JP2004090621A - Apparatus and method for discharging liquid and apparatus and method for manufacturing panel for display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To uniformize the discharge amount of the ink from the nozzle of a liquid discharge head. <P>SOLUTION: A liquid discharge apparatus is constituted so as to discharge a liquid to a medium by the liquid discharge head having a plurality of nozzles for discharging a liquid and has a discharge amount varying part 304 capable of individually varying the liquid discharge amounts from a plurality of the nozzles of the liquid discharge head with respect to a plurality of nozzles. The discharge amount varying part includes a voltage control circuit 313 capable of altering the drive voltage value of drive pulses supplied to a plurality of the nozzles. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a technique for forming or drawing a predetermined pattern using a liquid ejection head (for example, an ink jet head).
[0002]
[Prior art]
Generally, a liquid crystal display device is mounted on a personal computer, a word processor, a pachinko game console, an automobile navigation system, a small television, and the like, and the demand has been increasing in recent years. However, the cost of the liquid crystal display device is high, and the demand for cost reduction of the liquid crystal display device is increasing year by year. In particular, among the components of the liquid crystal display device, the cost ratio of the color filter is high, and the demand for reducing the cost of the color filter is increasing.
[0003]
A color filter used in a liquid crystal display device is configured by arranging colored filter elements such as red (R), green (G), and blue (B) on a transparent substrate. Is provided with a black matrix (BM) that blocks light in order to increase the display contrast of the liquid crystal display device. As for the BM, there is a resin BM using a black resin in recent years from a resin BM using a Cr metal thin film.
[0004]
On the colored layer including the filter element, an overcoat layer (protective layer) having a thickness of 0.5 to 2 μm made of an acrylic resin or an epoxy resin is formed to improve smoothness and the like. Then, a transparent electrode (ITO) film is formed.
[0005]
As a method for coloring a filter element of a color filter, various methods are conventionally known, and these include a dyeing method, a pigment dispersion method, an electrodeposition method, a printing method, and the like.
[0006]
The dyeing method is a process of applying a water-soluble polymer material, which is a material for dyeing, onto a glass substrate, patterning the material into a predetermined shape using photolithography, and then immersing it in a dyeing solution and coloring it. A method of repeatedly obtaining a color filter for each color B.
[0007]
The pigment dispersion method is a process in which a layer in which a coloring material pigment is dispersed in a photosensitive resin material is formed on a transparent substrate by a spin coater or the like, and the patterning process is performed once for each of R, G, and B colors. , A total of three times to obtain an RGB color filter.
[0008]
The electrodeposition method is a method of patterning a transparent electrode on a transparent substrate, immersing the electrode in an electrodeposition coating solution such as a pigment, a resin, or an electrolyte and coloring the same for each of R, G, and B to obtain a color filter. is there.
[0009]
The printing method is a method of obtaining a color filter by repeating a process of coloring a thermosetting resin in which a pigment-based color material is dispersed by offset printing for each of R, G, and B colors.
[0010]
The common feature of the above color filter manufacturing methods is that the same process must be repeated to color the three colors of R, G, and B, which is costly. Further, there is a problem that the manufacturing yield is reduced by increasing the number of steps.
[0011]
To compensate for these drawbacks, Japanese Patent Application Laid-Open Nos. 59-75205 (Patent Document 1), 63-235901 (Patent Document 2), and 1-217320 (Patent Document 3), etc. Discloses a method of manufacturing a color filter using an ink jet method. The ink-jet method is a method in which a colorant containing R, G, and B color materials is jetted onto a transparent substrate by using an ink-jet to color, dry, and fix to form a filter element. Since the three colors R, G, and B required for the color filter can be formed at the same time, the manufacturing process can be simplified and the cost can be reduced. In addition, since the number of steps is smaller than in the dyeing method, the pigment dispersion method, the electrodeposition method, the printing method, and the like, the production yield can be improved.
[0012]
Meanwhile, in a color filter used in a general liquid crystal display device or the like, the shape of a black matrix opening (that is, pixel) for partitioning each pixel is rectangular, whereas the shape of an ink droplet ejected from an inkjet head is Is substantially circular, it is difficult to discharge the required amount of ink in one pixel at a time and to spread the ink uniformly over the entire opening of the black matrix. Therefore, a plurality of ink droplets are ejected and colored to one pixel on the substrate while the inkjet head is relatively scanned with respect to the substrate.
[0013]
Further, as the variation in the amount of ink filled in each pixel is smaller, a high-quality color filter with reduced unevenness can be manufactured.
[0014]
However, the amount of ink ejected from the inkjet head may vary between the nozzles even if the ejection drive is performed under the same ejection drive conditions due to variations in the nozzles constituting the head or the structure, drive mechanism, and drive characteristics related to the ejection. The amount may vary. In this case, even if the same number of inks are ejected to each pixel, the ink filling amount of each pixel varies due to the different nozzles used, and this variation in the ink filling amount causes unevenness between pixels. As a result, the quality and yield of the color filter are reduced.
[0015]
Conventionally, the following two methods (bit correction and shading correction) have been adopted to solve the problem of the density unevenness. Here, the case of an inkjet head that ejects ink by thermal energy will be described.
[0016]
First, as described in Japanese Patent Application Laid-Open No. 9-281324 (Patent Document 4), a difference in ink ejection amount between each nozzle of an inkjet head IJH having a plurality of ink ejection nozzles shown in FIGS. A method of correcting (hereinafter, referred to as bit correction) will be described.
[0017]
First, as shown in FIG. 11, ink is ejected from a nozzle 1, a nozzle 2, and a nozzle 3, for example, three nozzles of the inkjet head IJH onto a predetermined substrate, and the ink ejected from each nozzle is ejected onto the substrate P. The size of the ink dot to be formed is measured, and the amount of ink ejected from each nozzle is measured. At this time, the heat pulse applied to the heater of each nozzle has a fixed width, and the width of the preheat pulse is changed. As a result, a curve showing the relationship between the preheat pulse width and the ink ejection amount as shown in FIG. 12 is obtained. Here, for example, if it is desired to unify the ink ejection amount from each nozzle to 20 ng, the width of the preheat pulse applied to the nozzle 1 is 1.0 μs, the width of the preheat pulse applied to the nozzle 2 is 0.5 μs, It can be seen that the time is 0.75 μs. Therefore, by applying a preheat pulse having such a width to the heater of each nozzle, the ink ejection amount from each nozzle can be made uniform to 20 ng as shown in FIG. Correcting the amount of ink ejected from each nozzle in this manner is called bit correction.
[0018]
Next, FIGS. 14 and 15 are diagrams showing a method of correcting unevenness in density in the scanning direction of the inkjet head by adjusting the ink ejection density from each ink ejection nozzle (hereinafter referred to as shading correction). . For example, as shown in FIG. 14, it is assumed that the ink discharge amount of the nozzle 1 is −10% and the ink discharge amount of the nozzle 2 is + 20%, based on the ink discharge amount of the nozzle 3 of the inkjet head. At this time, while scanning the ink jet head IJH, as shown in FIG. 15, a heat pulse is applied to the heater of the nozzle 1 once every nine times of the reference clock, and to the heater of the nozzle 2 at the time of 12 times of the reference clock. The heat pulse is applied once each time, and the heater pulse of the nozzle 3 is applied once every ten times of the reference clock. In this way, the number of ink ejections in the scanning direction can be changed for each nozzle, and as shown in FIG. 14, the ink density in the scanning direction in the pixels of the color filter can be made constant, and the density of each pixel can be increased. Unevenness can be prevented. Correcting the ink ejection density in the scanning direction in this manner is called shading correction.
[0019]
[Patent Document 1]
JP-A-59-75205
[Patent Document 2]
JP-A-63-235901
[Patent Document 3]
JP-A-1-217320
[Patent Document 4]
JP-A-9-281324
[Patent Document 5]
JP-A-8-179110.
[0020]
[Problems to be solved by the invention]
The above two methods are known as methods for reducing density unevenness. Conventionally, for example, a color in which each color is colored in a stripe shape as described in JP-A-8-179110 (Patent Document 5). In the filter, the discharge pitch is adjusted for one pixel row as one unit by the shading correction method, which is the latter of the above two methods, and the discharge amount for one pixel row is adjusted. In this striped color filter, a color mixing prevention wall is provided between each color pixel row so that ink of a predetermined color discharged to one pixel row does not flow into an adjacent pixel row of a different color.
[0021]
However, the color-mixing prevention wall is provided between the respective color pixel columns as described above, and the color filter is not a color filter that is colored in a stripe shape. The color-mixing prevention wall is not provided between the pixel columns, and the partition between pixels is BM (black matrix). In the case of a color filter having only one pixel array, if ink is ejected in a line with one pixel row as one unit, the ink ejected on the water-repellent BM flows into an adjacent pixel region. It becomes very difficult to manage the ejection amount in the pixel.
[0022]
That is, it is difficult to control the amount of ink applied to the pixel to a predetermined amount by the method of adjusting the ejection interval such as the shading correction.
[0023]
In addition, the pixel area tends to be reduced due to the high definition of the color filter pixels, and it becomes more difficult to control the ink filling amount in the pixels.
[0024]
Therefore, of the two methods of reducing density unevenness, the new method of improving the quality of color filter unevenness by the former method (bit correction) of equalizing the ejection amount is an important issue.
[0025]
In other words, in a mode in which the amount of ink filling is adjusted by using one pixel as one unit instead of one pixel column as one unit, the bit correction is used to make the amount of ink filling in each pixel uniform. Is considered to be effective, it is desired that a mode in which the uniformity of the ink filling amount by the bit correction can be realized with a configuration as simple as possible is desired.
A first problem for manufacturing such a high-quality color filter is to make the liquid filling amount in a predetermined area (pixel) uniform by bit correction.
[0026]
Incidentally, the amount of ink ejected from one nozzle is affected by whether or not ink is ejected from adjacent nozzles at the same time, and depends on whether adjacent nozzles are ejected at the same time or not. The discharge amount is different. In this specification, this phenomenon is referred to as adjacent nozzle crosstalk. In order to make the ink ejection amount uniform and eliminate unevenness between pixels, it is preferable to consider ejection fluctuation due to adjacent nozzle crosstalk.
[0027]
FIG. 35 shows an example of the measurement result of the adjacent nozzle crosstalk which motivated the present invention.
[0028]
In FIG. 35, control is performed such that the ejection timing is advanced or delayed, or ink is ejected or not ejected from the nozzles, for a plurality of nozzles (here, 80 ch) of the inkjet head. It shows how the quantity varies. In particular, it shows the effect of the discharge amount fluctuation due to the adjacent nozzle crosstalk. More specifically, in FIG. 35, the ejection amount of the nozzle of interest is measured by paying attention to the ejection amount of the Nth nozzle (ch12) among all the nozzles Z (80ch). In this discharge amount measurement, the voltage, current, and pulse waveform for driving the nozzle of interest (ch12) are kept constant in all measurements. FIG. 35 shows the timing of the discharge of the peripheral nozzle changed with respect to the discharge of the target nozzle (ch12).
[0029]
In FIG. 35, (a) shows the ejection amount of ch12 when ink is simultaneously ejected from all nozzles (80ch), and is represented by 100 in the right bar graph.
[0030]
(B) is the ejection amount of ch12 when ink is ejected from a selected half (40ch) of all nozzles (80ch). In this nozzle selection, ink is simultaneously ejected from ch11 and ch13, which are adjacent nozzles to ch12. In this case, the discharge amount is 1% smaller than the discharge amount in (a).
[0031]
(C) is the ejection amount of the ch12 nozzle when ink is ejected from 40ch out of 80ch, which is selected differently from (b). In this nozzle selection, ink is not ejected from ch11 and ch13, which are adjacent nozzles to ch12. In this case, the discharge amount is 5% smaller than the discharge amount of (a).
[0032]
(D) shows the ejection amount of the ch12 nozzle when ejection is performed with a shift of the ejection timing of 40 ch selected in the same manner as (c) among the 80 ch. In this nozzle selection, ink is not ejected from ch11 and ch13, which are adjacent nozzles to ch12. Further, here, the remaining nozzles (39ch) other than the target nozzle (ch12) eject ink with a delay of 10 μsec from the target nozzle (ch12). In this case, the discharge amount is 7% smaller than the discharge amount of (a) and 2% smaller than the discharge amount of (c).
