JP2001093666A - Organic led display device and method for manufacturing the same - Google Patents
Organic led display device and method for manufacturing the sameInfo
- Publication number
- JP2001093666A JP2001093666A JP26920699A JP26920699A JP2001093666A JP 2001093666 A JP2001093666 A JP 2001093666A JP 26920699 A JP26920699 A JP 26920699A JP 26920699 A JP26920699 A JP 26920699A JP 2001093666 A JP2001093666 A JP 2001093666A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- organic
- layer
- partition
- led display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 238000005192 partition Methods 0.000 claims abstract description 70
- 239000012044 organic layer Substances 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 239000010410 layer Substances 0.000 claims description 69
- 239000000463 material Substances 0.000 claims description 21
- 238000007639 printing Methods 0.000 claims description 8
- 238000000206 photolithography Methods 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 2
- 238000001039 wet etching Methods 0.000 claims description 2
- -1 first electrode Substances 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 26
- 239000011248 coating agent Substances 0.000 description 19
- 238000000576 coating method Methods 0.000 description 19
- 239000007788 liquid Substances 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 230000005525 hole transport Effects 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 239000003086 colorant Substances 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000002861 polymer material Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 229910017073 AlLi Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- AHLBNYSZXLDEJQ-FWEHEUNISA-N orlistat Chemical compound CCCCCCCCCCC[C@H](OC(=O)[C@H](CC(C)C)NC=O)C[C@@H]1OC(=O)[C@H]1CCCCCC AHLBNYSZXLDEJQ-FWEHEUNISA-N 0.000 description 3
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 238000007644 letterpress printing Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910017489 Cu I Inorganic materials 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910000733 Li alloy Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000001989 lithium alloy Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- SJCKRGFTWFGHGZ-UHFFFAOYSA-N magnesium silver Chemical compound [Mg].[Ag] SJCKRGFTWFGHGZ-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、有機LEDディス
プレイおよびその製造方法に関する。さらに詳しくは、
本発明は、発光層もしくは発光層と電荷輸送層からなる
有機層を含む有機LED素子(画素)を複数配置したフ
ルカラー表示可能な有機LEDディスプレイおよびその
製造方法に関する。The present invention relates to an organic LED display and a method for manufacturing the same. For more information,
The present invention relates to an organic LED display capable of full-color display in which a plurality of organic LED elements (pixels) each including a light-emitting layer or an organic layer including a light-emitting layer and a charge transport layer are provided, and a method of manufacturing the same.
【0002】[0002]
【従来の技術】近年、有機化合物を用いた電界発光素子
(以下、「有機LED素子」と称す)が注目を集めてい
る。特に、Tangらにより報告された有機LED素子は、
正孔輸送層と電子輸送性の発光層とを積層した2層構造
で、無機化合物を用いた電界発光素子(無機EL素子)
に比べて、低電圧駆動が可能で、高発光効率および高輝
度であり、多色発光が容易に得られる〔Appl. Phys. Le
tt. 51、第 913頁(1987年)参照〕。2. Description of the Related Art In recent years, an electroluminescent device using an organic compound (hereinafter referred to as "organic LED device") has attracted attention. In particular, the organic LED devices reported by Tang et al.
Electroluminescent device (inorganic EL device) using inorganic compound with a two-layer structure in which a hole transport layer and an electron transporting light emitting layer are laminated.
In comparison with, it is possible to drive at a lower voltage, achieve higher luminous efficiency and higher luminance, and easily obtain multicolor light emission [Appl. Phys.
tt. 51, p. 913 (1987)].
【0003】また、有機化合物(高分子材料)を含む塗
液をスピンコートして得られる有機層を含む有機LED
素子においても、低電圧駆動で高輝度発光が得られるこ
とが報告されている(国際特許公報第WO901314
8号参照)。このような技術の進歩により、安価でフル
カラー表示可能な有機LEDディスプレイの可能性がよ
り現実のものとなった。Further, an organic LED including an organic layer obtained by spin-coating a coating liquid containing an organic compound (polymer material)
It has been reported that high-luminance light emission can be obtained by driving at a low voltage also in an element (International Patent Publication No. WO901314).
No. 8). With the advancement of such technology, the possibility of an organic LED display capable of inexpensive and full-color display has become more realistic.
【0004】しかしながら、高分子材料を含む塗液を用
いてスピンコート法やドクターブレード法で有機層を形
成する方法では、有機層のパターニングが非常に困難で
あった。そこで、近年、このひとつの解決法として、リ
ソグラフィー法により電極上にマトリックスの隔壁を形
成するか、あるいは樹脂ブラックレジストをITO(イ
ンジウム錫酸化物)電極間にマトリックス状に形成し
て、その隔壁もしくは樹脂ブラックレジストの隔壁内に
インクジェット方式による吐出装置を用いて3原色を発
光する有機層を形成する方法が提案された〔特開平10
−12377号公報、特開平10−153967号公
報、特開平11−40358号公報、特開平11−74
076号公報およびAppl. Phys. Lett. 72、第9519頁
(1998年)参照〕。However, in the method of forming an organic layer by a spin coating method or a doctor blade method using a coating liquid containing a polymer material, it is very difficult to pattern the organic layer. In recent years, as one solution to this problem, a matrix partition is formed on an electrode by lithography, or a resin black resist is formed in a matrix between ITO (indium tin oxide) electrodes, and the partition or the partition is formed. A method has been proposed in which an organic layer that emits light of three primary colors is formed in a partition wall of a resin black resist by using an ejection device based on an ink jet method [Japanese Patent Laid-Open No. Hei 10
-12377, JP-A-10-153967, JP-A-11-40358, JP-A-11-74
076, Appl. Phys. Lett. 72, p. 9519 (1998)].
【0005】上記の先行技術における隔壁および樹脂ブ
ラックレジストの隔壁は、光遮断層もしくはインクジェ
ット方式で有機層を形成する際の塗液の垂れ防止用壁と
して機能する。一方、このような隔壁は、構造的に有機
層上に設けられる電極の断線の原因になるが、上記の先
行技術文献には、この問題に対する解決法は何ら開示さ
れていない。The partition walls and the partition walls of the resin black resist in the above-mentioned prior art function as a light blocking layer or a wall for preventing a coating liquid from dripping when an organic layer is formed by an ink jet method. On the other hand, such a partition wall structurally causes disconnection of an electrode provided on the organic layer, but the above-mentioned prior art document does not disclose any solution to this problem.
【0006】[0006]
【発明が解決しようとする課題】本発明は、電極の断線
がなく、安価で表示品位の優れた大画面のフルカラー表
示可能な有機LEDディスプレイを提供することを課題
とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide an inexpensive, large-screen, full-color organic LED display with excellent display quality without disconnection of electrodes.
