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JP2005268505A - Multilayer wiring board and its manufacturing method - Google Patents

Multilayer wiring board and its manufacturing method Download PDF

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Publication number
JP2005268505A
JP2005268505A JP2004078338A JP2004078338A JP2005268505A JP 2005268505 A JP2005268505 A JP 2005268505A JP 2004078338 A JP2004078338 A JP 2004078338A JP 2004078338 A JP2004078338 A JP 2004078338A JP 2005268505 A JP2005268505 A JP 2005268505A
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Prior art keywords
wiring board
printed wiring
board
circuit
peripheral portion
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Ryoichi Kishihara
亮一 岸原
Satoru Nakao
知 中尾
Shoji Ito
彰二 伊藤
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Fujikura Ltd
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Fujikura Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To avoid a resin base from being brought into a state likely to be exfoliated by relaxing stress exerted on an interlayer part of a mother board printed wiring board and an island-shaped circuit-equipped resin base when inflecting the mother board printed wiring board. <P>SOLUTION: A cutout 14 is provided at a portion located around the sticking portion (partial multilayered portion 20) of the single-sided wiring circuit-equipped resin base 21 of the mother board printed wiring board 11, and the cutout A is made to be more easily inflected than the other portion B. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、多層配線板およびその製造方法に関し、特に、部分的に多層部を有するプリント配線板およびその製造方法に関するものである。   The present invention relates to a multilayer wiring board and a manufacturing method thereof, and more particularly to a printed wiring board partially having a multilayer portion and a manufacturing method thereof.

近年の電子機器は、高周波信号、デジタル化等に加え、小型、軽量化が進み、それに伴い、電子機器に搭載されるプリント配線板においても、小型、高密度実装化等が要求される。これらの要求に応えるプリント配線板として、信号伝送の高速性、機器内への設置自由度の優れるリジッドフレックスプリント配線板がある(たとえば、特許文献1)。   In recent years, electronic devices have become smaller and lighter in addition to high-frequency signals, digitization, and the like, and accordingly, printed wiring boards mounted on electronic devices are also required to be small and have high density mounting. As a printed wiring board that meets these requirements, there is a rigid flex printed wiring board that is excellent in high-speed signal transmission and high flexibility in installation in equipment (for example, Patent Document 1).

しかしながら、このようなリジッドフレックス基板の場合、リジッド部とフレックス部の外形を同時に打ち抜いて(外形加工して)製造するため、製造過程で、リジッド部に余分な多層化領域が存在することになり、材料コストに無駄があり、省資源化、省廃棄物化に反する。また、多層領域の位置に制限が設けられ、配線の自由度が損なわれる。   However, in the case of such a rigid flex board, since the outer shape of the rigid portion and the flex portion are simultaneously punched (processed by outer shape processing), an extra multilayered region exists in the rigid portion in the manufacturing process. The material cost is wasted, contrary to resource saving and waste saving. In addition, restrictions are placed on the position of the multilayer region, and the degree of freedom of wiring is impaired.

この問題を克服すべく、本出願人と同一の出願人は、マザーボードプリント配線板上に、予め外形加工がなされた片面配線回路付き樹脂基材が複数枚貼り合わせされ、それらが、インナービアホールによって電気的に接続されている部分多層配線板、さらには、マザーボードプリント配線板上に、当該マザーボードプリント配線板の外形よりも小さい外形で、当該マザーボードプリント配線板と一致する外形のない島状の片面配線回路付き樹脂基材が複数枚貼り合わせされ、それらが、インナービアホールによって電気的に接続されている部分多層配線板を提案している(特願2003−11635)。   In order to overcome this problem, the same applicant as the present applicant bonded a plurality of resin base materials with a single-sided wiring circuit on the motherboard printed wiring board in advance. An electrically connected partial multilayer wiring board, and further on the motherboard printed wiring board, an outer shape smaller than the outer shape of the motherboard printed wiring board, and an island-like one side having no outer shape matching the motherboard printed wiring board A partial multilayer wiring board is proposed in which a plurality of resin substrates with wiring circuits are bonded together and are electrically connected by inner via holes (Japanese Patent Application No. 2003-11635).

しかし、部分多層配線板の電子機器への搭載のために、フレキシブルなマザーボードプリント配線板を屈曲させる際に、マザーボープリント配線板とマザーボードプリント配線板上に貼り付けられている島状の回路付き樹脂基材との層間部に応力が集中し、樹脂基材が端面から剥離し易い状態になる。   However, when a flexible motherboard printed wiring board is bent in order to mount the partial multilayer wiring board on an electronic device, the island-shaped resin with circuit attached to the mother board printed wiring board and the motherboard printed wiring board Stress concentrates on the interlayer between the base material and the resin base material is easily peeled off from the end face.

