JP2004125434A - Appearance examining method and device for electronic circuit component and method of manufacturing electronic circuit component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the accuracy in processing by using the color image processing, in the examination of the appearance of an electronic circuit component. <P>SOLUTION: The examined face color information composed of three coordinate components of a three-dimensional color space coordinate system in each position of an examined face, is created by an image processing device 11 on the basis of a detection output signal indicating the color image information of the electronic circuit component, picked up by a color light receiving part 2, the first image procession data composed of at least one coordinate component of at least one of the first examined face data indicating the examined face color information and the second examined face data of which the coordinate is converted into the three-dimensional color space coordinate system different from the first examination face data, a dimension of each coordinate component of the first image procession data is corrected by using the nondefective unit reference color data on the basis of the predetermined nondefective reference color information, a result of the processing is stored in a memory 14 as the corrected image procession data, and the image processing is performed by using the corrected image procession data and the nondefective reference color data to select a defective area of the examined face. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method and an apparatus for inspecting the appearance of electronic circuit components and a method of manufacturing an electronic circuit component, and more particularly, to a method and apparatus for inspecting the appearance of electronic circuit components suitable for improving the accuracy of appearance inspection. The present invention relates to an appearance inspection apparatus to be used and a method for manufacturing an electronic circuit component having a step of performing an appearance inspection by the appearance inspection method.
[0002]
[Prior art]
In recent years, not only dramatic progress in computers such as personal computers (PCs) and workstations (WS), but also image input / output devices such as cameras and scanners, and image recording devices such as CDs and MOs have progressed. Accordingly, processing techniques such as processing speed and processing accuracy in image processing have been remarkably developed.
Under such circumstances, the visual inspection of electronic circuit components such as package substrates and semiconductor components, which has conventionally relied on visual inspection, is about to undergo a technical shift to automation using image processing. Note that the electronic circuit component in this specification is a concept of a well-known package substrate such as a ceramic package substrate or a plastic package substrate, a well-known electronic component including a semiconductor component such as an LSI or an IC chip, a chip capacitor, an antenna switch module, and the like. contains.
[0003]
As an image processing method used for the appearance inspection, various methods have been studied, including a method of monochrome binarization processing by monochrome processing and a method of color image processing.
Further, in the appearance inspection using the color image processing, the discriminating ability of the subtle color difference in the appearance can be enhanced as compared with the case where the black and white binarization processing is used. For this reason, it is recognized that a method using color image processing is a particularly useful method in the appearance inspection of electronic circuit components in which subtle color differences due to constituent materials are likely to occur on the surface.
[0004]
[Patent Document 1] Japanese Utility Model Publication No. Hei 7-2964
[Patent Document 2] Japanese Patent Application Laid-Open No. 9-106459
[0005]
[Problems to be solved by the invention]
Therefore, when the appearance inspection of the electronic circuit component is performed by using the color image processing, the following problems are particularly apparent regarding the processing accuracy as compared with the case of using the black and white binarization processing. A color image is represented by coordinate values of three independent coordinate components of a three-dimensional color space coordinate system. For this reason, the ability to discriminate subtle color differences in appearance is enhanced as compared with the black and white shading represented by black and white binarization. Since the color difference between the non-defective area and the defective area in appearance becomes conspicuous by the improvement of the color difference discriminating ability, the extraction accuracy of the defective area can be improved. However, due to the improvement of the discriminating ability, the chromaticity varies between the inspection images sequentially obtained for each product in order to perform the color image processing, that is, inevitably occurs in the manufacturing process for each product. Variations in chromaticity also appear more remarkably than in the case of black and white binarization. Therefore, when image processing is sequentially performed for each product using an inspection image and a preset reference image, the occurrence of a defect that a non-defective region is excessively extracted as a defective region, and the occurrence of a defect such as oversight of a defective region, Since it is necessary to sequentially handle a large number of products, such as electronic circuit components, as an appearance inspection, the situation is inevitable to some extent. If the variation in chromaticity that occurs for each product is not related to the quality of the product, it is required that the appearance inspection method be devised to at least suppress the decrease in inspection accuracy due to the variation in chromaticity. become.
[0006]
As described above, the appearance inspection using the color image processing has higher processing accuracy than the case using the black and white binarization processing, but corresponds to the recent high density and high integration of electronic circuit components. In order to further improve the accuracy of the appearance inspection, it is important to suppress a decrease in the appearance inspection accuracy due to the chromaticity variation occurring for each product. That is, the present invention provides an appearance inspection method for an electronic circuit component and an appearance inspection apparatus used for the same, when the appearance of the electronic circuit component is inspected using color image processing, and the processing accuracy can be improved. It is an object of the present invention to provide a method for manufacturing an electronic circuit component having a step of performing a visual inspection by the visual inspection method.
[0007]
[Means for Solving the Problems and Functions / Effects]
An electronic circuit component appearance inspection method for solving the above-mentioned problem is as follows.
