JP2005128517A - Method for manufacturing device in which elctro-optical conversion member is used - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a device in which an electro-optical conversion member such as a liquid crystal is used, in which processes after formation of microlenses are a few and in which danger of injuring the microlenses is low and which prevents deterioration of image quality by sticking of impurities. <P>SOLUTION: This manufacturing method of the device has a stage for constituting a cell by sticking a first substrate 10 having a first electrode 11 and a second substrate 20 which has second electrodes 24 and light reflection members 21 having light transmission parts 22 with sealant 16 while providing a gap 15 where the electro-optical conversion member is filled up, a stage for forming a photo setting resin layer 30a on a surface of a side opposite to the gap 15 of the second substrate 20 of the cell, a stage for forming the microlenses each of which condenses light which goes to a gap 15 from the second substrate 20 by irradiating the photosensitive resin layer 30a with light while transmitting the light through the gap 15, the light transmission parts 22 and the second substrate 20 from the side of the first substrate 10. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing an apparatus using an electro-optic conversion member, for example, a liquid crystal, between two substrates. In particular, it relates to a method of forming a microlens in such an apparatus.

  Liquid crystal display devices are widely used in display units of electronic devices such as touch panels and mobile phones. In such a liquid crystal display device, it has been conventionally required to improve display brightness.

A reflective liquid crystal display device provided with a reflective film or a reflective plate displays an image using ambient ambient light, and thus does not need to use a backlight. However, since the reflective liquid crystal display device displays using only external light such as natural light or indoor illumination light, the display becomes dark when the ambient light is insufficient.
On the other hand, a transmissive liquid crystal device displays using light from a backlight provided below the liquid crystal device, and thus consumes much power and is not suitable for a portable electronic device.
Therefore, a transflective liquid crystal device having characteristics of both a reflective liquid crystal device and a transmissive liquid crystal device has been developed.

  The transflective liquid crystal device is provided with a backlight on the back of the liquid crystal panel that constitutes the liquid crystal display device, and in a bright place, displays only using external light as in the reflective liquid crystal device, and in a dark place, Display is performed using illumination light emitted from the backlight. The transflective liquid crystal device uses the outside light and the illumination light according to the brightness of the surroundings, thereby enabling clear display even when the surroundings are dark while reducing power consumption.

On the other hand, in a liquid crystal device including a backlight, a macro lens is provided to further improve display brightness.
Patent Document 1 discloses a method of forming a microlens array on a transparent flat substrate with a resin composition that is cured by curing energy rays.
In Patent Document 2, a reflective film is formed on a transparent substrate, a plurality of micropores that expose the transparent substrate are formed in the reflective film, and the reflective film is used as a mask from the plurality of microholes into the transparent substrate. It is disclosed that a microlens array is formed by diffusing a material having a refractive index different from that of a substrate.

In Patent Document 3, a light reflection film provided with a light transmission portion for each pixel is formed on one surface of a glass substrate, a photosensitive resist material is applied to the opposite surface of the glass substrate, and the light reflection film is formed. A method is disclosed in which the photosensitive resist material is exposed as a photomask, the unexposed portion of the resist is removed by development, and a microlens is formed in a portion corresponding to the light transmitting portion.
In Patent Document 4, two mother boards are bonded with a sealing material with a gap therebetween to form a pair of mother boards in which a plurality of empty cells are formed, and the mother board is polished to obtain a thickness. A method for manufacturing a liquid crystal device is disclosed in which a liquid crystal is injected between the mother substrates.

Japanese Patent Laid-Open No. 9-166701 (FIG. 1) JP 2003-84276 A (FIG. 1, FIG. 6, paragraphs (0023) to (0027), (0045) to (0048)) JP 2004-18106 A (FIG. 1, FIG. 3, paragraphs (0049) to (0057)) JP 2001-133762 A (FIG. 1)

In a conventional method of forming a microlens in a device using an electro-optic conversion member such as a liquid crystal device, as disclosed in Patent Documents 1 to 3, a microlens is first formed on one substrate, and then A cell is formed by bonding with the other substrate by a sealing material.
However, in the conventional method, after the microlens is formed on the substrate, the step of adhering the substrate with a sealing material is performed, so the number of steps after the microlens is formed increases and there is a risk of scratching the microlens. Get higher. In addition, in the microlens manufacturing process, impurities such as dust may adhere to the substrate and the image quality may deteriorate.
Accordingly, an object of the present invention is to provide a method for manufacturing an apparatus using an electro-optic conversion member such as a liquid crystal, which has solved the conventional problems.

According to the method of manufacturing the apparatus using the electro-optic conversion member according to the present invention,
(A) The electro-optic conversion member is filled with a first substrate having at least a first electrode, a second substrate having at least a second electrode, and a light reflecting member having a light transmission portion. A step of forming a cell by providing a gap and adhering with a sealing material;
(B) forming a photocurable resin layer on a surface of the second substrate of the cell opposite to the gap;
(C) From the first substrate side, the light passes through the gap, the light transmission portion, and the second substrate to irradiate the photocurable resin layer with light, and travels from the second substrate to the gap. Forming a microlens for condensing light on the light transmitting portion.

Moreover, according to the present invention,
(A) The electro-optic conversion member is filled with a first substrate having at least a first electrode, a second substrate having at least a second electrode, and a light reflecting member having a light transmission portion. A step of forming a cell by providing a gap and adhering with a sealing material;
(B) forming a photocurable resin layer on a surface of the second substrate of the cell opposite to the gap;
(C) filling and sealing the gap with the electro-optic conversion member;
(D) From the side of the first substrate, the light curable resin layer is irradiated with light through the gap filled with the electro-optic conversion member, the light transmission unit, and the second substrate, Forming a microlens that collects light directed from the substrate of 2 toward the gap filled with the electro-optic conversion member onto the light transmission portion;
Have

According to the present invention, a color filter may be provided between the first substrate and the second substrate.
The center of the pixel portion defined by the first electrode of the first substrate and the second electrode of the second substrate and the center of the light transmission portion are substantially in the vertical direction of the first substrate. Match.
According to the present invention, a plurality of light transmission portions are provided for each of the pixel portions defined by the first electrode of the first substrate and the second electrode of the second substrate, and for each pixel portion, A plurality of microlenses are formed.

