JP2000318099A - Film or sheet for partitioning clean room - Google Patents
Film or sheet for partitioning clean roomInfo
- Publication number
- JP2000318099A JP2000318099A JP11127024A JP12702499A JP2000318099A JP 2000318099 A JP2000318099 A JP 2000318099A JP 11127024 A JP11127024 A JP 11127024A JP 12702499 A JP12702499 A JP 12702499A JP 2000318099 A JP2000318099 A JP 2000318099A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- film
- vinyl chloride
- clean room
- partitioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000638 solvent extraction Methods 0.000 title claims description 33
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 claims abstract description 71
- 239000011347 resin Substances 0.000 claims abstract description 64
- 229920005989 resin Polymers 0.000 claims abstract description 64
- 239000004014 plasticizer Substances 0.000 claims abstract description 44
- 239000003973 paint Substances 0.000 claims abstract description 29
- 239000004020 conductor Substances 0.000 claims abstract description 28
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 15
- 125000004432 carbon atom Chemical group C* 0.000 claims description 12
- 239000011342 resin composition Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 6
- 125000002947 alkylene group Chemical group 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 abstract description 11
- 230000001070 adhesive effect Effects 0.000 abstract description 11
- 238000010943 off-gassing Methods 0.000 abstract description 7
- 238000010030 laminating Methods 0.000 abstract description 4
- 230000000704 physical effect Effects 0.000 abstract description 3
- 238000005192 partition Methods 0.000 description 29
- 239000004925 Acrylic resin Substances 0.000 description 14
- 229920000178 Acrylic resin Polymers 0.000 description 14
- -1 phosphate ester Chemical class 0.000 description 13
- 239000006229 carbon black Substances 0.000 description 9
- 239000011230 binding agent Substances 0.000 description 8
- 239000003063 flame retardant Substances 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- 239000003381 stabilizer Substances 0.000 description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 7
- 239000011737 fluorine Substances 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 7
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910019142 PO4 Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000010452 phosphate Substances 0.000 description 6
- 239000000049 pigment Substances 0.000 description 6
- 239000003963 antioxidant agent Substances 0.000 description 5
- 239000000314 lubricant Substances 0.000 description 5
- XNGIFLGASWRNHJ-UHFFFAOYSA-N o-dicarboxybenzene Natural products OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 5
- 239000002033 PVDF binder Substances 0.000 description 4
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 4
- 241000238631 Hexapoda Species 0.000 description 3
- 241000270666 Testudines Species 0.000 description 3
- 230000003078 antioxidant effect Effects 0.000 description 3
- QFFVPLLCYGOFPU-UHFFFAOYSA-N barium chromate Chemical compound [Ba+2].[O-][Cr]([O-])(=O)=O QFFVPLLCYGOFPU-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 3
- 229920000915 polyvinyl chloride Polymers 0.000 description 3
- 239000004800 polyvinyl chloride Substances 0.000 description 3
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical class C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 3
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 3
- 239000001052 yellow pigment Substances 0.000 description 3
- XMNDMAQKWSQVOV-UHFFFAOYSA-N (2-methylphenyl) diphenyl phosphate Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C=CC=CC=1)OC1=CC=CC=C1 XMNDMAQKWSQVOV-UHFFFAOYSA-N 0.000 description 2
- YEVQZPWSVWZAOB-UHFFFAOYSA-N 2-(bromomethyl)-1-iodo-4-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=C(I)C(CBr)=C1 YEVQZPWSVWZAOB-UHFFFAOYSA-N 0.000 description 2
- IRIAEXORFWYRCZ-UHFFFAOYSA-N Butylbenzyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCC1=CC=CC=C1 IRIAEXORFWYRCZ-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Chemical compound CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- YSMRWXYRXBRSND-UHFFFAOYSA-N TOTP Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C)OC1=CC=CC=C1C YSMRWXYRXBRSND-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 2
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 2
- AGXUVMPSUKZYDT-UHFFFAOYSA-L barium(2+);octadecanoate Chemical compound [Ba+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O AGXUVMPSUKZYDT-UHFFFAOYSA-L 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- 150000004665 fatty acids Chemical class 0.000 description 2
- 230000002070 germicidal effect Effects 0.000 description 2
- HSEMFIZWXHQJAE-UHFFFAOYSA-N hexadecanamide Chemical compound CCCCCCCCCCCCCCCC(N)=O HSEMFIZWXHQJAE-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- LYRFLYHAGKPMFH-UHFFFAOYSA-N octadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(N)=O LYRFLYHAGKPMFH-UHFFFAOYSA-N 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 150000003077 polyols Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000344 soap Substances 0.000 description 2
- 235000012424 soybean oil Nutrition 0.000 description 2
- 239000003549 soybean oil Substances 0.000 description 2
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical compound CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 description 2
- WTLBZVNBAKMVDP-UHFFFAOYSA-N tris(2-butoxyethyl) phosphate Chemical compound CCCCOCCOP(=O)(OCCOCCCC)OCCOCCCC WTLBZVNBAKMVDP-UHFFFAOYSA-N 0.000 description 2
- UJMBCXLDXJUMFB-UHFFFAOYSA-K trisodium;5-oxo-1-(4-sulfonatophenyl)-4-[(4-sulfonatophenyl)diazenyl]-4h-pyrazole-3-carboxylate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)C1=NN(C=2C=CC(=CC=2)S([O-])(=O)=O)C(=O)C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 UJMBCXLDXJUMFB-UHFFFAOYSA-K 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XOOUIPVCVHRTMJ-UHFFFAOYSA-L zinc stearate Chemical compound [Zn+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O XOOUIPVCVHRTMJ-UHFFFAOYSA-L 0.000 description 2
- HJIAMFHSAAEUKR-UHFFFAOYSA-N (2-hydroxyphenyl)-phenylmethanone Chemical compound OC1=CC=CC=C1C(=O)C1=CC=CC=C1 HJIAMFHSAAEUKR-UHFFFAOYSA-N 0.000 description 1
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- QMMJWQMCMRUYTG-UHFFFAOYSA-N 1,2,4,5-tetrachloro-3-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=C(Cl)C(Cl)=CC(Cl)=C1Cl QMMJWQMCMRUYTG-UHFFFAOYSA-N 0.000 description 1
- YAOMHRRYSRRRKP-UHFFFAOYSA-N 1,2-dichloropropyl 2,3-dichloropropyl 3,3-dichloropropyl phosphate Chemical compound ClC(Cl)CCOP(=O)(OC(Cl)C(Cl)C)OCC(Cl)CCl YAOMHRRYSRRRKP-UHFFFAOYSA-N 0.000 description 1
- LDVVTQMJQSCDMK-UHFFFAOYSA-N 1,3-dihydroxypropan-2-yl formate Chemical compound OCC(CO)OC=O LDVVTQMJQSCDMK-UHFFFAOYSA-N 0.000 description 1
- FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical compound C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 1
- FLPJVCMIKUWSDR-UHFFFAOYSA-N 2-(4-formylphenoxy)acetamide Chemical compound NC(=O)COC1=CC=C(C=O)C=C1 FLPJVCMIKUWSDR-UHFFFAOYSA-N 0.000 description 1
- JFMYRCRXYIIGBB-UHFFFAOYSA-N 2-[(2,4-dichlorophenyl)diazenyl]-n-[4-[4-[[2-[(2,4-dichlorophenyl)diazenyl]-3-oxobutanoyl]amino]-3-methylphenyl]-2-methylphenyl]-3-oxobutanamide Chemical compound C=1C=C(C=2C=C(C)C(NC(=O)C(N=NC=3C(=CC(Cl)=CC=3)Cl)C(C)=O)=CC=2)C=C(C)C=1NC(=O)C(C(=O)C)N=NC1=CC=C(Cl)C=C1Cl JFMYRCRXYIIGBB-UHFFFAOYSA-N 0.000 description 1
- QTSNFLIDNYOATQ-UHFFFAOYSA-N 2-[(4-chloro-2-nitrophenyl)diazenyl]-n-(2-chlorophenyl)-3-oxobutanamide Chemical compound C=1C=CC=C(Cl)C=1NC(=O)C(C(=O)C)N=NC1=CC=C(Cl)C=C1[N+]([O-])=O QTSNFLIDNYOATQ-UHFFFAOYSA-N 0.000 description 1
