JP2004253061A - Magnetic disk device and magnetic head slider - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simultaneously reduce a slider contact vibration with a smooth medium surface, a floating amount fluctuation with respect to medium surface undulation, and a pressure change around a slider. <P>SOLUTION: The ratio δs/δr of the step depth δs of a magnetic head slider to a recess depth is set within the range of 0.24≤δs/δr≤0.34 in a 2.5 inch disk device, and within the range of 0.20≤δs/δr≤0.32 in a 1.0 inch disk device. The tilting angle θ2 of the air flow-in end of a flow-out pad 12 is set to θ2≤54° in the 2.5 inch disk device, and to θ2≤58.2° in the 1.0 inch disk device. Thus, the magnetic head slider excellent to be made into high-density recording, made high in reliability and low in cost and the magnetic disk device are obtained. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a magnetic disk drive and a magnetic head slider, and more particularly, to a magnetic head slider excellent in high recording density and high reliability, a support of the magnetic head slider, and a magnetic disk drive having the configuration.
[0002]
[Prior art]
Every year, the flying height of a magnetic head slider required for higher recording density of a magnetic disk device tends to decrease. A factor that hinders the low flying height is that the slider flying end flying height h2 (see FIG. 6) fluctuates due to variations in slider processing and assembly, changes in air pressure around the slider, adhesion of gas and contaminants, and the like.
[0003]
When the flying height h2min reduced by these factors becomes smaller than the maximum height of the minute projection on the medium surface (disk surface) or the minute projection of the surface roughness, the lowest point of the slider comes into contact with the minute projection tip. I do.
[0004]
The flying height of the slider is measured optically, and h2min means the flying height from an ideal plane having no surface roughness. Therefore, the maximum height of the tip of the minute projection from the ideal plane is the contact starting flying height hto. . Therefore, how to increase the flying margin h2min-hto, which is the difference between h2min and hto, is an issue in lowering the flying height.
[0005]
As an approach to increase the flying margin, (1) hto can be reduced by reducing the maximum height of the tip of the minute projection on the medium surface. However, when the slider comes into contact with a smooth medium whose surface roughness is reduced and hto is reduced, the friction coefficient increases due to an increase in the true contact area, which leads to large vibration and head crash.
[0006]
Also, (2) flying height fluctuation due to medium surface waviness of a wavelength sufficiently larger than the slider length such as runout, and (3) medium surface waviness of a minute wavelength as small as the slider length are geometrically controlled. It is conceivable to reduce the flying height fluctuation that cannot follow the fluctuation, and (4) the flying height fluctuation due to the atmospheric pressure change around the slider.
[0007]
Regarding the above (1), (2) and (3), by increasing the attitude angle (pitch angle) of the slider, the contact area at the time of contact and the frictional force at the time of traveling can be greatly reduced, and the surface roughness is reduced. Slider contact vibration with the medium surface can be reduced.
[0008]
Also, by increasing the pitch angle, the flying surface area is reduced, the pressure fluctuation generated between the flying surface of the slider and the medium surface waviness of a long wavelength such as runout is reduced, and the flying height fluctuation with respect to the runout is also reduced. .
[0009]
In addition, by increasing the pitch angle, it is possible to geometrically follow a minute waviness that is about the same as the slider length. However, when the pitch angle of the slider is increased, there is a drawback that the flying height variation with respect to the atmospheric pressure change around the slider increases.
[0010]
Regarding (4), the conventional negative pressure utilizing type three-pad step slider has two floating pads formed on the inflow side, floating pads formed on the outflow side, and two sides formed along both sides. Consist of rails.
[0011]
By generating a negative pressure in a region surrounded by the flying pads and the side rails, a variation in flying height with respect to a change in air pressure around the slider can be reduced. However, the conventional negative pressure utilizing 3-pad step slider has a disadvantage that when it comes into contact with a smooth medium surface having a reduced surface roughness, the contact vibration is increased due to a large contact area.
[0012]
In order to efficiently increase the recording capacity per disk, it is necessary to keep the linear recording density from the innermost circumference to the outermost circumference of the disk constant. To achieve this, a magneto-resistive head is used, which has a high sensitivity and the reproduction output is related only to the strength of the magnetic field from the medium, and the flying characteristics of the magnetic head slider vary from the innermost circumference to the outermost circumference of the disk. Flattening of the flying profile, which is the trajectory of the flying height, is required.
[0013]
The negative pressure utilizing type three-pad step slider described in Patent Document 1 has a depth of a first step surface with respect to a floating surface of a pad provided with two step surfaces, and a depth of a second step surface. Is the step depth δs and the recess depth δr, respectively, the ratio of the step depth δs to the recess depth δr δs / δr satisfies the relational expression of 0.11 ≦ δs / δr ≦ 0.36, and The distance xp between the position of the air flow inflow end of the slider and the position of the load application point is set in a range that satisfies the relational expression 0.01 ≦ xp / L ≦ 0.4.
[0014]
This makes it possible to simultaneously achieve the difference in the flying height h2 of the slider outflow end between the innermost circumference and the outermost circumference of the disk and a reduction in the flying height h2 at an altitude of 3000 m within 0.8 nm. However, in this method, since the load application point is provided on the air inflow side from the center of mass, the pitch angle becomes small, and it is not possible to reduce the flying height fluctuation with respect to the medium surface undulation such as runout which is sufficiently large compared to the slider length. .
[0015]
[Patent Document 1]
JP 2002-203305 A
[0016]
[Problems to be solved by the invention]
In the above-mentioned conventional magnetic head slider, the slider contact vibration with the smooth medium surface with reduced surface roughness is reduced, and the flying height fluctuation with respect to the medium surface waviness having a wavelength sufficiently larger than the slider length such as runout is reduced. At the same time, when the load application point is at the position of the center of mass, the reduction in the flying height with respect to the change in the atmospheric pressure around the slider cannot be satisfied at the same time.
[0017]
An object of the present invention is to reduce slider contact vibration with a smooth medium surface with a reduced contact start flying height at the slider outflow end, and to reduce flying height fluctuation with respect to a medium surface waviness of a wavelength sufficiently larger than the slider length such as runout. That is, the reduction and the variation in the flying height with respect to the change in the air pressure around the slider at the position where the load acting point is at the center of mass are simultaneously satisfied.
