JP2004078175A - Confocal microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain height information at a high speed under optimum measurement conditions. <P>SOLUTION: A confocal microscope has measurement condition data consisting of an approximate curve, the number of arithmetic operation points, and a movement pitch corresponding to a high-speed mode or precise mode in which power of an objective 9 and height information on a sample 10 are acquired. A Z stage 12 is moved by a movement pitch ΔZ along an optical axis according to the measurement condition data, and an approximate curve is found from individual pieces of light intensity information being the output of an optical detector 15 obtained discretely by movement pitches ΔZ. Maximum light intensity information is estimated from the approximate curve, and height information on the sample 10 is found from the height of the Z stage 12 corresponding to the maximum light intensity information. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a confocal microscope that receives reflected light from a sample to acquire a confocal image of the sample.
[0002]
[Prior art]
A confocal microscope illuminates a sample in a point-like manner, collects transmitted light or reflected light from the sample on a confocal stop, and then detects the light intensity that has passed through the confocal stop with a photodetector. Obtain the surface information of the sample. In addition, the confocal microscope can acquire surface information in a wide range of the sample by scanning the sample surface with the point illumination by various methods.
[0003]
FIG. 5 is a configuration diagram of a general scanning confocal optical microscope. The light beam emitted from the light source 1 passes through the beam splitter 2, is reflected by the mirror 3, and enters the two-dimensional scanning mechanism 4. The two-dimensional scanning mechanism 4 scans an incident light beam in a two-dimensional manner. The first optical scanner 5 scans the light beam in one direction and the second light beam scans in a direction perpendicular to the one direction. It consists of a combination with the optical scanner 6.
[0004]
The light beam scanned two-dimensionally by the two-dimensional scanning mechanism 4 enters the objective lens 9 through the lenses 7 and 8. The light beam incident on the objective lens 9 is scanned on the surface of the sample 10 as convergent light by the objective lens 9. The sample 10 is placed on a Z stage 12 that can move the sample stage 11 in the optical axis direction.
[0005]
The light reflected from the surface of the sample 10 passes through the optical path opposite to the incident optical path to the sample 10, that is, from the objective lens 9 through the lenses 8 and 7, and further through the two-dimensional scanning mechanism 4 and the mirror 3. Is incident again. The light re-entering the beam splitter 2 is reflected by the beam splitter 2 and condensed on the pinhole 14 by the imaging lens 13.
[0006]
In this pinhole 14, the reflected light other than the condensing point of the objective lens 9 is cut out of the reflected light from the sample 10, and only the reflected light at the condensing point is allowed to pass. Therefore, the photodetector 15 arranged on the rear side of the pinhole 14 detects the reflected light at the condensing point of the objective lens 9 that has passed through the pinhole 14.
[0007]
The two-dimensional scanning mechanism 4, the Z stage 12 and the photodetector 15 are controlled by a computer 16, and a monitor 17 is connected to the computer 16.
[0008]
Here, the focal point of the objective lens 9 is optically conjugate with the pinhole 14. As a result, when the sample 10 is on the focal point of the objective lens 9, the reflected light from the sample 10 is collected on the pinhole 14, passes through the pinhole 14, and enters the photodetector 15. .
[0009]
However, when the sample 10 is at a position shifted from the focal point of the objective lens 9, the reflected light from the sample 10 is not collected on the pinhole 14 and does not pass through the pinhole 14.
[0010]
Therefore, the amount of light incident on the photodetector 15 changes when the sample 10 is on the focal point of the objective lens 9 and when it is at a position shifted from the focal point. FIG. 6 is a diagram (hereinafter referred to as an IZ curve) showing the relationship of the output (I) of the photodetector 15 with respect to the relative position (Z) between the sample 10 and the objective lens 9, and the sample 10 is the objective lens. when in the focal point Z ₀ of 9, the output of the photodetector 15 (I) is maximized. However, the sample 10 is deviated from the focal point Z ₀ of the objective lens 9, the output of the photodetector 15 (I) according to the deviation amount of the relative distance between the sample 10 and the objective lens 9 at that time is reduced drastically.
