JP2002107318A - Measuring device for linear expansion coefficient - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a linear expansion coefficient measuring device, capable of highly accurate measurement of the linear expansion coefficients of a large member of a size which cannot be inserted in a thermostatic chamber and an actual structure member, with small errors. SOLUTION: The linear expansion coefficient measuring device is provided with a base 15, made of zero-expansion glass of a linear expansion coefficient smaller than 0.1 ppm/ deg.C, a support device 16 made of zero-expansion glass for supporting a member to be measured 1 provided for the base 15, a measuring plate 17 made of zero-expansion glass provided for the member to be measured, a non-contact type displacement gauge 18 of measurement accuracy smaller than 0.5 μm capable of measuring the location of the measuring plate 17 and installed to the base 15, a sheet heater 19 capable of heating the member to be measured 1, a thermocouple 4 for measuring the temperature of the member to be measured 1, and a measurement computing device 6 for computing displacement, i.e., elongation of the measuring plate 17 due to temperature changes of the member to be measured 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for measuring a coefficient of linear expansion, and more particularly to a member having a large size or having a difficulty in measuring a coefficient of linear expansion, such as a pipe or a sandwich panel, or an actual structural member. For measuring the coefficient of linear expansion for

[0002]

2. Description of the Related Art FIGS. 8A to 8C show a conventional linear expansion coefficient measuring apparatus. In the conventional linear expansion coefficient measuring device, as shown in FIG. 8A, first, the member 1 to be measured is placed on a base 3 installed in a thermostat 2 and
Heating is performed by increasing the temperature in the thermostat 2. The temperature of the member 1 to be measured is measured by a thermocouple 4 attached to the member 1 to be measured.
The strain of the measured member 1 is measured by attaching the strain gauge 5 to the measured member 1, and the coefficient of linear expansion of the measured member 1 is measured based on the results by using the measurement calculation device 6. Measure. Alternatively, as shown in FIG.
The linear expansion coefficient of the member to be measured 1 is measured by the measurement arithmetic unit 6 by the contact type displacement meter 7 attached to at least one end of the member to be measured 1. Alternatively, as shown in FIG. 8C, the interferometer 8 attached to one end of the member 1 to be measured.
And the reflecting mirror 9, the incident beam 12 from the laser beam oscillating device 11 that has passed through the window glass 10 provided on the side surface of the thermostat 2 and the reflected beam 13 from the reflecting mirror 9 interfere with each other, and the detector 14 The linear expansion coefficient of the member to be measured 1 is measured by using the measuring and calculating device 6 by detecting the displacement in the step (1).

[0003]

In the conventional linear expansion coefficient measuring apparatus, as described above, since the whole of the member to be measured 1 is placed in the constant temperature bath 2 and heated to give a temperature change.
When the dimension of the member to be measured 1 is large, there is a problem that the measurement cannot be performed without entering the thermostat 2.

Further, since only the temperature in the thermostat 2 is controlled and the temperature of the member to be measured 1 is not directly controlled, it is difficult to make the temperature of the member to be measured 1 uniform.
An accurate measurement of the coefficient of linear expansion was not possible.

In the linear expansion coefficient measuring device using the strain gauge 5 shown in FIG. 8A, since the strain is detected as a change in the electric resistance, the change in the electric resistance due to the temperature is measured. Is larger than the change in strain due to the temperature change of
It was impossible to measure a linear expansion coefficient of less than ppm / ° C.

Further, in the linear expansion coefficient measuring apparatus using the contact type displacement meter 7 shown in FIG. 8B, the contact type displacement meter itself is thermally deformed in response to a temperature change, and the ratio of the deformation is reduced. Since the change in elongation caused by the temperature change of the member 1 to be measured is large and the error of the contact type displacement meter itself is large, it is impossible to measure the linear expansion coefficient accurately.

In the linear expansion coefficient measuring apparatus using a laser beam shown in FIG. 8 (c), it is necessary to place the thermostat 2, the laser beam oscillator 11, and the detector 14 at different places. There is a possibility that a large error may occur in the measurement due to the necessity of a large space or fluctuation from the outside of each device, for example, thermal deformation due to vibration or temperature change of the installation portion.