【0007】[0007]
【課題を解決するための手段】本発明者らはかかる観点
から、鋭意研究を行った結果、フルカラー表示可能な有
機LEDディスプレイにおいて、特定形状の隔壁を設け
ることにより、有機層のパターニングが容易になり、か
つ有機層上に設けられる電極の断線の問題が解消できる
ことを見出し、本発明を完成するに到った。Means for Solving the Problems From the above point of view, the present inventors have conducted intensive studies and as a result, it has been found that in organic LED displays capable of full-color display, patterning of an organic layer can be easily performed by providing partition walls of a specific shape. The present inventors have found that the problem of disconnection of the electrode provided on the organic layer can be solved, and have completed the present invention.
【0008】かくして、本発明によれば、発光層もしく
は発光層と電荷輸送層からなる有機層を含む有機LED
素子(画素)が複数配置された有機LEDディスプレイ
であって、基板と、基板上に形成された第1電極と、有
機層と、第1電極上に突出した隔壁と、第2電極とから
なり、第1電極と第2電極とが複数列からなるマトリッ
クス状電極であり、第1電極の列と平行する方向に配列
された隔壁が有機層よりも高い位置にオーバーハング部
のない構造を有し、かつ角部が外に凸状になる円弧の一
部であることを特徴とする有機LEDディスプレイが提
供される。Thus, according to the present invention, an organic LED including a light emitting layer or an organic layer comprising a light emitting layer and a charge transport layer
An organic LED display in which a plurality of elements (pixels) are arranged, comprising a substrate, a first electrode formed on the substrate, an organic layer, a partition protruding above the first electrode, and a second electrode. A first electrode and a second electrode are a matrix-like electrode composed of a plurality of rows, and a partition arranged in a direction parallel to the rows of the first electrodes has a structure without an overhang portion at a position higher than the organic layer. In addition, an organic LED display is provided, wherein the corner is a part of an arc protruding outward.
【0009】また、本発明によれば、発光層もしくは発
光層と電荷輸送層からなる有機層を含む有機LED素子
(画素)が複数配置された有機LEDディスプレイであ
って、基板と、基板上に形成された第1電極および画素
を駆動するための薄膜トランジスタと、有機層と、第1
電極上に突出し有機層を囲む格子状の隔壁と、第2電極
とからなり、隔壁の少なくとも一方が有機層よりも高い
位置にオーバーハング部のない構造を有し、かつ角部が
外に凸状になる円弧の一部であることを特徴とする有機
LEDディスプレイが提供される。Further, according to the present invention, there is provided an organic LED display in which a plurality of organic LED elements (pixels) each including a light emitting layer or an organic layer composed of a light emitting layer and a charge transport layer are arranged. A thin film transistor for driving the formed first electrode and pixel, an organic layer,
A grid-like partition protruding over the electrode and surrounding the organic layer; and a second electrode, at least one of the partition having a structure without an overhang portion at a position higher than the organic layer, and a corner portion protruding outward. An organic LED display is provided, wherein the organic LED display is part of a circular arc.
【0010】さらに、本発明によれば、上記の有機LE
Dディスプレイの製造方法であって、有機層の少なくと
も1層を印刷法により形成することを特徴とする有機L
EDディスプレイの製造方法が提供される。Further, according to the present invention, the above organic LE
A method for producing a D display, wherein at least one of the organic layers is formed by a printing method.
A method for manufacturing an ED display is provided.
【0011】[0011]
【発明の実施の形態】本発明の好適な実施の形態につい
て図面を参照して以下に説明する。有機LED素子(画
素)は、図1に示されるように、通常、基板1、第1電
極2、有機層3および第2電極4から構成される。本発
明の有機LEDディスプレイは、このような画素が複数
配置されて構成され、各画素間に隔壁5を有する。ま
た、ディスプレイの表示品位、例えば、コントラストの
観点からは、基板1の外側には偏向板6が設けられてい
るのが好ましく、さらにディスプレイの信頼性の観点か
らは、第2電極4上には、封止膜または封止基板7が設
けられているのが好ましい。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the organic LED element (pixel) generally includes a substrate 1, a first electrode 2, an organic layer 3, and a second electrode 4. The organic LED display of the present invention is configured by arranging a plurality of such pixels, and has a partition wall 5 between each pixel. Further, from the viewpoint of display quality of the display, for example, contrast, it is preferable that the deflection plate 6 is provided outside the substrate 1, and further from the viewpoint of display reliability, the deflecting plate 6 is provided on the second electrode 4. Preferably, a sealing film or a sealing substrate 7 is provided.
【0012】基板としては、石英基板、ガラス基板およ
びプラスチック基板などいずれも用いることができ、特
にこれらに限定されない。As the substrate, any of a quartz substrate, a glass substrate, a plastic substrate and the like can be used, and the substrate is not particularly limited thereto.
【0013】有機層は、発光層もしくは発光層と電荷輸
送層(電子輸送層および正孔輸送層)からなり、発光層
および電荷輸送層はそれぞれ単層構造および多層構造の
いずれであってもよい。発光層は、有機LED用または
有機光導電体用の公知の発光材料と、任意に公知の高分
子材料および添加剤とを溶媒に溶解もしくは分散させた
発光層形成用塗液により形成される。電荷輸送層は、有
機LED用または有機光導電体用の公知の電荷輸送材料
と、任意に公知の高分子材料および添加剤とを溶媒に溶
解もしくは分散させた電荷輸送層形成用塗液により形成
される。The organic layer comprises a light-emitting layer or a light-emitting layer and a charge transport layer (an electron transport layer and a hole transport layer). The light-emitting layer and the charge transport layer may each have a single-layer structure or a multilayer structure. . The light emitting layer is formed of a coating liquid for forming a light emitting layer in which a known light emitting material for an organic LED or an organic photoconductor and optionally a known polymer material and an additive are dissolved or dispersed in a solvent. The charge transport layer is formed by a coating liquid for forming a charge transport layer in which a known charge transport material for an organic LED or an organic photoconductor and optionally a known polymer material and an additive are dissolved or dispersed in a solvent. Is done.
【0014】有機層を挟持する第1電極と第2電極の材
質は、有機LEDディスプレイの構成により選定され
る。すなわち、有機LEDディスプレイにおいて、基板
が透明基板で、かつ第1電極が透明電極である場合に
は、有機層からの発光が基板側から放出されるので、発
光効率を高めるために、第2電極を反射電極とするか、
もしくは第2電極の有機層と隣接しない面に反射膜(図
示しない)を設けるのが好ましい。逆に、第2電極が透
明電極である場合には、有機層からの発光が第2電極側
から放出されるので、第1電極を反射電極とするか、も
しくは第1電極と基板との間に反射膜(図示しない)を
設けるのが好ましい。The materials of the first and second electrodes sandwiching the organic layer are selected according to the configuration of the organic LED display. That is, in the organic LED display, when the substrate is a transparent substrate and the first electrode is a transparent electrode, the light emitted from the organic layer is emitted from the substrate side. Is a reflective electrode,
Alternatively, it is preferable to provide a reflection film (not shown) on a surface of the second electrode that is not adjacent to the organic layer. Conversely, when the second electrode is a transparent electrode, light emission from the organic layer is emitted from the second electrode side, so that the first electrode is used as a reflective electrode or the first electrode is placed between the first electrode and the substrate. It is preferable to provide a reflective film (not shown) on the substrate.