[0011]
Since it has such an I-Z curve characteristic, the two-dimensional scanning mechanism 4 two-dimensionally scans the focal point on the surface of the sample 10, and the output of the photodetector 15 is synchronized with the two-dimensional scanning mechanism 4. When captured by the computer 16 and imaged, the computer 16 can image a sample image of the sample 10 only at a specific height and obtain an image (confocal image) obtained by optically slicing the sample 10.
[0012]
Further, the sample 10 is discretely moved in the optical axis direction (Z direction) by the operation of the Z stage 11, and the light beam is two-dimensionally scanned by the two-dimensional scanning mechanism 4 at each of these discrete positions, and each confocal image is obtained. And the height information of the sample 10 can be obtained by detecting the position of the Z stage 11 at which the output of the photodetector 15 is maximized at each point on the sample 10.
[0013]
In addition, by displaying the maximum value of the output of the photodetector 15 at each point on the sample 10 in an overlapping manner, a two-dimensional image focused on a specific height surface of the sample 10 can be obtained.
[0014]
In such a confocal microscope, the sample 10 is discretely moved in the optical axis direction (Z direction) by the operation of the Z stage 11. Therefore, if the accuracy of the height measurement of the sample 10 is to be increased, It is necessary to reduce the amount of movement per time in the discrete movement in the optical axis direction (Z direction), thereby increasing the number of detection points of the output of the photodetector 15 and taking time for measurement.
[0015]
For this reason, Japanese Patent Application Laid-Open No. 9-68413 proposes a height measurement method that increases the accuracy of sample height measurement without reducing the amount of movement of the Z stage per operation. This height measurement method approximates the IZ curve with a quadratic curve based on the output of the photo detector at a total of three points, the position of the Z stage where the output of the photo detector becomes maximum and the positions before and after that. The position of the Z stage at which the output of the photodetector is maximized is obtained with accuracy equal to or less than the amount of movement of the Z stage, and this is obtained as height information.
[0016]
[Problems to be solved by the invention]
In Japanese Patent Laid-Open No. 9-68413, the I-Z curve is approximated by a quadratic curve or other curve to obtain a measurement condition for obtaining the position of the Z stage that maximizes the output of the photodetector, ie, approximation. It is necessary to set the number of light intensity detection values to be used and the approximate curve to be used, the relative movement pitch between the focusing position and the sample to a predetermined value. For example, the number of light intensity detection values is 3 points and the approximate curve Is a quadratic curve and the relative movement pitch is designated by the user.
[0017]
However, the characteristics of the IZ curve vary depending on the magnification of the objective lens 9 and the like, and the number of light intensity detection values used for approximation suitable for each IZ curve, the approximate curve, the relative position of the light collection position and the sample. The moving pitch is different. In addition, it is not easy for the user to select an optimal relative movement pitch.
[0018]
Furthermore, in particular, the measurement conditions differ depending on whether the user wants to measure the height of the sample at high speed or with high accuracy. However, the technique does not consider such measurement conditions.
[0019]
Accordingly, an object of the present invention is to provide a confocal microscope that can obtain height information at high speed under optimum measurement conditions.
[0020]
[Means for Solving the Problems]
The present invention has an objective lens and a confocal stop arranged at a position conjugate to the focusing position of the objective lens, and the confocal stop when the relative distance between the sample and the objective lens is changed. In a confocal microscope in which light intensity information that has passed through is obtained discretely, a relative distance to obtain maximum light intensity information is estimated based on the light intensity information, and the relative distance is used as height information of the sample, an objective lens It has measurement condition data of light intensity information corresponding to each measurement mode to acquire the magnification and height information of the sample, and acquire the height information of the sample by changing the relative distance between the sample and the objective lens according to this measurement condition data A confocal microscope characterized by comprising height information calculation means.
[0021]
In the confocal microscope of the present invention, the measurement condition data is an approximate curve for estimating height information from each light intensity information corresponding to the magnification and measurement mode of the objective lens, and the light intensity information is extracted from this approximate curve. This is the movement pitch when changing the number of computation points and the relative distance used for.
