JP2003311589A - Method of machining fine shapes and device of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a machining device capable of precisely machining a mold having fine shapes and provide a method of machining. <P>SOLUTION: The machining device is provided with a machining table which holds an object to be machined and smoothly moves the object to be machined in a horizontal direction, a machining head which is located above the machining table, holds a machining tool for machining the object to be machined and can position a relative position between the object to be machined and the machining tool by moving the machining tool in a vertical direction and a displacement measurement detection device which measures a distance between the machining head and the machining table, and at the time of machining, the displacement measurement detection device measures a relative distance between the machining head and the machining table, whose measurement is reflected to a positioning command value to the machining head to perform machining. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing method and a processing apparatus for forming a fine shape on a mold, and more particularly to a micro prism shape and a microlens shape obtained by transfer molding of a submicron order fine shape from the mold. The present invention relates to a method and an apparatus for processing a metal mold that is a transfer master for obtaining a molded product having an array shape or the like.

[0002]

2. Description of the Related Art As a method for obtaining a submicron-order fine shape, the reverse shape can be obtained by die processing, and the desired shape can be obtained by transfer molding using the die as a mother die. At this time, the precision of the fine shape depends on the precision of the mold, which is the mother mold, and high-precision mold processing is required to obtain a highly accurate molded product. Here, as a method of performing fine die processing, there is a method of cutting using an NC control type ultra-precision processing machine. This is a processing apparatus provided with an XY table that can be moved with high accuracy and with little pitching and yawing error in the horizontal direction, and a Z-direction drive shaft that can be moved in the vertical direction with respect to the XY table.
A machining head for attaching a machining tool is attached to the Z-direction drive shaft.

When a fine prism shape as shown in FIG. 3 is obtained in the processing apparatus, for example, a cutting tool suitable for the desired prism shape is attached to the processing head, and X-
Attach the mold, which is the work piece, to the Y table. For the prism shape, a cutting direction (for example, X direction) and a pitch indexing direction (for example, Y direction pitch) are set, and X-
Attach the mold to one of the moving axes of the Y table. Then, the positional relationship between the cutting tool and the mold is controlled by moving the machining head, that is, the distance between the two is controlled so that the positional relationship is in accordance with the cutting depth, and the cutting amount according to the prism shape is controlled. Set and process. A desired prism shape can be obtained by creating an NC program for controlling the movement of the XY table and the movement of the processing head based on the prism shape and performing continuous groove cutting on the die.

In this case, the relative movement of the die and the cutting tool according to the NC program is performed as follows. Figure 5
As shown in (a), first, the tool is positioned outside the working range of the mold with respect to the cutting direction with the cutting tool and the mold sufficiently separated from each other. The pitch is indexed according to the prism shape and the tool is positioned at the groove cutting position. Subsequently, as shown in FIG. 5B, the cutting tool is moved in the vertical direction with respect to the mold so that a cutting amount corresponding to a predetermined shape can be given. This depth of cut is set by one depth of cut when the depth of the prism shape is small, but when the depth of the prism shape is large, a predetermined amount of depth of cut is performed multiple times at the same pitch indexing position. In order to give a predetermined amount of cut,
After the cutting head is moved in the vertical direction by the processing head, the XY table is moved as shown in FIG. 5C, and the surface of the mold is cut by the cutting tool. After finishing the groove cutting for one pass (one row), the tool is returned to the position before cutting by moving the machining head as shown in FIG.
Further, by moving the XY table, the horizontal direction is returned to the position before cutting. Then, the XY table is moved in the direction perpendicular to the cutting direction to perform pitch indexing and perform the next groove cutting positioning. After that, by repeating the above operation, it is possible to obtain a desired prism-shaped mold.

Further, in Japanese Patent Laid-Open No. 5-57520,
A processing method and a processing apparatus for measuring a distance between a processing head and a moving table on which a workpiece is installed by a displacement sensor and performing feedback control of a cutting depth displacement to process a fine groove are disclosed.