この結果、繰り返し曲げ部に使用されると、島状の回路付き樹脂基材がマザーボードプリント配線板より剥離する虞れが生じ、また、熱衝撃試験によって破壊の起点となり易く、信頼性を損ねることになる。
特開2002−158445号公報
As a result, if it is used repeatedly, it may cause the island-shaped resin substrate with circuit to peel off from the mother board printed wiring board, and it is likely to become a starting point of destruction by the thermal shock test, thereby impairing reliability. become.
Japanese Patent Laid-Open No. 2002-158445

この発明が解決しようとする課題は、マザーボードプリント配線板を屈曲させる際に、マザーボープリント配線板と島状の回路付き樹脂基材との層間部にかかる応力を緩和し、樹脂基材が剥離し易い状態に置かれることを回避し、高い信頼性、耐久性を確保してFPC(フレキシブルプリント基板)やリジッドフレックス基板の特徴である屈曲性がよいことを活かすことである。   The problem to be solved by the present invention is that when the motherboard printed wiring board is bent, the stress applied to the interlayer portion between the mother board printed wiring board and the island-shaped resin substrate with circuit is relieved, and the resin substrate peels off. It is to avoid being placed in an easy state, to ensure high reliability and durability, and to take advantage of the good flexibility that is characteristic of FPC (flexible printed circuit board) and rigid flex circuit boards.

この発明による多層配線板は、フレキシブル材製のマザーボードプリント配線板に、予め外形加工がなされた片面配線回路付き樹脂基材が配置され、当該樹脂基材が前記マザーボードプリント配線板の配線層上に貼り合わせられている多層配線板において、前記マザーボードプリント配線板のうち前記片面配線回路付き樹脂基材の貼り合せ周辺部分が、当該貼り合せ周辺部分以外の部分に比して屈曲し易くなっている。   In the multilayer wiring board according to the present invention, a resin base material with a single-sided wiring circuit that has been subjected to external processing is arranged on a mother board printed wiring board made of a flexible material, and the resin base material is placed on the wiring layer of the motherboard printed wiring board. In the multi-layered wiring board that is bonded, the peripheral part of the resin base material with a single-sided wiring circuit in the motherboard printed wiring board is more easily bent than the part other than the peripheral part of the bonding. .

この発明による多層配線板は、前記片面配線回路付き樹脂基材の貼り合せ周辺部分に、切欠、孔あるいは溝が形成され、当該貼り合せ周辺部分を横切り配線板の板面に対して直交する面の断面積の小さくなっていることにより、前記マザーボードプリント配線板のうち前記片面配線回路付き樹脂基材の貼り合せ周辺部分が、当該貼り合せ周辺部分以外の部分に比して屈曲し易くなっている。   In the multilayer wiring board according to the present invention, a notch, a hole or a groove is formed in a peripheral portion of the resin base material with a single-sided wiring circuit, and the surface is orthogonal to the plate surface of the wiring board. Since the cross-sectional area of the board is small, the peripheral portion of the printed circuit board with the single-sided wiring circuit in the motherboard printed wiring board is more easily bent than the portion other than the peripheral portion of the bonding. Yes.

この発明による多層配線板は、好ましくは、複数個の切欠あるいは孔、あるいは溝が前記貼り合せ周辺部分を横切る方向に沿って設けられている。   In the multilayer wiring board according to the present invention, preferably, a plurality of notches, holes, or grooves are provided in a direction crossing the peripheral portion of the bonding.

この発明による多層配線板は、好ましくは、マザーボードプリント配線板の絶縁層が、ポリイミド、液晶ポリマ、ポリエチレンテレフタレート、ポリエチレンナフタレートから選択される可撓性樹脂製である。   In the multilayer wiring board according to the present invention, the insulating layer of the mother board printed wiring board is preferably made of a flexible resin selected from polyimide, liquid crystal polymer, polyethylene terephthalate, and polyethylene naphthalate.

この発明による多層配線板の製造方法は、マザーボードプリント配線板に、予め外形加工がなされた片面配線回路付き樹脂基材が配置され、当該樹脂基材が前記マザーボードプリント配線板の配線層上に貼り合わせられている多層配線板の製造方法において、前記マザーボードプリント配線板の外形加工の加工法と同じ加工法により、前記片面配線回路付き樹脂基材の貼合部分の周辺に位置する部分の前記マザーボードプリント配線板に、切欠あるいは孔を形成する。   In the method for manufacturing a multilayer wiring board according to the present invention, a resin base material with a single-sided wiring circuit that has been subjected to external processing is arranged on a mother board printed wiring board, and the resin base material is pasted on the wiring layer of the mother board printed wiring board. In the method of manufacturing a multilayer wiring board, the mother board in a portion located around the bonding portion of the resin base material with a single-sided wiring circuit by the same processing method as the outer shape processing method of the mother board printed wiring board A notch or a hole is formed in the printed wiring board.