[0022]
In the confocal microscope of the present invention, the measurement condition data includes data giving priority to measurement time as measurement mode and data giving priority to measurement accuracy.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 5 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0024]
FIG. 1 is a configuration diagram of a confocal microscope. The computer 16 controls the operation of the two-dimensional scanning mechanism 4 and the Z stage 12 and takes in the output of the photodetector 15 to obtain light intensity information discretely. Based on the light intensity information, the maximum light intensity information is obtained. In addition to having a control program for a series of operations in which the relative distance to be obtained is estimated and the relative distance is used as the height information of the sample 10, a brightness and height calculation program is provided.
[0025]
The computer 16 executes a luminance and height calculation program to store a measurement condition data memory 20 that stores measurement condition data of light intensity information corresponding to each measurement mode for acquiring magnification and height information of the objective lens 9. A height information calculation unit 21 that reads the measurement condition data from the measurement condition data memory 20 and changes the relative distance between the sample 19 and the objective lens 9 according to the measurement condition data to obtain the height information of the sample 10. Have
[0026]
FIG. 2 is a schematic diagram showing an example of measurement condition data stored in the measurement condition data memory 20. The measurement condition data stores, for example, 10 times, 20 times, 50 times, and 100 times as the magnification of the objective lens 9, and stores each measurement mode, for example, the high-speed mode and the fine mode, for the magnification of the objective lens 9. Has been. The high-speed mode is a mode that prioritizes the measurement time of the height information of the sample 10, and the fine mode is a mode that prioritizes the measurement accuracy of the height information of the sample 10.
[0027]
In these high-speed mode and fine mode, an approximate curve for estimating height information from each light intensity information corresponding to the magnification of the objective lens 9 and the measurement mode, and the number of calculation points for extracting light intensity information from this approximate curve Each data of the movement pitch ΔZ when changing the relative distance is stored.
[0028]
Among these, the approximate curve stores a quadratic curve in the high speed mode, stores a Gaussian curve in the fine mode, stores 3 points in the high speed mode, and stores 5 points in the fine mode. The moving pitch ΔZ stores different moving pitches ΔZ for the high-speed mode and the fine mode at each magnification of the objective lens 9, for example, 10 μm for the high-speed mode in the objective lens 9 having a magnification of 10 times. For example, 5 μm is stored for the mode.
[0029]
Further, the computer 16 displays a confocal image of the sample 10 on the monitor 17 and displays an operation screen (not shown) for acquiring height information of the sample 10 together with the confocal image on the monitor 17. It has a function.
[0030]
Further, the computer 16 executes a brightness and height calculation program to select the magnification (for example, 10 times, 20 times, 50 times, 100 times) of the objective lens 9 as shown in FIG. (For example, a setting screen for selecting a high-speed mode or a fine mode) is displayed on the monitor screen of the monitor 17.
[0031]
Next, the operation of the apparatus configured as described above will be described.
[0032]
The light beam emitted from the light source 1 passes through the beam splitter 2, is reflected by the mirror 3, and enters the two-dimensional scanning mechanism 4. The two-dimensional scanning mechanism 4 scans the light beams incident by the first and second optical scanners 5 and 6 two-dimensionally. The light beam scanned two-dimensionally by the two-dimensional scanning mechanism 4 enters the objective lens 9 through the lenses 7 and 8. The light beam incident on the objective lens 9 is scanned on the surface of the sample 10 as convergent light by the objective lens 9.
[0033]
The light reflected from the surface of the sample 10 passes through the optical path opposite to the incident optical path to the sample 10, that is, from the objective lens 9 through the lenses 8 and 7, and further through the two-dimensional scanning mechanism 4 and the mirror 3. Is incident again. The light re-entering the beam splitter 2 is reflected by the beam splitter 2 and condensed on the pinhole 14 by the imaging lens 13. The photodetector 15 receives the light beam that has passed through the pinhole 14 and outputs the electrical signal.
[0034]
The computer 16 captures the output of the photodetector 15 in synchronization with the two-dimensional scanning mechanism 4, images a sample image of the sample 10 only at a specific height, and forms a confocal image obtained by optically slicing the sample 10. Obtained and displayed on the monitor 17.
