JP2001357998A - Laser plasma x-ray generating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser plasma X-ray generating device enabled to quickly restore a cryotarget by concentrating target material to a generated crater. SOLUTION: A rotating drum 2, rotatable and movable in the direction of axis, is installed inside a cryogenic cover l and kept cryogenically. Apart from a forming nozzle 5 supplying target gas for the formation of cryotarget layer at start, in order to generate a gas jet flow of cryogenic high density target gas same as above, for the restoration of the crater generated by the convergent irradiation of pulsed laser beam, one or a plurality of nozzles 7 for restoration are installed at the position of downstream side of rotation against the convergent irradiation point of the pulse laser beam, along the trajectory of the convergent irradiation point, on the cryogenic cover 1. At further downstream, a surface shape restoration plate 8 (also a means of thermal fusion will do), restoring the shape of the surface of the cryotarget layer by mechanical cutting, is installed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a high-temperature, high-density plasma by focusing and irradiating a pulsed laser beam having a high peak power and repeatedly output at a predetermined frequency with a solid target material as a target. And a laser plasma X-ray generator that continuously and repeatedly generates pulsed X-rays from the high-temperature, high-density plasma. The present invention relates to a laser plasma X-ray generator that targets a cryo-target layer deposited on a surface of a rotating body that has been fixed by being cooled by cooling.

[0002]

2. Description of the Related Art A laser plasma X-ray generator focuses a pulse laser beam having a high peak power and repeatedly output at a predetermined frequency on a point having a diameter of 100 μm or less, and forms a fixed target material (solid target material). ) By irradiating
A high-temperature, high-density plasma is generated, and high-intensity pulsed X-rays (laser plasma X-rays) are emitted from the plasma, and the generated X-rays are subjected to X-ray lithography, X-ray microscope, or the like. It is used as a light source. In this laser plasma X-ray generator, a chemically inert gaseous substance at room temperature, such as krypton, xenon, or argon, is cooled and liquefied as a target for pulsed laser beam condensing irradiation. Alternatively, those which are supplied in a solid state to form a cryogenic target layer are conventionally known. The endless belt is used as a means for continuously supplying and transferring the rare gas cooled and liquefied or solidified as a target material (cryotarget material) to a focused irradiation point of the pulsed laser light. Has been conventionally proposed as disclosed in Japanese Patent Application Laid-Open No. 1-6349 (Patent No. 2614457).

[0003] That is, as shown in FIG. 9, a laser plasma X-ray generator disclosed in Japanese Patent Application Laid-Open No. 1-6349 (Patent No. 2614457) is driven in one direction by a continuous drive inside a vacuum chamber 101. Conveyor 1 provided with a rotating endless belt 102 moving at a constant speed
A target material supply device 105 for supplying a liquefied or solidified cryotarget material 104 is provided outside the vacuum chamber 101, and a liquefied or solidified cryotarget material from the target material supply device 105 is provided. 4 is continuously supplied to the rotating endless belt 102 via a supply path 106, and the supplied cryogenic target material 104 adheres to the surface of the rotating endless belt 102, forms a cryogenic target layer 107, and is transported.
On the other hand, a pulsed laser beam 111 from a pulsed laser generator 110 is incident through a laser condenser lens 109 from an entrance 108 provided on a side wall of the vacuum chamber 101, and is fixed spatially on the surface of the rotating endless belt 2. The cryogenic target material of the cryogenic target layer 107 is turned into plasma at the convergence irradiation point 111 of the pulse laser beam 110, and the pulse X-ray 1
13 is emitted, and the pulse X-ray 113 is
14, the rotating endless belt 102 moves continuously, and the target material is continuously supplied to the belt surface. The cryo-target layer 107 that has occurred is configured to recover.

[0004] However, in the laser plasma X-ray generator described above, the cryogenic target material is supplied to the surface of the continuously moving rotating endless belt to form a cryogenic target layer, and the cryogenic target layer is continuously supplied to the focused irradiation point of the pulsed laser light. In some cases, the cryotarget material is not stably adhered to the surface of the rotating endless belt, and the cryotarget layer cannot be reliably formed. A target material such as a rare gas can be brought into contact with the surface of an object cooled at an extremely low temperature, solidified by cooling, deposited on the surface of the object, and formed as a cryo-target layer. Although the adhesion of the cryogenic target material to the surface is stable, it is not cooled, and the cryogenic target material that has been previously liquefied or solidified is supplied to the surface of the rotating endless belt that is not temperature-controlled. In this case, the attachment of the cryotarget is unstable.