[0018]
[Means for Solving the Problems]
In order to solve the above problems, a magnetic disk drive according to the present invention includes an inflow pad that can be an air bearing surface formed on an air flow inflow side, and an outflow pad that can be an air bearing surface formed on an air flow outflow side. A pair of side rails formed along both sides in the air flow inflow direction, wherein the inflow pad and the outflow pad are provided in the air flow inflow direction with a pad surface contacting the disk surface when the disk is stopped. In a magnetic disk drive including a magnetic head slider having a step surface that is a step surface of a step and a two-step surface that is a recess surface that is a step surface of a second step, the outflow pad of the magnetic head slider includes: The pad surface is formed in a substantially right-angled triangular shape, and the inclination angle θ2 of the airflow end of the pad surface with respect to the slider side surface is θ2 ≦ 58.2 degrees. It is assumed that.
[0019]
According to the above configuration of the present invention, when the inflow end inclination angle θ2 of the outflow pad becomes small, the difference between the element flying height hgap at the innermost circumference and the outermost circumference of the disk becomes small, and the flying height of the slider can be reduced. In particular, it is preferable that θ2 ≦ 54 degrees for a 2.5-inch disk device and θ2 ≦ 58.2 degrees for a 1.0-inch disk device. (See FIGS. 30 to 32).
[0020]
Further, assuming that the step depth is δs and the recess depth is δr, the outflow pad of the magnetic head slider has a range of 0.24 ≦ δs / δr ≦ 0.34, 1.0 In the inch disk device, the range of 0.20 ≦ δs / δr ≦ 0.32 is preferable. (See FIGS. 25 and 26). By setting δs / δr in this way, the pitch angle of the slider becomes almost maximum, and the decrease in hmin with respect to the change in atmospheric pressure is reduced, and the flying height of the slider can be reduced.
[0021]
BEST MODE FOR CARRYING OUT THE INVENTION
The outline of the embodiment of the present invention is that the ratio between the first step depth δs and the second recess depth δr of the slider flying surface shape is predetermined to reduce the flying height of the magnetic head slider of the magnetic disk drive. In this case, the pad surface of the outflow pad is formed in a substantially triangular shape, and the inclination angle θ2 on the air flow inflow end side is specified to be equal to or less than a predetermined angle.
[0022]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a three-dimensional perspective view of a magnetic head slider and its support used in the magnetic disk drive of the present invention. 2A and 2B are a perspective view and a side view, respectively, of an embodiment of a magnetic head slider used in the magnetic disk drive of the present invention.
[0023]
The slider 1 has two (one pair) pads 11 (hereinafter, also referred to as inflow pads) formed on the air inflow side and can be one air bearing surface formed on the air outflow side. 12 (hereinafter also referred to as an outflow pad), a pair of side rails 13 formed along both sides, and the like.
[0024]
At the outflow end of the outflow pad 13, a recording / reproducing element 1b composed of an exposed portion of the MR element of the reproducing MR head and a gap portion of the recording electromagnetic induction type magnetic head is provided. , A magnetic head 1c and a connection terminal 1d.
[0025]
The slider 1 is a negative pressure utilizing type slider in which a negative pressure Q2 is generated in a concave portion 14 surrounded by two inflow pads 11 and a pair of side rails 13 in which a positive pressure Q1 is generated aerodynamically.
[0026]
The mechanism of the generation of the negative pressure Q2 is that when the disk rotates and air flows between the slider and the disk, the volume of the concave portion 14 increases rapidly. The positive pressure Q1 acts in a direction to increase the flying height, and the negative pressure Q2 acts in a direction to decrease the flying height.
[0027]
FIGS. 3 and 4 show the inflow pad 11, the side rail 13, and the outflow pad 12, respectively, of the magnetic head slider of the present embodiment. These are a pad surface 112 (hereinafter also referred to as a contact surface) that comes in contact with the medium surface (disk surface) when the disk is stopped, and a first step surface 114 (step surface) provided through the step 113 in the air inflow direction. ) And a second step surface of a second step surface 116 (recess surface) provided via the step portion 115.
[0028]
Such a two-step surface structure can be manufactured by etching using a conventional lithography technique. δs and δr indicate the depth (step depth) of the first step surface 114 with respect to the pad surface 112 and the depth (recess depth) of the second step surface 116 with respect to the pad surface 112, respectively.
[0029]
The inclination angle θ2 of the inflow end of the outflow pad 12 is within 54 and 58.2 deg, respectively, in the case of a magnetic disk drive having 2.5 and 1.0 inch disks. The outer peripheral side length Xout of the outflow pad 12 is 60 μm or less, which can be manufactured by etching. Xin is the length of the outflow pad on the inner peripheral side of the disk. Therefore, the shape of the contact surface 112 of the outflow pad 12 is, for example, a right triangle.
[0030]
FIG. 5 is a plan view of a support for supporting the magnetic head slider of the present invention. The support 2 includes a load beam portion 21, a gimbal portion 22, and a load projection (hereinafter, also referred to as a dimple) 23.
[0031]
FIGS. 6A and 6B are side views of the magnetic head slider of the present embodiment during flying traveling. The dimple 23 is provided as a load application point for applying a load F pressed from the load beam portion 21 to the slider. With the fulcrum as a fulcrum, the slider is provided so that a restoring force acts on three degrees of freedom of movement in a translation (up / down) direction, a pitch (front / back) direction, and a roll (seek) direction.
[0032]
The position (Xp, Yp) of the dimple 23 as the load application point is expressed as a dimensionless value of Xp = xp / L in the pitch direction and Yp = yp / w in the roll direction. Here, xp is the distance from the inflow end of the slider, yp is the distance from the end of the slider side surface, L is the length of the slider in the longitudinal direction, and w is the length of the slider in the lateral direction.
[0033]
The dimple positions xp / L and yp / w are both 0.5. As described above, the reason why the load application point is provided at the center of mass is that when the load application point is provided on the air inflow side from the center of mass, the pitch angle of the slider is reduced, and the effect of the magnetic head slider of this embodiment is reduced.
[0034]
Further, when the load application point is provided on the air outflow side from the center of mass, the flying height variation with respect to the atmospheric pressure change around the slider increases, and the effect of the magnetic head slider of the present embodiment decreases.
[0035]
However, in the manufacturing process of bonding the magnetic head slider of the present embodiment and the gimbal portion 22 and positioning the dimple position at the center of mass of the slider, an assembling error of about 60 μm occurs. Therefore, the dimple position xp / L is 0. .45 ≦ xp / L ≦ 0.55.
