JP2001304440A - Microvalve device and manufacturing method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify a manufacturing process of a micro fluid device. SOLUTION: A one-way micro valve device or a three-way micro valve device A is formed by one or plural one-way micro valve units 3. A figure shows an example of the three-way micro valve device, where working fluid passages are respectively formed from input ports In1 and In2 and an output port Out, and joined at a center of a chip. Each passage has the one-way micro valve unit 3. The one-way micro valve unit 3 is normally closed by the contact of a membrane and a valve seat. The external driving air negative pressure is supplied through control ports C1, C2 and C3, whereby the membrane is displaced in the direction to open the one-way micro valve unit 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microvalve device manufactured by applying semiconductor fine processing technology and a manufacturing process thereof. This microvalve device can be applied to chemical analysis such as gene analysis and synthesis.

[0002]

2. Description of the Related Art Recently, a microfluidic device such as a microvalve device has been receiving attention. This is especially true in (bio) chemical technologies, including microchemical analysis systems (μTAS). In a typical design, a fine fluid passage (flow passage) is formed in a microvalve device, and a movable membrane is separated from and opened to a valve seat provided in the middle of the fluid passage. There are various methods for driving the membrane.

[0003] The point of micro valve unit design lies in the material of the membrane. Large deflections of the membrane, comparable to the dimensions of the flow path, are required for detachment from the valve seat or for fluid switching. In most cases, the deflection is tens of microns. Switching is essential for biochemical technology.

[0004] Silicone rubber is regarded as one of the main materials for microvalve unit membranes because of its low Young's modulus and excellent sealing properties. Ohori T, Shioji S, [1] are micro valve units of the type that pneumatically drive silicone rubber membranes.
Miura K and Yotumoto A 1997 Three-way microvalvefo
r blood flow contorl in medical micro total analys
is systems (μTAS) proc IEEE Micro Electro Mechanic
al Systems, Nagoya333-7, [2] Bousse L, Dijkstra E a
nd Guenat O 1996 High-density arrays of valves and
interconnects for liquid switching Proc.Solid-St
ate Sensor and Actuator Workshop, Hilton Head 272-5
There is.

[0005]

On the other hand, silicone rubber has a drawback that the driving method is restricted. As the driving method,
Only two methods, pneumatic and thermopneumatic, have been reported to date. However, these two methods are problematic when fabricating high density arrays of microvalve units. In the case of hot air pressure driving, it is difficult to thermally insulate adjacent valves in a high-density array. In the case of the pneumatic drive, a microchannel for introducing air pressure to the membrane is required.This is because, in addition to the microchannel layer of the fluid to be switched, another layer of the microchannel of the driving air is required. Means that extra is required. However, the fabrication of such multi-layer microchannel members requires a complicated fabrication process.

[0006] Pneumatically driven three-way or four-way valve microvalve units have been reported. They consist of three or four independent one-valve valve units. However, they do not have air microchannels. Therefore, the distance between the valve units is limited by the size of the air connector that is not manufactured by micromachining. In these systems, the spacing is greater than 2.5 mm, which means that when arranged in a square grid, the theoretical density of the valve arrangement is 16 / cm.
Means lower than ² .

[0007]

SUMMARY OF THE INVENTION The present invention relates to a three-way valve microvalve apparatus comprising three one-valve microvalve units as an example. On the other hand, the valve microvalve unit has a silicone rubber membrane. This membrane is driven by negative air pressure introduced from the outside. On the other hand, the interval between the valve microvalve units is smaller than 780 μm, which means that the theoretical arrangement density in the case of a square lattice arrangement is 164 / cm ² or more. This small spacing is achieved by employing a system with microchannels for air.

In order to simplify the process of fabricating a device having a relatively complicated structure having the multilayer microchannel, polydimethylsiloxane (polydimethylsiloxane), which is a kind of transparent silicone rubber, is used as a material of the device.
ne) (PDMS same in this specification) was employed.

Recently, PDMS molding techniques have been widely used to simplify the fabrication of microfluidic devices.

[0010] A commonly used process is as follows: (1) A PDMS chip having a groove formed on its surface is molded using a mold manufactured by micromachining. (2) Cover the groove with a flat substrate to form a microchannel.

