JP2002278054A - Positive type photoresist composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a chemical amplification type positive type photoresist composition having superior resolving power and sufficient size difference between sparse and dense areas and excellent also in PED stability. SOLUTION: The positive type photoresist composition contains a resin which is decomposed by the action of acids and increases its solubility in an alkali developing solution, a compound having an oxime sulfonate structure represented by a specified structure and generating an acid when irradiated with active light or radiation and at least one selected from the group comprising compounds each represented by a specified structure and generating an acid when irradiated with active light or radiation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positive photoresist composition used for manufacturing semiconductor integrated circuit devices, masks for manufacturing integrated circuits, printed wiring boards, liquid crystal panels, and the like.

[0002]

2. Description of the Related Art As a positive photoresist composition, there is a chemically amplified resist composition described in U.S. Pat. No. 4,491,628 and EP 29,139. The chemically amplified positive resist composition generates an acid in the exposed area by irradiation with radiation such as far ultraviolet light, and the acid-catalyzed reaction causes the active and non-irradiated parts of the active radiation to dissolve in the developing solution. Is a pattern forming material for forming a pattern on a substrate by changing the pattern.

The above chemically amplified positive resist composition comprises an alkali-soluble resin, a compound that generates an acid upon exposure to radiation (photoacid generator), and a compound that inhibits dissolution of the alkali-soluble resin having an acid-decomposable group. A three-component system, a two-component system composed of a resin having a group which becomes alkali-soluble by being decomposed by reaction with an acid, and a resin having a group which becomes alkali-soluble by being decomposed by a reaction with an acid; It can be broadly classified into a hybrid system comprising a low molecular weight dissolution inhibiting compound having an acid-decomposable group and a photoacid generator.

[0004] By mixing two or more resins (acid-decomposable resins) which are decomposed by the action of an acid used in the above-mentioned chemically amplified positive resist composition to increase the solubility in an alkali developing solution, the performance is improved. Various techniques for improvement are known. In addition, European Patent No.
A technique for improving the performance by mixing an acid-decomposable resin and two or more photoacid generators is described. However, the resolution, the reduction in dimensional difference between dense and dense, and P
It has been desired to suppress dimensional fluctuation by improving ED stability. PED (Post Exposure Delay) stability
The stability of a coating film when left in an exposure apparatus or a coating apparatus until a heating operation is performed after exposure.

[0005]

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a chemically amplified positive photoresist composition which is excellent in resolution, dimensional difference, and PED stability.

[0006]

Means for Solving the Problems In view of the present situation, the present inventors have made intensive studies and have found that a positive photoresist composition containing an acid-decomposable resin and two or more photoacid generators is used. The above object has been achieved, and the present invention has been completed. That is, the positive photoresist composition according to the present invention has the following constitution.

(1) (a) a resin which is decomposed by the action of an acid to increase the solubility in an alkali developer, and (b) generates an acid by irradiation with actinic rays or radiation represented by the following general formula (1). A positive-type photo-curable composition comprising: a compound represented by the following general formulas (2) to (5); and at least one selected from the group of compounds that generate an acid upon irradiation with actinic rays or radiation. Resist composition.

[0008]

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In the general formula (1), R ₁ and R ₂ represent an alkyl group which may have a substituent having 1 to 16 carbon atoms, a branched alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, and a cycloalkyl group. Represents an alkenyl group, an aryl group which may have a substituent, a heteroaryl group, and a cyano group. R ₁ and R ₂ are an alkylene chain, an alkenylene chain, an alkynine chain which may have a substituent having 2 to 8 carbon atoms, or a phenylene, a freelen, a thienylene which may have a substituent, -O-, -S-, -N-, -C
It may be bonded to R ₁ or R _{2 of} another compound represented by the general formula (1) via a linking chain containing O—. R ₃
Represents an alkyl group having 1 to 16 carbon atoms which may have a substituent, a branched alkyl group, a cycloalkyl group, or an aryl group which may have a substituent.

[0010]

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In the general formulas (2) to (5), R _{4 to} R ₆ represent a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, or a halogen atom. R ₇ represents an alkyl group, a cycloalkyl group, or an aryl group which may have a substituent having 3 to 16 carbon atoms.

(2) The positive photoresist composition as described in (1) above, further comprising a compound capable of generating an acid upon irradiation with actinic rays or radiation represented by the following general formula (6): .

[0013]

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In the general formula (6), R ₈ and R ₉ represent an alkyl group, a cycloalkyl group or an aryl group which may have a substituent.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.

(A) a resin which is decomposed by the action of an acid to increase solubility in an alkali developing solution, (resin (a))

The resin having a group decomposed by the action of an acid (also referred to as an acid-decomposable group) according to the present invention has a structure in which an acid-decomposable group is introduced into a compound having a molecular weight distribution obtained by polymerizing a monomer. And a compound which becomes alkali-soluble by the action of an acid.

The resin having an acid-decomposable group is a resin having an acid-decomposable group in the main chain or side chain of the resin, or in both the main chain and the side chain. Among them, a resin having an acid-decomposable group in a side chain is more preferable.

Next, as the base resin when the acid-decomposable group is bonded as a side chain, -OH or -COO is added to the side chain.
H, preferably -R ⁰ -COOH or -Ar-OH
It is an alkali-soluble resin having a group. Here, -R ⁰
-Represents a divalent or higher aliphatic or aromatic hydrocarbon which may have a substituent, -Ar- represents a divalent or higher aromatic group which may have a monocyclic or polycyclic substituent. Represent.

The preferred base resin in the present invention is an alkali-soluble resin having a phenolic hydroxyl group. The alkali-soluble resin having a phenolic hydroxyl group used in the present invention is o-, m- or p-hydroxystyrene (these are collectively referred to as hydroxystyrene), or o-, m- or p-hydroxy-α-. A copolymer containing at least 30 mol%, preferably 50 mol% or more of a repeating unit corresponding to methylstyrene (collectively referred to as hydroxy-α-methylstyrene) or a homopolymer thereof, or a benzene nucleus of the unit Is preferably a partially hydrogenated resin, and more preferably a p-hydroxystyrene homopolymer. As monomers other than hydroxystyrene and hydroxy-α-methylstyrene for preparing the copolymer by copolymerization, acrylates, methacrylates, acrylamides, methacrylamides, acrylonitrile, methacrylonitrile, Maleic anhydride, styrene, α-methylstyrene, acetoxystyrene, alkoxystyrenes and alkylstyrenes are preferred, and styrene, acetoxystyrene and t-butylstyrene are more preferred.

In the present invention, as the resin (a),
Any resin may be used as long as it has an increased solubility in an alkali developing solution, and examples thereof include those shown below.

[0022]

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In the above formula, W represents an acid-decomposable group. R ¹⁴ represents an acid stable group.