[0006]

In the conventional method,
There are limited shapes that can obtain high-precision fine shapes. Especially when the prism shape has a small pitch and machining takes a long time, the temperature environment factor of the machining equipment causes As a result, the relative position between the machining head and the XY table changes, and the cutting tool bites into the mold more than the set value, or the cutting amount becomes insufficient than the set value. There is a problem that the processing accuracy is reduced. Also, when cutting X-
Due to the heat generated by the motor that is the drive source due to the movement of the Y table and the heat generated by the sliding resistance of the drive mechanism,
Due to the occurrence of thermal expansion centering on the processing table, the relative position between the processing head and the XY table changes, and as a result,
There is a problem that the processing accuracy is reduced. In particular, when the cutting speed is increased, the frictional heat between the XY table and the one supporting the XY table and the heat of the motor become high, so that the influence of heat becomes remarkable.

FIG. 9 is a characteristic diagram showing the relative distance change amount between the machining table and the machining head with respect to the operation time. The horizontal axis represents the operation time and the vertical axis represents the relative distance amount between the machining table and the machining head. As is clear from the figure, initially, the distance change amount increases as the operating time increases, but it stops increasing when the change amount increases to a certain degree, and then gradually decreases while repeating slight increase and decrease. There was a change. It has been confirmed that this change changes depending on the table feed rate and the movement amount.

As a result of these, for example, the prism shape is
As shown in FIG. 4, in the case where the triangular groove shape and the flat portion are mixed, the depth of the cut amount changes due to the decrease in the relative distance, and when the cut amount increases, the flat portion There is a problem that the size becomes small, and when the depth of cut is reduced, the size of the flat part becomes large, resulting in defective machining of the die.

Further, the method disclosed in Japanese Patent Laid-Open No. 5-57520 requires highly precise setup work for installing a dedicated processing device, a displacement sensor, and a reference jig, and requires a metal having various outer dimensions and height dimensions. In the die cutting process, there is a problem that a highly accurate setup work is required each time. Further, in the method disclosed in Japanese Patent Laid-Open No. 5-57520, highly precise setup work is required to install a dedicated processing device, a displacement sensor, and a reference jig, and a die cutting process having various outer dimensions and height dimensions is required. However, there is a problem that a highly accurate setup work is required each time. Further, at the time of cutting, it is necessary to carry out mist spraying in which the cutting oil is sprayed onto the tool and the mold surface. There is a problem that the influence of this mist spray causes disturbance in the sensor part.

An object of the present invention is to solve the above-mentioned conventional drawbacks and to reduce the accuracy due to a change in the external temperature of the processing apparatus and a change in the relative position of the processing head and the XY table due to the movement of the apparatus XY table during processing. The present invention is to provide a processing method and a processing apparatus for suppressing a problem and forming a highly accurate fine shape in a die at high speed and with high accuracy.

[0011]

In order to achieve the object of the present invention, according to the first aspect of the invention, a processing device is provided with a processing table for holding a workpiece and moving it in a horizontal direction, and a processing table arranged above the processing table. And a machining head that holds a machining tool for machining the workpiece, and moves the machining tool in a vertical direction to position a relative position between the workpiece and the machining tool, the machining head, and the machining head. The processing table includes: a displacement measurement detection device that measures a distance from the processing table; and a control device that can control the position of the processing head by reflecting the value measured by the displacement measurement detection device. In the case of moving one direction to process one line and moving the processing table in a direction substantially orthogonal to the one direction to process another line, the control device is operated by the controller before starting the process. Performs positioning of the processing head with respect to the processing table, in the course processing of the one shall,
The position of the processing head is kept constant.

In a second aspect based on the first aspect, the processing head includes a drive mechanism for moving a large stroke by a motor drive source and a fine positioning drive mechanism by a piezoelectric element.