According to the present invention, after the step of forming the microlens,
(E) providing a first polarizing plate on a surface of the first substrate opposite to the gap; and
(F) providing a second polarizing plate and a backlight on the microlens side;
Have

  According to the present invention, the filled electro-optic conversion member can be a liquid crystal. Then, in the step (d) of irradiating the photocurable resin layer with light to form a microlens, a voltage is applied to the first electrode and the second electrode to drive the filled liquid crystal. The amount of transmitted light can be controlled.

According to the method of the present invention,
(A) a first mother substrate including a portion for forming a plurality of cells, the first mother substrate having at least a first electrode in each of the portions for forming the cells;
A second mother substrate including a portion for forming a plurality of cells, the second mother substrate having a light reflecting member having at least a second electrode and a light transmitting portion in each of the portions for forming the cells. The
The electro-optic conversion member is filled with a first seal material provided along the peripheral edges of the first and second mother substrates and a second seal material provided so as to surround the portions forming the cells. Forming a plurality of cells by adhering with a gap between them,
(B) forming a photo-curing resin layer on the surface of the second mother substrate opposite to the gap;
(C) From the first mother substrate side, the light, the light transmission part, and the second mother substrate are transmitted to irradiate the photocurable resin layer with light, and from the second mother substrate, Forming a microlens for condensing the light traveling toward the gap onto the light transmission part.

At this time, a light shielding material may be provided on a portion of the first and second mother substrates other than the portion where the cells are formed so that the microlens is not formed.
The center of the pixel portion defined by the first electrode of the first mother substrate and the second electrode of the second mother substrate and the center of the light transmitting portion are perpendicular to the first mother substrate. The direction is substantially the same.
The first sealing material forms a double seal at a part of the periphery of the mother board, and the double seal communicates between the gap formed by the first and second mother boards and the outside. A passage is formed.

According to the present invention, after the step of forming the microlens,
(D) First and second mother substrates having a plurality of cells on which the microlenses are formed are cut into strips, and the electro-optic conversion member is filled from an injection port provided in the second sealing material. And sealing,
Have
In addition,
(E) cutting and dividing a plurality of cells filled and sealed with the electro-optic conversion member into single cells;
Have

The present invention will be described by taking a transflective liquid crystal device as an example of a device using an electro-optic conversion member.
In FIG. 1, reference numeral 11 denotes a first electrode, and 24 denotes a second electrode. A liquid crystal layer is sandwiched between the first and second electrodes, and a pixel is formed in a portion where the first and second electrodes 11 and 24 overlap. A portion 28 is formed. In FIG. 1, a reflective film 21 serving as a light reflecting material is provided on the entire lower surface of the second electrode 24, and an opening 22 serving as a light transmitting part is formed in a portion of the reflective film 21 that faces the pixel portion 28. Is provided. Although the opening 22 is rectangular in the drawing, it may have an arbitrary shape such as a stripe, polygon, or circle.
Reference numeral 30 denotes a microlens provided on the lower side of the reflective film 21, and is disposed to face the opening 22.

FIG. 2 is a cross-sectional view taken along line AA in FIG. In FIG. 2, reference numeral 10 denotes a transparent first substrate having a first electrode 11 and a first alignment film 12. 20 is a transparent lens having a microlens 30 on one side and a reflective film 21, an insulating film 23, a second electrode 24, and a second alignment film 25 provided with an opening 22 on the other side. This is the second substrate. The first and second substrates 10 and 20 are arranged to face each other with a gap 15 therebetween, and are bonded by a sealing material 17. Liquid crystal 16 is injected into the gap 15 from an injection port provided in the sealing material 17, and the injection port is sealed with a sealing material 18.
A voltage is applied between the first electrode 11 and the second electrode 24, and the liquid crystal 16 is driven to form an image.

In FIG. 2, the first polarizing plate 1 is bonded to the viewer side of the first substrate 10. Further, on the liquid crystal layer 16 side of the first substrate 10, for example, a plurality of striped first electrodes 11 made of indium tin oxide are arranged in parallel to each other, and on the first electrode 11, A first alignment film 12 is provided.
On the other hand, a conductive reflective layer or reflective film 21 provided with a plurality of openings 22 is disposed on the liquid crystal layer 16 side of the transparent second substrate 20. The area of the opening 22 is 25% to 60% with respect to the area of the pixel portion 28, and preferably 40% to 50%. This ratio can vary depending on the preferences of the customer using the product.
In addition, the second polarizing plate 2 and the backlight 40 are provided on the microlens 30 side of the second substrate 20.

The transflective liquid crystal device shown in FIG. 2 is provided with a portion that reflects light (reflective film 21) and a portion that transmits light (opening 22). And more light from the backlight can be used. If the opening is small, the amount of reflected light increases and more reflected light can be used.
In the transflective liquid crystal device shown in FIG. 2, the microlens 30 is provided to enhance the light collecting function of the backlight 40. Therefore, the opening 22 can be made smaller than the case where there is no microlens, whereby the ratio of the reflection region can be made larger than the ratio and more reflected light can be used.

  As the reflective film 21, for example, an aluminum alloy such as aluminum (Al) or an aluminum neodymium alloy is used. On the reflective film 21, for example, a second electrode 24 made of indium tin oxide (hereinafter referred to as “ITO”) is disposed via an insulating film 23. The insulating film 23 is disposed to prevent the conductive reflective film 21 and the second electrode 24 from being short-circuited. A second alignment film 25 is provided on the second electrode 24.

Although FIG. 2 shows the case where the reflective film 21 is provided on the entire surface of the second substrate 20, a reflective film having substantially the same width as the width of the electrode 24 along the second electrode 24 may be used.
Alternatively, as illustrated in FIG. 3, an island-shaped reflective film 21 a may be provided so as to face the pixel portion 28 or cover the pixel portion 28. Note that when the reflective film having such a shape is provided, the insulating film may not be provided. In that case, since the number of manufacturing steps can be reduced, the cost can be reduced. Even when an insulating reflective film is used as the reflective film 21, it is not necessary to provide an insulating film.