[0035]
At the same time, the computer 16 displays a confocal image of the sample 10 on the monitor 17 and displays an operation screen for obtaining height information of the sample 10 together with the confocal image on the monitor 17. While observing the confocal image on the monitor 17 screen, an operation is performed on the operation screen on the monitor screen to set the measurement range while moving the Z stage 12 in the optical axis direction. This measurement range is stored on a memory in the computer 16.
[0036]
Next, in response to the user's operation, the computer 16 selects the magnification (for example, 10 times, 20 times, 50 times, 100 times) of the objective lens 9 as shown in FIG. 3 and the measurement mode (for example, the high speed mode). , A fine mode) selection screen is displayed on the monitor screen of the monitor 17.
[0037]
Here, the magnification (for example, 10 times) of the objective lens 9 used for measuring the height information of the sample 10 is selected by the user's operation on the setting screen, and then the measurement mode (for example, the high speed mode) is selected. The The setting of the magnification of the objective lens 9 is not limited to the operation on the setting screen shown in FIG. 3. For example, if the magnification of the objective lens 9 has already been set on the microscope setting screen, the setting shown in FIG. There is no need to select and set on the setting screen.
[0038]
When the setting of the magnification and measurement mode of the objective lens 9 is completed and the measurement of the height information of the sample 10 is started, the height information calculation unit 21 measures the measurement conditions shown in FIG. 2 within the set measurement range. The measurement condition data corresponding to the measurement mode (high-speed mode) is read from the data memory 20 at the magnification (10 times) of the objective lens 9, that is, a quadratic curve as an approximate curve, three points as calculation points, and 10 μm as a movement pitch ΔZ. Among them, the Z stage 12 is moved in the optical axis direction according to the movement pitch ΔZ (= 10 μm).
[0039]
Next, each time the Z stage 12 moves in the optical axis direction at a movement pitch ΔZ (= 10 μm), the height information calculation unit 21 captures the output of the photodetector 15 and each confocal image for each movement pitch ΔZ. To get. At this time, the light intensity information at a certain point is, for example, the value of the black point on the IZ curve shown in FIG.
[0040]
Next, when the high speed mode is set, the height information calculation unit 21 compares the light intensity information sequentially acquired for each movement pitch ΔZ with the maximum light intensity information already acquired, and the result of this comparison The light intensity information with a high light intensity is changed as the maximum light intensity information, and this comparison operation is sequentially repeated every time the light intensity information is taken in. As a result, the light intensity information that gives the maximum light intensity is obtained, and at this time and height information _{Z m} of the Z stage 12, and acquires the maximum light intensity _{I max.}
[0041]
At the same time, the height information calculation unit 21 obtains each height information and each light intensity information {Z of the Z stage 12 at heights Z _m −ΔZ and Z _m + ΔZ before and after the height information Z _{m having} the maximum light intensity. _m− ΔZ, I ′} and {Z _m + ΔZ, I ″} are extracted from each piece of light intensity information taken sequentially.
[0042]
Next, the height information calculation unit 21 selects a quadratic curve as an approximate curve from the measurement condition data memory 20 shown in FIG.
I = a · Z ² + b · Z + c (1)
And Then, the height information calculation unit 21 extracts the height information and the light intensity information {Z _m , I _max }, {Z _m −ΔZ, I ′}, {Z _m + ΔZ, I ′ ”extracted previously. '} Is substituted into the above formula (1),
I _max = a · Z _m ² + b · Z _m + c (2)
I ′ = a (Z _m −ΔZ) ² + b (Z _m −ΔZ) + c (3)
I ″ = a (Z _m + ΔZ) ² + b (Z _m + ΔZ) + c (4)
Here, for simplicity, when a and b are obtained by a coordinate system in which Z _m = 0 and ΔZ = 1,
a = (I ′ + I ″ −2I _max ) / 2 (5)
b = (I ″ −I ′) / 2 (6)
In addition, the coordinates (Z ₀ ', I) of the vertex of the quadratic curve at this time are
dI / dZ ′ = 2aZ ′ + b (7)
Z ₀ ′ = −b / 2a (8)
I = a (−b / 2a) ² + b (−b / 2a) + c
= C-b ² / 4a (9)
From I _max = c, I = I _max −b ² / 4a (10)
Here, when the coordinate system is restored,
Z ₀ = Z ₀ '· ΔZ + Z _m
= Z _m- (b / 2a) · ΔZ (11)
become.