According to a third aspect of the present invention, the processing apparatus holds a processing table which holds a workpiece and moves in a horizontal direction, and a processing tool which is arranged above the processing table and which processes the workpiece. , Which can move the machining tool in the vertical direction to position the workpiece and the relative position of the machining tool, and has a drive mechanism for moving a large stroke by a motor drive source and a drive mechanism for minute positioning by a piezoelectric element. A machining head, a displacement measurement detection device that measures a distance between the machining head and the machining table, and a control device that reflects a value measured by the displacement measurement detection device, and the machining table in one direction. Move and process.

In a fourth aspect based on the third aspect, the control device controls the first control device for controlling a drive mechanism for moving a large stroke and the drive mechanism for minute positioning by a piezoelectric element. A second control device for

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the displacement measurement / detection device includes a displacement detector provided on the machining head and a sensor target provided on the machining table.

In a sixth aspect based on the fifth aspect, the sensor target may measure the sensor target from a length in the vicinity of the width of the sensor target in a direction orthogonal to the processing direction of the workpiece. The length is possible.

In a seventh aspect of the present invention, a machining method includes a step of holding a workpiece on a machining table, and a machining head arranged on the machining table for machining the workpiece on a machining head. A step, a step of measuring a distance between the processing head and the processing table, a step of moving the processing table in one direction to perform one line of processing, and moving the processing table in a direction substantially orthogonal to the one direction. And a step of positioning the machining head by reflecting the control value obtained by the step of measuring the distance before starting the machining, and Positioning the processing head to perform one-line processing, and during the processing of one line, the position of the processing head is kept constant.

In an eighth aspect based on the seventh aspect, the machining head has a drive mechanism for moving a large stroke and a drive mechanism for minute positioning by a piezoelectric element, and is obtained in the step of measuring the distance. And a step of controlling the minute positioning drive mechanism by the piezoelectric element according to the command value.

In a ninth aspect of the present invention, a machining method includes a step of holding a workpiece on a machining table, and a machining head arranged on the machining table for machining the workpiece on a machining head. Step, measuring the distance between the machining head and the machining table, moving the machining table in one direction to perform one-line machining, and moving the machining table in a direction substantially orthogonal to the one direction. And a machining step for performing another machining, and before starting the machining of the one article, using the drive mechanism for moving a large stroke by a motor drive source and the drive mechanism for minute positioning by a piezoelectric element, the machining A step of positioning the head, and in the positioning step, the driving machine for the fine positioning based on the command value obtained in the distance measuring step. To control.

According to a tenth invention, in the ninth invention,
When the processing head is positioned with respect to the processing table to perform one line of processing, the position of the processing head is kept constant during the processing of one line.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings using examples. 1A and 1B are a front view and a side view showing an embodiment of a processing apparatus according to the present invention. FIG. 1A is a front view and FIG. 1B is a side view. In the figure, 1 is a processing device, and 2 is a device frame. The device frame 2 has an XY table 3
And the Z-axis moving mechanism section 4 are provided, and the NC control section 6 is provided.
Are configured so that they can be controlled to move in the XYZ directions respectively. The Z-axis moving mechanism section 4 constitutes a driving mechanism for a large stroke movement by a motor driving source using a ball screw or the like, and the Z-axis moving mechanism section 4 has a machining head 5 for fixing the cutting tool 7. Is equipped with. The machining apparatus 1 fixes a die 8 as a workpiece on the XY table 3 and moves the cutting tool 7 and the die 8 fixed to the machining head 5 relatively to each other. Mold 8 with 7
The fine shape is processed on the surface of. The processing head 5 includes a displacement detector 9, and the XY table 3 includes a target 10 of a displacement detection unit 11. Displacement detector 9
Also, the target 10 constitutes a displacement measurement detection device capable of measuring the relative distance between the machining head 5 and the XY table 3. The output of this displacement measurement detection device is the NC control unit 6
Entered in.

