JP2003214856A - Vibration gyro sensor, and manufacturing method for the vibration gyro sensor and compound sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the characteristics of a vibrator from being affected by a surrounding magnetic field to facilitate machining, and to advantageously adjust electric characteristics. <P>SOLUTION: A vibrator 2 comprises an integrally sintered body of ceramics along with a support stand 4, and a first flat section 6 that is thinner than the support stand 4 and whose main surface is extended in the vibration direction of the vibrator 2. A detection section comprises the first flat section 6, and a piezoelectric/electrostrictive element 12 for detection that is formed in one piece on the first flat section 6 by a film formation method. A second thin flat section 8 for reducing stiffness in the vibration direction of the vibrator 2 for facilitating vibration is provided integrally to the vibrator 2 so that the main surface is extended vertically to the vibration direction. A drive means 122 comprises a third flat section 10 having a main surface that extends in a direction in parallel with the main surface of the first flat section 6, and being thinner than the support stand 4. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyro sensor, and more particularly to a vibrating gyro sensor for detecting a rotational angular velocity by utilizing a Coriolis force generated when a vibrator rotates while vibrating. The present invention relates to a (scope), a method for manufacturing the same, and a composite sensor having the vibration gyro sensor.

[0002]

2. Description of the Related Art Conventionally, a gyro (scope), which is a sensor for detecting a rotational angular velocity, has been used in an inertial navigation system of an aircraft or a ship. In recent years, however, a car navigation system or a robot unmanned vehicle has been used. It has also come to be used for attitude control of the VTR camera, and also for a screen shake preventing device of a VTR camera. A gyro sensor suitable for use in these various fields requires a small size, and therefore, a vibration gyro sensor has been receiving attention (Patent Documents 1 to 7).

[0003]

[Patent Document 1] Japanese Patent Laid-Open No. 6-258079 (FIG. 1)

[Patent Document 2] Japanese Unexamined Patent Publication No. 4-157311 (FIG. 1,
(Fig. 2)

[Patent Document 3] Japanese Patent Laid-Open No. 4-62414 (FIG. 3)

[Patent Document 4] Japanese Patent Laid-Open No. 60-47913 (FIG. 1)

[Patent Document 5] Japanese Utility Model Publication No. 7-23689 (FIG. 1)

[Patent Document 6] Japanese Patent Laid-Open No. 6-347471 (FIG. 3)

[Patent Document 7] Japanese Utility Model Publication No. 3-90079 (FIG. 1)

[0004]

By the way, as is well known, this type of vibrating gyro sensor (scope) is driven by a vibrator formed of a constant elastic metal represented by an Elinba alloy. Has a basic structure in which a piezoelectric element for detection and a piezoelectric element for detection are adhered, and x, y,
In the Cartesian coordinate system of z, when the vibrator is rotated about the z-axis while the vibrator is bending-vibrated in the x-axis direction by the driving piezoelectric element, the y-direction is applied to the vibrator. The Coriolis force acts, and the bending vibration of the vibrator in the y-axis direction due to this Coriolis force is detected as a voltage by the detecting piezoelectric element, and the angular velocity is obtained from the detected voltage.

However, in such a conventional vibration gyro sensor, the displacement amount of the vibrator due to the vibration caused by the driving piezoelectric element is small, and therefore the piezoelectric element for detection is used. As a result of the small voltage (electromotive force) detected as a result, there is an inherent problem of low sensitivity.

In addition, since the driving piezoelectric element and the detecting piezoelectric element are bonded and fixed to the vibrator with an adhesive, the adhesive is present between the piezoelectric element and the vibrator. There is also a problem that the detection sensitivity becomes low due to the absorption of stress by the adhesive.

In the case where the vibrator is composed of a tuning piece or a member made of a tuning fork made of an elinvar alloy, the characteristic of the oscillator is that the magnetic field of the surroundings is because the elinvar alloy is a ferromagnetic material. In addition, there is a problem that the processing is difficult when adjusting the resonance frequency of the vibrator due to the shape and material of the vibrator.

Here, the present invention has been made in view of such circumstances, and its problem is to provide a vibration gyro sensor excellent in sensitivity by solving the above problems. To provide a vibration gyro sensor made of ceramics, in which the characteristics of the oscillator are not easily affected by the surrounding magnetic field, the processing is easy, and the electrical characteristics can be advantageously adjusted. Especially.

[0009]

In the vibrating gyro sensor according to the present invention, the whole body is composed of an integrally fired body of ceramics, and no magnetic body is used. In addition to being hardly affected, the thin first plate-shaped portion and second thin plate-shaped portion are provided as the easily bendable portions in each of the driving direction and the detection direction in which the vibrator is displaced. Therefore, a large displacement can be obtained in both the detection direction and the driving direction, so that the electromotive force (voltage) corresponding to the displacement detected by the piezoelectric / electrostrictive element becomes large and the detection sensitivity is increased. It can be effectively enhanced. In particular, since the detector has a structure in which stress is concentrated, a large output can be obtained.

Moreover, in the vibration gyro sensor according to the present invention, the piezoelectric / electrostrictive element for detection is attached to the first plate-shaped portion which provides the detection portion constituted by the integrally fired body of ceramics. Are integrally formed by a film forming method, and the first plate-shaped portion and the piezoelectric / electrostrictive element are in direct contact with each other without an adhesive layer interposed. The piezoelectric / electrostrictive element can effectively detect the displacement (bending vibration) of the oscillator due to the Coriolis force caused when the oscillator rotates because the absorption of the stress due to the existence is effectively avoided. It is possible to contribute to the improvement of the sensitivity.

Further, in the vibrating gyro sensor according to the present invention, the electrode area and the like in the piezoelectric / electrostrictive element provided in the detecting portion can be easily changed by an appropriate removing means such as a laser, It has a feature that adjustment of its electrical characteristics is easy.

In this case, the vibrator may be provided with a thin cutout portion extending from the tip thereof, and the resonance frequency of the vibrator may be adjusted according to the cutout amount of the cutout portion. The thin cut-off portion provided at the end of the oscillator is a portion that can be easily processed, and such a trimming cut-off portion is provided in advance, and the cut portion is appropriately cut by laser processing, ultrasonic processing, or the like. The resonance frequency of the vibrator can be easily adjusted to a desired value by cutting off with a means.

In the above structure, two vibrators may be supported in parallel with each other on the abutment, and the driving means may excite the two vibrators in opposite directions. In this case, the driving means is thinner than the vibrator, and the third plate-shaped portion is formed of an integrally fired body of ceramics together with the vibrator, and a film forming method on the third plate-shaped portion. It is possible to configure by having a driving piezoelectric / electrostrictive element integrally formed in.

Further, in the above-mentioned structure, the support columns are arranged between the two vibrators and at a position away from the vibrators, and the support columns are integrally supported on the abutment together with the two vibrators. You may

Further, in the above structure, the abutment may be constituted by a mounting frame portion which is located outside the vibrator at a predetermined distance so as to surround the vibrator. By providing a mounting frame, the vibration gyro
The sensor can be firmly fixed, and the flexibility of the installation location is great.

The following arrangements can be adopted for the arrangement position of the driving means. That is, the driving means may be integrally provided between the two vibrators, or may be integrally provided between the second plate-shaped portions.

In the case where there is a column, the driving means may be integrally provided between each of the transducers and the column, or the second plate-shaped portion and the column. You may make it integrally provide with the support | pillar, respectively.

When there is a mounting frame portion, the driving means may be integrally provided between each of the vibrators and the mounting frame portion, or each of the second plate-shaped portions and the You may make it integrally provide with the mounting frame part, respectively.

Next, in the second type of vibrating gyro sensor according to the present invention, a second plate-like member is provided at a portion opposite to a frame body supporting two vibrators. Portion and a third plate-shaped portion are integrally provided, a driving piezoelectric / electrostrictive element is integrally formed on the third plate-shaped portion, and the frame is formed by the driving piezoelectric / electrostrictive element. The two vibrators can be excited and vibrated by the deformation vibration of the body.

In addition, in the vibration gyro sensor which performs such a deformation vibration of the frame body, in order to facilitate the fixing of the frame body, the second plate-shaped portion of the frame body is fixed. A configuration in which an attachment portion for fixing the frame body is integrally formed on the outer surface of the forming portion is advantageously adopted, and the attachment portion of the frame body surrounds the frame body. A structure that integrally has a mounting frame portion located outside with a predetermined distance is advantageously adopted. With such a mounting frame portion, firm fixing of the vibration gyro sensor can be realized.

Next, in the third type of the vibration gyro sensor according to the present invention, unlike the above-mentioned two types of vibration gyro sensors, an abutment supporting two vibrators respectively. The parts are separately deformed and vibrated by the driving piezoelectric / electrostrictive elements provided on the third plate-like part that connects the outer mounting frame part to each of the abutment parts. The two supported oscillators are separately vibrated in the same plane.

The third type of the vibration gyro sensor, together with the second type described above,
Advantageously, the oscillator has a thin-walled cutout portion extending from its tip, and the resonance frequency of the vibrator is adjusted according to the cutout amount of the cutout portion. As a result, trimming can be easily performed by a cutting means such as laser processing or ultrasonic processing, thereby facilitating adjustment of the resonance frequency.

Next, in the vibration gyro sensor of the fourth type according to the present invention, first, in the state where the vibrator is vibrating, the one direction and the extending direction of the abutment are set. When an angular velocity is applied around an axis orthogonal to the plane containing the force, the force in one direction (Coriolis force) is alternately generated on the vibrator along with the vibration, and as a result, the one direction is applied to the detection unit. A force acts on the detector, and the detector vibrates due to this force. That is, a rotational vibration is generated around the rotation axis in a portion including the vibrator and the abutment, and the vibration is detected as an electromotive force (voltage) by the piezoelectric / electrostrictive element in the detection unit.

In this case, since the vibrator, the abutment, and the detecting portion are all formed of an integrally fired body of ceramics, the constituent material thereof does not include a magnetic body such as the conventional Erinba alloy. As a result, the characteristics of the sensor are not affected by the surrounding magnetic field.

Further, the detecting portion is composed of a first plate-shaped portion which is thinner than the vibrator in the height direction,
Since the structure is low in rigidity, when the angular velocity causes vibration around the rotation axis, a large strain is obtained in the detection unit, and the detection sensitivity of the piezoelectric / electrostrictive element is significantly improved.

In particular, in the vibrating gyro sensor according to the present invention, since the detecting portion vibrates only when the angular velocity is applied, the output from the piezoelectric / electrostrictive element in the absence of the angular velocity. (Null voltage) becomes very small, and the detection sensitivity is greatly improved. In addition, the probability of occurrence of fatigue damage in the detection portion due to vibration is reduced, and the sensor life can be extended.

Further, since the structure does not measure the angular velocity around the major axis of the vibrator but the angular velocity around the axis orthogonal to the plane including the one direction and the extending direction of the abutment, the vibration is generated. The child, the abutment, and the frame can be thinned in the height direction, and the size and weight of the sensor can be reduced.

Since the vibrator does not have a thin-walled detecting portion and is structured to be independently supported by a high-strength abutment, the vibrator itself can be made to have a large mass. Since the Coriolis force (Fc = 2 mΩ) generated in the child becomes large, it is possible to realize high sensitivity regarding the strain detection in the detection unit.

In the vibrating gyro sensor according to the present invention, the detection unit includes a ring member formed between the abutment and the frame body, and the detection member is parallel to the extending direction of the abutment in the ring member. You may make it comprise by the said 1st plate-shaped part built in.

In this case, when an angular velocity is applied around an axis orthogonal to the plane including the one direction and the extending direction of the abutment while the vibrator is vibrating, The force acts in the one direction, and the action of this force causes the ring member to vibrate while having an elliptical shape having the major axis or the minor axis in the one direction.

The vibration of the ring member along the one direction is detected as an electromotive force (voltage) by the piezoelectric / electrostrictive element.

In the vibration gyro sensor according to the present invention, at least two vibrators are supported on the abutment in parallel with each other, and the vibrators are excited in opposite directions between the two vibrators. You may make it arrange | position the drive means for vibrating.

In this case, the at least two oscillators vibrate in directions opposite to each other, that is, in directions in which they separate from and approach each other in one plane (the plane including the one direction and the extending direction of the abutment). Will be done. As the driving means, for example, a third plate-shaped portion that is thinner than the vibrator in the height direction and is formed of an integrally fired body of ceramics together with the vibrator, and the third plate A piezoelectric / electrostrictive element for driving formed on the cylindrical portion may be provided.

In the above structure, the driving means is the two
You may make it provide integrally between two vibrators. In particular, if the driving means is arranged on the line connecting the centers of gravity of the both vibrators, it is possible to efficiently bring the at least two vibrators closer to or farther from each other, and the detecting unit This is advantageous in improving the sensitivity of. Further, the driving means may be integrally provided between the vibrators and the abutment.

In the above structure, it is preferable to provide reference means for feedback control so that the vibration of the driving means becomes constant. This reference means
A fourth plate-shaped portion that is thinner than the vibrator in the height direction and is made of a ceramics integrally-fired body together with the vibrator, and a reference formed on the fourth plate-shaped portion. The piezoelectric / electrostrictive element can be configured to be used.

The reference means may be integrally provided between the vibrators, or may be integrally provided between the vibrators and the abutment.

Further, in the above structure, it is possible to integrally provide a vibrating section between each of the vibrators and the abutment. The vibrating section is disposed between the vibrator and the abutment and connects the fifth plate-shaped section extending parallel to the longitudinal direction of the abutment and the abutment and the fifth plate-shaped section. A sixth plate-shaped portion and a seventh plate-shaped portion that connects the vibrator and the fifth plate-shaped portion can be configured. In this case, the driving means may be integrally provided between the respective vibration units, or may be integrally provided between the respective vibration units and the abutment.

Further, in the above structure, the first thin wall for adjusting the resonance frequency on the driving side is provided at the free end of the vibrator.
And a thin second protrusion for adjusting the resonance frequency on the detection side at both ends of the abutment in the longitudinal direction. Further, the first and second protrusions are provided on the vibrator. Also, it may be configured with the abutment to be an integrally fired body of ceramics.

In this case, the resonance frequency on the drive side can be adjusted by trimming processing (cutting processing) on the first overhang portion, and the resonance frequency on the detection side can be trimmed processing (cutting processing) on the second overhang portion. Can be adjusted at. That is, since the resonance frequencies of the drive side and the detection side can be adjusted independently, it is possible to avoid the disadvantage that the resonance frequency of the detection side is affected by the adjustment of the resonance frequency of the drive side. In the adjustment of the resonance frequency, it is preferable to first adjust the resonance frequency on the drive side and then adjust the resonance frequency on the detection side.

The first and second overhanging portions may be formed, for example, in the shape of a plate that is thin in the height direction with respect to the vibrator, or may be supported by the vibrator. It may be configured to have a thin plate shape in the extending direction of the table. In the case of the former configuration, there is an advantage that the trimming process can be easily performed only by scanning the laser beam from the upper surface, and in the case of the latter,
Since the site to be trimmed exists over the entire surface perpendicular to the vibration direction of the vibrator, the mass balance becomes very good. As the trimming process in this case, for example, after laser irradiation, a hit such as an ultrasonic wave is applied,
This is done by removing unnecessary parts.

Further, in the above structure, the third plate-shaped portion of the driving means is also used as an object of adjustment of the resonance frequency on the driving side, and the first plate-shaped portion of the detection portion adjusts the resonance frequency of the detection side. You may make it serve as a target. Specifically, the resonance frequency on the drive side is adjusted by trimming the width direction of the third plate-shaped portion of the drive means, and the first frequency of the detection portion is adjusted.
The resonance frequency on the detection side is adjusted by trimming the plate-shaped portion in the width direction. That is, the resonance frequencies of the driving side and the detecting side are not adjusted by changing the masses of the vibrator and the support, but the driving side is changed by changing the spring constants of the third plate-shaped portion and the first plate-shaped portion. And a method of adjusting the resonance frequency on the detection side.

In this case, since it is not necessary to form the first overhanging portion and the second overhanging portion on the free end of the vibrator and both ends in the longitudinal direction of the abutment, respectively, the manufacturing process can be simplified and the trimming is performed. Since the portion to be processed is thin, the resonance frequency can be easily adjusted. Further, unlike the method of adjusting the resonance frequency by changing the mass, the resonance frequency on the drive side and the resonance frequency on the detection side can be adjusted completely independently.

Next, in the fifth type of vibrating gyro sensor according to the present invention, since the vibrator is constituted by the wide and long first plate-shaped portion, the mass of the vibrator is large. Also, the moment is increased, and as a result, the speed (∝ amplitude) due to the drive vibration is increased, so that the sensitivity can be further improved.

The detection piezoelectric / electrostrictive element may be integrally formed on almost the entire surface of the first plate-shaped portion. In this case, a large amount of electric charge can be stored, which is advantageous in the current detection method.

Further, in the above structure, a plurality of recesses are provided on the back surface of the first plate-shaped portion, and the detection piezoelectric / electrodes are provided at positions corresponding to the plurality of recesses on the surface of the first plate-shaped portion.
The electrostrictive element may be formed in an island shape. In this case, since the strength of the portion of the first plate-shaped portion where the recess is formed is reduced, when the first plate-shaped portion is deformed by the Coriolis force, the recessed portion is formed at the portion where the recess is formed. Distortion is greater than that of the area without. Therefore, by forming the detecting piezoelectric / electrostrictive element in the portion corresponding to the concave portion, a large detection output can be obtained, and the sensitivity can be further improved.

In the above structure, a thick block portion may be integrally provided between the first plate-shaped portion and the second plate-shaped portion. In this case, the presence of the block portion can increase the strength of the boundary portion, which is advantageous in improving reliability.