  Here, the opening 22 provided in the reflective film 21 will be described. As described above, since the reflective liquid crystal device forms an image using ambient ambient light, it is not necessary to use a backlight. Even when a backlight is used, the backlight brightness can be lowered. Therefore, power consumption is low and the continuous use time of the electronic device can be extended. However, the reflection type liquid crystal device has a problem that the brightness of reflected light is not sufficient in a dark place and is difficult to use. On the other hand, a transmissive liquid crystal device does not include a reflective film or a reflection plate, and displays only using light from a backlight provided below the liquid crystal device, so that it consumes much power and is not suitable for portable electronic devices. . Therefore, a transflective liquid crystal device having characteristics of both a reflective liquid crystal device and a transmissive liquid crystal device has been developed.

  The transflective liquid crystal device uses a dielectric multilayer film or a transflective member made of a metal half mirror such as Al, Ag, or Al alloy as the transflective film, as shown in FIGS. Some of the reflective films made of metal such as Al, Ag, and Al alloys use a transflective film that provides an opening in a part of the reflective film and transmits light from the backlight. In the present application, the present invention will be described using a transflective liquid crystal device using a transflective film in which an opening is provided in a part of the reflective film as an example.

1 and 2, the reflective film 21 is provided with an opening 22 for transmitting light. The opening 22 is provided substantially at the center of the pixel portion 28 for forming an image. The opening 22 is not necessarily provided in the center of the pixel portion 28, but is preferably provided in the center of the pixel portion 28 in order to efficiently manufacture a microlens described later.
The shape of the opening 22 may be a square or a rectangle as shown in FIG. 1 when viewed in plan, but may be a circle or a polygon. A plurality of different shapes may be adopted for one liquid crystal device.
As shown in FIG. 1 in plan view, the opening 22 is preferably provided with one opening 22 for one pixel portion 28, but a plurality of openings may be provided in one pixel portion. .

The method according to the present invention is not limited to a passive liquid crystal device in which stripe electrodes intersect to form the pixel portion 28, but can be applied to a pixel of an active liquid crystal device using elements such as TFT, MiM, and DTF.
At this time, when the pixel portion is a reflective electrode (eg, made of Ag or Al material), an opening is provided in a part of the reflective electrode.

  It is preferable to provide an insulating film or a planarizing film in the opening 22 described above, and to flatten the surface on which the second electrode 24 is disposed. In particular, in the case of an STN (super twisted nematic) liquid crystal device, since the image quality is significantly deteriorated due to the unevenness, a planarizing film or an insulating film is necessary. As will be described later, a color filter may be provided in the opening 22.

Under the second substrate 20, a plurality of microlenses 30 are disposed integrally with the second substrate 20 or directly on the second substrate 20. Even in the case of being integrated, since the glass material is used for the second substrate 20 and the first substrate 10 and the resin material is used for the microlens 30, they are not integrated by the same material. A resin material may be used for the second substrate 20.
The micro lens 30 may be provided in contact with the surface of the second substrate 20 opposite to the liquid crystal layer. For example, although the microlens 30 is formed on the second substrate 20, it is not necessary to be completely in close contact with the second substrate 20.

As shown in FIGS. 1 and 2, one microlens 30 is disposed in each pixel portion 28. In addition, the center of the microlens 30 coincides with the center of the opening 22 of the reflective film 21.
That is, the first substrate 10 and the second substrate 20 include the first electrode 11 and the second electrode 24 that define the position of the pixel portion 28, and the reflection film 21 that is the center of the pixel portion 28 and the light transmission portion. The center of the opening 22 and the condensing center of the microlens 30 (in the case of a lens having a semicircular cross section) substantially coincide with each other.
Thus, since the opening 22 of the reflective film 21 of one pixel portion 28 and the center of one microlens coincide, the light from the backlight 40 arranged behind the microlens 30 is reflected by the microlens 30. Since the light is condensed and transmitted through the opening 22, the amount of transmitted light is increased and the brightness of the image is improved.

Hereinafter, an example of the method for manufacturing the microlens 30 of the liquid crystal device according to the present invention will be described by taking the transflective liquid crystal device shown in FIGS. 1 and 2 as an example.
4 and 5 are main part process diagrams showing Example 1 of a method for manufacturing a liquid crystal device having a microlens according to the present invention.

4 and 5 show the first substrate 10 including the first electrode 11 and the first alignment film 12, the second electrode 24, the second alignment film 25, and the opening 22 serving as a light transmission portion. An “empty cell” is shown in which a second substrate 20 provided with a reflective film 21 serving as a reflective member having a gap is bonded with a sealing material 17 with a gap 15 filled with liquid crystal between the two substrates. 4 and 5 are drawn upside down from those shown in FIG.
In the empty cell, the first substrate 10 and the second substrate 20 are bonded by the sealing material 16 provided with the liquid crystal injection port, but the liquid crystal is not filled.

Next, a method according to the first embodiment of the present invention for forming the microlens 30 in the empty cell will be described.
First, as shown in FIG. 4, a photo-curing resin material is applied to the entire surface of the second substrate 20 opposite to the gap 15 by using a conventionally used application method such as a spinner method. Layer 30a is formed. Next, light (arrow) such as ultraviolet light or visible light that passes through the second substrate 20 is irradiated from the first substrate 10 side. This light is reflected by the first substrate 10, the first electrode 11, the first alignment film 12, the gap 15, the second alignment film 25, the second electrode 24, the insulating film 23 (or planarization film), and the reflection. The light curable resin layer 30 a that becomes the microlens 30 is irradiated through the opening 22 of the film 21 and the second substrate 20. Since the irradiated light is patterned at the opening 22 of the reflective film 21, the photocurable resin layer 30 a is exposed so as to have a microlens shape with the opening 22 at the center.
Next, when the photo-curing resin in the non-exposed part (the part not irradiated with light) is removed by development, a microlens 30 is formed on the second substrate 20 as shown in FIG. Thereafter, liquid crystal is injected into the gap 15 from the injection port provided in the sealing material 17, and the injection port is sealed with the sealing material 18.

  Since the macro lens 30 is formed as described above, an exposure mask pattern is not required as in the prior art. In addition, since the center of the pixel portion 28 defined by the first electrode 11 and the second electrode 24 and the center of the light transmission portion 22 substantially coincide with each other in the vertical direction of the first substrate 10, There is no need for an operation for accurately aligning the mask pattern for the microlens and the opening 22 and a jig or apparatus for alignment. Therefore, the manufacturing yield of the transflective liquid crystal device with microlenses is improved, and the manufacturing cost can be reduced compared to the conventional one.