As the displacement detector, a non-contact type displacement sensor such as a capacitance type displacement sensor, an eddy current type displacement sensor or a laser type displacement sensor is used. In the configuration of the processing device 1, the mold 8 is used.
The machining direction feed is performed by moving the XY table 3 in the X direction, and pitch indexing is performed on the XY table 3 in the Y direction.
This is done by moving in the direction. Further, the Z-axis movement mechanism unit 4 moves in the Z direction to perform the cut feed.

The operation of the processing apparatus 1 shown in FIG. 1 is shown in FIG.
This will be described using an example of a prism-shaped mold processing shown in FIG.
FIG. 3 is a perspective view and a sectional view of a prism-shaped mold,
3A is a perspective view, and FIG. 3B is a sectional view taken along line AA. The prism shape shown in FIG. 3 is a shape in which a plurality of groove portions 20 are arranged. 4A and 4B are a perspective view and a sectional view of a prism-shaped mold having a flat portion, FIG. 4A is a perspective view, and FIG. 4B is a sectional view taken along line AA. This prism shape has a flat portion 21 between the groove portions 20.
In order to manufacture the prism shown in FIGS. 3 and 4, the groove portions 20 are processed one by one by moving the tool 7 in the X direction, pitch feed is performed in the Y direction, and further the tool 7 is moved in the X direction. The desired shape can be obtained by repeating the movement of the. Here, FIG. 5 shows the operation of the tool 7 when processing one of the groove portions 20.

FIG. 5 is a side view of the cutting tool and the die for showing the operation of the cutting tool. The groove 20 is processed by performing the operations shown in FIGS. 5 (a) to 5 (d). . First, as shown in FIG. 5A, the tool 7 is positioned at a position slightly separated from the end of the die 8 in the X direction. Next in FIG.
As shown in (b), the position in the Z direction is adjusted so that the tip of the cutting tool 7 is located at the cutting depth of the groove of the die 8 shown by the dotted line. Subsequently, as shown in FIG. 5C, the tool 7 is moved in the X direction with respect to the die 8 to perform cutting work. Here, in an actual processing apparatus, the die 8 moves in the X direction and relatively performs the operation shown in FIG. After the cutting process is completed, the cutting tool 7 is moved in the Z direction as shown in FIG. 5D, further moved in the X direction, and returned to the position shown in FIG. 5A. By performing the operation of FIG. 5B and the pitch indexing operation by the movement in the Y direction,
The prism shape shown in can be processed.

When performing the above-mentioned processing, the XY table 3 shown in FIG. 1 reciprocates in the X direction to generate heat due to the sliding resistance of the drive mechanism in the X direction. In No. 3, the phenomenon of rising in the Z direction occurs. The amount of this increase increases as the reciprocating movement speed of the XY table 3 increases. As the XY table 3 rises, the relative distance to the processing head 5 becomes smaller. The amount of this rise is measured by the displacement detector 9 and the sensor target 10 attached to the machining head 5 and the XY table 3, and the amount of rise is corrected by correcting the cutting amount setting of the tool 7. High-precision processing is possible even underneath.

When performing the correction, the relative position between the machining head 5 and the XY table 3 is measured and corrected in the steps shown in FIG. FIG. 6 is a flowchart showing an embodiment of the processing operation of the processing apparatus shown in FIG. First, step 31
Then, the XY table 3 is moved so that the sensor target 10 is positioned below the displacement detector 9. Further, the Z height position of the processing head 5 is positioned so that the zero point of the detector can be accommodated. This Z height is always positioned at the same position during measurement during the subsequent processing. In step 32, the relative position between the machining head 5 and the XY table 3 is measured at this position and input to the memory. The value measured by the detector is taken into the processing portion of the control unit 6 to calculate the relative position. In step 35, the tool position is set based on the calculated relative position, and in step 36, a tool cutting command is issued, and in step 37, the cutting tool 7 is moved to the Z-axis drive unit 4
Is moved in the Z direction by, and then, in step 38, the XY table 3 is moved in the X direction for cutting. After the second pass, the relative distance between the processing head 7 and the XY table 3 is measured by the displacement detection unit in step 33, and the positional deviation amount is calculated by the controller in step 34. The displacement amount is calculated based on the Z height position measured at the start of processing as a reference. Then, in step 35,
The tool position is set, and thereafter, the cutting is performed using the tool 7 through the steps 36 to 38 described above.