【0015】透明電極の材質としては、例えば、Cu
I、ITO(インジウム錫酸化物)、SnO2 、ZnO
およびCuAlO2 などが挙げられ、反射電極の材質と
しては、例えば、アルミニウムおよびカルシウムなどの
金属、マグネシウム−銀およびリチウム−アルミニウム
などの合金、マグネシウム/銀のような金属同士の積層
膜、ならびにフッ化リチウム/アルミニウムのような絶
縁体と金属との積層膜などが挙げられる。As a material of the transparent electrode, for example, Cu
I, ITO (indium tin oxide), SnO 2 , ZnO
And the like CuAlO 2, and examples of the material for the reflective electrode, for example, metals such as aluminum and calcium, magnesium - silver and lithium - alloys such as aluminum, laminated film between the metals, such as magnesium / silver, and fluoride Examples include a laminated film of an insulator such as lithium / aluminum and a metal.
【0016】隔壁は、単層構造でも多層構造でもよく、
各画素間に配置されていてもよく、異なる発光色間に配
置されていてもよい。隔壁の材質は、発光材料、電荷輸
送材料や高分子材料を溶解もしくは分散した溶媒、すな
わち発光層形成用塗液または電荷輸送層形成用塗液の溶
媒に不溶もしくは難溶であるものが好ましい。ディスプ
レイとしての表示品位を向上させる意味で、ブラックマ
トリックス用の材料(例えば、クロムおよび樹脂ブラッ
クなど)を用いるのが特に好ましい。The partition may have a single-layer structure or a multilayer structure.
It may be arranged between each pixel or between different emission colors. The material of the partition walls is preferably a solvent in which a luminescent material, a charge transporting material or a polymer material is dissolved or dispersed, that is, a material which is insoluble or hardly soluble in a solvent of the luminescent layer forming coating liquid or the charge transporting layer forming coating liquid. From the viewpoint of improving the display quality as a display, it is particularly preferable to use a material for a black matrix (for example, chromium and resin black).
【0017】次に、有機LED素子(画素)の配置につ
いて説明する。本発明の有機LEDディスプレイは、複
数の画素が隔壁5を介してマトリックス状に配置されて
おり、これらの画素に複数の発光色をもたせることによ
り、フルカラー表示が可能となる。複数の発光色として
は、赤色、緑色および青色の組合せが好ましい。Next, the arrangement of the organic LED elements (pixels) will be described. In the organic LED display of the present invention, a plurality of pixels are arranged in a matrix with the partition wall 5 interposed therebetween, and full-color display is possible by giving these pixels a plurality of emission colors. As the plurality of emission colors, a combination of red, green, and blue is preferable.
【0018】画素の配置としては、例えば、図2(a)
に示されるような赤色(R)発光画素8、緑色(G)発
光画素9および青色(B)発光画素10が配置されたス
トライプ配列が挙げられる。また、画素の配置は、図2
(b)、2(c)および2(d)にそれぞれ示されるよ
うなモザイク配列、デルタ配列およびスクウェア配列で
あってもよい。R発光画素8、G発光画素9およびB発
光画素10それぞれの占有面積の割合は、図2(d)に
示されるように、必ずしも1:1:1である必要はな
く、各画素の占有面積は、同一であっても、各画素によ
って異なっていてもよい。The arrangement of the pixels is, for example, as shown in FIG.
The stripe arrangement in which red (R) light emitting pixels 8, green (G) light emitting pixels 9, and blue (B) light emitting pixels 10 are arranged as shown in FIG. Also, the arrangement of pixels is shown in FIG.
(B) A mosaic arrangement, a delta arrangement, and a square arrangement as shown in 2 (c) and 2 (d), respectively. The ratio of the occupied area of each of the R light emitting pixel 8, the G light emitting pixel 9, and the B light emitting pixel 10 does not necessarily need to be 1: 1: 1 as shown in FIG. May be the same or different for each pixel.
【0019】次に、各画素に対応した第1電極間と第2
電極間の接続方法について説明する。本発明の有機LE
Dディスプレイは、例えば、図3(a)に示されるよう
に有機層3を挟持する第1電極2と第2電極4が共通の
基板1上で互いに直交するストライプ状の電極になるよ
うに構成されているか、あるいは図3(b)に示される
ように第1電極2もしくは第2電極4が薄膜トランジス
タ(TFT)11を介して共通の電極に接続されてい
る。図中、12はソースバスライン、13はゲートバス
ラインをそれぞれ示す。Next, between the first electrode corresponding to each pixel and the second
A connection method between the electrodes will be described. Organic LE of the present invention
The D display is configured such that, for example, as shown in FIG. 3A, a first electrode 2 and a second electrode 4 sandwiching an organic layer 3 are striped electrodes orthogonal to each other on a common substrate 1. The first electrode 2 or the second electrode 4 is connected to a common electrode via a thin film transistor (TFT) 11 as shown in FIG. In the figure, 12 indicates a source bus line, and 13 indicates a gate bus line.
【0020】次に、隔壁の形状および大きさについて説
明する。隔壁は、第1電極上に突出し有機層を囲むよう
に形成され、第1電極間と第2電極間の接続形態によっ
て次のような形状を有する。図3(a)に示されるよう
に、第1電極2と第2電極4とが複数のストライプ状電
極である場合には、第1電極の列と平行する方向に配列
された隔壁は、有機層よりも高い位置にオーバーハング
部のない構造を有する。Next, the shape and size of the partition will be described. The partition wall is formed so as to protrude above the first electrode and surround the organic layer, and has the following shape depending on the connection between the first electrode and the second electrode. As shown in FIG. 3A, when the first electrode 2 and the second electrode 4 are a plurality of stripe-shaped electrodes, the partitions arranged in a direction parallel to the rows of the first electrodes are organic. It has a structure without an overhang portion at a position higher than the layer.
【0021】オーバーハング部のない構造としては、図
4(a)に示されるように、h0の上面から上に向かっ
て同形状もしくは先細りとなり突出するような構造が挙
げられる。図中、h0は有機層の膜厚(高さ)を表す。
このように上記隔壁をオーバーハング部のない構造にす
ることにより、有機層より高い位置にオーバーハング部
(突起)がないため、隔壁の影となって、電極材料が付
かない部分が生じないため、電極の断線の問題を解消で
きる。また、隔壁の角部を外に凸状になる円弧の一部の
構造を持たせることで、角部に生じる電極材料の断線を
防止することが可能となる。As a structure having no overhang portion, as shown in FIG. 4A, a structure having the same shape or tapering upward from the upper surface of h0 and projecting therefrom can be cited. In the figure, h0 represents the thickness (height) of the organic layer.