- WZSFTHVIIGGDOI-UHFFFAOYSA-N 4,5,6,7-tetrachloro-3-[2-methyl-3-[(4,5,6,7-tetrachloro-3-oxoisoindol-1-yl)amino]anilino]isoindol-1-one Chemical compound ClC1=C(Cl)C(Cl)=C(Cl)C2=C1C(NC1=CC=CC(NC=3C4=C(C(=C(Cl)C(Cl)=C4Cl)Cl)C(=O)N=3)=C1C)=NC2=O WZSFTHVIIGGDOI-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- QOACTULVIZXIHU-UHFFFAOYSA-N C=C.Br.Br.Br.Br Chemical compound C=C.Br.Br.Br.Br QOACTULVIZXIHU-UHFFFAOYSA-N 0.000 description 1
- CHDVXKLFZBWKEN-UHFFFAOYSA-N C=C.F.F.F.Cl Chemical compound C=C.F.F.F.Cl CHDVXKLFZBWKEN-UHFFFAOYSA-N 0.000 description 1
- 239000004803 Di-2ethylhexylphthalate Substances 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- PYVHTIWHNXTVPF-UHFFFAOYSA-N F.F.F.F.C=C Chemical compound F.F.F.F.C=C PYVHTIWHNXTVPF-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 102000003729 Neprilysin Human genes 0.000 description 1
- 108090000028 Neprilysin Proteins 0.000 description 1
- YRXJWEUFGHUZJW-UHFFFAOYSA-N O=C(C1=CC=CC=C11)OC1=O.Br.Br.Br.Br Chemical compound O=C(C1=CC=CC=C11)OC1=O.Br.Br.Br.Br YRXJWEUFGHUZJW-UHFFFAOYSA-N 0.000 description 1
- SACJLEAFEZNFPQ-UHFFFAOYSA-N O=C(C1=CC=CC=C11)OC1=O.Cl.Cl.Cl.Cl Chemical compound O=C(C1=CC=CC=C11)OC1=O.Cl.Cl.Cl.Cl SACJLEAFEZNFPQ-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- YYQRGCZGSFRBAM-UHFFFAOYSA-N Triclofos Chemical compound OP(O)(=O)OCC(Cl)(Cl)Cl YYQRGCZGSFRBAM-UHFFFAOYSA-N 0.000 description 1
- PQYJRMFWJJONBO-UHFFFAOYSA-N Tris(2,3-dibromopropyl) phosphate Chemical compound BrCC(Br)COP(=O)(OCC(Br)CBr)OCC(Br)CBr PQYJRMFWJJONBO-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 229940083898 barium chromate Drugs 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- ZFMQKOWCDKKBIF-UHFFFAOYSA-N bis(3,5-difluorophenyl)phosphane Chemical compound FC1=CC(F)=CC(PC=2C=C(F)C=C(F)C=2)=C1 ZFMQKOWCDKKBIF-UHFFFAOYSA-N 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- DWPHWVJZBHLVPI-UHFFFAOYSA-N bromophosphonic acid Chemical compound OP(O)(Br)=O DWPHWVJZBHLVPI-UHFFFAOYSA-N 0.000 description 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- CJZGTCYPCWQAJB-UHFFFAOYSA-L calcium stearate Chemical compound [Ca+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O CJZGTCYPCWQAJB-UHFFFAOYSA-L 0.000 description 1
- 239000008116 calcium stearate Substances 0.000 description 1
- 235000013539 calcium stearate Nutrition 0.000 description 1
- AFSKMUFTKFPHCZ-UHFFFAOYSA-N calcium;oxolead Chemical compound [Ca].[Pb]=O AFSKMUFTKFPHCZ-UHFFFAOYSA-N 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- 229940074979 cetyl palmitate Drugs 0.000 description 1
- OIQPTROHQCGFEF-UHFFFAOYSA-L chembl1371409 Chemical compound [Na+].[Na+].OC1=CC=C2C=C(S([O-])(=O)=O)C=CC2=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 OIQPTROHQCGFEF-UHFFFAOYSA-L 0.000 description 1
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- XMYLSWOTJKUSHE-UHFFFAOYSA-N cyanamide;lead Chemical compound [Pb].NC#N XMYLSWOTJKUSHE-UHFFFAOYSA-N 0.000 description 1
- GLOQRSIADGSLRX-UHFFFAOYSA-N decyl diphenyl phosphite Chemical compound C=1C=CC=CC=1OP(OCCCCCCCCCC)OC1=CC=CC=C1 GLOQRSIADGSLRX-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- MIMDHDXOBDPUQW-UHFFFAOYSA-N dioctyl decanedioate Chemical compound CCCCCCCCOC(=O)CCCCCCCCC(=O)OCCCCCCCC MIMDHDXOBDPUQW-UHFFFAOYSA-N 0.000 description 1
- XWVQUJDBOICHGH-UHFFFAOYSA-N dioctyl nonanedioate Chemical compound CCCCCCCCOC(=O)CCCCCCCC(=O)OCCCCCCCC XWVQUJDBOICHGH-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- ZJXZSIYSNXKHEA-UHFFFAOYSA-N ethyl dihydrogen phosphate Chemical compound CCOP(O)(O)=O ZJXZSIYSNXKHEA-UHFFFAOYSA-N 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- PXDJXZJSCPSGGI-UHFFFAOYSA-N hexadecanoic acid hexadecyl ester Natural products CCCCCCCCCCCCCCCCOC(=O)CCCCCCCCCCCCCCC PXDJXZJSCPSGGI-UHFFFAOYSA-N 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 239000012796 inorganic flame retardant Substances 0.000 description 1
- 239000000077 insect repellent Substances 0.000 description 1
- 229940057995 liquid paraffin Drugs 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- FTQWRYSLUYAIRQ-UHFFFAOYSA-N n-[(octadecanoylamino)methyl]octadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(=O)NCNC(=O)CCCCCCCCCCCCCCCCC FTQWRYSLUYAIRQ-UHFFFAOYSA-N 0.000 description 1
- RKISUIUJZGSLEV-UHFFFAOYSA-N n-[2-(octadecanoylamino)ethyl]octadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(=O)NCCNC(=O)CCCCCCCCCCCCCCCCC RKISUIUJZGSLEV-UHFFFAOYSA-N 0.000 description 1
- AWIZFKXFPHTRHN-UHFFFAOYSA-N naphtho[2,3-f]quinoline Chemical compound C1=CC=C2C3=CC4=CC=CC=C4C=C3C=CC2=N1 AWIZFKXFPHTRHN-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 239000001053 orange pigment Substances 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 150000003014 phosphoric acid esters Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- JQCXWCOOWVGKMT-UHFFFAOYSA-N phthalic acid diheptyl ester Natural products CCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC JQCXWCOOWVGKMT-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000004172 quinoline yellow Substances 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 235000012752 quinoline yellow Nutrition 0.000 description 1
- 229940051201 quinoline yellow Drugs 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 150000003902 salicylic acid esters Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229940037312 stearamide Drugs 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- NLOUTGCXBXLQIA-UHFFFAOYSA-N trichloro phosphate Chemical compound ClOP(=O)(OCl)OCl NLOUTGCXBXLQIA-UHFFFAOYSA-N 0.000 description 1
- 229960001147 triclofos Drugs 0.000 description 1
- 125000005591 trimellitate group Chemical group 0.000 description 1
- JNXDCMUUZNIWPQ-UHFFFAOYSA-N trioctyl benzene-1,2,4-tricarboxylate Chemical compound CCCCCCCCOC(=O)C1=CC=C(C(=O)OCCCCCCCC)C(C(=O)OCCCCCCCC)=C1 JNXDCMUUZNIWPQ-UHFFFAOYSA-N 0.000 description 1
- HQUQLFOMPYWACS-UHFFFAOYSA-N tris(2-chloroethyl) phosphate Chemical compound ClCCOP(=O)(OCCCl)OCCCl HQUQLFOMPYWACS-UHFFFAOYSA-N 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 239000001043 yellow dye Substances 0.000 description 1
- NDKWCCLKSWNDBG-UHFFFAOYSA-N zinc;dioxido(dioxo)chromium Chemical compound [Zn+2].[O-][Cr]([O-])(=O)=O NDKWCCLKSWNDBG-UHFFFAOYSA-N 0.000 description 1
- XAEWLETZEZXLHR-UHFFFAOYSA-N zinc;dioxido(dioxo)molybdenum Chemical compound [Zn+2].[O-][Mo]([O-])(=O)=O XAEWLETZEZXLHR-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Panels For Use In Building Construction (AREA)
- Laminated Bodies (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、半導体等を製造す
るクリーンルームの間仕切り用フィルム又はシート(以
下「フィルム・シート」と記す)に関する。The present invention relates to a film or sheet for partitioning a clean room for manufacturing semiconductors and the like (hereinafter referred to as "film sheet").
【0002】[0002]
【従来の技術】従来より、半導体等を製造するクリーン
ルームの間仕切り用フィルム・シートとして、合成樹脂
製の帯電防止性透明軟質フィルムが使用されている。中
でも、塩化ビニル系樹脂製の軟質フィルム・シートは、
帯電防止性、防炎性、透明性、柔軟性の面で特に優れる
ため、上記のクリーンルーム間仕切り用フィルム・シー
トとして多用されている。2. Description of the Related Art Conventionally, an antistatic transparent soft film made of a synthetic resin has been used as a film or sheet for partitioning a clean room for producing semiconductors and the like. Above all, flexible films and sheets made of vinyl chloride resin are
Since it is particularly excellent in terms of antistatic property, flameproof property, transparency and flexibility, it is widely used as the above-mentioned clean room partitioning film / sheet.
【0003】[0003]
【発明が解決しようとする課題】ところで、上記の間仕
切り用フィルム・シートは、一般に難燃性が要求される
ため、この様な用途に使用される塩化ビニル系樹脂製軟
質フィルム・シートは、可塑剤として、リン酸エステル
系可塑剤を含む塩化ビニル系樹脂組成物から得られるも
のが一般的である。However, since the above-mentioned partitioning film / sheet generally requires flame retardancy, a flexible film / sheet made of a vinyl chloride-based resin used for such an application is plasticized. As the agent, those obtained from a vinyl chloride resin composition containing a phosphate ester plasticizer are generally used.