As described above, in this embodiment, the distance between the machining head and the XY table 3 is measured for each pass.
That is, it is performed every time the cutting in the X direction is completed. Even during cutting, if the relative distance between the processing head 7 and the XY table 3 is measured and fed back to the control unit, noise due to vibration or cutting oil spray is introduced and an error occurs. In order to avoid this, in this embodiment, the relative distance between the machining head 7 and the XY table 3 is measured and the position of the tool 7 is set before cutting in each pass. Can be prevented.

7A and 7B are a perspective view and a top view showing an embodiment of arrangement of a die, a sensor target and a cutting tool on an XY table, FIG. 7A being a perspective view and FIG. 7B. Is a top view. FIG. 8 is a top view showing another embodiment of the arrangement of the die, the sensor target and the cutting tool on the XY table. The embodiment shown in FIGS. 7 and 8 only differs in the length of the sensor target 10. That is, the sensor target 10 shown in FIG. 8 is shorter. The sensor target 10 is provided on a part of the XY table 3 and is provided on a side opposite to the cutting movement direction in the X direction so as not to hinder the movement of the cutting tool 7 and the mold 8 during processing. It is located in the position.

In 7 (b), the dimension of the sensor target 10 in the Y direction is substantially the same as the Y dimension of the mold 8. As a result, the displacement detector 9 is placed at the position of the sensor target 10 at any position in the Y direction of the die 8 in the X direction.
The distance can be measured by positioning in the direction.

FIG. 8 shows an example in which the sensor target 10 is arranged with a sufficiently small area within a range where the displacement detector 9 can be sufficiently measured. When the Y dimension of the mold 8 becomes large, it is difficult to accurately arrange the height of the sensor target 10 in the Z direction for all the Y dimensions in the state of FIG. 7B. Therefore, as shown in FIG. 8, the sensor target 10 is made small, the measurement position is set to one point, and the measurement is performed to measure the shape error of the sensor target 10 and the inclination when the sensor target 10 is installed on the XY table 3. It is possible to perform the measurement without the influence of the accuracy decrease due to the error. In this case, a step is provided such that the displacement detector 9 is located above the sensor target 10 during measurement, and a predetermined pitch feed is performed and then post-machining is performed.

FIG. 2 is a front view showing another embodiment of the processing apparatus according to the present invention. In the illustrated embodiment, the processing head 5 is provided with a minute drive mechanism section 12. Micro drive mechanism section 12
For example, a piezoelectric element or a magnetostrictive element may be used. As described above, by providing the machining head 5 with the minute driving mechanism section 12, the movement of the cutting tool 7 in the Z direction is such that the Z-axis driving mechanism 4 moves the large stroke Z1 and the minute driving mechanism section 12 moves the minute displacement Z2. Can be moved. The displacement control of the micro drive mechanism unit 12 is performed by the micro displacement control unit 13 that can be interlocked with the NC control unit to perform the micro displacement movement 12. According to this processing apparatus configuration, even on a commercially available ultra-precision processing apparatus, by mounting the processing head 5 equipped with the minute drive mechanism section 12, correction processing that reflects the measurement results of the displacement detector 9 and the sensor target 10 is realized. it can. In the case of the configuration of FIG. 2, a command value of a correction amount according to the amount of rise of the XY table 3 is commanded to the minute displacement control unit 13. The NC control unit 6 of the processing apparatus 1 creates an NC program based on the design data based on the fine shape. As a result, it is possible to perform highly accurate die machining without adding special processing and functions to the NC control unit 6 and the NC program.