The abutment may be composed of a frame body which is located outside the vibrator at a predetermined distance so as to surround the vibrator. By using the abutment as a frame, the degree of freedom in mounting is wide and the rigidity is good, which is preferable in practice.

The drive means may be integrally provided between the second plate-shaped portions, or may be integrally provided between the block portions. Further, it may be integrally provided between the block portion and the frame.

In the above structure, it is preferable to provide reference means for feedback control so that the vibration of the drive means becomes constant. This reference means
It can be integrally provided between the respective second plate-shaped portions.

It is also possible to integrally provide the driving means on one plate-shaped portion of the respective second plate-shaped portions and integrally provide the reference means on the other plate-shaped portion. .

In this case, a relay portion having a free end is integrally provided at substantially the center of the side surface of the abutment facing the vibrating portion, and the one second plate-shaped portion and the relay portion are connected to each other. It is possible to adopt a configuration in which the drive means is integrally provided between the second plate-shaped portion and the relay portion and the reference means is integrally provided between the second plate-shaped portion and the relay portion.

Further, a plurality of relay portions each having a free end are integrally provided at positions of both ends in the width direction of the side surface facing the vibrating portion of the abutment, and one of the second plate-shaped portions is provided. It is also possible to adopt a configuration in which the driving means is integrally provided with one relay portion, and the reference means is integrally provided between the other second plate-shaped portion and the other relay portion. it can.

Further, in the above structure, a mounting portion for fixing the abutment is integrally provided on a surface of the abutment opposite to a surface on which the second plate-shaped portion is formed, A fifth plate-shaped portion, which is thin in the width direction of the abutment, is integrally provided between the abutment and the mounting portion, and at least the abutment and the vibrator form a tuning fork body. You may do it. In this case, since the fifth plate-shaped portion functions as a support rod that supports the tuning fork body, it is easy to differentiate the mode required and the mode not required in the vibration gyro sensor, and the detection accuracy is improved. Can be improved.

In the above structure, it is preferable that the mounting portion is constituted by a mounting frame portion that is located outside the tuning fork body with a predetermined distance so as to surround the tuning fork body.
In this case, the detection accuracy can be improved, and since the mounting portion is the mounting frame portion, it is practically preferable in terms of the degree of freedom of mounting, rigidity, and the like.

In the structure having the mounting frame portion, the vibrator is formed so as to bridge between a pair of inner wall surfaces of the mounting frame portion along the extending direction of the vibrator. It is possible to adopt a configuration in which the support portion is integrally installed so as to face upward, and the fifth plate-shaped portion is integrally provided between the support portion and the abutment.

In this case, even if the length of the fifth plate-shaped portion is lengthened, the total length of the sensor can be maintained within a certain range, so that the fifth plate-shaped portion can be extended. It becomes possible and the detection accuracy can be further improved.

Further, according to the present invention, in the above-mentioned vibration gyro sensor, which is provided with the mounting frame portion, the second frame which is adjacent to the mounting frame portion and is integral with the mounting frame portion is provided. A mounting frame portion is provided, and in the second mounting frame portion,
It is also advantageous to realize a composite sensor by integrally supporting another sensor having a function different from that of the vibration gyro sensor.

Particularly, in the conventional vibration gyro sensor, only the element having only one function is realized, but as described above, the mounting frame portion is utilized to have another function. When the sensor is provided, it is possible to easily form not only a function as a vibration gyro sensor but also a composite sensor or an integrated sensor capable of performing other functions at the same time.

Next, in the method of manufacturing a vibration gyro sensor according to the present invention, at least a substrate layer and a thin plate layer made of a green sheet are laminated and integrated, and then fired to form a vibrator having a long axis in one direction. And a support that extends in a direction orthogonal to the one direction and that supports one end of the vibrator, and a frame surface that is parallel to a surface including the one direction and the extending direction of the support, And a step of producing a fired body integrally including a frame body surrounding the vibrator and the abutment, and a detection unit attached between the abutment and the frame; A step of forming an electrostrictive element by a film forming method,
The method further includes trimming a part of the vibrator to adjust the resonance frequency on the driving side, and trimming a part of the abutment to adjust the resonance frequency on the detection side.

In this method, the vibration gyro sensor having a structure in which the abutment and the vibrator are surrounded by the frame and the abutment and the frame are connected by the detecting portion is easily and highly reliable. Can be manufactured with. Further, by trimming a part of the vibrator and a part of the abutment, respectively, the resonance frequencies on the drive side and the detection side can be easily adjusted, which is advantageous in reducing the number of steps.

As the vibrating gyro sensor, at least two vibrators are supported by the abutment in parallel with each other, and between the two vibrators, the vibrators are excited and vibrated in opposite directions. Drive means is provided, the drive means is thinner than the vibrator in a height direction thereof, and the third plate-shaped portion is formed together with the vibrator by an integrally fired body of ceramics; You may make it use what has the piezoelectric / electrostrictive element for a drive formed on the 3rd plate-shaped part.

Further, adjustment of the resonance frequency on the driving side is
Trimming is performed on the thin first projecting portion that integrally projects from the free end of the vibrator, and the resonance frequency on the detection side is adjusted by thinly projecting from both ends in the longitudinal direction of the abutment. It may be performed by trimming the second overhang portion. In this case, the resonance frequency on the drive side can be adjusted by trimming processing (cutting processing) on the first overhanging portion, and the resonance frequency on the detection side can be adjusted by trimming processing (cutting processing) on the second overhanging portion. can do. That is, since the resonance frequencies of the drive side and the detection side can be adjusted independently, it is possible to avoid the disadvantage that the resonance frequency of the detection side is affected by the adjustment of the resonance frequency of the drive side.

Further, the resonance frequency on the drive side is adjusted by trimming the width direction of the third plate-shaped portion in the drive means, and the resonance frequency on the detection side is adjusted by the trimming in the detection section. Alternatively, the trimming process may be performed in the width direction of the plate-shaped portion 1.

In this case, the resonance frequencies of the driving side and the detecting side are not adjusted by changing the masses of the vibrator and the abutment, but the spring constants of the third plate-shaped portion and the first plate-shaped portion are adjusted. This is a method of adjusting the resonance frequency on the drive side and the detection side by changing the resonance frequency. Therefore, since it is not necessary to form the first overhanging portion and the second overhanging portion on the free end of the vibrator and on both ends in the longitudinal direction of the abutment, respectively, the manufacturing process can be simplified, and the portion to be trimmed Since the thickness is thin, it is easy to adjust the resonance frequency. Further, unlike the method of adjusting the resonance frequency by changing the mass, the resonance frequency on the drive side and the resonance frequency on the detection side can be adjusted completely independently.

It is preferable to adjust the resonance frequency on the detection side after adjusting the resonance frequency on the drive side.

[0066]

BEST MODE FOR CARRYING OUT THE INVENTION In order to more specifically clarify the present invention, the configuration of the present invention will be described with reference to various specific examples of a vibration gyro sensor shown in the drawings.
It will be described in detail.

First, in an example (first specific example) of the vibration gyro sensor according to the present invention shown in FIG.
Two long rectangular rod-shaped vibrators 2 each having a rectangular cross-sectional shape and made of a fired body of ceramics are arranged in parallel with each other at a predetermined interval, and the two vibrators 2 and 2 are arranged in parallel with each other. At the base end side, they are integrally connected to and supported by rectangular rectangular rod-shaped abutments 4 made of a fired body of ceramics. Further, in each transducer 2, a portion slightly close to the abutment 4 is made thin, and a first plate-shaped portion 6 serving as a detection portion, whose main surface extends in the arrangement direction of the transducers 2, 2, It is formed integrally. Further, the base end side portion of each vibrator 2 is
A thin second plate-shaped portion 8 having a main surface extending in a direction perpendicular to the first plate-shaped portion 6 and having a width smaller than the width of the second plate-shaped portion 8. It is integrally connected to the abutment 4 via the. Furthermore, these two oscillators 2, 2
Is more than the vibrator 2 having a main surface parallel to the main surface of the first plate-shaped portion 6 at a portion between the first plate-shaped portion 6 and the second plate-shaped portion 8. The thin third plate-shaped portions 10 are integrally connected to each other. in short,
The two vibrators 2, 2, the abutment 4, the first plate-shaped portion 6,
6, the second plate-shaped portions 8 and 8 and the third plate-shaped portion 10 are formed of an integrally fired body of ceramics, and thus have an integrated structure.

That is, the vibrating gyro sensor constituted by such an integrally fired body of ceramics is understood as an integrally laminated body of the thin plate layer 22, the substrate layer 24 and the spacer layer 26 as shown in FIG. Can, there, first
The plate-like portion 6 and the third plate-like portion 10 are provided by the thin plate layer 22, while the vibrator 2 and the second plate-like portion 8 are provided by laminating and integrating the thin plate layer 22 and the substrate layer 24. It will be. Further, the support 4 is provided by integrally laminating the thin plate layer 22, the substrate layer 24 and the spacer layer 26.

The detecting piezoelectric / electrostrictive elements 12 are integrally formed on the thin first plate-like portion 6 formed on each vibrator 2 by a known film forming method. ing. The piezoelectric / electrostrictive element 12 for detection has a thin-film lower electrode 12a as shown in an enlarged view in FIG.
In the form in which the piezoelectric / electrostrictive layer 12b and the upper electrode 12c are laminated and integrated, the piezoelectric / electrostrictive layer 12b and the upper electrode 12c are directly formed on the first plate-shaped portion 6. This detecting piezoelectric / electrostrictive element 12
Is to detect vibration or displacement caused in the vibrator 2 in a direction perpendicular to the arrangement plane of the two vibrators 2. Further, the driving piezoelectric / electrostrictive element 14 as the driving means is integrally formed on the third plate-shaped portion 10 by a known film forming method in the same configuration as the detecting piezoelectric / electrostrictive element 12. It is made to form. By the driving of the driving piezoelectric / electrostrictive element 14, the two vibrators 2, 2 are bent and vibrated in the arrangement planes thereof in the directions opposite to each other in the x-axis direction, that is, in the directions in which they approach and separate from each other. It is designed to be punished.

In addition, thin-walled cut-out portions 16 and 16 integrally extending from the tip end portion of each vibrator 2 opposite to the connecting portion to the abutment 4 are provided, The cutout portion 16 can be easily trimmed by laser processing, ultrasonic processing, or the like. The abutment 4 has an upper surface flush with the upper surface of the vibrator 2, and has a thickness thicker than the vibrator 2, so that the lower surface of the abutment 4 is lower than the vibrator 2. It is located in. That is, the abutment 4 is provided at the bottom of FIG.
The spacer portion 18 for providing the spacer layer 26 is integrally provided, and the spacer portion 18 is thicker than the vibrator 2 by the thickness of the spacer portion 18. Such a spacer part 1
Even if the vibrating gyro sensor is attached to the flat mounting surface in the vertical direction at the abutment 4 portion by the bolts 20, the vibrators 2, 2
However, it does not interfere with such a mounting surface.

Therefore, the vibration gyro having such a structure
In the case of a sensor, a driving piezoelectric / actuator
When the third plate-shaped portion 10 is deformed by driving the electrostrictive element 14, the two vibrators 2 and 2 move in the x-axis direction in the Cartesian coordinate system of x, y, and z in FIG. Excited vibrations (bending vibrations) are made in the opposite directions, in other words, in the directions of approaching and separating from each other. And
In such a state, when a rotational force about the z-axis acts on the vibrators 2 and 2, the y-axis direction is applied to the vibrators 2 and 2 based on the angular velocity about the z-axis. The Coriolis force acts, and the Coriolis force causes the vibrators 2 to vibrate in the opposite directions in the y-axis direction. Then, such bending vibration of the vibrators 2 and 2 in the y-axis direction is detected by the piezoelectric / electrostrictive element 12 for detection.
It is detected by 12 as an electromotive force (voltage).

As described above, in such a vibration gyro sensor, since the entire body is made of a ceramics integrally fired body, the constituent material thereof should be a magnetic body such as the conventional Erinba alloy. Therefore, there is no problem that the characteristics of the sensor are affected by the surrounding magnetic field.
The electrostrictive element 12 and the driving piezoelectric / electrostrictive element 14 are directly and integrally formed on the first plate-shaped portion 6 and the third plate-shaped portion 10 by a film forming method. From the place where there is no adhesive layer between the plate-shaped part,
The problem of reduction in sensitivity due to absorption of stress by the adhesive layer and the like can be effectively solved.

Moreover, the driving piezoelectric actuator /
Since the electrostrictive element 14 is integrally formed on the thin third plate-shaped portion 10, the driving piezoelectric / electrostrictive element 14 can be advantageously deformed by driving.
Each transducer 2 is integrally connected to the abutment 4 by a thin second plate-shaped portion 8, and the second plate-shaped portion 8 is
Since the main surface is a thin plate portion that extends in the direction (y-axis direction) perpendicular to the vibration direction (x-axis direction) of the vibrator 2, the rigidity in the vibration direction is effectively reduced, and vibration is easy. Therefore, a large displacement can be obtained by the driving vibration of the driving piezoelectric / electrostrictive element 14 of the vibrator 2. In particular, by reducing the width (thickness) to height ratio of the second plate-shaped portion 8, it is possible to suppress the vibration in the vertical direction (y-axis direction) that causes a decrease in sensitivity. . Even if the piezoelectric / electrostrictive element 12 for detection is provided, the main surface of the first plate-shaped portion 6 integrally formed with the piezoelectric / electrostrictive element 12 has a main surface in the vibration direction (x
It is formed thinner than the vibrator 2 so as to extend in the axial direction, in other words, so as to be located in the vibration plane of the vibrator 2, and this is caused by the Coriolis force. A large displacement is obtained when bending vibration in the y-axis direction, which is a direction perpendicular to the x-axis direction, occurs.

As described above, since a region that is easily bent exists in both the detection vibration direction (y-axis direction) and the drive vibration direction (x-axis direction), a large displacement can be obtained in both driving and detection. From the above, the sensitivity of the vibration gyro sensor can be remarkably enhanced, and in particular, the first plate-shaped portion 6 provided with the detection piezoelectric / electrostrictive element 12 that provides the detection portion is thin. As a result, the stress is concentrated so that a large output can be obtained.

Further, in the above-mentioned specific example, the vibrator 2
Since the thin cut-out portion 16 integrally extending from the tip of the cutting portion is provided, it is possible to easily perform trimming processing such as laser processing or ultrasonic processing on the cut-out portion 16 to cause vibration. The resonance frequency of the child 2 can be easily adjusted. In addition, the detection piezoelectric / electrostrictive element 12 and the driving piezoelectric /
In the electrostrictive element 14, it is possible to easily change the electrode area of the electrostrictive element 14 by using a laser or the like, and it is possible to easily adjust the electrical characteristics thereof.

In addition, in the structure of the vibration gyro sensor according to this example, the third plate-shaped portion 10 on which the driving piezoelectric / electrostrictive element 14 is provided includes the two vibrators 2 and 2. Since the vibrators 2 and 2 are integrally formed so as to bridge between the base-side end portions, the vibrations of the vibrators 2 and 2 are generated in the third plate-shaped portion 1.
It also has an advantage that the constraint of 0 can be effectively suppressed.

By the way, the vibration gyro sensor according to the present invention can have various structures in addition to the structure of the above example, within a range not departing from the gist of the present invention.
A typical example thereof is shown in FIG. 4 and subsequent figures. The description of those examples will be limited to the description of only characteristic parts, and the same parts as those of the first specific example will be denoted by the same reference numerals and detailed description will be omitted. .

First, in the second specific example shown in FIG. 4, the vibrator 2 has the U-shaped tip of the U-shaped abutment 4 via the thin first plate-shaped portion 6. The second plate-shaped portion 8 is positioned on the tip side of the vibrator 2 and is positioned further on the tip side than the second plate-shaped portion 8. , Two oscillators 2, 2
It is characterized in that a thin third plate-shaped portion 10 for integrally connecting the two is integrally formed.

In the second specific example, since the third plate-shaped portion 10 is provided closer to the tip side of the vibrator 2 than in the first specific example, the vibration of the vibrator 2 is Three
Although there is a problem that the plate-shaped portion 10 is easily restrained, it is still possible to obtain a larger displacement than that of the conventional vibration gyro sensor.

The third concrete example and the fourth concrete example shown in FIGS. 5 and 6, respectively, are the vibrations between the two vibrators 2 and 2 in the first and second concrete examples. A prismatic pillar 28 having a rectangular cross section, which is parallel to the children 2 and 2.
It is characterized in that it is composed of an integrally fired body of ceramics having a structure in which is arranged.

That is, the support column 28 is integrally connected to and supported by the abutment 4 between the two vibrators 2 and 2 at a position separated from the vibrators by a predetermined distance. And thin-walled third plate-shaped portions 10 and 10 are integrally formed between the vibrators 2 and 2 located on the left and right sides thereof, and on the third plate-shaped portions 10 and 10, respectively. , The driving piezoelectric / electrostrictive elements 14, 14 are formed,
By the operation of the driving piezoelectric / electrostrictive elements 14 and 14, the left and right two vibrators 2 and 2 are excited and vibrated in mutually opposite directions.

Further, FIG. 7 and FIG.
And a sixth specific example, in which, in an integrally fired body structure of ceramics, an abutment 4 for supporting the two vibrators 2 and 2 at their base end sides has a rectangular mounting frame. And the two vibrators 2, 2 are housed in the mounting frame part 30, and a predetermined gap is formed between the vibrators 2, 2 and the mounting frame part 30. It is said to be the structure of the state.

Then, in this way, the two oscillators 2, 2
The independent drive means (actuator) is integrally provided between the two vibrators 2 and 2 with respect to the mounting frame portion 30 surrounding the. That is,
A thin third plate-shaped portion 10 is integrally formed between the two vibrators 2 and 2 and a side of the mounting frame portion 30 facing them, and the third plate-shaped portion 10 is formed. The driving piezoelectric / electrostrictive element 14 is integrally formed on the upper surface by a film forming method.