【0004】一方、最近では、上記の塩化ビニル系樹脂
製軟質フィルム・シートをクリーンルーム間仕切り用フ
ィルム・シートとして使用した場合に、当該間仕切り用
フィルム・シートから放出される気体成分(アウトガス
と呼ばれている)によって、シリコンウエハー等が汚染
され、半導体等の不良率が増加するという問題がクロー
ズアップされている。特に、より精密な半導体等が製造
されるようになった今日では、上記の問題が深刻化して
きている。On the other hand, recently, when the above-mentioned flexible film / sheet made of a vinyl chloride resin is used as a film / sheet for partitioning a clean room, a gas component released from the partitioning film / sheet (referred to as outgas). ) Contaminates silicon wafers and the like, increasing the defect rate of semiconductors and the like. In particular, today, when more precise semiconductors and the like have been manufactured, the above-mentioned problems have become more serious.
【0005】上記の塩化ビニル系樹脂製軟質フィルム・
シートにおけるアウトガスの原因となる物質としては、
リン酸エステル系可塑剤、安定剤中に含まれるトリフェ
ニルリン酸エステル等が挙げられている。しかしなが
ら、上記のような塩化ビニル系樹脂製軟質フィルム・シ
ートから、この様な成分を全て除くと、所望の難燃性が
付与されない等、クリーンルームの間仕切り用フィルム
・シートとして要求される諸物性を損なうという問題が
ある。The above-mentioned soft film made of vinyl chloride resin
Substances that cause outgassing in the seat include:
Examples include phosphate ester plasticizers and triphenyl phosphate esters contained in stabilizers. However, if all such components are removed from the vinyl chloride resin-made flexible film / sheet as described above, the desired flame retardancy is not imparted, and various physical properties required for a clean room partitioning film / sheet are not provided. There is a problem of spoiling.
【0006】本発明は、上記の課題を解決するためにな
されたものであり、難燃性等のクリーンルームの間仕切
り用フィルム・シートに要求される諸物性を損なうこと
なく、アウトガスに起因する問題をも解決し得るクリー
ンルーム間仕切り用フィルム・シートを提供するもので
ある。The present invention has been made in order to solve the above-mentioned problems, and has been made to solve the problems caused by outgas without impairing various physical properties required for a clean room partition film or sheet such as flame retardancy. It is intended to provide a film / sheet for partitioning a clean room which can solve the above problem.
【0007】[0007]
【課題を解決するための手段】上記の課題を解決するた
めになされた本発明のクリーンルーム間仕切り用フィル
ム・シートは、塩化ビニル系樹脂製軟質フィルム・シー
トの両面に、フッ素系樹脂製フィルムを積層した透明性
フィルム又はシートの片面又は両面に帯電防止性層が積
層されてなることを特徴とするものである。また、本発
明のクリーンルーム間仕切り用フィルム・シートは、該
透明性フィルム又はシートの片面又は両面に、導電性材
料を含む塗料を任意の連続模様状に塗布することにより
帯電防止性層が形成されているフィルム又はシートであ
るクリーンルーム間仕切り用フィルム又はシート、該透
明性フィルム又はシート表面の導電性材料を含む塗料が
塗布されていない部分の面積が70%以上であるクリー
ンルーム間仕切り用フィルム又はシート、塩化ビニル系
樹脂製軟質フィルム又はシートが、塩化ビニル系樹脂1
00重量部当たり30〜80重量部の可塑剤を含む塩化
ビニル系樹脂組成物を形成して得られる透明なフィルム
又はシートであって、全可塑剤中の30重量%以上が導
電性可塑剤としたフィルム又はシートであるクリーンル
ーム間仕切り用フィルム又はシート、導電性可塑剤が、
化1に示す導電性可塑剤であるクリーンルーム間仕切り
用フィルム又はシートである。 [化1] (式中、R1,R2は炭素数3〜15の直鎖状又は分岐状
アルキル基、A1,A2は炭素数2〜4のアルキレン基、
m、nは1〜7の整数を示す。但し、R1とA1の炭素数
の合計及びR2とA2の炭素数の合計は5〜17であ
る。) さらに、本発明のクリーンルーム間仕切り用フィルム・
シートは、塩化ビニル系樹脂製軟質フィルム又はシート
の表面に、導電性材料を含む塗料を任意の連続模様状に
塗布することにより帯電防止性層が形成されているフィ
ルム又はシートであるクリーンルーム間仕切り用フィル
ム又はシートである。本発明における透明フィルムと
は、透明フィルムや半透明フィルム及び透明や半透明の
フィルム上の一部に不透明の印刷を施したもの指す。Means for Solving the Problems A film / sheet for partitioning a clean room according to the present invention, which has been made to solve the above-mentioned problems, has a structure in which a fluorine resin film is laminated on both sides of a vinyl chloride resin soft film / sheet. Characterized in that an antistatic layer is laminated on one or both sides of the transparent film or sheet thus prepared. Further, the film or sheet for partitioning the clean room of the present invention has an antistatic layer formed by applying a paint containing a conductive material in an arbitrary continuous pattern on one or both surfaces of the transparent film or sheet. Film or sheet, which is a film or sheet, a clean room partition film or sheet having an area of 70% or more of the surface of the transparent film or sheet on which the paint containing a conductive material is not applied, vinyl chloride Soft film or sheet made of vinyl chloride resin 1
A transparent film or sheet obtained by forming a vinyl chloride resin composition containing 30 to 80 parts by weight of a plasticizer per 100 parts by weight, wherein 30% by weight or more of the total plasticizer is a conductive plasticizer. Clean room partitioning film or sheet that is a film or sheet that has been, conductive plasticizer,
A film or sheet for partitioning a clean room, which is a conductive plasticizer shown in Chemical formula 1. [Formula 1] (Wherein R 1 and R 2 are a linear or branched alkyl group having 3 to 15 carbon atoms, A 1 and A 2 are alkylene groups having 2 to 4 carbon atoms,
m and n show the integer of 1-7. However, the total number of carbon atoms of R 1 and A 1 and the total number of carbon atoms of R 2 and A 2 are 5 to 17. Further, the clean room partition film of the present invention
The sheet is a film or sheet in which an antistatic layer is formed by applying a coating containing a conductive material in an arbitrary continuous pattern on the surface of a vinyl chloride-based resin-made soft film or sheet. It is a film or a sheet. The transparent film in the present invention refers to a transparent film, a translucent film, and a transparent or translucent film on which a part of opaque printing is applied.
【0008】上記塩化ビニル系樹脂製のフィルム・シー
トは、塩化ビニル系樹脂100重量部当たり、30〜8
0重量部の可塑剤を含む塩化ビニル系樹脂組成物を成形
して得られるものが好ましい。The above-mentioned vinyl chloride resin film / sheet is used in an amount of 30 to 8 parts per 100 parts by weight of the vinyl chloride resin.
Those obtained by molding a vinyl chloride resin composition containing 0 parts by weight of a plasticizer are preferred.
【0009】上記の塩化ビニル系樹脂としては、塩化ビ
ニルの単独重合体であるポリ塩化ビニルの他、塩化ビニ
ルとエチレン、酢酸ビニル、ビニルエーテル、マレイン
酸エステル、(メタ)アクリル酸、(メタ)アクリル酸
エステル等のモノマーとの共重合体、あるいはこれらの
混合物等が使用できる。The vinyl chloride resin includes polyvinyl chloride, which is a homopolymer of vinyl chloride, and vinyl chloride, ethylene, vinyl acetate, vinyl ether, maleic acid ester, (meth) acrylic acid, (meth) acrylic resin. A copolymer with a monomer such as an acid ester or a mixture thereof can be used.
【0010】塩化ビニル系樹脂に添加される可塑剤とし
ては、ジ−2−エチルヘキシルフタレート、ジ−n−オ
クチルフタレート、ブチルベンジルフタレート、ジブチ
ルフタレート等のフタル酸エステル系可塑剤;トリクレ
ジルホスフェート、トリキシリルホスフェート、トリブ
チルホスフェート、トリフェニルホスフェート、トリク
ロロエチルホスフェート、トリオクチルホスフェート、
ジフェニルクレジルホスフェート、トリブトキシエチル
ホスフェート等のリン酸エステル系可塑剤;ジオクチル
アジペート、ジオクチルアゼレート、ジオクチルセバケ
ート等の脂肪酸エステル系可塑剤;エポキシ化大豆油、
エポキシ樹脂等のエポキシ系可塑剤;ポリエステル系可
塑剤;トリオクチルトリメリテート等のトリメリット酸
エステル系可塑剤;等から選ばれる一種あるいは二種以
上を使用することができる。また、塩化ビニル系樹脂に
添加される導電性可塑剤以外の可塑剤を添加する場合に
は、難燃性の面から、導電性可塑剤以外の可塑剤とし
て、リン酸エステル系可塑剤等の難燃性可塑剤のみ、或
いは難燃性可塑剤を主体とする混合可塑剤を用いること
が好ましい。Examples of the plasticizer to be added to the vinyl chloride resin include phthalate plasticizers such as di-2-ethylhexyl phthalate, di-n-octyl phthalate, butylbenzyl phthalate and dibutyl phthalate; tricresyl phosphate; Trixylyl phosphate, tributyl phosphate, triphenyl phosphate, trichloroethyl phosphate, trioctyl phosphate,
Phosphate plasticizers such as diphenylcresyl phosphate and tributoxyethyl phosphate; fatty acid ester plasticizers such as dioctyl adipate, dioctyl azelate and dioctyl sebacate; epoxidized soybean oil;
One or more selected from epoxy plasticizers such as epoxy resins; polyester plasticizers; trimellitate plasticizers such as trioctyl trimellitate; and the like can be used. When a plasticizer other than the conductive plasticizer added to the vinyl chloride resin is added, from the viewpoint of flame retardancy, as a plasticizer other than the conductive plasticizer, a phosphate ester plasticizer or the like is used. It is preferable to use only the flame-retardant plasticizer or a mixed plasticizer mainly composed of the flame-retardant plasticizer.
