JP2000223641A - Lead frame for semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To firmly install a fin for mounting a semiconductor element or a circuit board on the body of a lead frame for a semiconductor device. SOLUTION: The body of a strip frame 1 of a lead frame for a semiconductor device and a fin 2 arranged in an opening 3 of the main body 1 so as to face a plurality of external terminals 4 to 11 protruding from the main body 1 into the opening 3. The fin 2 is fixed on a supporting lead 12 protruding from an edge part 3a in the width direction of the opening into the opening 3. An extension 13 formed by protruding at least one of the external terminals 4 to 11 into the opening 3 is fixed on the fin 2 to reinforce the supporting lead 12 for supporting the fin 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a lead frame,
In particular, it belongs to a semiconductor device lead frame in which fins supporting a semiconductor chip are attached to a frame body with high mechanical strength.

[0002]

2. Description of the Related Art A band-shaped frame body having a plurality of openings formed at predetermined intervals in a longitudinal direction, and a plurality of external terminals protruding into the openings from the frame body are disposed in the openings of the frame body. A lead frame for a semiconductor device provided with a fin to be formed is known. For example, Shogan 54-
No. 96406 (Japanese Utility Model Application Laid-Open No. 56-15067) shows an element mounting board provided with a lead frame to which a heat sink is fixed. The lead frame has a lead piece and a coupling piece that are integrally formed, and the coupling piece is provided with a through hole. A protrusion is provided on the heat sink at a position facing the through hole of the connecting piece, and the protrusion of the heat sink is fitted into the through hole of the connecting piece, and the heat sink is fixed to the lead frame.

FIG. 5 shows a conventional lead frame for a semiconductor device. The lead frame for a semiconductor device has a band-shaped frame body (1) having a plurality of openings (3) formed at predetermined intervals in a length direction, and is arranged in the opening (3) of the frame body (1). Fins (2) to be provided. A plurality of external terminals (4) to (11) provided on a metal frame body (1) made of copper or the like.
Protrudes from the pair of frame bodies (1) into the opening (3) and faces the fins (2). Numerous openings in the frame body (1)
(3) are formed and the fins (2) are arranged corresponding to the respective openings (3). For convenience of illustration, FIG. 5 shows only two openings (3).

The opening (3) extends from the edge (3a) in the width direction of the opening (3).
Support lead projecting in the length direction of the frame body (1)
(12) is provided on the frame body (1), and a mounting plate (14) is formed integrally with the support lead (12) at the inner end of the support lead (12). As shown in FIG. 6, a through hole (15) is formed in the mounting plate (14), and a projection (16) formed integrally with the fin (2) is a through hole.
When inserted into (15), the top of the projection (16) is deformed by caulking and the fin (2) is fixed to the mounting plate (14). fin
(2) is formed separately from a metal having a greater thickness than the frame body (1), for example, a copper plate, thereby ensuring sufficient heat capacity and mechanical strength. The fins (2) are kept separated from each other in each opening (3). The external terminals (4) to (11) of each pair are
(3) The inner frame body (1) is connected by a connecting strip (17) integrally formed with the frame body (1) in the longitudinal direction.

In manufacturing a semiconductor device, although not shown, a semiconductor element or the like is fixed to one main surface of a fin (2) serving as a support plate, and a wire is connected between the semiconductor element and an external terminal by a wire bonding method. Are connected, and a resin sealing body (1
Form 8). Thereafter, the connecting strips (17) and the support leads (12) are cut and removed, and the semiconductor devices can be individually separated to complete the semiconductor device. In the obtained semiconductor device, both sides of the resin sealing body are obtained. External terminals (4) to (11) are led out from the surface side.

[0006]

However, in the conventional lead frame, the mechanical strength of the support lead (12) for supporting the fin (2) is not always sufficient, and the lead frame becomes externally moved during the transport of the lead frame. Contact with the fin
There is a risk that the mounting position or shape of (2) may be changed. In particular, when a large area fin (2) is used, sufficient support strength of the fin (2) cannot be obtained, and the fin (2) may be inclined with respect to the lead frame during transportation or during the transfer molding process. There is. Further, when mounting a semiconductor element or a circuit board having a diversified arrangement pattern or circuit configuration and a large number of electrodes on the fin (2), there is a possibility that a wire connection area cannot be secured. An object of the present invention is to provide a lead frame for a semiconductor device in which a fin for mounting a semiconductor element or a circuit board is firmly attached to a frame body.

