JP2003322801A - Ultraviolet microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a UV microscope which is mechanically simple and can be reduced in size. <P>SOLUTION: The UV microscope has a light source adapter 11 which is made incident with the light from a light source 12 for visible light emitting the light of a visible region and a light source 14 for UV light emitting the light of a UV region and selectively emits the UV light or visible light. The microscope illuminates a sample 3 by the light from this adapter 11 through an illumination optical system 7 and forms the optical image of the sample 3 as an enlarged optical image to an imaging plane 26 of a TV camera 25 by an image forming optical system 24 including an objective lens system. At least the optical system 7 and the optical system 24 are formed of optical materials allowing the transmission of the light of the wavelength region from the visible region to the UV region. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet microscope capable of selectively observing an ultraviolet light image and a visible light image of a specimen by switching them.

[0002]

2. Description of the Related Art In recent years, a microscope capable of observing a specimen, which is an object to be observed, with high magnification and high resolution is required. One of them is to use light having an ultraviolet wavelength range. Therefore, an ultraviolet microscope that realizes high resolution has come to be used.

As a conventional technique of such an ultraviolet microscope, Japanese Patent Application Laid-Open No. 11-052253 and Japanese Patent Application Laid-Open No.
The one disclosed in Japanese Patent No. 127096 is known.

Among these, the one disclosed in Japanese Patent Application Laid-Open No. 11-052253 has a visible light source and an ultraviolet light source individually, and is a visible light illumination for guiding the light from the visible light source to an objective lens. An optical system and an ultraviolet light illumination optical system for guiding the ultraviolet light of the selected wavelength range to the objective lens and a wavelength selection means for extracting only the light of the wavelength range necessary for illumination from the light from the ultraviolet light source, respectively, When observing the ultraviolet light image of the sample, the light source for ultraviolet light is turned on and only the light in the required wavelength range is taken out by the wavelength selection means, and the sample is illuminated through the objective lens from the ultraviolet light illumination optical system,
When the visible light image of the sample is observed by collecting the reflected light from the sample with the objective lens and observing the visible light image of the sample, the light source for visible light is turned on and the objective lens from the visible light illumination optical system. The sample is illuminated via the, and the reflected light is condensed by the objective lens to observe the visible light image. In this case, when observing the ultraviolet light image and the visible light image at the same time, it is necessary to turn on the light source for the ultraviolet light and the light source for the visible light at the same time. While both the light source for visible light and the light source for visible light are both turned on, the respective optical paths are blocked by shutters provided in the ultraviolet light illumination optical system and the visible light illumination optical system.

Further, in the one disclosed in Japanese Patent Application Laid-Open No. 5-127096, a light source that emits light in the visible range to the ultraviolet range is used, and an illumination lens, an imaging lens, and a magnifying lens system are used in the visible range. It is made of an optical material capable of transmitting light in a wavelength range extending to the ultraviolet range. Then, the light from the light source is selected as visible light or ultraviolet light by the spectral filter and illuminates the sample through the objective lens, and the reflected light from the sample passes through the objective lens again and is split by the half mirror. The light entering the eyepiece system used for visual observation in the optical path is cut by the ultraviolet cut filter in the optical path, and the light passing through the half mirror enters the magnifying lens system and is received by the TV camera (not shown). It is converted into an image signal and displayed as an observation image on a TV monitor (not shown). That is, the one disclosed in this publication uses a single light source for both visible light irradiation and ultraviolet light illumination, and a switching means for switching between visible light and ultraviolet light in the optical path from the light source to the sample via the illumination optical system. Is provided.

[0006]

However, Japanese Patent Laid-Open No. Hei 11
As disclosed in Japanese Patent Application No. 052253, in the case of observing an ultraviolet light image and a visible light image of a sample, a light source and an illumination optical system that are independent of each other are used for visible light illumination and ultraviolet light illumination, respectively. Since the optical components constituting the optical system and the space for arranging the optical components are required for visible light and ultraviolet light, respectively, there is a problem that the device becomes large.

