JP2002048726A - Flaw inspecting device for light scattering and transmitting sheet - Google Patents
Flaw inspecting device for light scattering and transmitting sheetInfo
- Publication number
- JP2002048726A JP2002048726A JP2000230146A JP2000230146A JP2002048726A JP 2002048726 A JP2002048726 A JP 2002048726A JP 2000230146 A JP2000230146 A JP 2000230146A JP 2000230146 A JP2000230146 A JP 2000230146A JP 2002048726 A JP2002048726 A JP 2002048726A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light scattering
- line sensor
- sensor camera
- defect inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明はシートにおける欠点
の有無を光学的に検査する技術分野に属する。特に、光
散乱透過シートにおける異物欠点と光散乱欠点の両方を
一回の検査で検出することができる欠点検査装置に関す
る。The present invention belongs to the technical field of optically inspecting sheets for defects. In particular, the present invention relates to a defect inspection apparatus capable of detecting both a foreign matter defect and a light scattering defect in a light scattering transmission sheet in one inspection.
【0002】[0002]
【従来技術】光散乱透過シートにおける主要な欠点の1
つは、光散乱特性が所定の特性から外れる欠点である。
特に、光散乱特性がシートの部分によって異なる光散乱
ムラが問題となる。また、主要な欠点の1つは、光散乱
透過シートに含まれる異物である。この異物はもともと
の材料中に含まれているもの、製造過程で付着混入する
ものが存在する。光散乱透過シートにおいては、特に光
学的特性が重要視されるため、いずれの欠点も重欠点と
見なされている。2. Description of the Related Art One of the main drawbacks of a light scattering transmission sheet is as follows.
One is that light scattering characteristics deviate from predetermined characteristics.
In particular, there is a problem of light scattering unevenness in which light scattering characteristics differ depending on the sheet portion. One of the major drawbacks is foreign matter contained in the light scattering transmission sheet. Some of these foreign substances are contained in the original material, and others are attached and mixed in the manufacturing process. In the light scattering / transmitting sheet, since the optical characteristics are particularly important, any of the drawbacks is regarded as a serious drawback.
【0003】[0003]
【発明が解決しようとする課題】この光散乱透過シート
の欠点検査は、従来は、もっぱら目視検査によって行な
われている。光散乱が存在するところで異物を検出する
ことも、微妙な光散乱そのものを検出することも、機械
検出では極めて困難なためである。しかし、人間にとっ
てこの検査は常に精神の緊張と集中を強いられ、作業負
荷が大きく、多くの時間を必要とし、費用負担も大き
い。その上、人間が検査する以上、検査基準のバラツ
キ、欠点の見逃しが避けられない。Conventionally, the defect inspection of the light-scattering and transmitting sheet is performed exclusively by visual inspection. This is because it is extremely difficult to detect a foreign substance in the presence of light scattering or to detect subtle light scattering itself by mechanical detection. However, for humans, this test is always strained and concentrated, the work load is large, it requires a lot of time, and the cost burden is large. In addition, because of the human inspection, it is inevitable that the inspection standards vary and defects are overlooked.
【0004】本発明はこのような課題を解決するために
なされたものである。その目的は、光散乱透過シートに
おける異物欠点と光散乱欠点の両方を一回の検査で高感
度にかつ高速に検出することができる欠点検査装置を提
供することにある。The present invention has been made to solve such a problem. An object of the present invention is to provide a defect inspection apparatus capable of detecting both a foreign matter defect and a light scattering defect in a light scattering transmission sheet with high sensitivity and high speed in one inspection.
【0005】[0005]
【課題を解決するための手段】上記課題は下記の本発明
によって解決される。すなわち、本発明の請求項1に係
る欠点検査装置は、移送される光散乱透過シートにおけ
る欠点の有無を検査する欠点検査装置であって、ライン
センサカメラと、ライン状光源を具備し、前記ラインセ
ンサカメラは、ライン状の撮像領域を有するカメラであ
って、前記光散乱透過シートの移送方向と直角方向に走
査を行い前記光散乱透過シートを撮像して撮像信号を出
力し、前記ライン状光源は、前記ラインセンサカメラが
前記散乱透過シートを散乱透過する光線によって撮像す
るためのライン状の発光領域を有する光源であって、そ
の発光領域の方向と前記撮像領域の方向は平行方向であ
り、前記光散乱透過シートの非撮像側の位置に前記ライ
ンセンサカメラの撮像光軸の延長上から離れて設けられ
るようにしたものである。The above object is achieved by the present invention described below. That is, a defect inspection apparatus according to claim 1 of the present invention is a defect inspection apparatus that inspects for the presence or absence of a defect in a light-scattering and transmitting sheet to be transported, and includes a line sensor camera and a linear light source. The sensor camera is a camera having a linear imaging area, and scans the light scattering transmission sheet in a direction perpendicular to the transport direction of the light scattering transmission sheet to image the light scattering transmission sheet and output an image signal, and outputs the image signal. Is a light source having a linear light-emitting area for the line sensor camera to capture an image by light rays scattered and transmitted through the scattered transmission sheet, the direction of the light-emitting area and the direction of the imaging area are parallel directions, The light scattering transmission sheet is provided at a position on the non-imaging side of the light scattering transmission sheet, away from an extension of an imaging optical axis of the line sensor camera.