この発明によれば、マザーボードプリント配線板のうち片面配線回路付き樹脂基材の貼合部分の周辺に位置する部分が、当該貼り合せ周辺部分以外の部分に比して屈曲し易いことから、マザーボードプリント配線板が屈曲されても、片面配線回路付き樹脂基材の貼合部分周辺に大きい曲げ応力が生じることがない。   According to this invention, since the portion located around the bonding portion of the resin base material with a single-sided wiring circuit in the mother board printed wiring board is more easily bent than the portion other than the bonding peripheral portion, the motherboard. Even if the printed wiring board is bent, a large bending stress is not generated around the bonded portion of the resin base material with a single-sided wiring circuit.

このことにより、マザーボープリント配線板とマザーボードプリント配線板上に貼り付けられている島状の回路付き樹脂基材との層間部の応力集中が緩和され、樹脂基材が剥離し易い状態になることが回避され、高い信頼性、耐久性を確保してフレキシブルプリント基板やリジッドフレックス基板の特徴である屈曲性がよいことを活かすことができるようになる。   As a result, the stress concentration at the interlayer between the mother board printed wiring board and the resin substrate with an island-like circuit attached on the mother board printed wiring board is alleviated, and the resin substrate is easily peeled off. Thus, high reliability and durability can be ensured, and the flexibility that is a characteristic of a flexible printed circuit board or a rigid flex circuit board can be utilized.

この発明による多層配線板(フレキシブル多層配線板)の一つの実施形態を、図1(a)、(b)、(c)を参照して説明する。   One embodiment of a multilayer wiring board (flexible multilayer wiring board) according to the present invention will be described with reference to FIGS. 1 (a), (b) and (c).

この実施形態のフレキシブル多層配線板10は、ベース基板をなす可撓性のマザーボードプリント配線板11を有する。マザーボードプリント配線板11は、フレキシブル材製の絶縁層12と銅箔等による配線層13とを有し、全体が屈曲可能な可撓性になっている。   The flexible multilayer wiring board 10 of this embodiment has a flexible motherboard printed wiring board 11 that forms a base substrate. The motherboard printed wiring board 11 has an insulating layer 12 made of a flexible material and a wiring layer 13 made of copper foil or the like, and is flexible so that the whole can be bent.

マザーボードプリント配線板11の絶縁層12は、ポリイミド(PI)、液晶ポリマ(LCP)、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)から選択される可撓性樹脂により構成することができる。   The insulating layer 12 of the motherboard printed wiring board 11 can be made of a flexible resin selected from polyimide (PI), liquid crystal polymer (LCP), polyethylene terephthalate (PET), and polyethylene naphthalate (PEN).

マザーボードプリント配線板11の配線層13側には、予め外形加工がなされた複数枚の片面配線回路付き樹脂基材21が積層状態で貼り合わせられている。この樹脂基材21の積層貼合部を部分多層化部20と云う。   On the side of the wiring layer 13 of the mother board printed wiring board 11, a plurality of resin base materials 21 with a single-sided wiring circuit that have been subjected to external processing are bonded in a laminated state. The laminated portion of the resin base material 21 is referred to as a partial multilayer portion 20.

片面配線回路付き樹脂基材21は、ポリイミド等による絶縁層22と銅箔等による配線層23と層間接着層24とを有し、各々層間導通のためのIVH構造の層間導通部25を形成されている。   The resin base material 21 with a single-sided wiring circuit has an insulating layer 22 made of polyimide or the like, a wiring layer 23 made of copper foil or the like, and an interlayer adhesive layer 24, and is formed with an interlayer conducting portion 25 having an IVH structure for interlayer conduction. ing.

片面配線回路付き樹脂基材21の貼合部分、つまり部分多層化部20の周辺に位置する部分のマザーボードプリント配線板11の両側縁部には、矩形の切欠部14が形成されている。切欠部14は、マザーボードプリント配線板11の絶縁層12の両側縁部12a、12bに、各々、配線層13の導体パターンを避けて貼り合せ周辺部分Aを横切る方向(直線)Xに沿って設けられている。この貼り合せ周辺部分Aを横切る方向(直線)Xとは、絶縁層12の平行な両側縁部12a、12bの長手方向(図1(a)では上下方向)に対して直交する方向(図1(a)では左右方向)である。   Rectangular cutouts 14 are formed on both side edges of the mother board printed wiring board 11 in the bonding portion of the resin base material 21 with a single-sided wiring circuit, that is, the portion located around the partial multilayered portion 20. The notches 14 are provided on both side edges 12a and 12b of the insulating layer 12 of the mother board printed wiring board 11 along a direction (straight line) X that crosses the peripheral portion A to be bonded while avoiding the conductor pattern of the wiring layer 13. It has been. A direction (straight line) X across the bonding peripheral portion A is a direction (FIG. 1) orthogonal to the longitudinal direction (vertical direction in FIG. 1A) of the parallel side edges 12a and 12b of the insulating layer 12. (A) in the left-right direction).

