JP2002110836A - Package for housing electronic component - Google Patents
Package for housing electronic componentInfo
- Publication number
- JP2002110836A JP2002110836A JP2000294953A JP2000294953A JP2002110836A JP 2002110836 A JP2002110836 A JP 2002110836A JP 2000294953 A JP2000294953 A JP 2000294953A JP 2000294953 A JP2000294953 A JP 2000294953A JP 2002110836 A JP2002110836 A JP 2002110836A
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- concave portion
- resin
- recess
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、半導体素子や弾性
表面波素子等の電子部品を収容する電子部品収納用パッ
ケージに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a package for housing electronic components such as semiconductor devices and surface acoustic wave devices.
【0002】[0002]
【従来技術】従来、半導体素子や表面弾性波素子等の電
子部品を収容するための電子部品収納用パッケージは、
酸化アルミニウム質焼結体等の電気絶縁材料から成り、
その上面の略中央部に電子部品を収容するための凹部及
び該凹部周辺から外表面にかけて導出されたタングステ
ン、モリブデン、マンガン等の高融点金属粉末から成る
メタライズ配線層を有する絶縁基体と、蓋体とから構成
されており、絶縁基体の凹部底面に電子部品をエポキシ
樹脂等の接着用の樹脂を介して接着固定するとともに電
子部品の各電極をボンディングワイヤを介して電気的に
接続し、最後に絶縁基体上面に蓋体をガラス、樹脂等の
封止部材により接合させ、内部に電子部品を気密封止す
ることによって最終製品としての電子装置となる。2. Description of the Related Art Conventionally, electronic component storage packages for storing electronic components such as semiconductor elements and surface acoustic wave elements have been developed.
It is made of an electrical insulating material such as an aluminum oxide sintered body,
An insulating base having a concave portion for accommodating an electronic component at a substantially central portion of the upper surface thereof and a metallized wiring layer made of a high melting point metal powder such as tungsten, molybdenum, manganese or the like led out from the periphery of the concave portion to the outer surface; The electronic component is bonded and fixed to the bottom of the concave portion of the insulating base via a bonding resin such as an epoxy resin, and each electrode of the electronic component is electrically connected via a bonding wire. The lid is joined to the upper surface of the insulating base with a sealing member such as glass or resin, and the electronic components are hermetically sealed inside to provide an electronic device as a final product.
【0003】なお、電子部品の凹部底面への接着は、例
えば、まず凹部底面に未硬化のエポキシ樹脂等の接着用
の樹脂を塗付し、次に凹部底面上に電子部品を位置決め
載置するとともに電子部品に適当な荷重を印加し、電子
部品の下面と凹部底面との間に樹脂を塗れ広がらせて充
填し、最後にこの未硬化の樹脂を加熱硬化することによ
り行われる。For bonding the electronic component to the bottom surface of the concave portion, for example, first, an uncured epoxy resin or the like is applied to the bottom surface of the concave portion, and then the electronic component is positioned and mounted on the bottom surface of the concave portion. At the same time, an appropriate load is applied to the electronic component, the resin is spread and filled between the lower surface of the electronic component and the bottom of the concave portion, and finally, the uncured resin is heated and cured.
【0004】また、近時、電子部品は数mm角以下の小
型化されたものが多用され、この場合、電子部品と凹部
底面との接着面積が狭く接着強度が低下しやすいことか
ら、凹部底面に縞状の突起部を設け、この縞状の突起部
上に跨らせて電子部品を載置することにより電子部品の
下面と凹部底面との間に一定のスペースを確保し、この
スペース内に樹脂を充填することにより樹脂のボリュー
ムを確保し、電子部品の接着強度が低下することを防止
するようにした構造が多用されつつある。In recent years, electronic components which have been reduced in size to several mm square or less are frequently used. In this case, since the bonding area between the electronic component and the bottom surface of the concave portion is small and the adhesive strength tends to decrease, the bottom surface of the concave portion is often used. A stripe-shaped projection is provided on the electronic component, and the electronic component is placed over the stripe-shaped projection to secure a certain space between the lower surface of the electronic component and the bottom surface of the concave portion. There is a growing use of a structure in which the resin is filled with a resin to secure the volume of the resin and prevent the adhesive strength of the electronic component from being reduced.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、この従
来の電子部品収納用パッケージにおいては、酸化アルミ
ニウム質焼結体等から成る絶縁基体の表面に数μm程度
の多数の凹凸が存在し、また絶縁基体の凹部底面が平坦
であることから、接着用の樹脂が流れ難く、電子部品と
凹部底面との間に樹脂を均一に濡れ広がらせることが難
しく、接着強度が部分的にばらついてしまい、電子部品
を凹部底面に強固に接着固定することができないという
問題があった。However, in this conventional electronic component housing package, a large number of irregularities of about several μm are present on the surface of an insulating base made of an aluminum oxide sintered body or the like. Since the bottom surface of the concave portion is flat, it is difficult for the resin for bonding to flow, it is difficult to uniformly spread the resin between the electronic component and the bottom surface of the concave portion, and the adhesive strength partially varies, and the electronic component Cannot be firmly bonded and fixed to the bottom surface of the concave portion.