[0036]
At the position of the dimple 23, the slider 1 balances the pressing load F and the aerodynamically generated flying force Q by the relational expression of F = Q, Q = Q1−Q2 (Q2> 0), The pitch angle θp, the roll angle θr representing the flying attitude in the roll direction, the flying height h2 at the outflow end, the flying height h1 at the inflow end, and the gap between the exposed portion of the MR element of the reproducing MR head and the electromagnetic induction type magnetic head for recording. The element position floating amount hgap and the like in the recording / reproducing element 1b constituted by the portion are dynamically stably levitated while being kept constant. Here, hmin is the minimum flying height of the slider.
[0037]
FIG. 7 shows the shape of the floating surface of each of the first to third embodiments of the magnetic head slider according to the present invention. The size is a pico size with a slider length L of 1.25 mm. The pressing load F is 29.4 mN, and the dimple positions xp / L and yp / w are both 0.5.
[0038]
The ratios δs / δr between the step depth δs and the recess depth δr are 0.24, 0.24, and 0.28 in Examples 1, 2, and 3, respectively. The inflow end inclination angle θ2 of the outflow pad is 52.1, 54.0, and 70.9 deg in Examples 1, 2, and 3, respectively. The outer peripheral side length Xout of the outflow pad is 36, 65.95 μm in Examples 1, 2, and 3, respectively.
[0039]
FIG. 8 shows the flying surface shape of the magnetic head slider of Comparative Example 1 for comparison with the embodiment of the magnetic head slider according to the present invention. The size is a pico size with a slider length L of 1.25 mm. The pressing load F is 29.4 mN, and the dimple positions xp / L and yp / L are both 0.5. δs / δr, θ2, and Xout are 0.18, 69.4 deg, and 133 μm, respectively.
[0040]
FIG. 9 shows the flying surface shapes of Examples 4 to 6 of the magnetic head slider according to the present invention. The size is a pico size with a slider length L of 1.25 mm. The pressing load F is 9.8 mN, and the dimple positions xp / L and yp / w are both 0.5. The ratios δs / δr between the step depth δs and the recess depth δr are 0.25, 0.222, and 0.2 in Examples 4, 5, and 6, respectively. θ2 is 48.8, 51.2, and 58.2 deg in Examples 4, 5, and 6, respectively. Xout is 57, 57.55 μm in Examples 4, 5, and 6, respectively.
[0041]
FIG. 10 shows the flying surface shape of the magnetic head slider of Comparative Example 2. The size is a pico size with a slider length L of 1.25 mm. The pressing load F is 9.8 mN, and the dimple positions xp / L and yp / w are both 0.5. δs / δr, θ2, and Xout are 0.15, 66.2 deg, and 97 μm, respectively.
[0042]
FIG. 11 shows a 2.5-inch apparatus (apparatus using a 2.5-inch disk, hereinafter the same) using the slider of Example 1 and the slider of Comparative Example 1 at altitude of 0 m and altitude of 3000 m. 3) shows the result of calculating the pitch angle θp under the innermost, middle, and outermost conditions.
[0043]
From FIG. 11, the pitch angle θp of the slider 1 of the first embodiment is about 15 nm in each of the innermost circumference, the middle circumference, and the outermost circumference condition of the radial position at altitudes of 0 m and 3000 m, as compared with the slider of the comparative example 1. It turned out that it increased about 30 nm and about 50 nm.
[0044]
In FIG. 12, the pitch angles θp are calculated using the sliders of Examples 4 to 6 and the slider of Comparative Example 2 under the conditions of the innermost circumference, the middle circumference, and the outermost circumference of the apparatus having an altitude of 0 m, the number of rotations, and the radial position of 1.0 inch. The results obtained are shown.
[0045]
12 that the pitch angles θp of the sliders of Examples 4 to 6 are about 2 to 10 nm, about 10 to 15 nm, and about 15 to 20 nm, respectively, as compared with the comparative example 2 slider. It turned out to be bigger.
[0046]
FIG. 13 shows the calculation of the element position flying height hgap using the slider of Example 1 and the slider of Comparative Example 1 under the conditions of the innermost circumference, the middle circumference, and the outermost circumference of an apparatus having an altitude of 0 m, the number of rotations, and the radial position of 2.5 inches. The results obtained are shown. The hgap of the slider of Example 1 and the slider of Comparative Example 1 under the innermost circumference conditions were both set to 12 nm. From the drawing, it was found that the flying height hgap difference of the flying profile of the slider 1 of Example 1 was within approximately 2 nm, as in the slider of Comparative Example 1.
[0047]
FIG. 14 shows the element position flying height hgap using the sliders of Examples 4 to 6 and Comparative Example 2 at the altitude of 0 m, the number of revolutions, and the radial position of the 1.0-inch device under the innermost, middle, and outermost conditions. 2 shows the result of calculating. The hgap of the sliders of Examples 4 to 6 and Comparative Example 2 under the innermost circumference conditions were all set to 13 nm. From the drawing, it was found that the flying height difference of the flying profiles hgap of the sliders 4 to 6 of the Examples 4 to 6 was almost within 1 nm similarly to the slider of the comparative example 2.
[0048]
FIG. 15 shows that the air pressure around the slider increases from 0 m to the altitude under the conditions of the innermost circumference, the middle circumference, and the outermost circumference of the 2.5-inch device using the slider of Example 1 and the slider of Comparative Example 1 at a rotation speed and a radial position of 2.5 inches. The result of calculating the amount of decrease in the minimum flying height hmin when changing to 3000 m is shown. As shown in the figure, the amount of decrease in hmin with respect to the change in the atmospheric pressure of the slider of Example 1 was smaller than that of the slider of Comparative Example 1 under the innermost and middle conditions.
[0049]
FIG. 16 shows the air pressure around the slider using the slider of Example 4, the slider of Example 5, and the slider of Comparative Example 2 under the conditions of the innermost circumference, the middle circumference, and the outermost circumference of the device having a rotation speed and a radial position of 1.0 inch. Shows the result of calculating the amount of decrease in the minimum flying height hmin when the altitude changes from an altitude of 0 m to an altitude of 3000 m. As can be seen from the drawing, the decrease amount of hmin with respect to the change in the air pressure of the sliders of Example 4 and Example 5 was smaller than that of the slider of Comparative Example 2.
[0050]
FIG. 17 shows that the slider of Example 1 and the slider of Comparative Example 1 have the same altitude as the slider length under the conditions of the innermost circumference, the middle circumference, and the outermost circumference of the 2.5-inch apparatus at the altitude of 0 m, the rotation speed, and the radial position. The result of calculating the fluctuation amount of the minimum flying height hmin that cannot follow geometrically with respect to minute undulations is shown. As shown in the figure, the fluctuation amount of hmin with respect to the minute waviness of the slider of Example 1 was smaller than that of the slider of Comparative Example 1.