  In the conventional manufacturing method, after the microlens 30 is formed on the substrate, the step of bonding the first and second substrates with the sealing material 17 is performed. For this reason, the number of steps after the microlens is formed increases, and the risk of scratching the microlens increases. Further, in the manufacturing process of the microlens 30, impurities such as dust may adhere to the second substrate 20, and the image quality may be deteriorated by the dust.

However, according to the manufacturing method shown in Example 1, the microlens is formed in the empty cell in which the first and second substrates are bonded by the sealing material 16 provided with the liquid crystal injection port. There are fewer steps. Therefore, the risk of scratching the microlens is reduced, and the yield is greatly improved during manufacturing.
Further, at the stage of forming the microlens, the first and second substrates are in a bonded state, so that they are resistant to dust and dirt. Therefore, it has the effect that the handling is easy and it is easy to work. In addition, in the manufacturing process of the microlens 30, it is possible to prevent impurities such as dust from adhering to the second substrate 20 and deteriorating the image quality due to the dust.

6 and 7 are main part process diagrams showing Embodiment 2 of the method of manufacturing the liquid crystal device having the microlens according to the present invention.
In the case of the first embodiment, the microlens 30 is formed in the cell in which the liquid crystal is not injected, but in the second embodiment shown in FIGS. 6 and 7, the microlens is formed in the cell after the liquid crystal 16 is injected. 30 is formed.

6 and 7 show the first substrate 10 including the first electrode 11 and the first alignment film 12, the second electrode 24, the second alignment film 25, and the opening 22 serving as a light transmission portion. A cell is shown in which a second substrate 20 including a reflective film 21 serving as a reflective member having a gap is provided with a gap 15 between the two substrates and bonded with a sealing material 17, and the gap 15 is filled with liquid crystal 16. . The liquid crystal 16 is injected from an injection port provided in the sealing material 17, and the injection port is sealed with a sealing material 18 made of a resin material.
6 and 7 are drawn upside down from those shown in FIG.

Next, a method according to the present invention for forming the microlens 30 in the cell filled with the liquid crystal and sealed will be described.
First, as shown in FIG. 6, a photo-curing resin material is applied to the entire surface of the second substrate 20 opposite to the liquid crystal layer 16 by using a conventional application method such as a spinner method, and photo-curing. The resin layer 30a is formed. Next, light (arrow) such as ultraviolet light or visible light that passes through the second substrate 20 is irradiated from the first substrate 10 side. This light is emitted from the first substrate 10, the first electrode 11, the first alignment film 12, the liquid crystal layer 16, the second alignment film 25, the second electrode 24, the insulating film 23 (or planarization film), The light curable resin layer 30 a that becomes the microlens 30 is irradiated through the opening 22 of the reflective film 21 and the second substrate 20. Since the irradiated light is patterned at the opening 22 of the reflective film 21, the photocurable resin 30 a is exposed so as to have a microlens shape with the opening 22 at the center.
Next, when the photo-curing resin in the non-exposed part (the part not irradiated with light) is removed by development, the microlens 30 is formed on the second substrate 20 as shown in FIG.

Since the macro lens 30 is formed as described above, the advantages and effects as described in the first embodiment are obtained.
Further, in Example 2, since the liquid crystal injection process is completed as compared with Example 1, the probability of scratching the microlens is further reduced, and the yield and quality are improved.
Further, in Example 2, the light transmitted through the first substrate 10 is formed on the second substrate 20 through the first electrode 11, the second electrode 24, and the opening 22 of the reflective film 21. In order to expose the cured resin layer 30a, a voltage is applied to the first electrode 11 and the second electrode 24 to drive the liquid crystal 16, thereby controlling the transmitted light amount of the irradiated light and exposing with the optimum light amount. You can Therefore, it is not necessary to use a complicated adjustment mechanism, the light irradiation device can be made inexpensive, and further cost reduction can be obtained.

FIG. 8 is an example of a cross-sectional view of a color liquid crystal device including a microlens. The configuration of the cross-sectional view of the color liquid crystal device shown in FIG. 8 is almost the same as the configuration shown in FIG. 2, but the color filter 26 and the protective film 27 are provided between the reflective film 21 having the opening 22 and the second electrode 24. 2 is different from the configuration of FIG.
In FIG. 8, reference numeral 10 denotes a transparent first substrate having a first electrode 11 and a first alignment film 12. 20 has a microlens 30 on one side and a reflective film 21, a color filter 26, a protective film 27, a second electrode 24, and a second alignment film 25 provided with an opening 22 on the other side. It is a transparent second substrate. The first substrate 10 and the second substrate 20 are disposed to face each other with a gap 15 therebetween, and are bonded by a sealing material 17. Liquid crystal 16 is injected into the gap 15 from an injection port provided in the sealing material 17, and the injection port is sealed with a sealing material 18.

  A voltage is applied between the first electrode 11 and the second electrode 24, and the liquid crystal 16 is driven to form an image.

  A color filter 26 is provided on the reflective film 21, and one of the three primary color filters of red, green, and blue (R, G, B) is provided to correspond to each pixel. For example, a pixel adjacent to a pixel provided with an R filter is provided with a G filter, a pixel adjacent to a pixel provided with a G filter is provided with a B filter, and a pixel provided with a B filter. An R filter is provided in a pixel adjacent to the pixel.

A planarizing film or protective film 27 made of a resin material is provided on the color filter 26 in order to make the upper surface of the filter flat. Note that the insulating film 23 shown in FIG. 2 is not necessary because the color filter 26 and the protective film 27 having an insulating function are provided.
In the example shown in FIG. 8, the reflective film 21 is provided on the entire surface of the second substrate 20, but a reflective film having substantially the same width as the width of the second electrode 24 is provided along the second electrode 24. May be. Alternatively, an island-shaped reflective film that faces or covers the pixel may be used.

In FIG. 8, the first polarizing plate 1 is bonded to the viewer side of the first substrate 10. In addition, on the liquid crystal layer 15 side of the first substrate 10, for example, a plurality of striped first electrodes 11 made of indium tin oxide are arranged in parallel to each other, and on the first electrode 11, A first alignment film 12 is provided.
On the other hand, a conductive reflective layer or reflective film 21 provided with a plurality of openings 22 is disposed on the liquid crystal 16 side of the transparent second substrate 20. In addition, the second polarizing plate 2 and the backlight 40 are provided on the microlens 30 side of the second substrate 20.
In addition, since the structure shown in FIG. 8 and the material such as the reflective film are the same as those shown in FIG.