【0006】本発明によれば、光散乱透過シートの移送
方向と直角方向の走査を行って光散乱透過シートを撮像
するラインセンサカメラと、そのラインセンサカメラが
散乱透過シートを散乱透過する光線によって撮像するた
めのライン状の発光領域を有するライン状光源により欠
点検査装置が構成されている。この構成により、光散乱
透過シートにおける異物欠点と光散乱欠点の両方が一回
の検査で高感度にかつ高速に検出される。According to the present invention, a line sensor camera that scans a light scattering transmission sheet by scanning in a direction perpendicular to the transport direction of the light scattering transmission sheet, and the line sensor camera uses a light beam scattered and transmitted through the scattering transmission sheet. A defect inspection apparatus is constituted by a linear light source having a linear light emitting region for imaging. With this configuration, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet are detected with high sensitivity and high speed in one inspection.
【0007】また本発明の請求項2に係る欠点検査装置
は、請求項1記載の欠点検査装置において、帯状調光部
材を具備しており、その帯状調光部材は、前記光散乱透
過シートの背面側から前記ラインセンサカメラの撮像領
域に入射する光線を調整するための帯状の部材であっ
て、その部材の方向と前記撮像領域の方向は平行方向で
あり、前記ラインセンサカメラの撮像光軸の延長上に設
けられるようにしたものである。本発明によれば、光散
乱透過シートにおける異物欠点と光散乱欠点の両方がよ
り高い感度で検出される。A defect inspection apparatus according to a second aspect of the present invention is the defect inspection apparatus according to the first aspect, further comprising a belt-like dimming member, and the belt-like dimming member is provided on the light scattering transmission sheet. A band-shaped member for adjusting a light beam incident on an imaging region of the line sensor camera from the back side, wherein a direction of the member and a direction of the imaging region are parallel to each other, and an imaging optical axis of the line sensor camera. It is designed to be provided on an extension of. According to the present invention, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet are detected with higher sensitivity.
【0008】また本発明の請求項3に係る欠点検査装置
は、請求項2に係る欠点検査装置において、前記帯状調
光部材は黒色かつマット状の表面を有する部材であるよ
うにしたものである。本発明によれば、光散乱透過シー
トにおける異物欠点と光散乱欠点の両方がより一層の高
い感度で検出される。According to a third aspect of the present invention, there is provided the defect inspection apparatus according to the second aspect, wherein the belt-like dimming member is a member having a black and mat-like surface. . According to the present invention, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet are detected with even higher sensitivity.
【0009】また本発明の請求項4に係る欠点検査装置
は、請求項1〜3に係る欠点検査装置において、前記ラ
インセンサカメラの撮像光軸と前記光散乱透過シートの
表面との成す角度は∠20°〜∠70°の鋭角となる範
囲であり、前記ライン状光源は前記鋭角を反対側から見
込む側の位置に設けられ、前記帯状調光部材はその表面
が前記光散乱透過シートの表面と平行となるように設け
られるようにしたものである。本発明によれば、光散乱
透過シートにおける異物欠点と光散乱欠点の両方が極め
て高い感度で検出される。The defect inspection apparatus according to a fourth aspect of the present invention is the defect inspection apparatus according to the first to third aspects, wherein the angle formed between the imaging optical axis of the line sensor camera and the surface of the light scattering transmission sheet is The angle range is an acute angle of ∠20 ° to ∠70 °, the line-shaped light source is provided at a position where the acute angle is viewed from the opposite side, and the band-shaped light control member has a surface that is a surface of the light scattering transmission sheet. It is provided so as to be parallel to. According to the present invention, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet are detected with extremely high sensitivity.