Since the partition has a structure without an overhang portion in this manner, since there is no overhang portion (projection) at a position higher than the organic layer, there is no shadow of the partition and no portion without electrode material is formed. In addition, the problem of electrode disconnection can be solved. In addition, by providing a part of a circular arc in which the corner of the partition is convex outward, it is possible to prevent disconnection of the electrode material occurring at the corner.
【0022】図3(a)に示されるように、互いに直交
するストライプ状電極を有する有機LEDディスプレイ
の場合には、隔壁は、第1電極の列と直交する方向に配
列された隔壁が第1電極の膜厚と有機層の膜厚の和より
も高い位置にオーバーハング部のある構造を有し、かつ
第1電極の列と平行する方向に配列された隔壁の高さh
2と第1電極の列と直交する方向に配列された隔壁の高
さh1とがh1>h2の関係であるのが好ましい〔図6
(a-2)および(b-2) 参照〕。As shown in FIG. 3A, in the case of an organic LED display having stripe-shaped electrodes orthogonal to each other, the partitions are arranged in a direction orthogonal to the rows of the first electrodes. The height h of the partition walls having a structure with an overhang portion at a position higher than the sum of the film thickness of the electrode and the film thickness of the organic layer, and arranged in a direction parallel to the row of the first electrodes
2 and the height h1 of the partition walls arranged in a direction perpendicular to the row of the first electrodes preferably have a relationship of h1> h2 [FIG.
(See (a-2) and (b-2))].
【0023】オーバーハング部のある構造としては、図
4(b)に示されるように、h3の上面から上に向かっ
て先太りとなり突出するような構造が挙げられる。図
中、h3は第1電極の膜厚と有機層の膜厚の和(高さ)
を表す。このように上記隔壁をオーバーハング部のある
構造にすることにより、有機層より高い位置にオーバー
ハング部(突起)ができるため、隔壁により影となり、
電極材料が付かない部分が生じるため、電極のパターン
グを隔壁で行うことができる。As a structure having an overhang portion, as shown in FIG. 4 (b), a structure in which the upper surface of h3 is tapered upward and protrudes upward. In the figure, h3 is the sum (height) of the thickness of the first electrode and the thickness of the organic layer.
Represents Since the partition has a structure with an overhang portion as described above, an overhang portion (projection) can be formed at a position higher than the organic layer.
Since there is a portion where the electrode material does not adhere, patterning of the electrode can be performed by the partition.
【0024】また、図3(b)に示されるように、第1
電極2もしくは第2電極4が薄膜トランジスタ(TF
T)11を介して共通の電極に接続されている場合に
は、隔壁の少なくとも一方が有機層よりも高い位置にオ
ーバーハング部のない構造を有する。Further, as shown in FIG.
The electrode 2 or the second electrode 4 is a thin film transistor (TF
When connected to a common electrode via T) 11, at least one of the partition walls has a structure without an overhang portion at a position higher than the organic layer.
【0025】本発明の有機LEDディスプレイの製造方
法を図6および図7を用いて説明する。 実施の形態1 図6の (a-1)〜(a-5) および (b-1)〜(b-5) は、それぞ
れ図3(a)の有機LEDディスプレイのA−A断面お
よびB−B断面を表し、 (a-1)と(b-1) のように末尾の
数字は同じ工程であることを表す。A method of manufacturing an organic LED display according to the present invention will be described with reference to FIGS. First Embodiment (a-1) to (a-5) and (b-1) to (b-5) of FIG. 6 are cross-sectional views of the organic LED display of FIG. B represents a cross section, and the numbers at the end indicate the same step as in (a-1) and (b-1).
【0026】第1電極の形成 前記の電極材料(例えば、ITO)を用いて、パターニ
ング工程(例えば、フォトリソグラフィ技術)により、
複数本の第1電極6をストライプ状になるように基板1
上に形成する〔図6 (a-1)および(b-1) 参照〕。Formation of First Electrode Using the above-mentioned electrode material (for example, ITO), a patterning step (for example, photolithography technique)
A plurality of first electrodes 6 are formed on the substrate 1 so as to form a stripe.
It is formed above (see FIGS. 6 (a-1) and (b-1)).
【0027】隔壁の形成 まず、レジストを用い、例えば通常のフォトリソグラフ
ィ技術で第1電極2に平行に膜厚h2の隔壁51を形成
し、次いで、隔壁51と同様の方法で第1電極2に直交
する方向に膜厚h1(h1>h2)の隔壁52を形成す
る〔図6 (a-2)および(b-2) 参照〕。具体的には、基板
上に隔壁材料層を形成し、フォトリソグラフィ法により
レジストマスクを形成し、次いでドライエッチング法ま
たはウエットエッチング法により隔壁材料層を食刻(エ
ッチング)して隔壁を形成するのが好ましい。First, a partition 51 having a thickness h2 is formed in parallel with the first electrode 2 by using a resist, for example, by a normal photolithography technique, and then formed on the first electrode 2 in the same manner as the partition 51. A partition wall 52 having a thickness h1 (h1> h2) is formed in a direction perpendicular to the direction [see FIGS. 6 (a-2) and (b-2)]. Specifically, a partition material layer is formed on a substrate, a resist mask is formed by a photolithography method, and then the partition material layer is etched (etched) by a dry etching method or a wet etching method to form a partition. Is preferred.
【0028】有機層の形成 前記の発光層形成用塗液と任意に電荷輸送層形成用塗液
を用いて、印刷法により第1電極2上に発光層もしくは
発光層と電荷輸送層からなる有機層3を形成する〔図6
(a-3)および(b-3) 参照〕。Formation of Organic Layer Using the coating liquid for forming a light emitting layer and optionally the coating liquid for forming a charge transport layer, an organic layer comprising a light emitting layer or a light emitting layer and a charge transport layer is formed on the first electrode 2 by a printing method. Form layer 3 [FIG.
(See (a-3) and (b-3)).
【0029】印刷法としては、凸版印刷、凹版印刷、平
版印刷、スクリーン印刷法およびインクジェット方式な
どの従来の方法が挙げられるが、中でも100nm以下
の薄膜を容易に形成することができる凸版印刷およびイ
ンクジェット方式が好ましく、インクジェット方式が特
に好ましい。したがって、多層構造の有機層を形成する
場合には、有機層の少なくとも1層をインクジェット方
式で形成するのが好ましい。 図5は、インクジェット
方式による有機層の形成工程を示す概略図である。図
中、1は基板、2は第1電極、51は第1電極の列と平
行する方向に配列された隔壁、52は第1電極の列と直
交する方向に配列された隔壁、14はインクジェットヘ
ッドをそれぞれ示している。Examples of the printing method include conventional methods such as letterpress printing, intaglio printing, lithographic printing, screen printing, and ink-jet printing. Among them, letterpress printing and ink-jet printing which can easily form a thin film of 100 nm or less are used. The method is preferable, and the ink jet method is particularly preferable. Therefore, when an organic layer having a multilayer structure is formed, at least one of the organic layers is preferably formed by an inkjet method. FIG. 5 is a schematic view showing a step of forming an organic layer by an inkjet method. In the figure, 1 is a substrate, 2 is a first electrode, 51 is a partition arranged in a direction parallel to the first electrode row, 52 is a partition arranged in a direction orthogonal to the first electrode row, and 14 is an ink jet Each head is shown.