FIG. 9 and FIG. 10 are main process diagrams showing an example (Example 3) of a method for manufacturing a color liquid crystal device having a microlens according to the present invention.
9 and 10 show the first substrate 10 including the first electrode 11 and the first alignment film 12, the second electrode 24, the second alignment film 25, the protective film 27, the color filter 26, And a second substrate 20 provided with a reflective film 21 serving as a reflective member having an opening 22 serving as a light transmitting portion is bonded with a sealing material with a gap 15 filled with liquid crystal between the two substrates. Cell ". 9 and 10 are drawn upside down from those shown in FIG.
In the empty cell, the first substrate 10 and the second substrate 20 are bonded by the sealing material 17 provided with the liquid crystal injection port, but the liquid crystal is not filled.

Next, a method according to the third embodiment of the present invention for forming the microlens 30 in the empty cell will be described.
First, as shown in FIG. 9, a photo-curing resin material is applied to the entire surface of the second substrate 20 opposite to the gap 15 by using a conventional application method such as a spinner method. Layer 30a is formed. Next, light (arrow) such as ultraviolet light or visible light that passes through the second substrate 20 is irradiated from the first substrate 10 side. This light is emitted from the first substrate 10, the first electrode 11, the first alignment film 12, the gap 15, the second alignment film 25, the second electrode 24, the insulating film 27, the color filter 26, and the reflection film 21. The light curable resin layer 30 a that becomes the microlens 30 is irradiated through the opening 22 and the second substrate 20. Since the irradiated light is patterned at the opening 22 of the reflective film 21, the photocurable resin layer 30 a is exposed so as to have a microlens shape with the opening 22 at the center.
Next, when the photo-curing resin in the non-exposed portion (the portion where no light is irradiated) is removed by development, a microlens 30 is formed on the second substrate 20 as shown in FIG. Thereafter, liquid crystal is injected into the gap 15 from the injection port provided in the sealing material 17, and the injection port is sealed with the sealing material 18.

  Since the macro lens 30 is formed as described above, an exposure mask pattern is not required as in the prior art. In addition, since the center of the pixel portion 28 defined by the first electrode 11 and the second electrode 24 and the center of the light transmission portion 22 substantially coincide with each other in the vertical direction of the first substrate 10, There is no need for an operation for accurately aligning the mask pattern for the microlens and the opening 22 and a jig or apparatus for alignment. Therefore, the manufacturing yield of the transflective liquid crystal device with microlenses is improved, and the manufacturing cost can be reduced compared to the conventional one.

  In the conventional manufacturing method, after the microlens 30 is formed on the substrate, a process of bonding the first and second substrates with a sealing material is performed. For this reason, the number of steps after the microlens is formed increases, and the risk of scratching the microlens increases. Further, in the manufacturing process of the microlens 30, impurities such as dust may adhere to the second substrate 20, and the image quality may be deteriorated by the dust.

However, according to the manufacturing method shown in Example 3, the microlens is formed in the empty cell in which the first and second substrates are bonded by the sealing material 17 provided with the liquid crystal injection port. This reduces the risk of scratching the microlens and greatly improves the yield during manufacturing.
Further, at the stage of forming the microlens, the first and second substrates are in a bonded state, so that they are resistant to dust and dirt. Therefore, it has the effect that the handling is easy and it is easy to work. In addition, in the manufacturing process of the microlens 30, it is possible to prevent impurities such as dust from adhering to the second substrate 20 and deteriorating the image quality due to the dust. Therefore, the probability that an inter-electrode short occurs between the first and second substrates is reduced, and the reliability of the liquid crystal device is improved.

FIGS. 11 and 12 are main part process diagrams showing Embodiment 4 of the method for manufacturing a liquid crystal device having microlenses according to the present invention.
In the case of the third embodiment, the microlens is formed in the cell where the liquid crystal is not injected, but in the fourth embodiment shown in FIGS. 11 and 12, the microlens is formed in the cell after the liquid crystal is injected. doing.

11 and 12 illustrate the first substrate 10 including the first electrode 11 and the first alignment film 12, the second electrode 24, the second alignment film 25, the protective film 27, the color filter 26, The second substrate 20 provided with the reflection film 21 serving as a reflection member having the opening 22 serving as a light transmission portion is bonded with a sealing material 17 with a gap 15 between the two substrates, and the liquid crystal 16 is bonded to the gap 15. Indicates a filled cell. The liquid crystal 16 is injected from an injection port provided in the sealing material 17, and the injection port is sealed with a sealing material 18 made of a resin material.
11 and 12 are drawn upside down from those shown in FIG.

Next, a method according to the present invention for forming the microlens 30 in the cell filled with the liquid crystal and sealed will be described.
First, as shown in FIG. 11, a photo-curing resin material is applied to the entire surface of the second substrate 20 opposite to the liquid crystal layer 16 by using a conventional application method such as a spinner method, and photo-curing. The resin layer 30a is formed. Next, light (arrow) such as ultraviolet light or visible light that passes through the second substrate 20 is irradiated from the first substrate 10 side. This light is emitted from the first substrate 10, the first electrode 11, the first alignment film 12, the liquid crystal layer 15, the second alignment film 25, the second electrode 24, the protective film 27, the color filter 26, and the reflective film. The light curable resin layer 30 a that becomes the microlens 30 is irradiated through the opening 22 of the 21 and the second substrate 20. Since the irradiated light is patterned at the opening 22 of the reflective film 21, the photocurable resin layer 30 a is exposed so as to have a microlens shape with the opening 22 at the center.
Next, when the photo-curing resin in the non-exposed part (the part not irradiated with light) is removed by development, the microlens 30 is formed on the second substrate 20 as shown in FIG.