Examples of the acid-decomposable group represented by W include a group represented by the following general formula (X), a group represented by the following general formula (X1), a group represented by the following general formula (X2), The formula (X
Examples of the group represented by 3) include the following general formula (X)
Are preferred.

[0025]

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[0026]

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In the general formula (X), R ¹ and R ² may be the same or different and represent a hydrogen atom, an alkyl group or a cycloalkyl group which may have a substituent. Z represents an alkyl group having 1 to 10 carbon atoms or a cycloalkyl group which may have a substituent. m represents an integer of 1 to 20. R, R ′ and R ″ in the general formulas (X1) to (X3) may be the same or different and represent an alkyl group having 1 to 12 carbon atoms which may have a substituent. Also, R 'and R''
May combine with each other to form a 3- to 12-membered ring.

R ¹ and R ² in the general formula (X) may be the same or different and represent a hydrogen atom, an alkyl group or a cycloalkyl group which may have a substituent.

The alkyl group for R ¹ and R ² may be linear or branched. The linear alkyl group preferably has 1 to 30 carbon atoms, more preferably 1 to 30 carbon atoms.
To 20, for example, methyl group, ethyl group, n-propyl group, n-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, n-octyl group, n-nonyl group,
and n-decanyl group. The branched alkyl group preferably has 1 to 30 carbon atoms, more preferably 1 to 30 carbon atoms.
20, for example, i-propyl group, i-butyl group,
t-butyl group, i-pentyl group, t-pentyl group, i-
Examples include a hexyl group, a t-hexyl group, an i-heptyl group, a t-heptyl group, an i-octyl group, a t-octyl group, an i-nonyl group, a t-decanoyl group, and the like.

The cycloalkyl group in R ¹ and R ² preferably has 3 to 30 carbon atoms, more preferably 3 to 30 carbon atoms.
20, for example, a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclononyl group, a tetracyclododecanyl group and the like.

Z in the general formula (X) represents an alkyl group or a cycloalkyl group having 1 to 10 carbon atoms which may have a substituent. As the alkyl group for Z, C 1 to C 1
10, for example, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i-butyl group,
t-butyl group, n-pentyl group, i-pentyl group, t-
Pentyl group, n-hexyl group, i-hexyl group, t-hexyl group, n-heptyl group, i-heptyl group, t-heptyl group, n-octyl group, i-octyl group, t-octyl group, n- Nonyl group, i-nonyl group, t-nonyl group, n
-Decanyl group, i-decanyl group, t-decanyl group and the like.

The cycloalkyl group represented by Z has 3 carbon atoms.
To 8, and examples thereof include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group.

R in the general formulas (X1) to (X3),
R ′ and R ″ may be the same or different and each have 1 carbon atom.
Represents an alkyl group which may have from 12 to 12 substituents.
The alkyl group for R, R ′ and R ″ has 1 carbon atom.
To 12, for example, methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, t-butyl, n-pentyl, i-pentyl,
t-pentyl group, n-hexyl group, i-hexyl group, t
-Hexyl group, n-heptyl group, i-heptyl group, t-
Heptyl, n-octyl, i-octyl, t-octyl, n-nonyl, i-nonyl, t-nonyl, n-decanyl, i-decanyl, t-decanyl and the like be able to.

The substituents of the above groups include a hydroxyl group,
Halogen atom (fluorine, chlorine, bromine, iodine), nitro group, cyano group, the above alkyl group, the above cycloalkyl group, methoxy group, ethoxy group, hydroxyethoxy group, propoxy group, hydroxypropoxy group, n-butoxy group , An alkoxy group such as an isobutoxy group, a sec-butoxy group and a t-butoxy group, an alkoxycarbonyl group such as a methoxycarbonyl group and an ethoxycarbonyl group, an aralkyl group such as a benzyl group, a phenethyl group and a cumyl group, an aralkyloxy group and a formyl group. Acetyl group, butyryl group, benzoyl group, cyanyl group, acyl group such as valeryl group, acyloxy group such as butyryloxy group, the above alkenyl group, vinyloxy group, propenyloxy group, allyloxy group, alkenyloxy group such as butenyloxy group, Phenoxy group Aryloxy group, and an aryloxycarbonyl group such as benzoyloxy group. These substituents may further have a substituent.

[0035] As group incapable of decomposing under the action of acid in the R ¹⁴ (referred to acid-stable group) represents a hydrogen atom, a halogen atom, an alkyl group, an alkoxy group, an acyloxy group.
In the acid-stable group of R ^14, the alkyl group, methyl group, ethyl group, propyl group, n- butyl group, sec- butyl group, having from 1 to 4 carbon atoms, such as t- butyl group.

Examples of the alkoxy group include a methoxy group, an ethoxy group, a hydroxyethoxy group, a propoxy group, a hydroxypropoxy group, an n-butoxy group, an isobutoxy group,
An alkoxy group having 1 to 4 carbon atoms such as a sec-butoxy group is preferred. As the acyloxy group, those having 2 to 7 carbon atoms such as an acetoxy group, a propnoyloxy group, a butanoyloxy group and a benzoyloxy group are preferred.

Specific examples of the group represented by formula (X) are shown below, but it should not be construed that the invention is limited thereto.

[0038]

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As the resin (a) in the present invention, any resin may be used as long as the alkali developability is increased by the action of an acid, but it has a group represented by the above general formula (X),
A resin which decomposes under the action of an acid to increase the solubility in an alkali developing solution (hereinafter also referred to as a resin having a group represented by the general formula (X)) is preferable.

In the present invention, the content of the repeating unit (structural unit) having a group represented by the general formula (X) in such a resin is preferably 5 mol% to 50 mol% based on all repeating units. Preferably, more preferably, 5 mol% or more.
30 mol%.

In the present invention, the resin having a group represented by the general formula (X) may contain another acid-decomposable group in addition to the group represented by the general formula (X).

For the resin containing the group represented by the general formula (X), a corresponding vinyl ether is synthesized and reacted with a phenolic hydroxyl group-containing alkali-soluble resin dissolved in an appropriate solvent such as tetrahydrofuran by a known method. Can be obtained at The reaction is usually carried out in the presence of an acidic catalyst, preferably an acidic ion exchange resin, a salt such as hydrochloric acid, p-toluenesulfonic acid or pyridinium tosylate. The corresponding vinyl ether can be synthesized from an active material such as chloroethyl vinyl ether by a method such as nucleophilic substitution reaction,
It can be synthesized using a mercury or palladium catalyst. Alternatively, it can be synthesized by acetal exchange using the corresponding alcohol and vinyl ether. In this case, the alcohol to be introduced has a substituent to be introduced, the vinyl ether is mixed with a relatively unstable vinyl ether such as t-butyl vinyl ether, and the reaction is carried out in the presence of an acid such as p-toluenesulfonic acid or pyridinium tosylate. .