[0007]

A lead frame for a semiconductor device according to the present invention comprises a band-shaped frame body (1) having a plurality of openings (3) formed at predetermined intervals in a longitudinal direction; Multiple external terminals protruding from (1) into opening (3)
(4) to (11), and a fin (2) arranged in the opening (3) of the frame body (1) so as to face the edge of the opening (3) in the width direction.
The fin (2) is fixed to the support lead (12) projecting in the longitudinal direction of the frame body (1) from the opening (3) into the opening (3). An extension (13) formed by projecting at least one of the plurality of external terminals (4) to (11) into the opening (3) is fixed to the fin (2).

At least one of the plurality of external terminals (4) to (11)
Since one is fixed to the fin (2), the support lead (12) for supporting the fin (2) can be reinforced, and the mechanical strength for supporting the fin (2) can be increased. That is, the extension
(13) prevents deflection of the fin (2) due to deformation such as torsion or bending of the support lead (12), fixing of the semiconductor element on the fin (2), and connection between the electrode on the semiconductor element and the external terminal. Wire bonding can be performed accurately.

In this embodiment, a through hole (15) is provided in a mounting plate (14) integrally formed at the inner end of a support lead (12), and a projection (16) provided on a fin (2) is attached to the mounting plate. (14) through the through hole (15), and attach the mounting plate (14) to the extension (1) of the external terminal (4).
Formed integrally with 3). The electrodes on the semiconductor element (22) and the external terminals (5) to (10) are connected to the thin metal wires (2) by wire bonding.
At the time of connection by 3), the electrode of the semiconductor element (22) and the external terminal (4) are not directly connected by the thin metal wire (23), but the mounting plate (14) electrically connected to the external terminal (4). ) Can be connected to the thin metal wire (23), which increases the connection area by wire bonding, shortens the thin metal wire (23), and
3) The electrical short circuit accident can be prevented.

The support lead (12) is provided with a lead step (20), and the extension (13) of the external terminal (4) is provided with a terminal step (21).
The mounting plate (14) is disposed below the frame body (1) and connected to the lead step (20) and the terminal step (21). The extension (13) of the external terminal (4) is formed in the width direction of the frame body (1). Provide the lead step (20) on the support lead (12) and the terminal extension on the extension (13) of the external terminal (4).
Since the (13) is formed, the mounting plate (14) can be supported with elasticity in the length direction and the width direction of the frame body (1).

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a lead frame for a semiconductor device according to the present invention will be described below with reference to FIGS. In these drawings, the same portions as those shown in FIG. 5 are denoted by the same reference numerals, and description thereof will be omitted.

The lead frame for a semiconductor device according to the present embodiment has the outermost external terminals (4) and (11) out of the plurality of external terminals (4) to (11) projecting into the opening (3). This is different from the conventional lead frame for a semiconductor device in that the extension portion (13) thus formed is fixed to the fin (2).

An extension (13) is formed integrally with the external terminals (4) and (11) in the width direction of the frame body (1), and the extension (13) is formed integrally with the mounting plate (14). It is formed. As shown in FIG. 2, the support lead (12) is provided with a lead step (20), and the external step (13) of the external terminals (4) and (11) is provided with a terminal step (2).
1) is provided, the mounting plate (14) is disposed below the frame body (1), and is connected to the lead step (20) and the terminal step (21). The through hole (15) of the mounting plate (14) and the projection (16) of the fin (2) are provided on the extension of the support lead (12) and the extension (13) of the external terminals (4) and (11). As shown in FIG.
The semiconductor element (22) is fixed on the fin (2) on the mounting plate (14), and the electrodes on the semiconductor element (22) are connected to the corresponding external terminals (5) through metal thin wires (23) by wire bonding. It is electrically connected to (10). As shown, external terminals (4) and
Instead of connecting a thin metal wire (23) to (11), a semiconductor element (2
2) and the mounting plate (14) are thin metal wires by wire bonding
Electrical connection can be made via (23). afterwards,
The ends of the fin (2), the semiconductor element (22), the thin metal wire (23) and the external leads (4) to (11) are covered with a resin sealing body (18) formed by a known transfer molding method. However, at least the lower surface of the fin (2), the outside of the external terminal (4), and the connecting portion side of the support lead (12) are not covered. An individual semiconductor device is completed by cutting the support lead (12) at the interface of the resin sealing body (18) and removing the frame body (1), the connecting strip (17) and the support lead (12). .