【0011】上記の塩化ビニル系樹脂には、難燃剤、顔
料、酸化防止剤、紫外線吸収剤、安定剤、充填剤、滑剤
等を適宜添加しても良い。特に顔料として、黄やオレン
ジ系の顔料を添加することによって、防虫効果を持たせ
ることができ、特に好ましい。[0011] Flame retardants, pigments, antioxidants, ultraviolet absorbers, stabilizers, fillers, lubricants and the like may be appropriately added to the vinyl chloride resin. In particular, by adding a yellow or orange pigment as a pigment, an insect repellent effect can be imparted, which is particularly preferable.
【0012】難燃剤としては、トリクレジルホスフェー
ト、トリス(β−クロロエチル)ホスフェート、トリス
(ジクロロプロピル)ホスフェート、トリス(ジブロモ
プロピル)ホスフェート、ブロモホスフェート、トリキ
シリルホスフェート、トリブチルホスフェート、トリフ
ェニルホスフェート、トリクロロエチルホスフェート、
トリオクチルホスフェート、ジフェニルクレジルホスフ
ェート、トリブトキシエチルホスフェート等のリン酸エ
ステル;塩素化パラフィン、四臭化エチレン等のハロゲ
ン化炭化水素;ジンクボレート、水酸化マグネシウム、
水酸化アルミニウム、酸化モリブデン、モリブデン酸亜
鉛、三酸化アンチモン等の無機系難燃剤;含リンポリオ
ール、含臭素ポリオール、四塩化無水フタル酸、四臭化
無水フタル酸等の反応性難燃剤等が使用できる。Examples of the flame retardant include tricresyl phosphate, tris (β-chloroethyl) phosphate, tris (dichloropropyl) phosphate, tris (dibromopropyl) phosphate, bromophosphate, tricylyl phosphate, tributyl phosphate, triphenyl phosphate, trichlorophosphate. Ethyl phosphate,
Phosphate esters such as trioctyl phosphate, diphenylcresyl phosphate, and tributoxyethyl phosphate; halogenated hydrocarbons such as chlorinated paraffin and ethylene tetrabromide; zinc borate, magnesium hydroxide;
Inorganic flame retardants such as aluminum hydroxide, molybdenum oxide, zinc molybdate and antimony trioxide; reactive flame retardants such as phosphorus-containing polyols, bromine-containing polyols, phthalic anhydride tetrachloride, and phthalic anhydride tetrabromide are used it can.
【0013】酸化防止剤としては、アルキルフェノー
ル、アルキレンビスフェノール、アルキルフェノールチ
オエーテル、β,β’−チオプロピオン酸エステル、有
機亜リン酸エステル、芳香族アミン、フェノール・ニッ
ケル複合体等が挙げられる。これらの酸化防止剤は、単
独又は2種以上を混合して使用することができる。Examples of the antioxidant include alkylphenol, alkylenebisphenol, alkylphenol thioether, β, β′-thiopropionate, organic phosphite, aromatic amine, phenol / nickel complex and the like. These antioxidants can be used alone or in combination of two or more.
【0014】紫外線吸収剤としては、サリチル酸エステ
ル、ベンゾトリアゾール、ヒドロキシベンゾフェノン、
アクリロニトリル置換体等が挙げられる。これらの紫外
線吸収剤は、単独又は2種以上を混合して使用すること
ができる。Examples of the ultraviolet absorber include salicylic acid ester, benzotriazole, hydroxybenzophenone,
And acrylonitrile-substituted products. These ultraviolet absorbers can be used alone or in combination of two or more.
【0015】安定剤としては、ステアリン酸亜鉛、ステ
アリン酸バリウムなどの金属石鹸、エポキシ化大豆油な
どのエポキシ化合物、ジフェニルデシルホスファイトな
どの有機ホスファイト系安定剤、ジブチル錫ラウレート
などの錫系安定剤などが使用できる。また、これらの安
定剤は、単独又は2種以上を混合して使用することがで
きる。Examples of the stabilizer include metal soaps such as zinc stearate and barium stearate; epoxy compounds such as epoxidized soybean oil; organic phosphite stabilizers such as diphenyldecyl phosphite; and tin stabilizers such as dibutyltin laurate. Agents and the like can be used. These stabilizers can be used alone or in combination of two or more.
【0016】充填剤としては、炭酸カルシウム、水酸化
アルミニウム、タルク等の無機充填剤が好ましい。As the filler, an inorganic filler such as calcium carbonate, aluminum hydroxide, talc and the like is preferable.
【0017】滑剤としては、ステアリン酸亜鉛、ステア
リン酸バリウム、ステアリン酸カルシウム等の金属石
鹸;流動パラフィン、ポリエチレンワックス類、塩素化
炭化水素類等の炭化水素類;ステアリン酸、ステアリン
酸アミド、パルミチン酸アミド、メチレンビスステアロ
アミド、エチレンビスステアロアミド等の脂肪酸及び脂
肪酸アミド;ステアリン酸ブチル、パルミチン酸セチ
ル、ステアリン酸モノグリセリド等の脂肪酸エステル等
の滑剤が使用できる。As the lubricant, metal soaps such as zinc stearate, barium stearate and calcium stearate; hydrocarbons such as liquid paraffin, polyethylene waxes and chlorinated hydrocarbons; stearic acid, stearamide, palmitamide And lubricants such as fatty acids and fatty acid amides such as methylene bis-stearamide and ethylene bis-stearamide; fatty acid esters such as butyl stearate, cetyl palmitate and monoglyceride stearate.
【0018】顔料としては、黄鉛、亜鉛黄、クロム酸バ
リウム、カドミウムイエロー、黄色酸化鉄、黄土、チタ
ン黄、鉛シアナミド、鉛酸カルシウム、イソインドリノ
ンイエロー、ローダミンレーキ、アンスラキノンイエロ
ー、ナフトールイエローS、ハンザイエロー10G、ハ
ンザイエロー5G、ハンザイエロー3G、ハンザイエロ
ーG、ハンザイエローGR、ダイヤジンイエローGR、
ハンザイエローA、ハンザイエローRN、ハンザイエロ
ーR、ピグメントイエローL、ベンジシンイエロー、ベ
ンジシンイエローG、ベンジシンイエローGR、パーマ
ネントイエローNCG、バルカンフアストイエロー5
G、バルカンフアストイエローR、タートラジンレー
キ、キノリンイエローレーキ、アンスラゲンイエロー6
GL、パーマネントイエローH10G、パーマネントイ
エローHR、アンスラピリジンイエロー等の黄色系顔料
もしくは染料が使用できる。Examples of the pigments include graphite, zinc yellow, barium chromate, cadmium yellow, yellow iron oxide, loess, titanium yellow, lead cyanamide, calcium lead oxide, isoindolinone yellow, rhodamine lake, anthraquinone yellow, and naphthol yellow. S, Hansa Yellow 10G, Hansa Yellow 5G, Hansa Yellow 3G, Hansa Yellow G, Hansa Yellow GR, Diamond Yellow GR,
Hansa Yellow A, Hansa Yellow RN, Hansa Yellow R, Pigment Yellow L, Benzicin Yellow, Benzicin Yellow G, Benzicin Yellow GR, Permanent Yellow NCG, Vulcan Fast Yellow 5
G, Vulcan Fast Yellow R, Tartrazine Lake, Quinoline Yellow Lake, Anslagen Yellow 6
Yellow pigments or dyes such as GL, Permanent Yellow H10G, Permanent Yellow HR and Anthrapyridine Yellow can be used.
【0019】上記の塩化ビニル系樹脂組成物は、カレン
ダー法、押出法、インフレーション法等の公知の手段に
より、所望の厚さのフィルム・シートに成形される。勿
論、本発明のフィルム・シートは、間仕切り用フィルム
・シートとしての透視性を確保し得る程度に透明である
ことが必要である。The above-mentioned vinyl chloride resin composition is formed into a film or sheet having a desired thickness by a known means such as a calendering method, an extrusion method, and an inflation method. Needless to say, the film / sheet of the present invention needs to be transparent enough to ensure transparency as a partitioning film / sheet.