Inspection light from the inspection surface of the electronic circuit component is received by the color light receiving unit, and based on the detection output of the color light receiving unit, three color components of the three-dimensional color space coordinate system at each position on the inspection surface are used. An inspection surface color information generating step of generating inspection surface color information
First inspection surface data representing three coordinate components of the inspection surface color information, and a second inspection surface obtained by performing coordinate conversion of the first inspection surface data to a three-dimensional color space coordinate system different from its own three-dimensional color space coordinate system. An image processing data creating step of creating image processing data consisting of at least one coordinate component in at least one of the data;
The image processing data, and a defective area selecting step of selecting a defective area by image processing using non-defective standard color data corresponding to the image processing data among preset non-defective standard color information,
The image processing data used for the image processing in the defective area selecting step is the coordinate component of the image processing data corresponding to the coordinate component according to the size of data representing the coordinate component of the non-defective reference color data. Is the corrected image processing data which is the data subjected to the correction processing.
[0008]
The electronic circuit component appearance inspection method of the present invention is performed by performing image processing on a color image of the appearance of the inspection surface of the electronic circuit component to be inspected. First, a color image of the appearance of the inspection surface is obtained by receiving inspection light from the inspection surface by the color light receiving unit, and the color light receiving unit outputs a detection output corresponding to an input signal of the color image. Then, based on the detection output, inspection surface color information including three coordinate components of a three-dimensional color space coordinate system at each position in the inspection surface is generated (inspection surface color information generation step). The inspection surface color information includes coordinates of three independent coordinate components forming a three-dimensional color space coordinate system at each position in the inspection surface, that is, at the position of each pixel that partitions the color image of the appearance of the inspection surface. It is composed of values. As described above, the inspection surface color information includes the position information of each position on the inspection surface and the color image information at that position.
[0009]
After the inspection surface color information is generated, first inspection surface data representing three coordinate components of the inspection surface color information and three-dimensional color space coordinates different from its own three-dimensional color space coordinate system. Image processing data including at least one coordinate component in at least one of the second inspection plane data that has been coordinate-converted into a system is generated (image processing data generation step). The first inspection surface data has the same three-dimensional color space coordinate system as the inspection surface color information, while the second inspection surface data has the three-dimensional color space coordinate system different from the first inspection surface data. . When inspecting the appearance of an electronic circuit component, the coordinate components of a three-dimensional color space coordinate system that is useful depending on the inspection object changes. Therefore, the image processing data is composed of at least one coordinate component of at least one of the first inspection plane data and the second inspection plane data in a form appropriately corresponding to the useful coordinate component. The image processing data is used as image data forming an inspection image when performing image processing. Then, a defective area is selected by color image processing using the image processing data and non-defective standard color data corresponding to the image processing data among the predetermined non-defective standard color information (defective area selecting step). The color image processing at the time of performing the defective area selecting step includes a difference process using a difference between the coordinate values of the same coordinate components of the image processing data and the non-defective reference color data, and a difference processing between the image processing data and the non-defective reference color data. Can be performed by appropriately adopting known image processing such as pattern matching processing using the same coordinate components. The non-defective reference color information includes a non-defective reference value preset for each coordinate component of the color image information at each position on the inspection surface. In other words, for each coordinate component of the three-dimensional color space coordinate system that is appropriately selected when performing image processing as a visual inspection, a predetermined reference value within a non-defective product allowable range is set in advance as a coordinate value.
[0010]
However, the image processing data used for the image processing in the defective area selection step in the present invention is adjusted according to the size of the data representing the coordinate components of the non-defective reference color data, and the coordinates of the image processing data corresponding to the coordinate components are adjusted. It is assumed that the size of the component is corrected image processing data that is data that has been subjected to correction processing. In other words, the image processing for performing the appearance inspection on the inspection surface of the predetermined area of the electronic circuit component is performed for each product by using the corrected image processing data and the non-defective reference color data. As a result, the image of a certain coordinate component of the image processing data based on the image information of the inspection surface is changed in chromaticity with respect to the image of the same coordinate component of the non-defective reference color data due to the inevitable chromaticity variation of each product. Even if there is a variation, as described in the present invention, by creating corrected image processing data for each product, it is possible to effectively suppress problems such as excessive detection of a defective area given to image processing. To make electronic circuit components subject to visual inspection, it is inevitable to handle components that tend to cause unavoidable chromaticity variations for each product. It is necessary to process a large amount sequentially. For this reason, in particular, in the manufacturing process, the chromaticity variation inevitably occurring irrespective of product quality leads to a decrease in inspection accuracy, which has been a problem inevitable to some extent in the past. Since the occurrence of defects can be effectively suppressed, as a result, the inspection accuracy in the appearance inspection can be reliably increased.