In each of the apparatuses shown in FIGS. 8 (a) to 8 (c), when the temperature chamber 2 or the base 3 is deformed due to a temperature change,
In particular, when the member to be measured 1 is deformed so as to be inclined, an accurate linear expansion coefficient of the member to be measured 1 cannot be measured.

Further, only the coefficient of linear expansion in one direction of the member to be measured 1 can be measured.

Also, it has been difficult to measure the coefficient of linear expansion of a thin plate that is deformed in an out-of-plane (up-down) direction in response to a temperature change.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a linear expansion coefficient measuring apparatus capable of more accurately measuring the linear expansion coefficient of a large-sized member or an actual structural member with a small error. It is an object.

[0012]

SUMMARY OF THE INVENTION The present invention provides a base made of zero-expansion glass, and a support means provided on the base and made of zero-expansion glass for supporting a member to be measured. And, a measurement plate composed of zero expansion glass provided in the direction to be measured with respect to the member to be measured,
A non-contact type displacement meter provided on the base for measuring the displacement of the measuring plate, a heating means for heating the member to be measured, a temperature measuring means for measuring the temperature of the member to be measured, and a temperature change of the member to be measured And a measuring and calculating means for calculating a linear expansion coefficient of the member to be measured from a displacement of the measuring plate due to elongation caused by the expansion.

[0013] Further, a measuring plate is provided at least at both ends of the member to be measured, and a displacement gauge is provided for each of the measuring plates.
Are provided one by one.

Further, the apparatus further comprises axial fixing means made of zero-expansion glass for preventing movement of one end of the member to be measured in the direction to be measured, and the measuring plate is provided on the opposite side of the axial fixing means. Have been.

[0015] The support means has a V-shaped support surface for supporting the member to be measured.

Further, the heating means includes a sheet heater which covers the entire peripheral surface of the member to be measured.

Further, the heating means includes a cylinder for housing the member to be measured therein, and a sheet heater for covering the entire peripheral surface of the cylinder.

Further, the heating means has a cylindrical sheet heater for accommodating the member to be measured therein, and a vacuum chamber for accommodating the sheet heater therein and having a vacuum state therein. And

Further, the apparatus further comprises a constant temperature and humidity means for keeping the member to be measured at a constant temperature and constant humidity, and a weighing scale for measuring the weight of the member to be measured. The swelling coefficient of the member to be measured is calculated from the displacement of the measurement plate.

Further, the base has a structure in which the displacement meter can be installed in a plurality of directions.

Further, the support means has a structure for enclosing the member to be measured in the center portion to suppress deformation of the member to be measured in the vertical direction, and the measuring plate has a knife edge shape at one end and the other end at the other end. Has a lambda shape whose end is a columnar shape.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIG. 1 is a view showing a linear expansion coefficient measuring apparatus according to Embodiment 1 of the present invention. FIG. 1A is a front view of the present apparatus, and FIG.
FIG. 1C is a sectional view taken along line AA in FIG. 1A, and FIG. 1C is a right side view. In FIG. 1, reference numeral 1 denotes a member to be measured whose linear expansion coefficient is to be measured. In the example of FIG. 1, the member has a columnar shape and a considerably long dimension in the longitudinal direction. It has a size that cannot be put in the tank 2. 15 has a linear expansion coefficient of 0.1 p
A base made of zero-expansion glass of less than pm / ° C.
Is a support device (support means) made of zero-expansion glass that is provided on the base 15 and supports the member 1 to be measured. As shown in FIG. 1B, the support device 16 is formed of a V-block having a V-shaped support surface for supporting the cylindrical member 1 to be measured. The support device 16 supports the measured member 1 at the center by using a V-shaped support surface,
It is configured so that it is horizontal in the longitudinal direction and does not change vertically in response to a temperature change. Numeral 17 denotes two flat disk-shaped zero-expansion glass measurement plates provided at both ends of the member 1 to be measured. Reference numeral 18 denotes a measurement accuracy of 0.5 provided at both ends of the base 15 for measuring the position of the measurement plate 17.
It is a non-contact type displacement meter within μm, and is composed of, for example, a laser type or eddy current type displacement meter. Reference numeral 19 denotes a sheet heater (heating means) for directly heating the member 1 to be measured. The seat heater 19 is a temperature controller (not shown) for controlling the temperature of the seat heater 19.
As shown in FIG. 1, it is directly attached to the member to be measured 1 and covers the entire peripheral surface of the member to be measured 1. Both surfaces of the seat heater 19 are covered with a sheet-like heat insulating material 19a. Reference numeral 4 denotes a thermocouple (temperature measuring means) attached to the measured member 1 for measuring the temperature of the measured member 1. 6 calculates the displacement of the measurement plate 17 due to the temperature change of the measured member 1, that is, the elongation of the measured member 1, based on the temperature measurement result by the thermocouple 4 and the position measurement result of the measurement plate 17 by the displacement meter 18. Measurement operation device (measurement operation means).