【0010】また本発明の請求項5係る欠点検査装置
は、請求項1〜4に記載の欠点検査装置において、デー
タ処理部を具備し、そのデータ処理部は、すくなくとも
前記光散乱透過シートにおける異物欠点を検出する処理
と光散乱欠点を検出する処理を行い、検出結果を欠点内
容が判るように出力するようにしたものである。本発明
によれば、欠点内容が判るように検出結果が出力され
る。A defect inspection apparatus according to a fifth aspect of the present invention is the defect inspection apparatus according to any one of the first to fourth aspects, further comprising a data processing unit, wherein the data processing unit is provided with at least foreign matter in the light scattering transmission sheet. A process for detecting a defect and a process for detecting a light scattering defect are performed, and the detection result is output so that the content of the defect can be recognized. According to the present invention, the detection result is output so that the contents of the defect can be understood.
【0011】[0011]
【発明の実施の形態】次に、本発明について実施の形態
を説明する。本発明の欠点検査装置における検出系の構
成の一例を図1に示す。図1において、1はラインセン
サカメラ、2はライン状光源、3は帯状聴講部材、10
0は光散乱透過シートである。また、矢印(→)は光散
乱透過シート100の移送方向を示す。光散乱透過シー
ト100は、図1においては、左側から右側に移送され
ているが、この移送方向は逆方向であっても同様で差異
がない。Next, an embodiment of the present invention will be described. FIG. 1 shows an example of a configuration of a detection system in the defect inspection apparatus of the present invention. In FIG. 1, 1 is a line sensor camera, 2 is a linear light source, 3 is a belt-like listening member, 10
0 is a light scattering transmission sheet. Further, an arrow (→) indicates a transfer direction of the light scattering transmission sheet 100. The light scattering transmission sheet 100 is transported from the left side to the right side in FIG. 1, but there is no difference even if the transport direction is reversed.
【0012】ラインセンサカメラ1はライン状の撮像領
域を有するカメラである。たとえば、多数の(500〜
5000程度の)受光画素を一次元に配列したCCD
(charge coupled device)型、MOS(metal oxide s
emiconductor)型、等の光センサを用いたカメラであ
る。このラインセンサカメラ1はその一次元に配列した
受光画素の走査を行って撮像信号を出力する。図1に示
すように、ラインセンサカメラ1はその走査方向が光散
乱透過シート100の移送方向に対して直角方向となる
ように検出系において設置されている。The line sensor camera 1 is a camera having a linear imaging area. For example, many (500-
CCD with one-dimensionally arranged light receiving pixels (about 5000)
(Charge coupled device) type, MOS (metal oxide s)
It is a camera using an optical sensor of the (emiconductor) type. The line sensor camera 1 scans the one-dimensionally arranged light receiving pixels and outputs an imaging signal. As shown in FIG. 1, the line sensor camera 1 is installed in the detection system such that the scanning direction is perpendicular to the transport direction of the light scattering transmission sheet 100.
【0013】ラインセンサカメラ1の撮像光軸と光散乱
透過シート100の表面との成す角度は∠20°〜∠7
0°の鋭角となる範囲とすると多くの種類の光散乱透過
シート100において好適である。この範囲における具
体的な値は、検査対象となる光散乱透過シート100に
応じて適正に決められる。このように設置することよ
り、光散乱透過シート100における異物欠点と光散乱
欠点の両方を高い感度で検出することが可能となる。The angle formed by the image pickup optical axis of the line sensor camera 1 and the surface of the light scattering transmission sheet 100 is between ∠20 ° and ∠7.
A range where the angle becomes an acute angle of 0 ° is suitable for many types of light scattering and transmitting sheets 100. Specific values in this range are appropriately determined according to the light scattering transmission sheet 100 to be inspected. With this arrangement, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet 100 can be detected with high sensitivity.
【0014】ライン状光源2はライン状の発光領域を有
する光源である。たとえば、蛍光灯、ネオン管、キセノ
ンランプ、ハロゲンランプ、等の直管形状の光源を適用
できる。また、光ファイバー、光伝達部材、レンズ、等
を用いて直線状の発光領域を形成したものを適用でき
る。また、LED(light emitting diode)のような点
光源を一次元に配列して擬似的に直線状の発光領域を形
成したものを適用できる。The linear light source 2 is a light source having a linear light emitting area. For example, a straight tube light source such as a fluorescent lamp, a neon tube, a xenon lamp, and a halogen lamp can be used. In addition, an optical fiber, a light transmission member, a lens, or the like, in which a linear light-emitting region is formed can be used. Further, a point light source such as an LED (light emitting diode) may be arranged one-dimensionally to form a pseudo linear light emitting region.