In the vibration gyro sensor having such a structure, the mounting frame portion 30 can be firmly fixed to the flat mounting surface via the spacer portion 18 with the bolt 20 or the like. Therefore, there is an advantage that the degree of freedom of the installation place is large.

Further, in the seventh and eighth specific examples shown in FIGS. 9 and 10, respectively, the abutment 4 in the first and second specific examples is provided with two vibrators 2, 2. A structure similar to that of the rectangular mounting frame portion 30 is provided in the ceramic integrally fired body structure so as to surround the.

That is, in the vibrating gyro sensor according to the seventh and eighth specific examples, the driving means is provided between the two vibrators 2 arranged in the mounting frame portion 30 of the rectangular frame structure. (10, 14) are integrally formed.
Even in these specific examples, as in the fifth and sixth specific examples, since the mounting frame portion 30 can be firmly fixed via the spacer portion 18, the degree of freedom of the installation place is reduced. You can enjoy the advantage of being large.

FIG. 11 shows a ninth specific example of the vibration gyro sensor according to the present invention, in which two vibrators 2 and 2 are provided in a ceramic integrally fired structure. A rectangular frame 32, which is an abutment supported on the base end side, is provided so as to surround the two vibrators 2, 2. Then, in the portion of the frame 32 located between the supporting portions of the two vibrators 2 and 2, the rigidity of the vibrators 2 and 2 in the vibration direction is reduced to facilitate vibration, and thus a thin second wall is formed. The plate-shaped portion 8 is integrally formed so as to provide a main surface extending in a direction perpendicular to the vibration direction (the surface where the vibrators 2 and 2 are disposed), while the second portion is formed.
In the portion of the frame body 32 facing the formation portion of the plate-shaped portion 8, the third plate-shaped portion 10 thinner than the frame body 32 has a main surface parallel to the main surface of the first plate-shaped portion 6. And the driving piezoelectric / electrostrictive element 14 is integrally formed on the third plate-shaped portion 10 by a film forming method.

Therefore, the vibration gyro having such a structure
In the sensor, when the driving piezoelectric / electrostrictive element 14 is actuated, the deformation of the third plate-shaped portion 10 causes bending vibration centering around the second plate-shaped portion 8 in the frame body 32. Then, based on that, the two vibrators 2 and 2 are excited and vibrated.

FIGS. 12 and 13 show examples of a structure for easily fixing the vibration gyro sensor shown in FIG. 11 as the tenth and eleventh examples, respectively. Shown in the fired structure.

Among them, in the example shown in FIG. 12, the attachment for fixing the frame body 32 to the outer surface of the formation portion of the second plate-shaped portion 8 provided in the rectangular frame body 32. The part 34 is integrally provided. Specifically, the mounting portion 34 has a triangular shape, and the apex angle portion of the triangle is integrally connected to the outer surface of the second plate-shaped portion 8. The width (length in the left-right direction in the drawing) of the connecting portion of the mounting portion 34 to the second plate-shaped portion 8 is larger than the width (length in the left-right direction in the drawing) of the second plate-shaped portion 8. It has been made smaller. This is because it is desirable to restrain the restraint against deformation of the second plate-shaped portion 8 as much as possible by connecting the mounting portion 34. Then, the vibration gyro sensor is fixed by fixing the mounting portion 34 with the bolts 20, 20 and the like via the spacer portion 18.

Further, the concrete example shown in FIG. 13 shows a modified example of the mounting portion 34 in the concrete example shown in FIG. 12, in which the frame 32 for providing the vibration gyro sensor is surrounded. As described above, the structure is integrally provided with the mounting frame portion 36 positioned outside the frame body 32 at a predetermined distance. By fixing the mounting frame portion 36 having such a rectangular frame shape with the bolts 20, it is possible to realize a strong fixing structure.

Further, a twelfth specific example of the vibration gyro sensor according to the present invention is shown in FIG. 14 in the structure of an integrally fired body of ceramics, in which two vibrators 2 and 2 are provided. Abutment 4 supported at the base side
Has a square U-shape, and a second plate-shaped portion 8 is formed in a portion of the abutment 4 located between the supporting portions of the two vibrators 2, 2, while the abutment 4 The attachment portion 34 for fixing the is integrally connected to the outer surface of the second plate-shaped portion 8 as in the example shown in FIG.
A rectangular frame-shaped mounting frame portion 36 integrally formed with the mounting portion 34 surrounds the two vibrators 2, 2 and the abutment 4 at a predetermined distance outside them. Has been placed.

The mounting frame 36 and the abutment 4 are arranged so as to bridge between the mounting frame 36 and the abutment 4 portions located on both sides of the second plate-shaped portion 8. The thin third plate-shaped portions 10 and 10 are integrally formed so as to have a main surface parallel to the main surface of the first plate-shaped portion 6, and further on the third plate-shaped portions 10 and 10. In addition, the driving piezoelectric / electrostrictive elements 14, 14 are integrally formed by the film forming method.

In the vibrating gyro sensor having such a structure, the abutment portions 4 located on both sides of the second plate-shaped portion 8 are provided between them and the mounting frame portion 36 as driving means. The barrel is vibrated by the operation of the driving piezoelectric / electrostrictive elements 14 and 14, and the vibrators 2 are vibrated based on the vibration.

Further, according to the structure of the vibration gyro sensor according to the present invention as described above, it is possible to easily realize the combination with another sensor. Specifically, FIG.
~ Mounting frame portions 30, 3 shown in Figs. 10, 13 and 14
In the structure of an integrally fired body of ceramics, a second mounting frame portion integrated with the mounting frame portion is provided adjacent to the mounting frame portion, and the second mounting frame portion is provided with the second mounting frame portion. It is possible to form a composite sensor by integrally supporting another sensor having a function different from that of the vibration gyro sensor, and an example thereof is shown in FIG.

The composite sensor illustrated in FIG. 15 has the structure shown in FIG.
Adjacent to the mounting frame portion 36 of the vibration gyro sensor shown in FIG. 3, a second mounting frame portion 38 that is integral with the mounting frame portion 36 is provided in the ceramic integrated firing structure, and the second mounting An acceleration sensor having a function different from that of the vibration gyro sensor is integrally provided in the frame portion 38, and in the figure, the angular velocity around the z-axis forming the vibration gyro sensor is shown on the left side. Angular velocity sensor unit 40 for detecting
On the right side, the acceleration sensor section 42 is formed in the second mounting frame section 38. That is, the acceleration sensor unit 42 includes a first sensor 44A and a second sensor 44B that detect acceleration in the y-axis direction, and a third sensor 44C and a fourth sensor 44D that detect acceleration in the x-axis direction.
It consists of and.

Then, the first and second sensors 44A, 4A
4B are all oscillators 46a and 46b which are inertial masses.
And thin plate-shaped detection portions 48a and 48b for integrally connecting them to the mounting frame portion 38, and the detection piezoelectric / electrostrictive element 14 integrally formed on the detection portions by a film forming method.
The detection piezoelectric / electrostrictive elements 50a and 50b having the same configuration as the above. Therefore, when the acceleration in the y-axis direction is input, the detection units 48a and 48b are respectively deformed, and based on the deformation, the detection piezoelectric / electrostrictive elements 50a and 50b.
A predetermined electromotive force (voltage) is output from b. In addition, these first and second sensors 44A,
The 44B also senses acceleration in the x-axis direction, but in that case, the two sensors have displacements in opposite directions, which is different from the displacement in the same direction that occurs in the case of acceleration in the y-axis direction. The signal can be separated.

In addition, the third and fourth sensors 44C, 44
D is also a vibrator 46c, 46d which is an inertial mass, respectively.
And thin plate-shaped detection portions 48c and 48d for integrally connecting them to the mounting frame portion 38, and the detection piezoelectric / electrostrictive element 12 integrally formed on the detection portions by a film forming method.
Piezoelectric / electrostrictive elements 50c, 50d for detection having the same structure as
And the vibrators 46c and 46d are composed of thin plate-like connecting portions 46c 'and 46d' for connecting and supporting the vibrators 46c and 46d to the mounting frame portion 38 in a state where they can be easily displaced in the x-axis direction. Therefore, when the acceleration in the x-axis direction is input, the two detection units 4
Based on the deformation of 8c and 48d, a predetermined electromotive force (voltage) is output from the detecting piezoelectric / electrostrictive elements 50c and 50d.

FIG. 16 also shows an example of a different structure of the composite sensor, in which the composite sensor disclosed therein is
Similar to the one illustrated in FIG. 15, a ceramic integrally fired structure has a structure in which an angular velocity sensor unit 40 and an acceleration sensor unit 42 are integrally provided.
In the structure of the first and second sensors 44A and 44B,
It differs from the previous example.

That is, the first and second sensors 44A, 44
A connecting portion 46 for integrally connecting the vibrators 46a and 46b, which are inertial masses in B, to the mounting frame portion 38, respectively.
Each of a ′ and 46b ′ is formed in a thin plate shape that can be easily deformed in the z-axis direction. Therefore, when the acceleration in the z-axis direction is input, the oscillator 4 which is the inertial mass
6a and 46b are connecting portions 46a 'and 46b' which are easily deformed.
Due to the existence of the above, a large displacement is given, and based on this, a predetermined electromotive force (voltage) is output by the detecting piezoelectric / electrostrictive elements 50a and 50b.

By the way, each of the vibration gyro sensor and the composite sensor according to the present invention is made of an integrally fired ceramic body except for the piezoelectric / electrostrictive elements 12, 14 and 50a to 50d. And specifically, it is manufactured as follows.

First, according to the present invention, an integrated fired body of ceramics which provides a sensor body including the vibrator 2, the abutment 4, and the first to third plate-shaped portions 6, 8, 10 and the spacer portion 18 is first described. As a material for forming the same, it has a large mechanical strength, can be heat-treated at about 1400 ° C. as described later, and can be integrally laminated with the piezoelectric / electrostrictive elements 12 and 14 without using an adhesive or the like. As long as it is an insulator or a dielectric material that can be converted into an oxide-based ceramic material or a non-oxide-based ceramic material, there is no problem, but at least aluminum oxide, magnesium oxide, Zirconium oxide,
A material containing either aluminum nitride or silicon nitride as a main component is preferably adopted in order to obtain excellent operating characteristics such as large displacement and generated force and fast response speed. In particular, aluminum oxide / zirconium oxide is used. It is recommended to use a ceramic material containing as a main component. Furthermore, among them, in particular, yttrium oxide, ytterbium oxide,
A material containing zirconium oxide as a main component, which is stabilized with at least one compound selected from the group consisting of cerium oxide, calcium oxide and magnesium oxide, can obtain high mechanical strength even in a thin plate thickness, and has high toughness. It can be advantageously used because it exhibits such characteristics as

The amount of the above compound added for stabilizing zirconium oxide is 1 mol% to 30 mol% for yttrium oxide and ytterbium oxide, 6 mol% to 50 mol% for cerium oxide, and In the case of calcium or magnesium oxide, it is preferable to use 5 mol% to 40 mol%, and among them, it is particularly preferable to use yttrium oxide as a stabilizer, and in that case, 1.5 mol% to 6 mol%. It is more preferable that the amount is 2 mol% to 4 mol%. In such an addition range, the crystal phase of zirconium oxide to which yttrium oxide is added is partially stabilized, thereby providing excellent characteristics as a sensor main body.

When stabilizing or partially stabilizing zirconia is used as the thin plate layer, it is preferable to include the auxiliary agents shown in the table below. Even if the piezoelectric / electrostrictive element contains the following auxiliary agents, the same effect can be obtained.

[0105]

[Table 1]

Further, the integrally fired body of ceramics which constitutes such a sensor body is preferably composed of a thin plate layer 22, a substrate layer 24 and, if necessary, a spacer layer 26, as shown in FIG. However, at least in the material that provides the thin plate layer 22, silicon oxide (SiO, S
iO ₂ ) is advantageously included. The content of silicon oxide is preferably 0.5% by weight or more and 5% by weight or less, and particularly preferably 1% by weight or more and 3% by weight or less. The inclusion of such a proportion of silicon oxide avoids an excessive reaction with the piezoelectric / electrostrictive material during the heat treatment of the piezoelectric / electrostrictive elements 12 and 14 formed on the thin plate layer 22,
This is effective in obtaining good actuator characteristics or detection characteristics.

Further, in the vibration gyro sensor and the composite sensor including the same according to the present invention, in order to obtain the high-speed response and large displacement, the thin plate layer 22 integrally formed with the piezoelectric / electrostrictive element is used. The thickness, in other words, the first plate-shaped portion 6
The thickness of the third plate-like portion 10 is generally 50 μm or less, preferably 30 μm or less, and more preferably 15 μm or less. On the other hand, the thickness of the substrate layer 24 is appropriately determined, but is generally 30 μm or more, preferably 50 μm or more, more preferably 100 μm or more. Further, in order to obtain a large displacement and a large generating force as an actuator or a detection unit, at least the thin plate layer 22 has an average crystal grain size of 0.1.
˜2 μm, more preferably 1 μm
It is desirable to be composed of a ceramic material having the following average particle diameter.

The thin plate layer 22 and the substrate layer 24 are
To obtain a ceramics-integrated fired body that provides a sensor body composed of (and a spacer layer 26), for example, a green sheet laminating method in which the thin plate layer 22, the substrate layer 24, and the spacer layer 26 are laminated in a green sheet state. In addition to the above, various molding methods such as pressure molding using a molding die, casting molding, injection molding, and mechanical processing such as ultrasonic processing, cutting / grinding processing, the vibrator 2, the abutment 4, and the first to first parts are used. The method for forming the plate-shaped portions 6, 8, 10 and the like of No. 3 may be mentioned. Among them, the green sheet laminating method, which is a method in which no processing stress remains and the plate thickness of the thin plate layer 22 is highly accurate, is preferably used. To be In this green sheet laminating method, preferably, first, second and third green sheets for providing the thin plate layer 22, the substrate layer 24 and the spacer layer 26, respectively, are used, and after laminating them by thermocompression bonding, The method of integrating by firing is adopted. Further, in the integration, it is preferable to use, as the first to third green sheets, at least green sheets that have the same shrinkage rate by firing.

By the way, in the green sheet laminating method, specifically, the shapes corresponding to the thin plate layer 22, the substrate layer 24 and the spacer layer 26 shown in FIG. 2 are applied to the first to third green sheets. After each of them is provided and laminated and integrated, firing is performed to form an integrated fired body, and then the piezoelectric / electrostrictive element (12, 1, 1) is provided at a predetermined portion of the thin plate layer 22.
In addition to the first method of integrally forming 4) by the film forming method, the first green sheet has a shape corresponding to the substrate layer 24 and the spacer layer 26 without giving the shape of the thin plate layer 22. The second and third green sheets are laminated and integrated, and further fired to form an integral fired body, and then the shape of the thin plate layer 22 is realized by laser processing, ultrasonic processing, or the like. , At a predetermined site on the thin plate layer 22,
The second method of integrally forming the piezoelectric / electrostrictive element and the first green sheet not having such a shape of the thin plate layer 22 are used, and the substrate layer 24 and the spacer layer 2
The second and third green sheets having a shape corresponding to 6 are laminated and integrated, and then fired to produce an integrated fired body, and a predetermined portion of the fired body portion of the first green sheet. There is a third method for obtaining a desired vibrating gyro sensor by forming a piezoelectric / electrostrictive element integrally on the substrate and then realizing the shape of the thin plate layer 22 by laser processing or ultrasonic processing. However, particularly in the present invention, the last third method is advantageously adopted in order to avoid deformation due to heat treatment when forming the piezoelectric / electrostrictive element.
The thin plate layer 22, the substrate layer 24 and the spacer layer 2 are
The realization of the shape of No. 6 is preferably carried out by adopting a method of forming a green sheet so as to give such a shape, laser processing, press processing by a mold, ultrasonic processing, etc. Since the press working with a die is excellent in mass productivity and integration, it is advantageously used.

FIG. 17 shows an example of a desirable manufacturing method (third method) of the vibration gyro sensor by such a green sheet laminating method. There
The first green sheet 52 that provides the thin plate layer 22 is not processed into the shape of the thin plate layer 22 and is used in a simple rectangular thin plate shape. Also, the substrate layer 2
The second green sheet 54 which gives No. 4 is processed into a shape corresponding to the shape of the substrate layer 24, and the third green sheet 56 which gives the spacer layer 26 also has the same shape.
It is processed into a shape corresponding to the shape of the spacer layer 26. Then, after the first, second and third green sheets 52, 54 and 56 are laminated, they are fired and integrated, and then, to a predetermined portion on the thin plate layer 22 in the obtained fired body 58. The piezoelectric / electrostrictive elements 12, 14
However, they are integrally formed according to the film forming method described later. Then, after that, the thin plate layer 22 portion of the integrally fired body 58 is subjected to excision processing such as laser processing or ultrasonic processing to complete the vibration gyro sensor having the shape as shown in FIG. is there.

According to the second method based on the green sheet laminating method described above, the piezoelectric / electrostrictive elements 12, 1 described above are used.
The order of the step of forming 4 and the step of processing the thin plate layer 22 is reversed, and the piezoelectric / electrostrictive elements 12 and 14 are integrally formed to complete the vibration gyro sensor as shown in FIG. Becomes

Further, in the green sheet laminating method for obtaining the vibration gyro sensor by laminating the first, second and third green sheets 52, 54 and 56 as described above, the shape of the thin plate layer 22 is taken into consideration. By doing so, it becomes extremely easy to form the thin plate-shaped cutout portion 16 extending from the tip end portion of the vibrator 2. Then, after the vibration gyro sensor is manufactured, the resonance frequency is measured, and the excision portion 16 formed at the tip of the vibrator 2 is excised (lacked) by laser processing or ultrasonic processing as necessary. Then, the resonance frequency can be easily fine-tuned.