[0033]
(E) is an ejection amount when ink is ejected alone from only channel 12 of 80 channels. In this nozzle selection, the ejection amount is 12% smaller than the ejection amount of (a). Conversely, in the case of simultaneous ejection of 80 channels in (a), the ejection amount is increased by 12% as compared with the ejection of single channel in (e).
[0034]
(F) is the ejection amount of the ch12 nozzle when ink is ejected from 40 channels selected differently from (d) out of 80 channels. In this nozzle selection, ink is ejected from ch11 and ch13, which are adjacent nozzles to ch12. Here, the remaining nozzles (39ch) other than the target nozzle (ch12) discharge 10 μsec later than the target nozzle (ch12). In this case, the discharge amount is further reduced by 7% from the discharge amount of (e).
[0035]
In (g), ink is ejected from all the nozzles (80 ch), but all the nozzles (the remaining 79 ch) other than the target nozzle (ch 12) discharge ink 10 μsec later than the target nozzle (ch 12). In this case, the discharge amount is smaller by 9% than the discharge amount of (e).
[0036]
The mechanism of occurrence of the above phenomenon can be described as crosstalk between nozzles due to the propagation of the pressure wave of the ink from the ink liquid chamber 114 to the respective liquid paths 110. That is, in the case of simultaneous ejection (a) of 80 channels, the pressure wave of the ejection of the nozzles (79 channels in total) other than the nozzle of interest (ch12) is different from the case of single ejection (e) by the nozzle of interest (ch12). (A), the discharge increases.
[0037]
(B) and (c) are simultaneous ejections of 40 ch, so the ejection amount does not increase as much as 80 ch simultaneous ejection. In addition, since the ink is ejected from the adjacent nozzle in (b) compared to (c), the ejection amount is increased by the difference. That is, whether or not ink is simultaneously ejected from adjacent nozzles has the greatest effect on the ejection of the nozzle of interest (ch12).
[0038]
Next, a comparison between (a), (e) and (g) shows that changing the discharge timing of the nozzles other than the target nozzle (ch12) changes the discharge amount of the target nozzle (ch12). If the other nozzle is ejected simultaneously with the target nozzle as in (a) as compared with (e), the ejection amount of the focused nozzle increases, but the other nozzle is moved to ch12 as in (g) as compared with (e). If the ejection is delayed with a slight delay, the ejection amount of the target nozzle decreases. This is because the interference phases of the pressure waves by the other nozzles are reversed, and this acts so that the discharge pressure of the nozzle of interest is canceled.
[0039]
Similarly, comparing (b), (e), and (f), it is understood that the discharge amount of the target nozzle changes when the discharge timing of another nozzle other than the target nozzle changes.
[0040]
Also, when comparing (b), (e) and (f), the number of remaining nozzles other than the focused nozzle (ch12) is smaller than when comparing (a), (e) and (g). It can be said that the smaller the amount, the smaller the change in the discharge amount of the target nozzle (ch12) with respect to the difference in the discharge timing of the remaining nozzles.
[0041]
In addition, the variation in the ejection amount of the target nozzle (ch12) with respect to the difference in the ejection timing of the nozzles other than the target nozzle has the greatest effect on the adjacent nozzle adjacent to the target nozzle. It can be said that even a nozzle or a nozzle farther away has a little effect.
[0042]
As described above, the presence / absence of ejection from other nozzles and the ejection timing other than the nozzle of interest affects the ink ejection amount of the nozzle of interest, but conventionally, this effect has not been considered. That is, if the number of used nozzles, the combination of used nozzles, or the ejection timing of each nozzle changes, the ejection amount for each nozzle changes, and the variation in the ejection amount causes a change between pixels. Since density unevenness may occur, when manufacturing a high-quality color filter, it is desirable to consider the discharge amount fluctuation due to the adjacent nozzle crosstalk.
If this is added, even if the ejection amount of each nozzle is made uniform by bit correction before pattern formation or pattern drawing, the ejection amount fluctuation due to the adjacent nozzle crosstalk may occur. It is desirable to do.
As described above, as a second problem for manufacturing a higher quality color filter, a uniform liquid filling amount in a predetermined area (pixel) in consideration of a discharge amount variation due to adjacent nozzle crosstalk is considered. Is mentioned.
Although the object to be manufactured has been described as a color filter, the first and second problems do not occur only in the manufacture of the color filter. In the case where it is necessary to perform the control in the above manner, the same occurs. For example, the same problem occurs when an EL display element is manufactured by applying a predetermined amount of an EL (electroluminescence) material liquid to a predetermined region on a substrate by using a liquid discharge head (ink-jet type head). Also, a predetermined amount of a conductive thin film material liquid (a liquid containing a metal element) is applied to a predetermined region on a substrate by a liquid ejection head (ink-jet type head), and electrons formed by forming a conductive thin film on the substrate. A similar problem arises when manufacturing an emission element or a display panel including a plurality of such elements.
[0043]
Therefore, the present invention has been made in view of the above-described problems, and an object of the present invention is to make it possible to equalize the liquid discharge amount from each nozzle of a liquid discharge head (for example, an ink jet head) with a simple configuration. It is to be.
[0044]
Another object of the present invention is to make it possible to vary the liquid ejection amount independently for each nozzle with a simple configuration.
[0045]
Still another object of the present invention is to make it possible to simply control the amount of liquid applied to a predetermined area (for example, a pixel) on a substrate to a predetermined amount, and to make the amount of liquid applied to a predetermined area (a pixel) uniform. It is to be. In this manner, the liquid filling amount for each predetermined area (pixel) is made uniform, and a display panel such as a high-quality color filter or an EL display element in which each pixel satisfies required characteristics, an electron-emitting device, and the like. A display panel including an electron-emitting device is manufactured.
[0046]
[Means for Solving the Problems]
In order to solve the above-described problems and achieve the object, a liquid ejection device according to the present invention is a liquid ejection device that ejects the liquid to a medium by a liquid ejection head having a plurality of nozzles for ejecting the liquid. And a discharge amount changing unit that can individually change a liquid discharge amount from each of the plurality of nozzles of the liquid discharge head for each of the plurality of nozzles. The discharge amount variable unit is supplied to each of the plurality of nozzles. And a voltage control unit that can change the drive voltage value of the drive pulse.
[0047]
Further, a liquid discharge method according to the present invention is a liquid discharge method for discharging the liquid to a medium by a liquid discharge head having a plurality of nozzles for discharging the liquid, wherein a driving pulse supplied to the nozzle is driven. Using a liquid discharge head having only a nozzle connected to a discharge amount changing means capable of changing a liquid discharge amount from the nozzle by changing a voltage value, and having a step of discharging liquid from the liquid discharge head. And
[0048]
Further, a display device panel manufacturing apparatus according to the present invention uses a liquid discharge head having a plurality of nozzles for discharging a liquid, and discharges a liquid from the liquid discharge head onto a substrate to form a display device panel. An apparatus for manufacturing a panel for a display device to be manufactured, comprising: a discharge amount variable unit capable of individually changing a liquid discharge amount from each of a plurality of nozzles of the liquid discharge head for each of the plurality of nozzles; The means includes voltage control means for changing a drive voltage value of a drive pulse supplied to each of the plurality of nozzles.
[0049]
Further, a method of manufacturing a display device panel according to the present invention uses a liquid discharge head having a plurality of nozzles for discharging liquid, and discharges a liquid from the liquid discharge head onto a substrate to form a display device panel. A method for manufacturing a display device panel to be manufactured, comprising: using a liquid discharge head having only a nozzle connected to a discharge amount variable means capable of changing a drive voltage value of a drive pulse supplied to the nozzle; A liquid crystal panel is manufactured by discharging a liquid.
[0050]
Further, a liquid ejection device according to the present invention is a liquid ejection device including a liquid ejection head having a plurality of nozzles including a nozzle capable of changing a liquid ejection amount, and is adjacent to a predetermined nozzle capable of changing a liquid ejection amount. A discharge amount control unit configured to change a discharge amount control value including at least one of a voltage value and a pulse width of a drive pulse supplied to the predetermined nozzle in accordance with a change in discharge condition of an adjacent nozzle. I do.
[0051]
Further, a liquid discharge method according to the present invention is a liquid discharge method for discharging a liquid to a medium by a liquid discharge head having a plurality of nozzles including a nozzle capable of changing a liquid discharge amount. The voltage of the drive pulse supplied to the nozzles in accordance with at least one condition change of the number of nozzles to be performed, presence / absence of a defective nozzle, the direction of relative movement between the head and the substrate, and the speed of relative movement between the head and the substrate The method includes a discharge amount control step of changing a discharge amount control value including at least one of a value and a pulse width.
[0052]
Further, a method of manufacturing a display device panel according to the present invention uses a liquid discharge head having a plurality of nozzles including a nozzle capable of changing a liquid discharge amount, and discharges liquid from the liquid discharge head onto a substrate to display. A method of manufacturing a display device panel for manufacturing a device panel, comprising a combination of nozzles to be used, the number of nozzles to be used, presence or absence of a defective nozzle, a direction of relative movement between a head and a substrate, and a relative position between a head and a substrate. A step of changing a discharge amount control value including at least one of a voltage value and a pulse width of a drive pulse supplied to the nozzle in accordance with a change in at least one condition of a moving speed. .
[0053]
According to the above configuration, since the discharge amount changing means is connected to each of the plurality of nozzles and the discharge amount can be changed independently for each nozzle, the discharge amount between each nozzle can be easily made uniform, thereby It is possible to uniformly control the liquid filling amount in a predetermined area (for example, a pixel).
[0054]
In addition, the driving conditions such as the driving voltage value and the pulse width given to each nozzle are controlled in consideration of the discharge / non-discharge state of the adjacent nozzles and the number of nozzles used. Can be adjusted to a desired amount.
[0055]
Furthermore, since the amount of liquid applied to a predetermined area (eg, a pixel) on the substrate can be easily controlled to a predetermined amount, a high-quality color filter or EL in which the amount of liquid applied to a predetermined area (pixel) is uniformed. A display device panel such as a display element, an electron-emitting device, and a display panel including the electron-emitting device can be manufactured.
In the present invention, an ink jet head is used as the liquid discharge head, but a liquid other than ink may be discharged depending on an object to be manufactured. For example, when the object to be manufactured is a color filter, ink is ejected. When the object to be manufactured is an EL element, an EL material liquid is ejected. When the object to be manufactured is an electron-emitting element, a conductive thin film material liquid is ejected. Is discharged. As described above, the liquid discharge head defined in this specification includes a head that discharges a liquid other than ink, but since the ink jet method is used as the discharge type, in this specification, the liquid to be discharged is not ink. In both cases, the liquid ejection head may be referred to as an inkjet head.
[0056]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following embodiments, the ejection amount correction at the time of manufacturing a display device panel such as a color filter or an EL element, an electron-emitting device or a display panel including the device will be described. However, the present invention is not limited to the ejection amount correction in the above. The present invention may be applied when it is required to equalize the liquid ejection amount from each nozzle with a high accuracy and a simple configuration. For example, ink may be applied to a medium such as plain paper or an OHP sheet. The present invention can also be applied to ejection amount correction in a consumer printer that prints ejected images.
[0057]
Note that the display device panel defined in the present invention includes, for example, a color filter having a colored portion or an EL element having a light emitting portion formed of a self-emitting material, and a plurality of electron emitting devices having a conductive thin film portion. A panel used for a display device, including a display panel.
[0058]
Further, the color filter defined in the present invention includes a colored portion and a base, and is capable of obtaining output light whose characteristics are changed with respect to input light. As a specific example, there is a liquid crystal display device in which light of three primary colors of R, G, B or C, M, Y is obtained from the backlight by transmitting the backlight. Here, the base includes a substrate such as glass or plastic, and also includes a shape other than a plate.
[0059]
(1st Embodiment)
FIG. 1 is a schematic diagram showing a configuration of an embodiment of a color filter manufacturing apparatus.
[0060]
In FIG. 1, reference numeral 51 denotes an apparatus mount; 52, an XYθ stage disposed on the mount 51; 53, a color filter substrate set on the XYθ stage 52; 54, a color filter formed on the color filter substrate 53; R (red), G (green), and B (blue) inkjet heads for coloring the color filter 54; 58, a controller for controlling the overall operation of the color filter manufacturing apparatus 90; 59, a display unit of the controller; A teaching pendant (personal computer) 60 is a keyboard which is an operation unit of the teaching pendant 59.