The fabrication process is simplified by two features of PDMS. One is sub-micron replica fidelity. This fidelity is sufficient for most applications. The two are self-adhesive.
In order to close (seal) the groove, the surface of PDMS must be made of glass, silicone P
It can reversibly adhere to the surface of various materials such as DMS. Furthermore, if necessary, the bonding surface can be irreversibly bonded by surface treatment with oxygen plasma before contacting. The microvalve unit described here is composed of two PDMS microchannel chips and one membrane. The components are assembled using reversible and irreversible joining techniques. The latter irreversible bonding technique is used when transferring a PDMS membrane from a substrate to a PDMS chip. The membrane on the substrate is formed by spin coating.

Therefore, the microvalve device of the present invention is characterized by comprising one or a plurality of one-valve microvalve units. Further, another microvalve device of the present invention has a plurality of the one-valve microvalve units, and a membrane that is displaced in a valve area for each of the one-valve microvalve units is attached to and detached from a valve seat and the working fluid A drive fluid element chip having a valve mechanism for opening and closing the passage, and a working fluid element chip having a plurality of control ports, a working fluid element chip having a plurality of access ports, and the membrane interposed between the two element chips cooperate with each other. The plurality of one-valve micro valve units, wherein the driving fluid element chip communicates with one control port and has a driving fluid passage having one pressure chamber in which pressure of the driving fluid acts in one valve region. A plurality of the working fluid element chips are formed by bonding to the membrane, and the working fluid element chips communicate with one access port and pass through the valve area. By bonding a dynamic fluid passage to said membrane plurality formation, said plurality of working fluid passages are communicated with each other,
In the valve region, the pressure chamber and the working fluid passage are adjacent to each other with the membrane interposed therebetween. By supplying and discharging the pressure of the driving fluid to and from the pressure chamber, the membrane is displaced to separate from the valve seat. The one-way micro valve unit is opened and closed to form a multi-way valve. Further, another microvalve device of the present invention has one one-valve microvalve unit, and a one-valve microvalve having a valve mechanism in which a membrane displaced in a valve area is detached from a valve seat to open and close a working fluid passage. A one-valve microvalve device having a unit, comprising: a driving fluidic device chip having one control port, a working fluidic device chip having two access ports, and the membrane sandwiched between the two device chips; The driving fluid element chip communicates with a control port, and a driving fluid passage having a pressure chamber in which a pressure of a driving fluid acts in the valve area is formed by adhering to the membrane, and the working fluid element chip communicates with an access port. A working fluid passage passing through the valve area is formed by bonding to the membrane, and the working fluid path is formed in the valve area. The pressure chamber and the working fluid passage are adjacent to each other with the membrane interposed therebetween, and by supplying and discharging the pressure of the driving fluid to and from the pressure chamber, the membrane is displaced to be separated from and attached to the valve seat. The one-valve micro valve unit is opened and closed to form a one-way valve. In addition, the method for manufacturing the microvalve device of the present invention includes:
A microvalve device comprising one or more one-valve microvalves having a valve mechanism for opening and closing a working fluid passage by a membrane displaced in a valve area to and from a valve seat, wherein the one-valve microvalve unit comprises a control port A working fluid element chip having an access port, and a membrane sandwiched between the two element chips, wherein the driving fluid element chip communicates with a control port to supply a driving fluid in the valve region. A driving fluid passage having a pressure chamber in which a pressure acts is formed by bonding to the membrane, and the working fluid element chip is formed by bonding the working fluid passage that passes through the valve region to the access port through the valve region. The pressure chamber and the working fluid passage are adjacent to each other across the membrane in the valve region. A microvalve device configured to supply and discharge the pressure of the driving fluid to the pressure chamber to displace the membrane so as to be detached from the valve seat to open and close the one-valve microvalve unit. A manufacturing method, wherein a photoresist is applied to a substrate, and the pattern of the pressure chamber or the working fluid flow path is exposed and developed to form an inverted pattern on the substrate, and then a driving fluid element chip is formed on the substrate. Alternatively, the material resin of the working fluid element chip is supplied to transfer the inverted pattern, and then the material resin is peeled off from the substrate, thus obtaining the driving fluid element and the working fluid element chip, while the material of the membrane is placed on another substrate. Supply resin, form a membrane on the substrate,
Next, the surface of the driving fluid element chip on the side where the pressure chamber is formed is irreversibly bonded to the surface of the membrane in the valve area to peel off the membrane from the substrate. The surface on which the working fluid passage is formed is reversibly bonded to the back surface of the membrane.