In the resin (a), examples of the repeating unit having a group represented by the general formula (X) include a structural unit represented by the following general formula (VI).

[0044]

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The substituent W ₁ in the general formula (VI) represents a group represented by the general formula (X).

Specific examples of the structural unit represented by the general formula (VI) are shown below, but the present invention is not limited thereto.

[0047]

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[0048]

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Preferred repeating units copolymerizable with the general formula (VI) include the following general formulas (VII) and (V)
The structural unit represented by III) can be mentioned. By including the above-mentioned structural unit in a resin, the resin is decomposed by the action of an acid, and the solubility in an alkali developer can be controlled. Further, by introducing this structural unit, a profile excellent in rectangularity can be achieved.
Further, it is effective for adjusting the amount of the structural unit represented by the general formula (VI).

[0050]

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[0051] As the group incapable of decomposing under the action of acid in the R ¹⁴ (referred to acid stable group), represents a hydrogen atom, a halogen atom, an alkyl group, an alkoxy group, an acyloxy group.
In the acid-stable group of R ^14, the alkyl group, methyl group, ethyl group, propyl group, n- butyl group, sec- butyl group, having from 1 to 4 carbon atoms, such as t- butyl group.

Examples of the alkoxy group include a methoxy group, an ethoxy group, a hydroxyethoxy group, a propoxy group, a hydroxypropoxy group, an n-butoxy group, an isobutoxy group,
An alkoxy group having 1 to 4 carbon atoms such as a sec-butoxy group is preferred. As the acyloxy group, those having 2 to 7 carbon atoms such as an acetoxy group, a propnoyloxy group, a butanoyloxy group and a benzoyloxy group are preferred.

Specific examples of the polymerizable monomer having the structural unit represented by the general formula (VIII) include, but are not limited to, the following.

[0054]

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[0055]

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Formula (VII) or (VIII)
Can be obtained by reacting a phenolic resin or a monomer thereof with an acid anhydride in the presence of a base, or with a corresponding halide in the presence of a base.

As the resin (a) of the present invention, those represented by the general formulas (VI) and (VII) and those represented by the general formula (V)
Examples include (I), the general formula (VII), the general formula (VIII), the general formula (VI), the general formula (VII) and t-butyl acrylate.

The resin (a) of the present invention includes the following general formulas (VI), (VII) and (V)
Preference is given to blends comprising (III)) (resin (A ')).

[0059]

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In the general formulas (VI) to (VIII), R ¹⁴ represents the above-mentioned acid stable group. W ₁ represents a group represented by the general formula (X). x and y are 1 to 100, z is 0 to 100, provided that x +
y + z = 100

In the resin (a) of the present invention comprising the general formulas (VI) and (VII), the content of the repeating unit represented by the general formula (VI) is 10 mol% to 45 mol%. Or less, preferably 15 to 40 mol%.

The above general formula (VI), general formula (VII) and t-
The content ratio of each repeating unit in the resin composed of butyl acrylate is such that the general formula (VI) is 0 mol% or more and 20 mol% or less, and t-butyl acrylate is 5 mol% or more and 25 mol% or less, preferably, the general formula (VI) ) Is 5 mol% or more 2
The content of t-butyl acrylate is 10 mol% or more and 20 mol% or less at 0 mol% or less.

In the present invention, the x, y, z ratio of the resin (A ') which may be contained in the resin (a) preferably satisfies the following conditions.

When z = 0, 0.05 <x / (x + y) <0.50, more preferably 0.1 <x
/(X+y)<0.45 z> 0 0.05 <x / (x + y + z) <0.35, 0.005 <z / (x + y + z) <0.25, x ≧ z, 0.5 <x / (x + z) <0.95 More preferably 0.1 <x /(X+y+z)<0.25, 0.01 <z / (x + y + z) <0.15, x ≧ z, 0.5 <x / (x + y) <0.85

When the resin of the present invention satisfies the above conditions, the rectangularity of the profile is improved, and particularly, development defects are further improved.

The repeating structural unit represented by the general formula (VI), the general formula (VII) or the general formula (VIII), or the repeating structural unit from another polymerizable monomer may be used alone or in combination of two or more. You may make it exist in resin. The resin (a) contained in the positive photoresist composition of the present invention may have an alkali-soluble group, for example, a phenolic hydroxyl group or a carboxyl group, in order to maintain good developability in an alkali developing solution. Other suitable polymerizable monomers may be copolymerized.

The specific structure of the resin (a) of the present invention is illustrated below, but the present invention is not limited thereto.

[0068]

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[0069]

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[0070]

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[0071]

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[0072]

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[0073]

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The molecular weight of the resin (a) is determined by weight average (M
w: polystyrene standard), preferably 2,000 or more, more preferably 3,000 to 200,000, and even more preferably 5,000 to 70,000. Also, the degree of dispersion (Mw
/ Mn) is preferably from 1.0 to 4.0, more preferably from 1.0 to 3.5, and particularly preferably from 1.0 to 3.0. The smaller the degree of dispersion, the higher the heat resistance and image formation. Properties (pattern profile, defocus latitude, etc.) are improved.

The content of the resin (a) in the positive photoresist composition (excluding the coating solvent) is preferably 50
To 99% by weight, more preferably 75 to 98% by weight.

(B) A compound capable of generating an acid upon irradiation with an actinic ray or radiation represented by the above general formula (1) and an actinic ray or radiation represented by the above general formulas (2) to (5) At least one compound selected from the group of compounds that generate an acid by irradiation (also referred to as “photoacid generator”)

In the general formula (1), R ₁ and R ₂ represent an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, a cycloalkenyl group which may have a substituent having 1 to 16 carbon atoms, An aryl group which may have a substituent,
Represents a heteroaryl group or a cyano group. Also, R ₁ and R ₂
Is an alkylene chain, alkenylene chain, alkynylline chain which may have a substituent having 2 to 8 carbon atoms, or phenylene, freelen, thienylene, -O-, -S- which may have a substituent. , -N -, - CO- via a linking chain comprising, R ₁ of the compound represented by another formula (1)
Alternatively, it may be bonded to R ₂ . That is, the compounds represented by the general formula (1) include those having two or three oxime sulfonate structures via a connecting chain.
R ₃ represents an alkyl group having 1 to 16 carbon atoms which may have a substituent, a cycloalkyl group, or an aryl group which may have a substituent.

Examples of the alkyl group having 1 to 16 carbon atoms for R ₁ , R ₂ and R ₃ include a methyl group, an ethyl group, a propyl group, an i-propyl group, a butyl group, an i-butyl group and a t-butyl group. , T-amyl group, n-hexyl group, n-octyl group, i-octyl group, n-decyl group, undecyl group, dodecyl group, alkyl group such as hexadecyl group, trifluoromethyl group, perfluoropropyl group, perfluorobutyl Group, perfluoro-t-butyl group, perfluorooctyl group, perfluoroundecyl group, 1,1-bistrifluoromethylethyl group, and the like.