By the way, the vibration gyro shown in FIG.
In the structure of the sensor, as is apparent from FIGS. 2 and 17, the second green sheet 54 that provides the substrate layer 24 is
Since the first plate-shaped portion 6 is to be formed by the thin plate layer 22 provided by the first green sheet 52,
It has a discontinuous structure in which the portion providing the vibrator 2 is separated, and therefore, it is difficult to position such a discontinuous portion, and at the time of firing or formation of a piezoelectric / electrostrictive element. Since there is an inherent problem of being easily deformed during the heat treatment at the time of, it is preferable to make it exist as a continuous body at the time of stacking and form such a discontinuous portion after being integrated by lamination or integrated by firing. 18 is used, and an example thereof is shown in FIG.

That is, FIG. 18 shows one of the effective methods for producing the vibration gyro sensor shown in FIG. 7, in which the second green sheet 54 for providing the substrate layer 24 is As shown in the figure, it is a continuous body. That is, the vibrator (2) forming portion 58 is connected to the attachment frame portion (30) forming portion 60 with the connecting portion 62, and is used as the second green sheet 54 in a state where there is no discontinuous portion, After being laminated with the first green sheet 52 and the third green sheet 56 and sintered and integrated, the piezoelectric / electrostrictive elements 12 and 14 are integrally formed, and the first green sheet 52 is further formed. The thin plate layer 22 is processed by the process described above, and at the same time or before or after the process, the connecting portion 62 that connects the vibrator 2 and the mounting frame 30 is cut by laser processing, ultrasonic processing, or the like. It is separated from the mounting frame portion 30. By forming the cut portion 64 with respect to the connection portion 62, the constraint of the vibrator 2 from the mounting frame portion 30 is released, and thus the vibration gyro sensor shown in FIG. 7 is completed.

In this way, in the second green sheet 54, the structure having no discontinuity can be realized as shown in FIGS. 7 to 16 so that the mounting frame portions 30, 36 surround the vibrator 2. , 38 and the frame 32, as well as the sensor having the structure in which the column 28 is provided between the two vibrators 2 and 2 as shown in FIG. 5 and FIG. A connecting portion (6
This is feasible if, after forming 2), it is finally cut off at the cutting section 64.

Further, in the manufacturing process of the vibration gyro sensor or the composite sensor as described above, the piezoelectric / electrostrictive elements 12 and 14 are formed on the predetermined portions of the thin plate layer 22 as follows. .

First, the electrode films (12a, 1a) made of the respective materials.
2c) and the piezoelectric / electrostrictive film (12b) are formed on a predetermined portion of the thin plate layer 22 by various known film forming methods such as a thick film method such as screen printing, a coating method such as dipping, and an ion beam. A thin film method such as sputtering, vacuum deposition, ion plating, CVD, or plating may be appropriately adopted, but is not limited thereto. Incidentally, in order to form the piezoelectric / electrostrictive film (12b), a method such as screen printing, dipping or coating is preferably adopted. This is because these methods can form a film on the thin plate layer 22 by using a paste or a slurry containing piezoelectric / electrostrictive ceramic particles as a main component and obtain good operating characteristics. In addition, when the piezoelectric / electrostrictive elements 12 and 14 are formed by the film forming method in this manner, the piezoelectric / electrostrictive elements 12 and 14 can be integrated with the thin plate layer 22 without using an adhesive or the like, so that reliability and reproducibility are improved. It is particularly preferable because it has excellent properties and is easily integrated. Furthermore, as for the shape of such a film, in addition to pattern formation using a screen printing method, a photolithography method, etc., unnecessary processing is removed by using a mechanical processing method such as laser processing method, slicing, or ultrasonic processing. You may form a pattern.

Incidentally, the piezoelectric / electrostrictive elements (12, 1) integrally formed at a predetermined portion of the thin plate layer (22) by a film forming method.
The structure and the shape of the film of 4) are not limited in any way, and conventionally known ones can be appropriately adopted. For example, the lateral effect of electric field induced strain as shown in FIG. 3 is used. In addition to the structure, a structure using the vertical effect of electric field-induced strain is appropriately adopted, and also in the film shape,
Polygons such as triangles and quadrilaterals, circles such as circles, ellipses, and rings,
It does not matter even if it has a comb shape, a lattice shape, or a special shape combining these.

Then, in this way, the thin plate layer (22)
The respective films (12a, 12b, 12c) formed on the first and third plate-shaped portions (6, 10) given in
May be heat-treated each time each film is formed so as to form an integral structure with each plate-shaped portion. Alternatively, after forming all the films, heat-treated simultaneously to form each film-shaped portion at the same time. You may make it integrally couple | bond with. When the electrode film is formed by the thinning method, heat treatment may not always be necessary to integrate the electrode film.

Further, the heat treatment temperature for integrating the formed film and the plate-like portion is generally 800.degree.
A temperature of about 1400 ° C is adopted, preferably 1000
Temperatures in the range of ℃ to 1400 ℃ are advantageously selected. Further, when the piezoelectric / electrostrictive film (12b) is heat-treated, the composition of the piezoelectric / electrostrictive film does not become unstable at high temperature,
It is preferable to perform heat treatment while controlling the atmosphere together with such an evaporation source of the piezoelectric / electrostrictive material.

The material of the electrode films (12a, 12c) constituting the piezoelectric / electrostrictive element manufactured by the above method is a conductor capable of withstanding a high temperature oxidizing atmosphere at the heat treatment temperature and the firing temperature. If it is not particularly limited, for example, it may be a simple metal or an alloy, or a mixture of an additive such as insulating ceramics or glass and a metal or an alloy, and further Even conductive ceramics can be used. More preferably,
High melting point precious metals such as platinum, palladium, rhodium, silver-
An electrode material containing an alloy such as palladium, silver-platinum, or platinum-palladium as a main component is preferably used.

Further, in the above mixture, as the ceramics to be added to the metal or alloy, the constituent material of the first plate-shaped portion or the third plate-shaped portion, or the piezoelectric / later described later
It is desirable to use the same material as the electrostrictive material, and the addition amount thereof is 5 to 30% by volume in the same material as the plate-shaped portion, and 5 to 2 in the same material as the piezoelectric / electrostrictive material.
About 0% by volume is preferable. In particular, a mixture obtained by mixing both the plate-shaped portion constituent material and the piezoelectric / electrostrictive material with the above metal or alloy is advantageously used for forming the intended electrode.

The electrodes 12a and 12c formed by using such a material have an appropriate thickness depending on the application, but the lateral effect of the electric field induced strain as shown in FIG. In the type used, generally 15 μm
Hereinafter, it is preferably formed with a thickness of 5 μm or less. Further, as shown in FIG. 19, in the type using the longitudinal effect of electric field induced strain, 3 μm or more is preferable, 10 μm or more is more preferable, and further more preferable. 20 μm
It will be formed in the above thickness.

Further, the piezoelectric / electrostrictive material for providing the film-shaped piezoelectric / electrostrictive layer (12b) constituting the piezoelectric / electrostrictive elements 12 and 14 is a material exhibiting electric field induced strain such as piezoelectric or electrostrictive effect. Any material can be used as long as it is a crystalline material or an amorphous material.
In addition, it does not matter whether it is a semiconductor material, a dielectric ceramic material, a ferroelectric ceramic material, a material that requires polarization treatment, or an unnecessary material. Is good.

However, the piezoelectric / electrostrictive material used in the present invention is preferably lead zirconate titanate (PZT).
Lead) magnesium niobate (P)
MN-based material, lead nickel niobate (P
NN-based) -based material, lead zinc niobate-based material, lead manganese lead-niobate-based material,
A material containing lead antimony stannate as a main component, a material containing lead titanate as a main component, a material containing barium titanate as a main component, and a composite material thereof are used. Note that P
A material containing an oxide of lanthanum, barium, niobium, zinc, nickel, manganese, etc., or other compounds thereof as an additive in a material containing ZT as a main component, such as PLZ.
It does not matter even if a predetermined additive is appropriately added to the above-mentioned material so as to be a T type.

The thickness of the piezoelectric / electrostrictive elements 12 and 14 having such a structure is generally 100 μm or less, preferably 50 μm or less, more preferably 30 μm.
The following is desirable.

The present invention has been specifically described above based on some specific examples. However, the present invention should not be construed as being limited to the above specific examples, and the scope of the present invention. It is to be understood that various changes, modifications, improvements, etc. can be made based on the knowledge of those skilled in the art without departing from the above.

For example, in each of the specific examples illustrated, the spacer portion 18 is provided on the abutment 4, the mounting frame portions 30, 36, the mounting portion 34, etc., and even if each vibrator 2 detects and vibrates, Although it does not interfere with the mounting surface, it may not be necessary to provide such a spacer portion 18 depending on the shape or structure of the mounting surface.

Further, in the illustrated specific example, the abutment 4, the mounting frame portions 30, 36, the mounting portion 34 and the like are fixed by bolts, but adhesive fixing with an adhesive is also effective. In that case In, it is preferable to fix the entire lower surface of the spacer portion 18 with an adhesive. As the adhesive, an epoxy resin type, an acrylic resin type, a synthetic rubber type, a hot melt type, a cyanoacrylate type, a polyurethane resin type or the like is used.

Further, in the example of the vibration gyro sensor according to the present invention, the first plate-shaped portion 6 on which the detecting piezoelectric / electrostrictive element 12 is integrally formed is the same as that of the vibrator 2. Although it is provided on the intermediate portion or the base end side,
It is also possible to provide the first plate-shaped portion 6 on the tip end side of the vibrator 2 and to form an integrated structure continuous with the excision portion 16, as shown in FIG. In this case, the piezoelectric / electrostrictive element 12 for detection
Although the Coriolis force applied to is reduced and the sensitivity is reduced, it has an advantage in terms of compactness and damage.

Next, a fifteenth specific example of the vibration gyro sensor according to the present invention will be described with reference to FIG.

A vibration gyro according to the fifteenth specific example
The sensor is a rectangular parallelepiped abutment 100 having a longitudinal direction in one direction (X direction in FIG. 22), and a direction provided on one side surface of the abutment 100 and orthogonal to the one direction (Y in FIG. 22). Direction) is provided on the other side surface of the abutment 100 and two vibrators 102A and 102B whose major axis direction is
And two vibrators 102C having the Y direction as the major axis direction
And 102D, and a frame body 104 whose frame surface is parallel to the plane including the X direction and the Y direction and surrounds the abutment 100 and the four vibrators 102A to 102D.

The two vibrators (102A, 102B) and (102C, 102D) are supported on the side faces of the abutment 100 so as to extend parallel to each other with a predetermined separation width d.

Each of the vibrators 102A to 102D has a rectangular parallelepiped vibrator main body 106, and a thin plate-like connecting portion (second plate-like portion) for connecting the vibrator main body 106 and the abutment 100. 108. The connecting portion 108 extends from the center portion in the width direction of the end face of the oscillator body 106 on the abutment 100 side to the abutment 100, and the height thereof is almost the same as that of the oscillator body 106, and the width thereof is Similar to the first specific example (see FIG. 1), the width is set smaller than the width of the vibrator main body 106.

The frame body 104 has a substantially flat surface having an opening area that penetrates the frame body 104 in the height direction of the frame body 104 and can surround the abutment 100 and the four vibrators 102A to 102D. Rectangular opening 110
Are formed. The opening 110 has a rectangular notch 112 at a portion corresponding to both longitudinal ends of the abutment 100,
The distance between the bottoms of the notches 112 is set longer than the length in the longitudinal direction of the abutment 100, and the side surface of each notch 112 is such that the surface near the opening 110 faces the side surface of the abutment 100. Has become. That is, both ends of the abutment 100 in the longitudinal direction are inserted into the corresponding notches 112.

Each two connected to both side surfaces of the abutment 100.
Book oscillators (102A, 102B) and (102C, 1
02D) is a plate-shaped drive unit (third plate-shaped unit) that is thin in the height direction between the vibrator main bodies 106.
114 is provided. In the example of FIG. 22, each drive unit 1
14 is provided at a position where the upper surface is on the upper surface side of the vibrator body 106 and is closest to the connecting portion 108. Each drive unit 114 is actually located on the upper surface side of the vibrator body 106, but is convex or downward convex, and is not strictly on the same plane (flat spring structure). ing.

Further, on both side surfaces of the abutment 100, between the portions near both ends in the longitudinal direction and the side surfaces of the notch 112 facing the portions, the plate-like portion 11 thinned in the height direction.
6 is provided. In the example of FIG. 22, each of the plate-shaped portions 1
Although the upper surfaces of 16 are flush with the upper surface of the abutment 100 and the upper surface of the frame body 104, in reality, each of the plate-shaped portions 116 includes the upper surface side of the abutment 100 and the frame. Body 10
Although it is located on the upper surface side of No. 4, it is convex upward or downward, and strictly speaking, it has a structure (leaf spring structure) that is not on the same plane.

In the vibrating gyro sensor according to the fifteenth example, the abutment 100, the four vibrators 102A to 102D, the frame 104, and the four connecting portions 1 are included.
08, the two driving units 114 and the four plate-shaped units 116,
The piezoelectric / electrostrictive element 118 for driving is formed on the driving portion 114, and the piezoelectric / electrostrictive element 120 for detection is formed on the plate-shaped portion 116. It is configured. Accordingly, the driving unit 114
And the piezoelectric / electrostrictive element 118 for driving the vibrator 102
The driving means 122 for exciting and vibrating the device is configured, and the detection unit 124 is configured by the plate-shaped portion 116 and the piezoelectric / electrostrictive element 120 for detection. Then, by driving the piezoelectric / electrostrictive element 118 for driving with electricity, each of the two vibrators (102A, 102B) and (102C, 102B).
D) will vibrate while being bent in directions opposite to each other in the X-axis direction, that is, in directions approaching or separating from each other in the arrangement planes.

The connecting portion 108 provided between the vibrator main body 106 and the abutment 100 will be described. The aspect ratio (width: height) of the connecting portion 108 is 1: 1.
The range of 2 to 1: 1000 is preferable, and 1: 1.8 to 1: is preferable.
The range of 50 is more preferable.

This is because when the aspect ratio of the connecting portion 108 is larger than 1: 1.2, the vibrators 102A to 102D are formed.
Unnecessary vibration in the Z-axis direction easily occurs, and as a result, unnecessary vibration easily occurs in the detection unit 124. On the other hand, if the aspect ratio is less than 1: 1000, the connecting portion 108
This makes it difficult to process and the processing accuracy deteriorates.

Since the integral firing of the ceramics and the formation of the piezoelectric / electrostrictive element have been already described in detail, the description thereof will be omitted here.

A vibration gyro according to the fifteenth specific example
In the sensor, the driving unit 114 is deformed by driving the driving piezoelectric / electrostrictive element 118,
Each of the two vibrators (102A, 102B) and (102
C, 102D) excite vibrations (bending vibrations) in opposite directions in the X-axis direction.

Thus, each of the two vibrators (102A, 102A,
102B) and (102C, 102D) are vibrating, around an axis orthogonal to the plane including the one direction and the extending direction of the abutment 100 (around the Z axis in FIG. 22).
When an angular velocity is applied to the detection unit 124, a force acts on the plate-shaped portion 116 of the detection unit 124 in the Y-axis direction, and the force causes the detection unit 124 to flex and vibrate. That is, the above Z
Rotational vibration occurs around the axis, and this vibration is detected as an electromotive force (voltage) by the piezoelectric / electrostrictive element 120 in the detection unit 124.

In this case, since the vibrator 102, the abutment 100, and the detection section 124 are all made of a ceramic integrally fired body, a magnetic material such as a conventional Erinba alloy does not exist in the constituent material. Moreover, the characteristics of the sensor are not affected by the surrounding magnetic field.

Further, the detecting portion 124 has a plate-like portion 116 which is thinner than the vibrator main body 106 in the height direction.
And has a structure with low rigidity, when the angular velocity vibrates around the Z-axis, a large strain is obtained in the plate-shaped portion 116, and Piezoelectric / electrostrictive element 1 for detection formed
The detection sensitivity at 20 is significantly improved.

Particularly, in the vibrating gyro sensor according to the fifteenth specific example, since the detecting portion 124 vibrates only when the angular velocity is applied, it is used for detection in the absence of the angular velocity. The output (null voltage) from the piezoelectric / electrostrictive element 120 becomes very small, and the detection sensitivity is greatly improved. Moreover, the probability of occurrence of fatigue damage in the detection unit 124 due to vibration is reduced, and the life of the vibration gyro sensor can be extended.

Further, instead of measuring the angular velocity around the major axis (around the Y axis) of the vibrator main body 106, the angular velocity about the axis orthogonal to the plane including the one direction and the extending direction of the abutment 100 (Z axis) is measured. Since the angular velocity of (around) is measured, the vibrator 102, the abutment 100, and the frame 104 can be thinned in the height direction, and the vibration gyro sensor can be reduced in size and weight.

Since each vibrator main body 106 in each of the four vibrators 102A to 102D does not have a thin plate member and has a structure in which it is independently supported by a high-strength abutment 100, The mass of each vibrator main body 106 can be increased, which allows the vibrators 102A to 102D to be mass-produced.
The Coriolis force (Fc = 2 mvl) generated at the time becomes large, and it is possible to realize the high sensitivity regarding the strain detection in the detection unit 124.

Next, a vibration gyro sensor according to a sixteenth example will be described with reference to FIG. 22 corresponding to those in FIG. 22 are designated by the same reference numerals, and duplicate description thereof will be omitted.