Further, as in Japanese Patent Laid-Open No. 5-127096, the same light source is used for both visible light illumination and ultraviolet light illumination,
In the configuration in which the switching means for switching visible light and ultraviolet light is provided in the optical path from the light source to the sample through the illumination optical system, the switching means is provided inside the microscope main body. Along with the filter, a moving mechanism that moves this filter in and out of the optical path is required, and the space for that must be secured in the microscope body, so unlike the general visible light microscope configuration, the configuration of the microscope is complicated, This causes a problem of increasing the size.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an ultraviolet microscope having a simple structure and capable of preventing an increase in size.

[0009]

The invention according to claim 1 is
A light source for visible light that emits light in the visible range and a light source for ultraviolet light that emits light in the ultraviolet range, and the light from the light source for visible light and the light source for ultraviolet light is incident to selectively select ultraviolet light or visible light. A light source adapter that emits light, an illumination optical system that illuminates a sample with light from the light source adapter, and an image forming optical system that includes an objective lens system and forms an enlarged optical image of the sample, at least the above. It is characterized in that the illumination optical system and the image forming optical system are formed of an optical material capable of transmitting light in a wavelength range from the visible region to the ultraviolet region.

According to a second aspect of the present invention, in the first aspect of the invention, the image forming optical system has an image forming optical system for forming an enlarged optical image of the sample, and the image forming optical system comprises The feature is that different magnifications can be set by replacement.

According to a third aspect of the present invention, in the second aspect of the invention, the image forming optical system has an optical path dividing means for dividing an optical path of the optical image of the sample, and the optical path dividing means divides the optical path. Further, an image forming optical system for forming an enlarged optical image of the sample is provided for each optical path.

According to a fourth aspect of the present invention, in the second aspect of the invention, the optical path splitting means splits the optical path of the optical image of the sample into the optical paths of the visible light image and the ultraviolet light image, and divides each of the split light paths. An image forming optical system for forming an enlarged optical image of the sample is provided on the optical path of.

According to a fifth aspect of the present invention, in the invention according to any one of the first to fourth aspects, an image pickup means for picking up an enlarged optical image of the sample formed by the image forming optical system and the image pickup means are provided. It is characterized by further comprising display means for displaying a visible light image or an ultraviolet light image of the sample by outputting an image pickup signal.

According to a sixth aspect of the invention, in the invention according to any one of the first to fifth aspects, there is provided an eyepiece tube capable of visually observing a magnified optical image of the sample formed by the image forming optical system. The ultraviolet microscope according to any one of claims 1 to 4, further comprising:

As a result, according to the present invention, it becomes possible to manufacture each optical system of the illumination optical system and the image forming optical system with a simple structure, the structure of the entire microscope can be simplified, and an increase in size can be prevented. can do.

Further, according to the present invention, the magnified optical image of the sample can be observed at different magnifications by making the magnifications of the imaging optical systems combined with the divided optical paths different.

Further, according to the present invention, the visible light image and the ultraviolet light image can be distinguished and observed.

Furthermore, according to the present invention, in addition to the image observation of the magnified optical image by the display means, the magnified optical image of visible light can be visually observed.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 shows a schematic structure of an ultraviolet microscope to which the present invention is applied.

In FIG. 1, reference numeral 1 denotes a microscope main body. The microscope main body 1 is provided with a horizontally arranged base 1a, and the base 1a is provided with upright columns 1b. A stage 2 is provided on the upright support 1b via a focusing mechanism (not shown).

The stage 2 is for mounting the sample 3 on it.
The sample 3 can be moved along the upright column 1b, that is, along the optical axis 9a of the objective lens 9 described later.
In addition to being able to focus, the position of the sample 3 to be observed can be positioned by moving in the plane orthogonal to the optical axis 9a.