[0051]
FIG. 18 shows that the slider of Example 6 and the slider of Comparative Example 2 have the same altitude as the slider length under the conditions of the innermost circumference, the middle circumference, and the outermost circumference of the 1.0-inch device at an altitude of 0 m, the number of revolutions, and the radius. The result of calculating the fluctuation amount of the minimum flying height hmin that cannot follow geometrically with respect to minute undulations is shown. As shown in the figure, the variation of hmin with respect to the minute waviness of the slider of Example 6 was smaller than that of the slider of Comparative Example 2.
[0052]
From the above calculation results, the effect of the slider of the present embodiment is that the flying height fluctuation with respect to the high pitch angle and the atmospheric pressure change around the slider can be reduced, and the flying height fluctuation with respect to the minute waviness equivalent to the slider length can be reduced. I found that there was. Hereinafter, the mechanism of the slider of the present embodiment at a high pitch angle and the setting range of the ratio δs / δr between the step depth δs and the recess depth δr will be described.
[0053]
FIGS. 19 to 21 show innermost and outermost conditions of a device having an altitude of 0 m, a rotation speed and a radial position of 2.5 inches using the flying surface shapes of the comparative example 1 slider and the examples 1 and 2 sliders. 7 shows the results of calculation of the relationship between the ratio δs / δr of the step depth δs and the recess depth δr in, and the minimum flying height hmin, the inflow end flying height h1, and the pitch angle θp.
[0054]
From these figures, as δs / δr increases, hmin, h1, and θp increase in all the sliders under the outermost circumference condition. In the case of the innermost circumference condition, hmin, all sliders have the maximum value.
[0055]
In the case of the innermost circumference condition, h1, θp, the slider of Comparative Example 1 does not have the maximum value, but the sliders of Examples 1 and 2 have the maximum value, in the range of 0.24 ≦ δs / δr ≦ 0.34. It is almost constant within. For example, in the case of the slider according to the first embodiment, each of hmin, h1, and θp becomes maximum when δs / δr = 0.28, 0.28, and 0.30.
[0056]
In FIGS. 22 to 24, using the flying surface shapes of the slider of Comparative Example 2 and the sliders of Examples 4 to 6, the altitude is 0 m, the number of revolutions and the radial position are 1.0 inches, and the apparatus is under the innermost and outermost conditions. The result of calculating the relationship between the ratio δs / δr of the step depth δs and the recess depth δr, the minimum flying height hmin, the inflow end flying height h1, and the pitch angle θp is shown.
[0057]
From these figures, as δs / δr increases, hmin, h1 and θp increase and approach a substantially constant value in the case of the outermost circumference condition for all sliders. In the case of the innermost circumference condition, hmin, the slider according to the fourth embodiment does not have the maximum value, but the other sliders have the maximum value.
[0058]
In the case of the innermost circumference condition, h1 and θp, all the sliders have the maximum value and are substantially constant within the range of 0.20 ≦ δs / δr ≦ 0.32. For example, in the case of the slider according to the fifth embodiment, hmin, h1, and θp are maximized when δs / δr = 0.22, 0.20, and 0.20.
[0059]
The reason why the flying height becomes substantially constant is considered that when δs / δr becomes a certain value or more, the floating force generated on the step floating surface of the inflow pad and the outflow pad is saturated. The reason why the levitation force s / δr differs depending on the innermost and outermost conditions is considered to be because δs / δr at which the levitation force is saturated varies depending on the peripheral speed under the innermost and outermost conditions.
[0060]
The reason why δs / δr increases and θp increases is that the floating height h1 of the inflow end of the inflow pad is larger than hmin, which is the floating height of the outflow end of the outflow pad. This is because the area of the step floating surface of the inflow pad is larger than that of the outflow pad. Therefore, as δs / δr increases, the levitation force generated on the step floating surface of the inflow pad also increases. The reason for the high pitch angle of the slider of the present embodiment is that δs / δr at which the pitch angle θp is near the maximum under the innermost circumference condition is set.
[0061]
FIG. 25 shows the step depth under the conditions of the innermost circumference and the outermost circumference of the 2.5-inch apparatus at an altitude of 0 m, the number of rotations and the radial position using the flying surface shapes of the slider of Comparative Example 1 and the sliders of Examples 1 to 3. The calculation result of the relationship between the ratio δs / δr of δs and the recess depth δr and the decrease amount of the minimum flying height hmin when the air pressure around the slider changes from the altitude 0 m to the altitude 3000 m is shown.
[0062]
From the results shown in FIG. 25, as the setting range of δs / δr of the slider of the 2.5-inch device, the pitch angle is almost maximum, and the hmin reduction amount with respect to the atmospheric pressure change is small, 0.24 ≦ δs / δr ≦ 0.34 is desirable.
[0063]
FIG. 26 shows the step depth under the conditions of the innermost circumference and the outermost circumference of the device having an altitude of 0 m, a rotation speed and a radial position of 1.0 inch, using the flying surface shapes of the slider of Comparative Example 2 and the sliders of Examples 4 to 6. The calculation result of the relationship between the ratio δs / δr of δs and the recess depth δr and the decrease in the minimum flying height hmin when the air pressure around the slider changes from an altitude of 0 m to an altitude of 3000 m is shown.
[0064]
From the results shown in FIG. 26, as the setting range of δs / δr of the slider of the 1.0-inch device, the pitch angle is almost maximum, and the hmin reduction amount with respect to the atmospheric pressure change is small, 0.20 ≦ δs / δr ≦ 0.32 is desirable.
[0065]
The reason why the hmin reduction amount with respect to the change in the air pressure of the sliders of the first to sixth embodiments becomes small and the flying height becomes almost constant is that δs / δr at which the levitation force is saturated under the innermost peripheral condition is set. It is considered that the change in the flying height is reduced even if the value changes.
[0066]
In FIG. 27, using the flying surface shapes of the comparative example 1 slider and the example 1 slider, the step depth δs at the altitude of 0 m, the number of rotations and the radial position of the 2.5-inch device under the innermost and outermost conditions is shown. The result of calculating the relationship between the ratio δs / δr to the recess depth δr and the variation of the minimum flying height hmin which cannot follow geometrically small undulations as large as the slider length is shown.
[0067]
From FIG. 27, it can be seen that within the range of 0.24 ≦ δs / δr ≦ 0.34, the variation of hmin with respect to the slight undulation of the slider of Example 1 is smaller than that of the slider of Comparative Example 1 under the innermost and outermost conditions. .