Next, the operation of the present apparatus will be described. In FIG. 1, a support device 16 made of zero-expansion glass having a V-shaped support surface for supporting a member to be measured 1 on a base 15 made of zero-expansion glass having a linear expansion coefficient of less than 0.1 ppm / ° C. Is installed, the member 1 to be measured is placed on the support device 16, and the temperature of the seat heater 9 is increased.
The member to be measured 1 is heated. The temperature of the member 1 to be measured is measured by a thermocouple 4 attached to the member 1 to be measured.
The displacement of the measurement plate 17 is measured by the displacement meter 18, and from these measurement results, the elongation of the member 1 to be measured is calculated using the measurement calculation device 6, and the coefficient of linear expansion is measured.

As described above, in the apparatus for measuring the coefficient of linear expansion of the present invention, since it is not necessary to heat the entire member 1 to be measured in the constant temperature bath 2 as in the prior art, the large member 1 to be measured can be measured. Can be realized.

Since the temperature of the member 1 to be measured can be directly controlled by the heat heater 19 instead of controlling only the temperature in the thermostat 2 as in the prior art, It is easy to make the temperature uniform, so that a more accurate measurement of the linear expansion coefficient is possible.

Conventionally, a strain gauge or a contact type displacement meter installed in the thermostat 2 is used.
However, in the present invention, the displacement gauge 18 is a non-contact type and is not installed in a thermostat. Since the displacement meter 18 itself is not heated and no error occurs in the displacement meter 18 itself, the accurate linear expansion coefficient can be measured.

In the conventional apparatus shown in FIG. 8 (c), since the thermostat, the laser beam oscillating device, and the detector need to be placed at different places, a large space is required and A large error may occur in the measurement due to fluctuations from the outside of the device, for example, thermal deformation due to vibration of the installation portion or temperature change. In the present invention, the displacement gauges 18 are provided at both ends of the member 1 to be measured. Since it is only necessary to simply install it, it is possible to save space, and since it is installed in the same place, it is possible to maintain high measurement accuracy without causing a large error in measurement.

In each of the conventional devices shown in FIGS. 8 (a) to 8 (c), when the constant temperature bath or the base is deformed due to the temperature change, and particularly when the member 1 to be measured is deformed inclining, Although the accurate linear expansion coefficient of the measuring member 1 could not be measured, in the present invention, since the member to be measured 1 is supported using the supporting device 16 having the V-shaped supporting surface, even if the supporting device 16 is Even if it is slightly deformed due to a temperature change, it does not greatly affect the measurement.

In the conventional apparatus, the member to be measured 1
Although the linear expansion coefficient can be measured only in a certain direction, in the present invention, the linear expansion coefficient in any direction of the measured member 1 can be measured.

It is also possible to measure the coefficient of linear expansion of a thin plate that deforms in an out-of-plane (up-down) direction in response to a temperature change.

Embodiment 2 FIG. 2 is a diagram showing a linear expansion coefficient measuring device according to Embodiment 2 of the present invention. FIG.
FIG. 2A is a front view of the apparatus, FIG.
(C) is a right side view. In FIG. 2, reference numeral 20 denotes a cylinder that covers the measured member 1, has a diameter larger than the diameter of the measured member 1, and is installed in a non-contact state with the measured member 1. Reference numeral 19A denotes a sheet heater connected to a temperature control device (not shown), the surface of which is covered with a sheet-like heat insulating material, and covers the entire peripheral surface of the cylinder 20. Other configurations are the same as those in the above-described first embodiment, and a description thereof will not be repeated. The length of the tube 20 in the longitudinal direction is longer than the member 1 to be measured.