The alkenyl group for R ₁ and R ₂ includes
Allyl group, methallyl group, vinyl group, methylallyl group, 1
-Butenyl group, 3-butenyl group, 2-butenyl group, 1,
Examples thereof include a 3-pentadienyl group, a 5-hexenyl group, a 2-oxo-3-pentenyl group, a decapentaenyl group, and a 7-octenyl group.

The alkynyl group for R ₁ and R ₂ includes
Ethynyl group, propargyl group, 2-butynyl group, 4-hexynyl group, 2-octynyl group, phenylethynyl group,
And a cyclohexylethynyl group.

Examples of the cycloalkyl group represented by R ₁ , R ₂ and R ₃ include those having 3 to 8 carbon atoms such as cyclopropyl, cyclopentyl and cyclohexyl which may have a substituent. Can be

Examples of the cycloalkenyl group for R ₁ and R ₂ include a cyclobutenyl group, a cyclohexenyl group, a cyclopentadienyl group, a bicyclo [4.2.4] dodeca-
And a 3,7-dien-5-yl group.

The aryl group in R ₁ , R ₂ and R ₃ may have a substituent and may have 6 carbon atoms such as a phenyl group, a tolyl group, a methoxyphenyl group and a naphthyl group.
To 14 items.

Examples of the substituent include an alkyl group, a cycloalkyl group, an alkoxy group, a halogen atom (a fluorine atom, a chlorine atom and an iodine atom), a cyano group, a hydroxy group,
Examples include a carboxy group, a nitro group, an aryloxy group, an alkylthio group, an aralkyl group, and a group represented by the following general formula (1A). Here, the alkyl group and the cycloalkyl group have the same meanings as those described above. Examples of the alkoxy group include a methoxy group, an ethoxy group, a hydroxyethoxy group,
Propoxy group, n-butoxy group, isobutoxy group, se
1-4 carbon atoms such as c-butoxy group and t-butoxy group
Individual ones. Examples of the aralkyl group include a benzyl group, a naphthylmethyl group, a furyl group, and a thienyl group.

[0085]

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In the above formula, R _{1 and} R ₂ represent the general formula (1)
It has the same meaning as R _{1 and} R ₂ in.

Specific examples of the compound represented by formula (1) are shown below, but the present invention is not limited to these.

[0088]

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[0089]

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In the above formulas (2) to (5), R _{4 to} R
₆ represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, or a halogen atom. R ⁷ has 3 to 1 carbon atoms
Represents an alkyl group, a cycloalkyl group, or an aryl group which may have six substituents.

In the above formulas (2) to (5), the alkyl group for R _{4 to} R ₆ may be a methyl group, an ethyl group, a propyl group, an n-butyl group,
1-4 carbon atoms such as a sec-butyl group and a t-butyl group
Individual ones. Examples of the cycloalkyl group represented by R _{4 to} R ₆ include those having 3 to 8 carbon atoms, such as a cyclopropyl group, a cyclopentyl group and a cyclohexyl group, which may have a substituent.

As the alkoxy group for R _{4 to} R ₆ ,
Methoxy, ethoxy, hydroxyethoxy, propoxy, n-butoxy, isobutoxy, sec-
Those having 1 to 4 carbon atoms such as a butoxy group and a t-butoxy group are exemplified. Examples of the halogen atom in R _{4 to} R ₆ include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom.

The alkyl group having 3 to 16 carbon atoms for R ₇ includes propyl, i-propyl, butyl,
i-butyl group, t-butyl group, t-amyl group, n-hexyl group, n-octyl group, i-octyl group, n-decyl group, undecyl group, dodecyl group, hexadecyl group, alkyl group, perfluoropropyl A perfluorobutyl group, a perfluoro-t-butyl group, a perfluorooctyl group, a perfluoroundecyl group, a 1,1-bistrifluoromethylethyl group, and the like.

As the cycloalkyl group for R ⁷ ,
An optionally substituted substituent having 3 to 1 carbon atoms such as a cyclopropyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclodecyl group, and a cyclodecanyl group.
There are six.

The aryl group represented by R ⁷ includes an optionally substituted aryl group having 6 to 14 carbon atoms such as a phenyl group, a tolyl group, a methoxyphenyl group and a naphthyl group.

Examples of the substituent include an alkyl group, a cycloalkyl group, an alkoxy group, a halogen atom (a fluorine atom, a chlorine atom, and an iodine atom), a cyano group, a hydroxy group,
Examples include a carboxy group and a nitro group. Here, the alkyl group, cycloalkyl group, and alkoxy group have the same meanings as those described above.

Specific examples of the compounds represented by formulas (2) to (5) are shown below, but the present invention is not limited thereto.

[0098]

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[0099]

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[0100]

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[0101]

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[0102]

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[0103]

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[0104]

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[0105]

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In the above general formula (6), R ₈ and R _{9 represent}
Examples of the alkyl group include those having 1 to 4 carbon atoms such as a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group and a t-butyl group. As the cycloalkyl group for R ₈ and R ₉ , a cyclopropyl group,
3 carbon atoms such as cyclopentyl and cyclohexyl
To 8 items. Examples of the aryl group represented by R ₈ and R ₉ include those having 6 to 14 carbon atoms which may have a substituent such as a phenyl group, a tolyl group, a methoxyphenyl group and a naphthyl group.

Examples of the substituent of the alkyl group, cycloalkyl group and aryl group in R ₈ and R ₉ include an alkyl group, a cycloalkyl group, an alkoxy group, a halogen atom (a fluorine atom, a chlorine atom and an iodine atom), and a cyano atom. Group, hydroxy group, carboxy group, nitro group and the like. Here, the alkyl group, cycloalkyl group, and alkoxy group have the same meanings as those described above.

Specific examples of the compound represented by the general formula (6) are shown below, but the present invention is not limited thereto.

[0109]

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The compound represented by the general formula (1), which is the component (b), is, for example, SRSandler & W. Karo, Organic.
functionalgroup preparations, Vol. 3, Academic Pre
ss), for example, the reaction of ketones with hydroxylamine or a salt thereof, or an oxime compound synthesized by nitrosating an "active" methylene group with nitrous acid or alkyl bisulfite, It can be obtained by reaction with an acid halide.