A vibration gyro according to the sixteenth specific example
As shown in FIG. 23, the sensor has substantially the same configuration as the vibration gyro sensor (see FIG. 22) according to the fifteenth specific example, but the detection unit 124 is different in the following points.

That is, the detecting portion 124 is a ring member integrally formed of ceramic between a portion of both sides of the abutment 100 near both ends in the longitudinal direction and a side surface of the notch 112 facing the portion. 130 and the ring member 13
A plate-shaped portion 116 integrally provided in the housing 0 in parallel with the extending direction (X-axis direction) of the abutment 100, and a piezoelectric / electrostrictive element 120 for detection formed on the plate-shaped portion 116. It is configured to have.

A vibration gyro according to the sixteenth specific example
In the sensor, the two transducers (102A, 102B) and (102C, 102D) are vibrating by the driving of the driving piezoelectric / electrostrictive element 118, and the one direction and the abutment. When an angular velocity is applied around an axis (around the Z axis) orthogonal to the plane including the extending direction of 100, a force acts on the detection unit 124 in the Y axis direction. As a result, the ring member 130 vibrates while having an elliptical shape with the major axis or minor axis in the Y-axis direction. The vibration along the Y-axis direction in this ring member 130 is detected by the piezoelectric / electrostrictive element 120 for detection.
It will be detected as an electromotive force (voltage). This first
In the sixth example, the strain in the Y-axis direction in the detection unit 124 is indirectly measured by the piezoelectric / electrostrictive element 120 for detection through the deformation of the ring member 130, and has the effect of being highly durable. .

In the vibration gyro sensor according to the fifteenth and sixteenth specific examples, the resonance frequency is adjusted in the same manner as the vibration gyro sensor according to the first specific example described above (see FIG. 1). Be seen. Specifically, the adjustment of the resonance frequency will be described with reference to FIGS. 24 and 25 through the vibration gyro sensor according to the fifteenth specific example.

In the gyro sensor according to the fifteenth specific example, actually, in order to adjust the resonance frequency, the gyro sensor shown in FIG.
As shown in FIG. 4, each of the two vibrators (102A, 102A,
In B) and (102C, 102D), thin first projecting portions 132 projecting outward from the respective free ends are integrally formed of ceramics, and the abutment 100 is further provided.
The second thin projecting portions 134 projecting outward from both longitudinal ends of the are integrally formed of ceramics.

Then, the resonance frequency on the drive side is adjusted by trimming the first overhang portion 132, and the resonance frequency on the detection side is adjusted by trimming the second overhang portion 134. I do.

In this case, the resonance frequency on the driving side can be adjusted by the trimming process (cutting process) for the first overhanging portion 132, and the resonance frequency on the detection side is trimming process (cutting off for the second overhanging part 134). Process). That is, since the resonance frequencies of the drive side and the detection side can be adjusted independently, it is possible to avoid the disadvantage that the resonance frequency of the detection side is affected by the adjustment of the resonance frequency of the drive side.

First and second overhang portions 132 and 134
The shape of each may be, for example, as shown in FIG. 24, a plate shape that is thin in the height direction with respect to each transducer body 106, or as shown in FIG. The vibrator main body 106 may be formed in a thin plate shape in the extending direction (X-axis direction) of the abutment 100.

In the case of the shape shown in FIG. 24, there is an advantage that the trimming process can be easily performed only by scanning the upper surface with, for example, a laser beam, and in the case of the shape shown in FIG. 102A, 102B) and (10
2C, 102D), since there is a part to be trimmed on the entire surface perpendicular to the vibration direction,
Mass balance is very good. The trimming process in this case can be performed, for example, by applying an impact such as ultrasonic waves after the laser irradiation to excise unnecessary portions.

In the adjustment of the resonance frequency,
In practice, if the first overhanging portion 132 is trimmed for the purpose of adjusting the resonance frequency on the drive side, the resonance frequency on the detection side is affected to a large extent. However, for the purpose of adjusting the resonance frequency on the detection side, the second overhanging portion 13
Since the driving side is not affected even if 4 is trimmed, in the actual adjustment of the resonance frequency, first, the trimming processing of the first overhang 132 is performed to adjust the resonance frequency of the driving side. It is preferable to trim the second overhanging portion 134 to adjust the resonance frequency on the detection side.

Next, a vibration gyro sensor according to a seventeenth example will be described with reference to FIG. 22 corresponding to those in FIG. 22 are designated by the same reference numerals, and duplicate description thereof will be omitted.

The vibration gyro according to the seventeenth specific example
As shown in FIG. 26, the sensor has substantially the same configuration as the vibration gyro sensor according to the fifteenth specific example,
The difference is that the plate-shaped driving unit 114 in the driving unit 122 is arranged on the line connecting the centers of gravity of the respective vibrator main bodies 106.

In this case, as compared with the vibrating gyro sensor (the fifteenth concrete example, etc.) in which the driving unit 114 is arranged in the vicinity of the connecting unit 108, each two vibrators (102A, 102B) are provided.
And (102C, 102D) can be efficiently approached or separated from each other, which is advantageous in improving the detection sensitivity of the detection unit 124.

The adjustment of the resonance frequency by the trimming process for the vibrating gyro sensor is performed in addition to the trimming process (see FIGS. 24 and 25) for the first and second overhang parts 132 and 134 described above. Two
As shown in FIG. 7, the width of each of the driving unit 114 provided between the transducer main bodies 106 and the plate-shaped unit 116 in the detection unit 124 provided between the abutment 100 and the frame 104 is set to be large in advance, The resonance frequencies on the drive side and the detection side may be adjusted by appropriately changing the widths of the portion 114 and the plate-shaped portion 116.

In this adjusting method, the resonance frequencies of the driving side and the detecting side are not adjusted by changing the masses of the vibrator body 106 and the abutment 100, but the spring constants of the driving section 144 and the plate-like section 116 are changed. This is a method of adjusting the resonance frequencies on the drive side and the detection side.

Specifically, when the frequency on the driving side is changed, the two plate-shaped driving units 1 between the vibrator main bodies 106 are provided.
When 14 is cut by laser processing, ultrasonic processing, or the like, and the frequency on the detection side is changed, the four plate-like portions 116 between the abutment 100 and the frame 104 are cut by laser processing, ultrasonic processing, or the like. By.

In this case, since it is not necessary to form the first overhanging portion 132 and the second overhanging portion 134 at the free end of each transducer main body 106 and both ends in the longitudinal direction of the abutment 100, the manufacturing process is simplified. Moreover, since the portion to be trimmed is thin, the resonance frequency can be easily adjusted. Further, unlike the method of adjusting the resonance frequency by changing the mass, there is also an advantage that the resonance frequency on the drive side and the resonance frequency on the detection side can be adjusted completely independently.

In the fifteenth to seventeenth specific examples,
Although the example in which the drive unit 114 is formed between the vibrator main body 106 has been shown, the drive unit 114 may be formed between the abutment 100 and the vibrator main body 106. Some examples of this configuration are shown in FIGS. 28 and 29 as eighteenth and nineteenth specific examples.
Shown in.

That is, as shown in FIG. 28, the vibrating gyro sensor according to the eighteenth specific example has a driving portion 114 extending from the portion near the frame 104 on the end face of the vibrator body 106 on the abutment 100 side to the abutment 100. As shown in FIG. 29, the vibration gyro sensor according to the nineteenth example is formed from a portion corresponding to the longitudinal center of the abutment 100 on the abutment 100 side end face of the vibrator body 106. 10
The drive unit 114 is formed from 0 to 0.

The vibrating gyro sensors according to the eighteenth and nineteenth specific examples are both arranged in the adjacent vibrating body 106.
Since the driving unit 114 is not formed between them, the space between the adjacent vibrator main bodies 106 can be narrowed, and the miniaturization of the vibration gyro sensor can be further promoted.

In the fifteenth to nineteenth specific examples,
The formation position of the connecting portion 108 formed between each transducer body 106 and the abutment 100 on each transducer body 106 is the central portion of the end face of the transducer body 106 on the abutment 100 side. For example, as shown in FIG. 30, each vibrator main body 1 of the connecting portion 108 is not required.
The formation position of 06 is the abutment 1 of the vibrator main body 106.
The end face on the 00 side may be close to the frame 104 (a twentieth specific example), or, although not shown, as the part corresponding to the longitudinal center of the abutment 100 on the end face on the abutment 100 side of the oscillator body 10. Good.

Further, as shown in FIGS. 31 to 33, in order to keep the vibration of the driving portion 114 by the driving piezoelectric / electrostrictive element 118 in the driving means 122 constant, the driving means 1
The drive unit 12 receives a signal from the reference piezoelectric / electrostrictive element 142 in the reference unit 140 provided at a position different from that of the drive unit 12.
A mechanism for feeding back to 2 may be adopted.

That is, the vibrating gyro sensor according to the twenty-first concrete example shown in FIG. 31 is the same as the vibrating gyro sensor according to the seventeenth concrete example shown in FIG.
The reference means 140 is provided in the vicinity of the connecting portion 108 of 06. The reference unit 140 has substantially the same configuration as the drive unit 122, and has a thin plate-shaped reference portion (fourth plate-shaped portion) 144 in the height direction, and the reference portion 144.
The piezoelectric / electrostrictive element 142 for reference formed above. The reference part 144 is integrally formed of ceramic like the driving part 114.

Then, the signal from the reference piezoelectric / electrostrictive element 142 in the reference means 140 is used for driving so that the vibration of the drive means 122 formed on the line connecting the centers of gravity of the respective vibrator bodies 106 becomes constant. Is fed back to the piezoelectric / electrostrictive element 118.

In the above-mentioned example, the plate-shaped portion provided on the line connecting the centers of gravity of the respective vibrator main bodies 106 and the piezoelectric / electrostrictive element formed on the plate-shaped portion are used as the driving means 122, and each vibrator main body is used. The plate-like portion provided in the vicinity of the connecting portion 108 of 106 and the piezoelectric / electrostrictive element formed on the plate-like portion are referred to as reference means 140.
However, the reverse configuration may be adopted.

Next, the vibration gyro sensor according to the 22nd specific example shown in FIG. 32 corresponds to the vibration gyro sensor according to the 18th specific example shown in FIG.
6, the reference means 140 is provided from the portion corresponding to the longitudinal center of the abutment 100 on the abutment 100 side end surface to the abutment 100.

Then, in order to make the vibration of the driving means 122 provided from the portion near the frame 104 on the end surface of the vibrator body 106 on the abutment 100 side to the abutment 100 constant, the reference means 140 for reference. The signal from the piezoelectric / electrostrictive element 142 is fed back to the driving piezoelectric / electrostrictive element 118.

In the above example, the abutment 10 of the vibrator main body 106
From the portion near the frame 104 on the 0-side end face to the abutment 100
A plate-shaped portion provided over the plate-shaped portion and a piezoelectric / electrostrictive element formed on the plate-shaped portion are used as the driving means 122, and the end face of the vibrator main body 106 on the side of the abutment 100 is located closer to the center in the longitudinal direction of the abutment 100. Although the plate-shaped portion provided from the portion to the abutment 100 and the piezoelectric / electrostrictive element formed on the plate-shaped portion are used as the reference means 140, the reverse configuration may be adopted.

Next, the vibrating gyro sensor according to the twenty-third concrete example shown in FIG. 33 corresponds to the vibrating gyro sensor according to the seventeenth concrete example shown in FIG.
6, the reference means 140 is provided from the portion corresponding to the longitudinal center of the abutment 100 on the abutment 100 side end surface to the abutment 100.

Then, the signal from the reference piezoelectric / electrostrictive element 142 in the reference means 140 is driven so that the vibration of the drive means 122 formed on the line connecting the centers of gravity of the respective vibrator bodies 106 becomes constant. Piezoelectric / electrostrictive element 118 for use
Be fed back to.

In the above-mentioned example, the plate-like portions provided on the line connecting the centers of gravity of the respective vibrator bodies 106 and the piezoelectric / electrostrictive elements formed on the plate-like portions are used as the driving means 122, and the vibrator bodies 106 are used. The plate-like portion provided from the portion corresponding to the longitudinal center of the abutment 100 on the end face of the abutment 100 to the abutment 100 and the piezoelectric / electrostrictive element formed on the plate-like portion serve as the reference means 140. Although used, the reverse configuration may be adopted.

In any of the vibration gyro sensors according to the first to twenty-third specific examples, the vibrator 2 (or 1
02) is a so-called forced vibration type structure in which it is directly vibrated by a driving unit, but a free vibration type structure may be adopted as shown in FIGS. 34 to 36.

First, the vibration gyro sensor according to the twenty-fourth concrete example shown in FIG.
A plate-shaped vibrating portion (fifth plate-shaped portion) 150 extending in parallel with the longitudinal direction of the abutment 100 is arranged between 06, and a thin-walled plate-shaped first portion that connects the abutment 100 and the vibrating portion 150 is arranged. 1 connecting portion (sixth plate-shaped portion) 152, the vibrator body 106, and the vibrating portion 15
Thin-walled plate-like connecting portion (7th plate-like portion) 1 for connecting with 0
54 and the drive means 122 provided between each vibration part 150.
An example configured with and is shown.

First and second connecting portions 152 and 154
Is a vibration gyro according to the fifteenth to twenty-third specific examples.
The oscillating portion 150 has substantially the same dimensional relationship as the connecting portion 108 of the sensor, and the vibrating portion 150 has substantially the same height as the vibrator main body 106, and its width is smaller than the width of the vibrator main body 106. , And slightly larger than the first and second connecting portions 152 and 154.

The vibration gyro sensor according to the twenty-fifth concrete example shown in FIG. 35 has substantially the same structure as the vibration gyro sensor according to the twenty-fourth concrete example, but the driving means 12
2 is the frame body 1 on the end face of the vibration unit 150 on the abutment 100 side.
It is different in that it is provided from the portion closer to 04 to the abutment 100.

The vibration gyro sensor according to the twenty-sixth specific example shown in FIG. 36 has substantially the same structure as the vibration gyro sensor according to the twenty-fourth specific example, but the driving means 122 includes a vibrating section. It is different in that it is provided from the portion corresponding to the longitudinal center of the abutment 100 on the abutment 100 side end surface of 150 to the abutment 100.

In the vibrating gyro sensor according to the twenty-fourth to twenty-sixth specific examples, the vibrator main body 10
6 to the vibrating section 150 existing between the abutment 100 and the supporting unit 100.
By applying vibration through 2, the vibrator 1 is indirectly
02A to 102D are vibrated, and the advantage thereof is that the vibrator main body 106 is less likely to be affected by the driving unit 114, so that (1) it is easy to obtain a large amplitude in the vibration of the vibrators 102A to 102D, Child 102A-102D
It is possible to obtain a vibration waveform that is similar to a clean sine wave because the vibration waveform at 3 is hardly disturbed.

By the way, in many vibration gyro sensors conventionally used, an elinvar alloy is used as a vibrator, and a bulk piezoelectric / electrostrictive element having electrodes is further fixed to the vibrator by adhesion. Therefore, it is necessary to use solder, Ag paste, or the like for connecting the external wiring to the electrodes of the piezoelectric / electrostrictive element. In this case, the solder, Ag paste, etc., and the external wiring itself add weight, which greatly affects the vibration characteristics of the vibrator, making the manufacture difficult.

Even in the type using the piezoelectric ceramics as the vibrator, there is no essential difference in that the lead wire is connected to the vibrating part: low reliability of the external wiring connection part, There is a problem of being large.

However, in the vibrating gyro sensor according to the above-mentioned first to twenty-sixth specific examples, the external wiring can be easily connected to the pair of electrodes of each piezoelectric / electrostrictive element (118, 120). Have advantages.

This advantage will be described based on the vibration gyro sensor according to the seventeenth example shown in FIG. 26. In this vibration gyro sensor, as shown in FIG. Except for each pair of electrodes, since it is composed of an integrally fired body of ceramics (non-conductive material), a pair of electrodes forming the piezoelectric / electrostrictive element 118 of the driving means 122 and the pair of electrodes are derived. Two external wirings (160, 162) and (164, 166), a pair of electrodes forming the piezoelectric / electrostrictive element 120 of the detection unit 124, and two externals derived from the pair of electrodes. Wiring (168, 170), (172,
174), (176, 178) and (180, 182)
And can be formed by the film forming method using the same wiring material.

The wiring forming pattern will be specifically described. Driving means 1 provided between the vibrator main bodies 106.
Two wirings (160, 162) and (16) led out from a pair of electrodes forming the piezoelectric / electrostrictive element 118 of 22.
4, 166) from the upper surface of the vibrator main body 106 adjacent to each electrode to the frame body 104 through the upper surface of the connection portion 108, the upper surface of the abutment 100, and the upper surface of the plate-shaped portion 116 of the detection portion 124 near the vibrators 102A and 102B. Formed to be derived.

In addition, two wirings (1) derived from a pair of electrodes of the piezoelectric / electrostrictive element 120 in each detection section 124 are provided.
68, 170), (172, 174), (176, 17)
8) and (180, 182) are formed so as to be led out from each detection unit 124 to the frame body 104.

As the constituent materials of these electrodes and wirings,
As described above, the conductor is not particularly limited as long as it is a conductor that can withstand a high temperature oxidizing atmosphere such as a heat treatment temperature and a firing temperature, and may be, for example, a simple metal or an alloy, and also has an insulating property. It does not matter if it is a mixture of an additive such as ceramics or glass and a metal or alloy, or even conductive ceramics. Preferably, an electrode material containing a high melting point noble metal such as platinum, palladium, or rhodium, or an alloy containing silver-palladium, silver-platinum, platinum-palladium, or the like as a main component is preferably used.

As the method for forming the electrodes and wirings, for example, a thick film method such as screen printing, a coating method such as dipping, a thin film method such as ion beam, sputtering, vacuum deposition, ion plating, CVD, and plating. Etc. can be appropriately adopted, but the invention is not limited thereto.