【0020】上記の透明性フィルム・シートには、次の
ような手段により、帯電防止性を付与することができ
る。例えば、 塩化ビニル系樹脂製フィルム・シートの両面にフッ素
系樹脂製フィルムを積層してなる透明性フィルム・シー
トの片面又は両面に、導電性材料を含む塗料を任意の連
続模様状に塗布することにより、帯電防止性を付与する
手段。 塩化ビニル系樹脂組成物中に含まれる全可塑剤中の3
0重量%以上を導電性可塑剤にし、さらに、透明性フィ
ルム・シートの片面又は両面に導電性材料を含む塗料を
任意の連続模様状に塗布することにより、より高い帯電
防止性を付与する。 塩化ビニル系樹脂製フィルム・シートの片面又は両面
に導電性材料を含む塗料を任意の連続模様状に塗布し、
さらに、透明性フィルム・シートの片面又は両面に導電
性材料を含む塗料を任意の連続模様状に塗布することに
より、より高い帯電防止性を付与する。 塩化ビニル系樹脂組成物中に含まれる全可塑剤中の3
0重量%以上を導電性可塑剤にし、塩化ビニル系樹脂製
フィルム・シートの片面又は両面に導電性材料を含む塗
料を任意の連続模様状に塗布し、さらに、透明性フィル
ム・シートの片面又は両面に導電性材料を含む塗料を任
意の連続模様状に塗布することにより、より高い帯電防
止性を付与する 等である。The above transparent film / sheet can be provided with an antistatic property by the following means. For example, applying a paint containing a conductive material in an arbitrary continuous pattern on one or both sides of a transparent film or sheet formed by laminating a fluororesin film on both sides of a vinyl chloride resin film or sheet Means for imparting antistatic properties. 3 in all plasticizers contained in the vinyl chloride resin composition
More than 0% by weight of the conductive plasticizer is used, and a coating containing a conductive material is applied to one or both surfaces of the transparent film / sheet in an arbitrary continuous pattern to impart higher antistatic properties. Apply a paint containing a conductive material on one or both sides of a vinyl chloride resin film or sheet in any continuous pattern,
Further, a higher antistatic property is imparted by applying a coating containing a conductive material on one or both sides of the transparent film / sheet in an arbitrary continuous pattern. 3 in all plasticizers contained in the vinyl chloride resin composition
A conductive plasticizer is used in an amount of 0% by weight or more, and a paint containing a conductive material is applied to one or both surfaces of the vinyl chloride resin film / sheet in an arbitrary continuous pattern. By applying a paint containing a conductive material on both sides in an arbitrary continuous pattern, higher antistatic properties can be imparted, and the like.
【0021】上記の手段で使用される塗料中に含まれる
導電性材料としては、カーボンブラック、グラファイ
ト、銀、酸化錫等が使用できるが、塗装適性等の見地か
ら、カーボンブラックあるいはグラファイト等のカーボ
ンを主体とするものが好適である。As the conductive material contained in the paint used in the above-mentioned means, carbon black, graphite, silver, tin oxide and the like can be used. From the viewpoint of coating suitability and the like, carbon black or graphite or the like can be used. The one mainly composed of is preferred.
【0022】また、これらの導電性材料を混入させる塗
料としては、各種の樹脂バインダーを含む溶剤系、水
系、紫外線硬化型等の塗料が使用できるが、基体となる
塩化ビニル系樹脂製軟質フィルム・シート又は透明性フ
ィルム・シートとの接着性の見地から、架橋タイプある
いは非架橋タイプの塩化ビニル系樹脂やアクリル系樹脂
をバインダーとする溶剤系塗料が好適である。As the paint mixed with these conductive materials, solvent-based paints containing various resin binders, water-based paints, UV-curable paints, etc. can be used. From the viewpoint of the adhesiveness to the sheet or the transparent film / sheet, a solvent-based coating using a crosslinked or non-crosslinked vinyl chloride resin or an acrylic resin as a binder is preferable.
【0023】上記の導電性材料を含む塗料は、例えば、
連続した線状(波線等も含む)、格子状、細目状、連続
した模様状に塗布される。また、カーボンブラック等の
導電性材料を含む塗料は、一般に黒色系で不透明である
が、上記した通り、間仕切り用フィルム・シートは透視
性を確保する必要があるため、この塗料を塗布する場合
には、フィルム表面の導電性材料を含む塗料が塗布され
ていない部分の面積比(開口率)が70%以上、更に好
ましくは、90%以上となるようにするのが望ましい。The paint containing the conductive material is, for example,
It is applied in a continuous linear shape (including wavy lines, etc.), a lattice shape, a fine shape, and a continuous pattern shape. In addition, paint containing a conductive material such as carbon black is generally black and opaque, but as described above, the partitioning film / sheet needs to ensure transparency, so when applying this paint, It is desirable that the area ratio (opening ratio) of the portion of the film surface where the paint containing the conductive material is not applied is 70% or more, more preferably 90% or more.
【0024】上記の導電性材料を含む塗料による塗膜の
抵抗値としては、1010Ω未満とするのが望ましく、特
に107Ω未満とするのが望ましい。導電性材料を含む
塗料による塗膜の抵抗値が高すぎると、クリーンルーム
間仕切り用として要求される帯電防止性を付与すること
ができない。The resistance value of the coating film made of the paint containing the above-mentioned conductive material is desirably less than 10 10 Ω, and particularly desirably less than 10 7 Ω. If the resistance of the coating film made of a paint containing a conductive material is too high, the antistatic property required for partitioning a clean room cannot be provided.
【0025】一方、上記の手段において使用する導電性
可塑剤としては、従来より知られている導電性可塑剤、
例えば化1に示す一般式で表されるフタル酸エステル系
の導電性可塑剤が使用できるが、特に好ましくは、化1
に示すフタル酸エステル系の導電性可塑剤である。On the other hand, the conductive plasticizer used in the above means includes a conventionally known conductive plasticizer,
For example, a phthalic acid ester-based conductive plasticizer represented by the general formula shown in Chemical Formula 1 can be used.
Are phthalic acid ester-based conductive plasticizers.
【0026】[化1] (式中、R1,R2は炭素数3〜15の直鎖状あるいは分
岐状のアルキル基、A 1,A2は炭素数2〜4のアルキレ
ン基、m,nは1〜7の整数を示す。但し、R1とA1の
炭素数の合計及びR2とA2の炭素数の合計は5〜17で
ある。)[Formula 1](Where R1, RTwoIs a straight or branched chain having 3 to 15 carbon atoms.
A branched alkyl group, A 1, ATwoIs an alkylene having 2 to 4 carbon atoms
And m and n each represent an integer of 1 to 7. Where R1And A1of
Total carbon number and RTwoAnd ATwoHas a total carbon number of 5-17
is there. )
【0027】上記のフタル酸エステル系の導電性可塑剤
は、炭素数1〜13の直鎖状あるいは分岐状のアルコー
ルに炭素数2〜4のアルキレンオキサイドを1〜7モル
付加させ、アルコールとアルキレンオキサイドの合計炭
素数が5〜17である末端ヒドロキシル化合物と、フタ
ル酸とを反応させて得られるものである。The above-mentioned phthalic acid ester-based conductive plasticizer is obtained by adding 1 to 7 moles of an alkylene oxide having 2 to 4 carbon atoms to a linear or branched alcohol having 1 to 13 carbon atoms, It is obtained by reacting a terminal hydroxyl compound having a total carbon number of oxide of 5 to 17 with phthalic acid.
【0028】上記の導電性可塑剤の添加量は、塩化ビニ
ル系樹脂に添加する全可塑剤中の30重量%以上、好ま
しくは50重量%以上である。The amount of the conductive plasticizer added is 30% by weight or more, preferably 50% by weight or more of the total plasticizer added to the vinyl chloride resin.
【0029】本発明のクリーンルーム間仕切り用フィル
ム・シートに用いられる透明性フィルム・シートは、上
記のようにして得られた塩化ビニル系樹脂製軟質フィル
ム・シートの両面にフッ素系樹脂製フィルムを積層して
なる。このフッ素系樹脂製フィルムとしては、四フッ化
エチレン樹脂、四フッ化エチレン−六フッ化プロピレン
共重合体、三フッ化塩化エチレン樹脂、フッ化ビニリデ
ン樹脂等から選ばれる一種あるいは二種以上の混合物な
どのフッ素系樹脂からなる透明フィルムが使用できる。The transparent film / sheet used in the clean room partitioning film / sheet of the present invention is obtained by laminating a fluororesin film on both sides of the vinyl chloride resin soft film / sheet obtained as described above. It becomes. Examples of the fluororesin film include one or a mixture of two or more selected from ethylene tetrafluoride resin, ethylene tetrafluoride-propylene hexafluoride copolymer, ethylene trifluoride chloride resin, vinylidene fluoride resin, and the like. For example, a transparent film made of a fluororesin such as the above can be used.
