are diagrams illustrating a droplet discharge head in the droplet discharge apparatus illustrated in FIG. 1, in which FIG. The bottom view which shows the other structural example of a droplet discharge means. The block diagram which shows the control means in the droplet discharge apparatus shown in FIG. FIG. 5A is a schematic diagram illustrating a head driving unit, and FIG. 5B is a timing chart illustrating a driving signal, a selection signal, and an ejection signal in the head driving unit. The figure for demonstrating the droplet discharge method of this invention. The figure for demonstrating the droplet discharge method of this invention. The figure for demonstrating the droplet discharge method of this invention. The figure for demonstrating the droplet discharge method of this invention. The figure for demonstrating the droplet discharge method of this invention. The figure for demonstrating the droplet discharge method of this invention. The schematic diagram which shows the base | substrate which provides a droplet with the droplet discharge apparatus of 2nd Embodiment of this invention. The schematic diagram which shows the manufacturing apparatus containing the droplet discharge apparatus of 2nd Embodiment of this invention. The perspective view of the droplet discharge apparatus of 2nd Embodiment of this invention. The schematic diagram which shows the manufacturing method by the droplet discharge apparatus of 2nd Embodiment. The schematic diagram which shows the base | substrate which provides a droplet with the droplet discharge apparatus of 3rd Embodiment of this invention. The schematic diagram which shows the manufacturing apparatus containing the droplet discharge apparatus of 3rd Embodiment of this invention. The perspective view of the droplet discharge apparatus of 3rd Embodiment of this invention. FIG. 9 is a schematic diagram illustrating a manufacturing method using a droplet discharge device according to a third embodiment. 1 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which an electronic apparatus of the present invention is applied. The perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. FIG. 14 is a perspective view illustrating a configuration of a digital still camera to which the electronic apparatus of the invention is applied.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1, 2 ... Manufacturing apparatus 91, 92, 93 ... Dot 100, 100R, 100G, 100B, 100C, 200R, 200G, 200B ... Droplet discharge apparatus 101 ... Tank 102 ... Discharge scanning part 103, 103 ' …… Droplet discharge means 104 …… First position control device 105 …… Carriage 106 …… Stage 108 …… Second position control device 110 …… Tube 111 …… Liquid material 112 …… Control means 114 …… Droplet discharge Head 114G: Head group 116A, 116B ... Nozzle array 118 ... Nozzle 118R ... Reference nozzle 120 ... Cavity 122 ... Bulkhead 124 ... Vibrator 124A, 124B ... Electrode 124C ... Piezo element 126 ... Vibration Plate 127 ... Discharge part 128 ... Nozzle plate 129 ... Liquid pool 130 ... Supply port 131 ... Hole 200 ... Buffer memory 202 ... Storage means 203 ... Drive signal generator 204 ... Processing unit 206 ... Scanning drive unit 208 ... Head drive unit AS ... Analog switch DS ... ... Drive signal SC ... Selection signal ES ... Discharge signal 10A, 30A ... Substrate 10 ... Color filter substrate 12, 32 ... Support substrate 14 ... Black matrix 16, 40 ... Bank 20 ... Protective film 18R, 18G, 18B, 38R, 38G, 38B ... Section 111FR, 111FG, 111FB ... Filter layer 134 ... Scanning range 30 ... Electroluminescence display device 34 ... Circuit element layer 36 ... Pixel electrode 40A ... Inorganic bank 40B …… Organic bank 42 …… Insulating film 44 …… Switching element 45 …… Interlayer insulating film 44G …… Gate electrode 44S …… Source electrode 44D …… Drain electrode 44V …… Through hole 46 …… Counter electrode 48 …… Sealing substrate 49 …… Inert gas 150R, 150G, 150B, 250R , 250G, 250B ... Drying device 111R, 111G, 111B ... Color filter material 160 ... Oven 165 ... Curing device 170,270 ... Conveying device 211R, 211G, 211B ... Luminescent material 1000 ... Image display device 1100 ... Personal computer 1102 ... Keyboard 1104 ... Main body 1106 ... Display unit 1200 ... Mobile phone 1202 ... Operation buttons 1204 ... Earpiece 1206 ... Mouthpiece 1300 ... Digital still camera 1302 ... Case ( Bo I over) 1304 ...... light receiving unit 1306 ...... shutter button 1308 ...... circuit board 1312 ...... video signal output terminal 1314 input-output terminal 1430 ...... television monitor 1440 ...... personal computer ...... for data communication

Claims (11)