Next, another specific example will be described.
Since the specific examples shown below can be understood as modified examples of the various specific examples shown in FIGS. 1 to 21, components corresponding to those in FIGS. 1 to 21 are denoted by the same reference numerals and duplicate description thereof will be omitted.

First, the vibration gyro sensor according to the twenty-seventh specific example shown in FIG. 38 has substantially the same structure as the vibration gyro sensor according to the first specific example shown in FIG. Third plate-shaped portion 10 provided with the strain element 14
However, it is different in that it is integrally formed so as to bridge between the two second plate-shaped portions 8.

The vibrating gyro sensor according to the twenty-eighth concrete example shown in FIG. 39 has substantially the same structure as the vibrating gyro sensor according to the third concrete example shown in FIG.
A thin third plate-shaped portion 10 is integrally formed between the second plate-shaped portion 8 and the second plate-shaped portions 8 located on the left and right sides of the second plate-shaped portion 8. Piezoelectric / electrostrictive element 1
4 is formed, and the two piezoelectric elements 2 on the left and right are excited and vibrated in mutually opposite directions by the operation of the driving piezoelectric / electrostrictive element 14.

The vibration gyro sensor according to the twenty-ninth specific example shown in FIG. 40 has substantially the same structure as the vibration gyro sensor according to the fifth specific example shown in FIG. A thin third plate-shaped portion 10 is integrally formed between the portion 8 and a side of the mounting frame portion 30 facing the portion 8, and further, a driving piezoelectric element is formed on the third plate-shaped portion 10. / Electrostrictive element 1
4 is integrally formed by a film forming method.

The vibrating gyro sensor according to the thirtieth specific example shown in FIG. 41 has substantially the same structure as the vibrating gyro sensor according to the seventh specific example shown in FIG. Two second plate-like parts 8 arranged in 30
A thin third plate-shaped portion 10 is integrally formed in between, and the driving piezoelectric / electrostrictive element 1 is further provided on the third plate-shaped portion 10.
4 is integrally formed by a film forming method.

Since the vibrating gyro sensors according to the 27th to 30th specific examples are configured to drive the second plate-shaped portion 8 instead of directly driving the oscillator 2. The oscillator 2 is a third element that constitutes the driving unit 122.
It is possible to vibrate without being restrained by the plate-shaped portion 10. As a result, the sharpness of the vibration of the vibrator 2 is increased, so that the vibration is less likely to be attenuated and the detection signal detected by the detection piezoelectric / electrostrictive element 12 is easily handled.
Moreover, the vibration amplitude of the vibrator 2 is increased, and the sensitivity can be further improved.

In the vibrating gyro sensor according to the first to thirtieth specific examples, the first plate-like portion 6 forming the detecting portion is formed thinner than the vibrator 2, and is structurally integrated. However, it is functionally configured to be separate from the vibrator 2.

The various concrete examples given below are ones in which the vibrator 2 and the detecting portion are structurally and functionally integrated, and are more advantageous in improving the sensitivity.

A concrete description will be given below. It should be noted that components corresponding to those in FIGS. 1 to 21 are denoted by the same reference numerals, and redundant description thereof will be omitted.

First, a vibration gyro sensor according to a thirty-first embodiment shown in FIG. 42 has a rectangular block-shaped abutment 4 having a predetermined thickness, and a long side surface of the abutment 4 as a base end. Two second plate-shaped portions 8 that are spaced apart from each other and extend in a direction perpendicular to the longitudinal side surfaces of the abutment 4, and each second
Of the plate-shaped portion 8 having a free end upper portion as a base end and extending in a direction perpendicular to the long side surface of the abutment 4 at a predetermined interval from each other, and having a substantially rectangular shape (wide and long) in the first direction. The plate-like portion (see FIG. 43) and the second plate-like portion 8 between the two second plate-like portions 8 are formed in a bridging manner.
0 has a shape integrally formed by integrally firing ceramics. In this case, the vibrator 2 is formed by the first plate-shaped portion 6.
Is configured.

The second plate-shaped portion 8 has a width smaller than that of the first plate-shaped portion 6 and has a main surface extending in a direction perpendicular to the first plate-shaped portion 6. It is a thin plate-shaped part,
The first plate-shaped portion 6 (vibrator 2) is integrally connected to the abutment 4 via the second plate-shaped portion 8.

The third plate-shaped portion 10 is the same as the second plate-shaped portion 8 described above.
It is integrally connected to the part near the abutment 4 in the space.

In the vibrating gyro sensor according to the thirty-first specific example, the piezoelectric / electrostrictive element 12 for detection is formed on almost the entire upper surface of each first plate-shaped portion 6 formed to have a wide width. The driving piezoelectric / electrostrictive element 14 is formed on almost the entire upper surface of the third plate-shaped portion 10.

A vibration gyro according to the 31st specific example.
According to the sensor, since the vibrator 2 is configured by the wide and long first plate-shaped portion 6, the mass and moment of the vibrator 2 are increased, and as a result, the speed (∝ amplitude) due to the drive vibration is increased. Since it becomes large, the sensitivity can be further improved. Further, since the detection piezoelectric / electrostrictive element 12 is formed on almost the entire surface of the first plate-shaped portion 6,
It becomes possible to store a large amount of charges, which is advantageous in the current detection method.

Next, the vibration gyro sensor according to the thirty-second concrete example shown in FIG. 44 has substantially the same structure as the vibration gyro sensor according to the thirty-first concrete example (see FIG. 42). The difference is that thick block portions 70 are integrally provided between the first plate-shaped portion 6 and the second plate-shaped portion 8.

In the vibration gyro sensor according to the thirty-first specific example shown in FIG. 42, the first plate-shaped portion 6 is directly provided on the second plate-shaped portion 8, so that the first plate The boundary portion between the plate-shaped portion 6 and the second plate-shaped portion 8 may be disadvantageous in terms of strength, but in the vibration gyro sensor according to the thirty-second specific example, due to the existence of the block portion 70, The strength of the boundary portion can be increased, which is advantageous in improving reliability.

Next, the vibration gyro sensor according to the thirty-third concrete example shown in FIG. 45 has the same structure as the vibration gyro sensor according to the thirty-first concrete example shown in FIG.
The difference is that the abutment 4 is a rectangular frame 32, and the two second plate-shaped portions 8 are spaced apart from each other by a predetermined distance with one short side of the frame inner wall surface of the frame 32 as a base end. Empty frame 32
Is integrally formed so as to extend parallel to the long side of the.

In the vibration gyro sensor and the like according to the thirty-first specific example shown in FIG. 42, since the abutment 4 has a block shape, when the abutment 4 is mounted or fixed by an adhesive or the like, a portion which can be fixed. There is a problem in mounting that the amount of vibration is small and a problem in strength that the rigidity of the abutment 4 tends to be low and vibrations are easily transmitted to the abutment 4. Since the degree of freedom of is increased and the rigidity is improved, the above problems can be solved, which is preferable in practice.

Next, the vibrating gyro sensor according to the thirty-fourth concrete example shown in FIG. 46 has substantially the same structure as the vibrating gyro sensor according to the thirty-third concrete example (FIG. 45). The difference is that thick block portions 70 are integrally provided between the plate-shaped portion 6 and the second plate-shaped portion 8.

In this case, due to the presence of the block portion 70, the strength of the boundary portion between the first plate-shaped portion 6 and the second plate-shaped portion 8 can be increased, and the frame 32 is used. Therefore, it is advantageous in terms of mounting and rigidity.

Next, the vibration gyro sensor according to the thirty-fifth concrete example shown in FIG. 47 has substantially the same structure as the vibration gyro sensor according to the thirty-third concrete example (see FIG. 45), but FIG. As shown in FIG. 5, a plurality of recesses 72 are formed on the back surface of the first plate-shaped portion 6, and the piezoelectric detection electrodes are located at positions corresponding to the recesses 72 in the upper surface of the first plate-shaped portion 6. The difference is that the electrostrictive element 12 is formed in an island shape. In the example of FIG. 47, the outer shape of the recess 72 and the planar shape of the detection piezoelectric / electrostrictive element 12 are both circular.

A vibration gyro according to the 33rd specific example
According to the sensor, since the strength of the portion of the first plate-shaped portion 6 in which the recess 72 is formed is reduced, the recess 72 is formed when the first plate-shaped portion 6 is deformed by the Coriolis force. Larger distortion occurs in the formed portion than in the portion without the recess 72. Therefore, by forming the detection piezoelectric / electrostrictive element 12 in the portion corresponding to the recess 72, a large detection output can be obtained, and the sensitivity can be further improved.

Next, the vibration gyro sensor according to the thirty-sixth concrete example shown in FIG. 49 has substantially the same structure as the vibration gyro sensor according to the thirty-fifth concrete example shown in FIG. The difference is that thick block portions 70 are integrally provided between the plate-shaped portion 6 and the second plate-shaped portion 8.

In this case, the presence of the block portion 70 makes it possible to increase the strength of the boundary portion between the first plate-shaped portion 6 and the second plate-shaped portion 8 and to obtain a large output. Therefore, it is advantageous in improving reliability and sensitivity.

In the vibrating gyro sensor according to the thirty-fifth and thirty-sixth specific examples, the piezoelectric / electrostrictive element 12 for detection, which is substantially circular in a plane, is formed in an island shape on the upper surface of the first plate-shaped portion 6. Although an example is shown, in addition, as shown in FIGS. 50 and 51, both the outer shape of the recess 72 (see FIG. 48) and the detection piezoelectric / electrostrictive element 12 may be quadrangular (37th and 38th). Specific example of). The planar shape of the concave portion 72 and the piezoelectric / electrostrictive element 12 for detection may be a circular shape or a quadrangle as well as a rhombus, and there is no limitation on the shape.

Next, the vibration gyro sensor according to the thirty-ninth specific example shown in FIG. 52 has substantially the same structure as the vibration gyro sensor according to the thirty-first specific example shown in FIG. 4, a mounting portion 74 for fixing the abutment 4 is integrally provided on the surface opposite to the surface on which the second plate-shaped portion 8 is formed. In between, the supporting portion (the fifth portion, which is thin in the width direction of the abutment 4).
The plate-shaped portion) is integrally provided.

That is, in the vibrating gyro sensor according to the thirty-ninth specific example, the abutment 4, the two second plate-shaped portions 8 and the two vibrators 2 (the first plate-shaped portion 6). ) At 1
One tuning fork body 78 is configured, and the tuning fork body 78 is integrally connected to the mounting portion 74 by a support portion (fifth plate-shaped portion) 76.

Generally, as a mode in which the tuning fork body 78 is vibrated by being supported by an arbitrary fixing means by a support rod, the two oscillators 2 of the tuning fork body 78 are in opposite directions. There are a vibration mode and a mode in which the two vibrators 2 vibrate in the same direction.

The necessary mode for the vibration gyro sensor is the former mode (modes vibrating in opposite directions).
The latter mode is unnecessary for the vibration gyro sensor. From this, if the frequency of the required mode and the frequency of the unnecessary mode are significantly different, they can be easily differentiated and the detection accuracy in the required mode can be improved.

FIG. 53 shows how the frequency of the required mode and the frequency of the unnecessary mode change depending on the length of the support rod. In FIG. 53, curve a shows the characteristics of the required mode, and curve b shows the characteristics of the unnecessary mode. As can be seen from FIG. 53,
When the length of the support rod is large, the frequencies of both modes are significantly different, but as the support rod becomes shorter, the frequencies of the two approaches each other, making it difficult to differentiate between the two, and in terms of detection accuracy, Be at a disadvantage.

On the other hand, in the vibration gyro sensor according to the thirty-ninth specific example, the abutment 4 and the mounting portion 74 are used.
Since the support portion 76 is integrally connected,
The support portion 76 will function as the support rod,
It is possible to improve the detection accuracy.

Next, the vibration gyro sensor according to the fortieth specific example shown in FIG. 54 has the same structure as the vibration gyro sensor according to the thirty-ninth specific example shown in FIG.
The difference is that thick block portions 70 are integrally provided between the first plate-shaped portion 6 and the second plate-shaped portion 8.

In this case, the presence of the block portion 70 makes it possible to increase the strength of the boundary portion between the first plate-shaped portion 6 and the second plate-shaped portion 8 and, moreover, the supporting portion 76.
In addition, since the tuning fork body 78 is integrally provided, it is advantageous in improving the detection accuracy.

Next, the vibration gyro sensor according to the forty-first embodiment shown in FIG. 55 has the same structure as the vibration gyro sensor according to the thirty-ninth embodiment shown in FIG.
The mounting portion 76 differs from the mounting frame portion 8 in that the mounting portion 76 is a rectangular frame (hereinafter, referred to as a mounting frame portion 80).
It is integrally formed so that one short side of the inner wall surface of the frame at 0 is a base end and extends parallel to the long side of the mounting frame portion 80.

In this case, the detection accuracy can be improved, and since the mounting portion is the mounting frame portion 80,
Practically preferable in terms of mounting flexibility and rigidity.

Next, the vibration gyro sensor according to the forty-second embodiment shown in FIG. 56 has the same structure as the vibration gyro sensor according to the forty-first embodiment shown in FIG.
The difference is that thick block portions 70 are integrally provided between the first plate-shaped portion 6 and the second plate-shaped portion 8.

In this case, the presence of the block portion 70 makes it possible to increase the strength of the boundary portion between the first plate-shaped portion 6 and the second plate-shaped portion 8 and, moreover, to attach the frame portion 8.
Since 0 is used, it is advantageous in terms of mounting and rigidity.

Next, the vibration gyro sensor according to the forty-third concrete example shown in FIG. 57 has the same structure as the vibration gyro sensor according to the forty-first concrete example shown in FIG.
As shown in FIG. 48, a plurality of concave portions 72 are formed on the back surface of the first plate-shaped portion 6, and detection positions are provided on the upper surface of the first plate-shaped portion 6 at positions corresponding to the plurality of concave portions 72. The difference is that the piezoelectric / electrostrictive element 12 is formed in an island shape. In the example of FIG. 57, the outer shape of the recess 72 and the piezoelectric / electrostrictive element 12 for detection are used.
2 shows an example in which both plane shapes are circular.

In this case, the detection accuracy can be improved, and at the same time, a large detection output can be obtained and the sensitivity can be improved.

Next, the vibration gyro sensor according to the forty-fourth concrete example shown in FIG. 58 has almost the same structure as the vibration gyro sensor according to the forty-third concrete example shown in FIG. The difference is that thick block portions 70 are integrally provided between the plate-shaped portion 6 and the second plate-shaped portion 8.

In this case, the presence of the block portion 70 makes it possible to increase the strength of the boundary portion between the first plate-shaped portion 6 and the second plate-shaped portion 8 and to obtain a large output. Therefore, it is advantageous in improving reliability and sensitivity.

In the vibrating gyro sensor according to the forty-third and forty-fourth specific examples, the piezoelectric / electrostrictive element 12 having a substantially circular plane shape is formed in an island shape on the upper surface of the first plate-shaped portion 6. Although an example is shown, in addition, as shown in FIGS. 59 and 60, both the outer shape of the recess 72 (see FIG. 48) and the detection piezoelectric / electrostrictive element 12 may be quadrangular (45th and 46th). Specific example of). Also in this case, the recess 72
The plane shape of the piezoelectric / electrostrictive element 12 for detection is not limited to the above-mentioned circle or quadrangle, and may be a rhombus, and the shape is not limited.

In the vibrating gyro sensor according to the 31st to 46th specific examples, the driving portion (third portion) having the driving piezoelectric / electrostrictive element 14 formed on the upper surface between the second plate-shaped portions 8 is used.
The driving means 122 having the plate-shaped part 10) is integrally provided. However, in order to keep the vibration of the vibrator 2 constant, as shown in FIG. A mechanism for feeding back a signal from the reference means 140 provided to the driving means 122 to the driving means 122 may be adopted.

That is, the vibrating gyro sensor according to the 47th specific example shown in FIG. 61 is the same as the vibrating gyro sensor according to the 34 th specific example (see FIG. 46). 8 has a structure in which a reference means 140 is provided in parallel with the drive means 122.

The reference means 140 has substantially the same structure as the drive means 122, and has a plate-shaped reference portion (fourth plate-shaped portion) 144 that is thin in the height direction, and the reference portion 14.
4 for reference and a piezoelectric / electrostrictive element 142 for reference. The reference part 144 is integrally formed of ceramics like the drive part 10. Reference unit 144 and drive unit 10
As for the arrangement relationship with the driving unit 1, the driving unit 10 is integrally formed at a position between the second plate-shaped units 8 and close to the frame body 80.
The reference portion 144 is provided at a position slightly closer to the first plate-shaped portion 6 from 0.
Are integrally formed.

Then, the reference means 14 is arranged so that the vibration of the drive means 122 formed between the second plate-shaped portions 8 becomes constant.
The signal from the reference piezoelectric / electrostrictive element 142 at 0 is fed back to the driving piezoelectric / electrostrictive element 14.

As shown in FIG. 62, the supply of the drive signal to the drive means 122 is connected to the upper electrode and the lower electrode (both not shown) formed above and below the driving piezoelectric / electrostrictive element 14. The lead signal is taken out through the lead wires 200a and 200b, and the reference signal is taken out from the reference means 140. Leads connected to upper and lower electrodes (both not shown) formed above and below the reference piezoelectric / electrostrictive element 142. Line 20
2a and 202b.

Further, the detection signal is taken out from the detection piezoelectric / electrostrictive element 12 formed on the first plate-like portion 6 by using the upper electrodes formed above and below the detection piezoelectric / electrostrictive element 12. And a lead wire 2 connected to the lower electrode (both not shown)
04a and 204b.