【0006】また同時に接着用の樹脂が流れ難いことか
ら、樹脂中に抱きこまれた気泡等の外部への移動が困難
で樹脂中に残留してボイド(空隙部)等の欠陥を生じ、
電子部品を凹部底面に強固に接着固定することができな
いという問題もあった。At the same time, since the bonding resin is difficult to flow, it is difficult for bubbles and the like entrapped in the resin to move to the outside, and remains in the resin to cause defects such as voids.
There is also a problem that the electronic component cannot be firmly bonded and fixed to the bottom of the concave portion.
【0007】本発明は上記従来技術における問題点に鑑
みてなされたものであり、その目的は、電子部品と凹部
底面との間に樹脂を、均一、かつボイド等の欠陥を生じ
ることなく充填させることができ、電子部品を凹部底面
に強固に接着固定することが可能な電子部品収納用パッ
ケージを提供することにある。The present invention has been made in view of the above-mentioned problems in the prior art, and has as its object to fill a resin between an electronic component and a bottom surface of a concave portion uniformly and without causing defects such as voids. Another object of the present invention is to provide an electronic component storage package that can firmly adhere and fix an electronic component to the bottom surface of a concave portion.
【0008】[0008]
【課題を解決するための手段】本発明の電子部品収納用
パッケージは、電子部品を収容するための凹部を有する
絶縁基体と蓋体とから成り、絶縁基体の凹部底面に電子
部品を樹脂を介して接着固定するとともに凹部を前記蓋
体で封止するようになした電子部品収納用パッケージで
あって、前記絶縁基体の凹部底面を、該凹部底面の中心
を頂点とする円弧状とするとともに凹部底面に縞状の突
起部を設けたことを特徴とするものである。A package for storing an electronic component according to the present invention comprises an insulating substrate having a concave portion for accommodating the electronic component and a lid, and the electronic component is provided on the bottom surface of the concave portion of the insulating substrate via a resin. An electronic component housing package in which the recess is sealed with the lid and the recess is sealed with the lid, wherein the bottom of the recess of the insulating base is formed into an arc shape having the center of the bottom of the recess as an apex. A stripe-shaped projection is provided on the bottom surface.
【0009】また本発明の電子部品収納用パッケージ
は、前記円弧状をなす凹部底面の最大高低差が5μm乃
至15μmであることを特徴とするものである。In the electronic component storage package according to the present invention, a maximum height difference of the bottom surface of the arc-shaped concave portion is 5 μm to 15 μm.
【0010】本発明の電子部品収納用パッケージによれ
ば、絶縁基体の凹部底面を、該凹部底面の中心を頂点と
する円弧状とするとともに凹部底面に縞状の突起部を設
けたことから、電子部品接着用の樹脂を凹部底面の中心
から外周に向かって流れ易くし電子部品と凹部底面との
間に均一に樹脂を充填させて接着強度を均一なものとす
ることができるとともに、この外周に向かう接着用の樹
脂の流れにより樹脂中に抱き込まれた気泡等を外部に容
易に移動、排出させることができ、気泡等に起因する樹
脂中の空隙等の欠陥が生じることを効果的に防ぐことが
でき、電子部品を凹部底面に強固に接着固定することが
できる。According to the electronic component housing package of the present invention, the bottom surface of the concave portion of the insulating base is formed in an arc shape having the center of the bottom surface of the concave portion as an apex, and the stripe-shaped projection is provided on the bottom surface of the concave portion. The resin for bonding the electronic component can easily flow from the center of the bottom surface of the concave portion toward the outer periphery, and the resin can be uniformly filled between the electronic component and the bottom surface of the concave portion so that the adhesive strength can be made uniform. The air bubbles and the like entrapped in the resin can be easily moved to the outside and discharged by the flow of the resin for bonding toward the outside, effectively preventing defects such as voids in the resin from being caused by the air bubbles and the like. Thus, the electronic component can be firmly bonded and fixed to the bottom surface of the concave portion.