Since the macro lens 30 is formed as described above, the advantages and effects as described in the third embodiment are obtained.
Further, in Example 4, since the liquid crystal injection process is completed as compared with Example 1, the probability of scratching the microlens is further reduced, and the yield and quality are improved.
Furthermore, in Example 4, the light transmitted through the first substrate 10 is formed on the second substrate 20 through the first electrode 11, the second electrode 24, and the opening 22 of the reflective film 21. In order to expose the cured resin layer 30a, a voltage is applied to the first electrode 11 and the second electrode 24 to drive the liquid crystal 16, thereby controlling the transmitted light amount of the irradiated light and exposing with the optimum light amount. You can Therefore, it is not necessary to use a complicated adjustment mechanism, the light irradiation apparatus can be inexpensive, and further cost reduction can be obtained.

13, 14, and 15 are main process diagrams showing Embodiment 5 of a method for manufacturing a liquid crystal device having a microlens according to the present invention.
FIG. 13 shows a configuration 100 in which a plurality of empty cells 130 are formed on a large substrate. In FIG. 13, the upper portion is a plan perspective view of a large substrate (hereinafter referred to as “mother substrate”) on which a plurality of empty cells 130 are formed, and the lower portion is a cross-sectional view taken along line BB of the upper plan perspective view. FIG.

In FIG. 13, a first mother board 105 a and a second mother board 105 b are bonded with a first sealing material 110 and a second sealing material 120. The first sealing material 110 is provided along the peripheral edge of the mother substrate, and the end portions 111 and 112 of the sealing material are arranged substantially in parallel to form a double seal. And the opening parts 113 and 114 are each provided in the outer side and inner side of the double seal part, and the communication path is formed.
A portion surrounded by the second sealing material 120 forms an individual cell 130. As shown in FIGS. 2 and 8, the first and second mother substrates 105a and 105b are provided with the first electrode, the second electrode, Other components are provided, but are not shown in the figure.
In FIG. 13, the second sealing material 120 is provided with a liquid crystal injection port 121 from which liquid crystal is injected.

In FIG. 13, the reason why the first seal 110 constitutes a double seal at the end, the openings 113 and 114 are provided on the outside and inside of the double seal, respectively, and the communication passage is formed is as follows. explain.
The first mother substrate 105a and the second mother substrate 105b are opposed to each other, a spacer material is provided between the substrates to provide a gap, and the first mother substrate 105a and the second mother substrate 105b are connected to the first mother substrate 105b. Thermocompression bonding is performed with the sealant 110 and the second sealant 120. At this time, if the gap is sealed with the first sealing material 110, the air in the inner central part of the mother boards 105a and 105b is thermally expanded, and the mother board is cracked. Therefore, in order to prevent the expanded air from destroying the mother board, a communication passage having openings 113 and 114 is provided in the fifth embodiment to release the expanded air.
Note that if the sealing material is made of an ultraviolet curable resin, it is not necessary to perform thermocompression bonding, and therefore the first sealing material 110 need not have a communication passage. However, reliability is enhanced by thermocompression bonding with a sealing material such as epoxy.

Further, the double seal portions (111, 112) of the first sealing material 110 are disposed inside the first sealing material 110 when unnecessary cleaning liquid or wet development process is performed in a post-process after the seal bonding. And has a function of preventing the liquid from entering the empty liquid crystal layer of the liquid crystal cell unit 130.
Note that the double seal portion of the first sealing material 110 may have any shape as long as it prevents the ingress of the developer and the cleaning solution, and is not limited to the shape in FIG. For example, in the shape shown in FIG. 13, the first sealing material 110 is arranged in one turn + about ¼ turn, but this is 1 turn + about 2/4 turn, 1 turn + 3/4 turn, 2 turns. It is good.

FIG. 14 shows a strip-shaped substrate 101 in which the mother substrate 100 on which the plurality of empty cells 130 are formed is cut along a horizontal cutting line X (X1, X2, X3, X4).
A plurality of empty cells 130 are formed in the strip-shaped substrate 101 in the horizontal direction. Each cell is provided with a liquid crystal injection port 121 oriented in the same direction, and liquid crystal is injected into each cell 130 from the injection port by a vacuum injection method. After the liquid crystal is injected into the empty cell, the injection port 121 is sealed with a resin material. For example, an ultraviolet curable resin or a thermosetting resin is used as the resin material.

In this way, a strip-shaped cell is obtained in which cells into which liquid crystal is injected into the second sealing material 120 are connected in a strip shape.
Next, the strip-shaped cell is cut along a cutting line Y (Y1, Y2, Y3) in the vertical direction, and a single cell 102 shown in FIG. 15 is obtained.

Next, a process of forming the microlens 30 on the mother substrate on which a plurality of empty cells are formed will be described with reference to FIGS. 16 is the same as the cross-sectional view taken along the line BB of the mother board shown in FIG. However, the cross-sectional view shown in FIG. 16 is upside down from the cross-sectional view shown in FIG.
In FIG. 16, a first mother board 105 a and a second mother board 105 b are bonded with a first sealing material 110 and a second sealing material 120. The first sealing material 110 is provided along the peripheral edge of the mother substrate, and the end portions 111 and 112 of the sealing material are arranged substantially in parallel to form a double seal. And as FIG. 13 shows, the opening parts 113 and 114 are provided in the outer side and the inner side of the double seal part, respectively, and the communication channel | path is formed.

A portion surrounded by the second sealing material 120 forms an individual cell 130. Note that, as shown in FIG. 2, a first electrode, a second electrode, and other components are provided in the portions where the cells 130 of the first mother substrate 105a and the second mother substrate 105b are formed, respectively. Although not shown in the figure. Further, a color filter may be provided as shown in FIG.
In FIG. 16, a photo-curing resin material is applied over the entire surface of the second mother substrate 105b opposite to the liquid crystal layer by using a conventionally used coating method such as a spinner method. Form. As a coating method, a method other than the spinner method, for example, a squeegee method or a printing method can be used.

  Next, light (arrow) such as ultraviolet light and visible light that passes through the second mother substrate 105b is irradiated from the first mother substrate 105a side. This light is the opening 22 of the first mother substrate 105 a, the first electrode 11, the first alignment film 12, the gap 15, the second alignment film 25, the second electrode 24, the insulating film 23, and the reflection film 21. Then, the light passes through the second mother substrate 105 b and is irradiated to the photocurable resin layer 30 a that becomes the microlens 30.