An illumination unit 4 is provided at the tip of the column 1b of the microscope body 1 in a direction parallel to the base 1a.

Inside the illumination unit 4, an illumination lens 5 is provided.
And a half mirror 6 is provided. The illumination lens 5 and the half mirror 6 compose the illumination optical system 7, and are both made of an optical material capable of transmitting light in a wavelength range from the visible region to the ultraviolet region. It should be noted that this illumination unit 4 is the same as an illumination unit used in a normal microscope except that the optical components used are made of an optical material capable of transmitting light in the wavelength range from the visible region to the ultraviolet region. The components are almost the same.

A lens revolver 8 is provided below the tip of the illumination unit 4 so as to face the stage 2.
A plurality of objective lenses 9 are attached to the lens revolver 8. In this case, the objective lens 9 mounted on the lens revolver 8 is a combination of an objective lens for visible light and an objective lens for ultraviolet light, and the desired objective lens 9 is aligned on the optical axis 9a by the rotation of the lens revolver 8. It is supposed to be arranged.

A light source mounting portion 10 is provided at the base end of the illumination unit 4. In this light source mounting portion 10,
The light source adapter 11 is connected.

The light source adapter 11 is connected to a light source 12 for visible light which emits light in the visible range.
And a light source mounting portion 15 that connects the ultraviolet light source 14 that emits light in the ultraviolet region.

In this case, the visible light source 12 is a halogen lamp used in an ordinary microscope for observing a visible light image, and the ultraviolet light source 14 is a light of a necessary wavelength in the ultraviolet region. A discharge lamp such as a mercury-xenon lamp that emits is used.

Inside the light source adapter 11, dichroic mirrors 16 and 17 having a characteristic of reflecting light in a wavelength range necessary for ultraviolet light observation and transmitting unnecessary light, and a wavelength of a wavelength necessary for ultraviolet light observation. A bandpass filter 18 that transmits only light, a shutter 19 that is disposed near the light source mounting portion 15 and that blocks the illumination light from the ultraviolet light source 14, and a driving unit 20 that drives the shutter 19 are provided. Here, the shutter 19 is driven by the driving unit 20 to block the ultraviolet illumination light when the ultraviolet light observation is not performed.

An opening 21 is provided above the tip of the illumination unit 4. An imaging optical system 22 is connected to the opening 21. An imaging lens 23 is provided in the imaging optical system 22. This imaging lens 23
Is formed of an optical material capable of transmitting light in a wavelength range from the visible range to the ultraviolet range, and constitutes an image forming optical system 24 for forming an enlarged optical image of the sample 3 together with the objective lens 9. .

Incidentally, the image forming optical system 2 in the present embodiment
2 is an opening 21 of the lighting unit 4,
The imaging optical system 22 having the imaging lenses 23 of different magnifications incorporated therein is selectively combined with the illumination unit 4 so that the observation magnification of the magnified optical image of the sample 3 can be arbitrarily set. It can be changed.

The image forming optical system 22 includes a TV as an image pickup means.
A camera 25 is provided. This TV camera 25
For example, the image pickup surface 26 is composed of a CCD camera.
Are arranged in the same plane as the image plane of the image forming optical system 24.

The image pickup signal of the TV camera 25 received by the image pickup surface 26 is output to the camera controller 27 as an image signal. The camera controller 27 is the TV camera 2
Necessary signal processing is applied to the image signal from No. 5, and the image signal subjected to this signal processing is displayed as an observation image on the TV monitor 28 as a display means.

The TV camera 25 here can input light in the visible region to the ultraviolet region and output an image signal, and the camera controller 27 also outputs the image signal of the TV camera 25. In addition, the magnified optical image of the sample 3 is displayed on the TV monitor 28 as a visible light image or an ultraviolet light image.

Next, the operation of the first embodiment thus constructed will be described.

First, the case of observing visible light will be described.

In this case, by rotating the lens revolver 8, the objective lens 9 for visible light having a desired magnification is arranged on the optical axis 9a.