これにより、マザーボードプリント配線板11の部分多層化部20の周辺部分Aを横切って配線板11の板面に対して直交する面の断面積(以下、横断面積と云う)が他の部分Bに比して小さくなり(配線板11の平面形状が図1(a)に示されているような単純な矩形の場合)、マザーボードプリント配線板11のうち部分多層化部20の周辺部分Aが直線Xに沿って、他の部分Bに比して屈曲し易くなっている。   As a result, the cross-sectional area (hereinafter referred to as the cross-sectional area) of the plane orthogonal to the board surface of the wiring board 11 across the peripheral part A of the partial multilayered portion 20 of the motherboard printed wiring board 11 is changed to the other part B. (In the case where the planar shape of the wiring board 11 is a simple rectangle as shown in FIG. 1A), the peripheral portion A of the partial multilayered portion 20 of the motherboard printed wiring board 11 is a straight line. It is easier to bend along the X than the other part B.

上述の如く、マザーボードプリント配線板11のうち部分多層化部20の周辺部分Aが、配線板11を左右に横切る直線Xに沿って他の部分Bに比して屈曲し易いことから、図1(b)に仮想線により示されているように、マザーボードプリント配線板11が屈曲されても、片面配線回路付き樹脂基材21の貼合部分周辺に大きい曲げ応力が生じることがない。   As described above, the peripheral portion A of the partial multilayered portion 20 of the motherboard printed wiring board 11 is more easily bent than the other portions B along the straight line X that crosses the wiring board 11 left and right. As indicated by phantom lines in (b), even if the mother board printed wiring board 11 is bent, a large bending stress does not occur around the bonded portion of the resin base material 21 with a single-sided wiring circuit.

このことにより、マザーボープリント配線板11とマザーボードプリント配線板11上に貼り付けられている島状の片面配線回路付き樹脂基材21との層間部Cの応力集中が緩和され、樹脂基材21がマザーボープリント配線板11より剥離し易い状態になることが回避される。   As a result, the stress concentration in the interlayer portion C between the mother board printed wiring board 11 and the island-shaped single-sided wiring circuit-attached resin substrate 21 affixed on the motherboard printed wiring board 11 is alleviated, and the resin substrate 21 becomes It is avoided that the mother board printed wiring board 11 is easily peeled off.

この結果、フレキシブル多層配線板10の特徴である屈曲性がよいことを活かすことと、高い信頼性、耐久性を確保することとが両立する。   As a result, it is compatible with taking advantage of the flexibility that is a characteristic of the flexible multilayer wiring board 10 and ensuring high reliability and durability.

マザーボープリント配線板11に設ける切欠部14は、もちろん、マザーボープリント配線板11の配線の自由度を損なわない範囲で、できるだけ層間部Cに応力集中しないように、配置位置、大きさを設定される。   The cutout portion 14 provided in the mother board printed wiring board 11 is, of course, set in the arrangement position and size so as not to concentrate stress on the interlayer part C as much as possible within the range not impairing the freedom of wiring of the mother board printed wiring board 11. .

切欠部14の形状は、矩形に限られず、図2(a)に示されているように、三角形でもよい。   The shape of the notch 14 is not limited to a rectangle, but may be a triangle as shown in FIG.

また、マザーボードプリント配線板11のうち部分多層化部20の周辺部分Aが、他の部分Bに比して屈曲し易くなるよう、マザーボードプリント配線板11の部分多層化部20の周辺部分Aの横断面積を、他の部分Bより小さくすることは、切欠部14に限られず、図2(b)、(c)に示されているように、丸形や長円形等による貫通孔15を、マザーボードプリント配線板11の絶縁層12に穿設することによっても、行うことができる。   Further, the peripheral portion A of the partial multilayered portion 20 of the mother board printed wiring board 11 is more easily bent than the other portions B so that the peripheral portion A of the partial multilayered portion 20 of the motherboard printed wiring board 11 is easily bent. Making the cross-sectional area smaller than the other part B is not limited to the notch part 14, and as shown in FIGS. 2B and 2C, the through-hole 15 having a round shape, an oval shape, or the like, This can also be done by drilling in the insulating layer 12 of the motherboard printed wiring board 11.

貫通孔15は、多層基板のスルーホールとは異なり、配線層13の導体パターンを避けて、貼り合せ周辺部分Aを横切る方向(直線)Xに沿って、複数個、所定ピッチで整列して設けられている
切欠部14、貫通孔15は、プレス打ち抜き、レーザ加工、プラズマエッチング等によって形成することができる。
Unlike the through-holes of the multilayer substrate, a plurality of through-holes 15 are provided at a predetermined pitch along the direction (straight line) X across the bonding peripheral portion A, avoiding the conductor pattern of the wiring layer 13. The cutouts 14 and the through holes 15 can be formed by press punching, laser processing, plasma etching, or the like.