【0011】[0011]
【発明の実施の形態】次に本発明を添付図面に基づき詳
細に説明する。図1および図2は本発明の電子部品収納
用パッケージの一実施例を示し、1は電気絶縁材料から
成る絶縁基体、2は蓋体である。この絶縁基体1と蓋体
2とで半導体素子や表面弾性波素子等の電子部品3を収
容するための容器4が構成される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described in detail with reference to the accompanying drawings. 1 and 2 show an embodiment of an electronic component storage package according to the present invention, wherein 1 is an insulating base made of an electrically insulating material, and 2 is a lid. The insulating base 1 and the lid 2 constitute a container 4 for housing an electronic component 3 such as a semiconductor element or a surface acoustic wave element.
【0012】前記絶縁基体1は酸化アルミニウム質焼結
体、ムライト質焼結体、窒化アルミニウム質焼結体等の
電気絶縁材料から成り、例えば、酸化アルミニウム質焼
結体から成る場合、酸化アルミニウム、酸化珪素、酸化
マグネシウム、酸化カルシウム等の原料粉末に適当な有
機バインダー、溶剤等を添加混合して泥漿物を作るとと
もに該泥漿物をドクターブレード法やカレンダーロール
法等によりシート状に成型してセラミックグリーンシー
トを得、しかる後、前記セラミックグリーンシートに適
当な打ち抜き加工を施すとともにこれを複数枚積層し、
約1600℃の高温で焼成することによって製作され
る。The insulating substrate 1 is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, and the like. An appropriate organic binder, a solvent, and the like are added to and mixed with raw material powders such as silicon oxide, magnesium oxide, and calcium oxide to form a slurry, and the slurry is formed into a sheet by a doctor blade method, a calendar roll method, or the like to form a ceramic. Obtain a green sheet, and then, after performing appropriate punching processing on the ceramic green sheet and laminating a plurality of these,
It is manufactured by firing at a high temperature of about 1600 ° C.
【0013】前記絶縁基体1はその上面中央部に電子部
品3を収容するための四角形状の凹部1aが設けてある
とともに該凹部1aの底面には縞状の突起部6が形成さ
れており、電子部品3がこの縞状の突起部6に跨るよう
にして載置されエポキシ樹脂等の樹脂5を介して凹部1
a底面に接着固定される。The insulating base 1 has a rectangular recess 1a for accommodating the electronic component 3 at the center of the upper surface thereof, and has a striped projection 6 formed on the bottom of the recess 1a. The electronic component 3 is placed so as to straddle the stripe-shaped protrusion 6, and the recess 1 is interposed via a resin 5 such as an epoxy resin.
a Adhesively fixed to the bottom surface.
【0014】前記電子部品3の凹部1a底面への接着固
定は、まず縞状の突起部6が形成されている凹部1a底
面に未硬化の熱硬化性エポキシ樹脂等の接着用の樹脂を
塗付し、次に電子部品3を縞状の突起部5上に跨らせて
位置決め載置するとともに電子部品3に適当な荷重を印
加し、接着用の樹脂を電子部品3の下面と凹部1a上面
との間に塗れ広がらせ、その後、熱等で接着用の樹脂を
硬化させることにより行われる。The bonding and fixing of the electronic component 3 to the bottom surface of the concave portion 1a is performed by first applying a bonding resin such as an uncured thermosetting epoxy resin to the bottom surface of the concave portion 1a where the stripe-shaped projections 6 are formed. Then, the electronic component 3 is positioned and mounted so as to straddle the stripe-shaped projections 5, and an appropriate load is applied to the electronic component 3, and a resin for bonding is applied to the lower surface of the electronic component 3 and the upper surface of the recess 1 a. This is performed by spreading the resin between the layers and then curing the bonding resin with heat or the like.