The compound represented by the general formula (2), which is the component (b), is obtained by reacting an aryl Grignard reagent such as arylmagnesium bromide with a substituted or unsubstituted phenyl sulfoxide. It can be synthesized by salt exchange of a sulfonium halide with a corresponding sulfonic acid. Further, a method of condensing or salt-exchanging a substituted or unsubstituted phenylsulfoxide and an aromatic compound corresponding thereto using an acid catalyst such as methanesulfonic acid / diphosphorus pentoxide or aluminum chloride, a method of converting a diaryliodonium salt and a diarylsulfide into copper acetate It can be synthesized by a method such as condensation and salt exchange using a catalyst such as
The salt exchange can be performed by a method of once converting to a halide salt and then converting it to a sulfonate using a silver reagent such as silver oxide, or by using an ion exchange resin. The sulfonic acid or sulfonic acid salt used for the salt exchange may be a commercially available one, or may be obtained by hydrolysis of a commercially available sulfonic acid halide. The compound represented by the general formula (4) can be synthesized by reacting an aromatic compound with periodate and subjecting the obtained iodonium salt to salt exchange with the corresponding sulfonic acid.

The compound represented by the general formula (6) is
For example, it can be synthesized by a method disclosed in Japanese Patent No. 3024621 in which bissulfonylmethane is diazotized with toluenesulfonylazide.

In the present invention, as the component (b), a compound represented by the general formula (1), which generates an acid upon irradiation with actinic rays or radiation, and a compound represented by the general formulas (2) to (5) At least one selected from the group of compounds that generate an acid upon irradiation with actinic rays or radiation.

In the component (b), a compound capable of generating an acid upon irradiation with an actinic ray or radiation represented by the general formula (1) and an actinic ray represented by the general formulas (2) to (5) are used. The amount of at least one selected from the group of compounds that generate an acid upon irradiation with radiation is a molar ratio (the compound which generates an acid upon irradiation with an actinic ray or radiation represented by the above general formula (1) / the above-described compound). At least one selected from the group of compounds which generate an acid upon irradiation with actinic rays or radiations represented by the general formulas (2) to (5)), and usually have a ratio of 90 /
10/15/85, preferably 80 / 20-20 / 8
0, more preferably 70/30 to 35/65.

When the component (b) contains a compound capable of generating an acid upon irradiation with actinic rays or radiation, represented by the above general formula (6), the compound represented by the above general formula (6)
The amount of the compound capable of generating an acid upon irradiation with actinic rays or radiation represented by the formula is 20 to 85 mol%, preferably 20 to 70 mol%, and more preferably 30 to 30 mol% in all the photoacid generators.
~ 65 mol%.

The amount of the compound capable of generating an acid upon irradiation with actinic rays or radiation represented by the above general formula (1) is 0.5 to 7% by weight, preferably 0.5 to 7% by weight, based on the solid content in the composition. 0.5-5% by weight, more preferably 1-4% by weight
It is.

The amount of at least one compound selected from the group of compounds that generate an acid upon irradiation with actinic rays or radiations represented by the above general formulas (2) to (5) is determined based on the solid content of the composition. 0.1 to 6% by weight, preferably 0.
It is 2 to 4% by weight, more preferably 0.5 to 3% by weight.

The amount of the compound capable of generating an acid upon irradiation with actinic rays or radiation represented by the general formula (6) is 0.5 to 7% by weight, preferably 0.5 to 7% by weight, based on the solid content in the composition. 0.5-5% by weight, more preferably 1-4% by weight
It is.

The amount of the photoacid generator (b) is usually in the range of 0.001 to 40% by weight, preferably 0.01 to 20% by weight, based on the solid content in the composition. , More preferably in the range of 1 to 10% by weight. When the addition amount of the photoacid generator is less than 0.001% by weight, the sensitivity is lowered. When the addition amount is more than 40% by weight, the light absorption of the resist becomes too high, and the deterioration of the profile and the process (particularly baking) ) The margin is undesirably narrow.

In the present invention, as the component (b), in addition to the compounds represented by the general formulas (1) to (6), a compound capable of generating an acid upon being decomposed by irradiation with another radiation or actinic ray is used. May be used in combination.

An organic basic compound can be used in the composition of the present invention. This is preferable because the stability during storage is further improved and the line width change due to PED is further reduced. Preferred organic basic compounds that can be used in the present invention are compounds that are more basic than phenol. Among them, a nitrogen-containing basic compound is preferable. Preferred chemical environments include the structures of the following formulas (A) to (E).

[0122]

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Further preferred compounds are nitrogen-containing cyclic compounds (also referred to as cyclic amine compounds) or nitrogen-containing basic compounds having two or more nitrogen atoms having different chemical environments in one molecule. The cyclic amine compound more preferably has a polycyclic structure. Preferred specific examples of the cyclic amine compound include a compound represented by the following general formula (F).

[0124]

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In the formula (F), Y and Z each independently represent a linear, branched or cyclic alkylene group which may contain a hetero atom and may be substituted. Here, examples of the hetero atom include a nitrogen atom, a sulfur atom, and an oxygen atom. The alkylene group preferably has 2 to 10 carbon atoms, and more preferably has 2 to 5 carbon atoms. Examples of the substituent of the alkylene group include an alkyl group having 1 to 6 carbon atoms, an aryl group, an alkenyl group, a halogen atom, and a halogen-substituted alkyl group. Further, specific examples of the compound represented by the general formula (F) include the following compounds.

[0126]

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Of the above, 1,8-diazabicyclo [5.4.0] undec-7-ene and 1,5-diazabicyclo [4.3.0] non-5-ene are particularly preferred.

The nitrogen-containing basic compound having two or more nitrogen atoms having different chemical environments in one molecule is particularly preferably a compound containing both a substituted or unsubstituted amino group and a ring structure containing a nitrogen atom. Or a compound having an alkylamino group. Preferred specific examples include substituted or unsubstituted guanidine, substituted or unsubstituted aminopyridine, substituted or unsubstituted aminoalkylpyridine, substituted or unsubstituted aminopyrrolidine, substituted or unsubstituted indazol, substituted or unsubstituted Pyrazole, substituted or unsubstituted pyrazine, substituted or unsubstituted pyrimidine, substituted or unsubstituted purine, substituted or unsubstituted imidazoline, substituted or unsubstituted pyrazoline, substituted or unsubstituted piperazine, substituted or unsubstituted amino Morpholine, substituted or unsubstituted aminoalkylmorpholine and the like. Preferred substituents are an amino group, aminoalkyl group, alkylamino group, aminoaryl group, arylamino group, alkyl group, alkoxy group, acyl group, acyloxy group, aryl group, aryloxy group, nitro group, hydroxyl group, cyano group It is.