External terminals (4) and (11) are connected to fins (2), respectively.
Support leads (12) that support the fins (2)
And the mechanical strength for supporting the fins (2) can be increased. The extension (13) prevents the deflection of the fin (2) due to deformation such as torsion or bending of the support lead (12), secures the semiconductor element on the fin (2), and fixes electrodes and external terminals on the semiconductor element. Wire bonding can be performed accurately.

The semiconductor element (22) is formed by wire bonding.
When the upper electrode and the external terminal (4) are connected by the thin metal wire (23), the electrode of the semiconductor element (22) and the external terminal (4) are not directly connected by the thin metal wire (23), but are externally connected. Since the thin metal wire (23) can be connected to the mounting plate (14) that is electrically connected to the terminal (4), the connection area by wire bonding is increased, the thin metal wire (23) is shortened, and the thin metal wire (23) Electrical short circuit accident can be prevented. The support lead (12) is provided with a lead step (20), and the extension (1) of the external terminal (4) is provided.
Since the terminal step (21) is formed in 3), the frame body (1)
The mounting plate (14) can be elastically supported in the length direction and the width direction.

In this embodiment, the following operation and effect can be obtained. [1] Support lead (12) and extension of external terminals (4) to (11)
Since (13) and (13) are connected to the mounting plate (14), a large mechanical mounting strength of the fin (2) is obtained, and it is possible to cope with an increase in the size and area of the fin (2). [2] Projection of through hole (15) of mounting plate (14) and fin (2)
(16) is connected to the support lead (12) and external terminal (4) and
Since it is provided on the extension of the extension (13) of (11), the strength against deformation is increased. [3] Connect the extension (13) of the external terminals (4) and (11) to the mounting plate (1).
Since connection is made to 4), no special connection member is required, and effective use of space can be achieved. [4] By using the mounting plate (14) as a wire bonding area, it is possible to cope with complicated wiring of the thin metal wires (23) and to shorten the thin metal wires (23). [5] Since the deformation of the fin (2) can be prevented, the fin (2)
The semiconductor element (22) or the circuit board can be securely mounted on the semiconductor device, and the wire bonding between the electrode of the semiconductor element (22) or the circuit board and the external terminals (4) to (11) can be easily and accurately performed. Can be.

In the lead frame for a semiconductor device shown in FIGS. 1 and 3, one mounting plate (14) has two supporting leads (12).
And the extension portions (13) of the two external terminals (4) and (11), and the fin (2) is securely held. As shown in FIG. 4A, a slit (14a) may be formed at the center of the mounting plate (14), and the mounting plate (14) may be divided into two parts. FIG. 4 (B)
As shown in the figure, one support lead (12) and one external terminal
One mounting plate (14) may be connected to the extension (13) of (4). Further, the projections (16) of the fins (2) and the mounting plate (14) may be fixed by welding, soldering, or a combination thereof in addition to crimping.

[0018]

As described above, in the lead frame for a semiconductor device according to the present invention, the fin can be strongly supported.
The reliability of the semiconductor device can be improved, and the manufacturing yield can be improved.

[Brief description of the drawings]

FIG. 1 is a plan view of a lead frame for a semiconductor device according to the present invention.

FIG. 2 is a partial perspective view showing a main part of FIG. 1;

FIG. 3 is a plan view of a lead frame for a semiconductor device provided with thin metal wires.

FIG. 4 is a plan view of a lead frame for a semiconductor device showing another embodiment of the present invention.

FIG. 5 is a plan view of a conventional semiconductor device lead frame.

FIG. 6 is a cross-sectional view showing a connection structure between a support lead and a fin.