The liquid material for forming the color element is liquidated from the nozzle while relatively moving the substrate on which the plurality of sections to be color elements are formed and the droplet discharge means having the plurality of nozzles for discharging the droplets. A droplet application method for performing discharge scanning a plurality of times as a droplet to be applied to the section,
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
In the ejection scanning, the droplets are ejected a plurality of times from a plurality of nozzles having different positions in the major axis direction for each of the sections while relatively moving the substrate and the droplet ejection means, and The liquid is characterized in that the liquid droplets are applied at intervals such that a plurality of dots formed by landing of a plurality of liquid droplets ejected from the same nozzle are connected along a minor axis direction substantially orthogonal to the major axis direction. Drop application method.   The droplet applying method according to claim 1, wherein in the second and subsequent ejection scans, the droplets are applied in an overlapping manner at substantially the same positions as the positions where the droplets were applied in the previous ejection scan. The liquid material for forming the color element is liquidated from the nozzle while relatively moving the substrate on which the plurality of sections to be color elements are formed and the droplet discharge means having the plurality of nozzles for discharging the droplets. A droplet application method for performing discharge scanning a plurality of times as a droplet to be applied to the section,
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
While relatively moving the substrate and the droplet discharge means, the droplets are discharged at least once from a plurality of nozzles having different positions in the major axis direction for each of the sections, and the droplets Make sure that the dots that have landed do not overlap in the major axis direction with the dots that have landed the droplets ejected from another nozzle that has the closest distance in the major axis direction to the nozzle that ejected the droplet. Performing a first ejection scan for applying droplets;
The substrate and the droplet discharge means are relatively moved in a short axis direction substantially orthogonal to the long axis direction, and are superposed at substantially the same positions as the positions where droplets were applied in the first discharge scan. And a step of performing a second ejection scan for applying a droplet.   In the first ejection scan and the second ejection scan, a plurality of droplets are ejected from each nozzle a plurality of times per one section, and a plurality of droplets ejected from the same nozzle are landed. The droplet application method according to claim 3, wherein the droplets are applied at intervals such that the dots of the dots are connected along the minor axis direction.   5. The droplet applying method according to claim 1, wherein the substrate and the droplet discharge means are reciprocated relatively in the minor axis direction, and discharge scanning is performed in the forward path and the return path, respectively.   The droplet applying method according to claim 5, wherein the application of the droplet to one substrate is terminated by one or more reciprocating discharge scans.   In the second and subsequent ejection scans, the previous ejection is performed on the same section by shifting the relative position between the droplet ejection means and the substrate by a predetermined amount in the major axis direction compared to the previous ejection scan. 7. The droplet applying method according to claim 1, wherein the droplet is discharged from a nozzle different from that used for scanning. Droplet discharge means having a plurality of nozzles for discharging droplets;
A base on which a plurality of sections to be color elements are formed, and a moving means for relatively moving the droplet discharge means;
Control means for controlling the operation of the droplet discharge means and the moving means,
A plurality of ejection scans in which the liquid material for forming color elements is ejected as droplets from the nozzles and applied to the compartments while the droplet ejection means and the substrate are relatively positioned in the short axis direction of the compartments. A droplet discharge device for performing,
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
In the ejection scanning, a plurality of droplets are respectively ejected from a plurality of nozzles having different positions in the major axis direction for each of the sections while relatively moving the substrate and the droplet ejection means in the minor axis direction. Droplet discharge, characterized in that droplets are applied at intervals such that a plurality of dots formed by multiple discharges and landed by a plurality of droplets discharged from the same nozzle are connected along the minor axis direction apparatus. Droplet discharge means having a plurality of nozzles for discharging droplets;
A base on which a plurality of sections to be color elements are formed, and a moving means for relatively moving the droplet discharge means;
Control means for controlling the operation of the droplet discharge means and the moving means,
A plurality of ejection scans in which the liquid material for forming color elements is ejected as droplets from the nozzles and applied to the compartments while the droplet ejection means and the substrate are relatively positioned in the short axis direction of the compartments. A droplet discharge device for performing,
The droplet discharge means includes at least one droplet discharge head having at least one nozzle row in which a plurality of nozzles are arranged along the major axis direction of the partition, and the nozzle pitch in the major axis direction is the nozzle pitch of the partition. It is configured to be shorter than the length in the major axis direction,
While relatively moving the base body and the droplet discharge means in the minor axis direction, each droplet is ejected at least once from a plurality of nozzles whose positions in the major axis direction are different from each other. In addition, the dots formed by the droplets are related to the dots formed by the droplets discharged from another nozzle having the shortest distance in the major axis direction from the nozzle that ejected the droplets and the major axis direction. A first ejection scan for applying droplets without overlapping,
Secondly, droplets are applied in a manner overlapping the respective positions where droplets have been applied in the first ejection scan while relatively moving the substrate and the droplet ejection means in the minor axis direction. A droplet discharge apparatus that performs a discharge scan of.   An electro-optical device comprising a step of manufacturing a color element-attached substrate by forming color elements in a plurality of sections on a substrate using the droplet applying method according to claim 1. Production method.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing an electro-optical device according to claim 10.

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