【0015】なお前記縞状の突起部6は、電子部品3と
凹部1a底面との間に一定のスペースを確保するための
スペーサーとして作用し、このスペース内に樹脂5を充
填させることにより電子部品3を絶縁基体1aに接着す
る樹脂量を十分なものとし、電子部品3の接着強度を確
保するようになっている。The striped projections 6 function as spacers for securing a certain space between the electronic component 3 and the bottom surface of the concave portion 1a. By filling the space with the resin 5, the electronic component 3 is filled. The amount of resin for bonding the electronic component 3 to the insulating base 1a is made sufficient to ensure the bonding strength of the electronic component 3.
【0016】また前記縞状の突起部6は、例えば、タン
グステン、モリブデン、マンガン等の高融点金属粉末か
ら成り、該高融点金属粉末に適当な有機溶剤、溶媒を添
加混合して得た金属ペーストを従来周知のスクリーン印
刷法等の厚膜手法を採用し、絶縁基体1の凹部1a底面
となるセラミックグリーンシートに所定厚みに印刷塗布
しておくことによって絶縁基体1の凹部1a底面に被着
形成される。The striped projections 6 are made of a high melting point metal powder such as tungsten, molybdenum, manganese, etc., and a metal paste obtained by adding an appropriate organic solvent and a solvent to the high melting point metal powder. Is formed on a ceramic green sheet serving as a bottom surface of the concave portion 1a of the insulating substrate 1 by applying a predetermined thickness by employing a known thick film method such as a screen printing method. Is done.
【0017】前記縞状の突起部6は、その最大高さが約
25μm〜35μmの高さとなるように形成しておくこ
とが好ましく、凹部1a底面と電子部品3との間に十分
なスペースを確保することができるとともに、縞状の突
起部6にカケ、剥離等の不具合が生じることを効果的に
防止することができる。It is preferable that the stripe-shaped projections 6 are formed so that the maximum height thereof is about 25 μm to 35 μm, and a sufficient space is provided between the bottom surface of the recess 1 a and the electronic component 3. In addition to ensuring the above, it is possible to effectively prevent the stripe-shaped projections 6 from being defective such as chipping and peeling.
【0018】更に前記縞状の突起部6は、タングステ
ン、モリブデン、マンガン等の高融点金属粉末から成る
場合、その表面にニッケル、金等のめっき層を1〜20
μm程度の厚みに被着させておくと、その酸化腐蝕を効
果的に防止し、電子部品をより一層容易かつ確実に接着
することができる。従って、前記縞状の突起部6は、そ
の表面にニッケル、金等のめっき層を1〜20μmの厚
みに被着させておくことが好ましい。Further, when the striped projections 6 are made of a high melting point metal powder such as tungsten, molybdenum, manganese, etc., a plating layer of nickel, gold, etc.
If it is applied to a thickness of about μm, its oxidative corrosion can be effectively prevented, and the electronic component can be more easily and reliably bonded. Accordingly, it is preferable that a plating layer of nickel, gold, or the like is applied to the surface of the stripe-shaped protrusion 6 to a thickness of 1 to 20 μm.
【0019】本発明の電子部品収納用パッケージにおい
ては、絶縁基体1の凹部1aの底面に上記のような突起
部6を設けるとともに、凹部1a底面を、該凹部1a底
面の中心を頂点とする円弧状とすることが重要である。In the electronic component housing package according to the present invention, the projection 6 is provided on the bottom surface of the concave portion 1a of the insulating base 1, and the bottom surface of the concave portion 1a is a circle having the center at the center of the bottom surface of the concave portion 1a. It is important to make it arc-shaped.