In addition to the laser plasma X-ray generator using such a rotating endless belt, instead of a belt conveyor, the surface of a cylindrical rotating body kept at a very low temperature is chemically inert. At room temperature, a target material such as a gaseous rare gas is contacted, condensed and solidified to form a cryogenic target layer, and the cryogenic target layer on the surface of the rotating body is rotated in the rotating direction and the axial direction of the rotating body. Proc. A method of continuously supplying a solidified target material (cryotarget material) to the pulsed laser beam convergent irradiation point by moving the pulsed laser light convergent irradiation point in the plane direction with respect to the converging irradiation point. SPIE Vol.3886 (1999). In such a method using a rotating body kept at an extremely low temperature, the adhesion of the cryogenic target material is stable,
Cryogenic target layers can be reliably formed.

[0006]

However, there is also a problem in the method of using the rotator cooled at an extremely low temperature. That is, a hemispherical crater was generated at the focused irradiation point due to the formation of plasma by the focused irradiation of the pulsed laser beam on the surface of the cryo-target layer, and the point where the crater occurred was irradiated with the pulsed laser beam again. In addition, since the stability of the light collection degree is deteriorated, stable and high average output laser plasma X-rays cannot be continuously and repeatedly generated. Therefore, the cryogenic target layer in which the crater has occurred needs to be promptly repaired. However, the conventional laser plasma X using the above-described method using a rotating body is used.
The line generator forms a sealed space around the rotating body and confine the high-density target gas, thereby bringing the target material into contact with the surface of the cooled rotating body, fixing and attaching the target material, In this case, the target material is supplied uniformly over a wide area of the surface of the rotating body. Therefore, even if it is convenient for forming a cryo-target layer at the start, it is inconvenient to concentrate craters at the places where craters occur. Therefore, it is not possible to quickly repair the cryo-target layer by locally supplying the target material to fill the crater.

[0007] Therefore, in a laser plasma X-ray generator, it is an object to concentrate a target material on a crater generated by plasma by condensing irradiation of a pulsed laser beam so that a cryo-target layer can be quickly repaired. . The invention of this application aims to solve such a problem.

[0008]

According to a first aspect of the present invention, there is provided a laser plasma X-ray generating apparatus comprising: a gaseous target material which is chemically inert and at room temperature is cooled to a very low temperature by liquid nitrogen or the like; By contacting with the surface of the rotating body having a shape and cooling, a cryogenic target layer that is solidified and deposited on the surface of the rotating body is formed, and the surface of the cryogenic target layer has a high peak power and has a predetermined peak power. Of the pulsed laser light spatially fixed by converging and irradiating the pulsed laser light repeatedly output at the frequency of, and moving the rotating body in the rotational direction or the axial direction or a combination of the movement in the two directions. The surface of the rotating body having the cryogenic target layer is moved in a plane direction with respect to the focused irradiation point, and the focused irradiation point is moved on the rotating body surface so as to draw a predetermined trajectory. Forming a cryogenic target layer in a laser plasma X-ray generator that generates high-temperature high-density plasma by condensing irradiation of the pulsed laser light and continuously and repeatedly generates pulsed X-rays from the high-temperature high-density plasma. One or more cryogenic target layer repair nozzles facing the surface of the rotating body, at a position along the locus of movement of the focused irradiation point downstream of the rotating body with respect to the focused irradiation point with respect to the focused irradiation point Is disposed, and a low-temperature and high-density gas jet stream of the target material is generated by the cryo-target layer repairing nozzle. By locally applying the gas jet stream to the craters left on the surface, those craters can be treated with the same target material as before the craters occurred. Because, wherein the repair cryo-target layer.

In this manner, the target material can be concentrated on the crater as a gas jet stream, and the crater can be buried to quickly repair the cryogenic target layer.

[0010] The laser plasma X according to the second aspect of the present invention.
The line generating device may be configured to use the laser plasma X according to claim 1.
In the line generator, a position along a locus of movement of the condensing irradiation point, which faces a rotating body surface forming the cryogenic target layer and is downstream of the rotating body with respect to the cryogenic target layer repairing nozzle in a rotating direction of the rotating body. And a surface shape correcting means for correcting the shape of the surface of the cryogenic target layer by a mechanical cutting action or a thermal melting action.