[0068]
FIG. 28 shows the step depth under the conditions of the innermost circumference and the outermost circumference of a 2.5-inch apparatus with an altitude of 0 m, a rotation speed and a radial position of 2.5 inches using the flying surface shapes of the slider of Comparative Example 1 and the sliders of Examples 1 and 2. The calculation result of the relationship between the ratio δs / δr of δs and the recess depth δr and the difference in the element position flying height hgap under the innermost and outermost conditions is shown.
[0069]
From FIG. 28, in the range of 0.24 ≦ δs / δr ≦ 0.34 in which the pitch angle becomes almost maximum, the innermost and outermost circumferences when the δs / δr of both the comparative example 1 slider, the example 1, and the 2 slider increase. The absolute value of the hgap difference between the innermost and outermost circumferences of the first and second sliders is smaller than that of the comparative example 1 slider.
[0070]
In particular, when δs / δr = 0.28, at which the pitch angle of the slider of the first embodiment is almost maximum, the absolute value of the hgap difference between the innermost and outermost circumferences is as small as 0.2 nm. It is as large as 3 nm.
[0071]
FIG. 29 shows the step depth under the conditions of the innermost circumference and the outermost circumference of the device having an altitude of 0 m, a rotation speed and a radial position of 1.0 inch using the flying surface shapes of the slider of Comparative Example 2 and the sliders of Examples 4 to 6. The calculation result of the relationship between the ratio δs / δr of δs and the recess depth δr and the difference in the element position flying height hgap under the innermost and outermost conditions is shown.
[0072]
From FIG. 29, in the range of 0.20 ≦ δs / δr ≦ 0.32 where the pitch angle is almost maximum, in both the slider of Comparative Example 2 and the sliders of Examples 4 to 6, when δs / δr increases, Although the absolute value of the hgap difference also increases, the absolute value of the hgap difference at the innermost and outermost circumferences of the sliders of Examples 4 to 6 is smaller than that of the slider of the comparative example 2.
[0073]
In particular, when δs / δr = 0.25, 0.222, and 0.20, at which the pitch angles of the sliders of Examples 4 to 6 are almost maximum, the hgap differences between the innermost and outermost circumferences are 0.3 and 0.0, respectively. , 0.2 nm, and is 4.0 nm or more for the slider of Comparative Example 2.
[0074]
FIG. 30 shows the outflow pads under the conditions of the innermost circumference and the outermost circumference of the 2.5-inch device at an altitude of 0 m, the number of rotations and the radial position using the flying surface shapes of the slider of Comparative Example 1 and the sliders of Examples 1 to 3. The result of calculating the relationship between the inflow end inclination angle θ2 and the element position flying height hgap difference under the innermost and outermost conditions under the condition that δs / δr is constant is shown.
[0075]
As shown in FIG. 30, as the inflow end inclination angle θ2 of the outflow pad decreases, the hgap difference between the innermost and outermost circumferences decreases. In order to make the hgap difference substantially zero within the range of 0.24 ≦ δs / δr ≦ 0.34, the inflow end inclination angle θ2 of the outflow pad needs to be within 54 deg.
[0076]
FIGS. 31 and 32 show the inflow end of the outflow pad under the conditions of the innermost circumference and the outermost circumference of an apparatus having an altitude of 0 m, a rotation speed and a radial position of 1.0 inch using the sliders of Examples 4 to 6 and Comparative Example 2. The results of calculating the relationship between the inclination angle θ2, the element position flying height hgap under the outermost circumference condition, and the element position flying height hgap difference under the innermost circumference condition are calculated under the condition that δs / δr is constant.
[0077]
As can be seen from these figures, when the inclination angle θ2 of the inflow end of the outflow pad decreases, the hgap of the outermost circumference decreases and the hgap difference of the innermost and outer circumferences decreases. In order to make the hgap difference substantially zero within the range of 0.20 ≦ δs / δr ≦ 0.32, the inflow end inclination angle θ2 of the outflow pad needs to be within 58.2 deg.
[0078]
From the above calculation results, it was found that the slider of the present embodiment has an effect that the hgap at the outermost periphery is reduced, and the absolute value of the hgap difference at the innermost and outermost perimeters of about 5 nm can be reduced to almost zero.
[0079]
The mechanism of the above-described effects of the magnetic head sliders according to the first to sixth embodiments of the present invention will be described with reference to FIGS. As shown in the figure, when the head is positioned by the rotary actuator method, the difference in the flying height of the flying profile is caused by the change in the peripheral velocity V of the disk at the element position due to the difference in the radial position of the innermost and outer circumferences, and the air inflow angle ( The peripheral speed Vy of the component perpendicular to the slider inflow end face or the peripheral velocity V2 of the component perpendicular to the outflow pad inflow end face changes due to the change in the Yaw angle θy) and the change in the inflow end inclination angle θ2 of the slider outflow pad. is there.
[0080]
FIG. 34 shows the inflow end inclination angle θ2 and the direction perpendicular to the outflow pad inflow end surface of the outflow pad of the magnetic head slider according to the present invention under the outermost circumference conditions of the 2.5-inch device and the 1.0-inch device at the rotation speed and the radial position. The calculation result of the relationship between the component and the peripheral speed V2 is shown.
[0081]
According to FIG. 34, by reducing the inflow end inclination angle θ2 of the outflow pad of the head slider to within 59 deg, the peripheral speed V2 of the component in the direction perpendicular to the outflow pad inflow end face can be reduced, and the outermost hgap and the innermost hgap are reduced. The difference can be reduced.
[0082]
In FIG. 35, using the sliders of Examples 4 to 6, the altitude was 0 m, the number of revolutions and the radial position were 1.0 inches. On the other hand, the calculation result of the relationship between the fluctuation amount of the minimum flying height hmin that cannot be followed geometrically and the inner peripheral side surface length Xin of the outflow pad is shown.
[0083]
As shown in FIG. 35, when the inner peripheral side surface length Xin of the outflow pad is reduced, the fluctuation amount of hmin with respect to minute waviness decreases. It is considered that the reason for this is that if the length of the outflow pad is reduced, it becomes easier to follow geometrically small undulations as long as the slider length.
[0084]
In order to reduce the inflow end inclination angle θ2 of the outflow pad, the length of the inner peripheral side surface Xin of the outflow pad cannot be shortened, so that the length of the outflow pad is shortened, and the outer peripheral side surface length Xout of the outflow pad is reduced. Need to be shorter. Therefore, the outer peripheral side length Xout of the outflow pad is set to 60 μm or less, which can be manufactured by etching.