Next, the operation will be described. In the linear expansion coefficient measuring apparatus according to the present embodiment, a tube 20 is provided on a base 15 and a V
A support device 16 having a U-shaped support surface is provided, on which the member to be measured 1 is mounted. In this state, by raising the temperature of the seat heater 19A, the cylinder 20
The temperature in the inside is increased, and the member to be measured 1 is heated to perform measurement. Note that other operations are the same as those in the first embodiment, and a description thereof will not be repeated.

In the present embodiment, the same effects as those of the first embodiment can be obtained. Further, as described above, the cylinder 20 covering the member to be measured and the heat sheeter 19A covering the entire peripheral surface of the cylinder 20 are provided. And use
It is possible to accurately measure the linear expansion coefficient under a uniform temperature condition even with the measured member 1 having a configuration or a shape in which the sheet heater 19A cannot be directly adhered.

Embodiment 3 FIG. 3 is a diagram showing a linear expansion coefficient measuring device according to Embodiment 3 of the present invention. FIG.
FIG. 3A is a front view of the present apparatus, FIG.
(C) is a left side view. In the figure, 21 is the base 1
5 is an axial fixing device made of zero-expansion glass that prevents movement of one end of the member 1 to be measured in the axial direction (that is, the direction in which the displacement is measured). Reference numeral 17A denotes a measurement plate made of zero-expansion glass provided on the opposite side of the axial fixing device 21. The other configuration is the same as that of the first embodiment, and the description is omitted here.

Next, the operation will be described. In the present embodiment, measurement is performed by basically the same operation as in the above-described first embodiment, but in this embodiment, an axial fixing device 21 is provided on one end surface of the member 1 to be measured. Therefore, the position of the end face does not change. Therefore, all the elongations of the measured member 1 due to the temperature rise can be detected by the displacement of the measuring plate 17A on the opposite side of the axial fixing device 21. Other operations are the same as those in the first embodiment, and a description thereof will not be repeated.

In this embodiment, the same effects as those of the first embodiment can be obtained, and an axial fixing device made of zero-expansion glass for preventing one end of the member 1 to be measured from moving in the axial direction. Since one end 21 is provided to prevent the movement of the one end, only one displacement gauge 18 needs to be provided, so that the configuration can be simplified and the cost can be reduced. Since only displacement is measured, the amount of processing data is halved, and the processing time can be shortened.

Embodiment 4 FIG. FIG. 4 is a diagram showing a linear expansion coefficient measuring apparatus according to Embodiment 4 of the present invention. FIG.
4A is a front view of the apparatus, FIG. 4B is a sectional view, and FIG.
(C) is a right side view. In the figure, reference numeral 22 denotes a vacuum chamber which is formed in a cylindrical shape so as to cover the member to be measured 1 and is configured to be in a vacuum state. The vacuum chamber 22 includes a seat heater 19B and a temperature controller (not shown). As shown in FIG. 4B, a sheet-like heat insulating material 19a is provided on the surface of the heat heater 19B on the side of the member to be measured 1. Further, as shown in FIG. 4B, another heat insulating material 1 formed in a cylindrical shape is provided between the heat insulating material 19a and the member 1 to be measured, if necessary.
9a is provided. Note that, in the present embodiment, the heat insulating material 19a and the heat sheeter 19B are provided separately from the measured member 1. Therefore, it is possible to accurately measure the linear expansion coefficient under uniform temperature conditions even for a member to be measured to which a heat sheeter or the like cannot be directly attached.

Next, the operation will be described. In the present embodiment, as shown in FIG. 4, a vacuum chamber 22 is provided on a base 15, a support device 16 having a V-shaped support surface is installed therein, and a member to be measured is placed thereon. 1
Is installed. In this state, the seat heater 19B
Is raised, the temperature in the vacuum chamber 22 is raised, and the member to be measured 1 is heated to perform measurement. Note that other operations are the same as those in the first embodiment, and a description thereof will not be repeated.

In this embodiment, the same effects as those of the above-described first and second embodiments can be obtained.
A vacuum chamber 22 provided with a seat heater 19B and a temperature controller, and formed in a cylindrical shape so as to cover the member 1 to be measured;
Is used, the measurement of the linear expansion coefficient of the measured member 1 in a vacuum environment and the measurement of the linear expansion coefficient in a low temperature environment can be realized.