[0013]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. In FIG. 1, reference numeral 1 denotes a three-way valve microvalve device as an example of a multi-way valve microvalve device.

The three-way valve microvalve device 1 has one or more three-way valve microvalves 2. The three-way valve microvalve 2 of the present invention has a plurality of one-way valve microvalve units 3. . That is, the one-way valve micro valve unit 3 is a three-way valve micro valve 2
To a valve unit of the three-way valve microvalve device 1. The one-way valve microvalve unit 3 of the present invention is a component of the three-way valve microvalve apparatus 1 as described above, and may constitute the one-way valve microvalve apparatus of the present invention having a single-way flow path alone. It is possible.
In the embodiments described below, the three-way valve microvalve device 1 is described as an example of the multi-way valve microvalve device 1, and the three-way valve microvalve 2 is described as an example of the multi-way valve microvalve unit.

FIG. 1 shows a three-way valve microvalve apparatus 1 having a three-way valve microvalve 2 having three independent one-valve microvalve units 3. The three-way valve microvalve device 1 includes two PDMS chips, that is, a working fluid element chip 5 and a driving fluid element chip 6, and a PDMS membrane 7 sandwiched between the two chips.
Consists of Although the three-way valve microvalve device 1 does not have a specific flow direction, the three access ports in the working fluidic device chip 5 are conveniently provided with an inlet port (In1).
-2) and the exit port (Out). On the other hand, the driving fluid element chip 6 has three control ports (C1-3).
There is. The working fluid element chip 5 and the driving fluid element chip 6 have a depth of 25 μm and 70 μm manufactured by micromachining.
μm grooves 8 and 11 are formed. The grooves 8 and 11 seal with both surfaces of the membrane 7 to form two layers of a working fluid flow path 12 and a pressure chamber 13 which are micro flow paths. The working fluid passage 12 is a passage through which the working fluid passes, and
Reference numeral 3 denotes a chamber where the pressure of the driving fluid acts. In this embodiment, the driving fluid is air. The working fluid element chip 5 reversibly adheres to the membrane 7, and the driving fluid element chip 6 irreversibly adheres to the membrane 7.

Part A of FIG. 1A shows the three-way valve microvalve 2, and its enlarged view is shown in FIG. Width 10
A 0 μm working fluid flow path 12 comes from the inlet and outlet ports and meets at the center of the chip. Each flow path 12 has a one-valve microvalve unit 3 and these flow paths are substantially equivalent. On the other hand, a cross-sectional view of the valve microvalve unit 3 is shown in FIG.

50 μm for interrupting the working fluid element flow path 12
Functions as the valve seat 14. On the other hand, the valve microvalve unit 3 is normally closed with the membrane 7 and the valve seat 14 sealed. External driving fluid air negative pressure is supplied through the control port and the pressure chamber 13 having a width of 200 μm, and displaces the membrane 7 in a direction to open the one-valve microvalve unit 3. For example, the working fluid passage 12 from In1 to Out is opened by supplying a negative air pressure to the control ports C1 and C3 at the same time.

Next, a method of manufacturing the three-way valve microvalve device 1 and the one-way valve microvalve device configured as described above will be described. The manufacturing process of the three-way valve microvalve device 1 and the one-way valve microvalve device is roughly shown in FIG. The driving fluid element chip 6 is manufactured by the following molding technique. 70μm high pressure chamber 1
In order to form an inverted pattern for forming the third photoresist pattern 3, an ultra-thick film photoresist 15 (SU-8: Microchee)
m, USA) is spin-coated on the substrate 16 and processed according to the manufacturer's instructions. Thereafter, the reverse pattern is exposed and developed (FIG. 4A). After development, 150 ° C. for 4 minutes in an oven to enhance adhesion
And then slowly cooled to room temperature over 1-2 hours. To improve mold release, the substrate is a reactive ion etching (RIE) machine (SystemVII SLR).
730/740: manufactured by Plasma-therm, U
In SA), a fluorocarbon layer polymerized by CHF ₃ plasma for 2 minutes is formed. The conditions at that time are as follows. CHF ₃ gas flow rate 50 sccm, pressure 1
60mTorr, power 200w.