【0030】インクジェットヘッド14から上記の塗液
を隔壁内に吐出させて、発光層を形成する。塗液の吐出
方式としては、有機層形成用塗液の熱による変質を考慮
して、熱の影響の少ないピエゾ方式および圧縮空気によ
る吐出方式が好ましく、ピエゾ方式が特に好ましい。こ
の工程は、1画素に対して、1種の塗液を用いた1回の
吐出であってもよく、あるいは複数種の塗液を用いた複
数回の吐出であってもよい。また、生産効率の観点か
ら、塗液を吐出するインクジェットヘッド14は、発光
色の異なる塗液毎に分けて、複数用いるのが好ましい。The above coating liquid is discharged from the ink jet head 14 into the partition walls to form a light emitting layer. As a method of discharging the coating liquid, a piezo method and a discharge method using compressed air, which are less affected by heat, are preferable in consideration of heat deterioration of the organic layer forming coating liquid, and a piezo method is particularly preferable. This step may be a single discharge using one type of coating liquid for one pixel, or a plurality of discharges using a plurality of types of coating liquid. In addition, from the viewpoint of production efficiency, it is preferable to use a plurality of inkjet heads 14 that discharge the coating liquid for each of the coating liquids having different emission colors.
【0031】第2電極の形成 第1電極の列と直交する方向にストライプ状の第2電極
4を形成する〔図6 (a-4)および(b-4) 参照〕。形成方
法としては、例えば、 1)電極形成用のストライプ状シャドウマスクを用いて、
蒸着法などのドライプロセスもしくはウエットプロセス
を用いて所定の膜厚の金属を蒸着することにより、スト
ライプ状金属膜を形成する方法、および 2)第1電極の列と直交する方向に配列された隔壁に沿っ
て、第1電極の膜厚と有機層の膜厚の和(h3)よりも
高い位置に、オーバーハング部のある構造をもたせ、例
えば蒸着法を用いて所定の膜厚の金属を蒸着することに
より、隔壁と金属膜とをストライプ状に断線させて形成
する方法 が挙げられる。Formation of Second Electrode A second electrode 4 in the form of stripes is formed in a direction orthogonal to the rows of the first electrodes (see FIGS. 6 (a-4) and (b-4)). As a formation method, for example, 1) using a stripe-shaped shadow mask for electrode formation,
A method of forming a striped metal film by evaporating a metal having a predetermined thickness using a dry process or a wet process such as an evaporation method, and 2) partition walls arranged in a direction perpendicular to the rows of the first electrodes. Along the line, a structure having an overhang portion is provided at a position higher than the sum (h3) of the film thickness of the first electrode and the film thickness of the organic layer, and a metal having a predetermined film thickness is deposited by using, for example, a vapor deposition method. By doing so, a method of forming the partition wall and the metal film by disconnecting them in a stripe shape can be given.
【0032】封止膜の形成 必要に応じて、有機LEDディスプレイの防湿のため
に、公知の材料を用いて素子の全面を封止する〔図6
(a-5)および(b-5) 参照〕。 偏光板の形成 さらに、必要に応じて、有機LEDディスプレイのコン
トラストの向上のために、基板の外側(有機層と反対
側)に偏向板を設ける。Formation of Sealing Film If necessary, the entire surface of the element is sealed with a known material to prevent moisture from the organic LED display [FIG.
(See (a-5) and (b-5)). Formation of Polarizing Plate Further, if necessary, a polarizing plate is provided outside the substrate (on the side opposite to the organic layer) to improve the contrast of the organic LED display.
【0033】実施の形態2 図7の (c-1)〜(c-5) および (d-1)〜(d-5) は、それぞ
れ図3(b)の有機LEDディスプレイのC−C断面お
よびD−D断面を表し、 (c-1)と(d-1) のように末尾の
数字は同じ工程であることを表す。Embodiment 2 (c-1) to (c-5) and (d-1) to (d-5) of FIG. 7 are CC cross sections of the organic LED display of FIG. , And DD section, and the numbers at the end indicate the same step as in (c-1) and (d-1).
【0034】第1電極の形成 公知の方法により薄膜トランジスタ11と第1電極2を
形成する〔図7 (c-1)および(d-1) 参照〕。 隔壁の形成 次に、レジストを用い、例えば通常のフォトリソグラフ
ィ技術で隔壁5を形成する〔図7 (c-2)および(d-2) 参
照〕。Formation of First Electrode The thin film transistor 11 and the first electrode 2 are formed by a known method (see FIGS. 7C-1 and D-1). Next, partition walls 5 are formed using a resist, for example, by a normal photolithography technique (see FIGS. 7C-2 and D-2).
【0035】有機層の形成 前記の発光層形成用塗液と任意に電荷輸送層形成用塗液
を用いて、印刷法により第1電極2上に発光層もしくは
発光層と電荷輸送層からなる有機層3を形成する。〔図
7 (c-3)および(d-3) 参照〕。 第2電極の形成 蒸着法などのドライプロセスもしくはウエットプロセス
により第2電極4を形成する〔図7 (c-4)および(d-4)
参照〕。Formation of Organic Layer Using the above-mentioned coating solution for forming a light emitting layer and optionally a coating solution for forming a charge transport layer, an organic layer comprising a light emitting layer or a light emitting layer and a charge transport layer is formed on the first electrode 2 by a printing method. The layer 3 is formed. [See FIGS. 7 (c-3) and (d-3)]. Formation of Second Electrode The second electrode 4 is formed by a dry process such as an evaporation method or a wet process [FIGS. 7 (c-4) and (d-4)].
reference〕.
【0036】封止膜の形成 必要に応じて、有機LEDディスプレイの防湿のため
に、公知の材料を用いて素子の全面を封止する〔図7
(c-5)および(d-5) 参照〕。 偏光板の形成 さらに、必要に応じて、有機LEDディスプレイのコン
トラストの向上のために、基板の外側(有機層と反対
側)に偏向板を設ける。Formation of Sealing Film If necessary, the entire surface of the device is sealed with a known material to prevent moisture from the organic LED display [FIG.
(See (c-5) and (d-5)). Formation of Polarizing Plate Further, if necessary, a polarizing plate is provided outside the substrate (on the side opposite to the organic layer) to improve the contrast of the organic LED display.