[0061]
FIG. 2 is a configuration diagram of a control controller of the color filter manufacturing apparatus 90. Reference numeral 59 denotes a teaching pendant which is an input / output unit of the controller 58; 62, a display unit for displaying information on the progress of manufacturing and whether or not there is a head abnormality; (Keyboard).
[0062]
58 is a controller for controlling the overall operation of the color filter manufacturing apparatus 90; 65 is an interface for transferring data to and from the teaching pendant 59; 66 is a CPU for controlling the color filter manufacturing apparatus 90; , A RAM for storing production information and the like, an ejection control unit for controlling the ejection of ink into each pixel of the color filter, and an XYθ of the color filter manufacturing apparatus 90. A stage controller 90 for controlling the operation of the stage 52 is connected to the controller 58, and shows a color filter manufacturing apparatus that operates according to the instruction.
[0063]
FIG. 3 is a diagram showing a general structure of the inkjet head IJH.
[0064]
In the apparatus of FIG. 1, three ink jet heads 55 are provided corresponding to the three colors of R, G, and B. However, since these three heads have the same structure, respectively, FIG. FIG. 3 shows one of these three heads as a representative structure.
[0065]
In FIG. 3, the ink-jet head IJH is schematically constituted by a heater board 104 which is a substrate on which a plurality of heaters 102 for heating ink are formed, and a top plate 106 put on the heater board 104. . A plurality of discharge ports 108 are formed in the top plate 106, and a tunnel-shaped liquid path 110 communicating with the discharge ports 108 is formed behind the discharge ports 108. Each liquid channel 110 is separated from an adjacent liquid channel by a partition 112. Each of the liquid paths 110 is commonly connected to one ink liquid chamber 114 at the rear thereof, and ink is supplied to the ink liquid chamber 114 through an ink supply port 116. The liquid is supplied to each liquid channel 110.
[0066]
The heater board 104 and the top plate 106 are aligned so that each heater 102 comes to a position corresponding to each liquid channel 110, and assembled in a state as shown in FIG. Although only two heaters 102 are shown in FIG. 3, the heaters 102 are arranged one by one corresponding to each liquid path 110. When a predetermined drive pulse is supplied to the heater 102 in an assembled state as shown in FIG. 3, the ink on the heater 102 boils to form bubbles. The ink is pushed out from the ejection port 108 by the volume expansion of the bubble, and the ink is ejected. Therefore, by controlling the driving pulse applied to the heater 102 and adjusting the size of the bubble, it is possible to control the volume of ink ejected from the ejection port. Parameters to be controlled include electric power supplied to the heater.
[0067]
FIG. 4 is a diagram for explaining a method of controlling the ink ejection amount by changing the electric power applied to the heater.
[0068]
In this embodiment, two types of low voltage pulses are applied to the heater 102 in order to adjust the amount of ink ejected. The two types of pulses are a preheat pulse and a main heat pulse (hereinafter simply referred to as a heat pulse) as shown in FIG. The preheat pulse is a pulse for warming the ink to a predetermined temperature prior to actually discharging the ink, and is set to a value shorter than the minimum pulse width t5 required for discharging the ink. Therefore, no ink is ejected by this preheat pulse. The reason why the preheat pulse is applied to the heater 102 is to raise the initial temperature of the ink to a constant temperature so that the ink ejection amount when a constant heat pulse is applied later is always constant. Conversely, by adjusting the length of the preheat pulse, it is possible to adjust the temperature of the ink in advance, and to vary the ink ejection amount even when the same heat pulse is applied. In addition, by warming the ink prior to the application of the heat pulse, the ink has a function of accelerating the time rise of ink ejection when the heat pulse is applied and improving the responsiveness.
[0069]
On the other hand, the heat pulse is a pulse for actually discharging the ink, and is set to be longer than the minimum pulse width t5 necessary for discharging the ink. Since the energy generated by the heater 102 is proportional to the width of the heat pulse (application time), it is possible to adjust the variation in the characteristics of the heater 102 by adjusting the width of the heat pulse.
[0070]
It is to be noted that it is also possible to adjust the ink ejection amount by adjusting the interval between the preheat pulse and the heat pulse and controlling the heat diffusion state by the preheat pulse.
[0071]
As can be seen from the above description, the amount of ink ejected can be adjusted by adjusting the application time of the preheat pulse and the heat pulse, or by adjusting the application interval of the preheat pulse and the heat pulse. is there. Therefore, by adjusting the application time of the pre-heat pulse and the heat pulse and the application interval of the pre-heat pulse and the heat pulse as necessary, it is possible to freely adjust the ink ejection amount and the responsiveness of the ink ejection to the application pulse. It becomes possible. In particular, when coloring a color filter, it is desirable to make the coloring density (color density) between each filter element or within one filter element substantially uniform in order to suppress the occurrence of color unevenness. In some cases, control is performed so that the ink ejection amounts of the two colors are the same. If the ink ejection amount for each nozzle is the same, the amount of ink ejected to each filter element is also the same, so that the color density between the filter elements can be made substantially the same. In addition, unevenness in one filter element can be reduced. Therefore, when it is desired to adjust the ink ejection amount of each nozzle to the same value, the above-described control of the ink ejection amount may be performed.
[0072]
Next, FIG. 5 is a diagram showing a manufacturing process of the color filter. The manufacturing process of the color filter 54 will be described with reference to FIG.
[0073]
FIG. 5A shows the glass substrate 1 provided with the black matrix 2 constituting the light transmitting part 9 and the light shielding part 10. First, on the substrate 1 on which the black matrix 2 is formed, the ink itself is rich in ink receptivity, but under certain conditions (for example, light irradiation, or light irradiation and heating), the ink receptivity decreases. A resin composition having the property of curing under certain conditions is applied, and prebaking is performed as necessary to form a resin composition layer 3 (FIG. 5B). For forming the resin composition layer 3, a coating method such as spin coating, roll coating, bar coating, spray coating, or dip coating can be used, and is not particularly limited.
[0074]
Next, the resin layer on the light transmitting portion 9 is subjected to pattern exposure in advance by using the photomask 4 to partially reduce the ink receptivity of the resin layer (FIG. 5C). 3 is formed with an ink receptive portion 6 and a portion 5 with reduced ink receptivity (FIG. 5D). In addition, when the ink jet head ejects ink while scanning the substrate relatively plural times, a relative scan is performed by moving the substrate while fixing the ink jet head, and when the ink jet head is fixed by moving the substrate. Any of the cases where relative scanning is performed by moving is possible.
[0075]
Thereafter, R (red), G (green), and B (blue) color inks are ejected to the resin composition layer 3 by an ink jet method and colored at a time (FIG. 5 (e)). I do. Examples of the inkjet method include a method using thermal energy and a method using mechanical energy, and any of these methods can be suitably used. The ink to be used is not particularly limited as long as it can be used for ink jet printing. As the colorant of the ink, various kinds of dyes or pigments are required for each pixel of R, G, B. A transmission spectrum suitable for the transmission spectrum to be performed is appropriately selected. The ink ejected from the inkjet head may be in the form of droplets at the time of being attached to the resin composition layer 3, but is preferably not separated into droplets from the inkjet head and adhered in a columnar form. .
[0076]
Next, the colored resin composition layer 3 is cured by performing light irradiation or light irradiation and heat treatment, and a protective layer 8 is formed as necessary (FIG. 5F). In order to cure the resin composition layer 3, conditions different from those in the previous ink repellent treatment, for example, increasing the exposure amount in light irradiation, stricter heating conditions, or using light irradiation and heat treatment together And the like.
[0077]
6 and 7 are cross-sectional views showing the basic configuration of a color liquid crystal display device 30 incorporating the above color filters.
[0078]
The color liquid crystal display device is generally formed by combining the color filter substrate 1 and the counter substrate 21 and enclosing the liquid crystal compound 18. A TFT (Thin Film Transistor) (not shown) and a transparent pixel electrode 20 are formed in a matrix inside one substrate 21 of the liquid crystal display device. Further, inside the other substrate 1, a color filter 54 in which RGB color materials are arranged at a position facing the pixel electrode is disposed, and a transparent counter electrode (common electrode) 16 is entirely disposed thereon. It is formed. The black matrix 2 is usually formed on the color filter substrate 1 side (see FIG. 6), but is formed on the opposite TFT substrate side in a BM (black matrix) on-array type liquid crystal panel (see FIG. 7). Further, an alignment film 19 is formed in the image of both substrates, and the liquid crystal molecules can be aligned in a certain direction by rubbing the alignment film 19. Polarizing plates 11 and 12 are adhered to the outside of each glass substrate, and the liquid crystal compound 18 fills the gap (about 2 to 5 μm) between these glass substrates. As a backlight, a combination of a fluorescent lamp (not shown) and a scattering plate (not shown) is generally used, and the display is performed by making a liquid crystal compound function as an optical shutter for changing the transmittance of the backlight. I do.
[0079]
An example in which such a liquid crystal display device is applied to an information processing device will be described with reference to FIGS.
[0080]
FIG. 8 is a block diagram showing a schematic configuration in a case where the above-described liquid crystal display device is applied to an information processing device having functions as a word processor, a personal computer, a facsimile device, and a copying device.
[0081]
In the figure, reference numeral 1801 denotes a control unit for controlling the entire apparatus, which includes a CPU such as a microprocessor and various I / O ports, outputs control signals and data signals to each unit, and controls and data signals from each unit. Is input to perform control. Reference numeral 18002 denotes a display unit on which various menus, document information, image data read by the image reader 1807, and the like are displayed. Reference numeral 1803 denotes a transparent pressure-sensitive touch panel provided on the display unit 1802. By pressing the surface of the touch panel with a finger or the like, it is possible to input items, coordinate positions, and the like on the display unit 1802.
[0082]
Reference numeral 1804 denotes an FM (Frequency Modulation) sound source unit that stores music information created by a music editor or the like as digital data in the memory unit 1810 or the external storage device 1812, and reads out the music information from the memory or the like to perform FM modulation. is there. The electric signal from the FM sound source unit 1804 is converted into an audible sound by the speaker unit 1805. The printer unit 1806 is used as an output terminal of a word processor, a personal computer, a facsimile machine, and a copying machine.
[0083]
Reference numeral 1807 denotes an image reader unit which photoelectrically reads and inputs document data, which is provided in a document transport path and reads various types of documents other than facsimile documents and copy documents.
[0084]
Reference numeral 1808 denotes a facsimile (FAX) transmission / reception unit for facsimile transmission of original data read by the image reader unit 1807 and reception and copying of a transmitted facsimile signal, and has an external interface function. Reference numeral 1809 denotes a telephone unit having various telephone functions such as a normal telephone function and an answering machine function.
[0085]
A memory unit 1810 includes a ROM that stores a system program, a manager program, other application programs, a character font, a dictionary, and the like, an application program and document information loaded from an external storage device 1812, and a video RAM. .
[0086]
Reference numeral 1811 denotes a keyboard unit for inputting document information, various commands, and the like.
[0087]
Reference numeral 1812 denotes an external storage device using a floppy (registered trademark) disk, a hard disk, or the like as a storage medium. The external storage device 1812 stores document information, music or audio information, user application programs, and the like.
[0088]
FIG. 9 is a schematic overview of the information processing apparatus shown in FIG.
[0089]
In the figure, reference numeral 1901 denotes a flat panel display using the above-described liquid crystal display device, which displays various menus, graphic information, and document information. By pressing the surface of the touch panel 1803 with a finger or the like on the display 1901, coordinate input and item designation input can be performed. A handset 1902 is used when the device functions as a telephone. The keyboard 1903 is detachably connected to the main body via a cord, and can perform various document functions and various data inputs. The keyboard 1903 is provided with various function keys 1904 and the like. Reference numeral 1905 denotes a slot for inserting a floppy (registered trademark) disk into the external storage device 1812.
[0090]
Reference numeral 1906 denotes a sheet placement unit on which a document read by the image reader unit 1807 is placed. The read document is discharged from the rear of the apparatus. In the case of receiving a facsimile or the like, printing is performed by the inkjet printer 1907.
[0091]
When the information processing apparatus functions as a personal computer or a word processor, various information input from the keyboard unit 1811 is processed by the control unit 1801 according to a predetermined program, and output as an image to the printer unit 1806.