PDMS (Sylgard 184; D
An unpolymerized solution of ow Corning (USA) is poured onto the substrate using a mold holding the solution (FIG. 4B).
On the other hand, the first cure at 65 ° C. for 1 hour and 100 ° C.
Gives a second cure for 1 hour. Cure PDMS
The chip is peeled from the substrate, and then three 1.5 mm access holes are punched into the chip using a metal pipe (FIG. 4C). Next, the PDMS membrane 7 is formed on another substrate (FIG. 4D), and then transferred onto the driving fluid element chip 6 by the following new technology (FIG. 4E). In advance, a fluorocarbon layer polymerized by CHF ₃ plasma is formed on a substrate using the above-described process.

The unpolymerized solution of PDMS is spin-coated on the substrate at 3000 rpm for 30 seconds, and cured in an oven at 100 ° C. for 1 hour. As a result, a membrane 7 having a thickness of 25 μm was obtained. In order to realize irreversible adhesion between the driving fluid element chip 6 and the membrane 7, both surfaces are treated with oxygen plasma for one hour in an RIE machine under the following conditions. Oxygen gas flow rate 100sccm, pressure 300mTorr
r and power 200W.

Immediately after being removed from the plasma chamber, the two surfaces were brought into contact and placed in an oven at 100 ° C.
And bake for 2 hours (FIG. 4D). Since the two members are irreversibly bonded, they can be peeled from the substrate together while maintaining the shape of the membrane 7 (FIG. 4E). Finally, all components are assembled. The working fluid element chip 5 is manufactured in the same manner as the driving fluid element chip 6, except that the thickness of the SU-8 photoresist is 25 μm. The working fluid element chip 5 reversibly adheres to the composite body of the driving fluid element chip 6 and the membrane 7 simply by contacting the surface.

Since the PDMS is transparent, the alignment is performed using a video microscope (VH-6300; manufactured by KEYE, Japan) and an X-ray microscope.
It can be performed using a handmade tool using a YZ stage. Six glass pipes are inserted into the access holes and bonded to PDMS (FIG. 4F).

[0023]

[Experiment] An experiment was conducted on the flow characteristics of the multi-way valve microvalve device 1 configured as described above.

Experimental Apparatus and Method FIG. 5 shows the flow characteristics of the three-way valve microvalve apparatus for water.
The evaluation was carried out using the device shown in FIG. In FIG. 5, (a)
Vacuum pump, (b, c) vacuum regulator, (dg)
Shown are a manual three-way valve, (n) a water trap, (i) a three-way valve microvalve, and (j, k) a silicone tube filled with pure water.

Negative pressure is used to draw in water and control the valve membrane. Negative pressure is supplied by a vacuum pump (DA-5D; ULVAC Vacuum Co., Japan) using two vacuum regulators (VR200-G; Koganei, Japan) for water suction and valve control. Adjusted separately and independently. Switching between vacuum and atmospheric pressure in the port is accomplished by using four three-way valves. The pressure in each port is indicated by P XX (port name). Water pumped from the outlet port is temporarily stored in a bottle to avoid drawing into the regulator. The inlet port is connected to a silicone tube (length 1 m, inner diameter 1 mm) filled with pure water. The other end of the tube is open to atmospheric pressure. Neglecting the height difference of several cm between the device and the tube placed on the table, the pressure PIN
1, PIn2 was considered atmospheric pressure. The moving speed of the water in the tube was measured to calculate the In1 and volumetric flow rate q _1, q ₂ of In2.

[0026] In Experimental Results and Discussion Figure 6A, is plotted against the control pressure PC1, PC3 varying the flow rate q ₁ with 0～70KPa.
(A) Opening and closing behavior of fluid route In1-Out, In2-Out
Out's fluid route is closed. (B) The flow rate with respect to the suction pressure when the fluid route is open.
The other fluid route In2-Out is closed.
(C) Flow rate versus suction pressure when both fluid routes are open.

The pressures PC2 and POUT are kept constant as shown. This curve corresponds to the fluid route In2-O
The opening and closing behavior of the fluid route In1-Out when ut is closed is shown. The curve shows little line formation. In other words, 2 controlled by C1 and C3
The device consisting of two valve units is one On-Of
Functions as an f-valve.