【0037】[0037]
【実施例】本発明を実施例によりさらに具体的に説明す
るが、これらの実施例により本発明が限定されるもので
はない。実施例1および2は上記実施の形態1の具体例
を示し、実施例3および4は上記実施の形態2の具体例
を示す。EXAMPLES The present invention will be described more specifically with reference to examples, but the present invention is not limited by these examples. Examples 1 and 2 show specific examples of the first embodiment, and Examples 3 and 4 show specific examples of the second embodiment.
【0038】実施例1 膜厚130nmのITO付きガラス基板をフォトリソグ
ラフィ法により、第1電極としてピッチ120μmで幅
100μmのITO透明ストライプ電極を形成した。次
に、この基板を、従来のウエットプロセス(イソプロピ
ルアルコール、アセトンおよび純水)により洗浄し、さ
らに従来のドライプロセス(UVオゾン処理およびプラ
ズマ処理)により洗浄した。次に、この基板上にポジ型
レジストを用いて、ITO電極の列と平行する方向には
ピッチ120μmで、ITO電極の列と直交する方向に
はピッチ200μmで、幅40μm、膜厚20μmのテ
ーパ断面を有する隔壁をフォトレジスト法により形成し
た。Example 1 An ITO transparent stripe electrode having a pitch of 120 μm and a width of 100 μm was formed as a first electrode on a glass substrate with ITO having a thickness of 130 nm by photolithography. Next, the substrate was washed by a conventional wet process (isopropyl alcohol, acetone and pure water), and further washed by a conventional dry process (UV ozone treatment and plasma treatment). Next, using a positive resist on this substrate, a tape having a pitch of 120 μm in a direction parallel to the row of ITO electrodes, a pitch of 200 μm in a direction perpendicular to the row of ITO electrodes, a width of 40 μm, and a thickness of 20 μm. A partition having a cross section was formed by a photoresist method.
【0039】市販のインクジェットプリンタにより、3,
4-ポリエチレンジオキシチオフェンを用いて、膜厚50
nmの正孔輸送層を形成した。次に、市販のインクジェ
ットプリンタにより、赤色、緑色および青色に発光する
発光材料を含む塗液をパターニング塗布し、膜厚50n
mの発光層を形成した。赤色の発光材料としてシアノポ
リフェニレンビニレン前駆体、緑色の発光材料としてポ
リフェニレンビニレン前駆体、および青色の発光材料と
してポリパラフェニレンを用いた。シアノポリフェニレ
ンビニレン前駆体とポリフェニレンビニレン前駆体は、
膜形成後、アルゴン(Ar)雰囲気下、150℃で6時
間加熱処理することにより、それぞれシアノポリフェニ
レンビニレンとポリフェニレンビニレンにした。With a commercially available ink jet printer, 3,
Film thickness of 50 using 4-polyethylenedioxythiophene
A hole transport layer having a thickness of nm was formed. Next, using a commercially available inkjet printer, a coating liquid containing a luminescent material that emits red, green and blue light is applied by patterning to a film thickness of 50 n.
m light emitting layers were formed. A cyanopolyphenylenevinylene precursor was used as a red light-emitting material, a polyphenylenevinylene precursor was used as a green light-emitting material, and polyparaphenylene was used as a blue light-emitting material. Cyanopolyphenylene vinylene precursor and polyphenylene vinylene precursor,
After the film formation, a heat treatment was performed at 150 ° C. for 6 hours in an argon (Ar) atmosphere to obtain cyanopolyphenylenevinylene and polyphenylenevinylene, respectively.
【0040】次に、シャドウマスクを用いた蒸着法によ
り、第2電極として膜厚0.2μm、幅300μm、ピ
ッチ320μmのAlLi合金電極を形成した。最後に
得られた素子をエポキシ樹脂を用いて封止した。以上の
ようにして作製した有機LEDディスプレイにおいて
は、第2電極の断線が発生せず、第1電極と第2電極と
の間、第1電極間および第2電極間でのショートも発生
しなかった。また、発光層および電荷輸送層の膜厚の不
均一による各画素における発光の不均一は観測されなか
った。Next, an AlLi alloy electrode having a thickness of 0.2 μm, a width of 300 μm, and a pitch of 320 μm was formed as a second electrode by an evaporation method using a shadow mask. Finally, the obtained device was sealed with an epoxy resin. In the organic LED display manufactured as described above, no disconnection of the second electrode occurs, and no short circuit occurs between the first electrode and the second electrode, between the first electrode, and between the second electrodes. Was. In addition, non-uniform light emission in each pixel due to non-uniform film thickness of the light emitting layer and the charge transport layer was not observed.
【0041】実施例2 膜厚130nmの付きガラス基板をフォトリソグラフィ
法により、第1電極としてピッチ120μmで幅100
μmのITO透明ストライプ電極を形成した。次に、こ
の基板を、従来のウエットプロセス(イソプロピルアル
コール、アセトンおよび純水)により洗浄し、さらに従
来のドライプロセス(UVオゾン処理およびプラズマ処
理)により洗浄した。次に、この基板上にポジ型レジス
トを用いて、ITO電極の列と平行する方向にピッチ1
20μmで、幅40μm、膜厚15μmのテーパ断面を
有する隔壁をフォトレジスト法により形成し、ネガ型レ
ジストを用いて、ITO電極の列と直交する方向にピッ
チ200μmで、幅40μm、膜厚15μmの逆テーパ
断面を有する隔壁をフォトレジスト法により形成した。Example 2 A glass substrate having a thickness of 130 nm was formed by photolithography as a first electrode at a pitch of 120 μm and a width of 100 μm.
A μm ITO transparent stripe electrode was formed. Next, the substrate was washed by a conventional wet process (isopropyl alcohol, acetone and pure water), and further washed by a conventional dry process (UV ozone treatment and plasma treatment). Next, using a positive resist on this substrate, a pitch of 1 is applied in a direction parallel to the row of ITO electrodes.
A barrier having a tapered cross section of 20 μm, width of 40 μm, and thickness of 15 μm is formed by a photoresist method, and using a negative resist, a pitch of 200 μm in a direction orthogonal to the row of the ITO electrodes, a width of 40 μm, and a thickness of 15 μm. A partition having an inverse tapered cross section was formed by a photoresist method.
【0042】実施例1と同様にして、正孔輸送層および
発光層を形成した。次に、蒸着法により、第2電極とし
て膜厚0.2μmのAlLi合金電極を形成した。最後
に得られた素子をエポキシ樹脂を用いて封止した。以上
のようにして作製した有機LEDディスプレイにおいて
は、第2電極の断線が発生せず、第1電極と第2電極と
の間、第1電極間および第2電極間でのショートも発生
しなかった。また、発光層および電荷輸送層の膜厚の不
均一による各画素における発光の不均一は観測されなか
った。In the same manner as in Example 1, a hole transport layer and a light emitting layer were formed. Next, an AlLi alloy electrode having a thickness of 0.2 μm was formed as a second electrode by an evaporation method. Finally, the obtained device was sealed with an epoxy resin. In the organic LED display manufactured as described above, no disconnection of the second electrode occurs, and no short circuit occurs between the first electrode and the second electrode, between the first electrode, and between the second electrodes. Was. In addition, non-uniform light emission in each pixel due to non-uniform film thickness of the light emitting layer and the charge transport layer was not observed.