[0043]
Thereby, the brightness and relative height of the surface of the sample 10 can be obtained with a resolution equal to or higher than the movement pitch ΔZ.
[0044]
On the other hand, when the fine mode is set, the height information calculation unit 21 sequentially compares the light intensity information for each movement pitch ΔZ that is sequentially captured, as described above, and obtains the light intensity information that is the maximum light intensity. It determined, and acquires the height information _{Z m} of the Z stage 12 at this time, the maximum light intensity _{I max.}
[0045]
At the same time, the height information calculation unit 21 has heights Z _m −2 · ΔZ, Z _m −ΔZ, Z _m + ΔZ, and Z _m +2 at two points before and after the height information Z _{m having} the maximum light intensity. Each height information and each light intensity information {Z _m −2 · ΔZ, I ′}, {Z _m −ΔZ, I ′}, {Z _m + ΔZ, I ″}, {Z _m + 2 · ΔZ, I ″} is extracted from each piece of light intensity information taken in sequentially.
[0046]
Next, the height information calculation unit 21 selects a Gaussian curve as an approximate curve from the measurement condition data memory 20 shown in FIG. A Gaussian curve can approximate an I-Z curve with higher accuracy than a quadratic curve.
[0047]
The Gaussian curve is, for example,
I = A · exp {− (Z−Z ₀ ) ² / 2W ² } (12)
And This Gaussian curve I is
log I = aZ ² + bZ + c (13)
Therefore, the height information calculation unit 21 can extract the five points of height information and light intensity information {Z _m −2 · ΔZ, I ′}, {Z _m −ΔZ, I ′}, Substituting {Z _m + ΔZ, I ″} and {Z _m + 2 · ΔZ, I ″} to obtain (a, b, c) by the least square method, and further, the value of the vertex of the Gaussian curve (Z ₀ , I) is determined.
[0048]
Z ₀ = −b / (2a) (14)
I = exp {c−b ² / (4a)} (15)
Thereby, the brightness and relative height of the surface of the sample 10 can be obtained with a resolution equal to or higher than the movement pitch ΔZ. In this case, in the fine mode, since the number of calculation points is 5 and the approximate curve is a Gaussian curve, the height information of the sample 10 can be obtained with higher accuracy.
[0049]
As described above, in the above-described embodiment, the Z stage 12 is set according to the measurement condition data of the light intensity information corresponding to each measurement mode of the high speed mode or the fine mode for acquiring the magnification of the objective lens 9 and the height information of the sample 10. The maximum light intensity information is obtained on the basis of the light intensity information of the respective calculation points obtained discretely for each movement pitch ΔZ by moving the movement pitch ΔZ, and the height of the Z stage 12 corresponding to the maximum light intensity information Since the height information of the sample 10 is acquired from the above, the light intensity information and the height information of the sample 10 can be measured at a high speed by reducing the number of movements of the Z stage 12.
[0050]
In addition, the magnification (for example, 10 times, 20 times, 50 times, 100 times) and measurement mode (for example, high speed mode, fine mode) of the objective lens 9 necessary for measurement by the user can be selected. In addition, the light intensity information and height information of the sample 10 can be measured under the measurement conditions optimum for the measurement mode, that is, the approximate curve, the number of calculation points, and the movement pitch.
[0051]
The brightness and relative height of the surface of the sample 10 can be obtained with a resolution equal to or higher than the movement pitch ΔZ, and the light intensity information and height information of the sample 10 are measured in a short time using the high-speed mode. In addition, the height information of the sample 10 can be obtained with high accuracy by the fine mode.
[0052]
Further, if the magnification and measurement mode of the objective lens 9 are set on the setting screen shown in FIG. 3, the light of the sample 10 is automatically measured under the optimum measurement conditions for the magnification and measurement mode of the objective lens 9 desired by the user. Strength information and height information can be measured.
[0053]
Note that the present invention is not limited to the above-described embodiment, and can be variously modified without departing from the scope of the invention in the implementation stage.
[0054]
Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent requirements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. If the effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.