[0092]
When functioning as a receiver of a facsimile apparatus, facsimile information input from a facsimile transmission / reception unit 1808 via a communication line is subjected to reception processing by a control unit 1801 according to a predetermined program, and output to a printer unit 1806 as a received image.
[0093]
When functioning as a copying apparatus, a document is read by an image reader unit 1807, and the read document data is output as a copy image to a printer unit 1806 via a control unit 1801. When functioning as a receiver of a facsimile apparatus, original data read by the image reader unit 1807 is transmitted by a control unit 1801 according to a predetermined program, and then transmitted to a communication line via a facsimile transmission / reception unit 1808. .
[0094]
The information processing apparatus described above may be of an integrated type in which an ink jet printer is built in the main body as shown in FIG. 10, and in this case, portability can be further improved.
[0095]
In the figure, parts having the same functions as those in FIG. 9 are denoted by the corresponding reference numerals.
[0096]
FIG. 18 shows the configuration of a discharge amount control circuit according to this embodiment. In FIG. 18, all of the nozzles are connected to a head nozzle drive circuit (voltage changing means including a DA converter and an amplification circuit), and all the nozzles are discharge amount changeable nozzles.
[0097]
In FIG. 18, a drawing control unit 311 supplies image serial data 319 to an image data serial / parallel conversion circuit 322, supplies a data latch signal 318 to an image data latch output circuit 321, and supplies a drive timing to a drive signal pattern generation circuit 320. The signal 317 is supplied. The drawing control unit 311 gives a command of a set control voltage to the head nozzle drive circuit 304. The ejection amount is controlled based on various signals from the drawing control unit 311. Specifically, first, the image serial data 319 for selecting ejection / non-ejection of each nozzle (ch) is converted into parallel data by the image data serial / parallel conversion circuit 322. The converted data is latched in the image data latch circuit 321 by the data latch signal 318. Each nozzle is selected based on the latch data. Thereafter, a drive timing signal 317 from the drive signal pattern generation circuit 320 is supplied to the nozzle drive circuit 304, and based on the drive timing signal, the drive signal is sent from the nozzle drive circuit 304 to the ejection drive element 309 of the selected nozzle. Is supplied.
[0098]
The ejection drive element corresponds to a heater in a bubble jet (registered trademark) type head. In a piezo-type head, it corresponds to a piezoelectric element used for a discharge driving side wall of an ink chamber of a nozzle.
[0099]
The discharge amount control circuit controls the discharge amount by controlling the voltage of the drive signal supplied to the nozzles. This voltage control is performed by the head nozzle drive circuit 304. The head nozzle drive circuit 304 includes a voltage control circuit 313, a signal reference voltage circuit 314, an output voltage amplifier circuit 315, and an output charge / discharge circuit 316. The voltage control circuit 313 and the signal reference voltage circuit 314 receive a command of the set control voltage value from the drawing control unit 311 and set the drawing control voltage of each nozzle. Specifically, the signal reference voltage circuit 314 sets the center value of the drive voltage, and the signal voltage control circuit 313 sets the correction voltage for the center value of the drive voltage of each nozzle. That is, the drive voltage is corrected by the signal voltage control circuit 313 to change the voltage value.
[0100]
The output voltage amplification circuit 315 supplies a drive voltage to the output charge / discharge circuit 316 based on the corrected voltage value.
[0101]
As described above, the corrected drive signal is output and supplied to each nozzle from the output charge / discharge circuit 316, and the discharge amount from the nozzle is controlled. Note that the head nozzle drive circuit 304 that performs voltage control is for changing the voltage value of the drive signal, and thus can be called a substation circuit.
[0102]
FIG. 19 shows a case where the voltage value of the drive signal given to each nozzle (nozzles 1 to 3) is corrected, and FIG. 20 shows a drawing state before and after the drive voltage is corrected. The state before correction of any nozzle 1 (reference numeral 324), nozzle 2 (reference numeral 325), and nozzle 3 (reference numeral 326) in FIG. 19 corresponds to “before correction” in FIG. In (), the nozzle 2 has a target discharge amount, the nozzle 1 has a discharge amount smaller than the target discharge amount, and the nozzle 3 has a discharge amount larger than the target discharge amount.
[0103]
For this reason, the drive signal voltage to be supplied to each nozzle is a drive voltage (V2 + Δv1) of a value corrected to be higher than the drive voltage V2 of the nozzle 2 (reference numeral 325) by Δv1 for the nozzle 1 (reference numeral 324). Is supplied to the nozzle 3 (reference numeral 326), and a drive voltage (V2-Δv2) having a value corrected by Δv2 lower than the drive voltage V2 of the nozzle 2 (reference numeral 325) is supplied.
[0104]
The state of the ejection amount after the voltage correction as described above corresponds to “after correction” in FIG.
[0105]
Next, FIG. 21 shows an ejection amount correction sequence for matching the ejection amount from each nozzle to a target value.
[0106]
In controlling the ejection amount of each nozzle, first, a variable characteristic representing the relationship between the ejection amount of each nozzle and a variable condition (here, drive voltage) is obtained.
[0107]
This variable characteristic is obtained according to the procedure of (1)-(3) in FIG. First, as described in (1), ink is ejected at a plurality of different drive voltage values which are drive voltage values within a range usable at the time of drawing and which are obtained by changing the drive voltage value. That is, a plurality of ink dots corresponding to different drive voltage values are drawn. For example, at least two or more points are set for a voltage value with a small discharge amount and a voltage value with a large discharge amount, and drawing is performed on a glass substrate under the condition of a drive signal having the same pulse width used in drawing. This drawing of ink dots is performed individually for all nozzles.
[0108]
Next, as described in (2), the amount of transmitted light of the ink dots drawn on the glass substrate is measured, and each ink ejection amount is obtained based on the measurement result.
[0109]
Next, as described in (3), the discharge amount when the voltage is varied is determined from the difference between the two points Vd2 and Vd1 where the discharge amount is large and the point Vd1 where the discharge amount is small. The amount of change (here, referred to as correction sensitivity K) is calculated. Note that the relationship between the voltage value and the corresponding ink ejection amount is as shown in FIG. 22, and the correction sensitivity K corresponds to the slope of the illustrated straight line. Here, the ejection amount is measured for each nozzle when the drive signal voltage is set to 18 v, 20 v, and 24 v.
[0110]
Next, as described in (4), the ejection amounts of all the nozzles under the driving conditions used in actual drawing are measured, and the average ejection amount Vdx of all the nozzles is calculated. The correction amount VdnNY is calculated for each nozzle based on the difference between the discharge amount VdnN of each nozzle and the average discharge amount Vdx and the correction sensitivity K. The correction amount VdnNY thus obtained is set in the signal voltage control circuit 313 shown in FIG. After the setting, ink ejection is performed, and the correction processing of the items (4) and (5) in FIG. 21 is performed until the drawing result is corrected to the target ejection amount.
[0111]
Next, FIG. 23 shows the relationship between the absorbance variation (discharge amount variation) before the correction sequence shown in FIG. 21 and the absorbance variation (discharge amount variation) after the correction sequence is executed. . The ejection amount variation data before the correction is data indicating the ejection amount variation when all the driving voltages are set to 19 V, and the variation reaches + 4%. On the other hand, as shown in FIG. 21, an average ejection amount of all nozzles is calculated, and a correction amount of each nozzle is calculated from a difference between the average ejection amount and the ejection amount of each nozzle and the correction sensitivity K. When the correction is performed using the correction amount, the ejection amount variation after the correction is suppressed to within ± 1%.
In the case of the present embodiment, the discharge amount can be varied by 1% by setting the signal setting voltage to a setting resolution of about 100 mV, and the discharge rate can be controlled to about 0.5% by further reducing the setting resolution. It is possible.
[0112]
The amount of ink discharged from each nozzle is corrected as described above, and a case where the correction of the amount of discharged ink is used when drawing a color filter will be described. FIG. 16 is a diagram illustrating an arrangement pattern of pixels of a color filter, and FIG. 17 is a diagram illustrating a drawing state after performing ejection amount correction. Here, the amount of ink discharged from each nozzle is individually controlled so that the amount of ink discharged from each nozzle matches the target value, so that the amount of ink filled in each pixel is made uniform. More specifically, as shown in FIG. 17, the drive voltage is corrected so that the ink ejection amount from each nozzle becomes the same, thereby making the ejection amount per droplet ejected from each nozzle uniform, The ink filling amount in the pixel is made equal. According to this configuration, since the ink filling amount in the pixel can be made the same, a high-quality color fill without density unevenness can be manufactured.
[0113]
In the case where a non-discharge nozzle that cannot discharge ink occurs among the used nozzles, as shown in the right two pixels in FIG. By compensating for the decrease in the ink ejection amount accompanying the above, the amount of ink ejection into the pixel is corrected to be the target amount (the amount of ink that should be originally ejected into one pixel). More specifically, in FIG. 17, five nozzles are opposed to one pixel, and the ink filling of one pixel is completed by ejecting one drop of ink from each of the five nozzles (3 in the left side of the figure). Pixel). However, if one of the five nozzles becomes a non-discharge nozzle, one pixel is formed by four ink droplets from the four nozzles (see the second pixel from the right). If the ink ejection amount is set to be the same as in the normal case where five ink droplets are ejected, the ink filling amount in the pixel naturally decreases. Therefore, the amount of ink ejected per droplet is increased so that the target amount can be achieved even with four ink droplets. In the case of this example, the ink ejection amount per droplet may be increased to ５ times as compared with the normal case where five droplets are ejected to one pixel. Similarly, in the case where two of the five nozzles corresponding to one pixel are non-discharge nozzles and form one pixel with three drops of ink (see the first pixel from the right), the normal case In comparison with this, the amount of ink ejected per droplet is set to 5/3 times, and the amount of ink ejected into the pixel may be made equal to the target amount. In addition, even when a non-discharge nozzle is generated as described above and the ink discharge amount is increased, the drive voltage of each nozzle is set such that the ink amount per droplet discharged from each nozzle is made uniform. .
[0114]
Note that, unlike the color filter of FIG. 17, the present invention can be similarly applied to a case where a color filter in which pixel rows are arranged at right angles to the scanning direction of the head is manufactured.
[0115]
Here, the effect of the ejection amount correction at the time of actual color filter drawing will be described.
[0116]
FIG. 24 shows a state of variation in the discharge amount of each nozzle before correction. This is an example of the ejection amount distribution for an arbitrary head. As shown in the drawing, in the state before the correction, the variation in the discharge amount among the nozzles is large.
[0117]
On the other hand, FIG. 25 shows a state of the ejection amount variation after the correction when the ejection amount correction is performed on the nozzles used for the drawing based on the ejection amount correction method. As shown in the drawing, the variation in the ejection amount after correction can be suppressed to ± 1% or less for the nozzles used at the time of drawing, and by drawing under these conditions, a high-quality color filter with less unevenness can be manufactured.
[0118]
In the above embodiment, a voltage control means capable of setting a voltage value of a drive signal so as to be changeable is used as an ejection amount varying means for varying an ink ejection amount, and this voltage control means is associated with each nozzle. The ejection amount of each nozzle is varied by changing the set voltage of the drive signal. However, the ejection amount varying means is not limited to the voltage control means. For example, the discharge amount may be adjusted by changing the pulse width of the drive signal while keeping the voltage constant. In the case of this mode, a drive pulse control means capable of setting the pulse width of the drive signal so as to be changeable is used as the discharge amount variable means, and this drive pulse control means is provided corresponding to each nozzle.
Further, it is also possible to control the ejection amount under variable conditions in which the drive voltage and the pulse width of the drive signal are arbitrarily combined for each nozzle independently.
[0119]
As described above, according to the first embodiment, the discharge amount varying means (specifically, the voltage control means capable of changing the drive voltage value of the drive pulse supplied to each of the plurality of nozzles) is provided for each of the plurality of nozzles. ) Is connected and the discharge amount can be changed independently for each nozzle, so that the discharge amount between each nozzle can be easily made uniform, and thereby the ink filling amount in the pixel can be controlled uniformly. It becomes. Thus, there is no need to adjust the ink ejection interval as in shading correction. In the case of shading correction, the amount of ink filling in one pixel is corrected by adjusting the ink discharge interval (the number of ink discharges). It may not be possible to match the value with high precision. However, in the first embodiment, the driving voltage and the driving pulse of each nozzle can be adjusted to change the ink ejection amount per droplet, so that the ink filling amount in one pixel matches the target value with high accuracy. It becomes possible. Accordingly, a high-quality color filter with less variation in ink filling amount between pixels can be manufactured as compared with a case where a color filter is manufactured and manufactured by shading correction.