Embodiment 5 FIG. 5 is a diagram showing a linear expansion coefficient measuring device according to a fifth embodiment of the present invention. In the figure, reference numeral 23 denotes a constant-temperature and constant-humidity device for installing the member to be measured 1 suspended therein. Constant temperature and humidity device 23
Inside is always kept at a constant temperature and humidity. Reference numeral 24 denotes a weighing scale for measuring the weight of the member 1 to be measured. As shown in FIG. 5, the weight scale 24 in the present embodiment
The member to be measured 1 is slidably connected to a sheave (pulley) 30 via a rope 32. Other configurations are denoted by the same reference numerals as those in the first embodiment, and description thereof is omitted here.

Next, the operation will be described. In FIG. 5, a pair of displacement gauges 18 is attached to a base 15 made of zero-expansion glass having a linear expansion coefficient of less than 0.1 ppm / ° C., and a constant temperature and humidity apparatus 23 is provided between the displacement gauges 18. . The member to be measured 1 is suspended by a rope 32 in the thermo-hygrostat 23 as shown in the figure. Measuring plates 17 are attached to both ends of the member 1 to be measured, and the displacement of the measuring plate 17 due to a change in the weight of the member 1 to be measured, that is, elongation, is calculated and obtained by the measuring and calculating device 6. In this embodiment, the elongation of the member to be measured due to a change in weight, that is, the swelling coefficient can be measured.

In this embodiment, the thermo-hygrostat 2
3 and the weight scale 24 are added to suspend the member to be measured 1 in the thermo-hygrostat 23 to measure the elongation of the member to be measured 1 due to a change in weight, so that the swelling coefficient can be measured. . In the present embodiment, an example in which measurement is performed in a constant temperature state has been described. However, the present invention is not limited to this case, and the measurement is performed by heating the member to be measured 1 with a heat sheeter or the like as in the above-described embodiment. You may do so.

Embodiment 6 FIG. FIG. 6 is a diagram showing a linear expansion coefficient measuring device according to Embodiment 6 of the present invention. FIG.
6A is a front view, and FIG. 6B is a plan view. In the figure, reference numeral 25 denotes a linear expansion coefficient at which a non-contact type displacement meter 18 can be installed in a plurality of directions at angles of 0.1 ppm.
It is a base made of zero-expansion glass of less than / ° C. Base 25
In the example of FIG. 6, displacement meters 18 are installed in four directions at an angle of 90 ° to each other. In the present embodiment, the member to be measured 1 has a circular plate shape,
Measuring plates 17 are provided at a plurality of locations on the side surface of the member to be measured, that is, in directions forming a plurality of angles. Displacement gauges 18 are provided so as to correspond one-to-one with each measurement plate 17.
Is provided. In FIG. 6, 19C is a seat heater provided on the peripheral surface of the member to be measured,
It is connected to a temperature controller (not shown), and its surface is covered with a sheet-like heat insulating material. Other configurations are the same as those in the above-described first embodiment, and a description thereof will not be repeated.

Next, the operation will be described. In the first embodiment, measurement is performed by basically the same operation as in the first embodiment. That is, the member 1 to be measured is heated by increasing the temperature of the sheet heater 19C, and the member 1 to be measured is heated.
Is measured by the thermocouple 4, and the displacement of the measuring plate 17 due to the temperature rise of the member to be measured, that is, the elongation is calculated and obtained by the measurement calculating device 6.

In the present embodiment, the same effects as those of the above-described first embodiment are obtained, and further, the base 25 is used so that the displacement meter can be installed in a plurality of directions. The coefficient of linear expansion of the member to be measured in a plurality of directions can be measured.

Embodiment 7 FIG. FIG. 7 is a diagram showing a linear expansion coefficient measuring apparatus according to Embodiment 7 of the present invention. In the drawing, reference numeral 27 denotes a thin plate-shaped member to be measured whose linear expansion coefficient is to be measured. Reference numeral 28 denotes a member provided on the base 15 and supports the thin plate-shaped member to be measured 27 at the center thereof. This is a supporting device made of zero-expansion glass that suppresses deformation of the member 27 in the out-of-plane (vertical) direction. 29 are attached to both sides of the member to be measured 27, and as shown in an enlarged perspective view in FIG.
The measuring end 29a has a knife edge shape and the other end 29b
Is a measurement plate made of zero-expansion glass having a λ shape which is a cylindrical shape. 4 is a thermocouple for measuring the temperature of the member to be measured 27, and 6 is a measuring plate 29 for measuring a temperature change of the member to be measured 27.
This is a measurement and calculation device that calculates the displacement of, that is, elongation. In the present embodiment, a sheet heater 19D whose surface is covered with a sheet-like heat insulating material is provided as shown in FIG.
As shown in FIG. 8, the support device 28 is attached so as to cover the entire surface. Other configurations are the same as those in the above-described embodiment, and are denoted by the same reference numerals, and description thereof is omitted here.