【0020】前記凹部1a底面を、該凹部1aの中心を
頂点とする円弧状とすることにより、凹部1a底面は中
心から外周に向かって下るように傾斜した形状とするこ
とができ、電子部品3を凹部1a底面に接着する際、こ
の傾斜面に沿って接着用樹脂を中心から外周に向かって
容易に流れるようにすることができる。その結果、電子
部品と凹部底面との間に均一に樹脂を充填させて接着強
度を均一なものとすることができるとともに、外周に向
かう接着用の樹脂の流れにより樹脂中に抱き込まれた気
泡等を外部に容易に移動、排出させることができ、気泡
等に起因する樹脂中の空隙等の欠陥が生じることを効果
的に防ぐことができ、電子部品を凹部底面に強固に接着
固定することができる。By forming the bottom surface of the concave portion 1a into an arc shape having the center of the concave portion 1a as an apex, the bottom surface of the concave portion 1a can be formed so as to be inclined from the center toward the outer periphery. When adhering to the bottom surface of the concave portion 1a, the adhesive resin can easily flow from the center toward the outer periphery along the inclined surface. As a result, the resin can be uniformly filled between the electronic component and the bottom surface of the concave portion, so that the adhesive strength can be made uniform, and air bubbles entrapped in the resin due to the flow of the adhesive resin toward the outer periphery. Etc. can be easily moved and discharged to the outside, and defects such as voids in the resin due to bubbles or the like can be effectively prevented, and the electronic component is firmly adhered and fixed to the bottom of the concave portion. Can be.
【0021】この場合、凹部1a底面の最大高低差が5
μm未満では凹部1a底面の中心から外周にかけての傾
斜が不十分となり、接着用の樹脂を外周に向かって効果
的に流れ易くすることが困難となり、15μm未満であ
ると傾斜が強くなり過ぎ、この凹部1a底面に電子部品
を水平に接着固定することが困難となり、電子部品が傾
いて接着強度が劣化する傾向にあり、また後述するボン
ディングワイヤを正確に電子部品3の電極に接続させる
ことが困難となる。従って、前記凹部1a底面は、その
最大高低差が5μm乃至15μmの範囲であることが好
ましい。In this case, the maximum height difference of the bottom surface of the concave portion 1a is 5
If it is less than μm, the inclination from the center to the outer periphery of the bottom surface of the concave portion 1a becomes insufficient, and it becomes difficult to effectively make the adhesive resin easily flow toward the outer periphery. If it is less than 15 μm, the inclination becomes too strong. It becomes difficult to horizontally fix the electronic component to the bottom surface of the concave portion 1a, the electronic component tends to be inclined, and the adhesive strength tends to deteriorate, and it is difficult to accurately connect a bonding wire described later to the electrode of the electronic component 3. Becomes Therefore, it is preferable that the maximum height difference of the bottom surface of the concave portion 1a is in the range of 5 μm to 15 μm.
【0022】なお前記凹部1a底面を、該凹部1a底面
の中心を頂点とする円弧状とするには、セラミックグリ
ーンシートの凹部1a底面となる領域の外周部に中心よ
りも大きな荷重をかけて焼成し凹部1a底面全体を円弧
状に反った形状とする方法や、セラミックグリーンシー
トの凹部1a底面となる領域の中心から外周にかけて円
弧状の断面となるようにセラミックペーストを塗付して
おく方法を用いることができる。In order to make the bottom surface of the concave portion 1a arc-shaped with the center of the bottom surface of the concave portion 1a as an apex, a load larger than the center is applied to the outer peripheral portion of the region of the ceramic green sheet which becomes the bottom surface of the concave portion 1a. A method in which the entire bottom surface of the concave portion 1a is curved in an arc shape, or a method in which a ceramic paste is applied so as to form an arc-shaped cross section from the center to the outer periphery of a region of the ceramic green sheet which is the bottom surface of the concave portion 1a. Can be used.
【0023】更に前記絶縁基体1はその凹部1a周辺か
ら容器4の外部にかけてメタライズ配線層7が被着形成
されており、該メタライズ配線層7の凹部1a周辺部は
電子部品3の各電極がボンディングワイヤ8を介し電気
的に接続され、また容器4の外部に導出された部位は錫
−鉛半田等の低融点ロウ材を介して外部電気回路と接続
される。Further, the metallized wiring layer 7 is formed on the insulating substrate 1 from the periphery of the concave portion 1a to the outside of the container 4, and each electrode of the electronic component 3 is bonded around the concave portion 1a of the metallized wiring layer 7. The part which is electrically connected through the wire 8 and led out of the container 4 is connected to an external electric circuit through a low melting point brazing material such as tin-lead solder.