[0011]
The above-described corrected image processing data is created by comparing data representing the same coordinate components of the image processing data and the non-defective reference color data with each other based on the magnitude of the coordinate values. When performing this comparison processing, a data group consisting of all coordinate values of data representing coordinate components, that is, a data group corresponding to the entire area of the inspection surface may be used, or one of data representing coordinate components may be used. This may be performed using a data group consisting of the coordinate values of the parts, that is, a data group corresponding to a predetermined partial area of the inspection surface. As described above, the comparison process is performed by appropriately using the data group corresponding to the entire area or the predetermined partial area of the inspection surface. In addition, for example, the comparison process is performed by separately dividing a first data group consisting of some coordinate values of data representing coordinate components and a second data group appropriately selected from coordinate values excluding the first data group. The corrected image processing data may be created by individual comparison processing using a plurality of data groups each corresponding to a predetermined area of the inspection surface, such as by performing comparison.
[0012]
As a method of comparing data representing the same coordinate components of the above-described image processing data and non-defective reference color data with each other based on the magnitude of the coordinate values, the average value, the median value, the mode value, and the weighting are used. Image processing using high-pass, low-pass, band-pass, or other filter processing using the average value as a representative value, or a threshold value set as a representative value based on the magnitude of the coordinate component on the non-defective reference color data side A known statistical comparison / correction method such as a method applied to the coordinate component on the data side or a method incorporating a Fourier transform may be appropriately selected and used. As described above, after comparing the sizes based on the coordinate values of the same coordinate components of the image processing data and the non-defective reference color data, the magnitudes of the coordinate values of the respective coordinate components in the image processing data are determined based on the comparison processing results. Is subjected to the correction processing, corrected image processing data is created.
[0013]
Next, the generation of the corrected image processing data according to the present invention includes, in the data representing the coordinate components of the non-defective reference color data, a reference representative value based on a data group corresponding to a predetermined partial area on the inspection surface, The correction is performed by using a comparison representative value based on a data group corresponding to the partial region among data representing coordinate components of corresponding image processing data.
[0014]
As described above, the corrected image processing data is created by comparing data representing the same coordinate components of the image processing data and the non-defective reference color data with each other based on the respective coordinate values. This comparison process is a process of smoothing the chromaticity variation occurring for each product in a sense based on the non-defective reference color data. For this purpose, for this purpose, the comparison process is performed based on a data group corresponding to a predetermined partial area on the inspection surface among the data representing the same coordinate components of the image processing and the non-defective reference color data. The processing using the reference representative value can sufficiently cope with this. This is because the purpose is not to smooth the chromaticity variation in the inspection surface region of the product itself, but to smooth the chromaticity variation in the inspection surface region for each product. In addition, by performing the comparison processing using a partial data group of the data representing the coordinate components, the processing time of the comparison processing can be reduced, and as a result, the comparison processing result can be reduced. The time required to create corrected image processing data created by performing correction processing on the magnitudes of the coordinate values of the respective coordinate components in the image processing data based on the image processing data can also be reduced. In the visual inspection of electronic circuit components, it is also important to sequentially and efficiently process a large number of products, and thus it can be said that it is useful to shorten the time required to generate corrected image processing data.
[0015]
Further, it is desirable that the reference representative value and the comparative representative value used in the above-described comparison processing be any one of the average value, the median value, and the mode value of a data group forming a predetermined partial area on the inspection surface. As described above, the comparison process itself is intended to smooth the variation in chromaticity of each product as described above. Therefore, a weight is assigned to a specific coordinate value, and a filter process is performed in a form that pays attention to occurrence of an abnormal value. It can be said that it is sufficient to use any one of the average value, median value, and mode value generally used when comparing basic statistics without complicating the processing such as performing the calculation. As a result, the comparison process can be easily performed without complicating the process. In addition, if the distribution of the data group forming the predetermined partial area on the inspection surface is substantially symmetrical, it is particularly preferable to perform the comparison processing using the average value. This is because, when the distribution of the data group is substantially symmetrical, the average value, the median value, and the mode value can be regarded as equivalent, and the average value is the one that can be most easily processed.
[0016]
As the comparison process using the reference representative value and the comparison representative value, for example, a method of taking a difference value between the reference representative value and the comparison representative value may be adopted, and then, the difference value is used for the comparison process. By adding or subtracting, for example, all or some of the coordinate values of the data representing the target coordinate components, the image processing data is corrected.