Next, the operation will be described. In the present embodiment, the member to be measured 27 is heated via the support device 28 by increasing the temperature of the seat heater 19D, and the temperature of the member to be measured 27 is measured by the thermocouple 4,
The displacement of the measurement plate 29 due to the temperature rise of the member to be measured 27, that is, the elongation, is calculated and obtained by the measurement calculation device 6.

In the present embodiment, a thin plate-like measurement target member 27 whose linear expansion coefficient is to be measured is placed on a base 15 made of zero expansion glass having a linear expansion coefficient of less than 0.1 ppm / ° C.
Is supported at the center, and a supporting device 28 made of zero-expansion glass for suppressing the deformation of the member to be measured 27 in the out-of-plane (vertical) direction. By providing a measuring plate 29 made of zero-expansion glass having a cylindrical shape at the other end and slidable in the horizontal direction, a linear expansion coefficient of a thin plate shape that is deformed in an out-of-plane (vertical) direction in response to a temperature change. Can be measured.

[0049]

According to the present invention, there is provided a base made of zero-expansion glass, support means provided on the base and made of zero-expansion glass for supporting a member to be measured, A measurement plate made of zero-expansion glass provided in the direction to be measured with respect to the member, a non-contact type displacement meter provided on the base and measuring the displacement of the measurement plate, and heating the member to be measured Heating means, temperature measuring means for measuring the temperature of the member to be measured, and measurement calculating means for calculating the linear expansion coefficient of the member to be measured from the displacement of the measuring plate due to elongation due to the temperature change of the member to be measured. Because it is a linear expansion coefficient measuring device, it can measure the linear expansion coefficient of a large member that cannot fit in the constant temperature bath without using the conventional constant temperature bath. The measurement can be performed

Further, the measuring plates are provided at least at both ends of the member to be measured, and the displacement meter is provided for each of the measuring plates.
Since the linear expansion coefficients are provided one by one, the measurement of the linear expansion coefficient of the large member can be performed with less influence of the error of the measurement plate.

Further, there is further provided an axial fixing means made of zero-expansion glass for preventing the movement of one end of the member to be measured in the direction to be measured, and the measuring plate is provided on the opposite side of the axial fixing means. As a result, the number of non-contact type displacement meters can be reduced.

Further, since the support means has a V-shaped support surface for supporting the member to be measured, it is not necessary to fix the member to be measured to the base, which improves the workability and convenience. Can be planned.

Further, the heating means is provided with a sheet heater which covers the entire peripheral surface of the member to be measured.
The member to be measured is uniformly heated, and the accurate linear expansion coefficient can be measured.

Further, since the heating means is provided with a tube for accommodating the member to be measured and a sheet heater covering the entire peripheral surface of the tube, the heating means is such that the sheet heater cannot be directly attached. The accurate linear expansion coefficient can be measured under uniform temperature conditions even with the measuring member.

Further, the heating means has a cylindrical seat heater for accommodating the member to be measured therein, and a vacuum chamber for accommodating the seat heater therein and having a vacuum state therein. Therefore, the linear expansion coefficient of the member to be measured can be measured in a vacuum environment and the linear expansion coefficient can be measured in a low temperature environment.

Further, the apparatus further comprises a constant temperature and humidity means for keeping the member to be measured at a constant temperature and humidity, and a weighing scale for measuring the weight of the member to be measured. Since the swelling coefficient of the member to be measured is calculated from the displacement of the measuring plate, it can be used as a swelling coefficient measuring device.

Further, since the base has a configuration in which the displacement meter can be installed in a plurality of directions, the linear expansion coefficients of the member to be measured in a plurality of directions can be measured.