If the crater is simply buried with the target material, irregularities may remain on the surface of the cryogenic target layer. Therefore, it is preferable to provide a surface shape correcting means for correcting the shape of the surface of the cryogenic target layer by the mechanical cutting action or the thermal melting action at the above-described position.
The unevenness of the cryogenic target layer can be made smooth, and more stable laser plasma X-rays can be continuously and repeatedly generated.

According to a third aspect of the present invention, in the laser plasma X-ray generator according to the second aspect, the cryogenic target layer repairing nozzle and the surface shape correcting means are integrally formed. It is characterized by having.

The cryogenic target layer repairing nozzle and the surface shape correcting means can also be formed in an integrated structure as described above, whereby the number of parts can be reduced and the configuration can be simplified.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

1 to 6 show an example of the embodiment. FIG. 1 is a cross-sectional view of a laser plasma X-ray generator, and FIG. 2 is a longitudinal sectional view of a main part of the laser plasma X-ray generator (A in FIG. 1).
-A section), FIG. 3 is a longitudinal sectional view (a) and a transverse sectional view (b) showing the detailed structure of the repair nozzle, FIG. 4 is a partial side view showing details of the surface shape correction plate, and FIG. FIG. 6 is a view showing a process of repairing a hemispherical crater by a nozzle, and FIG. 6 is a view for explaining the effect of target surface shape correction by a surface shape correction plate.

In this embodiment, as shown in FIGS. 1 and 2, the laser plasma X-ray generator includes a cryogenic cover 1 having a cylindrical shape. It has a rotating drum 2 that can move in the direction.

The rotating drum 2 has shafts at both ends supported by bearings 3 and 4, and has a driving device (not shown) connected to one end. A cooling substance such as liquid nitrogen is introduced into the rotating drum 2 as described later.

The cryogenic cover 1 is used for forming a cryogenic target layer at the start of spraying a chemically inert gaseous target material (hereinafter, referred to as target gas) at room temperature toward the surface of the rotating drum 2. Forming nozzle 5 (cryo target layer forming nozzle) and a hole for condensing and irradiating pulse laser light having a high peak power from a pulse laser light generator (not shown) to the cry target layer on the surface of rotating drum 2. With an irradiation flange 6
Further, a repair nozzle 7 (cryo target layer repair nozzle) for repairing the cryogenic target layer and a surface shape correcting plate 8 (surface shape correcting means) are provided. The forming nozzle 5, the irradiation flange 6, the repairing nozzle 7, and the surface shape correcting plate 8
When viewed in a cross section perpendicular to the rotation direction of the rotary drum 2, as shown in FIG. 1, in order from the upstream in the rotation direction of the rotary drum 2, the forming nozzle 5, the irradiation flange 6, the repairing nozzle 7, and the surface shape correcting plate 8 are arranged in the order of, for example, 90 ° intervals. However, the interval is not limited to 90 ° and can be changed as appropriate.

The rotary drum 2 moves the cryo-target layer with respect to the focused irradiation point of the spatially fixed pulse laser beam by moving in the rotation direction or the axial direction, or a combination of the movement in the two directions. The surface of the formed drum is moved in the plane direction, and the focused irradiation point of the pulse laser light is driven on the surface of the rotating drum 2 so as to draw a predetermined trajectory.

In order to repair a crater generated by plasma generation due to the focused irradiation of the pulse laser beam, the repair nozzle 7 uses the same target gas as the target gas from the forming nozzle 5 at a low temperature and high density gas jet flow. The surface of the rotary drum 2 is sprayed, and the trajectory of the focused irradiation point is located downstream of the rotating irradiation direction of the rotating drum 2 with respect to the focused irradiation point of the pulsed laser light facing the outer surface of the rotating drum 2. Singly or plurally are arranged at positions along. FIGS. 1 and 2 show an example in which 5
This is the case where they are mounted side by side. The number of the repairing nozzles 7 does not have to be five, and the larger the number is, the more advantageous the repairing efficiency is. However, there is a limit to the number that can be attached due to structural restrictions. Also, the mounting interval is one of the rotating drums 2.
It is meaningless if the pitch is smaller than the axial movement pitch per rotation, and the target material is used unnecessarily much. A preferable mounting interval of the nozzle 7 for repairing the cryogenic target layer is 1 to 10 times the axial movement pitch per rotation of the rotary drum 2.