【0030】さらに、フッ素系樹脂製フィルムとして
は、上記フッ素系樹脂からなるフッ素系樹脂層とアクリ
ル系樹脂層又は/及び塩化ビニル系樹脂層を積層したフ
ィルムを使用することができる。特に、フッ素系樹脂層
とアクリル系樹脂層、塩化ビニル系樹脂層を順次積層し
たフィルムは、高周波ウェルダー適性に優れ、かつ塩化
ビニル系樹脂製軟質フィルムと熱ラミネートすることも
できるため、特に好ましい。また、フッ素系樹脂層とア
クリル系樹脂層又は/及び塩化ビニル系樹脂層を積層し
たフッ素系樹脂製フィルムは共押出法やラミネート法等
で製造することができる。該フッ素系樹脂製フィルム中
の塩化ビニル系樹脂層にも、上記した塩化ビニル系樹脂
製軟質フィルムと同様に、可塑剤、難燃剤、顔料、酸化
防止剤、紫外線吸収剤、安定剤、充填剤、滑剤等を適宜
添加しても良い。Further, as the fluororesin film, a film in which a fluororesin layer composed of the above fluororesin and an acrylic resin layer or / and a vinyl chloride resin layer are laminated can be used. In particular, a film in which a fluorine-based resin layer, an acrylic-based resin layer, and a vinyl chloride-based resin layer are sequentially laminated is particularly preferable since it is excellent in high-frequency welder suitability and can be thermally laminated with a vinyl chloride-based resin-made soft film. Further, a fluororesin film in which a fluororesin layer and an acrylic resin layer and / or a vinyl chloride resin layer are laminated can be manufactured by a coextrusion method, a lamination method, or the like. The vinyl chloride-based resin layer in the fluorine-based resin film also has a plasticizer, a flame retardant, a pigment, an antioxidant, an ultraviolet absorber, a stabilizer, and a filler, similarly to the above-mentioned vinyl chloride-based resin soft film. , A lubricant and the like may be appropriately added.
【0031】また、上記のフッ素系樹脂製フィルムと前
記の塩化ビニル系樹脂製軟質フィルム・シートとを積層
するには、通常接着剤が使用される。この接着剤として
は、塩化ビニル系接着剤やアクリル系接着剤等の公知の
接着剤が使用できる。さらに、該接着剤にも、上記した
塩化ビニル系樹脂と同様に、可塑剤、難燃剤、顔料、酸
化防止剤、紫外線吸収剤、安定剤、充填剤、滑剤等を適
宜添加しても良い。フッ素系樹脂製フィルムとして、フ
ッ素系樹脂層、アクリル系樹脂層、塩化ビニル系樹脂層
を順次積層したフッ素系樹脂製フィルムを用いた場合に
は、熱ラミネート法や、高周波ウェルダーにより、塩化
ビニル系樹脂製軟質フィルム・シートと接着することが
可能である。In order to laminate the above-mentioned fluororesin film and the above-mentioned vinyl chloride resin soft film / sheet, an adhesive is usually used. As this adhesive, a known adhesive such as a vinyl chloride adhesive or an acrylic adhesive can be used. Further, a plasticizer, a flame retardant, a pigment, an antioxidant, an ultraviolet absorber, a stabilizer, a filler, a lubricant, and the like may be appropriately added to the adhesive similarly to the above-mentioned vinyl chloride resin. When a fluorine-based resin film in which a fluorine-based resin layer, an acrylic resin layer, and a vinyl chloride-based resin layer are sequentially laminated is used as the fluorine-based resin film, a vinyl chloride-based film is formed by a heat lamination method or a high-frequency welder. It is possible to adhere to resin soft films and sheets.
【0032】以上の構成からなる本発明のクリーンルー
ム間仕切り用フィルム・シートは、従来の塩化ビニル系
樹脂製軟質フィルム・シート単体からなる間仕切り用フ
ィルム・シートと比較して、アウトガスの発生が著しく
抑制されたものである。また、帯電防止性、防炎性(難
燃性)、透明性、柔軟性の面でも、従来の軟質塩化ビニ
ル系樹脂フィルム・シート単体からなる間仕切り用フィ
ルム・シートを比較して、何ら遜色のないものである。
さらに、本発明のクリーンルーム間仕切り用フィルム・
シートは、耐光性に優れ、殺菌灯などの強い紫外線を長
時間受けても添加剤がブリードすることが無く、クリー
ンルームや滅菌室に非常に有効である。The film / sheet for partitioning a clean room of the present invention having the above-mentioned structure has a remarkably reduced generation of outgas as compared with a conventional partitioning film / sheet composed of a soft film / sheet made of a vinyl chloride resin alone. It is a thing. In addition, in terms of antistatic properties, flame resistance (flame retardancy), transparency, and flexibility, it is inferior to conventional partition films / sheets consisting of a single soft vinyl chloride resin film / sheet alone. Not something.
Further, the clean room partition film of the present invention
The sheet is excellent in light resistance and does not bleed even when exposed to strong ultraviolet light such as a germicidal lamp for a long time, and is very effective in a clean room or a sterilization room.
【0033】[0033]
【実施例】実施例1 表1に示す配合からなる塩化ビニル系樹脂組成物を、ロ
ール温度175℃のカレンダー装置を用いて成形し、厚
さ0.3mmの塩化ビニル系樹脂製シートを得た。Example 1 A vinyl chloride resin composition having the composition shown in Table 1 was molded using a calender at a roll temperature of 175 ° C. to obtain a 0.3 mm thick vinyl chloride resin sheet. .
【0034】[0034]
【表1】 [Table 1]
【0035】次いで、得られた塩化ビニル系樹脂製軟質
シートの片面に、塩化ビニル系接着剤を介して、ポリフ
ッ化ビニリデン製フィルムを積層し、透明性フィルム・
シートを得た。得られた透明性フィルム・シートの両面
に導電性材料としてカーボンブラックを含むアクリル系
樹脂をバインダーとする溶剤塗料(塗膜の二点間抵抗値
は2×103Ω)を亀甲模様状の連続模様(開口率90
%)となるように塗布し、本発明のクリーンルーム間仕
切り用シートを得た。得られたクリーンルーム間仕切り
用シートは、アウトガスの発生がなく、また、耐光性、
帯電防止性、防炎性(難燃性)、透明性及び柔軟性の面
でも、クリーンルームの間仕切り用シートとして十分適
用し得るものであった。Next, a polyvinylidene fluoride film is laminated on one side of the obtained vinyl chloride resin soft sheet via a vinyl chloride adhesive to form a transparent film.
I got a sheet. On both sides of the obtained transparent film / sheet, a solvent paint (resistivity between two points of the coating film is 2 × 10 3 Ω) using an acrylic resin containing carbon black as a conductive material as a binder is continuous in a turtle pattern. Pattern (Aperture ratio 90
%) To obtain a clean room partition sheet of the present invention. The resulting clean room partition sheet has no outgassing, light resistance,
In terms of antistatic properties, flame resistance (flame retardancy), transparency, and flexibility, it could be sufficiently applied as a partition sheet for a clean room.
【0036】尚、上記した実施例1の間仕切り用シート
を図1に示す。図1は、実施例1の間仕切り用シートの
部分拡大断面図であり、図中の符号1は、間仕切り用シ
ート、符号10Aは塩化ビニル系樹脂製シート、符号1
0Bは導電性材料を含む塗料による塗膜、符号11はフ
ッ素系樹脂製フィルム、符号12は、フッ素系樹脂製フ
ィルム11と塩化ビニル系樹脂製軟質シート10とを接
着するための接着剤を示している。FIG. 1 shows the partition sheet of the first embodiment. FIG. 1 is a partially enlarged cross-sectional view of a partition sheet of Example 1, wherein reference numeral 1 denotes a partition sheet, reference numeral 10A denotes a vinyl chloride resin sheet, and reference numeral 1 denotes a sheet.
0B is a coating film of a paint containing a conductive material, reference numeral 11 is a fluororesin film, and reference numeral 12 is an adhesive for bonding the fluororesin film 11 and the vinyl chloride resin soft sheet 10. ing.
【0037】(比較例1)実施例1と比較するため、実
施例1における塩化ビニル系樹脂製軟質シートの両面に
導電性材料としてカーボンブラックを含むアクリル系樹
脂をバインダーとする溶剤塗料(塗膜の二点間抵抗値は
2×103Ω)を亀甲模様状の連続模様(開口率90
%)となるように塗布し、クリーンルーム間仕切り用シ
ートとした。この間仕切り用シートは、帯電防止性、防
炎性(難燃性)、透明性及び柔軟性の面では、クリーン
ルームの間仕切り用シートとして十分に適用し得るもの
であったが、アウトガスが発生し、殺菌灯の光を24時
間照射すると、ブリードを起こすという欠点を有するも
のであった。Comparative Example 1 For comparison with Example 1, a solvent paint (coating film) using an acrylic resin containing carbon black as a conductive material as a binder on both surfaces of the vinyl chloride resin soft sheet in Example 1 was used. The resistance value between two points is 2 × 10 3 Ω) and is a continuous pattern (opening ratio 90
%) To obtain a clean room partition sheet. This partitioning sheet could be adequately applied as a cleanroom partitioning sheet in terms of antistatic properties, flame resistance (flame retardancy), transparency and flexibility, but outgassing occurred. Irradiation with the light of a germicidal lamp for 24 hours had the disadvantage of causing bleeding.
【0038】(実施例2)表2に示す配合からなる塩化
ビニル系樹脂組成物をロール温度175℃のカレンダー
装置を用いて形成し、厚さ0.3mmの塩化ビニル系樹
脂製の帯電防止性透明軟質シートを得た。Example 2 A vinyl chloride resin composition having the composition shown in Table 2 was formed using a calender at a roll temperature of 175 ° C., and an antistatic property made of a 0.3 mm thick vinyl chloride resin was used. A transparent soft sheet was obtained.
【0039】[0039]
【表2】 *1 新日本理化社製「サンソサイザーC−1100」
(商品名)[Table 2] * 1 "Sanso Sizer C-1100" manufactured by Shin Nippon Rika Co., Ltd.