Particularly preferred compounds are guanidine and
1,1-dimethylguanidine, 1,1,3,3-tetramethylguanidine, 2-aminopyridine, 3-aminopyridine, 4-aminopyridine, 2-dimethylaminopyridine, 4-dimethylaminopyridine, 2-diethylaminopyridine , 2- (aminomethyl) pyridine, 2-amino-3-methylpyridine, 2-amino-4-methylpyridine, 2-amino-5-methylpyridine, 2-amino-6
-Methylpyridine, 3-aminoethylpyridine, 4-aminoethylpyridine, 3-aminopyrrolidine, piperazine, N- (2-aminoethyl) piperazine, N- (2-
Aminoethyl) piperidine, 4-amino-2,2,6,6
-Tetramethylpiperidine, 4-piperidinopiperidine, 2-iminopiperidine, 1- (2-aminoethyl)
Pyrrolidine, pyrazole, 3-amino-5-methylpyrazole, 5-amino-3-methyl-1-p-tolylpyrazole, pyrazine, 2- (aminomethyl) -5-methylpyrazine, pyrimidine, 2,4-diaminopyrimidine ,
4,6-dihydroxypyrimidine, 2-pyrazoline, 3
-Pyrazoline, N-aminomorpholine, N- (2-aminoethyl) morpholine, trimethylimidazole,
Examples include, but are not limited to, triphenylimidazole, methyldiphenylimidazole, and the like.

These nitrogen-containing basic compounds are used alone or in combination of two or more. The amount of the nitrogen-containing basic compound to be used is generally 0.001 to 10 parts by weight, preferably 0.01 to 5 parts by weight, per 100 parts by weight of the positive photoresist composition (excluding the solvent). 0.001
If the amount is less than parts by weight, the above effects cannot be obtained. On the other hand, if it exceeds 10 parts by weight, the sensitivity tends to decrease and the developability of the unexposed part tends to deteriorate.

The chemically amplified positive photoresist composition of the present invention may further comprise, if necessary, a phenolic OH which promotes solubility in a surfactant, a dye, a pigment, a plasticizer, a photosensitizer and a developer. Compounds having two or more groups can be contained.

The positive photoresist composition of the present invention preferably contains a surfactant. Specifically, polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, polyoxyethylene alkyl ethers such as polyoxyethylene oleyl ether, polyoxyethylene octyl phenol ether, polyoxyethylene nonyl phenol ether and the like Sorbitan such as polyoxyethylene alkyl allyl ethers, polyoxyethylene / polyoxypropylene block copolymers, sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan trioleate, sorbitan tristearate Fatty acid esters, polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan monopal Te - DOO, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan trioleate, nonionic surfactants of polyoxyethylene sorbitan fatty acid esters such as polyoxyethylene sorbitan tristearate, Eftop EF301, E
F303, EF352 (manufactured by Shin-Akita Chemical Co., Ltd.), Megafac F171, F173, F176, F189, R0
8 (manufactured by Dainippon Ink and Chemicals), Florad FC430,
FC431 (manufactured by Sumitomo 3M Limited), Asahigard AG710, Surflon S-382, SC101, SC
102, SC103, SC104, SC105, SC1
06 (manufactured by Asahi Glass Co., Ltd.), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), acrylic acid or methacrylic acid (co) polymerized polyflow No. 75, no. 95 (manufactured by Kyoeisha Yushi Kagaku Kogyo Co., Ltd.) and Troysol S-366 (manufactured by Troy Chemical Co., Ltd.). Among these surfactants, a fluorine-based or silicon-based surfactant is preferable in terms of coating properties and reduction of development defects.

The amount of the surfactant is usually 0.01% to 2% by weight, preferably 0.01% to 1% by weight, based on the solid content of the whole composition in the composition of the present invention. is there. These surfactants can be used alone or in combination of two or more.

Further, the following spectral sensitizers are added to sensitize the photoacid generator to be used in the wavelength region longer than the deep ultraviolet where the photoacid generator used has no absorption, thereby obtaining the chemically amplified positive resist of the present invention. Can be made sensitive to i or g rays. Suitable spectral sensitizers include, specifically, benzophenone, p, p'-tetramethyldiaminobenzophenone, p, p'-tetraethylethylaminobenzophenone, 2-chlorothioxanthone, anthrone, 9-ethoxyanthracene, anthracene, pyrene , Perylene,
Phenothiazine, benzyl, acridine orange, benzoflavin, cetoflavin-T, 9,10-diphenylanthracene, 9-fluorenone, acetophenone, phenanthrene, 2-nitrofluorene, 5-nitroacenaphthene, benzoquinone, 2-chloro-4-nitroaniline , N-acetyl-p-nitroaniline, p-nitroaniline, N-acetyl-4-nitro-1-naphthylamine, picramide, anthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 1,2-
Benzuansuraquinone, 3-methyl-1,3-diaza-
1,9-benzanthrone, dibenzalacetone, 1,2
-Naphthoquinone, 3,3'-carbonyl-bis (5,7-
Dimethoxycarbonylcoumarin) and coronene, but are not limited thereto.

Examples of the compound having two or more phenolic OH groups which promote the solubility in a developing solution include polyhydroxy compounds. Preferably, the polyhydroxy compound includes phenols, resorcin, phloroglucin, phloroglucside, 3,4-trihydroxybenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, α, α ′, α ″ -tris (4-hydroxyphenyl) -1,3,5-triisopropylbenzene, tris ( 4-hydroxyphenyl) methane, tris (4-hydroxyphenyl) ethane, and 1,1′-bis (4-hydroxyphenyl) cyclohexane.

The chemically amplified positive photoresist composition of the present invention is prepared by dissolving the above components in a solvent for dissolving the above components and coating the solution on a support. Examples of usable solvents include ethylene dichloride and cyclohexanone. , Cyclopentanone, 2-heptanone, γ-butyrolactone, methyl ethyl ketone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether,
2-methoxyethyl acetate, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, toluene, ethyl acetate, methyl lactate, ethyl lactate, methyl methoxypropionate, ethyl ethoxypropionate, methyl pyruvate, pyrvin Ethyl acid, propyl pyruvate, N, N-dimethylformamide, dimethylsulfoxide, N-methylpyrrolidone, tetrahydrofuran and the like are preferred, and these solvents are used alone or in combination.

The above-described chemically amplified positive photoresist composition can be prepared by spinning a substrate (eg, silicon / silicon dioxide coating) such as used in the manufacture of precision integrated circuit devices.
After coating by an appropriate coating method such as a coater or the like, exposure is performed through a predetermined mask, baking and development are performed, whereby a good resist pattern can be obtained.

As a developer for the chemically amplified positive photoresist composition of the present invention, for example, sodium hydroxide,
Potassium hydroxide, sodium carbonate, sodium silicate,
Inorganic alkalis such as sodium phosphate, sodium metasilicate and aqueous ammonia, primary amines such as ethylamine and n-propylamine, secondary amines such as diethylamine and di-n-butylamine, and secondary amines such as triethylamine and methyldiethylamine Triamines, alcoholamines such as dimethylethanolamine and triethanolamine, amides such as formamide and acetamide, tetramethylammonium hydroxide, trimethyl (2-hydroxyethyl) ammonium hydroxide, tetraethylammonium hydroxide, tributylmethylammonium Hydroxide, tetraethanolammonium hydroxide, methyltriethanolammonium hydroxide, benzylmethyldiethanolammonium hydroxide, benzyl Dimethyl ethanol ammonium hydroxide, benzyl triethanolammonium hydroxide, tetrapropylammonium hydroxide, quaternary ammonium salts such as tetrabutylammonium hydroxide, pyrrole, aqueous solutions of alkalis such as cyclic amines such as piperidine.