また、図2(d)に示されているように、部分多層化部20の周辺部分Aのマザーボードプリント配線板11の絶縁層12にフレキシブルヒンジを構成するような薄肉部16を、配線層13の導体パターンを避けて、貼り合せ周辺部分Aを横切る方向(直線)に沿ってハーフエッチング等によって形成することにより、マザーボードプリント配線板11のうち部分多層化部20の周辺部分Aを、他の部分Bに比して屈曲し易くしてもよい。薄肉部16はマザーボードプリント配線板11の絶縁層12に設けられるから、マザーボープリント配線板11の配線の自由度に影響を与えることがない。   Further, as shown in FIG. 2 (d), a thin portion 16 that constitutes a flexible hinge is formed on the insulating layer 12 of the motherboard printed wiring board 11 in the peripheral portion A of the partial multilayered portion 20. The peripheral portion A of the partial multilayered portion 20 of the mother board printed wiring board 11 is formed by another half-etching or the like along the direction (straight line) crossing the peripheral portion A of the bonding, avoiding the conductive pattern of It may be easier to bend compared to the portion B. Since the thin portion 16 is provided in the insulating layer 12 of the motherboard printed wiring board 11, it does not affect the degree of freedom of wiring of the mother printed wiring board 11.

また、図3に示されているように、部分多層化部20の平面形状が矩形の場合、開口部(孔)17が部分多層化部20の周辺部分Aを取り囲む堀のように、部分多層化部20の各辺に平行に形成されていてもよい。つまり、貼り合わせ部分周囲において、部分多層化部20の各辺に平行な開口部17が形成していてもよい。   In addition, as shown in FIG. 3, when the planar shape of the partial multilayered portion 20 is rectangular, the partial multilayer such as an opening (hole) 17 surrounding the peripheral portion A of the partial multilayered portion 20 is formed. It may be formed in parallel with each side of the conversion unit 20. That is, the opening 17 parallel to each side of the partial multilayer portion 20 may be formed around the bonded portion.

つぎに、図1に示されている実施形態による多層配線板の製造方法の一つの実施形態を、図4、図5を参照して説明する。   Next, one embodiment of a method for manufacturing a multilayer wiring board according to the embodiment shown in FIG. 1 will be described with reference to FIGS.

図4(a)に示されているように、ポリイミドフィルム(絶縁層)101の片面に銅箔層102を有する片面銅箔付きポリイミド基材100を出発材料とし、図4(b)に示されているように、サブトラクティブ法によって銅箔層102をエッチングすることで導体回路(配線層)103を形成し、回路形成済みプリント基板(回路形成済み樹脂基材)104を得た。   As shown in FIG. 4A, a polyimide base material 100 with a single-sided copper foil having a copper foil layer 102 on one side of a polyimide film (insulating layer) 101 is used as a starting material. As shown, a conductive circuit (wiring layer) 103 was formed by etching the copper foil layer 102 by a subtractive method, and a printed circuit board (circuit formed resin base material) 104 with a circuit formed thereon was obtained.

回路形成済みプリント基板104は、銅箔のないポリイミド基材を出発材料として、アディティブ法、セミアディティブ法によっても得ることができる。   The printed circuit board 104 on which the circuit has been formed can also be obtained by an additive method or a semi-additive method using a polyimide base material having no copper foil as a starting material.

ついで、図4(c)に示されているように、回路形成済みプリント基板104の、導体回路103とは反対側の面に層間接着層105を貼り合わせによって形成する。   Next, as shown in FIG. 4C, an interlayer adhesive layer 105 is formed on the surface of the printed circuit board 104 on which the circuit has been formed on the side opposite to the conductor circuit 103 by bonding.

層間接着層105は、層間接着層105を構成する接着剤としては、熱可塑性ポリイミドに熱硬化機能を付与したものを使用したが、これは、もちろん、エポキシ等に代表される熱硬化性樹脂によるものや、熱可塑性ポリイミド等の熱可塑性樹脂によるものでも構わない。   As the adhesive constituting the interlayer adhesive layer 105, the interlayer adhesive layer 105 used was a thermoplastic polyimide provided with a thermosetting function. Of course, this is based on a thermosetting resin typified by epoxy or the like. Or a thermoplastic resin such as thermoplastic polyimide may be used.

ただし、層間接着層付きの回路形成済みプリント基板104の構成は、表裏非対称なものであり、層間接着層105を形成した状態で、後の工程で不具合となるような反りが発生しないことが好ましい。このことから、層間接着層105を構成する接着剤は、ガラス転移温度が110℃以下、常温弾性率が1300MPa以下であることが好ましい。   However, the configuration of the printed circuit board 104 with the interlayer adhesive layer formed on the circuit is asymmetrical on the front and back sides, and it is preferable that the warp that causes a problem in a later process does not occur in the state where the interlayer adhesive layer 105 is formed. . For this reason, the adhesive constituting the interlayer adhesive layer 105 preferably has a glass transition temperature of 110 ° C. or lower and a room temperature elastic modulus of 1300 MPa or lower.