【0043】実施例3 ガラス基板上に、薄膜トランジスタを形成し、第1電極
として長辺200μm、短辺120μmのITO透明電
極を形成した。次に、この基板上にポジ型レジストを用
いて、幅40μm、膜厚20μmのテーパ断面を有する
隔壁をフォトレジスト法により形成した。続いて、実施
例1と同様にして、正孔輸送層および発光層を形成し、
実施例2と同様にして第2電極を形成し、最後に得られ
た素子をエポキシ樹脂を用いて封止した。以上のように
して作製した有機LEDディスプレイにおいては、第2
電極の断線が発生せず、第1電極と第2電極との間、第
1電極間および第2電極間でのショートも発生しなかっ
た。また、発光層および電荷輸送層の膜厚の不均一によ
る各画素における発光の不均一は観測されなかった。Example 3 A thin film transistor was formed on a glass substrate, and an ITO transparent electrode having a long side of 200 μm and a short side of 120 μm was formed as a first electrode. Next, a partition having a width of 40 μm and a thickness of 20 μm and having a tapered cross section was formed on the substrate by a photoresist method using a positive resist. Subsequently, a hole transport layer and a light emitting layer are formed in the same manner as in Example 1.
A second electrode was formed in the same manner as in Example 2, and the device finally obtained was sealed with an epoxy resin. In the organic LED display manufactured as described above, the second
No disconnection of the electrodes occurred, and no short circuit occurred between the first and second electrodes, between the first electrodes, and between the second electrodes. In addition, non-uniform light emission in each pixel due to non-uniform film thickness of the light emitting layer and the charge transport layer was not observed.
【0044】実施例4 ガラス基板上に、薄膜トランジスタを形成し、第1電極
としてAlLi反射電極を形成した。次に、この基板上
に、実施例3と同様にして隔壁を形成し、実施例1と同
様にして正孔輸送層および発光層を形成し、第2電極と
して膜厚0.2μmのITO透明電極を蒸着法により形
成した。最後に得られた素子をエポキシ樹脂を用いて封
止した。以上のようにして作製した有機LEDディスプ
レイにおいては、第2電極の断線が発生せず、第1電極
と第2電極との間、第1電極間および第2電極間でのシ
ョートも発生しなかった。また、発光層および電荷輸送
層の膜厚の不均一による各画素における発光の不均一は
観測されなかった。Example 4 A thin film transistor was formed on a glass substrate, and an AlLi reflective electrode was formed as a first electrode. Next, a partition wall was formed on this substrate in the same manner as in Example 3, a hole transport layer and a light emitting layer were formed in the same manner as in Example 1, and a 0.2 μm-thick ITO transparent film was formed as the second electrode. The electrodes were formed by a vapor deposition method. Finally, the obtained device was sealed with an epoxy resin. In the organic LED display manufactured as described above, no disconnection of the second electrode occurs, and no short circuit occurs between the first electrode and the second electrode, between the first electrode, and between the second electrodes. Was. In addition, non-uniform light emission in each pixel due to non-uniform film thickness of the light emitting layer and the charge transport layer was not observed.
【0045】[0045]
【発明の効果】本発明の有機LEDディスプレイは、発
光層もしくは発光層と電荷輸送層からなる有機層を含む
有機LED素子(画素)が複数配置された有機LEDデ
ィスプレイであって、基板と、基板上に形成された第
1電極と、有機層と、第1電極上に突出した隔壁と、第
2電極とからなり、第1電極と第2電極とが複数列から
なるマトリックス状電極であり、第1電極の列と平行す
る方向に配列された隔壁が有機層よりも高い位置にオー
バーハング部のない構造を有する、あるいは基板と、
基板上に形成された第1電極および画素を駆動するため
の薄膜トランジスタと、有機層と、第1電極上に突出し
有機層を囲む格子状の隔壁と、第2電極とからなり、隔
壁の少なくとも一方が有機層よりも高い位置にオーバー
ハング部のない構造を有することを特徴とする。The organic LED display of the present invention is an organic LED display in which a plurality of organic LED elements (pixels) each including a light-emitting layer or an organic layer composed of a light-emitting layer and a charge transport layer are arranged. A first electrode, an organic layer, a partition protruding above the first electrode, and a second electrode, the first electrode and the second electrode being a matrix-shaped electrode including a plurality of columns; Partition walls arranged in a direction parallel to the first electrode row have a structure without an overhang portion at a position higher than the organic layer, or
A thin film transistor for driving a first electrode and a pixel formed on a substrate, an organic layer, a grid-like partition protruding above the first electrode and surrounding the organic layer, and a second electrode, and at least one of the partition walls Has a structure without an overhang portion at a position higher than the organic layer.
【0046】また、隔壁を設け、有機層を印刷法、特に
インクジェット方式で形成するので、各画素内で均一な
膜厚の有機層を形成でき、かつ各画素内で発光色の異な
る発光材料が交じり合わない。したがって、有機LED
ディスプレイの生産管理が簡単になり、電極の断線がな
く、安価で表示品位の優れた大画面のフルカラー表示可
能な有機LEDディスプレイを提供することができる。Further, since a partition is provided and the organic layer is formed by a printing method, particularly, an ink jet method, an organic layer having a uniform thickness can be formed in each pixel, and a luminescent material having a different luminescent color can be formed in each pixel. Do not mix. Therefore, organic LED
It is possible to provide an inexpensive, large-screen, organic LED display capable of full-color display with excellent display quality, in which the production management of the display is simplified, the electrodes are not disconnected.
【図1】本発明の有機LEDディスプレイの有機LED
素子の概略断面図である。FIG. 1 is an organic LED of the organic LED display of the present invention.
It is a schematic sectional drawing of an element.
【図2】本発明の有機LEDディスプレイの有機層の概
略部分平面図である。FIG. 2 is a schematic partial plan view of an organic layer of the organic LED display of the present invention.
【図3】本発明の(a)互いに直交するストライプ状電
極を有する有機LEDディスプレイおよび(b)薄膜ト
ランジスタを有する有機LEDディスプレイの概略部分
平面図透視図である。FIG. 3 is a schematic partial plan view perspective view of (a) an organic LED display having striped electrodes orthogonal to each other and (b) an organic LED display having thin film transistors.