[0139]

The present invention will be described in more detail with reference to the following Examples, but it should not be construed that the invention is limited thereto.

Synthesis Example 1 [Synthesis Example of Resin] Resin can be synthesized by acetalization using either a method using vinyl ether or an acetal exchange method using alcohol and alkyl vinyl ether. For efficient and stable synthesis, the following dehydration azeotropic method can be preferably used. However, these synthesizing methods are merely examples, and the present invention is not limited thereto.

(1) (Synthesis of Resin 1) VP8000 (1800 g) manufactured by Nippon Soda and propylene glycol monomethyl ether acetate (PGMEA)
(8200 g) was dissolved in the flask, and distilled under reduced pressure to distill off water and PGMEA azeotropically. After confirming that the water content was sufficiently low, cyclohexaneethanol (5
76.2 g) and a solution of pyridinium-p-toluenesulfonate (9.0 g) dissolved therein was added to the reaction solution, and further, t-butyl vinyl ether (450.2 g) was added.
g) was added and stirred at room temperature for 5 hours. Water (3.6 liters) and ethyl acetate (7.2 liters) were added to the reaction solution, liquid separation was performed, and after washing with water, ethyl acetate, water, and an azeotropic PGMEA were distilled off under reduced pressure. Alkali-soluble resin having a substituent according to the present invention (resin 1)
(30% PGMEA solution) was obtained. According to GPC measurement based on polystyrene, Mw of the obtained polymer was 1
1000, Mw / Mn was 1.10.

(2) (Synthesis of Resin 2) VP15000 (100 g) manufactured by Nippon Soda and propylene glycol monomethyl ether acetate (PGMEA)
(400 g) was dissolved in a flask and distilled under reduced pressure.
Water and PGMEA were azeotropically distilled off. After confirming that the water content was sufficiently low, ethyl vinyl ether (25.0) was used.
g) and p-toluenesulfonic acid (0.02 g),
Stirred at room temperature for 1 hour. Triethylamine (0.03 g) was added to the reaction solution to stop the reaction, and water (400 m
l) and ethyl acetate (800 ml) were added, liquid-separated, washed with water, and then distilled under reduced pressure to remove ethyl acetate, water and azeotropic PGMEA, thereby obtaining an alkali-soluble resin having a substituent according to the present invention. (Resin 2) (30% PGMEA solution) was obtained. According to GPC measurement based on polystyrene, Mw of the obtained polymer was 18,000 and Mw / Mn
Was 1.12.

(3) (Synthesis of Resin 3) Poly (p-hydroxystyrene) (16.2 g) and isopropyl chloride were dissolved in acetone (100 ml), and triethylamine (1.8 g) was added to the reaction solution. Stirred for hours. The reaction solution was transferred to 1000 ml of water, and the upper layer was removed by decantation. The viscous resin material obtained was dissolved in 75 ml of acetone and the solution was transferred into 500 ml of water. The precipitated rubbery resin was dried under reduced pressure to obtain poly (p-hydroxystyrene /
15.4 g of (p-isopropoxystyrene) were obtained as a white powder. The ratio of the p-hydroxystyrene structural unit to the p-isopropoxystyrene structural unit of the obtained polymer was 90:10 by ¹ H-NMR. According to GPC measurement based on polystyrene, the obtained polymer had a weight average molecular weight Mw of 15,500 and a molecular weight distribution Mw /
Mn was 1.12. 15.0 g of the above poly (p-hydroxystyrene / p-isopropoxystyrene) and 3.0 g of ethyl vinyl ether were added to 150 ml of ethyl acetate.
And a catalytic amount of p-toluenesulfonic acid was added thereto, followed by stirring at room temperature for 6 hours to allow the reaction to proceed. After the reaction, the synthesis product was neutralized with triethylamine and concentrated. The viscous oily residue is dissolved in 100 ml of acetone and 3000 ml for further precipitation
Transferred to water. The precipitated polymer was filtered, washed with water, and dried under reduced pressure to obtain 16.2 g of poly (p-1-ethoxyethoxystyrene / p-hydroxystyrene / p-isopropoxystyrene) as a white powder. The ratio of the structural units of p-1-ethoxyethoxystyrene, p-hydroxystyrene, and p-isopropoxystyrene in the obtained polymer was 30:60:10 by ¹ H-NMR. According to GPC measurement based on polystyrene, Mw of the obtained polymer was 1800.
0 and Mw / Mn were 1.12.

(4) (Synthesis of Resin 4) [Synthesis Example 4-1 Synthesis of Vinyl Ether] Ethyl vinyl ether was mixed in cyclohexylethyl alcohol, mercury acetate was added thereto, and the mixture was stirred at room temperature for 12 hours. After extraction with ethyl acetate and water and washing with water, vacuum distillation was performed to obtain cyclohexylethyl vinyl ether (X-1) as a target product. [Synthesis Example 4-2] p dehydrated and purified by distillation based on a conventional method
-Tert-butoxystyrene monomer 39.6 g
(0.225 mol) and 4 g of t-Bu styrene monomer
(0.025 mol) was dissolved in 100 ml of tetrahydrofuran. Under a nitrogen stream and stirring, at 80 ° C., 0.033 g of azobisisobutyronitrile (AIBN) was added three times every 2.5 hours, and finally, stirring was continued for another 5 hours to carry out a polymerization reaction. . The reaction solution was hexane 120
The solution was added to 0 ml to precipitate a white resin. After drying the obtained resin, it was dissolved in 150 ml of tetrahydrofuran. 4N hydrochloric acid was added thereto, and the mixture was hydrolyzed by heating under reflux for 6 hours, and then reprecipitated in 5 L of ultrapure water. The resin was separated by filtration, washed with water and dried. Further, it was dissolved in 200 ml of tetrahydrofuran, and dropped and reprecipitated in 5 L of ultrapure water with vigorous stirring. This reprecipitation operation was repeated three times. The obtained resin was placed in a vacuum dryer at 120 ° C. for 12 hours.
After drying for an hour, a poly (p-hydroxystyrene / t-butylstyrene) copolymer alkali-soluble resin R-2 was obtained. The weight average molecular weight of the obtained resin was 9,600. [Synthesis Example 4-3] 20 g of the alkali-soluble resin R-2 obtained in Synthesis Example 4-2, 80 ml of propylene glycol monomethyl ether acetate (PGMEA) was dissolved in a flask, distilled under reduced pressure, and water and PGMEA were azeotropically distilled. Distilled off. After confirming that the water content was sufficiently low, 5.0 g of vinyl ether X-1 obtained in Synthesis Example 4-1 and 35 mg of p-toluenesulfonic acid were added, and the mixture was stirred at room temperature for 1 hour, and triethylamine was added. The reaction was terminated. Ethyl acetate was added to the reaction solution, and after further washing with water, ethyl acetate, water, and azeotropic PGMEA were distilled off under reduced pressure to remove the alkali-soluble resin having a substituent according to the present invention (Resin 4). ) Got. The weight average molecular weight of the obtained resin is 110.
00.