[Explanation of symbols]

(1) Frame body, (2) Fin, (3) Opening, (3a) Width edge, (4) to (11) External terminals, (12) Supporting lead, (13) ... extension, (14)
..Mounting plate, (15)
7) ・ ・ Connecting strip, (18) ・ ・ Resin sealed body, (20) ・ ・ Lead step, (21) ・ ・ Terminal step, (22) ・ ・ Semiconductor element, (23) ・ ・ Metal wire ,

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[Procedure amendment]

[Submission date] December 27, 1999 (1999.12.
27)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction contents]

[0007]

A lead frame for a semiconductor device according to the present invention comprises a band-shaped frame body (1) having a plurality of openings (3) formed at predetermined intervals in a longitudinal direction; Multiple external terminals projecting from 1) into the opening (3)
(4) to (11) and fins which are arranged to be displaced downward from the frame body (1) in the respective openings (3) of the frame body (1) so as to face the external terminals (4) to (11). (2), the mounting being connected to a support lead (12) projecting into the opening (3) in the length direction of the frame body (1) from the width direction edge (3a) of the opening (3). Fix the fins (2) to the plate (14). In this semiconductor device lead frame, the mounting plate (14) is disposed below the frame body (1), and the lead step (2) inclined with respect to the frame body (1) is provided.
(0) via the support lead (12) to the mounting plate (14), and at least one of the plurality of external terminals (4) to (11) is connected to the frame body.
An extension (13) is formed by projecting into the opening (3) in the width direction of (1), and the terminal step (2) inclined with respect to the frame body (1) is formed.
Connect the extension (13) to the mounting plate (14) via 1).

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction contents]

[0008] The support lead (12) through the lead step (20)
To the fins (2) and a plurality of external terminals (4) to (1).
Since at least one of (1) is fixed to the fin (2) at right angles to the support lead (12), the fin (2) can be firmly and stably supported. Further, since at least one of the external terminals (4) to (11) is fixed to the fin (2), the mechanical strength for supporting the fin (2) is increased, and the support leads ( 12) can be reinforced. In addition, the extension (1
3) prevents the fin (2) from being displaced due to deformation such as torsion or bending of the support lead (12), fixing the semiconductor element on the fin (2), and connecting wires between the electrodes on the semiconductor element and external terminals. Bonding can be performed accurately. In particular, the support lead (12) projecting in the length direction of the frame body (1) is provided with a lead step (20), and the extension step (13) projecting in the width direction of the frame body (1) is provided with a terminal step. Since the (21) is formed, the mounting plate (14) can be supported with elasticity in the length direction and the width direction of the frame body (1).

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

In the embodiment of the present invention, the support lead (12)
A through hole (15) is provided in the mounting plate (14) integrally formed at the inner end of the mounting plate (14), and the protrusion (16) provided in the fin (2) is formed in the through hole of the mounting plate (14).
The mounting plate (14) is formed integrally with the extension (13) of the external terminal (4).

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

[0010] The semiconductor element (22) by wire bonding
When the upper electrode and the external terminals (5) to (10) are connected by the thin metal wire (23), the electrode of the semiconductor element (22) and the external terminal (4) are directly connected by the thin metal wire (23). Since the thin metal wire (23) can be connected to the mounting plate (14) that is electrically connected to the external terminal (4), the connection area by wire bonding is increased, and the thin metal wire (23) is shortened. An electrical short circuit accident of the thin wire (23) can be prevented.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5F036 AA01 BA04 BA26 BB05 BE01 5F067 AA03 AB02 BB01 BD05 BD10 BE04 BE08 CA06 DA05 DF02 DF09 DF18

Claims (4)

[Claims] 1. A band-shaped frame main body having a plurality of openings formed at predetermined intervals in a length direction, and an opening of the frame main body opposed to a plurality of external terminals projecting into the opening from the frame main body. And fins arranged in the part,
A semiconductor device lead frame in which the fin is fixed to a support lead projecting in a longitudinal direction of a frame body from the width direction edge of the opening into the opening, wherein at least one of the plurality of external terminals is located in the opening. A lead frame for a semiconductor device, wherein an extension formed by protruding from the fin is fixed to the fin. 2. A through hole is provided in a mounting plate integrally formed at an inner end of the support lead, and a protrusion provided on the fin is inserted into the through hole of the mounting plate for mounting, and the mounting plate is connected to the external terminal. 2. The lead frame for a semiconductor device according to claim 1, wherein the lead frame is formed integrally with an extension of the semiconductor device. 3. A stepped portion is provided on the support lead, and a terminal stepped portion is provided on an extension of the external terminal,
The lead frame for a semiconductor device according to claim 1, wherein the mounting plate is disposed below the frame main body and connected to the lead step and the terminal step. 4. The lead frame for a semiconductor device according to claim 1, wherein an extension of said external terminal is formed in a width direction of said frame main body.