[0017]
Up to this point, in the present invention, it has been described that by performing image processing using at least the corrected image processing data, the selection accuracy for selecting the defective area is effectively increased. Therefore, next, a three-dimensional color space coordinate system used in image processing will be described. First, as long as it is a known three-dimensional color space coordinate system, there is no particular limitation. Among them, the first inspection image data includes three primary colors of light, red R, green G, and blue. It is preferable to use an RGB coordinate system in which B is a coordinate component. This is because a CCD camera is often used as a color light receiving unit for taking a color image of the external appearance, and a signal of a detection output thereof corresponds to an RGB coordinate system. As described above, the first inspection image data is composed of the RGB coordinate system, so that the inspection surface color information is generated based on the detection output data from the color light receiving unit, and the first inspection image data is created. It is not necessary to perform coordinate conversion in the above, and the processing time of the appearance inspection can be reduced. Next, it is preferable that the second inspection surface data created by performing coordinate conversion on the first inspection surface data be an HSI coordinate system having hue H, saturation S, and lightness I as coordinate components. This is because the non-defective reference color information including the non-defective reference value of the electronic circuit component needs to be set on the basis of the determination criterion obtained by visual observation, and the HSI coordinate system is close to the color sensation of a human. It is. In other words, by using the second inspection surface data in the HSI coordinate system, the criterion for determining the non-defective reference color information, which is regarded as the non-defective reference value, is set with higher accuracy. Can be increased.
[0018]
Of course, the first inspection plane data and the second inspection plane data are not limited to the three-dimensional color space coordinate system described above. For example, the RGB coordinate system and the HSI coordinate system use three independent coordinate components. However, it is also possible to include four or more coordinate components in which the coordinate components dependent on the coordinate components are added. As described above, first, the three-dimensional color space coordinate system forming the first inspection plane data and the second inspection plane data is appropriately determined in consideration of processing accuracy and processing time required in the appearance inspection processing. What is necessary is just to select from well-known things.
[0019]
Next, an appearance apparatus for performing the method for inspecting the appearance of electronic circuit components as described above will be described. Therefore, the appearance inspection device for electronic circuit components of the present invention is:
A color light receiving section for imaging an inspection surface of an electronic circuit component,
Inspection surface information generating means for generating inspection surface color information comprising three coordinate components of a three-dimensional color space coordinate system at each position in the inspection surface based on the detection output of the color light receiving unit;
First inspection surface data representing three coordinate components of the inspection surface color information, and a second inspection surface obtained by performing coordinate conversion of the first inspection surface data to a three-dimensional color space coordinate system different from its own three-dimensional color space coordinate system. Image processing data creating means for creating image processing data consisting of at least one coordinate component in at least one of the data;
The image processing data, and a defective area selecting means for selecting a defective area by image processing using non-defective reference color data corresponding to the image processing data among the preset non-defective reference color information, and
The image processing data used for the image processing in the defect candidate area selecting means is determined according to the size of the data representing the respective coordinate components of the non-defective reference color data, and the size of the respective coordinate components of the image processing data corresponding to the coordinate components. Is corrected image processing data that is data subjected to the correction processing.
[0020]
First, the color light receiving unit captures a color image of the inspection surface of the electronic circuit component, detects the input signal of the color image at each pixel corresponding to each position of the inspection surface, and detects the color image at each pixel. The detection signal corresponding to each of the three coordinate components of the three-dimensional color space coordinate system is output from the color light receiving unit. Next, based on the output analog signal, test plane color information including three coordinate values corresponding to three coordinate components of the three-dimensional color space coordinate system at each position on the test plane is generated as a digital signal. The inspection surface information generating means can be provided in a computer such as a personal computer (PC). Then, first inspection surface data representing three coordinate components of the inspection surface color information and a second inspection surface obtained by performing coordinate conversion of the first inspection surface data to a three-dimensional coordinate system different from its own three-dimensional color space coordinate system. Image processing data generating means for generating image processing data composed of at least one coordinate component of at least one of the data can also be provided in a computer such as a PC. Then, the defective area selecting means for selecting a defective area by image processing using the image processing data and the non-defective reference color data corresponding to the image processing data among the non-defective reference color information set in advance, as described above, It can be provided in a computer such as a PC. However, the image processing data used for the image processing in the defective area selecting means is adjusted according to the size of the data representing each coordinate component of the non-defective reference color data, and the size of each coordinate component of the image processing data corresponding to the coordinate component. Is corrected data, that is, the corrected image processing data described above. Means for creating the corrected image processing data can also be provided in the computer. By using the appearance inspection apparatus of the present invention provided with such means, it is possible to perform the above-described appearance inspection method for electronic circuit components.
[0021]
The method and apparatus for inspecting the appearance of electronic circuit components according to the present invention have been described above. Next, a method for manufacturing an electronic circuit component of the present invention having an appearance inspection step of performing an appearance inspection of an electronic circuit component by such an appearance inspection method will be described. First, in a step of forming a wiring pattern on a substrate, a wiring pattern corresponding to an element function of an electronic circuit component is formed. With respect to the appearance on the substrate surface on which such a wiring pattern is formed, it is necessary to inspect the appearance of defective areas such as adhesion of foreign matter, discoloration, cracks, and peeling of the surface. Therefore, the appearance inspection for the inspection surface on the substrate surface on which the wiring pattern is formed is performed in the determination step using the above-described appearance inspection method. In the determination step, first, a defective area on the inspection surface is selected using a method similar to the above-described appearance inspection method. Further, the final pass / fail judgment is made by evaluating the shape such as the area and length in each part of the wiring pattern corresponding to the selected defective area. By performing the determination step for the appearance of the inspection surface on the substrate surface in such a work process, the processing accuracy of the appearance inspection can be improved. As a result, it is possible to improve the quality of the manufactured electronic circuit component as well as the reliability of the product.