In this state, the light from the visible light source 12 passes through the dichroic mirror 17 and enters the illumination optical system 7 as visible illumination light. The visible illumination light that has entered the illumination optical system 7 passes through the illumination lens 5, is reflected by the half mirror 6, is changed in direction, passes through the objective lens 9 for visible light, and illuminates the sample 3.

At this time, the ultraviolet illuminating light from the ultraviolet light source 14 is blocked by the shutter 19 driven by the driving means 20 and blocked from entering the light source adapter 11. This is because a discharge lamp such as a mercury xenon lamp used as the ultraviolet light source 14 has a problem in that it takes a long time to stabilize the lighting state due to its principle. This is because it is more convenient to limit the incidence on the illumination optical system 7 by the shutter 19 than to repeatedly turn off the light. Further, the shutter 19 is driven independently of the rotational operation of the lens revolver 8. However, if the lens revolver 8 is of an electric type, the shutter 19 is operated by a control means (not shown) together with the drive means 20. It may be configured as follows.

The reflected light (optical image) from the sample 3 again passes through the half mirror 6 through the objective lens 9 for visible light, and the magnified optical image of the sample 3 is transmitted to the TV by the imaging lens 23.
An image is formed on the imaging surface 26 of the camera 25. And the imaging surface 2
The image pickup signal of the TV camera 25 received by 6 is subjected to necessary signal processing by the camera controller 27, and then T
It is displayed on the V monitor 28 as a visible light observation image.

Next, the case of observing ultraviolet light will be described.

In this case, the objective lens 9 for ultraviolet light is arranged on the optical axis 9a by rotating the lens revolver 8.
Further, the driving means 20 drives the shutter 19 to release the blocking of the ultraviolet illumination light from the ultraviolet light source 14.

In this state, the ultraviolet light from the ultraviolet light source 14 enters the light source adapter 11. The ultraviolet light that has entered the light source adapter 11 is dichroic mirror 16.
As a result, light in a wavelength range including a wavelength necessary for observation with ultraviolet light is reflected, and light having other wavelength components is transmitted. The light reflected by the dichroic mirror 16 enters a bandpass filter 18 that transmits only the light having the wavelength required for the ultraviolet light observation, and the light having the wavelength required for the ultraviolet light observation is extracted. This light is reflected by the dichroic mirror 17 and enters the illumination optical system 7 as ultraviolet illumination light. The ultraviolet illumination light that has entered the illumination optical system 7 passes through the illumination lens 5 and is reflected by the half mirror 6 to change its direction, and the objective lens 9 for ultraviolet light is used.
And illuminates sample 3 through.

At this time, the power supply to the visible light source 12 is stopped, and the visible light source 12 is turned off. Further, the shutter 19 is driven independently of the rotational operation of the lens revolver 8. For example, if the lens revolver 8 is of an electric type, the driving means 20 and the visible light source 12 are energized and illustrated. Alternatively, the control means may be operated in conjunction with each other.

The reflected light (optical image) from the sample 3 again passes through the half mirror 6 through the objective lens 9 for ultraviolet light, and the imaging lens 23 forms an enlarged optical image of the sample 3 on the TV.
An image is formed on the imaging surface 26 of the camera 25. The image pickup signal of the TV camera 25 received on the image pickup surface 26 is subjected to necessary signal processing by the camera controller 27, and then displayed on the TV monitor 28 as an ultraviolet observation image.

Therefore, in this way, the illumination optics for irradiating the sample with the light from the light source adapter 11 for selectively emitting the ultraviolet light or the visible light from the visible light source 12 and the ultraviolet light source 14 as the illumination light. The system 7 and an image forming optical system 24 having an image forming optical system 22 for forming an enlarged optical image of the sample 3 including an objective lens system including an objective lens 9 for visible light and ultraviolet light are visible. Since it is made of an optical material capable of transmitting light in the wavelength range from the visible region to the ultraviolet region and has a common optical path for the light in the wavelength region from the visible region to the ultraviolet region, the illumination optical system 7 and the image forming are formed. It is possible to manufacture each optical system of the optical system 24 with a simple structure, which simplifies the structure of the entire microscope and prevents an increase in size.