A specific embodiment of the processing apparatus according to the present invention will be described. When the continuous groove processing of the prism-shaped die 8 shown in FIG. 3 is performed by using the processing apparatus 1 shown in FIG.
Mold processing is performed by the method shown in FIG. In this case, the die size in the X direction is 100 mm, and the die size in the Y direction is 70 mm. The pitch indexing dimension in the Y direction is 1 micron. The mold 8 was made of stainless steel having an upper surface plated with copper, and the plated portion was cut with a V-shaped diamond cutting tool to form a groove. When the correction processing was not carried out, the amount of rise of the XY table was as large as about 8 microns within the range of the size in the Y direction of about 20 mm from the start of the processing, and the desired processing could not be performed. Therefore, the processing method according to the present invention was carried out.
For the correction by the displacement detector 9, the correction process described in FIG. 6 was performed every time one groove was processed, and it was possible to perform the groove processing with the dimension of 70 mm in the Y direction. As a result of measuring the mold, it was confirmed that the processing depth was within 0.1 micron when the dimension in the Y direction was 70 mm.

As described above, by using the processing apparatus and the processing method according to the present invention, it is possible to realize highly accurate die processing of a fine shape. Further, by applying the processing method according to the present invention also when performing the reference surface processing of the flat portion before the groove processing, a mold with higher accuracy can be obtained.

In this embodiment, the cutting process at the time of grooving is shown. However, not the cutting tool but the indenter for performing the forming process is attached to the machining head, and the indenter is pressed against the die 8 to form fine unevenness. The method of the present invention is also effective when performing indentation processing to obtain a shape. When performing indentation processing, it is possible to obtain a highly precise fine shape on the surface of the die by correcting the reference plane processing by this processing method and the amount of movement of the tool in the Z direction during indentation processing.

Further, the processing apparatus has been shown by taking the apparatus having the XY table and the Z-axis moving mechanism section shown in FIG. 1 as an example.
The method of the present invention is not limited to this, and may be any device configuration in which the tool and the mold are relatively moved to perform processing.

[0036]

As described above, according to the present invention, it is possible to perform a highly accurate die machining having a fine shape, and it is possible to obtain a highly accurate product which is faithful to the design shape even in the transfer molding product. it can.

[Brief description of drawings]

FIG. 1 is a front view and a side view showing an embodiment of a processing apparatus according to the present invention.

FIG. 2 is a front view showing another embodiment of the processing apparatus according to the present invention.

FIG. 3 is a perspective view and a cross-sectional view of a prism-shaped mold.

FIG. 4 is a perspective view and a cross-sectional view of a prism-shaped mold having a flat portion.

FIG. 5 is a side view of the cutting tool and the mold for showing the operation of the cutting tool.

6 is a flow chart showing an example of a processing operation of the processing apparatus shown in FIG.

7A and 7B are a perspective view and a top view showing an embodiment of arrangement of a die, a sensor target, and a cutting tool on an XY table.

FIG. 8 is a top view showing another embodiment of arrangement of a die, a sensor target and a cutting tool on an XY table.

FIG. 9 is a characteristic diagram showing an amount of change in relative distance between a processing table and a processing head with respect to operating time.

[Explanation of symbols]

1 ... Machining device, 2 ... Device frame, 3 ... XY table, 4 ... Z-axis drive mechanism, 5 ... Machining head, 6 ... NC control unit, 7 ... Cutting tool, 8 ... Mold, 9 ... Displacement detector 10, ...
Sensor target, 11 ... Mutation detection unit, 12 ... Piezoelectric element, 13 ... Micro displacement control section, 20 ... Groove section, 21 ... Flat section.