The detailed structure of the repairing nozzle 7 is as shown in FIG. 3, and a nozzle body 7a for generating and jetting a gas jet stream 10 of a target gas, and a target body for preventing the gas jet stream 10 that is jetted from dissipating. Gas crater 1
Micro cover 7b for shielding to concentrate on two places
Are integrated structures.

The surface shape correcting plate 8 mechanically cuts and smooths the irregularities of the cryogenic target layer 1, faces the outer surface of the rotating drum 2, and rotates with respect to the cryogenic target layer repairing nozzle 8. A single or a plurality thereof are arranged downstream of the drum 2 in the rotation direction at positions along the trajectory of the focused irradiation point. The dimension of the surface shape correcting plate 8 is, for example, a dimension (for example, about 10 mm) that covers a part of the overall axial dimension of the rotary drum 2 in the axial direction of the rotary drum 2 as indicated by p in FIG. May be.

In this laser plasma X-ray generator, a cooling substance such as liquid nitrogen is introduced into the inside of the rotating drum 2 to cool it, and the outer surface of the rotating drum 2 is kept at an extremely low temperature. Then, a target gas such as a rare gas (krypton, xenon, argon, etc.), which is a chemically inert gaseous target material at room temperature, is blown onto the surface of the rotary drum 2 by the forming nozzle 5 as a gas jet stream. Attached to,
The target gas is brought into contact with the surface of the drum, whereby the target gas is cooled, solidified and deposited on the outer surface of the rotating drum 2 to form the cryogenic target layer 11. And
The pulse laser beam from the pulse laser beam generator is incident through the hole of the irradiation flange 6 and condensed on the surface of the cryo target layer 11 at a spatially fixed converging irradiation point located near the outer surface of the rotating drum 2. Irradiation is performed to generate high-temperature, high-density plasma by condensing irradiation of the pulsed laser light, and pulse X-rays are continuously and repeatedly generated from the high-temperature, high-density plasma.

As shown in FIG. 1, the forming nozzle 5 and the repairing nozzle 7 are connected to a common target gas supply device (not shown) via a branch pipe 15, and the forming nozzle 5 and the repairing nozzle 5 are connected to each other. Branch pipe portions 15a on the nozzle 7 side,
15b is provided with valves 16a and 16b, respectively. And by these valves 16a and 16b,
The supply of the target gas to the forming nozzle 5 and the repairing nozzle 7 is switched and controlled.

The repair target gas does not require as much gas as the amount of gas for forming the cryo-target layer at the start. Therefore, the diameter of the repairing nozzle 7 is determined by the forming nozzle 5 for forming the cryotarget layer at the start.
It is set to be smaller than the diameter of.

At the start, the valve 16a of the branch pipe portion 15b connected to the forming nozzle 5 opens, and the valve 16b of the branch pipe portion 15b connected to the repairing nozzle 7 opens.
Closes. Then, the target gas is supplied to the forming nozzle 5.
And is ejected as a gas jet stream from the forming nozzle 5, whereby the outer surface of the rotating drum 2 moving in the rotation direction and the axial direction moves along the movement of the focused irradiation point of the pulsed laser light. Along the cryo-target layer 11
Is formed. The supply of the target gas to the forming nozzle 5 is stopped when a predetermined time has elapsed after the start.

When the irradiation of the pulse laser beam is started, the valve 16b of the branch pipe portion 15b connected to the cryogenic target layer repairing nozzle 7 is opened, and the supply of the target gas to the repairing nozzle 7 is started. Be started. And
As shown in FIG. 3, the target gas is jetted from the repair nozzle 7 as a gas jet stream 10, and is locally jetted to the crater 12 generated on the upstream side in the rotation direction of the rotary drum 2, so that the temperature becomes extremely low. The crater 12 is filled by being cooled by the held rotating drum 2 and solidified. At this time, the jetted gas jet stream 10 is shielded by the micro cover 7b and concentrates on the crater 12.