[0055]
For example, in the above-described embodiment, the high-speed mode and the fine mode can be selected and set as the measurement mode. However, the present invention is not limited to this, and an intermediate mode between the high-speed mode and the fine mode, or the height information of the sample 10 is used. Various modes for measuring can be selected and set. In addition to the quadratic curve and Gaussian curve, other curves may be used as approximate curves, the number of calculation points may be other points, and various changes may be made according to the characteristics of the confocal microscope. Also good.
[0056]
In addition, the confocal microscope is not limited to the configuration shown in FIG. 1. For example, a scanning mechanism that relatively scans the convergent light along the surface of the sample 10 by the objective lens 9 is, for example, perpendicular to the optical axis. An XY stage that moves the sample 10 in the plane may be used. Further, instead of the two-dimensional scanning mechanism 4, a one-dimensional optical scanner may scan the sample 10 with the convergent light of the objective lens 9 on the sample 10 to measure the cross-sectional shape of the sample 10.
[0057]
Further, as a moving mechanism for moving the relative position between the condensing position of the objective lens 9 and the position of the sample 10, for example, a mechanism for moving the objective lens 9 may be used instead of the movement by the Z stage 12, or the objective lens. 9 and the sample 10 may be moved relatively.
[0058]
Further, instead of the pinhole 14, for example, a structure may be adopted in which a Nipkow disk having a plurality of minute openings spirally formed on a disk is rotated at high speed. This Nippon disk also serves as a minute aperture disposed at a position conjugate with the condensing position of the objective lens 9, and a two-dimensional image sensor using a CCD or the like is used as the photodetector 15, for example.
[0059]
As a confocal microscope, various confocal stops are placed at conjugate positions with respect to the focusing position of the objective lens, and pass through the confocal stop when the relative distance between the sample and the objective lens is relatively changed. Applicable to all of the light intensity information obtained by discretely obtaining, estimating the relative distance to obtain the maximum light intensity information based on the light intensity information, and using the relative distance as the height information of the sample. it can.
[0060]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to provide a confocal microscope capable of obtaining height information at high speed under optimum measurement conditions.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an embodiment of a confocal microscope according to the present invention.
FIG. 2 is a schematic diagram of measurement condition data in an embodiment of a confocal microscope according to the present invention.
FIG. 3 is a diagram showing a setting screen in an embodiment of a confocal microscope according to the present invention.
FIG. 4 is a diagram showing light intensity information measured for each movement pitch on the IZ curve in the embodiment of the confocal microscope according to the present invention.
FIG. 5 is a configuration diagram of a conventional scanning confocal optical microscope.
FIG. 6 is a diagram showing the relationship of the output (I) of the photodetector with respect to the relative position (Z) between the sample and the objective lens.
[Explanation of symbols]
1: Light source, 2: Beam splitter, 3: Mirror, 4: Two-dimensional scanning mechanism, 5: First optical scanner, 6: Second optical scanner, 7, 8: Lens, 9: Objective lens, 10: Sample , 11: sample stage, 12: Z stage, 13: imaging lens, 14: pinhole, 15: photodetector, 16: computer, 17: monitor, 20: measurement condition data memory, 21: height information calculation unit .

Claims (3)

It has an objective lens and a confocal stop arranged at a position conjugate to the focusing position of the objective lens, and passes through the confocal stop when the relative distance between the sample and the objective lens is changed. In the confocal microscope which obtains the light intensity information discretely, estimates the relative distance to obtain the maximum light intensity information based on the light intensity information, and uses the relative distance as the height information of the sample,
It has measurement condition data of the light intensity information corresponding to each measurement mode for acquiring the magnification and height information of the objective lens, and the relative distance between the sample and the objective lens is changed according to the measurement condition data. Height information calculation means for acquiring height information of the sample,
A confocal microscope characterized by comprising: The measurement condition data is used for extracting the light intensity information from the approximate curve for estimating the height information from the light intensity information corresponding to the magnification of the objective lens and the measurement mode, and the approximate curve. The confocal microscope according to claim 1, which is a moving pitch when changing the number of calculation points and the relative distance. The confocal microscope according to claim 1, wherein the measurement condition data includes data giving priority to measurement time and data giving priority to measurement accuracy as the measurement mode.

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