【0015】このライン状光源2はその発光領域の方向
とラインセンサカメラ1撮像領域の方向とが平行方向と
なるように設置される。また、ライン状光源2はライン
センサカメラ1が散乱透過シート100を散乱透過する
光線によって撮像するための光源である。したがって、
図1に示すように、光散乱透過シート100の非撮像側
の位置に設置されている。The line light source 2 is installed so that the direction of the light emitting area and the direction of the image sensing area of the line sensor camera 1 are parallel. Further, the linear light source 2 is a light source for the line sensor camera 1 to capture an image with light rays scattered and transmitted through the scattering transmission sheet 100. Therefore,
As shown in FIG. 1, the light scattering transmission sheet 100 is installed at a position on the non-imaging side.
【0016】また、図1に示すように、ライン状光源2
は、前述のラインセンサカメラ1の撮像光軸と光散乱透
過シート100の表面とが成す鋭角を反対側から見込む
側の位置に設置されている。また、ライン状光源2はラ
インセンサカメラ1の撮像光軸の延長上から離れて設置
されている。このように設置することより、光散乱透過
シート100における異物欠点と光散乱欠点の両方を高
い感度で検出することが可能となる。Also, as shown in FIG.
Is installed at a position where the acute angle formed by the imaging optical axis of the line sensor camera 1 and the surface of the light scattering transmission sheet 100 is viewed from the opposite side. In addition, the linear light source 2 is set apart from the extension of the imaging optical axis of the line sensor camera 1. With this arrangement, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet 100 can be detected with high sensitivity.
【0017】帯状調光部材3は光散乱透過シート100
の背面側からラインセンサカメラ1の撮像領域に入射す
る光線を調整するための帯状の部材である。図1に示す
ように、その帯状調光部材3の方向と撮像領域の方向は
平行方向となるように、また、ラインセンサカメラ1の
撮像光軸の延長上となるように設置されている。The band-shaped light control member 3 is made of a light scattering transmission sheet 100.
Is a band-shaped member for adjusting a light beam incident on the imaging area of the line sensor camera 1 from the back side of the camera. As shown in FIG. 1, the direction of the band-shaped light control member 3 and the direction of the imaging region are set so as to be parallel to each other, and the extension of the imaging optical axis of the line sensor camera 1 is provided.
【0018】帯状調光部材3は黒色かつマット状の表面
とすると好適である。また、帯状調光部材3はその表面
が光散乱透過シート1の表面と平行となるように設置す
ると好適である。このようにすることにより、帯状調光
部材3による光線の調整を効果的に行なうことができ
る。その結果として、光散乱透過シート100における
異物欠点と光散乱欠点の両方を高い感度で検出すること
が可能となる。It is preferable that the belt-shaped light control member 3 has a black and mat-like surface. Further, it is preferable that the belt-shaped light control member 3 is installed so that its surface is parallel to the surface of the light scattering and transmitting sheet 1. By doing so, the adjustment of the light beam by the belt-shaped light control member 3 can be performed effectively. As a result, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet 100 can be detected with high sensitivity.
【0019】ラインセンサカメラ1のライン状の撮像領
域に入射する光線は、ライン状光源2が発する光線によ
っている。しかし、光散乱透過シート100が、その光
線を散乱し透過するため、撮像領域に入射する光線は、
極めて複雑な光線となる。上述の配置によれば、ライン
状光源2が発する光線をラインセンサカメラ1は直接的
には撮像しない(直接的には受光しない)。ラインセン
サカメラ1が撮像するのは光散乱透過シート100であ
る。しかし、光散乱の程度にもよるが、同時に光散乱透
過シート100の背景側も撮像している。光散乱透過シ
ート100が極めて光散乱の小さい透明シートとみなせ
るとき、帯状調光部材3が存在するときにはラインセン
サカメラ1が撮像するのは帯状調光部材3の表面であ
る。The light rays incident on the line-shaped imaging area of the line sensor camera 1 are the light rays emitted from the linear light source 2. However, since the light scattering transmission sheet 100 scatters and transmits the light, the light incident on the imaging region is
It becomes a very complicated light beam. According to the above-described arrangement, the line sensor camera 1 does not directly image (do not directly receive) the light beam emitted by the linear light source 2. The image captured by the line sensor camera 1 is the light scattering transmission sheet 100. However, depending on the degree of light scattering, the background side of the light scattering transmission sheet 100 is also imaged at the same time. When the light scattering transmission sheet 100 can be regarded as a transparent sheet having extremely small light scattering, when the band-shaped light control member 3 is present, it is the surface of the band light control member 3 that the line sensor camera 1 captures.