The crater 12 has, for example, a substantially hemispherical shape.
The center of the deep bottom of the dent is closer to the surface of the rotating drum 2. Therefore, the temperature inside the crater 12 is lower than the surface of the peripheral cryogenic target layer 11, and the temperature is further lower toward the bottom center. Therefore, the target material sprayed from the repair nozzle 7 toward the crater 12 adheres faster toward the center of the bottom of the crater 12, and FIG.
In the order shown in (b) and (c), the crater 12 is buried from the center of the bottom, and the unevenness of the surface of the cryogenic target layer 11 becomes smaller.

The temperature of the target gas which is locally sprayed so as to fill the crater 12 is 10 to the solidification temperature.
A temperature 20% higher is suitable.

After the new target material is deposited on the crater 12 in this way, the surface of the cryo-target layer 11 with the remaining irregularities is shaved by the cutting edge of the surface shape correcting plate 8 as shown in FIG. It is modified to be

As described above, the supply of the target gas to the forming nozzle 5 for forming the cryogenic target layer at the start and the supply of the target gas to the repair nozzle 7 for repairing the crater generation location are performed as described above. 16a, 1
6b, it is possible to minimize the amount of target gas used.

FIG. 7 shows a laser plasma X according to the present invention.
14 shows another example of the embodiment of the line generator. In this example, a plurality (three in the example of FIG. 7) of repairing nozzles 7 are provided at predetermined intervals in the circumferential direction of the rotary drum 2 when viewed in a cross section of the rotary drum 2. In this case, the plurality of repair nozzles 7 may be arranged at the same height in the axial direction of the rotary drum 2 or may have different axial heights. Also, the number can be changed as appropriate.

FIG. 8 shows a micro cover 71b whose width is increased in the axial direction of the rotary drum 2 so as to cover a plurality (for example, three) of the craters 12 in the axial direction of the rotary drum 2.
Nozzle body 7 that generates a wide-angle gas jet stream using
1A shows a repair nozzle 71 formed integrally with the nozzle 1a. As an embodiment of the present invention, such a repair nozzle 71 can be used.

FIG. 9 shows a micro cover 72b whose width is increased in the circumferential direction of the rotary drum 2 so as to cover a plurality (for example, three) of the craters 12 in the circumferential direction of the rotary drum 2.
Nozzle body 7 that generates a wide-angle gas jet stream using
2A shows a repair nozzle 72 having an integral structure with the nozzle 2a. As an embodiment of the present invention, such a repair nozzle 72 can be used.

FIG. 10 shows a case where a roller with a heater or the like is used.
A surface shape correcting roller 80 for correcting unevenness of the surface of the cryogenic target layer 11 by a thermal melting action is shown. As an embodiment of the present invention, it is possible to use such a surface shape correcting roller 81 as the surface shape correcting means.

FIG. 11 shows an integrated structure in which a surface shape correcting plate 81 is attached to a repairing nozzle 73 comprising a nozzle body 73a and a micro cover 73b. As an embodiment of the present invention, it is also possible to use the one in which the repair nozzle 73 and the surface shape correcting plate 81 are integrally structured.

FIG. 12 shows a micro cover 74b whose width is increased in the circumferential direction of the rotary drum 2 so as to cover a plurality of (for example, three) craters 12, and a nozzle body 74a which generates a wide-angle gas jet flow. Repair nozzle 7
4, a surface shape correction plate 82 is attached to form an integral structure. As an embodiment of the present invention, the repair nozzle 74 and the surface shape correcting plate 82
It is also possible to use one having an integral structure.

The above has described one example of the embodiment and its modified form. However, the present invention is not limited to this, and it is needless to say that the structure can be appropriately changed within the technical idea of the invention. is there.

[0039]

As is apparent from the above description, according to the invention of this application, the following excellent effects can be obtained.

That is, according to the first aspect of the present invention,
One or more repair nozzles are arranged at a position along the locus of movement of the focused irradiation point downstream of the rotating body with respect to the focused irradiation point of the pulsed laser beam, and the repair nozzle A low-temperature, high-density gas jet stream of the target material is generated, and the gas jet stream is locally applied to the crater left on the surface of the cryo-target layer along the trajectory of the condensed irradiation point each time the pulse laser beam is condensed By embedding the craters with the same target material as before the occurrence of the crater, the target material is concentrated on the crater as a gas jet stream, and the crater is buried and the cryo target layer is quickly repaired. And stable laser plasma X-rays can be continuously and repeatedly generated.