[0120]
(Modification of First Embodiment)
In this modified example, a method of correcting a discharge amount when manufacturing a plurality of color filters having different sizes from one glass substrate will be described.
[0121]
FIG. 26 is a diagram illustrating a case where a plurality of color filters (a color filter having a pixel A and a color filter having a pixel B) having different pixel sizes are manufactured from one glass substrate.
[0122]
When ink is ejected to pixels having different sizes, it is necessary to change the amount of ink ejected from the nozzles according to the size of the pixel. In the case of FIG. Since the nozzle 9 discharges ink to both the pixel A and the pixel B, the discharge amount must be changed when discharging ink to each pixel. Here, No. Although it has been described that only the nozzle of No. 9 performs drawing on both pixels, in actuality, No. 9 is used. In the nozzles other than the nozzle No. 9, drawing is performed on both pixels. In addition, if the types of color filters to be manufactured are different, the nozzles that perform drawing on a plurality of types of pixels are naturally different. In order to cope with various forms, it is necessary to have a configuration in which the ejection amount is variable independently for all nozzles. In this modification, although the amount of ink ejected from each nozzle is individually controlled for each nozzle, the amount of ink ejected from all nozzles is not made uniform. However, when drawing is performed on pixels of the same size, control is performed so that the same ejection amount is obtained. That is, the ejection amount control is executed such that the ink ejection is performed at the ejection amount A to the pixel A, and the ink ejection is performed at the ejection amount B to the pixel B. As described above, the point of equalizing the ink ejection amount for pixels of the same size is the same as in the first embodiment.
[0123]
FIG. 27 is a diagram illustrating a case where the scanning direction of the inkjet head is set to the longitudinal direction of the pixel. In this case as well, The nozzle No. 5 draws both the pixel A and the pixel B, so it is necessary to change the ink ejection amount per droplet. In this case, it is necessary to change not only the ink ejection amount but also the number of scans. That is, the pixel A is scanned four times, while the pixel B is scanned twice.
[0124]
FIG. 28 also shows a case where both the number of times of drawing and the discharge amount must be changed for each nozzle.
[0125]
As described above, according to this modification, the ejection amount changing means is configured to correspond to each nozzle so that the ejection amount can be changed independently for each nozzle. On the other hand, even when ink is ejected, the ink can be ejected with an ejection amount corresponding to the size of the pixel, so that any pixel can be filled with the target amount of ink. This makes it possible to obtain a plurality of types of color filters having different pixel sizes from a single substrate by a simple method. In other words, it is possible to realize multiple printing of a plurality of types of color filters having different pixel sizes by a simple method.
[0126]
(Second embodiment)
As described above, the ink discharge amount from each nozzle is affected by the discharge / non-discharge state of the adjacent nozzle and the number of nozzles used. Therefore, the second embodiment is characterized in that in consideration of these effects, driving conditions such as a driving voltage value and a pulse width to be applied to each nozzle are controlled. The other configuration (for example, the discharge amount control circuit shown in FIG. 18) is the same as that of the first embodiment, and the description thereof will be omitted. That is, also in the second embodiment, the ejection amount varying means is provided for each nozzle so that the ink ejection amount can be changed independently for each nozzle.
[0127]
FIG. 29 is a drawing flowchart of the color filter drawing showing the features of the present embodiment. In FIG. 29, the setup change means that the size and resolution of the filter 54 to be created, the shape and size of the glass substrate 53 are changed (step S501). If any one of these conditions changes, the combination of nozzles used changes. The image data to be drawn by each nozzle is changed accordingly (step S502).
[0128]
By the way, when the combination of the nozzles used changes, as described in the section of the problem, the nozzles for which the use / non-use conditions of the adjacent nozzles change, even if the ink is electrically ejected under the same driving conditions, The discharge amount changes due to the influence of the adjacent nozzle crosstalk. Therefore, taking into account the influence of the adjacent nozzle crosstalk, a discharge amount control value corresponding to the influence is set (step S503). Specifically, when the nozzle use condition as shown in FIG. 35 (b) is changed to the nozzle use condition as shown in FIG. 35 (c), the adjacent nozzles (ch11, 13) adjacent to the target nozzle (ch12) The condition of use / non-use is changed, and accordingly, adjacent crosstalk is affected. In this case, the discharge amount of the nozzle of interest decreases. Therefore, a condition (discharge amount control value) necessary to compensate for this decrease is set. Therefore, the ejection amount control value may be any condition value that can correct a change in the ejection amount due to the influence of adjacent crosstalk, such as a drive voltage value and a pulse width. This discharge amount control value is obtained in advance.
[0129]
After setting the ejection amount control value as described above, filter drawing is performed (step S504). That is, as long as the adjacent nozzle crosstalk condition is not changed, the filter drawing can be repeatedly performed using the same discharge amount control value (step S505 Yes).
[0130]
On the other hand, if any one of the size, resolution, shape, size, and the like of the filter 54 to be formed is switched, the influence of the adjacent nozzle crosstalk can be obtained even if the same inkjet head is electrically discharged under the same driving conditions. Since the discharge amount changes, the discharge amount control value corresponding to the change is set again (Yes in step S506).
[0131]
According to the above configuration, even if the use conditions of the nozzles are changed, the influence of the adjacent nozzle crosstalk is hardly affected, so that the discharge amount of the nozzles does not change, and the ink on each pixel of the color filter is not changed. The discharge amount is also kept constant.
[0132]
In a case where ink is ejected to one pixel of the filter by drawing a plurality of times using a single nozzle or a plurality of nozzles, it is necessary to maintain a constant amount of ejection on a specific pixel of the filter. However, it is not always necessary to keep each ejection amount of each nozzle constant. In other words, the ink ejection amount during any one of the multiple ejections may be adjusted so that the total ejection amount of the plurality of ejections for a specific pixel becomes the target amount.
[0133]
FIG. 30 is a drawing flowchart showing another embodiment. FIG. 30 shows the response when the number of used nozzles condition is switched. For example, assume that there is an inkjet head in which 160 nozzles are arranged in one row. When drawing a color filter using this head, drawing is performed using all 160 nozzles. However, due to the relationship between the size of the color filter and the number of nozzles, the drawing width is used when drawing the last scanning area. May be reduced, resulting in a surplus nozzle that is not used. In this case, only at the time of the last scanning drawing, for example, drawing is performed using only 100 nozzles out of 160 nozzles.
[0134]
It is assumed that there are a case where drawing is performed with the number of used nozzles P (160) and a case where drawing is performed with the number of used nozzles Q (100). In the case of Q, the first to 100th nozzles are used and 101 The 160th to 160th are not used. Here, paying attention to the 100th nozzle, in the case of P, the ink is ejected from both adjacent nozzles substantially simultaneously, so that the ejection amount from the 100th nozzle is large. On the other hand, in the case of Q, the 99th nozzle ejects ink substantially simultaneously, but the 101st nozzle is not used. Therefore, the ejection amount of the 100th nozzle (target nozzle) is smaller than in the case of P. Become.
[0135]
Therefore, in the case of P and the case of Q, it is necessary to reset the ejection amount control value set for each nozzle as shown in FIG. For this control value, test drawing is performed in advance under the respective conditions of P and Q, the ejection amount is measured (steps S511 and S513), and the control value is calculated from the result (steps S512 and S514). That is, for the 100th nozzle, the ejection amount of the target nozzle can be kept constant by switching to a correction value that increases the ejection amount only at the time of drawing the last scanning area. In steps 511 to S514, data is created for a plurality of combinations of the values of P and Q.
[0136]
In the steps after step S514, the image data is changed in step S515 according to the color filter to be manufactured. In step S516, the ejection amount control value of each nozzle is determined based on the data obtained in steps S512 and 514. After setting, the color filter is drawn in step S517. In steps S518 and S519, it is determined whether to perform further color filter drawing with the same number of nozzles as the nozzles used up to now, or to change the nozzles and draw with another number of nozzles. If the drawing is continued, the ejection amount control value is not changed. If the drawing is performed with another number of nozzles, the ejection amount control value is changed, and the process returns to step S515.
[0137]
As described above, by appropriately switching the discharge amount control value in accordance with the change in the number of nozzles used, even if the degree of influence of the adjacent nozzle crosstalk is changed, the discharge amount does not need to be changed. The amount of ink ejected onto the pixel is kept constant.
[0138]
FIG. 31 is a drawing flowchart showing still another embodiment. FIG. 31 shows the correspondence when the combination of nozzles used is switched for each drawing pass. More specifically, consider a case where nozzles used are different between a first pass in which the head passes through the substrate for the first time to draw and a second pass in which the head passes through the substrate for the second time to draw.
[0139]
Here, attention is paid to one nozzle A that is used in both the first pass and the second pass. The condition of whether or not the nozzle adjacent to the nozzle A (target nozzle) is used may be different between the first pass and the second pass. That is, the nozzles adjacent to the nozzle A are used in the first pass, and the nozzles adjacent to the nozzle A are not used in the second pass, or vice versa. In this case, the discharge amount of the nozzle A differs between the first pass and the second pass due to the influence of the adjacent nozzle crosstalk described with reference to FIG.
[0140]
Therefore, the discharge amount control value of the nozzle A is set to a different value in each of the first pass and the second pass so that the discharge amount of the nozzle A is equal to a predetermined desired value in the first pass and the second pass. Set. Such a change in the discharge amount control value is performed for all nozzles whose adjacent nozzle crosstalk changes between the first pass and the second pass.
[0141]
That is, as shown in FIG. 31, by appropriately changing and setting the discharge amount control value in accordance with the nozzle discharge conditions adjacent to each nozzle for each pass, the discharge amount of each nozzle in the first pass and the second pass Are equalized, and the nozzle discharge amount can be made uniform.
[0142]
By such a method, even when the combination of nozzles to be used is changed for each drawing pass, the discharge amount of each nozzle is kept constant, and the discharge amount of the filter to the pixels is also kept constant.
[0143]
More specifically, drawing of the filter is started in step S521 in FIG. 31, and when one scan is completed, the position of the inkjet head is shifted in the sub-scanning direction in step S522. At this time, if the pattern for the first pass is acceptable (Yes in step S523), the image pattern for the first pass is read in step S525, and the optimal first pattern is set for each nozzle used in the first pass in step S526. Is set, and the color filter is drawn in step S527. On the other hand, if it is determined in step S523 and step S524 that the pattern is for the second pass, the image pattern for the second pass is read in step S528, and each nozzle used in the second pass is read in step S529. Then, an optimal second discharge amount control value is set, and drawing of a color filter is performed in step S530.
[0144]
According to this configuration, when the used nozzle is different between the passes, the discharge amount control value is appropriately changed between the passes, so that the use status of the adjacent nozzle changes between the passes (noted Also in the nozzle A), the discharge amount does not change.
[0145]
FIG. 32 is a drawing flowchart showing still another embodiment. FIG. 32 shows a case where one nozzle B of the inkjet head becomes defective and drawing is performed without using the nozzle B.
[0146]
There are several methods of drawing a color filter without using the nozzle B. In this case, the discharge amount for one nozzle is fixed for all the nozzles, and the pixel that the nozzle B should originally draw is replaced with another nozzle ( A case in which the nozzles are complemented by nozzles A and C which are adjacent nozzles of the non-discharge nozzle B will be considered.
[0147]
When the nozzle B is not used, the discharge amount of the adjacent nozzles A and C is reduced as compared with the case where the nozzle B is used, due to the principle of the adjacent nozzle crosstalk in FIG.
[0148]
Therefore, as shown in FIG. 32, the defective nozzle B is specified, the defective nozzle B is treated as non-discharge, and test drawing is performed again (step S531), and the ejection amount uniformization correction coefficients of the adjacent nozzles A and C are calculated. It is obtained again (step S532), the ejection amount equalization correction coefficient is set again (step S533), and the filter drawing is restarted (step S534). At this time, the discharge amount control values of the nozzles A and C are set so that the discharge amounts of the nozzles A and C have the same desired values as the other nozzles. At the time of drawing in step S534, the drawing abnormality is continuously detected (step S535). If the drawing abnormality is detected (step S536 Yes), the defective nozzle is specified in step S538. The defective nozzle specified in S539 is treated as non-ejection, and the process returns to Step S531. If no drawing abnormality is detected in step S536, the process proceeds to step S537, and steps S531 to S537 are repeated until the production of the number of filters of the planned lot is completed.