Since the three valve units can be regarded as equivalent, the combination of C2-C3 and C1-C2 has the same characteristics as the On-Off characteristics shown in FIG. 6A. It is believed that the hysteresis between the opening and closing pressures is caused by sticking between the membrane and the valve seat. No leakage in the closed state is detected.

In FIG. 6B, the pressure change is 0 to 30 KP.
Flow rate q ₁ is a plot of relative suction pressure. Control pressure is

## EQU00001 ## PC1 = PC3 = -60 KPa and PC2 = 0 KPa are kept constant. This pressure is applied to the fluid flow path In1-0u.
t is set to “open”, and the fluid channel In2-Out is set to “closed”. As shown in FIG. 6B, the flow rate is proportional to the suction pressure. Therefore, the proportional constant can be defined as a flow path resistance (pressure drop).

When the curve is calculated from FIG. 6C, the fluid resistance R
_A is

R _A = 1.65 KPa / (μL / min) FIG. 6C shows the same experimental result as above. By applying pressure (-60 Pa) to all control ports, all fluid flow paths are kept open. The flow rates q ₁ and q ₂ shown in FIG. 6C are, as expected, balanced and proportional to the suction pressure. Flow path resistance R _C of the flow path resistance R _B and a fluid route In2-Out fluid route In1-Out
Is

Calculated as: R _B = 2.24 KPa / (μL / min) R _C = 2.29 KPa / (μL / min)

Conclusion On the other hand, a pneumatically driven three-way valve microvalve device having three valve microvalve units was manufactured. On the other hand, the spacing between valve valve units is smaller than 780 μm, which opens up the feasibility of high density microvalve arrays. Currently, this spacing is constrained by the accuracy of the alignment, but will be improved in the near future. A device including a multilayer microchannel was fabricated by a relatively simple process. This is made possible by using PDMS. In particular, new techniques for wafer level transfer of PDMS membranes have proven effective. PD
Since MS can be irreversibly bonded to glass, silicone and various other materials, this technique can be widely applied to multilayer microchannel systems.

[0032]

According to the present invention, a complicated and time-consuming process such as double-sided exposure, through-substrate etching, and sacrificial layer etching was required to manufacture a conventional microvalve unit. The process can be simplified by the choice of pattern exposure, development, molding, and reversible-irreversible bonding.

In order to produce a high-density microvalve unit array, precise alignment of the fluid circuit and the pneumatic circuit is indispensable. However, in the conventional micro valve unit, this was difficult because an opaque silicone substrate was used for a main structure, but in the present invention, the positioning of the members was achieved by using PDMS for both chips and the membrane. This facilitates the increase in the density of the microvalve system as well as the reduction in the size of the members. The present invention is applicable not only to the microvalve but also to a multilayer fluid circuit in general.

[0034]

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a three-way valve microvalve device composed of three one-valve units.

FIG. 2 is an enlarged view of a portion A in FIG. 1A.

FIG. 3 is a sectional view taken along the line BB in FIG. 2;

FIG. 4 is an explanatory view showing a manufacturing process of the three-way micro valve unit.

FIG. 5 is an explanatory diagram showing an experimental apparatus for evaluating flow characteristics of a three-way valve micro valve using water.

FIG. 6 is a graph showing characteristics of a three-way valve microvalve handling water.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Three-way valve micro valve apparatus 2 Three-way valve micro valve 3 One-way valve micro valve unit 5 Working fluid chip 6 Driving fluid chip 7 Membrane 8 Groove 11 Groove 12 Working fluid flow path 13 Pressure chamber 14 Valve seat 15 Super thick film photoresist 16 Substrate In1 entrance port In2 entrance port Out exit port C1 control port C2 control port C3 control port

Continued on the front page F term (reference) 3H056 AA01 AA07 AA08 BB32 CA08 CB03 CD04 DD08 EE01 FF10 GG03 GG14 3H067 AA01 AA28 AA32 BB08 BB14 CC32 DD05 DD33 EA28 EB28 EC14 EC17 FF12 GG02 GG21

Claims (9)