Since the irradiated light is patterned at the opening 22 of the reflective film 21, the photocurable resin layer 30 a is exposed to the shape of a microlens centered on the opening 22.
Next, when the photo-curing resin in the non-exposed part (the part not irradiated with light) is removed by development, a microlens is formed as shown in FIG.
In this way, the microlens 30 is formed on the second mother substrate 105b.

18 is an enlarged perspective plan view of the portion indicated by Z in FIG. 13 after the microlens 30 is formed. In FIG. 18, reference numeral 11 denotes a first electrode, and 24 denotes a second electrode. A liquid crystal layer is sandwiched between the first and second electrodes, and a pixel is formed in a portion where the first and second electrodes 11 and 24 overlap. A portion 28 is formed. In FIG. 18, a reflective film 21 is provided on the entire lower surface of the second electrode 24, and an opening 22 serving as a light transmission part is provided in a portion corresponding to the pixel portion 28 of the reflective film 21. Although the opening 22 is rectangular in the drawing, it may be a stripe, a polygon, or a circle.
Reference numeral 30 denotes a microlens provided on the lower side of the reflective film 21, and is disposed to face the opening 22.
110 is a first sealing material, and 120 is a second sealing material. A portion surrounded by the second sealing material 120 forms an individual cell 130.

  In FIGS. 13 and 18, when the reflective layer is not disposed on the entire surface, a light shielding material is provided in a portion that does not constitute the cell 130 including the portions of the cutting lines X and Y so that the exposure light does not pass through. By doing so, the microlens 30 is not formed in this portion. For this reason, when cutting a mother substrate and a strip-shaped mother substrate on which microlenses have already been formed, since there is no microlens at the cutting position, the conventional cutting method can be used as it is, and new conditions for cutting Setting is unnecessary, and cost can be reduced.

  As shown in FIG. 17, after the macro lens 30 is formed on the mother substrate, the mother substrate is cut into cell units as shown in FIG. As shown in FIG. 2, the second polarizing plate 2 and the backlight 40 are provided on the surface of the microlens 30, and the first polarizing plate 1 is provided on the first substrate 10.

In recent years, with regard to the backlight, technology has advanced and tubular fluorescent tubes, flat fluorescent tubes, light emitting diodes (LEDs), and electroluminescence (EL) are used as light sources. Tubular fluorescent tubes and LEDs have a backlight configuration called a sidelight, and a light guide plate is mainly used.
The microlens and the polarizing plate may be directly bonded, or may be disposed in a separated state by providing a gap or gap filling member.
Further, a polarizing plate may be disposed on the surface opposite to the substrate of the microlens by using a lens flattening material made of a material that does not lose the function of the lens so that the tip of the microlens is a flat surface.

FIG. 19 is a main part process diagram showing Embodiment 6 of a method for manufacturing a liquid crystal device having microlenses according to the present invention. The sixth embodiment is a modification of the first embodiment.
FIG. 19 includes a first substrate 10 including a first electrode 11 and a first alignment film 12, a second electrode 24, a second alignment film 25, and an opening 22 serving as a light transmission portion. An “empty cell” is shown in which a second substrate 20 having a reflective film 21 serving as a reflective member is bonded with a sealing material 17 (see FIG. 2) with a gap 15 filled with liquid crystal between the two substrates. Yes. In addition, FIG. 19 is drawn upside down from what was shown in FIG.
In the empty cell, the first substrate 10 and the second substrate 20 are bonded by the sealing material 16 provided with the liquid crystal injection port, but the liquid crystal is not filled.

  In the case of the empty cell shown in FIG. 19, each of the pixel portions 28 (see FIG. 1) defined by the first electrode 11 of the first substrate 10 and the second electrode 24 of the second substrate 20 is used. Are provided with a plurality of light transmission portions 22. In FIG. 19, p1, p2, p3, and-indicate one pixel portion, and each pixel portion 28 is provided with a plurality of openings 22.

Therefore, as shown in FIG. 4, when light such as ultraviolet rays or visible rays that pass through the second substrate 20 is irradiated from the first substrate 10 side, the light is emitted from the first substrate 10 and the first substrate 10. Electrode 11, first alignment film 12, gap 15, second alignment film 25, second electrode 24, insulating film 23 (or planarization film), opening 22 of reflection film 21, second substrate 20. The microlens 30 is formed at a location corresponding to the opening 22.
As shown in FIG. 19, since a plurality of openings 22 are provided in each pixel part p1, p2, p3, ---, a plurality of microlenses 30 are formed for each pixel part. . Subsequent steps are the same as those in the first embodiment.

FIG. 20 is a main part process diagram showing Embodiment 7 of a method for manufacturing a liquid crystal device having a microlens according to the present invention. The seventh embodiment is a modification of the second embodiment.
In the case of the sixth embodiment, the microlens is formed in the cell into which the liquid crystal is not injected, but in the seventh embodiment shown in FIG. 20, the microlens 30 is formed in the cell after the liquid crystal 16 is injected. ing.

FIG. 20 includes a first substrate 10 provided with a first electrode 11 and a first alignment film 12, a second electrode 24, a second alignment film 25, and an opening 22 serving as a light transmission portion. A cell is shown in which a second substrate 20 provided with a reflective film 21 serving as a reflective member is bonded with a sealing material 17 with a gap 15 between the two substrates, and the gap 15 is filled with liquid crystal 16. The liquid crystal 16 is injected from an injection port provided in the sealing material 17, and the injection port is sealed with a sealing material 18 made of a resin material.
20 is drawn upside down from that shown in FIG.

  In the case of the cell into which the liquid crystal 16 shown in FIG. 20 is injected, the pixel portion 28 defined by the first electrode 11 of the first substrate 10 and the second electrode 24 of the second substrate 20 (see FIG. 1). ) Are provided with a plurality of light transmission portions 22. In FIG. 20, p1, p2, p3, and-indicate one pixel portion, and each pixel portion 28 is provided with a plurality of openings 22.

Therefore, as shown in FIG. 20, when light such as ultraviolet rays or visible rays that pass through the second substrate 20 is irradiated from the first substrate 10 side, the light is emitted from the first substrate 10 and the first substrate 10. Electrode 11, first alignment film 12, liquid crystal layer 16, second alignment film 25, second electrode 24, insulating film 23 (or planarization film), opening 22 of reflection film 21, second substrate A microlens 30 is formed at a location that passes through 20 and corresponds to the opening 22.
As shown in FIG. 20, since a plurality of openings 22 are provided in each pixel portion p1, p2, p3, ---, a plurality of microlenses 30 are formed for each pixel portion. . Subsequent steps are the same as those in Example 2.