[0022]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram showing an embodiment of an electronic circuit component appearance inspection apparatus according to the present invention. The visual inspection device 100 includes a stage 20 on which the electronic circuit component 1 is placed. In addition, the stage 20 can automatically perform positioning and transport of the electronic circuit component 1 using electric power from the movement control device 50. In addition, the visual inspection device 100 includes an illumination device 40 for illuminating light from the light source 30 on the inspection surface of the electronic circuit component 1, the color light receiving unit 2, the image processing device 11, and the like. . The color light receiving unit 2 captures a color image of the appearance of the inspection surface of the electronic circuit component 1 to be inspected, and detects an input signal of the color image at each pixel corresponding to each position on the inspection surface. In addition, the image processing device 11 has a function of outputting a detection output signal corresponding to each of three coordinate components of a three-dimensional color space coordinate system representing a color image at each pixel to the image processing device 11. Next, as shown in FIG. 3, the image processing apparatus 11 includes a CPU 13 for performing functions such as arithmetic processing, a memory 14 for storing data, a hard disk 15 for storing and storing data, and a color light receiving unit. 2 has a function of taking in detection output signals corresponding to each of three coordinate components of a three-dimensional color space coordinate system representing a color image and outputting an analog signal to a digital signal. And a monitor 12 for displaying a captured image, a processing state, and the like. With such an image processing apparatus 11, image data creation, image processing, and the like can be performed. Although the image processing apparatus 11 in FIGS. 1 and 3 mainly uses a personal computer (PC), a general-purpose computer such as a workstation may be used instead of the PC. Further, an image processing apparatus specialized in image capturing and processing functions can be made to function in a form of being externally connected to a computer. Further, although the hard disk 15 is positioned as an auxiliary storage device here, the hard disk as the auxiliary storage device is connected to a removable storage medium such as an MO, a CD-R, a CD-RW, or a LAN. It can be replaced with an external storage medium. On the other hand, the memory 14 is used for storage of image data, image processing, arithmetic processing, and the like. Of course, the function of the memory 14 can be performed by the hard disk 15.
[0023]
Next, the appearance inspection method of the present invention will be described with reference to FIGS. 1, 2 and 3. FIG. 2 shows one operation procedure of the appearance inspection method. The inspection surface of the electronic circuit component 1 mounted on the stage 20 is irradiated with light from the light source 30 via the illumination device 40 to receive a color image of the appearance of the inspection surface of the electronic circuit component 1 in color. The imaging unit 11 captures an image, and outputs a detection output signal corresponding to each of three coordinate components of a three-dimensional color space coordinate system representing a color image at each pixel corresponding to each position on the inspection surface to the image processing apparatus 11. Output. Then, the image detection board 16 of the image processing apparatus 11 performs A / D conversion of the input detection output signal and generates inspection surface color information as a digital signal. The inspection surface color information is obtained by using three independent coordinate components of the three-dimensional color space coordinate system at each position of the inspection surface, that is, at the position of each pixel that partitions the color image of the appearance of the inspection surface. It is composed of two color space coordinate values. As described above, the inspection surface color information includes the position information of each position on the inspection surface and the color image information at each position. This operation corresponds to the inspection surface color information generation step of Step 1. Then, the generated inspection surface color information is captured by the image processing device 11 via the image capturing board 16 as information on the color image of the inspection surface.
[0024]
The inspection image color information input to the image processing device 11 in step 1 is stored in the memory 14 of the image processing device 11 as a first inspection image. Then, the image is compared with a reference image previously read into the memory 14, and if there is a position shift in the first inspection image, the shift amount is calculated by the image processing device 11. Thereafter, the position of the first inspection image is corrected based on the deviation amount, and is stored in the memory 14 as first inspection surface data. This operation corresponds to step 2.