[0085]
FIG. 36 shows that, using the sliders of Examples 1 to 6, the hgap difference between the innermost circumference and the outermost circumference under the conditions of the innermost circumference and the outermost circumference of the apparatus at an altitude of 0 m, the number of rotations and the radial position of 2.5 and 1.0 inches is almost equal. The result of calculating the relationship between the peripheral speed Vy of the component in the direction perpendicular to the slider inflow end surface at θy to be zero and the range of δs / δr at which the pitch angle becomes almost maximum is shown.
[0086]
FIG. 36 shows that as Vy increases, δs / δr at which the pitch angle becomes maximum also increases. Further, for example, if Vy is calculated under the innermost and outermost conditions of the 1.8-inch device, δs / δr at which the pitch angle of the slider of the 1.8-inch device becomes maximum can be obtained.
[0087]
FIG. 37 shows an example of a magnetic disk drive provided with the magnetic head slider according to the present invention. FIG. 37 (a) is a plan view showing a state where the slider 1 is running and seeking while flying above the recording medium surface 3, and FIG. 37 (b) is a side view thereof.
[0088]
In this embodiment, a magnetic recording medium (disk) 3, a drive unit 21 for rotating the magnetic recording medium (disk), a magnetic head slider 1 and its support 2 according to the present invention, a support arm 22 for positioning the slider 1 and a drive unit 23 thereof And a circuit 24 for processing a recording / reproducing signal of a magnetic head mounted on the slider 1.
[0089]
In such a magnetic disk drive, the ratio between the first step depth δs and the second recess depth δr of the flying surface shape of the magnetic head slider is defined in the above-mentioned predetermined range, and the pad surface of the outflow pad is adjusted. Since the slider is formed in a substantially triangular shape and the inclination angle θ2 on the air flow inflow end side is defined to be equal to or less than the predetermined angle, a low flying height of the slider can be realized.
[0090]
【The invention's effect】
As described above, according to the present invention, the contact start flying height of the air outflow end of the magnetic head slider is reduced, the slider contact vibration with the smooth medium surface is reduced, and the wavelength of the wavelength sufficiently larger than the slider length such as run-out is obtained. Since it is possible to simultaneously reduce the variation in the flying height of the slider due to the waviness of the medium surface and the variation in the flying height due to the change in the pressure around the slider at the position where the load is applied at the center of mass, it is possible to achieve high recording density and high density. A magnetic disk device having excellent reliability can be obtained.
[Brief description of the drawings]
FIG. 1 is a three-dimensional perspective view showing one embodiment of a magnetic head slider and a support thereof according to the present invention.
FIGS. 2A and 2B are a three-dimensional perspective view and a side view, respectively, showing an embodiment of a magnetic head slider according to the present invention.
FIG. 3 is a three-dimensional perspective view showing an inflow pad and a side rail of the magnetic head slider of FIG. 2;
FIG. 4 is a three-dimensional perspective view showing an outflow pad of the magnetic head slider of FIG. 2;
FIG. 5 is a partially enlarged plan view of the magnetic head slider support of FIG. 1;
FIG. 6 is a side view showing the magnetic head slider according to the present invention during flying traveling.
FIG. 7 is a view showing a flying surface shape of magnetic head sliders according to embodiments 1 to 3 of the present invention.
FIG. 8 is a view showing a flying surface shape of a magnetic head slider according to a comparative example 1 of the present invention.
FIG. 9 is a view showing the shape of the floating surface of magnetic head sliders according to Examples 4 to 6 of the present invention.
FIG. 10 is a view showing a flying surface shape of a magnetic head slider according to a comparative example 2 of the present invention.
FIG. 11 is a diagram illustrating a result of calculating a pitch angle of the magnetic head slider according to the first embodiment of the present invention under a 2.5-inch device condition.
FIG. 12 is a diagram showing a calculation result of a pitch angle of the magnetic head sliders of Examples 4 to 6 in the present invention under the condition of a 1.0-inch device.
FIG. 13 is a diagram showing a calculation result of a flying height of an element position on the innermost circumference, the middle circumference, and the outer circumference of a disk under a 2.5-inch apparatus condition of the magnetic head slider according to the first embodiment of the present invention.
FIG. 14 is a diagram showing the results of calculating the element position flying heights of the innermost circumference, the middle circumference, and the outermost circumference of the magnetic head slider according to Examples 4 to 6 of the magnetic head slider according to the present invention under a 1.0-inch apparatus condition.
FIG. 15 is a graph showing the result of calculating the dependence of the minimum flying height on the air pressure of the magnetic head slider according to the first embodiment of the present invention under a 2.5-inch device condition.
FIG. 16 is a graph showing the results of calculating the dependence of the minimum flying height on the air pressure under the 1.0-inch device conditions of Examples 4 and 5 of the magnetic head slider according to the present invention.
FIG. 17 is a diagram showing a calculation result of a fluctuation amount of a minimum flying height due to minute waviness under a 2.5-inch apparatus condition of the magnetic head slider according to the first embodiment of the present invention.
FIG. 18 is a diagram showing a result of calculating a fluctuation amount of a minimum flying height due to a minute waviness under a 1.0-inch device condition of the magnetic head slider according to the sixth embodiment of the present invention.
FIG. 19 shows the relationship between the step depth and the recess depth at the innermost circumference (FIG. 13A) and the outermost circumference (FIG. 14B) under the 2.5-inch device condition of the magnetic head sliders according to the first and second embodiments of the present invention. It is a figure showing the result of having calculated the relation between the ratio and the minimum flying height.
FIG. 20 shows the relationship between the step depth and the recess depth at the innermost periphery (FIG. 13A) and the outermost periphery (FIG. 14B) under the conditions of 2.5 inches of the magnetic head sliders according to the first and second embodiments of the present invention. It is a figure showing the result of having computed the relation between the ratio and the inflow end floating amount.
FIG. 21 shows the relationship between the step depth and the recess depth at the innermost circumference (FIG. 13A) and the outermost circumference (FIG. 13B) of the magnetic head slider according to the first and second embodiments of the present invention under a 2.5-inch device condition. It is a figure showing the result of having calculated the relation between a ratio and a pitch angle.
FIG. 22 shows the relationship between the step depth and the recess depth at the innermost circumference (FIG. 13A) and the outermost circumference (FIG. 14B) under the conditions of 1.0 inch device of the magnetic head sliders of Examples 4 to 6 of the present invention. It is a figure showing the result of having calculated the relation between the ratio and the minimum flying height.