(Product name)
【0040】得られた塩化ビニル系樹脂製の帯電防止性
透明軟質シートの両面に、塩化ビニル系接着剤を介し
て、ポリフッ化ビニリデン製フィルムを積層し、透明性
フィルム・シートを得た。得られた透明性フィルム・シ
ートの両面に導電性材料としてカーボンブラックを含む
アクリル系樹脂をバインダーとする溶剤塗料(塗膜の二
点間抵抗値は2×103Ω)を亀甲模様状の連続模様
(開口率90%)となるように塗布し、本発明のクリー
ンルーム間仕切り用シートを得た。得られたクリーンル
ーム間仕切り用シートは、アウトガスの発生がなく、ま
た、耐光性、帯電防止性、防炎性(難燃性)、透明性及
び柔軟性の面でも、クリーンルーム間仕切り用シートと
して十分に通用し得るものであった。A film made of polyvinylidene fluoride was laminated on both sides of the obtained antistatic transparent flexible sheet made of a vinyl chloride resin via a vinyl chloride adhesive to obtain a transparent film sheet. On both sides of the obtained transparent film / sheet, a solvent paint (resistivity between two points of the coating film is 2 × 10 3 Ω) using an acrylic resin containing carbon black as a conductive material as a binder is continuous in a turtle pattern. It was applied so as to have a pattern (opening ratio 90%) to obtain a clean room partition sheet of the present invention. The resulting clean room partition sheet has no outgassing, and is well-suited as a clean room partition sheet in terms of light resistance, antistatic properties, flame resistance (flame resistance), transparency and flexibility. Could be done.
【0041】尚、上記した実施例2の間仕切り用シート
を図2に示す。図2は、実施例2の間仕切り用シートの
部分拡大断面図であり、図中の符号2は間仕切り用シー
ト、符号20は、塩化ビニル製の帯電防止性透明軟質シ
ート、符号21はフッ素系樹脂製フィルム、符号22
は、フッ素系樹脂製フィルム21と塩化ビニル系樹脂製
の帯電防止性透明軟質シートとを接着するための接着剤
を示している。FIG. 2 shows the partition sheet of the second embodiment. FIG. 2 is a partially enlarged cross-sectional view of the partition sheet of Example 2, wherein reference numeral 2 denotes a partition sheet, reference numeral 20 denotes an antistatic transparent soft sheet made of vinyl chloride, and reference numeral 21 denotes a fluororesin. Film 22
Indicates an adhesive for bonding the fluororesin film 21 and the antistatic transparent flexible sheet made of vinyl chloride resin.
【0042】(比較例2)実施例2と比較するため、実
施例2における塩化ビニル系樹脂製の帯電防止性透明軟
質シートの片面に導電性材料としてカーボンブラックを
含むアクリル系樹脂をバインダーとする溶剤塗料(塗膜
の二点間抵抗値は2×103Ω)を亀甲模様状の連続模
様(開口率90%)となるように塗布し、本発明のクリ
ーンルーム間仕切り用シートを得た。この間仕切り用シ
ートは、帯電防止性、防炎性(難燃性)、透明性及び柔
軟性の面では、クリーンルーム間仕切り用シートとして
十分に適用し得るものであったが、アウトガスを発生
し、殺菌灯の光を24時間照射すると、ブリードを起こ
すという欠点を有するものであった。(Comparative Example 2) For comparison with Example 2, an acrylic resin containing carbon black as a conductive material was used as a binder on one side of a transparent soft antistatic transparent sheet made of a vinyl chloride resin in Example 2. A solvent paint (the resistance value between the two points of the coating film was 2 × 10 3 Ω) was applied so as to form a continuous pattern (opening ratio 90%) in the shape of a turtle pattern to obtain a clean room partition sheet of the present invention. This partitioning sheet could be adequately applied as a cleanroom partitioning sheet in terms of antistatic properties, flameproofness (flame retardancy), transparency and flexibility, but generated outgas and sterilized. Irradiation with lamp light for 24 hours had the disadvantage of causing bleeding.
【0043】(実施例3)表3に示す配合からなる塩化
ビニル系樹脂組成物をロール温度175℃のカレンダー
装置を用いて形成し、厚さ0.3mmの塩化ビニル系樹
脂製軟質シートを得た。Example 3 A vinyl chloride resin composition having the composition shown in Table 3 was formed using a calender at a roll temperature of 175 ° C. to obtain a 0.3 mm thick flexible sheet made of a vinyl chloride resin. Was.
【0044】[0044]
【表3】 [Table 3]
【0045】次いで、得られた塩化ビニル系樹脂製軟質
シートの両面にアクリル樹脂層を積層したフッ素系樹脂
フィルムを積層し、透明性シートを得た。得られた透明
性シートの片面に導電性材料としてカーボンブラックを
含むアクリル系樹脂をバインダーとする溶剤塗料(塗膜
の二点間抵抗値は2×103Ω)を格子状の連続模様
(開口率90%)となるように塗布し、本発明のクリー
ンルーム間仕切り用シートを得た。得られたクリーンル
ーム間仕切り用シートは、アウトガスの発生がなく、ま
た、耐光性、帯電防止性、実施例1,2よりも高い防炎
性(難燃性)、防虫性及び柔軟性の面でも、クリーンル
ームの間仕切り用シートとして十分適用でき得るもので
あった。Next, a fluororesin film having an acrylic resin layer laminated on both sides of the obtained vinyl chloride resin soft sheet was laminated to obtain a transparent sheet. On one side of the obtained transparent sheet, a solvent-based paint (resistance between two points of the coating film is 2 × 10 3 Ω) using an acrylic resin containing carbon black as a conductive material as a binder is used to form a grid-like continuous pattern (opening). (90%) to obtain a clean room partition sheet of the present invention. The resulting clean room partition sheet has no outgassing, and is also light-resistant, anti-static, flame-resistant (flame-retardant), and insect-resistant and flexible in comparison with Examples 1 and 2. It could be used as a partition sheet for a clean room.
【0046】(実施例4)表4に示す配合からなる塩化
ビニル系樹脂組成物をロール温度175℃のカレンダー
装置を用いて形成し、厚さ0.3mmの塩化ビニル系樹
脂製の帯電防止性透明軟質シートを得た。次いで、得ら
れた塩化ビニル系樹脂製の帯電防止性透明軟質シートの
両面に、ポリフッ化ビニリデン層の裏面にアクリル樹脂
層、ポリ塩化ビニル樹脂層を順次積層したフッ素系樹脂
フィルムを熱ラミネート法によって積層し、透明性シー
トを得た。 得られた透明性シートの両面に導電性材料
としてカーボンブラックを含むアクリル系樹脂をバイン
ダーとする溶剤塗料(塗膜の二点間抵抗値は2×103
Ω)を格子状の連続模様(開口率90%)となるように
塗布し、本発明のクリーンルーム間仕切り用シートを得
た。得られたクリーンルーム間仕切り用シートは、アウ
トガスの発生がなく、また、耐光性、実施例1,2より
も高い帯電防止性を有し、防炎性(難燃性)、防虫性及
び柔軟性の面でも、クリーンルームの間仕切り用シート
として十分適用でき得るものであった。Example 4 A vinyl chloride resin composition having the composition shown in Table 4 was formed by using a calender at a roll temperature of 175 ° C., and an antistatic property made of a 0.3 mm thick vinyl chloride resin was used. A transparent soft sheet was obtained. Next, on both surfaces of the obtained antistatic transparent flexible sheet made of a vinyl chloride resin, an acrylic resin layer on the back surface of a polyvinylidene fluoride layer, and a fluororesin film in which a polyvinyl chloride resin layer is sequentially laminated by a heat lamination method. Lamination was performed to obtain a transparent sheet. Solvent paint using acrylic resin containing carbon black as a conductive material as a binder on both sides of the obtained transparent sheet (the resistance value between two points of the coating film is 2 × 10 3
Ω) was applied so as to form a grid-like continuous pattern (opening ratio: 90%) to obtain a clean room partition sheet of the present invention. The resulting clean room partition sheet has no outgassing, has light resistance, higher antistatic property than Examples 1 and 2, and has flame retardancy (flame retardancy), insect resistance and flexibility. In terms of surface, it could be sufficiently applied as a partition sheet for a clean room.
【0047】[0047]
【表4】 *1 新日本理化社製「サンソサイザーC−1100」
(商品名)[Table 4] * 1 "Sanso Sizer C-1100" manufactured by Shin Nippon Rika Co., Ltd.
(Product name)
【0048】[0048]
【発明の効果】以上詳述した通り、本発明のクリーンル
ーム間仕切り用フィルム・シートは、帯電防止性、防炎
性(難燃性)、透明性及び柔軟性の面で、クリーンルー
ム間仕切り用シートとして十分に適用し得るものである
ことは勿論のこと、アウトガスの発生についても極めて
抑制されており、従って、このアウトガスによってシリ
コンウエハー等を汚染し、半導体等の不良率が増加する
という問題も懸念されないものである。また、クリーン
ルーム間仕切り用フィルム・シートを黄色顔料により黄
色の半透明のものとした場合には、防虫性にも優れるも
のである。さらに、帯電防止性層を表面に露出させたこ
とにより、高い帯電防止性を発揮するものである。As described in detail above, the film / sheet for partitioning a clean room according to the present invention is sufficient as a sheet for partitioning a clean room in terms of antistatic properties, flame resistance (flammability), transparency and flexibility. Of course, the generation of outgas is extremely suppressed, and therefore, there is no concern about the problem that the outgas contaminates silicon wafers and the like and increases the defective rate of semiconductors and the like. It is. In addition, when the film / sheet for partitioning the clean room is made of a yellow translucent material with a yellow pigment, the insect repellency is also excellent. Further, by exposing the antistatic layer to the surface, high antistatic properties are exhibited.