[0149]
According to the method shown in FIG. 32, even when the nozzle B becomes defective and the filter drawing is performed without using the nozzle B, the ejection amounts of the adjacent nozzles A and C are kept constant, and the amount of the filter applied to the pixels is reduced. The discharge rate is kept constant.
[0150]
FIG. 33 is a drawing flowchart showing still another embodiment. FIG. 33 shows a case where the landing position of each nozzle is corrected by slightly shifting the ejection timing of each nozzle back and forth.
[0151]
Even if all the nozzles are driven at the same time, the landing positions of the nozzles may vary due to manufacturing accuracy variations of the ink jet head. In this case, it is necessary to correct the landing position of each nozzle by slightly shifting the drive timing of each nozzle back and forth. Here, such a case is assumed.
[0152]
Even if the same nozzle B is used, if the driving timings of the nozzles A and C adjacent to the nozzle B are shifted back and forth, as described with reference to FIG. The discharge amount changes. In order to compensate for this error amount, the ejection amount of the nozzle B is measured under the condition that the driving timings of the nozzles A and C are shifted before and after, and the ejection amount control value of the nozzle B is obtained from the measured value. At this time, the discharge amount control value of the nozzle B is set so that the discharge amount of the nozzle B becomes the same desired value as the other nozzles.
[0153]
Note that even when drawing is performed using the same ink jet head, the moving speed (scanning speed) of the ink jet head at the time of drawing changes if, for example, the shape, size, and material of the filter are different. Along with this, the ejection timing for compensating the landing position also changes. Then, the degree of influence of adjacent crosstalk changes, and the ejection amount also changes. If the moving speed is reduced, the deviation of the driving timing of the adjacent nozzle becomes large, and in this case, the ejection amount generally decreases. Since the amount of decrease is determined when the moving speed of the inkjet head is determined, it is possible to determine an ejection amount control value such that the ejection amount of each nozzle becomes a constant desired value.
[0154]
By the method of FIG. 33, even when the moving speed of the ink jet head changes and the shift amount of the discharge timing for correcting the landing position changes accordingly, the discharge amount of each nozzle is kept constant. The discharge amount of the filter to the pixels is kept constant.
[0155]
Specifically, first, the first test drawing is performed (step S541), the landing position of each nozzle is measured (step S542), and the landing position is corrected based on the measurement result (step S543). Then, the second test drawing is performed (step S544), the ejection amount of each nozzle is measured (step S545), and the ejection amount control value of each nozzle is set (step S546). Then, the filter is drawn (step S547). If the filter is to be drawn continuously under the conditions (step S548 Yes), the filter drawing is repeated. If the filter is to be drawn under another condition (step S549 Yes), the process returns to step S541, and the same operation is repeated.
[0156]
FIG. 34 is a drawing flowchart showing still another embodiment. FIG. 34 shows a case where the landing position of each nozzle is corrected by slightly shifting the ejection timing of each nozzle back and forth, and further, a case where the drawing is performed on the filter in each of the forward path and the backward path of the movement of the ink jet head.
[0157]
As in the case of FIG. 33, even if all the nozzles are driven at the same time, the landing positions of the nozzles may vary due to variations in the manufacturing accuracy of the ink jet head. Correct the landing position for each nozzle.
[0158]
In order to shorten the drawing time of the filter drawing, it is desired to perform the drawing in both the going and returning directions of the reciprocating movement of the inkjet head. In this case, the ejection timing shift amount for correcting the landing position of a certain nozzle B is reversed in positive and negative directions. That is, for example, if the nozzle B is advanced by 1 μsec with respect to the nozzles A and C in the forward drawing to correct the landing position of the nozzle B, the nozzle B is moved to the nozzles A and C in the return drawing. The nozzle C must be driven with a delay of 1 μsec. For the nozzle B, the discharge amount of the nozzle B differs between when the driving of the adjacent nozzles A and C is 1 μsec earlier and later, and generally the discharge amount becomes smaller when 1 μsec later.
[0159]
In FIG. 34, the forward test drawing and the return test drawing of the ink jet head are performed in advance, and the discharge amount control value of each nozzle in each case is obtained (steps S551 to S557). At the time of forward drawing (step S559 Yes), the discharge amount control value of the forward direction drawing is set (steps S562 to S563), and at the time of return drawing (step S561 Yes), the discharge amount control value of the backward direction drawing. Is set (steps S565 to S566). As described above, it is possible to compensate for the influence of the crosstalk between the adjacent nozzles on the way and the way back, so that the ejection amount at the time of the drawing and the ejection amount at the time of the drawing on the same nozzle are equal.
[0160]
According to the method shown in FIG. 34, the ejection timing of each nozzle is slightly shifted back and forth to correct the landing position of each nozzle. The discharge amount of the nozzle is kept constant, and the discharge amount of the filter to the pixel is kept constant.
[0161]
As described above, according to the second embodiment, the discharge amount control value (drive voltage value) is changed according to the change in the discharge condition, taking into account the influence of the adjacent nozzle crosstalk caused by the change in the discharge condition of the nozzle. And the pulse width, etc.) are appropriately changed, so that the influence of the adjacent nozzle crosstalk is hardly affected, and the ejection amount of each nozzle is not changed. In particular, when controlling the discharge amount of the target nozzle, the discharge condition of the adjacent nozzle adjacent to the target nozzle (adjacent nozzle is driven at the same time, driven at a nearby time, or not driven) is changed. Since the discharge amount control value of the nozzle of interest is appropriately switched, the discharge amount of each nozzle can always be kept uniform, and an image without unevenness can be drawn.
[0162]
When a color filter is manufactured by this method, a high-quality color filter without unevenness can be manufactured stably with a high yield, and it is possible to efficiently cope with a change in product specifications.
[0163]
(Other embodiments)
The present invention is not limited to the above embodiments, and various applications are possible.
[0164]
For example, the colored portion constituting the color filter is not limited to being formed on the glass substrate, but may be formed on the pixel electrode to function as a color filter. In order to form a colored portion on the pixel electrode, an ink receiving layer is formed on the pixel electrode and ink is applied to the receiving layer, and coloring is performed using a resin ink mixed with a color material on the pixel electrode. There is the case of direct hit.
[0165]
Further, the present invention is not limited to the production of the above-described color filter, but is applicable to, for example, the production of an EL (electroluminescence) display element. An EL display element has a configuration in which a thin film containing a fluorescent inorganic or organic compound is sandwiched between a cathode and an anode, and electrons and holes are injected into the thin film and recombined to form excitons. And emits light using emission of fluorescence or phosphorescence when the exciton is deactivated. Among the fluorescent materials used in such EL display elements, materials that emit red, green, and blue light are produced by the manufacturing apparatus of the present invention (including the liquid discharge head and the discharge control circuit of FIG. A self-luminous full-color EL display element can be manufactured by patterning an element substrate such as a TFT by an inkjet method using a manufacturing apparatus including a liquid applying apparatus capable of executing the flow of 29 to 34 or the like. The present invention also includes such an EL display element, a method for manufacturing the display element, an apparatus for manufacturing the EL element, and the like.
[0166]
The manufacturing apparatus of the present invention performs a surface treatment process such as a plasma treatment, a UV treatment, and a coupling treatment on the surface of a resin resist, a pixel electrode, and a layer serving as a lower layer so that an EL material is easily attached. It may have means.
[0167]
The EL display element manufactured by using the manufacturing method of the present invention can be used in the low information field such as a segment display and a still image display with simultaneous simultaneous light emission, and is also used as a light source having a point, line, or surface shape. be able to. Further, by using an active element such as a TFT for driving, such as a passively driven display element, a full-color display element having high luminance and excellent responsiveness can be obtained.
[0168]
Hereinafter, an example of the organic EL device manufactured according to the present invention will be described. FIG. 37 shows a cross-sectional view of the laminated structure of the organic EL element. The organic EL element shown in FIG. 37 includes a transparent substrate 3001, a partition (partition member) 3002, a light emitting layer (light emitting portion) 3003, a transparent electrode 3004, and a metal layer 3006. Reference numeral 3007 denotes a portion composed of the transparent substrate 3001 and the transparent electrode 3004, which is called a drive substrate.
[0169]
The transparent substrate 3001 is not particularly limited as long as it has necessary characteristics such as transparency and mechanical strength as an EL display element. For example, a light-transmitting substrate such as a glass substrate or a plastic substrate can be used. Applicable.
[0170]
The partition (partition member) 3002 has a function of separating pixels from each other so that the material does not mix between adjacent pixels when a material to be the light emitting layer 3003 is applied from the liquid applying head. . That is, the partition wall 3002 functions as a mixing prevention wall. By providing the partition wall 3002 on the transparent substrate 3001, at least one concave portion (pixel region) is formed on the substrate. Note that there is no problem even if the partition wall 3002 has a multilayer structure having different affinity for the material.
[0171]
The light-emitting layer 3003 is formed using a material that emits light by passing a current, for example, a known organic semiconductor material such as polyphenylenevinylene (PPV), and has a thickness of, for example, about 0.05 μm to 0.2 μm to obtain a sufficient amount of light. It is composed. The light-emitting layer 3003 is formed by filling a thin film material liquid (self-light-emitting material) into a recess surrounded by the partition wall 3002 by an ink-jet method and performing heat treatment.
[0172]
The transparent electrode 3004 is made of a conductive and light-transmissive material, for example, ITO or the like. The transparent electrode 3004 is provided independently for each pixel region in order to emit light in pixel units.
[0173]
The metal layer 3006 is formed by stacking a conductive metal material, for example, aluminum lithium (Al-Li) to a thickness of about 0.1 μm to 1.0 μm. The metal layer 3006 is formed to function as a common electrode facing the transparent electrode 3004.
[0174]
The driving substrate 3007 is formed by laminating a thin film transistor (TFT), a wiring film, an insulating film, and the like (not shown) in multiple layers, and is configured to be able to apply a voltage between the metal layer 3006 and each transparent electrode 3004 in pixel units. The drive substrate 3007 is manufactured by a known thin film process.
[0175]
In the organic EL device having the above-described layer structure, in a pixel region where a voltage is applied between the transparent electrode 3004 and the metal layer 3006, a current flows through the light emitting layer 3003 to cause an electroluminescence phenomenon, and the transparent electrode 3004 Light is emitted through the transparent substrate 3001.
[0176]
Here, the manufacturing process of the organic EL element will be described.
[0177]
FIG. 38 shows an example of the manufacturing process of the organic EL element. The steps (a) to (d) will be described below with reference to FIG.
[0178]
Step (a)
First, a glass substrate is used as the transparent substrate 3001, and a thin film transistor (TFT), a wiring film, an insulating film, and the like (not shown) are stacked in multiple layers, and a transparent electrode 3004 is formed so that a voltage can be applied to the pixel region. .
[0179]
Step (b)
Next, a partition wall 3002 is formed at a position between the pixels. The partition wall 3002 may be any as long as it functions as a mixing preventing wall for preventing the EL material liquid from mixing between adjacent pixels when the EL material liquid to be a light-emitting layer is applied by an inkjet method. Here, it is formed by a photolithography method using a resist to which a black material is added, but the present invention is not limited to this, and various materials, colors, forming methods, and the like can be used.
[0180]
Step (c)
Next, a concave portion surrounded by the partition wall 3002 is filled with an EL material by an ink-jet method, and heat treatment is performed thereon, so that the light-emitting layer 3003 is formed.
[0181]
Step (d)
Further, a metal layer 3006 is formed over the light-emitting layer 3003.
Through these steps (a) to (d), a full-color EL element can be formed by simple steps. In particular, when a color organic EL element is formed, it is necessary to form a light-emitting layer having a different emission color such as red, green, or blue. Therefore, an inkjet method capable of discharging a desired EL material to an arbitrary position is used. It is effective to use.
[0182]
In the present invention, a solid portion is formed by filling a liquid material in a concave portion surrounded by a partition, and a colored portion corresponds to the solid portion in the case of a color filter, and a light emitting portion in the case of an EL element. Corresponds to the solid portion. The solid part including the colored part and the light emitting part is a part (display part) used for displaying information and also a part for visually recognizing a color.