FIG. 23 shows the relationship between the step depth and the recess depth at the innermost circumference (FIG. 13A) and the outermost circumference (FIG. 13B) of the magnetic head sliders of Examples 4 to 6 under the condition of 1.0 inch device. It is a figure showing the result of having computed the relation between the ratio and the inflow end floating amount.
FIG. 24 shows the relationship between the step depth and the recess depth at the innermost circumference (FIG. 13A) and the outermost circumference (FIG. 14B) under the condition of 1.0 inch apparatus of the magnetic head sliders of Examples 4 to 6 of the present invention. It is a figure showing the result of having calculated the relation between a ratio and a pitch angle.
FIG. 25 shows the relationship between the ratio between the step depth and the recess depth at the innermost circumference of the magnetic head sliders of Examples 1 and 2 of the present invention under the condition of 2.5 inches and the pressure dependency of the minimum flying height. It is a figure showing a result.
FIG. 26 shows the relationship between the ratio between the step depth and the recess depth at the innermost circumference of the magnetic head sliders of Examples 4 to 6 under the condition of 1.0 inch device and the dependence of the minimum flying height on the atmospheric pressure. It is a figure showing a result.
FIG. 27 is a diagram showing a calculation result of a relationship between a ratio between a step depth and a recess depth and a fluctuation amount of a minimum flying height due to a slight undulation in the magnetic head slider according to the first embodiment of the present invention under a 2.5-inch apparatus condition. It is.
FIG. 28 is a graph showing a calculation result of a relationship between a ratio between a step depth and a recess depth and a flying height difference between the innermost and outermost circumferences of the magnetic head slider according to the first and second embodiments of the present invention under a 2.5-inch apparatus condition. FIG.
FIG. 29 is a graph showing a calculation result of a relationship between a ratio between a step depth and a recess depth and a flying height difference between innermost and outermost circumferences under a 1.0-inch apparatus condition in Examples 4 to 6 of the magnetic head slider according to the present invention. FIG.
FIG. 30 is a diagram showing a calculation result of a relationship between an inclination angle of an inflow end of an outflow pad and a flying height difference of an element position on the innermost and outermost circumferences in the 2.5-inch devices of Examples 1 to 3 of the magnetic head slider according to the present invention. is there.
FIG. 31 is a diagram illustrating a calculation result of a relationship between an outflow pad inflow end inclination angle and a flying height of an element position on the outermost periphery in a 1.0-inch device of Examples 4 to 6 of the magnetic head slider according to the present invention.
FIG. 32 is a diagram showing a calculation result of a relationship between an inclination angle of an inflow end of an outflow pad and a flying height difference of an element position on the innermost and outermost circumferences in a 1.0-inch device of Examples 4 to 6 of the magnetic head slider according to the present invention. is there.
FIG. 33 is a diagram illustrating a mechanism of an effect of the embodiment of the magnetic head slider according to the present invention.
FIG. 34 shows the relationship between the inner peripheral side surface length of the outflow pad and the peripheral speed of a component perpendicular to the outflow pad inflow end face in the 2.5- and 1.0-inch devices of the embodiment of the magnetic head slider according to the present invention. It is a figure showing a result.
FIG. 35 shows the variation of the minimum flying height and the inner peripheral side surface length of the outflow pad due to minute waviness under the conditions of the innermost circumference, middle circumference, and outermost circumference of the disk of the 1.0-inch device of the embodiment of the magnetic head slider according to the present invention. FIG. 9 is a diagram showing a result of calculating a relationship between the two.
FIG. 36 shows that the peripheral speed Vy and the pitch angle of the component perpendicular to the slider inflow end face under the innermost and outermost conditions of the 2.5- and 1.0-inch devices of the embodiment of the magnetic head slider according to the present invention are almost the maximum. It is a figure showing the result of having computed relation with the range of (delta) r.
FIG. 37 is a plan view (a) and a side view (b) schematically showing an embodiment of a magnetic disk drive according to the present invention.
[Explanation of symbols]
1 Magnetic head slider
11 Inflow pad
12 Outflow pad
13 Side rail
14 Negative pressure pocket
112, 121, 122 Pad surface that comes into contact with the media surface when the disk is stopped
113, 115 Step
114, 1141 Step surface via step portion 113
116 Step surface via step portion 115
S Area of contact surface 112 of outflow pad 12
1b Gap part of magnetic head and exposed part of MR element
1c Magnetic head
1d connection terminal
δs step depth
δr Recess depth
θ2 Inflow end inclination angle of outflow pad
Xin Outflow side inner surface side length
Xout Outer side surface length of outflow pad
(Xp, yp) Dimple position
L Length of slider 1 in the longitudinal direction
w Length of slider 1 in short direction
F Pressing load
Q levitation force
θp Pitch angle
θr Roll angle
θy Yaw angle
h1 Inflow end floating amount
h2 Outflow end floating amount
hgap Element position flying height
hmin Minimum flying height
r radius
f Number of rotations
V peripheral speed
Vy Peripheral speed of component perpendicular to slider inflow end face
V2 Peripheral velocity of component perpendicular to outflow pad inflow end face
3 Magnetic recording media
21 Driving unit for rotating magnetic recording medium 3
22 Support arm
23 Support arm drive
24 Recording / playback signal processing circuit

Claims (10)

An inflow pad formed on the airflow inflow side that can be an air bearing surface, an outflow pad formed on the airflow outflow side that can be an air bearing surface, and a pair of side rails formed along both sides in the airflow inflow direction Wherein the inflow pad and the outflow pad are a pad surface that comes into contact with the disk surface when the disk is stopped, and a step surface and a second step surface that are the first step surface provided in the air flow inflow direction. A magnetic disk drive comprising a magnetic head slider having a two-step surface consisting of a recess surface
The outflow pad of the magnetic head slider has a pad surface formed in a substantially right-angled triangular shape, and the inclination angle θ2 of the pad surface with respect to the slider side surface at the air inflow end is expressed by:
A magnetic disk drive, wherein θ2 ≦ 58.2 degrees. An inflow pad formed on the airflow inflow side that can be an air bearing surface, an outflow pad formed on the airflow outflow side that can be an air bearing surface, and a pair of side rails formed along both sides in the airflow inflow direction Wherein the inflow pad and the outflow pad are a pad surface that comes into contact with the disk surface when the disk is stopped, and a step surface and a second step surface that are the first step surface provided in the air flow inflow direction. A magnetic head slider having a two-step surface consisting of a recessed surface, and a slider support having a dimple position for supporting the magnetic head slider and applying a load. In the magnetic disk device used,