(5) (Synthesis of Resin 5) A 60 mol% P-hydroxystyrene / 40 mol% acrylic acid-t-Bu copolymer resin manufactured by Triquest was used. The weight average molecular weight was 8,500.

The structures of the above resins 1 to 5 are shown below.
In addition, the ratio of the repeating unit in the resin shown below is shown by a molar ratio.

[0147]

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Synthesis Example 2 [Synthesis Example of Photoacid Generator] (1) (Synthesis of PAG1) PAG1 is disclosed in Example 8 of JP-A-2000-314956.
The compound described in No. 6 was used. (2) (Synthesis of PAG2) As PAG2, the compound described in Example 9 of JP-T-2000-517067 was used.

(3) Triphenylsulfonium-2,
Synthesis of 4,6- (triisopropyl) phenylsulfonate compound (PAG3) Triphenylsulfonium iodide (17.5 g) was dissolved in methanol (300 ml), silver oxide (10.9 g) was added thereto, and the mixture was stirred at room temperature for 4 hours. The reaction was filtered. On the other hand, 14.7 g of 2,4,6- (triisopropyl) benzenesulfonyl chloride was added to 100 ml of methanol.
and 10 ml of a methanol solution of 10% tetramethylammonium hydroxide (TMAH) under ice-cooling, and further reacted at 50 ° C. for 1 hour.
Allowed to cool. After adding hydrochloric acid thereto to make the system acidic, the mixture was added to the above-described reaction solution and stirred at room temperature. afterwards,
The reaction solution was concentrated, chloroform was added, and TMAH was added twice,
After washing twice with water, the residue was concentrated. The obtained solid was recrystallized from diisopropyl ether / ethyl acetate to obtain 22 g of the desired product (PAG3). Similarly, various compounds were obtained.

The structures of the above PAGs 1 to 6 are shown below.

[0151]

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Examples 1 to 16 and Comparative Examples 1 to 4 The components shown in Table 1 were dissolved in a PGMEA solvent so that the total weight ratio was 12% in the weight ratio shown in Table 1.
The mixture was filtered through a 1 μm microfilter to prepare a positive photoresist. Using a spin coater (Mark 8 from Tokyo Electron), an organic BARC (DUV42) manufactured by Nissan Chemical Co., Ltd. was applied on a silicon wafer on which a 100 nm film was formed, and dried at 90 ° C. for 90 seconds. A resist film of 0.5 μm was formed. The resist film was passed through a halftone phase shift mask having a transmittance of 6%, and Kr using Canon FPA-3000EX5.
With F excimer laser light (wavelength 248 nm, NA 0.6
3, σ0.5) Pattern exposure was performed. 110 ° C after exposure
For 90 seconds, developed with a 2.38% TMAH aqueous solution, rinsed, and then spin-dried to obtain a resist pattern.

(Evaluation Method of Resolution) The minimum mask dimension to be resolved at the exposure amount at which the size of the contact hole having a duty ratio of 1: 1 and a contact size of 1.1 μm was 0.18 μm was defined as the resolution.

(Evaluation Method of Dense Dimension Difference) Duty Ratio 1:
At a light exposure amount where the size of a contact hole having a mask size of 1.1 μm of 1 is 0.18 μm, the difference between the contact dimensions at a duty ratio of 1: 1 and 1:10 is determined by a length measuring SEM: S-8840 manufactured by Hitachi, Ltd. Measured.

(Method of Evaluating PED Stability) The contact size on a wafer which was subjected to PEB processing immediately after exposure at an exposure amount where the size of a contact hole having a duty ratio of 1: 1 and a mask size of 1.1 μm was 0.18 μm. When,
The difference from the contact size on the wafer after 2 hours of PEB processing was measured by a length measuring SEM: S-8840 manufactured by Hitachi, Ltd. The results are shown in Table 1 below.

[0156]

[Table 1]

The following compounds were used as additives in all the resists of the examples and comparative examples in an amount of 0.2 parts by weight.

[0158]

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As shown in Table 1 above, it can be seen that the composition of the present invention is superior in resolution, dimensional difference and PED stability as compared with Comparative Examples.

[0160]

According to the present invention, there is provided a chemically amplified positive photoresist composition which is excellent in resolution, dimensional difference between coarse and fine, and also excellent in PED stability.

Continued on the front page F term (reference) 2H025 AA02 AA11 AB14 AB15 AB16 AC04 AC08 AD03 BE00 BE07 BE10 BG00 CB08 CB14 CB17 CB41 FA17 4J002 BC081 BC091 BC101 BC121 BE041 BG041 BG051 BG091 BG131 EB116 FD006 EVFD EV 296

Claims (2)

[Claims] 1. A resin which decomposes under the action of an acid to increase the solubility in an alkali developer, and b) generates an acid by irradiation with actinic rays or radiation represented by the following general formula (1). A positive photoresist comprising a compound and at least one selected from the group of compounds that generate an acid upon irradiation with actinic rays or radiations represented by the following general formulas (2) to (5): Composition. Embedded image In the general formula (1), R ₁ and R ₂ each have an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, a cycloalkenyl group or a substituent which may have a substituent having 1 to 16 carbon atoms. Represents an aryl group, a heteroaryl group, or a cyano group which may be substituted. R ₁ and R ₂ are an alkylene chain, an alkenylene chain, an alkynine chain which may have a substituent having 2 to 8 carbon atoms, or a phenylene, a freelen, a thienylene which may have a substituent, -O
-, -S-, -N-, via a connecting chain containing -CO-,
It may be bonded to R ₁ or R _{2 of} another compound represented by the general formula (1). R ₃ represents an alkyl group having 1 to 16 carbon atoms which may have a substituent, a cycloalkyl group, or an aryl group which may have a substituent. Embedded image In the general formulas (2) to (5), R _{4 to} R ₆ represent a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, or a halogen atom. R ₇ represents an alkyl group, a cycloalkyl group, or an aryl group which may have a substituent having 3 to 16 carbon atoms. 2. The positive photoresist composition according to claim 1, further comprising a compound represented by the following general formula (6) that generates an acid upon irradiation with actinic rays or radiation. Embedded image In the general formula (6), R ₈ and R ₉ represent an alkyl group, a cycloalkyl group, or an aryl group which may have a substituent.