ついで、図4(d)に示されているように、UV・YAGレーザーによって層間接着層105とポリイミドフィルム101を貫通する貫通孔(インナビアホール)106の穴明け加工を施し、プラズマ照射によるソフトエッチを施すことでデスミアを行う。そして、この貫通孔106に銀ペーストを充填することで、IVH構造の層間導通部107を形成する。これにより、層間導通部付きの一枚の片面配線回路付きプリント基板(基材)108が完成する。   Next, as shown in FIG. 4 (d), a through-hole (inner via hole) 106 penetrating the interlayer adhesive layer 105 and the polyimide film 101 is drilled by UV / YAG laser, and soft etching by plasma irradiation is performed. Desmear is performed by applying. The through hole 106 is filled with a silver paste to form an IVH structure interlayer conductive portion 107. Thereby, one printed circuit board (base material) 108 with a single-sided wiring circuit with an interlayer conductive portion is completed.

穴明け加工のレーザーは、UV・YAGレーザーのほかにも、炭酸ガスレーザーや、エキシマレーザー等によって、現状では、より高速で加工ができる。また、デスミアの方法としては、過マンガン酸塩を使用した湿式デスミアも、ごく一般的である。IVHに充填する導電性ペーストとしては、銀ペーストのほかにも、銅ペースト、カーボンペースト、ニッケルペースト等、種々の金属ペーストを使用することが可能である。   The drilling laser can be processed at a higher speed at present by using a carbon dioxide laser, an excimer laser or the like in addition to the UV / YAG laser. Further, as a desmear method, wet desmear using a permanganate is also very common. As the conductive paste filled in the IVH, various metal pastes such as a copper paste, a carbon paste, and a nickel paste can be used in addition to the silver paste.

ついで、金型プレスにより、図4(e)に点線Laで示されている如く、外形加工し、図4(f)に示されているように、外形加工がなされた片面配線回路付き樹脂基材110を複数個得た。   Subsequently, the outer shape was processed by a die press as shown by a dotted line La in FIG. 4E, and the outer base was processed as shown in FIG. A plurality of materials 110 were obtained.

ついで、図5(g)に示されているように、絶縁層をなすポリイミドフィルム151の表裏両面に、銅箔による導体回路152、153が形成済みであり、かつ、積層予定部分に開口部156を開口させた絶縁保護用のカバー層154、155が表面に形成されているマザーボード配線板150を作成した。   Next, as shown in FIG. 5 (g), conductor circuits 152 and 153 made of copper foil have been formed on both front and back surfaces of the polyimide film 151 forming the insulating layer, and an opening 156 is formed in the portion to be laminated. A motherboard wiring board 150 having insulating protection cover layers 154 and 155 formed on the surface was prepared.

そして、マザーボード配線板150に、外形加工がなされた複数枚の片面配線回路付き樹脂基材110を、各々位置合わせした後に重ね合わせた。   Then, a plurality of single-sided wiring circuit-attached resin base materials 110 each having an outer shape processed were superimposed on the motherboard wiring board 150 after being aligned with each other.

位置合わせには、ピンアライメント方式をとっても構わないが、ピン用の穴を明けるスペースが必要になるため、好ましいとは云えない。また、基材110が常温粘着性を有するため、ピンアライメント方式による位置合わせは難しい。従って、画像認識による位置合わせを実施した。   For alignment, a pin alignment method may be used, but a space for drilling a pin hole is required, which is not preferable. Moreover, since the base material 110 has room temperature adhesiveness, alignment by the pin alignment method is difficult. Therefore, alignment by image recognition was performed.

この後、真空熱プレス機により、真空度lkPa以下の元で、加熱、加圧し、層間接着層105による本接着を行い、図5(h)に示されているように、層間導通部107によって基材110同士の導体回路103、基材110の導体回路103とマザーボード配線板150の導体回路152とが導通接続された多層配線板160を得た。   After that, heating and pressurization are performed by a vacuum heat press machine under a vacuum degree of 1 kPa or less, and the main adhesion by the interlayer adhesive layer 105 is performed. As shown in FIG. The multilayer circuit board 160 in which the conductor circuit 103 between the base materials 110, the conductor circuit 103 of the base material 110, and the conductor circuit 152 of the motherboard wiring board 150 are conductively connected is obtained.

ついで、図5(i)に示されているように、開口部156と積層された基材110との隙間に、印刷法によってソルダレジスト157を塗布し、これを硬化させた。   Next, as shown in FIG. 5I, a solder resist 157 was applied to the gap between the opening 156 and the laminated base material 110 by a printing method, and this was cured.

ついで、プレス金型による打ち抜き加工によって多層配線板160を、図5(i)に点線Lbで示されている外形加工線に沿った外形加工を行う。この外形加工時に、図5(j)に示されているように、外形加工と同じプレス金型による打ち抜き加工によって多層化部分の周辺に切欠開口部158を外形加工と同時に形成し、多層配線板160を完成させた。   Next, the multilayer wiring board 160 is subjected to outer shape processing along the outer shape processing line indicated by the dotted line Lb in FIG. 5I by punching with a press die. At the time of this outer shape processing, as shown in FIG. 5 (j), a notch opening 158 is formed around the multilayered portion simultaneously with the outer shape processing by punching with the same press die as the outer shape processing. 160 was completed.