Assuming that the step depth from the pad surface to the step surface is δs and the recess depth from the pad surface to the recess surface is δr, δs / δr of the outflow pad of the magnetic head slider is as follows:
0.24 ≦ δs / δr ≦ 0.34
In the range that satisfies the relationship
When the distance xp between the air flow inflow end position of the magnetic head slider and the dimple position is L, the total length in the longitudinal direction of the slider is L,
0.45 ≦ xp / L ≦ 0.55
A magnetic disk drive characterized by being in a range satisfying the following relational expression: An inflow pad formed on the airflow inflow side that can be an air bearing surface, an outflow pad formed on the airflow outflow side that can be an air bearing surface, and a pair of side rails formed along both sides in the airflow inflow direction Wherein the inflow pad and the outflow pad are a pad surface that comes into contact with the disk surface when the disk is stopped, and a step surface and a second step surface that are the first step surface provided in the air flow inflow direction. A magnetic head slider having a two-step surface consisting of a recessed surface, and a slider support having a dimple position for supporting the magnetic head slider and applying a load. In the magnetic disk device used,
Assuming that the step depth from the pad surface to the step surface is δs and the recess depth from the pad surface to the recess surface is δr, δs / δr of the outflow pad of the magnetic head slider is as follows:
0.20 ≦ δs / δr ≦ 0.32
In the range that satisfies the relationship
When the distance xp between the air flow inflow end position of the magnetic head slider and the dimple position is L, the total length in the longitudinal direction of the slider is L,
0.45 ≦ xp / L ≦ 0.55
A magnetic disk drive characterized by being in a range satisfying the following relational expression: An inflow pad formed on the airflow inflow side that can be an air bearing surface, an outflow pad formed on the airflow outflow side that can be an air bearing surface, and a pair of side rails formed along both sides in the airflow inflow direction Wherein the inflow pad and the outflow pad are a pad surface that comes into contact with the disk surface when the disk is stopped, and a step surface and a second step surface that are the first step surface provided in the air flow inflow direction. A magnetic disk drive comprising: a magnetic head slider having a two-step surface consisting of a recess surface, and a slider support member provided with a dimple position for supporting the magnetic head slider and applying a load.
The peripheral velocity Vy of the disk in the component perpendicular to the airflow inflow end face of the magnetic head slider is:
2.853 m / s ≦ Vy ≦ 4.831 m / s
Where Vy = Vcos (θy)
V is the peripheral speed θy at the element position determined by the rotation speed and the radial position, and the peripheral speed θy is in a range satisfying a relational expression of the Yaw angle indicating the air inflow angle.
Assuming that the step depth from the pad surface to the step surface is δs and the recess depth from the pad surface to the recess surface is δr, δs / δr of the outflow pad of the magnetic head slider is as follows:
0.20 ≦ δs / δr ≦ 0.32
In the range that satisfies the relationship
When the peripheral speed Vy is
6.140 m / s ≦ Vy ≦ 12.719 m / s
Where Vy = Vcos (θy)
V is the peripheral speed θy at the element position determined by the rotation speed and the radial position, and the peripheral speed θy is in a range satisfying a relational expression of the Yaw angle indicating the air inflow angle.
Where δs / δr is
0.24 ≦ δs / δr ≦ 0.34
In the range that satisfies the relationship
In any case, if the distance xp between the air flow inflow end position of the magnetic head slider and the dimple position is L, the total length of the slider in the longitudinal direction is L,
0.45 ≦ xp / L ≦ 0.55
A magnetic disk drive characterized by being in a range satisfying the following relational expression: The magnetic disk drive according to any one of claims 1, 2, and 4,
The outflow pad of the magnetic head slider has a pad surface formed in a substantially right-angled triangular shape, and the inclination angle θ2 of the pad surface with respect to the slider side surface at the air inflow end is expressed by:
θ2 ≦ 54 degrees and the length Xout of the pad surface on the outer peripheral side of the disk is:
Xout ≦ 60 μm
A magnetic disk drive for a 2.5-inch disk, wherein the magnetic disk drive is within the following range. The magnetic disk drive according to any one of claims 1, 3, and 4,
The outflow pad of the magnetic head slider has a pad surface formed in a substantially right-angled triangular shape, and the inclination angle θ2 of the pad surface with respect to the slider side surface at the air inflow end is expressed by:
θ2 ≦ 58.2 degrees and the length Xout of the pad surface on the outer peripheral side of the disk is:
Xout ≦ 60 μm
1. A magnetic disk drive for a 1.0-inch disk, wherein 7. The magnetic disk drive according to claim 1, wherein the disk has a smooth magnetic recording medium having a center line average surface roughness Ra of 1 nm or less and a center line maximum height Rp of 5 nm or less. A magnetic disk drive characterized in that it is used. An inflow pad formed on the airflow inflow side that can be an air bearing surface, an outflow pad formed on the airflow outflow side that can be an air bearing surface, and a pair of side rails formed along both sides in the airflow inflow direction Wherein the inflow pad and the outflow pad are a pad surface that comes into contact with the disk surface when the disk is stopped, and a step surface and a second step surface that are the first step surface provided in the air flow inflow direction. A magnetic head slider having a two-step surface consisting of a recess surface
The outflow pad has a pad surface formed in a substantially right-angled triangular shape, and an inclination angle θ2 of the air inflow end of the pad surface with respect to the slider side surface is expressed as follows:
A magnetic head slider, wherein θ2 ≦ 58.2 degrees. The magnetic head slider according to claim 8, wherein
Assuming that the step depth of the outflow pad is δs and the recess depth is δr, δs / δr is 0.24 ≦ δs / δr ≦ 0.34.
The inclination angle θ2 is θ2 ≦ 54 degrees,
The outer peripheral side length Xout of the pad surface of the outflow pad is Xout ≦ 60 μm,
A magnetic head slider for a 2.5-inch disk, wherein the magnetic head slider is in the following range. The magnetic head slider according to claim 8, wherein
Assuming that the step depth of the outflow pad is δs and the recess depth is δr, δs / δr is 0.20 ≦ δs / δr ≦ 0.32,
When the inclination angle θ2 is θ2 ≦ 58.2 degrees, the length Xout of the pad surface of the outflow pad on the disk outer peripheral side is Xout ≦ 60 μm,
A magnetic head slider for a 1.0-inch disk, characterized by being within the following range.

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