【0020】この帯状調光部材3の表面には光散乱透過
シート100の広い領域から散乱する光線が達してい
る。すなわち、光散乱透過シート100の広い領域の光
学的な特性に影響されて帯状調光部材3の表面の明るさ
がレベル変化する、または変動することになる。その結
果、ラインセンサカメラ1の撮像信号には、ラインセン
サカメラ1が撮像しようとしている撮像領域の光学的な
特性だけでなく、光散乱透過シート100の広い領域の
影響が外乱として含まれてしまう。帯状調光部材3を黒
色かつマット状の表面とし、その表面が光散乱透過シー
ト1の表面と平行となるようにする理由の1つは、この
外乱を避けることにある。Light rays scattered from a wide area of the light scattering transmission sheet 100 reach the surface of the belt-shaped light control member 3. That is, the level of the brightness of the surface of the belt-shaped light control member 3 changes or fluctuates due to the optical characteristics of a wide area of the light scattering transmission sheet 100. As a result, the imaging signal of the line sensor camera 1 includes not only the optical characteristics of the imaging region to be imaged by the line sensor camera 1 but also the influence of a wide area of the light scattering transmission sheet 100 as a disturbance. . One of the reasons for making the belt-like light control member 3 a black and mat-like surface and making the surface parallel to the surface of the light scattering and transmitting sheet 1 is to avoid this disturbance.
【0021】勿論、帯状調光部材3は光散乱透過シート
100の背景側において発せられる光線を、ラインセン
サカメラ1が直接的には撮像しないように、その光線を
遮光する役割を有する。帯状調光部材3が存在すること
によって帯状調光部材3より奥の背景側が外乱となるこ
とを防いでいる。Of course, the belt-shaped light control member 3 has a role of blocking light emitted from the background side of the light scattering transmission sheet 100 so that the line sensor camera 1 does not directly image the light. The presence of the band-shaped light control member 3 prevents the background side behind the band-shaped light control member 3 from becoming a disturbance.
【0022】前述において、ラインセンサカメラ1はラ
イン状光源2が発する光線を直接的には撮像しないこと
を述べた。しかし、実際のライン状光源2は理想的な線
で発光する光源ではなく、相応の発光面積を有してい
る。また、光散乱透過シート100が光線を散乱し透過
するため、撮像領域に入射する光線は極めて複雑な光線
となる。したがって、ライン状光源2がラインセンサカ
メラ1の撮像光軸の延長上から離れて設置されているに
もかかわらず、ラインセンサカメラ1が撮像する光線に
は、散乱光線だけでなく実質的には直接光線とみなせる
成分が含まれることとなる。In the above, it has been described that the line sensor camera 1 does not directly capture the light beam emitted by the linear light source 2. However, the actual linear light source 2 is not a light source that emits light in an ideal line, but has a corresponding light emitting area. Further, since the light-scattering and transmitting sheet 100 scatters and transmits the light, the light incident on the imaging region is an extremely complicated light. Therefore, even though the linear light source 2 is set apart from the extension of the imaging optical axis of the line sensor camera 1, the light imaged by the line sensor camera 1 is substantially not only scattered light but also substantially scattered light. Components that can be regarded as direct rays will be included.
【0023】帯状調光部材3は、この散乱光線と直接光
線との成分比を調節することができる。帯状調光部材3
によって、ライン状光源2を隠す程度を大きくすると散
乱光線の成分比が大きくなる。帯状調光部材3によっ
て、ライン状光源2を隠す程度を小さくすると直接光線
の成分比が大きくなる。この散乱光線と直接光線との成
分比を適正にすることにより、光散乱透過シート100
における異物欠点と光散乱欠点の両方を高い感度で検出
することが可能となる。The belt-like light control member 3 can adjust the component ratio between the scattered light and the direct light. Strip light control member 3
Accordingly, when the degree of hiding the linear light source 2 is increased, the component ratio of the scattered light increases. When the degree of hiding the linear light source 2 by the band-shaped light control member 3 is reduced, the component ratio of the direct light increases. By making the component ratio between the scattered light and the direct light appropriate, the light scattering transmission sheet 100
, It is possible to detect both the foreign matter defect and the light scattering defect with high sensitivity.