この外形加工と切欠開口部158の形成は、プレス金型による打ち抜き加工以外に、レーザ加工、プラズマエッチングによって同時に形成することができる。   The outer shape processing and the formation of the notch opening 158 can be simultaneously formed by laser processing and plasma etching, in addition to punching by a press die.

(a)〜(c)はこの発明による多層配線板の一つの実施形態を模式的に示す断面図である。(A)-(c) is sectional drawing which shows typically one Embodiment of the multilayer wiring board by this invention. (a)〜(d)は各々この発明による多層配線板の他の実施形態を模式的に示す断面図である。(A)-(d) is sectional drawing which shows typically other embodiment of the multilayer wiring board by this invention, respectively. この発明による多層配線板の他の実施形態を模式的に示す断面図である。It is sectional drawing which shows typically other embodiment of the multilayer wiring board by this invention. (a)〜(f)は本実施形態による多層配線板の製造方法の工程を示す工程図である。(A)-(f) is process drawing which shows the process of the manufacturing method of the multilayer wiring board by this embodiment. (g)〜(j)は本実施形態による多層配線板の製造方法の工程を示す工程図である。(G)-(j) is process drawing which shows the process of the manufacturing method of the multilayer wiring board by this embodiment.

符号の説明Explanation of symbols

10 多層配線板
11 マザーボードプリント配線板
12 絶縁層
13 配線層
14 切欠部
15 孔
16 薄肉部
20 部分多層化部
21 片面配線回路付き樹脂基材
100 片面銅箔付きポリイミド基材
101 ポリイミドフィルム
102 銅箔層
103 導体回路
104 回路形成済みプリント基板
105 層間接着層
106 貫通孔
107 層間導通部
108 片面配線回路付きプリント基板
110 片面配線回路付き樹脂基材
150 マザーボード配線板
151 ポリイミドフィルム
152、153 導体回路
154、155 カバー層
156 開口部
157 ソルダレジスト
158 切欠開口部
160 多層配線板
DESCRIPTION OF SYMBOLS 10 Multilayer wiring board 11 Mother board printed wiring board 12 Insulating layer 13 Wiring layer 14 Notch part 15 Hole 16 Thin part 20 Partial multilayer part 21 Resin base material with single-sided wiring circuit 100 Polyimide base material 101 with single-sided copper foil Polyimide film 102 Copper foil Layer 103 Conductor circuit 104 Circuit-formed printed circuit board 105 Interlayer adhesive layer 106 Through hole 107 Interlayer conduction part 108 Printed circuit board with single-sided wiring circuit 110 Resin substrate 150 with single-sided wiring circuit Motherboard wiring board 151 Polyimide films 152 and 153 Conductor circuit 154 155 Cover layer 156 Opening 157 Solder resist 158 Notch opening 160 Multilayer wiring board

Claims (5)

フレキシブル材製のマザーボードプリント配線板に、予め外形加工がなされた片面配線回路付き樹脂基材が配置され、当該樹脂基材が前記マザーボードプリント配線板の配線層上に貼り合わせられている多層配線板において、
前記マザーボードプリント配線板のうち前記片面配線回路付き樹脂基材の貼り合せ周辺部分が、当該貼り合せ周辺部分以外の部分に比して屈曲し易くなっている多層配線板。
A multilayer wiring board in which a resin base material with a single-sided wiring circuit that has been preliminarily processed is arranged on a mother board printed wiring board made of a flexible material, and the resin base material is bonded onto a wiring layer of the motherboard printed wiring board In
A multilayer wiring board in which a bonding peripheral portion of the resin substrate with a single-sided wiring circuit in the motherboard printed wiring board is more easily bent than portions other than the bonding peripheral portion.
前記片面配線回路付き樹脂基材の貼り合せ周辺部分に、切欠、孔あるいは溝が形成され、当該貼り合せ周辺部分を横切って配線板の板面に対して直交する面の断面積が小さくなっていることにより、前記マザーボードプリント配線板のうち前記片面配線回路付き樹脂基材の貼り合せ周辺部分が、当該貼り合せ周辺部分以外の部分に比して屈曲し易くなっている請求項1記載の多層配線板。   Notches, holes, or grooves are formed in the peripheral portion of the resin substrate with the single-sided wiring circuit, and the cross-sectional area of the surface orthogonal to the board surface of the wiring board is reduced across the peripheral portion of the bonding. 2. The multilayer according to claim 1, wherein a bonding peripheral portion of the resin base material with a single-sided wiring circuit in the motherboard printed wiring board is more easily bent than a portion other than the bonding peripheral portion. Wiring board. 複数個の切欠あるいは孔、あるいは溝が前記貼り合せ周辺部分を横切る方向に沿って設けられている請求項2記載の多層配線板。   The multilayer wiring board according to claim 2, wherein a plurality of cutouts, holes, or grooves are provided along a direction crossing the pasted peripheral portion. マザーボードプリント配線板の絶縁層が、ポリイミド、液晶ポリマ、ポリエチレンテレフタレート、ポリエチレンナフタレートから選択される可撓性樹脂製である請求項1〜3の何れか1項記載の多層配線板。   The multilayer wiring board according to any one of claims 1 to 3, wherein the insulating layer of the mother board printed wiring board is made of a flexible resin selected from polyimide, liquid crystal polymer, polyethylene terephthalate, and polyethylene naphthalate. マザーボードプリント配線板に、予め外形加工がなされた片面配線回路付き樹脂基材が配置され、当該樹脂基材が前記マザーボードプリント配線板の配線層上に貼り合わせられている多層配線板の製造方法において、
前記マザーボードプリント配線板の外形加工の加工法と同じ加工法により、前記片面配線回路付き樹脂基材の貼り合せ周辺部分の前記マザーボードプリント配線板に、切欠あるいは孔を形成する多層配線板の製造方法。
In a method for manufacturing a multilayer wiring board, wherein a resin base material with a single-sided wiring circuit that has been subjected to external shape processing is disposed on a motherboard printed wiring board, and the resin base material is bonded onto a wiring layer of the motherboard printed wiring board ,
A method of manufacturing a multilayer wiring board in which a notch or a hole is formed in the motherboard printed wiring board in the peripheral portion of the bonding of the resin base material with the single-sided wiring circuit by the same processing method as the outer shape processing method of the motherboard printed wiring board .
JP2004078338A 2004-03-18 2004-03-18 Multilayer wiring board and its manufacturing method Pending JP2005268505A (en)