(Second Embodiment) Next, the second embodiment of the present invention will be described.
An embodiment will be described.

FIG. 2 shows a schematic configuration of the second embodiment of the present invention. The same parts as those in FIG. 1 are designated by the same reference numerals. In addition, the illumination unit 4, the light source adapter 11, and the visible light source 1 which are common to the configuration of the first embodiment.
2. Regarding the ultraviolet light source 14, the description of its operation will be omitted.

In this case, the image forming optical system 24 is provided with an image dividing unit 29 as a dividing means in the opening 21 of the illumination unit 4. The image splitting unit 29 splits the optical path of the optical image of the sample 3, and the half mirror 3
0 and a mirror 31 are built in. Half mirror 30
Is formed of an optical material capable of transmitting light in the wavelength range from the visible range to the ultraviolet range. The mirror 31 is provided with a coating for totally reflecting the light in the wavelength range from the visible range to the ultraviolet range.

The image division unit 29 includes openings 32, 3
3 is provided. Imaging optical systems 221 and 222 are detachably provided in the openings 32 and 33, respectively. These imaging optical systems 221 (222) are
Imaging lens 231 built-in as in the first embodiment
(232) shows the magnified optical image of the sample 3 on the TV camera 2
An image is formed on the imaging surface 261 (262) of 51 (252).

In the second embodiment, the TV camera 251 (2) is provided to each of the two image forming optical systems 221 (222).
52), a camera controller 271 (272) and a TV monitor 281 (282) are provided, and two observation images can be displayed on each TV monitor 281 (282).

In such a configuration, the visible illumination light (or ultraviolet illumination light) incident on the illumination optical system 7 is transmitted through the illumination lens 5 and reflected by the half mirror 6 to change its direction. Alternatively, the sample 3 is illuminated by passing through the objective lens 9 (for ultraviolet light). Light reflected from sample 3 (optical image)
Passes through the half mirror 6 again through the objective lens 9, enters the image splitting unit 29 through the opening 21, and is split into two optical paths by the half mirror 30.

Of these two optical paths, the half mirror 30
The light from the sample 3 that has passed through is incident on the image forming optical system 221 through the opening 32, and then the magnified optical image of the sample 3 is formed by the image forming lens 231.
Image at 1. The image pickup signal of the TV camera 251 received on the image pickup surface 261 is subjected to necessary signal processing by the camera controller 271 and displayed on the TV monitor 281 as an observation image.

On the other hand, sample 3 reflected by the half mirror 30
The light from is reflected by the mirror 31 to change its direction, enters the image forming optical system 222 through the opening 33, and thereafter, the magnified optical image of the sample 3 is formed by the image forming lens 232 into the image pickup surface of the TV camera 252. The image is formed at 262. This imaging surface 262
The image signal of the TV camera 252 received by is subjected to necessary signal processing by the camera controller 272, and is displayed as an observation image on the TV monitor 282.

Therefore, even in this case, the same effect as that of the first embodiment can be expected. Further, an image division unit 29 is provided in the opening 21 of the illumination unit 4,
The reflected light (optical image) from the sample 3 is incident on the image division unit 29, divided into two optical paths, and enlarged optical images for the respective optical paths are obtained via the imaging optical system 221 (222). , For example, an imaging lens 231 (23) of an imaging optical system 221 (222) that is combined with two optical paths.
By making the magnifications of 2) different, it becomes possible to observe the magnified optical image of the sample 3 at two different magnifications. It is also possible to perform different image processing on the image signals of the TV camera 251 (252) formed by the two image forming optical systems 221 (222) for comparative observation.