【図面の簡単な説明】[Brief description of the drawings]
【図1】本発明のクリーンルーム間仕切り用シートの一
実施例の部分拡大断面図である。FIG. 1 is a partially enlarged cross-sectional view of one embodiment of a clean room partition sheet of the present invention.
【図2】本発明のクリーンルーム間仕切り用シートの一
実施例の部分拡大断面図である。FIG. 2 is a partially enlarged cross-sectional view of one embodiment of the clean room partition sheet of the present invention.
【図3】本発明のクリーンルーム間仕切り用シートの一
実施例の部分拡大断面図である。FIG. 3 is a partially enlarged cross-sectional view of one embodiment of the clean room partition sheet of the present invention.
1,2,3 クリーンルーム間仕切り用シート 10,20,30 塩化ビニル系樹脂製軟質シート 11,21 フッ素系樹脂製フィルム 12,22 接着剤 13,23,33 導電性材料を含む塗料 31a ポリ塩化ビニル樹脂層 31b アクリル樹脂層 31c ポリフッ化ビニリデン層 1,2,3 Clean room partition sheet 10,20,30 Vinyl chloride resin soft sheet 11,21 Fluorine resin film 12,22 Adhesive 13,23,33 Paint containing conductive material 31a Polyvinyl chloride resin Layer 31b Acrylic resin layer 31c Polyvinylidene fluoride layer
───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2E162 CD04 CD10 CD11 EA18 FA20 4F100 AA37 AH02H AK15A AK15G AK17B AK17C AK19 AK25 AR00D AR00E BA01 BA03 BA04 BA05 BA06 BA10B BA10C BA10D BA10E CA04A CA22B CA22C CB00 CC00A CC00B CC00C DE01 EH46A GB90 HB31B HB31C JG03A JG03D JG03E JJ07 JK13A JK17 JN01 JN01A YY00A ────────────────────────────────────────────────── ─── Continued on the front page F-term (reference) 2E162 CD04 CD10 CD11 EA18 FA20 4F100 AA37 AH02H AK15A AK15G AK17B AK17C AK19 AK25 AR00D AR00E BA01 BA03 BA04 BA05 BA06 BA10B BA10C BA10D BA10E CA04A CA00B31C00B CCB JG03A JG03D JG03E JJ07 JK13A JK17 JN01 JN01A YY00A
Claims (6)
仕切り用として使用されるフィルム又はシートであっ
て、 塩化ビニル系樹脂製軟質フィルム又はシートの両面に、
フッ素系樹脂製フィルムを積層した透明性フィルム又は
シートの片面又は両面に帯電防止性層が積層されてなる
ことを特徴とするクリーンルーム間仕切り用フィルム又
はシート。1. A film or sheet used for partitioning a clean room for producing semiconductors and the like, comprising: a vinyl chloride resin-based soft film or sheet;
A film or sheet for partitioning a clean room, wherein an antistatic layer is laminated on one or both sides of a transparent film or sheet laminated with a film made of a fluororesin.
面に、導電性材料を含む塗料を任意の連続模様状に印刷
することにより、帯電防止性層が形成されているフィル
ム又はシートである請求項1記載のクリーンルーム間仕
切り用フィルム又はシート。2. A film or sheet in which an antistatic layer is formed by printing a paint containing a conductive material in an arbitrary continuous pattern on one or both sides of a transparent film or sheet. The film or sheet for partitioning a clean room according to 1.
材料を含む塗料が塗布されていない部分の面積が70%
以上である積求項2記載のクリーンルーム間仕切り用フ
ィルム又はシート。3. The area of a portion of the transparent film or sheet surface where the paint containing a conductive material is not applied is 70%.
The film or sheet for partitioning a clean room according to claim 2 above.
ートが、塩化ビニル系樹脂100重量部当たり30〜8
0重量部の可塑剤を含む塩化ビニル系樹脂組成物を形成
して得られる透明なフィルム又はシートであって、全可
塑剤中の30重量%以上が導電性可塑剤としたフィルム
又はシートである請求項1〜3いずれか1項記載のクリ
ーンルーム間仕切り用フィルム又はシート。4. A soft film or sheet made of a vinyl chloride-based resin having a thickness of 30 to 8 per 100 parts by weight of the vinyl chloride-based resin.
A transparent film or sheet obtained by forming a vinyl chloride resin composition containing 0 parts by weight of a plasticizer, wherein 30% by weight or more of the total plasticizer is a film or sheet containing a conductive plasticizer. The film or sheet for partitioning a clean room according to claim 1.
剤である請求項4記載のクリーンルーム間仕切り用フィ
ルム又はシート。 【化1】 (式中、R1,R2は炭素数3〜15の直鎖状又は分岐状
アルキル基、A1,A2は炭素数2〜4のアルキレン基、
m、nは1〜7の整数を示す。但し、R1とA1の炭素数
の合計及びR2とA2の炭素数の合計は5〜17であ
る。)5. The film or sheet for partitioning a clean room according to claim 4, wherein the conductive plasticizer is a conductive plasticizer shown in Chemical formula 1. Embedded image (Wherein R 1 and R 2 are a linear or branched alkyl group having 3 to 15 carbon atoms, A 1 and A 2 are alkylene groups having 2 to 4 carbon atoms,
m and n show the integer of 1-7. However, the total number of carbon atoms of R 1 and A 1 and the total number of carbon atoms of R 2 and A 2 are 5 to 17. )
ートの表面に、導電性材料を含む塗料を任意の連続模様
状に塗布することにより帯電防止性層が形成されている
フィルム又はシートである請求項1〜5いずれか1項記
載のクリーンルーム間仕切り用フィルム又はシート。6. A film or sheet in which an antistatic layer is formed by applying a coating containing a conductive material in an arbitrary continuous pattern on the surface of a soft film or sheet made of a vinyl chloride resin. Item 6. A film or sheet for partitioning a clean room according to any one of Items 1 to 5.
Priority Applications (1)
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JP12702499A JP4676583B2 (en) | 1999-05-07 | 1999-05-07 | Clean room partition film or sheet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12702499A JP4676583B2 (en) | 1999-05-07 | 1999-05-07 | Clean room partition film or sheet |
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Publication Number | Publication Date |
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JP2000318099A true JP2000318099A (en) | 2000-11-21 |
JP2000318099A5 JP2000318099A5 (en) | 2006-03-30 |
JP4676583B2 JP4676583B2 (en) | 2011-04-27 |
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ID=14949805
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JP12702499A Expired - Fee Related JP4676583B2 (en) | 1999-05-07 | 1999-05-07 | Clean room partition film or sheet |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007060914A1 (en) * | 2005-11-22 | 2007-05-31 | Sekisui Chemical Co., Ltd. | Optical transmitter |
JP2007171894A (en) * | 2005-11-22 | 2007-07-05 | Sekisui Chem Co Ltd | Optical transmitter |
JP2009024928A (en) * | 2007-07-19 | 2009-02-05 | Tohoku Univ | Environmental control room component and method for manufacturing environmental control chamber component |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5429378A (en) * | 1977-08-08 | 1979-03-05 | Kohkoku Chem Ind | Antistatic transparent polyvinyl chloride resin film or sheet |
JPH0716998A (en) * | 1993-07-05 | 1995-01-20 | Achilles Corp | Antibacterial sheet |
JPH10205056A (en) * | 1997-01-29 | 1998-08-04 | Toray Ind Inc | Base material for building material |
JPH1158630A (en) * | 1997-08-27 | 1999-03-02 | Achilles Corp | Film or sheet for partitioning clean room |
-
1999
- 1999-05-07 JP JP12702499A patent/JP4676583B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5429378A (en) * | 1977-08-08 | 1979-03-05 | Kohkoku Chem Ind | Antistatic transparent polyvinyl chloride resin film or sheet |
JPH0716998A (en) * | 1993-07-05 | 1995-01-20 | Achilles Corp | Antibacterial sheet |
JPH10205056A (en) * | 1997-01-29 | 1998-08-04 | Toray Ind Inc | Base material for building material |
JPH1158630A (en) * | 1997-08-27 | 1999-03-02 | Achilles Corp | Film or sheet for partitioning clean room |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007060914A1 (en) * | 2005-11-22 | 2007-05-31 | Sekisui Chemical Co., Ltd. | Optical transmitter |
JP2007171894A (en) * | 2005-11-22 | 2007-07-05 | Sekisui Chem Co Ltd | Optical transmitter |
JP2009024928A (en) * | 2007-07-19 | 2009-02-05 | Tohoku Univ | Environmental control room component and method for manufacturing environmental control chamber component |
Also Published As
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JP4676583B2 (en) | 2011-04-27 |
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