Further, the supporting means has a structure in which the member to be measured is sandwiched in the central portion to suppress the deformation of the member to be measured in the vertical direction, and the measuring plate has a knife edge shape at one end and the other end at the other end. Has a cylindrical shape at its end, so that a linear expansion coefficient of a thin plate shape that deforms in an out-of-plane (up-down) direction in response to a temperature change can be measured.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a linear expansion coefficient measuring device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a linear expansion coefficient measuring device according to a second embodiment of the present invention.

FIG. 3 is a diagram illustrating a configuration of a linear expansion coefficient measuring device according to a third embodiment of the present invention.

FIG. 4 is a diagram illustrating a configuration of a linear expansion coefficient measuring device according to a fourth embodiment of the present invention.

FIG. 5 is a diagram showing a configuration of a linear expansion coefficient measuring device according to a fifth embodiment of the present invention.

FIG. 6 is a diagram showing a configuration of a linear expansion coefficient measuring device according to a sixth embodiment of the present invention.

FIG. 7 is a diagram showing a configuration of a linear expansion coefficient measuring device according to a seventh embodiment of the present invention.

FIG. 8 is a view showing a conventional linear expansion coefficient measuring device.

[Explanation of symbols]

1,27 measured member, 2 thermostat, 3,15,25
Base, 4 thermocouples, 5 strain gauges, 6 measurement and calculation device,
7 Contact type displacement meter, 8 Interferometer, 9 Reflector, 10
Window glass, 11 laser beam oscillator, 12 incident beam, 13 reflected beam, 14 detector, 16, 26,
28 support device, 17, 29 measuring plate, 18 non-contact type displacement gauge, 19, 19A, 19B, 19C, 19D seat heater, 20 cylinder, 21 axial fixing device, 22
Vacuum chamber, 23 thermo-hygrostat, 24 scale.

Claims (10)

[Claims] 1. A base made of zero-expansion glass, support means provided on the base, and made of zero-expansion glass for supporting a member to be measured to be measured, A measuring plate made of zero-expansion glass provided in the direction to be measured, a non-contact type displacement meter provided on the base, and measuring a displacement of the measuring plate; and heating the member to be measured. Heating means for measuring, a temperature measuring means for measuring the temperature of the member to be measured, and a measurement operation for calculating a linear expansion coefficient of the member to be measured from a displacement of the measuring plate due to elongation accompanying a temperature change of the member to be measured. And a linear expansion coefficient measuring device. 2. The apparatus according to claim 1, wherein the measuring plates are provided at least at both ends of the member to be measured, and one displacement meter is provided for each of the measuring plates. Linear expansion coefficient measuring device. 3. An axial fixing means made of zero-expansion glass for preventing movement of one end of the member to be measured in a direction to be measured, wherein the measuring plate is opposite to the axial fixing means. The linear expansion coefficient measuring device according to claim 1, wherein the linear expansion coefficient measuring device is provided on a side. 4. The linear expansion coefficient measuring device according to claim 1, wherein said supporting means has a V-shaped supporting surface for supporting said member to be measured. 5. The linear expansion coefficient measuring apparatus according to claim 1, wherein the heating means includes a sheet heater covering the entire peripheral surface of the member to be measured. 6. The heating device according to claim 1, wherein the heating unit includes a tube accommodating the member to be measured therein, and a sheet heater covering the entire peripheral surface of the tube. The linear expansion coefficient measuring device according to 1. 7. A heating means comprises: a tubular seat heater for accommodating the member to be measured therein; and a housing for accommodating the seat heater therein, wherein the interior is brought into a vacuum state. The linear expansion coefficient measuring device according to any one of claims 1 to 4, further comprising a vacuum chamber. 8. A constant-temperature and constant-humidity means for keeping the member to be measured at a constant temperature and humidity, and a weighing scale for measuring the weight of the member to be measured, wherein the measuring and calculating means includes a change in weight of the member to be measured. 8. The linear expansion coefficient measuring apparatus according to claim 1, wherein a swelling coefficient of the member to be measured is calculated from a displacement of the measuring plate due to the elongation accompanying. 9. The linear expansion coefficient measuring device according to claim 1, wherein the base has a configuration in which the displacement meter can be installed in a plurality of directions. . 10. A structure in which said support means encloses said member to be measured at a central portion thereof to suppress deformation of said member to be measured in the vertical direction. The linear expansion coefficient measuring device according to any one of claims 1 to 9, wherein the linear expansion coefficient measuring device has a λ shape in which the other end has a cylindrical shape.