According to the second aspect of the present invention, the mechanical cutting action or the thermal melting is performed at a position along the locus of movement of the focused irradiation point downstream of the rotating nozzle in the rotational direction of the rotating body. By providing the surface shape correcting means for correcting the shape of the surface of the cryogenic target layer by the action, the unevenness of the cryogenic target layer can be smoothed, and more stable laser plasma X-rays can be continuously and repeatedly generated. it can.

According to the third aspect of the present invention, the number of components can be reduced, the configuration can be simplified, and the like, by integrating the cryogenic target layer repair nozzle and the surface shape correcting means.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a laser plasma X-ray generator according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view (section AA in FIG. 1) of a main part of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 3 is a longitudinal sectional view showing a detailed structure of a repair nozzle of the laser plasma X-ray generator according to the embodiment of the present invention (a).
And a cross-sectional view (b).

FIG. 4 is a partial side view showing details of a surface shape correction plate of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 5 is a view showing a process of repairing a hemispherical crater by a repair nozzle of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 6 is a diagram illustrating an operation of correcting a target surface shape by a surface shape correcting plate of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 7 is a cross-sectional view showing another example of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 8 is a longitudinal sectional view (a) and a transverse sectional view (b) showing another example of the repair nozzle of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 9 is a longitudinal sectional view (a) and a transverse sectional view (b) showing still another example of the repair nozzle of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 10 is a diagram for explaining an operation of correcting the target surface shape by another example of the surface shape correcting means of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 11 is a diagram showing another example of a repair nozzle and a surface shape correction plate of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 12 is a view showing still another example of a repair nozzle and a surface shape correcting plate of the laser plasma X-ray generator according to the embodiment of the present invention.

FIG. 13 is a schematic configuration diagram showing a conventional laser plasma X-ray generator in a longitudinal section.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Cryogenic cover 5 Forming nozzle 7, 71, 72, 73, 74 Repair nozzle 7a, 71a, 72a, 73a, 74a Nozzle body 7b, 71b, 72b, 73b, 74b Micro cover 8 Surface shape correction plate 10 Gas jet Flow 11 Cryo target layer 12 Crater 80 Surface modification roller

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hideaki Mochizuki 4-21-4 Shimoma, Setagaya-ku, Tokyo A-2 F-term (reference) 4C092 AA06 AA14 AB30 AC09 AC20 BD06 BD17 BD18 BD20

Claims (3)

[Claims] 1. A chemically inert gaseous target material at room temperature is brought into contact with the surface of a rotating body having a cylindrical shape cooled to an extremely low temperature by liquid nitrogen or the like, and solidified by cooling. Forming a cryo-target layer deposited on the surface of the rotating body, and condensing and irradiating the surface of the cryo-target layer with pulsed laser light having a high peak power and repeatedly output at a predetermined frequency; By moving the body in the rotation direction or the axial direction, or a combination of the movements in the two directions, the surface of the rotating body having the cryo-target layer in the plane direction is focused with respect to the focused irradiation point of the pulse laser light fixed spatially. To move the focused irradiation point on the surface of the rotating body so as to draw a predetermined trajectory, and generate a high-temperature high-density plasma by the focused irradiation of the pulsed laser light. A laser plasma X for continuously and repeatedly generating pulsed X-rays from the high-temperature high-density plasma
In the line generator, facing the surface of the rotating body forming the cryo-target layer, at a position along the locus of movement of the focused irradiation point, downstream of the rotating body in the rotational direction with respect to the focused irradiation point, A single or a plurality of cryogenic target layer repair nozzles are arranged, and a low-temperature and high-density gas jet stream of the target material is generated by the cryogenic target layer repair nozzle. By locally applying the gas jet stream to the crater left on the surface of the cryogenic target layer along the trajectory of the focused irradiation point, the craters are filled with the same target material as before the crater was generated, and the cryogenic target layer was repaired. A laser plasma X-ray generator. 2. A position along a locus of movement of the condensing irradiation point, which faces a rotating body surface forming the cryogenic target layer and is downstream of the rotating body with respect to the cryogenic target layer repairing nozzle in a rotating direction of the rotating body. 2. The laser plasma X-ray generator according to claim 1, further comprising surface shape correcting means for correcting the shape of the surface of the cryogenic target layer by a mechanical cutting action or a thermal melting action. 3. The laser plasma X-ray generator according to claim 2, wherein said cryogenic target layer repair nozzle and said surface shape correcting means are integrated.