【0024】次に、ラインセンサカメラ1から出力され
る撮像信号の処理について説明する。本発明の欠点検査
装置における処理系の構成の一例を図2に示す。図2に
おいて図1と同一部分には同一符号を付してある。図2
において、4は処理系の本体、5は入力部、6は出力部
である。また、処理系の本体4において、41はA/D
(analog-to-digital)変換部、42は記憶部、43は
処理部である。Next, processing of an image pickup signal output from the line sensor camera 1 will be described. FIG. 2 shows an example of a configuration of a processing system in the defect inspection apparatus of the present invention. 2, the same parts as those in FIG. 1 are denoted by the same reference numerals. FIG.
, 4 is a main body of the processing system, 5 is an input unit, and 6 is an output unit. In the main body 4 of the processing system, reference numeral 41 denotes an A / D
(Analog-to-digital) conversion unit, 42 is a storage unit, and 43 is a processing unit.
【0025】本体4は、パーソナルコンピュータ、画像
処理システム、等のデータ処理装置の本体である。本発
明の欠点検査装置における処理系は、データ処理装置と
周辺機器のハードウェアとソフトウェアによって構成す
ることができる。入力部5は、オペレータが欠点検査装
置に対して、設定入力、指示入力、等を行なう部分であ
る。入力部5は、たとえばキーボード、マウス、等から
成る。出力部は、欠点検査装置における設定内容、動作
状態、検査結果、等を出力する部分である。出力部は、
たとえば、ディスプレイ、警報器、等から成る。The main body 4 is a main body of a data processing device such as a personal computer, an image processing system, or the like. The processing system in the defect inspection apparatus of the present invention can be configured by hardware and software of a data processing apparatus and peripheral devices. The input unit 5 is a part where the operator performs setting input, instruction input, and the like to the defect inspection apparatus. The input unit 5 includes, for example, a keyboard, a mouse, and the like. The output unit is a unit that outputs settings, operation states, inspection results, and the like in the defect inspection apparatus. The output part is
For example, it comprises a display, an alarm, and the like.
【0026】ラインセンサカメラ1が出力する撮像信号
は本体4のA/D変換部41によって入力が行なわれ
る。撮像信号は、ラインセンサカメラ1が光散乱透過シ
ート100の移送方向と直角方向に走査を行い光散乱透
過シートを撮像して得た撮像信号である。A/D変換部
41は、その撮像信号をディジタルデータに変換して記
憶部42に記憶する。An image signal output from the line sensor camera 1 is input by an A / D converter 41 of the main body 4. The imaging signal is an imaging signal obtained by the line sensor camera 1 scanning in the direction perpendicular to the transport direction of the light scattering transmission sheet 100 and imaging the light scattering transmission sheet. The A / D converter 41 converts the imaging signal into digital data and stores the digital data in the storage unit 42.
【0027】記憶する撮像信号における走査線(1走査
の信号)の数は1つとは限らない、検出しようとする欠
点の種類、寸法によって、同時に(関連付けて)処理す
べき走査線の数は異なる。一般的に、点状の小さな欠点
の場合には同時に処理すべき走査線の数は少なくて済
む。また、広域に及ぶ欠点の場合には同時に処理すべき
走査線の数を多くする必要性がある。The number of scanning lines (signals for one scan) in an image signal to be stored is not limited to one. The number of scanning lines to be processed simultaneously (associated) differs depending on the type and size of a defect to be detected. . In general, a small point-like defect requires fewer scan lines to be processed simultaneously. In the case of a wide area defect, it is necessary to increase the number of scanning lines to be processed simultaneously.
【0028】したがって、記憶部42に記憶されている
撮像信号のデータは、光散乱透過シート100における
特定の部位を撮像して得た2次元のデータ、すなわち画
像データである。この記憶部42に記憶されている画像
データは、光散乱透過シート100の移送にともない更
新される。連続的に更新を行なうため、たとえば、記憶
部42を2つ以上に領域分割し、新規画像データの読み
込みと欠点検出のデータ処理とが、同じ領域では同時に
は起こらないようにする。Therefore, the image signal data stored in the storage section 42 is two-dimensional data obtained by imaging a specific portion of the light scattering transmission sheet 100, that is, image data. The image data stored in the storage unit 42 is updated as the light scattering transmission sheet 100 is transported. In order to continuously update, for example, the storage unit 42 is divided into two or more areas so that reading of new image data and data processing of defect detection do not occur simultaneously in the same area.