[0025]
Next, when data in a three-dimensional color space coordinate system different from the first inspection plane data is required, the first inspection plane data stored in the memory 14 in step 2 is converted to its own three-dimensional color space coordinate system. Converts the coordinates into a different three-dimensional color space coordinate system by arithmetic processing using the CPU 13 and the memory 14, and stores the processing result in the memory 14 as second inspection plane data. Then, image processing data including at least one coordinate component of at least one of the first inspection plane data and the second inspection plane data is created using the image processing apparatus 11 and stored in the memory 14. This work corresponds to the image processing data creation step of step 3. Further, for each coordinate component of the color image information at each position of the inspection surface constituting at least one of the first inspection surface data and the second inspection surface data, a non-defective reference value within a non-defective acceptable range is set in advance. In addition, the non-defective reference color information including the non-defective reference values is read into the memory 14 in advance. Then, the non-defective reference color data corresponding to each coordinate component of the image processing data among the non-defective reference color information is stored in the memory 14. Further, the size of each coordinate component of the image processing data corresponding to the coordinate component is determined by an arithmetic process using the CPU 13 and the memory 14 in accordance with the size of the data representing the coordinate component of the non-defective reference color data. The correction processing is performed, and the data created by the correction processing is stored in the memory 14 as corrected image processing data. This work corresponds to the creation of the corrected image processing data in step 4.
[0026]
Then, using the data representing each coordinate component of the image processing data and the data representing each coordinate component of the non-defective reference color data corresponding to the coordinate component, image processing or pattern matching is performed by subjecting them to differential processing. The known image processing such as the resulting image processing is performed by the image processing apparatus 11. A set of positions on the inspection plane corresponding to the data extracted by this image processing is defined as a defective area. This operation corresponds to a defective area selection step of Step 5. The data extracted here is stored in the memory 14 as image extraction data.
[0027]
The image processing in the defective area selection step of step 5 is performed using the image processing data and the non-defective reference color data. For example, the coordinate components for performing the difference processing and the coordinate components for performing the pattern matching are separated. May be subjected to different types of image processing. In this case, data is individually extracted in each image processing, and a set of positions on the inspection surface corresponding to a combination of the extracted data is regarded as a defective area.
[0028]
Next, after the operation of step 5, each part determined as a defective area in the inspection surface of the electronic circuit component 1 is stored in the memory 14 corresponding to the selected defective area and using the image extraction data. The respective areas and lengths are analyzed by the image processing device 11 to create shape evaluation data. If a value exceeding a threshold value set for each part of the wiring pattern formed on the inspection surface of the electronic circuit component 1 is extracted from the shape evaluation data, the electronic circuit component 1 is determined to be defective. judge. This operation corresponds to the pass / fail judgment based on the shape evaluation in step S5. Here, the data extracted in the image processing in step 4 is collectively referred to as extracted data. For example, the extracted data for each coordinate component subjected to the image processing is individually stored in the memory 14 as the extracted data. Using these extracted data individually, it is also possible to make a quality judgment by shape evaluation in the same manner as described above.
[0029]
Although not described in the above operation procedure, the non-defective reference image formed by each coordinate component constituting the non-defective reference color information is subjected to position correction by comparing in advance with the reference image used in the position correction in Step 2. Was made. In addition, as a matter of course, a region that is not to be subjected to the appearance inspection in the electronic circuit component 1 is subjected to mask processing in advance. By the way, the appearance inspection of the electronic circuit component 1 is performed according to the above operation procedure, but this operation procedure is only an example. Known methods can be applied to the position correction in step 2 and the method and procedure for creating, calculating, and analyzing data in the image processing apparatus 11.
[0030]
Next, a specific example of the three-dimensional color space coordinate system used for the first inspection plane data and the second inspection plane data, a specific example of the correction processing in step 3, and the like will be described together with the appearance inspection method of the present invention. An example will be described.
[0031]
(Embodiment) As the color light receiving section 2, one capable of capturing a color image for each of the three primary colors of light (red R, green G, and blue B) is used. For example, a CCD type three-plate color line sensor camera or the like is used. By using such a line sensor camera 2, as shown in FIG. 4, the stage 20 on which the electronic circuit component 1 is mounted is moved in the X direction perpendicular to the camera scan direction. A color image of the appearance of the inspection surface of the component 1 is taken into the image processing device 11 as inspection surface color information for each of R, G, and B. Each captured image for each of R, G, and B is configured with a pixel as a minimum unit as shown in FIG. 4, and the size of each pixel is determined by the type of the line sensor camera 2 and the type of the lens used. It is defined by the resolution. On the other hand, the magnitude of the luminance representing the output value of the detection output that is output from the line sensor camera 2 to the image processing device 11 for each of R, G, and B is, for example, 1 byte of 0 to 255 in the image processing device 11. Converted to digital value. In this way, the inspection surface color information including the coordinate values corresponding to the R, G, and B coordinate components at the position of each pixel corresponding to each position of the inspection surface is taken into the image processing device 11. In addition, the inspection surface color information includes position information of each position on the inspection surface and color image information expressed in the RGB coordinate system at each position.
[0032]
Next, the inspection surface color information input to the image processing apparatus 11 is stored in the memory 14 of the image processing apparatus 11 as a first inspection image. Then, the image is compared with a reference image previously read into the memory 14, and if there is a position shift in the first inspection image, the amount of the shift is calculated by the image processing apparatus 11. Thereafter, the position of the first inspection image is corrected based on the deviation amount, and is stored in the memory 14 as first inspection surface data.