[0183]
Further, the colored portion of the color filter and the light emitting portion of the EL element are also portions that generate color (color is emitted), and thus can be referred to as a color forming portion. For example, in the case of a color filter, light from the backlight passes through the colored portion to emit RGB light, and in the case of an EL element, the light emitting portion emits light by emitting light by itself.
[0184]
Further, since the ink and the self-luminous material are materials for forming the color-forming portion, they can also be referred to as materials that generate color. Since the ink and the self-luminous material are liquids, they can be generally referred to as liquid materials. A head having a plurality of nozzles for discharging these liquids is defined as a liquid discharge head or an ink jet head.
[0185]
Further, the present invention is not limited to the production of the above-described color filters and EL display elements. For example, an electron-emitting device in which a conductive thin film is formed on a substrate and an electron source using the electron-emitting device It is also applicable to the manufacture of substrates, electron sources, display panels, and the like.
[0186]
Here, a method of manufacturing an electron-emitting device, an electron source substrate, an electron source, and a display panel using the device, which is another application example of the present invention, will be described. Note that these electron-emitting devices, the electron source substrate using the electron-emitting devices, the electron source, and the display panel are used, for example, for displaying television.
[0187]
An electron-emitting device (for example, a surface conduction electron-emitting device) used for an electron source substrate, an electron source, a display panel, etc., applies a current to a small-area conductive thin film formed on a substrate in parallel with the film surface. This utilizes the phenomenon that electron emission occurs when flowing. More specifically, a crack is generated in a part of the conductive thin film, and a voltage is applied to the conductive thin film to cause a current to flow, whereby electrons are emitted from the crack (hereinafter referred to as an electron emitting portion). . FIG. 39 shows a configuration example of such a surface conduction electron-emitting device.
[0188]
39 is manufactured using the manufacturing apparatus of the present invention (a manufacturing apparatus including the liquid discharge head and the discharge control circuit of FIG. 18 and including a liquid applying apparatus capable of executing the flow of FIG. 21 and FIGS. 29 to 34). FIG. 40 is a schematic view showing an example of an electron-emitting device (a surface-conduction electron-emitting device) that can be used, and FIG. 40 is a diagram showing an example of a process for manufacturing this surface-conduction-type electron-emitting device.
[0189]
39 and 40, 5001 is a substrate, 5002 and 5003 are element electrodes, 5004 is a conductive thin film, 5005 is an electron emitting portion, 5007 contains the liquid discharge head and the discharge control circuit of FIG. 5024 is a droplet of a conductive thin film material liquid discharged from the liquid applying device, and 5025 is a conductive thin film before energization forming.
In this example, first, device electrodes 5002 and 5003 are formed on a substrate 5001 at a certain distance L1 (FIG. 40A). Next, a conductive thin film material liquid (a liquid containing a metal element) 5024, which is a liquid material for forming the conductive thin film 5004, is discharged from a liquid discharge head (ink-jet type head) 5007 (FIG. 40 ( b)), a conductive thin film 5004 is formed so as to be in contact with the device electrodes 5002 and 5003 (FIG. 40 (c)). Next, a crack is generated in the conductive thin film by, for example, a forming process described later, and the electron-emitting portion 5005 is formed (FIG. 40D).
[0190]
By using such a liquid application method, fine droplets of the metal element-containing liquid can be selectively formed only at desired positions (predetermined regions). There is no waste. In addition, a vacuum process that requires an expensive apparatus and patterning by photolithography including a number of steps are not required, so that production costs can be reduced.
[0191]
If a specific example of the liquid application device 5007 is given, any device may be used as long as it can discharge an arbitrary liquid drop, but in particular, control is performed in a range of about several tens to several tens of ng. It is preferable to use an ink-jet type apparatus which is capable of easily discharging a small amount of droplets of about 10 ng to several tens ng. A method of manufacturing a surface conduction electron-emitting device using an ink-jet type liquid applying apparatus is described in Japanese Patent Application Laid-Open No. H11-354015.
[0192]
The conductive thin film 5004 is particularly preferably a fine particle film composed of fine particles in order to obtain good electron emission characteristics. The thickness of the conductive thin film is determined by the step coverage to the device electrodes 5002 and 5003, the resistance value between the device electrodes 5002 and 5003, and the like. It is set as appropriate depending on the energizing forming conditions and the like to be described later, but is preferably several to several thousand, and particularly preferably 10 to 500. Its sheet resistance is 10 ³ -10 ⁷ Ω / □.
[0193]
Materials forming the conductive thin film 5004 include metals such as Pd, Pt, Ru, Ag, Au, Ti, In, Cu, Cr, Fe, Zn, Sn, Ta, W, and Pb, PdO, and SnO. ₂ , In ₂ O ₃ , PbO, Sb ₂ O ₃ Oxides such as HfB ₂ , ZrB ₂ , LaB ₆ , CeB ₆ , YB ₄ , GdB ₄ And the like, carbides such as TiC, ZrC, HfC, TaC, SiC and WC, nitrides such as TiN, ZrN and HfN, semiconductors such as Si and Ge, carbon and the like.
[0194]
The fine particle film described herein is a film in which a plurality of fine particles are aggregated, and has a fine structure not only in a state where the fine particles are individually dispersed and arranged, but also in a state where the fine particles are adjacent to each other or overlap each other (including an island shape). It refers to a film, and the particle size of the fine particles is several to several thousand, preferably 10 to 200.
[0195]
Examples of the liquid on which the droplet 5024 is based include a solution in which the above-described constituent material of the conductive thin film is dissolved in water, a solvent, or the like, and an organic metal solution.
[0196]
As the substrate 5001, quartz glass, glass having a low content of impurities such as Na, blue plate glass, SiO ₂ A glass substrate formed on the surface and a ceramic substrate such as alumina are used.
[0197]
As a material for the device electrodes 5002 and 5003, a general conductive material is used, for example, a metal or alloy such as Ni, Cr, Au, Mo, W, Pt, Ti, Al, Cu, Pd, and Pd, Ag, Au, RuO ₂ , Pd-Ag or other metal or metal oxide and printed conductor composed of glass, etc., In ₂ O ₃ -SnO ₂ And the like, and a semiconductor material such as polysilicon.
[0198]
The electron-emitting portion 5005 is a high-resistance crack formed in a part of the conductive thin film 5004, and is formed by current forming or the like. Further, the crack may have conductive fine particles having a particle size of several to several hundreds of mm. These conductive fine particles contain at least a part of elements of a substance constituting the conductive thin film 5004. Further, the electron-emitting portion 5005 and the conductive thin film 5004 in the vicinity thereof may include carbon and a carbon compound.
[0199]
The electron-emitting portion 5005 is formed by performing an energization process called energization forming of an element in which the conductive thin film 5004 and the element electrodes 5002 and 5003 are formed. In the energization forming, as described in Japanese Patent Application Laid-Open No. 2-56822, an electric current is applied between the element electrodes 5002 and 5003 from a power source (not shown) to locally destroy, deform, or alter the conductive thin film 5004. This is to form a site having a changed structure. The site where the structure is locally changed is referred to as an electron emitting portion 5. The voltage waveform of the energization forming is particularly preferably a pulse shape, and there are a case where a voltage pulse having a constant pulse peak value is continuously applied and a case where a voltage pulse is applied while increasing the pulse peak value.
[0200]
When a voltage pulse is applied while increasing the pulse peak value, the pulse peak value (peak voltage at the time of energization forming) is increased, for example, in steps of about 0.1 V and applied under an appropriate vacuum atmosphere.
[0201]
In the energization forming process in this case, the element current is measured at a voltage that does not locally destroy or deform the conductive thin film 5004, for example, a voltage of about 0.1 V, and a resistance value is obtained. When indicated, the energization forming is completed.
Next, it is desirable to perform a process called an activation process on the element for which the energization forming has been completed. The activation step includes, for example, 10 ^-4 -10 ^-5 This is a process of repeatedly applying a voltage pulse having a constant pulse peak value at a degree of vacuum of about Torr and a constant pulse peak value, and depositing carbon and carbon compounds originating from an organic substance existing in a vacuum on a conductive thin film. This is a process for significantly changing the element current If and the emission current Ie. The activation process ends while measuring the device current If and the emission current Ie, for example, when the emission current Ie is saturated.
[0202]
Here, the carbon and the carbon compound are graphite (refer to both single crystal and polycrystal) and amorphous carbon (refer to a mixture of amorphous carbon and polycrystal graphite), and the film thickness is 500 °. Or less, more preferably 300 ° or less.
[0203]
The electron-emitting device manufactured in this manner is preferably operated and driven in an atmosphere having a higher degree of vacuum than the energization forming step and the activation step. Further, it is desirable to drive the device after heating at 80 ° C. to 150 ° C. in an atmosphere with a higher degree of vacuum.
[0204]
The degree of vacuum higher than the degree of vacuum in the energization forming step and the activation processing is, for example, about 10 ^-6 The degree of vacuum is equal to or higher than Torr, more preferably an ultrahigh vacuum system, and a degree of vacuum in which carbon and carbon compounds are hardly newly deposited on the conductive thin film. This makes it possible to stabilize the element current If and the emission current Ie.
[0205]
As described above, a flat surface conduction electron-emitting device can be manufactured.
FIG. 41 is an external view of a manufacturing apparatus including a liquid discharging apparatus for manufacturing a surface conduction electron-emitting device. 41, reference numeral 5101 denotes a housing for storing a control device, 5102 denotes a monitor of a personal computer stored in the housing, 5103 denotes a personal computer keyboard or operation panel, 5104 denotes a stage on which a board 5106 is mounted, and 5105 denotes a board for mounting the board 5106. A liquid discharge head (ink-jet type head) 5106 for discharging a liquid is a substrate on which a surface conduction electron-emitting device is formed, and a reference numeral 5107 is such that a droplet can be applied to an arbitrary position on the substrate 5106. An XY stage that freely moves in both the vertical and horizontal directions, a surface plate 5108 that holds the entire liquid ejection apparatus, and an alignment camera 5109 that aligns the ejection position of droplets on the substrate 5107. The manufacturing apparatus thus configured operates basically in the same manner as the color filter manufacturing apparatus described with reference to FIG. The method described in JP-A-11-354015 can be applied to the method for aligning the substrate, the method for forming the conductive thin film, and the forming method.
[0206]
Next, a display panel is formed by arranging a plurality of the surface conduction electron-emitting devices manufactured as described above on a substrate. FIG. 42 is a diagram showing a display panel 5091 including such a plurality of surface conduction electron-emitting devices 5094. The plurality of surface conduction electron-emitting devices provided in the display panel are arranged in a matrix of m rows and n columns, for example. Then, television display can be performed by driving the surface conduction electron-emitting device in the display panel based on an image signal (for example, an NTSC television signal). The method described in JP-A-11-354015 can be applied to the manufacture of the display panel.
[0207]
By performing the above-mentioned discharge amount uniforming control of the present invention, the shape of the conductive thin film of all the electron-emitting devices included in the display panel can be made constant. Therefore, when the electron-emitting device of the display panel is manufactured according to the present invention, the conductive thin films constituting the electron-emitting device can be uniformly arranged, and thus, a display panel with high image quality can be manufactured.
[0208]
【The invention's effect】
As described above, according to the present invention, it is possible to equalize the liquid discharge amount from each nozzle of the liquid discharge head. In addition, the liquid ejection amount can be varied independently for each nozzle.
[0209]
Further, since the amount of liquid applied to a predetermined area (eg, a pixel) on the substrate can be easily controlled to a predetermined amount, a high-quality color filter or EL having a uniform amount of liquid applied to a predetermined area (pixel) can be obtained. A display device panel such as a display device, an electron-emitting device, and a display panel including the device can be manufactured.
[Brief description of the drawings]
FIG. 1 is a schematic diagram illustrating a configuration of an embodiment of a color filter manufacturing apparatus.
FIG. 2 is a diagram illustrating a configuration of a control unit that controls an operation of a color filter manufacturing apparatus.
FIG. 3 is a diagram illustrating a structure of an inkjet head used in a color filter manufacturing apparatus.
FIG. 4 is a diagram showing a voltage waveform applied to a heater of the inkjet head.