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123428A (en) * 2005-10-26 2007-05-17 Nec Electronics Corp Flexible circuit board
WO2008139612A1 (en) * 2007-05-14 2008-11-20 Ibiden Co., Ltd. Wiring board and method of manufacturing the same
WO2008139613A1 (en) * 2007-05-14 2008-11-20 Ibiden Co., Ltd. Wiring board and method of manufacturing the same
JP2009004687A (en) * 2007-06-25 2009-01-08 Brother Ind Ltd Flexible wiring material
WO2009011024A1 (en) * 2007-07-13 2009-01-22 Ibiden Co., Ltd. Wiring board and manufacturing method thereof
WO2009011023A1 (en) * 2007-07-13 2009-01-22 Ibiden Co., Ltd. Wiring board and manufacturing method thereof
US8035983B2 (en) 2007-07-17 2011-10-11 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
US8178789B2 (en) 2007-07-17 2012-05-15 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
US8648263B2 (en) 2007-05-17 2014-02-11 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
US8669480B2 (en) 2007-05-17 2014-03-11 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
JP2016526275A (en) * 2013-04-28 2016-09-01 京東方科技集團股▲ふん▼有限公司Boe Technology Group Co.,Ltd. Flexible substrate, display device, and method of bonding electronic device on flexible substrate
JP2017045952A (en) * 2015-08-28 2017-03-02 シチズンファインデバイス株式会社 High-accuracy submount substrate and manufacturing method thereof
WO2020017881A1 (en) * 2018-07-19 2020-01-23 스템코 주식회사 Multilayer circuit board and manufacturing method therefor

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123428A (en) * 2005-10-26 2007-05-17 Nec Electronics Corp Flexible circuit board
WO2008139612A1 (en) * 2007-05-14 2008-11-20 Ibiden Co., Ltd. Wiring board and method of manufacturing the same
WO2008139613A1 (en) * 2007-05-14 2008-11-20 Ibiden Co., Ltd. Wiring board and method of manufacturing the same
US8648263B2 (en) 2007-05-17 2014-02-11 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
US8669480B2 (en) 2007-05-17 2014-03-11 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
JP2009004687A (en) * 2007-06-25 2009-01-08 Brother Ind Ltd Flexible wiring material
WO2009011023A1 (en) * 2007-07-13 2009-01-22 Ibiden Co., Ltd. Wiring board and manufacturing method thereof
WO2009011024A1 (en) * 2007-07-13 2009-01-22 Ibiden Co., Ltd. Wiring board and manufacturing method thereof
US8035983B2 (en) 2007-07-17 2011-10-11 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
US8178789B2 (en) 2007-07-17 2012-05-15 Ibiden Co., Ltd. Wiring board and method of manufacturing wiring board
US8359738B2 (en) 2007-07-17 2013-01-29 Ibiden Co., Ltd. Method of manufacturing wiring board
JP2016526275A (en) * 2013-04-28 2016-09-01 京東方科技集團股▲ふん▼有限公司Boe Technology Group Co.,Ltd. Flexible substrate, display device, and method of bonding electronic device on flexible substrate
JP2017045952A (en) * 2015-08-28 2017-03-02 シチズンファインデバイス株式会社 High-accuracy submount substrate and manufacturing method thereof
WO2020017881A1 (en) * 2018-07-19 2020-01-23 스템코 주식회사 Multilayer circuit board and manufacturing method therefor
US11956904B2 (en) 2018-07-19 2024-04-09 Stemco Co., Ltd. Multilayer circuit board and manufacturing method therefor

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