Hereinafter, other specific examples in which the reference means 140 is formed will be described. First, the vibration gyro sensor according to the forty-eighth concrete example shown in FIG. 63 is the same as the vibration gyro sensor according to the thirty-sixth concrete example shown in FIG. The reference means 140 is provided in parallel with the means 122.

In this case, as shown in FIG. 64, the upper electrodes and the lead wires 204a in the plurality of detection piezoelectric / electrostrictive elements 12 formed in an island shape are connected to the relay conductors 206, respectively.
a lead wire 204b is electrically connected to each of the lower electrodes of the plurality of detection piezoelectric / electrostrictive elements 12 via a relay conductor 206b. The detection signal from the detection piezoelectric / electrostrictive element 12 is taken out through the lines 204a and 204b.

Next, a vibration gyro sensor according to a forty-ninth specific example shown in FIG. 65 is the same as the vibration gyro sensor according to the thirty-ninth specific example (see FIG. 52). A relay portion (sixth plate-shaped portion) 208 whose end portion is a free end is integrally provided in a substantially central portion of the side surface facing, and between the second plate-shaped portion 8 and the relay portion 208 on one side. The driving means 122 is integrally provided, and the reference means 140 is integrally provided between the other second plate-shaped portion 8 and the relay portion 208.

This is because the support portion 76 (fifth plate-shaped portion) is formed between the abutment 4 and the mounting portion 74 so as to substantially coincide with the line-symmetrical position of the tuning fork body 78. One of the second plate-shaped portions 8 of the book is vibrated to generate the corresponding vibrator 2
Is utilized, the other oscillator 2 also utilizes the property of vibrating at the same frequency.

Therefore, when one of the vibrators 2 vibrates due to the driving of the driving means 122, the other vibrator 2 also vibrates at the same frequency, so that the vibration of the driving means 122 is caused by the signal taken out by the reference means 140. It is possible to feed back so that it becomes constant.

Next, a vibration gyro sensor according to a fiftieth specific example shown in FIG. 66 is the same as the vibration gyro sensor according to the thirty-ninth specific example (see FIG. 52). A plurality of relay portions 210a and 210b each having a free end at positions of both ends of the facing side surface in the longitudinal direction.
Are integrally provided, the driving means 122 is integrally provided between the one second plate-shaped portion 8 and the one relay portion 210a, and the other second plate-shaped portion 8 and the other relay portion are provided. The reference means 140 is integrally provided between the reference means 140 and 210b.

Also in this case, when one of the vibrators 2 vibrates due to the driving of the driving means 122, the other vibrator 2 also vibrates at the same frequency, so that the signal taken out by the reference means 140 causes the driving means 122 to move. It is possible to feed back so that the vibration becomes constant.

In the vibrating gyro sensor according to the forty-ninth and fiftieth specific examples, the tuning fork body 78 is integrally provided on the block-shaped mounting portion 74. Like the vibration gyro sensor according to the fifty-first and fifty-second specific examples shown, the mounting portion 74 is
May be a rectangular frame body (mounting frame portion) 80.

In this case, the driving means 1 is referred to by the reference means 140.
Feedback control can be performed so that the vibration of 22 is constant, and since the mounting portion is the mounting frame portion 80,
It is advantageous in terms of mounting flexibility and rigidity.

Next, the vibration gyro sensor according to the 52nd specific example shown in FIG. 69 has substantially the same structure as the vibration gyro sensor according to the 42nd specific example shown in FIG. It differs in that it is configured as follows.

That is, the supporting portion 76 bridges between a pair of inner wall surfaces of the mounting frame portion 80 along the extending direction of the vibrator 2, and the supporting portions 76 are shown in FIGS. 70A and 70C. As shown in FIG. 1, a first support portion 212 integrally provided so as to face the vibrator 2 upward, and a bridge between the first support portion 212 and the abutment 4, and As shown in FIG. 70B, it is configured to have a second support portion 214 integrally provided so as to face the driving means 122 upward.

As described above, lengthening the support rod of the tuning fork 78 can make the distinction between the required mode and the unnecessary mode clearer, and is therefore suitable for improving the detection accuracy of the sensor. However, in the vibration gyro sensor (see FIG. 56) according to the forty-second embodiment, the support portion 76 formed of the fifth plate-shaped portion between the abutment 4 and the mounting frame portion 80. However, if the support portion 76 is made longer, the total length of the sensor becomes longer accordingly, and there is a limit to the extension of the support portion 76.

On the other hand, in the vibration gyro sensor according to the 53rd embodiment, the tuning fork body 78 is substantially used.
The second support portion 214 having the same function as the support rod of
It is provided in parallel with the two second plate-shaped portions 8 and these second
Since the plate-shaped portion 8 extends in the same direction as that of the plate-shaped portion 8, even if the length of the second support portion 8 is increased, the total length of the sensor can be maintained within a certain range. Therefore, the second
It is possible to extend the support portion 8 and the detection accuracy can be further improved.

The first and second supporting portions 212 and 21
The configuration of No. 4 can also be applied to a vibrating gyro sensor having a driving unit 122 and a reference unit 140, as shown in FIGS. 71 and 72, for example.

The vibrating gyro sensor according to the 54th concrete example shown in FIG. 71 is similar to the 51st vibrating gyro sensor shown in FIG. 67, but instead of the supporting portion 76, the first and second supporting portions 212 and 214. 72 is provided, and FIG.
The vibration gyro sensor according to the 55th specific example shown in
The support portion 7 of the 52nd vibrating gyro sensor shown in FIG.
6 instead of the first and second support portions 212 and 21.
4 is provided.

By the way, as shown in FIG. 2, the vibrating gyro sensor constituted by such an integrally fired ceramic body has a thin plate layer 22, a substrate layer 24 and a spacer layer 26, as shown in FIG.
73 can be configured as an integral laminated body of FIG.
As shown in FIG. 3, it is also possible to further interpose one layer (intermediate layer) 216 between the thin plate layer 22 and the substrate layer 24.

The thickness of the intermediate layer 216 is 1 μm.
~ 500 μm can be used, preferably 10 μm to 400
μm, and more preferably 50 μm to 300 μm. If the thickness exceeds 500 μm, it becomes difficult to bend and the sensitivity decreases. Further, if it is thinner than 1 μm, there is a problem that the strength is low and it is easily damaged. Therefore, the intermediate layer 216
It is preferable to adopt the above range as the thickness of the.

The formation of the intermediate layer 216 is of a type in which the block-shaped vibrator 2 is supported by the thin first plate-shaped portion 6 (see FIGS. 1, 4 to 18 and 38 to 41). Or
Ensuring strength and sensitivity in a type (see FIGS. 22 and 24 to 37) of a type in which an abutment 100 integrally provided with four block-shaped vibrators 102A to 102D is supported by a thin plate-shaped portion 116 Is preferable in order to improve

Further, the 31st to 5th shown in FIGS.
As for the vibration gyro sensor according to the fifth example, in which the vibrator 2 is configured by the thin first plate-shaped portion 6, the strength is increased by interposing the intermediate layer 216. This is advantageous in securing security and improving sensitivity. 74 to 76 show examples thereof.

The example shown in FIG. 74 is a thin plate layer 2 which constitutes the vibration gyro sensor according to the 33rd specific example shown in FIG.
2 shows a state in which the intermediate layer 216 is interposed between the substrate 2 and the substrate layer 24. By processing the thin plate layer 22,
The upper surface portion 32a of the frame 32, the upper portion 6 of the first plate-shaped portion 6
a, the upper end portion 8a of the second plate-shaped portion 8 and the third plate-shaped portion 10 are integrally formed, and by processing the intermediate layer 216, the upper portion 32b excluding the upper surface portion of the frame 32, the first portion The lower portion 6b of the plate-shaped portion 6 and the upper portion 8b of the second plate-shaped portion 8 excluding the upper end portion are integrally formed, and the substrate layer 24 is processed to form the remaining portion 32c of the frame 32 and the first portion 8c. The vibrating gyro sensor according to the thirty-third concrete example is manufactured by integrally forming the remaining portion 8c of the second plate-shaped portion 8 and integrally laminating and firing them.

The example shown in FIG. 75 is a thin plate layer 2 constituting the vibration gyro sensor according to the 34th example shown in FIG.
2 shows a state in which the intermediate layer 216 is interposed between the substrate 2 and the substrate layer 24. By processing the thin plate layer 22,
The upper surface portion 32a of the frame 32, the upper portion 6 of the first plate-shaped portion 6
a, the upper end portion 8a of the second plate-shaped portion 8 and the third plate-shaped portion 10 are integrally formed, and by processing the intermediate layer 216, the upper portion 32b excluding the upper surface portion of the frame 32, the first portion The lower portion 6b of the plate-shaped portion 6 and the upper portion 8b of the second plate-shaped portion 8 excluding the upper end portion are integrally formed, and the substrate layer 24 is processed to form the remaining portion 32c of the frame body 32, The remaining portion 8c of the second plate-shaped portion 8 and the block portion 70 are integrally formed, and these are laminated and integrated and fired to manufacture the vibration gyro sensor according to the 34th specific example. It will be.

The example shown in FIG. 76 is a thin plate layer 2 constituting the vibration gyro sensor according to the thirty-fifth specific example shown in FIG.
2 shows a state in which the intermediate layer 216 is interposed between the substrate 2 and the substrate layer 24. By processing the thin plate layer 22,
The upper surface portion 32a of the frame 32, the upper portion 6 of the first plate-shaped portion 6
a, the upper end portion 8a of the second plate-shaped portion 8 and the third plate-shaped portion 10 are integrally formed, and the intermediate layer 216 is processed, whereby the upper portion 32b except the upper surface portion of the frame 32, A lower portion 6b of the first plate-shaped portion 6 in which a hole 218 (which constitutes the recess 72 shown in FIG. 48 together with the thin plate layer 22) is formed, and an upper portion 8b of the second plate-shaped portion 8 excluding the upper end portion thereof are integrally formed. And processing the substrate layer 24 to integrally form the remaining portion 32c of the frame body 32 and the remaining portion 8c of the second plate-shaped portion 8, and stack and integrate these for firing. As a result, the vibration gyro sensor according to the 35th specific example is manufactured.

As described above, in the vibration gyro sensor according to the first to the 55th specific examples, the vibrator 2 (or 10
2), abutment 4 (or 100), mounting frame (30, 36,
38), since the entire frame 32 (or 104) and the like are made of an integrally fired body of ceramics (non-conductive material) such as zirconia oxide, the external wiring is formed on them by a film forming method. In addition to the advantage that the wiring can be directly formed, the piezoelectric / electrostrictive elements (12, 14, 11) can be formed.
The film forming method such as screen printing is used to form the electrodes of (8, 120, 142).
(4, 118, 120, 142) and at the same time,
There is an advantage that wiring to these electrodes can be performed up to the frame portion (frame body 104) that does not affect the vibration characteristics, and the ease of manufacturing the vibration gyro sensor and the improvement of the yield can be realized. it can.

In each of the specific examples of the vibrating gyro sensor shown, the thin second plate-shaped portion 8 is shown as a flat plate, but is not necessarily limited to a flat plate. Instead, any structure may be used as long as it has low rigidity in order to easily vibrate the vibrator in the desired vibration direction, and even if it has a shape in which a part thereof is constricted, there is no problem. It goes without saying that.

[0267]

As is apparent from the above description, in the vibrating gyro sensor according to the present invention, the whole is composed of a ceramic integrally fired body and no magnetic material is used. Therefore, it is not necessary to consider the influence of the surrounding magnetic field on the characteristics, and there is no restriction on the installation place. At the same time, the vibration of the first and second plate-shaped portions is A large displacement can be obtained in the detection direction and the driving direction of the child, and a large output can be effectively obtained because of the integrated structure in which the piezoelectric / electrostrictive element and the vibrator are in direct contact. Therefore, the cause of the decrease in sensitivity due to the absorption of stress can be effectively eliminated, and a highly sensitive sensor can be advantageously provided.

Further, in the composite sensor according to the present invention, unlike the conventional sensor having only one function per element, another sensor may be integrally provided adjacent to the vibration gyro sensor. This is extremely easy. For example, it is possible to easily realize a structure in which the vibration gyro and the acceleration sensor are simultaneously formed as one element (integrated sensor).

[Brief description of drawings]

FIG. 1 is a perspective explanatory view showing a preferred first specific example of a vibration gyro sensor according to the present invention.

2 is an exploded perspective view of the vibration gyro sensor shown in FIG. 1. FIG.

FIG. 3 is a partial perspective explanatory view showing an enlarged part of a first plate-shaped portion in the vibration gyro sensor shown in FIG.

FIG. 4 is a perspective explanatory view showing a preferred second specific example of the vibration gyro sensor according to the present invention.

FIG. 5 is a perspective explanatory view showing a preferred third specific example of the vibration gyro sensor according to the present invention.

FIG. 6 is a perspective explanatory view showing a preferred fourth specific example of the vibration gyro sensor according to the present invention.

FIG. 7 is a perspective explanatory view showing a preferred fifth specific example of the vibration gyro sensor according to the present invention.

FIG. 8 is a perspective explanatory view showing a preferred sixth specific example of the vibration gyro sensor according to the present invention.

FIG. 9 is a perspective explanatory view showing a preferred seventh specific example of the vibration gyro sensor according to the present invention.

FIG. 10 is a perspective explanatory view showing a preferred eighth specific example of the vibration gyro sensor according to the present invention.

FIG. 11 is a perspective explanatory view showing a preferred ninth specific example of the vibration gyro sensor according to the present invention.

FIG. 12 is a perspective explanatory view showing a tenth preferred example of the vibration gyro sensor according to the present invention.

FIG. 13 is a perspective explanatory view showing a preferred eleventh specific example of the vibration gyro sensor according to the present invention.

FIG. 14 is a perspective explanatory view showing a twelfth preferred example of the vibration gyro sensor according to the present invention.

FIG. 15 is a perspective explanatory view showing a preferred example of the composite sensor according to the present invention.

FIG. 16 is a perspective explanatory view showing another preferable example of the composite sensor according to the present invention.

FIG. 17 is an explanatory diagram showing an example of a manufacturing process of the vibration gyro sensor according to the first specific example shown in FIG. 1.

FIG. 18 is an explanatory diagram showing an example of a manufacturing process of the vibration gyro sensor according to the fifth specific example shown in FIG. 7.

FIG. 19 is an enlarged perspective view showing an electrode structure of a type using the vertical effect of electric field induced strain.

FIG. 20 is a perspective explanatory view showing a thirteenth preferred example of the vibration gyro sensor according to the present invention.

FIG. 21 is a perspective explanatory view showing a preferable fourteenth specific example of the vibration gyro sensor according to the present invention.

FIG. 22 is a perspective explanatory view showing a preferable fifteenth specific example of the vibration gyro sensor according to the present invention.

FIG. 23 is a perspective explanatory view showing a preferred sixteenth specific example of the vibration gyro sensor according to the present invention.

FIG. 24 is a perspective explanatory view showing an example of a configuration of an overhanging portion used for adjusting a resonance frequency in a vibration gyro sensor according to a fifteenth specific example.

FIG. 25 is a perspective explanatory view showing another example of the configuration of the overhanging portion used for adjusting the resonance frequency in the vibration gyro sensor according to the fifteenth specific example.

FIG. 26 is a perspective explanatory view showing a preferred seventeenth specific example of the vibration gyro sensor according to the present invention.

FIG. 27 is a perspective explanatory view showing an example of a structure for adjusting the resonance frequencies of the drive side and the detection side by changing the spring constants of the drive section and the detection section in the vibration gyro sensor according to the seventeenth example. .

FIG. 28 is a perspective explanatory view showing a preferable eighteenth specific example of the vibration gyro sensor according to the present invention.

FIG. 29 is a perspective explanatory view showing a preferable nineteenth specific example of the vibration gyro sensor according to the present invention.

FIG. 30 is a perspective explanatory view showing a preferable 20th specific example of the vibration gyro sensor according to the present invention.

FIG. 31 is a perspective explanatory view showing a twenty-first preferred example of the vibration gyro sensor according to the present invention.

FIG. 32 is a perspective explanatory view showing a preferable twenty-second specific example of the vibration gyro sensor according to the present invention.

FIG. 33 is a perspective explanatory view showing a preferable 23rd specific example of the vibration gyro sensor according to the present invention.

FIG. 34 is a perspective explanatory view showing a preferable twenty-fourth specific example of the vibration gyro sensor according to the present invention.

FIG. 35 is a perspective explanatory view showing a preferable 25th specific example of the vibration gyro sensor according to the present invention.

FIG. 36 is a perspective explanatory view showing a preferable 26th specific example of the vibration gyro sensor according to the present invention.

FIG. 37 is a perspective explanatory view showing an example of a wiring formation pattern derived from a pair of electrodes in the piezoelectric / electrostrictive element in the vibration gyro sensor according to the seventeenth specific example.

FIG. 38 is a perspective explanatory view showing a preferred twenty-seventh specific example of the vibration gyro sensor according to the present invention.

FIG. 39 is a perspective explanatory view showing a preferable twenty-eighth specific example of the vibration gyro sensor according to the present invention.

FIG. 40 is a perspective explanatory view showing a preferable 29th specific example of the vibration gyro sensor according to the present invention.

FIG. 41 is a perspective explanatory view showing a preferred thirtieth specific example of the vibration gyro sensor according to the present invention.

FIG. 42 is a perspective explanatory view showing a preferred 31st specific example of the vibration gyro sensor according to the present invention.

43 is a cross-sectional view taken along the line AA of FIG. 42.

FIG. 44 is a perspective explanatory view showing a preferable 32nd specific example of the vibration gyro sensor according to the present invention.

FIG. 45 is a perspective explanatory view showing a preferable thirty-third concrete example of the vibration gyro sensor according to the present invention.

FIG. 46 is a perspective explanatory view showing a preferred thirty-fourth specific example of the vibration gyro sensor according to the present invention.