In the second embodiment described above, 2
The TV cameras 251, 252, the camera controllers 271, 272, and the image forming optical systems 221, 222, respectively.
Although TV monitors 281 and 282 are provided, for example, T
One V monitor may be provided, and image signals of two observation images may be selectively input and appropriately switched to display an image.

(Third Embodiment) Next, the third embodiment of the present invention will be described.
An embodiment will be described.

In the third embodiment, the image division unit 29 shown in FIG. 2 used in the description of the second embodiment.
The half mirror 30 built in is replaced with a dichroic mirror 301 that transmits visible light and reflects ultraviolet light.

Since the others are the same as those in FIG. 2, the same drawing is used here.

In such a structure, the reflected light (optical image) from the sample 3 again passes through the objective lens 9 and the half mirror 6, passes through the opening 21 and the image division unit 29.
The light in the visible region is transmitted by the dichroic mirror 301, and the light in the ultraviolet region is reflected and separated.

Of these two lights, the light in the visible wavelength range that has passed through the dichroic mirror 301 enters the imaging optical system 221 through the opening 32, and then the imaging lens 2
The magnified optical image of the sample 3 is formed on the image pickup surface 261 of the TV camera 251 by 31. The image pickup signal of the TV camera 251 received on the image pickup surface 261 is subjected to necessary signal processing by the camera controller 271 and displayed on the TV monitor 281 as an observation image.

On the other hand, the light of the wavelength in the ultraviolet region reflected by the dichroic mirror 301 is reflected by the mirror 31 to change its direction, enters the image forming optical system 222 through the opening 33, and then forms the image forming lens 232. The magnified optical image of the sample 3 is formed on the imaging surface 262 of the TV camera 252 by. The image pickup signal of the TV camera 252 received on the image pickup surface 262 is subjected to necessary signal processing by the camera controller 272 and displayed on the TV monitor 282 as an observed image.

Therefore, even in this case, the same effect as that of the first embodiment can be expected. Further, an image division unit 29 is provided in the opening 21 of the illumination unit 4,
Since the magnified optical image of the sample 3 is separated into the visible light image and the ultraviolet light image before being imaged by the imaging optical system,
The visible light image and the ultraviolet light image can be displayed separately on the TV cameras 251 and 252. Further, as the image forming optical system 221 and the TV camera 251 used only for visible light observation, those for visible light which are generally widely used can be diverted.
It is possible to increase the choices of the image observing means and reduce the economical cost.

(Fourth Embodiment) Next, the fourth embodiment of the present invention will be described.
An embodiment will be described.

FIG. 3 shows a schematic configuration of the fourth embodiment of the present invention. The same parts as those in FIG. 2 are designated by the same reference numerals. In addition, the illumination unit 4, the light source adapter 11, and the visible light source 1 which are common to the configuration of the second embodiment.
2. Regarding the ultraviolet light source 14 and the image division unit 29, description of their operation will be omitted.

In this case, the image division unit 29 has a third
In the same manner as described in the above embodiment, the half mirror 30 is used as the dichroic mirror 3 that transmits visible light and reflects ultraviolet light.
Replaced with 01.

An eyepiece tube 34 is provided in the opening 32 of the image division unit 29. The eyepiece tube 34 has an imaging lens 35 and a mirror 37 built therein and an eyepiece 36. As a result, the magnified observation image of the visible light from the sample 3 that has passed through the dichroic mirror 301 and entered through the opening 32 passes through the imaging lens 35, is reflected by the mirror 37, and changes its direction. It is visually observable.

Further, the imaging optical system 22 is detachably provided in the opening 33. The imaging optical system 22 forms an enlarged optical image of the sample 3 on the imaging surface 26 of the TV camera 25 by the imaging lens 23. In addition, the imaging surface 26
The output signal of the TV camera 25 received by is subjected to necessary signal processing by the camera controller 27, and the TV monitor 2
8 is displayed as an observation image.