【0029】この記憶部42に記憶されている画像デー
タに基づいて、処理部43は欠点を検出する処理を行な
う。処理部43は、すくなくとも光散乱透過シート10
0における異物欠点を検出する処理と光散乱欠点を検出
する処理を行う。異物欠点は寸法の小さいものが多い。
小さな欠点を検出する処理としては、たとえば、ラプラ
シアン・オペレータ、等を用いて画像データを微分処理
し、所定の閾値で2値化する。小さな光散乱欠点も同様
の処理で検出できる。Based on the image data stored in the storage section 42, the processing section 43 performs a process for detecting a defect. The processing unit 43 includes at least the light scattering transmission sheet 10.
A process for detecting a foreign matter defect and a process for detecting a light scattering defect at 0 are performed. Most of the foreign matter defects have small dimensions.
As a process of detecting a small defect, for example, image data is differentiated using a Laplacian operator or the like, and binarized by a predetermined threshold. Small light scattering defects can be detected by the same process.
【0030】光散乱欠点は広域に及ぶものが多い。広域
の欠点を検出処理としては、画像データに含まれる、シ
ェーディング、等の広域の撮像ムラ、等の誤差を除去す
る処理を行なって、所定の許容範囲に含まれているか否
かを判定する。大きな異物欠点も同様の処理で検出でき
る。なお基準となる画像データを検査前に得ておき、そ
れとの差分を演算することで誤差の除去と検出とを同時
に行なってもよい。Light scattering defects often cover a wide area. As a process of detecting a wide-area defect, a process of removing an error such as shading, a wide-area imaging unevenness, etc., included in the image data is performed, and it is determined whether the image data is included in a predetermined allowable range. Large foreign matter defects can be detected by the same processing. Note that the reference image data may be obtained before the inspection, and the difference between the image data and the reference image data may be calculated to simultaneously remove and detect the error.
【0031】この処理部43における検出結果は欠点内
容が判るように出力部6において出力が行なわれる。The detection result in the processing unit 43 is output in the output unit 6 so that the contents of the defect can be understood.
【0032】[0032]
【発明の効果】以上のとおりであるから、本発明の請求
項1に係る欠点検査装置によれば、光散乱透過シートに
おける異物欠点と光散乱欠点の両方を一回の検査で高感
度にかつ高速に検出することができる。また本発明の請
求項2に係る欠点検査装置によれば、光散乱透過シート
における異物欠点と光散乱欠点の両方をより高い感度で
検出することができる。また本発明の請求項3に係る欠
点検査装置によれば、光散乱透過シートにおける異物欠
点と光散乱欠点の両方をより一層の高い感度で検出する
ことができる。また本発明の請求項4に係る欠点検査装
置によれば、光散乱透過シートにおける異物欠点と光散
乱欠点の両方を極めて高い感度で検出することができ
る。また本発明の請求項5係る欠点検査装置によれば、
欠点内容が判るように検出結果を出力することができ
る。As described above, according to the defect inspection apparatus according to the first aspect of the present invention, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet can be inspected with high sensitivity in one inspection. It can be detected at high speed. Further, according to the defect inspection apparatus according to the second aspect of the present invention, both the foreign matter defect and the light scattering defect in the light scattering transmission sheet can be detected with higher sensitivity. Further, according to the defect inspection apparatus according to the third aspect of the present invention, it is possible to detect both the foreign matter defect and the light scattering defect in the light scattering transmission sheet with higher sensitivity. Further, according to the defect inspection apparatus according to claim 4 of the present invention, it is possible to detect both the foreign matter defect and the light scattering defect in the light scattering transmission sheet with extremely high sensitivity. Further, according to the defect inspection apparatus according to claim 5 of the present invention,
The detection result can be output so that the contents of the defect can be understood.
【図1】本発明の光散乱透過シートの欠点検査装置にお
ける検出系の構成の一例を示す図である。FIG. 1 is a diagram showing an example of a configuration of a detection system in a defect inspection apparatus for a light scattering transmission sheet of the present invention.