It is the figure which showed an example of the structure of a transflective liquid crystal device. It is sectional drawing along the AA line of FIG. It is the figure which showed an example of the structure of a transflective liquid crystal device. It is principal part process drawing which shows Example 1 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 1 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 2 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 2 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is the figure which showed an example of sectional drawing of the color liquid crystal device provided with the micro lens. It is principal part process drawing which shows Example 3 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 3 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 4 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 4 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 5 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 5 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 5 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is the figure which showed the process of forming a micro lens in the mother board | substrate with which the several empty cell was formed. It is the figure which showed the process of forming a micro lens in the mother board | substrate with which the several empty cell was formed. FIG. 14 is an enlarged perspective plan view of a portion indicated by Z in FIG. 13 after a microlens is formed. It is principal part process drawing which shows Example 6 of the manufacturing method of the liquid crystal device which has a microlens by this invention. It is principal part process drawing which shows Example 7 of the manufacturing method of the liquid crystal device which has a microlens by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st polarizing plate 2 2nd polarizing plate 10 1st board | substrate 11 1st electrode 12 1st alignment film 15 Gap | interval 16 Liquid crystal 17 Sealing material 18 Sealing material 20 2nd board | substrate 21 Reflecting film 20 2nd Substrate 21 Reflective film 22 Reflective film opening 23 Insulating film 24 Second electrode 25 Second alignment film 26 Color filter 27 Protective film 28 Pixel part 40 Backlight 100 Configuration in which a plurality of empty cells are formed on a large substrate 101 Strip-shaped substrate on which a plurality of empty cells are formed 102 Single empty cell 105a First mother substrate 105b Second mother substrate 110 First sealing material 120 Second sealing material 121 Liquid crystal inlet 130 Cell portion X, Y Cutting line

Claims (14)

A method of manufacturing a device using an electro-optic conversion member,
(A) The electro-optic conversion member is filled with a first substrate having at least a first electrode, a second substrate having at least a second electrode, and a light reflecting member having a light transmission portion. A step of forming a cell by providing a gap and adhering with a sealing material;
(B) forming a photocurable resin layer on a surface of the second substrate of the cell opposite to the gap;
(C) From the first substrate side, the light passes through the gap, the light transmission portion, and the second substrate to irradiate the photocurable resin layer with light, and travels from the second substrate to the gap. Forming a microlens for condensing light on the light transmitting portion;
Having a method. A method of manufacturing a device using an electro-optic conversion member,
(A) The electro-optic conversion member is filled with a first substrate having at least a first electrode, a second substrate having at least a second electrode, and a light reflecting member having a light transmission portion. A step of forming a cell by providing a gap and adhering with a sealing material;
(B) forming a photocurable resin layer on a surface of the second substrate of the cell opposite to the gap;
(C) filling and sealing the gap with the electro-optic conversion member;
(D) From the side of the first substrate, the light curable resin layer is irradiated with light through the gap filled with the electro-optic conversion member, the light transmission unit, and the second substrate, Forming a microlens for condensing light from the substrate of 2 toward the gap filled with the electro-optic conversion member on the light transmission part;
Having a method.   The method according to claim 1, wherein a color filter is provided between the first substrate and the second substrate.   The center of the pixel portion defined by the first electrode of the first substrate and the second electrode of the second substrate substantially coincides with the center of the light transmission portion in the vertical direction of the first substrate. The method according to claim 1 or 2.   A plurality of the light transmission portions are provided for each of the pixel portions defined by the first electrode of the first substrate and the second electrode of the second substrate, and a plurality of microlenses are provided for each pixel portion. The method according to claim 1 or 2, wherein is formed. After the step of forming the microlens,
(E) providing a first polarizing plate on a surface of the first substrate opposite to the gap; and
(F) providing a second polarizing plate and a backlight on the microlens side;
The method according to claim 1, comprising:   The method according to claim 2, wherein the electro-optic conversion member to be filled is liquid crystal.   In the step (d) of irradiating the photocurable resin layer with light to form a microlens, a voltage is applied to the first electrode and the second electrode to drive the filled liquid crystal. The method according to claim 7, wherein the amount of transmitted light transmitted is controlled. A method of manufacturing a device using an electro-optic conversion member,
(A) a first mother substrate including a portion for forming a plurality of cells, the first mother substrate having at least a first electrode in each of the portions for forming the cells;
A second mother substrate including a portion for forming a plurality of cells, the second mother substrate having a light reflecting member having at least a second electrode and a light transmitting portion in each of the portions for forming the cells. The
The electro-optic conversion member is filled with a first seal material provided along the peripheral edges of the first and second mother substrates and a second seal material provided so as to surround the portions forming the cells. Forming a plurality of cells by adhering with a gap between them,
(B) forming a photo-curing resin layer on the surface of the second mother substrate opposite to the gap;
(C) From the first mother substrate side, the light, the light transmission part, and the second mother substrate are transmitted to irradiate the photocurable resin layer with light, and from the second mother substrate, Forming a microlens for condensing the light toward the gap on the light transmission part;
Having a method.   10. The method according to claim 9, wherein a light shielding material is provided on a portion of the first and second mother substrates other than a portion where the cell is formed so that a microlens is not formed.   The center of the pixel portion defined by the first electrode of the first mother substrate and the second electrode of the second mother substrate and the center of the light transmitting portion are in the vertical direction of the first mother substrate. The method of claim 9, wherein the methods are substantially consistent.   The first sealing material forms a double seal at a part of the periphery of the mother board, and the double seal serves as a communication path between the gap formed by the first and second mother boards and the outside. The method of claim 9, which forms. After the step of forming the microlens,
(D) First and second mother substrates having a plurality of cells on which the microlenses are formed are cut into strips, and the electro-optic conversion member is filled from an injection port provided in the second sealing material. And sealing,
The method of claim 9, comprising: After filling and sealing the electro-optic conversion member,
(E) cutting and dividing a plurality of cells filled and sealed with the electro-optic conversion member into single cells;
14. The method of claim 13, comprising:

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