[0033]
When data of a three-dimensional color space coordinate system (HSI system in this embodiment) different from the first inspection plane data is required, the first inspection plane data stored in the memory 14 is stored after the position correction is performed. The coordinate is converted to an HSI coordinate system different from its own RGB coordinate system by arithmetic processing using the CPU 13 and the memory 14, and the processing result is stored in the memory 14 as second inspection plane data. Here, the first inspection plane data has three coordinate components of R, G, and B coordinate components as color image information, while the second inspection plane data includes H (hue) and S (saturation). , I (lightness) coordinate components. The hue H represents a hue, and as shown in FIG. 5A, R (red), Y (yellow), G (green), C (cyan), and B ( Blue) and M (magenta) are defined, and the color is defined by the angle with respect to the center. Therefore, an angle in the range of 0 to 360 degrees indicating the hue is assigned to a value of 0 to 255 (1 byte) to obtain a coordinate value of the H coordinate component. For example, if R is 0, G becomes 85 and B becomes 170, and becomes 255 again at 255. Next, as shown in the HSI coordinate system of FIG. 5B, the saturation S representing the vividness of the color is defined by the length from the center. Therefore, the length assigned to the value of 0 to 255 (1 byte) is defined as the coordinate value of the S coordinate component. Finally, the lightness I representing the brightness of a color is defined by a position on the central axis. Therefore, the value obtained by assigning the position to a value of 0 to 255 (1 byte) is defined as the coordinate value of the I coordinate component.
[0034]
Using the image processing device 11, image processing data including at least one coordinate component in at least one of the first inspection plane data and the second inspection plane data, in which the coordinate values of the respective coordinate components are defined as described above, It is created and stored in the memory 14. Further, for each coordinate component of the color image information at each position of the inspection surface constituting at least one of the first inspection surface data and the second inspection surface data, a non-defective reference value within a non-defective acceptable range is set in advance. In addition, the non-defective reference color information including the non-defective reference values is read into the memory 14 in advance. Then, based on the reference image used for the position correction of the first inspection image, the non-defective reference color information is assumed to have been subjected to the position correction. Of course, the non-defective reference color information can be used as a reference image. Next, the non-defective reference color information corresponding to each coordinate component of the image processing data is stored in the memory 14. Then, in the data representing the coordinate components of the non-defective reference color data, a reference representative value of each coordinate value of a data group corresponding to a predetermined partial area of the inspection surface is obtained. The reference representative value is, for example, any one of an average value, a median value, a mode value, and the like. In the same manner as the reference representative value obtained in this manner, in the data representing the respective coordinate components of the image processing data, each of the data groups corresponding to the predetermined partial area of the same inspection surface as the reference representative value is obtained. A comparative representative value of the coordinate values is obtained. Then, a difference value between the obtained reference representative value and the comparison representative value is calculated, and the difference value is calculated in the form of raising or lowering the background of the data representing the coordinate components of the image processing data. Is performed for addition or subtraction to all the coordinate values that make Then, the processing result is stored in the memory 14 as corrected image processing data.
[0035]
After creating the corrected image processing data, a defective area is selected by performing image processing such as difference processing or pattern matching between data forming the same coordinate component between the corrected image processing data and the non-defective reference color data. . Then, based on the selection result, a final pass / fail judgment of the electronic circuit component is performed by shape evaluation.
[0036]
By performing the image processing using the corrected image processing data as described above, it is possible to effectively smooth the unavoidable chromaticity variations that occur for each product, and, consequently, the external appearance of electronic circuit components. The inspection accuracy of the inspection can be improved. However, since this embodiment is merely an example, various modifications or improvements can be added without departing from the technical scope based on the description of the claims. For example, the correction image processing data may be created based on a reference representative value and a comparative representative value obtained using data corresponding to the entire area of the inspection surface, or the inspection surface area may be divided into a plurality of predetermined areas. The method may be performed by dividing and separately obtaining the reference representative value and the comparative representative value, and individually correcting the coordinate values forming the data of the coordinate components accordingly.
[0037]
By using the appearance inspection method of the present invention described above, it is possible to increase the inspection accuracy of the appearance inspection performed on the inspection surface of the electronic circuit component. In addition, a determination step of performing an external appearance inspection on the appearance of the substrate on which a wiring pattern corresponding to the element function of the electronic circuit component is formed on a substrate, such as adhesion of foreign matter, discoloration, cracks, and peeling of the surface. Also in the method for manufacturing an electronic circuit component having the same, by performing the determination step using the same method as the appearance inspection method of the present invention, the inspection accuracy for the appearance can be improved.
[0038]
The above-described embodiments and examples according to the present invention are merely examples. In the appearance inspection of the inspection surface of the electronic circuit component, corrected image processing data is created for each product, and the corrected image processing data is generated. The concept of performing image processing using is included in the concept of the present invention.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing an embodiment of a visual inspection device of the present invention.