[Claims] 1. A microvalve device comprising one or a plurality of one-valve microvalve units. 2. A valve mechanism having a plurality of said one-valve micro valve units, wherein a membrane displaced in a valve area for each of said one-valve micro valve units is attached to and detached from a valve seat to open and close a working fluid passage. Have, and
A driving fluid element chip having a plurality of control ports, a working fluid element chip having a plurality of access ports, and the membrane sandwiched between the two element chips cooperate to constitute the plurality of one-valve microvalve units. Wherein the driving fluid element chip is formed by bonding a plurality of driving fluid passages to the membrane, the driving fluid passage having one pressure chamber in communication with one control port and in which a pressure of the driving fluid acts in one valve region. The working fluid element chip is connected to one access port, and a plurality of working fluid passages that pass through the valve region are adhered to the membrane to form a plurality of working fluid passages, and the plurality of working fluid passages communicate with each other. The pressure chamber and the working fluid passage are adjacent to each other across the membrane, and supply and discharge the pressure of the driving fluid to and from the pressure chamber. Microvalve device according to claim 1, characterized by being configured multiple lateral valves in the manner to open and close the one-way valve microvalve unit by Hanaregi and the valve seat by displacing the membrane by. 3. A one-way valve having a one-way microvalve unit having one one-valve microvalve unit, and having a valve mechanism for opening and closing a working fluid passage by a membrane displaced in a valve area being attached to and detached from a valve seat. A microvalve device, comprising: a driving fluid element chip having one control port, a working fluid element chip having two access ports, and the membrane interposed between the two element chips, wherein the driving fluid element chip is provided. A drive fluid passage having a pressure chamber in communication with a control port and in which pressure of a drive fluid acts in the valve area is formed by bonding the membrane to the membrane, and the working fluid element chip communicates with an access port to form the valve area. A working fluid passage which passes is formed by adhering to the membrane, and the pressure chamber and the working flow are formed in the valve region. The body passage is adjacent to the membrane across the membrane, the membrane is displaced by supplying and discharging the pressure of the drive fluid to and from the pressure chamber, the membrane is displaced and separated from the valve seat, the one-valve micro valve unit 2. The microvalve device according to claim 1, wherein the one-way valve is configured to open and close. 4. The microvalve according to claim 2, wherein the driving fluid device chip and the membrane are irreversibly bonded, and the working fluid device chip and the membrane are reversibly bonded. apparatus. 5. The microvalve device according to claim 2, wherein the driving fluid element chip, the working fluid element chip, and the membrane are made of a transparent or translucent synthetic resin. 6. The microvalve device according to claim 2, wherein the driving fluid element chip, the working fluid element chip, and the membrane are made of PDMS. 7. The microvalve device according to claim 2, wherein the driving fluid is air. 8. A microvalve device having one or more one-valve microvalve units having a valve mechanism for opening and closing a working fluid passage by allowing a membrane displaced in a valve area to be attached to and detached from a valve seat. The valve unit includes a driving fluid element chip having a control port, a working fluid element chip having an access port, and the membrane sandwiched between the both element chips, wherein the driving fluid element chip communicates with a control port and communicates with the control port. A driving fluid passage having a pressure chamber in which a pressure of a driving fluid acts in a region is formed by bonding to the membrane, and the working fluid element chip communicates with an access port and a working fluid passage passing through the valve region is formed in the membrane. The pressure chamber and the working fluid passage in the valve area are bonded to each other. A structure in which the membrane is displaced by supplying and discharging the pressure of the driving fluid to and from the pressure chamber to detach and attach to the valve seat to open and close the one-valve microvalve unit. A method of manufacturing a microvalve device, comprising applying a photoresist to a substrate, exposing and developing a pattern of the pressure chamber or the working fluid flow path to form a reverse pattern on the substrate, and then forming a reverse pattern on the substrate. The material resin of the driving fluid element chip or the working fluid element chip is supplied to the substrate, the inverted pattern is transferred, and then the material resin is peeled off from the substrate. Thus, the driving fluid element and the working fluid element chip are obtained. The material resin of the membrane is supplied thereon to form the membrane on the substrate, and then the surface of the driving fluid element chip on the side where the pressure chambers are formed is covered with the bag. Irreversibly adheres to the surface of the membrane in the membrane region to release the membrane from the substrate, and then the surface of the working fluid element chip on which the working fluid passage is formed is reversibly attached to the back surface of the membrane. A method for manufacturing a microvalve device, characterized in that the device is bonded to a substrate. 9. The method according to claim 8, wherein the irreversible bonding is performed by surface-treating one or both of the bonding surfaces with oxygen plasma prior to bonding.