【図2】本発明の光散乱透過シートの欠点検査装置にお
ける処理系の構成の一例を示す図である。FIG. 2 is a diagram showing an example of a configuration of a processing system in the defect inspection apparatus for a light scattering transmission sheet of the present invention.
1 ラインセンサカメラ 2 ライン状光源 3 帯状聴講部材 4 処理系の本体 5 入力部 6 出力部 41 A/D 変換部 42 記憶部 43 処理部 100 光散乱透過シート DESCRIPTION OF SYMBOLS 1 Line sensor camera 2 Line-shaped light source 3 Band-shaped listening member 4 Processing system main unit 5 Input unit 6 Output unit 41 A / D conversion unit 42 Storage unit 43 Processing unit 100 Light scattering transmission sheet
Claims (5)
の有無を検査する欠点検査装置であって、ラインセンサ
カメラと、ライン状光源を具備し、 前記ラインセンサカメラは、ライン状の撮像領域を有す
るカメラであって、前記光散乱透過シートの移送方向と
直角方向に走査を行い前記光散乱透過シートを撮像して
撮像信号を出力し、 前記ライン状光源は、前記ラインセンサカメラが前記散
乱透過シートを散乱透過する光線によって撮像するため
のライン状の発光領域を有する光源であって、その発光
領域の方向と前記撮像領域の方向は平行方向であり、前
記光散乱透過シートの非撮像側の位置に前記ラインセン
サカメラの撮像光軸の延長上から離れて設けられる、 ことを特徴とする欠点検査装置。1. A defect inspection apparatus for inspecting the transferred light scattering / transmissive sheet for defects, comprising a line sensor camera and a linear light source, wherein the line sensor camera has a linear imaging area. A camera that scans in a direction perpendicular to the transport direction of the light-scattering and transmitting sheet to image the light-scattering and transmitting sheet and outputs an imaging signal; A light source having a linear light-emitting region for imaging by light rays scattered and transmitted through the sheet, wherein the direction of the light-emitting region and the direction of the imaging region are parallel to each other, and A defect inspection device, which is provided at a position away from an extension of an imaging optical axis of the line sensor camera.
状調光部材を具備し、その帯状調光部材は、前記光散乱
透過シートの背面側から前記ラインセンサカメラの撮像
領域に入射する光線を調整するための帯状の部材であっ
て、その部材の方向と前記撮像領域の方向は平行方向で
あり、前記ラインセンサカメラの撮像光軸の延長上に設
けられることを特徴とする欠点検査装置。2. The defect inspection apparatus according to claim 1, further comprising a band-shaped light control member, wherein the light beam incident on the imaging area of the line sensor camera from the back side of the light scattering transmission sheet. A defect inspection apparatus characterized in that the direction of the member and the direction of the imaging region are parallel to each other, and are provided on an extension of the imaging optical axis of the line sensor camera. .
記帯状調光部材は黒色かつマット状の表面を有する部材
であることを特徴とする欠点検査装置。3. The defect inspection apparatus according to claim 2, wherein said belt-shaped light control member is a member having a black and mat-like surface.
て、前記ラインセンサカメラの撮像光軸と前記光散乱透
過シートの表面との成す角度は∠20°〜∠70°の鋭
角となる範囲であり、前記ライン状光源は前記鋭角を反
対側から見込む側の位置に設けられ、前記帯状調光部材
はその表面が前記光散乱透過シートの表面と平行となる
ように設けられることを特徴とする欠点検査装置。4. The defect inspection apparatus according to claim 1, wherein the angle between the imaging optical axis of the line sensor camera and the surface of the light scattering transmission sheet is an acute angle of ∠20 ° to ∠70 °. Wherein the linear light source is provided at a position where the acute angle is viewed from the opposite side, and the band-shaped light control member is provided such that its surface is parallel to the surface of the light scattering transmission sheet. Defect inspection equipment.
て、データ処理部を具備し、そのデータ処理部は、すく
なくとも前記光散乱透過シートにおける異物欠点を検出
する処理と光散乱欠点を検出する処理を行い、検出結果
を欠点内容が判るように出力することを特徴とする欠点
検査装置。5. The defect inspection apparatus according to claim 1, further comprising a data processing unit, wherein the data processing unit detects at least foreign matter defects and light scattering defects in the light scattering transmission sheet. A defect inspection apparatus which performs a process of outputting the detection result so that the content of the defect can be understood.
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JP2000230146A JP4620228B2 (en) | 2000-07-31 | 2000-07-31 | Light scattering transmission sheet defect inspection device |
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