【0024】前記メタライズ配線層7はタングステン、
モリブデン、マンガン等の高融点金属粉末から成り、該
高融点金属粉末に適当な有機溶剤、溶媒を添加混合して
得た金属ペーストを従来周知のスクリーン印刷法等の厚
膜手法を採用し、絶縁基体1となるセラミックグリーン
シートに予め印刷塗布しておくことによって絶縁基体1
の凹部1a周辺から容器4の外部にかけて被着形成され
る。The metallized wiring layer 7 is made of tungsten,
A metal paste obtained by adding a suitable organic solvent and a solvent to the high melting point metal powder, such as molybdenum, manganese, etc., is applied to the metal paste by using a conventionally known thick film method such as a screen printing method. The insulating substrate 1 is printed and coated on a ceramic green sheet serving as the substrate 1 in advance.
From the periphery of the concave portion 1 a to the outside of the container 4.
【0025】前記絶縁基体1は更にその上面に蓋体2が
封止部材9を介して接合され、これによって絶縁基体1
の凹部1aはその内部が蓋体2によって気密に封止され
る。The insulating substrate 1 is further joined with a lid 2 on the upper surface thereof via a sealing member 9, whereby the insulating substrate 1
The inside of the recess 1 a is hermetically sealed by the lid 2.
【0026】前記蓋体2は、鉄−ニッケル−コバルト合
金、酸化アルミニウム質焼結体、ムライト質焼結体、窒
化アルミニウム質焼結体等から成り、例えば酸化アルミ
ニウム質焼結体から成る場合、酸化アルミニウム、酸化
マグネシウム、酸化カルシウム等の原料粉末を従来周知
のプレス成形法を採用することによって成型するととも
にこれを約1500℃の温度で焼成することによって形
成される。The lid 2 is made of an iron-nickel-cobalt alloy, an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, or the like. It is formed by molding a raw material powder such as aluminum oxide, magnesium oxide, calcium oxide or the like by using a conventionally known press molding method, and firing it at a temperature of about 1500 ° C.
【0027】かくしてこの電子部品収納用パッケージに
よれば、絶縁基体1の凹部1a底面に電子部品3をエポ
キシ樹脂等から成る樹脂5を介して接着し、次に前記電
子部品3の各電極をメタライズ配線層7にボンディング
ワイヤ8を介して電気的に接続させ、最後に絶縁基体1
の上面に蓋体2をガラス、樹脂等から成る封止部材9を
介して接合させ、絶縁基体1と蓋体2とから成る容器4
内部に電子部品3を気密に収容することによって最終製
品としての電子装置となる。Thus, according to this electronic component storage package, the electronic component 3 is bonded to the bottom surface of the concave portion 1a of the insulating base 1 via the resin 5 made of epoxy resin or the like, and then each electrode of the electronic component 3 is metallized. The wiring layer 7 is electrically connected to the wiring layer 7 through the bonding wires 8.
Lid 2 is joined to the upper surface of the container via a sealing member 9 made of glass, resin or the like, and a container 4 composed of the insulating base 1 and the lid 2
An electronic device as a final product is obtained by hermetically housing the electronic component 3 therein.
【0028】なお、本発明は上記実施例に限定されるも
のではなく、本発明の要旨を逸脱しない範囲での種々の
変更・改良を加えることは何ら差し支えない。例えば、
上記実施例においては絶縁基体を酸化アルミニウム質焼
結体等を用いた場合について説明したが、絶縁基体とし
てプラスチック等の樹脂材料製や有機材料と無機材料と
の複合材料製のものを用いてもよい。The present invention is not limited to the above embodiment, and various changes and improvements may be made without departing from the spirit of the present invention. For example,
In the above embodiment, the case where the insulating substrate is made of aluminum oxide sintered body or the like is described. However, the insulating substrate may be made of a resin material such as plastic or a composite material of an organic material and an inorganic material. Good.