FIG. 5 is a diagram showing a manufacturing process of the color filter.
FIG. 6 is a cross-sectional view illustrating a basic configuration of a color liquid crystal display device incorporating a color filter according to an embodiment.
FIG. 7 is a cross-sectional view showing another example of the basic configuration of the liquid crystal display device incorporating the color filter of the embodiment.
FIG. 8 is a diagram illustrating an information processing apparatus in which a liquid crystal display device is used.
FIG. 9 is a diagram illustrating an information processing device using a liquid crystal display device.
FIG. 10 is a diagram illustrating an information processing device using a liquid crystal display device.
FIG. 11 is an explanatory diagram illustrating a conventional method for reducing unevenness in density of each pixel of a color filter.
FIG. 12 is an explanatory diagram illustrating a conventional method for reducing unevenness in density of each pixel of a color filter.
FIG. 13 is an explanatory diagram illustrating a conventional method for reducing unevenness in density of each pixel of a color filter.
FIG. 14 is an explanatory diagram illustrating another conventional method for reducing unevenness in density of each pixel of a color filter.
FIG. 15 is an explanatory diagram illustrating another conventional method for reducing unevenness in density of each pixel of a color filter.
FIG. 16 is a diagram illustrating a configuration of a pixel array of a color filter.
FIG. 17 illustrates an example of a color filter drawing method according to the first embodiment.
FIG. 18 is a diagram illustrating a configuration of a discharge control circuit.
FIG. 19 is a diagram illustrating an outline when a voltage of a drive signal is variable.
FIG. 20 is a diagram illustrating a discharge state before and after a discharge amount correction.
FIG. 21 is a diagram illustrating a discharge amount correction sequence.
FIG. 22 is a diagram illustrating a relationship between a discharge amount and a drive signal voltage.
FIG. 23 is a diagram showing a state before and after a discharge amount correction between nozzles is performed.
FIG. 24 is a diagram illustrating a state of a discharge amount in a head discharge state at the time of non-correction when drawing a color filter.
FIG. 25 is a diagram illustrating the state of the ejection amount when the nozzles used by the head are corrected when drawing a color filter.
FIG. 26 is a diagram illustrating a state in which a plurality of color filters having different pixel sizes are manufactured from one glass substrate.
FIG. 27 is a diagram illustrating a state in which a plurality of color filters having different pixel sizes are manufactured from one glass substrate.
FIG. 28 is a diagram illustrating a state in which a plurality of color filters having different pixel sizes are manufactured from one glass substrate.
FIG. 29 is a flowchart illustrating an example of a control method of the drawing apparatus.
FIG. 30 is a flowchart showing another embodiment of the control method of the drawing apparatus.
FIG. 31 is a flowchart showing still another embodiment of the control method of the drawing apparatus.
FIG. 32 is a flowchart showing still another embodiment of the control method of the drawing apparatus.
FIG. 33 is a flowchart showing still another embodiment of the control method of the drawing apparatus.
FIG. 34 is a flowchart showing still another embodiment of the control method of the drawing apparatus.
FIG. 35 is a diagram illustrating a measurement example of an adjacent nozzle crosstalk amount of an inkjet head.
FIG. 36 is a diagram illustrating a discharge amount correction sequence.
FIG. 37 is a diagram illustrating an example of a configuration of an EL element.
FIG. 38 is a diagram illustrating an example of the manufacturing process of the EL element.
FIG. 39 is a view showing a configuration example of a surface conduction electron-emitting device.
FIG. 40 is a view illustrating an example of a step of manufacturing the surface conduction electron-emitting device.
FIG. 41 is an external view of a manufacturing apparatus including a liquid ejection apparatus for manufacturing a surface conduction electron-emitting device.
FIG. 42 is a diagram illustrating an example of a display panel including a plurality of electron-emitting devices.
[Explanation of symbols]
1 Transparent substrate
2 Black matrix
3 resin composition layer
4 Photomask
5 Uncolored part
8 Protective layer
52 XYθ stage
53 glass substrate
54 Color Filter
55 coloring head
58 Controller
59 Teaching pendant
60 keyboard
300 color filter substrate
301 pixel area
303 inkjet head
304 Head drive circuit
309 drive element (bubble jet (registered trademark) type heater or piezo type piezoelectric element)
311 Drawing control control unit
312 Nozzle drive output circuit
313 Voltage control circuit
314 signal reference voltage
315 Output voltage amplifier circuit
316 output charge / discharge circuit
317 Drive timing signal
318 Data latch signal
319 Image serial data
320 Drive signal pattern generation output circuit
321 Image data latch output circuit
322 image data serial / parallel conversion circuit
324 to 329 Drive signal voltage at the time of ejection amount correction
330-335 Discharge amount correction sequence
336 Unused nozzle
337 Nozzle used for drawing

Claims (23)

A liquid ejection apparatus that ejects the liquid onto a medium by a liquid ejection head having a plurality of nozzles for ejecting the liquid,
A discharge amount changing unit that can individually change a liquid discharge amount from each of the plurality of nozzles of the liquid discharge head for each of the plurality of nozzles;
The liquid ejection apparatus according to claim 1, wherein the ejection amount changing unit includes a voltage control unit that can change a driving voltage value of a driving pulse supplied to each of the plurality of nozzles. The discharge amount changing means changes at least one condition of a combination of nozzles to be used, the number of nozzles to be used, presence or absence of a defective nozzle, a direction of relative movement between a head and a medium, and a speed of relative movement between a head and a medium. 2. The liquid ejecting apparatus according to claim 1, wherein the drive voltage value is changed in accordance with the control. A liquid discharging method for discharging the liquid to a medium by a liquid discharging head having a plurality of nozzles for discharging a liquid,
By using a liquid discharge head having only a nozzle connected to a discharge amount changing means capable of changing a liquid discharge amount from the nozzle by changing a drive voltage value of a drive pulse supplied to the nozzle, from the liquid discharge head A liquid discharging method comprising a step of discharging a liquid. A display panel manufacturing apparatus for manufacturing a display panel by using a liquid discharge head having a plurality of nozzles for discharging a liquid and discharging the liquid from the liquid discharge head onto a substrate,
A discharge amount changing unit that can individually change a liquid discharge amount from each of the plurality of nozzles of the liquid discharge head for each of the plurality of nozzles;
The apparatus for manufacturing a panel for a display device, wherein the discharge amount changing means includes a voltage control means capable of changing a drive voltage value of a drive pulse supplied to each of the plurality of nozzles. The discharge amount changing means changes at least one condition of a combination of nozzles to be used, the number of nozzles to be used, presence or absence of a defective nozzle, a direction of relative movement between the head and the substrate, and a speed of relative movement between the head and the substrate. 5. The apparatus for manufacturing a display device panel according to claim 4, wherein the drive voltage value is changed along with the driving. A method for manufacturing a display device panel, comprising: using a liquid ejection head having a plurality of nozzles for ejecting a liquid, ejecting a liquid from the liquid ejection head onto a substrate to produce a display device panel,
Using a liquid discharge head having only a nozzle connected to a discharge amount variable means capable of changing a drive voltage value of a drive pulse supplied to the nozzle, manufacturing a display device panel by discharging liquid from the liquid discharge head A method for manufacturing a display device panel, comprising: A liquid ejection apparatus including a liquid ejection head having a plurality of nozzles including a nozzle capable of changing a liquid ejection amount,
With a change in the discharge condition of the adjacent nozzle adjacent to the predetermined nozzle whose liquid discharge amount can be changed, a discharge amount control value including at least one of the voltage value and the pulse width of the drive pulse supplied to the predetermined nozzle is set. A liquid discharge device comprising discharge amount control means for changing. 8. The discharge amount control unit according to claim 7, wherein the discharge amount control unit changes the discharge amount control value of the predetermined nozzle according to whether or not the discharge is performed from the adjacent nozzle substantially at the same time as the discharge time of the predetermined nozzle. The liquid ejection device according to any one of the preceding claims. When the predetermined nozzle is a nozzle B, and the nozzles on both sides thereof are a nozzle A and a nozzle C, respectively,
The discharge amount control means performs drive discharge from at least one of the nozzles A and C at substantially the same time as the nozzle B, or at a time near the nozzles B and C at a time near the extent that affects the discharge amount of the nozzles B. If at least one of the ejection conditions relating to whether ejection is performed from at least one of the nozzles A and C at a time near the ejection time of the nozzle B is changed, The liquid discharge device according to claim 7, wherein the discharge amount control value of the nozzle B is changed. The method according to claim 7, wherein the discharge amount control unit switches the discharge amount control value of the predetermined nozzle so that the discharge amount of the predetermined nozzle does not change when the discharge condition of the adjacent nozzle is changed. The liquid ejection device according to any one of the preceding claims. 8. The method according to claim 7, wherein when the number of used nozzles of the liquid discharge head is changed, the discharge amount control unit switches a discharge amount control value of an end nozzle located at an end among the used nozzles. The liquid ejection device according to any one of the preceding claims. 8. The ejection amount control unit according to claim 7, wherein when the combination of the nozzles used in the liquid ejection head is changed, the ejection amount control unit switches the ejection amount control value of the predetermined nozzle in which the use status of the adjacent nozzle has changed. Liquid ejection device. In a case where the predetermined nozzle becomes a defective nozzle among a plurality of nozzles of the liquid discharge head and the combination of used nozzles is changed by disabling the predetermined nozzle which has become the defective nozzle, the discharge amount control is performed. 8. The liquid ejection apparatus according to claim 7, wherein the means switches the ejection amount control values of adjacent nozzles on both sides of the predetermined nozzle. When the ejection timing of the predetermined nozzle is shifted among the plurality of nozzles of the liquid ejection head, the ejection amount control means controls the ejection amount of the predetermined nozzle and the adjacent nozzles on both sides of the predetermined nozzle whose ejection timing is shifted. The liquid ejection apparatus according to claim 7, wherein the value is switched. A liquid ejection method for ejecting liquid to a medium by a liquid ejection head having a plurality of nozzles including a nozzle capable of changing a liquid ejection amount,
With the change of at least one condition of the combination of nozzles to be used, the number of nozzles to be used, the presence or absence of defective nozzles, the direction of relative movement between the head and the substrate, and the speed of relative movement between the head and the substrate, A liquid ejection method, comprising: an ejection amount control step of changing an ejection amount control value including at least one of a voltage value and a pulse width of a supplied drive pulse. The medium has a pixel area partitioned by a black matrix,
The liquid ejection head ejects ink from the nozzle,
The liquid discharging method according to claim 3, wherein a color filter is manufactured by discharging ink from the liquid discharging head to a pixel region on the medium. The medium has a pixel region serving as a light emitting unit,
The liquid ejection head ejects an electroluminescent material from the nozzle,
The liquid discharging method according to claim 3, wherein an electroluminescent material is manufactured by discharging an electroluminescent material from the liquid discharging head to a pixel region on the medium. The medium has a region to be a conductive thin film portion,
The liquid ejection head ejects a conductive thin film material from the nozzle,
16. The liquid discharge device according to claim 3, wherein a conductive thin film material is discharged from the liquid discharge head to a region on the medium to manufacture an electron-emitting device having the conductive thin film portion. Method. The medium has a region to be a conductive thin film portion,
The liquid ejection head ejects a conductive thin film material from the nozzle,
4. A display panel including a plurality of electron-emitting devices having the conductive thin film portion by discharging a conductive thin film material from the liquid discharge head to a region on the medium. 16. The liquid discharging method according to item 15. A method for manufacturing a display device panel, comprising manufacturing a display device panel by using a liquid discharge head having a plurality of nozzles including a nozzle capable of changing a liquid discharge amount and discharging liquid from the liquid discharge head onto a substrate. hand,
With the change of at least one condition of the combination of nozzles to be used, the number of nozzles to be used, the presence or absence of defective nozzles, the direction of relative movement between the head and the substrate, and the speed of relative movement between the head and the substrate, A method for manufacturing a display device panel, comprising a step of changing a discharge amount control value including at least one of a voltage value and a pulse width of a supplied drive pulse. 21. The method for manufacturing a display device panel according to claim 6, wherein the display device panel is a color filter. The method for manufacturing a display device panel according to claim 6, wherein the display device panel is an electroluminescent element. 21. The method of manufacturing a display device panel according to claim 6, wherein the display device panel includes a plurality of electron-emitting devices having a conductive thin film portion.

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