Continued front page    (72) Inventor Yukio Maeda             292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa             Inside the Hitachi, Ltd. production technology laboratory (72) Inventor Masato Taya             Hitachi 1-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo             Kasei Industry Co., Ltd. (72) Kyohisa Ota             Hitachi 1-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo             Kasei Industry Co., Ltd. F term (reference) 3C001 KA02 KB01 TA03 TB03                 3C029 EE02

Claims (10)

[Claims] 1. A machining table which holds a workpiece and moves in the horizontal direction, and a machining tool which is arranged on the upper part of the machining table and which is used for machining the workpiece, and which vertically moves the machining tool. A machining head that can be moved to position the relative position between the workpiece and the machining tool, a displacement measurement detection device that measures the distance between the machining head and the machining table, and a value measured by the displacement measurement detection device. And a control device capable of controlling the position of the processing head by moving the processing table, moving the processing table in one direction to perform one-line processing, and the processing table in a direction substantially orthogonal to the one direction. When performing the processing of another strip by moving the, before starting the processing, by the control device,
A processing apparatus, wherein the processing head is positioned with respect to the processing table, and the position of the processing head is kept constant during the processing of the one line. 2. The machining apparatus according to claim 1, wherein the machining head includes a drive mechanism for moving a large stroke by a motor drive source and a fine positioning drive mechanism by a piezoelectric element. apparatus. 3. A machining table which holds a workpiece and moves in a horizontal direction, and a machining tool which is arranged on the upper part of the machining table and which is used for machining the workpiece, and which vertically moves the machining tool. A machining head that can be moved to position relative positions of a workpiece and a machining tool, and has a drive mechanism for moving a large stroke by a motor drive source and a drive mechanism for minute positioning by a piezoelectric element, and the machining head. It is provided with a displacement measurement detection device that measures a distance from the processing table, and a control device that reflects the value measured by the displacement measurement detection device, and moves the processing table in one direction for processing. And processing equipment. 4. The machining apparatus according to claim 3, wherein the control device controls a first control device for controlling a drive mechanism for moving a large stroke and a drive mechanism for minute positioning by a piezoelectric element. A processing device comprising a second control device for 5. The processing apparatus according to claim 1, wherein the displacement measurement detection device includes a displacement detector provided on the processing head and a sensor target provided on the processing table. Processing equipment characterized by. 6. The processing apparatus according to claim 5, wherein the sensor target can measure the sensor target from the length in the vicinity of the width of the sensor target in the direction orthogonal to the processing direction of the workpiece. A processing device characterized by a length. 7. A step of holding a work piece on a working table; a step of holding a working tool, which is arranged above the working table, for working the work piece on a working head; Measuring the distance from the processing table, moving the processing table in one direction to perform one-line processing, and moving the processing table in a direction substantially orthogonal to the one direction to perform another one-line processing. Machining step, positioning the machining head by reflecting the control value obtained by the step of measuring the distance before starting the machining, and positioning the machining head with respect to the machining table. Processing one line, and maintaining the position of the processing head constant during the processing of one line. 8. The machining method according to claim 7, wherein the machining head has a drive mechanism for moving a large stroke and a drive mechanism for minute positioning by a piezoelectric element, and is obtained in the step of measuring the distance. And a step of controlling the minute positioning drive mechanism by the piezoelectric element according to the command value. 9. A step of holding a work piece on a working table; a step of holding a working tool, which is arranged on the upper part of the working table, for working the work piece on a working head; The step of measuring the distance to the processing table, the processing table is moved in one direction to perform one-row processing, and the processing table in a direction substantially orthogonal to the one direction is moved to perform another one-way processing. And a step of positioning the processing head by using a drive mechanism for moving a large stroke by a motor drive source and a drive mechanism for minute positioning by a piezoelectric element before starting the one-row processing. In the positioning step, the drive mechanism for minute positioning is controlled by the command value obtained in the distance measuring step. Engineering method. 10. The machining method according to claim 9, wherein when the machining head is positioned with respect to the machining table to perform one-row machining, the position of the machining head is kept constant during the one-row machining. A processing method characterized by maintaining.