【0029】[0029]
【発明の効果】本発明の電子部品収納用パッケージによ
れば、絶縁基体の凹部底面を、該凹部底面の中心を頂点
とする円弧状とするとともに凹部底面に縞状の突起部を
設けたことから、電子部品接着用の樹脂を凹部底面の中
心から外周に向かって流れ易くし電子部品と凹部底面と
の間に均一に樹脂を充填させて接着強度を均一なものと
することができるとともに、この外周に向かう接着用の
樹脂の流れにより樹脂中に抱き込まれた気泡等を外部に
容易に移動、排出させることができ、気泡等に起因する
樹脂中の空隙等の欠陥が生じることを効果的に防ぐこと
ができ、電子部品を凹部底面に強固に接着固定すること
ができる。According to the electronic component housing package of the present invention, the bottom surface of the concave portion of the insulating base is formed into an arc shape having the center of the bottom surface of the concave portion as an apex and the stripe-shaped projection is provided on the bottom surface of the concave portion. From this, it is possible to easily flow the resin for bonding the electronic component from the center of the bottom surface of the concave portion toward the outer periphery, and to uniformly fill the resin between the electronic component and the bottom surface of the concave portion, thereby making the bonding strength uniform. Bubbles and the like entrapped in the resin can be easily moved to the outside and discharged by the flow of the bonding resin toward the outer periphery, and the effect that defects such as voids in the resin due to the bubbles and the like are generated. The electronic component can be firmly bonded and fixed to the bottom surface of the concave portion.
【図1】本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing one embodiment of the present invention.
【図2】本発明の一実施例を示す平面図である。FIG. 2 is a plan view showing an embodiment of the present invention.
1・・・・絶縁基体 1a・・・凹部 2・・・・蓋体 3・・・・電子部品 4・・・・容器 5・・・・樹脂 6・・・・縞状の突起部 7・・・・メタライズ配線層 8・・・・ボンディングワイヤ 9・・・・封止部材 DESCRIPTION OF SYMBOLS 1 ... Insulating base 1a ... Depression 2 ... Lid 3 ... Electronic components 4 ... Container 5 ... Resin 6 ... Stripe-shaped protrusion 7 ... ... Metalized wiring layer 8 ... Bonding wire 9 ... Sealing member
フロントページの続き (72)発明者 中原 光一 鹿児島県国分市山下町1番1号 京セラ株 式会社鹿児島国分工場内 Fターム(参考) 5J097 AA24 AA32 HA04 JJ01 JJ03Continued on the front page (72) Inventor Koichi Nakahara 1-1, Yamashita-cho, Kokubu-shi, Kagoshima F-term in Kyocera Corporation's Kagoshima Kokubu Plant (reference) 5J097 AA24 AA32 HA04 JJ01 JJ03
Claims (2)
縁基体と蓋体とから成り、絶縁基体の凹部底面に電子部
品を樹脂を介して接着固定するとともに凹部を前記蓋体
で封止するようになした電子部品収納用パッケージであ
って、 前記絶縁基体の凹部底面を、該凹部底面の中心を頂点と
する円弧状とするとともに凹部底面に縞状の突起部を設
けたことを特徴とする電子部品収納用パッケージ。An electronic device comprising: an insulating base having a concave portion for accommodating an electronic component; and a lid, wherein the electronic component is bonded and fixed to a bottom surface of the concave portion of the insulating base via a resin, and the concave portion is sealed with the lid. An electronic component housing package as described above, wherein a bottom surface of the concave portion of the insulating base is formed in an arc shape having a center at the center of the bottom surface of the concave portion, and a stripe-shaped protrusion is provided on the bottom surface of the concave portion. Electronic component storage package.
5μm乃至15μmであることを特徴とする請求項1に
記載の電子部品収納用パッケージ。2. The electronic component storage package according to claim 1, wherein the maximum height difference of the bottom surface of the arc-shaped concave portion is 5 μm to 15 μm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000294953A JP2002110836A (en) | 2000-09-27 | 2000-09-27 | Package for housing electronic component |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000294953A JP2002110836A (en) | 2000-09-27 | 2000-09-27 | Package for housing electronic component |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2002110836A true JP2002110836A (en) | 2002-04-12 |
Family
ID=18777458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000294953A Pending JP2002110836A (en) | 2000-09-27 | 2000-09-27 | Package for housing electronic component |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002110836A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021034665A (en) * | 2019-08-28 | 2021-03-01 | 三菱電機株式会社 | Semiconductor device and manufacturing method of semiconductor device |
-
2000
- 2000-09-27 JP JP2000294953A patent/JP2002110836A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021034665A (en) * | 2019-08-28 | 2021-03-01 | 三菱電機株式会社 | Semiconductor device and manufacturing method of semiconductor device |
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