Therefore, even in this case, the same effect as that of the first embodiment can be expected, and further, the imaging optical system 2
2. In addition to image observation of the magnified optical image by the TV camera 25 and the TV monitor 28, it is also possible to visually observe the magnified optical image of visible light.

In addition, the present invention is not limited to the above-described embodiment, and can be variously modified at the stage of carrying out the invention without departing from the spirit of the invention.

Furthermore, the above-described embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the section of the problem to be solved by the invention can be solved, and it is described in the section of the effect of the invention. In the case where the effect described above is obtained, a configuration in which this constituent element is deleted can be extracted as an invention.

[0072]

As described above, according to the present invention, it is possible to provide an ultraviolet microscope having a simple structure and capable of preventing an increase in size.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.

FIG. 2 is a diagram showing a schematic configuration of second and third embodiments of the present invention.

FIG. 3 is a diagram showing a schematic configuration of a fourth embodiment of the present invention.

[Explanation of symbols]

1 ... Microscope body 1a ... base 1b ... prop 2 ... Stage 3 ... Sample 4 ... Lighting unit 5 ... Illumination lens 6 ... Half mirror 7 ... Illumination optical system 8 ... Lens revolver 9 ... Objective lens 9a ... Optical axis 10 ... Light source mounting part 11 ... Light source adapter 12 ... Light source for visible light 13 ... Light source mounting part 14 ... Ultraviolet light source 15 ... Light source mounting part 16.17 ... Dichroic mirror 18 ... Bandpass filter 19 ... Shutter 20 ... Driving means 21 ... Opening 22 ... Imaging optical system 23 ... Imaging lens 24 ... Image forming optical system 25 ... TV camera 26 ... Imaging surface 27 ... Camera controller 28 ... TV monitor 29 ... Image division unit 30 ... Half mirror 301 ... Dichroic mirror 31 ... Mirror 32.33 ... Opening 34 ... Eyepiece tube 35 ... Imaging lens 36 ... Eyepiece 37 ... Mirror 221.222 ... Imaging optical system 231, 232 ... Imaging lens 251, 252 ... TV cameras 261, 262 ... Imaging surface 271.272 ... Camera controller 281, 282 ... TV monitor

Claims (6)

[Claims] 1. A light source for visible light that emits light in the visible region and a light source for ultraviolet light that emits light in the ultraviolet region, and light from the light source for visible light and the light source for ultraviolet light is incident on the ultraviolet light or visible light. A light source adapter that selectively emits light, an illumination optical system that illuminates a sample with light from the light source adapter, and an image forming optical system that includes an objective lens system and forms an enlarged optical image of the sample. An ultraviolet microscope comprising: at least the illumination optical system and the image forming optical system formed of an optical material capable of transmitting light in a wavelength range from a visible region to an ultraviolet region. 2. The image forming optical system has an image forming optical system for forming an enlarged optical image of a sample, and the image forming optical system can be set to different magnifications by replacement. The ultraviolet microscope according to claim 1. 3. The image forming optical system has an optical path splitting means for splitting an optical path of an optical image of the sample, and an enlarged optical image of the sample is provided for each optical path split by the optical path splitting means. The ultraviolet microscope according to claim 2, further comprising an image forming optical system for forming an image. 4. The optical path splitting means splits an optical path of an optical image of a sample into a visible light image and an optical path of an ultraviolet light image, and forms an enlarged optical image of the sample on each of the split optical paths. 3. The ultraviolet microscope according to claim 2, further comprising an image forming optical system for making the image. 5. An image pickup means for picking up an enlarged optical image of the sample formed by an image forming optical system, and a display means for displaying a visible light image or an ultraviolet light image of the sample by outputting an image pickup signal of the image pickup means. The ultraviolet microscope according to any one of claims 1 to 4, further comprising: 6. The ultraviolet microscope according to claim 1, further comprising an eyepiece tube that allows a magnified optical image of the sample formed by the image forming optical system to be visually observed.