【図4】本発明の有機LEDディスプレイにおける
(a)オーバーハング部のない構造の隔壁および(b)
オーバーハング部のある構造の隔壁の概略断面図であ
る。FIG. 4 shows (a) a partition wall without an overhang portion and (b) in the organic LED display of the present invention.
It is a schematic sectional drawing of the partition of a structure with an overhang part.
【図5】本発明のインクジェット方式による有機層の形
成工程の概略図である。FIG. 5 is a schematic view of a step of forming an organic layer by an inkjet method according to the present invention.
【図6】本発明の実施の形態1による有機LEDディス
プレイの製造工程の概略断面図であり、(a−1)〜
(a−5)は図3(a)のA−A断面を表し、(b−
1)〜(b−5)は図3(a)のB−B断面を表す。FIG. 6 is a schematic cross-sectional view of a manufacturing step of the organic LED display according to the first embodiment of the present invention, in which (a-1) to
(A-5) shows an AA cross section of FIG.
1) to (b-5) show BB cross sections in FIG.
【図7】本発明の実施の形態2による有機LEDディス
プレイの製造工程の概略断面図であり、(c−1)〜
(c−5)は図3(b)のC−C断面を表し、(d−
1)〜(d−4)は図3(b)のD−D断面を表す。FIG. 7 is a schematic cross-sectional view of a manufacturing process of the organic LED display according to the second embodiment of the present invention;
(C-5) shows a cross section taken along the line CC in FIG.
1) to (d-4) show DD cross sections in FIG.
1 基板 2 第1電極 3 有機層 4 第2電極 5 隔壁 51 第1電極の列と平行する方向に配列された隔壁 52 第1電極の列と直交する方向に配列された隔壁 6 偏向板 7 封止膜または封止基板 8 赤色(R)発光画素 9 緑色(G)発光画素 10 青色(B)発光画素 11 薄膜トランジスタ(TFT) 12 ソースバスライン 13 ゲートバスライン 14 インクジェットプリンタヘッド h0 有機層の膜厚(高さ) h1 第1電極の列と直交する方向に配列された隔壁の
高さ h2 第1電極の列と平行する方向に配列された隔壁の
高さ h3 第1電極の膜厚と有機層の膜厚の和(高さ)DESCRIPTION OF SYMBOLS 1 Substrate 2 1st electrode 3 Organic layer 4 2nd electrode 5 Partition wall 51 Partition wall arranged in the direction parallel to the row of 1st electrode 52 Partition wall arranged in the direction orthogonal to the row of 1st electrode 6 Deflection plate 7 Sealing Stop film or sealing substrate 8 Red (R) light emitting pixel 9 Green (G) light emitting pixel 10 Blue (B) light emitting pixel 11 Thin film transistor (TFT) 12 Source bus line 13 Gate bus line 14 Inkjet printer head h0 Film thickness of organic layer (Height) h1 Height of partition walls arranged in a direction perpendicular to the row of first electrodes h2 Height of partition walls arranged in a direction parallel to the row of first electrodes h3 Film thickness of first electrode and organic layer Sum of film thickness (height)
Claims (6)
なる有機層を含む有機LED素子が複数配置された有機
LEDディスプレイであって、基板と、基板上に形成さ
れた第1電極と、有機層と、第1電極上に突出した隔壁
と、第2電極とからなり、第1電極と第2電極とが複数
列からなるマトリックス状電極であり、第1電極の列と
平行する方向に配列された隔壁が有機層よりも高い位置
にオーバーハング部のない構造を有し、かつ角部が外に
凸状になる円弧の一部であることを特徴とする有機LE
Dディスプレイ。An organic LED display in which a plurality of organic LED elements each including a light emitting layer or an organic layer composed of a light emitting layer and a charge transport layer are arranged, the substrate comprising: a substrate; a first electrode formed on the substrate; A first electrode and a second electrode are arranged in a matrix in a plurality of rows, and are arranged in a direction parallel to the rows of the first electrodes. Organic EL having a structure in which the formed partition wall has no overhang portion at a position higher than the organic layer, and is a part of an arc whose corners are convex outward.
D display.
1電極の列と直交する方向に配列された隔壁が第1電極
の膜厚と有機層の膜厚の和よりも高い位置にオーバーハ
ング部のある構造を有し、かつ第1電極の列と平行する
方向に配列された隔壁の高さh2と第1電極の列と直交
する方向に配列された隔壁の高さh1とがh1>h2の
関係である請求項1に記載の有機LEDディスプレイ。2. In a partition surrounding an organic layer in a lattice pattern, a partition arranged in a direction orthogonal to a row of first electrodes is overlaid at a position higher than the sum of the thickness of the first electrode and the thickness of the organic layer. The height h2 of the partition walls having a structure with a hang portion and arranged in a direction parallel to the row of the first electrodes and the height h1 of the partition walls arranged in a direction perpendicular to the row of the first electrodes are h1. The organic LED display according to claim 1, wherein the relationship is> h2.
なる有機層を含む有機LED素子が複数配置された有機
LEDディスプレイであって、基板と、基板上に形成さ
れた第1電極および画素を駆動するための薄膜トランジ
スタと、有機層と、第1電極上に突出し有機層を囲む格
子状の隔壁と、第2電極とからなり、隔壁の少なくとも
一方が有機層よりも高い位置にオーバーハング部のない
構造を有し、かつ角部が外に凸状になる円弧の一部であ
ることを特徴とする有機LEDディスプレイ。3. An organic LED display in which a plurality of organic LED elements each including a light-emitting layer or an organic layer composed of a light-emitting layer and a charge transporting layer are arranged, wherein a substrate, a first electrode and a pixel formed on the substrate are formed. A thin-film transistor for driving, an organic layer, a grid-like partition protruding above the first electrode and surrounding the organic layer, and a second electrode, and at least one of the partitions has an overhang portion at a position higher than the organic layer. An organic LED display, which has no structure, and is a part of an arc whose corners are convex outward.
の有機LEDディスプレイの製造方法であって、第2電
極をマスク蒸着法によりストライプ状に形成することを
特徴とする有機LEDディスプレイの製造方法。4. The method for manufacturing an organic LED display according to claim 1, wherein the second electrode is formed in a stripe shape by a mask vapor deposition method. Production method.
機LEDディスプレイの製造方法であって、有機層の少
なくとも1層を印刷法により形成することを特徴とする
有機LEDディスプレイの製造方法。5. The method for manufacturing an organic LED display according to claim 1, wherein at least one of the organic layers is formed by a printing method. Method.
ソグラフィ法によりレジストマスクを形成し、次いでド
ライエッチング法またはウエットエッチング法により隔
壁材料層を食刻して隔壁を形成することを特徴とする請
求項4または5に記載の有機LEDディスプレイの製造
方法。6. A partition material layer is formed on a substrate, a resist mask is formed by a photolithography method, and then the partition material layer is etched by a dry etching method or a wet etching method to form a partition. The method for manufacturing an organic LED display according to claim 4.
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