FIG. 2 is a schematic process diagram showing one operation procedure of the appearance inspection method of the present invention.
FIG. 3 is a schematic configuration diagram of a main part of the visual inspection device of the present invention.
FIG. 4 is a schematic view for explaining the appearance inspection method of the present invention.
FIG. 5 is a schematic diagram for explaining a three-dimensional color space coordinate system used in the appearance inspection method of the present invention.
[Explanation of symbols]
1 Electronic circuit components
2 Color receiver (line sensor camera)
11 Image processing device
100 Appearance inspection device

Claims (7)

An appearance inspection method for electronic circuit components,
Inspection light from the inspection surface of the electronic circuit component is received by the color light receiving unit, and based on the detection output of the color light receiving unit, three color components of the three-dimensional color space coordinate system at each position on the inspection surface are used. An inspection surface color information generating step of generating inspection surface color information
First inspection surface data representing three coordinate components of the inspection surface color information, and a second inspection surface obtained by performing coordinate conversion of the first inspection surface data to a three-dimensional color space coordinate system different from its own three-dimensional color space coordinate system. An image processing data creating step of creating image processing data consisting of at least one coordinate component in at least one of the data;
The image processing data, and a defective area selecting step of selecting a defective area by image processing using non-defective standard color data corresponding to the image processing data among preset non-defective standard color information,
The image processing data used for the image processing in the defective area selecting step is the coordinate component of the image processing data corresponding to the coordinate component according to the size of data representing the coordinate component of the non-defective reference color data. Wherein the size of the electronic circuit component is corrected image processing data that is data subjected to the correction processing. The generation of the corrected image processing data includes a reference representative value based on a data group corresponding to a predetermined partial area on the inspection surface among data representing coordinate components of the non-defective reference color data, and the reference component corresponding to the coordinate component. 2. The external appearance of the electronic circuit component according to claim 1, wherein the correction is performed by using a comparison representative value based on a data group corresponding to the partial area among data representing coordinate components of the image processing data. Inspection methods. 3. The electronic circuit component according to claim 2, wherein the reference representative value and the comparison representative value are each one of an average value, a median value, and a mode value of the data group forming the partial area. Appearance inspection method. 4. The electronic device according to claim 1, wherein the first inspection surface data includes an RGB coordinate system having three primary colors of light, red R, green G, and blue B, as coordinate components. 5. Visual inspection method for circuit components. 5. The electronic circuit component according to claim 1, wherein the second inspection surface data includes an HSI coordinate system having hue H, saturation S, and lightness I as coordinate components. 6. Appearance inspection method. An appearance inspection device used for the appearance inspection of electronic circuit components,
A color light receiving section for imaging an inspection surface of an electronic circuit component,
Inspection surface information generating means for generating inspection surface color information consisting of three coordinate components of a three-dimensional color space coordinate system at each position in the inspection surface based on the detection output of the color light receiving unit;
First inspection surface data representing three coordinate components of the inspection surface color information, and a second inspection surface obtained by performing coordinate conversion of the first inspection surface data to a three-dimensional color space coordinate system different from its own three-dimensional color space coordinate system. Image processing data creating means for creating image processing data consisting of at least one coordinate component in at least one of the data;
A defect area selecting means for selecting a defective area by image processing using the image processing data and non-defective reference color data corresponding to the image processing data among preset non-defective reference color information; ,
The image processing data used for the image processing in the defective candidate area selecting means is the same as the non-defective reference color data, in accordance with the size of the data representing the coordinate components, and the image processing data corresponding to the coordinate components. An appearance inspection apparatus for an electronic circuit component, wherein the magnitude of a coordinate component is corrected image processing data that is data obtained by performing a correction process. Forming a wiring pattern on the substrate;
Inspection light from an inspection surface on the substrate on which the wiring pattern is formed is received by a color light receiving unit, and a three-dimensional color space coordinate system at each position in the inspection surface is detected based on a detection output of the color light receiving unit. Inspection plane color information composed of three coordinate components is generated, and first inspection plane data representing the three coordinate components of the inspection plane color information and the first inspection plane data are converted into a three-dimensional image that is different from its own three-dimensional color space coordinate system. Create image processing data consisting of at least one coordinate component in at least one of the second inspection plane data that has been coordinate-transformed to the color space coordinate system, and generate the image processing data and the non-defective reference color information in the preset non-defective standard color information. Determining a defective area by image processing using non-defective reference color data corresponding to the image processing data, and determining whether the wiring pattern is good or bad based on the selected defective area. Together,
The image processing data used in the image processing performed to select the defective area in the determination step corresponds to the coordinate component according to the size of data representing the coordinate component of each of the non-defective reference color data. A method of manufacturing a component for an electronic circuit, wherein the size of each coordinate component of the image processing data is corrected image processing data that is data obtained by performing a correction process.

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