FIG. 47 is a perspective explanatory view showing a preferred thirty-fifth specific example of the vibration gyro sensor according to the present invention.

48 is a sectional view taken along the line BB in FIG. 47.

FIG. 49 is a perspective explanatory view showing a preferable thirty-sixth specific example of the vibration gyro sensor according to the present invention.

FIG. 50 is a perspective explanatory view showing a preferred thirty-seventh specific example of the vibration gyro sensor according to the present invention.

FIG. 51 is a perspective explanatory view showing a preferable 38th specific example of the vibration gyro sensor according to the present invention.

52 is a perspective explanatory view showing a preferable 39th specific example of the vibration gyro sensor according to the present invention. FIG.

FIG. 53 is a characteristic diagram showing a change in resonance angular frequency ratio depending on the length of a support rod that supports a tuning fork body.

FIG. 54 is a perspective explanatory view showing a preferred fortieth specific example of the vibration gyro sensor according to the present invention.

FIG. 55 is a perspective explanatory view showing a preferred forty-first specific example of the vibration gyro sensor according to the present invention.

FIG. 56 is a perspective explanatory view showing a preferable forty-second specific example of the vibration gyro sensor according to the present invention.

FIG. 57 is a perspective explanatory view showing a preferred 43rd specific example of the vibration gyro sensor according to the present invention.

FIG. 58 is a perspective explanatory view showing a preferable forty-fourth specific example of the vibration gyro sensor according to the present invention.

FIG. 59 is a perspective explanatory view showing a preferred 45th specific example of the vibration gyro sensor according to the present invention.

FIG. 60 is a perspective explanatory view showing a preferable 46th specific example of the vibration gyro sensor according to the present invention.

FIG. 61 is a perspective view showing a 47th preferred example of the vibration gyro sensor according to the present invention.

FIG. 62 is an enlarged view showing a configuration of a lead wire lead portion in a vibration gyro sensor according to a forty-seventh specific example.

FIG. 63 is a perspective explanatory view showing a preferred forty-eighth specific example of the vibration gyro sensor according to the present invention.

FIG. 64 is an enlarged view showing a configuration of a lead wire lead portion in a vibration gyro sensor according to a forty-eighth specific example.

FIG. 65 is a perspective explanatory view showing a preferable forty-ninth specific example of the vibration gyro sensor according to the present invention.

FIG. 66 is a perspective explanatory view showing a preferable fiftieth specific example of the vibration gyro sensor according to the present invention.

67 is a perspective explanatory view showing a preferred fifty-first concrete example of the vibration gyro sensor according to the present invention. FIG.

68 is a perspective explanatory view showing a preferable 52nd specific example of the vibration gyro sensor according to the present invention. FIG.

69 is a perspective explanatory view showing a preferred 53rd specific example of the vibration gyro sensor according to the present invention. FIG.

70A is a sectional view taken along line CC of FIG. 69, FIG. 70B is a sectional view taken along line DD of FIG. 69, and FIG. 70C is a sectional view taken along line EE of FIG. 69. is there.

71 is a perspective explanatory view showing a preferable 54th specific example of the vibration gyro sensor according to the present invention. FIG.

72 is a perspective explanatory view showing a preferable 55th specific example of the vibration gyro sensor according to the present invention. FIG.

73 is an exploded perspective view showing another configuration of the vibration gyro sensor according to the first specific example shown in FIG. 1. FIG.

FIG. 74 is an exploded perspective view showing the vibration gyro sensor according to the 33rd specific example shown in FIG. 45.

75 is an exploded perspective view showing the vibrating gyro sensor according to the thirty-fourth specific example shown in FIG. 46. FIG.

76 is an exploded perspective view showing the vibrating gyro sensor according to the thirty-fifth specific example shown in FIG. 47. FIG.

[Explanation of symbols]

2 ... Oscillator 4 ... Abutment 6 ... 1st plate-shaped part 8 ... 2nd plate-shaped part 10 ... 3rd plate-shaped part 12 ... Piezoelectric / electrostrictive element for detection 14 ... Piezoelectric / electrostrictive element for drive 122 ... Driving means

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[Procedure amendment]

[Submission date] February 12, 2003 (2003.2.1
2)

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0028

[Correction method] Change

[Correction content]

Since the vibrator does not have a thin-walled detecting portion and is structured to be independently supported by a high-strength abutment, the vibrator itself can be made to have a large mass. Since the Coriolis force (Fc = 2 m v Ω) generated in the child becomes large, it is possible to realize high sensitivity regarding the strain detection in the detection unit.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01L 41/18 101C 101D (72) Inventor Kazuyoshi Shibata 2 (72) invention at 775 Yamada-cho, Mizunami-shi, Gifu prefecture Person Takashi Onishi 40, Izumi-cho, Nishibiwajima-cho, Nishibashijima-cho, Nishikasugai-gun, Aichi Prefecture Sancourt Nishibiwajima No. 2 Building 401 Room F Term (reference) 2F105 AA02 AA03 AA06 AA08 BB02 BB07 BB17 CC01 CD02 CD06 CD13

Claims (27)

[Claims] 1. At least one of vibrators which are excited and vibrated by a driving means provided with a driving piezoelectric / electrostrictive element, an abutment which supports the vibrators at a base end side thereof, and the vibrator rotates. And a detecting section provided with a detecting piezoelectric / electrostrictive element for detecting a displacement occurring in a direction perpendicular to the vibration direction of the vibrator, wherein the vibrator is The abutment is composed of an integrally fired body of ceramics, is thinner than the abutment, and has a first plate-shaped portion whose main surface extends in the vibration direction, and the detection unit is A first plate-shaped portion and the detection piezoelectric / electrostrictive element integrally formed on the first plate-shaped portion by a film forming method, and Reduced rigidity in the vibration direction to facilitate vibration The second plate-shaped portion of the order of thin-walled,
The main surface is integrally provided so as to extend in a direction perpendicular to the vibration direction, the driving means is thinner than the abutment, and the main surface has the first plate-shaped portion. A third plate-shaped portion extending in a direction parallel to the main surface of the second plate-shaped portion, the third plate-shaped portion being formed of a ceramic fired body integrated with the second plate-shaped portion. Vibration gyro sensor. 2. The vibrating gyro sensor according to claim 1, wherein two of the vibrators are supported by the abutment in parallel to each other,
Further, the driving means is arranged between the respective second plate-shaped portions, and the two vibrators are excited and vibrated in directions opposite to each other by the driving means. Vibration gyro sensor. 3. The vibrating gyro sensor according to claim 1, wherein the driving means is a piezoelectric / electrostrictive element for driving integrally formed on the third plate-shaped portion by a film forming method. A vibration gyro sensor characterized by having: 4. The vibrating gyro sensor according to claim 1, wherein the detection piezoelectric / electrostrictive element is integrally formed on substantially the entire surface of the first plate-shaped portion. Vibration gyro sensor characterized by being formed. 5. The vibrating gyro sensor according to claim 1, wherein the first plate-shaped portion has a plurality of recesses on a back surface thereof, and the first plate-shaped portion is provided. A vibrating gyro sensor, wherein the piezoelectric / electrostrictive element for detection is formed in an island shape at positions corresponding to the plurality of recesses on the surface of the. 6. The vibrating gyro sensor according to claim 1, wherein a thick block portion is integrally formed between the first plate-shaped portion and the second plate-shaped portion. A vibration gyro sensor characterized by being provided. 7. The vibrating gyro sensor according to claim 1, wherein the abutment is located outside the vibrator at a predetermined distance so as to surround the vibrator. A vibration gyro sensor characterized by being constituted by a frame body. 8. The vibrating gyro sensor according to claim 1, wherein the driving means is integrally provided between the second plate-shaped portions. Vibrating gyro sensor. 9. The vibrating gyro sensor according to claim 6, wherein the driving means is integrally provided between the block portions. 10. The vibration gyro sensor according to claim 7, wherein the drive means is integrally provided between the block portion and the frame body. 11. The vibration gyro sensor according to claim 1, further comprising a reference unit for performing feedback control so that the vibration of the driving unit is constant. Gyro sensor. 12. The vibrating gyro sensor according to claim 11, wherein the reference means is thinner than the abutment in the height direction, and is formed of an integrally fired body of ceramics together with the vibrator. A vibration gyro sensor having a fourth plate-shaped portion and a reference piezoelectric / electrostrictive element formed on the fourth plate-shaped portion. 13. The vibration gyro sensor according to claim 11, wherein the reference means is integrally provided between the second plate-shaped portions. 14. The vibrating gyro sensor according to claim 11, wherein the driving means is integrally provided on one of the second plate-shaped portions. A vibrating gyro sensor, wherein the reference means is integrally provided on the other plate-shaped portion. 15. The vibrating gyro sensor according to claim 14, wherein a relay portion having a free end is integrally provided at a substantially central portion of a side surface of the abutment that faces the vibrating portion. The drive means is integrally provided between the second plate-shaped portion and the relay portion, and the reference means is integrally provided between the other second plate-shaped portion and the relay portion. Vibration gyro sensor characterized by 16. The vibrating gyro sensor according to claim 14, wherein a plurality of relay portions each having a free end are integrally provided at positions at both ends in a width direction of a side surface of the abutment facing the vibrating portion. The drive means is integrally provided between the one second plate-shaped portion and the one relay portion, and the other second
The vibrating gyro sensor, wherein the reference means is integrally provided between the plate-shaped portion of the sheet and the other relay portion. 17. The vibration gyro sensor according to claim 1, wherein the support is provided on a surface of the abutment opposite to a surface on which the second plate-shaped portion is formed. A mounting portion for fixing the base is integrally provided, and a fifth plate-shaped portion that is thin in the width direction of the support is integrally provided between the abutment and the mounting portion. A vibration gyro sensor, wherein at least the abutment and the vibrator form a tuning fork body. 18. The vibrating gyro sensor according to claim 17, wherein the mounting portion is composed of a mounting frame portion which is located outside the tuning fork body at a predetermined distance so as to surround the tuning fork body. Vibration gyro sensor characterized by being 19. The vibrating gyro sensor according to claim 18, wherein a pair of inner wall surfaces of the mounting frame portion along the extending direction of the vibrator is bridged, and A vibrating gyroscope characterized in that a supporting part is integrally installed so as to face the vibrator upward, and the fifth plate-shaped part is integrally provided between the supporting part and the abutment. Sensor. 20. A composite sensor including a vibrating gyro sensor, wherein the vibrating gyro sensor comprises at least one of vibrators which are excited and vibrated by a driving means provided with a driving piezoelectric / electrostrictive element, and the vibration. Detection provided with an abutment that supports the child at the base end side, and a detection piezoelectric / electrostrictive element that detects displacement that occurs when the vibrator rotates in a direction perpendicular to the vibration direction of the vibrator. A first unit, the detection unit including the vibrator and the abutment is formed of an integrally fired body of ceramics, and the main surface is thinner than the vibrator and has a main surface extending in the vibration direction. A plate-shaped portion, the detection piezoelectric / electrostrictive element is integrally formed on the first plate-shaped portion by a film forming method, and the rigidity in the vibration direction is reduced with respect to the vibrator. Let the vibration The thin second plate-shaped part for ease
An attachment in which its main surface is integrally provided so as to extend in a direction perpendicular to the vibration direction, and the abutment is located outside the vibrator at a predetermined distance so as to surround the vibrator. A third plate-shaped portion formed of a frame portion, wherein the drive means is thinner than the abutment, and the main surface of which extends in a direction parallel to the main surface of the first plate-shaped portion. The driving means is integrally provided between the mounting frame portion and the vibrator, and is adjacent to the mounting frame portion of the vibration gyro sensor and is integrated with the mounting frame portion. A composite sensor, wherein a second mounting frame portion is provided, and another sensor having a function different from that of the vibration gyro sensor is integrally supported in the second mounting frame portion. 21. A composite sensor including a vibrating gyro sensor, wherein the vibrating gyro sensor is provided in parallel with each other, and two vibrators are excited and vibrated by a driving piezoelectric / electrostrictive element. A frame that surrounds the vibrator and supports the vibrator on the proximal side, and a piezoelectric / electrical electrode for detection that detects a displacement that occurs when the vibrator rotates in a direction perpendicular to the vibration direction of the vibrator. And a detection unit provided with a strain element, the detection unit, together with the vibrator and the frame body, is composed of an integrally fired body of ceramics, and is thinner than the vibrator, and The main surface is composed of a first plate-shaped portion extending in the vibration direction, the detection piezoelectric / electrostrictive element is integrally formed on the first plate-shaped portion by a film forming method, and the frame body The above two The thin second plate-shaped portion for reducing the rigidity in the vibration direction and facilitating the vibration with respect to the portion located between the supporting portions of the vibrator of Part of the frame body that is integrally formed so as to extend in a vertical direction and that faces the formation portion of the second plate-shaped portion, and has a main surface with respect to the main surface of the first plate-shaped portion. And a third plate-shaped portion thinner than the frame so as to extend in a parallel direction, and the driving piezoelectric / electrostrictive element is integrally formed on the third plate-shaped portion by a film forming method. Of the second plate-shaped portion of the frame body, the two vibrators are excited and vibrated based on the vibration of the frame body by the driving piezoelectric / electrostrictive element. An attachment portion for fixing the frame body is integrally formed on the outer surface of the formation portion, and the attachment portion surrounds the frame body. As described above, the mounting frame portion that is positioned outside the frame body at a predetermined distance is integrally provided, and is adjacent to the mounting frame portion of the vibration gyro sensor and is integrated with the mounting frame portion. A composite sensor, wherein a second mounting frame portion is provided, and another sensor having a function different from that of the vibration gyro sensor is integrally supported in the second mounting frame portion. 22. Two vibrators, which are positioned in parallel with each other and are excited and vibrated by a driving piezoelectric / electrostrictive element, and an abutment for supporting these vibrators at a base end side, and the vibrators. A composite sensor comprising a vibrating gyro sensor having a detecting section provided with a detecting piezoelectric / electrostrictive element for detecting a displacement occurring in a direction perpendicular to a vibrating direction of the vibrator when rotated, The detection unit is composed of an integrally fired body of ceramics together with the vibrator and the abutment, is thinner than the vibrator, and has a first plate-shaped portion whose main surface extends in the vibration direction. A portion of the first plate-shaped portion on which the piezoelectric / electrostrictive element for detection is integrally formed by a film forming method, the portion being located between supporting portions of the two vibrators of the abutment. Against the above A thin second plate-shaped portion for reducing rigidity in a direction and facilitating vibration is integrally formed so that a main surface thereof extends in a direction perpendicular to the vibration direction; A mounting portion integrally connected to the outer surface of the plate-shaped portion forming portion and provided with a mounting frame portion outside the two vibrators and the abutment at a predetermined distance from each other. So that the mounting frame portion and the abutment portions located on both sides of the second plate-shaped portion are respectively bridged, and the main surface thereof is the main surface of the first plate-shaped portion. A third plate-shaped portion that is thinner than the abutment is integrally formed so as to extend in a direction parallel to it, and the driving piezoelectric / electrostrictive element is formed as a film on the third plate-shaped portion. Is formed integrally by the above method, and based on the vibration of the abutment due to the driving piezoelectric / electrostrictive element, the two A second mounting frame portion integrated with the mounting frame portion is provided adjacent to the mounting frame portion in the vibrating gyro sensor configured such that the pendulum is excited and vibrated, and the second mounting frame is provided. A composite sensor in which another sensor having a function different from that of the vibration gyro sensor is integrally supported in the section. 23. At least a substrate layer made of a green sheet and a thin plate layer are laminated and integrated, and then fired to extend a vibrator having a major axis in one direction and extending in a direction orthogonal to the one direction, And an abutment supporting one end of the oscillator, a frame surface is parallel to a surface including the one direction and the extending direction of the abutment, and a frame body surrounding the oscillator and the abutment, A step of producing a fired body integrally having the detection part attached between the abutment and the frame; and a step of forming a detection piezoelectric / electrostrictive element on at least the detection part by a film forming method. And a step of trimming a part of the vibrator to adjust the resonance frequency on the drive side, and a step of trimming a part of the abutment to adjust the resonance frequency on the detection side. Vibrating gyro sensor manufacturing method. 24. The method of manufacturing a vibration gyro sensor according to claim 23, wherein in the vibration gyro sensor, at least two vibrators are supported by the abutment in parallel with each other, and these two vibrators are also supported. Drive means for exciting and vibrating the vibrators in opposite directions is provided between the vibrators, and the drive means is thinner than the vibrators in the height direction, and is integrated with the vibrators in a ceramic body. A method for manufacturing a vibrating gyro sensor, comprising: a plate-shaped portion made of a fired body; and a driving piezoelectric / electrostrictive element formed on the plate-shaped portion. 25. The method of manufacturing a vibration gyro sensor according to claim 23, wherein the step of adjusting the resonance frequency on the driving side is a thin first projection that integrally projects from a free end of the vibrator. The trimming process is performed on the portion, and the step of adjusting the resonance frequency on the detection side is performed by trimming the thin second projecting portion that integrally projects from both ends in the longitudinal direction of the abutment. A method of manufacturing a vibration gyro sensor, characterized by: 26. The method for manufacturing a vibration gyro sensor according to claim 23, wherein the step of adjusting the resonance frequency on the drive side is performed by trimming a width direction of the plate-shaped portion of the drive means. The step of adjusting the resonance frequency on the detection side is performed by trimming the width direction of the plate-shaped portion that constitutes the detection unit mounted between the frame surrounding the vibrator and the abutment and the abutment. A method for manufacturing a vibration gyro sensor, which is performed by 27. The method of manufacturing a vibration gyro sensor according to claim 23, wherein the resonance frequency on the detection side is adjusted after the resonance frequency on the drive side is adjusted.
Sensor manufacturing method.